JP2021106255A - Ray direction control element, manufacturing method of ray direction control element and imaging device - Google Patents

Abstract

To provide a ray direction control element in which the inclination of a translucent layer is suppressed, a manufacturing method of the ray direction control element, and an imaging device.SOLUTION: A ray direction control element 100 comprises: a substrate 10; a plurality of translucent layers 20 arranged on the principal plane 12 of the substrate 10; a light absorbing layer 30 arranged between the plurality of translucent layers 20; and an inclination-prevention layer 40 provided on the principal plane 12 of the substrate 10 and arranged on the outer periphery of a region in which the plurality of translucent layers 20 are arranged.SELECTED DRAWING: Figure 1

Description

The present disclosure relates to a light ray direction control element, a method for manufacturing the light ray direction control element, and an image pickup device.

A ray direction control element that controls the direction of transmitted light is known. For example, Patent Document 1 discloses a collimating screen including a substrate, a plurality of translucent columns formed on the substrate in a predetermined pattern, and a light absorbing material arranged between the translucent columns. is doing. In the collimated screen of Patent Document 1, since the light absorbing material absorbs the incident light having a large incident angle, the emission angle of the emitted light emitted from the collimated screen can be controlled within a predetermined range.

U.S. Patent Application Publication No. 2007/0139765

In Patent Document 1, a translucent column having a high aspect ratio is formed in a predetermined pattern, and then a light absorbing material is filled between the translucent columns. When the translucent column is formed on the substrate, the aspect ratio of the translucent column is high, so that the translucent column formed on the outer peripheral portion of the predetermined pattern may be tilted toward the outside of the predetermined pattern. be.

The present disclosure has been made in view of the above circumstances, and an object of the present invention is to provide a light ray direction control element in which the inclination of the light transmitting layer is suppressed, a method for manufacturing the light ray direction control element, and an image pickup device.

In order to achieve the above object, the light ray direction control element according to the first aspect is
With the base
A plurality of translucent layers arranged on the main surface of the substrate,
A light absorption layer arranged between the plurality of light-transmitting layers and
An anti-tilt layer provided on the main surface of the substrate and arranged on the outer periphery of a region in which the plurality of translucent layers are arranged is provided.

The method for manufacturing the light ray direction control element according to the second aspect is as follows.
The process of laminating a photosensitive translucent material on the main surface of the substrate,
A step of forming a plurality of arranged translucent layers and an anti-tilt layer arranged on the outer periphery of a region in which the plurality of translucent layers are arranged from the translucent material.
A step of forming a light absorbing layer between the plurality of light transmitting layers is included.

The image sensor according to the third viewpoint is
With the board
A plurality of light receiving parts arranged on the main surface of the substrate and receiving light from an imaging target, and
A translucent layer arranged on each of the plurality of light receiving portions,
A light absorbing layer arranged between the light transmitting layers and
An anti-tilt layer provided on the main surface of the substrate and arranged on the outer periphery of the region where the translucent layer is arranged is provided.

Since the anti-tilt layer is arranged on the outer periphery of the region where the translucent layer is arranged, the inclination of the translucent layer can be suppressed.

It is a schematic diagram which shows the upper surface of the light ray direction control element which concerns on Embodiment 1. FIG. It is sectional drawing which saw the ray direction control element shown in FIG. 1 by arrow AA. It is a schematic diagram for demonstrating the angular distribution of transmitted light which concerns on Embodiment 1. It is a flowchart which shows the manufacturing method of the light ray direction control element which concerns on Embodiment 1. It is a schematic diagram which shows the laminated light-transmitting material which has the photosensitive property which concerns on Embodiment 1. FIG. It is a schematic diagram which shows the formed light-transmitting layer and the inclination prevention layer which concerns on Embodiment 1. FIG. It is a schematic diagram which shows the upper surface of the light ray direction control element which concerns on Embodiment 2. It is a schematic diagram which shows the upper surface of the light ray direction control element which concerns on Embodiment 3. It is a schematic diagram which shows the upper surface of the light ray direction control element which concerns on Embodiment 4. FIG. It is a schematic diagram which shows the upper surface of the light ray direction control element which concerns on Embodiment 5. It is a schematic diagram which shows the light ray direction control element which concerns on Embodiment 6. It is a schematic diagram which shows the inclination prevention layer which concerns on a modification. It is a schematic diagram which shows the inclination prevention layer which concerns on a modification. It is a schematic diagram which shows the light ray direction control element which concerns on a modification. It is a photograph which shows the light-transmitting layer of the central part which concerns on Example 1. FIG. It is a photograph which shows the light-transmitting layer of the end part in the + X direction which concerns on Example 1. FIG. It is a photograph which shows the light-transmitting layer at the end in the −X direction which concerns on Example 1. FIG. It is a photograph which shows the light-transmitting layer of the central part which concerns on a comparative example. It is a photograph which shows the light-transmitting layer of the end part in the + X direction which concerns on a comparative example. It is a photograph which shows the light-transmitting layer at the end in the −X direction which concerns on a comparative example. It is a photograph which shows the light-transmitting layer of the end part in the + X direction which concerns on Example 2. FIG. It is a photograph which shows the light-transmitting layer of the end part in the + X direction which concerns on Example 3. FIG. It is a photograph which shows the light-transmitting layer and the inclination prevention layer which concerns on Example 4. FIG.

Hereinafter, the light ray direction control element according to the embodiment will be described with reference to the drawings.

<Embodiment 1>
The light ray direction control element 100 according to the present embodiment will be described with reference to FIGS. 1 to 6. As shown in FIGS. 1 and 2, the light ray direction control element 100 includes a substrate 10, a light transmitting layer 20, a light absorbing layer 30, and an inclination prevention layer 40. In the present embodiment, the substrate 10 is a translucent substrate. The translucent layer 20 is arranged in a predetermined pattern on the main surface 12 of the substrate 10. The light absorbing layer 30 is arranged between the light transmitting layers 20. The anti-tilt layer 40 is arranged on the outer periphery of a predetermined pattern of the light-transmitting layer 20. In order to facilitate understanding, in the present specification, the right direction (right direction of the paper surface) of the light ray direction control element 100 in FIG. 1 is referred to as the + X direction, and the upward direction (upward direction of the paper surface) is defined as the + Y direction and the + X direction. The direction perpendicular to the + Y direction (the front direction of the paper surface) will be described as the + Z direction.

The light ray direction control element 100 is provided on a display surface of a display device (for example, a liquid crystal display), a light receiving surface of an image pickup element, or the like. The ray direction control element 100 controls the angular distribution of the transmitted light (that is, the light emitted from the ray direction control element 100). Specifically, as shown in FIG. 3, the incident light L1 having a large incident angle θ1 among the incident light on the light ray direction control element 100 is absorbed by the light absorption layer 30. On the other hand, the incident light L2 having a small incident angle θ2 among the incident light on the light ray direction control element 100 is not absorbed by the light absorption layer 30 and is transmitted through the light ray direction control element 100 (light transmission layer 20). Thereby, the angle distribution of the light transmitted through the light ray direction control element 100 is controlled. The angular distribution of the transmitted light can be controlled by the height H, the width D1 and the refractive index of the light transmitting layer 20.

Returning to FIG. 1, the substrate 10 of the light ray direction control element 100 transmits visible light. The substrate 10 is, for example, a flat glass substrate. The light transmitting layer 20, the light absorbing layer 30, and the anti-tilt layer 40 are formed on the main surface 12 of the substrate 10 as shown in FIG.

The light transmitting layer 20 of the light ray direction control element 100 transmits visible light. As shown in FIGS. 1 and 2, the light-transmitting layer 20 is formed in a pillar shape from a light-transmitting material having photosensitivity on the main surface 12 of the substrate 10. The aspect ratio (height H / width D1) of the column-shaped translucent layer 20 is preferably 1 or more, and more preferably 8 or more. Further, the translucent layer 20 is arranged in a predetermined pattern on the main surface 12 of the substrate 10. In this embodiment, the translucent layer 20 is formed in a square column from a chemically amplified photoresist: SU-8 (trade name, Nippon Kayaku Co., Ltd.) and is arranged in a matrix.

The light absorption layer 30 of the light ray direction control element 100 is formed on the main surface 12 of the substrate 10. Further, the light absorbing layer 30 is arranged between the light transmitting layers 20 as shown in FIGS. 1 and 2. In this embodiment, the light absorbing layer 30 and the light transmitting layer 20 are arranged alternately. The light absorbing layer 30 is formed from, for example, a black curable resin at the same height as the light transmitting layer 20.

The tilt prevention layer 40 of the light ray direction control element 100 suppresses the light transmission layer 20 from tilting toward the outside of a predetermined pattern. The anti-tilt layer 40 is formed on the main surface 12 of the substrate 10 and is arranged on the outer periphery of the region T in which the light-transmitting layer 20 is arranged. As used herein, the outer circumference of the region T means the outer circumference of the region T.
In this embodiment, the anti-tilt layer 40 is formed from a photosensitive translucent material (SU-8) at the same height as the translucent layer 20. Further, as shown in FIG. 1, the inclination prevention layer 40 is formed in a frame shape on the outer periphery of the region T in which the light transmitting layer 20 is arranged. The distance M between the anti-tilt layer 40 and the region T is, for example, 150 μm.

The width D2 of the anti-tilt layer 40 is preferably wider than the width D1 of the light-transmitting layer 20. As a result, the inclination prevention layer 40 can further suppress the inclination of the light transmitting layer 20. In the present specification, the width D1 of the translucent layer 20 refers to the width (distance) between the surface 20a facing the anti-tilt layer 40 and the surface 20a facing the anti-tilt layer 40 and the surface 20b on the opposite side. .. Further, the width D2 of the inclination prevention layer 40 refers to the width (distance) between the surface 40a facing the translucent layer 20 and the surface 40a facing the translucent layer 20 and the surface 40b on the opposite side.

Next, a method of manufacturing the light ray direction control element 100 will be described with reference to FIG. FIG. 4 is a flowchart showing a manufacturing method of the light ray direction control element 100. The method for manufacturing the light ray direction control element 100 includes a step (step S10) of laminating a light-transmitting material 22 having photosensitivity (hereinafter, referred to as the light-transmitting material 22) on the main surface 12 of the substrate 10 and a light-transmitting property. A step (step S20) of forming a plurality of arranged light-transmitting layers 20 and an inclination prevention layer 40 arranged on the outer periphery of a region T in which the plurality of light-transmitting layers 20 are arranged from the material 22 and a plurality of steps. The step (step S30) of forming the light absorbing layer 30 between the light transmitting layers 20 is included.

In step S10, first, the substrate 10 and the translucent material 22 forming the translucent layer 20 and the anti-tilt layer 40 are prepared. In this embodiment, a flat glass substrate is prepared as the substrate 10, and SU-8 is prepared as the translucent material 22. Next, as shown in FIG. 5, the translucent material 22 is laminated on the main surface 12 of the substrate 10. The translucent material 22 is laminated on the main surface 12 by spin coating, screen printing, spray coating, wire coater, or the like. The thickness of the translucent material 22, that is, the height H of the translucent layer 20, is, for example, 10 μm to 600 μm.

In step S20, as shown in FIG. 4, a step of prebaking the laminated translucent material 22 (step S22) and exposing the translucent material 22 to a predetermined pattern of the translucent layer 20 and the anti-tilt layer 40. (Step S24), a step of developing the exposed translucent material 22 (step S26), and a step of post-baking the developed translucent material 22 (step S28).

In step S22, the laminated translucent material 22 is prebaked (heated) in order to remove the solvent contained in the laminated translucent material 22. The heating temperature is, for example, 95 ° C.

In step S24, the translucent material 22 is exposed to a predetermined pattern of the translucent layer 20 and the anti-tilt layer 40 by using a mask having an opening pattern of the translucent layer 20 and the anti-tilt layer 40. The exposure light is, for example, ultraviolet light having a wavelength of 365 nm.

In step S26, the exposed translucent material 22 is developed with a developing solution. The developing method may be a shower method or a dip (immersion) method. By swinging the substrate 10, the developability of the translucent material 22 is improved. After development, the developed translucent material 22 is rinsed with a rinsing liquid. The rinsing method is the same as the developing method.

In step S28, post-baking (heating) is performed to promote cross-linking of the translucent material 22. The heating temperature is, for example, 150 ° C.
As a result, as shown in FIG. 6, a plurality of light-transmitting layers 20 arranged in a predetermined pattern and an inclination prevention layer 40 arranged on the outer periphery of the region T in which the light-transmitting layer 20 is arranged are formed. NS. In the present embodiment, since the inclination prevention layer 40 is formed together with the light transmitting layer 20, the inclination of the light transmitting layer 20 can be suppressed.

In step S30, a black curable resin is filled between the light-transmitting layers 20, and then the black curable resin is cured to form a light absorption layer 30 between the light-transmitting layers 20. From the above, the light ray direction control element 100 can be manufactured.

As described above, since the inclination prevention layer 40 is arranged on the outer periphery of the region T in which the light transmission layer 20 is arranged, the light ray direction control element 100 can suppress the inclination of the light transmission layer 20. Further, in the method of manufacturing the light ray direction control element 100, since the inclination prevention layer 40 arranged on the outer periphery of the region T where the light transmitting layer 20 is arranged is formed together with the light transmitting layer 20, the inclination of the light transmitting layer 20 is increased. Can be suppressed.

<Embodiment 2>
The tilt prevention layer 40 of the first embodiment is formed in a frame shape, but the shape of the tilt prevention layer 40 is arbitrary.

As shown in FIG. 7, the light ray direction control element 100 of the present embodiment has the tilt prevention layers 41 to 48 divided into a plurality of parts. The anti-tilt layers 41 to 48 are each formed in a rectangular shape. The anti-tilt layers 41 to 48 are arranged on the outer periphery of the region T so as to surround the region T. Other configurations are the same as the configuration of the light ray direction control element 100 of the first embodiment.

Also in the light ray direction control element 100 of the present embodiment, since the inclination prevention layers 41 to 48 are arranged on the outer periphery of the region T in which the light transmission layer 20 is arranged, the inclination of the light transmission layer 20 can be suppressed. Further, in the manufacture of the light ray direction control element 100, the circulation of the developing solution can be facilitated and the developability can be improved. Further, the adhesion of the light transmitting layer 20 to the substrate 10 can be improved.

<Embodiment 3>
In the first embodiment, one frame-shaped anti-tilt layer 40 is arranged on the outer periphery of the region T, but a plurality of anti-tilt layers 50 may be arranged so as to face the light-transmitting layer 20.

As shown in FIG. 8, the light ray direction control element 100 of the present embodiment has a plurality of tilt prevention layers 50. The plurality of anti-tilt layers 50 are arranged on the outer periphery of the region T in which the translucent layer 20 is arranged, and surround the region T. Each of the anti-tilt layers 50 faces each of the light-transmitting layers 20 arranged on the outermost circumference in the region T. Other configurations are the same as the configuration of the light ray direction control element 100 of the first embodiment. Also in this embodiment, the width D2 of the tilt prevention layer 50 (the width between the surface 50a facing the translucent layer 20 and the surface 50a facing the translucent layer 20 and the surface 50b on the opposite side) D2 is transparent. It is preferably wider than the width D1 of the light layer 20.

Also in the light ray direction control element 100 of the present embodiment, since the inclination prevention layer 50 is arranged on the outer periphery of the region T in which the light transmission layer 20 is arranged, the inclination of the light transmission layer 20 can be suppressed.

<Embodiment 4>
In the third embodiment, a plurality of anti-tilt layers 50 are arranged to face the light-transmitting layer 20, but when the region T in which the light-transmitting layer 20 is arranged has a polygonal shape, the anti-tilt layer 52 is arranged in the region T. It may be arranged at a position facing the corner portion 62 of the.

In the light ray direction control element 100 of the present embodiment, as shown in FIG. 9, a plurality of light transmitting layers 20 are arranged in a matrix in a rectangular region T. Further, each of the anti-tilt layers 50 is arranged to face each of the translucent layers 20 arranged on the outermost periphery in the region T, similarly to the anti-tilt layer 50 of the third embodiment. Further, the inclination prevention layer 52 is arranged at a position facing the corner portion 62 of the region T on the outer periphery of the region T. Other configurations are the same as the configuration of the light ray direction control element 100 of the third embodiment.

Also in this embodiment, since the inclination prevention layer 50 is arranged on the outer periphery of the region T in which the light transmission layer 20 is arranged, the inclination of the light transmission layer 20 can be suppressed. Further, since the inclination prevention layer 52 faces the corner portion 62 of the region T, the inclination of the translucent layer 20 arranged in the vicinity of the corner portion 62 of the region T can be further suppressed.

<Embodiment 5>
In the third embodiment, the plurality of anti-tilt layers 50 are arranged to face the light-transmitting layer 20, but the anti-tilt layers 50 may be connected to each other.

In the light ray direction control element 100 of the present embodiment, each of the tilt prevention layers 50 faces each of the light transmitting layers 20 arranged on the outermost periphery in the region T, similarly to the tilt prevention layer 50 of the third embodiment. It is arranged. Further, the anti-tilt layers 50 are connected to each other at the end opposite to the light-transmitting layer 20 as shown in FIG. Other configurations are the same as the configuration of the light ray direction control element 100 of the third embodiment.

Also in this embodiment, since the inclination prevention layer 50 is arranged on the outer periphery of the region T in which the light transmission layer 20 is arranged, the inclination of the light transmission layer 20 can be suppressed. Further, since the inclination prevention layers 50 are connected to each other, the inclination of the inclination prevention layer 50 can be suppressed.

<Embodiment 6>
In the light ray direction control element 100 of the first to fifth embodiments, the substrate 10 is a translucent substrate, but the substrate 10 is not limited to the translucent substrate.

In this embodiment, the substrate 10 is an image sensor. The image sensor is, for example, a CCD (Charge Coupled Device) image sensor. As shown in FIG. 11, the substrate 10 has a substrate 10a and a plurality of light receiving portions 14. The plurality of light receiving units 14 are arranged on the main surface 12 and receive light from an imaging target.

In this embodiment, the translucent layer 20 is located on the light receiving portion 14 of the substrate 10. Further, the light absorbing layer 30 is located between the light transmitting layers 20. Other configurations of the light ray direction control element 100 of the present embodiment are the same as those of the light ray direction control element 100 of the first embodiment.

In the present embodiment, since the light absorbing layer 30 removes the light incident on the light receiving unit 14 from an extra angle, a clear image can be captured. Further, also in the present embodiment, since the inclination prevention layer 40 is arranged on the outer periphery of the region T in which the light transmission layer 20 is arranged, the inclination of the light transmission layer 20 can be suppressed. The light ray direction control element 100 of the present embodiment is arranged on the substrate 10a and the main surface 12 of the substrate 10a, and is placed on the plurality of light receiving units 14 and the light receiving units 14 for receiving light from the image pickup target. Imaging including a light-transmitting layer 20 arranged, a light absorbing layer 30 arranged between the light-transmitting layers 20, and an anti-tilt layer 40 arranged on the outer periphery of a region T in which the light-transmitting layer 20 is arranged. Also represented as an element.

<Modification example>
Although the embodiments have been described above, the present disclosure can be modified in various ways without departing from the gist.

The substrate 10 of the first to fifth embodiments is a flat glass substrate, but the substrate 10 may be formed of a translucent resin.

The light-transmitting layers 20 of the first to fifth embodiments are arranged in a matrix, but the arrangement of the light-transmitting layers 20 is arbitrary. The translucent layers 20 may be arranged in a staggered pattern, for example. Further, in the sixth embodiment, the light transmitting layer 20 is arranged corresponding to the arrangement of the light receiving unit 14. Further, in the first to sixth embodiments, the shape of the light transmitting layer 20 is a quadrangular prism, but the shape of the light transmitting layer 20 is arbitrary. The shape of the light transmitting layer 20 may be, for example, a cylinder.

The shape of the region T in which the light transmitting layer 20 is arranged is arbitrary. The region T of the first and second embodiments has a rectangular shape, but the region T may have a polygonal shape, a circular shape, or the like.

The translucent material 22 forming the translucent layer 20 and the anti-tilt layer 40 is not limited to SU-8, and may be any material having photosensitivity and translucency. The exposure of the translucent material 22 may be a proximity exposure in which a gap is provided between the translucent material 22 and the mask, or a contact exposure in which the translucent material 22 and the mask are in contact with each other.

In the step of exposing the translucent material 22 to a predetermined pattern of the translucent layer 20 and the anti-tilt layer 40 (step S24), after exposing the translucent material 22, a PEB (Post Exposure Bake) treatment is performed. May be good.

The anti-tilt layers 40, 41 to 48, 50, and 52 are arranged on the outer periphery of the region T so as to surround the region T, but the anti-tilt layer may be arranged on the outer periphery of the region T. As shown in FIG. 12, two opposing anti-tilt layers 54 and 55 may be arranged on the outer periphery of the region T with the region T interposed therebetween.

The inclination prevention layer 52 of the fourth embodiment is arranged so as to face the corner portion 62 of the rectangular region T. When the region T has a polygonal shape, the inclination prevention layer 52 may be arranged so as to face the corners of the polygonal shape. Further, the inclination prevention layers 50 and 52 of the fourth embodiment may be connected to each other as shown in FIG.

The black curable resin forming the light absorption layer may be a thermosetting resin or a UV (Ultraviolet) curable resin.

Although the light-transmitting layer 20 of the sixth embodiment is formed directly on the light-receiving portion 14, another member may be provided between the light-transmitting layer 20 and the light-receiving portion 14. For example, the protective layer that protects the light receiving unit 14 may be provided directly on the light receiving unit 14, and the light transmitting layer 20 may be provided on the protective layer. Further, the image sensor is not limited to the CCD image sensor. The image sensor may be, for example, a CMOS (Complementary Metal Oxide Semiconductor) image sensor.

The light transmitting layer 20 of the sixth embodiment may be arranged on at least a part of the light receiving unit 14. As shown in FIG. 14, the light transmitting layer 20 may be arranged on a part of the light receiving portion 14. Further, in a plan view, the light transmitting layer 20 may be arranged at a position overlapping a part of the light receiving portion 14.

Although the preferred embodiment has been described above, the present disclosure is not limited to the specific embodiment, and the present disclosure includes the invention described in the claims and the equivalent scope thereof.

The present disclosure will be described in more detail with reference to the following examples, but the present disclosure is not limited to the examples.

<Example 1>
In this embodiment, the substrate 10 is a flat glass substrate, and the light-transmitting layer 20 and the anti-tilt layer 40 of the first embodiment are formed on the main surface 12 of the substrate 10. In this embodiment, the size of the region T in which the translucent layer 20 is arranged is 30 mm × 30 mm, and the shape of the translucent layer 20 is a regular quadrangular prism. The width D1 of the transparent layer 20 was 50 μm, the height H of the transparent layer 20 was 400 μm, and the arrangement pitch of the transparent layer 20 was 100 μm. Further, the width D2 of the anti-tilt layer 40 was set to 250 μm, the height of the anti-tilt layer 40 was set to 400 μm, and the distance M between the anti-tilt layer 40 and the region T was set to 150 μm.
The light transmitting layer 20 and the tilt prevention layer 40 were formed according to steps S10 and S20 (steps S22 to S28) in the method for manufacturing the light ray direction control element 100.

Further, as a comparative example not provided with the anti-tilt layer 40, only the light-transmitting layer 20 similar to this embodiment was formed on the main surface 12 of the substrate 10.

15 and 16 and 17 show a light-transmitting layer 20 at the center, a light-transmitting layer 20 at the end in the + X direction, and a light-transmitting layer 20 at the end in the −X direction in the region T formed in this embodiment, respectively. Is shown. Further, FIGS. 18, 19 and 20 show a translucent layer 20 at the center, a transmissive layer 20 at the end in the + X direction, and a transmissive layer at the end in the −X direction in the region T formed in the comparative example, respectively. 20 is shown. It should be noted that the partial chipping of the light-transmitting layer 20 in FIGS. 15 to 20 is a chipping caused by a break for producing a sample for photography.

As shown in FIGS. 15 to 17, the translucent layer 20 formed in this embodiment is not inclined. On the other hand, as shown in FIGS. 19 and 20, the translucent layer 20 formed in the comparative example is inclined toward the outside of the region T at the end in the −X direction and the end in the + X direction.

As described above, since the inclination prevention layer 40 is arranged on the outer periphery of the region T in which the light transmission layer 20 is arranged, the inclination of the light transmission layer 20 can be suppressed.

<Example 2, Example 3>
Similar to the first embodiment, the translucent layer 20 and the anti-tilt layer 40 of the first embodiment are formed on the main surface 12 of the substrate 10. The height H of the translucent layer 20 and the height of the anti-tilt layer 40 were set to 350 μm, and the width D2 of the anti-tilt layer 40 was set to 250 μm (Example 2) and 450 μm (Example 3). Other configurations are the same as in the first embodiment.

FIG. 21 shows the translucent layer 20 at the end in the + X direction of Example 2, and FIG. 22 shows the translucent layer 20 at the end in the + X direction of Example 3. As shown in FIGS. 21 and 22, the light-transmitting layer 20 formed in Examples 2 and 3 is not inclined. Therefore, by arranging the inclination prevention layer 40 on the outer periphery of the region T, the inclination of the light transmitting layer 20 can be suppressed.

<Example 4>
In this embodiment, the substrate 10 is a flat glass substrate, and the translucent layer 20 and the anti-tilt layers 50 and 52 of the fourth embodiment are formed on the main surface 12 of the substrate 10. In this embodiment, the size of the region T in which the translucent layer 20 is arranged is 30 mm × 30 mm, and the shape of the translucent layer 20 is a regular quadrangular prism. The width D1 of the transparent layer 20 was 50 μm, the height H of the transparent layer 20 was 400 μm, and the arrangement pitch of the transparent layer 20 was 100 μm. Further, the width D2 of the anti-tilt layers 50 and 52 was set to 250 μm, the height of the anti-tilt layers 50 and 52 was set to 400 μm, and the distance M between the anti-tilt layers 50 and the region T was set to 50 μm. The light transmitting layer 20 and the inclination prevention layers 50 and 52 were formed according to steps S10 and S20 in the method for manufacturing the light ray direction control element 100.

FIG. 23 shows the translucent layer 20 and the anti-tilt layers 50 and 52 in this embodiment. As shown in FIG. 23, the light transmitting layer 20 is not inclined.

As described above, since each of the tilt prevention layers 50 arranged on the outer periphery of the region T faces each of the translucent layers 20 arranged on the outermost periphery in the region T, the translucent layer The inclination of 20 can be suppressed. Further, since the inclination prevention layer 52 faces the corner portion 62 of the region T, the inclination of the translucent layer 20 arranged in the vicinity of the corner portion 62 can be further suppressed.

10 substrate, 10a substrate, 12 main surface, 14 light receiving part, 20 translucent layer, 20a surface facing the anti-tilt layer, 20 b surface opposite to the surface facing the anti-tilt layer, 22 translucent with photosensitivity Material, 30 light absorbing layers, 40, 41, 42, 43, 44, 45, 46, 47, 48, 50, 52, 54, 55 anti-tilt layers, 40a, 50a surfaces facing the translucent layer, 40b, 50b Surface opposite to the surface facing the light transmission layer, 62 corners, 100 ray direction control element, D1, D2 width, H height, M interval, T region, L1, L2 incident light, θ1, θ2 incident angle

Claims (13)

With the base
A plurality of translucent layers arranged on the main surface of the substrate,
A light absorption layer arranged between the plurality of light-transmitting layers and
An anti-tilt layer provided on the main surface of the substrate and arranged on the outer periphery of a region in which the plurality of translucent layers are arranged is provided.
Ray direction control element. The anti-tilt layer is divided into a plurality of parts.
The light ray direction control element according to claim 1. Provided with the plurality of anti-tilt layers
Each of the plurality of anti-tilt layers is arranged so as to face each of the transmissive layers arranged on the outermost periphery.
The light ray direction control element according to claim 1. The plurality of anti-slope layers are connected to each other.
The light ray direction control element according to claim 3. When the main surface of the substrate is viewed from above, the region in which the plurality of translucent layers are arranged has a polygonal shape, and the anti-tilt layer is the corner of the region in which the plurality of translucent layers are arranged. Arranged facing the part,
The light ray direction control element according to any one of claims 2 to 4. The anti-tilt layer surrounds an area in which the plurality of translucent layers are arranged.
The light ray direction control element according to any one of claims 1 to 5. The width of the anti-tilt layer is wider than the width of the translucent layer.
The light ray direction control element according to any one of claims 1 to 6. The translucent layer has a pillar shape.
The light ray direction control element according to any one of claims 1 to 7. The substrate is a translucent substrate.
The light ray direction control element according to any one of claims 1 to 8. The substrate is an image sensor.
The light ray direction control element according to any one of claims 1 to 8. The process of laminating a photosensitive translucent material on the main surface of the substrate,
A step of forming a plurality of arranged translucent layers and an anti-tilt layer arranged on the outer periphery of a region in which the plurality of translucent layers are arranged from the translucent material.
A step of forming a light absorbing layer between the plurality of light transmitting layers, and the like.
A method for manufacturing a ray direction control element. With the board
A plurality of light receiving parts arranged on the main surface of the substrate and receiving light from an imaging target, and
A translucent layer arranged on each of the plurality of light receiving portions,
A light absorbing layer arranged between the light transmitting layers and
An anti-tilt layer provided on the main surface of the substrate and arranged on the outer periphery of the region where the translucent layer is arranged is provided.
Image sensor. The translucent layer is arranged at a position where it overlaps a part of the light receiving portion.
The image pickup device according to claim 12.

Images