JP2021179333A - Three-dimensional measuring device and light receiving device - Google Patents

Abstract

To provide a space-saving type three-dimensional measuring device that receives emitted waves from a measurement object and materializes three-dimensional imaging of the measurement object.SOLUTION: A three-dimensional measuring device pertaining to the present invention comprises: an irradiation device configured to be capable of irradiating the irradiation region of a measurement object with spatial modulated irradiation light; and a light receiving device including a first multicore fiber having a plurality of cores capable of receiving emitted light that is emitted from the measurement object irradiated with irradiation light and includes information of the measurement object in the irradiation region and an optical information calculation unit configured to be capable of calculating the three-dimensional information of the measurement object on the basis of the optical information of emitted light received by each of the plurality of cores and the optical information of irradiation light. The first multicore fiber includes an appropriate numerical aperture so that the irradiation region is included within an overlap region where the ranges of light-receiving angles of emitted light receivable by each of two or more cores of the plurality of cores overlap each other.SELECTED DRAWING: Figure 1

Description

The present invention relates to a three-dimensional measuring device and a light receiving device.

The object to be measured is irradiated with the modulated light spatially modulated by a predetermined modulation pattern, and the emitted light emitted from the object to be measured and containing the information of the object to be measured is detected by a point detector or the like having no spatial resolution. , Information on the object to be measured can be obtained by processing. As described above, the technique for acquiring information on the object to be measured is known as single pixel imaging (SPI), and a photodiode is used as the point detector, for example.

For example, in the SPI disclosed in Non-Patent Document 1, the projector irradiates the object to be measured with modulated light having a speckle pattern, and the emitted light reflected from the object to be measured toward the projector is four single pixels. The light is received by the photo detector, and the information of the object to be measured is reproduced based on the acquired information. The four single-pixel photodetectors are located in the same plane as the projector's projection lens and are located above, below, and on both sides of the lens apart from each other when viewed along the optical axis. By acquiring the emitted light in parallel with four single pixel photodetectors, the SPI disclosed in Non-Patent Document 1 realizes three-dimensional imaging of the object to be measured.

Various methods for forming structured lighting with SPI have been proposed. For example, in the SPI disclosed in Non-Patent Document 1 described above, the projector includes a light-emitting diode (Light-emitted source: LED) of three primary colors and a digital micromirror device (DMD). The light emitted from the LEDs is spatially modulated by a plurality of micromirrors capable of changing their orientations in different directions of the DMD to form structured illumination.

In the method of forming structured illumination using a modulator such as a DMD or a liquid crystal spatial light modulator as described above, it is necessary to form structured illumination of a plurality of modulation patterns in order to obtain information on the object to be measured. be. The acquisition speed of the information of the object to be measured is limited by the switching time of the light emission pattern of the light source and the operating time of the modulator. Further, the modulator and the driver for operating the modulator or the like require an installation space. For example, Non-Patent Document 2 discloses an SPI that forms structured illumination using a multi-core fiber (Multu-core fiber: MCF) and acquires three-dimensional information of an object to be measured. In the SPI disclosed in Non-Patent Document 2, by switching the optical information input to each core of the MCF, the intensity of the Fraunhofer diffraction light applied to the object to be measured located away from the emission end face of the MCF is determined. It can be modulated to form structured optics with multiple modulation patterns. Since the MCF is a passive device, the SPI disclosed in Non-Patent Document 2 eliminates the time corresponding to the operating time of the modulator in the conventional SPI, speeds up the acquisition of information of the object to be measured, and receives the modulated light. The size of the irradiation device that irradiates the measurement object can be reduced.

B. Sun, MP Edgar, R. Bowman, LE Vittert, S. Welsh, A. Bowman, MJ Padgett: “3D Computational Imaging with Single-Pixel Detectors”, Science, Vol. 340, Issue 6134, pp.844-847 , 2013. Y. Kameyama, K. Ikeda, O. Koyama, M. Yamada: “Single-pixel Imaging using a Multi-core Fiber”, Technical Digest of OECC / PSC 2019, WP4-C2, 2019.

In the SPI disclosed in Non-Patent Document 1, in order to receive the entire emitted light by the light receiving portion consisting of a single pixel of each photodetector, the four photodetectors are separated from the object to be measured and projected in the propagation direction of the light wave. It is necessary to arrange the photodetectors in the same plane as the lens at intervals considering the light receiving angle of the photodetector. Therefore, the SPI disclosed in Non-Patent Document 1 has a problem that the entire space for arranging a plurality of light receiving portions is expanded. The SPI disclosed in Non-Patent Document 2 has a problem that the irradiation device can be speeded up and downsized, but is limited to two-dimensional imaging. Therefore, a space-saving light-receiving device that is spatially modulated in a predetermined pattern and receives light waves containing information on the object to be measured to realize three-dimensional imaging of the object to be measured, and a three-dimensional measuring device provided with the light-receiving device. Was sought after.

The present invention provides a space-saving three-dimensional measuring device and a light receiving device that receive light emitted waves from a measured object to realize three-dimensional imaging of the measured object.

The three-dimensional measuring device according to the present invention includes an irradiation device configured to be capable of irradiating an irradiation region of an object to be measured with irradiation light spatially modulated by a predetermined modulation pattern in the irradiation region, and the irradiation light. A first multi-core fiber having a plurality of cores capable of receiving light emitted from the object to be measured and containing information on the object to be measured in the irradiation region, and each of the plurality of cores receives light. A light receiving device including an optical information calculation unit configured to be able to calculate three-dimensional information of the object to be measured based on the optical information of the emitted light and the optical information of the irradiation light. The first multi-core fiber has the plurality of irradiation regions so that the irradiation region is included in the overlapping region where the light receiving angle ranges of the emitted light that can be received by each of the two or more cores of the plurality of cores overlap each other. Each of the cores has a numerical aperture determined by the maximum light receiving angle of the emitted light and the refractive index of the region between the object to be measured and the first multi-core fiber.

In the above-mentioned three-dimensional measuring device, the distance between the irradiation surface overlapping at least a part of the irradiation region in the traveling direction of the emitted light and the light receiving end surface of the first multi-core fiber is the direction along the numerical aperture and the irradiation surface. It may be set according to the size of the irradiation area in.

In the above-mentioned three-dimensional measuring device, the irradiation device shares the first multi-core fiber, and the light source and the light emitted from the light source are modulated and modulated into a plurality of lights having different spatial distributions from each other. A modulator that causes the plurality of lights to be incident on the plurality of cores of the first multi-core fiber may be provided.

In the above-mentioned three-dimensional measuring device, the irradiation device includes a light source, a modulator that modulates the light emitted from the light source into a plurality of lights having different spatial distributions from each other, and the plurality of modulators modulated by the modulator. The first multi-core fiber has a plurality of cores that emit the plurality of lights from the emission end so that the irradiation light is formed in the irradiation region of the object to be measured that can be incident with light and is away from the emission end. A second multi-core fiber, which is arranged at a different position from the above, may be provided.

In the above-mentioned three-dimensional measuring device, the irradiation device collimates the light source and the light emitted from the light source with parallel light having a size larger than the irradiation region in a cross section intersecting the optical axis of the light. A lens and a spatial modulator configured to form the irradiation light by spatially modulating the light collimated by the first lens and to irradiate the irradiation region with the irradiation light. May be good.

The light receiving device according to the present invention is used to acquire three-dimensional information of the object to be measured that is irradiated with the irradiation light spatially modulated by a predetermined modulation pattern in the irradiation area of the object to be measured. A first multi-core fiber having a plurality of cores capable of receiving light emitted from the object to be measured irradiated with the irradiation light and including information on the object to be measured in the irradiation region. An optical information calculation unit configured to be able to calculate three-dimensional information of the object to be measured based on the optical information of the emitted light received by each of the plurality of cores and the optical information of the irradiation light. .. The first multi-core fiber has the plurality of irradiation regions so that the irradiation region is included in the overlapping region where the light receiving angle ranges of the emitted light that can be received by each of the two or more cores of the plurality of cores overlap each other. Each of the cores has a numerical aperture determined by the maximum light receiving angle of the emitted light determined from the light receiving angle range and the refractive index of the region between the object to be measured and the first multi-core fiber.

According to the present invention, it is possible to provide a space-saving three-dimensional measuring device and a light receiving device that receive light emitted waves from a measured object to realize three-dimensional imaging of the measured object.

It is a schematic diagram of the 3D measuring apparatus of 1st Embodiment which concerns on this invention. It is a side view when the incident end face of the MCF of the 3D measuring apparatus shown in FIG. 1 is seen. It is a side view when the emission end face of the MCF of the 3D measuring apparatus shown in FIG. 1 is seen. It is a schematic diagram which shows the phase of each core of the MCF of the 3D measuring apparatus shown in FIG. It is a schematic diagram for demonstrating the state of the light-receiving state in the 3D measuring apparatus shown in FIG. It is a schematic diagram for demonstrating the state of the light-receiving state in the 3D measuring apparatus shown in FIG. It is a schematic diagram of the 3D measuring apparatus of the 2nd Embodiment which concerns on this invention. It is a schematic diagram for demonstrating the state of the light-receiving state in the 3D measuring apparatus shown in FIG. 7. It is a schematic diagram of the 3D measuring apparatus of the 3rd Embodiment which concerns on this invention. It is a schematic diagram when the modulation plane of the spatial modulator of the 3D measuring apparatus shown in FIG. 9 is viewed from the front. It is a schematic diagram for demonstrating the state of the light-receiving state in the 3D measuring apparatus shown in FIG.

Hereinafter, preferred embodiments of the three-dimensional measuring device and the light receiving device according to the present invention will be described with reference to the drawings.

(First Embodiment)
As shown in FIG. 1, the three-dimensional measuring device 201 of the first embodiment according to the present invention includes an irradiation device 211 and a light receiving device 221. The irradiation device 211 includes a light source 10, a demultiplexer 12, a plurality of modulators 14-1, ..., 14-m, an optical circulator 16-1, 16-m, and an MCF (first). Multi-core fiber) 21 and. m is a natural number of 2 or more, and is the total number of cores 26-1 ..., 26-m of MCF21 described later.

The light source 10 emits a light wave LW1 having a predetermined center wavelength (or peak wavelength). The incident end of the connecting fiber 11-1 is connected to the emitted end of the light source 10. The exit end of the connecting fiber 11-1 is connected to the incident end of the duplexer 12. Each incident end of m connecting fibers 11-2 is connected to the emitting end of the demultiplexer 12. The demultiplexer 12 divides the light wave LW1 incident from the connection fiber 11-1 into substantially m and causes the light wave LW1 to be incident on m connection fibers 11-2. As the duplexer 12, for example, a known optical coupler including connecting fibers 11-1 and 11-2 is used. The incident ends of the modulators 14-1 ... And 14-m are connected to the emitted ends of the m connecting fibers 11-2.

For example, a phase shifter is used for each of the modulators 14-1 ... And 14-m. _{The p-th modulator 14-p} shifts the phase of the incident light wave LW1 by a predetermined phase amount φp. p represents a natural number of 1 or more and m or less. The incident end of the connecting fiber 11-3 is connected to each of the emitting ends of the modulators 14-1 ... And 14-m. Each emission end of the m connecting fibers 11-3 is connected to each of the first input / exit ends (not shown) of the optical circulators 16-1 ..., 16-m. The incident end of the connecting fiber 11-4 is connected to each of the second input / output ends (not shown) of the optical circulators 16-1 ... And 16-m. The modulated light LW2 modulated by each of the modulators 14-1 ..., 14-m is emitted from the first input / output ends of the optical circulators 16-1 ..., 16-m, and is emitted from the optical circulator 16-1. ..., It is incident on m connecting fibers 11-4 from the second input / output end of 16-m.

The irradiation device 211 shares the MCF 21 with the light receiving device 221. The MDF 21 is a light receiving member that receives the emitted light LW4 emitted from the object to be measured 100 as described later, but the coordinate measuring device 201 also serves as an irradiation member that irradiates the object 100 to be measured with the irradiation light LW3. ing.

As shown in FIGS. 1 to 3, the MCF 21 has a plurality of cores 26-1 ..., 26-m, and a clad 28. FIG. 2 and the like show the case where m = 7 as an example. The core 26-1 is provided at the center of the incident end surface 31 and the emitted end surface 32 when viewed from the z direction. The six cores 26-2, ..., 26-7 are provided at equal intervals in the circumferential direction on the concentric circle centered on the core 26-1 on the incident end surface 31 and the emitted end surface 32.

The clad 28 is provided on the outer peripheral portions of the plurality of cores 26-1 ..., 26-m when viewed from the z direction along the axial direction of the MCF 21 (that is, the traveling direction of the light wave LW1). As shown in FIG. 2, the clad 28 may be connected at the outer peripheral portions of a plurality of cores 26-1 ..., 26-m and integrally provided by the MCF 21, and the plurality of cores 26-1 ... It may be provided individually on each outer peripheral portion of 26-m. Each emission end of m connecting fibers 11-4 is connected to the incident ends of the plurality of cores 26-1 ..., 26-m on the incident end surface 31 of the MCF 21.

As shown in FIG. 1, with respect to the emission end surface 32 of the MCF 21, a plurality of cores 26-1 ... The object to be measured 100 is arranged at a position Z1 away from the emission end surface 32 by a predetermined distance. In other words, the emission end surface 32 is arranged at a distance Z1 from the object to be measured 100 in the z direction. The object to be measured 100 may be any object as long as it can add optical information to the irradiated light wave, and is not limited to a specific object. The shape of the object to be measured 100 is not limited to a specific shape. The object to be measured 100 exemplified in the first embodiment is an object capable of reflecting at least a part of the irradiated light.

The light receiving device 221 includes an MCF 21 and a computer (optical information calculation unit) 50. The MCF 21 is an irradiation member that emits a modulated wave LW2 to form an irradiation light LW3, which will be described later. In the first place, the irradiation light LW3 is reflected by the measured object 100, so that the emitted light LW4 emitted from the measured object 100 is emitted. It is a light receiving member of. The incident end of the connecting fiber 11-5 is connected to each of the third input / output ends (not shown) of the optical circulators 16-1 ... And 16-m. The exit ends of the m connecting fibers 11-5 are connected to the photoelectric converter 52. The photoelectric converter 52 is connected to a computer 50 such as a personal computer via a connection cable 18 or the like. The photoelectric converter 52 converts the optical information of the emitted light LW4 such as the light intensity received through each of the m connecting fibers 11-5 into a current value or a voltage value, and outputs the optical information to the computer 50. Optical information about the modulated light LW3, which does not reflect the optical information of the object to be measured 100, is input to the computer 50 via a cable or a connecting line (not shown). The computer 50 can calculate the three-dimensional information of the object to be measured 100 based on the optical information of the emitted light LW4 and the optical information of the irradiation light LW3 received by each of the plurality of cores 26-1 ..., 26-m. It is configured.

The connecting fibers 11-1, 11-2, 11-3, 11-4, 11-5 are designed according to the center wavelength of the optical LW1 and form the optical LW1, the modulated wave LW2, and the emitted light LW4 so as to be propagable. Has been done. The modulators 14- # and the optical circulators 16- # numbers # connected to the plurality of cores 26- # of the MCP21 do not necessarily match each other as long as the connection relationship is clear on a one-to-one basis. good.

In the three-dimensional measuring device 201, the light LW1 emitted from the light source 10 is phase-shifted by each of the plurality of modulators 14-1 ..., 14-m, and the core 26-1 of the MCF 21 is used as the modulated light LW2. -It is incident on 26-m. The modulated light LW2 propagating in the z direction through the cores 26-1 ... Of the MCF 21 and 26-m is emitted into the free space from the emission end toward the object to be measured 100. As shown in FIG. 4, the exit end face 32 of MCF21, modulated light LW2 having a difference in relative phase quantity phi _p is the core 26-1 ..., modulation source by being supplied to the 26-m electric field _{E i (ζ, η)} of the modulated wave LW2 occurs. i represents the number of times of modulation using a plurality of modulators 14-1 ..., 14-m. zeta, eta represents the variable in the complex amplitude distribution of the modulated light LW2 based on the complex amplitude distribution _F i of the irradiation light LW3 the irradiated surface 105 (x, y) (i.e., the spatial frequency in the Fourier domain). The irradiation surface 105 is a plane that overlaps with the irradiation region 102, which is the measurement target region of the object to be measured 100, in the x-direction and the y-direction that are orthogonal to each other in the z-direction and intersects in the z-direction. The difference in distance between the irradiation surface 105 and the irradiation region 102 in the z direction is optically negligible. That is, the _{modulated light LW2 having a complex amplitude distribution E i} (ζ, η) on the emission end surface 32 of the MCF 21 propagates in free space around the z direction from the emission end surface 32, is Fraunhofer diffracted, and is near the irradiation surface 105. in the complex amplitude distribution _F i (x, y) to form a radiation beam LW3 with. The complex amplitude distribution _Fi (x, y) is expressed by the following equation (1).

In the equation (1), j represents an imaginary unit, λ represents the center wavelength of the light waves LW1 and LW2, and k represents the wave number of the light waves LW1 and LW2. The predetermined distance Z1 between the emission end surface 32 of the MCF 21 and the irradiation surface 105 in the z direction is secured within a range in which the Fraunhofer approximation holds. Therefore, the complex amplitude distribution _Fi (x, y) is _{expressed by the Fourier transform of the complex amplitude distribution E i} (ζ, η) as shown in Eq. (2) below.

_{The light intensity I i} (x, y) of the modulated light LW3 on the irradiation surface 105 is expressed by the following equation (3).

The irradiation light LW3 irradiated on the irradiation region 102 of the object to be measured 100 is reflected by the object 100 to be measured centering on the −z direction parallel to and opposite to the z direction. The emitted light LW4 reflected (emitted) from the measured object 100 includes optical information obtained by adding the optical information of the measured object 100 in the irradiation region 102 to the optical information of the irradiation light LW3. The plurality of cores 26-1 ..., 26-m of the MCF 21 are formed so as to be able to receive the emitted light LW4. Specifically, as shown in FIG. 5, the p-th core 26-p of the MCF 21 has a light-receiving angle within the light-receiving angle range θ _p (<2θ _max-p ) _{smaller than the maximum light-receiving angle θ max-p.} The emitted light LW4 of the above is incident. 2θ _max-p means the viewing angle of the p-th core 26-p. The emitted light LW4 incident on each of the cores 26-1 ..., 26-m repeats total internal reflection at the interface between the cores 26-1 ..., 26-m and the clad 28, and the core 26-1 ... ..., Proceed inside each of 26-m in the -z direction.

_{In the first embodiment, it is assumed that the refractive indexes n core of} m cores 26-1, ..., 26-m are the same as each other. The m cores 26-1 ..., 26-m are arranged at different positions on the light receiving end surface 33 of the MCF 21 as a light receiving member. In the three-dimensional measuring device 201, the light receiving end surface 33 is the same as the emission end surface 32 of the MCF 21 as an irradiation member. the m cores 26-1 ..., and the light receiving angle range theta _q of the light-receiving angle range theta _p and q th core 26-q of the p-th core 26-p of 26-m, the same size However, they do not completely overlap in the crossing direction that intersects in the z direction (hereinafter, may be simply referred to as the crossing direction). q is different from p and represents a natural number of 1 or more and m or less.

When the refractive index of free space (area) between the object to be measured 100 and MCF21 and _{n s,} the numerical aperture of MCF21 NA (Numerical aperture) is represented as the following equation (4).

In the equation (4), the maximum light receiving angle θ _{MAX is equal to the maximum light receiving angles θ max-1} , ..., θ _max-m equal to each other of the m cores 26-1, ..., 26-m. These are the parameters that collectively describe the maximum light receiving angles. Assuming that the free space is filled with air and n _s = 1, the numerical aperture NA is expressed by the following equation (5).

In the equation (5), Δ is the difference in the specific refractive index of the MCF 21, and is expressed as in the equation (6) shown below.

_{The numerical aperture NA of the MCF 21 is such that the light receiving angle ranges θ p} and θ _q that can be received by each of the cores 26-p and 26-q among the plurality of cores 26-1, ..., 26-m overlap each other and It is set so that at least the irradiation region 102 of the object to be measured 100 is included in the overlapping region OVL 26 between the light receiving angle ranges θ _p and θ _q. The MCF 21 has a numerical aperture NA that satisfies the condition that the light receiving end surface 33 and the irradiation region 102 of the measured object 100 face each other and at least the irradiation region 102 of the measured object 100 is included in the overlapping region OVL 26. In FIG. 5, _{cores 26-p and 26-q having light receiving angle ranges θ p} and θ _q forming the overlapping region OVL 26 are adjacent to each other in the y direction. However, the cores 26-p and 26-q forming the overlapping region OVL26 do not have to be adjacent to each other in the crossing direction including the y direction. Further, in FIG. 5, the number of cores forming the overlapping region OVL26 including the irradiation region 102 is two, but it may be three or more, and the maximum is m. The number of cores forming the overlapping region OVL26 including the irradiation region 102 is preferably 3 or more and m or less, for example.

The numerical aperture NA of the MCF 21 is obtained by the _{maximum light receiving angle θ MAX} and the refractive index n _{s as expressed by the equation (4).} The maximum light receiving angle θ _MAX is mainly obtained by the refractive index n _core and n _clad . Therefore, depending on the numerical aperture NA determined to satisfy the above-mentioned conditions; "at least the irradiation region 102 of the object to be measured 100 is included in the overlapping region OVL26", the refractive index n _core , n _{clad of the} MCF 21 and other than these. Design parameters are set.

The refractive index n _core , n _clad of the MCF 21 may be determined within a certain numerical range or by a specific value depending on the materials of the plurality of cores 26-1, ..., 26-m and the clad 28 of the MCF 21. The clad 28 is formed of, for example, high-purity quartz glass. In the plurality of cores 26-1, ..., 26-m, the quartz glass of the clad 28 is doped with impurities such as germanium (Ge) and phosphorus (P), and 0.2 to 0.2 to more than the quartz glass of the clad 28. It is made of quartz glass having a high refractive index of about 0.3%. The refractive index n _core is set to a predetermined value close to 1.5, and the refractive index n _clad is set to a predetermined value within a range of 1.5 to several percent increase.

When the refractive indexes n _core and n _{clad of the} MCF 21 are constrained to a specific value, the maximum light receiving angle θ _MAX is constrained, and as a result, the numerical aperture NA is constrained. When the numerical aperture NA is restricted within a predetermined range and the size of the irradiation region 102 of the object to be measured 100 is determined, the irradiation surface 105 and the light receiving end surface 33 of the MCF 21 in the z direction (the traveling direction of the emitted light LW4). The distance Z1 is set by the numerical aperture NA and the size of the irradiation surface 105 when viewed from the z direction so as to satisfy the above-mentioned conditions.

The light intensity (optical information) of the emitted light LW4 received by each of the plurality of cores 26-1, ..., 26-m of the MCF 21 is taken into the photoelectric converter 52. The photoelectric converter 52 converts the captured light intensity into a current value, a voltage value, or the like that can be handled by the computer 50. The converted electric information such as the current value or the voltage value is output to the computer 50. The computer 50 calculates two-dimensional optical information on the irradiation surface 105 of the object to be measured 100 based on the input electrical information and the electrical information converted from the optical information of the irradiation light LW3. The method for calculating the two-dimensional optical information of the object to be measured 100 includes, for example, an iterative method, but is not particularly limited. The computer 50 has a built-in program that calculates the optical information of the object to be measured 100 based on the optical information of the emitted light LW4 and the irradiation light LW3.

For example, the number of times the irradiation light LW3 is spatially modulated using m modulators 14-1, ..., 14-m, that is, the number of measurements is C, and the measurement position (that is, the pixel) in the irradiation region 102. Let X be the total number. _{The light intensity I c} (x, y) at the x-th measurement position of the irradiation light LW3 at the c-th modulation count is referred _{to as I c-x} . _{Let B c be} the light intensity when the output light LW4 at the cth modulation count is detected at each of the plurality of cores 26-1, ..., 26-m, and the intensity of the object 100 to be measured at the xth measurement position. When is Ox, the following _equation (7) is established.

_{In the equation (7), the light intensities I 1-1} , ..., _IC-X, and the core 26 of the MCF21, which can be calculated from the modulation patterns of m modulators 14-1, ..., 14-m. -1, ..., substituting light intensity _{B c} of the emitted light LW4 detected by each of the 26-m, the strength _{O x} of the measured object 100 to be calculated is obtained.

As described above, the plurality of cores 26-1, ..., 26-m of the MCF 21 have a viewing angle determined by the numerical aperture NA of the MCF 21. A plurality of core 26-1, ..., among the 26-m, reconstructed image from the intensity _{O X} of the emitted light LW4 received at each core 26-p, 26-q to form at least the overlapping region OVL26 is parallax images includes z-direction strength _{T X} of the object to be measured 100 in the irradiation region 102.

As shown in FIG. 6, for example, among a plurality of cores 26-1, ..., 26-m, with the center of each of the two cores 26-p, 26-q in the crossing direction (y direction in FIG. 6). the line connecting the v-th measurement position _{H v} in the irradiation region 102 of the object to be measured 100 and S1, S2. _{Let θ b} be the angle formed by the line S1 and the line S2 with the measurement position H _{v as the center.} the distance between the centers of two cores 26-p, 26-q in the y-direction and _{D C.} When the light receiving end surface 33 of MCF21 in the z-direction distance between the measurement position _{H v} and _{Z X,} the following equation (8) and (9) below is satisfied.

For example, considering that the distance _{D C} as a design parameter of MCF21 known, the angle based on the optical intensity information _{O X} like of the emitted light LW4 received at each of the two cores 26-p, 26-q θ b _{If it is known, the distance Z X} is calculated by the equations (8) and (9). By calculating the relative value of the distance Z _X for the distance Z1, it can acquire optical information related to the thickness of the object to be measured 100 and the reference surface of the irradiation surface 105 as the intensity T _X. The intensity _O X, by obtaining a _{T X,} 3-dimensional imaging of the object to be measured 100 is realized.

The three-dimensional measuring device 201 of the first embodiment described above includes an irradiation device 211 and a light receiving device 221. The irradiation device 211 is configured to be able to irradiate the irradiation region 102 with the irradiation light LW3 spatially modulated by a predetermined modulation pattern in the crossing direction in the irradiation region 102 of the object to be measured 100. The light receiving device 221 has an MCF 21 and a computer 50. The MCF 21 has a plurality of cores 26-1, ..., 26-m. The plurality of cores 26-1, ..., 26-m are emitted from the measured object 100 irradiated with the irradiation light LW3, and receive the emitted light LW4 including the information of the measured object 100 in the irradiation region 102. It is formed as possible. The computer 50 can calculate the three-dimensional information of the object to be measured 100 based on the optical information of the emitted light LW4 and the optical information of the irradiation light LW3 received by each of the plurality of cores 26-1, ..., 26-m. It is configured in. _{The MCF 21 has a light receiving angle range θ p} of the emitted light LW4 that can be received by each of two or more cores (for example, 26-p, 26-q) out of a plurality of cores 26-1, ..., 26-m. , Θ _q have a predetermined numerical aperture NA so that the irradiation region 102 is included in the overlapping region OVL 26 where θ q overlaps with each other. Predetermined numerical aperture NA, a plurality of core 26-1, ..., the area between the 26-m in each of the maximum light receiving angle theta _MAX and the object to be measured 100 of the outgoing light determined by the light receiving angle range MCF21 It is determined by the refractive index.

In three-dimensional measurement apparatus 201 described above, a plurality of cores 26-1 MCF21, · · ·, at least one optical information and the object to be measured of the light intensity _{B C} etc. of the emitted light LW4 received at the core of the 26-m 100 based on the optical information I _C-X and the like of the illumination light LW3 before irradiation, the two-dimensional information of the optical information of the intensity O _x or the like of the object to be measured 100 of the measurement position of the total number X comprising an irradiation region 102 Can be obtained as. Further, in the above-mentioned three-dimensional measuring device 201, since the irradiation region 102 of the object to be measured 100 is included in the overlapping region OVL26 of the light receiving angle ranges θp and θq of at least two cores 26-p and 26-q, the core 26- Optical information of the emitted light LW4 including parallax is acquired by p and 26-q with the irradiation surface 105 as a reference plane, and the intensity of the object to be measured 100 in the z direction (that is, the thickness direction) based on the above-mentioned effect of parallax. Optical information such as Z _{x can be acquired.} According to the three-dimensional measuring apparatus 201 described above, it acquires the optical information such as the z-direction strength Z _x in addition to the optical information of the intensity O _x or the like of the object to be measured 100 in the cross direction, three-dimensional object to be measured 100 Imaging can be realized.

In the above-mentioned three-dimensional measuring device 201, a plurality of cores 26-1, ..., 26-m that receive the emitted light LW4 emitted from the object to be measured 100 are arranged in the MCF 21 having a diameter of, for example, 1 mm or less in the crossing direction. Has been done. Therefore, compared to the conventional device in which a plurality of light receiving elements independent of each other are dispersed and arranged in the space, a plurality of cores 26-1, ..., 26-m corresponding to the light receiving elements are arranged in the crossing direction. It is possible to reduce the space and save space for the light receiving member.

In the three-dimensional measuring device 201 of the first embodiment, the light receiving surface 105 which overlaps with the irradiation region 102 in the Z direction and is substantially orthogonal to the z direction and the light receiving surface of the MCF 21 which is parallel to the irradiation surface 105 and substantially orthogonal to the z direction. The distance Z1 from the end surface 33 is set according to the number of openings NA of the MCF 21 and the size D102 of the irradiation region 102 in the direction along the irradiation surface 105.

In the above-mentioned three-dimensional measuring device 201, for example, when the refractive index of the material of the core 26-1, ..., 26-m of the MCF 21 and the clad 28 is restricted to a specific value, the refractive index is preliminarily based on the specific refractive index. The distance Z1 can be set so that the irradiation region 102 is included in the overlapping region OVL26 determined by the numerical aperture NA according to the fixed numerical aperture NA and the size D102 of the irradiation region 102. According to the three-dimensional measuring device 201, obtains an optical information such as the z-direction strength Z _x in addition to the optical information of the intensity O _x or the like of the object to be measured 100 in the cross direction, the three-dimensional imaging of the object to be measured 100 realizable.

In the three-dimensional measuring device 201 of the first embodiment, the irradiation device 211 shares the light receiving device 221 and the MCF 21, and includes a light source 10 and a plurality of modulators 14-1, ..., 14-m. The plurality of modulators 14-1, ..., 14-m modulate the light LW1 emitted from the light source 10 into a plurality of lights having different phases (spatial distributions) from each other, and also modulate the plurality of modulated lights into a plurality of lights having different phases (spatial distribution). It is incident on a plurality of cores 26-1, ..., 26-m of MCF21.

In the above-mentioned three-dimensional measuring device 201, the MCF 21 is a light receiving member of the light receiving device 221 but also serves as a light projecting member of the irradiation device 211. In the past, it was necessary to secure a space for separately arranging the light projecting member and the light receiving member, but according to the above-mentioned three-dimensional measuring device 201, these spaces are combined into one and installed as a whole. Space can be reduced.

In the above-mentioned three-dimensional measuring device 201, each of the plurality of cores 26-1, ..., 26-m of the MCF 21 has a predetermined phase in each of the plurality of modulators 14-1, ..., 14-m. The modulated light LW2 whose phase is shifted to the quantity is incident. The modulated light LW2 propagating in the z direction every 26-1, ..., 26-m is emitted from the emission end surface 32 of the MCF 21 into the free space and diffused, synthesized by Fraunhofer diffraction, and is synthesized in the irradiation region 102. A modulated light LW2 having a predetermined spatial distribution is formed in the above. Since the phase shift amount in each of the plurality of modulators 14-1, ..., 14-m and the spatial distribution in the irradiation region 102 correspond to each other, the plurality of modulators 14-1, ..., 14 By appropriately setting and changing the phase shift amount at each of −m, the modulated light LW2 having a desired spatial distribution can be easily formed.

The light receiving device 221 of the first embodiment described above is the object to be measured when the irradiated area 102 of the object to be measured 100 is irradiated with the modulated light LW2 spatially modulated by a predetermined modulation pattern in the irradiation area 102. It is a device used to acquire 100 three-dimensional information. The light receiving device 221 includes the above-mentioned MCF 21 and a computer 50. _{The MCF 21 has a light receiving angle range θ p} of the emitted light LW4 that can be received by each of two or more cores (for example, 26-p, 26-q) out of a plurality of cores 26-1, ..., 26-m. , Θ _q have a predetermined numerical aperture NA so that the irradiation region 102 is included in the overlapping region OVL 26 where θ q overlaps with each other.

According to the light receiving device 221 described above, the object to be measured 100 modulated light LW2 is irradiated to at least the irradiation region 102, a plurality of detection points in the cross direction (i.e., measurement position of the irradiation region 102) intensity O _x or the like In addition to the optical information of the above, optical information _{such as the intensity Z x in the} z direction can be acquired, and three-dimensional imaging of the object to be measured 100 can be realized. Further, in the light receiving device 221, a plurality of cores 26-1, ..., 26-m having a high numerical aperture NA are arranged at short intervals on the order of microns in the crossing direction. Therefore, it is possible to realize a small light receiving device 221 as compared with the conventional light receiving device in which a plurality of light receiving elements independent of each other are dispersed and arranged in the space.

(Second Embodiment)
Next, the three-dimensional measuring device 202 of the second embodiment according to the present invention will be described. Hereinafter, among the configurations of the three-dimensional measuring device 202, those common to the configuration of the three-dimensional measuring device 201 of the first embodiment are designated by the same reference numerals as those of the configuration, and the description overlapping with the first embodiment will be described. Omit.

In the second embodiment, as shown in FIG. 7, the irradiation device 212 of the coordinate measuring device 202 includes a light source 10, a demultiplexer 12, and a plurality of modulators 14-1, ..., 14-g. A MCF (second multi-core fiber) 22 separate from the MCF 21 of the light receiving device 221 is provided. g is a natural number of 2 or more, and is the total number of cores 26-1 ..., 26-g of MCF22. g may be equal to or different from m.

The MCF 22 has a plurality of cores 26-1, ..., 26-g. The exit ends of g of the connecting fibers 11-3 are connected to the incident ends of the plurality of cores 26-1 ..., 26-g. A plurality of lights modulated by the modulators 14-1, ..., 14-g are incident on the plurality of cores 26-1 ..., 26-g via g connecting fibers 11-3. It is possible. Modulated light LW2 is emitted into the free space from the emission ends of the plurality of cores 26-1 ..., 26-g.

The MCF 21 and the MCF 22 are arranged at different positions from each other, and are arranged at intervals in the circumferential direction centered on the center Q of the irradiation region 102 of the object to be measured 100. The emission end surface 38 of the MCF 22 faces the irradiation region 102 of the object to be measured 100 in the z direction. The light receiving end surface 33 of the MCF 21 faces the irradiation region 102 of the object to be measured 100 from an angle direction different from that of the emission end surface 38 of the MCF 22 with the center C as the center. Although the MCF 22 is a separate body from the MCF 21, a plurality of cores 26-1 ..., 26-g arrangement and each core are arranged based on the same principle as the MCF 21 as the irradiation member described in the first embodiment. Modulated light LW2 is formed on the emission end face 38 according to the phase shift amount of the propagating light. The modulated light LW2 having a complex amplitude distribution E _i (ζ, η) on the emission end surface 38 of the MCF 22 propagates in free space around the z direction from the emission end surface 38, is Fraunhofer diffracted, and is complex in the vicinity of the irradiation surface 105. amplitude distribution _F i (x, y) to form a radiation beam LW3 with. With respect to the irradiation surface 105 shown in FIGS. 7 and 8, the angle of the irradiation surface 105 centered on the center Q is appropriately set.

In FIG. 8, the irradiation device 212 is omitted in order to clearly show the arrangement of the light receiving device 221 and the object to be measured 100. _{As shown in FIG. 8, the numerical aperture NA of the MCF 21 is a light receiving angle range θ p} , which can be received by each of the cores 26-p and 26-q among the plurality of cores 26-1, ..., 26-m. It is set so as to satisfy the condition that θ _q overlaps with each other and at least the irradiation region 102 of the object to be measured 100 is included in the overlapping region OVL 26.

In the second embodiment, the irradiation surface 105 is a surface that passes through the center Q of the irradiation region 102 and is orthogonal to the w direction. Similar to the first embodiment, the numerical aperture NA of the MCF 21 is restricted within a predetermined range by the refractive index peculiar to the materials of the cores 26-1, ..., 26-m and the clad 28, and the irradiation region of the object to be measured 100 is irradiated. When the size of 102 is determined, the distance Z1 between the irradiation surface 105 and the light receiving end surface 33 of the MCF 21 in the w direction (traveling direction of the emitted light LW4) is the numerical aperture NA and the w direction so as to satisfy the above conditions. It is set according to the size of the irradiation surface 105 when viewed from above.

The emitted light LW4 is reflected from the irradiation region 102 of the object to be measured 100 irradiated with the irradiation light LW3 in the w direction inclined with respect to the z direction and the −z direction. The emitted light LW4 is received by a plurality of cores 26-1 ..., 26-m of the MCF 21. The subsequent operation of the light receiving device 221 and the like are the same as the operation of the light receiving device 221 described in the first embodiment. However, unlike the light receiving device 221 of the first embodiment, the light receiving device 221 of the second embodiment does not have a portion shared with the irradiation device 212. The incident end of the connecting fiber 11-5 is connected to each of the exit ends of the plurality of cores 26-1 ... Of the MCF 21 and 26-m.

The three-dimensional measuring device 202 of the second embodiment described above includes an irradiation device 212 and a light receiving device 221. The light receiving device 221 of the second embodiment includes an MCF 21 and a computer 50. In the three-dimensional measuring device 202 and the light receiving device 221, the MCF 21 receives light from each of two or more cores (for example, 26-p, 26-q) out of the plurality of cores 26-1, ..., 26-m. It has a predetermined numerical aperture NA so that the irradiation region 102 is included in the overlapping region OVL 26 in which the light receiving angle ranges θ _p and θ _{q of the possible emitted light LW4 overlap each other.}

According to the three-dimensional measuring device 202 and the light receiving device 221 of the second embodiment, similarly to the three-dimensional measuring apparatus 201 of the first embodiment, in addition to the optical information of the intensity O _x or the like of the object to be measured 100 in the cross direction It is possible to acquire optical information such as the intensity Z _{x in the} z direction and realize three-dimensional imaging of the object to be measured 100. Further, according to the three-dimensional measuring device 202 and the light receiving device 221 of the second embodiment, a plurality of light receiving elements corresponding to the light receiving elements are compared with the conventional device in which a plurality of light receiving elements independently of each other are dispersed and arranged in the space. The space between the cores 26-1, ..., 26-m in the crossing direction can be reduced to save space for the light receiving member.

In the three-dimensional measuring device 202 of the second embodiment, the irradiation device 212 includes a light source 10, a plurality of modulators 14-1, ..., 14-g, and an MCF 22. The plurality of modulators 14-1, ..., 14-g modulate the light LW1 emitted from the light source 10 into a plurality of modulated light LW2 having different spatial distributions from each other. The MCF 22 has a plurality of cores 26-1 ..., 26-g, is formed separately from the MCF 21, and is arranged at a position different from that of the MCF 21. The plurality of cores 26-1 ..., 26-g are located at positions away from the emission end so that the plurality of modulated light LW2 modulated by the modulators 14-1, ..., 14-g can be incident. A plurality of modulated lights LW2 are emitted from the emission end so as to form the irradiation light LW3 in the vicinity of the irradiation region 102 of the object to be measured 100.

According to the above-mentioned three-dimensional measuring device 202, the MCF 22 is designed to satisfy the conditions required for the light projecting member by separating the MCF 22 as the light projecting member and the MCF 21 as the light receiving member. Can be designed to satisfy the conditions required for a light receiving member. The conditions required for the MCF 22 are that the modulated light LW2 modulated by a plurality of modulators 14-1, ..., 14-g is emitted into the free space from the emission ends of the cores 26-1 ..., 26-g. When the Fraunhofer diffraction is performed at the same time, the irradiation light LW3 is formed in the vicinity of the irradiation region 102. Design parameters such as core 26-1 ... Of MCF22, number g of 26-g, arrangement and numerical aperture NA are appropriately set so as to satisfy the above-mentioned conditions independently of MCF21. On the other hand, the condition required for the MCF 21 is the emitted light LW4 that can be received by each of two or more cores (for example, 26-p, 26-q) out of a plurality of cores 26-1, ..., 26-m. The irradiation region 102 is included in the overlapping region OVL 26 in which the light receiving angle ranges θ _p and θ _{q of the above overlap with each other.} Design parameters such as core 26-1 ... Of MCF21, number m of 26-m, arrangement and numerical aperture NA are appropriately set so as to satisfy the above-mentioned conditions. In the first embodiment, since the MCF 21 also serves as a light receiving member and a light projecting member, it is necessary to have design parameters that simultaneously satisfy both the conditions required for the MCF 21 and the conditions required for the MCF 22 described above. According to the three-dimensional measuring device 202 of the second embodiment, the degree of freedom in designing the irradiation device 212, the light receiving device 221 and the three-dimensional measuring device 202 can be increased.

(Third Embodiment)
Next, the three-dimensional measuring device 203 of the third embodiment according to the present invention will be described. Hereinafter, among the configurations of the three-dimensional measuring device 203, those common to the configuration of the three-dimensional measuring device 201 of the first embodiment and the three-dimensional measuring device 202 of the second embodiment are designated by the same reference numerals as those of the configuration. However, the description overlapping with the first embodiment will be omitted.

As shown in FIG. 9, the irradiation device 213 of the coordinate measuring device 203 includes a light source 10, a first lens 71, and a spatial modulator 80. The first lens 71 collimates the light LW1 emitted from the light source 10 with parallel light having a size of the irradiation region 102 or more in a cross section intersecting the optical axis. The first lens 71 is arranged at a position separated from the emission end of the light source 10 by the focal length f1 of the first lens 71 on the optical axis of the light LW1. The aperture size and numerical aperture of the first lens 71 are appropriately set based on the focal length f1 and the size of the modulation surface 81 of the spatial modulator 80.

As shown in FIG. 10, the surface irradiated with the light LW1 in the spatial modulator 80 constitutes the modulation surface 81. The spatial modulator 80 has a plurality of modulation elements 82 arranged on the modulation surface 81 corresponding to the pixels in the plane intersecting the optical axis direction of the optical LW1. The plurality of modulation elements 82 are connected to a control device (not shown), and the spatial distributions such as the reflection direction and the phase of the parallel light LW1-2 collimated by the first lens 71 according to the electric signal received from the control device are distributed to each other. Change independently. As the spatial modulator 80, for example, a spatial optical phase modulator (Liquid Crystal On Silicon-Spatial Light Modular: LCOS-SLM), a Digital Micromirror Device (DMD), or the like can be applied. If the spatial modulator 80 is, for example, an LCOS-SLM, a laminate of a liquid crystal display and a CMOS (Complementary Metal Oxide Semiconductor) is used as the modulation element 82. If the spatial modulator 80 is, for example, a DMD, the modulation element 82 connects a microplate mirror having substantially the same size as a pixel, a CMOS for changing the inclination of the microplate mirror, a microplate mirror, and a CMOS. A mechanism equipped with a hinge or the like is used.

As shown in FIG. 9, the light receiving device 222 of the three-dimensional measuring device 203 has the same configuration as the light receiving device 222 of the three-dimensional measuring device 202 of the second embodiment, and is behind the light receiving end surface 33 of the MCF 21 in the w direction. Further provided with an arranged second lens 72. The second lens 72 is arranged at a position separated from the light receiving end surface 33 of the MCF 21 on the optical axis of the optical LW4 (that is, in the w direction) by the focal length f2 of the second lens 72. The aperture size and numerical aperture of the second lens 72 are appropriately set based on the focal length f2 and the size of the irradiation region 102 of the object to be measured 100.

In the three-dimensional measuring device 203, the parallel light LW1-2 emitted from the light source 10 and collimated by the first lens 71 is spatially modulated on the modulation surface 81 by the spatial modulator 80 to form the irradiation light LW3. The irradiation light LW3 irradiates the irradiation region 102 of the object to be measured 100 with the modulated spatial distribution substantially maintained. The emitted light LW4 reflected from the object to be measured 100 travels in the w direction while substantially maintaining the collimated state, and is incident on the second lens 72.

_{As shown in FIG. 11, the numerical aperture NA of the MCF 21 is a light receiving angle range θ p} , which can be received by each of the cores 26-p and 26-q among the plurality of cores 26-1, ..., 26-m. It is set so as to satisfy the condition that θ _q overlaps with each other and at least the irradiation region 102 of the object to be measured 100 is included in the overlapping region OVL 26. The second lens 72 converges the emitted light LW3 reflected from the object to be measured 100 in a collimated state around the w direction, and has a high coupling efficiency with a plurality of cores 26-1, ..., 26- of the MCF 21. It is provided to be incident on at least two cores 26-p and 26-q of m. In the third embodiment, the fact that at least the irradiation region 102 of the object to be measured 100 is included in the overlapping region OVL 26 means that the emitted light LW4 from the irradiation region 102 incident on the second lens 72 is included in the overlapping region OVL 26. Means that.

In the third embodiment, the irradiation surface 105 is a surface that overlaps with at least a part of the irradiation region 102 ′ in which the irradiation region 102 is moved forward in the w direction to the central surface (or main surface) of the second lens 72. Similar to the first embodiment, the numerical aperture NA of the MCF 21 is restricted within a predetermined range by the refractive index peculiar to the materials of the cores 26-1, ..., 26-m and the clad 28, and the irradiation region of the object to be measured 100 is irradiated. When the sizes of 102 and the irradiation region 102'are determined, the distance Z1 between the irradiation surface 105 and the light receiving end surface 33 of the MCF 21 in the w direction (the traveling direction of the emitted light LW4) is an opening so as to satisfy the above conditions. It is set by the numerical aperture and the size of the irradiation surface 105 when viewed from the w direction.

The emitted light LW4 incident on the second lens 72 travels in the w direction, converges in the direction intersecting the w direction, and is received by the plurality of cores 26-1 ..., 26-m of the MCF 21. The subsequent operation of the light receiving device 222 and the like are the same as the operation and the like of the light receiving device 221 described in the first embodiment. However, the light receiving device 222 of the third embodiment does not have a portion shared with the irradiation device 213 like the light receiving device 221 of the second embodiment. The incident end of the connecting fiber 11-5 is connected to each of the exit ends of the plurality of cores 26-1 ... Of the MCF 21 and 26-m.

The three-dimensional measuring device 203 of the third embodiment described above includes an irradiation device 213 and a light receiving device 222. The light receiving device 222 of the third embodiment includes an MCF 21 and a computer 50. In the three-dimensional measuring device 203 and the light receiving device 222, the MCF 21 receives light from each of two or more cores (for example, 26-p, 26-q) out of the plurality of cores 26-1, ..., 26-m. It has a predetermined numerical aperture NA so that the irradiation region 102'is included in the overlapping region OVL 26 in which the light receiving angle ranges θ _p and θ _{q of the possible emitted light LW4 overlap each other.}

According to the three-dimensional measuring device 203 and the light receiving device 222 of the third embodiment, similarly to the three-dimensional measuring apparatus 201 of the first embodiment, in addition to the optical information of the intensity O _x or the like of the object to be measured 100 in the cross direction It is possible to acquire optical information such as the intensity Z _{x in the} z direction and realize three-dimensional imaging of the object to be measured 100. Further, according to the three-dimensional measuring device 202 and the light receiving device 222 of the second embodiment, a plurality of light receiving elements corresponding to the light receiving elements are compared with the conventional device in which a plurality of light receiving elements independently of each other are dispersed and arranged in the space. The space between the cores 26-1, ..., 26-m in the crossing direction can be reduced to save space for the light receiving member.

In the three-dimensional measuring device 203 of the third embodiment, the irradiation device 213 includes a light source 10, a first lens 71, and a spatial modulator 80. The first lens 71 collimates the light LW1 emitted from the light source 10 with the parallel light LW1-2 having a size of the irradiation region 102 or more on the cross section intersecting the optical axis of the light LW1 and the modulation surface 81 of the spatial modulator 80. do. The spatial modulator 80 is configured to form the irradiation light LW3 by spatially modulating the parallel light LW1-2 collimated by the first lens 71, and to irradiate the irradiation region 102 of the object to be measured 100 with the irradiation light LW3. Has been done.

In the above-mentioned three-dimensional measuring device 203, unlike the three-dimensional measuring device 201 of the first embodiment and the three-dimensional measuring device 202 of the second embodiment, the space modulator 80 is used instead of the MCF to emit light from the light source 10. Moreover, the parallel light LW1-2 collimated by the first lens 71 can be spatially modulated to directly form the irradiation light LW3.

In the three-dimensional measuring device 203 of the third embodiment, the light receiving device 222 includes a second lens 72, an MCF 21, and a computer 50. The second lens 72 condenses the emitted light LW4 emitted from the object to be measured 100 in a substantially collimated state in a direction intersecting the w direction with the w direction as the center, and the core 26-1 of the MCF 21 ... , 26-m can be incident. According to the light receiving device 222, although a space for arranging the second lens 72 is required, as a light receiving element, a plurality of cores 26-1, ..., 26-m having a high numerical aperture NA are placed in the w direction in the MCF 21. It can be miniaturized by arranging them at short intervals on the order of microns in the planes intersecting with each other.

In the three-dimensional measuring device 203 of the third embodiment, the emitted light LW4 emitted from the irradiation region 102 of the measured object 100 can acquire the optical information of the measured object 100 without arranging the second lens 72. The second lens 72 can be omitted if light can be received by the cores 26-1, ..., 26-m of the MCF 21 with a high efficiency.

Although the preferred embodiment of the present invention has been described in detail above, the present invention is not limited to a specific aspect. The present invention can be variously modified and modified within the scope of the gist of the present invention described in the claims.

For example, in the MCF 21 of the first embodiment, as described above, the MCF 21 serves as both a light emitting member and a light receiving member. The number of cores required to form the irradiation light LW3 having a predetermined spatial distribution by Fraunhofer diffraction, the distance between the cores, and the number of cores required to satisfy the condition that the overlap region OVL 26 includes the irradiation region 102. And the spacing between cores may differ. In that case, the number m of the cores of the MCF 21 may be the same as the larger number of the above-mentioned required number of cores. The minimum spacing between the cores of the MCF 21 may be the same as the smaller spacing of the above-mentioned required spacing between the cores. Regarding the smaller number of the above-mentioned required cores, only the smaller number of the above-mentioned required number of cores among the m cores 26-1, ..., 26-m of the MCF21. Can be used. For example, the number of cores required to form the irradiation light LW3 having a predetermined spatial distribution by Fraunhofer diffraction is 8, and the number of cores required to satisfy the condition that the overlap region OVL 26 includes the irradiation region 102. If is 2, the number m of the cores of the MCF 21 is set to 8, and the emitted wave LW4 emitted from the object to be measured 100 has an interval satisfying the condition that the irradiation region 102 is included in the overlapping region OVL 26 among the eight cores. It suffices to receive light with two cores.

In each of the above-described embodiments, for example, it has been described that the irradiation wave LW3 is formed by phase-modulating the light LW1 emitted from the light source 10 in a plane intersecting the optical axis, but the irradiation wave LW3 is the phase of the light LW1. In addition to this, it may be formed by modulating the intensity, polarization, or the like. In the present invention, the irradiation wave LW3 may be spatially modulated so that the object to be measured 100 can be three-dimensionally imaged by receiving the emitted wave LW4 at the plurality of cores of the MCF 21.

The light receiving device according to the present invention may be used in combination with another device that is already installed and irradiates the object to be measured with an irradiation wave.

The three-dimensional measuring device and the light receiving device according to the present invention are not limited to the emitted wave reflected from the measured object as described in each of the above-described embodiments, and may receive the emitted wave transmitted from the measured object. .. Further, in the three-dimensional measuring device and the light receiving device according to the present invention, a predetermined optical process may be applied to the emitted wave as long as the optical information of the object to be measured can be extracted by the computer.

201, 202, 203 3D measuring device 211, 212, 213 Irradiating device 221, 222 Light receiving device

Claims (6)

An irradiation device configured to be capable of irradiating the irradiation area of the object to be measured with irradiation light spatially modulated by a predetermined modulation pattern in the irradiation area.
A first multi-core fiber having a plurality of cores capable of receiving emitted light emitted from the object to be measured irradiated with the irradiation light and including information on the object to be measured in the irradiation region, and the plurality of cores. A light receiving device having an optical information calculation unit configured to be able to calculate three-dimensional information of the object to be measured based on the optical information of the emitted light received by each of them and the optical information of the irradiation light.
Equipped with
The first multi-core fiber has the plurality of irradiation regions so that the irradiation region is included in the overlapping region where the light receiving angle ranges of the emitted light that can be received by each of the two or more cores of the plurality of cores overlap each other. Each of the cores has a numerical aperture determined by the maximum light receiving angle of the emitted light and the refractive index of the region between the object to be measured and the first multi-core fiber.
3D measuring device. The distance between the irradiation surface that overlaps at least a part of the irradiation region in the traveling direction of the emitted light and the light receiving end surface of the first multi-core fiber is the numerical aperture and the size of the irradiation region in the direction along the irradiation surface. Set according to,
The three-dimensional measuring device according to claim 1. The irradiation device is
Sharing the first multi-core fiber,
Light source and
A modulator that modulates the light emitted from the light source into a plurality of lights having different spatial distributions, and causes the plurality of modulated lights to be incident on a plurality of cores of the first multi-core fiber.
To prepare
The three-dimensional measuring device according to claim 1 or 2. The irradiation device is
Light source and
A modulator that modulates the light emitted from the light source into a plurality of lights having different spatial distributions from each other.
A plurality of light emitted from the emission end so that the plurality of light modulated by the modulator can be incident and the irradiation light is formed in the irradiation region of the object to be measured away from the emission end. A second multi-core fiber having a core and arranged at a position different from that of the first multi-core fiber,
To prepare
The three-dimensional measuring device according to claim 1 or 2. The irradiation device is
Light source and
A first lens that collimates the light emitted from the light source with parallel light having a size larger than the irradiation region in a cross section intersecting the optical axis of the light.
A spatial modulator configured to form the irradiation light by spatially modulating the light collimated by the first lens and to irradiate the irradiation region with the irradiation light.
To prepare
The three-dimensional measuring device according to claim 1 or 2. It is a light receiving device used to acquire three-dimensional information of an object to be measured that is spatially modulated with an irradiation light having a predetermined modulation pattern in the irradiation area of the object to be measured.
A first multi-core fiber having a plurality of cores capable of emitting light emitted from the object to be measured irradiated with the irradiation light and receiving emitted light including information on the object to be measured in the irradiation region.
An optical information calculation unit configured to be able to calculate three-dimensional information of the object to be measured based on the optical information of the emitted light received by each of the plurality of cores and the optical information of the irradiation light.
Equipped with
The first multi-core fiber has the plurality of irradiation regions so that the irradiation region is included in the overlapping region where the light receiving angle ranges of the emitted light that can be received by each of the two or more cores of the plurality of cores overlap each other. Each of the cores has a numerical aperture determined by the maximum light receiving angle of the emitted light determined from the light receiving angle range and the refractive index of the region between the object to be measured and the first multi-core fiber.
Light receiving device.

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