JP2021100076A - Flying object producing device, method for supplying molding material and method for manufacturing photoelectric conversion element - Google Patents

Abstract

To provide a flying object producing device that can generate a flying object of any light-absorbing and viscous material.SOLUTION: A flying object producing device 100 is the flying object producing device that produces a flying object that flies out from a predetermined member, and comprises a transparent substrate 101; a light-absorbing film 102 formed on a surface of the transparent substrate 101; a donor layer 103 formed directly or through the light-absorbing film 102 on the surface of the transparent substrate 101 and comprising a donor material that constitutes the flying object; and a light vortex laser irradiation device 104 that is disposed on the opposite side of the donor layer 103 across the transparent substrate 101 and irradiates the light-absorbing film 102 with an optical vortex laser.SELECTED DRAWING: Figure 1

Description

The present invention relates to a flying object generator, a method for supplying a molding material, and a method for manufacturing a photoelectric conversion element.

In recent years, the laser forward transfer (LIFT) method has attracted attention as a technique for supplying molding materials in various manufacturing processes such as 3D printing and patterning of electronic wiring. The laser forward transfer method is a method in which a material is irradiated with a laser to fly a part of the molding material to which the energy and momentum of the laser are transferred to reach an object to be supplied. Patent Document 1 discloses a technique for stably flying a molding material over a long distance by using an optical vortex laser beam.

JP-A-2019-123133

When a molding material is made to fly by using the laser forward transfer method, it is necessary for the molding material to absorb laser light well and to stabilize the flight direction of the molding material. Therefore, a molding material to be flown is required to have high light absorption and high viscosity, and it is considered difficult to fly a molding material having low light absorption and viscosity. Even in the technique disclosed in Patent Document 1, a liquid or solid having high light absorption and viscosity is used as a molding material to be flown.

The present invention has been made in view of the above circumstances, and is a flying object generator capable of producing a flying object of a molding material having arbitrary light absorption and viscosity, a method of supplying the molding material, and a photoelectric conversion. It is an object of the present invention to provide a method for manufacturing an element.

In order to solve the above problems, the present invention employs the following means.

(1) The projectile generator according to one aspect of the present invention is a projectile generator that generates a projectile that jumps out of a predetermined member, and is a transparent substrate and a light absorption film formed on the surface of the transparent substrate. And a donor layer formed on the surface of the transparent substrate directly or via the light absorption film and made of a donor material constituting the projectile, and arranged on the opposite side of the transparent substrate with the transparent substrate interposed therebetween. A light vortex laser irradiating device for irradiating the light absorbing film with an optical vortex laser.

(2) In the flying object generator according to the above (1), it is preferable that the light absorbing film is a metal film.

(3) In the flying object generator according to any one of (1) and (2), the optical density of the donor material is preferably 0.1 or less.

(4) In the projectile generator according to any one of (1) to (3) above, the donor material may be made of a perovskite precursor.

(5) In the flying object generator according to any one of (1) to (4), the donor material may be made of an ultraviolet curable resin. In addition, as long as it is a transparent material, the viscosity and optical density do not matter.

(6) The method for supplying the molding material according to one aspect of the present invention is the method for supplying the molding material using the flying object generating apparatus according to any one of (1) to (5) above. By arranging a support member of the molding material on the side facing the donor layer and irradiating the light absorbing film with an optical vortex laser directly or through the transparent substrate, a flying object protruding from the donor layer can be obtained. , Is supplied to the support member as the molding material.

(7) In the method for supplying the molding material according to (6) above, it is preferable that a metal film is used as the light absorption film and the frequency of the optical vortex laser to be irradiated is 0.2 μm or more and 10.6 μm or less.

(8) The method for supplying the molding material according to any one of (6) or (7) is a step of controlling the flight direction of the flying object by adjusting the irradiation direction of the optical vortex laser, and during flight. It may have a step of solidifying the flying object.

(9) The molding material supply method according to (8) changes the distance between the phase singularity of the optical vortex laser and the center of the optical vortex laser in the step of controlling the flight direction of the flying object. Thereby, the flight direction of the flying object may be controlled.

(10) The method for manufacturing a photoelectric conversion element according to one aspect of the present invention is a method for manufacturing a photoelectric conversion element using the method for supplying a molding material according to any one of (6) to (9) above. Therefore, a perovskite precursor is used as the donor material, and a support member having a base layer of a photoelectric conversion layer is used to supply the projectile to the base layer.

(11) In the method for manufacturing a photoelectric conversion element according to (10), a plurality of types of perovskite precursors having different halogen element content ratios are used as a donor material for the projectile to be supplied for each predetermined region of the base layer. It may have a step of selecting from the body.

According to the projectile generator of the present invention, a projectile can be generated by indirectly heating the donor layer through the light irradiation film. Therefore, in the projectile generator of the present invention, the donor layer does not need to absorb the laser beam and the material of the donor layer is not limited, so that the projectile having arbitrary light absorption and viscosity is generated. be able to.

By using the projectile generator of the present invention, an arbitrary molding material can be easily supplied to a micron-order region of a base material (support member), and a structure having an arbitrary shape and size can be manufactured. can do. According to the method for supplying a molding material of the present invention, a photoelectric conversion element can be manufactured by using a photoelectric conversion material such as perovskite as the molding material.

It is a top view of the flying object generator which concerns on one Embodiment of this invention. It is a figure which shows the structure of the optical vortex laser irradiation device which comprises the flying object generation device of FIG. It is a figure explaining the supply method of the molding material using the flying object generator of FIG. (A) to (c) are images in which a flying object is generated by using the flying object generating apparatus according to Examples 1 to 3 of the present invention. It is an image of a flying object generated by using the flying object generating apparatus which concerns on Example 4 of this invention. The images of the flying objects generated by using the flying object generating apparatus according to the fifth embodiment of the present invention are arranged in the order of the passage of time. The images of the flying object according to the sixth embodiment of the present invention are arranged in the order of the moving distances of the phase singular points by using the flying object generating device according to the fifth embodiment of the present invention. .. It is a graph which shows the relationship between the movement distance of a phase singularity, and the flight angle about the flying object of Example 6.

Hereinafter, a flying object generator, a method for supplying a molding material, and a method for manufacturing a photoelectric conversion element according to an embodiment to which the present invention is applied will be described in detail with reference to the drawings. In the drawings used in the following description, in order to make the features easier to understand, the featured parts may be enlarged for convenience, and the dimensional ratios of each component may not be the same as the actual ones. Absent. Further, the materials, dimensions, etc. exemplified in the following description are examples, and the present invention is not limited thereto, and the present invention can be appropriately modified without changing the gist thereof.

<Flying object generator>
FIG. 1 is a plan view schematically showing the configuration of a flying object generator 100 according to the first embodiment of the present invention. The projectile generator 100 uses a laser forward transfer (LIFT) method to generate a projectile that jumps out of a predetermined member. The flying object generation device 100 mainly includes a transparent substrate 101, a light absorption film 102, a donor layer 103, and an optical vortex laser irradiation device 104. The projectile generator 100 is configured such that the light emitted from the optical vortex laser irradiation device 104 indirectly heats the donor layer 103 via the transparent substrate 101 and the light absorption film 102.

The transparent substrate 101 is a flat plate-shaped member capable of transmitting 90% or more of laser light, preferably light in the wavelength region from visible light to near infrared light. Examples of the material of the transparent substrate 101 include glass, ITO, sapphire, and the like. The viscosity, optical density, etc. of the transparent substrate 101 are not particularly limited. It is assumed that the two main surfaces 101a and 101b of the transparent substrate are both substantially flat and substantially parallel to each other.

The light absorption film 102 is formed (mounted) on one main surface 101a facing the optical vortex laser irradiation device 104 or on the other main surface 101b on the opposite side of the surface of the transparent substrate 101. From the viewpoint of propagating the thermal energy of the optical vortex laser to the donor layer 103, it is preferable that the light absorption film 102 is formed on the other main surface 101b. When the light absorption film 102 is formed on one of the main surfaces 101a, the optical vortex laser loses heat energy while propagating in the transparent substrate 101, and the heating of the donor layer 103 is weakened by that amount. ..

The light absorption film 102 contains a material that absorbs light from the visible light region to the near infrared light region, for example, a metal such as gold, chromium, titanium, black silicon, or the like as a main component. Of these, gold, which is hard to peel off from the transparent substrate 101, is most preferable. The material of the light absorption film 102 is preferably chemically inert and difficult to oxidize so as not to react with the material of the donor layer 103.

The thickness of the light absorption film 102 is preferably 10 nm or more and 1000 nm or less. If the light absorption film is thinner than 10 nm, the optical vortex laser L will pass through, making it difficult to realize indirect heating via the light absorption film 102. If the light absorption film is thicker than 1000 nm, it will be completely absorbed and propagation to the donor layer 103 will be hindered.

The donor layer 103 is formed on the surface of the transparent substrate 101 directly or with the light absorption film 103 sandwiched therein, and is made of a donor material constituting the flying object 103. The donor material is not limited in terms of light absorption, viscosity, etc., and may be, for example, a liquid such as water or an organic solvent, or a solid such as _{MoS 2 or graphene.} The optical density of the donor material is preferably 0.1 or less.

The optical vortex laser irradiation device 104 is arranged on the opposite side of the transparent substrate 101 from the donor layer 103, and has a function of irradiating the light absorption film 102 with the optical vortex laser. FIG. 2 is a diagram schematically showing a configuration example of the optical vortex laser irradiation device 104. The optical vortex laser irradiation device 104 mainly includes a laser light source 105, a first beam diameter changing member 106, a first beam wavelength changing member 107, an optical vortex conversion member 108, and a second beam wavelength conversion member 109. a second beam diameter changing member 110 includes, as arranged in order in the irradiation direction D ₁ of the optical vortex laser beam.

The laser light source 105 is not particularly limited and can be appropriately selected depending on the intended purpose. For example, a solid-state laser, a gas laser, a semiconductor laser, or the like, and its second harmonic and third harmonic are used. , Or the fourth harmonic can be used. Examples of the solid-state laser include a YAG laser, a titanium sapphire laser, and a fiber laser. Examples of the gas laser include an argon laser and a carbon dioxide gas laser. As the optical vortex laser irradiation device 104, it is preferable to use a semiconductor laser having an output of about 30 mW from the viewpoint of miniaturization and cost reduction. If there is a laser light source 105 that can independently generate an optical vortex laser, it may be used. In that case, the optical vortex conversion member 108 becomes unnecessary.

The optical vortex conversion member 108 may be a member that converts the linear laser beam LA generated by the laser light source 105 into the optical vortex laser beam LB, and may be, for example, a diffractive optical element, a multimode fiber, or a liquid crystal phase modulator. Etc. can be used. Examples of the diffractive optical element include a spiral phase plate and a hologram element, and among them, the spiral phase plate is particularly preferable.

Examples of the method for generating the optical vortex laser beam include the following methods.
-A method of oscillating an optical vortex laser from a laser cavity as an intrinsic mode-A method of inserting a hologram element into a laser cavity-A method of using excitation light converted into a donut beam-A method of using a laser resonator mirror having a dark point -A method of oscillating the optical vortex mode using the thermal lens effect generated by the side-pumped solid-state laser as a spatial filter.

The first beam diameter changing member 106 and the second beam diameter changing member 110 may be members that change the beam diameters of the laser light before the optical vortex conversion and the laser light after the optical vortex conversion, respectively. An optical lens or the like can be used.

The first beam wavelength conversion member 107 may be any member as long as it can change the wavelength of the laser light before the optical vortex conversion to a wavelength that can be transmitted through the transparent substrate 101 and absorbed by the light absorption film. .. Examples of such a member include KTP crystal, BBO crystal, LBO crystal, CLBO crystal and the like.

The polarizing member (polarizing rotating element) 109 may be any as long as it can change the laser light after optical vortex conversion into a polarized state that can obtain a sufficient output for flying the donor material. For example, glass (crystal wavelength). Boards, etc.) and the like.

When the laser light generated by the laser light source 105 has a predetermined beam diameter and beam wavelength, the first beam diameter changing member 106, the first beam wavelength changing member 107, and the second beam wavelength converting member The 109 and the second beam diameter changing member 110 are not required.

<Supply method of molding material>
FIG. 3 is a diagram showing a state in which a flying object generator 100 is operated to supply a flying object to be a molding material to a predetermined support member 111 to form a molded body 112. The projectile 103A is mainly generated through the following steps. First, the optical vortex laser L generated by the optical vortex irradiator 104 is irradiated directly to the light absorption film 102 or through the transparent substrate 101, and the energy, momentum, and angular momentum of the optical vortex laser L are propagated. Will be done. Here, the case where the light absorption film 102 is formed on the other main surface 101b of the transparent substrate that does not face the optical vortex laser irradiation device 104 is illustrated. In this case, the optical vortex laser L However, the light absorbing film 102 is irradiated (transmitted) through the transparent substrate 101.

The light absorption film 102 is heated by the energy of the propagating optical vortex laser L, and the heat energy is propagated to the donor layer 103 and converted into the kinetic energy of the projectile 103A. At this time, the momentum and angular momentum of the optical vortex laser L are also propagated to the donor layer 103 via the light absorption film 102, and affect the movement direction of the projectile 103A.

Laser light of a general linear (columnar) has planar equiphase plane perpendicular to the irradiation direction D ₁ (the wavefront), the direction of the Poynting vector coincides with the irradiation direction D _1. Therefore, for the light-absorbing layer 102, together with the thermal energy of the laser beam propagates, momentum propagates in the irradiation direction D ₁ of the laser beam, applied pressure. Further, since the linear laser beam has the maximum intensity distribution at the center and tends to spread outward, pressure is also applied to the light absorption film 102 in the direction orthogonal to the laser beam irradiation direction D. .. It is added to the light absorption film 102 together with the heat energy. When these pressures propagate to the donor layer 103, a flying object 103A that jumps out of the donor layer 103 is generated. The flying object 103A, as the distance from a donor layer 103, radially diffused (scattered) to the irradiation direction _{D 1.}

In contrast, optical vortex laser L of the present embodiment, one axis extending in the radiation direction D _1, has an equiphase plane formed spiral as winds, the Poynting vector The direction is tilted toward the center of the optical vortex laser L. The intensity distribution of the optical vortex laser L, since the donut-shaped distribution becomes zero at the center, not that the pressure prevailing outside occurs with respect to the irradiation direction D ₁ as linear laser beam. Therefore, since the pressure of the optical vortex laser light propagating to the light absorption film and the donor layer acts on the light absorption film 102 toward the center of the optical vortex laser light, this pressure propagates through the light absorption film 102. The flying object 103A generated from the donor layer 103 converges in the central direction as the distance from the donor layer 103 increases, and as a result, becomes a flying object that advances linearly.

The flying object 103A generated by using the optical vortex laser L can fly farther (to a place where the flight distance R is 100 mm or more) by the amount of linear movement.

When a metal thin film (metal film) is used as the light absorption film 102, the frequency of the optical vortex laser to be irradiated is set to 0.2 μm or more and 10.6 μm or less, which coincides with the plasmon resonance frequency of this metal thin film. In this case, the plasmon (vibration of free electrons) that has absorbed the optical vortex laser is excited in the metal thin film, and the orbital angular momentum of the optical vortex laser is transferred to this plasmon. Since this plasmon gives the donor layer 103 an angular momentum, it is possible to generate a flying object (jet) and fly it over a long distance even when the donor material does not have light absorption.

Generation of projectile to fly towards the support member, optical vortex laser irradiation device 104, the transparent substrate 101, a support member 111, in the irradiation direction D ₁ perpendicular direction D ₃ of the optical vortex laser, suitably moved relative Do it multiple times while letting it. As a result, a predetermined number of flying objects 103A can be attached to a predetermined position of the support member 111, and finally various structures such as a film and wiring can be formed.

The molding material supply method of the present embodiment may include a step of controlling _{the flight direction D 2} of the flying object 103A by adjusting _{the irradiation direction D 1 of the optical vortex laser.} By going through this step, the molding material can be laminated not only in the direction perpendicular to the surface to be molded 111a of the support member 111 but also in any direction, so that a more complicated structure can be molded.

As the donor material, a material (ultraviolet curable resin or the like) that cures (solidifies) during flight from the donor layer 103 may be used. By using such a material, a fiber-like structure extending along the trajectory of the flying object 103A can be obtained. Fibrous structure, it is possible to suppress the thickness to about one to 10 minutes in 5 of the width of the optical vortex laser L, in the step of controlling the flight direction D _2, to adjust the shape of the bending way such Therefore, for example, it can be used as a wiring pattern for a semiconductor device or the like whose miniaturization is advancing.

The control of the flight direction is not particularly limited, but for example, the phase singular point (dark point portion of the optical vortex) of the optical vortex laser L is moved (as a non-integer optical vortex), and the phase singular point and the optical vortex are controlled. This can be done by changing the distance from the center of the laser L. When the material of the donor layer 103 is metal, the flight direction of the flying object is opposite to the moving direction of the phase singular point of the optical vortex laser L. On the contrary, when the material of the donor layer 103 is other than the metal type (resin or the like), the flight direction of the flying object is the same as the moving direction of the phase singularity of the optical vortex laser L.

<Manufacturing method of photoelectric conversion element>
In the molding material supply method described above, a support member 111 having a base layer of a photoelectric conversion layer is used, and the photoelectric conversion material is supplied to the base layer 111 as a donor material to obtain a photoelectric conversion element (flexible solar cell, light emitting). Elements, etc.) can be manufactured.

The photoelectric conversion material, for example, perovskite _{MAPbX 3-n Y n, FAPbX} 3-n Y n, CsPbX 3-n Y n (MA, FA organic molecules, X, Y is halogen ^(Cl -, Br ^-, I ^- etc.)) Precursors and the like can be used. As a method for manufacturing a photoelectric conversion element, when supplying a photoelectric conversion material, a plurality of types of donor materials (photoelectric conversion materials) of a projectile to be supplied are provided for each predetermined region of the base layer 111, and the content ratio of halogen elements is different. It may have a step of selecting from the perovskite precursors of. The type of perovskite precursor selected for each region may be singular or plural.

By going through this step, various regions containing the halogen element at a predetermined ratio can be formed on the base layer 111, and in each region, light emission of a color corresponding to the content ratio of the halogen element is performed. Can be done. Various colors can be combined by adjusting the distribution of the emitted colors.

As described above, according to the flying object generator 100 according to the present embodiment, the flying object 103A can be generated by indirectly heating the donor layer 103 via the light irradiation film 102. Therefore, in the flying object generator 100 of the present embodiment, the donor layer 103 does not need to absorb the laser beam L, and the material of the donor layer is not limited, so that the flying object has arbitrary light absorption and viscosity. Can generate a body. Further, since the donor layer 103 is not directly irradiated with the laser beam L, a material that photodecomposes can be used as the donor material.

By using the projectile generator 100 of the present embodiment, any molding material can be easily supplied to the micron-order region of the base material (support member) 111, and the structure has an arbitrary shape and size. The thing 112 can be manufactured. According to the method for supplying a molding material of the present embodiment, it is possible to manufacture a photoelectric conversion element by using a photoelectric conversion material such as perovskite as the molding material.

Hereinafter, the effects of the present invention will be made clearer by examples. The present invention is not limited to the following examples, and can be appropriately modified and implemented without changing the gist thereof.

(Example 1)
A flying object was generated using the flying object generating device according to the above embodiment. A glass substrate was used as the transparent substrate, a gold thin film (thickness 200 nm) was used as the light absorbing film, and a low-viscosity (0.1 Pa · s) liquid film was used as the donor layer. The wavelength of the optical vortex laser that irradiates the light absorption film was set to 0.532 μM. The irradiated laser pulse is a single pulse.

(Example 2)
A gold thin film was used as the donor layer, and a flying object was generated in the same manner as in Example 1 for other configurations.

(Example 3)
Liquid silicon was used as the donor layer, and a flying object was generated in the same manner as in Example 1 for other configurations.

4 (a) to 4 (c) are images of the flying object F generated from the donor layer D in Examples 1 to 3, respectively. From these images, it can be seen that the spin jet is formed by the projectile F flying in one direction regardless of the viscosity of the donor material and whether the donor material is a liquid or a solid.

(Comparative Example 1)
The optical vortex laser irradiation device was replaced with a linear laser irradiation device, and a flying object was generated in the same manner as in Example 1 for other configurations. In this case, the generated flying object is diffused in a plurality of directions, and the spin jet as in Examples 1 to 3 is not formed.

(Comparative Example 2)
A flying object was generated using a conventional flying object generating device in which a donor layer was formed on a transparent substrate. A glass substrate was used as the transparent substrate, and a low-viscosity (about 0.1 Pa · s) liquid film was used as the donor layer. Also in this case, the generated flying object is diffused in a plurality of directions, and the spin jet as in Examples 1 to 3 is not formed.

(Example 4)
An ultraviolet curable resin was used as the donor layer, and a flying object was generated in the same manner as in Example 1 for other configurations. FIG. 5 is an image of the flying object F generated from the donor layer in Example 4. From this image, it can be seen that the flying object F flies in a curved locus P and solidifies during the flight. As a result, a fiber-like structure extending along the trajectory P of the flying object F is formed.

(Example 5)
With the phase singularity (dark spot of the optical vortex) slightly moved in one direction from the center and in the other direction, the optical vortex laser is irradiated to continuously shoot multiple projectiles. I made it fly. FIG. 6 shows images of a plurality of flying objects F at each time (5 μs, 6.5 μs, 8.5 μs, 12.5 μs, 16.5 μs, 20.5 μs, 30.5 μs, 50.5 μs). It is arranged side by side. With the passage of time, the flight direction is tilted to one side (here, the right side) when the time is in the range of 6.5 μs to 8.5 μs, and the opposite side when the time is in the range of 12.5 μs to 50.5 μs. It is tilted (here, on the left side). It is considered that these inclinations are due to the fact that the rotation axis of the flying object F changes by moving the phase singular point, and the flying object F flies while deflecting (curving) in a specific direction. Further, since the tilting direction changed between 8.5 μs and 12.5 μs, it is considered that the moving direction of the phase singularity of the optical vortex laser changed between 8.5 μs and 12.5 μs.

(Example 6)
With the phase singularity moved from the center (broken line), the optical vortex laser was irradiated to continuously fly a plurality of projectiles. FIG. 7 shows the projectile F obtained when the movement distance (Phase singularity shift) from the center of the phase singularity is 0, 0.08, 0.13, 0.16, 0.18, 0.21. It is an arrangement of the images of. FIG. 8 is a graph showing the relationship between the moving distance [radian] of the phase singularity and the degree of inclination (flying angle) [degree] in the flight direction. From FIGS. 7 and 8, it can be seen that the flight angle of the flying object F is proportional to the amount of misalignment of the phase singularity.

100 ... Flying object generator 101 ... Transparent substrate 101a ... One main surface of the transparent substrate 101b ... The other main surface of the transparent substrate 102 ... Light absorbing film 103 ... Donor layer 103A・ ・ ・ Flying object 104 ・ ・ ・ Light vortex laser irradiation device 105 ・ ・ ・ Laser light source 106 ・ ・ ・ First beam diameter changing member 107 ・ ・ ・ First beam wavelength changing member 108 ・ ・ ・ Light vortex conversion member 109 ・・ ・ Second beam wavelength changing member 110 ・ ・ ・ Second beam diameter changing member 111 ・ ・ ・ Support member 111a ・ ・ ・ Surface to be molded of support member 112 ・ ・ ・ Molded body D ₁・ ・ ・ Irradiation of optical vortex laser _{Direction D 2} ... Flying direction of the flying object D ₃ ... Direction perpendicular to the irradiation direction of the optical vortex laser F ... Flying object L ... Laser L ₁ ... Linear laser L ₂ ... Optical vortex laser P ・ ・ ・ Trajectory R ・ ・ ・ Flying distance of flying object

Claims (11)

A flying object generator that generates a flying object that jumps out of a predetermined member.
With a transparent board
A light absorbing film formed on the surface of the transparent substrate and
A donor layer made of a donor material formed directly on the surface of the transparent substrate or via the light absorption film and constituting the flying object, and
A projectile generator comprising a light vortex laser irradiation device that is arranged on the side opposite to the donor layer with the transparent substrate interposed therebetween and irradiates the light absorption film with an optical vortex laser. The flying object generator according to claim 1, wherein the light absorbing film is a metal film. The projectile generator according to claim 1 or 2, wherein the donor material has an optical density of 0.1 or less. The projectile generator according to any one of claims 1 to 3, wherein the donor material is composed of a perovskite precursor. The projectile generator according to any one of claims 1 to 4, wherein the donor material is made of an ultraviolet curable resin. A method for supplying a molding material using the flying object generator according to any one of claims 1 to 5.
A support member for the molding material is arranged on the side facing the donor layer, and the support member is arranged.
By irradiating the light absorbing film with an optical vortex laser directly or through the transparent substrate, a flying object protruding from the donor layer is supplied to the support member as the molding material. Material supply method. The method for supplying a molding material according to claim 6, wherein a metal film is used as the light absorption film, and the frequency of the optical vortex laser to be irradiated is 0.2 μm or more and 10.6 μm or less. The process of controlling the flight direction of the flying object by adjusting the irradiation direction of the optical vortex laser, and
The method for supplying a molding material according to claim 6 or 7, further comprising a step of solidifying the flying object during flight. In the step of controlling the flight direction of the flying object,
The method for supplying a molding material according to claim 8, wherein the flight direction of the flying object is controlled by changing the distance between the phase singularity of the optical vortex laser and the center of the optical vortex laser. A method for manufacturing a photoelectric conversion element using the method for supplying a molding material according to any one of claims 6 to 9.
A perovskite precursor was used as the donor material.
As the support member, a member having a base layer of a photoelectric conversion layer is used.
A method for manufacturing a photoelectric conversion element, which comprises supplying the flying object to the base layer. 10. The method according to claim 10, wherein the donor material of the projectile to be supplied for each predetermined region of the base layer has a step of selecting from a plurality of types of perovskite precursors having different halogen element content ratios. Manufacturing method of photoelectric conversion element.

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