JP2009015923A - Resin film formation method and resin film formation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To successfully irradiate other face areas with light without irradiating a predetermined circumference part of a board with light without using a light shielding mask, and moreover to make a boundary of irradiation and non-irradiation clear. <P>SOLUTION: A resin film formation method for irradiating and curing a resin film being spread on the board with light is characterized in that the boundary of irradiation and non-irradiation of the second light near a setting position is made clear by irradiating up to a predetermined position before a setting position of the resin film which stops irradiation of light with a first light of which gradient of luminous intensity distribution is a gentle gradient which does not produce irregularity on the resin film at the boundary of irradiation and non-irradiation while shifting it toward an outer periphery side from a rotation center axis line side; forming a second light by controlling the first light so that the gradient of the luminous intensity distribution becomes sharp at the predetermined position; and controlling the second light so that it becomes an intensity distribution of sharp gradient set up beforehand at the setting position. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a resin film forming method and a resin film in which a light-transmitting resin film having a uniform film thickness is formed on a substrate such as an optical disk, or a resin film having a uniform film thickness is formed between substrates such as an optical disk. The present invention relates to a forming apparatus.

  In general, an optical disc (next-generation optical disc) has a structure in which one or two recording layers are formed on a transparent resin substrate having a thickness of, for example, about 1.1 mm, and is protected with a transparent resin film, or about 0.6 mm. The basic structure is a structure in which two transparent resin substrates having a thickness of 1 are laminated with a transparent adhesive resin film. In this case, these transparent resin substrates include those in which a signal recording layer is formed only on one substrate, or those in which a signal recording layer is formed on both substrates, and those in which both substrates have the same thickness, Alternatively, there is a thin transparent sheet as a light transmission protective layer. Further, there is an optical disk having a structure in which two disks having such a bonded structure are bonded with an adhesive and four transparent substrates are laminated. These structures are employed in various optical disks such as a write-once high recording density optical disk or a write-once DVD, a read-only high recording density optical disk or a read-only DVD, or a rewritable optical disk. In addition to optical disks, there are cases where a plurality of substrates such as transparent glass and lenses are bonded with an adhesive.

  In a multilayer optical disc, a technique for forming one or two resin films on a transparent resin substrate having one signal recording layer by spin coating is widely known (for example, see Patent Documents 1 and 2). . When a transparent resin film is formed by spin coating, it is difficult to produce a uniform thickness from the inner periphery to the outer periphery, and the outer periphery becomes thicker than the inner periphery. In Patent Document 1, in order to solve this problem, after applying a radiation curable resin to the entire substrate, the number of rotations of the substrate is accelerated, and radiation is irradiated during acceleration to cure the radiation curable resin. It is carried out. In addition, if the radiation curable resin is cured while rotating the substrate in order to make the thickness in the vicinity of the outer peripheral edge uniform, burrs are generated at the outer peripheral edge, so that radiation is applied to the radiation curable resin at the outer peripheral part. I try not to be irradiated. Further, in the above-mentioned Patent Document 2, when a transparent resin film is formed by spin coating, the outer peripheral portion of the resin film whose thickness is thicker than the inner periphery is covered with a mask so that radiation is not irradiated. A manufacturing method is disclosed in which an outer peripheral portion of a resin film whose thickness is increased is left in an uncured state and is flattened by gravity. It should be noted that the outer peripheral portion of the resin film whose thickness is increased may extend from the signal recording area to the outside of the signal recording area, or may be formed in the outer peripheral area of the resin film corresponding to the outside of the signal recording area.

  On the other hand, in the case of an optical disc for bonding substrates, after two substrates are stacked via an adhesive, the adhesive is spread evenly between the substrates by rotating at high speed, and the excess adhesive is shaken off, followed by a curing step In general, the adhesive is cured in a short time by irradiating ultraviolet rays from one side or both sides of the substrate. The ultraviolet irradiation is performed by continuously irradiating ultraviolet rays for a predetermined time using a UV lamp or by irradiating ultraviolet rays in a pulse manner using a xenon lamp. As another irradiation method of this ultraviolet ray, after a coating film is formed on the entire surface of the substrate by high-speed rotation, an ultraviolet spot light of a small irradiation area is sequentially irradiated from the inside to the outer periphery direction while rotating the substrate at a low speed. There has been proposed a method of curing the coating film formed in order from the inside (see, for example, Patent Document 3).

Further, as another irradiation method similar to this method, the method described in Patent Document 3 is spot light, whereas the area of the circular light is sequentially changed using a mechanical irradiation range adjustment mechanism. There is one that expands and irradiates sequentially from the inner side to the outer peripheral direction and hardens the coating film in order from the inner side (see, for example, Patent Document 4). Furthermore, when the paint film is spread, the part of the paint film that has reached the predetermined film thickness is irradiated with ultraviolet rays sequentially to determine the film thickness, so that the paint film does not move further outside. Thus, a technique for forming a uniform coating film with high accuracy has already been proposed (see, for example, Patent Document 5).
Japanese Patent No. 3742813 JP 2006-351103 A JP-A-9-161333 JP 2003-091888 A JP 2004-280927 A

  Although the above-mentioned patent document 1 does not describe a specific method for preventing radiation from being applied to the radiation curable resin at the outer peripheral part, the above-mentioned patent document 2 covers the outer periphery by covering the outer peripheral part with a mask member. The radiation curable resin at the end is prevented from being cured. However, in this method, if radiation is irradiated in the process of spreading the radiation curable resin by the spin coating method, the shaken radiation curable resin adheres to the mask member and cures. It is difficult to irradiate. Furthermore, in the radiation irradiation methods disclosed in Patent Documents 1 and 2, when radiation is performed with a spin device, the radiation curable resin that has been shaken off adheres to the inner wall of the spin device and cures, so that the radiation irradiation process is performed by spin There is a problem that it must be performed in a position different from the device. Further, since the mask member cannot shield the mask member from contact with the radiation curable resin film, the leaked radiation is irradiated to the resin film, and the boundary region between the softening and curing of the resin film is semi-cured. Therefore, it is difficult to make the thickness of the resin film uniform even if a high-speed rotation process is performed thereafter. In addition, the provision of the mask mechanism not only increases the size and complexity of the apparatus, but also increases the cost.

  As a result, the method described in Patent Document 3 is a method of irradiating a coating film on a rotating substrate spirally with spot light having a steep mountain-shaped intensity distribution and sequentially curing the coating in a spiral manner. It is. Therefore, every time the spot light having a mountain-shaped intensity distribution with a steep slope is irradiated in a spiral shape, the spot light is hardened in a spiral shape. By rapidly curing in this spiral shape, the coating film rapidly cures and shrinks in a spiral shape, and due to this rapid curing shrinkage, the coating film becomes uneven in a spiral shape and undulates. There is a problem in appearance that flatness is lowered and a spiral line is drawn in appearance. Furthermore, there is a drawback that it takes time to cure the coating film. The method described in the above-mentioned Patent Document 4 is a mechanical shutter system in which the outer diameter of the circular light increases as the irradiation time elapses and the light irradiation range is expanded. Compared to the above, the light irradiation time on the inner circumference side becomes longer, and a temperature difference occurs between the inner circumference and the outer circumference, which causes the substrate to warp. In addition, the entire apparatus becomes large and heavy, and there is a disadvantage that a cooling device for cooling the mechanical shutter is required. In particular, since the next-generation optical disc requires high-precision flatness, the occurrence of such warping cannot be ignored.

  The radiation irradiation method described in the above-mentioned Patent Document 5 is a technique for forming a uniform coating film with high accuracy. However, when the radiation irradiation width is narrow, the same problem as in the above-mentioned Patent Document 3 occurs. . The more the angle distribution of the radiation intensity distribution, the more the problem is solved. However, when the intensity distribution of the radiation is a gentle mountain shape, the irradiation boundary area becomes unclear and a wide range of irradiation is achieved. The resin film in the boundary region is insufficiently cured. Similar to the problem of the above-mentioned Patent Document 2, it is difficult to make the thickness of the resin film uniform even if a high-speed rotation process is performed thereafter.

  Therefore, the present invention mainly aims to solve the problems in the case where a resin film having a uniform film thickness is formed on the substrates using the centrifugal force generated by the high-speed rotation or a resin film having a uniform film thickness between the substrates. It is said. First, as the light to be irradiated on the light irradiation surface in order to uniformly cure the resin film, the gradient of the intensity distribution in the radial direction is irradiated from the inner peripheral side or the rotation center axis to a predetermined position before the set position. The curing shrinkage rate of the resin film at the boundary between the non-irradiation and the non-irradiation is made gentle with respect to the direction in which the curing proceeds (the direction from the inner side to the outer side of the substrate), and the resin film is not uneven. By irradiating light, and then controlling the light from its predetermined position to make the gradient of the intensity distribution steep, and irradiating light with a steep gradient of the intensity distribution from the predetermined position to the set position, almost the entire surface of the light irradiation The above-mentioned problems of Patent Documents 1 to 5 are solved while uniformly irradiating the amount of light energy.

  According to a first aspect of the present invention, a photocurable resin supplied to the substrate is spread by rotating the substrate at a high speed about a rotation center axis to form a resin film having a predetermined thickness on the substrate. In the resin film forming method in which the resin film is irradiated with light during or after being formed on the substrate, the light is irradiated to a predetermined position before the setting position of the resin film to stop the light irradiation. Irradiate the first light with a gentle gradient that does not cause unevenness in the resin film at the boundary between the irradiation and non-irradiation of the intensity distribution while shifting from the rotation center axis side to the outer peripheral side. The second light is formed by starting control so that the gradient of the intensity distribution of the first light becomes steep at the predetermined position, and the intensity distribution has a preset steep gradient at the set position. The second light is controlled at a second position near the set position. To provide a resin film forming method characterized by vivid illumination and boundaries of the non-irradiation of light.

  According to a second invention, in the first invention, the first light is a light irradiation surface of the resin film from a light irradiation start time t1 to a time t2 when the first light reaches the predetermined position. Irradiating the substrate by moving from the inner periphery side to the outer periphery side, and the second light that has started to be controlled so as to increase the gradient of the intensity distribution of the first light from the time t2. The resin film forming method is characterized in that the second light is controlled to the preset steep gradient intensity distribution at time t3 when the second light reaches the set position. .

  According to a third invention, in the first invention or the second invention, the transition speed of the first light is slower on the outer peripheral side than the rotation center side of the light irradiation surface as the irradiation time elapses. By controlling so as to provide a resin film forming method, the amount of light irradiation energy per unit area of the irradiation surface irradiated with the first light is made uniform.

  According to a fourth invention, in any one of the first invention to the third invention, the irradiation time of the first light is controlled so that the outer peripheral side becomes longer than the rotation center side of the light irradiation surface. Thus, there is provided a resin film forming method characterized in that the amount of light irradiation energy per unit area of the irradiation surface irradiated with the first light is made uniform.

  According to a fifth invention, in any one of the first invention to the fourth invention, the substrate is a disc substrate on which one or more signal recording layers are formed, and the light irradiation surface is the disc substrate. A light transmission layer formed on the signal recording layer, in a state where the light transmission layer having a predetermined thickness is formed by spreading the photocurable resin by rotating the disk substrate. The first light and the second light are applied to the light transmission layer, and after the second light is applied, the disk substrate is rotated again, and the uncured light transmission layer on the outer peripheral side is removed. Provided is a method for forming a resin film, which is characterized by planarization.

  According to a sixth aspect of the present invention, in any one of the first to fourth aspects, the transfer speed of the first light to the outer peripheral side is determined by the liquid material forming the resin film being spread. There is provided a resin film forming method characterized in that the film thickness is sequentially determined when the resin film reaches a predetermined thickness depending on the time during which the resin film reaches a predetermined thickness.

  According to a seventh aspect of the present invention, there is provided an apparatus including an ultraviolet irradiation mechanism for irradiating and curing a resin film formed on or between the substrates using a centrifugal force generated by rotation of the substrate rotation mechanism. The irradiation mechanism includes a light source that generates light irradiated on the light irradiation surface of the resin film, a control device that controls the start and stop of irradiation of the light, and a light intensity distribution change that changes a gradient of the light intensity distribution. And the intensity distribution changing mechanism has a gradient of the light intensity distribution at a boundary between light irradiation and non-irradiation up to a predetermined position before the setting position of the resin film that stops the light irradiation. The light is shifted from the rotation center axis side of the substrate toward the outer peripheral side so that light with a gentle gradient that does not cause unevenness on the film is irradiated, and the gradient of the intensity distribution of the light is at the predetermined position. Change the intensity distribution so that it becomes larger The setting becomes steep gradient preset in position, to provide a resin film forming apparatus characterized by sharpening the light irradiation and the boundary of the non-irradiation at said set position near.

  In an eighth aspect based on the seventh aspect, the light intensity distribution changing mechanism includes: a lens mechanism that changes a gradient of light intensity distribution from the light source; and the lens mechanism that is vertically upward with respect to the resin film. And when the lifting device moves the lens mechanism in a direction away from the light irradiation surface, the light moves from the light irradiation surface toward the outer peripheral side from the rotation central axis side, From the irradiation start time t1 to the time t2 when the light reaches the predetermined position, the lens mechanism changes the focus of the light so as to increase the gradient of the light intensity distribution. A resin film forming apparatus is provided.

  In a ninth aspect based on the seventh aspect, the elevating device drives the annular light forming portion and the lens mechanism when the annular light forming portion and the lens mechanism are driven away from the light irradiation surface. Provided is a resin film forming apparatus characterized in that the amount of light irradiation energy per unit area of the irradiation surface irradiated with the light is made uniform by decreasing the rising speed as the lens mechanism moves away from the light irradiation surface. To do.

  In a tenth aspect of the invention according to the seventh aspect or the ninth aspect, the annular light forming portion includes a plurality of optical fiber tip portions that guide light from the light source, and the tip portions are Provided is a resin film forming apparatus characterized in that it is an annular tip portion of an annular optical fiber, and annular light is irradiated from the annular tip surface.

  In an eleventh aspect based on the seventh aspect, the light intensity distribution changing mechanism includes a lens mechanism that changes a gradient of the intensity distribution of the spot-like light from the light source, and the light source and the lens mechanism are connected to the light source. It consists of a translation device that moves parallel to the irradiation surface, and in a state where the substrate is rotating, the translation device moves the light source and the lens mechanism in parallel on the resin film, The spot-like light moves on the light irradiation surface from the rotation center axis side toward the outer peripheral side, and a time t2 when the spot-like light reaches the predetermined position from the irradiation start time t1 of the spot-like light. In addition, a resin film forming apparatus is provided in which the lens mechanism starts to focus the spot-like light so that the gradient of the intensity distribution of the spot-like light is increased.

  In a twelfth invention according to any one of the seventh invention to the eleventh invention, the lens mechanism includes a specific wavelength cut filter so as to be positioned between the lens portion and the resin film, The specific wavelength cut filter prevents the light having a wavelength equal to or less than the specific wavelength from passing through, thereby reducing the influence of light chromatic aberration and making the boundary between light irradiation and non-irradiation at the set position Y clearer. A resin film forming apparatus is provided.

  In a thirteenth aspect based on the seventh aspect, the light intensity distribution changing mechanism includes a multidirectional moving device that shifts the light source in a direction parallel to the light irradiation surface and in a vertical direction. In the rotating state, the multi-directional moving device moves the light source in the outer peripheral direction from the rotation center axis side in parallel with the resin film, and the light reaches the predetermined position from the irradiation start time t1. At time t2, the multi-directional moving device lowers the light source and brings it closer to the resin film so that the gradient of the light intensity distribution becomes larger than that of the light before time t2. A resin film forming apparatus is provided.

  In a fourteenth aspect based on the seventh aspect, the light intensity distribution changing mechanism shifts the light source in a direction parallel to the light irradiation surface and changes an inclination angle of the light source with respect to the light irradiation surface. The movement / angle changing device includes a movable / angle changing device, and the moving / angle changing device uses the light source as the resin film from an irradiation start time t1 to a time t2 when the substrate reaches the predetermined position. The light that is moved in the outer peripheral direction from the rotation center axis side in parallel to the resin film while being inclined at a predetermined angle with respect to the light irradiation surface is inclined at a predetermined angle with respect to the light irradiation surface. When the movement / angle changing device changes the angle of the light source in the direction perpendicular to the light irradiation surface at the time t2 when the light reaches the time t2, light having a larger gradient in intensity distribution than the light before the time t2 is obtained. Said setting To provide a resin film forming apparatus characterized by irradiating up location.

  According to the first aspect of the invention, when light is irradiated from the rotation center axis side of the resin film to the set position, substantially uniform light energy is given to the light irradiation surface of the resin film without using a light shielding mask. Not only can the resin film be cured uniformly, but the boundary between light irradiation and non-irradiation at a set value can be made clear in a narrow region. Therefore, it is possible to solve the problem of deterioration in flatness due to the undulation of the conventional resin film. Further, since the irradiation light does not spread, it is possible to irradiate light at the same position as the resin film formation position without irradiating light to unnecessary portions.

  According to the second aspect of the invention, in addition to the effect obtained in the first aspect of the invention, at least the gradient of the light intensity distribution only needs to be a steep gradient set in advance at the setting position Y of the resin film. By controlling the time to change from light with a light intensity distribution with a gentle gradient to light with a light intensity distribution with a steep gradient, for example, by making it the shortest, the irradiation time of light with a gentle gradient can be lengthened, and the resin Since it does not affect the flattening of the film, it is possible to form a resin film having a uniform film thickness and better flatness.

  According to the third invention or the fourth invention, in addition to the effects obtained in any of the inventions, compensation is made for a change in illuminance associated with the transition of irradiation light having a gentle intensity distribution gradient toward the outer periphery. Since the irradiation intensity can be made uniform, the effective irradiation time of light can be shortened, the flatness of the resin film can be further improved, and the warpage of the substrate can be suppressed.

  According to the fifth aspect of the invention, a high-quality optical disk substrate having a resin film with excellent flatness can be obtained without using an optical mask or the like. Further, since the irradiation light does not spread unnecessarily, light is not irradiated to unnecessary portions, and it is possible to irradiate light with a substrate rotation mechanism formed with a resin film.

  According to the sixth aspect of the invention, in addition to the effects obtained in the first to fifth aspects of the invention, the speed at which the light is transferred to the outer peripheral side is set at the location where the resin film has a predetermined thickness. Since the speed is almost equal to the speed of transition from the peripheral side to the outer peripheral side, it is possible to solve the problems of deterioration of the flatness of the resin film and warping of the substrate caused by light irradiation.

  According to the seventh aspect of the present invention, it is possible to satisfactorily irradiate light to other surface areas without irradiating light to a predetermined outer peripheral portion of the substrate without using a light shielding mask. A device having a clear boundary can be provided. Therefore, the problem of the flatness of the resin film can be solved.

  According to the eighth invention, in addition to the effects obtained in the seventh invention, the gradient of the intensity distribution is changed by focusing the annular light by the lens mechanism, so that the desired gradient can be easily obtained. An intensity distribution having the above can be obtained, and the effect of irradiating the annular light can be reduced to such an extent that the conventional adverse effects are not substantially caused.

  According to the ninth invention, in addition to the effects obtained in the seventh invention, the light is controlled so that the energy of the light applied to the light irradiation surface is uniform. The flatness of the resin film can be improved.

  According to the tenth aspect, in addition to the effects obtained by the seventh aspect or the ninth aspect, the annular light is emitted from the annular tip surface of the optical fiber. Since the size and weight can be reduced, and since the heat radiation is small, a cooling device is not required and the size and weight can be further reduced. Therefore, the driving force of the light irradiation head can be reduced and the driving speed can be increased.

  According to the eleventh aspect of the invention, in addition to the effects obtained by the seventh aspect, the gradient of the intensity distribution is changed by focusing the spot-like light by the lens mechanism. The intensity distribution having the above can be obtained, and the effect of irradiating the spot-like light can be reduced to a level that does not substantially cause the conventional adverse effects.

  According to the twelfth invention, in addition to the effects obtained by any of the seventh to eleventh inventions, the influence of chromatic aberration can be reduced. The boundary can be made clearer.

  According to the thirteenth and fourteenth inventions, in addition to the effects obtained by the seventh invention, it is possible to omit the lens mechanism, so that it is possible to provide an apparatus that is excellent in economic efficiency. In addition, a small and lightweight device can be provided.

  An object to which the present invention is applied is not limited to a high recording density optical disc called a Blu-ray Disc (HD) or HD DVD (High Definition DVD). In such an optical disc, the non-uniformity in the thickness of the light-transmitting resin film serving as the cover layer and the transparent resin film also serving as the adhesive layer is a serious problem. In the Blu-ray Disc, the thickness of the light transmission protective layer consisting of an adhesive layer and a sheet or the light transmission protective layer consisting only of a resin film having excellent light transmission characteristics is as thin as 0.1 mm. The non-uniformity of the thickness of the resin film and the warp of the substrate have a great influence on the quality of the disc, and influence the quality of the optical disc having a high recording density. In addition, in the case of HD-DVD, which is another optical disk with high recording density, both substrates to be bonded are 0.6 mm in thickness and are the same as ordinary DVDs. The film thickness of the layer must be uniform with sufficiently high accuracy, and in any case, the uniformity of the thickness of the adhesive layer and the resin film and the reduction of the warpage greatly affect the quality of the optical disk having a high recording density. In addition, it is desired to make the film thickness of the resin film formed on various other substrates such as ordinary DVDs and compact discs more uniform and reduce the warpage of the substrate.

  First, the basics of the present invention will be described with reference to FIGS. In the present invention, light is irradiated to a set position Y just before the outer peripheral edge of the substrate 1 such as a Blu-ray disc, and the light irradiation is stopped at least once at the set position Y. However, in the case where the light irradiation is stopped up to the set position Y just before the outer peripheral edge of the substrate 1 as described above, the boundary between the light irradiation and the non-irradiation in order to prevent the wave of the resin film as described above. It is preferable to irradiate light having a gentle intensity distribution (a wide light irradiation range) that does not cause unevenness in the resin film to a set position. It is difficult to irradiate so as not to exceed the set position Y, and if the light is irradiated so as not to exceed the set position Y as much as possible, an intermediate region between light irradiation and non-irradiation before the set position Y, that is, There is a problem that the region where the curing is different and the region where the curing is insufficient is considerably widened, and the intermediate region causes a decrease in the flatness of the resin film by a subsequent process. Therefore, the present invention has a gentle gradient that does not cause unevenness in the resin film 2 at the boundary between light irradiation and non-irradiation up to a predetermined position Z before the set position Y of the resin film 2 formed by high-speed rotation. Irradiates light having an intensity distribution, starts controlling the intensity distribution of the light at a predetermined position Z, and controls the light to have at least a predetermined steep gradient intensity distribution when the light disappears at the set position Y To do.

  According to this method, the boundary between light irradiation and non-irradiation at the setting position Y becomes clear, and the intermediate region between the curing and non-curing of the resin film is narrowed. The flatness of the resin film can be improved without adversely affecting the film. In other words, in the middle region where the boundary between light irradiation and non-irradiation is unclear, some resins tend to cure, that is, the curing is insufficient, and the curing is insufficient during the next high-speed rotation process. Since the resin film in a certain area moves to the outer peripheral side due to centrifugal force, it becomes thin and lowers the flatness of the resin film. Therefore, the flatter the area where the boundary between light irradiation and non-irradiation is unclear, the flatter the resin film It is preferable for improvement. Or if the said unclear area | region has extended to the outer peripheral side of the setting position Y, the area | region will not become flat also by a subsequent high-speed rotation process, and flatness will fall anyway. The term “curing” means that the resin is solidified to such an extent that the resin film does not move partially in the outward direction by centrifugal force due to high-speed rotation.

  When an ultraviolet curable resin is used as the liquid material, the light used here is ultraviolet light. For example, as shown in FIG. 2, the first light U1 has a broad mountain-shaped intensity distribution (gradient slope) in which the light energy (intensity) gradually rises to the peak value and falls relatively slowly from the peak value. The intensity of the boundary between light irradiation and non-irradiation changes gently. That is, when the first light U1 is an annular light or a circular spot-like light, the gradient of the intensity distribution of the light width in the radial direction of the circular substrate 1 is resin at the boundary between light irradiation and non-irradiation. The light gradually changes so as not to cause unevenness in the film 2. Therefore, the light width in the radial direction of the substrate 1 in the first light U1 on the light irradiation surface 2A is larger than the light width of the second light U2 described later.

  Here, the expression that the first light U1 is a light having a gentle mountain-shaped intensity distribution means that the rising gradient of the sharp mountain-shaped intensity distribution of the second light U2, which will be described later, or the rising and falling gradients. In contrast, it means that the rising gradient or rising and falling gradient of the intensity distribution of the first light U1 is gentle. Therefore, the first light U1 may be light from a light source (not shown), or may be light obtained by expanding the light or reducing light from the light source, for example, focused light. However, the light gradually changes so as not to cause unevenness in the resin film 2 at the boundary between light irradiation and non-irradiation. Here, the rising and falling gradients of the light intensity distribution may be substantially the same or different from each other, but the rising of the light intensity distribution affects the rate of change in curing shrinkage of the resin film. In other words, the resin film is already cured when the falling edge of the light intensity distribution passes, and the falling edge of the light intensity distribution does not affect the rate of change in the curing shrinkage of the resin film. Gradient is not really a problem. The rising of the light intensity distribution refers to the gradient on the outer peripheral side (light traveling direction) of the light intensity distribution applied to the substrate 1, and the falling refers to the gradient on the central axis X side of the substrate 1.

  After the resin is spread by high-speed rotation and the resin film 2 is formed on the substrate 1 or after it is formed, the first light U1 is transmitted to the inner periphery of the resin film 2 as shown in FIG. The end 2B is irradiated. The irradiation time of the first light U1 is the time t2 when the first set time T1 elapses from the time t1 when the inner peripheral edge 2B of the resin film 2 reaches a predetermined film thickness (hereinafter referred to as the light irradiation start time t1). The first light U1 moves from the inner peripheral end 2B to the predetermined position Z before the set position Y from the inner peripheral end 2B during the first set time T1. That is, the first light U1 reaches the predetermined position Z at time t2. In the process in which the first light U1 moves, the intensity of the light changes according to the intensity distribution of the first light U1 at any irradiation location. Therefore, the first light is irradiated so that the intensity of the light becomes uniform. It is preferable that the amount of light irradiation energy per unit area of the irradiated surface to be made uniform.

  As described above, when the resin film 2 is formed by the spin coating method, the thick portion 2C having a thick film thickness is generated at the outer peripheral portion. Therefore, the setting position Y is a position immediately before the inner peripheral side of the thick portion 2C. Since the transition speed of the first light U1 is constant or changes at a predetermined speed program, the first light U1 travels from the inner peripheral end 2B of the resin film 2 to the predetermined position Z before the set position Y. The required time to shift can be accurately obtained in advance, and the required time is the first set time T1 (time t1 to t2). The first set time T1 depends on the length of a second set time T2 described later. Here, the first light U1 is light in which the gradient of the intensity distribution in the radial direction changes gently, and the boundary between light irradiation and non-irradiation exhibits a relatively unclear state, so the first light U1. In the process of moving to the outer peripheral side, even if it is irradiated discontinuously as viewed microscopically by the rotation of the substrate 1, the flatness of the coating film, the warp or the appearance problem may occur as in the past. Absent.

  As shown in FIG. 2, the second light U2 is light having a steep gradient in intensity distribution compared to the first light U1. The second light U2 is set to have an intensity distribution having a gradient such that the boundary between light irradiation and non-irradiation at the setting position Y becomes clear. That is, the second light U2 is light that changes the intensity distribution of the first light U1 to the set intensity distribution within the second set time T2 (t2 to t3), and the intensity distribution within the second set time T2. It is light that the gradient of becomes steep. Therefore, if the change speed of the light intensity distribution is fast, the second set time T2 is short, and the first set time T1 can be lengthened accordingly. On the other hand, if the speed of changing the intensity distribution is slow, the second set time T2 becomes longer, and the first set time T1 becomes shorter accordingly. The second light U2 is irradiated to the setting position Y just before the thick portion 2C of the resin film 2, and disappears without being substantially irradiated to the thick portion 2C.

  Since the surface area of a slight distance from the predetermined position Z to the set position Y is irradiated with the second light U2 having a steeper slope than the first light U1, the unit of the first light U1 up to the predetermined position Z Since the amount of light energy per area can be made substantially equal, the light energy of the entire irradiated surface of the substrate 1 can be made substantially uniform. Further, since the boundary between the irradiation of the second light U2 and the non-irradiation is clear at the set position Y, the resin film 2 is cured to the point immediately before the thick part 2C, and the thick part 2C is left uncured. It is. This makes it possible to selectively irradiate light having a desired intensity distribution without irradiating light to an area where light irradiation is unnecessary, without providing a mask member that blocks light irradiation as in the past. To. After the uncured thick portion 2C of the resin film 2 is left as it is or after an additional spin process is performed for applying a centrifugal force to the uncured thick portion 2C to flatten it. Light is irradiated and cured.

[Embodiment 1]
A method and apparatus for forming a resin film according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 3 is a view for explaining a resin film forming apparatus according to Embodiment 1 of the present invention, and FIG. 4 is a view for explaining light irradiation. FIG. 5 is a diagram showing a spin pattern SP as an example of a substrate spin program. In the first embodiment, the annular first light beam U1 having a gentle intensity distribution that does not cause unevenness in the resin film 2 at the boundary between light irradiation and non-irradiation is the light energy in the irradiation surface area. The inner diameter and the outer diameter of the annular light beam U1 are sequentially increased in accordance with the spreading speed of the resin film so that the time integral value (total light amount) of the ring is substantially uniform. By irradiating the entire light irradiation surface of the substrate 1 with a substantially uniform amount of light energy, the substrate 1 is cured from the inner peripheral side of the substrate and is determined to have a substantially constant thickness. Further, by preventing the liquid material at a location having a predetermined thickness from moving radially outward due to subsequent high-speed rotation, the film thickness of the liquid material is uniform over the entire surface of the substrate without causing warpage. And flattening the resin film. The substrate 1 is a disk substrate having one or more signal recording layers, a glass substrate, or the like. Here, a disk substrate such as a high recording density optical disk is used as the substrate 1.

  First, the outline of this resin film forming apparatus will be described with reference to FIG. 3. This resin film forming apparatus is a substrate rotating mechanism 3 that rotates the substrate 1 around the rotation center axis X according to the selected spin pattern. An ultraviolet irradiation mechanism 4 for irradiating annular ultraviolet rays, a first light U1 having a predetermined focal point is formed from the annular ultraviolet rays from the ultraviolet irradiation mechanism 4, and the focal point of the first light U1 is changed to change the second light U1. A lens mechanism 5 that forms the light U2, a lifting / lowering device 7 that moves a light irradiation head 6 including a part of the ultraviolet irradiation mechanism 4 and the lens mechanism 5 up and down, and a control device 8 that controls these devices are provided. The substrate rotation mechanism 3 is generally called a spinner, and the rotation axis 3A is moved according to a selected spin pattern (for example, a curve SP in FIG. 5) from a memory unit (not shown) of the control device 8. The rotation driving unit 3B that can be rotated, the substrate receiving table 3C fixed to the tip of the rotating shaft 3A, and the cover member 3D that prevents the liquid material from scattering to the surroundings are schematically illustrated.

  Although not shown, as an example, a rotation mechanism and a liquid substance supply mechanism having a general configuration are provided at different positions, and the discharge nozzle of the liquid substance supply apparatus is a liquid substance such as an ultraviolet curable resin. Is supplied to the substrate 1 in an annular shape. The substrate 1 to which the liquid material is supplied in an annular shape is transferred onto the substrate cradle 3C by a transport mechanism (not shown). Alternatively, as another example, it is of course possible to supply a liquid substance in an annular shape to a substrate 1 on which a discharge nozzle (not shown) capable of turning in the front and back direction of the drawing is placed on the substrate support 3C. In this case, before the ultraviolet irradiation mechanism 4 operates, the discharge nozzle (not shown) turns and retreats.

  The ultraviolet irradiation mechanism 4 includes an ultraviolet light source 4A that outputs ultraviolet light, an optical fiber cable 4B in which a large number of optical fibers are bundled, and ultraviolet light from the optical fiber cable 4B that is annular ultraviolet light (hereinafter referred to as annular light). It is roughly composed of an annular light forming portion 4C. As shown in FIG. 4A, the annular light forming portion 4C includes an annular portion 4C1 made of a transparent material on the light emitting surface side, and the tip portion of the optical fiber 4B is annularly formed on the annular portion 4C1. Has been placed. The optical fiber cable 4B is divided so that the tip portion thereof is substantially conical or spindle-shaped at the annular portion 4C1, and the annular portion 4C1 is arranged so that the tips of each optical fiber 4B are located on substantially the same plane. Embedded in an annular shape. Here, the tip portion of the optical fiber cable 4B and the annular light forming portion 4C constitute a part of the light irradiation head 6.

  The lens mechanism 5 includes a lens portion 5A for directing the annular light from the annular light forming portion 4C toward the outer peripheral side at a predetermined angle φ with respect to the rotation center axis X, and the annular light forming portion 4C and the lens portion. The focus change unit 5B changes the focal point of the annular light by changing the interval 5A. In one example, the lens mechanism 5 suppresses scattering of annular ultraviolet light emitted from the annular front end surface of the optical fiber 4B in the annular light forming portion 4C, and irradiates the substrate 1 with the annular light held at a predetermined width. Do the work. The lens portion 5A has a lens structure in which a plurality of commonly used lenses are combined, and a lens structure that can adjust the inter-lens distance so that the above functions can be performed at the same time is preferable. Various lens structures such as a combination of lenses, for example, a zoom lens structure used in a general optical camera can be used. In this embodiment, since the substrate 1 is an optical disk substrate, the distance between the lens portion 5A and the substrate 1 is preferably in the range of 10 to 500 mm from the viewpoint of the efficiency of the annular light.

  The annular light is inclined in a conical shape at a predetermined angle φ (for example, 5 to 30 degrees) with respect to the rotation center axis X. When the light irradiation head 6 is at the set lower limit position, that is, the lens unit 5A is at the set lower limit position (for example, the lower surface of the lens unit 5A is 10 mm above the substrate 1), the first light U1 that is annular light The inner diameter of the annular first light U1 is determined so that the inner peripheral portion of the resin film 2 spread on the substrate 1 can be irradiated. For example, if the inner diameter of the resin film 2 is D as shown in FIG. 4B, the inner diameter of the first light U 1 must be somewhat smaller than the inner diameter D of the resin film 2. Therefore, by moving the light irradiation head 6 upward from the lowest position by the lifting device 7, the first light U <b> 1 that has irradiated the inner peripheral portion of the resin film 2 moves toward the outer peripheral direction of the substrate 1. . Note that CP shown in FIG. 4B is a center pin located at the center of the substrate cradle 3C, and performs positioning of the substrate 1 and the like.

  The elevating device 7 has a structure including a motor (not shown) and a linear driving member that converts the rotational force of the motor into a linear driving force, and moves the light irradiation head 6 up and down. The rising speed of the light irradiation head 6 determines the spreading speed of the inner and outer diameters of the annular light irradiated from the lens mechanism 5 and will be described in detail later. Here, the lens mechanism 5 and the elevating device 7 constitute an example of a light intensity distribution changing mechanism that changes the gradient of the light intensity distribution.

  The control device 8 has a spin pattern (shown by a curve SP in FIG. 5 as an example) that provides a desired film thickness under various conditions such as the type of liquid material and the viscosity for forming the resin film 2. A plurality of data are stored in a memory (not shown). The control device 8 includes a rotation control function for controlling the rotation drive of the rotation drive unit 3B, a light control function for controlling on / off of the ultraviolet light source 4A, the curing characteristics of the resin film, and the irradiation intensity of the light output from the ultraviolet light source 4A. The ascending speed for controlling the ascending speed of the light irradiation head 6 according to the ascending speed program (shown as an example by the speed pattern VP in FIG. 5) for irradiating the entire surface of the substrate 1 with substantially uniform light energy under various conditions such as A control function, a focus adjustment function for sending a signal to the focus changing unit 5B at the time t2 described in FIG.

  Here, the control device 8 is a generic term for devices that perform control, and may of course be performed by an individual controller or the like. The spin program and the ascending speed program are stored in the memory of each control unit, read by a selection command, and controls the rotation drive unit 3B with the selected spin pattern SP to rotate the substrate 1, Then, the elevating device 7 is raised by the selected speed pattern VP to raise the light irradiation head 6. Of course, the spin program and the ascending speed program may be stored in the substrate rotating mechanism 3 and the elevating device 7, respectively.

  Next, the operation of the resin film forming apparatus of Embodiment 1 will be described. First, when a substrate 1 such as an optical disk substrate to which a liquid substance is supplied in an annular shape is placed on the substrate cradle 3C and sucked and held on the substrate cradle 3C, the substrate cradle 3C is moved by the rotation drive unit 3B. As the spin pattern SP (FIG. 5) rotates, the liquid material is spread on the substrate 1 to form a resin film 2. Here, as an example, in the spin pattern SP, as shown in FIG. 4, the rotation speed of the substrate cradle 3 </ b> C increases almost linearly from zero, and when the rotation speed reaches a set rotation speed, the rotation speed is held for a predetermined time. At a time t1 during which the rotation speed is maintained at the set rotational speed, that is, at a light irradiation start time t1 at which the inner peripheral portion of the resin film 2 made of an ultraviolet curable resin reaches a predetermined film thickness, The ultraviolet light source 4A is turned on by the signal and outputs ultraviolet light. The ultraviolet ray is converted into an annular ultraviolet ray by the annular light forming portion 4C through the optical fiber cable 4B, and the annular first light U1 from the lens portion 5A of the light irradiation head 6 located at the lowest setting position is the resin film 2. Is irradiated to the inner peripheral end 2B (FIG. 1).

  At this time, the lens unit 5A is adjusted by the focus changing unit 5B so as to exhibit a predetermined gentle focus. For example, as shown in FIG. 2, the annular first light U <b> 1 from the lens unit 5 </ b> A is focused to such an extent that the flatness and appearance of the coating film are not deteriorated in the process in which the first light U <b> 1 moves to the outer peripheral side. Is a light having an intensity distribution of a gentle mountain shape, that is, an intensity distribution of a Gaussian distribution (normal distribution) in which the gradient of the rise and fall of light energy is gentle. This normally distributed light has a peak value of illuminance at substantially the center thereof. Compared with the second light U1, the first light U1 has a wide irradiation range and a low peak value. Therefore, the resin film 2 is uneven at the boundary between light irradiation and non-irradiation when moving from the inside to the outside. It is light that does not occur, that is, annular light with a gentle change in intensity with respect to the moving direction (rise) of the light. However, as will be described later, the boundary between the irradiation and non-irradiation of the first light U1 is unclear due to the above characteristics. Almost simultaneously with the irradiation of the first light U1, the control device 8 controls the lifting device 7 with the speed pattern VP (curve VP in FIG. 5) corresponding to the selected spin pattern SP, and the light irradiation head 6 is controlled with the speed pattern VP. Raise according to.

  Accordingly, the light irradiation head 6 rises along the rotation center axis X according to the speed pattern VP, that is, moves away from the upper surface of the substrate 1, so that the inner diameter and outer diameter of the first light U1 are increased. The first light U1 moves from the inner peripheral side to the outer peripheral side. This transition speed is determined according to the time during which the resin film 2 is spread and becomes a predetermined thickness from the inside to the outside. That is, the annular first light is shifted to the outer peripheral side substantially in accordance with the spread of the liquid substance, and the film thickness is sequentially determined when the resin film 2 reaches a predetermined thickness. Then, at the time t2 when the first set time T1 elapses from the light irradiation start time t1, it is assumed that the first light U1 reaches the predetermined position Z before the set position Y described in FIG. At the same time (at time t2) when the first set time T1 elapses from t1, the control device 8 sends a signal to the focus changing unit 5B, and the focus changing unit 5B is connected to the lens unit 5A and the annular light forming unit 4C. The focus of the lens unit 5A is started to be reduced to a preset focus by changing the interval.

  With this series of functions, the first light U1 starts to be focused at time t2 corresponding to the predetermined position Z before the set position Y of the resin film 2, and becomes the second light U2. The second light U2 is a circle having at least a steep set intensity distribution as shown by the curve U2 in FIG. 2 at the set position Y corresponding to the time t3 when the second set time T2 elapses from the time t2. It becomes the annular second light U2. In this state, naturally, the light width of the second light U2 is narrower than that of the first light U1, and the peak value of light energy is larger than that of the first light U1. The transition speed of the second light U2 is determined so that the total light amount per unit area received by the irradiation surface is substantially equal to the total light amount per unit area of the first light U1 at the predetermined position Z. In some cases, the illuminance of the second light U2 is controlled. Therefore, the second light U2 is a light whose focal stop becomes stronger within the second set time T2, and if the focus change speed of the focus change unit 5B is fast, the second set time T2 can be shortened. If the focus changing speed of the focus changing unit 5B is slow, the second set time T2 becomes long. Therefore, if the second set time T2 is short, the first set time T1 can be lengthened accordingly, which is preferable. In the process of increasing the focus of the second light U2, the intensity of light emitted from the ultraviolet light source 4A is controlled by power control, which will be described later, for example, the total light amount per unit area becomes substantially constant. The peak value may be controlled.

  Then, the second light U2 has a final intensity distribution just before the set position Y, and the second light U2 of the set intensity distribution moves to the set position Y and reaches the set position Y at time t3. The control device 8 sends out an off signal to the ultraviolet light source 4A to make it disappear. In the first embodiment, since the first light U1 and the second light U2 are not irradiated except for the resin film 2, even if the same substrate rotation mechanism 3 irradiates light, the cover member 3D of the substrate rotation mechanism 3 and the like Is hardly shot. After the resin film 2 is cured to the set position Y, spin processing is performed if necessary, the uncured portion 2C is flattened, and cured by irradiation with the third light U3.

  In the first embodiment, since the light width in the radial direction of the substrate 1 of the annular first light U1 is increased by raising the light irradiation head 6, the irradiation area naturally increases accordingly. The amount of energy of the first light U1 that is radiated per contact becomes smaller toward the outer peripheral side. Therefore, in this Embodiment 1, the rising speed of the light irradiation head 6 increases as the irradiation area of the first light U1 increases so that the irradiation energy amount of the ultraviolet light irradiated to the resin film 2 becomes substantially uniform. A decreasing speed pattern VP is used. Further, a spin pattern in which the rotation speed of the substrate 1 decreases as the irradiation area of the first light U1 increases may be used in combination.

  According to this speed pattern VP, the rising speed of the light irradiation head 6 decreases as the first light U1 moves toward the outer peripheral side, so the expansion of the inner diameter and outer diameter of the first light U1 is slow. That is, since the transition speed becomes slow, the irradiation time of the first light U1 becomes long. Therefore, by selecting and combining the spin pattern SP and the speed pattern VP, the inner diameter and the outer diameter of the first light U1 are expanded, and the portion where the resin film 2 has a predetermined film thickness is from the inner peripheral side to the outer peripheral side. The time integral value of the irradiation energy of the first light U1 can be made substantially uniform over the entire irradiation surface of the substrate 1 while being substantially equal to the speed of shifting to. Therefore, according to the first embodiment, not only the resin film 2 having a uniform film thickness can be formed on the substrate 1, but also the heat distribution of the substrate 1 becomes almost uniform, so that no warpage occurs and the quality is high. An optical disk or the like on which a resin film is formed can be obtained.

  In another example of the first embodiment, the control device 8 has the above-described control function, and not only the on / off state of the ultraviolet light source 4A but also the power supplied to the ultraviolet light source 4A according to the light control program including the irradiation time and the irradiation intensity. It also has a control function for controlling. According to the light control program, the increase rate of the irradiation area of the first light U1 on the surface of the substrate 1, that is, the increase rate of the illuminance of the first light U1 in proportion to the increase of the radius of the first light U1. Therefore, the input power of the ultraviolet light source 4A is controlled. Even in this case, the time integral value of the irradiation energy of the first light U1 over the entire surface of the substrate 1, that is, the total amount of light per unit area can be made substantially uniform, and a substrate having the same quality as that of the first embodiment can be obtained. Obtainable. As the first light U1 moves to the outer peripheral side of the substrate as the distance to the substrate 1 increases, the irradiation energy per unit area of the substrate 1 decreases, so that the decrease in the irradiation energy is compensated. In addition, a spin pattern with a slow rotation speed and an ascent speed pattern with a slow ascent speed may be combined.

  In addition, when increasing the luminous intensity of the first light U1, it may of course be performed in combination with one or both of the spin pattern and the rising speed pattern as described above. The supply of the liquid substance to the substrate 1 may be performed while rotating the substrate cradle 3C at a low speed while the substrate 1 is placed on the substrate cradle 3C. In the above description of the embodiment, the resin film 2 on the substrate 1 has been described. However, in the process in which the liquid material between the substrates is bonded to each other by the centrifugal force due to high-speed rotation, The same effect can be obtained even if the first light U1 is shifted to the outer peripheral side in synchronization with the time when the film has a predetermined thickness. Further, by switching from the first light U1 to the second light U2 before the outermost periphery, the resin protruding from the outer peripheral end face between the substrates (not shown) can be left uncured, and therefore can be easily removed. Furthermore, if one of the peeling substrates (not shown) is peeled off when the resin protruding from the outer peripheral end surface of the substrate is not cured, no dust is generated during peeling, so a high-quality multilayer optical disk can be obtained. become. Even if this light irradiation is performed after the liquid material is spread over the entire surface of the substrate, the spread resin film can be cured.

  Another example of the ultraviolet irradiation mechanism 4 in the first embodiment will be described with reference to FIG. In FIG. 6, the same symbols as those used in FIGS. 1 to 5 indicate members having the same names. The example shown in FIG. 6 uses a light emitting diode LED that emits ultraviolet light instead of the ultraviolet light source 4A of the first embodiment. The plurality of light emitting diodes LED are arranged in close contact with or slightly between the annular outer wall portion 41 and the annular inner wall portion 42 of the case, and these constitute the annular light forming portion 4C. ing. In the annular light forming portion 4C of this example, the annular light forming portion 4C itself generates annular ultraviolet light in the vicinity of the lens mechanism 5. The annular light of the annular light forming portion 4C is converted into the first light U1 having the normal distribution illuminance as shown in FIG. 2 by the lens mechanism 5 similar to that described in the first embodiment, and further to the second light. Of light U2.

  The example shown in FIG. 7 uses an annular ultraviolet irradiation lamp LP having an appropriate diameter. The annular ultraviolet irradiation lamp LP is provided between the annular outer wall portion 41 and the annular inner wall portion 42 of the case, and the ultraviolet irradiation lamp LP is configured so that the emitted ultraviolet rays are almost directed toward the lens portion 5A. . The annular light forming unit 4C in this example also emits annular light in the vicinity of the lens mechanism 5 by itself. The annular light of the annular light forming portion 4C is converted into the first light U1 having the normal distribution illuminance as shown in FIG. 2 by the lens mechanism 5 similar to that described in the first embodiment, and further to the second light. Of light U2. Also in these examples, unless the light intensity control by special power control is performed, the peak value of the light energy of the second light U2 is larger than that of the first light U1.

  Accordingly, in these examples, unlike the first embodiment, a plurality of light emitting diodes LED or an annular ultraviolet irradiation lamp LP is also a light source, so that not only an optical fiber cable in which a large number of optical fibers are bundled can be omitted, but also an optical fiber cable. Instead, since the flexible and strong metal wiring can be connected to the annular light forming portions 4C1 and 4C2, the annular light forming portion 4C can be easily moved up and down, and the reliability of the apparatus Can be improved. The irradiation with the first light U1 and the second light U2 may be performed at a light irradiation position different from that of the substrate rotation mechanism 3 after the resin film 2 is formed.

  Although not shown, the annular light forming portion 4C uses two sets of conical reflecting members having similar shapes, and holds the apex of the conical reflecting member so as to be positioned at the rotation center axis X, thereby providing a conical optical path. , Irradiating the apex of the conical reflecting member with the spot-like light from the light source, and dispersing the spot-like light almost uniformly to derive the annular light. Various other configurations are conceivable, but the first embodiment is not limited by the configuration of the annular light forming portion 4C.

[Embodiment 2]
A second embodiment of the present invention will be described with reference to FIGS. FIG. 8 is a diagram for explaining the basic concept of the method of the second embodiment, and FIG. 9 is a diagram for explaining the apparatus of the second embodiment. 8 and 9, the same symbols as those used in FIGS. 1 to 7 indicate members having the same names. The second embodiment is different from the first embodiment in that the resin film is irradiated with spot-like light instead of the annular light. The spot-like light is circular light that transitions from the inner peripheral side to the outer peripheral side in parallel with the resin film that is the irradiation surface, or elliptical light that is long in the transition direction (elliptical). In the second embodiment, the substrate 1 is always rotated at a selected spin pattern or at a constant speed during the light irradiation process.

  In FIG. 8, although not shown, the ultraviolet light source 4A includes a light emitting member that emits ultraviolet light, a member that adjusts the illuminance thereof, a switch mechanism, and the like, and performs illuminance adjustment and on / off of light emission according to a signal from the control device 8. . The light emitting member of the ultraviolet light source 4A includes a laser diode, a small laser tube, a light emitting diode, or an ultraviolet lamp that emits ultraviolet light having a desired wavelength. When the light emitting member is composed of a laser diode or a light emitting diode, a plurality of laser diodes or light emitting diodes are closely arranged in a circular or oval shape as necessary to obtain a circular or oval spot light. May be. The parallel moving mechanism 10 includes a guide member 10A such as a rail, a moving member 10B that moves the guide member 10A left and right in FIG. 8, and a light irradiation head 6 that includes the ultraviolet light source 4A and the lens mechanism 5 as the moving member 10B. It consists of the coupling member 10C couple | bonded with. Note that E is a power supply line that supplies power to the ultraviolet light source 4A from a power source (not shown), and is excellent in flexibility. Here, the lens mechanism 5 and the parallel movement mechanism 10 constitute an example of a light intensity distribution changing mechanism.

  Next, the operation will be described. The rotation drive unit 3B rotates the substrate with the spin pattern selected by the signal S1 from the control device 8. As described above, at time t1 when the inner peripheral portion of the resin film 2 made of the ultraviolet curable resin becomes a predetermined film thickness by the action of the centrifugal force due to the high-speed rotation of the substrate 1, the control device 8 sends an ON signal S2 to the ultraviolet light source 4A. And the ultraviolet light source 4A is turned on to emit ultraviolet light. Since the lens portion 5A of the lens mechanism 5 has already been adjusted to the set focal point, the spot-shaped first light U1 is applied to the inner peripheral portion of the resin film 2. The focal point of the first light U1 is constant, and as described above, the first light U1 is light with a gentle aperture stop so as not to deteriorate the flatness and appearance of the coating film in the process of moving to the outer peripheral side. The light irradiation surface 2A of the resin film 2 is light having a normal distribution with a gentle gradient as described with reference to FIG. In other words, the first light U1 is a spot-like light that has a relatively unclear boundary between light irradiation and non-irradiation, and has almost no adverse effect on the resin film 2 by moving from the inside to the outside.

  Then, the control device 8 sends a signal S3 to the moving member 10B, and the moving member 10B moves in the outer peripheral direction in parallel with the substrate 1 with a preselected speed pattern. Along with this, the spot-like first light U1 moves the surface of the resin film 2 to the outer peripheral side. The speed pattern is mainly related to the time during which the ultraviolet curable resin is spread and the resin film 2 having a predetermined thickness is formed from the inside to the outside, and the first light U1 moves in the outer peripheral direction. It is determined in consideration of the changing peripheral speed. Thus, the spot-shaped first light U1 is shifted to the outer peripheral side in accordance with the spread of the liquid material, and the film thickness is sequentially determined when the resin film 2 reaches a predetermined thickness. The first light U1 is emitted from the light irradiation start time t1 to the time t2 when the first set time T1 elapses. At the same time t2, the control device 8 sends a signal S4 to the focus changing unit 5B of the lens mechanism 5, and the focus changing unit 5B changes the distance between the lens unit 5A and the resin film 1 to a set value. Do. Since this change operation is mainly a mechanical operation, a time longer than the minimum time necessary for changing the focus, that is, the second set time T2 is required.

  The spot-shaped first light U1 becomes the second light U2 when the time t2 elapses. The second light U2 is strongly focused during the second set time T2 from the start of change of the focus of the lens unit 5A to the end of change by the focus changing unit 5B, and has a steep slope as shown in FIG. Has a normal distribution of intensity distribution. Therefore, unless the light intensity control by special power control is performed, the peak value of the light energy of the second light U2 is larger than that of the first light U1. Then, the second light U2 reaches the setting position Y of the resin film 2 at time t3 when the second setting time T2 has substantially elapsed from time t2, and at the setting position Y, the focus of the second light U2 reaches at least the setting value. It is squeezed. During the period in which the first light U1 and the second light U2 are applied to the resin film 2, the substrate 1 is rotated by, for example, the spin pattern SP shown in FIG. 5, and the first light U1 is as described above. Since the boundary between light irradiation and non-irradiation is relatively unclear, the first light U1 is irradiated discontinuously when viewed in a very short time in the process of moving to the outer peripheral side. As in the prior art, a decrease in the flatness of the coating film can be suppressed, and no problem in appearance occurs.

  Next, correction of chromatic aberration will be described. In the above embodiment, ultraviolet rays are used as light. However, the ultraviolet rays from an ultraviolet light source (not shown) are mostly light having a wavelength of, for example, 200 to 400 nm. In general, because the refractive index of a lens with respect to wavelength is different, even if light is incident on the same surface area of the lens, light with different wavelengths is refracted by the lens with different refractive indexes, and light rays from the lens are slightly different. The light irradiation surface is shifted and irradiated. Even if the intensity distribution of light is controlled to have a steep slope as described above due to the effect of chromatic aberration, the boundary between light irradiation and non-irradiation is not sufficiently sharpened due to the effect of chromatic aberration. This increases the width of the insufficiently cured region of the resin film.

  In order to reduce the influence of such chromatic aberration and make the boundary between light irradiation and non-irradiation depending on the wavelength of light clear, the lens mechanism 5 has a wavelength of a predetermined wavelength or less between the lens portion 5A and the substrate 1. A cut filter (not shown) that does not allow light to pass through is provided. As an example, by using a cut filter that removes ultraviolet light having a wavelength of 300 nm or less, light irradiated to the resin film 2 of the substrate 1 is mostly ultraviolet light having a wavelength of 300 to 400 nm, and the light shift due to the difference in wavelength. Therefore, naturally, the boundary between light irradiation and non-irradiation at the set position Y of the resin film 2 becomes clear. In addition, it is preferable that this cut filter does not correct the chromatic aberration of ultraviolet rays irradiated to the predetermined position Z.

[Embodiment 3]
A third embodiment of the present invention will be described with reference to FIG. 10, the same symbols as those used in FIGS. 1 to 9 indicate members having the same names. In this embodiment, spot-like ultraviolet rays are irradiated onto the resin film 2, but without changing the focal point of the light (ultraviolet rays) by the lens mechanism in the middle, the ultraviolet light source 4A that generates ultraviolet rays is lowered in the middle to produce spot-like light. It is characterized in that the spread of (ultraviolet rays) is reduced and the intensity distribution of the normal distribution is steeply inclined. Since the apparatus configuration has many parts similar to the apparatus shown in FIG. 8, the description will be made with reference to FIG. In this apparatus, it is convenient that at least a part of the coupling member 10C of the moving mechanism 10 shown in FIG. 8 is composed of an expansion / contraction member (not shown) made of a cylinder member that expands and contracts. In the third embodiment, since it is not necessary to change the focal point of changing the focal point of the first light U1 to form the second light U2, the lens mechanism can be omitted.

  In the apparatus that realizes this method, a multi-directional moving device (not shown) corresponding to the parallel moving mechanism 10 is located away from the resin film 2 as compared with the second embodiment. Although the operation of the multidirectional moving device will be described later, this multidirectional moving device constitutes an example of a light intensity distribution changing mechanism and has a known mechanism for moving the ultraviolet light source 4A in the horizontal direction and the downward direction. Compared with the second embodiment, the ultraviolet light source 4A is further away from the resin film 2, and the ultraviolet light emitted from the ultraviolet light source 4A spreads and the intensity of the normal distribution having a gentle inclination on the light irradiation surface 2A of the resin film 2 It becomes the 1st light U1 which has distribution. The intensity distribution of the first light U1 is constant. As described above, the first light U1 has a light intensity that is gentle enough not to deteriorate the flatness and appearance of the coating film in the process of moving to the outer peripheral side. It is. That is, the first light U1 is a light having a wide irradiation range where the boundary between light irradiation and non-irradiation is relatively unclear, and the flatness of the resin film 2 is hardly adversely affected by shifting from the inside to the outside. Light.

  The spot-shaped first light U1 moves to the outer peripheral side in parallel with the resin film 2 in accordance with the spread of the liquid substance, and the resin film 2 rotating with the selected spin pattern has a predetermined thickness. The film thickness is determined sequentially at that time. The spot-shaped first light U1 becomes the second light U2 when the time t2 elapses. At time t2, the control device 8 sends a signal to an expansion / contraction member (not shown) such as a cylinder member of the multidirectional movement device, and the ultraviolet light source 4A is lowered downward by extending the expansion / contraction member. That is, the ultraviolet light source 4A descends to the setting lower limit position while moving in the horizontal direction from time t2 to time t3 after the elapse of the second setting time T2, and at this time, the second light U2 reaches the setting position Y of the resin film 2. Reach. Naturally, the spot-like second light U2 at the setting position Y is less spread than the spot-like first light U1, and the distance between the ultraviolet light source 4A and the resin film 2 is short. Since the attenuation is small, the irradiation range on the light irradiation surface 2A becomes narrow, the peak value of the light illuminance increases, and the gradient of the intensity distribution, which is a normal distribution, becomes steep, so the boundary between ultraviolet irradiation and non-irradiation Becomes clear.

  Accordingly, the resin film 2 is cured to the point immediately before the thick portion 2C where the thickness is increased at the outer peripheral portion, and the thick portion 2C is left uncured. That is, since the final intensity (illuminance) of the second light U2 at the setting position Y is sharp, the width of the intermediate region between the cured and uncured regions can be minimized and thickened at the outer peripheral portion. This serves to flatten the portion 2C. In the third embodiment, the minimum time required for the ultraviolet light source 4A to descend from the initial height to the set lower limit position is required, and the gradient of the intensity distribution of the second light U2 becomes steep as the time elapses. Going inclined. Although the time can be adjusted, the irradiation time of the first light U1 can be lengthened, so that a shorter time is preferable. In the third embodiment, since it is not necessary to change the focal point of changing the focal point of the first light U1 to form the second light U2, the lens mechanism 5 can be omitted. For example, in a structure in which an ultraviolet ray source generating ultraviolet rays irradiates the ultraviolet rays from a cylindrical barrel having an appropriate diameter, the lens mechanism 5 can be omitted, and the cost is excellent. In addition, the apparatus can be reduced in size and weight.

[Embodiment 4]
With reference to FIG. 11, a spot-shaped light irradiation method according to the fourth embodiment of the present invention will be described. In FIG. 11, the same symbols as those used in FIGS. 1 to 10 indicate members having the same names. The fourth embodiment is also basically the same as the second and third embodiments, and the formation method of the first light and the second light is different. As shown in FIG. 11, the ultraviolet light source 4A that generates ultraviolet rays is inclined at an angle from the rotation center axis X of the disk-shaped substrate 1 to the outer peripheral direction or from the outer peripheral direction to the rotation center axis X, A first spot U1 having a larger area than the light emitting surface of the ultraviolet light source 4A is formed on the irradiation surface of the resin film 2 by forming a predetermined angle gradient of the ultraviolet irradiation angle with respect to the irradiation surface. The second light source U2 having a higher illuminance than the first light U1 is obtained by setting the ultraviolet light source 4A substantially perpendicular to the irradiation surface of the resin film 2 to obtain the second light U2. There are features.

  The moving / angle changing mechanism 11 constitutes an example of a light intensity distribution changing mechanism, and includes a guide member 11A such as a rail, a moving member 11B that moves the guide member 11A left and right in FIG. 8, and one end coupled to the moving member 11B. The connecting member 11C and the angle changing member 11D connected to the other end of the connecting member 11C. The angle changing member 11D has a function of rotating the ultraviolet light source 4A at a certain angle around the fulcrum shaft 11E. The substrate rotation mechanism is the same as the substrate rotation mechanism 3 of the above embodiment. The angle changing member 11D receives the command signal C1 from the control device 8 in advance and tilts the ultraviolet light source 4A to a predetermined angle. The tilt angle θ is arbitrary, for example, an angle selected in the range of 20 to 60 degrees.

  As described above, at the light irradiation time t1 when the inner circumference of the resin film 2 on the substrate 2 becomes a desired thickness by the high speed rotation of the substrate rotating mechanism 3, the control device 8 first sends a command signal C2 to the ultraviolet light source 4A. It is turned on to generate ultraviolet light that becomes the first light U1. Since the ultraviolet light source 4A is inclined at a predetermined angle with respect to the light irradiation surface, the first light U1 is irradiated to the light irradiation surface while being inclined. Accordingly, the intensity distribution is a gradual mountain shape similar to the distribution shown by the curve U1 in FIG. 2, particularly a mountain shape having a gradual slope at the fall (rotation center side) compared to the rise (outer circumference side). The peak value of the distribution is biased to one side. The control device 8 sends the command signal C3 to the moving member 10B substantially simultaneously with the command signal C2 or with some delay. As described in the second embodiment, the moving member 11B moves in the outer circumferential direction with a predetermined speed pattern. Accordingly, the first light U1 also moves in the outer peripheral direction with the predetermined speed pattern.

  Then, at time t2 corresponding to a certain position before the set position Y of the substrate 1, the control device 8 sends a command signal C1 to the angle changing member 11D. Upon receiving the command signal C1, the angle changing member 11D rotates the set angle clockwise about the fulcrum shaft 11E, and directs the ultraviolet light source 4A in a direction substantially perpendicular to the light irradiation surface, that is, the resin film 2. Therefore, the first light U1 whose intensity distribution is substantially constant from time t1 to time t2 becomes second light U2 whose irradiation area becomes narrower from time t2. When the second light U2 substantially reaches the set position Y (time t3), at least the ultraviolet light source 4A is oriented in a direction substantially perpendicular to the resin film 2.

  Therefore, the second light U2 has a normal distribution with a steep normal distribution in which the rising and falling of the intensity distribution at the set position Y of the resin film 2 are equal, and the boundary between irradiation with ultraviolet light and non-irradiation becomes clear. Since the light rises, the resin film 2 is cured to the point immediately before the thick portion 2C of the outer peripheral portion, and the thick portion 2C is left uncured. That is, since the rising of the final intensity distribution of the second light U2 at the setting position Y is steep, the region between the cured and uncured regions can be minimized, and the portion that becomes thicker at the outer peripheral portion Useful for 2C planarization. In the fourth embodiment, the time required for the ultraviolet light source 4A to be substantially perpendicular from the initial tilt angle is necessary, and the intensity distribution of the second light U2 is sharp as time elapses. It will become. Although the time can be adjusted, it is preferable that the time is short from the viewpoint that the irradiation time of the first light U1 can be lengthened. In this case, the peak value of the intensity distribution of the second light U2 is larger than that of the first light U1. Further, the gradient angle of the ultraviolet light source 4A may be opposite to that shown in the figure, and in this case, the rising (outer peripheral side) is a mountain with a gentler slope than the falling (rotation center side).

  Also in the fourth embodiment, the spot-like first light U1 moves to the outer peripheral side in parallel with the resin film 2 in accordance with the spread of the liquid substance, and the resin film 2 rotating with the selected spin pattern is obtained. It is preferable to sequentially determine the film thickness when the predetermined thickness is reached. However, after the resin film 2 having a substantially predetermined film thickness is formed, it is transferred to another substrate rotating device (not shown), You may irradiate 1st light U1 and 2nd light U2 as mentioned above, rotating.

  In Embodiments 2 to 4 described above, since the spot light is circular or oval (elliptical), it is desired to form the resin film 2 on the entire surface including the rotation center point on the upper surface of the substrate such as a glass plate. It is possible to deal with cases. Even in the case of annular light as in the first embodiment, it is possible to deal with a case where the resin film 2 is desired to be formed on the entire surface including the rotation center point by bringing the lens portion close to the vicinity of the resin film. The entire surface including the central surface area of the resin film 2 of the substrate can be cured with an irradiation energy having a substantially uniform time integral value, and a high quality substrate having a uniform film thickness and a resin film with excellent flatness is obtained. Can do. In the second to fourth embodiments, the first light U1 and the second light U2 are generated from the same light source. However, the first light U1 and the second light U2 may be generated from separate light sources.

  In this case, for example, a second light source that generates the second light U2 near the set position Y of the substrate 1 is provided, and when the first light U1 arrives just before the set position Y, The second light source may be turned on to irradiate the set position Y of the substrate 1 with the second light U2. Further, the annular first light U1 described in the first embodiment and the spot-shaped second light U2 as described in the second to fourth embodiments may be combined. As in the first embodiment, the intensity of light may be increased as the spot-shaped light shifts to the outer peripheral side.

  As described above, the present invention is particularly useful when a uniform and thin cover layer is formed on an optical disk substrate of an optical disk having a high recording density. It is also useful when a resin film having a uniform film thickness is formed between various substrates and bonded together, or when a resin film having a uniform film thickness is formed on various substrates. In addition, when bonding substrates together, an adhesive is supplied on one substrate in an annular or dot shape, and the other substrate is superposed on it and rotated at a high speed to put the adhesive between the substrates. The resin film 2 is formed by spreading, and when the resin film 2 reaches a predetermined thickness, the resin film 2 is sequentially determined by irradiating the annular light through the other substrate as described above. May be. Further, the first light irradiation may be performed as described above in a state in which the rotation of the substrate is stopped or the number of rotations is reduced when the resin film has reached a substantially constant thickness up to the set value Y. . At this time, the second light irradiation is the same as described above.

It is a figure for demonstrating the resin film formation method which concerns on this invention. It is a figure for demonstrating the light used for the resin film formation method concerning this invention. It is a figure for demonstrating an example of the formation method of the resin film which concerns on Embodiment 1 of this invention, and the apparatus which implement | achieves the method. It is a figure for demonstrating an example of the annular | circular shaped light formation part used for Embodiment 1. FIG. It is a figure which shows an example of the raise speed of the spin pattern of the board | substrate in Embodiment 1, and a light irradiation head. It is a figure for demonstrating another example of the annular | circular shaped light formation part used for Embodiment 1. FIG. It is a figure for demonstrating another example of the annular | circular shaped light formation part used for Embodiment 1. FIG. It is a figure for demonstrating an example of the formation method of the resin film which concerns on Embodiment 2 of this invention, and the apparatus which implement | achieves the method. It is a figure for demonstrating the formation method of the resin film which concerns on Embodiment 2 of this invention. It is a figure for demonstrating the formation method of the resin film which concerns on Embodiment 3 of this invention. It is a figure for demonstrating an example of the formation method of the resin film which concerns on Embodiment 4 of this invention, and the apparatus which implement | achieves the method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... Resin film 2A ... Light irradiation surface 2B ... Inner peripheral edge of resin film 3 ... Substrate rotation mechanism 3A ... Rotating shaft 3B ... Rotation drive part 3C .. Substrate cradle 3D ... Cover member 4 ... UV irradiation mechanism 4A ... UV light source 4B ... Optical fiber cable 4C ... Annular light forming part 4C1 ... Annular part 5. Lens mechanism 5A ... Lens unit 5B ... Focus changing unit 6 ... Light irradiation head 7 ... Elevating device 8 ... Control device 9 ... Rotating shaft 10 ... Parallel movement mechanism 11. .. Movement / angle changing mechanism 11A: guide member 11B ... moving member 11C ... coupling member 11D ... angle changing member 11E ... fulcrum shaft 41 ... annular outer wall 42 of the case 42 ... An annular inner wall of the case CP ... Center pin of the board cradle LED ... Light emitting diode X ... Center axis of rotation Y ... Setting position of resin film 2 U1 ... First light U2 ... Second light D ... Inner diameter of resin film 2 E. ..Power supply line SP ... Spin pattern VP ... Speed pattern

Claims (14)

While the photocurable resin supplied to the substrate is spread by rotating the substrate at a high speed around the rotation center axis, a resin film having a predetermined film thickness is being formed on the substrate, or the substrate In the resin film forming method in which the resin film is cured by irradiating light after being formed,
A gentle gradient in which the gradient of the light intensity distribution does not cause unevenness on the boundary between light irradiation and non-irradiation until a predetermined position before the set position of the resin film where the light irradiation is stopped The first light is irradiated while moving from the rotation center axis side toward the outer peripheral side,
The second light is formed by starting control so that the gradient of the intensity distribution of the first light is steep at the predetermined position, and the intensity distribution has a preset steep gradient at the set position. A method for forming a resin film, comprising: controlling the second light to sharpen a boundary between irradiation and non-irradiation of the second light in the vicinity of the set position. In claim 1,
From the light irradiation start time t1 to the time t2 when the first light reaches the predetermined position, the first light moves from the inner peripheral side to the outer peripheral side of the light irradiation surface of the resin film, and Irradiate the substrate,
From the time t2, the substrate is irradiated with the second light that has been controlled to increase the gradient of the intensity distribution of the first light,
The resin film forming method, wherein the second light is controlled to have an intensity distribution with a steep gradient set in advance at time t3 when the second light reaches the set position. In claim 1 or claim 2,
By controlling the transition speed of the first light so that the outer peripheral side becomes slower than the rotation center side of the light irradiation surface as the irradiation time elapses, the irradiation surface of the irradiation surface irradiated with the first light is controlled. A method for forming a resin film, characterized in that the amount of light irradiation energy per unit area is made uniform. In claim 1 or claim 2,
By controlling the irradiation time of the first light so that the outer peripheral side becomes longer than the rotation center side of the light irradiation surface, the light irradiation energy per unit area of the irradiation surface irradiated with the first light A resin film forming method, characterized in that the amount is uniform. In any one of Claim 1 thru | or 4,
The substrate is a disc substrate on which one or more signal recording layers are formed,
The light irradiation surface is a light transmission layer formed on the signal recording layer of the disk substrate,
The first light and the second light are transmitted through the optical disk in a state where the photocurable resin is spread by rotating the disk substrate to form the light transmitting layer having a predetermined thickness. The layer is irradiated,
After irradiating the second light, the disk substrate is rotated again to flatten the uncured light transmission layer on the outer peripheral side. In any one of Claim 1 thru | or 4,
The transition speed of the first light to the outer peripheral side depends on the time during which the liquid material forming the resin film is spread and the resin film reaches a predetermined thickness, and the resin film has a predetermined thickness. A method for forming a resin film, characterized in that the film thickness is sequentially determined at a point of time. In an apparatus equipped with an ultraviolet irradiation mechanism that irradiates and cures a resin film formed on or between substrates using centrifugal force generated by the rotation of the substrate rotation mechanism.
The ultraviolet irradiation mechanism is
A light source that generates light irradiated on the light irradiation surface of the resin film;
A control device for controlling irradiation start and irradiation stop of the light;
A light intensity distribution changing mechanism for changing a gradient of the light intensity distribution;
With
The intensity distribution changing mechanism has an unevenness in the resin film at a boundary between light irradiation and non-irradiation in a gradient of the light intensity distribution to a predetermined position before the set position of the resin film where the light irradiation is stopped. The light is shifted from the rotation center axis side of the substrate toward the outer peripheral side so that light with a gentle gradient is irradiated so that the gradient of the light intensity distribution becomes large at the predetermined position. The light intensity distribution has a steep slope set in advance at the set position, and the light irradiation and non-irradiation boundaries in the vicinity of the set position are sharpened. In claim 7,
The light intensity distribution changing mechanism includes a lens mechanism that changes the gradient of the light intensity distribution from the light source, and a lifting device that moves the lens mechanism vertically upward with respect to the resin film,
When the lifting device moves the lens mechanism in a direction away from the light irradiation surface, the light moves from the light irradiation surface toward the outer peripheral side from the rotation center axis side,
From the irradiation start time t1 to the time t2 when the light reaches the predetermined position, the lens mechanism changes the focus of the light so as to increase the gradient of the light intensity distribution. Resin film forming device. In claim 7,
The elevating device is lifted as the annular light forming portion and the lens mechanism are separated from the light irradiation surface when the annular light forming portion and the lens mechanism are driven so as to be separated from the light irradiation surface. A resin film forming apparatus characterized in that a light irradiation energy amount per unit area of an irradiation surface irradiated with the light is made uniform by reducing a speed. In claim 7 or claim 9,
The annular light forming portion includes a plurality of optical fiber tip portions that guide light from the light source, and the tip portion is an annular tip portion of an annular optical fiber, A resin film forming apparatus, wherein annular light is irradiated from an annular tip surface. In claim 7,
The light intensity distribution changing mechanism includes: a lens mechanism that changes a gradient of the intensity distribution of spot-like light from the light source; and a translation device that moves the light source and the lens mechanism in parallel to the light irradiation surface. Become
In the state where the substrate is rotating, the parallel movement device moves the light source and the lens mechanism in parallel on the resin film, so that the spot-like light is moved along the rotation center axis along the light irradiation surface. From the side toward the outer periphery,
From the irradiation start time t1 of the spot-like light to the time t2 when the spot-like light reaches the predetermined position, the lens mechanism starts to focus the spot-like light, and the intensity distribution of the spot-like light is changed. A resin film forming apparatus, wherein the gradient is changed so as to increase. In any one of Claims 7 thru | or 11,
The lens mechanism is provided with a specific wavelength cut filter so as to be positioned between the lens portion and the resin film, and the specific wavelength cut filter does not allow the light having a wavelength equal to or less than the specific wavelength to pass, thereby causing chromatic aberration of light. A resin film forming apparatus characterized in that the influence of light is reduced and the boundary between light irradiation and non-irradiation at the set position Y becomes clearer. In claim 7,
The light intensity distribution changing mechanism includes a multidirectional moving device that shifts the light source in a direction parallel to the light irradiation surface and in a vertical direction,
In a state where the substrate is rotating, the multi-directional moving device moves the light source in the outer peripheral direction from the rotation center axis side in parallel to the resin film,
At the time t2 when the light reaches the predetermined position from the irradiation start time t1, the multidirectional moving device lowers the light source and approaches the resin film, so that the light is emitted more than the light before the time t2. A resin film forming apparatus, wherein the gradient of the intensity distribution is increased. In claim 7,
The light intensity distribution changing mechanism includes a movement / angle changing device capable of changing the tilt angle of the light source with respect to the light irradiation surface while moving the light source in a direction parallel to the light irradiation surface,
While the substrate is rotating, from the irradiation start time t1 to the time t2 when the substrate reaches the predetermined position, the movement / angle changing device tilts the light source at a predetermined angle with respect to the resin film. Move in parallel to the resin film from the rotation center axis side to the outer circumferential direction,
At time t2 when the light irradiated at a predetermined angle with respect to the light irradiation surface reaches the predetermined position, the moving / angle changing device makes the angle of the light source perpendicular to the light irradiation surface. By changing the direction, the resin film forming apparatus irradiates the set position with light having a larger intensity distribution gradient than the light before time t2.

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