JP2021167045A - Industrial robot and control method of the same - Google Patents

Abstract

To provide an industrial robot which can properly correct a position and an orientation of a hand in a horizontal direction to place an object to be transported (a transported object) in a delivery part after a position and an orientation of the transported object placed in a receiving part is properly corrected in the horizontal direction even if large warpage occurs in the transported object.SOLUTION: An industrial robot 1 conducts a first operation that is an action performed when an arm 7 is contracted so that a hand 5, receiving an object to be transported (a transported object) 2 at a receiving part 3, moves close to a body part 9. A control unit of the industrial robot 1 acquires anteroposterior position data of the hand 5 recorded when each of two retro-reflective type sensors 27 detects the transported object 2 during a preliminary operation being conducted by the industrial robot 1 before the transport object 2 is received at the receiving part 3 and further acquires lateral position data of the transport object 2 detected by a through-beam detection mechanism 26 in a state that the industrial robot 1 has completed the first operation.SELECTED DRAWING: Figure 1

Description

The present invention relates to an industrial robot that conveys a rectangular or square object to be conveyed. The present invention also relates to a method for controlling such an industrial robot.

Conventionally, an industrial robot that conveys a rectangular workpiece such as a glass substrate for a liquid crystal display is known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 carries out, for example, a work from an accommodating cassette and conveys the work to a predetermined processing device. This industrial robot includes a hand on which a work is mounted, an articulated arm in which the hand is rotatably connected to the tip side, and a base in which the base end side of the articulated arm is rotatably connected. ing. Further, this industrial robot includes an arm drive mechanism for expanding and contracting an articulated arm, a rotation mechanism for rotating a base, and a movement mechanism for moving the base in the horizontal direction. The arm drive mechanism expands and contracts the arm so that the hand moves linearly with the hand facing a certain direction with respect to the base.

In the industrial robot described in Patent Document 1, the hand includes two mounting portions on which the workpiece is mounted. An alignment sensor is attached to the upper surface on the tip side of the two mounting portions. The alignment sensor is a diffuse reflection type optical sensor (photoelectric sensor). The alignment sensor includes a light emitting unit that emits light toward the lower surface of the work and a light receiving unit that receives the light reflected by the lower surface of the work. Assuming that the movement direction of the hand that moves linearly when the arm expands and contracts is the front-rear direction, the alignment sensor detects one end surface of the work housed in the storage cassette in the front-rear direction.

In the industrial robot described in Patent Document 1, before the work housed in the storage cassette is mounted on the hand, one end surface of the work housed in the storage cassette in the front-rear direction is detected by the alignment sensor, and the alignment sensor is used. Based on the detection result, the position and orientation (inclination in the horizontal plane) of the work to be accommodated in the accommodating cassette in the front-rear direction are specified. Further, based on the position and orientation of the specified work in the front-rear direction, the position and orientation of the hand in the front-rear direction, which is taught in advance, are corrected, and the work is mounted on the hand whose position and orientation in the front-rear direction are corrected. ..

Japanese Unexamined Patent Publication No. 2006-272526

In recent years, a method of manufacturing a plurality of semiconductor packages at once by arranging a large number of chips on a large rectangular or square panel (panel level packaging (PLP)) has begun to spread, and a semiconductor package using PLP has begun to spread. Industrial robots are beginning to be used in the production lines of. PLP includes a process of coating (sealing) the upper surface of a panel on which a large number of chips are placed with resin, and a panel handled in a semiconductor package manufacturing line using PLP has a large warp. Is likely to occur.

Further, in the industrial robot described in Patent Document 1, the processing apparatus is corrected to an appropriate position and orientation in the front-back and left-right directions (that is, the horizontal position) and the orientation of the work placed in the accommodation cassette. In order to place the work in, the horizontal position and orientation of the hand may be corrected when the work is carried out from the accommodating cassette and carried into the processing device. In this case, for example, a sensor for detecting the position of the work carried out from the storage cassette in the left-right direction is attached to the base.

Further, in this case, in order to correct the position and orientation of the work placed in the storage cassette in the front-rear direction, the work placed in the storage cassette is based on the detection result of the alignment sensor before being mounted on the hand. After correcting the position and orientation of the hand in the front-back direction, the work is mounted on the corrected hand and the position of the work in the left-right direction is corrected based on the detection result of the sensor attached to the base. When the workpiece mounted on the hand is carried into the processing device and placed, the position of the hand in the left-right direction is corrected.

In the industrial robot described in Patent Document 1, the inventor of the present application carries out, for example, a transport object having a large warp, such as a panel handled in a semiconductor package manufacturing line using PLP, from a storage cassette. When the operation of carrying the object into the processing device is performed, the horizontal position and orientation of the object to be transported placed in the storage cassette are corrected, and then the object to be transported is placed in the processing device in the horizontal direction of the hand. We are considering correcting the position and orientation.

However, when the alignment sensor attached to the upper surface of the mounting portion of the hand is a diffusion reflection type optical sensor as in the industrial robot described in Patent Document 1, a large warp occurs in the object to be conveyed. If this is the case, the vertical distance between the alignment sensor and the end face of the object to be transported (end face in the front-rear direction) becomes unstable, and the light emitted from the alignment sensor and reflected at a location other than the end surface of the object to be transported is the alignment sensor. It has been clarified by the examination of the inventor of the present application that there is a possibility that the light may be first incident on the sensor. That is, when the alignment sensor is a diffuse reflection type optical sensor, if the object to be transported has a large warp, the alignment sensor cannot appropriately detect the end face of the object to be transported in the front-rear direction. Has been clarified by the examination of the inventor of the present application.

If the alignment sensor cannot properly detect the end face of the object to be transported in the front-rear direction, the front and rear of the hand will be based on the detection result of the alignment sensor before the object to be transported placed in the storage cassette is mounted on the hand. It becomes impossible to properly correct the position and orientation of the direction. Therefore, it becomes impossible to appropriately correct the horizontal position and orientation of the transport object placed on the storage cassette before placing the transport object on the processing device.

Therefore, an object of the present invention is that in an industrial robot that carries out a transport object from a predetermined receiving section and carries the transport object into a predetermined delivery section, even if the transport target has a large warp, the receiving section It is possible to appropriately correct the horizontal position and orientation of the hand in order to properly correct the horizontal position and orientation of the object to be transported placed on the delivery unit and then place the object to be transported on the delivery section. It is to provide industrial robots.

Another object of the present invention is that in an industrial robot that carries out a transport object from a predetermined receiving section and carries the transport object into a predetermined delivery section, even if the transport object is greatly warped, the receiving section is It is possible to properly correct the horizontal position and orientation of the hand to be transported in order to properly correct the horizontal position and orientation of the object to be transported placed in the delivery section and then place the object to be transported in the delivery section. The purpose is to provide a control method for industrial robots.

In order to solve the above problems, the industrial robot of the present invention is an industrial robot that conveys a rectangular or square object to be conveyed, in which a hand on which the object to be conveyed is mounted and a hand on the tip side. An arm that is rotatably connected to and expands and contracts in the horizontal direction, a main body that is rotatably connected to the base end side of the arm, an optical first detection mechanism that is attached to the main body, and a hand. It is equipped with two optical second detection mechanisms to be used and a control unit that controls an industrial robot, and a transport object placed in a predetermined receiving unit is mounted on the hand with the arm extended. If the position of the hand when receiving is set as the receiving position and the position of the hand when delivering the object to be transported mounted on the hand to the predetermined delivery part is set as the delivery position while the arm is extended, the transfer is performed at the receiving position. The receiving operation, which is the operation when receiving the object, the first operation, which is the operation when the arm contracts so that the hand receiving the transported object at the receiving position approaches the main body, and the transport target after the first operation. The second operation, which is an operation when the arm extends until the hand on which the object is mounted moves to the delivery position, and the preliminary operation, which is an operation before the receiving operation, are performed, and the first detection mechanism is a line sensor or A transmission having a first light receiving part made of an area sensor and a first light emitting part arranged to face the first light receiving part with a predetermined distance between the first light receiving part in the vertical direction. It is a type detection mechanism, and the second detection mechanism has a predetermined space between the second light receiving part and the second light emitting part and the second light receiving part and the second light emitting part in the vertical direction. It is a retroreflecting type detection mechanism having a second light receiving unit and a retroreflecting plate arranged to face the second light emitting unit in the state, or a second light receiving unit and a second light receiving unit in the vertical direction. It is a transmission type detection mechanism having a second light emitting part which is arranged to face the second light receiving part with a predetermined space between the parts and the hand, and the hand is an industrial robot performing the first operation. When doing so, it moves linearly with the main body facing a certain direction, and the direction of movement of the hand when the industrial robot performs the first movement is the front-back direction, which is orthogonal to the front-back direction and the up-down direction. Assuming that the direction of movement is the left-right direction, when the industrial robot completes the first operation, one end surface of the object to be conveyed in the left-right direction is arranged between the first light receiving portion and the first light emitting portion, and is used for industrial purposes. When the industrial robot makes a preliminary movement, the hand faces a certain direction with respect to the main body. The two second detection mechanisms move linearly in the front-rear direction in the state, and are arranged on the connecting portion side between the arm and the hand, rather than the mounting range of the hand, which is the range on which the object to be transported is mounted. At the same time, when the industrial robot performs the preliminary movement, it is arranged in a state of being spaced in the left-right direction. It moves to one side in the front-rear direction to the position detected by the second detection mechanism, and then two second detection mechanisms are moved to the main body side from the transported object detected by the two second detection mechanisms. The control unit moves to the other side in the front-rear direction to the position where it is arranged, and when the industrial robot performs a preliminary operation, the second detection mechanism of one of the two second detection mechanisms picks up the object to be conveyed. The first position data, which is the data of the position in the front-rear direction of the hand at the time of detection, and the front-back direction of the hand when the second detection mechanism of the other of the two second detection mechanisms detects the object to be conveyed. Transport detected by the first detection mechanism when the industrial robot performs the first operation or when the industrial robot completes the first operation while acquiring the second position data which is the position data. The third position data, which is the data of the position of one end surface of the object in the left-right direction in the left-right direction, is acquired, and when the industrial robot performs the receiving operation, it is based on the first position data and the second position data. , Corrects the position and orientation of the hand in the front-back direction when reaching the receiving position, and when the industrial robot performs the second operation, the hand when reaching the delivery position based on the third position data. When the position in the left-right direction of is corrected, or when the industrial robot reaches the delivery position based on the first position data, the second position data, and the third position data when performing the second operation. It is characterized by correcting the horizontal position and orientation of the hand.

Further, in order to solve the above problems, in the control method of the industrial robot of the present invention, a hand on which a transport object formed in a rectangular shape or a square shape is mounted and the hand are rotatably connected to the tip side. An arm that expands and contracts in the horizontal direction, a main body that is rotatably connected to the base end side of the arm, an optical first detection mechanism that is attached to the main body, and two optical types that are attached to the hand. The receiving position is the position of the hand when the object to be transported, which is placed in the predetermined receiving portion, is mounted on the hand with the arm extended and received, and the arm is extended. Assuming that the delivery position is the position of the hand when delivering the transport object mounted on the hand to the predetermined delivery portion in the state of being in the hand, the receiving operation which is the operation when receiving the transport object at the receiving position and the receiving position at the receiving position The first operation, which is an operation when the arm contracts so that the hand receiving the object to be conveyed approaches the main body, and after the first operation, the arm extends until the hand on which the object to be conveyed moves to the delivery position. The second operation, which is the operation at the time, and the preliminary operation, which is the operation before the receiving operation, are performed, and the first detection mechanism is the first light receiving unit composed of a line sensor or an area sensor and the first in the vertical direction. It is a transmission type detection mechanism having a first light emitting part which is arranged to face the first light receiving part with a predetermined space between the light receiving part and the second detecting mechanism. Arranged facing the second light receiving part and the second light emitting part with a predetermined distance between the light receiving part and the second light emitting part and the second light receiving part and the second light emitting part in the vertical direction. It is a retroreflecting type detection mechanism having a retroreflecting plate, or a second light receiving portion with a predetermined distance between the second light receiving portion and the second light receiving portion in the vertical direction. It is a transmission type detection mechanism having a second light emitting part arranged opposite to the light receiving part, and the hand is linearly oriented in a certain direction with respect to the main body when the first operation is performed. Assuming that the moving direction of the hand when moving and the first movement is performed is the front-back direction and the direction orthogonal to the front-back direction and the up-down direction is the left-right direction, when the first movement is completed, the left and right of the object to be transported are left and right. One end surface of the direction is arranged between the first light receiving part and the first light emitting part, and when the preliminary operation is performed, the hand is straight in the front-rear direction while facing a certain direction with respect to the main body part. The two second detection mechanisms move in a horizontal direction, and the two second detection mechanisms are larger than the placement range of the hand, which is the range in which the object to be transported is placed. It is arranged on the connecting portion side between the robot and the hand, and is arranged in a state of being spaced in the left-right direction when the preliminary operation is performed. In the preliminary operation, the hand is arranged on the receiving portion. The object to be transported moves to a position detected by the two second detection mechanisms in one direction in the direction, and then two second detections are made more than the objects to be conveyed detected by the two second detection mechanisms. It is a control method of an industrial robot that moves to the other side in the front-rear direction to a position where the mechanism is arranged on the main body side, and is one of two second detection mechanisms when the industrial robot performs a preliminary operation. The first position data, which is the data of the position in the front-rear direction of the hand when one of the second detection mechanisms detects the object to be conveyed, and the second detection mechanism of the other of the two second detection mechanisms are the objects to be conveyed. A state in which the second position data, which is the data of the position in the front-back direction of the hand when an object is detected, is acquired, and the industrial robot performs the first operation or the industrial robot completes the first operation. Then, when the third position data, which is the data of the position in the left-right direction of one end surface in the left-right direction of the object to be transported detected by the first detection mechanism, is acquired, and the industrial robot performs the receiving operation, the first Based on the position data and the second position data, the position and orientation of the hand in the front-rear direction when reaching the receiving position are corrected, and when the industrial robot performs the second operation, the third position data is used. Based on this, the position in the left-right direction of the hand when reaching the delivery position is corrected, or when the industrial robot performs the second operation, the first position data, the second position data, and the third position data are used. It is characterized in that the horizontal position and orientation of the hand when reaching the delivery position are corrected based on the above.

In the present invention, when the industrial robot performs a preliminary operation, the first position data which is the data of the position in the front-rear direction of the hand when one of the second detection mechanisms detects the object to be conveyed, and the second of the other. When the detection mechanism acquires the second position data which is the data of the position in the front-rear direction of the hand when the object to be transported is detected, and the industrial robot performs the first operation or the industrial robot is the first. In the state where the operation is completed, the third position data which is the data of the position in the left-right direction of one end surface in the left-right direction of the object to be conveyed detected by the first detection mechanism is acquired, but the first detection mechanism has acquired the third position data. It is a transmission type detection mechanism, and the second detection mechanism is a retroreflection type detection mechanism or a transmission type detection mechanism. Therefore, in the present invention, even if a large warp occurs in the object to be conveyed, the first position data, the second position data, and the third position data can be appropriately acquired by the first detection mechanism and the second detection mechanism. It will be possible.

Further, in the present invention, the two second detection mechanisms are arranged so as to be spaced apart from each other in the left-right direction when the industrial robot performs the preliminary movement. In the preliminary movement, the hand is placed on the receiving portion. The placed object to be transported moves to one side in the front-rear direction to a position detected by the two second detection mechanisms, and then 2 than the object to be transported detected by the two second detection mechanisms. Since the second detection mechanisms move to the other side in the front-rear direction to the position where they are arranged on the main body side, the transport target placed on the receiving unit is based on the appropriate first position data and second position data. It becomes possible to appropriately identify the position and orientation of an object in the front-rear direction. Further, in the present invention, when the industrial robot completes the first operation, one end surface of the object to be transported in the left-right direction is a first light receiving portion of the first detection mechanism attached to the main body of the industrial robot. Since it is arranged between the first light emitting units, it is possible to appropriately specify the position of the object to be conveyed mounted on the hand in the left-right direction based on the appropriate third position data.

Further, in the present invention, when the industrial robot performs the receiving operation, the position and orientation of the hand in the front-rear direction when reaching the receiving position are corrected based on the first position data and the second position data. In addition, when the industrial robot performs the second operation, the position in the left-right direction of the hand when reaching the delivery position is corrected based on the third position data, so that the object to be transported is greatly warped. Even so, based on the properly identified front-back position and orientation of the object to be transported, the front-back position and orientation of the hand when reaching the receiving position is appropriately corrected and properly specified. Based on the position of the object to be transported in the left-right direction, it is possible to appropriately correct the position of the hand in the left-right direction when reaching the delivery position.

Alternatively, in the present invention, when the industrial robot performs the second operation, the horizontal position of the hand when reaching the delivery position based on the first position data, the second position data, and the third position data. And because the orientation is corrected, even if there is a large warp in the object to be transported, the horizontal position of the hand when reaching the delivery position based on the horizontally identified position and orientation of the object to be transported. It becomes possible to appropriately correct the position and orientation of the direction.

As described above, in the present invention, even if the object to be transported has a large warp, it is possible to appropriately specify the position and orientation of the object to be transported in the front-rear direction placed on the receiving portion, and the hand. It becomes possible to appropriately specify the position of the object to be transported mounted on the vehicle in the left-right direction. Further, in the present invention, the position and orientation in the front-rear direction of the hand when reaching the receiving position are appropriately corrected and appropriately based on the position and orientation in the front-rear direction of the appropriately specified object to be transported. Based on the left-right position of the identified transport object, it becomes possible to appropriately correct the left-right position of the hand when reaching the delivery position, or the appropriately identified transport object. Based on the horizontal position and orientation of the hand, it is possible to appropriately correct the horizontal position and orientation of the hand when reaching the delivery position. Therefore, in the present invention, even if the object to be transported is greatly warped, the object to be transported is placed in the delivery section after the horizontal position and orientation of the object to be transported placed in the receiving portion are appropriately corrected. Therefore, it becomes possible to appropriately correct the horizontal position and orientation of the hand.

In the present invention, the second detection mechanism is preferably a regression reflection type detection mechanism. With this configuration, the regression reflector is arranged to face the second light receiving portion and the second light emitting portion with a predetermined interval in the vertical direction, so that the second detection mechanism is a transmission type. Compared with the case of the detection mechanism, the second detection mechanism can be miniaturized in the vertical direction.

In the present invention, the industrial robot includes, for example, two hands, a first hand and a second hand, as well as a first arm and a second hand as an arm to which the first hand is connected. A second arm as an arm to be connected and one main body portion to which the first arm and the second arm are connected are provided, and two second detection mechanisms are attached to the first hand, and a second arm is attached. Two second detection mechanisms are attached to the hand, and the transport object mounted on the first hand and the transport target mounted on the second hand are displaced in the vertical direction, and the first arm is displaced. When the first light receiving unit and the first light emitting unit, in which the object to be transported mounted on the first hand is arranged between them when the industrial robot completes the first operation when contracting, and the second arm contracts. When the industrial robot completes the first operation of And the first light emitting part.

In this case, even if the object to be transported is transported by the two hands, the first hand and the second hand, the object to be transported and the first hand mounted on the first hand are used by using the common first detection mechanism. Since it is possible to detect the object to be transported mounted on the two hands, it is possible to simplify the configuration of the industrial robot.

In the present invention, the industrial robot is, for example, an arm drive mechanism that expands and contracts the arm so that the hand moves linearly with respect to the main body in a certain direction, and a rotation mechanism that rotates the main body. And a horizontal movement mechanism that moves the main body in the left-right direction, and the control unit moves horizontally with the arm drive mechanism and rotation mechanism based on the first position data, the second position data, and the third position data. It controls the mechanism and corrects the horizontal position and orientation of the hand.

As described above, in the present invention, in the industrial robot that carries out the object to be transported from the predetermined receiving unit and carries the object to be transported to the predetermined delivery unit, even if the object to be transported is greatly warped, it is received. It is possible to properly correct the horizontal position and orientation of the hand to be transported in order to properly correct the horizontal position and orientation of the object to be transported placed on the unit and then place the object to be transported on the delivery unit. become.

It is a top view of the industrial robot which concerns on embodiment of this invention. It is a rear view of the industrial robot shown in FIG. It is a side view for demonstrating the structure of the 2nd detection mechanism shown in FIG. It is a block diagram for demonstrating the structure of the industrial robot shown in FIG. It is a top view for demonstrating the operation of the industrial robot shown in FIG. It is a top view of the industrial robot which concerns on other embodiment of this invention. It is a side view of the industrial robot shown in FIG.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Structure of industrial robot)
FIG. 1 is a plan view of the industrial robot 1 according to the embodiment of the present invention. FIG. 2 is a rear view of the industrial robot 1 shown in FIG. FIG. 3 is a side view for explaining the configuration of the detection mechanism 27 shown in FIG. FIG. 4 is a block diagram for explaining the configuration of the industrial robot 1 shown in FIG.

The industrial robot 1 of this embodiment (hereinafter referred to as “robot 1”) is a horizontal articulated robot for transporting a predetermined transport object 2. The object 2 to be transported in this embodiment is a large panel handled in a semiconductor package manufacturing line using PLP. The object to be transported 2 is formed in a rectangular or square flat plate shape. The robot 1 transports the transport object 2 from, for example, the storage cassette 3 in which a plurality of transport objects 2 are housed to the processing device 4 that performs a predetermined process on the transport target 2.

That is, for example, the robot 1 carries out the transport object 2 from the accommodation cassette 3 and also carries the transport object 2 carried out from the accommodation cassette 3 into the processing device 4. A plurality of objects to be transported 2 are accommodated in the accommodating cassette 3 so as to be overlapped with each other at intervals in the vertical direction. The accommodating cassette 3 of this embodiment is a receiving unit in which the robot 1 receives the object to be transported 2, and the processing device 4 is a delivery unit in which the robot 1 delivers the object to be transported 2.

The robot 1 may transport the object 2 to be transported from the processing device 4 to the storage cassette 3. That is, the robot 1 may carry out the transport target object 2 from the processing device 4 and also carry the transport target object 2 carried out from the processing device 4 into the storage cassette 3. In this case, the processing device 4 serves as a receiving unit for the robot 1 to receive the transported object 2, and the accommodating cassette 3 serves as a delivery unit for the robot 1 to deliver the transported object 2.

The robot 1 includes two hands 5 and 6 on which the object to be transported 2 is mounted, an arm 7 to which the hand 5 is rotatably connected to the tip side, and an arm 8 to which the hand 6 is connected to the tip side. , The main body 9 in which the base ends of the arms 7 and 8 are rotatably connected, the case body 10 in which the lower part of the main body 9 is housed, and the main body 9 and the case 10 can be moved in the horizontal direction. It is equipped with a base 11 that supports the robot. The hand 5 of this embodiment is the first hand, and the hand 6 is the second hand. Further, the arm 7 of this embodiment is a first arm, and the arm 8 is a second arm.

The hands 5 and 6 include a hand base 14 rotatably connected to the tip end side of the arms 7 and 8 and a plurality of linear forks 15 on which the transport object 2 is placed on the upper surface side. .. The hands 5 and 6 of this embodiment include two forks 15. The two forks 15 project from the hand base 14 in the same horizontal direction. Further, the two forks 15 are arranged in parallel with each other at intervals. The fork 15 of the hand 5 and the fork 15 of the hand 6 project in the same direction.

The fork 15 of the hand 5 and the fork 15 of the hand 6 are displaced in the vertical direction. That is, the transport target 2 mounted on the hand 5 and the transport target 2 mounted on the hand 6 are displaced in the vertical direction. In this embodiment, the fork 15 of the hand 5 is arranged above the fork 15 of the hand 6. The object to be transported 2 is placed in a range (part) of the fork 15 excluding the base end side part (root side part). That is, the range of the fork 15 excluding the base end side portion is the mounting range 15a of the hands 5 and 6, which is the range in which the transport object 2 is mounted.

Arms 7 and 8 are articulated arms that expand and contract in the horizontal direction. The arms 7 and 8 are composed of two arm portions, a first arm portion 16 and a second arm portion 17. The base end side of the first arm portion 16 is rotatably connected to the main body portion 9. The base end side of the second arm portion 17 is rotatably connected to the tip end side of the first arm portion 16. Hands 5 and 6 are rotatably connected to the tip end side of the second arm portion 17.

The first arm portion 16 is arranged above the main body portion 9. The second arm portion 17 is arranged above the first arm portion 16. The hands 5 and 6 are arranged above the second arm portion 17. The base end side of the first arm portion 16 of the arm 7 and the base end side of the first arm portion 16 of the arm 8 are connected to the main body portion 9 in a state of being adjacent to each other in the horizontal direction. Further, the arm 7 and the arm 8 are arranged adjacent to each other, and are arranged at the same position in the vertical direction.

In the horizontal direction, the distance between the rotation center of the first arm portion 16 with respect to the main body portion 9 and the rotation center of the second arm portion 17 with respect to the first arm portion 16 and the rotation center of the second arm portion 17 with respect to the first arm portion 16. The distance between the center of rotation and the center of rotation of the hands 5 and 6 with respect to the second arm portion 17 is equal. The arms 7 and 8 are arranged so that the tips of the hands 5 and 6 (the tip of the fork 15) extend away from the main body 9 and the tips of the hands 5 and 6 approach the main body 9. It can be expanded and contracted in the horizontal direction with the positions where 7 and 8 contract. When the expansion and contraction amounts of the arms 7 and 8 are equal, the fork 15 of the hand 5 and the fork 15 of the hand 6 overlap in the vertical direction. Further, at this time, the arms 7 and the arms 8 are arranged line-symmetrically when viewed from the vertical direction.

The main body 9 is rotatable with respect to the case body 10 with the vertical direction as the axial direction of rotation. Further, the main body 9 can be raised and lowered with respect to the case body 10. The case body 10 can move linearly in the horizontal direction with respect to the base 11. In the following description, the moving direction of the case body 10 with respect to the base 11 (Y direction in FIG. 1 and the like) is defined as the “horizontal direction”, and the X direction in FIG. do. Further, the X1 direction side of FIG. 1 and the like, which is one side in the front-rear direction, is referred to as the "front" side, and the X2 direction side of FIG. 1 and the like, which is the opposite side, is referred to as the "rear" side.

In this embodiment, for example, a plurality of storage cassettes 3 are arranged in the left-right direction. Further, for example, the plurality of accommodating cassettes 3 are arranged on one side of the robot 1 in the front-rear direction, and the processing device 4 is arranged on the other side of the robot 1 in the front-rear direction. For example, the plurality of storage cassettes 3 are arranged on the front side of the robot 1, and the processing device 4 is arranged on the rear side of the robot 1. Further, in the accommodation cassette 3 and the processing device 4, the end faces of the objects to be transported 2 mounted on the hands 5 and 6 are substantially parallel to the front-rear direction or the left-right direction.

Further, the robot 1 includes an arm drive mechanism 20 that expands and contracts the arm 7, an arm drive mechanism 21 that expands and contracts the arm 8, a rotation mechanism 22 that rotates the main body 9, and an elevating mechanism 23 that raises and lowers the main body 9. A horizontal movement mechanism 24 that moves the main body 9 in the horizontal direction together with the case body 10 and a control unit 25 that controls the robot 1 are provided. Further, the robot 1 includes a detection mechanism 26 for detecting the transport target object 2 mounted on the hands 5 and 6, and a detection mechanism 27 for detecting the transport target object 2 housed in the storage cassette 3. ing. The detection mechanism 26 of this embodiment is the first detection mechanism, and the detection mechanism 27 is the second detection mechanism.

The arm drive mechanism 20 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the arm 7 and the hand 5. The arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the main body 9 while the hand 5 faces a certain direction. Similar to the arm drive mechanism 20, the arm drive mechanism 21 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the arm 8 and the hand 6. The arm drive mechanism 21 expands and contracts the arm 8 so that the hand 6 moves linearly with respect to the main body 9 while the hand 6 faces a certain direction. The arm drive mechanisms 20 and 21 are electrically connected to the control unit 25. Specifically, the motors and the like of the arm drive mechanisms 20 and 21 are electrically connected to the control unit 25.

The rotation mechanism 22 rotates the main body 9 with respect to the case body 10 with the vertical direction as the axial direction of rotation. That is, the rotation mechanism 22 rotates the arms 7 and 8 together with the main body 9 with the vertical direction as the axial direction of rotation. The rotation mechanism 22 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the main body 9. The rotating mechanism 22 is housed in the case body 10. The rotating mechanism 22 is electrically connected to the control unit 25. Specifically, the motor of the rotating mechanism 22 and the like are electrically connected to the control unit 25.

The elevating mechanism 23 elevates and elevates the main body 9 with respect to the case body 10. That is, the elevating mechanism 23 raises and lowers the arms 7 and 8 together with the main body 9. Further, the elevating mechanism 23 raises and lowers the rotating mechanism 22 together with the main body 9. The elevating mechanism 23 is housed in the case body 10. The elevating mechanism 23 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the main body 9. The elevating mechanism 23 is electrically connected to the control unit 25. Specifically, the motor of the rotating mechanism 23 and the like are electrically connected to the control unit 25.

The horizontal movement mechanism 24 linearly moves the case body 10 in the left-right direction with respect to the base 11. That is, the horizontal movement mechanism 24 linearly moves the main body 9 and the arms 7 and 8 together with the case body 10 in the left-right direction. The horizontal movement mechanism 24 includes a motor as a drive source and a power transmission mechanism for transmitting the power of the motor to the case body 10. The horizontal movement mechanism 24 is electrically connected to the control unit 25. Specifically, the motor of the horizontal movement mechanism 24 and the like are electrically connected to the control unit 25.

The detection mechanism 26 is an optical detection mechanism (photoelectric sensor) having a light emitting unit 30 and a light receiving unit 31. Further, the detection mechanism 26 is a transmission type detection mechanism. The light emitting unit 30 is arranged to face the light receiving unit 31 in the vertical direction with a predetermined distance from the light receiving unit 31. The light receiving unit 31 is a line sensor. In the light receiving unit 31, a plurality of light receiving elements are arranged in a row in the left-right direction. The light emitting unit 30 of this embodiment is a first light emitting unit, and the light receiving unit 31 is a first light receiving unit. The optical axis of the light emitted from the light emitting unit 30 may be parallel to the vertical direction or may be slightly inclined with respect to the vertical direction.

The detection mechanism 26 is attached to the main body 9. Specifically, the detection mechanism 26 is fixed to the sensor fixing member 32 fixed to the main body 9, and the detection mechanism 26 is attached to the main body 9 via the sensor fixing member 32. The detection mechanism 26 rotates and moves up and down with respect to the case body 10 together with the main body portion 9. Further, the detection mechanism 26 moves in the left-right direction together with the main body 9. The detection mechanism 26 is electrically connected to the control unit 25.

The detection mechanism 27 is an optical detection mechanism (photoelectric sensor) having a light emitting unit 34 and a light receiving unit 35. Further, the detection mechanism 27 is a regression reflection type detection mechanism having a regression reflector 36 (see FIG. 3). The regression reflector 36 is arranged to face the light emitting unit 34 and the light receiving unit 35 with a predetermined distance between the light emitting unit 34 and the light receiving unit 35 in the vertical direction. For example, the regression reflector 36 is arranged above the light emitting unit 34 and the light receiving unit 35 with a predetermined distance between the light emitting unit 34 and the light receiving unit 35 in the vertical direction. The light emitting unit 34 of this embodiment is a second light emitting unit, and the light receiving unit 35 is a second light receiving unit.

The detection mechanism 27 is attached to the hands 5 and 6. In this embodiment, two detection mechanisms 27 are attached to the hand 5, and two detection mechanisms 27 are attached to the hand 6. That is, the robot 1 includes four detection mechanisms 27. The two detection mechanisms 27 attached to the hand 5 move together with the hand 5, and the two detection mechanisms 27 attached to the hand 6 move together with the hand 6. The detection mechanism 27 is electrically connected to the control unit 25.

Further, the detection mechanism 27 is attached to the fork 15. Specifically, the detection mechanism 27 is attached to each of the two forks 15 of the hand 5, and the detection mechanism 27 is attached to each of the two forks 15 of the hand 6. The detection mechanism 27 is attached to the upper surface side of the base end side portion of the fork 15, and is arranged closer to the hand base portion 14 than the mounting range 15a. That is, the detection mechanism 27 is arranged on the connecting portion side between the arms 7 and 8 and the hands 5 and 6 with respect to the mounting range 15a.

As described above, the robot 1 conveys the object 2 to be conveyed from the accommodating cassette 3 to the processing device 4. Further, as described above, in the arms 7 and 8, the positions where the arms 7 and 8 extend so that the tips of the hands 5 and 6 are separated from the main body 9 and the tips of the hands 5 and 6 approach the main body 9. The arms 7 and 8 can be expanded and contracted in the horizontal direction from the contracted position. In this embodiment, the arms 7 and 8 are in an extended state when the robot 1 receives the transfer object 2 from the accommodation cassette 3 and when the robot 1 delivers the transfer object 2 to the processing device 4. ..

The position of the hand 5 (see FIG. 1) when the object 2 to be transported placed on the storage cassette 3 is mounted on the hand 5 with the arm 7 extended and received is set as the receiving position 5A, and the arm 7 is extended. Assuming that the position of the hand 5 when delivering the transfer object 2 mounted on the hand 5 to the processing device 4 is the delivery position 5B, the robot 1 receives the transfer object 2 at the receiving position 5A. After the first operation M11, which is an operation when the arm 7 contracts so as to approach the main body 9, and the first operation M11, the arm 7 until the hand 5 on which the object to be transported 2 is mounted moves to the delivery position 5B. The second operation M12, which is the operation when the robot is extended, is performed. When the first operation M11 is completed, the turning radius (turning radius) of the main body 9 including the conveyed object 2, the hand 5 and the arm 7 mounted on the hand 5 becomes the minimum.

Similarly, a state in which the receiving position 6A is set as the receiving position 6A when the object 2 to be transported placed in the storage cassette 3 is mounted on the hand 6 with the arm 8 extended and received, and the arm 8 is extended. Assuming that the position of the hand 6 when delivering the transfer object 2 mounted on the hand 6 to the processing device 4 is the delivery position 6B, the robot 1 has the hand 6 that receives the transfer object 2 at the receiving position 6A as the main body. After the first operation M21, which is an operation when the arm 8 contracts toward the portion 9, and the first operation M21, the arm 8 extends until the hand 6 on which the object to be transported 2 is mounted moves to the delivery position 6B. The second operation M22, which is the operation at the time, is performed. When the first operation M21 is completed, the turning radius of the main body 9 including the object 2, the hand 6 and the arm 8 mounted on the hand 6 becomes the minimum.

As described above, the arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the main body 9 while the hand 5 faces a certain direction, and the arm drive mechanism 21 attaches the arm drive mechanism 21 to the main body 9. On the other hand, the arm 8 is expanded and contracted so that the hand 6 moves linearly while facing a certain direction. That is, the hand 5 moves linearly in a state of facing a certain direction with respect to the main body 9 when the robot 1 performs the first operation M11, and the hand 6 performs the first operation M21 by the robot 1. Occasionally, it moves linearly with respect to the main body 9 in a certain direction. Further, the hand 5 moves linearly in a state of facing a certain direction with respect to the main body 9 when the robot 1 performs the second operation M12, and the hand 6 performs the second operation M22 by the robot 1. Occasionally, it moves linearly with respect to the main body 9 in a certain direction.

In the present embodiment, since the accommodating cassette 3 is arranged on the front side of the robot 1 and the processing device 4 is arranged on the rear side of the robot 1, the hand 5 is used when the robot 1 performs the first operation M11. , When the robot 1 performs the second operation M12, it moves linearly in the front-rear direction. Further, the hand 6 moves linearly in the front-rear direction when the robot 1 performs the first operation M21 and when the robot 1 performs the second operation M22.

Specifically, when the robot 1 performs the first operation M11, the hand 5 linearly moves to the rear side with the tip of the fork 15 facing the front side, and the robot 1 performs the second operation M12. Occasionally, the fork 15 moves linearly to the rear side with the tip of the fork 15 facing the rear side. Further, when the robot 1 performs the first operation M21, the hand 6 moves linearly to the rear side with the tip of the fork 15 facing the front side, and when the robot 1 performs the second operation M22, the hand 6 moves. The fork 15 moves linearly to the rear side with the tip of the fork 15 facing the rear side.

The detection mechanism 26 is arranged behind the rear end of the conveyed object 2 mounted on the hand 5 arranged at the receiving position 5A. When the robot 1 performs the first operation M11, one end surface of the object to be transported 2 mounted on the hand 5 in the left-right direction passes between the light emitting unit 30 and the light receiving unit 31 of the detection mechanism 26. When the robot 1 completes the first operation M11, one end surface of the object to be transported 2 mounted on the hand 5 in the left-right direction is arranged between the light emitting unit 30 and the light receiving unit 31 (FIG. 5C). reference). That is, in the detection mechanism 26, when the robot 1 completes the first operation M11, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction is arranged between the light emitting unit 30 and the light receiving unit 31. It is placed in the same position. Even when the robot 1 performs the second operation M12, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction passes between the light emitting unit 30 and the light receiving unit 31.

Similarly, the detection mechanism 26 is arranged behind the rear end of the conveyed object 2 mounted on the hand 6 arranged at the receiving position 6A. When the robot 1 performs the first operation M21, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction passes between the light emitting unit 30 and the light receiving unit 31. When the robot 1 completes the first operation M21, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction is arranged between the light emitting unit 30 and the light receiving unit 31 (see FIG. 1). That is, in the detection mechanism 26, when the robot 1 completes the first operation M21, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction is arranged between the light emitting unit 30 and the light receiving unit 31. It is placed in the same position. Even when the robot 1 performs the second operation M22, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction passes between the light emitting unit 30 and the light receiving unit 31.

As described above, in the present embodiment, when the robot 1 completes the first operation M11 when the arm 7 contracts, the light receiving unit 31 and the light emitting unit 30 in which the conveyed object 2 mounted on the hand 5 is arranged between them. When the robot 1 completes the first operation M21 when the arm 8 contracts, the light receiving unit 31 and the light emitting unit 30 in which the conveyed object 2 mounted on the hand 6 is arranged between them are common. That is, when the robot 1 completes the first motion M11 when the arm 7 contracts, the transport object 2 mounted on the hand 5 when the robot 1 completes, and the first motion M21 when the arm 8 contracts. The transport object 2 mounted on the hand 6 is arranged between the same light receiving unit 31 and the light emitting unit 30.

Further, as described above, since the light receiving unit 31 is a line sensor in which a plurality of light receiving elements are arranged in a row in the left-right direction, the detection mechanism 26 hands the light receiving unit 31 when the robot 1 completes the first operation M11. It is possible to detect the position of one end surface of the object to be transported 2 mounted on the vehicle 2 in the left-right direction in the left-right direction. Similarly, when the robot 1 completes the first operation M21, the detection mechanism 26 makes it possible to detect the position of one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction in the left-right direction. ing.

Further, the robot 1 performs a receiving operation M13, which is an operation when receiving the conveyed object 2 at the receiving position 5A, and a preliminary operation M14, which is an operation before performing the receiving operation M13. Similarly, the robot 1 performs a receiving operation M23, which is an operation when receiving the conveyed object 2 at the receiving position 6A, and a preliminary operation M24, which is an operation before performing the receiving operation M23. The receiving operation M13 is performed before the first operation M11, and the receiving operation M23 is performed before the first operation M21.

When the robot 1 performs the receiving operation M13, the hand 5 linearly moves to the front side until the mounting range 15a of the fork 15 is arranged under the transport object 2 housed in the storage cassette 3. Ascend and receive the object 2 to be transported. When the robot 1 performs the receiving operation M23, the hand 6 linearly moves to the front side until the mounting range 15a of the fork 15 is arranged under the transport object 2 housed in the storage cassette 3. Ascend and receive the object 2 to be transported.

When the robot 1 performs the preliminary operation M14, the hand 5 moves linearly in the front-rear direction while facing a certain direction with respect to the main body portion 9. That is, when the robot 1 performs the preliminary operation M14, the arm 7 expands and contracts so that the hand 5 moves linearly in the front-rear direction with the hand 5 facing a certain direction with respect to the main body 9. Specifically, when the robot 1 performs the preliminary operation M14, the hand 5 moves linearly in the front-rear direction with the tip of the fork 15 facing forward. When the robot 1 performs the preliminary operation M14, the longitudinal direction and the front-rear direction of the two forks 15 of the hand 5 coincide with each other, and the two detection mechanisms 27 attached to the hand 5 are spaced apart from each other in the left-right direction. It is arranged in a state of being.

In the preliminary operation M14, the hand 5 moves forward to a position where the conveyed object 2 placed in the accommodating cassette 3 is detected by the two detection mechanisms 27 attached to the hand 5 (FIG. 3 (B)). , See FIG. 5 (B)). Further, in the preliminary operation M14, the hand 5 subsequently moves backward to a position where the two detection mechanisms 27 are arranged on the main body 9 side of the conveyed object 2 detected by the two detection mechanisms 27. do. That is, the hand 5 moves backward to a position where the two detection mechanisms 27 are arranged behind the rear end of the conveyed object 2 detected by the two detection mechanisms 27 (FIG. 5 (A). )reference).

Similarly, when the robot 1 performs the preliminary operation M24, the hand 6 moves linearly in the front-rear direction with the tip of the fork 15 facing forward. That is, when the robot 1 performs the preliminary operation M24, the arm 8 expands and contracts so that the hand 6 moves linearly in the front-rear direction with the hand 6 facing a certain direction with respect to the main body 9. When the robot 1 performs the preliminary operation M24, the longitudinal direction and the front-rear direction of the two forks 15 of the hand 6 coincide with each other, and the two detection mechanisms 27 attached to the hand 6 are spaced apart from each other in the left-right direction. It is arranged in a state of being. In the preliminary operation M24, the hand 6 moves forward to a position where the conveyed object 2 placed in the accommodating cassette 3 is detected by the two detection mechanisms 27 attached to the hand 6, and then two. The two detection mechanisms 27 move to the rear side from the rear end of the conveyed object 2 detected by the detection mechanism 27 of the above.

The robot 1 performs a rotational operation to rotate the main body 9 between the first operation M11 and the second operation M12. At this time, the arm 8 is also contracted. Further, the robot 1 performs a rotation operation for rotating the main body 9 between the first operation M21 and the second operation M22. At this time, the arm 7 is also contracted. Further, the robot 1 raises and lowers the main body 9 and raises and lowers the main body 9 between the first movement M11 and the second movement M12, and between the first movement M21 and the second movement M22, if necessary. Moves in the left-right direction. Further, if necessary, the robot 1 performs an elevating operation of the main body 9 and a moving operation of the main body 9 in the left-right direction during the first operations M11 and M21, and during the second operations M12 and M22. In addition, the main body 9 is moved up and down and the main body 9 is moved in the left-right direction.

(Control method for industrial robots)
FIG. 5 is a plan view for explaining the operation of the robot 1 shown in FIG. Note that in FIGS. 5A and 5B, the hand 6 is not shown.

The control unit 25 is attached to the hand 5 that moves forward when the detection mechanism 27 of one of the two detection mechanisms 27 detects the object to be transported 2 when performing the preliminary operation M14 (specifically, the control unit 25 is attached to the hand 5 that moves to the front side. Hand when one of the detection mechanisms 27 detected the rear end of the transport object 2 housed in the storage cassette 3 (that is, when one detection mechanism 27 first detects the transport object 2). When the first position data, which is the data of the position in the front-rear direction of 5, and the other detection mechanism 27 of the two detection mechanisms 27 detects the object to be transported 2 (specifically, the hand moving to the front side). When the other detection mechanism 27 attached to the 5 detects the rear end of the transport object 2 housed in the storage cassette 3 (that is, when the other detection mechanism 27 first detects the transport object 2). ), Which is the data of the position of the hand 5 in the front-rear direction, and the second position data (see FIG. 5B).

The control unit 25 specifies the position and orientation (inclination of the transport object 2 in the horizontal plane) of the transport object 2 housed in the storage cassette 3 in the front-rear direction based on the first position data and the second position data. do. Further, the control unit 25 compares the position and orientation of the specified transport object 2 in the front-rear direction with the position and orientation of the transport object 2 in the front-rear direction taught in advance to the robot 1, and the robot 1 controls the robot 1. When the receiving operation M13 is performed, the position and orientation of the hand 5 in the front-rear direction when reaching the receiving position 5A are corrected based on the comparison result.

That is, when the robot 1 performs the receiving operation M13, the control unit 25 determines the position and orientation of the hand 5 in the front-rear direction when reaching the receiving position 5A based on the first position data and the second position data. to correct. Specifically, when the robot 1 performs the receiving operation M13, the control unit 25 controls the arm drive mechanism 20 and the rotation mechanism 22 based on the first position data and the second position data ( Alternatively, the position and orientation of the hand 5 in the front-rear direction when reaching the receiving position 5A (by controlling the arm driving mechanism 20, the rotating mechanism 22, and the horizontal moving mechanism 24) are corrected.

Further, when the robot 1 performs the receiving operation M13, the control unit 25 is appropriately positioned in the front-rear direction of the conveyed object 2 mounted on the hand 5 based on the first position data and the second position data. The position and orientation of the hand 5 in the front-rear direction when reaching the receiving position 5A are corrected so that the orientation of the object 2 to be conveyed mounted on the hand 5 becomes an appropriate orientation as well as the position. The hand 5 is loaded with a transport object 2 whose front-rear direction and orientation are corrected.

Further, the control unit 25 is detected by the detection mechanism 26 in a state where the robot 1 has completed the first operation M11 (see FIG. 5C), in the left-right direction of the transport object 2 mounted on the hand 5. Acquire the third position data which is the position data in the left-right direction of one end surface. At this time, for example, as shown in FIG. 5C, the arm 8 extends to a position where the hand 6 is arranged at the receiving position 6A, and the robot 1 receives the object 2 to be transported from the accommodating cassette 3. .. Further, at this time, the arm 8 may be contracted in a state where the object 2 to be transported is not mounted on the hand 6.

The control unit 25 specifies the position of the object to be conveyed 2 mounted on the hand 5 in the left-right direction based on the third position data. Further, the control unit 25 compares the position of the specified transport object 2 in the left-right direction with the position of the transport object 2 in the left-right direction previously taught to the robot 1, and the robot 1 performs the second operation M12. Based on this comparison result, the position of the hand 5 in the left-right direction when reaching the delivery position 5B is corrected.

That is, when the robot 1 performs the second operation M12, the control unit 25 corrects the position of the hand 5 in the left-right direction when reaching the delivery position 5B based on the third position data. Specifically, when the robot 1 performs the second operation M12, the control unit 25 controls the horizontal movement mechanism 24 based on the third position data to reach the delivery position 5B on the left and right of the hand 5. Correct the position of the direction. Further, when the robot 1 performs the second operation M12, the control unit 25 makes the position of the conveyed object 2 placed on the processing device 4 in the left-right direction an appropriate position based on the third position data. , Correct the position of the hand 5 in the left-right direction when reaching the delivery position 5B.

Similarly, when the control unit 25 performs the preliminary operation M24, when one of the two detection mechanisms 27, the detection mechanism 27, detects the object to be transported 2 (specifically, the hand that moves to the front side). The first position data, which is the data of the position in the front-rear direction of the hand 6 (when one of the detection mechanisms 27 attached to 6 detects the rear end of the object to be conveyed 2 accommodated in the accommodation cassette 3, and 2 When the other detection mechanism 27 of the detection mechanisms 27 detects the object to be transported 2 (specifically, the other detection mechanism 27 attached to the hand 6 moving forward is housed in the storage cassette 3). The second position data, which is the data of the position in the front-rear direction of the hand 6 (when the rear end of the object to be transported 2 is detected), is acquired.

The control unit 25 specifies the position and orientation of the conveyed object 2 accommodated in the accommodating cassette 3 in the front-rear direction based on the first position data and the second position data. Further, the control unit 25 compares the position and orientation of the specified transport object 2 in the front-rear direction with the position and orientation of the transport object 2 in the front-rear direction taught in advance to the robot 1, and the robot 1 controls the robot 1. When the receiving operation M23 is performed, the position and orientation of the hand 6 in the front-rear direction when reaching the receiving position 6A are corrected based on the comparison result.

That is, when the robot 1 performs the receiving operation M23, the control unit 25 determines the position and orientation of the hand 6 in the front-rear direction when reaching the receiving position 6A based on the first position data and the second position data. to correct. Specifically, when the robot 1 performs the receiving operation M23, the control unit 25 controls the arm drive mechanism 21 and the rotation mechanism 22 based on the first position data and the second position data ( Alternatively, the position and orientation of the hand 6 in the front-rear direction when reaching the receiving position 6A (by controlling the arm driving mechanism 21, the rotating mechanism 22, and the horizontal moving mechanism 24) are corrected.

Further, when the robot 1 performs the receiving operation M23, the control unit 25 is appropriately positioned in the front-rear direction of the conveyed object 2 mounted on the hand 6 based on the first position data and the second position data. The position and orientation of the hand 6 in the front-rear direction when reaching the receiving position 6A are corrected so that the orientation of the object 2 to be conveyed mounted on the hand 6 becomes an appropriate orientation as well as the position. The hand 6 is loaded with a transport object 2 whose front-rear direction and orientation are corrected.

Further, the control unit 25 is located at a position in the left-right direction of one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction, which is detected by the detection mechanism 26 in a state where the robot 1 has completed the first operation M21. Acquire the third position data which is the data. At this time, for example, the arm 7 extends to a position where the hand 5 is arranged at the receiving position 5A, and the robot 1 receives the object 2 to be transported from the accommodating cassette 3. Further, at this time, the arm 7 may be contracted in a state where the object 2 to be transported is not mounted on the hand 5.

The control unit 25 specifies the position of the object to be conveyed 2 mounted on the hand 6 in the left-right direction based on the third position data. Further, the control unit 25 compares the position of the specified transport object 2 in the left-right direction with the position of the transport object 2 in the left-right direction previously taught to the robot 1, and the robot 1 performs the second operation M22. Based on this comparison result, the position of the hand 6 in the left-right direction when reaching the delivery position 6B is corrected.

That is, when the robot 1 performs the second operation M22, the control unit 25 corrects the position of the hand 6 in the left-right direction when reaching the delivery position 6B based on the third position data. Specifically, when the robot 1 performs the second operation M22, the control unit 25 controls the horizontal movement mechanism 24 based on the third position data to reach the delivery position 6B on the left and right of the hand 6. Correct the position in the direction. Further, when the robot 1 performs the second operation M22, the control unit 25 makes the position of the conveyed object 2 placed on the processing device 4 in the left-right direction an appropriate position based on the third position data. , Correct the position of the hand 6 in the left-right direction when reaching the delivery position 6B.

(Main effect of this form)
As described above, in the present embodiment, when the robot 1 performs the preliminary operations M14 and M24, the control unit 25 acquires the first position data and the second position data by using the detection mechanism 27, and the robot The third position data is acquired by using the detection mechanism 26 in the state where 1 has completed the first operations M11 and M21. The detection mechanism 26 is a transmission type detection mechanism, and the detection mechanism 27 is , It is a regression reflection type detection mechanism. Therefore, in the present embodiment, even if the conveyed object 2 is greatly warped, the detection mechanisms 26 and 27 can appropriately acquire the first position data, the second position data, and the third position data. ..

Further, in the present embodiment, the two detection mechanisms 27 are arranged in a state of being spaced apart in the left-right direction when the robot 1 performs the preliminary movements M14 and M24, and the hands 5 in the preliminary movements M14 and M24. , 6 move forward to a position where the transport object 2 placed in the accommodation cassette 3 is detected by the two detection mechanisms 27, and then the transport object 2 detected by the two detection mechanisms 27. Since the two detection mechanisms 27 move backward to the position where they are arranged behind the number 2, the object to be conveyed is placed in the accommodation cassette 3 based on the appropriate first position data and the second position data. It becomes possible to appropriately specify the position and orientation of 2 in the front-rear direction. Further, in the present embodiment, when the robot 1 completes the first operations M11 and M21, one end surface of the object 2 to be transported in the left-right direction is a light receiving portion 31 of the detection mechanism 26 attached to the main body portion 9 of the robot 1. Since it is arranged between the light emitting units 30, it is possible to appropriately specify the position of the conveyed object 2 mounted on the hands 5 and 6 in the left-right direction based on the appropriate third position data.

Further, in the present embodiment, when the robot 1 performs the receiving operations M13 and M23, the front-back directions of the hands 5 and 6 when reaching the receiving positions 5A and 6A based on the first position data and the second position data. The position and orientation of the hand 2 are corrected, and when the robot 1 performs the second operations M12 and M22, the position of the hand 2 in the left-right direction when reaching the delivery positions 5B and 6B is determined based on the third position data. Since the correction is performed, the position and orientation of the hands 5 and 6 in the front-rear direction when reaching the receiving positions 5A and 6A are appropriately determined based on the position and orientation of the conveyed object 2 in the front-rear direction that are appropriately specified. It is possible to correct and appropriately correct the position of the hands 5 and 6 in the left-right direction when reaching the delivery positions 5B and 6B based on the position of the conveyed object 2 in the left-right direction that has been appropriately specified. become.

As described above, in the present embodiment, even if the transported object 2 is greatly warped, the position and orientation of the transported object 2 placed in the storage cassette 3 in the front-rear direction can be appropriately specified. At the same time, it becomes possible to appropriately specify the position of the conveyed object 2 mounted on the hands 5 and 6 in the left-right direction. Further, in the present embodiment, the position and orientation of the hands 5 and 6 in the front-rear direction when reaching the receiving positions 5A and 6A are appropriately determined based on the position and orientation of the appropriately specified transport object 2 in the front-rear direction. It is possible to correct and appropriately correct the left-right position of the hands 5 and 6 when reaching the delivery positions 5B and 6B based on the position of the conveyed object 2 in the left-right direction that has been appropriately specified. become. Therefore, in the present embodiment, even if the transported object 2 is greatly warped, the horizontal position and orientation of the transported object 2 placed on the storage cassette 3 are appropriately corrected before being transported to the processing device 5. It becomes possible to appropriately correct the horizontal position and orientation of the hands 5 and 6 in order to place the object 2.

In this embodiment, when the robot 1 completes the first operation M11 when the arm 7 contracts, the light receiving unit 31 and the light emitting unit 30 in which the conveyed object 2 mounted on the hand 5 is arranged between them, and the arm 8 When the robot 1 completes the first operation M21 when contracting, the light receiving unit 31 and the light emitting unit 30 in which the conveyed object 2 mounted on the hand 6 is arranged between them are common. Therefore, in the present embodiment, even if the transfer target object 2 is conveyed by the two hands 5 and 6, it is mounted on the transfer object 2 and the hand 6 mounted on the hand 5 by using the common detection mechanism 26. It becomes possible to detect the object to be transported 2. Therefore, in this embodiment, it is possible to simplify the configuration of the robot 1.

(Modification example of industrial robot)
FIG. 6 is a plan view of the industrial robot 1 according to another embodiment of the present invention. FIG. 7 is a side view of the industrial robot 1 shown in FIG. In addition, in FIGS. 6 and 7, the same reference numerals are given to the same configurations as those described above.

In the above-described embodiment, the arm 7 and the arm 8 are arranged at the same position in the vertical direction and are adjacent to each other in the horizontal direction. However, as shown in FIGS. May be arranged at positions offset from each other in the vertical direction. In this case, the main body 9 has an arm support 57 that supports the base ends of the arms 7 and 8 and can be raised and lowered, a support frame 58 that supports the arm support 57 so that it can be raised and lowered, and a lower end portion of the main body 9. It is provided with a swivel frame 59 constituting the above.

As shown in FIG. 7, the base end side of the arm 7 is rotatably connected to the upper end side of the arm support 57, and the base end side of the arm 8 is rotatably connected to the lower end side of the arm support 57. ing. The support frame 58 holds the hands 5, 6 and the arms 7, 8 so as to be able to move up and down via the arm support 57. The lower end of the support frame 58 is fixed to the swivel frame 59. The swivel frame 59 is connected to the base 60 so that it can rotate in the vertical direction as the axial direction of rotation. The base 60 can move linearly in the left-right direction with respect to the base 11.

The arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the arm support 57 while the hand 5 faces a certain direction. That is, the arm drive mechanism 20 expands and contracts the arm 7 so that the hand 5 moves linearly with respect to the main body 9 while the hand 5 faces a certain direction. The arm drive mechanism 21 expands and contracts the arm 8 so that the hand 6 moves linearly with respect to the arm support 57 while the hand 6 faces a certain direction. That is, the arm drive mechanism 21 expands and contracts the arm 8 so that the hand 6 moves linearly with respect to the main body 9 while the hand 6 faces a certain direction.

The rotating mechanism 22 rotates the swivel frame 59 with respect to the base 60 with the vertical direction as the axial direction of rotation. That is, the rotation mechanism 22 rotates the main body 9 with respect to the base 60 with the vertical direction as the axial direction of rotation. The elevating mechanism 23 elevates and elevates the arm support 57 with respect to the support frame 58. The horizontal movement mechanism 24 linearly moves the base 60 in the left-right direction with respect to the base 11. That is, the horizontal movement mechanism 24 linearly moves the main body 9 in the left-right direction together with the base 60.

The detection mechanism 26 is attached to the arm support 57 of the main body 9. Specifically, the detection mechanism 26 is fixed to a sensor fixing member (not shown) fixed to the arm support 57, and the detection mechanism 26 is attached to the main body 9 via the sensor fixing member. The detection mechanism 26 is arranged behind the rear end of the conveyed object 2 mounted on the hands 5 and 6 arranged at the receiving positions 5A and 6A. When the robot 1 completes the first operation M11, one end surface of the conveyed object 2 mounted on the hand 5 in the left-right direction is arranged between the light emitting unit 30 and the light receiving unit 31, and the robot 1 performs the first operation M21. When the above is completed, one end surface of the conveyed object 2 mounted on the hand 6 in the left-right direction is arranged between the light emitting unit 30 and the light receiving unit 31.

(Modified example of control method for industrial robots)
In the above-described embodiment, the control unit 25 receives the hands 5 when reaching the receiving positions 5A and 5B based on the first position data and the second position data when the robot 1 performs the receiving operations M13 and M23. Hands 5 and 6 when the robot 1 corrects the position and orientation of 6 in the front-rear direction and reaches the delivery positions 5B and 6B based on the third position data when the robot 1 performs the second operations M12 and M22. The control unit 25 corrects the position in the left-right direction of the above, but when the robot 1 performs the second operations M12 and M22, the control unit 25 is based on the first position data, the second position data, and the third position data. The position (horizontal position) and orientation of the hands 5 and 6 in the front-back and left-right directions when reaching the delivery positions 5B and 6B may be corrected.

Specifically, when the robot 1 performs the second operations M12 and M22, the control unit 25 and the arm drive mechanisms 20 and 21 are based on the first position data, the second position data, and the third position data. The rotation mechanism 22 and the horizontal movement mechanism 24 may be controlled to correct the horizontal position and orientation of the hands 5 and 6 when reaching the delivery positions 5B and 6B. In this case, when the robot 1 performs the receiving operation M13, the hand 5 moves to the receiving position 5A taught in advance, and the transport target in the state (position and orientation) of being placed in the accommodation cassette 3 The object 2 is mounted on the hand 5. Similarly, when the robot 1 performs the receiving operation M23, the hand 6 moves to the receiving position 6A taught in advance, and the conveyed object 2 in the state of being placed in the accommodating cassette 3 is mounted on the hand 6. Will be done.

Even in this case, as in the above-described embodiment, even if the transported object 2 is greatly warped, the delivery position 5B is based on the appropriately specified horizontal position and orientation of the transported object 2. , 6B can be appropriately corrected for the horizontal position and orientation of the hands 5 and 6 when reaching 6B. Therefore, even if the transport target object 2 is greatly warped, the transport target object 2 is sent to the processing device 5 after appropriately correcting the horizontal position and orientation of the transport target object 2 placed in the storage cassette 3. It is possible to properly correct the horizontal position and orientation of the hands 5 and 6 for placement.

(Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be carried out without changing the gist of the present invention.

In the above-described form, the detection mechanism 27 may be a transmission type detection mechanism. In this case, the light emitting unit 34 is arranged to face the light receiving unit 35 with a predetermined distance from the light receiving unit 35 in the vertical direction. However, when the detection mechanism 27 is a retroreflective type detection mechanism, the light emitting unit 34, the light receiving unit 35, and the retroreflective plate 36 are arranged so as to face each other with a predetermined distance in the vertical direction. Compared with the case where the detection mechanism 27 is a transmission type detection mechanism (that is, compared with the case where the light emitting unit 34 and the light receiving unit 35 are arranged to face each other with a predetermined distance in the vertical direction). ), It becomes possible to miniaturize the detection mechanism 27 in the vertical direction.

In the above-described embodiment, the control unit 25 acquires the third position data by using the detection mechanism 26 in the state where the robot 1 has completed the first operation M11, but the robot 1 is the first in the control unit 25. When performing the operation M11, the detection mechanism 26 may be used to acquire the third position data. Similarly, in the above-described embodiment, the control unit 25 acquires the third position data by using the detection mechanism 26 in the state where the robot 1 has completed the first operation M21, but the control unit 25 is the robot 1. May acquire the third position data by using the detection mechanism 26 when the first operation M21 is performed.

In the above-described embodiment, the robot 1 may include two detection mechanisms 26 attached to the main body 9. In this case, the two detection mechanisms 26 overlap, for example, in the vertical direction. Further, in this case, one of the two detection mechanisms 26, the detection mechanism 26, is one of the transport objects 2 mounted on the hand 5 in the left-right direction when the robot 1 performs the first operation M11. The end face is arranged at a position where the end face passes between the light emitting unit 30 and the light receiving unit 31, and the other detection mechanism 26 is left and right of the conveyed object 2 mounted on the hand 6 when the robot 1 performs the first operation M21. One end surface in the direction is arranged at a position where it passes between the light emitting unit 30 and the light receiving unit 31.

In the above-described embodiment, the light receiving unit 31 may be an area sensor in which a plurality of light receiving elements are two-dimensionally arranged. Even in this case, the detection mechanism 26 can detect the position of one end surface of the conveyed object 2 mounted on the hands 5 and 6 in the left-right direction in the left-right direction.

In the above-described embodiment, the number of hands and arms included in the robot 1 may be one. For example, the robot 1 may include only one hand 5 and one arm 7. In this case, for example, the robot 1 replaces the arm drive mechanism 20 with respect to the first arm portion drive mechanism that rotates the first arm portion 16 with respect to the main body portion 9 and the first arm portion 16. A second arm portion drive mechanism for rotating the second arm portion 17 and a hand drive mechanism for rotating the hand 5 with respect to the second arm portion 17 may be provided. Further, in this case, the robot 1 may not include, for example, the rotation mechanism 22 and the horizontal movement mechanism 24.

When the number of hands and arms included in the robot 1 is one, the number of arm portions included in the arm 7 may be three or more. For example, as described in Japanese Patent Application Laid-Open No. 2019-176029, the number of arm portions included in the arm 7 may be three. In this case, the robot 1 may not include, for example, the rotation mechanism 22 and the horizontal movement mechanism 24.

In the above-described embodiment, the number of forks 15 included in the hands 5 and 6 may be three or more. Further, in the above-described embodiment, the accommodating cassette 3 and the processing device 4 may be arranged on the front side of the robot 1. Further, in the above-described embodiment, the object to be transported 2 may be a panel other than a large panel handled in a semiconductor package manufacturing line using PLP.

1 Robot (industrial robot)
2 Object to be transported 3 Storage cassette (receiver)
4 Processing device (delivery section)
5 hands (1st hand)
6 hands (2nd hand)
7 arm (1st arm)
8 arm (2nd arm)
9 Main body 15a Mounting range 20, 21 Arm drive mechanism 22 Rotation mechanism 24 Horizontal movement mechanism 25 Control unit 26 Detection mechanism (first detection mechanism)
27 Detection mechanism (second detection mechanism)
30 Light emitting part (first light emitting part)
31 Light receiving part (first light receiving part)
34 Light emitting part (second light emitting part)
35 Light receiving part (second light receiving part)
36 Regression reflector X Front-back direction Y Left-right direction

Claims (5)

In an industrial robot that transports a rectangular or square object to be transported,
A hand on which the object to be transported is mounted, an arm that is rotatably connected to the tip side and expands and contracts in the horizontal direction, and a main body portion that is rotatably connected to the base end side of the arm. It includes an optical first detection mechanism attached to the main body, two optical second detection mechanisms attached to the hand, and a control unit for controlling the industrial robot.
The receiving position is the position of the hand when the object to be transported, which is placed in a predetermined receiving portion, is mounted on the hand with the arm extended and received, and the hand is received with the arm extended. Assuming that the position of the hand when the object to be transported mounted on the vehicle is delivered to a predetermined delivery portion is set as the delivery position,
A receiving operation that is an operation when receiving the conveyed object at the receiving position, and an operation when the arm contracts so that the hand that has received the conveyed object at the receiving position approaches the main body portion. One operation, a second operation which is an operation when the arm extends until the hand on which the object to be conveyed is moved to the delivery position after the first operation, and an operation before the receiving operation is performed. Preliminary movement and
The first detection mechanism faces the first light receiving unit with a predetermined distance between the first light receiving unit composed of a line sensor or an area sensor and the first light receiving unit in the vertical direction. It is a transmissive detection mechanism having a first light emitting unit to be arranged.
The second detection mechanism is such that the second light receiving unit and the second light emitting unit are spaced apart from each other in the vertical direction by a predetermined distance between the second light receiving unit and the second light emitting unit. It is a regression reflection type detection mechanism having a light receiving unit of 2 and a regression reflecting plate arranged to face the second light emitting unit, or the second light receiving unit and the second light receiving unit in the vertical direction. It is a transmission type detection mechanism having a second light emitting portion arranged to face the second light receiving portion with a predetermined interval between the two.
When the industrial robot performs the first operation, the hand moves linearly with respect to the main body in a certain direction.
When the moving direction of the hand when the industrial robot performs the first operation is the front-rear direction, and the direction orthogonal to the front-back direction and the up-down direction is the left-right direction.
When the industrial robot completes the first operation, one end surface of the object to be transported in the left-right direction is arranged between the first light receiving portion and the first light emitting portion.
When the industrial robot performs the preparatory movement, the hand moves linearly in the front-rear direction while facing a certain direction with respect to the main body portion.
The two second detection mechanisms are arranged on the connecting portion side of the arm and the hand with respect to the mounting range of the hand, which is the range on which the transported object is mounted, and the industry. When the robot performs the preliminary operation, it is arranged with a space in the left-right direction.
In the preliminary operation, the hand moves one side in the front-rear direction to a position where the conveyed object placed on the receiving portion is detected by the two second detection mechanisms, and then two. The two second detection mechanisms move to the other side in the front-rear direction to the position where the two second detection mechanisms are arranged on the main body side of the object to be conveyed, which is detected by the second detection mechanism.
The control unit
Data on the position of the hand in the front-rear direction when the second detection mechanism of one of the two second detection mechanisms detects the object to be conveyed when the industrial robot performs the preliminary operation. The first position data and the second position, which is the data of the position in the front-rear direction of the hand when the second detection mechanism of the other of the two second detection mechanisms detects the object to be conveyed. The object to be transported detected by the first detection mechanism when the data is acquired and the industrial robot performs the first operation or when the industrial robot completes the first operation. The third position data, which is the data of the position of one end surface in the left-right direction of the robot in the left-right direction, is acquired, and at the same time,
When the industrial robot performs the receiving operation, the position and orientation of the hand in the front-rear direction when reaching the receiving position are corrected based on the first position data and the second position data. Moreover, when the industrial robot performs the second operation, the position in the left-right direction of the hand when reaching the delivery position is corrected based on the third position data, or the industrial robot is used. When the robot performs the second operation, the horizontal position and orientation of the hand when reaching the delivery position based on the first position data, the second position data, and the third position data. An industrial robot characterized by correcting. The industrial robot according to claim 1, wherein the second detection mechanism is a regression reflection type detection mechanism. As the hand, two hands, a first hand and a second hand, are provided, and as the first arm as the arm to which the first hand is connected and the arm to which the second hand is connected. The second arm and one main body to which the first arm and the second arm are connected are provided.
Two of the second detection mechanisms are attached to the first hand.
Two of the second detection mechanisms are attached to the second hand.
The transport target mounted on the first hand and the transport target mounted on the second hand are displaced in the vertical direction.
When the industrial robot completes the first operation when the first arm contracts, the first light receiving unit and the first light receiving unit on which the conveyed object mounted on the first hand is arranged between them. When the industrial robot completes the light emitting unit and the first operation when the second arm contracts, the first light receiving object to be mounted on the second hand is arranged between them. The industrial robot according to claim 1 or 2, wherein the unit and the first light emitting unit are a common first light receiving unit and the first light emitting unit. An arm drive mechanism that expands and contracts the arm so that the hand moves linearly with respect to the main body in a certain direction, a rotation mechanism that rotates the main body, and the main body in the left-right direction. Equipped with a horizontal movement mechanism to move the part
The control unit controls the arm drive mechanism, the rotation mechanism, and the horizontal movement mechanism based on the first position data, the second position data, and the third position data to make the hand horizontal. The industrial robot according to any one of claims 1 to 3, wherein the position and orientation of the direction are corrected. A hand on which a rectangular or square object to be transported is mounted, an arm in which the hand is rotatably connected to the tip side and expands and contracts in the horizontal direction, and a base end side of the arm are rotatable. It is provided with a main body portion connected to the main body portion, an optical first detection mechanism attached to the main body portion, and two optical second detection mechanisms attached to the hand.
The receiving position is the position of the hand when the object to be transported, which is placed in a predetermined receiving portion, is mounted on the hand with the arm extended and received, and the hand is received with the arm extended. Assuming that the position of the hand when the object to be transported mounted on the vehicle is delivered to a predetermined delivery portion is set as the delivery position,
A receiving operation that is an operation when receiving the conveyed object at the receiving position, and an operation when the arm contracts so that the hand that has received the conveyed object at the receiving position approaches the main body portion. One operation, a second operation which is an operation when the arm extends until the hand on which the object to be conveyed is moved to the delivery position after the first operation, and an operation before the receiving operation is performed. Preliminary movement and
The first detection mechanism faces the first light receiving unit with a predetermined distance between the first light receiving unit composed of a line sensor or an area sensor and the first light receiving unit in the vertical direction. It is a transmissive detection mechanism having a first light emitting unit to be arranged.
The second detection mechanism is such that the second light receiving unit and the second light emitting unit are spaced apart from each other in the vertical direction by a predetermined distance between the second light receiving unit and the second light emitting unit. It is a regression reflection type detection mechanism having a light receiving unit of 2 and a regression reflecting plate arranged to face the second light emitting unit, or the second light receiving unit and the second light receiving unit in the vertical direction. It is a transmission type detection mechanism having a second light emitting portion arranged to face the second light receiving portion with a predetermined interval between the two.
When the first operation is performed, the hand moves linearly with respect to the main body in a certain direction.
When the moving direction of the hand when the first operation is performed is the front-back direction, and the direction orthogonal to the front-back direction and the up-down direction is the left-right direction,
When the first operation is completed, one end surface of the object to be conveyed in the left-right direction is arranged between the first light receiving portion and the first light emitting portion.
When the preparatory movement is performed, the hand moves linearly in the front-rear direction while facing a certain direction with respect to the main body portion.
The two second detection mechanisms are arranged closer to the connecting portion between the arm and the hand than the mounting range of the hand, which is the range in which the object to be transported is mounted, and the spare. When the operation is performed, they are arranged with a space in the left-right direction.
In the preliminary operation, the hand moves one side in the front-rear direction to a position where the conveyed object placed on the receiving portion is detected by the two second detection mechanisms, and then two. A control method for an industrial robot that moves two second detection mechanisms to a position on the main body side in the front-rear direction with respect to the object to be transported detected by the second detection mechanism. There,
Data on the position of the hand in the front-rear direction when the second detection mechanism of one of the two second detection mechanisms detects the object to be conveyed when the industrial robot performs the preliminary operation. The first position data and the second position, which is the data of the position in the front-rear direction of the hand when the second detection mechanism of the other of the two second detection mechanisms detects the object to be conveyed. The object to be transported detected by the first detection mechanism when the data is acquired and the industrial robot performs the first operation or when the industrial robot completes the first operation. The third position data, which is the data of the position of one end surface in the left-right direction of the robot in the left-right direction, is acquired, and at the same time,
When the industrial robot performs the receiving operation, the position and orientation of the hand in the front-rear direction when reaching the receiving position are corrected based on the first position data and the second position data. Moreover, when the industrial robot performs the second operation, the position in the left-right direction of the hand when reaching the delivery position is corrected based on the third position data, or the industrial robot is used. When the robot performs the second operation, the horizontal position and orientation of the hand when reaching the delivery position based on the first position data, the second position data, and the third position data. A control method for an industrial robot, which is characterized by correcting.

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