JP2004191918A - Light deflector - Google Patents

Light deflector Download PDF

Info

Publication number
JP2004191918A
JP2004191918A JP2003169702A JP2003169702A JP2004191918A JP 2004191918 A JP2004191918 A JP 2004191918A JP 2003169702 A JP2003169702 A JP 2003169702A JP 2003169702 A JP2003169702 A JP 2003169702A JP 2004191918 A JP2004191918 A JP 2004191918A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
portion
mirror
pair
formed
mirror body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003169702A
Other languages
Japanese (ja)
Other versions
JP4380233B2 (en )
Inventor
Takayuki Izeki
隆之 井関
Original Assignee
Victor Co Of Japan Ltd
日本ビクター株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical deflector of a two axis oscillation type having a very simple structure. <P>SOLUTION: A magnetic spherical body 13 held between the central part of the back face of a mirror part 11e formed in a mirror body 11 and the inner peripheral face of a hemispherical hole part 12b with bottom formed on a mirror supporting base 12, is moved along the inner peripheral face of the hemispherical hole part 12b of the mirror supporting base 12 with a magnetic suction force, the mirror part 11e is two dimensionally oscillated in an X-Y plane, the price is reduced because of a simple structure, and the mirror part 11e can be tilted with a large deflection angle with a low power. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【0001】 [0001]
【発明の属する技術分野】 BACKGROUND OF THE INVENTION
本発明は、レーザー光などを2次元的に偏向できる光偏向器に関するものである。 The present invention relates to an optical deflector which can two-dimensionally deflecting the laser light or the like.
【0002】 [0002]
【従来の技術】 BACKGROUND OF THE INVENTION
最近の半導体プロセス技術と、最近のマイクロマシン技術とを利用して、シリコン基板を用いてマイクロミラーによる光偏向器が各種の機器に適用されている。 And recent semiconductor processing technology, by using the Recent micromachine technology, optical deflector according micromirrors by using a silicon substrate has been applied to various devices. この種の光偏向器は、レーザー光などを所望の方向に偏向できるため、レーザービームプリンタやバーコードリーダとか、光LANモジュールなど種々の用途に適用されている。 This type of optical deflector, it is possible to deflect the laser light or the like in a desired direction, it is applied Toka laser beam printer or a bar code reader, in a variety of applications such as optical LAN module.
【0003】 [0003]
上記した光偏向器は、レーザー光などを所望の方向に偏向する際に、マイクロミラーをX軸方向(又はY軸方向)のみ揺動させる1軸方向揺動型と、マイクロミラーをX軸方向及びY軸方向に2次元的に揺動させる2軸方向揺動型とに大別できるが、本発明に係る光偏向器は後述するように2軸方向揺動型に構成しているために、以下、2軸方向揺動型について説明する。 Optical deflector described above, when deflecting the laser light or the like in a desired direction, 1 and axially oscillating swinging the micro mirror only X-axis direction (or the Y-axis direction), X-axis direction micromirrors and can be classified into two axially oscillating for 2-dimensionally oscillatable in the Y-axis direction, the optical deflector according to the present invention in order to constitute two axially oscillating, as described below , it will be described below 2 axially oscillating.
【0004】 [0004]
ここで、2軸方向揺動型の光偏向器の従来例として、光偏向器のミラー体内に形成したミラー部を2次元的に揺動させることができるものがある(例えば、特許文献1及び特許文献2参照)。 Here, as a conventional example of an optical deflector 2 axially oscillating, there is a mirror portion formed on the mirror body of the optical deflector can be 2-dimensionally oscillatable (e.g., Patent Documents 1 and see Patent Document 2).
【0005】 [0005]
【特許文献1】 [Patent Document 1]
特開平6−180428号公報(第3頁、第1図) JP-6-180428 discloses (page 3, FIG. 1)
【0006】 [0006]
【特許文献2】 [Patent Document 2]
特開平8−32227号公報(第3頁、第1−2図) JP-8-32227 discloses (page 3, 1-2 diagram)
【0007】 [0007]
図15(a),(b)は従来例1の静電力駆動小型光スキャナを説明するために示した上面図,縦断面図、 Figure 15 (a), (b) is a top view shown in order to explain the electrostatic drive compact optical scanner of the conventional example 1, longitudinal section,
図16(a),(b)は従来例2のプレーナ型電磁アクチュエータを説明するためにそれぞれ示した斜視図である。 FIG. 16 (a), the is a perspective view showing (b), respectively to illustrate a planar type electromagnetic actuator of the conventional example 2.
【0008】 [0008]
まず、図15(a),(b)に示した従来例1の静電力駆動小型光スキャナ(光偏向器)100は、特許文献1(特開平6−180428号公報)に開示されているものであり、ここでは特許文献1を参照して簡略に説明する。 First, FIG. 15 (a), (b) the conventional example 1 of electrostatic drive compact optical scanner (optical deflector) shown 100, those disclosed in Patent Document 1 (JP-A-6-180428) , and the here briefly described with reference to Patent documents 1.
【0009】 [0009]
図15(a),(b)に示した如く、上記した従来例1の静電力駆動小型光スキャナ100では、シリコン基板を用いて矩形状のミラー体101内の各部がエッチング加工により薄肉に一体的に形成されている。 FIG. 15 (a), the as shown (b), the integral thin the electrostatic drive compact optical scanner 100 in the conventional example 1 described above, the respective portions of the mirror body 101 rectangular with silicon substrate by etching It is formed. 即ち、ミラー体101は、外枠部101aの内側にY軸走査用の梁101bとY軸方向静電吸引部101cとが一体に形成され、且つ、Y軸方向静電吸引部101cの内側にX軸走査用の梁101dとミラー部101eとが一体に形成されている。 That is, the mirror member 101, the beam 101b and the Y-axis direction electrostatic attraction portion 101c of the Y-axis scanning inside the outer frame portion 101a are integrally formed, and, on the inside of the Y-axis direction electrostatic attraction portion 101c and beam 101d and the mirror portion 101e of the X-axis scanning is integrally formed. また、ミラ−部101eの下部にX軸方向駆動電極102が配置され、且つ、Y軸方向静電吸引部101cの下部にY軸方向駆動電極103が配置されており、これらの各駆動電極102,103は電極基板104上に形成されて駆動電極配線部105に接続されている。 Further, Mira - X-axis direction driving electrode 102 on the lower parts 101e are disposed, and are arranged in the Y-axis direction driving electrode 103 at the bottom of the Y-axis direction electrostatic attraction portion 101c, each of these drive electrodes 102 , 103 is formed on the electrode substrate 104 is connected to the drive electrode wiring portion 105. この際、各駆動電極102,103上には絶縁膜106が膜付けされている。 At this time, on each of the drive electrodes 102 and 103 insulating film 106 is film with.
【0010】 [0010]
また、ミラー体101と電極基板104との間には、ミラー体101内に形成したミラ−部101eと各駆動電極102,103間のギャップをきめる支持スペ−サ部107が設けられている。 Between the mirror body 101 and the electrode substrate 104, Mira was formed on the mirror body 101 - parts 101e and supporting space determines the gap between the drive electrodes 102 and 103 - service unit 107 is provided.
【0011】 [0011]
ここで、上記のように構成された2軸方向走査可能な静電力駆動小型光スキャナ100の動作について説明する。 Here, the configuration has been biaxially scannable operation of electrostatic drive the small-sized optical scanner 100 as described above.
【0012】 [0012]
まず、X軸方向駆動電極102に電圧を印加することにより、ミラー体101内に形成したミラ−部101eは静電力を受けて、X軸走査用の梁101dと支持スペ−サ部107を支点として傾動するので、レーザー光をX軸方向に走査する。 First, by applying a voltage to the X-axis direction driving electrode 102, Mira was formed on the mirror body 101 - fulcrum support 107 - part 101e receives the electrostatic force, a beam 101d of the X-axis scanning support space since tilts as to scan the laser beam in the X-axis direction.
【0013】 [0013]
次に、Y軸方向駆動電極103に電圧を印加すると、Y軸方向静電吸引部101cが静電力を受けて、Y軸走査用の梁101bと支持スペ−サ部107を支点として傾動するので、ミラ−部101eはY軸方向静電吸引部101cと一体となりレーザー光をY軸方向に走査する。 Next, when a voltage is applied to the Y-axis direction drive electrode 103 receives the electrostatic force Y axis direction electrostatic attraction portion 101c, and support beams 101b for Y-axis scanning space - so tilts the support portion 107 as a fulcrum Mira - parts 101e scans the laser beam in the Y-axis direction becomes integrated with the Y-axis direction electrostatic attraction portion 101c.
【0014】 [0014]
従って、X軸,Y軸方向の各駆動電極102,103にそれぞれ電圧を印加して、ミラー体101内に形成したミラ−部101eを静電力により吸引させた時に、ミラ−部101eに照射したレ−ザー光が2軸方向走査可能となる。 Therefore, X-axis, by applying a respective voltage to each of the driving electrodes 102 and 103 in the Y-axis direction, mirror formed in the mirror body 101 - a section 101e when sucked by an electrostatic force, Mira - was irradiated to part 101e Le - Heather light becomes possible 2 axial scan.
【0015】 [0015]
次に、図16(a),(b)に示した従来例2のプレーナ型電磁アクチュエータ(光偏向器)200は、特許文献2(特開平8−32227号公報)に開示されているものであり、ここでは特許文献2を参照して簡略に説明する。 Next, FIG. 16 (a), the conventional example 2 of a planar type electromagnetic actuator (optical deflector) 200 shown in (b) is that which is disclosed in Patent Document 2 (JP-A-8-32227) There, here briefly described with reference to Patent Document 2.
【0016】 [0016]
図16(a)に示した如く、上記した従来例2のプレーナ型電磁アクチュエータ(ガルバノミラー)200では、絶縁基板201上の中央部位に例えばシリコン基板を用いて可動部と軸支部とを一体形成したスキャナ本体210が略45°の角度を持って斜めに配置されていると共に、絶縁基板201の上面周囲に例えば磁性体である純鉄からなる枠状のヨーク202が設けられている。 As shown in FIG. 16 (a), the planar type electromagnetic actuator (galvanometer mirror) 200 of the conventional example 2 described above, formed integrally with the movable portion and the shaft support with the central portion of the insulating substrate 201, for example, a silicon substrate with scanner 210 is disposed obliquely at an angle of approximately 45 °, a frame-shaped yoke 202 made on the top surface surrounding insulating substrate 201 from pure iron such as magnetic body is provided. また、スキャナ本体210を挟んでヨーク202の互いに対面する2辺の内側には、静磁界発生手段として一対の永久磁石203,204が設けられている。 Further, on the inside of each other facing two sides of the yoke 202 across the scanner body 210, a pair of permanent magnets 203 and 204 is provided as a static magnetic field generating means. 更に、スキャナ本体210は、4本の導線205を介して4本のコネクタピン206に接続されている。 Furthermore, the scanner main body 210 is connected to the four connector pins 206 through the four conductors 205.
【0017】 [0017]
また、図16(b)に拡大して示した如く、上記したスキャナ本体210は、シリコン基板211に、枠状の外側可動板212Aと平板状の内側可動板212Bとからなる可動部と、外側可動板212Aを軸支する第1トーションバー213A,213Aと外側可動板212Aに対して内側可動板212Bを軸支する第2トーションバー213B,213Bとを互いに直交させた軸支部とを、異方エッチングによって一体形成している。 Further, as shown enlarged in FIG. 16 (b), the scanner main body 210 described above, the silicon substrate 211, a movable portion comprising a frame-shaped outer movable plate 212A a flat inner movable plate 212B, the outer the first torsion bar 213A for supporting the movable plate 212A, the second torsion bars 213B for supporting the inner movable plate 212B relative 213A and the outer movable plate 212A, and a shaft support which are perpendicular to each other and 213B, anisotropic It is integrally formed by etching.
【0018】 [0018]
また、外側可動板212A上には、例えば銅薄膜の駆動コイルとしての平面コイル215Aが形成され、且つ、この平面コイル215Aは第1トーションバー213A,213Aの一方を介してシリコン基板211上の一対の外側電極端子214A,214Aに電気的に接続されている。 Further, on the outer movable plate 212A, for example, the planar coil 215A as a drive coil of the copper thin film is formed, and this planar coil 215A is first torsion bar 213A, a pair of the silicon substrate 211 through one of 213A the outer electrode terminals 214A, is electrically connected to the 214A.
【0019】 [0019]
また、内側可動板212B上にも平面コイル215Bが形成され、且つ、この平面コイル215Bも第2トーションバー213B,213Bの一方から外側可動板212A部分を通り第1トーションバー213A,213Aの他方側を介してシリコン基板211上の内側電極端子214B,214Bに電気的に接続されている。 Also, the planar coil 215B is formed on the inner movable plate 212B, and this planar coil 215B The second torsion bars 213B, outer movable from one 213B plate 212A moiety through first torsion bars 213A, the other side of 213A inner electrode terminal 214B of the silicon substrate 211 through, and is electrically connected to the 214B.
【0020】 [0020]
更に、内側可動板212Bの上面中央部には、例えばアルミニウム蒸着により全反射ミラー216が形成されている。 Further, the upper central portion of the inner movable plate 212B, the total reflection mirror 216 is formed by, for example, aluminum deposition.
【0021】 [0021]
ここで、上記のように構成された2軸方向走査可能な電磁アクチュエータの動作について説明すると、永久磁石203で発生した磁界は、絶縁基板201上のスキャナー本体210を横切って永久磁石204に向かう。 Here, the operation of the two axial directions scannable electromagnetic actuator configured as described above, the magnetic field generated by the permanent magnet 203 is directed to the permanent magnet 204 across the scanner body 210 on the insulating substrate 201. この際、磁界はスキャナ本体210の平面内で互いに直交する横成分磁界と縦成分磁界とが存在し、横成分磁界は外側可動板212Aを軸支する第1トーションバー213A,213Aの軸方向と直角方向であり、縦成分磁界は内側可動板212Bを軸支する第2トーションバー213B,213Bの軸方向と直角方向となるので、外側可動板212A上の平面コイル215Aに電流を流すと、この電流と前記横成分磁界との作用により磁気力が発生して外側可動板212Aが駆動され、また、同様にして、内側可動板212B上の平面コイル215Bに電流を流すと、この電流と前記縦成分磁界との作用により磁気力が発生して内側可動板212Bが駆動されるので、内側可動板212B上に形成した反射ミラー216が2軸方向に揺動自 At this time, the magnetic field is present and the transverse component magnetic field and a vertical component magnetic field perpendicular to each other in the plane of the scanner main body 210, the transverse component magnetic field first torsion bar 213A for supporting the outer movable plate 212A, and the axial direction of 213A a perpendicular, second torsion bars 213B longitudinal component magnetic field for supporting the inner movable plate 212B, since the axial direction perpendicular to the direction of 213B, when an electric current is applied to the planar coil 215A on the outer movable plate 212A, the current and the magnetic force by the action of the transverse component magnetic field is driven outer movable plate 212A is generated, also, in the same manner, when an electric current is applied to the planar coil 215B on the inner movable plate 212B, the this current vertical since the magnetic force is generated by the action of the component field inner movable plate 212B is driven, oscillating self reflection mirror 216 formed on the inner movable plate 212B is biaxially となっている。 It has become.
【0022】 [0022]
【発明が解決しようとする課題】 [Problems that the Invention is to Solve
ところで、図15(a),(b)を用いて説明した従来例1の静電力駆動小型光スキャナ(光偏向器)100では、ミラー体101内に形成したミラー部101eの振れ角(光偏向角度)を大きくするためには、ミラー部101eとX軸,Y軸方向の各駆動電極102,103とのギャップ(間隔)を大きくする必要がある。 Incidentally, FIG. 15 (a), the the electrostatic force of the conventional example 1 described with reference to (b) driving a small optical scanner (optical deflector) 100, the deflection angle of the mirror portion 101e formed in the mirror body 101 (the light deflector in order to increase the angle), the mirror portion 101e and the X-axis, it is necessary to increase the gap (interval) between the drive electrodes 102 and 103 in the Y-axis direction. この際、一般的に静電力はギャップの2乗に反比例するので、ギャップを大きくすると、ミラー体101内に形成したミラー部101eへの駆動力を得るのに大きな電圧を必要とするなどの問題がある。 At this time, since the general electrostatic force is inversely proportional to the square of the gap, the larger the gap, such as requiring a large voltage to obtain a driving force to the mirror portion 101e formed in the mirror body 101 in question there is.
【0023】 [0023]
一方、図16(a),(b)を用いて説明した従来例2の静電力駆動小型光スキャナ(光偏向器)200において、平面コイル215A,215Bにそれぞれ電流を流した時にローレンツ力で発生させることの出来る力は、磁界の吸引力に比べて小さいので、ミラー体210内に形成した反射ミラー216を傾動させる際に大きな駆動力を得ることは難しい。 On the other hand, FIG. 16 (a), the in the conventional example 2 of the electrostatic force driving the compact optical scanner (optical deflector) 200 described with reference to (b), generated by Lorentz force upon applying each current planar coil 215A, the 215B force that can be is smaller than the suction force of the magnetic field, it is difficult to obtain a large driving force reflecting mirror 216 which is formed in the mirror body 210 when tilting. また、ミラー体210内に形成した反射ミラー216が小さくなるとそこに巻く平面コイル215A,215Bの巻き数が少なくなってしまう。 The planar coils 215A wound thereon when the reflection mirror 216 formed in the mirror body 210 is reduced, the number of turns of 215B becomes small.
【0024】 [0024]
そこで、ミラー体内に形成したミラー部を少ない駆動電力で2次元的に大きく傾動させることができ、且つ、構造が簡単な2軸揺動型の光偏向器が望まれている。 Therefore, two-dimensionally a mirror portion formed on the mirror body with less driving power increases can be tilted, and, it has been desired simple 2 JikuYurado type optical deflector structure.
【0025】 [0025]
【課題を解決するための手段】 In order to solve the problems]
本発明は上記課題に鑑みてなされたものであり、第1の発明は、外枠部内から一対の第1梁部を互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第1梁部間に形成した内枠部を該一対の第1梁部を中心にして揺動可能に支持すると共に、前記一対の第1梁部に対して直交させた一対の第2梁部を前記内枠部内から互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第2梁部間に形成したミラー部を該一対の第2梁部を中心にして揺動可能に支持したミラー体と、 The present invention has been made in view of the above problems, a first invention, respectively by extending inwardly a first beam portion of the pair from the outer frame portion to face each other, and the pair of the first beam the inner frame portion formed between the parts as well as pivotably supported about a first beam portion of said pair, said second beam portions of the pair obtained by orthogonal to the pair of first beam portion each is extended inward to face each other from within the frame section, and the mirror body and a mirror portion formed between the second beam portion of the pair was swingably supported about a second beam portions of said pair ,
前記ミラー体の外枠部の裏面を支持するための上面外周部と、この上面外周部の内側に開口して半径Rの半球状有底穴部とを形成したミラー体支持台と、 And the upper surface outer peripheral portion for supporting the back surface of the outer frame portion of the mirror body, a mirror body supporting base forming a hemispherical bottomed hole of radius R open to the inside of the upper surface outer peripheral portion,
前記ミラー体支持台に形成した前記半球状有底穴部の半径Rに対してR/2の半径で球状に磁性材を用いて形成され、且つ、前記ミラー体を前記ミラー体支持台の上面外周部上に取り付けた状態で前記ミラー体内に形成した前記ミラー部の裏面中心部と、前記半球状有底穴部の内周面との間に挟まれながら両者にそれぞれ点接触する磁性球体と、 The spherically formed using a magnetic material with respect to the radius R of the mirror body has been formed to the support the hemispherical perforated bottom hole portion at R / 2 of the radius, and the upper surface of the mirror-body support the mirror body and the back center of the mirror portion in a state mounted on the outer peripheral portion is formed on the mirror body, a magnetic sphere respectively contact points both while being sandwiched between the inner peripheral surface of the hemispherical perforated bottom hole portion ,
前記磁性球体を磁気的に吸引して該磁性球体を前記ミラー体支持台に形成した前記半球状有底穴部の内周面に沿って移動させることで、前記ミラー体内に形成した前記一対の第1梁部及び前記内枠部並びに前記一対の第2梁部を介して前記ミラー部を2次元的に傾動させる磁界発生手段とを備えたことを特徴とする光偏向器である。 The magnetic sphere by moving along the inner peripheral surface of the hemispherical perforated bottom hole portion of the magnetic sphere is formed on the mirror-body support and magnetically attracted, the pair of which is formed in the mirror body an optical deflector, characterized in that a magnetic field generating means for two-dimensionally tilting the mirror through the first beam portion and the inner frame portion and the second beam portion of the pair.
【0026】 [0026]
また、第2の発明は、外枠部内から一対の第1梁部を互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第1梁部間に形成した内枠部を該一対の第1梁部を中心にして揺動可能に支持すると共に、前記一対の第1梁部に対して直交させた一対の第2梁部を前記内枠部内から互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第2梁部間に形成したミラー部を該一対の第2梁部を中心にして揺動可能に支持したミラー体と、 The second invention, respectively by extending inwardly a first beam portion of the pair from the outer frame portion to face each other and the inner frame portion formed between the first beam portion of the pair of the pair while supporting so as to be swingable around the first beam portion, extending the second beam portion of the pair obtained by orthogonal to the pair of first beam portion inside each facing each other from the inner frame portion It is allowed, and the mirror body mirror portion formed between the second beam portion of the pair was swingably supported about a second beam portions of said pair,
前記ミラー体内に形成した前記ミラー部の裏面中心部に一端部が固着され、且つ、前記一端部から他端部に向かって棒状に延出し、それぞれの端部にN極,S極の磁化方向が与えられた永久磁石棒と、 One end is fixed to the back surface center portion of the mirror portion formed on the mirror body, and extends into a rod toward the other end from the one end, N pole at each end, the magnetization direction of the S pole and the permanent magnet rod is given,
前記ミラー体の外枠部の裏面を支持するための上面外周部と、この上面外周部の内側に開口した有底穴部とを形成したミラー体支持台と、 And the upper surface outer peripheral portion for supporting the back surface of the outer frame portion of the mirror body, a mirror body supporting base forming the bottomed hole opened in the inner side of the upper surface outer peripheral portion,
前記ミラー体を前記ミラー体支持台の上面外周部上に取り付けて、前記ミラー体内に形成した前記ミラー部の裏面に固着した前記永久磁石棒を前記ミラー体支持台の有底穴部内に収納した状態で、前記永久磁石棒の周面から所定距離隔てて載置され、且つ、前記永久磁石棒の他端部を磁気的に吸引及び/又は反発させることで、前記ミラー体内に形成した前記一対の第1梁部及び前記内枠部並びに前記一対の第2梁部を介して前記ミラー部を2次元的に傾動させる磁界発生手段とを備えたことを特徴とする光偏向器である。 Attaching the mirror body to the mirror-body support of the upper surface outer peripheral portion on and accommodating the permanent magnet rod fixed to the rear surface of said mirror unit formed in the mirror body in the mirror body supporting base having a bottom in the hole state, the placed a predetermined distance away from the peripheral surface of the permanent magnet bars, and the other end portion of the permanent magnet rod that is magnetically attracted and / or repelled, the pair formed in the mirror body an optical deflector, characterized in that the first beam portion and the inner frame portion and the mirror portion through the second beam portion of the pair and a magnetic field generating means for two-dimensionally tilted in.
【0027】 [0027]
【発明の実施の形態】 DETAILED DESCRIPTION OF THE INVENTION
以下に本発明に係る光偏向器の一実施例を図1乃至図14を参照して、第1実施例,第2実施例の順に詳細に説明する。 An example of an optical deflector according to the present invention below with reference to FIGS. 1 to 14, the first embodiment will be described in detail in the order of the second embodiment.
【0028】 [0028]
<第1実施例の光偏向器> <Optical deflector of the first embodiment>
図1は本発明に係る第1実施例の光偏向器の構成を説明するための分解斜視図、図2は本発明に係る第1実施例の光偏向器の動作を説明するための縦断面図であり、(a)はミラー体の初期状態を示し、(b)はミラー体内に形成したミラー部を一対の第2梁部(X軸)を中心にして反時計方向に揺動した状態を示し、(c)はミラー体内に形成した内枠部及び一対の第2梁部並びにミラー部を一対の第1梁部(Y軸)を中心にして反時計方向に揺した状態を示した図である。 Figure 1 is an exploded perspective view for explaining the structure of an optical deflector of a first embodiment according to the present invention, longitudinal section for explaining the operation of the optical deflector of the first embodiment according to Figure 2 the present invention a diagram, (a) state indicates the initial state of the mirror body, (b) is obtained by swinging the mirror portion formed on the mirror body in a counterclockwise direction and the second beam portion of the pair of (X-axis) to the center the indicated showed (c) the state where the swinging of the second beam portion and the mirror portion of the inner frame and a pair formed in the mirror body with the first beam portion of the pair of (Y-axis) to the center counterclockwise it is a diagram.
【0029】 [0029]
図1に示した如く、本発明に係る第1実施例の光偏向器10Aでは、ミラー体11が薄い厚みのシリコン,ポリイミド,ステンレスなどの材料を用いて正方形状に形成され、且つ、このミラー体11を支持するミラー体支持台12の上面外周部12aも正方形状に形成されている。 As shown in Figure 1, the optical deflector 10A of the first embodiment according to the present invention, is formed in a square shape by using a silicon mirror body 11 is a thin thickness, a polyimide, a material such as stainless, and, the mirror top peripheral portion 12a of the mirror member support 12 for supporting the body 11 is also formed in a square shape.
【0030】 [0030]
尚、以下の説明の都合上、ミラー体11の中心及びミラー体支持台12の上面外周部12aの中心を2軸座標系のX軸とY軸とで直交させて図示している。 Incidentally, for convenience of the description below, are illustrated by the centers of and the upper surface outer peripheral portion 12a of the mirror body support 12 of the mirror body 11 is orthogonal to the X and Y axes of the two-axis coordinate system.
【0031】 [0031]
上記したミラー体11は、外枠部11aの内側に、一対の第1梁部11b,11bと、内枠部11cと、一対の第2梁部11d,11dと、ミラー部11eとが一体的に形成されている。 Mirror body 11 described above, the inside of the outer frame portion 11a, a pair of first beam portions 11b, 11b and an inner frame portion 11c, a pair of second beam portions 11d, 11d and, integrally with the mirror portion 11e is It is formed in.
【0032】 [0032]
より具体的に説明すると、ミラー体11は、外枠部11a内から一対の第1梁部11b,11bをY軸上で互いに対向してそれぞれ内側に延出させ、且つ、一対の第1梁部11b,11b間に形成したリング状の内枠部11cを一対の第1梁部11b,11b(Y軸)を中心にしてX軸方向に揺動可能に支持すると共に、一対の第1梁部11b,11bに対して直交させた一対の第2梁部11d,11dをX軸上でリング状の内枠部11c内から互いに対向してそれぞれ内側に延出させ、且つ、一対の第2梁部11d,11d間に形成した円盤状のミラー部11eを一対の第2梁部11d,11d(X軸)を中心にしてY軸方向に揺動可能に支持している。 To be more specific, the mirror body 11, a first beam portion 11b from the outer frame portion 11a of the pair, 11b and by extending inward respectively opposite each other on the Y-axis, and a pair of the first beam parts 11b, the first beam portion 11b of the ring-shaped inner frame section 11c which is formed between 11b of the pair, 11b together around the (Y-axis) swingably supported in the X axis direction, a pair of the first beam parts 11b, is extended inwardly respectively to face each other from the ring-shaped inner frame portion 11c second beam portions 11d of the pair obtained by orthogonally and 11d on the X-axis with respect to 11b, and a pair second beam portions 11d, and a second beam portion 11d of the disk-shaped mirror portion 11e formed in the pair between 11d, around the 11d (X-axis) and swingably supported on the Y-axis direction.
【0033】 [0033]
この際、ミラー体11内に形成した一対の第1梁部11b,11b及び一対の第2梁部11d,11dは、捩じりバネ性を備える材料特性、構造を有している。 At this time, the pair of first beam portion 11b which is formed in the mirror body 11, 11b and the pair of second beam portions 11d, 11d, the material properties comprise a torsion spring property, it has a structure. また、ミラー体11の外枠部11aと内枠部11cとの間で一対の第1梁部11b,11bが接続している部位を除いてエッチングなどの処理により貫通してくりぬかれていると共に、内枠部11cとミラー部11eとの間で一対の第2梁部11d,11dが接続している部位を除いてエッチングなどの処理により貫通してくりぬかれている。 The pair of first beam portion 11b between the outer frame portion 11a and the inner frame portion 11c of the mirror body 11, except for the portion 11b is connected with being hollowed out through a process such as etching It is hollowed out through except for a site where a pair of second beam portions 11d between the inner frame portion 11c and the mirror portion 11e, 11d are connected by a process such as etching. また、ミラー体11内に形成したミラー部11eは上面側が鏡面に形成されている。 The mirror portion 11e formed in the mirror body 11 is an upper surface side is formed on the mirror surface.
【0034】 [0034]
次に、ミラー体11を支持するためのミラー体支持台12は直方形状に形成されている。 Then, the mirror body support 12 for supporting the mirror member 11 is formed in a rectangular shape. このミラー体支持台12は、ミラー体11の外枠部11aの裏面を取り付けるために上面外周部12aが平坦に正方形状に形成され、且つ、正方形状の上面外周部12aの内側にこの上面外周部12aの中心点を中心にして半径Rの半球状有底穴部12bが開口して形成されている。 The mirror body support 12 has an upper surface outer peripheral portion 12a for attaching the rear surface of the outer frame portion 11a of the mirror member 11 is formed in a flat square shape, and this top periphery to the inside of the square upper surface outer peripheral portion 12a hemispherical perforated bottom hole portion 12b of the radius R is formed open around the center point of the section 12a.
【0035】 [0035]
また、ミラー体支持台12に形成した半球状有底穴部12b内には、磁性球体13が回転可能に収納されている。 Further, the mirror body support 12 to form the hemispherical closed bottom hole portion 12b, magnetic spheres 13 are rotatably received. この磁性球体13は磁性材を用いてミラー体支持台12の半球状有底穴部12bの半径Rに対してR/2の半径で球状に形成されている。 The magnetic sphere 13 is formed into a spherical shape by R / 2 of the radius with respect to the radius R of the hemispherical closed bottom hole portion 12b of the mirror body support 12 using a magnetic material.
【0036】 [0036]
そして、ミラー体11の外枠部11aの裏面をミラー体支持台12の上面外周部12a上に取り付けた時に、磁性球体13がミラー体11内に形成したミラー部11eの裏面中心部と、ミラー体支持台12に形成した半球状有底穴部12bの内周面との間に挟まれた状態で収納されるので、磁性球体13はミラー部11eの裏面中心部に対して一点で接触し、且つ、半球状有底穴部12bの内周面に対しても一点で接触している。 Then, the back surface of the outer frame portion 11a of the mirror body 11 when mounted on the upper surface outer peripheral portion 12a of the mirror body support 12, and the back central part of the mirror 11e to magnetic spherical bodies 13 is formed in the mirror body 11, a mirror since housed in sandwiched state between the inner peripheral surface of the hemispherical closed bottom hole portion 12b formed on the body support 12, magnetic spheres 13 in contact at a single point with respect to the back surface center portion of the mirror 11e and are in contact at a single point with respect to the inner peripheral surface of the hemispherical closed bottom hole portion 12b.
【0037】 [0037]
また、直方形状のミラー体支持台12において、互いに対向する外側面12c,12eの外側にはX軸に沿って一対の電磁石14X,14Xがそれぞれ設置され、且つ、互いに対向する外側面12d,12fの外側にもY軸に沿って一対の電磁石14Y,14Yがそれぞれ設置されている。 Further, the mirror body support 12 of rectangular shape, mutually facing outer surfaces 12c, 12e of the pair of electromagnets 14X along the X-axis on the outside, 14X are installed respectively, and the outer surface 12d facing each other, 12f a pair of electromagnets 14Y also along the Y axis to the outside, 14Y are installed respectively.
【0038】 [0038]
上記した一対の電磁石14X,14X及び一対の電磁石14Y,14Yは共に同じように構成されて磁性球体13に対する磁界発生手段となっており、各電磁石14X,14Yは鉄心15に沿ってコイル16が巻回され、且つ、コイル16にスイッチ17と可変抵抗器18と直流電源19とが直列で接続されている。 A pair of electromagnets 14X as described above, 14X and the pair of electromagnets 14Y, 14Y has a magnetic field generating means to the magnetic sphere 13 is configured both like, the electromagnets 14X, 14Y is a coil 16 along the core 15 is wound wound, and a switch 17 and a variable resistor 18 and the DC power source 19 is connected in series to the coil 16.
【0039】 [0039]
ここで、上記構成による第1実施例の光偏向器10Aの動作を図2(a)〜(c)を用いて説明する。 Here will be described with reference to FIG. 2 (a) ~ (c) the operation of the optical deflector 10A of the first embodiment of the above construction.
【0040】 [0040]
まず、図2(a)に示した如く、ミラー体11の外枠部11aの裏面をミラー体支持台12上に取り付けて、光偏向器10Aが初期状態の時に、ミラー体11内に形成した一対の第1梁部11b,11b(図1)及び一対の第2梁部11d,11dの捩じりバネ性による復元力により内枠部11c及びミラー部11eはミラー体支持台12上で略水平な姿勢を維持している。 First, as shown in FIG. 2 (a), is attached to the rear surface of the outer frame portion 11a of the mirror member 11 on the mirror body support 12, when the optical deflector 10A is in the initial state was formed in the mirror body 11 a pair of first beam portions 11b, 11b (FIG. 1) and a pair of second beam portions 11d, the inner frame portion 11c and the mirror portion 11e by the restoring force due to the torsion spring of the 11d is substantially on the mirror body support 12 while maintaining a horizontal attitude. また、この初期状態の時に、ミラー体支持台12の外側面12d,12fの外側でY軸に沿って設けた一対の電磁石14Y,14YはOFF状態を維持しているので磁界が発生しない。 Further, when the initial state, the outer surface 12d of the mirror body support 12, a pair which is provided along the Y-axis outside the 12f electromagnetic 14Y, 14Y has no magnetic field is generated so maintains the OFF state. 勿論、ここでの図示を省略しているがミラー体支持台12の外側面12c,12eの外側でX軸に沿って設けた一対の電磁石14X,14XもOFF状態を維持している。 Of course, here not shown in that it maintains the outer surface 12c of the mirror body support 12, a pair of electromagnets 14X provided along the X axis outside of 12e, 14X also OFF state. 従って、ミラー体11内に形成したミラー部11eの裏面中心部と、ミラー体支持台12に形成した半球状有底穴部12bの内周面との間に挟まれた磁性球体13は、この半径が半球状有底穴部12bの半径Rの半分(R/2)に形成されているので、ミラー部11eの裏面中心部と半球状有底穴部12bの内周面真下中央部とにそれぞれ点接触している。 Therefore, magnetic spheres 13 sandwiched between the back surface center portion of the mirror portion 11e formed in the mirror body 11, and the inner peripheral surface of hemispherical perforated bottom hole portion 12b formed in the mirror body support 12, the since the radius is formed on one half of the radius R of the hemispherical closed bottom hole portion 12b (R / 2), on the inner peripheral surface beneath the central portion of the rear surface center and hemispherical perforated bottom hole portion 12b of the mirror 11e in contact points, respectively.
【0041】 [0041]
次に、図2(b)に示した如く、ミラー体11内に形成したミラー部11eのみを初期状態から一対の第2梁部11d,11d(X軸)を中心にして反時計方向に揺動させる場合には、ミラー体支持台12の外側面12fの外側に設けた電磁石14YだけをON状態にする。 Next, as shown in FIG. 2 (b), the second beam portion 11d only mirror portion 11e formed in the mirror body 11 from the initial state of the pair, 11d (X-axis) rocking to the counterclockwise direction about the in case of moving, only the to oN state electromagnet 14Y provided outside of the outer surface 12f of the mirror body support 12. ここで、ミラー体支持台12の外側面12fの外側に設けた電磁石14Yは、スイッチ17をONした時に直流電源19から可変抵抗器18の抵抗値に応じた電流がコイル16を通して流れるので、鉄心15に電流値に応じた磁界が発生し、この磁界に応じた電磁力(吸引力)によって磁性球体13が半球状有底穴部12bの内周面に沿って矢印方向に吸引されて移動する。 Here, an electromagnet 14Y provided on the outside of the outer surface 12f of the mirror body support 12, since current corresponding from the DC power source 19 when the ON switch 17 to the resistance value of the variable resistor 18 flows through the coil 16, the core 15 a magnetic field is generated in accordance with the current value, magnetic spherical bodies 13 by the electromagnetic force (attraction force) moves is attracted in the arrow direction along the inner peripheral surface of the hemispherical closed bottom hole portion 12b in accordance with the magnetic field . この際、上記した電磁石14Yによる電磁力は、磁性球体13を吸引するための吸引力が作用するようにコイル16の巻回方向と直流電源19の±極の接続方向とを予め設定している。 At this time, the electromagnetic force by the electromagnet 14Y described above is set in advance and connection direction of ± pole winding direction and the DC power supply 19 of the coil 16 as the suction force for attracting the magnetic sphere 13 acts . そして、磁性球体13の矢印方向の移動に伴って、磁性球体13は、ミラー体11内に形成したミラー部11eの裏面中心部と、半球状有底穴部12bの内周面真下中央部からY軸上でRtanαだけ右斜め上方に変位した部位とにそれぞれ点接触するので、ミラー部11eのみが一対の第2梁部11d,11d(X軸)を中心にして角度αだけ反時計方向(矢印方向)に傾動する。 Then, with the movement of the arrow direction of the magnetic sphere 13, magnetic spheres 13, and the back central part of the mirror portion 11e formed in the mirror body 11, from the inner peripheral surface beneath the central portion of the hemispherical closed bottom hole section 12b since contact each point on the Y axis and the site displaced to the right obliquely upward by Rtanarufa, only the mirror portion 11e is a pair of second beam portions 11d, 11d of the (X-axis) to the central angle α a counterclockwise direction ( tilted in the direction of the arrow). この際、ミラー体11内に形成したミラー部11eの傾斜角度は可変抵抗器18の抵抗値を制御すれば良い。 At this time, the angle of inclination of the mirror portion 11e formed in the mirror body 11 may be controlled resistance value of the variable resistor 18.
【0042】 [0042]
尚、ミラー体11内に形成したミラー部11eのみを初期状態から一対の第2梁部11d,11d(X軸)を中心にして時計方向に揺動させる場合には、上記した図2(b)の場合とは逆に、ミラー体支持台12の外側面12dの外側に設けた電磁石14Yを作動させれば良いものである。 In the case where the second beam portion 11d only mirror portion 11e formed in the mirror body 11 from the initial state of the pair, around the 11d (X-axis) is swung in the clockwise direction, FIG. 2 described above (b contrary to the case of), in which the electromagnet 14Y provided outside of the outer side surface 12d of the mirror body support 12 it is sufficient to operate.
【0043】 [0043]
次に、図2(c)に示した如く、ミラー体11内に形成した内枠部11c及び一対の第2梁部11d,11d並びにミラー部11eを初期状態から一対の第1梁部11b,11b(Y軸)を中心にして反時計方向に揺動させる場合には、ミラー体支持台12の外側面12cの外側に設けた電磁石14XだけをON状態にする。 Next, as shown in FIG. 2 (c), the first beam portion 11b second beam portions 11d inner frame 11c is formed in the mirror body 11 and a pair, and 11d as well as the mirror portion 11e from the initial state of the pair, If swinging around the 11b (Y axis) in a counterclockwise direction, only to oN state electromagnets 14X provided outside of the outer side surface 12c of the mirror body support 12. ここでも、ミラー体支持台12の外側面12cの外側に設けた電磁石14Xは、スイッチ17をONした時に直流電源19から可変抵抗器18の抵抗値に応じた電流がコイル16を通して流れるので、鉄心15に電流値に応じた磁界が発生し、この磁界に応じた電磁力(吸引力)によって磁性球体13が半球状有底穴部12bの内周面に沿って矢印方向に吸引されて移動する。 Again, electromagnets 14X provided on the outside of the outer surface 12c of the mirror body support 12, since current corresponding from the DC power source 19 when the ON switch 17 to the resistance value of the variable resistor 18 flows through the coil 16, the core 15 a magnetic field is generated in accordance with the current value, magnetic spherical bodies 13 by the electromagnetic force (attraction force) moves is attracted in the arrow direction along the inner peripheral surface of the hemispherical closed bottom hole portion 12b in accordance with the magnetic field . そして、磁性球体13の矢印方向の移動に伴って、磁性球体13は、ミラー体11内に形成したミラー部11eの裏面中心部と、半球状有底穴部12bの内周面真下中央部からX軸上でRtanβだけ右斜め上方に変位した部位とにそれぞれ点接触するので、内枠部11c及び一対の第2梁部11d,11d並びにミラー部11eが一体となって一対の第1梁部11b,11b(Y軸)を中心にして角度βだけ反時計方向(矢印方向)に傾動する。 Then, with the movement of the arrow direction of the magnetic sphere 13, magnetic spheres 13, and the back central part of the mirror portion 11e formed in the mirror body 11, from the inner peripheral surface beneath the central portion of the hemispherical closed bottom hole section 12b since contacts each point on the site displaced to the right obliquely upward by Rtanβ on the X-axis, the inner frame portion 11c and a pair of second beam portions 11d, 11d and the first beam portion mirror portion 11e of the pair together 11b, tilts 11b around the (Y-axis) by an angle β counterclockwise direction (arrow direction). この際、ミラー体11内に形成した内枠部11c及び一対の第2梁部11d,11d並びにミラー部11eの傾斜角度は可変抵抗器18の抵抗値を制御すれば良い。 At this time, the second beam portion 11d inner frame 11c is formed in the mirror body 11 and a pair, 11d and the inclination angle of the mirror portion 11e may be controlled resistance value of the variable resistor 18.
【0044】 [0044]
尚、ミラー体11内に形成した内枠部11c及び一対の第2梁部11d,11d並びにミラー部11eを初期状態から一対の第1梁部11b,11b(Y軸)を中心にして時計方向に揺動させる場合には、上記した図2(c)の場合とは逆に、ミラー体支持台12の外側面12eの外側に設けた電磁石14Xを作動させれば良いものである。 Incidentally, clockwise second beam portion 11d inner frame 11c is formed in the mirror body 11 and a pair, and 11d as well as the mirror portion 11e and the first beam portion 11b from the initial state of the pair, 11b and (Y-axis) to the center in the case of swinging, the case of FIG. 2 (c) above to the contrary, it is intended the electromagnets 14X provided outside of the outer side surface 12e of the mirror body support 12 it is sufficient to operate.
【0045】 [0045]
上記では、図2(b)の動作と、図2(c)の動作とをそれぞれ個別に説明したが、ミラー体支持台12の外側面12c,12eの外側に設けた一対の電磁石14X,14Xのいずれか一方と、ミラー体支持台12の外側面12d,12fの外側に設けた一対の電磁石14Y,14Yのいずれか一方とを選択的に組み合わせて動作させれば、両電磁石14X,14Yの組み合わせに応じて発生する合成磁界による吸引力の方向に磁性球体13が半球状有底穴部12bの内周面に沿って移動するので、ミラー体11内に形成した一対の第1梁部11b,11b及び内枠部11c並びに一対の第2梁部11d,11dを介してミラー部11eをXY平面内で2次元的に揺動させることができる。 In the above, operation of the FIG. 2 (b), the have been described in operation and each individually FIG. 2 (c), the outer surface 12c of the mirror body support 12, a pair which is provided on the outside of 12e electromagnets 14X, 14X of one and one outer surface 12d of the mirror body support platform 12, 12f pair of electromagnets 14Y provided outside of, if operated selectively combining the one of 14Y, both electromagnets 14X, the 14Y since magnetic spherical 13 in the direction of the suction force by the synthetic magnetic field generated in response to the combination moves along the inner peripheral surface of the hemispherical closed bottom hole portion 12b, the first beam portions 11b of the pair formed in the mirror body 11 it can be 2-dimensionally oscillatable mirror portion 11e in the XY plane via 11b and the inner frame portion 11c and a pair of second beam portions 11d, the 11d. これにより、レーザー光をミラー体11内に形成したミラー部11eに照射すれば、レーザー光がミラー部11eの傾動方向に対応して2次元的に反射される。 Thus, by irradiating the mirror portion 11e forming the laser beam into the mirror body 11, the laser light is reflected two-dimensionally in correspondence with the tilting direction of the mirror portion 11e.
【0046】 [0046]
次に、本発明に係る第1実施例の光偏向器を一部変形させた変形例1について図3を用いて簡略に説明する。 Next, a modified example 1 of the optical deflector of the first embodiment according to the present invention has been partially deformed briefly described with reference to FIG.
【0047】 [0047]
図3は本発明に係る第1実施例の光偏向器を一部変形させた変形例1を説明するための縦断面図である。 Figure 3 is a longitudinal sectional view for explaining a modified example 1 of the optical deflector of the first embodiment according to the present invention has been partially deformed.
図3に示した如く、本発明に係る第1実施例の光偏向器を一部変形させた変形例1の光偏向器10Bでは、ミラー体11が先に説明した第1実施例の光偏向器10A(図1)と同様に形成されてミラー体支持台12上に取り付けられ、且つ、ミラー体支持台12の半球状有底穴部12b内に磁性球体13が回転可能に収納されている点は第1実施例と同じであるものの、磁性球体13への磁界発生手段となる不図示の電磁石14X,14Xと、電磁石14Y,14Yとがミラー体支持台12の底面12gに沿って設けられている点が第1実施例に対して異なっている。 As shown in Figure 3, the light deflection in the first embodiment the optical deflector 10B of Modification 1 of the optical deflector was partially modified in the first embodiment, the mirror body 11 has been described above according to the present invention vessel 10A (FIG. 1) and is formed similarly mounted on the mirror body support 12, and a magnetic sphere 13 is rotatably housed in the mirror body hemispherical perforated bottom hole portion 12b of the support 12 although the point is the same as the first embodiment, the magnetic field generating means to become not shown electromagnets 14X to magnetic spherical bodies 13, and 14X, the electromagnet 14Y, and 14Y are provided along the bottom surface 12g of the mirror body support 12 and has a point is different from the first embodiment.
【0048】 [0048]
即ち、変形例1の光偏向器10Bにおいて、ミラー体支持台12の底面12gでX軸に沿って一対の電磁石14X,14X(図示せず)が配置され、且つ、Y軸に沿って一対の電磁石14Y,14Yが配置されており、両電磁石14X,14Yの組み合わせに応じた合成磁界による吸引力が磁性球体13に作用するようになっている。 That is, in the optical deflector 10B of Modification 1, a pair of electromagnets 14X along the X axis at the bottom surface 12g of the mirror body support 12, is arranged 14X (not shown), and a pair along the Y-axis electromagnet 14Y, 14Y are arranged, both electromagnets 14X, suction force by synthesis magnetic field corresponding to the combination of 14Y is adapted to act on the magnetic sphere 13.
【0049】 [0049]
従って、例えば、ミラー体11内に形成したミラー部11eを一対の第2梁部11d,11d(X軸)を中心にして反時計方向に揺動させる場合には、先に説明した図2(b)の場合と同様に、ミラー体支持台12の底面12gで側面12f側に配置した電磁石14YをON状態にすれば、磁性球体13が半球状有底穴部12bの内周面に沿って矢印方向に吸引されて移動するので、ミラー部11eのみが一対の第2梁部11d,11d(X軸)を中心にして角度αだけ反時計方向(矢印方向)に傾動する。 Thus, for example, when swinging the mirror portion 11e formed in the mirror body 11 a pair of second beam portions 11d, around the 11d (X-axis) in a counterclockwise direction, FIG. 2 described above ( as in the case of b), if the electromagnet 14Y arranged on the side surface 12f side at the bottom surface 12g of the mirror body support 12 in oN state, the magnetic spherical 13 along the inner peripheral surface of the hemispherical closed bottom hole portion 12b since moving is sucked in the direction of the arrow to tilt only the mirror portion 11e is a pair of second beam portions 11d, and 11d in the (X-axis) around the angle α counterclockwise direction (arrow direction).
【0050】 [0050]
次に、本発明に係る第1実施例の光偏向器を一部変形させた変形例2について図4を用いて簡略に説明する。 Next, a modified example 2 of the optical deflector of the first embodiment according to the present invention has been partially deformed briefly described with reference to FIG.
【0051】 [0051]
図4は本発明に係る第1実施例の光偏向器を一部変形させた変形例2を説明するための縦断面図である。 Figure 4 is a longitudinal sectional view for explaining a modified example 2 of the optical deflector of the first embodiment according to the present invention has been partially deformed.
図4に示した如く、本発明に係る第1実施例の光偏向器を一部変形させた変形例2の光偏向器10Cでも、ミラー体11が先に説明した第1実施例の光偏向器10A(図1)と同様に形成されてミラー体支持台12上に取り付けられ、且つ、ミラー体支持台12の半球状有底穴部12b内に磁性球体13が回転可能に収納されている点は第1実施例と同じであるものの、磁性球体13への磁界発生手段となる永久磁石9がミラー体支持台12の底面12gに沿ってX軸方向及び/又はY軸方向に移動可能に設けられている点が第1実施例に対して異なっている。 As shown in Figure 4, the light deflector of the first embodiment, even a light deflector 10C of Modification 2 of the optical deflector was partially modified in the first embodiment, the mirror body 11 has been described above according to the present invention vessel 10A (FIG. 1) and is formed similarly mounted on the mirror body support 12, and a magnetic sphere 13 is rotatably housed in the mirror body hemispherical perforated bottom hole portion 12b of the support 12 although the point is the same as the first embodiment, so as to be movable in the X-axis direction and / or Y-axis direction along the bottom surface 12g of the permanent magnet 9 is the mirror body support 12 as a magnetic field generating means to magnetic spherical bodies 13 that is provided is different from the first embodiment.
【0052】 [0052]
即ち、変形例2の光偏向器10Cにおいて、ミラー体支持台12の底面12gの下方にXYステージ5が底面12gに沿って移動自在に設けられている。 That is, in the optical deflector 10C variant 2, XY stage 5 is provided to be movable along the bottom surface 12g below the bottom surface 12g of the mirror body support 12. このXYステージ5は、固定ベース6上にX軸方向に移動するXステージ7と、Y軸方向に移動するYステージ8とが積層されており、且つ、上層のYステージ8上に永久磁石9が固着されている。 The XY stage 5, an X stage 7 moves in the X-axis direction on the fixed base 6, a Y stage 8 moves in the Y-axis direction are stacked and and a permanent magnet 9 on the upper layer of the Y stage 8 There has been fixed. そして、XYステージ5上に固着させた永久磁石9をミラー体支持台12の底面12gに沿ってX軸方向及び/又はY軸方向に移動させて、永久磁石9の移動磁界に応じた吸引力が磁性球体13に作用するようになっている。 Then, by moving the permanent magnet 9 which is fixed on the XY stage 5 in the X-axis direction and / or Y-axis direction along the bottom surface 12g of the mirror body support 12, the suction force corresponding to the moving magnetic fields of the permanent magnet 9 There has been adapted to be acting on the magnetic sphere 13. 従って、永久磁石9が静止した時に、その位置でミラー体11内に形成したミラー部11eの傾斜は保たれるので、電力を与えることなく永久磁石9によってミラー部11eの角度を保持する機能を備えることになる。 Therefore, when the permanent magnet 9 is stationary, the inclination of the mirror portion 11e formed in the mirror body 11 is held at that position, a function of holding the angle of the mirror portion 11e by the permanent magnet 9 without powering It will be provided.
【0053】 [0053]
尚、永久磁石9をミラー体支持台12の底面12gに沿って移動させる手段はXYステージ5に限られることなく、いかなる構成でも良い。 The means for moving the permanent magnets 9 on the bottom surface 12g of the mirror body support 12 is not limited to the XY stage 5 may be any configuration.
【0054】 [0054]
従って、例えば、ミラー体11内に形成したミラー部11eを一対の第2梁部11d,11d(X軸)を中心にして反時計方向に揺動させる場合には、XYステージ5上に固着させた永久磁石9をY軸線上に沿って右方に移動すれば、磁性球体13が半球状有底穴部12bの内周面に沿って矢印方向に吸引されて移動するので、ミラー部11eのみが一対の第2梁部11d,11d(X軸)を中心にして角度αだけ反時計方向(矢印方向)に傾動する。 Thus, for example, when swinging the mirror portion 11e formed in the mirror body 11 a pair of second beam portions 11d, around the 11d (X-axis) in a counterclockwise direction, thereby fixing on the XY stage 5 and if moving permanent magnet 9 to the right along on the Y axis, since the magnetic sphere 13 moves is attracted in the arrow direction along the inner peripheral surface of the hemispherical closed bottom hole portion 12b, the mirror portion 11e only There tilting the pair of second beam portions 11d, and 11d in the (X-axis) around the angle α a counterclockwise direction (arrow direction).
【0055】 [0055]
上記した第1実施例の光偏向器10A及び第1実施例を一部変形させた変形例1,2の光偏向器10B,10Cによれば、ミラー体11内に形成したミラー部11eの裏面中心部と、ミラー体支持台12に形成した半球状有底穴部12bの内周面との間に挟まれた磁性球体13を、磁気的な吸引力でミラー体支持台12の半球状有底穴部12bの内周面に沿って移動させているので、ミラー部11eをXY平面内で2次元的に揺動させることができ、且つ、構造が非常に簡単であるので低価格が可能であると共に、大きな偏向角度に対してもミラー部11eを低電力で傾動させることができる。 According to a first embodiment of the optical deflector 10A and the first light deflector 10B of second modifications of the embodiment was partially deformed, 10C as described above, the rear surface of the mirror 11e formed in the mirror body 11 center and, a magnetic sphere 13 sandwiched between the inner peripheral surface of the hemispherical closed bottom hole portion 12b formed in the mirror body support 12, magnetic hemispherical perforated mirror body support 12 by the suction force since moving along the inner peripheral surface of the bottom hole portion 12b, and a mirror portion 11e can be 2-dimensionally oscillatable in the XY plane, and, can be low cost since the structure is very simple with it, it can also tilting the mirror portion 11e at low power for large deflection angle.
【0056】 [0056]
<第2実施例の光偏向器> <Optical deflector of the second embodiment>
図5は本発明に係る第2実施例の光偏向器の構成を説明するための分解斜視図、図6は本発明に係る第2実施例の光偏向器の動作を説明するための縦断面図であり、(a)はミラー体の初期状態を示し、(b)はミラー体内に形成したミラー部を一対の第2梁部(X軸)を中心にして反時計方向に揺動した状態を示し、(c)はミラー体内に形成した内枠部及び一対の第2梁部並びにミラー部を一対の第1梁部(Y軸)を中心にして反時計方向に揺動した状態を示した図である。 Figure 5 is an exploded perspective view for explaining the structure of an optical deflector according to a second embodiment of the present invention, longitudinal section for explaining the operation of the optical deflector of the second embodiment according to Figure 6 the present invention a diagram, (a) state indicates the initial state of the mirror body, (b) is obtained by swinging the mirror portion formed on the mirror body in a counterclockwise direction and the second beam portion of the pair of (X-axis) to the center are shown, shows a state where the swing in (c) is counter-clockwise the second beam portion and the mirror portion of the inner frame and a pair formed in the mirror body with the first beam portion of the pair of (Y-axis) to the center It was a diagram.
【0057】 [0057]
図5に示した如く、本発明に係る第2実施例の光偏向器20Aでは、第1実施例と同様に、ミラー体21が薄い厚みのシリコン,ポリイミド,ステンレスなどの材料を用いて正方形状に形成され、且つ、このミラー体21を支持するミラー体支持台23の上面外周部23aも正方形状に形成されている。 As shown in Figure 5, the optical deflector 20A of the second embodiment according to the present invention, like the first embodiment, a square shape using silicon mirror body 21 is a thin thickness, a polyimide, a material such as stainless to be formed, and has the upper surface outer peripheral portion 23a of the mirror body support 23 to the mirror body 21 for supporting also formed in a square shape.
【0058】 [0058]
尚、以下の説明の都合上、ミラー体21の中心及びミラー体支持台23の上面外周部23aの中心を2軸座標系のX軸とY軸とで直交させて図示している。 Incidentally, for convenience of the description below, are illustrated by the center of the upper surface outer peripheral portion 23a of the center and the mirror body support 23 of the mirror body 21 is orthogonal to the X and Y axes of the two-axis coordinate system.
【0059】 [0059]
上記したミラー体21は、外枠部21aの内側に、一対の第1梁部21b,21bと、内枠部21cと、一対の第2梁部21d,21dと、ミラー部21eとが一体的に形成されている。 Mirror body 21 described above, the inside of the outer frame portion 21a, a pair of first beam portions 21b, 21b and an inner frame portion 21c, a pair of second beam portions 21d, 21d and, integrally with the mirror portion 21e is It is formed in.
【0060】 [0060]
より具体的に説明すると、ミラー体21は、外枠部21a内から一対の第1梁部21b,21bをY軸上で互いに対向してそれぞれ内側に延出させ、且つ、一対の第1梁部21b,21b間に形成したリング状の内枠部21cを一対の第1梁部21b,21b(Y軸)を中心にしてX軸方向に揺動可能に支持すると共に、一対の第1梁部21b,21bに対して直交させた一対の第2梁部21d,21dをX軸上でリング状の内枠部21c内から互いに対向してそれぞれ内側に延出させ、且つ、一対の第2梁部21d,21d間に形成した円盤状のミラー部21eを一対の第2梁部21d,21d(X軸)を中心にしてY軸方向に揺動可能に支持している。 To be more specific, the mirror body 21, a first beam portion 21b from the outer frame portion 21a of the pair, 21b and by extending inward respectively opposite each other on the Y-axis, and a pair of the first beam parts 21b, the first beam portion 21b of the ring-shaped inner frame section 21c which is formed between 21b of the pair, 21b together around the (Y-axis) swingably supported in the X axis direction, a pair of the first beam parts 21b, is extended inwardly respectively to face each other from the ring-shaped inner frame portion 21c second beam portions 21d of the pair obtained by orthogonally and 21d on the X-axis with respect to 21b, and a pair second beam portions 21d, and a second beam portion 21d of the disk-shaped mirror portion 21e formed in the pair between 21d, around the 21d (X-axis) and swingably supported on the Y-axis direction.
【0061】 [0061]
この際、ミラー体21内に形成した一対の第1梁部21b,21b及び一対の第2梁部21d,21dは、捩じりバネ性を備える材料特性、構造を有している。 At this time, the pair of first beam portion 21b formed in the mirror body 21, 21b and the pair of second beam portions 21d, 21d, the material properties comprise a torsion spring property, it has a structure. また、ミラー体21の外枠部21aと内枠部21cとの間で一対の第1梁部21b,21bが接続している部位を除いてエッチングなどの処理により貫通してくりぬかれていると共に、内枠部21cとミラー部12eとの間で一対の第2梁部21d,21dが接続している部位を除いてエッチングなどの処理により貫通してくりぬかれている。 The pair of first beam portion 21b between the outer frame portion 21a and the inner frame portion 21c of the mirror body 21, except for the portion 21b is connected with being hollowed out through a process such as etching It is hollowed out through except for a site where a pair of second beam portions 21d between the inner frame portion 21c and the mirror portion 12e, 21d are connected by a process such as etching. また、ミラー体21内に形成したミラー部21eは上面側が鏡面に形成されている。 The mirror portion 21e formed in the mirror body 21 is an upper surface side is formed on the mirror surface.
【0062】 [0062]
更に、ミラー体21内に形成したミラー部21eの裏面中心部には、永久磁石棒22の一端部が接着剤などを用いて固着され、且つ、この永久磁石棒22は一端部から他端部に向かって棒状に延出されて、各端部にN極,S極の磁化方向が与えられており、他端部側が自由端となっている。 Further, on the back surface center portion of the mirror portion 21e formed in the mirror body 21, one end portion of the permanent magnet rod 22 is fixed with an adhesive, and this permanent magnet rod 22 from one end is extended in a rod shape toward, N pole at each end, is given a direction of magnetization of the S pole, the other end is a free end. そして、ミラー体21内に形成したミラー部21eの裏面中心部に永久磁石棒22を固着した時に、ミラー部21eの裏面中心部に固着した一端部側が例えばS極(又はN極)に着磁され且つ自由端側がN極(又はS極)に着磁されて、永久磁石棒2がミラー部21eに対して垂直な姿勢を保った状態でミラー部21eと一体的になっている。 Then, magnetized when fixing the permanent magnet rod 22 to the back surface center portion of the mirror portion 21e formed in the mirror body 21, at one end, for example, S pole fixed to the back surface center portion of the mirror 21e (or N-pole) is magnetized in to and the free end N pole (or S pole), has become the mirror portion 21e integrally while maintaining a vertical posture with respect to the permanent magnet rod 2 is mirror 21e.
【0063】 [0063]
次に、ミラー体21を支持するためのミラー体支持台23は直方形状に形成されている。 Then, the mirror body support 23 for supporting the mirror member 21 is formed in a rectangular shape. このミラー体支持台23は、ミラー体21の外枠部21aの裏面を取り付けるために上面外周部23aが平坦に正方形状に形成され、且つ、正方形状の上面外周部23aの内側にこの上面外周部23aの中心点を中心にして正方形状有底穴部23bが開口して形成されている。 The mirror body support 23 has an upper surface outer peripheral portion 23a for attaching the rear surface of the outer frame portion 21a of the mirror member 21 is formed in a flat square shape, and this top periphery to the inside of the square upper surface outer peripheral portion 23a around the center point of the section 23a square perforated bottom hole portion 23b is formed with an opening.
【0064】 [0064]
そして、ミラー体21の外枠部21aの裏面をミラー体支持台23の上面外周部23a上に取り付けた時に、ミラー体21内に形成したミラー部21eの裏面中心部に固着した永久磁石棒22が、ミラー体支持台23の正方形状有底穴部23b内の中心部に納まっている。 Then, the back surface of the outer frame portion 21a of the mirror body 21 when mounted on the upper surface outer peripheral portion 23a of the mirror body support 23, the permanent magnet rod 22 fixed to the back surface center portion of the mirror portion 21e formed in the mirror body 21 There are accommodated in the center of the square closed bottom hole portion 23b of the mirror body support 23.
【0065】 [0065]
また、ミラー体21をミラー体支持台23上に取り付けた状態で、ミラー体支持台23の正方形状有底穴部23b内には、ミラー体21内に形成したミラー部21eの裏面中心部に固着した永久磁石棒22の周面から所定距離隔てて一対の電磁石24X,24X及び一対の電磁石24Y,24Yが載置されている。 Further, the mirror body 21 in a state mounted on the mirror body support 23, the mirror body support 23 square perforated bottom hole portion 23b of the back surface center portion of the mirror portion 21e formed in the mirror body 21 a pair of electromagnets 24X from the peripheral surface of the permanent magnet rod 22 which is fixed to a predetermined distance, 24X and the pair of electromagnets 24Y, 24Y is mounted.
【0066】 [0066]
そして、一対の電磁石24X,24Xは、正方形状有底穴部23b内の互いに対向する内側面23c,23eの内側でX軸に沿ってそれぞれ設置され、且つ、一対の電磁石24Y,24Yは、互いに対向する内側面23d,23fの内側でY軸に沿ってそれぞれ設置されている。 Then, a pair of electromagnets 24X, 24X has an inner surface 23c opposed to each other in a square-shaped closed bottom hole portion 23b, respectively installed along the X-axis in the inside of 23e, and a pair of electromagnets 24Y, 24Y are each opposed inner surfaces 23d, are disposed respectively along the Y axis inside the 23f.
【0067】 [0067]
また、上記した一対の電磁石24X,24X及び一対の電磁石24Y,24Yは共に同じように構成されて、ミラー体21内に形成したミラー部21eの裏面中心部に固着した永久磁石棒22に対する磁界発生手段となっており、各電磁石24X,24Yは鉄心25に沿ってコイル26が巻回され、且つ、コイル26にスイッチ27と可変抵抗器28と直流電源29とが直列で接続されている。 Further, a pair of electromagnets 24X as described above, 24X and the pair of electromagnets 24Y, 24Y are both configured in the same way, the magnetic field generator for the permanent magnet rod 22 fixed to the back surface center portion of the mirror portion 21e formed in the mirror body 21 has become a means, the electromagnets 24X, 24Y is a coil 26 is wound along the core 25, and a switch 27 and a variable resistor 28 and the DC power source 29 is connected in series to the coil 26.
【0068】 [0068]
ここで、上記構成による第2実施例の光偏向器20Aの動作を図6(a)〜(c)を用いて説明する。 Here will be described with reference to FIG. 6 (a) ~ (c) the operation of the optical deflector 20A of the second embodiment having the above structure.
【0069】 [0069]
まず、図6(a)に示した如く、ミラー体21の外枠部21aの裏面をミラー体支持台23上に取り付けて、光偏向器20Aが初期状態の時に、ミラー体21内に形成した一対の第1梁部21b,21b(図1)及び一対の第2梁部21d,21dの捩じりバネ性による復元力により内枠部21c及びミラー部21eはミラー体支持台23上で略水平な姿勢を維持していると共に、ミラー部21eの裏面中心部に固着した永久磁石棒22は、ミラー体支持台23の正方形状有底穴部23b内の中心部で下方に垂れ下がっている。 First, as shown in FIG. 6 (a), is attached to the rear surface of the outer frame portion 21a of the mirror member 21 on the mirror body support 23, when the optical deflector 20A is in the default state, to form the mirror body 21 a pair of first beam portions 21b, 21b (FIG. 1) and a pair of second beam portions 21d, the inner frame portion 21c and the mirror portion 21e by the restoring force due to the torsion spring of the 21d is substantially on the mirror body support 23 together maintains the horizontal posture, the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e is hanging downward at the center of the square closed bottom hole portion 23b of the mirror body support 23. この際、永久磁石棒22は、ミラー部21eの裏面中心部に固着した一端部が例えばS極に着磁され、且つ、一端部と反対側の自由端(他端部)がN極に着磁されているものとする。 In this case, the permanent magnet rod 22 is magnetized on one end which is fixed, for example, S pole on the back center of the mirror 21e, and, opposite to the free end and one end portion (the other end) is wearing N pole and those that are magnetic.
【0070】 [0070]
また、この初期状態の時に、ミラー体支持台23の内側面23d,23fの内側でY軸に沿って設けた一対の電磁石24Y,24YはOFF状態を維持しているので磁界が発生しない。 Further, when the initial state, the inner surface 23d of the mirror body support 23, a pair which is provided along the Y axis inside the 23f electromagnetic 24Y, 24Y has no magnetic field is generated so maintains the OFF state. 勿論、ここでの図示を省略しているがミラー体支持台23の内側面23c,23eの内側でX軸に沿って設けた一対の電磁石24X,24XもOFF状態を維持している。 Of course, here not shown in that it maintains the inner surface 23c of the mirror body support 23, a pair of electromagnets 24X that inwardly disposed along the X axis 23e, 24X also OFF state.
【0071】 [0071]
次に、図6(b)に示した如く、ミラー体21内に形成したミラー部21eのみを初期状態から一対の第2梁部21d,21d(X軸)を中心にして反時計方向に揺動させる場合には、ミラー体支持台23の内側面23fの内側に設けた電磁石24YだけをON状態にする。 Next, as shown in FIG. 6 (b), the second beam portion 21d only mirror portion 21e formed in the mirror body 21 from the initial state of the pair, 21d (X-axis) rocking to the counterclockwise direction about the in case of moving, only the to oN state electromagnet 24Y provided inside the inner surface 23f of the mirror body support 23. ここで、ミラー体支持台23の内側面23fの外側に設けた電磁石24Yは、スイッチ27をONした時に直流電源29から可変抵抗器28の抵抗値に応じた電流がコイル26を通して流れるので、鉄心25中で永久磁石棒22と対向する面側に電流値に応じた磁界S極が発生し、この磁界S極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(吸引力)によってミラー部21eの裏面中心部に固着した永久磁石棒22の自由端が矢印方向に吸引されて移動する。 Here, an electromagnet 24Y provided on the outside of the inner surface 23f of the mirror body support 23, since current corresponding from the DC power supply 29 when the ON switch 27 to the resistance value of the variable resistor 28 flows through the coil 26, the core field S pole is generated in accordance with the current value on the side facing the permanent magnet rod 22 in 25, the electromagnetic force corresponding to the magnetic field N pole of the free end of the magnetic field S pole and the permanent magnet bar 22 (suction force ) the free ends of the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e by moves is attracted in the direction of the arrow. この際、上記した電磁石24Yによる電磁力は、永久磁石棒22の自由端のN極に対してこれと対向する鉄心25の先端にS極が発生して永久磁石棒22の自由端を吸引するための吸引力が作用するようにコイル26の巻回方向と直流電源29の±極の接続方向とを予め設定している。 At this time, the electromagnetic force by the electromagnet 24Y described above sucks a free end of the permanent magnet rod 22 S pole is generated at the tip of the iron core 25 facing the hand N pole of the free end of the permanent magnet rod 22 suction force is set to the connection direction of ± pole winding direction and the DC power supply 29 of the coil 26 so as to act in advance for. そして、永久磁石棒22の自由端が矢印方向に移動すると、この永久磁石棒22と一体となってミラー部21eが一対の第2梁部21d,21d(X軸)を中心にして反時計方向(矢印方向)に傾動する。 When the free end of the permanent magnet rod 22 is moved in the arrow direction, the counterclockwise direction about the mirror portion 21e together with the permanent magnet rod 22 is a pair of second beam portions 21d, 21d of the (X-axis) tilted (arrow). この際、ミラー体21内に形成したミラー部21eの傾斜角度は可変抵抗器28の抵抗値を制御すれば良い。 At this time, the angle of inclination of the mirror portion 21e formed in the mirror body 21 may be controlled resistance value of the variable resistor 28.
【0072】 [0072]
尚、ミラー体21内に形成したミラー部21eを初期状態から一対の第2梁部21d,21d(X軸)を中心にして時計方向に揺動させる場合には、上記した図6(b)の場合とは逆に、ミラー体支持台23の内側面23dの内側に設けた電磁石24Yを作動させれば良いものである。 In the case where the second beam portion 21d of the mirror portion 21e formed in the mirror body 21 from the initial state of the pair, around the 21d (X-axis) is swung in the clockwise direction, FIG. 6 described above (b) the case of the opposite, in which the electromagnet 24Y provided inside the inner surface 23d of the mirror body support 23 it is sufficient to operate.
【0073】 [0073]
次に、図6(c)に示した如く、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eを初期状態から一対の第1梁部21b,21b(Y軸)を中心にして反時計方向に揺動させる場合には、ミラー体支持台23の内側面23cの内側に設けた電磁石24XだけをON状態にする。 Next, as shown in FIG. 6 (c), the first beam portion 21b second beam portions 21d inner frame 21c formed in the mirror body 21 and a pair of the 21d and mirror portion 21e from the initial state of the pair, and 21b a (Y axis) in the center when swinging in the counterclockwise direction, only to oN state electromagnets 24X provided on the inner side of the inner surface 23c of the mirror body support 23. ここでも、ミラー体支持台23の内側面23cの内側に設けた電磁石24Xは、スイッチ27をONした時に直流電源29から可変抵抗器28の抵抗値に応じた電流がコイル26を通して流れるので、鉄心25中で永久磁石棒22と対向する面側に電流値に応じた磁界S極が発生し、この磁界S極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(吸引力)によってミラー部21eの裏面中心部に固着した永久磁石棒22の自由端が矢印方向に吸引されて移動する。 Again, electromagnets 24X provided on the inner side of the inner surface 23c of the mirror body support 23, since current corresponding from the DC power supply 29 when the ON switch 27 to the resistance value of the variable resistor 28 flows through the coil 26, the core field S pole is generated in accordance with the current value on the side facing the permanent magnet rod 22 in 25, the electromagnetic force corresponding to the magnetic field N pole of the free end of the magnetic field S pole and the permanent magnet bar 22 (suction force ) the free ends of the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e by moves is attracted in the direction of the arrow. そして、永久磁石棒22の自由端が矢印方向に移動すると、この永久磁石棒22と一体となって内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eが一対の第1梁部21b,21b(Y軸)を中心にして反時計方向(矢印方向)に傾動する。 When the free end of the permanent magnet rod 22 is moved in the arrow direction, the inner frame portion 21c and a pair of second beam portions 21d together with the permanent magnet rod 22, 21d and the first beam mirror portion 21e is a pair of parts 21b, tilts around the 21b (Y axis) in a counterclockwise direction (arrow direction).
【0074】 [0074]
尚、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eを初期状態から一対の第1梁部21b,21b(Y軸)を中心にして時計方向に揺動させる場合には、上記した図6(c)の場合とは逆に、ミラー体支持台23の内側面23eの内側に設けた電磁石24Xを作動させれば良いものである。 Incidentally, clockwise second beam portion 21d inner frame 21c formed in the mirror body 21 and a pair of the 21d and mirror portion 21e and the first beam portion 21b from the initial state of the pair, 21b and (Y-axis) to the center in the case of swinging, the case of FIG. 6 (c) above to the contrary, it is intended the electromagnets 24X provided on the inner side of the inner surface 23e of the mirror body support 23 it is sufficient to operate.
【0075】 [0075]
上記では、図6(b)の動作と、図6(c)の動作とをそれぞれ個別に説明したが、ミラー体支持台23の内側面23c,23eの内側に設けた一対の電磁石24X,24Xのいずれか一方と、ミラー体支持台23の内側面23d,23fの内側に設けた一対の電磁石24Y,24Yのいずれか一方とを選択的に組み合わせて動作させれば、両電磁石24X,24Yの組み合わせに応じて発生する合成磁界による吸引力の方向に永久磁石棒22の自由端が正方形状有底穴部23b内で移動するので、ミラー体21内に形成した一対の第1梁部21b,21b及び内枠部21c並びに一対の第2梁部21d,21dを介してミラー部21eをXY平面内で2次元的に揺動させることができる。 In the above, operation of the FIG. 6 (b), the have been described in operation and each individually FIG. 6 (c), the inner surface 23c of the mirror body support 23, a pair which is provided on the inside of 23e electromagnets 24X, 24X of one and one, the inner surface 23d of the mirror-body support 23, 23f pair of electromagnets 24Y provided inside of, if operated selectively combining the one of 24Y, both electromagnets 24X, the 24Y since the free ends of the permanent magnet rod 22 in the direction of the suction force by the synthetic magnetic field generated in accordance with a combination moves within square perforated bottom hole portion 23b, a pair of first beam portion 21b formed in the mirror body 21, 21b and inner frame portion 21c and a pair of second beam portions 21d, can be 2-dimensionally oscillatable mirror portion 21e in the XY plane via 21d. これにより、レーザー光をミラー体21内に形成したミラー部21eに照射すれば、レーザ光がミラー部21eの傾動方向に対応して2次元的に反射される。 Thus, by irradiating the mirror portion 21e forming a laser beam to the mirror body 21, laser light is reflected two-dimensionally in correspondence with the tilting direction of the mirror portion 21e.
【0076】 [0076]
次に、本発明に係る第2実施例の光偏向器を一部変形させた変形例1について図7を用いて簡略に説明する。 Next, a modified example 1 of the optical deflector of the second embodiment according to the present invention has been partially deformed briefly described with reference to FIG.
【0077】 [0077]
図7は本発明に係る第2実施例の光偏向器を一部変形させた変形例1を説明するための縦断面図である。 Figure 7 is a longitudinal sectional view for explaining a modified example 1 of the optical deflector of the second embodiment according to the present invention has been partially deformed.
図7に示した如く、本発明に係る第2実施例の光偏向器を一部変形させた変形例1の光偏向器20Bでは、ミラー体21が先に説明した第2実施例の光偏向器20A(図5)と同様に形成され、且つ、ミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の固着側(一端部側)をS極,自由端側(他端部側)をN極に着磁した状態で、ミラー体21がミラー体支持台23上に取り付けられている点は第2実施例と同じであるものの、ミラー体21内に形成したミラー部21eの裏面中心部に固着させた永久磁石棒22を、磁界発生手段による反発力を用いて傾動させている点が第2実施例に対して異なっている。 As shown in Figure 7, the light deflector of the second embodiment the optical deflector 20B of Modification 1 of the optical deflector was part variation of the second embodiment, the mirror body 21 has been described above according to the present invention vessel 20A (FIG. 5) and are formed similarly, and, sticking side of the permanent magnet rod 22 is fixed to the center of the rear surface of the mirror portion 21e of the mirror body 21 (one end side) of the S pole, the free end side (the other end the part-side) while magnetized into N pole, the mirror portion 21e that mirror 21 is mounted on the mirror body support 23 is formed in the second but the same as in example, the mirror body 21 of the permanent magnet rod 22 is secured to the back surface center point that is tilted with a repulsive force by the magnetic field generating means is different from the second embodiment.
【0078】 [0078]
即ち、変形例1の光偏向器20Bにおいて、ミラー体支持台23の内側面23dの内側でY軸に沿って設けた電磁石24Yのスイッチ27をONした時に直流電源29から可変抵抗器28の抵抗値に応じた電流がコイル26を通して流れるので、鉄心25中で永久磁石棒22と対向する面側に電流値に応じた磁界N極が発生し、この磁界N極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(反発力)によってミラー部21eの裏面中心部に固着した永久磁石棒22の自由端が矢印方向に反発されて移動する。 That is, in the optical deflector 20B of Modification 1, the resistance from the DC power supply 29 when the ON switch 27 of the electromagnet 24Y provided along the Y-axis in the inside of the inner side surface 23d of the mirror body support 23 of the variable resistor 28 since the current corresponding to a value flows through the coil 26, the magnetic field N-pole is generated in accordance with the current value on the side facing the permanent magnet rod 22 in the core 25, the free ends of the magnetic field N-pole and the permanent magnet rod 22 electromagnetic force the free end of the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e by (repulsive force) moves are repelled in the direction of the arrow in response to the and the magnetic field N pole. これに伴って、永久磁石棒22と一体となってミラー部21eが一対の第2梁部21d,21d(X軸)を中心にして反時計方向(矢印方向)に傾動する。 Accordingly, the tilted Focusing mirror 21e together with the permanent magnet rod 22 is a pair of second beam portions 21d, 21d of the (X-axis) in a counterclockwise direction (arrow direction).
【0079】 [0079]
次に、本発明に係る第2実施例の光偏向器を一部変形させた変形例2について図8を用いて簡略に説明する。 Next, a modified example 2 of the optical deflector of the second embodiment according to the present invention has been partially deformed briefly described with reference to FIG.
【0080】 [0080]
図8は本発明に係る第2実施例の光偏向器を一部変形させた変形例2を説明するための縦断面図である。 Figure 8 is a longitudinal sectional view for explaining a modified example 2 of the optical deflector of the second embodiment according to the present invention has been partially deformed.
図8に示した如く、本発明に係る第2実施例の光偏向器を一部変形させた変形例2の光偏向器20Cでは、ミラー体21が先に説明した第2実施例の光偏向器20A(図5)と同様に形成され、且つ、ミラー体21がミラー体支持台23上に取り付けられている点は第2実施例と同じであるものの、ここではミラー体21内に形成したミラー部21eの裏面中心部に固着させた永久磁石棒22の一端部が例えばN極に着磁され、且つ、一端部と反対側の自由端(他端部)がS極に着磁され、且つ、永久磁石棒22を磁界発生手段による吸引力と反発力とを併用して傾動させている点が第2実施例に対して異なっている。 As shown in Figure 8, the light deflection in the second embodiment the optical deflector 20C of Modification 2 of the optical deflector was part variation of the second embodiment, the mirror body 21 has been described above according to the present invention vessel 20A (FIG. 5) and are formed similarly, and, although that mirror 21 is mounted on the mirror body support 23 is the same as the second embodiment was formed in the mirror body 21 is here is magnetized end of the permanent magnet rod 22 is secured to the back surface center portion, for example, N pole of the mirror 21e, and, opposite to the free end and one end portion (the other end) is magnetized to the S pole, and, that it the permanent magnet rod 22 is tilted in combination a suction force and repulsion by the magnetic field generating means is different from the second embodiment.
【0081】 [0081]
即ち、変形例2の光偏向器20Cにおいて、ミラー体支持台23の内側面23d,23fの内側に設けた左右一対の電磁石24Y,24Yの鉄心25,25に巻回させたコイル26,26の一端同士を結線すると共に、コイル26,26の他端間にスイッチ27A及び直流電源29Aと、スイッチ27B及び直流電源29Aに対して極性を反転させた直流電源29Bとを並列に接続し、更に、可変抵抗器28を直列に接続している。 That is, in the optical deflector 20C of Modification 2, the mirror body support 23 inner surface 23d, a pair of left and right electromagnets 24Y provided inside of 23f, the coil 26, 26 were wound iron core 25 wound of 24Y while connecting the one ends, it connects the switches 27A and DC power supply 29A between the other end of the coil 26, a DC power source 29B obtained by inverting the polarity for the switch 27B and the DC power supply 29A in parallel, further, the variable resistor 28 are connected in series. そして、スイッチ27AをONすると、ミラー部21eの裏面中心部に固着させた永久磁石棒22の自由端に着磁したS極に対して、左側の電磁石24YではS極による反発力が発生し、且つ、右側の電磁石24YではN極による吸引力が発生するので、永久磁石棒22の自由端に反発力だけ又は吸引力だけの場合よりも2倍の力が加わるために、永久磁石棒22と一体となってミラー部21eが一対の第2梁部21d,21d(X軸)を中心にして反時計方向に大きく傾動する。 Then, ON the switch 27A Then, to the S poles magnetized in the free end of the permanent magnet rod 22 is secured to the back surface center portion of the mirror 21e, the repulsive force due to S-pole at the left of the electromagnet 24Y is generated, and, since the attraction force by the N pole at the right side of the electromagnet 24Y occurs, in order to double the force is applied than when only just or suction force repulsive force to the free end of the permanent magnet rod 22, the permanent magnet rod 22 mirror portion 21e is largely tilted in the counterclockwise direction by the pair of second beam portions 21d, 21d of the (X-axis) to the center together.
【0082】 [0082]
次に、本発明に係る第2実施例の光偏向器を一部変形させた変形例3について図9(a),(b)を用いて簡略に説明する。 Next, a modified example 3 of the optical deflector of the second embodiment according to the present invention has been partially deformed FIG. 9 (a), the briefly described with reference to (b).
【0083】 [0083]
図9(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例3を説明するための斜視図,縦断面図である。 Figure 9 (a), (b) is a perspective view for explaining a modified example 3 obtained by partly modifying the optical deflector according to a second embodiment of the present invention, is a longitudinal sectional view.
図9(a),(b)に示した如く、本発明に係る第2実施例の光偏向器を一部変形させた変形例3の光偏向器20Dでも、ミラー体21が先に説明した第2実施例の光偏向器20A(図5)と同様に形成され、且つ、ミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の固着側(一端部側)をS極,自由端側(他端部側)をN極に着磁した状態で、ミラー体21がミラー体支持台23上に取り付けられている点は第2実施例と同じであるものの、ミラー体支持台23の正方形状有底穴部23b内でX軸,Y軸に沿って設置した磁界発生手段となる電磁石30X,30Yの形状が先に説明した第2実施例の光偏向器20A(図5)内でX軸,Y軸に沿って設置した一対の電磁石24X,24X,一対の電磁石24Y,24Y FIG. 9 (a), the described as shown, the optical deflector of the second embodiment according to the present invention, even an optical deflector 20D of Modification 3 was partially deformed mirror body 21 above (b) optical deflector 20A of the second embodiment (FIG. 5) and are formed similarly, and, S-pole anchoring side (one end side) of the permanent magnet rod 22 is fixed to the center of the rear surface of the mirror portion 21e of the mirror body 21 , the free end side (other end side) in a state of being magnetized to the N pole, but that the mirror body 21 is mounted on the mirror body support 23 is the same as the second embodiment, the mirror body support X-axis in square perforated bottom hole portion 23b of the base 23, a second embodiment of the optical deflector 20A magnetic field generating means to become electromagnets 30X was placed along the Y axis, the shape of 30Y described above (FIG. 5 ) X-axis in a pair of electromagnets 24X was placed along the Y-axis, 24X, a pair of electromagnets 24Y, 24Y 場合と異なっている。 If that different.
【0084】 [0084]
即ち、変形例3の光偏向器20Dにおいて、ミラー体支持台23の正方形状有底穴部23b内でX軸に沿って設置した電磁石30Xは、リング状コア31の中間部位に形成した連結部31cに沿ってコイル33が巻回され、且つ、コイル33にスイッチ34と可変抵抗器35と直流電源36とが直列で接続されている。 That is, in the optical deflector 20D of Modification Example 3, the electromagnets 30X was placed along the X-axis by the mirror body support 23 square perforated bottom hole portion 23b of the connecting portion formed in the intermediate portion of the ring-shaped core 31 coil 33 along 31c is wound, and a switch 34 and a variable resistor 35 and the DC power source 36 is connected in series to the coil 33.
【0085】 [0085]
上記したリング状コア31は、リング状に巻回した矩形内でX軸に沿った長辺の中央をミラー体21側に向かって開口して幅広のギャップが形成され、且つ、ギャップ内の左右両端に一対の矩形面31a,31bが互いに対向して形成されている。 Ring core 31 as described above, the wide gap is formed opening toward the center of the long sides along the X-axis in a rectangular wound in a ring shape mirror body 21 side, and the left and right in the gap a pair of rectangular surfaces 31a, 31b are formed to face each other at both ends. そして、リング状コア31の一対の矩形面31a,31b間に形成したギャップ内にミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の自由端側が揺動可能に進入している。 Then, a pair of rectangular faces 31a of the ring-shaped core 31, the free end side of the permanent magnet rod 22 is fixed to the center of the rear surface of the mirror portion 21e of the mirror body 21 in a gap formed between 31b is enters swingably there.
【0086】 [0086]
一方、ミラー体支持台23の正方形状有底穴部23b内でY軸に沿って設置した電磁石30Yは、リング状コア32の中間部位に形成した連結部32cに沿ってコイル33が巻回され、且つ、コイル33にスイッチ34と可変抵抗器35と直流電源36とが直列で接続されている。 On the other hand, the electromagnet 30Y was installed along the Y axis by the mirror body support 23 square perforated bottom hole portion 23b of the coil 33 is wound along the connecting portion 32c formed in the middle portion of the ring-shaped core 32 and, a switch 34 and a variable resistor 35 and the DC power source 36 is connected in series to the coil 33.
【0087】 [0087]
上記したリング状コア32も、リング状コア31と略同様に、リング状に巻回した矩形内でY軸に沿った長辺の中央をミラー体21側に向かって開口して幅広のギャップが形成され、且つ、ギャップ内の前後両端に一対の矩形面32a,32bが互いに対向してリング状コア31の一対の矩形面31a,31bと同じ高さ位置に形成されており、これら一対の矩形面32a,32b間に形成したギャップ内にミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の自由端側が揺動可能に進入している。 The above-mentioned ring-shaped core 32, substantially similarly to the ring-shaped core 31, the wider the gap open toward the center of the long sides along the Y axis in the rectangular wound in a ring shape mirror body 21 side is formed, and a pair of rectangular faces 32a to front and rear ends of the gap, a pair of rectangular faces 31a of the ring-shaped core 31 32b face each other, are formed at the same height as the 31b, the pair of rectangular face 32a, the free end side of the permanent magnet rod 22 is fixed to the center of the rear surface of the mirror portion 21e of the mirror body 21 is entered swingably in a gap formed between 32b.
【0088】 [0088]
そして、リング状コア31はミラー体21に対して垂設され、一方、リング状コア32はミラー体21と略平行に横設されている。 The ring-shaped core 31 is vertical set to the mirror body 21, whereas, are laterally disposed substantially parallel to the ring-shaped core 32 is the mirror body 21.
【0089】 [0089]
上記構成による第2実施例における変形例3の光偏向器20Dの動作について図9(b)を用いて説明すると、例えば、ミラー体21内に形成したミラー部21eを一対の第2梁部21d,21d(X軸)を中心にして反時計方向に揺動させる場合には、Y軸に沿って設けた電磁石30YをON状態にする。 To explain with reference to FIG. 9 (b) the operation of the optical deflector 20D of Modification Example 3 of the second embodiment according to the above configuration, for example, the second beam portion 21d of the mirror portion 21e formed in the mirror body 21 of the pair , when swinging around the 21d (X-axis) in a counterclockwise direction, the electromagnet 30Y provided along the Y axis to the oN state. ここで、電磁石30Y中のスイッチ34をONした時に直流電源36から可変抵抗器35の抵抗値に応じた電流がコイル33を通して流れるので、コ字状コア32に形成した一対の矩形面32a,32bに電流値に応じた磁界N極,S極がそれぞれ発生し、これらの磁界N極,S極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(矩形面32aからの反発力,矩形面32bからの吸引力)によって、ミラー部21eの裏面中心部に固着した永久磁石棒22の自由端が矢印方向に移動する。 Here, since the current corresponding to the resistance value of the variable resistor 35 from the DC power supply 36 when the ON switch 34 in the electromagnet 30Y flows through the coil 33, a pair of rectangular faces 32a formed in a U-shaped core 32, 32 b field N pole, S pole is generated each corresponding to the current value, the backlash from these magnetic fields N pole, an electromagnetic force corresponding to the magnetic field N pole of the free end of the S pole and the permanent magnet rod 22 (the rectangular plane 32a force, by the suction force) from the rectangular plane 32b, the free end of the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e is moved in the direction of the arrow.
【0090】 [0090]
そして、永久磁石棒22の自由端が矢印方向に移動すると、この永久磁石棒22と一体となってミラー体21内に形成したミラー部21eが一対の第2梁部21d,21d(X軸)を中心にして反時計方向(矢印方向)に傾動する。 When the free end of the permanent magnet rod 22 is moved in the arrow direction, second beam portion 21d mirror portion 21e formed in the mirror body 21 together with the permanent magnet rod 22 is a pair, 21d (X-axis) around the tilted counterclockwise (arrow).
【0091】 [0091]
次に、本発明に係る第2実施例の光偏向器を一部変形させた変形例4について図10〜図14を用いて説明する。 Next, a modified example 4 of the optical deflector of the second embodiment according to the present invention has been partially deformed will be described with reference to FIGS. 10 to 14.
【0092】 [0092]
図10は本発明に係る第2実施例の光偏向器を一部変形させた変形例4を説明するために初期状態を示した斜視図、 Figure 10 is a perspective view for explaining a modified example 4 of the optical deflector of the second embodiment according to the present invention has been partially deformed shows an initial state,
図11(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例4を説明するために初期状態をそれぞれ示したY軸方向縦断面図,X軸方向縦断面図、 Figure 11 (a), (b) the Y-axis direction vertical sectional view showing respectively an initial state for explaining a modified example 4 of the optical deflector was partially modified according to a second embodiment of the present invention, X axial longitudinal section,
図12(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例4において、ミラー体内に形成したミラー部をX軸を中心に反時計方向,時計方向に揺動させる状態をそれぞれ示したY軸方向縦断面図,Y軸方向縦断面図、 Figure 12 (a), (b) the present invention in the second embodiment Modification 4 an optical deflector was some deformation of the counterclockwise direction form the mirror portion around the X axis to the mirror body, Y-axis direction vertical sectional view showing a state to swing clockwise, respectively, the Y-axis direction vertical sectional view,
図13(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例4において、ミラー体内に形成した内枠部及び一対の第2梁部d並びにミラー部をY軸を中心に反時計方向,時計方向に揺動させる状態をそれぞれ示したX軸方向縦断面図,X軸方向縦断面図、 Figure 13 (a), (b) in the fourth modification obtained by modifying part of the optical deflector according to a second embodiment of the present invention, the second beam portion d and the inner frame portion is formed to have a mirror body and a pair mirror unit counterclockwise direction about the Y axis, X-axis direction vertical sectional view illustrating each state in which the swinging in the clockwise direction, X-axis direction vertical sectional view,
図14は本発明に係る第2実施例の光偏向器と、第2実施例の光偏向器を一部変形させた変形例4の光偏向器とを比較する際に、ミラー体内に形成したミラー部の電流に対する偏向角特性を示した図である。 Figure 14 when comparing the optical deflector of the second embodiment according to the present invention, the fourth modification obtained by modifying part of the optical deflector of the second embodiment and an optical deflector, formed in the mirror body it is a diagram showing a deflection angle characteristic to the mirror portion of the current.
【0093】 [0093]
図10に示した如く、本発明に係る第2実施例の光偏向器を一部変形させた変形例4の光偏向器20Eでも、ミラー体21が先に説明した第2実施例の光偏向器20A(図5)と同様に形成され、且つ、ミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の固着側(一端部側)をS極,自由端側(他端部側)をN極に着磁した状態で、ミラー体21がミラー体支持台23上に取り付けられている点は第2実施例と同じであるものの、ミラー体支持台23の正方形状有底穴部23b内でX軸,Y軸に沿って設置した磁界発生手段となる電磁石40X,40Yの形状が先に説明した第2実施例の光偏向器20A(図5)内でX軸,Y軸に沿って設置した一対の電磁石24X,24X,一対の電磁石24Y,24Yの場合と異な As shown in Figure 10, the optical deflector of the second embodiment, even a light deflector 20E of Modification 4 of the optical deflector was partially deformed, the mirror body 21 is described above in the second embodiment according to the present invention vessel 20A (FIG. 5) and are formed similarly, and, sticking side of the permanent magnet rod 22 is fixed to the center of the rear surface of the mirror portion 21e of the mirror body 21 (one end side) of the S pole, the free end side (the other end the part-side) while magnetized into N pole, although that mirror 21 is mounted on the mirror body support 23 is the same as the second embodiment, a square-shaped bottom of the mirror body support 23 X-axis in the hole 23b, the electromagnet becomes magnetic field generating means installed along the Y axis 40X, X-axis in the second embodiment of the optical deflector 20A to the shape of 40Y has been described previously (FIG. 5), Y a pair of electromagnets 24X was placed along the axis, 24X, a pair of electromagnets 24Y, different from the case of 24Y ている。 To have.
【0094】 [0094]
即ち、変形例4の光偏向器20Eにおいて、ミラー体支持台23の正方形状有底穴部23b内でX軸に沿って設置した電磁石40Xは、コ字状コア41の中間部位に形成した連結部41cに沿ってコイル43が巻回され、且つ、コイル43にスイッチ44と可変抵抗器45と直流電源46とが直列で接続されている。 That is, in the optical deflector 20E of Modification Example 4, the electromagnets 40X was placed along the X-axis in a square perforated bottom hole portion 23b of the mirror body support 23 is connected which is formed in the middle portion of the U-shaped core 41 coil 43 is wound along the section 41c, and a switch 44 and a variable resistor 45 and the DC power source 46 is connected in series with the coil 43.
【0095】 [0095]
上記したコ字状コア41は、ミラー体21側に向かって上向きコ字状に形成された状態でX軸に沿って垂設されている。 U-shaped core 41 as described above are vertically along the X-axis in a state of being formed on the upwardly U-shape toward the mirror body 21 side. また、コ字状コア41は、X軸に沿って上方に向かってコ字状に突出した左右上端部の各内側に一対の傾斜面41a,41bが互いに対称に対向して形成されている。 Further, U-shaped core 41 has a pair of inclined surfaces 41a each inside of the left and right upper end projecting in a U-shape upward along the X axis, 41b are formed opposite to symmetrically. また、コ字状コア41の一対の傾斜面41a,41b間に幅広のギャップが形成されている。 The pair of inclined surfaces 41a of the U-shaped core 41, the wider the gap between 41b are formed. そして、コ字状コア41の一対の傾斜面41a,41b間に形成したギャップ内にミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の自由端側が揺動可能に進入している。 Then, the free end side of the pair of inclined surfaces 41a, the permanent magnet rod 22 is fixed to the center of the rear surface of the mirror portion 21e of the mirror body 21 in a gap formed between 41b of U-shaped core 41 enters swingably ing.
【0096】 [0096]
この際、コ字状コア41に形成した一対の傾斜面41a,41bは、永久磁石棒22の自由端側がギャップ内に進入した時に永久磁石棒22の自由端に衝突しないように、ミラー体21のミラー部21eの裏面中央を中心にして揺動する永久磁石棒22の自由端の揺動軌跡に接近して直線状又は円弧状に傾斜して形成されている。 In this case, a pair of inclined surfaces 41a formed in a U-shaped core 41, 41b so as not to impinge on the free end of the permanent magnet rod 22 when the free end of the permanent magnet rod 22 enters into the gap, the mirror body 21 It is formed to be inclined in a straight line or an arc shape close the center of the back surface of the mirror portion 21e to swing trajectory of the free end of the permanent magnet rod 22 swings around.
【0097】 [0097]
一方、ミラー体支持台23の正方形状有底穴部23b内でY軸に沿って設置した電磁石40Yは、コ字状コア42の中間部位に形成した連結部42cに沿ってコイル43が巻回され、且つ、コイル43にスイッチ44と可変抵抗器45と直流電源46とが直列で接続されている。 On the other hand, the electromagnet 40Y was installed along the Y-axis in a square perforated bottom hole portion 23b of the mirror body support 23 includes a coil 43 along a connecting portion 42c formed in the middle portion of the U-shaped core 42 is wound It is, and, a switch 44 and a variable resistor 45 and the DC power source 46 is connected in series with the coil 43.
【0098】 [0098]
上記したコ字状コア42は、ミラー体21側に向かって上向きコ字状に形成された状態で、コ字状コア41に形成した一対の傾斜面41a,41b間に上方から進入してY軸に沿って垂設されている。 U-shaped core 42 as described above, in a state which is formed in an upward U-shape toward the mirror body 21 side, a pair of inclined surfaces 41a formed in a U-shaped core 41, enters from above between 41b Y It is vertically along the axis. また、コ字状コア42は、コ字状コア41と略同様に、Y軸に沿って上方に向かってコ字状に突出した前後上端部の各内側に一対の傾斜面42a,42bが互いに対称に対向し、且つ、コ字状コア41の一対の傾斜面41a,41bと同じ高さ位置に形成されている。 Further, U-shaped core 42, substantially similarly to the U-shaped core 41, a pair of inclined surfaces 42a each inside of the front and rear upper portion protruding in a U-shape upward along the Y-axis, 42b to each other It faces symmetrically and a pair of inclined surfaces 41a of the U-shaped core 41, are formed at the same height position as 41b. また、コ字状コア42の一対の傾斜面42a,42b間に幅広のギャップが形成されている。 The pair of inclined surfaces 42a of the U-shaped core 42, the wider the gap between 42b are formed. そして、コ字状コア42の一対の傾斜面42a,42b間に形成したギャップ内にミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の自由端側が揺動可能に進入している。 Then, the free end side of the pair of inclined surfaces 42a, the permanent magnet rod 22 is fixed to the center of the rear surface of the mirror portion 21e of the mirror body 21 in a gap formed between 42b of U-shaped core 42 enters swingably ing.
【0099】 [0099]
この際、コ字状コア42に形成した一対の傾斜面42a,42bは、永久磁石棒22の自由端側がギャップ内に進入した時に永久磁石棒22の自由端に衝突しないように、ミラー体21のミラー部21eの裏面中央を中心にして揺動する永久磁石棒22の自由端の揺動軌跡に接近して直線状又は円弧状に傾斜して形成されている。 In this case, a pair of inclined surfaces 42a formed in a U-shaped core 42, 42b so as not to impinge on the free end of the permanent magnet rod 22 when the free end of the permanent magnet rod 22 enters into the gap, the mirror body 21 It is formed to be inclined in a straight line or an arc shape close the center of the back surface of the mirror portion 21e to swing trajectory of the free end of the permanent magnet rod 22 swings around.
【0100】 [0100]
上記構成による第2実施例における変形例4の光偏向器20Eの動作について図11〜図13を用いて順に説明する、 Be described in order with reference to FIGS. 11 to 13, the operation of the optical deflector 20E of Modification 4 of the second embodiment having the above structure,
まず、光偏向器20Eが初期状態の時には、ミラー体21内に形成した一対の第1梁部21b,21b及び一対の第2梁部21d,21dの捩じりバネ性による復元力により内枠部21c及びミラー部21eはミラー体支持台23上で略水平な姿勢を維持していると共に、ミラー体21のミラー部21eの裏面中央に固着させた永久磁石棒22の自由端側が、図11(a)に示したようにコ字状コア42の一対の傾斜面42a,42b間に形成したギャップの中心部位に進入していると共に、図11(b)に示したようにコ字状コア41の一対の傾斜面41a,41b間に形成したギャップの中心部位に進入している。 First, when the optical deflector 20E is in the initial state, the inner frame a pair of first beam portion 21b formed in the mirror body 21, 21b and the pair of second beam portions 21d, by the restoring force due to the torsion spring of 21d with parts 21c and the mirror portion 21e maintains a substantially horizontal posture on the mirror body support 23, the free end side of the permanent magnet rod 22 which was fixed to the back surface center of the mirror portion 21e of the mirror body 21, FIG. 11 pair of inclined surfaces 42a of the U-shaped core 42 as shown in (a), with which enters the central portion of the gap formed between 42b, U-shaped core as shown in FIG. 11 (b) pair of inclined surfaces 41a of 41, and enters the central portion of the gap formed between 41b. この時、電磁石40Y,40XはそれぞれOFF状態を維持しているので磁界が発生しない。 At this time, the electromagnet 40Y, 40X magnetic field does not occur because each maintains the OFF state.
【0101】 [0101]
次に、図12(a)に示した如く、ミラー体21内に形成したミラー部21eのみを初期状態から一対の第2梁部21d,21d(X軸)を中心にして反時計方向に揺動させる場合には、ミラー体支持台23の内側面23d,23fの内側でY軸に沿って設けた電磁石40YだけをON状態にする。 Next, as shown FIG. 12 (a), the second beam portion 21d only mirror portion 21e formed in the mirror body 21 from the initial state of the pair, 21d (X-axis) rocking to the counterclockwise direction about the in case of dynamic is the inner surface 23d of the mirror body support 23, only the electromagnet 40Y provided along the Y-axis in the inside of 23f to oN state. ここで、図12(a)に示した如く、電磁石40Y中のスイッチ44をONした時に直流電源46から可変抵抗器45の抵抗値に応じた電流Iaがコイル43を通して流れるので、コ字状コア42に形成した一対の傾斜面42a,42bに電流値に応じた磁界N極,S極がそれぞれ発生し、これらの磁界N極,S極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(傾斜面42aからの反発力,傾斜面42bからの吸引力)によって、ミラー部21eの裏面中心部に固着した永久磁石棒22の自由端が傾斜面42b側に向かって移動する。 Here, as shown in FIG. 12 (a), since the current Ia corresponding to the resistance value of the variable resistor 45 from the DC power supply 46 when the ON switch 44 in the electromagnet 40Y flows through the coil 43, U-shaped core pair of inclined surfaces 42a formed in 42, the magnetic field N pole in accordance with the current value 42b, S poles are generated respectively, these magnetic fields N pole, to the magnetic field N pole of the free end of the S pole and the permanent magnet rod 22 depending electromagnetic force (repulsive force from the inclined surface 42a, the suction force from the inclined surface 42b) by the free ends of the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e is moved toward the inclined surface 42b side .
【0102】 [0102]
そして、永久磁石棒22の自由端が傾斜面42b側に向かって移動すると、この永久磁石棒22と一体となってミラー体21内に形成したミラー部21eが一対の第2梁部21d,21d(X軸)を中心にして反時計方向(矢印方向)に傾動する。 When the free end of the permanent magnet rod 22 is moved toward the inclined surface 42b side, the mirror portion 21e formed in the mirror body 21 together with the permanent magnet rod 22 is a pair of second beam portions 21d, 21d in the (X-axis) around the tilted counterclockwise (arrow).
【0103】 [0103]
この際、ミラー体21内に形成したミラー部21eの傾斜角度は可変抵抗器45の抵抗値を制御すれば良い。 At this time, the angle of inclination of the mirror portion 21e formed in the mirror body 21 may be controlled resistance value of the variable resistor 45. ここで、より少ない電流でミラー体21内に形成したミラー部21eを傾動させるためには、コ字状コア42に形成した一対の傾斜面42a,42bからの発生磁界をより有効に永久磁石棒22の自由端に作用させる必要がある。 Here, in order to tilt the mirror portion 21e formed in the mirror body 21 with less current, a pair of inclined surfaces 42a formed in a U-shaped core 42, more effectively the permanent magnet rod magnetic field generated from 42b it is necessary to act on the free end 22.
【0104】 [0104]
そのためには、永久磁石棒22の自由端と、コ字状コア42に形成した一対の傾斜面42a,42bとの間の距離ができるだけ近い方が望ましく、一対の傾斜面42a,42bは永久磁石棒22の自由端の揺動軌跡に接近して直線状又は円弧状に傾斜しているために、ミラー体21内に形成したミラー部21eが傾動しても一対の傾斜面42a,42bの傾斜で永久磁石棒22の自由端の衝突を防ぎながら永久磁石棒22の自由端側を傾斜面42b側に近づけることが可能になる。 For that purpose, the free end of the permanent magnet rod 22, a pair of inclined surfaces 42a formed in a U-shaped core 42, is more desirably as close as possible the distance between the 42b, a pair of inclined surfaces 42a, 42b is a permanent magnet to close the swinging locus of the free end of the rod 22 is inclined in a straight line or an arc shape, a pair of inclined surfaces 42a also mirror portion 21e formed in the mirror body 21 is tilted, 42b slope of in it is possible to bring the free end of the permanent magnet rod 22 on the inclined surface 42b side while preventing collision of the free end of the permanent magnet rod 22.
【0105】 [0105]
尚、図12(b)に示した如く、ミラー体21内に形成したミラー部21eを初期状態から一対の第2梁部21d,21d(X軸)を中心にして時計方向に揺動させる場合には、上記した図12(a)の場合に対して逆方向の電流Ibが流れるように直流電源46の極性を反転させた直流電源46'を用いれば良く、この場合にはコ字状コア42に形成した一対の傾斜面42a,42bにそれぞれ発生する磁界S極,N極が上記した図12(a)の場合とは逆向きになるので、これらの磁界S極,N極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(傾斜面42aからの吸引力,傾斜面42bからの反発力)によって、ミラー部21eの裏面中心部に固着した永久磁石棒22の自由端が傾斜面42a側に向かって移動する。 Incidentally, as shown in FIG. 12 (b), when the second beam portion 21d of the mirror portion 21e formed in the mirror body 21 from the initial state of the pair, around the 21d (X-axis) is swung in the clockwise direction the conductivity, an 12 DC power supply 46 to the reverse direction of the current Ib is obtained by inverting the polarity of the DC power source 46 to flow for the case of (a) 'described above, in this case U-shaped core pair of inclined surfaces 42a formed in 42, respectively the magnetic field generated by the S pole in 42b, the N pole is opposite to the case of FIG. 12 (a) described above, these magnetic fields S pole, N pole and the permanent magnet electromagnetic force corresponding to the magnetic field N pole of the free end of the rod 22 (the suction force from the inclined surface 42a, the repulsive force from the inclined surface 42b) by the free of the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e end is moved toward the inclined surface 42a side.
【0106】 [0106]
そして、永久磁石棒22の自由端が傾斜面42a側に向かって移動すると、この永久磁石棒22と一体となってミラー体21内に形成したミラー部21eが一対の第2梁部21d,21d(X軸)を中心にして時計方向(矢印方向)に傾動する。 When the free end of the permanent magnet rod 22 is moved toward the inclined surface 42a side, the mirror portion 21e formed in the mirror body 21 together with the permanent magnet rod 22 is a pair of second beam portions 21d, 21d in the (X-axis) around the tilted clockwise (arrow).
【0107】 [0107]
従って、電磁石40Y中で直流電源46と直流電源46'とを切り換え可能に一体的に備えた直流電源を用いれば、ミラー体21内に形成したミラー部21eをX軸を中心にして反時計方向,時計方向に揺動できる。 Therefore, using a DC power supply having a DC power source 46 'and capable of integrally switching the DC power source 46 in the electromagnet 40Y, counterclockwise mirror portion 21e formed in the mirror body 21 about the X axis , it can be swung in the clockwise direction.
【0108】 [0108]
次に、図13(a)に示した如く、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eを初期状態から一対の第1梁部21b,21b(Y軸)を中心にして反時計方向に揺動させる場合には、ミラー体支持台23の内側面23c,23eの内側でX軸に沿って設けた電磁石40XだけをON状態にする。 Next, as shown in FIG. 13 (a), the first beam portion 21b second beam portions 21d inner frame 21c formed in the mirror body 21 and a pair of the 21d and mirror portion 21e from the initial state of the pair, and 21b a (Y axis) in the center when swinging in the counterclockwise direction, the inner surface 23c of the mirror body support 23, only the electromagnets 40X provided along the X-axis in the inside of 23e to oN state. ここでも、図13(a)に示した如く、電磁石40X中のスイッチ44をONした時に直流電源46から可変抵抗器45の抵抗値に応じた電流Icがコイル43を通して流れるので、コ字状コア41に形成した一対の傾斜面41a,41bに電流値に応じた磁界N極,S極がそれぞれ発生し、これらの磁界N極,S極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(傾斜面41aからの反発力,傾斜面41bからの吸引力)によって、ミラー部21eの裏面中心部に固着した永久磁石棒22の自由端が傾斜面41b側に向かって移動する。 Again, as shown in FIG. 13 (a), the current Ic corresponding to the resistance value of the variable resistor 45 from the DC power supply 46 when the ON switch 44 in the electromagnet 40X flows through the coil 43, U-shaped core pair of inclined surfaces 41a formed in 41, the magnetic field N pole in accordance with the current value 41b, S poles are generated respectively, these magnetic fields N pole, to the magnetic field N pole of the free end of the S pole and the permanent magnet rod 22 depending electromagnetic force (repulsive force from the inclined surface 41a, the suction force from the inclined surface 41b) by the free ends of the permanent magnet rod 22 fixed to the back surface center portion of the mirror 21e is moved toward the inclined surface 41b side .
【0109】 [0109]
そして、永久磁石棒22の自由端が傾斜面41b側に向かって移動すると、この永久磁石棒22と一体となってミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eが一対の第1梁部21b,21b(Y軸)を中心にして反時計方向(矢印方向)に傾動する。 When the free end of the permanent magnet rod 22 is moved toward the inclined surface 41b side, the second beam portion 21d of the inner frame portion 21c and a pair formed within the mirror body 21 together with the permanent magnet rod 22, 21d and the mirror portion 21e is a pair of first beam portion 21b, tilts 21b around the (Y-axis) counterclockwise (arrow).
【0110】 [0110]
この際、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eの傾斜角度は可変抵抗器45の抵抗値を制御すれば良い。 At this time, the second beam portion 21d inner frame 21c formed in the mirror body 21 and the pair, 21d and the inclination angle of the mirror portion 21e may be controlled resistance value of the variable resistor 45. ここで、より少ない電流でミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eを傾動させるためには、コ字状コア41に形成した一対の傾斜面41a,41bからの発生磁界をより有効に永久磁石棒22の自由端に作用させる必要がある。 Here, in order to tilt the second beam portions 21d, 21d and the mirror portion 21e is formed in the mirror body 21 inner frame portion 21c and the pair with less current, a pair of inclined formed in a U-shaped core 41 surface 41a, it is necessary to act more effectively free end of the permanent magnet rod 22 to the magnetic field generated from 41b.
【0111】 [0111]
そのためには、永久磁石棒22の自由端と、コ字状コア41に形成した一対の傾斜面41a,41bとの間の距離ができるだけ近い方が望ましく、一対の傾斜面41a,41bは永久磁石棒22の自由端の揺動軌跡に接近して直線状又は円弧状に傾斜しているため、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eが傾動しても一対の傾斜面41a,41bの傾斜で永久磁石棒22の自由端の衝突を防ぎながら永久磁石棒22の自由端側を傾斜面41b側に近づけることが可能になる。 For that purpose, the free end of the permanent magnet rod 22, a pair of inclined surfaces 41a formed in a U-shaped core 41, is more desirably as close as possible the distance between the 41b, a pair of inclined surfaces 41a, 41b is a permanent magnet due to the linearly inclined or arc-shaped close to the swinging locus of the free end of the rod 22, the inner frame is formed in the mirror body 21 portion 21c and the pair of second beam portions 21d, 21d and the mirror unit 21e There a pair of inclined surfaces 41a be tilted, it is possible to bring the free end of the permanent magnet rod 22 on the inclined surface 41b side while preventing collision of the free end of the permanent magnet rod 22 in 41b slope of.
【0112】 [0112]
尚、図13(b)に示した如く、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eを初期状態から一対の第1梁部21b,21b(Y軸)を中心にして時計方向に揺動させる場合には、上記した図13(a)の場合に対して逆方向の電流Idが流れるように直流電源46の極性を反転させた直流電源46'を用いれば良く、この場合にはコ字状コア41に形成した一対の傾斜面41a,41bにそれぞれ発生する磁界S極,N極が上記した図13(a)の場合とは逆向きになるので、これらの磁界S極,N極と永久磁石棒22の自由端の磁界N極とに応じた電磁力(傾斜面41aからの吸引力,傾斜面41bからの反発力)によって、ミラー部21eの裏面中心部に固着した永久磁石棒22の自 Incidentally, as shown in FIG. 13 (b), the first beam portion 21b second beam portions 21d inner frame 21c formed in the mirror body 21 and a pair of the 21d and mirror portion 21e from the initial state of the pair, 21b when swinging in the clockwise direction about the (Y axis), a DC power supply obtained by inverting the polarity of the DC power source 46 so as to flow the reverse current Id with respect to the case of FIG. 13 described above (a) may be used to 46 ', opposite to the case of FIG. 13 in which the magnetic field S pole, N pole and the respectively generated pair of inclined surfaces 41a formed in a U-shaped core 41, and 41b in this case (a) since, these field S pole, an electromagnetic force corresponding to the magnetic field N pole of the free end of the N pole and the permanent magnet rod 22 (the suction force from the inclined surface 41a, the repulsive force from the inclined surface 41b) by the mirror own permanent magnet rod 22 fixed to the rear surface center parts 21e 由端が傾斜面41a側に向かって移動する。 Derived end is moved toward the inclined surface 41a side.
【0113】 [0113]
そして、永久磁石棒22の自由端が傾斜面41a側に向かって移動すると、この永久磁石棒22と一体となってミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eが一対の第2梁部21d,21d(X軸)を中心にして時計方向(矢印方向)に傾動する。 When the free end of the permanent magnet rod 22 is moved toward the inclined surface 41a side and the second beam portion 21d of the inner frame portion 21c and a pair formed within the mirror body 21 together with the permanent magnet rod 22, 21d and the second beam portion 21d mirror portion 21e is a pair, around the 21d (X-axis) is tilted in the clockwise direction (arrow direction).
【0114】 [0114]
従って、電磁石40X中で直流電源46と直流電源46'を切り換え可能に一体的に備えた直流電源を用いれば、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eをX軸を中心にして反時計方向,時計方向に揺動できる。 Therefore, the use of the DC power supply integrally provided with a switchable DC power supply 46 'and the DC power source 46 in the electromagnet 40X, the inner frame is formed in the mirror body 21 portion 21c and the pair of second beam portions 21d, 21d as well as swinging the mirror portion 21e counterclockwise around the X axis, in a clockwise direction.
【0115】 [0115]
本構造の場合、ミラー体21内に形成したミラー部21eの最大傾斜角度、又は、ミラー体21内に形成した内枠部21c及び一対の第2梁部21d,21d並びにミラー部21eの最大傾斜角度は、永久磁石棒22の長さ,一対の傾斜面41a,41b間に形成したギャップ幅,永久磁石棒22の自由端と一対の傾斜面41a,41bとの間の距離,永久磁石棒22の自由端の先端形状などで決定される。 For this structure, the maximum inclination angle of the mirror portion 21e formed in the mirror body 21, or the second beam portion 21d inner frame 21c formed in the mirror body 21 and the pair, 21d and the maximum inclination of the mirror portion 21e angle, the length of the permanent magnet rod 22, the distance between the pair of inclined surfaces 41a, gap width formed between 41b, the free end and a pair of inclined surfaces 41a of the permanent magnet rod 22, and 41b, the permanent magnet rod 22 It is determined such by the tip shape of the free end of the. たとえば、永久磁石棒22の長さを短くすれば、その他のパラメータが同じでもより大きな角度に傾斜が可能である。 For example, the shorter the length of the permanent magnet rod 22, the other parameters can be also inclined to a greater angle the same.
【0116】 [0116]
上記では、図13(a),(b)の動作と、図14(a),(b)の動作とをそれぞれ個別に説明したが、ミラー体支持台23の正方形状有底穴部23b内に設けた電磁石40Xと電磁石40Yとを選択的に組み合わせて動作させれば、両電磁石40X,40Yの組み合わせに応じて発生する合成磁界による(吸引力+反発力)の方向に永久磁石棒22の自由端が正方形状有底穴部23b内で移動するので、ミラー体21内に形成した一対の第1梁部21b,21b及び内枠部21c並びに一対の第2梁部21d,21dを介してミラー部21eをXY平面内で2次元的に揺動させることができる。 In the above, FIG. 13 (a), the the operation of (b), FIG. 14 (a), the operation and the respective has been described separately (b), the mirror body square perforated bottom hole portion 23b of the support 23 It is operated by selectively combining the electromagnets 40X and the electromagnet 40Y provided on both electromagnets 40X, by the combined magnetic field generated in response to a combination of 40Y direction of the permanent magnet rod 22 (suction force + repulsive force) since the free end moves within the square closed bottom hole portion 23b, a pair of first beam portion 21b formed in the mirror body 21, 21b and the inner frame portion 21c and a pair of second beam portions 21d, through 21d the mirror portion 21e can be 2-dimensionally oscillatable in the XY plane. これにより、レーザー光をミラー体21内に形成したミラー部21eに照射すれば、レーザ光がミラー部21eの傾動方向に対応して2次元的に反射される。 Thus, by irradiating the mirror portion 21e forming a laser beam to the mirror body 21, laser light is reflected two-dimensionally in correspondence with the tilting direction of the mirror portion 21e.
【0117】 [0117]
次に、図14に示した如く、先に説明した第2実施例の光偏向器20Aと、第2実施例の光偏向器を一部変形させた変形例4の光偏向器20Eとを比較するにあたって、ミラー体21内に形成したミラー部21eの電流に対する偏向角特性を測定した。 Next, as shown in FIG. 14, comparing the optical deflector 20A of the second embodiment described above, the optical deflector 20E of Modification 4 of the optical deflector was partially modified in the second embodiment order to, was measured deflection angle characteristics with respect to the current mirror portion 21e formed in the mirror body 21. この際、光偏向器20A,20E内の各ミラー体21は各ミラー部21eを大きく傾動させるためにポリイミド材を用いて同一形状に作製し、且つ、各ミラー部21e上に鏡面加工を施すか、又は、ミラーを貼着したものを用いて、各ミラー部21eをX軸を中心に揺動させた場合について測定した。 Is this case, each mirror 21 of the optical deflector 20A, the 20E is manufactured in the same shape using the polyimide material in order to increase tilt each mirror portion 21e, and is subjected to a mirror finish on the mirror 21e or, by using a material obtained by adhering a mirror was measured for the case where each mirror portion 21e is rocked about the X axis.
【0118】 [0118]
ここでは、光偏向器20A内に設けた一対の磁気コア24Y,24Y(図5,図6)の外形形状と、光偏向器20E内に設けた電磁石40Yのコ字状コア42(図10〜図12)の外形形状とが異なっており、コイル巻数などは両者同一に設定した。 Here, a pair of magnetic core 24Y provided in the optical deflector in 20A, 24Y (FIG. 5, FIG. 6) and the outer shape of U-shaped core 42 of the electromagnet 40Y provided in the optical deflector within 20E (FIGS. 10 Figure 12) are different and the outer shape of, such as number of coil turns was set to both the same.
【0119】 [0119]
尚、光偏向器20Aではミラー体21のミラー部21eの裏面に固着させた永久磁石棒22の自由端が一対の電磁石24Y,24Yの互いに対向する端部に衝突する可能性があるために、永久磁石棒22の太さを500μm(角)に設定した。 The optical deflector free end of the permanent magnet rod 22 in is fixed to the rear surface of the mirror portion 21e of the mirror body 21 20A is a pair electromagnets 24Y, because of the possibility of collision to the opposite ends of 24Y, set the thickness of the permanent magnet rod 22 to 500μm (corner). 一方、光偏向器20Eではミラー体21のミラー部21eの裏面に固着させた永久磁石棒22の自由端がコ字状コア42に形成した一対の傾斜面42a,42bに衝突しないので、永久磁石棒22の太さを上記よりも太く1mm(角)に設定でき、これにより永久磁石棒22の磁束量か大きくなった。 On the other hand, a pair of inclined surfaces 42a which free ends of the permanent magnet rod 22 is fixed to the rear surface of the mirror portion 21e of the optical deflector 20E in the mirror body 21 is formed in a U-shaped core 42, it does not impinge on 42b, permanent magnets the thickness of the rod 22 can be set to 1 mm (corner) thicker than the, increased thereby or flux amount of the permanent magnet rod 22.
【0120】 [0120]
この結果、図14からもわかるとおり、光偏向器20Aに対して光偏向器20Eの方が電流効率が良い。 As a result, as can be seen from FIG. 14, towards the optical deflector 20E current efficient with respect to the optical deflector 20A. より具体的には、電流値を例えば−100mA〜+100mAの範囲内で振った場合に、光偏向器20E内に設けたミラー体21のミラー部21eの方が光偏向器20A内に設けたミラー体21のミラー部21eよりも−側で約4倍傾けることができ、+側で約11倍と大きく傾けることができるので、光偏向器20E内に設けた電磁石40Yの方が光偏向器20A内に設けた一対の磁気コア24Y,24Yよりも電流効率が良い。 Mirror More specifically, when shaken in a range of current values, for example -100mA~ + 100mA, the direction of the mirror portion 21e of the mirror body 21 provided in the optical deflector within 20E is provided in the optical deflector in 20A than the mirror portion 21e of the body 21 - side in can be tilted about four times, + it is possible to incline is about a 11-fold on the side, it is light deflector electromagnets 40Y provided in the optical deflector within 20E 20A a pair of magnetic core 24Y provided within the current efficiency is better than 24Y. 同様に、光偏向器20E内に設けた電磁石40Xの方が光偏向器20A内に設けた一対の磁気コア24X,24Xよりも電流効率が良い。 Similarly, a pair of magnetic core 24X which towards electromagnets 40X provided in the optical deflector within 20E is provided in the optical deflector in 20A, current efficient than 24X.
【0121】 [0121]
尚、光偏向器20A,光偏向器20E内で永久磁石棒22の太さを同じにした場合でも、光偏向器20Eの場合の方が光偏向器20Aの場合よりも電流効率が良いことも確認した。 The optical deflector 20A, even when the same thickness of the permanent magnet rod 22 by the optical deflector within 20E, even better in the case of the optical deflector 20E be good current efficiency than that of the optical deflector 20A confirmed.
【0122】 [0122]
上記した第2実施例の光偏向器20A及び第2実施例を一部変形させた変形例1〜4の光偏向器20B〜20Eによれば、ミラー体21内に形成したミラー部21eの裏面中心部に一端部を固着させた永久磁石棒22の自由端を磁気的な吸引力及び/又は反発力でミラー体支持台23の正方形状有底穴部23b内で移動させているので、ミラー部21eをXY平面内で2次元的に揺動させることができ、且つ、構造が非常に簡単であるので低価格が可能であると共に、大きな偏向角度に対してもミラー部21eを低電力で傾動させることができる。 According to above-described second embodiment of the optical deflector 20A and the second optical deflector 20B~20E modification 1-4 Example was partially deformed, the rear surface of the mirror 21e formed in the mirror body 21 since moved in square perforated bottom hole portion 23b of the mirror body support 23 the free end of the permanent magnet rod 22 is fixed to one end portion in the magnetic attraction force and / or repulsion force to the central portion, the mirror parts 21e can be 2-dimensionally oscillatable within the XY plane, and, since the structure is very simple as well as a possible low-cost, low-power mirror 21e also for large deflection angles it can be tilted.
【0123】 [0123]
【発明の効果】 【Effect of the invention】
以上詳述した本発明に係る光偏向器において、請求項1記載によると、ミラー体内に形成したミラー部の裏面中心部と、ミラー体支持台に形成した半球状有底穴部の内周面との間に挟まれた磁性球体を、磁気的な吸引力でミラー体支持台の半球状有底穴部の周面に沿って移動させているので、ミラー部をXY平面内で2次元的に揺動させることができ、且つ、構造が非常に簡単であるので低価格が可能であると共に、大きな偏向角度に対してもミラー部を低電力で傾動させることができる。 In the optical deflector according to the present invention described above in detail, according to claim 1, wherein a back surface center portion of the mirror portion formed on the mirror body, the inner circumferential surface of the hemispherical closed bottom hole portion formed in the mirror-body support magnetic spheres sandwiched between, so that is moved along the peripheral surface of the hemispherical closed bottom hole of the mirror body supporting base by the magnetic attractive force, two-dimensional mirror unit in the XY plane it can be swung in, and, since the structure is very simple as well as a possible low-cost, can also tilting the mirror unit in a low power for large deflection angle.
【0124】 [0124]
また、請求項2記載によると、ミラー体内に形成したミラー部の裏面中心部に一端部を固着させた永久磁石棒の他端部を磁気的な吸引力及び/又は反発力でミラー体支持台の有底穴部内で移動させているので、ミラー部をXY平面内で2次元的に揺動させることができ、且つ、構造が非常に簡単であるので低価格が可能であると共に、大きな偏向角度に対してもミラー部を低電力で傾動させることができる。 Further, according to claim 2, wherein the mirror-body support the other end portion of the permanent magnet rod is fixed to one end portion on the back surface center portion of the mirror portion formed on the mirror body in a magnetic attraction force and / or repulsion since moving in bottomed hole portion of the mirror portion can be 2-dimensionally oscillatable within the XY plane, and, together with since the structure is very simple it is possible to lower the cost, large deflection it can also tilting the mirror unit in a low power relative angle.
【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS
【図1】本発明に係る第1実施例の光偏向器の構成を説明するための分解斜視図である。 1 is an exploded perspective view for explaining the structure of an optical deflector of a first embodiment according to the present invention.
【図2】本発明に係る第1実施例の光偏向器の動作を説明するための縦断面図であり、(a)はミラー体の初期状態を示し、(b)はミラー体内に形成したミラー部を一対の第2梁部(X軸)を中心にして反時計方向に揺動した状態を示し、(c)はミラー体内に形成した内枠部及び一対の第2梁部並びにミラー部を一対の第1梁部(Y軸)を中心にして反時計方向に揺動した状態を示した図である。 Figure 2 is a longitudinal sectional view for explaining the operation of the optical deflector of the first embodiment according to the present invention, (a) shows the initial state of the mirror body, (b) is formed in the mirror body the second beam portion of the mirror portion of the pair (X axis) illustrates a state in which swung counterclockwise about the, (c) a second beam portion and the mirror portion of the inner frame and a pair formed in the mirror body which is a diagram showing a state where the swing in the counterclockwise direction by the first beam portion of the pair of (Y-axis) in the center.
【図3】本発明に係る第1実施例の光偏向器を一部変形させた変形例1を説明するための縦断面図である。 3 is a longitudinal sectional view for explaining a modified example 1 of the optical deflector was partly modifying the first embodiment of the present invention.
【図4】本発明に係る第1実施例の光偏向器を一部変形させた変形例2を説明するための縦断面図である。 4 is a longitudinal sectional view for explaining a modified example 2 of the optical deflector was partly modifying the first embodiment of the present invention.
【図5】本発明に係る第2実施例の光偏向器の構成を説明するための分解斜視図である。 5 is an exploded perspective view for explaining the structure of an optical deflector according to a second embodiment of the present invention.
【図6】本発明に係る第2実施例の光偏向器の動作を説明するための縦断面図であり、(a)はミラー体の初期状態を示し、(b)はミラー体内に形成したミラー部を一対の第2梁部(X軸)を中心にして反時計方向に揺動した状態を示し、(c)はミラー体内に形成した内枠部及び一対の第2梁部並びにミラー部を一対の第1梁部(Y軸)を中心にして反時計方向に揺動した状態を示した図である。 6 is a longitudinal sectional view for explaining the operation of the optical deflector according to a second embodiment of the present invention, (a) shows the initial state of the mirror body, (b) is formed in the mirror body the second beam portion of the mirror portion of the pair (X axis) illustrates a state in which swung counterclockwise about the, (c) a second beam portion and the mirror portion of the inner frame and a pair formed in the mirror body which is a diagram showing a state where the swing in the counterclockwise direction by the first beam portion of the pair of (Y-axis) in the center.
【図7】本発明に係る第2実施例の光偏向器を一部変形させた変形例1を説明するための縦断面図である。 7 is a longitudinal sectional view for explaining a modified example 1 of the optical deflector was partially modified according to a second embodiment of the present invention.
【図8】本発明に係る第2実施例の光偏向器を一部変形させた変形例2を説明するための縦断面図である。 8 is a longitudinal sectional view for explaining a modified example 2 of the optical deflector was partially modified according to a second embodiment of the present invention.
【図9】(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例3を説明するための斜視図,縦断面図である。 9 (a), (b) is a perspective view for explaining a modified example 3 obtained by partly modifying the optical deflector according to a second embodiment of the present invention, is a longitudinal sectional view.
【図10】本発明に係る第2実施例の光偏向器を一部変形させた変形例4を説明するために初期状態を示した斜視図である。 10 is a perspective view showing an initial state for explaining a modified example 4 of the optical deflector was partially modified according to a second embodiment of the present invention.
【図11】(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例4を説明するために初期状態をそれぞれ示したY軸方向縦断面図,X軸方向縦断面図である。 11 (a), (b) the Y-axis direction vertical sectional view showing respectively an initial state for explaining a modified example 4 of the optical deflector was part variation of the second embodiment according to the present invention an X-axis direction vertical sectional view.
【図12】(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例4において、ミラー体内に形成したミラー部をX軸を中心に反時計方向,時計方向に揺動させる状態をそれぞれ示したY軸方向縦断面図,Y軸方向縦断面図である。 [12] (a), (b) in the fourth modification obtained by modifying part of the optical deflector according to a second embodiment of the present invention, counterclockwise the mirror portion formed on the mirror body about the X axis direction, Y axis direction longitudinal sectional view showing each state to swing in the clockwise direction and the Y-axis direction vertical sectional view.
【図13】(a),(b)は本発明に係る第2実施例の光偏向器を一部変形させた変形例4において、ミラー体内に形成した内枠部及び一対の第2梁部d並びにミラー部をY軸を中心に反時計方向,時計方向に揺動させる状態をそれぞれ示したX軸方向縦断面図,X軸方向縦断面図である。 13 (a), (b) in the fourth modification of the light deflector of the second embodiment according to the present invention has been partially deformed, the inner frame portion and a pair of second beam portion formed in the mirror body d and counter-clockwise around the mirror portion on the Y axis, X-axis direction vertical sectional view showing respectively a state to swing in the clockwise direction and the X-axis direction vertical sectional view.
【図14】本発明に係る第2実施例の光偏向器と、第2実施例の光偏向器を一部変形させた変形例4の光偏向器とを比較する際に、ミラー体内に形成したミラー部の電流に対する偏向角特性を示した図である。 An optical deflector of a second embodiment according to Figure 14 the present invention, when comparing the optical deflector of the optical deflector fourth modification obtained by partly modifying the second embodiment, formed in the mirror body it is a diagram showing a deflection angle characteristics for the mirror portion of the current.
【図15】(a),(b)は従来例1の静電力駆動小型光スキャナを説明するために示した上面図,縦断面図である。 [15] (a), (b) is a top view shown in order to explain the electrostatic drive compact optical scanner of the conventional example 1, a longitudinal sectional view.
【図16】(a),(b)は従来例2のプレーナ型電磁アクチュエータを説明するためにそれぞれ示した斜視図である。 [16] (a), it is a perspective view showing (b), respectively to illustrate a planar type electromagnetic actuator of the conventional example 2.
【符号の説明】 DESCRIPTION OF SYMBOLS
5…XYステージ、9…永久磁石、 5 ... XY stage, 9 ... permanent magnet,
10A…第1実施例の光偏向器、 10A ... optical deflector of the first embodiment,
10B…第1実施例を一部変形させた変形例1の光偏向器、 10B ... optical deflector of a modification 1 which has been partially modified the first embodiment,
10C…第1実施例を一部変形させた変形例2の光偏向器、 10C ... first optical deflector embodiment variant was partially modified example 2,
11…ミラー体、11a…外枠部、11b,11b…一対の第1梁部、 11 ... mirror body, 11a ... outer frame portion, 11b, 11b ... first beam portion of the pair,
11c…内枠部、11d,11d…一対の第2梁部、11e…ミラー部、 11c ... inner frame, 11d, 11d ... second beam portions of the pair, 11e ... mirror section,
12…ミラー体支持台、12a…上面外周部、12b…半球状有底穴部、 12 ... mirror-body support, 12a ... upper surface outer peripheral portion, 12b ... semispherical closed bottom hole section,
12c〜12f…外側面、 12c~12f ... the outer surface,
13…磁性球体、 13 ... magnetic sphere,
14X,14Y…電磁石、15…鉄心、16…コイル、17…スイッチ、 14X, 14Y ... electromagnet 15 ... core, 16 ... coil, 17 ... switch,
18…可変抵抗器、19…直流電源、 18 ... variable resistor, 19 ... DC power source,
20A…第2実施例の光偏向器、 20A ... optical deflector of the second embodiment,
20B…第2実施例を一部変形させた変形例1の光偏向器、 20B ... second embodiment of an optical deflector modification 1 which has been partially deformed,
20C…第2実施例を一部変形させた変形例2の光偏向器、 20C ... second optical deflector embodiment variant was partially modified example 2,
20D…第2実施例を一部変形させた変形例3の光偏向器、 20D ... optical deflector of Modification 3 was partially modified to a second embodiment,
20E…第2実施例を一部変形させた変形例4の光偏向器、 20E ... optical deflector of a modification 4 is deformed part of the second embodiment,
21…ミラー体、21a…外枠部、21b,21b…一対の第1梁部、 21 ... mirror body, 21a ... outer frame portion, 21b, 21b ... first beam portion of the pair,
21c…内枠部、21d,21d…一対の第2梁部、21e…ミラー部、 21c ... inner frame, 21d, 21d ... second beam portions of the pair, 21e ... mirror section,
22…永久磁石棒、 22 ... permanent magnet bars,
23…ミラー体支持台、23a…上面外周部、23b…正方形状有底穴部、 23 ... mirror-body support, 23a ... upper surface outer peripheral portion, 23b ... square perforated bottom hole portion,
23c〜23f…内側面、 23c~23f ... the inner surface,
24X,24Y…電磁石、25…鉄心、26…コイル、27…スイッチ、 24X, 24Y ... electromagnet 25 ... core, 26 ... coil, 27 ... switch,
28…可変抵抗器、29,29A,29B…直流電源、 28 ... variable resistor, 29 and 29A, 29B ... DC power source,
30X,30Y…電磁石、 30X, 30Y ... electromagnet,
31…リング状コア、31a,31b…一対の矩形面、 31 ... ring-shaped core, 31a, 31b ... a pair of rectangular faces,
32…リング状コア、32a,32b…一対の矩形面、 32 ... ring-shaped core, 32a, 32 b ... a pair of rectangular faces,
33…コイル、34…スイッチ、35…可変抵抗器、36…直流電源。 33 ... coil, 34 ... switch, 35 ... variable resistor, 36 ... DC power source.
40X,40Y…電磁石、 40X, 40Y ... electromagnet,
41…コ字状コア、41a,41b…一対の傾斜面、 41 ... U-shaped core, 41a, 41b ... a pair of inclined surfaces,
42…コ字状コア、42a,42b…一対の傾斜面、 42 ... U-shaped core, 42a, 42b ... a pair of inclined surfaces,
43…コイル、44…スイッチ、45…可変抵抗器、46…直流電源。 43 ... coil, 44 ... switch, 45 ... variable resistor, 46 ... DC power source.

Claims (2)

  1. 外枠部内から一対の第1梁部を互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第1梁部間に形成した内枠部を該一対の第1梁部を中心にして揺動可能に支持すると共に、前記一対の第1梁部に対して直交させた一対の第2梁部を前記内枠部内から互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第2梁部間に形成したミラー部を該一対の第2梁部を中心にして揺動可能に支持したミラー体と、 Each is extended inward from the outer frame portion to face each other a first beam portion of the pair, and, the inner frame portion formed between the first beam portion of the pair about a first beam portion of the pair with swingably supported, by extending the second beam portion of the pair of it is perpendicular to the first beam portion of the pair of inside areas to face each other from the inner frame portion, and, the pair first a mirror body formed by mirror portion is swingably supported about a second beam portions of said pair between second beam portion,
    前記ミラー体の外枠部の裏面を支持するための上面外周部と、この上面外周部の内側に開口して半径Rの半球状有底穴部とを形成したミラー体支持台と、 And the upper surface outer peripheral portion for supporting the back surface of the outer frame portion of the mirror body, a mirror body supporting base forming a hemispherical bottomed hole of radius R open to the inside of the upper surface outer peripheral portion,
    前記ミラー体支持台に形成した前記半球状有底穴部の半径Rに対してR/2の半径で球状に磁性材を用いて形成され、且つ、前記ミラー体を前記ミラー体支持台の上面外周部上に取り付けた状態で前記ミラー体内に形成した前記ミラー部の裏面中心部と、前記半球状有底穴部の内周面との間に挟まれながら両者にそれぞれ点接触する磁性球体と、 The spherically formed using a magnetic material with respect to the radius R of the mirror body has been formed to the support the hemispherical perforated bottom hole portion at R / 2 of the radius, and the upper surface of the mirror-body support the mirror body and the back center of the mirror portion in a state mounted on the outer peripheral portion is formed on the mirror body, a magnetic sphere respectively contact points both while being sandwiched between the inner peripheral surface of the hemispherical perforated bottom hole portion ,
    前記磁性球体を磁気的に吸引して該磁性球体を前記ミラー体支持台に形成した前記半球状有底穴部の内周面に沿って移動させることで、前記ミラー体内に形成した前記一対の第1梁部及び前記内枠部並びに前記一対の第2梁部を介して前記ミラー部を2次元的に傾動させる磁界発生手段とを備えたことを特徴とする光偏向器。 The magnetic sphere by moving along the inner peripheral surface of the hemispherical perforated bottom hole portion of the magnetic sphere is formed on the mirror-body support and magnetically attracted, the pair of which is formed in the mirror body optical deflector characterized by comprising a magnetic field generating means for tilting the mirror unit in two dimensions through the first beam portion and the inner frame portion and the second beam portion of the pair.
  2. 外枠部内から一対の第1梁部を互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第1梁部間に形成した内枠部を該一対の第1梁部を中心にして揺動可能に支持すると共に、前記一対の第1梁部に対して直交させた一対の第2梁部を前記内枠部内から互いに対向してそれぞれ内側に延出させ、且つ、前記一対の第2梁部間に形成したミラー部を該一対の第2梁部を中心にして揺動可能に支持したミラー体と、 Each is extended inward from the outer frame portion to face each other a first beam portion of the pair, and, the inner frame portion formed between the first beam portion of the pair about a first beam portion of the pair with swingably supported, by extending the second beam portion of the pair of it is perpendicular to the first beam portion of the pair of inside areas to face each other from the inner frame portion, and, the pair first a mirror body formed by mirror portion is swingably supported about a second beam portions of said pair between second beam portion,
    前記ミラー体内に形成した前記ミラー部の裏面中心部に一端部が固着され、且つ、前記一端部から他端部に向かって棒状に延出し、それぞれの端部にN極,S極の磁化方向が与えられた永久磁石棒と、 One end is fixed to the back surface center portion of the mirror portion formed on the mirror body, and extends into a rod toward the other end from the one end, N pole at each end, the magnetization direction of the S pole and the permanent magnet rod is given,
    前記ミラー体の外枠部の裏面を支持するための上面外周部と、この上面外周部の内側に開口した有底穴部とを形成したミラー体支持台と、 And the upper surface outer peripheral portion for supporting the back surface of the outer frame portion of the mirror body, a mirror body supporting base forming the bottomed hole opened in the inner side of the upper surface outer peripheral portion,
    前記ミラー体を前記ミラー体支持台の上面外周部上に取り付けて、前記ミラー体内に形成した前記ミラー部の裏面に固着した前記永久磁石棒を前記ミラー体支持台の有底穴部内に収納した状態で、前記永久磁石棒の周面から所定距離隔てて載置され、且つ、前記永久磁石棒の他端部を磁気的に吸引及び/又は反発させることで、前記ミラー体内に形成した前記一対の第1梁部及び前記内枠部並びに前記一対の第2梁部を介して前記ミラー部を2次元的に傾動させる磁界発生手段とを備えたことを特徴とする光偏向器。 Attaching the mirror body to the mirror-body support of the upper surface outer peripheral portion on and accommodating the permanent magnet rod fixed to the rear surface of said mirror unit formed in the mirror body in the mirror body supporting base having a bottom in the hole state, the placed a predetermined distance away from the peripheral surface of the permanent magnet bars, and the other end portion of the permanent magnet rod that is magnetically attracted and / or repelled, the pair formed in the mirror body the first beam portion and the optical deflector, characterized in that the inner frame portion and through the second beam portion of the pair and a magnetic field generating means for tilting the mirror unit in two dimensions of.
JP2003169702A 2002-10-18 2003-06-13 Light deflector Active JP4380233B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002304384 2002-10-18
JP2003169702A JP4380233B2 (en) 2002-10-18 2003-06-13 Light deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003169702A JP4380233B2 (en) 2002-10-18 2003-06-13 Light deflector

Publications (2)

Publication Number Publication Date
JP2004191918A true true JP2004191918A (en) 2004-07-08
JP4380233B2 JP4380233B2 (en) 2009-12-09

Family

ID=32774435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003169702A Active JP4380233B2 (en) 2002-10-18 2003-06-13 Light deflector

Country Status (1)

Country Link
JP (1) JP4380233B2 (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005026817A1 (en) * 2003-09-11 2005-03-24 Mems Technology Co., Ltd Optical scanner device
WO2007145236A1 (en) * 2006-06-15 2007-12-21 Alps Electric Co., Ltd. Actuator
JP2010026226A (en) * 2008-07-18 2010-02-04 Canon Inc Optical scanner and image forming apparatus
EP2597859A1 (en) * 2004-11-15 2013-05-29 Scaneva Ltd. Method and device for scanning light
US9157790B2 (en) 2012-02-15 2015-10-13 Apple Inc. Integrated optoelectronic modules with transmitter, receiver and beam-combining optics for aligning a beam axis with a collection axis
KR20150129125A (en) * 2014-05-08 2015-11-19 단국대학교 산학협력단 magnetostatically actuated scanning micromirror using magnetic coil integrated in substrate
US9435638B2 (en) 2012-03-22 2016-09-06 Apple Inc. Gimbaled scanning mirror array
US9482863B2 (en) 2012-10-23 2016-11-01 Apple Inc. Production of micro-mechanical devices
EP3115826A1 (en) * 2015-07-06 2017-01-11 Trumpf Laser Marking Systems AG Device for deflecting a laser beam
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US10018723B2 (en) 2012-07-26 2018-07-10 Apple Inc. Dual-axis scanning mirror

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5768803B2 (en) 2012-11-15 2015-08-26 株式会社豊田中央研究所 Mems devices

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005026817A1 (en) * 2003-09-11 2005-03-24 Mems Technology Co., Ltd Optical scanner device
EP2597859A1 (en) * 2004-11-15 2013-05-29 Scaneva Ltd. Method and device for scanning light
US8797623B2 (en) 2004-11-15 2014-08-05 Scaneva Ltd. Method and device for scanning light
WO2007145236A1 (en) * 2006-06-15 2007-12-21 Alps Electric Co., Ltd. Actuator
JP2010026226A (en) * 2008-07-18 2010-02-04 Canon Inc Optical scanner and image forming apparatus
US9157790B2 (en) 2012-02-15 2015-10-13 Apple Inc. Integrated optoelectronic modules with transmitter, receiver and beam-combining optics for aligning a beam axis with a collection axis
US9651417B2 (en) 2012-02-15 2017-05-16 Apple Inc. Scanning depth engine
US9435638B2 (en) 2012-03-22 2016-09-06 Apple Inc. Gimbaled scanning mirror array
US10018723B2 (en) 2012-07-26 2018-07-10 Apple Inc. Dual-axis scanning mirror
US9482863B2 (en) 2012-10-23 2016-11-01 Apple Inc. Production of micro-mechanical devices
KR20150129125A (en) * 2014-05-08 2015-11-19 단국대학교 산학협력단 magnetostatically actuated scanning micromirror using magnetic coil integrated in substrate
KR101685249B1 (en) * 2014-05-08 2016-12-12 단국대학교 산학협력단 magnetostatically actuated scanning micromirror using magnetic coil integrated in substrate
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
WO2017005588A1 (en) * 2015-07-06 2017-01-12 Trumpf Laser Marking Systems Ag Device for deflecting a laser beam
EP3115826A1 (en) * 2015-07-06 2017-01-11 Trumpf Laser Marking Systems AG Device for deflecting a laser beam
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly

Also Published As

Publication number Publication date Type
JP4380233B2 (en) 2009-12-09 grant

Similar Documents

Publication Publication Date Title
US5898515A (en) Light reflecting micromachined cantilever
US6496612B1 (en) Electronically latching micro-magnetic switches and method of operating same
US4745589A (en) Objective lens actuator having movements restricting control means for an optical head
US6924915B2 (en) Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
US6147421A (en) Platform positionable in at least three degrees of freedom by interaction with coils
US6149061A (en) Optoelectronic device for multidirectional capture of images of plane objects, in particular bar codes
US5912608A (en) Planar type electromagnetic actuator
US6337612B1 (en) Switch using solenoid
US20030137711A1 (en) Rocking member apparatus
US20020113675A1 (en) Movable-body apparatus, optical deflector, and method of fabricating the same
US5543956A (en) Torsional vibrators and light deflectors using the torsional vibrator
JP2003057586A (en) Optical scanner, vibrating body used for optical scanner and image forming apparatus equipped with optical scanner
US5187612A (en) Gyrating programmable scanner
JP2000214407A (en) Light deflector and display device using the same
JP2008203497A (en) Oscillating body apparatus, method of driving the same, light deflector and image display using light deflector
US20030053186A1 (en) Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure
US6747786B2 (en) Optical deflector and optical deflector array
US20100329654A1 (en) Lens driving apparatus with anti-shake mechanism
US20080225363A1 (en) Optical deflector and optical device
JP2001037201A (en) Motor device, stage equipment and exposure device
JP2004280039A (en) Solid state imaging device
US5959758A (en) Two-dimensional optical deflecting device
US5126605A (en) Oscillating stepper motor
US7224507B2 (en) Optical deflector
JPH08334723A (en) Optical deflection element

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050929

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090310

A131 Notification of reasons for refusal

Effective date: 20090310

Free format text: JAPANESE INTERMEDIATE CODE: A131

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090428

A131 Notification of reasons for refusal

Effective date: 20090609

Free format text: JAPANESE INTERMEDIATE CODE: A131

A521 Written amendment

Effective date: 20090807

Free format text: JAPANESE INTERMEDIATE CODE: A523

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Effective date: 20090901

Free format text: JAPANESE INTERMEDIATE CODE: A01

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Effective date: 20090914

Free format text: JAPANESE INTERMEDIATE CODE: A61

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 3

Free format text: PAYMENT UNTIL: 20121002

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121002

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131002

Year of fee payment: 4