JP2021162650A - Mirror scanner - Google Patents

Abstract

To provide a mirror scanner that has a reduced circuit scale and cost.SOLUTION: A mirror scanner 100 of the present invention has: a mirror 10 that has a first surface reflecting light and can oscillate around a first axis and a second axis intersecting with each other at a predetermined angle; a permanent magnet that is arranged on a second surface being a surface on the opposite side of the first surface of the mirror; and a driving part that has a yoke 21 having a pair of end parts 21c that are opposite to the second surface of the mirror and arranged to sandwich the permanent magnet and a coil 23 that is wound around the yoke. The pair of end parts are arranged such that a straight line connecting the end parts intersects with the first axis and the second axis.SELECTED DRAWING: Figure 1

Description

The present invention relates to a mirror scanner, and more particularly to a mirror scanner that swings a mirror around two axes.

There is known a scanning device that obtains various information about an object located in the predetermined region by emitting light toward a predetermined region while deflecting the light and detecting the light returned from the predetermined region. There is. In such a scanning device, a movable mirror such as a MEMS (Micro Electro Mechanical System) mirror is provided as a portion for deflecting light. As an optical scanning device having a movable mirror, an optical scanning device in which a mirror oscillator and a permanent magnet are surrounded by upper and lower covers has been proposed (for example, Patent Document 1).

JP-A-2009-69676

In the optical scanning device as described above, an external force is applied to the movable portion of the movable mirror by magnetism or the like to cause a swing motion, a reciprocating motion, or the like. For example, in a general two-axis drive movable mirror that performs raster scan, the movable mirror swings by combining swing around the high-speed axis due to resonance drive and swing around the low-speed axis due to non-resonant drive. Will be done.

Since the non-resonant drive is a drive method that does not utilize the resonance phenomenon, a larger power is required than when the resonance drive is performed. Therefore, the magnetic circuit for the low-speed shaft has a larger circuit scale than the magnetic circuit for the high-speed shaft. Therefore, the optical scanning device provided with the magnetic circuit for the low-speed axis has a problem that the size of the entire device becomes large due to the circuit scale of the magnetic circuit.

Further, the conventional two-axis drive movable mirror requires an independent and specially designed yoke and coil for swinging around the high-speed axis and a yoke and coil for swinging around the low-speed shaft. Therefore, the two-axis drive mirror scanner becomes large in size, weight, and cost.

The present invention has been made in view of the above points, and one of the objects of the present invention is to provide a mirror scanner with reduced size, weight and cost.

The invention according to claim 1 has a mirror that has a first surface that reflects light and is swingable around a first axis and a second axis that intersect at a predetermined angle, and the first surface of the mirror. A yoke having a permanent magnet arranged on a second surface opposite to the mirror, and a pair of ends arranged so as to face the second surface of the mirror and sandwich the permanent magnet. It has a drive unit having a coil wound around the yoke, and the pair of ends are arranged so that a straight line connecting the ends intersects the first axis and the second axis. It is characterized by.

It is a figure which shows the whole structure of the mirror scanner which concerns on Example 1. FIG. It is a top view of the mirror which concerns on Example 1. FIG. It is sectional drawing of the mirror which concerns on Example 1. FIG. It is a top view of the mirror scanner which concerns on Example 1. FIG. It is a figure which shows typically the mode of how the coil is wound around a yoke. It is a figure which shows the shaft torque applied to the mirror with respect to the inclination angle of a yoke. It is a figure which shows the signal waveform of a drive signal. It is a figure which shows the signal waveform of the 1st signal. It is a figure which shows the signal waveform of the 2nd signal. It is a figure which shows typically the magnetic pole of the magnetic field generated at the time of applying a drive signal. It is a figure which shows typically the magnetic flux of the magnetic field generated when the drive signal is applied. It is a figure which shows typically the component which decomposed the combined magnetic flux in the 1st axis direction and the 2nd axis direction. It is a figure which shows that the magnetic field is generated alternately in a magnetic circuit by the application of a drive signal. It is a figure which shows that the magnetic field is generated alternately in a magnetic circuit by the application of a drive signal. It is a figure which shows typically the 1st modification about the way of winding a coil around a yoke. It is a figure which shows typically the 2nd modification about the way of winding a coil around a yoke. It is a figure which shows typically the 3rd modification about the way of winding a coil around a yoke.

Preferred embodiments of the present invention will be described in detail below. In the description and the accompanying drawings in each of the following examples, substantially the same or equivalent parts are designated by the same reference numerals.

FIG. 1 is a perspective view showing the overall configuration of the mirror scanner 100 according to the present embodiment. The mirror scanner 100 is an optical scanning device that deflects light by periodically swinging a movable mirror.

The mirror scanner 100 includes an optical deflector 10 that performs optical deflection, and a magnetic circuit 20 that is a magnetic field generation source that generates a magnetic field for swinging the optical deflector 10.

In the mirror scanner 100 of this embodiment, the optical deflector 10 swings when the magnetic field generated by the magnetic circuit 20 is applied to the optical deflector 10. The mirror scanner 100 is, for example, a magnetically driven MEMS (Micro Electro Mechanical System) device in which the optical deflector 10 operates according to a change in a magnetic field.

The magnetic circuit 20 has a yoke 21 made of a soft magnetic material, for example, an electromagnetic steel plate. The yoke 21 has, for example, a C-shaped or U-shaped shape including a pair of core portions 21A, a connecting portion 21B connecting the pair of core portions 21A, and a pair of end portions 21C. The pair of end portions 21C are located on the opposite side of the pair of core portions 21A from the portions connected to the connecting portion 21B.

Further, the magnetic circuit 20 has a coil 23 wound around the connecting portion 21B of the yoke 21. The coil 23 is wound around the connecting portion 21B using, for example, a continuous steel wire.

Further, the magnetic circuit 20 includes a drive circuit 25 that generates a magnetic field from the yoke 21 by applying a current as a drive signal to the coil 23. In this embodiment, the drive circuit 25 applies an alternating current to the coil as a drive signal. As a result, an alternating magnetic field is generated from each of the pair of ends 21C of the yoke 21. That is, the pair of ends 21C of the yoke 21 have a property as a magnetic field generating end for generating a magnetic field.

In this embodiment, the yoke 21 functions as an electromagnet when a current is applied to the coil 23 by the drive circuit 25. That is, the magnetic circuit 20 of this embodiment has an electromagnet that generates an alternating magnetic field.

FIG. 2 is a plan view of the light deflector 10. Further, FIG. 3 is a cross-sectional view of the light deflector 10 and is a cross-sectional view taken along the line 3-3 in FIG. The configuration of the light deflector 10 will be described with reference to FIGS. 2 and 3.

In this embodiment, the light deflector 10 has a light reflecting surface 10S which is a mirror having reflection property with respect to a predetermined light. That is, the light deflector 10 is a MEMS mirror in which the light reflecting surface 10S swings around the first swing shaft AX and the second swing shaft AY.

The light deflector 10 includes a support portion 11, a movable portion 12 swingably supported by the support portion 11, and a permanent magnet 13. The permanent magnet 13 swings the movable portion 12 in response to a change in the magnetic field.

The movable portion 12 has a movable frame 12A supported by the support portion 11 in a swingable state around the first swing shaft AY. In this embodiment, the movable frame 12A is an annular frame body, and is connected to and supported by the support portion 11 by a torsion bar 11X extending along the second swing axis AX.

Further, the movable portion 12 has a movable plate 12B which is arranged inside the movable frame 12A and is supported by the movable frame 12A in a state where it can swing around the second swing shaft AY. In this embodiment, the movable plate 12B is a flat plate-shaped member, and one of the surfaces thereof functions as a light reflecting surface 10S. Further, the movable plate 12B is connected to and supported by the movable frame 12A by a torsion bar 12Y extending along the second swing shaft AY.

When a magnetic field is applied to the permanent magnet 13 so that the torsion bar 11X is twisted in the circumferential direction, the movable frame 12A and the movable plate 12B swing around the first swing shaft AX while being supported by the support portion 11. do. Further, when a magnetic field is applied to the permanent magnet 13 so that the torsion bars 11X and 12Y are twisted in the circumferential direction thereof, the movable frame 12A swings around the first swing shaft AX, and the movable plate 12B becomes the first. It swings around the swing shaft AX of 1 and the swing shaft AY of the second swing shaft.

Further, in this embodiment, the permanent magnet 13 is fixed on the other surface of the movable plate 12B (the surface opposite to the surface functioning as the light reflecting surface 10S). Further, for example, the support portion 11 and the movable portion 12 of the optical deflector 10 are made of a semiconductor material, and can be formed by, for example, processing a semiconductor wafer.

FIG. 4 is a top view of the mirror scanner 100 according to the present embodiment as viewed from a direction perpendicular to the light reflecting surface 10S. Note that the connecting portion 21B and the coil 23 of the yoke 21 are not shown here.

In the yoke 21, each of the pair of end portions 21C faces the second surface of the movable plate 12B of the light deflector 10, and the straight line A1 which is a straight line connecting the centers of the pair of end portions 21C is the first swing. The moving shaft AX and the second swinging shaft AY are arranged so as to be inclined at predetermined angles, for example, at an angle θ <45 ° with respect to the second swinging shaft AY.

The yoke 21 is arranged so that the straight line A1 overlaps the intersection of the first swing axis AX and the second swing axis AY in the direction perpendicular to the light reflecting surface 10S of the light deflector 10. ing. A permanent magnet 13 is arranged on the second surface of the movable plate 12B of the light deflector 10 at a position corresponding to the intersection of the first swing shaft AX and the second swing shaft AY.

Further, the yoke 21 is arranged so that the pair of end portions 21C have a symmetrical positional relationship on the straight line A1 with the arrangement position of the permanent magnet 13 as the center. That is, the yoke 21 is arranged so that a pair of end portions 21C of the yoke 21 sandwich the arrangement position of the permanent magnet 13.

In other words, the mirror scanner 100 has a light reflecting surface 10S that reflects light, and has a mirror that can swing around the first swing axis AX and the second swing axis AY that intersect at a predetermined angle. The permanent magnet 13 arranged on the second surface opposite to the light reflecting surface 10S of the light deflector 10 and the permanent magnet 13 facing the second surface of the light deflector 10 and sandwiching the permanent magnet 13 It has a yoke 21 having a pair of arranged end portions 21C and a magnetic circuit 20 having a coil 23 wound around the yoke 21, and the pair of end portions 21C has a first swing in which a straight line connecting the ends thereof is the first swing. It is arranged so as to intersect the moving axis AX and the second swinging axis AY.

Further, the permanent magnet 13 has a first swing axis AX when viewed from a direction perpendicular to a plane including the first swing axis AX and the second swing axis AY on the second surface of the light deflector 10. It is arranged at a position overlapping the intersection of the second swing axis AY and the pair of end portions 21C, and each of the pair of end portions 21C is arranged so as to face the permanent magnet 13.

FIG. 5 is a diagram schematically showing an aspect of the coil 23 in the yoke 21. For example, the coil 23 is continuously wound in the same direction around the connecting portion 21B of the yoke 21 by using a common winding. By winding the coil 23 in this way, when an alternating current I is passed through the coil 23 in a predetermined direction (for example, the direction indicated by the arrow in FIG. 5), one of the pair of ends 21C of the yoke 21 is N pole. And an AC magnetic field is generated so that the other is the S pole.

Referring to FIG. 4 again, the mirror scanner 100 of the present embodiment resonates the optical deflector 10 so as to swing around the second swing shaft AY at high speed, and the first swing shaft AX. An AC magnetic field is generated so that the non-resonant operation is performed so as to oscillate at a low speed around the. That is, in this embodiment, the second swing shaft AY is the high speed shaft and the first swing shaft AX is the low speed shaft. Therefore, when the light is incident on the light reflecting surface 10S of the light deflector 10, the light reflecting surface 10S reflects the light and scans the reflected light in the direction of the second swing axis AY at high speed to obtain the first light. Scan at a low speed in the direction of the swing axis AX. This makes it possible to perform raster scanning of the reflected light on the light reflecting surface 10S of the light deflector 10.

The drive circuit 25 applies the drive signal DS to the coil 23.

The drive signal DS superimposes a second sine wave for high-speed axis drive, which has a smaller amplitude and a higher frequency than the second signal, the sawtooth wave for driving the low-speed axis, on the sawtooth wave for driving the low-speed axis, which is the first signal. Has a sawtooth waveform.

FIG. 6 is a diagram showing shaft torque applied to the first and second swing shafts AX and AY at a predetermined tilt angle θ of the yoke 21 of the mirror scanner 100 according to the present embodiment.

The horizontal axis indicates the distance between the permanent magnet 13 and each of the pair of ends of the yoke 21 facing the permanent magnet 13. The vertical axis indicates the shaft torque related to each swinging shaft.

In each of the curves in the figure, the inclination angles θ of the straight line A1 connecting the centers of the pair of ends 21C of the yoke 21 and the second swing axis AY are 0 ° (parallel), 5 ° and 10 °, respectively. The case is shown. The solid line in the figure is the shaft torque applied to the first swing shaft AX that performs non-resonant operation, and the broken line is the shaft torque applied to the second swing shaft AY that performs coexistence operation.

It can be seen that the shaft torque applied to the first swing shaft AX, which is the low speed shaft, is hardly affected by the change in the shaft torque due to the tilt angle θ even if the tilt angle θ is changed from 0 to 10 °. Further, as the permanent magnet 13 and the pair of end portions 21C are separated from each other, the axial torque decreases in inverse proportion to the distance at any inclination angle θ, but the influence of the inclination angle θ is observed at any distance. No.

On the other hand, as for the shaft torque applied to the second swing shaft AY, which is a high-speed shaft, an increase in shaft torque is observed every time the inclination angle θ is changed to 0 °, 5 °, and 10 °.

As described above, the high-speed shaft that performs the resonance operation can be driven with a smaller shaft torque than the low-speed shaft that performs the non-resonant operation. That is, by tilting the yoke 21 at the inclination angle θ, it is possible to obtain the shaft torque required for the resonance operation without affecting the shaft torque required for the non-resonant operation.

FIG. 7 is a waveform diagram showing the current waveform of the drive signal DS. Further, FIG. 8 shows a sawtooth wave for driving a low-speed shaft, which is the first signal. Further, FIG. 9 shows a sine wave for driving a high-speed axis, which is a second signal. Further, the amplitude AML indicates the amplitude for the low speed shaft corresponding to the sawtooth wave for driving the low speed shaft. Further, the amplitude AMH indicates the amplitude for the high-speed axis corresponding to the sine wave for driving the high-speed axis.

The sawtooth wave, which is the first signal shown in FIG. 8, is a signal for causing the first swing axis AX to scan light in the low-speed scanning direction in raster scanning. In this embodiment, the first signal scans the low-speed scanning direction in one direction, has a section having a steep slope for moving the light reflecting surface to the scanning start position, and scanning ends from the scanning start position. It has a section for operating at a predetermined speed to a position.

Further, the sine wave, which is the second signal shown in FIG. 9, is a signal for causing the second swing axis AY to scan light in the high-speed scanning direction in the raster scan. Since the second swing axis AY of the optical deflector 10 is resonantly driven, the sine wave has a frequency matched to the resonance frequency of the second swing axis AY. Further, since the resonance drive does not require a large power as compared with the non-resonance drive, the sine wave which is the second signal does not affect the drive of the first swing axis AX by the first signal. The amplitude can be reduced.

Further, as described above, the drive signal DS has a signal waveform as shown in FIG. 7 in which a sawtooth wave for driving the low-speed axis, which is the first signal, and a sine wave for driving the high-speed axis, which is the second signal, are superimposed. Have.

In other words, the first signal has a larger amplitude and a lower frequency than the second signal.

The first signal is a sawtooth wave, and the second signal is a sine wave.

FIG. 10 is a diagram schematically showing magnetic poles generated at a pair of end portions 21C of the yoke 21 when a magnetic field is generated by applying a drive signal DS.

By applying the drive signal DS, a current flows through the first coil 23, and a magnetic field is generated so that one of the pair of ends 21C of the yoke 21 is the north pole and the other is the south pole. In FIG. 10, of the pair of end portions 21C of the yoke 21, one end portion 21C, which is the end portion shown on the upper side in the figure, is on the north pole (indicated as Na in the figure) and on the lower side in the figure. The case where the other end 21C, which is the indicated end, becomes an S pole (indicated as Sa in the figure) is shown.

FIG. 11 is a diagram schematically showing the magnetic flux of the magnetic field generated by the application of the drive signal DS using a vector. By applying the drive signal DS, a magnetic flux shown as a vector S1 is generated in the direction from the magnetic pole Na to the magnetic pole Sa.

The vector S1 is formed at an angle of inclination θ in which the yoke 21 is arranged so as to be inclined with respect to the second swing axis AY.

FIG. 12 shows that the magnetic flux of the vector S1 shown in FIG. 11 is decomposed in the direction of the second swing AY (hereinafter referred to as the Y direction) and the direction of the first swing axis AX (hereinafter referred to as the X direction). It is a figure which shows the component schematically by using the vector. The component SY in the Y direction of the magnetic flux is a vector component corresponding to the component in the Y direction of the vector S1. On the other hand, the component SX in the X direction of the magnetic flux is a vector component corresponding to the component in the X direction of the vector S1.

By applying the drive signal DS to the coil 23 in this way, a magnetic field having a large magnetic flux component in the Y direction and a small magnetic flux component in the X direction is generated. Therefore, by applying such a magnetic field to the permanent magnet 13, the light deflector 10 is oscillated around the first oscillating shaft AX by non-resonant drive (low speed drive) which requires a relatively large power, and is large. The light deflector 10 can be swung around the second swing shaft AY by a resonance drive (high-speed drive) that does not require power.

13 and 14 are diagrams showing that a magnetic field is alternately generated in the magnetic circuit 20 by applying a drive signal DS having a signal waveform as shown in FIG. 7. FIG. 13 shows the magnetic poles generated at the pair of ends 21C of the yoke 21 at the time A shown in FIG. 7, and FIG. 14 shows the magnetic poles generated at the pair of ends 21C of the yoke 21 at the time B shown in FIG.

At time A, the magnetic flux flows from the magnetic pole Na toward the magnetic pole Sa due to the inclination angle θ at a predetermined angle in which the yoke 21 is arranged. Then, at time B, these relationships are reversed.

Further, as described above, the drive signal DS input to the coil 23 is a waveform obtained by superimposing the sawtooth wave for driving the low-speed axis, which is the first signal, and the sine wave for driving the high-speed axis, which is the second signal. Become. Therefore, at each of the vicinity of time A and the vicinity of time B, the pair of end portions 21C can apply an attractive force or a repulsive force to the permanent magnet 13 around the second swing axis AY at the frequency of the sinusoidal wave of the second signal. It becomes a resonance driving force source of the movable plate 12B. Further, the pair of end portions 21C are applied with an attractive force or a repulsive force corresponding to the sawtooth wave around the first swing axis AX to the permanent magnet 13, and serve as a non-resonant driving force source of the movable frame 12A. As a result, the optical deflector 10 drives the optical deflector 10 non-resonantly in the direction of the second swing axis AX by inputting the drive signal DS to the coil 23, and drives the optical deflector 10 to the first. It is possible to resonate drive in the direction of the swing axis AY. Therefore, a desired rotational motion (that is, swing motion) can be realized as a whole.

In other words, the angle formed by the straight line A1 connecting the pair of end portions 21C and the first swing axis AX and the second swing axis AY is the angle formed by the straight line A1 connecting the pair of end portions 21C and the first swing axis AY. The angle formed by the straight line A1 connecting the pair of end portions 21C and the second swinging shaft AY is smaller than the angle formed by the swinging shaft AX, and the coil 23 has the optical deflector 10 as the first. The optical deflector 10 is generated by inputting a drive signal DS in which the optical deflector 10 is superimposed on the first signal driven around the swing shaft AX and the second signal for driving the optical deflector 10 around the second rocking shaft AY is superimposed. Swing.

As described above, in the mirror scanner 100 of the present embodiment, the first swing axis AX and the second swing axis AX and the second swing axis AX, in which the straight line connecting the centers of the pair of end portions 21C of the yoke 21 is the swing axis of the optical deflector 10. The magnetic circuit 20 is configured by using the yoke 21 of 1 arranged so as to form a predetermined angle with the swing shaft AY. Then, a drive signal DS in which a sawtooth wave for the low speed shaft and a sine wave for the high speed shaft are superimposed is applied to the coil 23 to generate an alternating magnetic field. As a result, the mirror scanner 100 according to the present embodiment is a raster scan in which the optical deflector 10 is swung around the second swing shaft AY at high speed and around the first swing shaft AX at low speed. It becomes possible to do.

According to the mirror scanner 100 of this embodiment, the resonance drive for the high-speed axis and the non-resonance drive for the low-speed axis can be realized by using one yoke, so that the size, weight and cost of the mirror scanner can be suppressed. Is possible.

In the above embodiment, an example in which a sawtooth wave for a low-speed axis and a sine wave for a high-speed axis are superimposed as a drive signal has been described, but the present invention is not limited to this, and the first swing axis AX and the first swing axis AX and the first are not limited to this. A drive signal capable of swinging the optical deflector 10 around the swing shaft AY of 2 may be used.

Further, in the above embodiment, a case where a sawtooth wave is input as a first signal for scanning the first rocking shaft AX, which is a low speed shaft, in one direction has been described. However, the operating direction of the first swing shaft AX is not limited to one direction. For example, by inputting a sine wave having a frequency lower than that of the second signal for the high-speed axis and a larger amplitude than the second signal for the high-speed axis in order to utilize the bidirectional swing of the first swing axis AX in the outward path and the return path, Raster scan using the bidirectional swing of the first swing axis AX on the outward path and the return path becomes possible.

Further, in the above embodiment, an example in which the coil 23 is wound around the connecting portion of the yoke 21 by using a steel wire has been described. However, each configuration of the coil is not limited to this.

For example, as shown in FIG. 15, it may be composed of a first coil 23A and a second coil 23B that are continuously wound using a common steel wire. That is, each of the first coil 23A and the second coil 23B may be composed of a pair of coils separately wound around a pair of core portions, instead of one coil not separated as in the above embodiment. It is possible.

Further, as shown in FIG. 16, the coil 23 is composed of the first coil 23A and the second coil 23B wound around the pair of core portions 21A of the yoke 21, and the coil 23C wound around the connecting portion 21B. It may be configured. That is, each of the first coil portion and the second coil portion can be composed of three coils that are separately wound around the pair of core portions and the connecting portion of the yoke, respectively.

Further, as shown in FIG. 17, the coil 23 may be composed of a series of coils 23D having a length obtained by adding the three coils (23A, 23B and 23C) shown in FIG. That is, each of the first coil portion and the second coil portion may be composed of a series of coils wound over a pair of core portions and connecting portions of the yoke.

In the modified examples shown in FIGS. 15 to 17 above, an example in which coils 23A to 23C wound over a plurality of portions are continuously wound using a common steel wire has been described. However, the first, second and third coils 23A, 23B and 23C may be wound around each of the pair of core portions 21A or the connecting portion 21B of the yoke 21 by using independent steel wires. That is, in the first, second and third coils 23A, 23B and 23C, one of the pair of ends 21C of the yoke 21 becomes the north pole and the other becomes the south pole when the drive signal DS is applied. It suffices if it is wrapped around.

In other words, the coil 23 is configured such that when the drive signal DS is input, each of the pair of end portions 21C has opposite polarities.

Further, the series of processes described in the above embodiment can be performed by computer processing according to a program stored in a recording medium such as a ROM.

100 Mirror Scanner 10 Mirror 10S Light Reflecting Surface 11 Support 12 Movable 12A Movable Frame 12B Movable Plate 13 Permanent Magnet 20 Yoke 23 Coil 25 Drive Circuit of Magnetic Circuit 21

Claims (6)

A mirror that has a first surface that reflects light and can swing around the first and second axes that intersect at a predetermined angle.
Permanent magnets arranged on the second surface of the mirror, which is the surface opposite to the first surface,
A yoke having a pair of ends arranged to face the second surface of the mirror and sandwiching the permanent magnet, and a drive unit having a coil wound around the yoke.
Have,
The pair of ends is a mirror scanner characterized in that straight lines connecting the ends are arranged so as to intersect the first axis and the second axis. The angle formed by the straight line connecting the ends and the first axis and the second axis is a straight line connecting the ends and the straight line connecting the ends rather than the angle formed by the straight line connecting the ends and the first axis. The angle formed by the second axis is smaller,
A drive signal obtained by superimposing a second signal for driving the mirror around the second axis on a first signal for driving the mirror around the first axis is input to the coil, so that the mirror is formed. The mirror scanner according to claim 1, wherein the mirror scanner swings. The mirror scanner according to claim 2, wherein the first signal has a larger amplitude and a lower frequency than the second signal. The first signal is a sawtooth wave.
The mirror scanner according to claim 3, wherein the second signal is a sine wave. The invention according to any one of claims 1 to 4, wherein the coil is configured such that each of the pair of ends has opposite polarities when receiving an input of the drive signal. Mirror scanner. The permanent magnet is arranged at a position overlapping the intersection of the first axis and the second axis when viewed from a direction perpendicular to the plane including the first axis and the second axis on the second surface of the mirror. Being done
The mirror scanner according to any one of claims 1 to 5, wherein each of the pair of ends is arranged so as to face the permanent magnet.

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