JP2021121784A - Diaphragm and pressure sensor - Google Patents

Diaphragm and pressure sensor Download PDF

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JP2021121784A
JP2021121784A JP2020014876A JP2020014876A JP2021121784A JP 2021121784 A JP2021121784 A JP 2021121784A JP 2020014876 A JP2020014876 A JP 2020014876A JP 2020014876 A JP2020014876 A JP 2020014876A JP 2021121784 A JP2021121784 A JP 2021121784A
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corrugated
diaphragm
opening
pressure sensor
corrugated portion
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JP7440281B2 (en
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学 市倉
Manabu Ichikura
学 市倉
聡一郎 大嶌
Soichiro Oshima
聡一郎 大嶌
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Tokyo Cosmos Electric Co Ltd
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Tokyo Cosmos Electric Co Ltd
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Abstract

To provide a diaphragm and a pressure sensor that can be made thin.SOLUTION: The diaphragm is a diaphragm for a pressure sensor that is arranged so as to cover an opening opened in a frame portion, has a peripheral edge portion fixed to an opening edge portion, and is displaced by a difference between pressures applied to both sides. The diaphragm comprises a corrugated portion formed in a stretchable waveform arranged in a middle portion between the peripheral edge portion and a central portion of the diaphragm. A first corrugated portion located corresponding to a first opening edge located on one side of a center line passing through a center portion of the opening and a second corrugated portion located corresponding to a second opening edge located on the other side of the center line are arranged to be asymmetrical with respect to a line passing through the center portion of the opening and orthogonal to the centerline.SELECTED DRAWING: Figure 1

Description

本発明は、ダイヤフラムおよび圧力センサに関する。 The present invention relates to a diaphragm and a pressure sensor.

例えば、特許文献１には、フレーム部と、可動部と、フレーム部と可動部とに架け渡されるカーボンナノチューブ素子とを備え圧力センサが開示されている。圧力センサは、フレーム部と可動部とを連結すると共に、伸縮可能な波形（蛇腹状）に形成されたコルゲート部を備えている。 For example, Patent Document 1 discloses a pressure sensor including a frame portion, a movable portion, and a carbon nanotube element bridged between the frame portion and the movable portion. The pressure sensor connects the frame portion and the movable portion, and includes a corrugated portion formed in a stretchable corrugated shape (bellows shape).

可動部およびコルゲート部は、薄膜形成されている。可動部は、フレーム部の内側で全周にわたりコルゲート部によって支持されている。可動部およびコルゲート部は、ダイヤフラムを構成している。可動部は、ダイヤフラムの表裏の圧力差に応じて、ダイヤフラムの表裏方向に変位する構成となっている。ダイヤフラムの裏側から表側よりも高い圧力が加わった場合、ダイヤフラムが薄膜形成されているため、可動部は表側へ変位する。これにより、カーボンナノチューブ素子も変形することになり、カーボンナノチューブ素子の抵抗値が変化する。この抵抗値の変化量に基づいて、ダイヤフラムの表裏の圧力差が検出される。 The movable portion and the corrugated portion are formed of a thin film. The movable portion is supported by a corrugated portion all around the inside of the frame portion. The movable portion and the corrugated portion form a diaphragm. The movable part is configured to be displaced in the front and back directions of the diaphragm according to the pressure difference between the front and back of the diaphragm. When a pressure higher than the front side is applied from the back side of the diaphragm, the movable part is displaced to the front side because the diaphragm is formed as a thin film. As a result, the carbon nanotube element is also deformed, and the resistance value of the carbon nanotube element changes. Based on the amount of change in the resistance value, the pressure difference between the front and back of the diaphragm is detected.

波形の伸縮によりフレーム部に対する可動部の変化量を大きくすることができると共に、カーボンナノチューブ素子の抵抗値の変化量についても大きくすることができる。つまり、コルゲート部の伸縮量に応じて、圧力センサを高感度化することが可能となる。 The amount of change in the movable portion with respect to the frame portion can be increased by expanding and contracting the waveform, and the amount of change in the resistance value of the carbon nanotube element can also be increased. That is, it is possible to increase the sensitivity of the pressure sensor according to the amount of expansion and contraction of the corrugated portion.

特開２００９−１９８３３７号公報Japanese Unexamined Patent Publication No. 2009-198337

ところで、特許文献１に記載の圧力センサを高感度化するため、単に、コルゲート部の波形の数を増やすことや、波形を大きくすることにより、コルゲート部の伸縮量を大きくする場合、ダイヤフラムの厚さが増し、その結果、例えば、圧力センサが大型化になることや、圧力センサのレイアウトの自由度が低下するという問題がある。 By the way, in order to increase the sensitivity of the pressure sensor described in Patent Document 1, when the amount of expansion and contraction of the corrugated portion is increased by simply increasing the number of waveforms of the corrugated portion or increasing the waveform, the thickness of the diaphragm is increased. As a result, there is a problem that the pressure sensor becomes large and the degree of freedom in the layout of the pressure sensor is reduced.

本発明の目的は、薄型にすることが可能なダイヤフラムおよび圧力センサを提供することである。 An object of the present invention is to provide a diaphragm and a pressure sensor that can be made thin.

上記の目的を達成するため、本発明におけるダイヤフラムは、
フレーム部に開設された開口を覆うように配置され、開口縁部に固定される周縁部を有し、両面にかかる圧力間の差により変位する圧力センサ用のダイヤフラムであって、
前記ダイヤフラムの前記周縁部と中央部との間の中間部に配置され、伸縮可能な波形に形成されたコルゲート部を備え、
前記開口の中央部を通る中心線の一側に位置する第１開口縁部に対応して配置される第１コルゲート部と、前記中心線の他側に位置する第２開口縁部に対応して配置される第２コルゲート部とは、前記開口の中央部を通り、前記中心線と直交する線に対して非対称に構成される。 In order to achieve the above object, the diaphragm in the present invention is
A diaphragm for a pressure sensor that is arranged so as to cover an opening provided in a frame portion, has a peripheral edge portion fixed to an opening edge portion, and is displaced by a difference between pressures applied to both sides.
A corrugated portion arranged in an intermediate portion between the peripheral portion and the central portion of the diaphragm and formed in a stretchable corrugated portion is provided.
Corresponds to the first corrugated portion located on one side of the center line passing through the center of the opening and the second corrugated edge located on the other side of the center line. The second corrugated portion is formed asymmetrically with respect to a line that passes through the central portion of the opening and is orthogonal to the center line.

また、本発明における圧力センサは、
上記ダイヤフラムの中央部における上記第１コルゲート部側に配置される被検出部と、
平板状の上記フレーム部と、
を備える。 Further, the pressure sensor in the present invention is
The detected portion arranged on the first corrugated portion side in the central portion of the diaphragm, and the detected portion.
The flat plate-shaped frame part and
To be equipped.

本発明によれば、ダイヤフラムを薄型にすることができる。 According to the present invention, the diaphragm can be made thin.

図１は、本発明の一実施の形態における圧力センサを概略的に示す平面図である。FIG. 1 is a plan view schematically showing a pressure sensor according to an embodiment of the present invention. 図２は、本発明の一実施の形態における圧力センサを概略的に示す斜視図である。FIG. 2 is a perspective view schematically showing a pressure sensor according to an embodiment of the present invention. 図３は、圧力センサの分解斜視図である。FIG. 3 is an exploded perspective view of the pressure sensor. 図４は、図１のＡ−Ａ線断面図である。FIG. 4 is a cross-sectional view taken along the line AA of FIG. 図５は、図１のＢ−Ｂ線断面図である。FIG. 5 is a cross-sectional view taken along the line BB of FIG.

以下、本発明の実施の形態について、図面を参照しながら説明する。
図１は、本発明の一実施の形態における圧力センサ１を概略的に示す平面図である。図２は、圧力センサ１の斜視図である。図３は、圧力センサ１の分解斜視図である。図１にはＸ軸、Ｙ軸およびＺ軸が描かれている。図１において左右方向をＸ方向又は横方向といい、右向を「＋Ｘ方向」又は横方向一側、左方向を「−Ｘ方向」又は横方向他側という。また、図１において上下方向をＹ方向又は縦方向といい、上方向を「＋Ｙ方向」又は縦方向一側、下方向を「−Ｙ方向」又は縦方向他側という。また、図１の紙面の奥行き方向をＺ方向、表裏方向又は厚さ方向といい、手前側を「＋Ｚ方向」、表側又は表方向、奥側を「−Ｚ方向」、裏側又は裏方向という。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view schematically showing a pressure sensor 1 according to an embodiment of the present invention. FIG. 2 is a perspective view of the pressure sensor 1. FIG. 3 is an exploded perspective view of the pressure sensor 1. The X-axis, Y-axis and Z-axis are drawn in FIG. In FIG. 1, the left-right direction is referred to as the X direction or the lateral direction, the right direction is referred to as "+ X direction" or one side in the lateral direction, and the left direction is referred to as "-X direction" or the other side in the lateral direction. Further, in FIG. 1, the vertical direction is referred to as the Y direction or the vertical direction, the upward direction is referred to as "+ Y direction" or one side in the vertical direction, and the downward direction is referred to as "-Y direction" or the other side in the vertical direction. Further, the depth direction of the paper surface in FIG. 1 is referred to as the Z direction, the front / back direction or the thickness direction, the front side is referred to as the "+ Z direction", the front side or the front direction, and the back side is referred to as the "-Z direction", the back side or the back direction.

図１から図３に示すように、圧力センサ１は、フレーム部１０と、ダイヤフラム２０と、片持ち梁部３０と、を有している。 As shown in FIGS. 1 to 3, the pressure sensor 1 has a frame portion 10, a diaphragm 20, and a cantilever portion 30.

フレーム部１０は、矩形状の外形形状を有する平板であって、開口１２を有している。図１に、開口１２の中央部を通り、Ｙ方向に沿って延在する中心線Ｌ１（第１対称軸ともいう）、および、開口１２の中央部を通り、Ｘ方向に沿って延在する直交線Ｌ２（第２対称軸ともいう）を示す。 The frame portion 10 is a flat plate having a rectangular outer shape, and has an opening 12. In FIG. 1, the center line L1 (also referred to as the first axis of symmetry) extending along the Y direction through the central portion of the opening 12 and extending along the X direction through the central portion of the opening 12. The orthogonal line L2 (also referred to as the second axis of symmetry) is shown.

開口１２は、台形形状を有している。開口１２の開口縁部１４は、互いに平行な２つの辺である長辺部１４ａおよび短辺部１４ｂと、斜辺部１４ｃと、斜辺部１４ｄとを有する。ここで、長辺部１４ａは、開口１２の中央部に対し縦方向一側（＋Ｙ方向）に配置される。長辺部１４ａは中心線Ｌ１の一側である第１開口縁部に相当する。また、短辺部１４ｂは、開口１２の中央部に対し縦方向他側（−Ｙ方向）に配置される。短辺部１４ｂは中心線Ｌ１の他側である第２開口縁部に相当する。斜辺部１４ｃは、開口１２の中央部に対し横方向一側（＋Ｘ方向）に配置される。斜辺部１４ｄは、開口１２の中央部に対し横方向他側（−Ｘ方向）に配置される。 The opening 12 has a trapezoidal shape. The opening edge portion 14 of the opening 12 has two parallel sides, a long side portion 14a and a short side portion 14b, an oblique side portion 14c, and an oblique side portion 14d. Here, the long side portion 14a is arranged on one side (+ Y direction) in the vertical direction with respect to the central portion of the opening 12. The long side portion 14a corresponds to the first opening edge portion on one side of the center line L1. Further, the short side portion 14b is arranged on the other side (−Y direction) in the vertical direction with respect to the central portion of the opening 12. The short side portion 14b corresponds to the second opening edge portion on the other side of the center line L1. The hypotenuse portion 14c is arranged on one side (+ X direction) in the lateral direction with respect to the central portion of the opening 12. The hypotenuse portion 14d is arranged on the other side (−X direction) in the lateral direction with respect to the central portion of the opening 12.

ダイヤフラム２０は、開口１２を裏方向（−Ｚ方向）から覆うように配置される。ダイヤフラム２０は、薄膜形成を有している。ダイヤフラム２０には、例えば、薄い銅板が用いられる。ダイヤフラム２０は、開口１２の形状に対応するように台形形状を有している。ダイヤフラム２０の周縁部２２は、気密を保つように開口縁部１４に固定されている。 The diaphragm 20 is arranged so as to cover the opening 12 from the back direction (−Z direction). The diaphragm 20 has a thin film formation. For the diaphragm 20, for example, a thin copper plate is used. The diaphragm 20 has a trapezoidal shape corresponding to the shape of the opening 12. The peripheral edge portion 22 of the diaphragm 20 is fixed to the opening edge portion 14 so as to maintain airtightness.

図４は図１のＡ−Ａ線断面図である。図５は図１のＢ−Ｂ線断面図である。図４および図５に、フレーム部１０、ダイヤフラム２０および片持ち梁部３０のそれぞれの板厚を強調して示す。図１から図５に示すように、ダイヤフラム２０の周縁部２２と中央部２４との間の中間部２６には、伸縮可能な波形（蛇腹状）に形成されたコルゲート部２８が配置されている。ダイヤフラム２０の表裏の圧力差に応じて、コルゲート部２８が伸縮することでダイヤフラム２０が変位する。コルゲート部２８は、第１コルゲート部２８ａ、第２コルゲート部２８ｂ、第３コルゲート部２８ｃ、および、第４コルゲート部２８ｄを有している。 FIG. 4 is a cross-sectional view taken along the line AA of FIG. FIG. 5 is a cross-sectional view taken along the line BB of FIG. 4 and 5 show the thickness of each of the frame portion 10, the diaphragm 20, and the cantilever portion 30 with emphasis. As shown in FIGS. 1 to 5, a corrugated portion 28 formed in a stretchable corrugated shape (bellows shape) is arranged in an intermediate portion 26 between the peripheral portion 22 and the central portion 24 of the diaphragm 20. .. The diaphragm 20 is displaced by the expansion and contraction of the corrugated portion 28 according to the pressure difference between the front and back surfaces of the diaphragm 20. The corrugated portion 28 has a first corrugated portion 28a, a second corrugated portion 28b, a third corrugated portion 28c, and a fourth corrugated portion 28d.

第１コルゲート部２８ａは、長辺部１４ａ（第１開口縁部）に沿うように配置される。第１コルゲート部２８ａは、直交線Ｌ２に対して第２コルゲート部２８ｂと非対称に構成される。ここで、「非対称」とは、二つのコルゲート部の位置が互いに異なる位置における非対称、二つのコルゲート部の大きさが互いに異なる大きさにおける非対称、及び二つのコルゲート部の形状が互いに異なる形状における非対称のうちの一つ以上の非対称をいう。 The first corrugated portion 28a is arranged along the long side portion 14a (first opening edge portion). The first corrugated portion 28a is configured to be asymmetrical with the second corrugated portion 28b with respect to the orthogonal line L2. Here, "asymmetric" means an asymmetry in a position where the positions of the two corrugated portions are different from each other, an asymmetry in a size in which the sizes of the two corrugated portions are different from each other, and an asymmetry in a shape in which the shapes of the two corrugated portions are different from each other. One or more of the asymmetries.

具体的には、第１コルゲート部２８ａは、その伸縮量が第２コルゲート部２８ｂの伸縮量より大きくなるように構成される。ここで、伸縮量とは、コルゲート部２８が最も縮んだ最大短縮位置と最も伸びた最大伸長位置との間の距離をいう。 Specifically, the first corrugated portion 28a is configured so that the amount of expansion and contraction thereof is larger than the amount of expansion and contraction of the second corrugated portion 28b. Here, the expansion / contraction amount means the distance between the maximum shortened position where the corrugated portion 28 is most contracted and the maximum extended position where the corrugated portion 28 is most extended.

図１から図３に示すように、第２コルゲート部２８ｂは、短辺部１４ｂ（第２開口縁部）に対応して配置される。本実施の形態では、第２コルゲート部２８ｂは、第３コルゲート部２８ｃの縦方向他側（−Ｙ方向）端部と、第４コルゲート部２８ｄの縦方向他側（−Ｙ方向）端部とにより構成される。 As shown in FIGS. 1 to 3, the second corrugated portion 28b is arranged so as to correspond to the short side portion 14b (second opening edge portion). In the present embodiment, the second corrugated portion 28b includes a vertical other side (−Y direction) end portion of the third corrugated portion 28c and a vertical other side (−Y direction) end portion of the fourth corrugated portion 28d. Consists of.

第３コルゲート部２８ｃは、斜辺部１４ｃに沿うように配置される。第３コルゲート部２８ｃの縦方向一側端部は、第１コルゲート部２８ａの横方向一側端部に接続されている。また、前述したように、第３コルゲート部２８ｃの縦方向他側端部は、第２コルゲート部２８ｂを構成している。第１コルゲート部２８ａの伸縮量が第２コルゲート部２８ｂの伸縮量よりも大きくため、第３コルゲート部２８ｃは、縦方向一側端部の伸縮量が縦方向他側端部の伸縮量よりも大きくなるように形成される。 The third corrugated portion 28c is arranged along the hypotenuse portion 14c. The vertical one-sided end of the third corrugated portion 28c is connected to the lateral one-sided end of the first corrugated portion 28a. Further, as described above, the other end portion in the vertical direction of the third corrugated portion 28c constitutes the second corrugated portion 28b. Since the expansion / contraction amount of the first corrugated portion 28a is larger than the expansion / contraction amount of the second corrugated portion 28b, the expansion / contraction amount of the third corrugated portion 28c is larger than the expansion / contraction amount of the one side end portion in the vertical direction. It is formed to be large.

第４コルゲート部２８ｄは、中心線Ｌ１に対して第３コルゲート部２８ｃと対称的に構成される。第４コルゲート部２８ｄは、斜辺部１４ｄに沿うように配置される。第４コルゲート部２８ｄの縦方向一側端部は、第１コルゲート部２８ａの横方向他側端部に接続されている。また、前述したように、第４コルゲート部２８ｄの縦方向他側端部は、第２コルゲート部２８ｂを構成している。第１コルゲート部２８ａの伸縮量が第２コルゲート部２８ｂの伸縮量よりも大きいため、第４コルゲート部２８ｄは、縦方向一側端部の伸縮量が縦方向他側端部の伸縮量よりも大きくなるように形成される。 The fourth corrugated portion 28d is configured symmetrically with respect to the center line L1 and the third corrugated portion 28c. The fourth corrugated portion 28d is arranged along the hypotenuse portion 14d. The vertical one-side end of the fourth corrugated portion 28d is connected to the lateral other-side end of the first corrugated portion 28a. Further, as described above, the other end portion in the vertical direction of the fourth corrugated portion 28d constitutes the second corrugated portion 28b. Since the expansion / contraction amount of the first corrugated portion 28a is larger than the expansion / contraction amount of the second corrugated portion 28b, the expansion / contraction amount of the first corrugated portion 28d in the vertical direction is larger than the expansion / contraction amount of the other side end portion in the vertical direction. It is formed to be large.

片持ち梁部３０は、フレーム部１０と一体に形成される。片持ち梁部３０は、弾性を有する片持ちバネである。片持ち梁部３０には、弾性を持たせるため例えば、熱処理したリン青銅やステンレスが用いられる。 The cantilever portion 30 is formed integrally with the frame portion 10. The cantilever portion 30 is an elastic cantilever spring. For the cantilever beam portion 30, for example, heat-treated phosphor bronze or stainless steel is used in order to give elasticity.

片持ち梁部３０は、短辺部１４ｂの横方向中央部から長辺部１４ａに向かって＋Ｙ方向に延在する。片持ち梁部３０の基端部３２は短辺部１４ｂの横方向中央部に固定された固定端である。片持ち梁部３０の延出部３４（中央部）は、中心線Ｌ１に沿って縦方向（Ｙ方向）に延在する。図４に示すように、片持ち梁部３０の自由端である先端部３６は、ダイヤフラム２０の中央部２４における第１コルゲート部２８ａ側に固定される。 The cantilever portion 30 extends in the + Y direction from the lateral central portion of the short side portion 14b toward the long side portion 14a. The base end portion 32 of the cantilever portion 30 is a fixed end fixed to the lateral central portion of the short side portion 14b. The extending portion 34 (central portion) of the cantilever portion 30 extends in the vertical direction (Y direction) along the center line L1. As shown in FIG. 4, the tip portion 36, which is the free end of the cantilever portion 30, is fixed to the first corrugated portion 28a side in the central portion 24 of the diaphragm 20.

片持ち梁部３０は、ダイヤフラム２０の両面の圧力差に応じて変位する。本実施の形態では、片持ち梁部３０の先端部３６を被検出部３０Ａとする。 The cantilever portion 30 is displaced according to the pressure difference on both sides of the diaphragm 20. In the present embodiment, the tip portion 36 of the cantilever portion 30 is designated as the detected portion 30A.

片持ち梁部３０の先端部３６（被検出部３０Ａ）の変位量を検出する方法として、公知の手段が用いられる。例えば、先端部３６の変位量を、直線可動ポテンショメータや、レバーを用いて回転変位に変換して回転可動ポテンショメータで検出する方法がある。また、例えば、先端部３６に設けられた磁石と先端部３６に対向配置される部位に設けられた磁気官能素子とを用いた磁気方式により検出する方法がある。また、例えば、対向電極を先端部３６と先端部３６に対向配置された部位とに設けて、対向電極間の静電容量の変化により電気的信号に変換する方法がある。 A known means is used as a method for detecting the amount of displacement of the tip portion 36 (detected portion 30A) of the cantilever portion 30. For example, there is a method in which the displacement amount of the tip portion 36 is converted into a rotational displacement by using a linear movable potentiometer or a lever and detected by the rotary movable potentiometer. Further, for example, there is a method of detecting by a magnetic method using a magnet provided at the tip portion 36 and a magnetic functional element provided at a portion arranged opposite to the tip portion 36. Further, for example, there is a method in which counter electrodes are provided at a tip portion 36 and a portion arranged opposite to the tip portion 36, and converted into an electrical signal by a change in capacitance between the counter electrodes.

次に、圧力センサ１の動作について、図１から図５を参照して簡単に説明する。図４に、変位した状態のダイヤフラム２０および片持ち梁部３０を示す。 Next, the operation of the pressure sensor 1 will be briefly described with reference to FIGS. 1 to 5. FIG. 4 shows the diaphragm 20 and the cantilever portion 30 in a displaced state.

例えば、ダイヤフラム２０の裏側（−Ｚ方向）の圧力が表側（＋Ｚ方向）の圧力より高い場合、第１から第４のコルゲート部２８ａ，２８ｂ，２８ｃ，２８ｄのそれぞれは、受ける圧力に応じて伸縮する。これにより、ダイヤフラム２０は表側に変位し、片持ち梁部３０も表側に変位する。片持ち梁部３０の変位量（ダイヤフラム２０の変位量）は、片持ち梁部３０の各部（基端部３２から先端部３６）が受けるダイヤフラム２０からの力と、片持ち梁部３０の復元力とがつり合うときの変位量である。 For example, when the pressure on the back side (−Z direction) of the diaphragm 20 is higher than the pressure on the front side (+ Z direction), each of the first to fourth corrugated portions 28a, 28b, 28c, and 28d expands and contracts according to the pressure received. do. As a result, the diaphragm 20 is displaced to the front side, and the cantilever portion 30 is also displaced to the front side. The displacement amount of the cantilever portion 30 (displacement amount of the diaphragm 20) is the force from the diaphragm 20 received by each part (base end portion 32 to tip portion 36) of the cantilever beam portion 30 and the restoration of the cantilever beam portion 30. It is the amount of displacement when the force is balanced.

片持ち梁部３０の変位量は、先端ほど大きく変位する。また、第２コルゲート部２８ｂの伸縮量が比較的に大きいため、片持ち梁部３０の先端部３６の変位量も大きくなる。前述する公知の手段は、先端部３６の変位量に基づいて、ダイヤフラム２０の両面の圧力差を検出する。 The amount of displacement of the cantilever portion 30 is larger toward the tip. Further, since the amount of expansion and contraction of the second corrugated portion 28b is relatively large, the amount of displacement of the tip portion 36 of the cantilever portion 30 is also large. The above-mentioned known means detects the pressure difference on both sides of the diaphragm 20 based on the displacement amount of the tip portion 36.

上記実施の形態におけるダイヤフラム２０は、フレーム部１０に開設された開口１２を覆うように配置され、開口縁部１４に固定される周縁部２２を有し、両面にかかる圧力間の差により変位する圧力センサ用のダイヤフラム２０であって、ダイヤフラム２０の周縁部２２と中央部２４との間の中間部２６に配置され、伸縮可能な波形に形成されたコルゲート部２８を備え、開口１２の中央部を通る中心線Ｌ１の一側に位置する長辺部１４ａに対応して配置される第１コルゲート部２８ａと、中心線Ｌ１の他側に位置する短辺部１４ｂに対応して配置される第２コルゲート部２８ｂとは、開口１２の中央部を通り、中心線Ｌ１と直交する直交線Ｌ２に対して非対称に構成される。 The diaphragm 20 in the above embodiment is arranged so as to cover the opening 12 provided in the frame portion 10, has a peripheral edge portion 22 fixed to the opening edge portion 14, and is displaced by the difference between the pressures applied to both surfaces. A diaphragm 20 for a pressure sensor, which is arranged in an intermediate portion 26 between a peripheral portion 22 and a central portion 24 of the diaphragm 20, includes a corrugated portion 28 formed in a stretchable waveform, and a central portion of an opening 12. The first corrugated portion 28a arranged corresponding to the long side portion 14a located on one side of the center line L1 passing through the center line L1 and the first corrugated portion 14b arranged corresponding to the short side portion 14b located on the other side of the center line L1. The 2 corrugated portion 28b is configured to be asymmetric with respect to the orthogonal line L2 that passes through the central portion of the opening 12 and is orthogonal to the center line L1.

第１コルゲート部２８ａと第２コルゲート部２８ｂとを非対称に構成することで、例えば、第１コルゲート部２８ａと第２コルゲート部２８ｂとの間で伸縮量に差をつけることが可能となる。コルゲート部２８の一部であるコルゲート部２８ａの伸縮量を大きくしたため、単に、コルゲート部２８の全体の伸縮量を大きくする場合に比較して、ダイヤフラム２０の全体がコルゲート部２８によって厚さ方向（Ｚ方向）に嵩張ることがないため、ダイヤフラム２０を薄型にすることが可能となる。 By configuring the first corrugated portion 28a and the second corrugated portion 28b asymmetrically, for example, it is possible to make a difference in the amount of expansion and contraction between the first corrugated portion 28a and the second corrugated portion 28b. Since the amount of expansion and contraction of the corrugated portion 28a, which is a part of the corrugated portion 28, is increased, the entire diaphragm 20 is thickened by the corrugated portion 28 as compared with the case where the total amount of expansion and contraction of the corrugated portion 28 is simply increased. Since it is not bulky in the Z direction), the diaphragm 20 can be made thin.

また、上記実施の形態におけるダイヤフラム２０は、第１コルゲート部２８ａの伸縮量は、第２コルゲート部２８ｂの伸縮量よりも大きい。これにより、コルゲート部２８の一部である第１コルゲート部２８ａ及びその近傍の例えば波形の数を増やすことや、波形を大きくすることで、第１コルゲート部２８ａおよびその近傍の伸縮量を大きくしため、単に、コルゲート部２８の全体の波形の数を増やすことや、波形を大きくする場合に比較して、ダイヤフラム２０を薄型にすることが可能となる。 Further, in the diaphragm 20 in the above embodiment, the expansion / contraction amount of the first corrugated portion 28a is larger than the expansion / contraction amount of the second corrugated portion 28b. As a result, the amount of expansion and contraction of the first corrugated portion 28a and its vicinity is increased by increasing the number of waveforms in the first corrugated portion 28a and its vicinity, which are a part of the corrugated portion 28, and by increasing the waveform. Therefore, it is possible to simply increase the total number of waveforms of the corrugated portion 28, or to make the diaphragm 20 thinner than in the case of increasing the waveform.

また、上記実施の形態におけるダイヤフラム２０は、開口１２は台形形状を有し、第１コルゲート部２８ａは、開口縁部１４の長辺部１４ａに沿うように配置される。これにより、第１コルゲート部２８ａ及びその近傍の波形の数を増やすことや、波形を大きくする場合、第１コルゲート部２８ａが長い分だけ、多数の波形や大きな波形を折りたたみ展開し易くなる。結果的に、第１コルゲート部２８ａが伸縮し易くなる。 Further, in the diaphragm 20 of the above embodiment, the opening 12 has a trapezoidal shape, and the first corrugated portion 28a is arranged along the long side portion 14a of the opening edge portion 14. As a result, when increasing the number of waveforms in and around the first corrugated portion 28a or enlarging the waveform, it becomes easier to fold and unfold a large number of waveforms or large waveforms because the first corrugated portion 28a is longer. As a result, the first corrugated portion 28a easily expands and contracts.

また、上記実施の形態における圧力センサ１においては、平板状のフレーム部１０と、ダイヤフラム２０の中央部２４における第１コルゲート部２８ａ側に配置される被検出部３０Ａと、を備える。上記の構成によれば、平板状のフレーム部１０を備えることにより、圧力センサを薄型にすることが可能となる。また、ダイヤフラム２０の両面の圧力差に応じてダイヤフラム２０が変位する場合、ダイヤフラム２０の中央部２４における第１コルゲート部２８ａ側の変位量が他の場所に比べて大きくなる。変位量が大きな場所に被検出部３０Ａが配置されるため、圧力センサ１を高感度化することが可能となる。 Further, the pressure sensor 1 in the above embodiment includes a flat plate-shaped frame portion 10 and a detected portion 30A arranged on the first corrugated portion 28a side in the central portion 24 of the diaphragm 20. According to the above configuration, the pressure sensor can be made thin by providing the flat plate-shaped frame portion 10. Further, when the diaphragm 20 is displaced according to the pressure difference on both sides of the diaphragm 20, the displacement amount on the first corrugated portion 28a side in the central portion 24 of the diaphragm 20 becomes larger than that in other places. Since the detected portion 30A is arranged at a place where the displacement amount is large, the pressure sensor 1 can be made highly sensitive.

また、上記実施の形態における圧力センサ１においては、短辺部１４ｂの方から長辺部１４ａの方へ延在し、延在する自由端としての先端部３６に被検出部３０Ａが配置される、弾性を有する片持ち梁部３０を備える。片持ち梁部３０の先端部３６が長辺部１４ａ側に位置し、長辺部１４ａに沿って配置される第１コルゲート部２８ａの伸縮量が比較的に大きいため、先端部３６は、他の部位（基端部３２や延出部３４）と比較して大きな荷重を受ける。これにより、先端部３６は大きく撓む。大きく撓む先端部３６に被検出部３０Ａが配置されるため、圧力センサ１を高感度化することができる。 Further, in the pressure sensor 1 in the above embodiment, the detected portion 30A extends from the short side portion 14b toward the long side portion 14a and is arranged at the tip portion 36 as an extending free end. The cantilever portion 30 having elasticity is provided. Since the tip portion 36 of the cantilever portion 30 is located on the long side portion 14a side and the amount of expansion and contraction of the first corrugated portion 28a arranged along the long side portion 14a is relatively large, the tip portion 36 is other than the other. It receives a large load as compared with the parts (base end portion 32 and extension portion 34). As a result, the tip portion 36 is greatly bent. Since the detected portion 30A is arranged at the tip portion 36 that flexes greatly, the pressure sensor 1 can be made highly sensitive.

また、上記実施の形態における圧力センサ１においては、片持ち梁部３０は、フレーム部１０と一体に形成される。これにより、片持ち梁部３０をフレーム部１０に厚さ方向（Ｚ方向）から取り付ける必要がないため、圧力センサ１をさらに薄型にすることが可能となり、また、部品点数を削減することが可能となる。 Further, in the pressure sensor 1 in the above embodiment, the cantilever portion 30 is formed integrally with the frame portion 10. As a result, it is not necessary to attach the cantilever portion 30 to the frame portion 10 from the thickness direction (Z direction), so that the pressure sensor 1 can be made thinner and the number of parts can be reduced. It becomes.

その他、上記実施の形態は、何れも本発明の実施をするにあたっての具体化の一例を示したものに過ぎず、これらによって本発明の技術的範囲が限定的に解釈されてはならないものである。すなわち、本発明はその要旨、またはその主要な特徴から逸脱することなく、様々な形で実施することができる。 In addition, the above embodiments are merely examples of embodiment of the present invention, and the technical scope of the present invention should not be construed in a limited manner by these. .. That is, the present invention can be implemented in various forms without departing from its gist or its main features.

上記実施の形態では、開口１２は台形形状を有するが、本発明はこれに限らない、開口１２は、矩形形状、多角形状、円形形状又は楕円形状であってもよい。この場合でも、開口１２の開口縁部において開口１２の中心部を間にして対向する辺部の一方から他方の辺部に向かって片持ち梁部を延在すればよく、また、他方の辺部に沿って伸縮量が比較的大きなコルゲート部を配置すればよい。 In the above embodiment, the opening 12 has a trapezoidal shape, but the present invention is not limited to this. The opening 12 may have a rectangular shape, a polygonal shape, a circular shape, or an elliptical shape. Even in this case, the cantilever beam portion may extend from one of the opposing side portions to the other side portion with the central portion of the opening 12 in between at the opening edge portion of the opening 12, and the other side may also extend. A corrugated portion having a relatively large amount of expansion and contraction may be arranged along the portion.

本発明は、薄型にすることが要求されるダイヤフラムを備えた圧力センサに好適に利用される。 The present invention is suitably used for a pressure sensor provided with a diaphragm that is required to be thin.

１ 圧力センサ
１０ フレーム部
１２ 開口
１４ 開口縁部
１４ａ 長辺部
１４ｂ 短辺部
２０ ダイヤフラム
２２ 周縁部
２４ 中央部
２６ 中間部
２８ コルゲート部
２８ａ 第１コルゲート部
２８ｂ 第２コルゲート部
２８ｃ 第３コルゲート部
２８ｄ 第４コルゲート部
３０ 片持ち梁部
３０Ａ 被検出部
３２ 基端部
３４ 延出部
３６ 先端部

1 Pressure sensor 10 Frame part 12 Opening 14 Opening edge part 14a Long side part 14b Short side part 20 Diaphragm 22 Peripheral part 24 Central part 26 Intermediate part 28 Corrugated part 28a 1st corrugated part 28b 2nd corrugated part 28c 3rd corrugated part 28d 4th corrugated part 30 Cantilever beam part 30A Detected part 32 Base end part 34 Extension part 36 Tip part

Claims (5)

フレーム部に開設された開口を覆うように配置され、開口縁部に固定される周縁部を有し、両面にかかる圧力間の差により変位する圧力センサ用のダイヤフラムであって、
前記ダイヤフラムの前記周縁部と中央部との間の中間部に配置され、伸縮可能な波形に形成されたコルゲート部を備え、
前記開口の中央部を通る中心線の一側に位置する第１開口縁部に対応して配置される第１コルゲート部と、前記中心線の他側に位置する第２開口縁部に対応して配置される第２コルゲート部とは、前記開口の中央部を通り、前記中心線と直交する線に対して非対称に構成される、
ダイヤフラム。 A diaphragm for a pressure sensor that is arranged so as to cover an opening provided in a frame portion, has a peripheral edge portion fixed to an opening edge portion, and is displaced by a difference between pressures applied to both sides.
A corrugated portion arranged in an intermediate portion between the peripheral portion and the central portion of the diaphragm and formed in a stretchable corrugated portion is provided.
Corresponds to the first corrugated portion located on one side of the center line passing through the center of the opening and the second corrugated edge located on the other side of the center line. The second corrugated portion is formed asymmetrically with respect to a line that passes through the central portion of the opening and is orthogonal to the center line.
Diaphragm. 前記第１コルゲート部の伸縮量は、前記第２コルゲート部の伸縮量よりも大きい、
請求項１に記載のダイヤフラム。 The amount of expansion and contraction of the first corrugated portion is larger than the amount of expansion and contraction of the second corrugated portion.
The diaphragm according to claim 1. 請求項１または２に記載のダイヤフラムの中央部における前記第１コルゲート部側に配置される被検出部と、
平板状の前記フレーム部と、
を備える、圧力センサ。 A detected portion arranged on the first corrugated portion side in the central portion of the diaphragm according to claim 1 or 2.
The flat plate-shaped frame portion and
A pressure sensor. 前記第２開口縁部の方から前記第１開口縁部の方へ延在し、延在する自由端としての先端部に前記被検出部が配置される、弾性を有する片持ち梁部をさらに備える、
請求項３に記載の圧力センサ。 An elastic cantilever portion extending from the second opening edge portion toward the first opening edge portion and having the detected portion arranged at the tip portion as an extending free end is further provided. Prepare, prepare
The pressure sensor according to claim 3. 前記片持ち梁部は、前記フレーム部と一体に形成される、
請求項４に記載の圧力センサ。 The cantilever portion is formed integrally with the frame portion.
The pressure sensor according to claim 4.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278924A (en) * 1988-09-14 1990-03-19 Omron Tateisi Electron Co Pressure detector
JP2002062208A (en) * 2000-08-22 2002-02-28 Citizen Electronics Co Ltd Capacitance type pressure sensor
JP2009198337A (en) * 2008-02-22 2009-09-03 Panasonic Electric Works Co Ltd Sensor device
US20120198939A1 (en) * 2011-02-08 2012-08-09 Quartzdyne, Inc. Isolation elements including one or more diaphragms, sensors including isolation elements, and related methods

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278924A (en) * 1988-09-14 1990-03-19 Omron Tateisi Electron Co Pressure detector
JP2002062208A (en) * 2000-08-22 2002-02-28 Citizen Electronics Co Ltd Capacitance type pressure sensor
JP2009198337A (en) * 2008-02-22 2009-09-03 Panasonic Electric Works Co Ltd Sensor device
US20120198939A1 (en) * 2011-02-08 2012-08-09 Quartzdyne, Inc. Isolation elements including one or more diaphragms, sensors including isolation elements, and related methods

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