JP2021113343A - Vacuum treatment apparatus - Google Patents

Abstract

To provide a vacuum treatment apparatus with a structure capable of improving a maintenance workability with less number of parts.SOLUTION: A vacuum treatment apparatus DM performs a vacuum treatment on at least one surface of a sheet shaped base material Sw with treatment units ES1, ES2 arranged in a vacuum treatment chamber Ms while the sheet shaped base material Sw is moved by multiple transportation rollers Gr in the vacuum treatment chamber Ms. The vacuum treatment chamber includes: a chamber body 1; engaging means Sh1, Sh2, Fb1, Fb2 which are defined with a first and a second support plates 21, 22 each covering openings 11, 12a, 12b on a wall surface of the chamber body facing each other, pivotally support each transportation roller by either of the first and the second support plates, supports the treatment unit by the other of the first and the second support plates, and selectively engage the chamber body, the first support plate and the second support plate, and single transportation means R1, 31 which support the first support plate and relatively moves to the second support plate in a proximity separation direction.SELECTED DRAWING: Figure 1

Description

In the present invention, a predetermined vacuum treatment is performed on at least one surface of the sheet-shaped substrate by a processing unit provided in the vacuum processing chamber while the sheet-shaped substrate is run by a plurality of transfer rollers in the vacuum processing chamber. More specifically, the present invention relates to a vacuum processing apparatus for which maintenance workability can be improved.

For example, since a resin sheet-like base material has flexibility and good workability, a predetermined thin film such as a predetermined metal film or oxide film is formed alone or on one surface in a vacuum atmosphere. It is known that a film is formed in multiple layers, or an electronic component or an optical component is subjected to etching or heat treatment. A vacuum processing apparatus that performs such vacuum processing is known, for example, in Patent Document 1. This one is provided with a vacuum chamber capable of forming a vacuum atmosphere, a can roller is provided in the vacuum chamber, and the vacuum chamber is divided into two upper and lower chambers by a partition plate arranged around the can roller.

A processing unit that performs various types of vacuum processing is arranged in one chamber (vacuum processing chamber), and a feeding roller that feeds a wound sheet-like base material at a constant speed in the other chamber (conveying chamber). And, they are arranged parallel to each other to guide the transfer of the sheet-like base material between the take-up roller that winds the vacuum-treated sheet-like base material and the feeding roller and the take-up roller through the can roller. A plurality of guide rollers are provided. Then, for example, when the processing unit is a vapor deposition source for forming a thin film by, for example, a vacuum vapor deposition method, the vaporized material provided in the vapor deposition source is sublimated or vaporized, and the sublimated or vaporized vaporized particles are wound around a can roller. A predetermined thin film is vapor-deposited (deposited) by adhering to and depositing on the sheet-like base material.

By the way, when the processing unit is a vapor deposition source or a sputtering cathode, the vapor deposition materials and targets used for them are so-called consumables, so that it is necessary to replenish the materials or replace the targets. Further, when a film-forming process is applied to the sheet-shaped base material in the vacuum chamber, a constant tension is applied to the partition wall (including the adhesive plate) provided in the vacuum chamber and the sheet-shaped base material inside the partition wall. The film will also be applied to parts such as can rollers and guide rollers as transport rollers that run in the added state. Therefore, it is necessary to periodically open the vacuum chamber to the atmosphere, remove the film film (cleaning), replace parts, and perform maintenance to return the vacuum processing apparatus to the initial state. Normally, each drive component such as a feeding roller, a winding roller, a guide roller, and a can roller for feeding a sheet-shaped base material is a single support component (support plate or vacuum chamber) for maintaining alignment accuracy, for example. It is provided in the vacuum chamber so that it can be supported by a wall or the like and handled as a unit. For this reason, even when only material replenishment or target replacement is performed, all the chambers in the vacuum chamber must be returned to the air atmosphere at the same time, in other words, the vacuum processing chamber is operated while maintaining the transport chamber in the vacuum atmosphere. There is a problem that it cannot be returned to the atmosphere.

On the other hand, a vacuum processing apparatus capable of improving workability during maintenance is known, for example, in Patent Document 2. This has a vacuum chamber for accommodating a drum around which a sheet-like base material is wound, and a plurality of processing spaces isolated from each other are partitioned around the drum (can roller) in the vacuum chamber. The partition wall is provided. A mounting opening is provided in the partition wall of the vacuum chamber so as to face each processing space, and a processing unit is detachably provided through the mounting opening. Each of the processing units is provided with a support capable of closing the mounting opening by contacting the outer wall surface of the vacuum chamber, and each support is located at a mounting position where the mounting opening can be closed and one of the mounting positions in the axial direction of the drum. It is integrally held by a first trolley that can move forward and backward with and from a separated retracted position. Each of the partition walls is integrated with a second carriage that can move forward and backward between the partition position that exists in the vacuum chamber and defines the processing space and the other retracted position that is separated from this partition position in the axial direction of the drum. Is held in.

In the vacuum chamber, an upstream vacuum chamber and a downstream vacuum chamber are connected in series from a direction perpendicular to the axial direction, and a sheet-like base material is wound around the upstream vacuum chamber, and this sheet is wound at a constant speed. A feeding roller for feeding the shaped base material is provided, and a winding roller for winding the formed sheet-shaped base material is provided in the downstream vacuum chamber. Even in such a case, as in the above, each drive component is supported by a single support component (a vacuum chamber, a support plate common to the upstream vacuum chamber and the downstream vacuum chamber, etc.) and handled as one. It is normal to do. Then, at the time of maintenance, the vacuum chamber is opened to the atmosphere, the second carriage is moved from the section position to the other in the axial direction, and when the other retracted position is reached, the partition wall held by the other carriage is outside the vacuum chamber. It is taken out into a large space. After that, when the first carriage is moved from the mounting position to the retracted position, the processing unit held by the first carriage is taken out to a wide space outside the vacuum chamber. Therefore, maintenance of the processing unit such as replacement of the target and filling of the vapor-deposited material can be performed with good workability. However, even when the first trolley is moved, each drive component remains in the vacuum chamber, so that the operator has no choice but to enter the vacuum chamber to perform the work. In such a case, it is conceivable to configure the main body of the vacuum chamber to be movable from a single support component, but in addition to the first and second trolleys, an additional trolley is also required. There is also a problem that the number of parts increases and the cost increases.

Japanese Unexamined Patent Publication No. 2006-225710 JP-A-2019-39055

In view of the above points, it is an object of the present invention to provide a vacuum processing apparatus having a structure capable of improving maintenance workability with a small number of parts.

In order to solve the above problems, while the sheet-shaped base material is run by a plurality of transfer rollers in the vacuum processing chamber, the processing unit provided in the vacuum processing chamber is used to cover at least one surface of the sheet-shaped base material. In the vacuum processing apparatus of the present invention that performs a predetermined vacuum processing, the vacuum processing chamber is defined by a chamber body in which the wall surfaces facing each other are opened, and first and second support plates that cover the openings in the chamber body, respectively. The transfer roller is pivotally supported on one side of the first and second support plates, and the processing unit is supported on the other side, so that the chamber body and the first support plate are supported, or the chamber body and the second support plate are supported. Further provided with an engaging means for selectively engaging the support plate of the above, and a single moving means for supporting the first support plate and moving relative to the second support plate in the proximity-separation direction. It is characterized by.

According to the present invention, when the vacuum processing chamber is opened to the atmosphere and maintenance such as material replenishment or parts replacement is performed on the processing unit supported by the first support plate, for example, manually or automatically by engaging means. The second support plate and the chamber body are selectively engaged. At this time, the engagement between the first support plate and the chamber body remains disengaged. Then, when the first support plate is moved in the separation direction by the moving means, the processing unit supported by the first support plate is taken out from the vacuum processing chamber to a wide space outside the vacuum processing chamber. As a result, maintenance can be performed in a space where there are no interfering parts or the like.

On the other hand, when performing maintenance such as removing the film formed on each transfer roller or replacing the transfer roller, the first support plate and the chamber body are selectively engaged by the engaging means manually or automatically. At this time, the engagement between the second support plate and the chamber body remains disengaged. Then, when the first support plate is moved in the separation direction by the moving means, the first support plate is moved integrally with the chamber body, and each transport roller pivotally supported by the second support plate remains exposed. Remain. As a result, maintenance such as removal of the film formed on each transfer roller and replacement of the transfer roller can be performed without limiting the work space such as the partition wall of the vacuum chamber.

As described above, in the present invention, the first or second support plate and the chamber body are selectively engaged by the engaging means, and when a single moving means is moved, the one that is disengaged is changed. Therefore, maintenance workability can be improved with a small number of parts. Moreover, even when performing maintenance such as material replenishment or parts replacement, or when performing maintenance such as removing the film on each transport roller or replacing the transport roller, the direction in which the moving means is moved is the same. The space required for performing maintenance needs to be in only one direction with respect to the vacuum chamber, which is advantageous because the occupied area of the device can be reduced.

In the present invention, the chamber body is provided with a central first chamber portion and a second chamber portion connected to both sides thereof, and a sheet-like base material is provided on one support plate portion facing each of the second chamber portions. A configuration may be adopted in which a feeding roller for feeding the sheet and a winding roller for winding the sheet-shaped base material are respectively pivotally supported. As a result, the vacuum processing devices can be isolated from each other, and a so-called multi-chamber structure having a plurality of spaces capable of forming a vacuum atmosphere can be formed, which is advantageous. Then, when performing maintenance such as material replenishment or parts replacement, it is possible to return only the central first chamber portion to the atmosphere.

A cross-sectional view of the vacuum processing apparatus including the vapor deposition source of the present embodiment as viewed from the front. FIG. 2 is a cross-sectional view taken along the line II-II of FIG. FIG. 5 is an enlarged cross-sectional view showing the vapor deposition source of the present embodiment. A plan view showing an enlarged vapor deposition source. Cross-sectional view of the vapor deposition source removed from the vacuum processing chamber. A cross-sectional view of the chamber body defining the vacuum processing chamber removed together with the vapor deposition source. It is a figure which expands and explains a part of the vacuum processing chamber which concerns on a modification.

Hereinafter, referring to the drawings, the processing unit is used as a vapor deposition source for film deposition processing by a vacuum vapor deposition method, and the sheet-shaped base material Sw is formed on both sides of the sheet-shaped base material Sw while running in a vacuum atmosphere. An embodiment of the vacuum processing apparatus of the present invention will be described by taking the case of forming a film as an example. In the following, it is assumed that the can roller is housed in the vacuum chamber Vc in a posture in which the axial direction of the can roller as the transport roller coincides with the horizontal direction, and the axial direction is the X-axis direction, and the X-axis is in the same horizontal plane. The direction orthogonal to is the Y-axis direction, the vertical direction orthogonal to the X-axis and the Y-axis is the Z-axis direction, and the directions such as up and down are based on FIG. 1 shown in the installation posture of the vacuum processing apparatus.

With reference to FIGS. 1 and 2, the vacuum processing apparatus DM of the present embodiment includes a central vacuum processing chamber Ms and a vacuum chamber Vc including first and second transfer chambers Ts1 and Ts2. Although not particularly illustrated and described, a vacuum pump unit composed of a turbo molecular pump, a rotary pump, etc. is connected to the vacuum processing chamber Ms and the respective transport chambers Ts1 and Ts2 via an exhaust pipe to form a vacuum atmosphere. You can do it. The vacuum processing chamber Ms has an O-ring of a first chamber portion 1 as a chamber body having a rectangular parallelepiped contour and opening side wall surfaces in the Y-axis direction facing each other, and openings 11 and 12a of the first chamber portion 1. It is made first and second support plate 2 _1, 2 ₂ and de image as sealably respectively cover the partition wall via a vacuum seal Sv equal. The first and second support plate 2 _1, 2 ₂ of the upper and lower surfaces of a predetermined position, the first screw hole Sh ₁ is bored penetrating in the Y-axis direction, the first chamber portion 1 of the opening first and second supporting plate ₂ 1, _{2 2} when the attached to 11, 12a, the first wall portion of the chamber portion 1 corresponding to the first screw hole Sh _1, the second screw hole Sh ₂ Has been drilled. The supporting plate ₂ 1 of the first and second to the first chamber portion 1 of the opening 11, 12a, _{2 2} of the mounting state, each of the first and second screw holes _Sh 1, fastened to Sh ₂ volts Fb _1, by fastening the Fb _2, a state where the vacuum seal Sv is pressed into the support plate ₂ 1, _{2 2} wall portion and the first and second located around the first chamber portion 1 of the opening 11,12a Both can be fixed with. In this case, the first and second screw holes Sh ₁ and Sh ₂ and the fastening bolts Fb ₁ and Fb ₂ constitute the engaging means of the present embodiment.

Further, on the side of the first and second facing away from one another of the supporting plate 2 _1, 2 _2, first and second support frame 3 _1, 3 ₂ respectively attached, the first and second support plate 2 _1, 2 ₂ of the standing posture in the Z-axis direction is to be maintained. The lower surface of the first supporting frame 3 _1, the slider 31 which moves slidably is provided in the rail member Rl was laid on the floor F, whereas the Y-axis direction from the first chamber portion 1 of the opening 11 (FIG. 2 It is movable between the retracted position (middle, left side) and the closed position that closes the opening 11 of the first chamber portion 1 (see FIG. 2). In this case, the rail member Rl and the slider 31 form a single moving means of the present embodiment.

The X-axis direction both sides of the first chamber portion 1 has a rectangular parallelepiped contour, Y axis direction the other side wall surface (in FIG. 2, right side wall) second chamber part 4 ₁ of a chamber body having an opening only, 4 ₂ are respectively provided continuously, the conveying chamber Ts1, Ts2 has been made a second supporting plate _{2 2} a de image located in the second chamber portion ₄ 1, _{4 2} and the Y-axis direction the other side. In this case, although not particularly illustrated and described, _{the first screw hole Sh 1} penetrating in the Y-axis direction is formed at predetermined positions on the upper surface and the lower surface of the _{second support plate 22 as described above.} the second chamber portions ₄ 1, _{4 2} openings 12b, when the second supporting plate _{2 2} attached to 12b, a second chamber portion ₄ 1, _{4 2} wall corresponding to the first screw hole Sh ₁ A second screw hole Sh ₂ is bored in the portion. Then, each of the second chamber portion ₄ 1, _{4 2} openings 12b, the second supporting plate _{2 second} mounting state to 12b, the fastening bolt Fb ₂ in each of the first and second screw holes _Sh 1, Sh ₂ by fastening the second chamber in a state where the vacuum seal is pressed against the the support plate 2 ₂ wall portion and the second located around the second chamber portion 4 _1, 4 ₂ openings 12b, 12b outside the Figure part ₄ 1, _{4 2} so can be fixed to the second supporting plate _{2 2.} In the present embodiment, the case where the first opening 12a and the second chamber portion ₄ first chamber portion 1, _{4 2} of each opening 12b, a second support plate closing and 12b _{2 2} is a single example are described, and the first opening 12a of the chamber part 1, a second chamber portion ₄ 1, _{4 2} openings 12b, 12b and respectively openably closing constructed as a second supporting plate _{2 2} a plurality it can be, in this case, it is sufficient to support the respective single support frame 3 _2.

The side wall located in the first chamber portion 1 and the second chamber portion ₄ 1, _{4 2} in the X-axis direction, which face each other, through holes 13a permitting passage of the sheet substrate Sw, 13b, 41 and 42 are respectively with the opening, the first chamber portion 1 and in the gap between the second chamber portion 4 _1, 4 ₂ between both side walls, the load lock valve so as to cover the portion of the sheet substrate Sw passing through the gap 5 is provided so that the sheet-shaped base material Sw can be consistently conveyed in a vacuum atmosphere and the vacuum processing chamber Ms and both transfer chambers Ts1 and Ts2 can be isolated. Since a known load lock valve 5 can be used as the load lock valve 5 used in this type of vacuum processing apparatus DM, detailed description thereof will be omitted here. In order to automatically operate the load lock valve 5, it is necessary to supply some power (electric power, compressed air, etc.). In such a case, for example, piping and wiring necessary for power supply is made through the first supporting plate 2 ₁ and a second supporting plate 2 _2, this time, the support plate 2 of the _first and second later, A connector that is connected and disconnected in synchronization with the attachment and detachment of 2 ₂ and the chamber main body ₁ , 4 _{1, 4 2 is appropriately provided at a predetermined position.} The use of cable bear (registered trademark) is also conceivable as a method other than the connector.

The first transport chamber Ts1 located on one side in the X-axis direction (left side in FIG. 1) is provided with a feeding roller Wr around which a sheet-shaped base material Sw before film formation is wound. The rotation shaft Wa of the feeding roller Wr _{is pivotally supported by the second} support plate 22 and is rotationally driven by a motor M1 provided outside the vacuum chamber Vc. The second transport chamber Ts2 is provided with a take-up roller Ur that winds up the film-formed sheet-like base material Sw. The rotation shaft Ua of the take-up roller Ur is also _{pivotally supported by the second} support plate 22 and is rotationally driven by a motor M2 provided outside the vacuum chamber Vc. Note that both the transfer chamber Ts1, Ts2 are guide rollers Gr as a carrying roller for guiding the conveyance of the sheet substrate Sw is appropriately provided, supporting the rotation shaft Ga also of the second guide roller Gr plates 2 ₂ Each is supported by the axis.

The vacuum processing chamber Ms is provided with a guide roller Gr and a can roller Cr so that the sheet-shaped base material Sw is cooled while being conveyed around the can roller Cr. The rotation axes Ga and Ca of the guide roller Gr and the can roller Cr are also _{pivotally supported by the second} support plate 22 so that the can roller Cr is rotationally driven by the motor M3 provided outside the vacuum chamber Vc. It has become. _{Then, two thin-film deposition sources ES 1} and ES ₂ are provided in the vacuum processing chamber Ms as processing units for performing film formation processing on both surfaces of the sheet-shaped base material Sw that is horizontally conveyed in the X-axis direction. Has been done.

With reference to FIGS. 3 and 4, each of the vapor deposition sources ES ₁ and ES ₂ has the same configuration and includes a main cylinder 6 and a sub cylinder 7. In this case, expansion chambers Ec are continuously provided on the _{outer surface of the first} support plate 21 in the Y-axis direction _{according to the position and number of the vapor deposition sources ES 1} and ES _{2 to be installed.} Although not particularly illustrated and described, a vacuum pump unit composed of a turbo molecular pump, a rotary pump, or the like and a vent valve are connected to the expansion chamber Ec via an exhaust pipe. Then, in the expansion chamber Ec, the main cylinders 6 of the _{vapor deposition sources ES 1} and ES ₂ are arranged in a posture having a cylindrical contour and whose longitudinal direction coincides with the Z-axis direction.

The main cylinder 6 has a bottomed tubular contour, and a crucible portion 61 in which the solid vapor deposition material Em is filled at a predetermined filling rate is provided at the lower portion thereof in the Z-axis direction. The vapor deposition material Em is appropriately selected according to the composition of the thin film to be deposited (deposited) on the sheet-shaped base material Sw, and for example, a metal material such as aluminum, lithium, indium and an alloy thereof or an organic material is used. Be done. An opening / closing door Ed is provided in the upper opening of the main cylinder 6, and when the opening / closing door Ed is closed, the inside of the main cylinder 6 can be sealed. The crucible portion 61 is also provided with a lid 62 that rotatably closes the upper surface opening 61a. In this case, an actuator 63 is provided in the main cylinder 6, and the lid 62 is erected in the Z-axis direction by the actuator 63, and the upper surface opening 61a is closed (see FIG. 3). The lid body 62 is swung between the two, and the lid body 62 is pressed toward the pit 61 in the horizontal posture so that the contact surface pressure between the lid 62 and the pit 61 can be secured. (In other words, as will be described later, even when the internal pressure of the vapor deposition material Em rises due to sublimation or vaporization, the conductance between the lid 62 and the pit 61 is secured, and the vapor deposition material Em is the main component. To prevent inconvenient leakage into the cylinder 6). Since a known actuator 63 can be used as such an actuator 63, further description thereof will be omitted.

On the outer peripheral surface of the main cylinder 6, a cylindrical branch pipe portion 64 extending in the Y-axis direction having a mounting flange 64a at the tip is projected, and when the opening / closing door Ed is closed, the inside of the main cylinder 6 is inside. The atmosphere is intended to communicate only with the branch pipe portion 64. The branch pipe portion 64 is _{inserted into a through hole 21 provided in the first} support plate 21 and its tip protrudes to the vacuum processing chamber Ms. The height position of the branch pipe portion 64 in the Z-axis direction is set so as to be located at least above the upper layer portion of the thin-film deposition material Em filled in the crucible portion 61. A sheath heater 8a as a heating means is also provided in the main cylinder 6, and by energizing the sheath heater 8a from a power source (not shown), not only the vapor deposition material Em in the crucible portion 61 but also the inside of the main cylinder 6 The inner surface and the lid 62 can be heated over the entire surface.

The sub-cylinder body 7 located in the vacuum processing chamber Ms has a cylindrical contour having mounting flanges 71 and 72 corresponding to the mounting flanges 64a at both ends, and is fixed so as to be longer than the width of the sheet-shaped base material Sw. It has been dimensioned. Then, with the mounting flange 64a and one mounting flange 71 in the Y-axis direction in contact with each other, the sub-cylinder body 7 can be detached from the main cylinder body 6 by fastening the two with bolts Bo as fastening means. It is attached to and is positioned and supported by the holder Hd. The method of fixing the sub-cylinder body 7 to the main cylinder body 6 is not limited to the above, and for example, a clamp or the like can be used. At this time, if the sub-cylinder body 7 is rotated and fixed by a predetermined angle around the hole axis (corresponding to the Y axis), the phase of the discharge opening 75, which will be described later, can be arbitrarily changed. In the present embodiment, in the vapor deposition source ES ₁ located on the first transport chamber Ts1 side, the discharge opening 75 is oriented upward in the Z-axis direction, and in the vapor deposition source ES _{2 located on the second transport chamber Ts2 side.} , The discharge opening 75 is oriented downward in the Z-axis direction (see FIG. 1). A lid plate 73 that closes the inside of the sub-cylinder body 7 is mounted on the other mounting flange 72 in the Y-axis direction, and the lid plate 73 holds the distribution plate 76 described later. At this time, the internal atmosphere of the main cylinder 6 and the sub-cylinder 7 communicate with each other, and the communication port between the internal atmosphere and the outside does not exist other than the discharge opening 75 described later. Further, the lid plate 73 can be detachably attached by fastening the lid plate 73 and the other mounting flange 72 in the Y-axis direction with a bolt Bo as a fastening means. ing.

On the outer peripheral surface of the sub-cylinder 7, a ridge 74 having a racetrack-like contour separated from one mounting flange 71 in the Y-axis direction is provided, and the Y-axis is surrounded by the ridge 74. A slit-shaped discharge opening 75 that is long in the direction is opened. In the mounted state of the vapor deposition sources ES ₁ and ES ₂ , the discharge opening 75 faces the portion of the sheet-shaped base material Sw conveyed in the vacuum processing chamber Ms. A distribution hole 76a is formed in the sub-cylinder body 7 through which the sublimated or vaporized vaporized material Em transferred from the main cylinder body 6 to the sub-cylinder body 7 passes when guided to the discharge opening 75. A plate 76 is inserted. As shown in FIG. 4, the distribution plate 76 has a length extending over substantially the entire length of the sub-cylinder 7 in the Y-axis direction across the discharge opening 75 and a width wider than the discharge opening 75 (length in the X-axis direction). Have. The distribution hole 76a is composed of a single elongated hole formed so as to be located directly below the discharge opening 75, and is provided on the other side in the Y-axis direction from the main cylinder 6 side so that the opening area is continuously increased. It is the one that was made. The amount of increase in the opening area is appropriately set in consideration of the film thickness distribution in the Y-axis direction (width direction of the sheet-shaped base material Sw) when the film is formed on the sheet-shaped base material Sw.

In the above embodiment, a single elongated hole forming the distribution hole 76a will be described as an example, but if the film thickness distribution when the film is formed on the sheet-shaped base material Sw can be made substantially uniform, the film thickness distribution will be described. The present invention is not limited to this, and for example, a plurality of holes having different areas may be opened and configured. Further, in the above embodiment, the case where the distribution plate 76 is used will be described as an example, but the discharge opening 75 is provided from the main cylinder 6 side to the other side in the Y-axis direction so that the opening area is continuously increased. , The distribution plate 76 can be omitted. Further, a sheath heater 8b as a heating means is provided in the sub-cylinder body 7, and by energizing the sheath heater 8b from a power source (not shown), the inner surface of the sub-cylinder body 7 and the surface of the distribution plate 76 are covered over the entire surface thereof. It is possible to heat it. In the present embodiment, the sheath heater 8b is provided in the sub-cylinder body 7, but when the vapor deposition material Em in the crucible portion 61 is heated, the main cylinder body 6 and the sub-cylinder body 7 are sufficiently heated by radiation or heat transfer. If possible, this can be omitted.

When forming a film on both sides of the sheet-shaped base material Sw while running the sheet-shaped base material Sw with the above-mentioned true processing wearing device DM, first, the opening / closing door Ed is opened in the expansion chamber Ec of the air atmosphere. With the lid 62 in an upright position by the actuator 63 _{, the crucible portions 61 of the vapor deposition sources ES 1} and ES ₂ of each vapor deposition source are filled with the vapor deposition material Em at a predetermined filling rate. At this time, a sheet-shaped base material Sw is wound around the feeding roller Wr in one of the transport chambers Tc1 of the vacuum chamber Vc, and the tip portion thereof is wound around the guide rollers Gr and the can roller Cr in the vacuum processing chamber Ms. After being wound on each, they are guided to the other transport chamber Tc2 and attached to the take-up roller Ur via the guide roller Gr. In this state, the vacuum processing chamber Ms and both transport chambers Ts1 and Ts2 are evacuated to a predetermined pressure. It is in a standby state.

After filling the vapor deposition material Em, the lid 62 is placed in a horizontal position to close the upper surface opening 61a and the opening / closing door Ed, and then the inside of each expansion chamber Ec is evacuated. When the inside of each expansion chamber Ec reaches a predetermined pressure, the sheath heaters 8a and 8b are energized to heat the main cylinder 6 and the sub cylinder 7 of the _{vapor deposition sources ES 1} and ES _{2 including the crucible portion 61.} Here, when the vapor deposition material Em reaches a predetermined temperature by heating, for example, the vapor deposition material Em in the crucible portion 61 is liquefied, and the vapor deposition material Em filled in the crucible portion 61 has a vapor pressure curve of the vapor deposition material Em. It begins to vaporize from the upper layer according to. At this time, the pressure inside the pit 61 (partial pressure of the vapor deposition material Em) rises to the vapor pressure corresponding to the predetermined temperature, shifts to a thermal equilibrium state in which vaporization is suppressed by the vapor pressure rate-determining rate, and the pit 61. All the vapor deposition material Em filled in 61 is liquefied (the energizing current (heater output) of the sheath heater 8a is stable).

Next, the motors M1 to M3 are rotationally driven to run the sheet-shaped base material Sw at a constant speed, and the lid 62 is put into an upright posture by the actuator 63. Then, the vaporized vaporized vaporized material Em passes through the main cylinder 6 while maintaining its vapor pressure so that the difference in partial pressure with the sub-cylinder 7 existing in the vacuum processing chamber Ms in the vacuum atmosphere becomes an equilibrium state. It is transferred (diffused) to the cylinder 7, guided to the discharge opening 75 by the distribution plate 76, and discharged from the discharge opening 75 into the vacuum atmosphere. At this time, in the vapor deposition source ES ₁ , since the discharge opening 75 is directed upward, a film is formed on one surface of the sheet-like base material Sw by depot-up. Then, the sheet-shaped base material Sw is once cooled while being conveyed around the can roller Cr, and then, in the vapor deposition source ES ₂ , since the discharge opening 75 is directed downward, the sheet-shaped base material Sw is deposited down. A film is formed on the other surface of the. The sheet-like base material Sw formed on both sides is conveyed to another transfer chamber Ts2 and wound by a take-up roller Ur, and after the other transfer chamber Tc2 is opened to the atmosphere, the sheet has been subjected to film formation treatment. The shape of the base material Sw is recovered.

By the way, when performing maintenance such as replacement of the distribution plate 76, cleaning of the sub-cylinder body 7 and replacement of the sheath heaters 8a and 8b due to the change of the type of the vapor deposition material Em, the first support plate 2 ₁ and the first chamber portion 1 preparative fastening bolts remove all Fb ₁ (in other words for engagement with each other, the first chamber portion 1 and this respectively provided continuously to each the second chamber portion 4 _1, 4 _2, and the second support plate 2 ₂ Selectively engage). After the vacuum chamber Vc was opened to the atmosphere, via the slider 31, to move the first support frame 3 ₁ while the X-axis direction. As a result, as shown in FIG. 5, the sub-cylinders 7 of the vapor deposition sources ES ₁ and ES _{2 supported by the first} support plate 21 can be taken out into a wide space separated from the vacuum processing chamber Ms for maintenance. Workability can be improved.

On the other hand, especially when performing maintenance such as removal of the can roller Cr and the guide roller Gr existing in the vacuum processing chamber Ms and replacement of the vacuum processing chamber Ms and the guide roller Gr in each of the transport chambers Ts1 and Ts2. fastening bolts remove all Fb ₂ (in other words for engagement second supporting plate _{2 2} and the first chamber portion 1 and the second chamber portion ₄ 1, _{4 2} and each other, and chamber body _1,4 1, _{4 2} Selectively engage with the first support plate 2 _1). After the vacuum chamber Vc was opened to the atmosphere, via the slider 31, to move the first support frame 3 ₁ while the X-axis direction. Thus, as shown in FIG. 6, the first supporting plate 2 ₁ is moved integrally with the first chamber portion 1 and this respectively provided continuously to the second chamber portion 4 _1, 4 _2, the second pivotally supported by the support plate 2 ₂ the can roller Cr, feeding roller Wr, winding roller Ur and and guide rollers Gr is remain bare. This makes it possible to perform maintenance in the absence limiting the working space, such as partition walls defining a first chamber portion 1 and the second chamber portion 4 _1, 4 _2. In this case, not only the sheet-shaped base material Sw is set on the feeding roller Wr and the sheet-shaped base material Sw is passed through the can roller Cr and the like to the winding roller Ur, but also the sheet-shaped base material Sw. Travel adjustment work can also be carried out.

Incidentally, after completion of the maintenance, when moving the first supporting frame 3 ₁ through the slider 31 in the X-axis direction while the first supporting plate 2 ₁ and the first chamber portion 1, or the second support plate 2 ₂ can also be first chamber portion 1 and the second chamber portion 4 _1, 4 ₂ and is provided with guide means to be re-attached in a state of being positioned. Such guide means, as shown in FIG. 7, the first support plate 2 ₁ and a chamber body 1, a second supporting plate 2 ₂ and the first chamber portion 1 and the second chamber portion 4 _1, 4 to opposing portions of the positioning block 91a~91d provided at a predetermined position of the _2, guide pins 92a which are protruded to extend in the X-axis direction, 92b and, the guide pin 92a, the guide hole for receiving the 92b It can be composed of 93a and 93b.

According to the above embodiment, the first or second support plates 2 ₁ and 2 ₂ and the first chamber portion 1 and the second chamber portions 4 ₁ and 4 _{are selectively selected by the fastening bolts Fb 1} and Fb _2. and ₂ selectively engages the first support frame 3 ₁ through the slider 31 when moving one in the X-axis direction, since as those leaving is changed, maintenance a small number of components Workability can be improved. Moreover, when carrying out the maintenance such material replenishment or replacement of the components of the vapor deposition source ES _1, ES ₂ to each deposition source ES _1, ES _2, and the removal and the transport roller Despite his film deposited on the conveying rollers Even when maintenance such as replacement is performed, the directions in which the moving means are moved are the same, so the space required for performing maintenance is one direction based on the first chamber portion 1 (in FIGS. 5 and 6). , Left side), which is advantageous because the occupied area of the device can be reduced. Further, the first chamber portion 1, if the opening 12b only on one side, the second chamber portion having a 12b 4 _1, 4 ₂ are such as are continuously provided via the load lock valve 5, each second chamber portion 4 _1, 4 ₂ of the lower space, it is a space for installing the example wires or pipes, it is advantageous. In addition, when partition walls are arranged to partition a plurality of processing spaces isolated from each other around the can roller as in the conventional example, each partition wall is placed on each of the first or second support plates or the first chamber. It may be supported by the part 1.

Although the embodiments of the present invention have been described above, the present invention is not limited to those of the above-described embodiments, and various modifications can be made as long as the gist of the present invention is not deviated. In the above embodiment, the vapor deposition sources ES ₁ and ES ₂ have been described as examples as the processing unit, but the present invention is not limited to this, and the processing unit includes a vapor deposition source for forming a film by vacuum deposition or CVD. may be provided by the component is supported in the first supporting plate 2 ₁ when performing the etching and heat treatment. Further, in the above embodiment, as an example, the engaging means is _{composed of the screw holes Sh 1} and Sh ₂ and the fastening bolts Fb ₁ and Fb _2, and the operator manually performs selective engagement. The example is, but it is not limited to this. For example, an easy-to-detach fastener (so-called quick fastener) can be used instead of the fastening bolt, while any power (electric power, compressed air, etc.) is supplied to automatically and selectively engage. It may be.

In the above embodiment, those composed of a single moving means between the rail members Rl and the slider 31 has been described as an example, the first support frame 3 ₁ in the X-axis direction while maintaining the standing posture As long as it can be moved, it is not limited to this, and for example, a trolley can be used. Further, in the above embodiment, the second chamber portion 4 _1, 4 ₂ in the Y axis direction the other side wall surface (in FIG. 2, right side wall) has been described only in the opening 12b, those provided 12b as an example, this is not limited to, the opening 12b, to the second chamber portion 4 _1, 4 ₂ of the side wall surface facing the 12b provided with an opening (not shown), openably closed by the first support frame 3 ₁ It can also be configured to be.

DM ... Vacuum processing device, ES ₁ , ES ₂ ... Deposition source (processing unit), Fb ₁ , Fb ₂ ... Fastening bolt (engagement means), Gr ... Guide roller (conveying roller), Rl ... Rail member (moving means) , Sh ₁ , Sh ₂ ... Screw holes (engagement means), Sw ... Sheet-like base material, Ur ... Winding roller, Wr ... Unwinding roller, 1 ... First chamber part (chamber body), 2 ₁ , 2 ₂ ... 1st and 2nd support plates, 4 ₁ , 4 ₂ ... 2nd chamber portion (chamber body), 11, 12a, 12b ... openings, 31 ... sliders (moving means).

Claims (2)

Vacuum processing in which a predetermined vacuum treatment is performed on at least one surface of the sheet-shaped base material by a processing unit provided in the vacuum processing chamber while the sheet-shaped base material is run by a plurality of transfer rollers in the vacuum processing chamber. In the device
The vacuum processing chamber is defined by a chamber body having openings to face each other and first and second support plates covering the openings of the chamber bodies, respectively.
Each transport roller is pivotally supported on one of the first and second support plates, and the processing unit is supported on the other side.
With respect to the engaging means that selectively engages the chamber body and the first support plate, or the chamber body and the second support plate, and the second support plate that supports the first support plate. A vacuum processing apparatus further comprising a single moving means that moves relative to each other in the proximity-separation direction. The chamber body is provided with a central first chamber portion and a second chamber portion connected to both sides thereof, and a feeding roller for feeding a sheet-like base material to a support plate portion facing each of the second chamber portions. The vacuum processing apparatus according to claim 1, wherein a winding roller for winding a sheet-shaped base material is pivotally supported.

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