JP2021135256A - Shape measurement device and shape measurement method - Google Patents

Abstract

To provide a shape measurement device and a shape measurement method that can determine whether light blocking by a light-blocking member is properly performed on a measurement object.SOLUTION: A shape measurement device 1 measures a shape of a measurement object T1 in a measurement area AR. The shape measurement device 1 includes a light source 11 that emits light to the measurement area AR, a light-receiving element 12 that receives reflection light formed when the light emitted from the light source 11 is reflected in the measurement area AR, and a specifying unit 13 that specifies an ineffective image part where the measured height is ineffective in a light reception image obtained from the reflection light received by the light-receiving element 12.SELECTED DRAWING: Figure 1

Description

The present invention relates to a shape measuring device and a shape measuring method for measuring the shape of a measurement target.

In Patent Document 1, the luminous flux from a low coherence light source is divided into a reference luminous flux and a measurement luminous flux and interfered with each other, and an object is scanned relative to a white interferometer in the optical axis direction to measure interference fringes. Thereby, a shape measuring device for measuring the shape of an object is disclosed.

By the way, in the manufacturing work of the hard disk drive, a liquid gasket is applied to the top cover, the top cover is attached to the main body side of the hard disk drive, and screwing is performed. In this manufacturing operation, the accuracy of the shape and dimensions of the liquid gasket is required. Therefore, in the manufacturing work of the hard disk drive, the shape of the liquid gasket is measured by using a white interferometer or the like.

Japanese Unexamined Patent Publication No. 2017-26494

For example, as shown in FIG. 8, in the case of the top cover 81 of the hard disk drive, the liquid gasket G to be measured is applied around the embossed portion 81a which is a portion not to be measured. Therefore, the light reflected by the inclined surface of the embossed portion 81a may reach the liquid gasket G. Then, when both the light reflected by the liquid gasket G after being reflected by the inclined surface of the embossed portion 81a and the light directly reflected by the liquid gasket G are input to the shape measuring device 82, the shape of the liquid gasket G is accurately adjusted. Cannot measure.

Therefore, it is conceivable that the light from the light source directed to the part not to be measured is blocked by the light-shielding member. Judgment is important.

An object of the present invention is to provide a shape measuring device and a shape measuring method capable of determining whether or not shading by a shading member is appropriate for an object to be measured.

The shape measuring device according to the embodiment of the present invention is
It is a shape measuring device that measures the shape and dimensions of the measurement target from the height information of the measurement target in the measurement area.
A light source that emits light to the measurement area and
A light receiving element that receives the reflected light emitted from the light source and reflected in the measurement area.
Among the light-receiving images obtained from the reflected light received by the light-receiving element, a specific portion that identifies an invalid image portion whose measured height is invalid, and a specific portion.
To be equipped.

According to the shape measuring device according to the embodiment of the present invention, it is determined whether or not the shading by the shading member is appropriate for the object to be measured based on the invalid image portion where the measured height is invalid. Is possible. As a result, when measuring the shape by the shape measuring device, it is possible to suppress the light reflected from the portion other than the measurement target from reaching the measurement target, and to accurately measure the height of the measurement target.

FIG. 1 is an explanatory diagram showing a schematic configuration of a shape measuring device of one embodiment. FIG. 2 is an explanatory diagram showing an mode of shading by a shading member installed in the shape measuring device of one embodiment. FIG. 3 is an explanatory diagram showing a first light-shielding state, a second light-shielding state, and a third light-shielding state by light-shielding members having different diameters and arranged in the shape measuring device of one embodiment. FIG. 4 is an explanatory diagram showing a schematic configuration of the shape measuring device of another embodiment. FIG. 5 is an explanatory view showing a schematic vertical cross-sectional structure of a moving mechanism included in the shape measuring device shown in FIG. FIG. 6 is a schematic plan view of the moving mechanism of FIG. FIG. 7 is an explanatory view showing an inspection system including the shape measuring device shown in FIG. FIG. 8 is an explanatory diagram showing that when a portion other than the measurement target is located in the measurement area in the conventional shape measuring device, light is reflected at this portion.

(Embodiment 1)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. The scope of the present invention is not limited to the following embodiments, and can be arbitrarily changed within the scope of the technical idea of the present invention.

As shown in FIG. 1, the shape measuring device 1 includes an optical interferometer unit 100, a specific unit 13, a storage unit 14, and a determination unit 15.

The optical interferometer unit 100 includes an optical system 10 having an optical path 10a that guides the light emitted from the light source 11 to the measurement area AR and guides the reflected light generated in the measurement area AR to the light receiving element 12, and is a white interferometer. According to the principle of, the shape and dimension of the measurement target T1 are measured from the height information of the measurement target T1 located in the measurement area AR. Here, the shape dimension is a dimension related to the shape such as the height and width of the measurement target T1. As an example, the light from the light source 11 is applied to the beam splitter 104 via the lens 101, the mirror 102, and the lens 103. The beam splitter 104 splits the light from the light source 11 into two, a measurement luminous flux and a reference luminous flux.

The measured luminous flux is focused on the measurement area AR by the objective lens 105. The light reflected by the measurement area AR passes through the objective lens 105 and the beam splitter 104, and then reaches the light receiving element 12 via the lens 109.

The reference luminous flux is applied to the reference mirror 108 via the lens 106 and the mirror 107. The light reflected by the reference mirror 108 is incident on the beam splitter 104 through the mirror 107 and the lens 106, then is reflected by the beam splitter 104 in the direction in which the lens 109 is located, and is reflected by the beam splitter 104 in the direction in which the lens 109 is located. Reach 12

As described above, the light received by the measured luminous flux in the measurement area AR and the light reflected by the reference luminous flux in the reference mirror 108 reach the light receiving element 12.

The shape measuring device 1 measures the interference fringes by moving the relative position of the entire housing of the optical interferometer unit 100 or the optical system 10 in the housing and the measurement object T in the optical axis direction to measure the interference fringes, thereby measuring the measurement area AR. From the height information of the measurement target T1 in the inside, the shape and dimension of the measurement target T1 are measured. For example, assuming that the top cover of the hard disk drive is the measurement target T, the liquid gasket applied in the vicinity of the embossed portion of the top cover is the measurement target T1, and the embossed portion is the non-measurement target portion P.

When measuring the shape of the measurement target T1 by the shape measuring device 1, a light-shielding member 2 that blocks the light emitted from the light source 11 is arranged between the objective lens 105 on the optical path 10a of the optical system 10 and the measurement area AR. Further, the distance between the light-shielding member 2 and the measurement area AR is shorter than the distance between the light-shielding member 2 and the objective lens 105. The light-shielding member 2 blocks the light emitted from the light source 11 before reaching the non-measurement target portion P in the measurement area AR.

Further, the measurement object T can be held, for example, by screwing a screw passed through the screw through hole of the embossed portion into the screw hole of the holding base 4. At this time, as the light-shielding member 2, a ring-shaped washer can be fixed to the embossed portion with the screw. By fixing a washer of an appropriate diameter at an appropriate position of the embossed portion, it is possible to block light toward the measurement area AR within an appropriate range.

The identification unit 13 identifies an invalid image portion whose measured height is invalid in the received image obtained from the reflected light received by the light receiving element 12.

The identification of the invalid image portion is performed by at least one of the contour, the area, and the length of the predetermined portion of the image portion of the invalid image portion. The specified invalid image portion can be represented by the number of pixels of the invalid image portion on the light receiving element 12, or a unit of measurement such as mm.

When the light-shielding member 2 is arranged with respect to the shape measuring device 1 at a height at which shape measurement is invalid, for example, at a height outside the measurement range of the shape measuring device 1, the light receiving element 12 In the received image, the invalid image portion where the measured height is invalid indicates the position of the light-shielding member 2.

(Judgment example 1 of shading)
The storage unit 14 stores a determination standard that serves as a reference for determining shading of the measurement area AR. This determination criterion is, for example, distance range information for determining whether or not the edge of the light-shielding member 2 located in the measurement area AR is separated from the edge of the measurement target T1 within a predetermined range. This distance range information can be expressed in units of measurement such as the number of pixels or mm.

As shown in FIG. 3, the determination unit 15 indicates the edge of the invalid image portion whose measured height is invalid, and the measured height indicates the height of the measurement target T1. The distance L1 between images with the edge of the target image portion is calculated. In the shape measuring device 1, for example, the height measured by the shape measuring device 1 is higher than the height of the coated surface to which the liquid gasket to be measured T1 is applied, and is within the range of the height within the measuring range. The image portion showing the above is determined to be the target image portion.

Further, the determination unit 15 compares the inter-image distance L1 with the distance range information which is the determination standard read from the storage unit 14, and whether or not the light shielding by the light shielding member 2 is within the range indicated by the distance range information. To judge.

Since the invalid image portion whose measured height is invalid indicates the range of shading by the light-shielding member 2, by specifying this invalid image portion, the light-shielding by the light-shielding member 2 is the measurement target T1 and the portion not to be measured. It can be determined whether or not it is properly performed for P.

For example, the first light-shielding state shown in FIG. 3 is inappropriate light-shielding because the distance L between the edge of the light-shielding member 2 and the edge of the measurement target T1 is too long. When the first light-shielding state occurs, the determination unit 15 determines that the inter-image distance L1 is outside the range indicated by the distance range information.

The second light-shielding state is an appropriate light-shielding state because the distance L between the edge of the light-shielding member 2 and the edge of the measurement target T1 is within a predetermined range. When the second light-shielding state occurs, the determination unit 15 determines that the inter-image distance L1 is within the range indicated by the distance range information.

The third light-shielding state is inappropriate light-shielding because the distance L between the edge of the light-shielding member 2 and the edge of the measurement target T1 is too short. When the third light-shielding state occurs, the determination unit 15 determines that the inter-image distance L1 is outside the range indicated by the distance range information.

By providing the determination unit 15 in this way, it is possible to determine whether or not the shading is within the standard regardless of the judgment ability of a person. This determination can be presented to the operator by displaying characters on a monitor (not shown), lighting an LED (light emitting diode) of a predetermined color, or the like.

(Judgment example 2 of shading)
The storage unit 14 stores a determination standard that serves as a reference for determining shading of the measurement area AR. This determination criterion is, for example, area range information of an invalid image portion in which the measured height is invalid. The area range information of the invalid image portion is information indicating the range of the area of the invalid image portion or the range of the ratio of the area of the invalid image portion to the area of the measurement area AR. This area range information can be expressed by the number of pixels, a ^{unit of measurement such as mm 2} , or a ratio (%).

The determination unit 15 calculates the area of the invalid image portion specified by the specific unit 13. Then, the determination unit 15 compares the area of the invalid image portion with the area range information of the invalid image portion, which is the determination standard read from the storage unit 14, and determines whether or not the light shielding by the light shielding member 2 is within the standard. To judge. As shown in FIG. 3, by using the light-shielding members 2 having different sizes, the light-shielding range of the light-shielding member 2 changes, and the area of the invalid image portion also changes. For example, when the second light-shielding state occurs, the determination unit 15 determines that the calculated area of the invalid image portion is within the range of the area range information of the invalid image portion which is the determination criterion.

Alternatively, the determination unit 15 calculates the ratio of the area of the invalid image portion to the area of the measurement area AR specified by the specific unit 13. Then, the determination unit 15 compares the ratio of the area of the invalid image portion with the area range information of the invalid image portion which is the determination standard read from the storage unit 14, and whether the light shielding by the light shielding member 2 is within the standard. Judge whether or not.

When there are a plurality of measurement points for the measurement object T, the light-shielding member 2 may be fastened to the non-measurement target portion P of each measurement location. The determination unit 15 determines whether or not the light shielding by the light shielding member 2 is within the reference for each measurement point.

The holding table 4 may include an XY table for moving the object T to be measured, for example, in the X and Y directions orthogonal to each other in a horizontal plane. By providing this XY table, the holding table 4 can function as a measurement point changing mechanism for sequentially locating a plurality of measurement points in the measurement area AR for the same measurement object T. The determination unit 15 determines whether or not the shading by the light-shielding member 2 arranged at the measurement point is within the standard for each measurement point changed by the holding table 4.

As described above, when the washer, which is the light-shielding member 2, is already placed at the measurement location, the position data, shape data, etc. of the non-measurement target portion P, etc. on the measurement target object T from CAD (Computer-Aided Design) or the like. Even if there is no particular value, the quality of shading can be judged. In addition, it can be determined that the light-shielding member 2 is forgotten to be arranged at each measurement point. Further, when the arrangement of the light-shielding member 2 is inappropriate, the position of the light-shielding member 2 can be adjusted each time. After determining that the shading of the light-shielding member 2 at the plurality of measurement points is within the standard, it is also possible to sequentially execute the shape measurement of the measurement target T1 at the plurality of measurement points. Alternatively, the shape of the measurement target T1 can be measured each time it is determined that the shading is within the standard for each measurement point.

Further, in the shape measuring method of one embodiment, the shape of the measurement target T1 is measured by using the shape measuring device 1. Then, in this shape measurement method, the shape of the measurement target T1 located around the inclined surface is formed in a state where the light-shielding member 2 is arranged at a position covering at least the inclined surface in the portion P outside the measurement target in the measurement area AR. taking measurement.

(Embodiment 2)
Next, the configuration of the shape measuring device 1 of the second embodiment and the inspection system 5 including the shape measuring device 1 will be described with reference to FIGS. 4, 5, 6 and 7. The same or corresponding parts as those in the previous embodiment are designated by the same reference numerals, and the description thereof will not be repeated.

As shown in FIG. 4, the shape measuring device 1 includes a plate-shaped light-shielding member 2A and a moving mechanism 3. The edge shape of the light-shielding member 2A is not limited to a straight line, but may be a curved line.

The moving mechanism 3 includes a holding base 4 and a light-shielding member moving mechanism 30 that moves the light-shielding member 2A. The holding table 4 in this embodiment sequentially positions a plurality of measurement points of the measurement object T in the measurement area AR. Further, the light-shielding member moving mechanism 30 displaces the relative position between the light-shielding member 2A and the portion P not to be measured by moving the light-shielding member 2A to, for example, the X-direction component and the Y-direction component orthogonal to each other in the horizontal plane. .. That is, the moving mechanism 3 sequentially positions a plurality of measurement points for the same measurement object T in the measurement area AR, and changes the relative positions of the measurement points and the light-shielding member 2A positioned at the measurement points.

The light-shielding member moving mechanism 30 includes, for example, a hollow rotary table 31 having a hollow center side, as shown in FIGS. 5 and 6. The measurement area AR of the optical interferometer unit 100 is located in the cavity of the hollow rotary table 31. Further, the holding table 4 can be arranged on the central side of the hollow rotary table 31.

The hollow rotary table 31 has a ring-shaped lower base portion 31a, a thrust bearing 31b mounted on the lower base portion 31a, and a ring-shaped upper side rotatably supported on the thrust bearing 31b. It includes a rotating portion 31c. The upper rotating portion 31c has, for example, a gear portion on the peripheral surface. By transmitting the rotational force of the motor to the gear portion via, for example, a worm gear, the upper rotating portion 31c can rotate at an arbitrary angle in a plane. Not limited to such a rotation mechanism, the upper rotating portion 31c may be directly driven by using a so-called hollow motor in which the rotor and the stator are arranged to face each other in the thrust direction.

A support shaft 32 is embedded in the upper surface of the upper rotating portion 31c with the shaft core positioned in the Z direction orthogonal to the X direction and the Y direction. The upper portion of the support shaft 32 projects from the upper surface of the upper rotating portion 31c, and the protruding portion rotatably supports the light-shielding member 2A in a horizontal plane. Instead of the support shaft 32, a motor may be embedded in the upper rotating portion 31c, and a light-shielding member 2A may be attached to the rotating shaft of the motor.

The position and orientation of the light-shielding member 2A can be arbitrarily changed by rotating the upper rotating portion 31c at an arbitrary angle θ ₁ and rotating the light-shielding member 2A around the support shaft 32 at an arbitrary angle θ _2. .. As a result, the light-shielding member 2A is positioned above the position including the inclined surface of the non-measurement target portion P in the measurement area AR in a direction that does not overlap the measurement target T1, and the light emitted from the light source 11 is measured. It can be blocked before reaching the non-target part P.

As shown in FIG. 7, the inspection system 5 includes a computer 51, a controller 52, and a display 53. The controller 52 includes a device controller 52a that controls the optical interferometer unit 100 and a stage controller 52b that controls the moving mechanism 3. For example, the driver software attached to the optical interferometer unit 100 is installed in the computer 51, and various controls can be performed on the optical interferometer unit 100 by key operation on the computer 51 or the like, and light reception is performed during shape measurement. The image of the measurement area AR created from the light receiving image of the element 12 is displayed on the display 53. This display image is, for example, a color image in which the difference in height is represented by the difference in color.

In the operation of the moving mechanism 3, for example, by operating two predetermined keys on the keyboard of the computer 51, the upper rotating portion 31c of the hollow rotary table 31 is rotated clockwise and counterclockwise by a motor (not shown), and the other predetermined movement mechanism 3 is operated. By operating the two keys, the light-shielding member 2A can be rotated clockwise and counterclockwise by a motor provided with a rotating shaft at the position of the support shaft 32. The controller 52 receives the operation signal of the keyboard and drives the motor according to the operated keys.

Further, instead of performing such an operation of the moving mechanism 3 or the like by the key operation of the measurer, the moving mechanism 3 may automatically move the light-shielding member 2A or the like. For example, the storage unit 51a of the computer 51 stores the design data of a specific top cover, which is the measurement target T. As the design data, for example, target information indicating the positions, shapes, etc. of a plurality of measurement targets T1 and site information indicating the positions, shapes, etc. of a plurality of non-measurement targets P are stored. In this embodiment, the determination standard that is the criterion for determining the shading of the measurement area AR is stored in the storage unit 14.

The computer 51 determines the position of each measurement target T1 on the measurement target T held on the holding table 4 based on the target information based on the X distance and the Y distance on the XY coordinates from the predetermined origin position. do. Further, the computer 51 sequentially calculates the difference between the position of the measurement area AR on the XY coordinates and the position of the arbitrary measurement target T1. By moving the measurement target T1 by the holding table 4 by a distance corresponding to the difference, any measurement target T1 can be positioned in the measurement area AR. At this time, the non-measurement target portion P in the vicinity of the measurement target T1 may also be located in the measurement area AR.

The computer 51 is located in the measurement area AR by operating the moving mechanism 3 via the controller 52 based on the site information of the non-measurement target portion P stored in the storage unit 51a of the computer 51. The portion P not to be measured is shielded by the light-shielding member 2A. For example, the computer 51 calculates the position of the non-measurement target portion P located in the measurement area AR on the XY coordinates. Further, for example, the storage unit 51a of the computer 51 outputs _{the necessary rotation angles θ 1} and θ ₂ from the origin position of the moving mechanism 3 with respect to the position on the XY coordinates of the portion P not to be measured. The data table to be used and the data table of the number of drive pulses of each motor required for the required rotation _{angles θ 1} and θ _{2 are stored.} As a teaching operation, the light-shielding member 2A is manually positioned appropriately on a plurality of non-measurement target portions P of the measurement target object T, and the X distance and Y distance of the position or the necessary rotation for the position is performed. The angles θ ₁ and θ ₂ may be stored in the storage unit.

The computer 51 reads, for example, the part information of a plurality of non-measurement target parts P, which is the design data of the top cover, from the model number information of the top cover set on the holding table 4 input by the measurer. Further, the computer 51 operates the moving mechanism 3 via the controller 52 based on the data in the data table, and automatically moves the light-shielding member 2A above the portion P not to be measured in the measurement at a plurality of locations. Move to.

That is, the computer 51 controls the moving mechanism 3 based on the part information of the non-measurement target part P read from the storage unit 51a of the computer 51, and the relative position between the non-measurement target part P and the light-shielding member 2A. To change. In this way, in the configuration in which the relative positions of the portion P not to be measured and the light-shielding member 2A are changed, the washer, which is the light-shielding member 2, does not have to be arranged in advance in the plurality of measurement areas AR.

The light-shielding member 2A moves at a height position outside the measurement range of the shape measuring device 1. When the light-shielding member 2A moves at such a height position, as described above, in the light-receiving image of the light-receiving element 12, the invalid image portion indicates the position of the light-shielding member 2A.

Similar to the first embodiment, the determination unit 15 can determine whether or not the light shielding by the light shielding member 2A is within the standard by comparing the image-to-image distance L1 with the distance range information.

Alternatively, the determination unit 15 can determine whether or not the light shielding by the light shielding member 2A is within the standard as follows. The determination unit 15 calculates the difference between the invalid image portion and the non-measurement target portion P read from the storage unit 14. This difference is, for example, an edge difference which is the distance between the edge of the portion P not to be measured and the edge of the invalid image portion. The information of the portion P that is not the measurement target may be transferred from the storage unit 51a of the computer 51 to the storage unit 14.

Further, the storage unit 14 stores the permissible range of the distance between the edge of the portion P that is not the measurement target and the edge of the invalid image portion as a determination standard that serves as a criterion for determining the shading of the measurement area AR.

When the determination unit 15 determines that the calculated edge difference is within the permissible range stored by the storage unit 14, the determination unit 15 determines that the light shielding by the light shielding member 2 is within the reference. On the other hand, when the determination unit 15 determines that the calculated edge difference is outside the permissible range stored in the storage unit 14, the determination unit 15 determines that the light shielding by the light shielding member 2 is out of the standard.

The computer 51 may include the determination unit 15 and the storage unit 14, and the shape measuring device 1 may include the computer 51.

In the above example, the optical interferometer unit 100 is fixed in the X direction and the Y direction (for example, the horizontal direction), and a plurality of measurement target T1s are sequentially moved into the measurement area AR by the holding table 4. , Not limited to this. The optical interferometer unit 100 itself is provided so as to be movable in the X and Y directions, and by moving the optical interferometer unit 100, a plurality of measurement target T1s are sequentially positioned in the measurement area AR of the optical interferometer unit 100. You may. Further, in this configuration, the optical interferometer unit 100 and the light shielding member moving mechanism 30 can be configured to move together in the X direction and the Y direction.

Since the relative position between the portion P not to be measured and the light-shielding member 2A may be displaced, the light-shielding member 2A may be fixed and the measurement object T may be moved in the X direction and the Y direction. In this case, the holding table 4 that movably holds the measurement object T sets the relative position of the non-measurement target portion P located in the measurement area AR and the light-shielding member 2A in the X direction at least orthogonal to each other on a plane. It is a moving mechanism that displaces the component and the component in the Y direction. When the holding table 4 functions as a moving mechanism in this way, the holding table 4 further includes a rotating mechanism for rotating the measurement object T in a plane including the X direction and the Y direction, with respect to the light-shielding member 2A in a fixed arrangement. The measurement target T1 may change its direction.

When displaying the image of the measurement area AR created from the light receiving image of the light receiving element 12 on the display 53, the invalid image portion specified by the specific unit 13 may be displayed on the display 53 in a specific color. can. Further, the measurement target image portion can also be displayed on the display 53 in a color different from the specific color. The measurer can visually recognize the range in which the light-shielding members 2 and 2A are located in the measurement area AR in the color range on the display 53. That is, even if the shape measuring device 1 does not include the determination unit 15, the measurer can determine the suitability of shading.

Although the top cover of the hard disk drive is illustrated as the measurement object T, an article other than the top cover can be used as the measurement object T. Further, the shape measuring device for measuring the shape can be configured by using not only the optical system of the white interferometer but also another optical system. Further, in the above example, the measurement target T1 is irradiated with light from above, but the irradiation direction of the light with respect to the measurement target T1 is not limited.

The present invention can be used, for example, in the manufacturing field of a hard disk drive or the like having a step of applying a liquid packing to a cover member in a predetermined shape.

1: Shape measuring device 2: Light-shielding member 2A: Light-shielding member 3: Moving mechanism 4: Holding table 5: Inspection system 10: Optical system 10a: Optical path 11: Light source 12: Light receiving element 13: Specific unit 14: Storage unit 15: Judgment Unit 30: Light-shielding member moving mechanism 31: Hollow rotary table 31a: Lower base portion 31b: Thrust bearing 31c: Upper rotating portion 32: Support shaft 51: Computer 51a: Storage unit 52: Controller 52a: Device controller 52b: Stage controller 53: Display 100: Optical interferometer 101: Lens 102: Mirror 103: Lens 104: Beam splitter 105: Objective lens 106: Lens 107: Mirror 108: Reference mirror 109: Lens AR: Measurement area P: Area not to be measured T: Measurement target T1: Measurement target θ1: Angle θ2: Angle

Claims (8)

It is a shape measuring device that measures the shape and dimensions of the measurement target from the height information of the measurement target in the measurement area.
A light source that emits light to the measurement area and
A light receiving element that receives the reflected light emitted from the light source and reflected in the measurement area.
Among the light-receiving images obtained from the reflected light received by the light-receiving element, a specific portion that identifies an invalid image portion whose measured height is invalid, and a specific portion.
To prepare
Shape measuring device. In the shape measuring device according to claim 1,
A storage unit that stores a judgment standard that serves as a judgment standard for shading the measurement area, and a storage unit.
The distance between the edge of the invalid image portion and the edge of the target image portion whose measured height indicates the height of the measurement target is calculated, and this distance is compared with the determination criterion read from the storage unit. Then, a judgment unit for determining whether or not the shading is within the standard, and
Further prepare,
Shape measuring device. In the shape measuring device according to claim 1,
A storage unit that stores a judgment standard that serves as a judgment standard for shading the measurement area, and a storage unit.
The area of the invalid image portion or the ratio of the area of the invalid image portion to the area of the measurement area is calculated, and the area of the invalid image portion or the ratio is compared with the determination criterion read from the storage unit. , A judgment unit that determines whether the shading is within the standard,
Further prepare,
Shape measuring device. In the shape measuring device according to claim 1,
A storage unit that stores information on a determination standard that serves as a criterion for determining shading of the measurement area and a portion of the measurement location that is not subject to measurement, and a storage unit.
The difference between the invalid image portion and the non-measurement target portion read from the storage unit is calculated, and this difference is compared with the judgment standard read from the storage unit to determine whether or not the shading is within the standard. Judgment department to judge
Further prepare,
Shape measuring device. In the shape measuring device according to any one of claims 2 to 4.
The storage unit stores the determination criteria for a plurality of measurement points.
The determination unit determines whether or not the shading is within the reference by using the determination criteria at each measurement point.
Shape measuring device. In the shape measuring device according to claim 5,
Further provided with a measurement point changing mechanism for sequentially positioning a plurality of measurement points for the same measurement object in the measurement area.
The determination unit is a shape measuring device that determines whether or not the shading by the light-shielding member arranged at the measurement point is within the standard for each measurement point changed by the measurement point changing mechanism. In the shape measuring device according to claim 5,
A moving mechanism for sequentially positioning a plurality of measurement points for the same measurement object in the measurement area and changing the relative positions of the measurement points and the light-shielding member positioned at the measurement points is further provided.
The determination unit determines whether or not the shading is within the standard for each measurement point changed by the moving mechanism.
Shape measuring device. The shape measuring device according to any one of claims 1 to 7 is used to be located around the inclined surface in a state where the light-shielding member is arranged in the measurement area so as to cover at least the inclined surface. A shape measuring method for measuring the shape of a measurement target.

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