JP2021167042A - Industrial robot and control method of the same - Google Patents

Abstract

To provide an industrial robot which can properly correct a position and an orientation of a hand in a horizontal direction to place an object to be transported (a transported object) in a delivery part after a position and an orientation of the transported object placed in a receiving part is properly corrected in the horizontal direction even if large warpage occurs in the transported object.SOLUTION: An industrial robot 1 conducts a first operation that is an action performed when an arm 7 is contracted so that a hand 5, receiving an object to be transported 2 (a transported object) at a delivery part 3, moves close to a body part 9. When the industrial robot 1 conducts the first operation, a control unit of the industrial robot 1 acquires: anteroposterior positioning data of the hand 5 made when a transmission type detection mechanism 26 fixed to the body part 9 detects the transported object 2; lateral position data of the transported object 2 detected by the detection mechanism 26 when the hand 5 moves to a first measurement position; and lateral position data of the transport object 2 detected by the detection mechanism 26 when the hand 5 that has passed through the first measurement position moves to a second measurement position.SELECTED DRAWING: Figure 1

Description

The present invention relates to an industrial robot that conveys a rectangular or square object to be conveyed. The present invention also relates to a method for controlling such an industrial robot.

Conventionally, an industrial robot that conveys a rectangular workpiece such as a glass substrate for a liquid crystal display is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 carries out, for example, a work from an accommodating cassette and conveys the work to a predetermined processing device. This industrial robot includes a hand on which a work is mounted, an articulated arm in which the hand is rotatably connected to the tip side, and a base in which the base end side of the articulated arm is rotatably connected. ing. Further, this industrial robot includes an arm drive mechanism for expanding and contracting an articulated arm, a rotation mechanism for rotating a base, and a movement mechanism for moving the base in the horizontal direction. The arm drive mechanism expands and contracts the arm so that the hand moves linearly with the hand facing a certain direction with respect to the base.

In the industrial robot described in Patent Document 1, the hand includes two mounting portions on which the workpiece is mounted. An alignment sensor is attached to the upper surface on the tip side of the two mounting portions. The alignment sensor is a reflective optical sensor. Assuming that the movement direction of the hand that moves linearly when the arm expands and contracts is the front-rear direction, the alignment sensor detects one end surface of the work housed in the storage cassette in the front-rear direction from below.

In the industrial robot described in Patent Document 1, before the work housed in the storage cassette is mounted on the hand, one end surface of the work housed in the storage cassette in the front-rear direction is detected by the alignment sensor, and the alignment sensor is used. Based on the detection result, the position and orientation (inclination in the horizontal plane) of the work to be accommodated in the accommodating cassette in the front-rear direction are specified. Further, based on the position and orientation of the specified work in the front-rear direction, the position and orientation of the hand in the front-rear direction, which is taught in advance, are corrected, and the work is mounted on the hand whose position and orientation in the front-rear direction are corrected. ..

Japanese Unexamined Patent Publication No. 2006-272526

In recent years, a method of manufacturing a plurality of semiconductor packages at once by arranging a large number of chips on a large rectangular or square panel (panel level packaging (PLP)) has begun to spread, and a semiconductor package using PLP has begun to spread. Industrial robots are beginning to be used in the production lines of. PLP includes a process of coating (sealing) the upper surface of a panel on which a large number of chips are placed with resin, and a panel handled in a semiconductor package manufacturing line using PLP has a large warp. Is likely to occur.

Further, in the industrial robot described in Patent Document 1, the processing apparatus is corrected to an appropriate position and orientation in the front-back and left-right directions (that is, the horizontal position) and the orientation of the work placed in the accommodation cassette. In order to place the work in, the horizontal position and orientation of the hand may be corrected when the work is carried out from the accommodating cassette and carried into the processing device. In this case, for example, a sensor for detecting the position of the work carried out from the storage cassette in the left-right direction is attached to the base.

Further, in this case, in order to correct the position and orientation of the work placed in the storage cassette in the front-rear direction, the work placed in the storage cassette is based on the detection result of the alignment sensor before being mounted on the hand. After correcting the position and orientation of the hand in the front-back direction, the work is mounted on the corrected hand and the position of the work in the left-right direction is corrected based on the detection result of the sensor attached to the base. When the workpiece mounted on the hand is carried into the processing device and placed, the position of the hand in the left-right direction is corrected.

In the industrial robot described in Patent Document 1, the inventor of the present application carries out, for example, a transport object having a large warp, such as a panel handled in a semiconductor package manufacturing line using PLP, from a storage cassette. When the operation of carrying the object into the processing device is performed, the horizontal position and orientation of the object to be transported placed in the storage cassette are corrected, and then the object to be transported is placed in the processing device in the horizontal direction of the hand. We are considering correcting the position and orientation.

However, when the alignment sensor attached to the upper surface of the mounting portion of the hand is a reflection type optical sensor as in the industrial robot described in Patent Document 1, a large warp occurs in the object to be conveyed. Then, the vertical distance between the alignment sensor and the end face (end face in the front-rear direction) of the object to be transported becomes unstable, and the light emitted from the alignment sensor and reflected at a place other than the end face of the object to be transported is transmitted to the alignment sensor. It has been clarified by the examination of the inventor of the present application that there is a possibility of incident first. That is, when the alignment sensor is a reflection type optical sensor, if the object to be transported has a large warp, the alignment sensor may not be able to properly detect the end face of the object to be transported in the front-rear direction. It has been clarified by the examination of the inventor of the present application that it occurs.

If the alignment sensor cannot properly detect the end face of the object to be transported in the front-rear direction, the front and rear of the hand will be based on the detection result of the alignment sensor before the object to be transported placed in the storage cassette is mounted on the hand. It becomes impossible to properly correct the position and orientation of the direction. Therefore, it becomes impossible to appropriately correct the horizontal position and orientation of the transport object placed on the storage cassette before placing the transport object on the processing device.

Therefore, an object of the present invention is that in an industrial robot that carries out a transport object from a predetermined receiving section and carries the transport object into a predetermined delivery section, even if the transport target has a large warp, the receiving section It is possible to appropriately correct the horizontal position and orientation of the hand in order to properly correct the horizontal position and orientation of the object to be transported placed on the delivery unit and then place the object to be transported on the delivery section. It is to provide industrial robots.

Another object of the present invention is that in an industrial robot that carries out a transport object from a predetermined receiving section and carries the transport object into a predetermined delivery section, even if the transport object is greatly warped, the receiving section is It is possible to properly correct the horizontal position and orientation of the hand to be transported in order to properly correct the horizontal position and orientation of the object to be transported placed in the delivery section and then place the object to be transported in the delivery section. The purpose is to provide a control method for industrial robots.

In order to solve the above problems, the industrial robot of the present invention is an industrial robot that conveys a rectangular or square-shaped object to be conveyed, in which a hand on which the object to be conveyed is mounted and a hand on the tip side. Controls an arm that is rotatably connected to and expands and contracts in the horizontal direction, a main body that is rotatably connected to the base end side of the arm, an optical detection mechanism that is attached to the main body, and an industrial robot. A state in which the receiving position is set as the receiving position when the object to be transported, which is placed in a predetermined receiving unit, is mounted on the hand in a state where the arm is extended and received, and the arm is extended. Assuming that the position of the hand when the object to be transported mounted on the hand is delivered to the predetermined delivery part is the delivery position, the arm contracts so that the hand receiving the object to be transported at the receiving position approaches the main body. The first operation, which is an operation, and the second operation, which is an operation when the arm extends until the hand on which the object to be transported is moved to the delivery position after the first operation, are performed. When the first operation is performed, the robot moves linearly while facing a certain direction with respect to the main body, and the detection mechanism is located between the light receiving unit composed of a line sensor or an area sensor and the light receiving unit in the vertical direction. It is a transmissive detection mechanism having a light emitting part that is arranged to face the light receiving part at a predetermined interval, and the movement direction of the hand when the industrial robot performs the first operation is the front-back direction. Assuming that the direction orthogonal to the vertical direction is the horizontal direction, when the industrial robot performs the first operation, one end surface of the object to be transported in the horizontal direction passes between the light receiving unit and the light emitting unit, and the control unit. Is the first position data which is the data of the position in the front-rear direction of the hand when the detection mechanism detects the object to be transported when the industrial robot performs the first operation, and the detection mechanism detects the object to be transported. After that, when the hand moves to a predetermined first measurement position, the second position data, which is the data of the position of one end surface in the left-right direction of the object to be conveyed, which is detected by the detection mechanism, and the first measurement position In addition to acquiring the third position data, which is the data of the horizontal position of one end surface in the horizontal direction of the object to be transported, which is detected by the detection mechanism when the passed hand moves to the predetermined second measurement position, and the industrial When the industrial robot performs the second operation, the horizontal position and orientation of the hand when reaching the delivery position are corrected based on the first position data, the second position data, and the third position data. It is characterized by.

Further, in order to solve the above problems, in the control method of the industrial robot of the present invention, a hand on which a transport object formed in a rectangular shape or a square shape is mounted and the hand are rotatably connected to the tip side. It is equipped with an arm that expands and contracts in the horizontal direction, a main body that is rotatably connected to the base end side of the arm, and an optical detection mechanism that is attached to the main body, and is placed in a predetermined receiving portion. The receiving position is the position of the hand when the object to be transported is mounted on the hand with the arm extended and received, and the object to be transported mounted on the hand with the arm extended is set to the predetermined delivery section. Assuming that the position of the hand at the time of delivery is the delivery position, the first operation is an operation when the arm contracts so that the hand receiving the object to be conveyed at the receiving position approaches the main body, and the object to be conveyed after the first operation. The second operation, which is the operation when the arm extends until the hand on which the vehicle is mounted moves to the delivery position, is performed, and the hand faces a certain direction with respect to the main body when the first operation is performed. In It is a transmissive detection mechanism that has, and if the moving direction of the hand when the first movement is performed is the front-back direction and the direction orthogonal to the front-back direction and the up-down direction is the left-right direction, when the first movement is performed One end surface in the left-right direction of the object to be transported is a control method for an industrial robot that passes between a light receiving unit and a light emitting unit, and when the detection mechanism detects the object to be transported during the first operation. The first position data, which is the data of the position of the hand in the front-rear direction, and the conveyed object detected by the detection mechanism when the hand moves to a predetermined first measurement position after the detection mechanism detects the conveyed object. The second position data, which is the data of the position of one end surface in the left-right direction, and the object to be conveyed, which is detected by the detection mechanism when the hand passing through the first measurement position moves to a predetermined second measurement position. The third position data, which is the data of the position of one end surface in the left-right direction in the left-right direction, is acquired, and when the second operation is performed, it is based on the first position data, the second position data, and the third position data. Therefore, it is characterized in that the horizontal position and orientation of the hand when reaching the delivery position are corrected.

In the present invention, when the industrial robot performs the first operation, the first position data, which is the data of the position in the front-rear direction of the hand when the detection mechanism detects the object to be conveyed, and the detection mechanism obtains the object to be conveyed. After detection, the second position data, which is the data of the position of one end surface in the left-right direction of the object to be conveyed, which is detected by the detection mechanism when the hand moves to the first measurement position, and the first measurement position. The third position data, which is the data of the position in the left-right direction of one end surface in the left-right direction of the object to be conveyed, which is detected by the detection mechanism when the passed hand moves to the second measurement position, is acquired. The mechanism is a transmission type detection mechanism having a light receiving unit and a light emitting unit arranged to face the light receiving unit.

Therefore, in the present invention, even if a large warp occurs in the object to be conveyed, the detection mechanism can appropriately acquire the first position data, the second position data, and the third position data. Therefore, in the present invention, the object to be transported mounted on the hand in the state (position and orientation) as it is placed on the receiving unit based on the appropriate first position data, second position data, and third position data. It becomes possible to properly identify the horizontal position and orientation of the.

Further, in the present invention, when the industrial robot performs the second operation, the horizontal position of the hand when reaching the delivery position based on the first position data, the second position data and the third position data. And because the orientation is corrected, even if there is a large warp in the object to be transported, the horizontal position of the hand when reaching the delivery position based on the horizontally identified position and orientation of the object to be transported. It becomes possible to appropriately correct the position and orientation of the direction.

As described above, in the present invention, even if the object to be transported is greatly warped, the horizontal position and orientation of the object to be transported mounted on the hand while being placed on the receiving portion can be appropriately specified. It is possible to properly correct the horizontal position and orientation of the hand when reaching the delivery position, based on the horizontally identified position and orientation of the object to be transported. become. Therefore, in the present invention, even if the object to be transported is greatly warped, the object to be transported is placed in the delivery section after the horizontal position and orientation of the object to be transported placed in the receiving portion are appropriately corrected. Therefore, it becomes possible to appropriately correct the horizontal position and orientation of the hand.

In the present invention, the industrial robot includes, for example, two hands, a first hand and a second hand, and a first arm and a second hand as an arm to which the first hand is connected. A second arm as a connected arm, a main body to which the first arm and the second arm are connected, and a first detection mechanism as a detection mechanism for detecting a conveyed object mounted on the first hand. And a second detection mechanism as a detection mechanism for detecting the transport target mounted on the second hand, the transport target mounted on the first hand and the transport target mounted on the second hand are The first detection mechanism and the second detection mechanism are attached to the main body in a state of being overlapped in the vertical direction.

In this case, since the first detection mechanism for detecting the transport target mounted on the first hand and the second detection mechanism for detecting the transport target mounted on the second hand are individually provided. Even if the second arm is contracted while the object to be transported is mounted on the second hand, the control unit keeps the first hand when the first detection mechanism detects the object to be transported mounted on the first hand. The first position data, which is the data of the position in the front-rear direction, and the position in the left-right direction of one end surface in the left-right direction of the object to be conveyed, which is detected by the first detection mechanism when the first hand moves to the first measurement position. The second position data, which is the data of It becomes possible to appropriately acquire the three-position data.

Further, even if the first arm is contracted while the object to be transported is mounted on the first hand, the control unit can perform the second when the second detection mechanism detects the object to be transported mounted on the second hand. The first position data, which is the data of the position of the hand in the front-rear direction, and the left-right direction of one end surface in the left-right direction of the object to be conveyed, which is detected by the second detection mechanism when the second hand moves to the first measurement position. The second position data, which is the position data, and the left-right position data of one end surface of the object to be conveyed in the left-right direction, which is detected by the second detection mechanism when the second hand moves to the second measurement position. It becomes possible to appropriately acquire the third position data.

In the present invention, the industrial robot is, for example, an arm drive mechanism that expands and contracts the arm so that the hand moves linearly with respect to the main body in a certain direction, and a rotation mechanism that rotates the main body. And a horizontal movement mechanism that moves the main body in the left-right direction, and the control unit is based on the first position data, the second position data, and the third position data when the industrial robot performs the second operation. The arm drive mechanism, the rotation mechanism, and the horizontal movement mechanism are controlled to correct the horizontal position and orientation of the hand when reaching the delivery position.

As described above, in the present invention, in the industrial robot that carries out the object to be transported from the predetermined receiving unit and carries the object to be transported to the predetermined delivery unit, even if the object to be transported is greatly warped, it is received. It is possible to properly correct the horizontal position and orientation of the hand to be transported in order to properly correct the horizontal position and orientation of the object to be transported placed on the unit and then place the object to be transported on the delivery unit. become.

It is a top view of the industrial robot which concerns on embodiment of this invention. It is a rear view of the industrial robot shown in FIG. It is a block diagram for demonstrating the structure of the industrial robot shown in FIG. It is a top view for demonstrating the operation of the industrial robot shown in FIG. It is a top view of the industrial robot which concerns on other embodiment of this invention. It is a side view of the industrial robot shown in FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Structure of industrial robot)
FIG. 1 is a plan view of the industrial robot 1 according to the embodiment of the present invention. FIG. 2 is a rear view of the industrial robot 1 shown in FIG. FIG. 3 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG.

The industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is a horizontal articulated robot for transporting a predetermined transport object 2. The object 2 to be transported in this embodiment is a large panel handled in a semiconductor package manufacturing line using PLP. The object to be transported 2 is formed in a rectangular or square flat plate shape. The robot 1 transports the transport object 2 from, for example, the storage cassette 3 in which a plurality of transport objects 2 are housed to the processing device 4 that performs a predetermined process on the transport target 2.

That is, for example, the robot 1 carries out the transport object 2 from the accommodation cassette 3 and also carries the transport object 2 carried out from the accommodation cassette 3 into the processing device 4. A plurality of objects to be transported 2 are accommodated in the accommodating cassette 3 so as to be overlapped with each other at intervals in the vertical direction. The accommodating cassette 3 of this embodiment is a receiving unit in which the robot 1 receives the object to be transported 2, and the processing device 4 is a delivery unit in which the robot 1 delivers the object to be transported 2.

The robot 1 may transport the object 2 to be transported from the processing device 4 to the storage cassette 3. That is, the robot 1 may carry out the transport target object 2 from the processing device 4 and also carry the transport target object 2 carried out from the processing device 4 into the storage cassette 3. In this case, the processing device 4 serves as a receiving unit for the robot 1 to receive the transported object 2, and the accommodating cassette 3 serves as a delivery unit for the robot 1 to deliver the transported object 2.

The robot 1 includes two hands 5 and 6 on which the object to be transported 2 is mounted, an arm 7 to which the hand 5 is rotatably connected to the tip side, and an arm 8 to which the hand 6 is connected to the tip side. , The main body 9 in which the base ends of the arms 7 and 8 are rotatably connected, the case body 10 in which the lower part of the main body 9 is housed, and the main body 9 and the case 10 can be moved in the horizontal direction. It is equipped with a base 11 that supports the robot. The hand 5 of this embodiment is the first hand, and the hand 6 is the second hand. Further, the arm 7 of this embodiment is a first arm, and the arm 8 is a second arm.

The hands 5 and 6 include a hand base 14 rotatably connected to the tip end side of the arms 7 and 8 and a plurality of linear forks 15 on which the transport object 2 is placed on the upper surface side. .. The hands 5 and 6 of this embodiment include two forks 15. The two forks 15 project from the hand base 14 in the same horizontal direction. Further, the two forks 15 are arranged in parallel with each other. The fork 15 of the hand 5 and the fork 15 of the hand 6 project in the same direction. Further, the fork 15 of the hand 5 and the fork 15 of the hand 6 are displaced in the vertical direction. That is, the transport target 2 mounted on the hand 5 and the transport target 2 mounted on the hand 6 are displaced in the vertical direction. In this embodiment, the fork 15 of the hand 5 is arranged above the fork 15 of the hand 6.

Arms 7 and 8 are articulated arms that expand and contract in the horizontal direction. The arms 7 and 8 are composed of two arm portions, a first arm portion 16 and a second arm portion 17. The base end side of the first arm portion 16 is rotatably connected to the main body portion 9. The base end side of the second arm portion 17 is rotatably connected to the tip end side of the first arm portion 16. Hands 5 and 6 are rotatably connected to the tip end side of the second arm portion 17.

The first arm portion 16 is arranged above the main body portion 9. The second arm portion 17 is arranged above the first arm portion 16. The hands 5 and 6 are arranged above the second arm portion 17. The base end side of the first arm portion 16 of the arm 7 and the base end side of the first arm portion 16 of the arm 8 are connected to the main body portion 9 in a state of being adjacent to each other in the horizontal direction. Further, the arm 7 and the arm 8 are arranged adjacent to each other, and are arranged at the same position in the vertical direction.

In the horizontal direction, the distance between the rotation center of the first arm portion 16 with respect to the main body portion 9 and the rotation center of the second arm portion 17 with respect to the first arm portion 16 and the rotation center of the second arm portion 17 with respect to the first arm portion 16. The distance between the center of rotation and the center of rotation of the hands 5 and 6 with respect to the second arm portion 17 is equal. The arms 7 and 8 are arranged so that the tips of the hands 5 and 6 (the tip of the fork 15) extend away from the main body 9 and the tips of the hands 5 and 6 approach the main body 9. It can be expanded and contracted in the horizontal direction with the positions where 7 and 8 contract. When the expansion and contraction amounts of the arms 7 and 8 are equal, the fork 15 of the hand 5 and the fork 15 of the hand 6 overlap in the vertical direction. Further, at this time, the arms 7 and the arms 8 are arranged line-symmetrically when viewed from the vertical direction.

The main body 9 is rotatable with respect to the case body 10 with the vertical direction as the axial direction of rotation. Further, the main body 9 can be raised and lowered with respect to the case body 10. The case body 10 can move linearly in the horizontal direction with respect to the base 11. In the following description, the moving direction of the case body 10 with respect to the base 11 (Y direction in FIG. 1 and the like) is defined as the “horizontal direction”, and the X direction in FIG. do. Further, the X1 direction side of FIG. 1 and the like, which is one side in the front-rear direction, is referred to as the "front" side, and the X2 direction side of FIG. 1 and the like, which is the opposite side, is referred to as the "rear" side.

In this embodiment, for example, a plurality of storage cassettes 3 are arranged in the left-right direction. Further, for example, the plurality of accommodating cassettes 3 are arranged on one side of the robot 1 in the front-rear direction, and the processing device 4 is arranged on the other side of the robot 1 in the front-rear direction. For example, the plurality of storage cassettes 3 are arranged on the front side of the robot 1, and the processing device 4 is arranged on the rear side of the robot 1. Further, in the accommodation cassette 3 and the processing device 4, the end faces of the objects to be transported 2 mounted on the hands 5 and 6 are substantially parallel to the front-rear direction or the left-right direction.

Further, the robot 1 includes an arm drive mechanism 20 that expands and contracts the arm 7, an arm drive mechanism 21 that expands and contracts the arm 8, a rotation mechanism 22 that rotates the main body 9, and an elevating mechanism 23 that raises and lowers the main body 9. A horizontal movement mechanism 24 that moves the main body 9 in the horizontal direction together with the case body 10 and a control unit 25 that controls the robot 1 are provided. Further, the robot 1 includes a detection mechanism 26 for detecting the transport target object 2 mounted on the hand 5, and a detection mechanism 27 for detecting the transport target object 2 mounted on the hand 6. The detection mechanism 26 of this embodiment is the first detection mechanism, and the detection mechanism 27 is the second detection mechanism.

The arm drive mechanism 20 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the arm 7 and the hand 5. The arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the main body 9 while the hand 5 faces a certain direction. Similar to the arm drive mechanism 20, the arm drive mechanism 21 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the arm 8 and the hand 6. The arm drive mechanism 21 expands and contracts the arm 8 so that the hand 6 moves linearly with respect to the main body 9 while the hand 6 faces a certain direction. The arm drive mechanisms 20 and 21 are electrically connected to the control unit 25. Specifically, the motors and the like of the arm drive mechanisms 20 and 21 are electrically connected to the control unit 25.

The rotation mechanism 22 rotates the main body 9 with respect to the case body 10 with the vertical direction as the axial direction of rotation. That is, the rotation mechanism 22 rotates the arms 7 and 8 together with the main body 9 with the vertical direction as the axial direction of rotation. The rotation mechanism 22 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the main body 9. The rotating mechanism 22 is housed in the case body 10. The rotating mechanism 22 is electrically connected to the control unit 25. Specifically, the motor of the rotating mechanism 22 and the like are electrically connected to the control unit 25.

The elevating mechanism 23 elevates and elevates the main body 9 with respect to the case body 10. That is, the elevating mechanism 23 raises and lowers the arms 7 and 8 together with the main body 9. Further, the elevating mechanism 23 raises and lowers the rotating mechanism 22 together with the main body 9. The elevating mechanism 23 is housed in the case body 10. The elevating mechanism 23 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the main body 9. The elevating mechanism 23 is electrically connected to the control unit 25. Specifically, the motor of the rotating mechanism 23 and the like are electrically connected to the control unit 25.

The horizontal movement mechanism 24 linearly moves the case body 10 in the left-right direction with respect to the base 11. That is, the horizontal movement mechanism 24 linearly moves the main body 9 and the arms 7 and 8 together with the case body 10 in the left-right direction. The horizontal movement mechanism 24 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the case body 10. The horizontal movement mechanism 24 is electrically connected to the control unit 25. Specifically, the motor of the horizontal movement mechanism 24 and the like are electrically connected to the control unit 25.

The detection mechanisms 26 and 27 are optical detection mechanisms having a light emitting unit 30 and a light receiving unit 31. Further, the detection mechanisms 26 and 27 are transmission type detection mechanisms. The light emitting unit 30 is arranged to face the light receiving unit 31 in the vertical direction with a predetermined distance from the light receiving unit 31. The light receiving unit 31 of this embodiment is a line sensor. In the light receiving unit 31, a plurality of light receiving elements are arranged in a row in the left-right direction. The optical axis of the light emitted from the light emitting unit 30 may be parallel to the vertical direction or may be slightly inclined with respect to the vertical direction.

The detection mechanisms 26 and 27 are attached to the main body 9. Specifically, the detection mechanisms 26 and 27 are fixed to the sensor fixing member 32 fixed to the main body 9, and the detection mechanisms 26 and 27 are attached to the main body 9 via the sensor fixing member 32. .. Further, the detection mechanism 26 and the detection mechanism 27 are attached to the main body 9 via the sensor fixing member 32 in a state of being overlapped in the vertical direction. In this embodiment, the detection mechanism 26 is arranged directly above the detection mechanism 27. The detection mechanisms 26 and 27 rotate and move up and down with respect to the case body 10 together with the main body portion 9. Further, the detection mechanisms 26 and 27 move in the left-right direction together with the main body portion 9. The detection mechanisms 26 and 27 are electrically connected to the control unit 25.

As described above, the robot 1 conveys the object 2 to be conveyed from the accommodating cassette 3 to the processing device 4. Further, as described above, in the arms 7 and 8, the positions where the arms 7 and 8 extend so that the tips of the hands 5 and 6 are separated from the main body 9 and the tips of the hands 5 and 6 approach the main body 9. The arms 7 and 8 can be expanded and contracted in the horizontal direction from the contracted position. In this embodiment, the arms 7 and 8 are in an extended state when the robot 1 receives the transfer object 2 from the accommodation cassette 3 and when the robot 1 delivers the transfer object 2 to the processing device 4. ..

The position of the hand 5 (see FIG. 1) when the object 2 to be transported placed on the storage cassette 3 is mounted on the hand 5 with the arm 7 extended and received is set as the receiving position 5A, and the arm 7 is extended. Assuming that the position of the hand 5 when delivering the transfer object 2 mounted on the hand 5 to the processing device 4 is the delivery position 5B, the robot 1 receives the transfer object 2 at the receiving position 5A. After the first operation M11, which is an operation when the arm 7 contracts so as to approach the main body 9, and the first operation M11, the arm 7 until the hand 5 on which the object to be transported 2 is mounted moves to the delivery position 5B. The second operation M12, which is the operation when the robot is extended, is performed. When the first operation M11 is completed, the turning radius (turning radius) of the main body 9 including the conveyed object 2, the hand 5 and the arm 7 mounted on the hand 5 becomes the minimum.

Similarly, a state in which the receiving position 6A is set as the receiving position 6A when the object 2 to be transported placed in the storage cassette 3 is mounted on the hand 6 with the arm 8 extended and received, and the arm 8 is extended. Assuming that the position of the hand 6 when delivering the transfer object 2 mounted on the hand 6 to the processing device 4 is the delivery position 6B, the robot 1 has the hand 6 that receives the transfer object 2 at the receiving position 6A as the main body. After the first operation M21, which is an operation when the arm 8 contracts toward the portion 9, and the first operation M21, the arm 8 extends until the hand 6 on which the object to be transported 2 is mounted moves to the delivery position 6B. The second operation M22, which is the operation at the time, is performed. When the first operation M21 is completed, the turning radius of the main body 9 including the object 2, the hand 6 and the arm 8 mounted on the hand 6 becomes the minimum.

As described above, the arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the main body 9 while the hand 5 faces a certain direction, and the arm drive mechanism 21 attaches the arm drive mechanism 21 to the main body 9. On the other hand, the arm 8 is expanded and contracted so that the hand 6 moves linearly while facing a certain direction. That is, the hand 5 moves linearly in a state of facing a certain direction with respect to the main body 9 when the robot 1 performs the first operation M11, and the hand 6 performs the first operation M21 by the robot 1. Occasionally, it moves linearly with respect to the main body 9 in a certain direction. Further, the hand 5 moves linearly in a state of facing a certain direction with respect to the main body 9 when the robot 1 performs the second operation M12, and the hand 6 performs the second operation M22 by the robot 1. Occasionally, it moves linearly with respect to the main body 9 in a certain direction.

In the present embodiment, since the accommodating cassette 3 is arranged on the front side of the robot 1 and the processing device 4 is arranged on the rear side of the robot 1, the hand 5 is used when the robot 1 performs the first operation M11. , When the robot 1 performs the second operation M12, it moves linearly in the front-rear direction. Further, the hand 6 moves linearly in the front-rear direction when the robot 1 performs the first operation M21 and when the robot 1 performs the second operation M22.

Specifically, when the robot 1 performs the first operation M11, the hand 5 linearly moves to the rear side with the tip of the fork 15 facing the front side, and the robot 1 performs the second operation M12. Occasionally, the fork 15 moves linearly to the rear side with the tip of the fork 15 facing the rear side. Further, when the robot 1 performs the first operation M21, the hand 6 moves linearly to the rear side with the tip of the fork 15 facing the front side, and when the robot 1 performs the second operation M22, the hand 6 moves. The fork 15 moves linearly to the rear side with the tip of the fork 15 facing the rear side.

When the robot 1 performs the first operation M11, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction passes between the light emitting portion 30 of the detection mechanism 26 and the light receiving portion 31 of the detection mechanism 26. That is, in the detection mechanism 26, when the robot 1 performs the first operation M11, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction is a light emitting unit 30 of the detection mechanism 26 and a light receiving unit of the detection mechanism 26. It is arranged at a position passing between the 31 and the 31. Further, the detection mechanism 26 is arranged behind the rear end of the conveyed object 2 mounted on the hand 5 arranged at the receiving position 5A. Further, even when the robot 1 performs the second operation M12, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction is formed by the light emitting portion 30 of the detection mechanism 26 and the light receiving portion 31 of the detection mechanism 26. Pass between.

Similarly, when the robot 1 performs the first operation M21, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction is between the light emitting portion 30 of the detection mechanism 27 and the light receiving portion 31 of the detection mechanism 27. Pass through. That is, in the detection mechanism 27, when the robot 1 performs the first operation M21, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction is a light emitting unit 30 of the detection mechanism 27 and a light receiving unit of the detection mechanism 27. It is arranged at a position passing between the 31 and the 31. Further, the detection mechanism 27 is arranged behind the rear end of the conveyed object 2 mounted on the hand 6 arranged at the receiving position 6A. Further, even when the robot 1 performs the second operation M22, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction is formed by the light emitting portion 30 of the detection mechanism 27 and the light receiving portion 31 of the detection mechanism 27. Pass between.

As described above, since the light receiving unit 31 is a line sensor in which a plurality of light receiving elements are arranged in a row in the left-right direction, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction by the detection mechanism 26. It is possible to detect the position of the in the left-right direction. Similarly, the detection mechanism 27 makes it possible to detect the position of one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction in the left-right direction.

The robot 1 performs a rotational operation to rotate the main body 9 between the first operation M11 and the second operation M12. At this time, the arm 8 is also contracted. Further, the robot 1 performs a rotation operation for rotating the main body 9 between the first operation M21 and the second operation M22. At this time, the arm 7 is also contracted. Further, the robot 1 raises and lowers the main body 9 and raises and lowers the main body 9 between the first movement M11 and the second movement M12, and between the first movement M21 and the second movement M22, if necessary. Moves in the left-right direction. Further, if necessary, the robot 1 performs an elevating operation of the main body 9 and a moving operation of the main body 9 in the left-right direction during the first operations M11 and M21, and during the second operations M12 and M22. In addition, the main body 9 is moved up and down and the main body 9 is moved in the left-right direction.

(Control method for industrial robots)
FIG. 4 is a plan view for explaining the operation of the robot 1 shown in FIG. Note that in FIG. 4, the illustration of the hand 6 and the like is omitted.

When the detection mechanism 26 detects the transport target object 2 when the robot 1 performs the first operation M11 (specifically, the control unit 25 detects the rear end of the transport target object 2 mounted on the hand 5). This is data on the position of the hand 5 in the front-rear direction when the mechanism 26 detects it (that is, when the detection mechanism 26 first detects the object to be transported 2 mounted on the hand 5) (see FIG. 4A). The transport target detected by the detection mechanism 26 when the hand 5 moves to a predetermined first measurement position after the first position data and the detection mechanism 26 have detected the transport target 2. When the second position data, which is the data of the position of one end surface of the object 2 in the left-right direction in the left-right direction, and the hand 5 which has passed the first measurement position move to a predetermined second measurement position (FIG. 4 (C)). (See) Acquires the third position data which is the data of the position of one end surface of the conveyed object 2 in the left-right direction in the left-right direction detected by the detection mechanism 26.

The control unit 25 specifies the position of the object to be conveyed 2 mounted on the hand 5 in the front-rear direction based on the first position data, and mounts the control unit 25 on the hand 5 based on the second position data and the third position data. The position and orientation of the transported object 2 in the left-right direction (inclination of the transported object 2 in the horizontal plane) is specified. The second position data is data on the position of one end surface of the object to be transported 2 in the left-right direction, which is relatively close to the rear end of the object to be transported 2 in the left-right direction (see FIG. 4B). The third position data is data on the position of one end surface of the object to be transported 2 in the left-right direction, which is relatively close to the front end of the object to be transported 2 in the left-right direction (see FIG. 4C).

Further, the control unit 25 determines the position (horizontal position) and orientation of the specified transport object 2 in the front-rear and left-right directions and the horizontal position and orientation of the transport object 2 previously taught to the robot 1. In addition to making a comparison, when the robot 1 performs the second operation M12, the horizontal position and orientation of the hand 5 when reaching the delivery position 5B are corrected based on the comparison result. That is, when the robot 1 performs the second operation M12, the control unit 25 is horizontal of the hand 5 when it reaches the delivery position 5B based on the first position data, the second position data, and the third position data. Correct the position and orientation of the direction.

Specifically, when the robot 1 performs the second operation M12, the control unit 25 determines the arm drive mechanism 20 and the rotation mechanism 22 based on the first position data, the second position data, and the third position data. And the horizontal movement mechanism 24 are controlled to correct the horizontal position and orientation of the hand 5 when reaching the delivery position 5B. Further, when the robot 1 performs the second operation M12, the control unit 25 is horizontal to the transport object 2 placed on the processing device 4 based on the first position data, the second position data, and the third position data. The horizontal position and orientation of the hand 5 when reaching the delivery position 5B so that the position in the direction becomes an appropriate position and the direction of the object to be conveyed 2 placed on the processing device 4 becomes an appropriate direction. to correct.

Similarly, when the detection mechanism 27 detects the transport target object 2 when the robot 1 performs the first operation M21 (specifically, after the transport target object 2 mounted on the hand 6), the control unit 25 The first position data, which is the data of the position of the hand 6 in the front-rear direction (when the end is detected by the detection mechanism 27), and the hand 6 to a predetermined first measurement position after the detection mechanism 27 detects the object to be transported 2. The second position data, which is the data of the position of one end surface of the conveyed object 2 in the left-right direction in the left-right direction, and the hand 6 which has passed the first measurement position, are predetermined first positions. 2 Acquires the third position data which is the data of the position of one end surface of the conveyed object 2 in the left-right direction in the left-right direction, which is detected by the detection mechanism 27 when moving to the measurement position.

The control unit 25 specifies the position of the object to be conveyed 2 mounted on the hand 6 in the front-rear direction based on the first position data, and mounts the control unit 25 on the hand 6 based on the second position data and the third position data. The position and orientation of the object to be transported 2 in the left-right direction are specified. Further, the control unit 25 compares the horizontal position and orientation of the specified transport object 2 with the horizontal position and orientation of the transport object 2 previously taught to the robot 1, and the robot 1 controls the robot 1. When the second operation M22 is performed, the horizontal position and orientation of the hand 6 when reaching the delivery position 6B are corrected based on the comparison result.

That is, when the robot 1 performs the second operation M22, the control unit 25 is horizontal of the hand 6 when it reaches the delivery position 6B based on the first position data, the second position data, and the third position data. Correct the position and orientation of the direction. Specifically, when the robot 1 performs the second operation M22, the control unit 25 determines the arm drive mechanism 21 and the rotation mechanism 22 based on the first position data, the second position data, and the third position data. And the horizontal movement mechanism 24 are controlled to correct the horizontal position and orientation of the hand 6 when reaching the delivery position 6B.

Further, when the robot 1 performs the second operation M22, the control unit 25 is horizontal to the transport object 2 placed on the processing device 4 based on the first position data, the second position data, and the third position data. The horizontal position and orientation of the hand 6 when reaching the delivery position 6B so that the position in the direction becomes an appropriate position and the direction of the object to be conveyed 2 placed on the processing device 4 becomes an appropriate direction. to correct.

When the transport object 2 placed on the storage cassette 3 is mounted on the hand 5, the contracted arm 7 extends so that the hand 5 moves to the receiving position 5A instructed in advance. The hand 5 is loaded with a transport object 2 in a state (position and orientation) as it is placed in the storage cassette 3. Similarly, when the transport object 2 placed in the storage cassette 3 is mounted on the hand 6, the contracted arm 8 extends so that the hand 6 moves to the receiving position 6A instructed in advance. The hand 6 is loaded with the object to be transported 2 as it is placed in the storage cassette 3.

(Main effect of this form)
As described above, in the present embodiment, when the robot 1 performs the first operations M11 and M21, the control unit 25 uses the detection mechanisms 26 and 27 to perform the first position data, the second position data, and the third position data. Although the position data is acquired, the detection mechanisms 26 and 27 are transmission type detection mechanisms having a light receiving unit 31 and a light emitting unit 30 arranged to face the light receiving unit 31. Therefore, in the present embodiment, even if the conveyed object 2 is greatly warped, the detection mechanisms 26 and 27 can appropriately acquire the first position data, the second position data, and the third position data. .. Therefore, in this embodiment, the hands 5 and 6 are mounted in the state (position and orientation) as they are placed in the storage cassette 3 based on the appropriate first position data, second position data, and third position data. It becomes possible to appropriately specify the position and orientation of the conveyed object 2 in the horizontal direction.

Further, in the present embodiment, when the robot 1 performs the second operations M12 and M22, the hand when reaching the delivery positions 5B and 6B based on the first position data, the second position data and the third position data. Since the horizontal positions and orientations of 5 and 6 are corrected, even if the transported object 2 is greatly warped, based on the appropriately specified horizontal position and orientation of the transported object 2, the transport target 2 is corrected. It becomes possible to appropriately correct the horizontal position and orientation of the hands 5 and 6 when reaching the delivery positions 5B and 6B.

As described above, in the present embodiment, even if the transport target object 2 is greatly warped, the horizontal position of the transport target object 2 mounted on the hands 5 and 6 while being placed on the storage cassette 3 And the orientation can be appropriately specified, and the horizontal position of the hands 5 and 6 when reaching the delivery positions 5B and 6B based on the horizontally specified position and orientation of the transported object 2 which has been appropriately specified. It becomes possible to appropriately correct the position and orientation of the direction. Therefore, in the present embodiment, even if the transported object 2 is greatly warped, the horizontal position and orientation of the transported object 2 placed on the storage cassette 3 are appropriately corrected before being transported to the processing device 4. It becomes possible to appropriately correct the horizontal position and orientation of the hands 5 and 6 in order to place the object 2.

In this embodiment, a detection mechanism 26 for detecting the transport target object 2 mounted on the hand 5 and a detection mechanism 27 for detecting the transport target object 2 mounted on the hand 6 are individually provided, and the detection mechanism 26 is provided. And the detection mechanism 27 are attached to the main body 9 in a state of being overlapped in the vertical direction. Therefore, in the present embodiment, even if the arm 8 is contracted while the transport object 2 is mounted on the hand 6, the control unit 25 detects the transport target 2 mounted on the hand 5 when the detection mechanism 26 detects it. The first position data, which is the data of the position of the hand 5 in the front-rear direction, and the left-right direction of one end surface of the conveyed object 2 in the left-right direction, which is detected by the detection mechanism 26 when the hand 5 moves to the first measurement position. The second position data, which is the data of the position of, and the data of the position in the left-right direction of one end surface of the conveyed object 2 in the left-right direction, which is detected by the detection mechanism 26 when the hand 5 moves to the second measurement position. It becomes possible to appropriately acquire the third position data.

Further, even if the arm 7 is contracted while the transport object 2 is mounted on the hand 5, the control unit 25 of the hand 6 when the detection mechanism 27 detects the transport target 2 mounted on the hand 6. First position data, which is position data in the front-rear direction, and left-right position data of one end surface of the conveyed object 2 in the left-right direction, which is detected by the detection mechanism 27 when the hand 6 moves to the first measurement position. Second position data, and third position data, which is data on the left-right position of one end surface of the conveyed object 2 in the left-right direction, which is detected by the detection mechanism 27 when the hand 6 moves to the second measurement position. And can be obtained properly.

(Modification example of industrial robot)
FIG. 5 is a plan view of the industrial robot 1 according to another embodiment of the present invention. FIG. 6 is a side view of the industrial robot 1 shown in FIG. In addition, in FIGS. 5 and 6, the same reference numerals are given to the same configurations as those described above.

In the above-described embodiment, the arm 7 and the arm 8 are arranged at the same position in the vertical direction and are adjacent to each other in the horizontal direction. However, as shown in FIGS. May be arranged at positions offset from each other in the vertical direction. In this case, the main body 9 has an arm support 57 that supports the base ends of the arms 7 and 8 and can be raised and lowered, a support frame 58 that supports the arm support 57 so that it can be raised and lowered, and a lower end portion of the main body 9. It is provided with a swivel frame 59 constituting the above.

As shown in FIG. 6, the base end side of the arm 7 is rotatably connected to the upper end side of the arm support 57, and the base end side of the arm 8 is rotatably connected to the lower end side of the arm support 57. ing. The support frame 58 holds the hands 5, 6 and the arms 7, 8 so as to be able to move up and down via the arm support 57. The lower end of the support frame 58 is fixed to the swivel frame 59. The swivel frame 59 is connected to the base 60 so that it can rotate in the vertical direction as the axial direction of rotation. The base 60 can move linearly in the left-right direction with respect to the base 11.

The arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the arm support 57 while the hand 5 faces a certain direction. That is, the arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the main body 9 while the hand 5 faces a certain direction. The arm drive mechanism 21 expands and contracts the arm 8 so that the hand 6 moves linearly with respect to the arm support 57 while the hand 6 faces a certain direction. That is, the arm drive mechanism 21 expands and contracts the arm 8 so that the hand 6 moves linearly with respect to the main body 9 while the hand 6 faces a certain direction.

The rotating mechanism 22 rotates the swivel frame 59 with respect to the base 60 with the vertical direction as the axial direction of rotation. That is, the rotation mechanism 22 rotates the main body 9 with respect to the base 60 with the vertical direction as the axial direction of rotation. The elevating mechanism 23 elevates and elevates the arm support 57 with respect to the support frame 58. The horizontal movement mechanism 24 linearly moves the base 60 in the left-right direction with respect to the base 11. That is, the horizontal movement mechanism 24 linearly moves the main body 9 in the left-right direction together with the base 60.

The detection mechanisms 26 and 27 are attached to the arm support 57 of the main body 9. Specifically, the detection mechanisms 26 and 27 are fixed to a sensor fixing member (not shown) fixed to the arm support 57, and the detection mechanisms 26 and 27 are attached to the main body 9 via the sensor fixing member. ing. Further, the detection mechanism 26 and the detection mechanism 27 are attached to the main body 9 in a state of being overlapped in the vertical direction.

Further, in the detection mechanism 26, when the robot 1 performs the first operation M11, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction is a light emitting unit 30 of the detection mechanism 26 and a light receiving unit of the detection mechanism 26. It is arranged at a position passing between the 31 and the 31. In the detection mechanism 27, when the robot 1 performs the first operation M21, one end surface of the object to be transported 2 mounted on the hand 6 in the left-right direction is a light emitting unit 30 of the detection mechanism 27 and a light receiving unit 31 of the detection mechanism 27. It is placed in a position that passes between.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be carried out without changing the gist of the present invention.

In the above-described embodiment, when the robot 1 performs the first operation M11, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction passes between the light emitting unit 30 and the light receiving unit 31. In addition to the detection mechanism 26 arranged at the position, when the robot 1 performs the first operation M11, the other end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction is the light emitting unit 30 and the light receiving unit 31. A detection mechanism 26 arranged at a position passing between them may be provided.

In this case, when the robot 1 performs the first operation M11, the presence or absence of chipping at both ends of the object to be transported 2 mounted on the hand 5 in the left-right direction by using the two detection mechanisms 26. And it becomes possible to detect the size of the chip. In this case, the light receiving unit 31 of the detection mechanism 26 additionally installed does not have to be a line sensor. Further, in this case, the detection mechanism 26 additionally installed may be a reflection type detection mechanism.

Similarly, when the robot 1 performs the first operation M21, the robot 1 is positioned so that one end surface of the object to be transported 2 mounted on the hand 6 in the left-right direction passes between the light emitting unit 30 and the light receiving unit 31. In addition to the detected detection mechanism 27 that is arranged, when the robot 1 performs the first operation M21, the other end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction is between the light emitting unit 30 and the light receiving unit 31. A detection mechanism 27 arranged at a passing position may be provided.

In this case, when the robot 1 performs the first operation M21, two detection mechanisms 27 are used to determine whether or not both ends of the object to be transported 2 mounted on the hand 6 are chipped in the left-right direction and whether or not the robot 1 is chipped. It becomes possible to detect the size. In this case, the light receiving unit 31 of the detection mechanism 27 additionally installed does not have to be a line sensor. Further, in this case, the detection mechanism 27 additionally installed may be a reflection type detection mechanism.

In the above-described embodiment, the number of detection mechanisms included in the robot 1 may be one. In this case, when the robot 1 performs the first operation M11, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction is between the light emitting unit 30 and the light receiving unit 31 of the detection mechanism. When the robot 1 performs the first operation M21, one end surface of the object 2 to be transported mounted on the hand 6 in the left-right direction is between the light emitting unit 30 and the light receiving unit 31 of the detection mechanism. Pass. Further, in this case, when the robot 1 performs the first operation M11, the arm 8 is extended or contracted in a state where the transfer object 2 is not mounted on the hand 6, and the robot 1 is extended. When the first operation M21 is performed, the arm 7 is extended or contracted in a state where the transfer target 2 is not mounted on the hand 5.

In the above-described embodiment, the light receiving unit 31 may be an area sensor in which a plurality of light receiving elements are two-dimensionally arranged. Even in this case, the detection mechanism 26 can detect the position of one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction in the left-right direction. Similarly, the detection mechanism 27 can detect the position of one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction in the left-right direction.

In the above-described embodiment, the number of hands and arms included in the robot 1 may be one. For example, the robot 1 may include only one hand 5 and one arm 7. In this case, the detection mechanism 27 becomes unnecessary. When the number of hands and arms included in the robot 1 is one, for example, the robot 1 rotates the first arm portion 16 with respect to the main body portion 9 instead of the arm drive mechanism 20. A 1-arm drive mechanism, a second arm drive mechanism that rotates the second arm 17 with respect to the first arm 16, and a hand drive mechanism that rotates the hand 5 with respect to the second arm 17. May be provided. Further, in this case, the robot 1 may not include, for example, the rotation mechanism 22 and the horizontal movement mechanism 24.

When the number of hands and arms included in the robot 1 is one, the number of arm portions included in the arm 7 may be three or more. For example, as described in Japanese Patent Application Laid-Open No. 2019-176029, the number of arm portions included in the arm 7 may be three. In this case, the robot 1 may not include, for example, the rotation mechanism 22 and the horizontal movement mechanism 24.

In the above-described embodiment, the number of forks 15 included in the hands 5 and 6 may be three or more. Further, in the above-described embodiment, the accommodating cassette 3 and the processing device 4 may be arranged on the front side of the robot 1. Further, in the above-described embodiment, the object to be transported 2 may be a panel other than a large panel handled in a semiconductor package manufacturing line using PLP.

1 Robot (industrial robot)
2 Object to be transported 3 Storage cassette (receiver)
4 Processing device (delivery section)
5 hands (1st hand)
6 hands (2nd hand)
7 arm (1st arm)
8 arm (2nd arm)
9 Main body 20, 21 Arm drive mechanism 22 Rotation mechanism 24 Horizontal movement mechanism 25 Control unit 26 Detection mechanism (first detection mechanism)
27 Detection mechanism (second detection mechanism)
30 Light emitting part 31 Light receiving part X Front-back direction Y Left-right direction

Claims (4)

In an industrial robot that transports a rectangular or square object to be transported,
A hand on which the object to be transported is mounted, an arm that is rotatably connected to the tip side and expands and contracts in the horizontal direction, and a main body portion that is rotatably connected to the base end side of the arm. It is provided with an optical detection mechanism attached to the main body and a control unit for controlling the industrial robot.
The receiving position is the position of the hand when the object to be transported, which is placed in a predetermined receiving portion, is mounted on the hand with the arm extended and received, and the hand is received with the arm extended. Assuming that the position of the hand when the object to be transported mounted on the vehicle is delivered to a predetermined delivery portion is set as the delivery position,
The first operation, which is an operation when the arm contracts so that the hand that has received the object to be conveyed at the receiving position approaches the main body, and the operation in which the object to be conveyed is mounted after the first operation. The second operation, which is the operation when the arm extends until the hand moves to the delivery position, is performed.
When the industrial robot performs the first operation, the hand moves linearly with respect to the main body in a certain direction.
The detection mechanism is a transmissive type having a light receiving portion composed of a line sensor or an area sensor and a light emitting portion arranged to face the light receiving portion with a predetermined distance between the light receiving portion in the vertical direction. It is a detection mechanism,
When the moving direction of the hand when the industrial robot performs the first operation is the front-rear direction, and the direction orthogonal to the front-back direction and the up-down direction is the left-right direction.
When the industrial robot performs the first operation, one end surface of the object to be transported in the left-right direction passes between the light receiving portion and the light emitting portion.
The control unit includes first position data, which is data on the position of the hand in the front-rear direction when the detection mechanism detects the object to be conveyed when the industrial robot performs the first operation, and the first position data. Data on the horizontal position of one end surface of the transport object in the left-right direction, which is detected by the detection mechanism when the hand moves to a predetermined first measurement position after the detection mechanism detects the transport object. The second position data, and the left-right direction of one end surface of the conveyed object in the left-right direction, which is detected by the detection mechanism when the hand that has passed the first measurement position moves to a predetermined second measurement position. The third position data, which is the data of the position of, is acquired, and when the industrial robot performs the second operation, it is based on the first position data, the second position data, and the third position data. An industrial robot that corrects the horizontal position and orientation of the hand when it reaches the delivery position. As the hand, two hands, a first hand and a second hand, are provided, and as the first arm as the arm to which the first hand is connected and the arm to which the second hand is connected. The first detection as the detection mechanism for detecting the second arm, the one main body to which the first arm and the second arm are connected, and the object to be conveyed mounted on the first hand. A mechanism and a second detection mechanism as the detection mechanism for detecting the conveyed object mounted on the second hand are provided.
The transport target mounted on the first hand and the transport target mounted on the second hand are displaced in the vertical direction.
The industrial robot according to claim 1, wherein the first detection mechanism and the second detection mechanism are attached to the main body in a vertically overlapping state. An arm drive mechanism that expands and contracts the arm so that the hand moves linearly with respect to the main body in a certain direction, a rotation mechanism that rotates the main body, and the main body in the left-right direction. Equipped with a horizontal movement mechanism to move the part
The control unit has the arm drive mechanism and the rotation mechanism based on the first position data, the second position data, and the third position data when the industrial robot performs the second operation. The industrial robot according to claim 1 or 2, wherein the robot controls the robot and the horizontal movement mechanism to correct the horizontal position and orientation of the hand when reaching the delivery position. A hand on which a rectangular or square object to be transported is mounted, an arm in which the hand is rotatably connected to the tip side and expands and contracts in the horizontal direction, and a base end side of the arm are rotatable. It is provided with a main body connected to the main body and an optical detection mechanism attached to the main body.
The receiving position is the position of the hand when the object to be transported, which is placed in a predetermined receiving portion, is mounted on the hand with the arm extended and received, and the hand is received with the arm extended. Assuming that the position of the hand when the object to be transported mounted on the vehicle is delivered to a predetermined delivery portion is set as the delivery position,
The first operation, which is an operation when the arm contracts so that the hand that has received the object to be conveyed at the receiving position approaches the main body, and the operation in which the object to be conveyed is mounted after the first operation. The second operation, which is the operation when the arm extends until the hand moves to the delivery position, is performed.
When the first operation is performed, the hand moves linearly with respect to the main body in a certain direction.
The detection mechanism is a transmissive type having a light receiving portion composed of a line sensor or an area sensor and a light emitting portion arranged to face the light receiving portion with a predetermined distance between the light receiving portion in the vertical direction. It is a detection mechanism,
When the moving direction of the hand when the first operation is performed is the front-back direction, and the direction orthogonal to the front-back direction and the up-down direction is the left-right direction,
When the first operation is performed, one end surface of the object to be transported in the left-right direction is a control method for an industrial robot that passes between the light receiving portion and the light emitting portion.
When performing the first operation, the first position data, which is the data of the position in the front-rear direction of the hand when the detection mechanism detects the object to be transported, and the detection mechanism have detected the object to be transported. After that, when the hand moves to a predetermined first measurement position, the second position data which is the data of the position in the left-right direction of one end surface in the left-right direction of the object to be conveyed, which is detected by the detection mechanism, and the first position data. Third position data, which is data on the left-right position of one end surface of the object to be conveyed in the left-right direction, which is detected by the detection mechanism when the hand that has passed through one measurement position moves to a predetermined second measurement position. And, when performing the second operation, the horizontal direction of the hand when reaching the delivery position based on the first position data, the second position data, and the third position data. A method of controlling an industrial robot, which comprises correcting the position and orientation of an industrial robot.

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