JP2021511676A - 電圧モード感光装置 - Google Patents
電圧モード感光装置 Download PDFInfo
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- JP2021511676A JP2021511676A JP2020540780A JP2020540780A JP2021511676A JP 2021511676 A JP2021511676 A JP 2021511676A JP 2020540780 A JP2020540780 A JP 2020540780A JP 2020540780 A JP2020540780 A JP 2020540780A JP 2021511676 A JP2021511676 A JP 2021511676A
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Abstract
Description
本開示は、水平な基板表面の第1の領域に位置する感光装置を説明する。本装置は、第1の側及び第2の側を有する、実質的に水平な第1の導電電極を備える。第1の導電電極は、少なくとも第1の領域上にある。また、本装置は、第1の側及び第2の側を有する、実質的に水平な第1の誘電体層を備える。第1の誘電体層の第1の側は、少なくとも第1の領域上にある場所において、第1の導電電極の第2の側と接している。また、本装置は、第1の側及び第2の側を有する、実質的に水平な検知電極を備える。検知電極は二次元層状材料からなる。検知電極の第1の側は、少なくとも第1の領域上にある場所において、第1の誘電体層の第2の側と接している。また、本装置は、第1の側及び第2の側を有する、実質的に水平な光活性層を備える。光活性層は、電磁放射線を吸収することが可能な半導体材料からなる。光活性層の第1の側は、少なくとも第1の領域上にある場所において、検知電極の第2の側と接している。
図2a及び図2bは第1の装置実施形態を示す。符号21〜25、261は、図1の符号11〜15、161にそれぞれ対応する。ただし、グラフェンは、検知電極材料の図示例として使用し、半導体ナノ結晶(SNC)層は、光活性層の図示例として使用する。図2bは、図2aの「第1の側(first side)」及び「第2の側(second side)」なる表現の意味を示す。所与の層29の「第1の側」291は、基板と対向する下側であり、「第2の側」292は、基板の反対側に面する上側である。この用語は、図2aに示す第1の領域内のすべての層に当てはまる。
図3aは、積層体を逆の順で基板表面に堆積した一実施形態を示す。符号31〜34は、図2aの符号21〜24にそれぞれ対応している。第1の領域及び接触領域は離間して図示していないが、それぞれ図2aに示す領域に相当する。グラフェンを再び検知電極材料の図示例として使用し、半導体ナノ結晶(SNC)層を光活性層の図示例として使用する。
また、感光装置は、第1の側及び第2の側を有する、実質的に水平な第2の導電電極を備えてもよい。第2の導電電極の第1の側は、少なくとも一部が第1の領域上にある場所において、光活性層の第2の側と接していてもよい。
また、上述の第1及び第2の装置実施形態にて明記した特徴に加えて、感光装置は、第1の側及び第2の側を有する、実質的に水平な第2の誘電体層を備えてもよい。第2の誘電体層の第1の側は、少なくとも一部が第1の領域上にある場所において、光活性層の第2の側と接していてもよい。また、本装置は、第1の側及び第2の側を有する、実質的に水平な第2の導電電極を備えてもよい。第2の導電電極の第1の側は、少なくとも一部が第1の領域上にある場所において、第2の誘電体層の第2の側と接していてもよい。
また、上述の第1、第2、及び、第3又は第4の装置実施形態にて明記した特徴に加えて、感光装置は、検知電極に電荷キャリアを移送する、又は、検知電極から電荷キャリアを移送するためのリセット電極を備えてもよい。リセット電極は、水平な基板表面のリセット領域上にある場所において、検知電極の第1又は第2の側のいずれかと接していてもよい。
第6の装置実施形態は、前述の5つの装置実施形態のいずれかと一緒に実施してもよい。本実施形態において、感光装置の第1の導電電極、第1の誘電体層及び光活性層が、第1の領域に隣接する基準ピクセル領域上にもある。本装置は、第1の側及び第2の側を有する、実質的に水平な基準電極を備える。基準電極は、二次元層状材料からなる。また、第1の誘電体層の第1の側は、基準ピクセル領域上にある場所においても、第1の導電電極の第2の側に接している。また、基準電極の第1の側は、基準ピクセル領域上にある場所において、第1の誘電体層の第2の側に接している。また、光活性層の第1の側は、基準ピクセル領域上にある場所において、基準電極の第2の側に接している。
光検出器は感光装置のアレイを備える。前述の装置実施形態で説明した感光装置は、ピクセル固有のパターン形成を行うことなくいくつかの層を複数のピクセル上に又はアレイ全体にわたってさえ作成することができるため、より大きなアレイに都合よくスケーリングすることができる。
装置ピクセルのサイズが十分に小さく、検知電極に用いる二次元材料の導電率が十分に高いと想定すると、xy平面における感光装置の形状は、測定電極の配置に制限されない。なぜなら、検知電極の電位は、検知電極全体にわたって同じであるためである。二次元材料の導電率が比較的低ければ、ピクセルサイズは、導電率の高い二次元材料を用いる装置におけるピクセルサイズより小さくてもよい。
Claims (13)
- 水平な基板表面の第1の領域に位置する感光装置であって、
第1の側及び第2の側を有する、実質的に水平な第1の導電電極であって、少なくとも前記第1の領域上にある、第1の導電電極と、
第1の側及び第2の側を有する、実質的に水平な第1の誘電体層であって、第1の側が、少なくとも前記第1の領域上にある場所において、前記第1の導電電極の第2の側と接している、第1の誘電体層と、
第1の側及び第2の側を有する、実質的に水平な検知電極であって、二次元層状材料からなり、第1の側が、少なくとも前記第1の領域上にある場所において、前記第1の誘電体層の第2の側と接している、検知電極と、
第1の側及び第2の側を有する、実質的に水平な光活性層であって、電磁放射線を吸収することができる半導体材料からなり、第1の側が、少なくとも前記第1の領域上にある場所において、前記検知電極の第2の側と接している、光活性層と
を備える感光装置において、
前記検知電極の電位を判定するための片端測定電極であって、前記水平な基板表面の接触領域上にある場所において、前記検知電極の第1又は第2の側のいずれかと接している、片端測定電極を備える
ことを特徴とする、感光装置。 - 第1の側及び第2の側を有する、実質的に水平な第2の導電電極をさらに備え、
前記第2の導電電極の第1の側が、少なくとも一部が前記第1の領域上にある場所において、前記光活性層の第2の側と接している
ことを特徴とする、請求項1に記載の感光装置。 - 第1の側及び第2の側を有する、実質的に水平な第2の誘電体層であって、第1の側が、少なくとも一部が前記第1の領域上にある場所において、前記光活性層の第2の側と接している、第2の誘電体層と、
第1の側及び第2の側を有する、実質的に水平な第2の導電電極であって、第1の側が、少なくとも一部が前記第1の領域上にある場所において、前記第2の誘電体層の第2の側と接している、第2の導電電極と
をさらに備える
ことを特徴とする、請求項1に記載の感光装置。 - 前記検知電極に電荷キャリアを移送する、又は、前記検知電極から電荷キャリアを移送するためのリセット電極であって、前記水平な基板表面のリセット領域上にある場所において、前記検知電極の第1又は第2の側のいずれかと接している、リセット電極をさらに備える
ことを特徴とする、請求項1〜3のいずれか1項に記載の感光装置。 - 前記第1の導電電極、前記第1の誘電体層及び前記光活性層が、前記第1の領域に隣接する基準ピクセル領域上にもあり、
前記感光装置が、第1の側及び第2の側を有する、実質的に水平な基準電極であって、二次元層状材料からなる、基準電極を備え、
前記第1の誘電体層の第1の側が、前記基準ピクセル領域上にある場所においても、前記第1の導電電極の第2の側と接しており、
前記基準電極の第1の側が、前記基準ピクセル領域上にある場所において、前記第1の誘電体層の第2の側と接しており、
前記光活性層の第1の側が、前記基準ピクセル領域上にある場所においても、前記基準電極の第2の側と接しており、
前記感光装置が、前記基準電極の電位を判定するための片端基準測定電極であって、基準接触領域上にある場所において、前記基準電極の第1又は第2の側のいずれかと接している、片端基準測定電極を備え、
前記感光装置が、前記基準ピクセル領域上にあるマスク層であって、前記第1の領域よりも前記基準ピクセル領域の光活性層における電磁放射線吸収量を遥かに少なくする、マスク層を備える
ことを特徴とする、請求項1〜4のいずれか1項に記載の感光装置。 - 複数の第1の領域を有する水平な基板表面に設けられた複数の感光装置のアレイを備え、各感光装置が第1の領域に位置する、光検出器において、
1又は複数の実質的に水平な第1の導電電極及び1又は複数の実質的に水平な第1の誘電体層であって、各々、第1の側及び第2の側を有し、各第1の誘電体層の第1の側が、少なくとも、前記基板表面の1又は複数の第1の領域上にある場所において、対応する第1の導電電極の第2の側と接している、第1の導電電極及び第1の誘電体層と、
各第1の領域上にあって、特定の第1の領域専用となる、実質的に水平な検知電極であって、二次元層状材料からなり、第1の側及び第2の側を有し、第1の側が、対応する第1の領域上にある場所において、対応する第1の誘電体層の第2の側と接している、検知電極と、
1又は複数の実質的に水平な光活性層であって、各々、第1の側及び第2の側を有し、第1の側が、前記基板表面の少なくとも1つの第1の領域上にある場所において、少なくとも1つの検知電極の第2の側と接している、光活性層と
を備え、
前記各感光装置が、対応する検知電極の電位を判定するための片端測定電極であって、前記水平な基板表面の接触領域上にある場所において、対応する検知電極の第1又は第2の側のいずれかと接している、片端測定電極を備える
ことを特徴とする、光検出器。 - 前記各感光装置が、1又は複数の実質的に水平な第2の導電電極であって、各々、第1の側及び第2の側を有し、第1の側が、前記基板表面の少なくとも1つの第1の領域上にある場所において、少なくとも1つの光活性層の第2の側と接している、第2の導電電極をさらに備える
ことを特徴とする、請求項6に記載の光検出器。 - 前記各感光装置が、
第1の側及び第2の側を有する1又は複数の実質的に水平な第2の誘電体層であって、第1の側が、前記基板表面の少なくとも1つの第1の領域上にある場所において、少なくとも1つの光活性層の第2の側と接している、第2の誘電体層と、
1又は複数の実質的に水平な第2の導電電極であって、各々、第1の側及び第2の側を有し、第1の側が、前記基板表面の少なくとも1つの第1の領域上にある場所において、少なくとも1つの第2の誘電体層の第2の側と接している、第2の導電電極と
をさらに備える
ことを特徴とする、請求項6に記載の光検出器。 - 1つの第2の導電電極がすべてのピクセルにわたって延在している
ことを特徴とする、請求項6〜8のいずれか1項に記載の光検出器。 - 前記光活性層の数が、前記ピクセルの数と等しいことにより、前記各光活性層が特定のピクセル専用となる
ことを特徴とする、請求項6〜9のいずれか1項に記載の光検出器。 - 1つの光活性層がすべてのピクセルにわたって延在している
ことを特徴とする、請求項6〜9のいずれか1項に記載の光検出器。 - 1つの第1の導電電極がすべてのピクセルにわたって延在している
ことを特徴とする、請求項6〜11のいずれか1項に記載の光検出器。 - 前記各感光装置が、前記検知電極に電荷キャリアを移送する、又は、前記検知電極から電荷キャリアを移送するためのリセット電極であって、各々、前記水平な基板表面のリセット領域上にある場所において、対応する検知電極の第1又は第2の側のいずれかと接している、リセット電極をさらに備える
ことを特徴とする、請求項6〜12のいずれか1項に記載の光検出器。
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