JP2021126011A - Transport system - Google Patents

Abstract

To provide a transport system that can transport a mover while controlling the posture of the mover with high accuracy while reducing fluctuations in speed of the mover in a transport direction when the mover transfers between transport systems.SOLUTION: A transport system is a transport system in which a mover transfers to another transport system. The transport system includes: a plurality of coils installed along the transport direction of the mover for driving the mover when electric current is applied; a detection unit that detects control information for controlling the mover moving along the transport direction from the mover; and a control unit that controls the mover by controlling the electric current based on the control information. The control unit transmits the control information to the other transport system before the other transport system starts to control the mover.SELECTED DRAWING: Figure 2A

Description

The present invention relates to a transport system.

Patent Document 1 describes a motor main body portion arranged in a movement path of a slider having a mover, a plurality of stators attached to the motor main body portion, and a plurality of stators attached to the motor main body corresponding to the stators. A linear motor with a sensor substrate is described. In the linear motor described in Patent Document 1, among a plurality of stators, in the control device of the stator driving the slider, the position detecting means provided on the sensor boards on both sides of the sensor board of the stator is used. The position of the slider is obtained by adding the position detection signals.

Japanese Patent No. 5826599

However, in the technique described in Patent Document 1, position detection means provided on the sensor boards on both sides of the sensor board of the stator are used for transport control when the mover transfers between a plurality of transport systems by a linear motor. The position detection signals of are not added together. Therefore, in the technique described in Patent Document 1, when the mover transfers between the transport systems, the fluctuation of the speed of the mover in the transport direction can be reduced, or the posture of the mover can be controlled with high accuracy. That is difficult.

INDUSTRIAL APPLICABILITY When a mover transfers between transport systems, the present invention can transport the mover while controlling the posture of the mover with high accuracy while reducing fluctuations in the speed of the mover in the transport direction. The purpose is to provide a system.

According to one aspect of the present invention, there is a plurality of transfer systems in which a mover is transferred to another transfer system, which is installed along the transfer direction of the mover and drives the mover by applying an electric current. Coil, a detection unit that detects control information for controlling the mover that moves along the transport direction from the mover, and controls the mover by controlling the current based on the control information. The control unit is characterized in that the control information is transmitted to the other transfer system before the other transfer system starts controlling the mover. Provided.

According to another aspect of the present invention, it is a transfer system in which a mover transfers from another transfer system, is installed along the transfer direction of the mover, and drives the mover by applying an electric current. A plurality of coils, a detection unit that detects control information for controlling the mover moving along the transport direction from the mover, and a mover that controls the current based on the control information. It has a control unit for controlling, and the control unit is characterized in that the control information is transmitted to the other transfer system before the other transfer system cannot acquire the control information from the mover. A transport system is provided.

According to the present invention, when a mover transfers between transport systems, the mover can be transported while controlling the posture of the mover with high accuracy while reducing fluctuations in the speed of the mover in the transport direction. can.

It is the schematic explaining the problem in the related technology. It is the schematic which shows the structure of the transport system by 1st Embodiment of this invention. It is the schematic which shows the structure of the transport system by 1st Embodiment of this invention. It is the schematic which shows the structure of the transport system by 1st Embodiment of this invention. It is the schematic explaining the method of determining the coil used for the control of the carrier in the transfer system by 1st Embodiment of this invention. It is the schematic explaining the transport method of the carrier in the same transport system by 1st Embodiment of this invention. It is a flowchart explaining the calculation method of the position of a carrier in the same transport system by 1st Embodiment of this invention. It is a flowchart explaining the calculation method of the posture of a carrier in the same transport system by 1st Embodiment of this invention. It is the schematic explaining the transport method of the carrier at the time of connecting between different transport systems by 1st Embodiment of this invention. It is a flowchart explaining the calculation method of the position of a carrier at the time of connecting between different transport systems by 1st Embodiment of this invention. It is a flowchart explaining the calculation method of the posture of a carrier at the time of connecting between different transport systems by 1st Embodiment of this invention. It is a schematic diagram explaining the carrier transport method in the transfer between different transport systems according to the second embodiment of the present invention. It is a flowchart explaining the carrier transport method in the transfer between different transport systems according to the 2nd Embodiment of this invention.

[Related technology]
A transport system using a linear motor transports an object to be transported by using the magnetic force of a permanent magnet and the magnetic force generated by applying an electric current to a coil. The configuration of such a transfer system generally includes a carrier, a coil, a current controller, a current calculator, a self-distance detector, and a position calculator, although there are small differences depending on the device. The carrier is a mover as an object to be transported. The coil forms part of a stator for transporting carriers. The current controller controls the current applied to the coil. The current calculator calculates the amount of current in the current controller and instructs the current controller. The distance detector detects the relative distance of the carrier as seen from itself. The position calculator calculates the absolute position of the carrier from the distance information acquired from the distance detector. A system having a configuration including these is referred to as a "transport system" in the present specification. In addition, the operation of the carrier moving between different transport systems is referred to as "transit".

In a transfer system using a linear motor, particularly a transfer system that functions as a transfer line for transporting a large object, for example, the entire transfer line may be a long transfer line exceeding 100 meters. Therefore, it is common to construct a transport line by connecting a plurality of transport systems. In addition, Patent Document 1 describes a method for eliminating the complexity of constructing and disassembling a transport line that occurs when the distance detector of each transport system protrudes to the outside.

Further, when the transport system is used in the manufacturing process of a large organic EL display or the like, a method of forming a film by passing through an area for vapor deposition while transporting a carrier on which a substrate such as a glass substrate is placed can be considered. At this time, it is important that the film is uniformly formed on the substrate. Therefore, it is required to transport the carrier at a constant speed over the entire transport path. Further, when the attitude of the carrier is also controlled by using a linear motor, it is necessary to perform multi-axis control with high accuracy. The posture of the carrier can be expressed with reference to the coordinate axes defined as follows. That is, the X axis is taken along the horizontal direction which is the carrier transport direction, and the carrier transport direction is the X direction. Further, the Z axis is taken along the vertical direction which is orthogonal to the X direction, and the vertical direction is the Z direction. Further, the Y axis is taken along the directions orthogonal to the X direction and the Z direction, and the direction orthogonal to the X direction and the Z direction is defined as the Y direction. Further, the rotation around the X axis is defined as ωX, the rotation around the Y axis is defined as ωY, and the rotation around the Z axis is defined as ωZ. Then, the posture of the carrier can be represented by each component of Y, Z, ωX, ωY, and ωZ.

In a transfer line constructed by connecting a plurality of transfer systems, the current value flowing through the coil is generally calculated using the distance information detected by the distance detectors in the same transfer system. However, in such a configuration, it is not possible to calculate the current value to be passed through the coil until the distance detector detects the carrier, especially when the transfer system is connected. As a result, there is a problem that the carrier speed is reduced by the amount that the coil control start is delayed, and the carrier speed varies. Further, there is a problem that the attitude calculation cannot be started until the distance detector for calculating the attitude of the carrier detects the carrier, and the attitude of the carrier also varies.

The variation that occurs in the speed and posture of the carrier when connecting the transport system will be described with reference to FIG. In the following description, for a plurality of existing components, if it is not necessary to distinguish them, a code of only a common number is used, and if necessary, a lowercase alphabet is added after the code of the number to indicate each component. Distinguish. In FIG. 1, a plurality of existing components are distinguished from each other by adding a lowercase alphabet after the sign of a number. FIG. 1 shows the speed (Vx) and the posture (Y, Z) in the X direction, which is the traveling direction, when the carrier 8 which is a mover transfers the transport system from the transport system 1 to the transport system 2 while traveling in the + X direction. , ΩX, ωY, ωZ) shows how they vary. The transport system 1 includes a coil 31, an X distance detector 51, a Y distance detector 61, and a Z distance detector 71. The X distance detector 51, the Y distance detector 61, and the Z distance detector 71 detect the relative distances of the carriers 8 in the X direction, the Y direction, and the Z direction, respectively. The transport system 2 includes a coil 32, an X distance detector 52, a Y distance detector 62 and a Z distance detector 72. The X distance detector 52, the Y distance detector 62, and the Z distance detector 72 detect the relative distances of the carriers 8 in the X direction, the Y direction, and the Z direction, respectively.

When the carrier 8 advances in the + X direction in the transfer system 1 and starts connecting to the transfer system 2, the number of coils 31 belonging to the transfer system 1 facing the carrier 8 decreases. In FIG. 1, since the coils 31b, 31d, ... Do not face the carrier 8 in this order, the thrust of the coil 31 with respect to the carrier 8 gradually decreases, and the target speed cannot be maintained. On the other hand, when the carrier 8 reaches the position P11 where the carrier 8 is applied to the X distance detector 52a of the transport system 2, the transport system 2 can detect the X position of the carrier 8. Then, since the carrier 8 can be controlled by using the coils 32b, 32d, etc. belonging to the transport system 2, the target speed of the carrier 8 can be maintained again.

Further, in order to control the target posture of the carrier 8, at least two or more Y distance detectors 62 detection values and at least three or more Z distance detector detection values are required. For example, when the transport system 2 controls the posture on six axes, in FIG. 1, when the carrier 8 reaches the position P12 where the Y distance detectors 62a and 62b for detecting the distance in the Y direction detect the carrier 8, the carrier 8 is transported. The system 2 can calculate the postures Y and ωZ of the carrier 8. Further, when the carrier 8 reaches the position P12 where the Z distance detectors 72a, 72b, 72c or 72d for detecting the distance in the Z direction or the Z distance detectors 72a, 72b, 72d detect the carrier 8, the transport system 2 receives the carrier 8. The postures Z, ωX, and ωY of the carrier 8 can be calculated. In this way, only when the carrier 8 reaches the position P12, the coil 32 of the transport system 2 can be used for the attitude control of the carrier 8 to maintain the target attitude of the carrier 8.

As described above, it has been a problem that the target speed and the posture vary due to the lack of the coil for maintaining the speed and the posture of the carrier in the transport direction when connecting the transport system. In addition, Patent Document 1 describes that the position information of the carrier is shared among a plurality of transport systems with respect to the control in a single axis (one direction). However, Patent Document 1 does not describe a method for controlling carrier transport when connecting between transport systems, nor does it describe a method for controlling carrier posture on multiple axes. Therefore, in the technique described in Patent Document 1, the speed and attitude of the carrier will vary when connecting between transport systems.

On the other hand, in the embodiment of the present invention, by passing information about the carrier between the transport systems, the attitude of the carrier is controlled with high accuracy while reducing the fluctuation of the carrier speed in the transport direction. Achieves transport of the mover. Hereinafter, embodiments of the present invention will be described. It should be noted that the embodiments shown below are merely examples, and for example, those skilled in the art can appropriately change the detailed configuration without departing from the spirit of the present invention, and the present invention is not limited.

[First Embodiment]
The first embodiment of the present invention will be described with reference to FIGS. 2A to 7B.

First, the configuration of the transport system according to the present embodiment will be described with reference to FIGS. 2A to 3. FIG. 2A is a view of the configurations of the two transport systems 1 and 2 as viewed from above (+ Z direction). Further, FIG. 2B is a side view of the transport system 1 as viewed from the position of FIG. 2A (A). FIG. 2C is a top view of the configuration of the carrier 8. Further, FIG. 3 is a schematic view illustrating a method of determining a coil used for controlling the carrier 8 in the transfer systems 1 and 2. In FIG. 2A, for the sake of explanation, each part is drawn by appropriately changing the vertical relationship of each part.

In the present embodiment, the system 101 including a plurality of transport systems 1 and 2 to which the carrier 8 is connected will be described. The system 101 constitutes a part of a processing system that also has a process apparatus for processing the work 3 conveyed by the carrier 8.

Here, the coordinate axes, directions, and the like used in the following description are defined. First, the X axis is taken along the horizontal direction which is the transport direction (traveling direction) of the carrier 8, and the transport direction of the carrier 8 is set to the X direction. Further, the Z axis is taken along the vertical direction which is orthogonal to the X direction, and the vertical direction is the Z direction. Further, the Y axis is taken along the directions orthogonal to the X direction and the Z direction, and the direction orthogonal to the X direction and the Z direction is defined as the Y direction. Further, the rotation direction around the X axis is defined as the ωX direction, the rotation direction around the Y axis is defined as the ωY direction, and the rotation direction around the Z axis is defined as the ωZ direction. The transport direction of the carrier 8 does not necessarily have to be the horizontal direction, but even in that case, the Y direction and the Z direction can be similarly determined with the transport direction as the X direction. The X, Y, and Z directions are not necessarily limited to directions orthogonal to each other, and can be defined as directions intersecting each other. In the present embodiment, a case where the carrier 8 is conveyed in the + X direction while controlling the position and orientation of the carrier 8 on the six axes of the X direction, the Y direction, the Z direction, the ωX direction, the ωY direction, and the ωZ direction will be described. ..

As shown in FIGS. 2A to 2C, the system 101 includes transfer systems 1 and 2, a carrier 8, a transfer line controller 100, and a transfer device 1000. In the system 101, the carrier 8 which is a mover is conveyed so as to transfer from the transfer system 1 to the transfer system 2. The system 101 can include not only the two transport systems 1 and 2, but also three or more transport systems configured in the same manner as the transport systems 1 and 2.

The transport systems 1 and 2 transport the work 3 held by the carrier 8 to a process apparatus that performs processing work on the work 3, for example, by transporting the carrier 8. The process apparatus is not particularly limited, but is, for example, a film forming apparatus such as a vapor deposition apparatus or a sputtering apparatus that forms a film on a glass substrate which is a work 3. Note that FIG. 2A shows one carrier 8 for two transport systems 1 and 2, but is not limited thereto. In system 101, one or more carriers 8 may be transported by a plurality of transport systems of three or more.

The transfer system 1 includes a current calculator 11, a current controller 21, a coil 31, an X distance detector 51, a Y distance detector 61, a Z distance detector 71, and a position calculator 41. Further, the transfer system 2 has the same configuration as the transfer system 1, and includes a current calculator 12, a current controller 22, a coil 32, an X distance detector 52, a Y distance detector 62, a Z distance detector 72, and a position. It has a calculator 42. The current calculator 12, the current controller 22, and the coil 32 of the transfer system 2 have the same configurations and functions as the current calculator 11, the current controller 21, and the coil 31 of the transfer system 1, respectively. Further, the X distance detector 52, the Y distance detector 62, the Z distance detector 72 and the position calculator 42 of the transport system 2 are the X distance detector 51, the Y distance detector 61, the Z distance detector 71 and the position, respectively. It has the same configuration and function as the calculator 41.

The transport system 2 is connected to the transport system 1 adjacent to the transport system 1 in the X direction, and is installed so that the carrier 8 can transfer from the transport system 1. The carrier 8 transported in the transport system 1 is transferred to the transport system 2 installed adjacently and transported in the transport system 2. In the transport systems 1 and 2, the position and orientation of the carrier 8 are controlled by the electromagnetic force generated by the action of the coil 31 excited by the electric current and the permanent magnet 10 described later in the carrier 8.

First, the transfer line controller 100 will be described. The transfer line controller 100 is connected to the current calculators 11 and 12 of the transfer systems 1 and 2. The transfer line controller 100 functions as a control unit that controls the entire transfer line composed of the transfer systems 1 and 2. The transfer line controller 100 transmits the target position of the carrier 8 in the X direction and the speed profile to the current calculators 11 and 12 belonging to the transfer systems 1 and 2, and controls the carrier 8 in the transfer line. ..

Next, each component in the transport systems 1 and 2 will be described. In the following, each component of the transport system 1 will be described as an example, and description of each component of the transport system 2 having the same configuration and function will be omitted. The code of the component in the transport system 2 is the code of the component in the corresponding transport system 1 plus one. Therefore, as a description of each component in the transport system 2, the following description of each component in the transport system 1 can be read by adding 1 to the code of each component in the transport system 1.

The current calculator 11, the current controller 21, and the position calculator 41 control the current applied to the plurality of coils 31 in the transfer system 1 based on the control information which is the information for controlling the carrier 8 described below. It functions as a control unit that controls the carrier 8. The current calculator 11, the current controller 21, and the position calculator 41 may be configured as separate devices, or a part or all of them may be configured as an integrated device.

First, the current calculator 11 will be described. The current calculator 11 is connected to the current controller 21, the position calculator 41, and the transfer line controller 100. The current calculator 11 acquires the position X of the carrier 8 in the current X direction and the current postures Y, Z, ωX, ωY, and ωZ from the position calculator 41 as control information for controlling the carrier 8. .. Further, the current calculator 11 acquires the target position of the carrier 8 in the X direction and the speed profile of the carrier 8 from the transfer line controller 100. Further, the current calculator 11 is based on the current position X and the current attitudes Y, Z, ωX, ωY, and ωZ acquired from the position calculator 41, and the target position and velocity profile acquired from the transfer line controller 100. The value of the current flowing through the coil 31 is calculated. Further, the current calculator 11 notifies the current controller 21 of the calculated current value.

The current calculator 11 determines which of the plurality of coils 31 and 32 is the control target, and calculates the current value to be passed through the control target coils 31 and 32. Here, a method in which the current calculator 11 determines the coils 31 and 32 to be controlled will be described with reference to FIG.

The current calculator 11 stores the mounting positions of the coils 31 and 32 of the transport systems 1 and 2 in the X direction. In FIG. 3, the positions P31c (d), P32b, and the like indicate the mounting positions of the coils 31 and 32 in the X direction. For example, the position P31c (d) indicates the mounting position of the coils 31c and 31d in the X direction. The position P32a (b) indicates the mounting position of the coils 32a and 32b in the X direction. The coils 31 are arranged and attached to the transport device 1000 so as to be arranged in two rows in the X direction. The plurality of coils 31 in one row and the other row arranged in two rows have their mounting positions aligned with each other in the X direction. The coil 32 is also attached in the same manner as the coil 31.

Further, the current calculator 11 stores the length Lc of the carrier 8 in the X direction. Assuming that the current position of the carrier 8 is Pn, the mounting position P31 of the coil 31 to be controlled satisfies the following equation 1a. Further, the mounting position P32 of the coil 32 to be controlled satisfies the following equation 1b.
Pn− (Lc / 2) ≦ P31 ≦ Pn + (Lc / 2)… Equation 1a
Pn− (Lc / 2) ≦ P32 ≦ Pn + (Lc / 2)… Equation 1b

The current calculator 11 determines the coil 31 satisfying the equation 1a and the coil 32 satisfying the equation 1b as the coils 31 and 32 to be controlled, respectively, and controls the current flowing through the coils 31 and 32 to be controlled. For example, in the case shown in FIG. 3, since the coils 31c (31d) to 31o (31p) satisfy the formula 1a and the coils 32a (32b) satisfy the formula 1b, these are the control targets.

Next, the current controller 21 will be described. The current controller 21 is connected to the current calculator 11 and the coil 31. The current controller 21 acquires the current value to be passed through the coil 31 from the current calculator 11. Further, the current controller 21 controls the current so that the current of the current value acquired from the current calculator 11 is applied to the coil 31. There may be an upper limit to the number of coils controlled by one current controller. In this case or the like, a plurality of current controllers can be configured to control the current applied to the coil 31.

Next, the coil 31 will be described. The coil 31 is connected to the current controller 21. The coil 31 drives the carrier 8 by applying an electric current. Specifically, the coil 31 is excited by applying a current controlled by the current controller 21, and the position and orientation of the carrier 8 are changed by the electromagnetic force generated by the action of the carrier 8 with the permanent magnet. The carrier 8 is driven while being controlled. A plurality of coils 31 are attached and installed in the transport device 1000 so as to be lined up at predetermined intervals along the X direction, which is the transport direction of the carrier 8. The plurality of coils 31 are installed so as to be arranged in two rows. FIG. 2A shows a case where a plurality of coils 31a to 31p are installed in two rows.

Next, the position calculator 41 will be described. The position calculator 41 is connected to the X distance detectors 51a to 51b, the Y distance detectors 61a to 61c, the Z distance detectors 71a to 71f, the current calculator 11, and the position calculator 42. The position calculator 41 receives the relative movement distance of the carrier 8 in the X direction from the X distance detectors 51a to 51b. Further, the position calculator 41 receives the distance from the Y distance detectors 61a to 61c to the carrier 8 in the Y direction. Further, the position calculator 41 receives the distance in the Z direction from the carrier 8 received from the Z distance detectors 71a to 71f. The position calculator 41 calculates the current position X and the current posture Y, Z, ωX, ωY, ωZ of the carrier 8 by using the received relative movement distance in the X direction and each distance in the Y direction and the Z direction. .. Further, the position calculator 41 transmits the received information on various distances to the position calculator 42 of the transport system 2. The position calculator 41 in the transport system 2 also transmits information regarding various distances similarly received in the transport system 2 to the position calculator 41 in the transport system 1.

Next, the X distance detector 51, the Y distance detector 61, and the Z distance detector 71 will be described. A plurality of the X-distance detector 51, the Y-distance detector 61, and the Z-distance detector 71 are attached to and installed on the transport device 1000, respectively. The X distance detector 51, the Y distance detector 61, and the Z distance detector 71 each function as detection units for detecting control information for controlling the carrier 8 moving in the X direction from the carrier 8.

The X distance detector 51 will be described. The X distance detector 51 is connected to the position calculator 41. The X distance detector 51 is a detection unit that detects the relative movement distance of the carrier 8 in the X direction by reading the magnetic scale 9 installed on the carrier 8. The relative movement distance of the carrier 8 in the X direction is control information for controlling the carrier 8 and is information regarding the position of the carrier 8. The X distance detector 51 transmits the detected relative movement distance in the X direction to the position calculator 41. The relative movement distance detected by the X distance detector 51 is the relative movement distance of the carrier 8 after the X distance detector 51 detects the carrier 8. FIG. 2A shows a case where the X distance detectors 51a to 51b are mounted in the X direction at predetermined intervals in the transport system 1.

When the carrier 8 is detected by a plurality of X distance detectors 51, each X distance detector 51 shows a different value as a detection value. Therefore, in advance, the carrier 8 is stopped in a state where it is detected by a plurality of X distance detectors 51, and the difference between the detected values at that time is registered as an offset. By using the offset registered in advance, the transport system 1 can switch the X distance detector 51 without creating a blank in which the position X of the carrier 8 is not detected.

The Y distance detector 61 will be described. The Y distance detector 61 is connected to the position calculator 41. The Y distance detector 61 is a detection unit that detects the distance from the Y distance detector 61 to the carrier 8 in the side surface direction (Y direction). The distance to the carrier 8 in the Y direction is control information for controlling the carrier 8 and information for calculating the posture of the carrier 8. The Y distance detector 61 transmits the detected distance in the Y direction to the position calculator 41. The distances to the carriers 8 detected by the plurality of Y distance detectors 61a to 61c installed in the transport system 1 are transmitted to the position calculator 41 and used by the position calculator 41 to calculate the postures Y and ωZ of the carriers 8. Be done.

Here, the procedure for attaching the Y distance detector 61 will be described. After attaching the Y distance detector 61, one plate for calibration is applied to the plurality of Y distance detectors 61. In this state, the value indicated by each Y distance detector 61 is added to the value detected by the Y distance detector 61. Thereby, the mounting error of the Y distance detector 61 in the Y direction can be absorbed. The mounting error of the Y distance detector 61 in the X direction is not particularly considered, and it can be considered that the Y distance detector 61 is mounted according to the design value of the device.

The Z distance detector 71 will be described. The Z distance detector 71 is connected to the position calculator 41. The Z distance detector 71 is a detection unit that detects the distance from the Z distance detector 71 to the carrier 8 in the vertical direction (Z direction) as control information. The distance to the carrier 8 in the Z direction is control information for controlling the carrier 8 and information for calculating the posture of the carrier 8. The Z distance detector 71 transmits the detected distance in the Z direction to the position calculator 41. The distances to the carrier 8 detected by the plurality of Z distance detectors 71a to 71f installed in the transport system 1 are transmitted to the position calculator 41, and the position calculator 41 calculates the postures Z, ωX, and ωY of the carriers 8. Used for.

Here, the procedure for attaching the Z distance detector 71 will be described. After attaching the Z-distance detector 71, one plate for calibration is applied to the plurality of Z-distance detectors 71. In this state, the value indicated by each Z distance detector 71 is added to the value detected by the Z distance detector 71. Thereby, the mounting error of the Z distance detector 71 in the Z direction can be absorbed. The mounting error of the Z distance detector 71 in the X direction is not particularly considered, and it can be considered that the Z distance detector 71 is mounted according to the design value of the device.

In this way, the transport system 1 is configured. The transport system 2 is also configured in the same manner as the transport system 1.

Next, the carrier 8 which is a mover will be described. The carrier 8 is configured to move on the transport device 1000 along the X direction, which is the transport direction. The carrier 8 has a magnetic scale 9 detected by the X distance detector 51 and a permanent magnet 10 for constructing a linear motor facing the coils 31 and 32. The permanent magnet 10 includes a permanent magnet 10a installed so as to be arranged along the X direction and a permanent magnet 10b installed so as to be arranged along the Y direction. As shown in FIG. 2C, the permanent magnets 10 are installed so as to be arranged in two rows in the X direction corresponding to the number of rows of the coils 31 and 32 of the carrier 8, for example, corresponding to the two rows of coils 31 and 32. Has been done. The permanent magnet 10 is attached and installed on the lower surface of the carrier 8, for example, as shown in FIG. 2B. The transfer device 1000 is provided with coils 31 and 32 so as to face the permanent magnet 10 of the carrier 8.

The carrier 8 is driven by an electromagnetic force generated by the action of the permanent magnet 10 and the excited coils 31 and 32, and moves along the X direction, which is the transport direction. The carrier 8 can move while holding the work 3 which is the object to be conveyed. By transporting the carrier 8 in this way, the work 3 can be transported. The work 3 is, for example, a glass substrate, a mask for vapor deposition, or the like in the case of a system 101 incorporated in a processing system including a manufacturing apparatus for an organic EL display. The work 3 is held by the carrier 8 and conveyed to a process apparatus such as a vapor deposition apparatus. In the process apparatus, the conveyed work 3 is processed. In this way, the work 3 is processed to manufacture an article.

The permanent magnets 10a are installed so that a plurality of permanent magnets are arranged so that the polarities of the outer magnetic poles facing the coils 31 and 32 are alternately different and the north and south poles are alternately arranged in the X direction, which is the transport direction. There is. The position X and posture Z, ωX, and ωY of the carrier 8 are controlled by the electromagnetic force generated by the action of the permanent magnet 10a and the coils 31 and 32.

The permanent magnets 10b are installed so that a plurality of permanent magnets, for example, two permanent magnets, are arranged in the Y direction orthogonal to the X direction in which the permanent magnets 10a are arranged. Further, the permanent magnets 10b are installed at both ends of the permanent magnets 10a in the X direction. The postures Y and ωZ of the carrier 8 are controlled by the electromagnetic force generated by the action of the permanent magnet 10b and the coils 31 and 32.

Next, the transport device 1000 will be described. The coils 31 and 32 are installed in the transport device 1000 in two rows in the X direction. The coils 31 and 32 are installed in the transport device 1000 so as to face the permanent magnet 10 of the carrier 8.

Further, the transport device 1000 is equipped with an X distance detector 51 that reads the magnetic scale of the carrier 8 and detects the relative movement distance of the carrier 8 in the X direction. Further, the transport device 1000 is equipped with Y distance detectors 61 and 62 for detecting the distance from the carrier 8 in the Y direction. Further, the transport device 1000 is equipped with Z distance detectors 71 and 72 that detect the distance from the carrier 8 in the Z direction.

Further, the transport device 1000 is installed with transport rollers (not shown) attached so as to line up in the X direction. The carrier 8 comes into contact with the transport roller of the transport device 1000, and the transport roller rotates when the carrier 8 is transported. That is, when the carrier 8 receives thrust in the X direction due to the electromagnetic force generated by the action of the permanent magnet 10a and the coils 31 and 32, the carrier 8 moves in the X direction by rotating the transport roller of the transport device 1000. The mechanism for moving the carrier 8 in the X direction, which is the transport direction, is not limited to the transport rollers installed in the transport device 1000. For example, a transport roller may be attached to the carrier 8 and installed.

In this way, the system 101 including the carrier 8, the transfer systems 1 and 2, and the transfer device 1000 is configured.

In the transfer system 1, the coil 31 is usually installed closer to the transfer system 2 than the X distance detector 51, the Y distance detector 61, and the Z distance detector 71 in the X direction. Further, in the transfer system 2, the coil 32 is usually installed closer to the transfer system 1 than the X distance detector 52, the Y distance detector 62, and the Z distance detector 72 in the X direction. The reason why each distance detector is not installed at each end of the transfer systems 1 and 2 is usually due to a structure such as a door or a gate valve installed at the boundary where the transfer systems 1 and 2 are adjacent to each other. This is because it is difficult to install each distance detector at each end of the transfer systems 1 and 2. Also in this case, in the present embodiment, by sharing the control information of the carrier 8 between the transport systems 1 and 2 as described later, the fluctuation of the speed of the carrier 8 in the transport direction is reduced and the accuracy is high. The carrier 8 can be conveyed while controlling the posture of the carrier 8.

Hereinafter, a processing flow for transporting the carrier 8 in the system 101 including the transport systems 1 and 2 will be described.

First, a method of calculating the position X and the postures Y, Z, ωX, ωY, and ωZ of the carriers 8 transported by the same transport system 1 will be described with reference to FIGS. 4 to 5B. FIG. 4 is a schematic view illustrating a transfer method of the carrier 8 in the same transfer system 1. FIG. 5A is a flowchart illustrating a method of calculating the position of the carrier 8 in the same transfer system 1. FIG. 5B is a flowchart illustrating a method of calculating the posture of the carrier 8 in the same transport system 1. In the transport system 2, the position X and the postures Y, Z, ωX, ωY, and ωZ of the carrier 8 can be calculated by the same method as in the transport system 1.

First, a method of calculating the position X of the carrier 8 transported by the transport system 1 will be described with reference to FIGS. 4 and 5A. The transport system 1 includes X distance detectors 51a and 51b that detect the relative movement distance of the carrier 8 in the X direction. The position calculator 41 calculates the position X of the carrier 8 transported by the transport system 1 by using the relative movement distances in the X direction detected by each of the X distance detectors 51a and 51b.

In the position calculator 41, a switching point P21 which is a position in the X direction for switching the X distance detector 51 used for calculating the position X of the carrier 8 in the transport system 1 is defined in advance. As shown in FIG. 4, the switching point P21 is from the position P22 in the X direction in which the X distance detector 51b starts to detect the carrier 8 to the position P23 in the X direction in which the X distance detector 51a cannot detect the carrier 8. Defined as a position within a section.

As an initial state, it is assumed that the carrier 8 exists at the position (1) shown in FIG. At this time, the carrier 8 has the relative movement distance detected by the two X distance detectors 51a and 52b (step S1-1).

Here, the length of the carrier 8 in the X direction is Lc, the mounting position of the X distance detector 51a in the X direction is P51a, and the relative movement of the carrier 8 in the X direction after the X distance detector 51a detects the carrier 8. Let the distance be D51a. Further, the mounting position of the X distance detector 51b in the X direction is P51b, and the relative movement distance of the carrier 8 in the X direction after the X distance detector 51b detects the carrier 8 is D51b.

The position calculator 41 calculates the position Pn51a of the carrier 8 in the X direction according to the following equation 2 using the relative movement distance D51a detected by the X distance detector 51a.
Pn51a = P51a + D51a- (Lc / 2) ... Equation 2

Further, the position calculator 41 calculates the position Pn51b of the carrier 8 in the X direction according to the following equation 3 using the relative movement distance D51b detected by the X distance detector 51b.
Pn51b = P51b + D51b- (Lc / 2) ... Equation 3

At this point, the carrier 8 has not reached the switching point P21 of the X distance detector 51 used to calculate the position of the carrier 8 in the transport system 1. Until the carrier 8 reaches the switching point P21, the position calculator 41 uses the relative movement distance D51a detected by the X distance detector 51a to detect the position Pn1 of the carrier 8 in the X direction in the transport system 1 according to the equation 2. Calculated as Pn51a.

The carrier 8 is further conveyed in the + X direction and reaches the position (2) shown in FIG. 4, that is, the switching point P21 (step S1-2). The switching point P21 is a position for switching the X distance detector 51 used for calculating the position X of the carrier 8. When the carrier 8 reaches the switching point P21, the position calculator 41 switches the X distance detector 51 used to calculate the position X of the carrier 8. The position calculator 41 calculates the position Pn1 of the carrier 8 in the transport system 1 in the X direction as Pn51b according to Equation 3 using the relative movement distance D51b detected by the X distance detector 51b (step S1-3).

By switching the plurality of X distance detectors 51 in the same transport system 1 according to the above procedure, the position calculator 41 can move the carrier 8 in the transport system 1 in the X direction during the transport of the carrier 8 in the transport system 1. Calculate the position in.

Next, a method of calculating the postures Y and ωZ of the carrier 8 transported by the transport system 1 will be described with reference to FIGS. 4 and 5B. The transport system 1 includes Y distance detectors 61a to 61c that detect the distance from the carrier 8 in the Y direction. When each Y distance detector 61a to 61c detects the carrier 8, it detects the distance from itself to the carrier 8 (step S2-1). Each Y distance detector 61a to 61c transmits the detected distance in the Y direction to the position calculator 41 (step S2-2).

The position calculator 41 counts the currently detected distance to the carrier 8 in the Y direction, that is, the number of distances received from the Y distance detector 61, and determines whether or not the number of distances is two or more. Determine (step S2-3). If the number of distances is two or more (steps S2-3, YES), the position calculator 41 determines the distance in the Y direction acquired from the Y distance detector 61 and the mounting position of the Y distance detector 61 in the X direction. From, the postures Y and ωZ of the carrier 8 are calculated (step S2-4). The postures Y and ωZ can be calculated by using, for example, the calculation of the average value or the calculation by the least squares method. On the other hand, if the number of distances is one or less (steps S2-3, NO), the position calculator 41 continues to wait for the reception of the distance from the Y distance detector 61.

By using a predetermined number or more of Y distance detectors 61 in the same transfer system 1 according to the above procedure, the position calculator 41 can perform the posture of the carrier 8 in the transfer system 1 during the transfer of the carrier 8 in the transfer system 1. Calculate Y and ωZ.

Next, a method of calculating the postures Z, ωX, and ωY of the carrier 8 transported by the transport system 1 will be described with reference to FIGS. 4 and 5B. The transport system 1 includes Z distance detectors 71a to 71f that detect the distance from the carrier 8 in the Z direction. When the Z distance detectors 71a to 71f detect the carrier 8, they detect the distance from themselves to the carrier 8 (step S2-1). Each Z distance detector 71a to 71f transmits the detected distance in the Z direction to the position calculator 41 (step S2-2).

The position calculator 41 counts the currently detected distance to the carrier 8 in the Z direction, that is, the number of distances received from the Z distance detector 71, and determines whether or not the number of distances is three or more. (Step S2-3). If the number of distances is 3 or more (steps S2-3, YES), the position calculator 41 receives the distance from the Z distance detector 71 in the Z direction and the mounting position of the Z distance detector 71. From, the postures Z, ωX, and ωY of the carrier 8 are calculated (step S2-4). The postures Z, ωX, and ωY can be calculated by using, for example, the calculation of the average value or the calculation by the least squares method. On the other hand, if the number of distances is two or less (steps S2-3, NO), the position calculator 41 continues to wait for the reception of the distance from the Z distance detector 71.

By using a predetermined number or more of Z distance detectors 71 in the same transfer system 1 according to the above procedure, the position calculator 41 can perform the posture of the carrier 8 in the transfer system 1 during the transfer of the carrier 8 in the transfer system 1. Calculate Z, ωX, ωY.

In this way, while the carrier 8 is transported in the same transport system 1, the position calculator 41 uses the values of the six axes of the carrier 8 in the transport system 1, that is, the position X and the posture Y, Z, ωX, ωY, of the carrier 8. Calculate ωZ.

Next, a method of calculating the position X and the posture Y, Z, ωX, ωY, and ωZ of the carrier 8 when the carrier 8 transfers between the transfer system 1 and the transfer system 2 will be described with reference to FIGS. 6 to 7B. .. FIG. 6 is a schematic diagram illustrating a transfer method of the carrier 8 when connecting between different transfer systems 1 and 2. FIG. 7A is a flowchart illustrating a method of calculating the position of the carrier 8 when connecting between different transport systems 1 and 2. FIG. 7B is a flowchart illustrating a method of calculating the posture of the carrier 8 when connecting between different transport systems 1 and 2.

First, a method of calculating the position X of the carrier 8 when the carrier 8 transfers between the transfer system 1 and the transfer system 2 will be described with reference to FIGS. 6 and 7A.

In the position calculator 41 of the transfer system 1, a shared point P31, which is a position in the X direction that shares the position X of the carrier 8 from the transfer system 1 to the transfer system 2, is defined. As shown in FIG. 6, the shared point P31 is defined as a position in front of the position P32 in which the front end of the carrier 8 faces the coils 32a and 32b closest to the transfer system 1 side of the coils 32 in the transfer system 2. There is. The shared point P31 referred to here is a position separate from the mounting position P31 of the coil 31. Further, the position P32 referred to here is a position different from the mounting position P32 of the coil 32.

The position calculator 41 formulates the position Pn1 (1) of the carrier 8 in the transport system 1 in the X direction, including the position when the carrier 8 reaches the shared point P31, by the calculation method in the same transport system 1 described above. Calculate according to 2 or Equation 3.

When the carrier 8 reaches the shared point P31 (step S3-1), the position calculator 41 determines whether or not there is a shared destination transport system that should share the position Pn1 (1) of the carrier 8 in the transport system 1. Determine (step S3-2). As a specific method, for example, a setting file, a database, etc. that associate the position in the X direction with the transfer system to be shared are prepared, and the position calculator 41 determines whether or not there is a transfer system to be shared based on the setting file, the database, and the like. The method of doing this can be considered. The position calculator 41 can determine the presence / absence of the transfer system of the sharing destination by referring to the setting file or the like stored so as to be able to be referred to in the storage device or the like. In the example shown in FIG. 6, when the shared point P31 is reached, the shared point P31 is associated with the transport system 2 as a shared destination transport system so as to share the position Pn1 (1) in the X direction with respect to the transport system 2. Prepare the setting file etc.

When the position calculator 41 determines that the sharing destination transport system does not exist (step S3-2, NO), the position calculator 41 ends the process without sharing the position X of the carrier 8.

On the other hand, when the position calculator 41 determines that the transport system 2 exists as a shared destination transport system (steps S3-2, YES), the position calculator 41 converts the position between the transport systems 1 and 2 in the X direction (step S3-2). 3). That is, the position calculator 41 converts the position Pn1 (1) in the X direction calculated by the transfer system 1 into the position Pn2 (1) in the X direction as seen from the shared destination transfer system 2. The position conversion is necessary because the current position of the apparent carrier 8 in each of the transfer systems 1 and 2 differs by the amount of deviation of the origin position of the position in the X direction between the transfer system 1 and the transfer system 2. Is.

Let P01 be the origin of the transport system 1 in the X direction, and P02 be the origin of the transport system 2 in the X direction. Further, the current position of the carrier 8 in the transport system 1 in the X direction is Pn1 (1) as described above. Then, the position Pn2 (2) of the carrier 8 in the current X direction as seen from the transport system 2 is calculated by the following equation 4.
Pn2 (1) = Pn1 (1) + P01-P02 ... Equation 4

The position calculator 41 calculates the position Pn2 (1) according to the equation 4. As a result, the position calculator 41 converts the current position of the carrier 8 in the X direction from the position Pn1 (1) in the transfer system 1 to the position Pn2 (1) in the transfer system 2.

The position calculator 41 of the transport system 1 transmits the calculated position Pn2 (1) of the carrier 8 in the current X direction to the position calculator 42 of the transport system 2 to notify the position calculator 42 (step S3-4).

In this way, the position calculator 41 calculates the position Pn2 (1), which is the control information for controlling the carrier 8, based on the shared point P31, which is the position of the carrier 8 in the X direction, and transmits the position Pn2 (1) to the position calculator 42. do. As a result, the position calculator 41 transmits the position Pn2 (1) to the position calculator 42 before the transfer system 2 starts controlling the carrier 8. In other words, the position calculator 41 determines the position of the carrier 8 before the carrier 8 faces the coils 32a and 32b closest to the transfer system 1 among the coils 32 controlled by the transfer system 2 adjacent to the transfer system 1. Pn2 (1) is transmitted to the position calculator 42.

The position calculator 42 registers the position Pn2 (1) of the carrier 8 in the current X direction received from the position calculator 41 as the position of the carrier 8 in the transfer system 2 and updates the position of the carrier 8 (step). S3-5).

In this way, the current position of the carrier 8 can be shared between the transfer systems 1 and 2 before the carrier 8 engages with the coil 32b of the transfer system 2, that is, before the transfer system 2 starts controlling the carrier 8. can. Therefore, the transfer system 2 can immediately start the control of the carrier 8 when the coils 32a and 32b and the carrier 8 face each other.

On the other hand, the position calculator 42 of the transport system 2 transmits the position X of the carrier 8 in the transport system 2 to the position calculator 41 of the transport system 1 to notify the position calculator 42 as described below. As a result, the position X of the carrier 8 is shared from the transfer system 2 to the transfer system 1. Therefore, in the position calculator 42, the shared point P33, which is the position in the X direction for notifying and sharing the position of the carrier 8 in the transport system 2 in the X direction to the position calculator 41 of the transport system 1, is defined in advance. Has been done. As shown in FIG. 6, the shared point P33 is defined as a position in the section from the position P34 in the X direction to the position P35 in the X direction. The position P34 is a position where the X distance detector 52a, which is most attached to the transfer system 1 side in the transfer system 2, starts to detect the carrier 8. The position P35 is a position where the X distance detector 51b, which is most attached to the transfer system 2 side in the transfer system 1, cannot detect the carrier 8.

Further, when the carrier 8 is conveyed and advances in the + X direction, the carrier 8 reaches the shared point P33. At this time, the X distance detector 52a detects the carrier 8, and as the carrier 8 advances in the + X direction, the X distance detector 52a positions the relative movement distance D52a after the carrier 8 is detected. It is transmitted to the calculator 42.

When the length of the carrier 8 in the X direction is Lc and the mounting position of the X distance detector 52a in the X direction is P52a, the current position Pn2 (2) of the carrier 8 in the transport system 2 in the X direction is given by the following equation 5 It is calculated by.
Pn2 (2) = P52a + D52a- (Lc / 2) ... Equation 5

The position calculator 42 calculates the position Pn2 (2) of the carrier 8 in the transfer system 2 according to the equation 5. When the carrier 8 reaches the shared point P33 (step S3-6), the position calculator 42 determines whether or not there is a shared destination transport system that should share the carrier 8 position Pn2 (2) in the transport system 2. Judgment (step S3-7). As a specific method, for example, a setting file, a database, etc. that associate the position in the X direction with the transfer system to be shared are prepared, and the position calculator 42 determines whether or not there is a transfer system to be shared based on the setting file, the database, and the like. The method of doing this can be considered. The position calculator 42 can determine the presence / absence of the transfer system of the sharing destination by referring to the setting file or the like stored so as to be able to be referred to in the storage device or the like. In the example shown in FIG. 6, when the shared point P33 is reached, the shared point P33 is associated with the transport system 1 as a shared destination transport system so as to share the position Pn2 (2) in the X direction with respect to the transport system 1. Prepare the setting file etc.

When the position calculator 42 determines that the sharing destination transport system does not exist (step S3-7, NO), the position calculator 42 ends the process without sharing the position X of the carrier 8.

On the other hand, when the position calculator 42 determines that the transport system 1 exists as the shared destination transport system (steps S3-7, YES), the position calculator 42 converts the position between the transport systems 1 and 2 in the X direction (step S3-). 8). That is, the position calculator 42 converts the position Pn2 (2) of the carrier 8 in the X direction calculated by the transfer system 2 into the position Pn1 (2) in the X direction as seen from the shared destination transfer system 1. The position conversion is necessary because the current position of the apparent carrier 8 in each of the transfer systems 1 and 2 differs by the amount of deviation of the origin position of the position in the X direction between the transfer system 1 and the transfer system 2. Is.

The current position Pn1 (2) of the carrier 8 in the X direction as seen from the transport system 1 is calculated by the following equation 6.
Pn1 (2) = Pn2 (2) + P02-P01 ... Equation 6

The position calculator 42 calculates the position Pn1 (2) according to the equation 6. As a result, the position calculator 42 converts the current position of the carrier 8 in the X direction from the position Pn2 (2) in the transfer system 2 to the position Pn1 (2) in the transfer system 1.

The position calculator 42 of the transport system 2 transmits the calculated position Pn1 (2) of the carrier 8 in the current X direction to the position calculator 41 of the transport system 1 to notify the position calculator 41 (step S3-9).

In this way, the position calculator 42 calculates the position Pn1 (2), which is the control information for controlling the carrier 8, based on the shared point P33, which is the position of the carrier 8 in the X direction, and transmits the position Pn1 (2) to the position calculator 41. do. As a result, the position calculator 42 transmits the position Pn1 (2) of the carrier 8 to the position calculator 41 before the transfer system 1 cannot acquire the position of the carrier 8 which is the control information in the X direction from the carrier 8. .. In other words, the position calculator 42 is a carrier before the X-distance detector 51b, which is the closest to the X-distance detector 51 in the transport system 1 adjacent to the transport system 2, cannot detect the carrier 8. The position Pn1 (2) of 8 is transmitted to the position calculator 41.

The position calculator 41 registers the current position Pn1 (2) received from the position calculator 42 in the X direction as the position of the carrier 8 in the transfer system 1 and updates the position of the carrier 8 (step S3-10). ).

In this way, even after the X distance detector 51b cannot detect the carrier 8, the transport system 1 can acquire the position of the carrier 8 in the X direction. Therefore, in the transfer system 1, even after the carrier 8 is detached from any of the X distance detectors 51 in the transfer system 1, the coils 32o and 32p closest to the transfer system 2 among the coils 31 in the transfer system 1 are used. The current applied to each coil 31 can be controlled until it is disengaged.

Next, a method of calculating the postures Y and ωZ of the carrier 8 when the carrier 8 transfers between the transfer system 1 and the transfer system 2 will be described with reference to FIGS. 6 and 7B. At the initial position of the carrier 8, the carrier 8 faces the Y distance detectors 61b and 61c (step S4-1).

The position calculator 41 determines whether or not there is a transport system that should share the distance detected by the Y distance detector 61 that detects the distance to the carrier 8 in the Y direction (step S4-2). As a specific method, for example, a setting file, a database, etc. that associate the Y distance detector 61 with the transfer system to be shared are prepared, and the position calculator 41 determines whether or not there is a transfer system to be shared based on the setting file, the database, and the like. The method of doing this can be considered. In the example shown in FIG. 6, the Y distance detector 61b is set to share the detected distance with the transport system 2 as the shared destination transport system, and the Y distance detector 61c is set to share the detected distance as the shared destination transport system. do.

When the position calculator 41 determines that the shared destination transport system 2 exists (step S4-2, YES), the position calculator 42 determines the distance in the Y direction detected by the Y distance detector 61c based on the above association. To notify (step S4-3). At this time, the position calculator 41 transmits the mounting position of the Y distance detector 61c in the X direction as well as the distance detected by the Y distance detector 61c in the Y direction to the position calculator 42 to notify the position calculator 41.

The position calculator 42 counts the distance to the carrier 8 in the currently detected Y direction, that is, the number of distances acquired from the Y distance detectors 61 and 62, and whether or not the number of distances is two or more. (Step S4-4). If the number of distances is two or more (step S4-4, YES), the position calculator 42 calculates the postures Y and ωZ of the carrier 8 (step S4-5). That is, the position calculator 42 calculates the postures Y and ωZ of the carrier 8 from the Y distance acquired from the Y distance detectors 61 and 62 and the mounting positions of the Y distance detectors 61 and 62 in the X direction.

Next, a method of calculating the postures Z, ωX, and ωY of the carrier 8 when the carrier 8 transfers between the transfer system 1 and the transfer system 2 will be described with reference to FIGS. 6 and 7B. The basic flow is the same as the method for calculating the postures Y and ωZ described above. At the initial position of the carrier 8, the carrier 8 faces the Z distance detectors 71c, 71d, 71e, 71f (step S4-1).

The position calculator 41 determines whether or not there is a transport system that should share the distance detected by the Z distance detector 71 that detects the distance to the carrier 8 in the Z direction (step S4-2). As a specific method, for example, a setting file, a database, etc. that associate the Z distance detector 71 with the transfer system to be shared are prepared, and the position calculator 41 determines whether or not there is a transfer system to be shared based on the setting file, the database, and the like. The method of doing this can be considered. In the example shown in FIG. 6, the Z distance detectors 71c and 71d are set to share the detected distance with the transport system 2 as the shared destination transport system, and the Z distance detectors 71c and 71d are set to share the detected distance as the shared destination transport system. do.

When the position calculator 41 determines that the shared destination transport system 2 exists (step S4-2, YES), the position calculator 41 calculates the position of the distance in the Z direction detected by the Z distance detectors 71e and 71f based on the above association. It is transmitted to the vessel 42 to notify it (step S4-3). At this time, the position calculator 41 transmits to the position calculator 42 not only the distance detected by the Z distance detectors 71e and 71f in the Z direction but also the mounting position of the Z distance detectors 71e and 71f in the X direction. Notice.

The position calculator 42 counts the distance to the carrier 8 in the Z direction currently detected, that is, the number of distances acquired from the Z distance detectors 71 and 72, and whether or not the number of distances is three or more. (Step S4-4). If the number of distances is 3 or more (step S4-4, YES), the position calculator 42 calculates the postures Z, ωX, and ωY of the carrier 8 (step S4-5). That is, the position calculator 42 determines the postures Z, ωX, and ωY of the carrier 8 from the distance in the Z direction acquired from the Z distance detectors 71 and 72 and the mounting position of the Z distance detectors 71 and 72 in the X direction. calculate.

As described above, when the carrier 8 transfers from the transfer system 1 to the transfer system 2, both the transfer systems 1 and 2 share a position in the X direction and a distance in the Y direction and the Z direction. Thereby, both the transport systems 1 and 2 can calculate the position X and the postures Y, Z, ωX, ωY, and ωZ of the carrier 8 even when the carrier 8 transfers from the transport system 1 to the transport system 2.

The current calculators 11 and 12 set the 6-axis values of the carrier 8 calculated by the above procedure, that is, the position X and the postures Y, Z, ωX, ωY, and ωZ of the carrier 8, and the position calculators 41 and 42, respectively. Get through.

Further, the current calculators 11 and 12 are based on the values of the six axes of the carrier 8 and the mounting positions of the coils 31 and 32, and the target position and speed profile in the X direction acquired from the transfer line controller 100. , 32, the current to flow is calculated. Further, the current calculators 11 and 12 transmit the calculated current to the current controllers 21 and 22. The current controllers 21 and 22 control the current so that the current received from the current calculators 11 and 12 flows through the coils 31 and 32.

According to the above procedure, even when the carrier 8 transfers between the transport systems 1 and 2, the position X and the attitude Y of the carrier 8 which are the control information necessary for the speed control and the attitude control of the carrier 8 in the X direction. , Z, ωX, ωY, ωZ are always aligned. Therefore, it is possible to keep the variation in the target speed and posture of the carrier 8 low due to the shortage of the coils 31 and 32 for maintaining the speed and posture in the transport direction.

As described above, according to the present embodiment, when the carrier 8 transfers between the transport systems 1 and 2, the posture of the carrier 8 is controlled with high accuracy while reducing the fluctuation of the speed of the carrier 8 in the transport direction. However, the carrier 8 can be conveyed. In particular, it is required that the transport speed and posture of the work 3 such as a substrate held and transported by the carrier 8 such as an organic EL (Electroluminescence) display manufacturing apparatus are constant. When the carrier 8 conveys the work 3 in such an apparatus, according to the present embodiment, it is possible to achieve a particularly remarkable effect that the occurrence of defects can be reduced or prevented.

[Second Embodiment]
A second embodiment of the present invention will be described with reference to FIGS. 8 and 9. The same components as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted or simplified.

In the first embodiment, when the carrier 8 reaches a predetermined position in the X direction, the case of notifying the information used for controlling the carrier 8 at the time of transit between the transport systems 1 and 2 has been described. In the present embodiment, a case where the timing of notifying the adjacent transport system of the information used for controlling the carrier 8 is defined by using the start position and the end position of the notification defined in advance will be described. The sharing of the distances detected by the Y distance detectors 61 and 62 and the Z distance detectors 71 and 72 between the transport systems 1 and 2 is the same as in the first embodiment. In the present embodiment, a method of sharing the position of the carrier 8 in the X direction between the transport systems 1 and 2 will be described.

The basic configuration of the system 101 including the transfer systems 1 and 2 according to the present embodiment is the same as that of the first embodiment. Hereinafter, the flow at the time of connecting the carriers 8 between the transport systems 1 and 2 in the present embodiment will be described with reference to FIGS. 8 and 9. FIG. 8 is a schematic view illustrating a method of transporting the carrier 8 in a transfer between different transport systems 1 and 2 according to the present embodiment. FIG. 9 is a flowchart illustrating a transfer method of the carrier 8 in a transfer between different transfer systems 1 and 2 according to the present embodiment.

In the position calculator 41 of the transfer system 1, a shared point P41, which is a position in the X direction that shares the position X of the carrier 8 from the transfer system 1 to the transfer system 2, is defined. As shown in FIG. 8, the shared point P41 is defined as a position in front of the position P43 in which the front end of the carrier 8 faces the coils 32a and 32b closest to the transfer system 1 side of the coils 32 in the transfer system 2. ing.

The position calculator 41 sets the position Pn1 (1) of the carrier 8 in the transport system 1 in the X direction, including the position when the carrier 8 reaches the shared point P41, to the same transport system 1 as in the first embodiment. It is calculated by the calculation method in.

When the carrier 8 reaches the shared point P41 (step S5-1), the position calculator 41 determines whether or not there is a shared destination transport system that should share the position Pn1 (1) of the carrier 8 in the transport system 1. Judgment (step S5-2). As a specific method, for example, a setting file, a database, etc. that associate the position in the X direction with the transfer system to be shared are prepared, and the position calculator 41 determines whether or not there is a transfer system to be shared based on the setting file, the database, and the like. The method of doing this can be considered. The position calculator 41 can determine the presence / absence of the transfer system of the sharing destination by referring to the setting file or the like stored so as to be able to be referred to in the storage device or the like. In the example shown in FIG. 8, when the shared point P41 is reached, the shared point P41 is associated with the transport system 2 as a shared destination transport system so as to share the position Pn1 (1) in the X direction with respect to the transport system 2. Prepare the setting file etc.

When the position calculator 41 determines that the sharing destination transport system does not exist (step S5-2, NO), the position calculator 41 ends the process without sharing the position X of the carrier 8.

On the other hand, when the position calculator 41 determines that the transport system 2 exists as a shared destination transport system (step S5-2, YES), the position calculator 41 converts the position between the transport systems 1 and 2 in the X direction (step S5-). 3). That is, the position calculator 41 converts the position Pn1 (1) in the X direction calculated by the transfer system 1 into the position Pn2 (1) in the X direction as seen from the shared destination transfer system 2. The position conversion is necessary because the current position of the apparent carrier 8 in each of the transfer systems 1 and 2 differs by the amount of deviation of the origin position of the position in the X direction between the transfer system 1 and the transfer system 2. Is.

Let P01 be the origin of the transport system 1 in the X direction, and P02 be the origin of the transport system 2 in the X direction. Further, the current position of the carrier 8 in the transport system 1 in the X direction is Pn1 (1) as described above. Then, the position Pn2 (1) of the carrier 8 in the current X direction as seen from the transport system 2 is calculated by the following equation 7.
Pn2 (1) = Pn1 (1) + P01-P02 ... Equation 7

The position calculator 41 calculates the position Pn2 (1) according to the equation 7. As a result, the position calculator 41 converts the current position of the carrier 8 in the X direction from the position Pn1 (1) in the transfer system 1 to the position Pn2 (1) in the transfer system 2.

Next, the position calculator 41 determines the end point P42 in which the current position of the carrier 8 in the X direction is the predetermined position in the X direction when the calculation of the current position Pn2 (1) is completed. Is determined (step S5-4). In the position calculator 41, the end point P42 is defined as a position in the X direction on the position P43 side of the shared point P41 in the section from the shared point P41 to the position P43. The end point P42 is the one in which the sharing of the position with the transfer system 2 is delayed when the carrier 8 has reached the end point P42 when the calculation of the current position Pn2 (1) is completed, and the position calculator 41 This is the position to be judged.

When the position calculator 41 determines that the current position of the carrier 8 in the X direction has reached the end point P42 (step S5-4, YES), the position calculator 41 transmits an error to the current calculator 11 (step S5-13). ).

When an error is transmitted to the current calculator 11, error processing is executed in the system 101 (step S5-14). In the error processing, the current calculator 11 and the transfer line controller 100 execute the following processing. That is, the current calculator 11 that has received the error from the position calculator 41 transmits the error to the transfer line controller 100. The transfer line controller 100, which has received an error from the current calculator 11, executes a stop process for stopping the control of the entire transfer line. The stop process referred to here is, for example, a process for preventing a current from flowing through each current calculator 11 or for controlling the current of the coil 31 so as to safely stop the carrier 8. Processing when an abnormality occurs.

On the other hand, when the position calculator 41 determines that the current position of the carrier 8 in the X direction has not reached the end point P42 (step S5-4, NO), the position calculator 41 executes the next process. That is, the position calculator 41 transmits the calculated position Pn2 (1) of the carrier 8 in the current X direction to the position calculator 42 of the transfer system 2 to notify the position (step S5-5).

In this way, the position calculator 41 calculates the position Pn2 (1), which is the control information for controlling the carrier 8, based on the shared point P41 and the end point P42, which are the positions of the carrier 8 in the X direction, and calculates the position. It is transmitted to the vessel 42. As a result, the position calculator 41 transmits the position Pn2 (1) to the position calculator 42 before the transfer system 2 starts controlling the carrier 8. In other words, the position calculator 41 determines the position of the carrier 8 before the carrier 8 faces the coils 32a and 32b closest to the transfer system 1 among the coils 32 controlled by the transfer system 2 adjacent to the transfer system 1. Pn2 (1) is transmitted to the position calculator 42.

The position calculator 42 registers the position Pn2 (1) of the carrier 8 in the current X direction received from the position calculator 41 as the position of the carrier 8 in the transfer system 2 and updates the position of the carrier (step S5). -6).

In this way, the current position of the carrier 8 can be shared between the transfer systems 1 and 2 before the carrier 8 is engaged with the coil 32b of the transfer system 2. Therefore, the transfer system 2 can immediately start the control of the carrier 8 when the coils 32a and 32b and the carrier 8 face each other.

On the other hand, the position calculator 42 of the transport system 2 transmits the position X of the carrier 8 in the transport system 2 to the position calculator 41 of the transport system 1 to notify the position calculator 42 as described below. As a result, the position X of the carrier 8 is shared from the transfer system 2 to the transfer system 1. Therefore, in the position calculator 42, the shared point P44, which is the position in the X direction for notifying the position calculator 41 of the transport system 1 in the X direction of the carrier 8 in the transport system 2 and sharing the position, is defined in advance. Has been done. As shown in FIG. 8, the shared point P44 is defined as a position in the section from the position P46 in the X direction to the position P47 in the X direction. The position P46 is a position where the X distance detector 52a, which is most attached to the transfer system 1 side in the transfer system 2, starts to detect the carrier 8. The position P47 is a position where the X distance detector 51b, which is most attached to the transfer system 2 side in the transfer system 1, cannot detect the carrier 8.

Further, when the carrier 8 is conveyed and advances in the + X direction, the carrier 8 reaches the shared point P44. At this time, the X distance detector 52a detects the carrier 8, and as the carrier 8 advances in the + X direction, the X distance detector 52a positions the relative movement distance D52a after the carrier 8 is detected. It is transmitted to the calculator 42.

When the length of the carrier 8 in the X direction is Lc and the mounting position of the X distance detector 52a in the X direction is P52a, the current position Pn2 (2) of the carrier 8 in the transport system 2 in the X direction is expressed by the following equation 8 It is calculated by.
Pn2 (2) = P52a + D52a- (Lc / 2) ... Equation 8

The position calculator 42 calculates the position Pn2 (2) of the carrier 8 in the transfer system 2 according to the equation 8. When the carrier 8 reaches the shared point P44 (step S5-7), the position calculator 42 determines whether or not there is a shared destination transport system that should share the carrier 8 position Pn2 (2) in the transport system 2. Judgment (step S5-8). As a specific method, for example, a setting file, a database, etc. that associate the position in the X direction with the transfer system to be shared are prepared, and the position calculator 42 determines whether or not there is a transfer system to be shared based on the setting file, the database, and the like. The method of doing this can be considered. The position calculator 42 can determine the presence / absence of the transfer system of the sharing destination by referring to the setting file or the like stored so as to be able to be referred to in the storage device or the like. In the example shown in FIG. 8, when the shared point P44 is reached, the shared point P44 is associated with the transport system 1 as a shared destination transport system so as to share the position Pn2 (2) in the X direction with respect to the transport system 1. Prepare the setting file etc.

When the position calculator 42 determines that the transfer system of the sharing destination does not exist (step S5-8, NO), the position calculator 42 ends the process without sharing the position X of the carrier 8.

On the other hand, when the position calculator 42 determines that the transport system 1 exists as the shared destination transport system (steps S5-8, YES), the position calculator 42 converts the position between the transport systems 1 and 2 in the X direction (step S5-). 9). That is, the position calculator 42 converts the position Pn2 (2) in the X direction calculated by the transfer system 2 into the position Pn1 (2) in the X direction as seen from the shared destination transfer system 1. The position conversion is necessary because the current position of the apparent carrier 8 in each of the transfer systems 1 and 2 differs by the amount of deviation of the origin position of the position in the X direction between the transfer system 1 and the transfer system 2. Is.

The current position Pn1 (2) of the carrier 8 in the X direction as seen from the transport system 1 is calculated by the following equation 9.
Pn1 (2) = Pn2 (2) + P02-P01 ... Equation 9

The position calculator 42 calculates the position Pn1 (2) according to the equation 9. As a result, the position calculator 42 converts the current position of the carrier 8 in the X direction from the position Pn2 (2) in the transfer system 2 to the position Pn1 (2) in the transfer system 1.

Next, the position calculator 42 determines the end point P45 in which the current position of the carrier 8 in the X direction is the predetermined position in the X direction when the calculation of the current position Pn1 (2) is completed. Is determined (step S5-10). In the position calculator 42, the end point P45 is defined as a position in the X direction on the position P47 side of the shared point P44 in the section from the shared point P44 to the position P47. The end point P45 is the one in which the sharing of the position with the transfer system 1 is delayed when the carrier 8 has reached the end point P45 when the calculation of the current position Pn1 (2) is completed, and the position calculator 42 This is the position to be judged.

When the position calculator 42 determines that the current position of the carrier 8 in the X direction has reached the end point P45 (step S5-10, YES), the position calculator 42 transmits an error to the current calculator 12 (step S5-13). ).

When an error is transmitted to the current calculator 12, error processing is executed in the system 101 (step S5-14). In the error processing, the current calculator 12 and the transfer line controller 100 execute the following processing. That is, the current calculator 12 that has received the error from the position calculator 42 transmits the error to the transfer line controller 100. The transfer line controller 100, which has received an error from the current calculator 12, executes a stop process for stopping the control of the entire transfer line. The stop process referred to here is, for example, a process for preventing a current from flowing through each current calculator 12 or for controlling the current of the coil 32 so as to safely stop the carrier 8. Processing when an abnormality occurs.

On the other hand, when the position calculator 42 determines that the current position of the carrier 8 in the X direction has not reached the end point P45 (step S5-10, NO), the position calculator 42 executes the next process. That is, the position calculator 42 transmits the calculated position Pn1 (2) of the carrier 8 in the current X direction to the position calculator 41 of the transfer system 1 to notify the position calculator 41 (S5-11).

In this way, the position calculator 42 calculates the position Pn1 (2), which is the control information for controlling the carrier 8, based on the shared point P44 and the end point P45, which are the positions of the carrier 8 in the X direction, and calculates the position. It is transmitted to the vessel 41. As a result, the position calculator 42 transmits the position Pn1 (2) of the carrier 8 to the position calculator 41 before the transfer system 1 cannot acquire the position of the carrier 8 which is the control information in the X direction from the carrier 8. .. In other words, the position calculator 42 is a carrier before the X-distance detector 51b, which is the closest to the X-distance detector 51 in the transport system 1 adjacent to the transport system 2, cannot detect the carrier 8. The position Pn1 (2) of 8 is transmitted to the position calculator 41.

The position calculator 41 registers the position Pn1 (2) of the carrier 8 in the current X direction received from the position calculator 42 as the position of the carrier 8 in the transfer system 1 and updates the position of the carrier 8 (S5). -12).

In this way, even after the X distance detector 51b cannot detect the carrier 8, the transport system 1 can acquire the position of the carrier 8 in the X direction. Therefore, in the transfer system 1, even after the carrier 8 is detached from any of the X distance detectors 51 in the transfer system 1, the coils 32o and 32p closest to the transfer system 2 among the coils 31 in the transfer system 1 are used. The current applied to each coil 31 can be controlled until it is disengaged.

As described above, in the present embodiment, the timing of notifying and sharing the position X of the carrier 8 from the transfer system 1 to the transfer system 2 is defined by the sharing point P41 and the end point P42 defined in advance. Further, in the present embodiment, the timing of sharing the position X of the carrier 8 from the transfer system 2 to the transfer system 1 is defined by the sharing point P44 and the end point P45 defined in advance. Therefore, in the present embodiment, it is possible to prevent variations in the speed and posture of the carrier 8 due to the delay in sharing the position X from the transfer system 1 to the transfer system 2 or from the transfer system 2 to the transfer system 1.

As described above, according to the present embodiment, when the carrier 8 transfers between the transport systems 1 and 2, the posture of the carrier 8 is controlled with high accuracy while reducing the fluctuation of the speed of the carrier 8 in the transport direction. However, the carrier 8 can be conveyed. In particular, it is required that the transport speed and posture of the work 3 such as a substrate held and transported by the carrier 8 such as an organic EL display manufacturing apparatus are constant. When the carrier 8 conveys the work 3 in such an apparatus, according to the present embodiment, it is possible to achieve a particularly remarkable effect that the occurrence of defects can be reduced or prevented.

Moreover, according to the present embodiment, it is possible to prevent variations in the speed and posture of the carrier 8 due to the delay in sharing the position of the carrier 8 between the transport systems 1 and 2.

[Modification Embodiment]
The present invention is not limited to the above embodiment and can be modified in various ways.
For example, in the above embodiment, the case where the system 101 includes two transfer systems 1 and 2 has been described as an example, but the present invention is not limited to this. The system 101 can include not only the two transport systems 1 and 2, but also three or more transport systems similar to the transport systems 1 and 2 to which the carrier 8 can transfer.

Further, in the above embodiment, the case where the carrier 8 is conveyed in the X direction while performing 6-axis control of the position X and the posture Y, Z, ωX, ωY, and ωZ has been described as an example, but the position and posture of the carrier 8 have been described. The number of axes for controlling is not limited to six. In order to control more axes of 6 or more axes, for example, more distance detectors may be provided to control more axes.

Further, the transport system according to the present invention transports a work together with a carrier to a work area of each process device such as a machine tool that performs each work process on a work to be an article in a manufacturing system for manufacturing an article such as an electronic device. It can be used as a transport system. The process device for carrying out the work process may be any device such as a device for assembling parts to the work and a device for performing painting. Further, the article to be manufactured is not limited to a specific item, and may be any part.

As described above, the work can be conveyed to the work area by using the transfer system according to the present invention, and the work process can be performed on the work conveyed to the work area to manufacture an article.

1, 2 ... Conveying system 3 ... Work 100 ... Conveying line controller 101 ... System 11, 12 ... Current calculator 21, 22 ... Current controller 31, 32 ... Coil 41, 42 ... Position calculator 51, 52 ... X distance Detector 61, 62 ... Y distance detector 71, 72 ... Z distance detector 8 ... Carrier 9 ... Magnetic scale 10 ... Permanent magnet 1000 ... Conveyor

Claims (20)

It is a transport system in which the mover transfers to another transport system.
A plurality of coils installed along the transport direction of the mover and driving the mover by applying an electric current, and
A detection unit that detects control information from the mover for controlling the mover that moves along the transport direction, and a detection unit.
It has a control unit that controls the mover by controlling the current based on the control information.
The control unit is a transport system characterized in that the control information is transmitted to the other transport system before the other transport system starts controlling the mover. The transport system according to claim 1, wherein the control unit transmits information regarding the position of the mover as the control information to the other transport system. The transport system according to claim 2, wherein the information regarding the position of the mover is information regarding the position of the mover in the transport direction. The transfer system according to claim 3, wherein the control unit transmits the control information to the other transfer system based on the position of the mover in the transfer direction. The transport system according to claim 4, wherein the control unit executes error processing when the mover has reached a predetermined position when the calculation of the control information is completed. The transfer system according to any one of claims 2 to 5, wherein the control unit converts information regarding the position of the mover and transmits the information to the other transfer system. The transport system according to any one of claims 1 to 6, wherein the control unit transmits information for calculating the posture of the mover as the control information to the other transport system. .. The transport system according to claim 7, wherein the information for calculating the posture of the mover includes a distance to the mover in a first direction intersecting the transport direction. The transport according to claim 8, wherein the information for calculating the posture of the mover includes the movement distance to the mover in the transport direction and the second direction intersecting the first direction. system. It is a transport system in which the mover transfers from another transport system.
A plurality of coils installed along the transport direction of the mover and driving the mover by applying an electric current, and
A detection unit that detects control information from the mover for controlling the mover that moves along the transport direction, and a detection unit.
It has a control unit that controls the mover by controlling the current based on the control information.
The control unit is a transport system characterized in that the control information is transmitted to the other transport system before the other transport system cannot acquire the control information from the mover. The transport system according to claim 10, wherein the control unit transmits information regarding the position of the mover as the control information to the other transport system. The transport system according to claim 11, wherein the information regarding the position of the mover is information regarding the position of the mover in the transport direction. The transfer system according to claim 12, wherein the control unit transmits the control information to the other transfer system based on the position of the mover in the transfer direction. The transport system according to claim 13, wherein the control unit executes error processing when the mover has reached a predetermined position when the calculation of the control information is completed. The transfer system according to any one of claims 11 to 14, wherein the control unit converts information regarding the position of the mover and transmits the information to the other transfer system. The mover has a first permanent magnet installed along the transport direction and a second permanent magnet installed along a direction intersecting the transport direction.
The control unit controls the current and controls the position or orientation of the mover by an electromagnetic force generated by the action of the plurality of coils and the first permanent magnet or the second permanent magnet. The transport system according to any one of claims 1 to 15, wherein the transport system is characterized. The other transport system
A plurality of coils installed along the transport direction of the mover and driving the mover by applying an electric current, and
It has a detection unit that detects the control information from the mover.
According to claims 1 to 16, in the other transfer system, the coil closest to the transfer system among the plurality of coils is installed closer to the transfer system than the detection unit. The transport system according to any one item. The transport system according to any one of claims 1 to 17.
A processing system characterized by having a process apparatus for processing a work conveyed by the mover. A method for manufacturing an article, wherein the article is manufactured by using the processing system according to claim 18.
The process of transporting the work by the mover and
A method for manufacturing an article, which comprises a step of performing the processing by the process apparatus on the work conveyed by the mover. The first transport system and
Including the second transfer system in which the mover transfers from the first transfer system.
The first transfer system is
A plurality of first coils installed along the transport direction of the mover and driving the mover by applying a first current, and a plurality of first coils.
A first detection unit that detects control information for controlling the mover that moves along the transport direction from the mover, and
It has a first control unit that controls the mover by controlling the first current based on the control information.
The second transfer system is
A plurality of second coils installed along the transport direction and driving the mover by applying a second current, and a plurality of second coils.
A second detection unit that detects the control information from the mover,
It has a second control unit that controls the mover by controlling the second current based on the control information.
The first control unit transmits the control information to the second transfer system before the first transfer system starts controlling the mover.
The second control unit is a system characterized in that the control information is transmitted to the first transfer system before the first transfer system cannot acquire the control information from the mover.

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