JP2021190658A - Substrate processing apparatus - Google Patents

Abstract

To prevent interference between a function part and a substrate as well as effectively functioning the function part.SOLUTION: An elevating body 33 is arranged between a first rotational axis 42 and a second rotational axis 44 above a conveyance reference surface 18, and is maintained at a predetermined downward position with respect to a conveyance reference surface 18 while both of first and second rollers 31 and 32 are not ridden on an upper surface of a substrate 1, and is maintained so as to be lifted to the upward from the downward position by the rotational axis of each roller ridden on the upper surface of the substrate while at least one of the first and second rollers 31 and 32 is ridden on the upper surface of the substrate 1. Elevating direction regulation means 35 and 36 regulate an elevating direction of the elevating body 33 when elevating it from the downward position to an appropriate vertical direction with respect to the conveyance reference surface 18. A function part 50 is fixedly provided to the elevating body 33 so that the elevating body 33 is positioned above the conveyance reference surface 18 in a state where it is dropped at the downward position, and functions so as to be opposite from the upward to the upper surface of the substrate 1 in the middle of the conveyance.SELECTED DRAWING: Figure 8

Description

The present invention relates to a substrate processing apparatus that conveys and processes a metal plate such as a printed wiring board or a lead frame (hereinafter, a metal plate such as a target printed wiring board or a lead frame is abbreviated as a substrate).

In Patent Document 1, a transport means for a printed circuit board having horizontally arranged printed circuit board surfaces and a liquid processing medium arranged on the upper portion of the transport surface of the printed circuit board and supplied from a supply container are printed. A spray processing device including a nozzle device for spraying on the upper surface of a plate and a suction nozzle unit (suction pipe) for sucking a processing medium sprayed on the upper surface of a printed circuit board during a spray operation is described. ..

The suction pipe is provided with a plurality of suction nozzles, and the suction nozzles are slit-shaped openings on the circumference of the suction pipe. The suction pipe is fixed to the front surface of the support member, and the support member is bearing-supported by two upper transport rollers.

Japanese Unexamined Patent Publication No. 2003-243811

In the apparatus of Patent Document 1, two upper transport rollers (the first roller on the upstream side in the transport direction and the second roller on the downstream side in the transport direction) are bearing-supported on the support member (elevating body). After the first roller rides on the upper surface of the printed circuit board (board), until the second roller rides on the upper surface of the substrate, and after the first roller descends from the upper surface of the substrate, the second roller The elevating body is tilted with respect to the substrate until it descends from the upper surface of the substrate. Therefore, the distance between the opening of the suction pipe (functional portion) and the upper surface of the substrate may not be constant, and the suction function may not be effectively exhibited. Further, when the plate thickness of the substrate is increased (when processing a thick substrate), the substrate may interfere with the elevating body or the functional part.

Therefore, an object of the present invention is to make the functional portion effectively function in the entire length range of the upper surface of the substrate in the transport direction, and to surely prevent the elevating body and the functional portion from interfering with the substrate.

In order to achieve the above object, the first aspect of the present invention is a substrate processing apparatus for transporting and processing a substrate so that the lower surface of a plate-shaped substrate in an inverted posture moves substantially horizontally along a transport reference plane. It includes a first roller, a second roller, an elevating body, an elevating direction regulating means, and a functional unit.

The first roller has a first rotating shaft that can move up and down with respect to the transport reference plane above the transport reference plane, and is in contact with the upper surface of the substrate while riding on the upper surface of the substrate during transport. It rotates around the rotation axis of 1. The second roller has a second rotation axis that can move up and down with respect to the transport reference plane above the transport reference plane on the downstream side in the transport direction of the first roller, and rides on the upper surface of the substrate during transport. In this state, it rotates about the second rotation axis while touching the upper surface of the substrate.

The elevating body is arranged above the transfer reference plane between the first rotation axis and the second rotation axis, and is transferred while both the first and second rollers are not riding on the upper surface of the substrate. It is maintained in a predetermined descending position with respect to the reference plane, and while at least one of the first and second rollers rides on the upper surface of the substrate, the rotation axis of the roller riding on the upper surface of the substrate causes the descending position. Lifted upwards and maintained. The ascending / descending direction regulating means regulates the ascending / descending direction of the elevating body when ascending / descending (ascending and then descending) from the descending position in a direction substantially perpendicular to the transport reference plane. The functional unit is fixedly provided on the elevating body so as to be located above the transfer reference surface in a state where the elevating body is lowered to the descending position, and functions so as to face the upper surface of the substrate during transportation from above.

In the above configuration, the distance between the lower end of the first roller and the lower end of the second roller along the transport direction of the substrate (distance between the first rotation axis and the second rotation axis) is along the transport direction. It is set shorter than the total length of the substrate (distance between the downstream end in the transport direction and the upstream end in the transport direction). The downstream end of the substrate in the transport direction in the middle of transport passes through the lower end of the first roller and the lower end of the second roller in sequence, and the upstream end of the substrate in the transport direction has the downstream end in the transport direction at the lower end of the second roller. After reaching, it passes through the lower end of the first roller and passes through the lower end of the second roller.

In the above configuration, the first roller is maintained at a predetermined initial height with respect to the transport reference plane before the downstream end of the substrate in the transport direction reaches the lower end of the first roller, and the downstream end of the substrate in the transport direction is maintained. From reaching the lower end of the first roller until the upstream end in the transport direction of the substrate passes through the lower end of the first roller, the board rides on the upper surface of the substrate, and the upstream end in the transport direction of the substrate is the first. After passing the lower end of the roller, it descends to the initial height.

The second roller is maintained at the initial height before the downstream end of the substrate in the transport direction reaches the lower end of the second roller, and the downstream end of the substrate passing through the lower end of the first roller is the second roller. From reaching the lower end of the roller of the After passing through, it descends to the initial height.

The elevating body is maintained at a predetermined lowering position with respect to the transport reference plane before the downstream end of the substrate in the transport direction reaches the lower end of the first roller. When the downstream end of the substrate in the transport direction reaches the lower end of the first roller and the first roller rides on the upper surface of the substrate, the elevating body is lifted upward from the descending position by the first rotation axis. Since the elevating direction regulating means regulates the elevating direction of the elevating body when ascending and descending from the descending position in a direction substantially perpendicular to the transport reference plane, the elevating body is abbreviated as riding the first roller on the upper surface of the substrate. At the same time, it rises from the descending position by the thickness of the substrate. After that, even if the upstream end of the substrate in the transport direction passes through the lower end of the first roller, the elevating body is raised by the thickness of the substrate while the second roller rides on the upper surface of the substrate. It does not descend from and is maintained in the ascending position until the upstream end of the substrate in the transport direction passes through the lower end of the second roller. When the upstream end of the substrate in the transport direction passes through the lower end of the second roller and the second roller descends, the elevating body descends from the ascending position to the descending position.

A functional unit is fixedly provided on the elevating body so that the elevating body is positioned above the transport reference surface in a state where the elevating body is lowered to the descending position, and the elevating body is arranged between the first roller and the second roller. Since the ascending position of the elevating body is higher than the plate thickness of the substrate from the transport reference plane, the elevating body should be attached to the substrate until the downstream end of the substrate in the transport direction reaches below the elevating body. It rises from the descending position to the ascending position together with the functional portion without tilting, and after the upstream end in the transport direction of the substrate passes below the elevating body, it descends from the ascending position to the descending position together with the functional portion without tilting with respect to the substrate.

Therefore, regardless of the plate thickness of the substrate, the height position of the functional portion with respect to the upper surface of the substrate is maintained constant in the entire length range of the upper surface of the substrate in the transport direction, and the functional portion can function efficiently. In addition, it is possible to reliably prevent interference between the elevating body and the functional portion and the substrate.

The second aspect of the present invention is the substrate processing apparatus of the first aspect, in which the elevating direction of the first rotating shaft and the elevating direction of the second rotating shaft are substantially perpendicular to the transport reference plane. A second ascending / descending direction regulating means for regulating is provided.

In the above configuration, the second elevating direction regulating means regulates the elevating direction of the first rotating shaft and the elevating direction of the second rotating shaft in a direction substantially perpendicular to the transport reference plane, so that the elevating body and the functional unit are used. The behavior when ascending and descending can be stabilized, and the interference between the elevating body and the functional part and the substrate can be prevented more reliably.

A third aspect of the present invention is the substrate processing apparatus of the first or second aspect, and the functional unit has a suction port for sucking a liquid from the upper surface of the substrate.

In the above configuration, since the suction port can be maintained at a constant distance from the upper surface of the substrate, the liquid can be efficiently sucked and removed from the upper surface of the substrate.

According to the present invention, the functional portion can be effectively functioned in the entire length range of the upper surface of the substrate in the transport direction, and interference between the elevating body and the functional portion and the substrate can be reliably prevented.

It is a schematic block diagram which shows the substrate processing apparatus which concerns on one Embodiment of this invention. It is an enlarged sectional view of the printed wiring board for demonstrating the etching process. It is a side view which looked at the support structure of a suction unit from the outside in the width direction of a device. It is a side view which looked at the support structure of a suction unit from the inside in the width direction of a device. FIG. 3 is a cross-sectional view taken along the line VV of FIG. FIG. 5 is a cross-sectional view taken along the line VI-VI of FIG. It is a side view which shows the state which the slide block is maintained in a descending position. It is a side view which shows the state which the upper roller on the upstream side got on the substrate. It is a side view which shows the state which the upstream side upper roller and the downstream side upper roller got on the substrate. It is a side view which shows the state after the upstream side upper roller descends and before the downstream side upper roller descends. Another example of the support structure of the suction unit is a side view seen from the inside in the width direction of the device. FIG. 11 is a plan view of the support structure of FIG. 11 as viewed from above.

Hereinafter, an embodiment in which the substrate processing apparatus of the present invention is applied to an etching apparatus will be described with reference to the drawings.

First, an outline of a method for manufacturing a printed wiring board using the etching apparatus of the present embodiment will be described with reference to the cross-sectional view of FIG.

As shown in FIG. 2A, a conductive layer (etched layer) such as a copper foil is formed on both sides of an insulating substrate (processed object) 1 made of a thermosetting resin such as an epoxy resin or another resin. ) 2 is formed with a film thickness of several μm to several tens of μm. The method of forming the conductive layer 2 can be any method such as sticking, plating, vapor phase growth, etc., and both sides of the substrate 1 are the surfaces to be etched.

Next, as shown in FIG. 2B, a resist film 3 is formed on the upper layer of the conductive layer 2 by a photolithography step (dry film resist, liquid resist, etc.), pattern exposed, and developed. , The resist film 3 is patterned on the upper layer of the conductive layer 2. The forming process of the resist film 3 is performed on both sides of the substrate 1, respectively.

Next, as shown in FIG. 2C, the conductive layers 2 on both sides of the substrate 1 are subjected to an etching process using the resist film 3 as a mask. That is, the conductive layer 2 is etched along the pattern of the resist film 3 to form the wiring portion 2a as a pattern.

After forming the pattern of the wiring portion 2a, the resist film 3 is peeled off by, for example, a strong alkaline solution or an organic solvent treatment. As a result, a desired printed wiring board is formed.

The etching process for the conductive layer 2 using the resist film 3 as a mask is performed using the etching apparatus (substrate processing apparatus) according to the present embodiment. FIG. 1 is a schematic configuration diagram schematically showing an etching apparatus according to the present embodiment.

In the processing chamber 11 of the etching apparatus 10, a transport path extending horizontally and linearly from the inlet 14 on one side (left side in FIG. 1) to the outlet 15 on the other side (right side in FIG. 1) is set, and this transport is performed. A plurality of pairs of upper and lower transport rollers (lower transport roller 16 and upper transport roller 17) are provided in the path as transport means. The transport rollers 16 and 17 hold the substrate 1 on which the resist film 3 is patterned so as to be substantially horizontal with one side facing upward and the other side facing downward, and transport the substrate 1 along the transport path. The upper end of the lower transfer roller 16 defines a transfer reference surface 18 extending in a substantially horizontal plane from the upstream side to the downstream side, and in the transfer rollers 16 and 17, the lower surface of the plate-shaped substrate 1 in the inverted posture is the transfer reference surface. The substrate 1 is conveyed so as to move substantially horizontally along the 18. The transport rollers 16 and 17 may be configured only by a drive roller that is driven and rotated by a motor or the like, or may include a non-drive roller (a driven roller that is rotated by a substrate driven 1). Further, a lower transfer roller 16 that does not form a pair with the upper transfer roller 17 and an upper transfer roller 17 that does not form a pair with the lower transfer roller 16 may be included.

The upper part in the processing chamber 11 between the inlet 14 and the outlet 15 constitutes an etching processing unit 12 for performing an etching step. A plurality of injection nozzles 20 are arranged and provided in the etching processing unit 12. The injection nozzle 20 injects the etching solution and sprays it onto the substrate 1 in the processing chamber 11. The injection nozzle 20 may be fixed (stationary) or rocked (oscillated) with respect to the transport path. The injection form of the injection nozzle 20 is not limited, and may be a one-fluid nozzle or a two-fluid nozzle. Further, the plurality of injection nozzles 20 may be composed of a one-fluid nozzle and a two-fluid nozzle.

An etching solution (treatment liquid) 5 based on cupric chloride, ferric chloride or an alkaline substance is stored in the bottom of the processing chamber 11 below the transport path. An etching solution supply pipe line 21 for supplying the etching solution 5 stored in the processing chamber 11 is connected to each injection nozzle 20. A pump 22, a filter 24, and a pressure gauge 23 are provided in the etching liquid supply pipeline 21, and the etching liquid 5 in the processing chamber 11 is filtered by the filter 24 from the pump 22 and then each injection nozzle 20 at a predetermined pressure. Is supplied to. The supply pressure of the etching solution to the injection nozzle 20 is measured by the pressure gauge 23.

The injection nozzles 20 are arranged above and below the transport path, respectively. The upper and lower injection nozzles 20 inject and spray the etching solution onto the upper surface and the lower surface of the substrate 1 conveyed by the transfer roller 16, respectively.

The gas in the processing chamber 11 containing the components of the etching solution is purified by an exhaust treatment device (not shown) and then discharged into the atmosphere from the exhaust pipe line (not shown).

Above the transfer path (transport reference surface 18) of the etching processing unit 12, a plurality of suction units (functional units) 50 that suck and remove the etching solution sprayed on the upper surface of the substrate 1 from the upper injection nozzle 20. Are arranged and provided. Each suction unit 50 has a suction pipe 55 (see FIGS. 5 and 6) extending substantially horizontally in a direction substantially orthogonal to the transport path (device width direction) so as to cover the entire width of the substrate 1, and an outer circumference of the suction pipe 55. It is composed of a plurality of slit-shaped suction nozzles (suction ports) 56 (see FIG. 6) formed on a surface (lower surface in the present embodiment) and opening toward a transport reference surface 18 (downward in the present embodiment), and suction is performed. The nozzle 56 is arranged between the spraying regions of the etching solution ejected from the injection nozzle 20, and a desired suction action is generated in the arranged region.

Each suction pipe 55 is connected to a suction port 52a of an ejector 52 provided in the middle of the liquid circulation pipe 54 via a suction pipe 51. The liquid circulation pipe 54 is a closed circuit in which both ends communicate with the inside of the processing chamber 11 and a circulation pump 53 is provided in the middle. The circulation pump 53 pumps out the etching solution 5 in the processing chamber 11, puts pressure on it with the ejector 52, and returns it to the processing chamber 11 again. When the etching solution circulating in the liquid circulation conduit 54 passes through the ejector 52, the suction port 52a of the ejector 52 has a negative pressure, so that the etching solution sprayed on the upper surface of the substrate 1 is sucked from the suction nozzle 56. It is sucked through the conduit 51.

In this way, since the etching solution sprayed from the injection nozzle 20 is removed from the upper surface of the substrate 1 at an early stage, it is possible to prevent the occurrence of retention of the etching solution which may be an obstacle to the spraying of the etching solution. , Etching with high in-plane uniformity can be performed.

Next, the support structure 30 of each suction unit 50 (suction pipe 55) will be described with reference to FIGS. 3 to 6. In the following, the upstream side of the substrate 1 in the transport direction is the rear, the downstream side is the front, the horizontal direction orthogonal to the transport direction of the substrate 1 is the device width direction (horizontal direction), and the direction orthogonal to the transport reference surface 18 is up and down. Explained as a direction.

The support structure 30 includes an upstream side upper roller (first roller) 31, a downstream side upper roller (second roller) 32, a slide block (elevating body) 33, and a plurality of elevating guides 34 to 37. , Each is provided for a plurality of suction units 50. The elevating guides 34 to 37 are each composed of rectangular blocks, and are arranged side by side in the front-rear direction on the upper surfaces of the left and right device frames 13 extending in the front-rear direction on both sides in the device width direction. It is fixed at 13 and extends vertically upward. The four elevating guides 34 to 37 on each side in the device width direction are an upstream elevating guide (second elevating direction regulating means) 34 and a central rear elevating guide (elevating direction regulating means, second elevating direction regulating means) 35. , A central front elevating guide (elevating direction regulating means, second elevating direction regulating means) 36, and a downstream side elevating guide (second elevating direction regulating means) 37, which are directed from the upstream side to the downstream side. Arrange in a straight line at predetermined intervals.

The upper and lower upstream shaft support blocks 38 and 39, the slide block 33, and the upper and lower downstream shaft support blocks 40 and 41 are arranged on the upper surfaces of the left and right device frames 13, respectively.

The rear end surfaces and front end surfaces of the upstream shaft support blocks 38 and 39 have a concave shape that engages with the front end surface of the upstream elevating guide 34 and the rear end surface of the central rear elevating guide 35 so as to be slidable in the vertical direction. Each has (see FIG. 5). The lower upstream shaft support block 39 is inserted from above between the upstream elevating guide 34 and the central rear elevating guide 35, and is placed on the upper surface of the apparatus frame 13 in a state of being engaged with the elevating guides 34 and 35. And supported. The upper upstream shaft support block 38 is supported by the upstream elevating guide 34 and the center rear side in a state where the lower upstream shaft support block 39 is engaged with the elevating guides 34 and 35 and supported on the upper surface of the device frame 13. It is inserted from above between the elevating guide 35 and is arranged above the lower upstream shaft support block 39 in a state of being engaged with the elevating guides 34 and 35.

The upstream side elevating guide 34 and the central rear elevating guide 35 are substantially perpendicular to the transport reference surface 18 in the elevating direction of the upper upstream side shaft support block 38 (and the upper upstream side roller support shaft 42 described later). Regulate in the direction. The engagement form between the upstream shaft support blocks 38 and 39 and the upstream lift guide 34 and the central rear lift guide 35 is not limited to the above, and the upstream shaft support blocks 38 and 39 slide in the vertical direction. Any form may be used as long as it can be supported.

Similar to the upstream side, the rear end surface and the front end surface of the downstream side shaft support blocks 40, 41 are engaged with each other so as to be slidable in the vertical direction between the front end surface of the central front elevating guide 36 and the rear end surface of the downstream elevating guide 37. Each has a matching concave shape (see FIG. 5). The lower downstream shaft support block 41 is inserted from above between the central front elevating guide 36 and the downstream elevating guide 37, and is placed on the upper surface of the apparatus frame 13 in a state of being engaged with the elevating guides 36 and 37. Be supported. The upper downstream shaft support block 40 is supported by the central front lift guide 36 and the downstream lift in a state where the lower downstream shaft support block 41 is engaged with the lift guides 36 and 37 and supported by the upper surface of the device frame 13. It is inserted from above between the guide 37 and is arranged above the lower downstream shaft support block 41 in a state of being engaged with the elevating guides 36 and 37.

The center front elevating guide 36 and the downstream elevating guide 37 refer to the elevating direction of the upper downstream side shaft support block 40 (and the upper downstream side roller support shaft 44 described later) in a direction substantially perpendicular to the transport reference surface 18. Regulate to. The engagement form between the downstream shaft support blocks 40 and 41 and the central front lift guide 36 and the downstream lift guide 37 is not limited to the above, and the downstream shaft support blocks 40 and 41 can slide and move in the vertical direction. Any form may be used as long as it is supported by.

The rear end surface and the front end surface of the slide block 33 have a concave shape that engages with the front end surface of the central rear elevating guide 35 and the rear end surface of the central front elevating guide 36 so as to be slidable in the vertical direction (see FIG. 5). ). The slide block 33 is inserted from above between the center rear elevating guide 35 and the center front elevating guide 36, engages with the elevating guides 35 and 36, and can slide in the vertical direction.

The upstream roller support shafts 42, 43 extending in the width direction of the apparatus are arranged vertically side by side between the left and right upstream shaft support blocks 38, 39, respectively. Both ends of the upper upstream roller support shaft (first rotating shaft) 42 are rotatably supported by the left and right upper upstream shaft support blocks 38, and both ends of the lower upstream roller support shaft 43 are rotatably supported. It is rotatably supported by the left and right lower upstream shaft support blocks 39.

A plurality of upstream upper rollers 31 are fixed to the upper upstream roller support shaft 42 separated from each other in the device width direction, and a plurality of upstream lower rollers 46 are upstream to the lower upstream roller support shaft 43. It is fixed at a distance in the width direction of the device so as to face the upper roller 31. The upstream side lower roller 46 and the upstream side upper roller 31 constitute transfer rollers 16 and 17, and the upper end of the upstream side lower roller 46 defines a transfer reference surface 18. The lowest position of the upper upstream roller support shaft 42 (upper upstream shaft support block 38 and upstream upper roller 31) is the contact between the upper upstream shaft support block 38 and the lower upstream shaft support block 39. The upstream side upper roller 31 is defined by contact and / or contact between the upstream side upper roller 31 and the upstream side lower roller 46, and at the initial height at which the upstream side upper roller 31 is most lowered with respect to the transport reference surface 18. The lower end is close to or in contact with the upper end (transport reference surface 18) of the upstream lower roller 46. When the front end of the substrate 1 during transportation reaches the lower end of the upstream side upper roller 31 (between the upstream side upper roller 31 and the upstream side lower roller 46), the vertical position of the upstream side lower roller 46 does not change and the upstream side The upper roller 31 rides on the upper surface of the substrate 1 and rises from the initial height by the thickness of the substrate 1. When the upstream upper roller 31 rises, the upper upstream roller support shaft 42 and the upper upstream shaft support block 38 also rise. The upstream side upper roller 31 and the upstream side lower roller 46 may be a driving roller or a driven roller. Further, it is not necessary to provide the lower roller 46 on the upstream side.

Between the left and right downstream side shaft support blocks 40 and 41, the downstream side roller support shafts 44 and 45 extending in the device width direction are arranged vertically side by side, respectively. Both ends of the upper downstream roller support shaft (second rotating shaft) 44 are rotatably supported by the left and right upper downstream shaft support blocks 40, and both ends of the lower downstream roller support shaft 45 are rotatably supported. It is rotatably supported by the lower left and right lower downstream shaft support blocks 41.

A plurality of downstream upper rollers 32 are fixed to the upper downstream roller support shaft 44 at intervals in the device width direction, and a plurality of downstream lower rollers 47 are downstream to the lower downstream roller support shaft 45. It is fixed at a distance in the width direction of the device so as to face the upper roller 32. The lower roller 47 on the downstream side and the upper roller 32 on the downstream side constitute transfer rollers 16 and 17, and the upper end of the lower roller 47 on the downstream side defines a transfer reference surface 18. The lowest position of the upper downstream roller support shaft 44 (upper downstream shaft support block 40 and downstream upper roller 32) is the contact between the upper downstream shaft support block 40 and the lower downstream shaft support block 41. Contact and / or at the initial height at which the downstream upper roller 32 is most lowered with respect to the transport reference surface 18, defined by the contact between the downstream upper roller 32 and the downstream lower roller 47, of the downstream upper roller 32. The lower end is close to or in contact with the upper end (transport reference surface 18) of the lower roller 47 on the downstream side. When the front end of the substrate 1 during transportation reaches the lower end of the downstream upper roller 32 (between the downstream upper roller 32 and the downstream lower roller 47), the vertical position of the downstream lower roller 47 does not change, and the downstream side does not change. The upper roller 32 rides on the upper surface of the substrate 1 and rises from the initial height by the thickness of the substrate 1. When the downstream upper roller 32 rises, the upper downstream roller support shaft 44 and the upper downstream shaft support block 40 also rise. The lower roller 32 on the downstream side and the lower roller 47 on the downstream side may be a drive roller or a driven roller. Further, it is not necessary to provide the lower roller 47 on the downstream side.

An upstream shaft 60 extending upward and a downstream shaft 61 are attached to the upper upstream shaft support block 38 and the upper downstream shaft support block 40, respectively. Male screw portions 62 are formed at the lower end of the upstream shaft 60 and the lower end of the downstream shaft 61, respectively, and the upper upstream shaft support block 38 and the upper downstream shaft support block 40 are on the upper side. Female screw holes 48 extending downward from the end face are formed respectively. By screwing the male screw portion 62 into each female screw hole 48 and tightening the nuts 63 and 64 on the upstream side and the downstream side, respectively, the upstream side shaft 60 and the downstream side shaft 61 are connected to the upstream side shaft support block 38 and the downstream side. It is fixed to the side shaft support block 40.

A support plate 66 is fixed to the upper end surface of the slide block 33 via an inverted U-shaped connecting member 65, and the support plate 66 has an upstream shaft insertion hole 67 and a downstream shaft insertion hole 68 penetrating in the vertical direction. And are formed. The upper portion of the upstream shaft 60 protruding upward from the upstream support block 38 inserts the upstream shaft insertion hole 67, and the upper portion of the downstream shaft 61 protruding upward from the downstream support block 40 inserts the downstream shaft. Insert the hole 68.

When the upstream upper roller 31 is lifted from the initial height, the upper upstream shaft support block 38 is guided by the upstream elevating guide 34 and the central rear elevating guide 35, and separates from the lower upstream shaft support block 39. As such, it rises in a direction substantially orthogonal to the transport reference plane 18. When the upstream side shaft support block 38 rises, the support plate 66 is pushed up by the nut 63, and the slide block 33 also rises in the same manner as the upstream side upper roller 31. The ascending direction of the slide block 33 is regulated by the central rear elevating guide 35 and the central front elevating guide 36 in a direction substantially orthogonal to the transport reference surface 18. On the other hand, the downstream upper roller 32 does not rise and is maintained at the initial height (see FIG. 8).

On the contrary, when the downstream upper roller 32 is lifted from the initial height, the upper downstream shaft support block 40 is guided by the central front elevating guide 36 and the downstream elevating guide 37, and the lower downstream shaft support block 41 is guided. Ascends in a direction substantially orthogonal to the transport reference plane 18 so as to move away from. When the downstream side shaft support block 40 rises, the support plate 66 is pushed up by the nut 64, and the slide block 33 also rises in the same manner as the downstream side upper roller 32. The ascending direction of the slide block 33 is regulated by the central rear elevating guide 35 and the central front elevating guide 36 in a direction substantially orthogonal to the transport reference surface 18. On the other hand, the upstream upper roller 31 does not rise and is maintained at the initial height (see FIG. 10).

Both ends of the suction unit 50 (suction pipe 55) in the device width direction are fixed and supported by the left and right slide blocks 33, respectively. The slide block 33 can be fixed by any method other than fastening and fixing using a fastening member such as a screw. Inside the suction pipe 55, a rectifying plate 57 for rectifying the etching solution sucked from the suction nozzle 56 is provided, and the etching solution in the suction pipe 55 flows through the through hole 57a formed in the rectifying plate 57 and is a pipe. It flows out to the suction pipe line 51 through the joint 58. The edges of the rear lower end of the slide block 33 and the suction unit 50 (suction pipe 55) are formed in an inclined surface shape or a curved surface shape so as not to interfere with the substrate 1.

As described above, the upstream upper roller 31 has an upstream roller support shaft 42 that can move up and down with respect to the transfer reference surface 18 above the transfer reference surface 18, and is in a state of riding on the upper surface of the substrate 1 in the middle of transfer. While in contact with the upper surface of the substrate 1, it rotates about the upstream roller support shaft 42. The downstream upper roller 32 has a downstream roller support shaft 44 that can move up and down with respect to the transport reference surface 18 above the transport reference surface 18 on the downstream side in the transport direction of the upstream upper roller 31, and the substrate 1 in the middle of transport. While riding on the upper surface of the substrate 1, it rotates about the downstream roller support shaft 44 while contacting the upper surface of the substrate 1.

The slide block 33 is arranged above the transport reference surface 18 between the upper upstream roller support shaft 42 and the upper downstream roller support shaft 44. The slide block 33 is maintained at a predetermined lowering position with respect to the transport reference surface 18 while both the upstream side upper roller 31 and the downstream side upper roller 32 do not ride on the upper surface of the substrate 1, and the upstream side upper roller 31 is maintained. While at least one of 31 and the downstream upper roller 32 rides on the upper surface of the substrate 1, the rotation axis of the roller riding on the upper surface of the substrate 1 (upper upstream roller support shaft 42 and / or upper downstream). It is lifted and maintained upward from the lowered position by the side roller support shaft 44).

The central rear elevating guide 35 and the central front elevating guide 36 regulate the elevating direction of the slide block 33 when ascending / descending (ascending and then descending) from the descending position in a direction substantially perpendicular to the transport reference surface 18. The upstream elevating guide 34, the central rear elevating guide 35, the central front elevating guide 36, and the downstream elevating guide 37 convey the elevating direction of the upper upstream roller support shaft 42 and the upper downstream roller support shaft 44. It is regulated in a direction substantially perpendicular to the reference plane 18.

The suction unit 50 (suction pipe 55) is fixedly provided on the slide block 33 so as to be located above the transport reference surface 18 in a state where the slide block 33 is lowered to the descending position, and is fixedly provided on the upper surface of the substrate 1 during transport. It works facing from above.

Further, the distance between the lower end of the upstream upper roller 31 and the lower end of the downstream upper roller 32 along the transport direction of the substrate 1 (distance between the upper upstream roller support shaft 42 and the upper downstream roller support shaft 44). Is set shorter than the total length of the substrate 1 along the transport direction (distance between the front end (downstream end in the transport direction) and the rear end (upstream end in the transport direction)). The front end of the substrate 1 during transportation passes through the lower end of the upstream upper roller 31 and the lower end of the downstream upper roller 32 in sequence, and the front end of the substrate reaches the lower end of the downstream upper roller 32 at the rear end of the substrate 1. After that, it passes through the lower end of the upstream upper roller 31 and passes through the lower end of the downstream upper roller 32.

Next, the movements of the upstream upper roller 31, the downstream upper roller 32, the slide block 33, and the suction unit 50 that move up and down with the transfer of the substrate 1 will be described with reference to FIGS. 7 to 10.

The upstream side upper roller 31 is maintained at a predetermined initial height with respect to the transport reference surface 18 before the front end of the substrate 1 reaches the lower end of the upstream side upper roller 31 (see FIG. 7), and the upstream side upper roller 31 is maintained at a predetermined initial height with respect to the transfer reference surface 18 (see FIG. 7). Rides on the upper surface of the substrate 1 until the rear end of the substrate 1 passes through the lower end of the upstream upper roller 31 after reaching the lower end of the upstream upper roller 31 (see FIGS. 8 and 9). After the rear end of the substrate 1 passes through the lower end of the upstream upper roller 31, it descends to the initial height (see FIG. 10).

The downstream upper roller 32 was maintained at the initial height (see FIGS. 7 and 8) before the front end of the substrate 1 reached the lower end of the downstream upper roller 32, and passed through the lower end of the upstream upper roller 31. From the time when the front end of the substrate 1 reaches the lower end of the downstream upper roller 32 until the rear end of the substrate 1 passes through the lower end of the downstream upper roller 32, the board rides on the upper surface of the substrate 1 (FIGS. 9 and 9). 10), after the rear end of the substrate 1 passes through the lower end of the downstream upper roller 32, it descends to the initial height (see FIG. 7).

The slide block 33 is maintained at a predetermined lowering position with respect to the transport reference surface 18 before the front end of the substrate 1 reaches the lower end of the upstream upper roller 31 (see FIG. 7). When the front end of the substrate 1 reaches the lower end of the upstream upper roller 31 and the upstream upper roller 31 rides on the upper surface of the substrate 1, the slide block 33 is moved upward from the descending position by the upper upstream roller support shaft 42. Lifted (see Figure 8). The center rear elevating guide 35 and the center front elevating guide 36 regulate the elevating direction of the slide block 33 when ascending / descending (ascending and then descending) from the descending position in a direction substantially perpendicular to the transport reference surface 18. The block 33 rises from the descending position by the plate thickness D of the substrate 1 substantially at the same time as the upstream upper roller 31 rides on the upper surface of the substrate 1. After that, even if the rear end of the substrate 1 passes through the lower end of the upstream upper roller 31, the slide block 33 keeps the plate thickness D of the substrate 1 while the downstream upper roller 32 rides on the upper surface of the substrate 1. It does not descend from the ascended position, but is maintained in the ascended position until the rear end of the substrate 1 passes through the lower end of the downstream upper roller 32 (see FIG. 10). When the rear end of the substrate 1 passes through the lower end of the downstream upper roller 32 and the downstream upper roller 32 descends, the slide block 33 descends from the ascending position to the descending position (see FIG. 7).

A suction unit 50 is fixedly provided on the slide block 33 so that the slide block 33 is located above the transport reference surface 18 (at a predetermined height with respect to the transport reference surface 18) in a state of being lowered to the descending position, and slides. Since the block 33 is arranged between the upstream side upper roller 31 and the downstream side upper roller 32, the rising position of the slide block 33 is higher than the plate thickness D of the substrate 1 from the transport reference surface 18, so that the slide block 33 is located. Raises from the descending position to the ascending position together with the suction unit 50 without tilting with respect to the substrate 1 (transport reference surface 18) until the front end of the substrate 1 reaches the lower part of the slide block 33. After the rear end passes below the slide block 33, it descends from the ascending position to the descending position together with the suction unit 50 without tilting with respect to the substrate 1.

Therefore, regardless of the plate thickness D of the substrate 1, the height of the suction unit 50 (suction nozzle 56) with respect to the upper surface of the substrate 1 is a constant position in the total length range (the entire area in the front-rear direction) of the upper surface of the substrate 1 in the transport direction. It is maintained at (a position close to the upper surface of the substrate 1 so that a high suction effect can be obtained), and the suction unit 50 can function efficiently. Further, it is possible to reliably prevent the slide block 33 and the suction unit 50 from interfering with the substrate 1.

Further, the upstream elevating guide 34, the central rear elevating guide 35, the central front elevating guide 36, and the downstream elevating guide 37 are the elevating directions of the upper upstream roller support shaft 42 and the upper downstream roller support shaft 44. Since the elevating direction is restricted to be substantially perpendicular to the transport reference surface 18, the behavior when the slide block 33 and the suction unit 50 move up and down can be stabilized, and the slide block 33, the suction unit 50, and the substrate 1 can be brought together. Interference can be prevented more reliably.

Further, since the suction nozzle 56 can be maintained at a constant distance from the upper surface of the substrate 1, the etching solution can be efficiently sucked and removed from the upper surface of the substrate 1.

Although the present invention has been described above based on the above-described embodiment, the present invention is not limited to the contents of the above-described embodiment and can be appropriately modified as long as it does not deviate from the present invention. be.

For example, the form of the support structure 30 of the suction unit 50 is not limited to the above embodiment, and the slide block 33 is lifted by at least one of the first and second rotation axes and is substantially perpendicular to the transport reference surface 18. It may be configured to ascend and maintain the ascending position until both the first and second rotating shafts descend. For example, in the example of the support structure 70 shown in FIGS. 11 and 12, the upstream plate 71, the downstream plate 72 and the central plate 73 are provided in place of the support plate 66, and the upstream shaft 60 and the downstream attached to the support plate 66 are provided. The side shaft 61 is omitted. The upstream side plate 71 is fixedly provided on the upper upstream side shaft support block 38, and one side in the device width direction extends to the downstream side. The upstream side plate 71 of the illustrated example is fixed to the upper surface of the upper upstream side shaft support block 38, and the inside in the device width direction extends to the downstream side. The downstream side plate 72 is fixedly provided on the upper downstream side shaft support block 40, and the other side in the device width direction extends to the upstream side. The downstream side plate 72 of the illustrated example is fixed to the upper surface of the upper downstream side shaft support block 40, and the outside in the device width direction extends to the upstream side. The central plate 73 is fixedly provided on the slide block 33 (fixed to the upper surface of the slide block 33 in the illustrated example), and protrudes inward and outward in the device width direction from the slide block 33. The front portion of the upstream plate 71 on one side in the device width direction faces one side of the central plate 73 in the device width direction (inside in the illustrated example) from below, and the other side of the downstream plate 72 in the device width direction. The rear portion faces the other side (outside in the illustrated example) of the center plate 73 in the device width direction from below. When the upper upstream roller support shaft 42 rises, the upstream plate 71 pushes up the central plate 73, and the slide block 33 rises. Similarly, when the upper downstream roller support shaft 44 rises, the downstream plate 72 pushes up the central plate 73 and the slide block 33 rises. The slide block 33 is maintained in the ascending position until both the upper upstream roller support shaft 42 and the upper downstream roller support shaft 44 descend.

Further, the functional portion fixedly provided on the elevating body 33 is not limited to the suction unit 50 as in the above embodiment, and has other functions (for example, gas and / or liquid is directed toward the upper surface of the substrate 1). It may be a slit nozzle having a function of injecting).

Further, in the above embodiment, the slide block 33 and the suction unit 50 are formed separately and fixed to each other, but both may be integrally formed.

Further, the support structure 30 of the suction unit 50 may be provided in the middle portion in the device width direction in place of or in addition to both ends in the device width direction.

1: Substrate 5: Etching liquid (treatment liquid)
10: Etching device (board processing device)
11: Processing chamber 12: Etching processing unit 13: Equipment frame 16, 17: Conveying roller (conveying means)
20: Injection nozzles 30, 70: Support structure of suction unit 31: Upstream upper roller (first roller)
32: Downstream side upper roller (second roller)
33: Slide block (elevating body)
34: Upstream side elevating guide (second elevating direction regulating means)
35: Center rear elevating guide (elevating direction regulating means, second elevating direction regulating means)
36: Center front elevating guide (elevating direction regulating means, second elevating direction regulating means)
37: Downstream elevating guide (second elevating direction regulating means)
38: Upper upstream shaft support block 39: Lower upstream shaft support block 40: Upper downstream shaft support block 41: Lower downstream shaft support block 42: Upper upstream roller support shaft (first rotation) shaft)
43: Lower upstream roller support shaft 44: Upper downstream roller support shaft (second rotation shaft)
45: Lower downstream roller support shaft 46: Upstream lower roller 47: Downstream lower roller 50: Suction unit (functional part)
55: Suction pipe 56: Suction nozzle (suction port)
60: Upstream shaft 61: Downstream shaft 65: Connecting member 66: Support plate 71: Upstream plate 72: Downstream plate 73: Central plate

In the processing chamber 11 of the etching apparatus 10, a transport path extending horizontally and linearly from the inlet 14 on one side (left side in FIG. 1) to the outlet 15 on the other side (right side in FIG. 1) is set, and this transport is performed. A plurality of pairs of upper and lower transport rollers (lower transport roller 16 and upper transport roller 17) are provided in the path as transport means. The transport rollers 16 and 17 hold the substrate 1 on which the resist film 3 is patterned so as to be substantially horizontal with one side facing upward and the other side facing downward, and transport the substrate 1 along the transport path. The upper end of the lower transfer roller 16 defines a transfer reference surface 18 extending in a substantially horizontal plane from the upstream side to the downstream side, and in the transfer rollers 16 and 17, the lower surface of the plate-shaped substrate 1 in the inverted posture is the transfer reference surface. The substrate 1 is conveyed so as to move substantially horizontally along the 18. Conveying rollers 16 and 17, may be only the result structure driving roller which is rotationally driven by a motor or the like, may include a non-driving roller (driven roller which is rotated by the movement of the substrate 1). Further, a lower transfer roller 16 that does not form a pair with the upper transfer roller 17 and an upper transfer roller 17 that does not form a pair with the lower transfer roller 16 may be included.

Claims (3)

A substrate processing device that transports and processes the substrate so that the lower surface of the plate-shaped substrate in the laid-down posture moves substantially horizontally along the transport reference plane.
It has a first rotation axis that can move up and down with respect to the transfer reference surface above the transfer reference surface, and the first rotation shaft is in contact with the upper surface of the substrate while riding on the upper surface of the substrate during transportation. The first roller that rotates around the axis of rotation of
A state in which a second rotating shaft that can move up and down with respect to the transport reference plane is provided above the transport reference plane on the downstream side in the transport direction of the first roller and rides on the upper surface of the substrate during transport. A second roller that rotates about the second rotation axis while in contact with the upper surface of the substrate.
It is arranged between the first rotating shaft and the second rotating shaft above the transport reference surface, and while both the first and second rollers are not riding on the upper surface of the substrate, The rotation of the roller that rides on the upper surface of the substrate while being maintained at a predetermined descending position with respect to the transport reference plane and that at least one of the first and second rollers rides on the upper surface of the substrate. An elevating body that is lifted and maintained upward from the descending position by a shaft,
An elevating direction regulating means that regulates the elevating direction of the elevating body when ascending and descending from the descending position in a direction substantially perpendicular to the transport reference surface.
A functional unit that is fixedly provided on the elevating body so as to be located above the transport reference surface in a state where the elevating body is lowered to the descending position, and functions so as to face the upper surface of the substrate during transportation from above. A substrate processing apparatus characterized by being provided with. The substrate processing apparatus according to claim 1.
A substrate processing apparatus comprising: a second elevating direction regulating means for regulating the elevating direction of the first rotating shaft and the elevating direction of the second rotating shaft in a direction substantially perpendicular to the transport reference plane. .. The substrate processing apparatus according to claim 1 or 2.
The functional unit is a substrate processing apparatus having a suction port for sucking a liquid from the upper surface of the substrate.

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