JP2021086842A - Component mounting machine and nozzle blow pressure calibration method - Google Patents

Abstract

To eject gas suitable for detachment of a component by a nozzle while suppressing the increase in the number of components and the cost.SOLUTION: A difference between two positive pressure introduction holes Hl and Hr in the flow rate of gas flowing from positive pressure introduction pipes 61l and 61r into the positive pressure introduction holes Hl and Hr is adjusted by a positive pressure supply mechanism 6. Therefore, it is possible to make the flow rates of the gas ejected from each nozzle N uniform to realize the ejection of the gas from a nozzle N suitable for the detachment of a component E. Moreover, the positive pressure supply mechanism 6 adjusts a difference in gas flow rate not for all 18 nozzles N, but for two nozzles N at working positions Sl and Sr of the 18 nozzles N.SELECTED DRAWING: Figure 7

Description

The present invention relates to a technique for supplying positive pressure to a plurality of nozzles arranged in a circumferential shape in a so-called rotary type mounting head.

Patent Document 1 describes a rotary type mounting head provided with a plurality of nozzles arranged in a circumferential shape. This mounting head supplies a negative pressure to the nozzle to attract parts to the nozzle. Further, when the component is mounted on the substrate, the component is separated from the nozzle by supplying a positive pressure to the nozzle. Specifically, as shown in FIG. 41, the air supply source and the nozzle are connected to each other, and a variable throttle valve is provided in the connection path between the air supply source and the nozzle. Then, a positive pressure corresponding to the opening degree of the throttle valve is supplied to the nozzle.

Japanese Patent No. 3802955

By the way, the rotary head can be configured by arranging nozzle holders for holding a plurality of nozzles arranged in a circumferential shape in a hollow portion provided in the housing. In such a configuration, the nozzle holder is provided with a plurality of positive pressure communication passages corresponding to a plurality of nozzles, while the housing is provided with a predetermined number of positive pressures corresponding to a predetermined number (for example, two) working positions. The introduction hole penetrates. Then, among the plurality of positive pressure communication passages, the opening of the positive pressure communication passage corresponding to the nozzle located at the working position faces the opening of the positive pressure introduction hole, and the nozzle at the working position and the positive pressure input hole of the housing communicate with each other. To do. As a result, positive pressure can be supplied to the nozzle from the positive pressure introduction hole through the positive pressure communication passage of the nozzle holder.

By the way, in the rotary head having the above configuration, the nozzle holder may be arranged eccentrically with respect to the hollow portion of the housing. In such a case, since the size of the gap between the inner wall of the housing and the outer wall of the nozzle holder differs depending on each positive pressure introduction hole, the amount of gas leaking from the gap differs in each positive pressure introduction hole, and each nozzle The flow rate and pressure of the gas ejected from the gas vary. As a result, it has been difficult to realize the ejection of gas from the nozzles suitable for detaching the parts in all the nozzles.

For such a problem, for example, a throttle valve shown in Patent Document 1 can be used. However, if such a throttle valve is provided for each nozzle, the number of components increases and the cost increases. In this respect, Patent Document 1 has room for improvement.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of ejecting a gas suitable for separation of parts by a nozzle while suppressing an increase in components and an increase in cost.

The component mounting machine according to the present invention has a main body surrounding the hollow portion and L positive pressure introduction holes provided corresponding to L (L is an integer of 2 or more) working positions, and has positive pressure. A housing in which the introduction holes penetrate the main body and open into the hollow portion, and M pieces (M is from L) arranged in the hollow portion rotatably with respect to the housing around a predetermined rotation center and arranged in a circumferential shape. A nozzle holder that holds a nozzle (a large integer), a positive pressure source that outputs positive pressure, and L positive pressure introduction holes are provided to connect the corresponding positive pressure introduction holes and positive pressure sources, respectively. An adjusting unit that adjusts the difference between the L positive pressure introduction paths and the L positive pressure introduction holes of one of the target values of the pressure and flow rate of the gas flowing into the positive pressure introduction holes from the positive pressure introduction path. The nozzle holder is provided with M positive pressure communication passages provided corresponding to the M nozzles, and the rotation of the nozzle holder allows the L work positions of the M nozzles to be set. The L positive pressure communication passages located are switched, and among the M positive pressure communication passages, the openings of the L positive pressure communication passages corresponding to the L nozzles located at the L work positions are L positive pressure introduction holes. The L nozzles and the L positive pressure input holes communicate with each other so as to face the opening of.

In the present invention (parts mounting machine) configured in this way, nozzle holders for holding M nozzles arranged in a circumferential shape are arranged in a hollow portion provided in the housing. The nozzle holder is provided with M positive pressure communication passages corresponding to M nozzles, while the housing has L corresponding to L working positions (L is an integer of 2 or more smaller than M). The positive pressure introduction hole penetrates. Then, among the M positive pressure communication passages, the openings of the L positive pressure communication passages corresponding to the L nozzles located at the L work positions face the openings of the L positive pressure introduction holes, and the work is performed. The L nozzles at the position and the L positive pressure input holes of the housing communicate with each other. As a result, positive pressure can be supplied from the L positive pressure introduction holes to the L nozzles through the L positive pressure communication passages of the nozzle holder.

Further, in the present invention, the difference between the L positive pressure introduction holes of one of the target values of the pressure and the flow rate of the gas flowing into the positive pressure introduction holes from the positive pressure introduction path is adjusted by the adjusting unit. Therefore, even if the nozzle holder is eccentrically arranged with respect to the hollow portion of the housing and the size of the gap between the inner wall of the housing and the outer wall of the nozzle holder differs depending on each positive pressure introduction hole, the gas is ejected from each nozzle. It is possible to make the flow rate and pressure of the gas to be generated uniform, and to realize the ejection of the gas from the nozzle suitable for separating the parts. Moreover, since the adjusting unit adjusts the difference between the target values not for all the M nozzles but for the L nozzles out of the M nozzles, it requires a small number of components. The adjustment unit can be configured. In this way, in the present invention, it is possible to execute the ejection of gas suitable for detachment of parts by the nozzle while suppressing the increase of components and the cost increase.

Further, among the L positive pressure introduction holes, the gap between the inner wall of the main body provided with one positive pressure introduction hole and the nozzle holder is the inner wall of the main body provided with the other positive pressure introduction hole and the nozzle. Narrower than the gap between the holder, the adjustment unit is a component mounting machine so that the target value of the gas flowing into one positive pressure introduction hole is smaller than the target value of the gas flowing into the other positive pressure introduction hole. May be configured. In such a configuration, there is a gap between the inner wall of the main body provided with any one of the L positive pressure introduction holes and the nozzle holder, and another positive pressure introduction hole different from the one positive pressure introduction hole. Depending on the difference between the inner wall of the main body provided with the positive pressure introduction hole and the gap between the nozzle holders, the target value of the gas flowing into one positive pressure introduction hole flows into the other positive pressure introduction hole. It is set smaller than the target value of gas. As a result, the flow rates and pressures of the gases ejected from the L nozzles located at the L working positions can be made uniform, and the nozzles can eject the gas suitable for separating the parts.

The difference in the gap between the main body and the nozzle holder includes a difference caused by a tolerance and a difference caused intentionally. In the latter case, the gap between the inner wall of the main body provided with one positive pressure introduction hole and the nozzle holder is the gap between the inner wall of the main body provided with the other positive pressure introduction hole and the nozzle holder. The body and nozzle holder are designed to be narrower.

Further, the component mounting machine may be configured so that L is 2. In such a configuration, the adjustment of the difference between the target values is performed by limiting the target to the two nozzles. Therefore, it is possible to more reliably suppress the increase in the number of components and the cost increase.

Further, the adjusting unit has a control mechanism for reducing the target value by a control valve, and the control mechanism is one of the L positive pressure introduction paths connecting the positive pressure source and one positive pressure introduction hole. Compared with the target value of the gas that is provided only in the positive pressure introduction path and flows into one positive pressure introduction path from the positive pressure source, the target value of the gas that flows into the positive pressure introduction hole from one positive pressure introduction path is set. Even if the component mounting machine is configured so that the target value of the gas flowing into one positive pressure introduction hole is smaller than the target value of the gas flowing into the other positive pressure introduction hole by reducing it with the control valve. Good. In such a configuration, the difference between the two positive pressure introduction holes of one target value of the pressure and the flow rate of the gas flowing into the positive pressure introduction hole from the positive pressure introduction path can be adjusted by a single control valve. it can. Therefore, it is possible to minimize the increase in the number of components and the cost.

Further, the control mechanism has a gas discharge path branching from one positive pressure introduction path, the control valve is a flow rate adjusting valve for adjusting the flow rate of the gas flowing through the gas discharge path, and the adjusting unit is a flow rate adjusting valve. By opening the gas and discharging the gas from one positive pressure introduction path through the gas discharge path, the flow rate of the gas flowing into one positive pressure introduction hole is larger than the flow rate of the gas flowing into the other positive pressure introduction hole. The component mounting machine may be configured to be small. In such a configuration, the difference in the flow rate of the gas flowing from the positive pressure introduction path into the positive pressure introduction hole between the two positive pressure introduction holes can be adjusted by a single flow rate adjusting valve. Therefore, it is possible to minimize the increase in the number of components and the cost.

Further, the control valve is a pressure reducing valve provided in one positive pressure introduction path, and the adjusting unit reduces the positive pressure output from the positive pressure source by the pressure reducing valve and then enters the one positive pressure introduction hole. By supplying the gas, the component mounting machine may be configured so that the pressure of the gas flowing into one positive pressure introduction hole is smaller than the pressure of the gas flowing into the other positive pressure introduction hole. In such a configuration, the difference in the pressure of the gas flowing from the positive pressure introduction path into the positive pressure introduction hole between the two positive pressure introduction holes can be adjusted by a single pressure reducing valve. Therefore, it is possible to minimize the increase in the number of components and the cost.

Further, the component mounting machine may be configured so that M is 5 times or more of L. In such a configuration, the number of nozzles (= L) for adjusting the difference between the target values can be limited to one-fifth or less of the total number of nozzles (= M). Therefore, it is possible to more reliably suppress the increase in the number of components and the cost increase.

The nozzle blow pressure calibration method according to the present invention has a main body surrounding the hollow portion and L positive pressure introduction holes provided corresponding to L (L is an integer of 2 or more) working positions. , The positive pressure introduction holes are arranged in a circumferential shape, which is held by a nozzle holder rotatably arranged in the hollow portion around a predetermined rotation center with respect to the housing that penetrates the main body and opens in the hollow portion. Of the M nozzles (M is an integer larger than L), the step of positioning the L nozzles at the L working positions and the L positive pressure introduction holes are provided corresponding to the corresponding positives. The pressure and flow rate of the gas flowing into the positive pressure introduction holes while flowing the gas into the L positive pressure introduction holes from the L positive pressure introduction paths connecting the pressure introduction holes and the positive pressure source that outputs the positive pressure. Of the step of changing the difference between the L positive pressure introduction holes of one target value and the M positive pressure communication passages provided in the nozzle holder corresponding to the M nozzles, L work. The openings of the L positive pressure communication passages corresponding to the L nozzles located at the positions face the openings of the L positive pressure introduction holes, and the L nozzles and the L positive pressure input holes communicate with each other. This includes a step of detecting the blow pressure of the gas ejected from the L nozzles and a step of setting the difference between the target values between the L positive pressure introduction holes based on the blow pressure.

In the present invention (nozzle blow pressure calibration method) configured in this way, gas is allowed to flow into the positive pressure introduction holes from the L positive pressure introduction holes provided in the housing to the L nozzles at the working position. The difference between the L positive pressure introduction holes of one of the target values of the pressure and flow rate of the inflowing gas is changed. While changing the difference between the target values in this way, the blow pressure of the gas ejected from the L nozzles is detected, and the difference between the target values among the L positive pressure introduction holes is set based on this blow pressure. Therefore, in component mounting, the target value of the gas supplied to the L positive pressure introduction holes is adjusted according to the difference between the target values set by the blow pressure calibration method of this nozzle, so that the working position can be changed. The blow pressure of the gas ejected from the L nozzles can be made uniform. That is, since it is sufficient to adjust the difference between the target values not for all the M nozzles but for the L nozzles out of the M nozzles, the nozzles can be adjusted with a small number of components. Blow pressure can be made uniform. In this way, in the present invention, it is possible to execute the ejection of gas suitable for detachment of parts by the nozzle while suppressing the increase of components and the cost increase.

As described above, according to the present invention, it is possible to execute the ejection of gas suitable for detachment of parts by the nozzle while suppressing the increase of components and the cost increase.

The partial plan view which shows typically the component mounting machine which concerns on this invention. The perspective view which shows the appearance structure of a rotary head. The perspective view which shows the rotary head of FIG. 2 partially enlarged. The perspective view which shows the internal structure of the rotary head of FIG. FIG. 2 is a cross-sectional view showing a cross section of the rotary head of FIG. FIG. 2 is a cross-sectional view showing a partially enlarged view of the rotary head of FIG. The figure which shows the 1st example of the positive pressure supply mechanism which supplies positive pressure to a rotary head schematically. FIG. 5 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 7. FIG. 5 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 7. The figure which shows the 2nd example of the positive pressure supply mechanism which supplies positive pressure to a rotary head schematically. FIG. 5 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. FIG. 5 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. The figure which shows the 3rd example of the positive pressure supply mechanism which supplies positive pressure to a rotary head schematically. The figure which shows the 4th example of the positive pressure supply mechanism which supplies positive pressure to a rotary head schematically.

FIG. 1 is a partial plan view schematically showing a component mounting machine according to the present invention. In the figure and the following figures, the X direction, the Y direction, and the Z direction that are orthogonal to each other are shown as appropriate. Here, the X direction and the Y direction are horizontal directions, and the Z direction is a vertical direction. As shown in FIG. 1, the component mounting machine 1 includes a pair of conveyors 12 and 12 provided on the base 11. Then, the component mounting machine 1 mounts the components on the board B carried in from the upstream side in the X direction (board transfer direction) by the conveyor 12 to the mounting processing position (position of the board B in FIG. 1), and mounts the components. The completed substrate B is carried out by the conveyor 12 from the mounting processing position to the downstream side in the X direction.

The component mounting machine 1 is provided with a pair of Y-axis rails 21 and 21 extending in the Y direction, a Y-axis ball screw 22 extending in the Y direction, and a Y-axis motor My that rotationally drives the Y-axis ball screw 22 in the X direction. The extending X-axis rail 23 is fixed to the nut of the Y-axis ball screw 22 in a state of being movably supported by a pair of Y-axis rails 21 and 21 in the Y direction. An X-axis ball screw 24 extending in the X direction and an X-axis motor Mx for rotationally driving the X-axis ball screw 24 are attached to the X-axis rail 23, and the rotary head 3 can move to the X-axis rail 23 in the X direction. It is fixed to the nut of the X-axis ball screw 24 in a state of being supported by. Therefore, the Y-axis motor My may rotate the Y-axis ball screw 22 to move the rotary head 3 in the Y direction, or the X-axis motor Mx may rotate the X-axis ball screw 24 to move the rotary head 3 in the X direction. it can.

On both sides of the pair of conveyors 12 and 12 in the Y direction, two component supply units 28 are arranged in the X direction. A plurality of tape feeders 281 are detachably attached to each component supply unit 28 side by side in the X direction at a pitch P, and each tape feeder 281 is in the form of small pieces such as an integrated circuit, a transistor, and a capacitor. A reel on which a tape containing the component E (chip electronic component) of the above is stored at predetermined intervals is arranged. Then, the tape feeder 281 supplies the component E to the component supply position at the tip of the substrate B side by intermittently feeding the tape to the substrate B side.

The rotary head 3 attracts and mounts the component E by the nozzle N (FIGS. 4 and 5). That is, the rotary head 3 moves above the tape feeder 281 and sucks the component E supplied by the tape feeder 281. Specifically, the rotary head 3 attracts the component E by lowering the nozzle N until it comes into contact with the component E and then raising the nozzle N while generating a negative pressure in the nozzle N. Subsequently, the rotary head 3 moves above the board B at the mounting processing position to mount the component E on the board B. Specifically, the rotary head 3 mounts the component E by lowering the nozzle N until the component E comes into contact with the substrate B and then generating a positive pressure in the nozzle N. After mounting the component E, the rotary head 3 raises the nozzle N.

FIG. 2 is a perspective view showing an external configuration of the rotary head, FIG. 3 is a perspective view showing a partially enlarged view of the rotary head of FIG. 2, and FIG. 4 is a perspective view showing an internal configuration of the rotary head of FIG. 5A and 5B are cross-sectional views showing a cross section of the rotary head of FIG. 2, and FIG. 6 is a cross-sectional view showing a partially enlarged view of the rotary head of FIG.

The rotary head 3 has a main rod 31 extending parallel to the Z direction and a shaft holder 32 supported at the lower end of the main rod 31. The main rod 31 and the shaft holder 32 are rotatably supported around a rotation axis Ca that passes through the center and is parallel to the Z direction, and rotates under the driving force of a rotation motor (not shown).

As shown in FIG. 6, the rotary head 3 has a housing 36 that surrounds the shaft holder 32 from the side (horizontal direction). The housing 36 has a housing body 361 and a hollow portion 362 formed inside the housing body 361 and penetrating the housing body 361 in the Z direction. The inner peripheral surface of the housing body 361 (in other words, the outer peripheral surface of the hollow portion 362) and the outer peripheral surface of the housing body 361 have a cylindrical shape having a straight line parallel to the Z direction as a common center, and have a cylindrical shape in the Z direction. The housing body 361 has an annular shape in a plan view from the above. On the other hand, the outer peripheral wall of the shaft holder 32 has a cylindrical shape centered on the rotation axis Ca. At this time, the diameter of the cylindrical shape of the shaft holder 32 is slightly shorter than the diameter of the cylindrical shape of the hollow portion 362, and the shaft holder 32 fits into the hollow portion 362. The shaft holder 32 thus arranged in the hollow portion 362 is rotatable with respect to the housing body 361 about the rotation shaft Ca.

The shaft holder 32 has M shaft insertion holes 321 arranged at equal angles (20 degrees) around the rotation axis Ca. Here, M is an integer of 3 or more corresponding to the number of nozzles N mounted on the rotary head 3, and in this example, M = 18. The shaft insertion hole 321 penetrates in the Z direction, and the nozzle shaft 33 is supported by the shaft holder 32 in a state of being inserted into the shaft insertion hole 321. In this way, the 18 nozzle shafts 33 supported by the shaft holder 32 are arranged at equal angles (20 degrees) in a circumferential shape centered on the rotation axis Ca. Therefore, when the shaft holder 32 rotates about the rotation axis Ca, the 18 nozzle shafts 33 integrally rotate about the rotation axis Ca.

Each nozzle shaft 33 has an elevating rod 331 extending in the Z direction and a spline shaft 332 attached to the shaft holder 32. The spline shaft 332 is attached to the shaft holder 32 in a state of being inserted into the shaft insertion hole 321. The spline shaft 332 is provided with a rod insertion hole penetrating in the Z direction, and the elevating rod 331 is inserted into the rod insertion hole. Further, the nozzle shaft 33 has a coil spring 333 externally fitted to the elevating rod 331, and the coil spring 333 urges the elevating rod 331 upward with respect to the spline shaft 332. In this way, the elevating rod 331 is supported so as to be elevated by the spline shaft 332 and the coil spring 333. The lower end of the elevating rod 331 is located below the shaft holder 32, and the nozzle N is attached to the lower end.

The nozzle shaft 33 is rotatably supported by the shaft holder 32 about a rotation shaft Cb that coincides with its center line. Specifically, the spline shaft 332 of the nozzle shaft 33 can rotate about the rotation shaft Cb with respect to the shaft holder 32. The spline shaft 332 restrains the elevating rod 331 in the rotation direction centered on the rotation shaft Cb, and the spline shaft 332 and the elevating rod 331 rotate integrally around the rotation shaft Cb. The spline shaft 332 has a driven gear 332b centered on the rotating shaft Cb above the shaft holder 32, and rotates with the elevating rod 331 according to the torque applied to the driven gear 332b.

In such a configuration, 18 nozzle shafts 33 rotate about their respective rotation shafts Cb when torque is applied to their respective driven gears 332b. On the other hand, the rotary head 3 has a drive gear 34 that drives and rotates 18 nozzle shafts 33. The drive gear 34 is arranged above the shaft holder 32 with the rotation shaft Ca as the center. The drive gear 34 is fitted onto the main rod 31 via a bearing 35, and when it receives a driving force of a rotary motor (not shown), it rotates about a rotation shaft Ca. On the other hand, the 18 driven gears 332b provided on the 18 nozzle shafts 33 are arranged in a circumferential shape along the peripheral edge of the drive gear 34 and mesh with the drive gear 34 from the outside. Therefore, the rotation of the drive gear 34 drives the 18 driven gears 332b, and the 18 nozzle shafts 33 rotate around their respective rotation axes Cb.

Further, the rotary head 3 can rotate 18 nozzle shafts 33 along with the shaft holder 32 around the rotation shaft Ca by rotating the main rod 31. On the other hand, the rotary head 3 is provided with a rotation angle of 180 degrees about the rotation axis Ca, and has L working positions Sl and Sr arranged at a pitch P in the X direction. Here, L is an integer less than M and 2 or more corresponding to the number of working positions, and L = 2 in this example. Therefore, the rotary head 3 uses 18 nozzles of 2 nozzle shafts 33 located at 2 working positions Sl and Sr out of 18 nozzle shafts 33 (in other words, 18 nozzles N). It can be switched by rotating the shaft 33. When L is larger than 2, the interval between the L working positions changes according to the value of L, not 180 degrees. For example, when L = 3, the distance between the three working positions may be 120 degrees (360 degrees / 3).

Further, of the 18 nozzle shafts 33, the two nozzle shafts 33 located at the two working positions Sl and Sr can be selectively moved up and down. That is, the rotary head 3 has two elevating mechanisms 51 corresponding to the two working positions Sl and Sr. Since the configurations of the two elevating mechanisms 51 are common, here, one elevating mechanism 51 corresponding to the working position Sl will be described.

The elevating mechanism 51 has a cam follower 52 that faces the upper end of the elevating rod 331 of the nozzle shaft 33 located at the working position Sl from above, and an elevating member 53 that elevates and elevates the cam follower 52. By driving in the direction, the cam follower 52 is moved up and down along with the elevating member 53. When the cam follower 52 is located at the height shown in FIG. 5, the cam follower 52 is separated upward from the elevating rod 331 of the nozzle shaft 33 at the working position Sl. As a result, at the working position Sl, the elevating rod 331 is located at the highest point according to the upward urging force of the coil spring 333, and the nozzle N attached to the elevating rod 331 is located at the ascending position. On the other hand, when the cam follower 52 descends from the height shown in FIG. 5, the cam follower 52 abuts on the elevating rod 331 of the nozzle shaft 33 from above and pushes down the elevating rod 331 against the urging force of the coil spring 333. As a result, at the working position Sl, the elevating rod 331 descends from the highest point, and the nozzle N attached to the elevating rod 331 is located at a descending position lower than the ascending position.

The rotary head 3 sucks the component E by the nozzle N by supplying a negative pressure to the nozzle N located at the descending position in the working positions Sl and Sr. By the way, as described above, since the two working positions Sl and Sr and the two tape feeders 281 are lined up in the X direction at the same pitch P, the two nozzles located at the two working positions Sl and Sr N can suck the component E from the two tape feeders 281 at the same time. Further, the rotary head 3 separates the component E downward from the nozzle N by supplying a positive pressure to the nozzle N located at the descending position at the working positions Sl and Sr, and mounts the component E on the substrate B. Subsequently, a configuration for supplying negative pressure and positive pressure to the nozzle N will be described.

The rotary head 3 has 18 pressure switching mechanisms 4 corresponding to 18 nozzle shafts 33. The 18 pressure switching mechanisms 4 are attached to the shaft holder 32 and rotate around the rotation shaft Ca along with the shaft holder 32. These 18 pressure switching mechanisms 4 are arranged on the outside of the 18 nozzle shafts 33 at equal angles (20 degrees) around the rotation axis Ca, and each pressure switching mechanism 4 has a corresponding nozzle. The pressure supplied to the nozzle N attached to the lower end of the shaft 33 is switched between negative pressure and positive pressure.

The pressure switching mechanism 4 has a valve spool 41 extending in the Z direction and a sleeve 42 accommodating the valve spool 41. The sleeve 42 has a flange 421 at its upper end, and the flange 421 of the sleeve 42 inserted into the mounting hole 322 that opens upward in the shaft holder 32 engages with the upper surface of the shaft holder 32. In this way, the sleeve 42 is supported by the shaft holder 32. The valve spool 41 is inserted into a housing hole that opens upward in the sleeve 42, and is movable in the Z direction with respect to the sleeve 42. The valve spool 41 has an engaging portion 411 at its upper end. Then, the cam follower of the elevating mechanism, which will be described later, moves up and down while engaging with the engaging portion 411, so that the valve spool 41 moves up and down, and the pressure supplied to the nozzle N is switched.

Specifically, as shown in FIG. 6, the sleeve 42 has a negative pressure input port 42a to which a negative pressure is input and a positive pressure input port 42b to which a positive pressure is input. The inside of the sleeve 42 is hollow and communicates with the nozzle N attached to the lower end of the corresponding nozzle shaft 33. Therefore, the negative pressure input from the negative pressure input port 42a to the inside of the sleeve 42 and the positive pressure input from the positive pressure input port 42b to the inside of the sleeve 42 are supplied to the nozzle N, respectively.

On the other hand, inside the main rod 31, a negative pressure supply path 31a extending in the Z direction is provided, and inside the shaft holder 32, 18 pieces corresponding to 18 pressure switching mechanisms 4 are provided. The negative pressure branch path 32a is provided. The 18 negative pressure branch paths 32a are provided radially around the rotation axis Ca, and communicate the negative pressure input port 42a of the corresponding pressure switching mechanism 4 with the negative pressure supply path 31a. Therefore, negative pressure is supplied to the negative pressure input ports 42a of the 18 sleeves 42 from the negative pressure supply path 31a via the corresponding negative pressure branch paths 32a.

Further, inside the shaft holder 32, 18 positive pressure input holes 32b corresponding to the 18 pressure switching mechanisms 4 are provided. Each positive pressure input hole 32b extends horizontally between the positive pressure input port 42b of the sleeve 42 of the corresponding pressure switching mechanism 4 and the outer peripheral surface of the shaft holder 32, and opens at the outer peripheral surface of the shaft holder 32. To do. On the other hand, the rotary head 3 has two pressure switching positions Cl and Cr corresponding to the two working positions Sl and Sr, and the housing body 361 of the housing 36 has two pressure switching positions Cl and Cr. Two positive pressure introduction holes Hl and Hr penetrate in the horizontal direction and open to the hollow portion 362. Then, of the 18 pressure switching mechanisms 4, the two pressure switching mechanisms 4 located at the two pressure switching positions Cl and Cr (in other words, the nozzle shafts 33 located at the two working positions Sl and Sr). The positive pressure input ports 42b of the two pressure switching mechanisms 4) corresponding to the above are opposed to and communicate with the positive pressure introduction holes Hl and Hr via the positive pressure input holes 32b.

Further, the rotary head 3 has two positive pressure introduction pipes 61r and 61l (positive pressure introduction path) corresponding to the two positive pressure introduction holes Hl and Hr, and the positive pressure introduction pipes 61r and 61l, respectively. Is connected to the corresponding positive pressure introduction holes Hl and Hr to supply positive pressure to the positive pressure introduction holes Hl and Hr. In this way, the positive pressure supplied to the positive pressure introduction holes Hl and Hr is supplied to the positive pressure input port 42b of the pressure switching mechanism 4 located at the pressure switching positions Cl and Cr.

In such a configuration, when the valve spool 41 of the pressure switching mechanism 4 located at the pressure switching positions Cl and Cr is positioned at the negative pressure supply position ha, the valve spool 41 opens the negative pressure input port 42a and the positive pressure input port 42b. Close. As a result, the negative pressure supply path 31a communicates with the nozzles N at the working positions Sl and Sr via the inside of the sleeve 42, and the negative pressure is supplied to these nozzles N. Further, when the valve spool 41 of the pressure switching mechanism 4 located at the pressure switching positions Cl and Cr is positioned at the positive pressure supply position hb lower than the negative pressure supply position ha, the valve spool 41 closes the negative pressure input port 42a and is positive. Open the pressure input port 42b. As a result, the positive pressure introduction holes Hl and Hr communicate with the nozzles N at the working positions Sl and Sr through the inside of the sleeve 42, and the positive pressure is supplied to these nozzles N.

The rotary head 3 has two elevating mechanisms 55 corresponding to the two pressure switching positions Cl and Cr, and each elevating mechanism 55 corresponds to one of the two pressure switching positions Cl and Cr. The valve spool 41 of the pressure switching mechanism 4 located at is moved up and down between the negative pressure supply position ha and the positive pressure supply position hb. Since the configurations of the two elevating mechanisms 55 are common, here, one elevating mechanism 55 corresponding to the pressure switching position Cl will be described.

The elevating mechanism 55 has a cam follower 56 facing the engaging portion 411 of the valve spool 41 of the pressure switching mechanism 4 located at the pressure switching position Cl. The engaging portion 411 has a pair of facing portions 412 arranged vertically, and in the Z direction, the cam follower 56 is located between the facing portions 412 and faces each of the upper and lower facing portions 412. Further, the elevating mechanism 55 has an elevating member 57 for elevating and lowering the cam follower 56, and by driving the elevating member 57 in the Z direction by a linear motor, the cam follower 56 is elevated and lowered along with the elevating member 57.

That is, when the cam follower 56 is raised, the cam follower 56 pushes up the upper facing portion 412 of the pair of facing portions 412 from below, and the valve spool 41 is positioned at the negative pressure supply position ha. Further, when the cam follower 56 is lowered, the cam follower 56 pushes down the lower facing portion 412 of the pair of facing portions 412 from above, and the valve spool 41 is positioned at the positive pressure supply position hb.

Subsequently, in the component mounting machine 1, a mechanism for supplying positive pressure to the two positive pressure introduction holes Hl and Hr opened in the housing body 361 of the rotary head 3 will be described with reference to FIG. 7. Here, FIG. 7 is a diagram schematically showing a first example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. In the following description, the two valve spools 41 at the pressure switching positions Cr and Cl are located at the positive pressure supply position Hb, respectively, and the two nozzles N at the working positions Sl and Sr are positive pressure introduction holes, respectively. It is assumed that the situation is connected to Hl and Hr.

As shown in FIG. 7, the positive pressure supply mechanism 6 included in the component mounting machine 1 is connected to the two positive pressure introduction holes Hl and Hr opened on the outer peripheral surface of the housing body 361 of the rotary head 3, respectively. It has two positive pressure introduction pipes 61l and 61r. Further, the positive pressure supply mechanism 6 has a positive pressure source 62 that outputs a positive pressure, and the two positive pressure introduction pipes 61l and 61r have a common positive pressure source 62 and a positive pressure introduction connected to each of the two positive pressure introduction pipes 61l and 61r. It extends between the holes Hl and Hr.

Since the configurations for these positive pressure introduction pipes 61l and 61r are common, the configuration for one positive pressure introduction pipe 61l will be described. An on-off valve 63 is inserted between the positive pressure source 62 and the positive pressure introduction hole Hl with respect to the positive pressure introduction pipe 61l. Therefore, by opening the on-off valve 63, the positive pressure source 62 and the positive pressure introduction hole Hl can be communicated with each other by the positive pressure introduction pipe 61l, and the positive pressure can be supplied to the positive pressure introduction hole Hl. On the other hand, by closing the on-off valve 63, the positive pressure source 62 and the positive pressure introduction hole Hl can be shut off, and the supply of the positive pressure to the positive pressure introduction hole Hl can be stopped. Here, the description will be made on the premise that the on-off valve 63 is open.

Further, a gas discharge mechanism 64 is provided for the positive pressure introduction pipe 61l. The gas discharge mechanism 64 has a gas discharge pipe 641 branched from the positive pressure introduction pipe 61l and a flow rate adjusting valve 642 attached to the gas discharge pipe 641 between the on-off valve 63 and the positive pressure introduction hole Hl. .. The flow rate adjusting valve 642 adjusts the flow rate of the gas (air) discharged to the outside from the gas discharge pipe 641. Therefore, when the flow rate adjusting valve 642 is opened, a part of the gas from the positive pressure source 62 to the positive pressure introduction hole Hl via the positive pressure introduction pipe 61l is positively pressured through the gas discharge pipe 641 and the flow rate adjusting valve 642. It is discharged from the introduction pipe 61l. Further, the flow rate of the gas discharged from the positive pressure introduction pipe 61l increases as the opening degree of the flow rate adjusting valve 642 is increased. As a result, as the opening degree of the flow rate adjusting valve 642 is increased, the flow rate of the gas discharged from the positive pressure introduction pipe 61l through the gas discharge pipe 641 and the flow rate adjustment valve 642 increases, and the positive pressure introduction hole The flow rate of the gas flowing into Hl decreases.

As described above, the shaft holder 32 is located inside the housing body 361 (hollow portion 362) through which the positive pressure introduction hole Hl opens. The shaft holder 32 is provided with 18 positive pressure communication passages T each composed of the above-mentioned positive pressure input holes 32b and sleeve 42 corresponding to 18 nozzles N, and each positive pressure communication passage T is provided. Communicate with the corresponding nozzle N. Then, of the 18 nozzles N, the opening Oi of the positive pressure communication passage T communicating with the nozzle N located at the working position Sl faces the opening Oo of the positive pressure introduction hole Hl from the horizontal direction, and becomes the positive pressure introduction hole Hl. The nozzle N located at the working position Sl communicates with the nozzle N. As a result, the positive pressure supplied from the positive pressure source 62 to the positive pressure introduction hole Hl via the positive pressure introduction pipe 61l is supplied to the nozzle N located at the working position Sl.

Similarly, of the 18 nozzles N, the opening Oi of the positive pressure communication passage T communicating with the nozzle N located at the working position Sr faces the opening Oo of the positive pressure introduction hole Hr from the horizontal direction, and the positive pressure introduction hole Hr And the nozzle N located at the working position Sr communicate with each other. As a result, the positive pressure supplied from the positive pressure source 62 to the positive pressure introduction hole Hr via the positive pressure introduction pipe 61r is supplied to the nozzle N located at the working position Sr.

By the way, in the example of FIG. 7, as a result of the deviation between the cylindrical center line of the hollow portion 362 and the rotation axis Ca of the shaft holder 32, for example, the shaft holder 32 has a cylindrical center line of the hollow portion 362. As a result of the rotation axis Ca being slightly shifted to the left in FIG. 7, the gap Δl between the inner peripheral surface of the housing body 361 on the positive pressure introduction hole Hl side and the outer peripheral surface of the shaft holder 32 is on the positive pressure introduction hole Hr side. It is narrower than the gap Δr between the inner peripheral surface of the housing body 361 and the outer peripheral surface of the shaft holder 32. In such a case, the flow rate at which the air flowing into the hollow portion 362 from the positive pressure introduction hole Hr escapes from the gap Δr is larger than the flow rate at which the air flowing into the hollow portion 362 from the positive pressure introduction hole Hl escapes from the gap Δl. Therefore, if the flow rate and positive pressure of the gas supplied to the positive pressure introduction holes Hl and Hr are the same, the blow pressure of the gas ejected from the nozzle N at the working position Sl is compared with the blow pressure of the gas ejected from the nozzle N at the working position Sr. The blow pressure of the ejected gas becomes smaller. As a result of such variations in blow pressure, a situation may occur in which the nozzle N having a large blow pressure blows off the component E, while the component E does not accurately separate from the nozzle N having a small blow pressure. As described above, it may be difficult to eject an appropriate gas to each nozzle N without blowing off the component E while surely separating the component E from the nozzle N.

Therefore, the positive pressure supply mechanism 6 makes the opening degree of the flow rate adjusting valve 642 provided for the positive pressure introducing pipe 61l larger than the opening degree of the flow rate adjusting valve 642 provided for the positive pressure introducing pipe 61r. As a result, the flow rate of the gas discharged from the positive pressure introduction pipe 61l through the gas discharge pipe 641 is made larger than the flow rate (including zero) of the gas discharged from the positive pressure introduction pipe 61r through the gas discharge pipe 641. That is, between these flow rates so that the flow rate of the gas flowing from the positive pressure introduction pipe 61l into the positive pressure introduction hole Hl is smaller than the flow rate of the gas flowing from the positive pressure introduction pipe 61r into the positive pressure introduction hole Hr. The difference is set. As a result, the difference between the blow pressure of the gas ejected from the nozzle N located at the working position Sl and the blow pressure of the gas ejected from the nozzle N located at the working position Sr is suppressed.

In the embodiment configured as described above, the shaft holder 32 (nozzle holder) holding 18 (M) nozzles arranged in a circumferential shape is arranged in the hollow portion 362 provided in the housing 36. Will be done. The shaft holder 32 is provided with 18 positive pressure continuous passages T corresponding to 18 nozzles N, while the housing 36 is provided with two corresponding to two (L) working positions Sl and Sr. The positive pressure introduction holes Hl and Hr of the above penetrate. Then, of the 18 positive pressure continuous passages T, the openings Oi of the two positive pressure continuous passages T corresponding to the two nozzles N located at the two working positions Sl and Sr are the two positive pressure introduction holes Hl. , The two nozzles N at the working positions Sl and Sr and the two positive pressure introduction holes Hl and Hr of the housing 36 communicate with each other so as to face the opening Oo of the Hr. As a result, positive pressure can be supplied from the two positive pressure introduction holes Hl and Hr to the two nozzles N via the two positive pressure communication passages T of the shaft holder 32.

Further, in this embodiment (first example of FIG. 7), there are two (L) flow rates of gas flowing into the positive pressure introduction holes Hl and Hr from the positive pressure introduction pipes 61l and 61r (positive pressure introduction path). The difference between the positive pressure introduction holes Hl and Hr is adjusted by the positive pressure supply mechanism 6 (adjusting unit). Therefore, the shaft holder 32 is eccentrically arranged with respect to the hollow portion 362 of the housing 36, and the sizes of the gaps Δl and Δr between the inner peripheral surface of the housing 36 and the outer peripheral surface of the shaft holder 32 are the sizes of the positive pressures introduced. Even if it differs depending on the holes Hl and Hr, it is possible to make the flow rates of the gas ejected from each nozzle N uniform so that the gas ejected from the nozzle N suitable for detachment of the component E can be realized. Moreover, the positive pressure supply mechanism 6 does not cover all 18 (M) nozzles N for adjusting the difference in gas flow rate, but the working positions Sl and Sr of the 18 nozzles N. Since it is sufficient to target the two (L) nozzles N of the above, the positive pressure supply mechanism 6 can be configured with a small number of components. In this way, in this embodiment, it is possible to execute the ejection of gas suitable for the detachment of the component E by the nozzle N while suppressing the increase in the number of components and the cost increase.

That is, in this embodiment, paying attention to the fact that the two working positions Sl and Sr are provided, the adjustment of the gas flow rate difference is applied to the two nozzles N of the two working positions Sl and Sr. Is limited. Therefore, it is possible to more reliably suppress the increase in the number of components and the cost increase.

Further, of the two positive pressure introduction holes Hl and Hr, the gap Δl between the inner wall of the housing body 361 on the positive pressure introduction hole Hl side and the shaft holder 32 is on the other positive pressure introduction hole Hr side. It is narrower than the gap Δr between the inner wall of the housing body 361 and the shaft holder 32. Correspondingly, the positive pressure supply mechanism 6 makes the flow rate of the gas flowing into one positive pressure introduction hole Hl smaller than the flow rate of the gas flowing into the other positive pressure introduction hole Hr. That is, the flow rate of the gas flowing into one positive pressure introduction hole Hl is set to be smaller than the flow rate of the gas flowing into the other positive pressure introduction hole Hr according to the difference between these gaps Δl and Δr. As a result, the flow rates of the gas ejected from the two nozzles N located at the two working positions Sl and Sr can be matched, and the nozzle N can execute the ejection of the gas suitable for the detachment of the component E. ..

Further, the number of nozzles N (= M) is five times or more the number of working positions Sl and Sr (= L). In such a configuration, the number of nozzles N (= L) for adjusting the difference in gas flow rate can be limited to one-fifth or less of the total number of nozzles N (= M). Therefore, it is possible to more reliably suppress the increase in the number of components and the cost increase.

FIG. 8 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 7. This nozzle blow pressure calibration method is performed, for example, by an operator before the start of component mounting on the component mounting machine 1.

In step S101, the nozzles N are positioned at the working positions Sl and Sr, respectively, and gas is ejected from the two nozzles N at the working positions Sl and Sr. This step S101 prevents the execution of step S102 and subsequent steps in a state where neither nozzle N is located at the working positions Sl or Sr, and any two nozzles N out of the 18 nozzles N are N. May be positioned at the working positions Sl and Sr. If the nozzle N is located at each of the working positions Sl and Sr before the start of the nozzle blow pressure calibration method, it is considered that step S101 has been executed / completed at the start of the method.

In step S102, each of the two flow rate adjusting valves 642 of the positive pressure supply mechanism 6 is fully closed (that is, the opening degree is set to zero). Then, the blow pressure (wind pressure) of the gas ejected from the nozzle N at the working position Sl and the blow pressure of the gas ejected from the nozzle N at the working position Sr are detected (step S103). For example, a detector (not shown) is provided in the two positive pressure communication passages T corresponding to the two nozzles N located at the two working positions Sl and Sr, and the detection in step S103 is executed by this detector. Will be done.

Based on such a detection result, in step S104, of the two nozzles N located at the two working positions Sl and Sr, the positive pressure communication path (positive pressure communication) communicating with the nozzle N that ejects the gas at the maximum blow pressure. The opening operation of gradually opening the flow rate adjusting valve 642 connected to the path 61l or 61r) is started. Here, since the gap Δl is narrower than the gap Δr, the blow pressure of the nozzle N at the working position Sl is higher than the blow pressure of the nozzle N at the working position Sr. Therefore, the opening operation is started for the flow rate adjusting valve 642 connected to the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl.

With the start / execution of such an opening operation, the flow rate of the gas discharged from the positive pressure introduction pipe 61l through the gas discharge pipe 641 and the flow rate adjusting valve 642 increases, and the positive pressure introduction hole from the positive pressure introduction pipe 61l. The flow rate of the gas flowing into Hl decreases. As a result, the flow rate of the gas ejected from the nozzle N at the working position Sl is reduced, and the blow pressure of the gas ejected from the nozzle N at the working position Sl and the blow pressure of the gas ejected from the nozzle N at the working position Sr are reduced. The difference from the pressure (difference in blow pressure) is reduced. Therefore, in step S105, while monitoring the difference in blow pressure, it is confirmed whether or not this is within the permissible range. Then, when the difference in blow pressure is within the permissible range (“YES” in step S105), the flow rate adjustment provided in the gas discharge pipe 641 connected to the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl. The opening operation for the valve 642 is stopped (step S106). As a result, the opening degree of each flow rate adjusting valve 642 is set at the opening degree at the time when the opening operation is stopped.

In this nozzle blow pressure calibration method, gas is allowed to flow from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 into the two nozzles N at the working positions Sl and Sr (step S101). , S102), the difference between the two positive pressure introduction holes Hl and Hr of the flow rate of the gas flowing into the positive pressure introduction holes Hl and Hr is changed (step S104). While changing the difference in gas flow rate in this way, the blow pressure of the gas ejected from the two nozzles is detected (steps S104 and S105), and the difference in gas flow rate between the two positive pressure introduction holes Hl and Hr. Is set based on this blow pressure (steps S105 and S106). Therefore, in component mounting, the flow rates of the gas supplied to the two positive pressure introduction holes Hl and Hr are adjusted so as to cause a difference in the gas flow rates set by this nozzle blow pressure calibration method. , The blow pressure of the gas ejected from the two nozzles N at the working positions Sl and Sr can be made uniform. That is, it is sufficient to adjust the difference in gas flow rate not for all 18 (M) nozzles N but for 2 nozzles N out of 18 nozzles. , The blow pressure of the nozzle N can be made uniform with a small number of components. In this way, it is possible for the nozzle N to eject a gas suitable for detachment of the component E while suppressing an increase in the number of components and an increase in cost.

FIG. 9 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. 7. This nozzle blow pressure calibration method is performed, for example, by an operator before the start of component mounting on the component mounting machine 1.

In step S201, the nozzle N is positioned at each of the working positions Sl and Sr. In step S202, each of the two flow rate adjusting valves 642 of the positive pressure supply mechanism 6 is fully opened (that is, the opening degree is maximized). Then, the blow pressure of the gas ejected from the nozzle N at the working position Sl and the blow pressure of the gas ejected from the nozzle N at the working position Sr are detected (step S203).

Based on the detection result, in step S204, of the two nozzles N located at the two working positions Sl and Sr, the positive pressure communication path (positive pressure communication) communicating with the nozzle N that ejects the gas at the lowest blow pressure. The closing operation of gradually closing the flow rate adjusting valve 642 connected to the path 61l or 61r) is started. Here, since the gap Δr is wider than the gap Δl, the blow pressure of the nozzle N at the working position Sr is lower than the blow pressure of the nozzle N at the working position Sl. Therefore, the closing operation is started with respect to the flow rate adjusting valve 642 connected to the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr.

With the start / execution of the closing operation, the flow rate of the gas discharged from the positive pressure introduction pipe 61r via the gas discharge pipe 641 and the flow rate adjusting valve 642 decreases, and the positive pressure introduction hole from the positive pressure introduction pipe 61r. The flow rate of the gas flowing into Hr increases. As a result, the flow rate of the gas ejected from the nozzle N at the working position Sr increases, and the blow pressure of the gas ejected from the nozzle N at the working position Sr and the blow of the gas ejected from the nozzle N at the working position Sl increase. The difference from the pressure (difference in blow pressure) is reduced. Therefore, in step S205, while monitoring the difference in blow pressure, it is confirmed whether or not this is within the permissible range. Then, when the difference in blow pressure is within the permissible range (“YES” in step S205), the closing operation of the flow rate adjusting valve 642 provided in the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr is stopped. (Step S206). As a result, the opening degree of each flow rate adjusting valve 642 is set at the opening degree at the time when the closing operation is stopped.

In this nozzle blow pressure calibration method, gas is allowed to flow from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 into the two nozzles N at the working positions Sl and Sr (step S201). , S202), the difference between the two positive pressure introduction holes Hl and Hr of the flow rate of the gas flowing into the positive pressure introduction holes Hl and Hr is changed (step S204). While changing the difference in gas flow rate in this way, the blow pressure of the gas ejected from the two nozzles is detected (steps S204 and S205), and the difference in gas flow rate between the two positive pressure introduction holes Hl and Hr. Is set based on this blow pressure (steps S205 and S206). Therefore, in component mounting, the flow rates of the gas supplied to the two positive pressure introduction holes Hl and Hr are adjusted so as to cause a difference in the gas flow rates set by this nozzle blow pressure calibration method. , The blow pressure of the gas ejected from the two nozzles N at the working positions Sl and Sr can be made uniform. That is, it is sufficient to adjust the difference in gas flow rate not for all 18 (M) nozzles N but for 2 nozzles N out of 18 nozzles. , The blow pressure of the nozzle N can be made uniform with a small number of components. In this way, it is possible for the nozzle N to eject a gas suitable for detachment of the component E while suppressing an increase in the number of components and an increase in cost.

FIG. 10 is a diagram schematically showing a second example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. The difference between the second example of FIG. 10 and the first example of FIG. 7 is that a pressure reducing valve 65 (regulator) is provided in each of the positive pressure introduction pipes 61l and 61r instead of the gas discharge mechanism 64. Here, the description will be focused on the differences from the first example, and the common points with the first example will be given corresponding reference numerals and the description will be omitted as appropriate. Further, as in the first example, since the configurations for the positive pressure introduction pipes 61l and 61r are common, the configuration for one positive pressure introduction pipe 61l will be described.

That is, in the second example, the pressure reducing valve 65 is provided between the positive pressure source 62 and the on-off valve 63 for the positive pressure introduction pipe 61l. The pressure reducing valve 65 outputs the output pressure obtained by reducing the positive pressure output from the positive pressure source 62 to the on-off valve 63 side (in other words, the positive pressure introduction hole Hl side). Further, the amount of decompression by the pressure reducing valve 65, in other words, the output pressure can be changed and set. Therefore, as the output pressure of the pressure reducing valve 65 decreases, the positive pressure of the gas flowing from the positive pressure introduction pipe 61l into the positive pressure introduction hole Hl decreases.

Further, in the example of FIG. 10, similarly to the example of FIG. 7, the gap Δl between the inner peripheral surface of the housing body 361 on the positive pressure introduction hole Hl side and the outer peripheral surface of the shaft holder 32 is the positive pressure introduction hole. The gap between the inner peripheral surface of the housing body 361 on the Hr side and the outer peripheral surface of the shaft holder 32 is narrower than the gap Δr. Therefore, it may be difficult to eject an appropriate gas to each nozzle N without blowing off the component E while surely separating the component E from the nozzle N.

Therefore, the positive pressure supply mechanism 6 sets the output pressure of the pressure reducing valve 65 provided for the positive pressure introduction pipe 61l to be lower than the output pressure of the pressure reducing valve 65 provided for the positive pressure introduction pipe 61r (in other words). By setting a large amount of decompression), the positive pressure of the gas flowing from the positive pressure introduction pipe 61l into the positive pressure introduction hole Hl becomes the positive pressure of the gas flowing from the positive pressure introduction pipe 61r into the positive pressure introduction hole Hr. The difference is set between these positive pressures so that they are less than the pressure. As a result, the difference between the blow pressure of the gas ejected from the nozzle N located at the working position Sl and the blow pressure of the gas ejected from the nozzle N located at the working position Sr is suppressed.

As described above, in this embodiment (second example of FIG. 10), the positive pressure of the gas flowing into the positive pressure introduction holes Hl and Hr from the positive pressure introduction pipes 61l and 61r (positive pressure introduction path) is 2. The difference between the (L) positive pressure introduction holes Hl and Hr is adjusted by the positive pressure supply mechanism 6 (adjusting unit). Therefore, the shaft holder 32 is eccentrically arranged with respect to the hollow portion 362 of the housing 36, and the sizes of the gaps Δl and Δr between the inner peripheral surface of the housing 36 and the outer peripheral surface of the shaft holder 32 are the sizes of the positive pressures introduced. Even if it differs depending on the holes Hl and Hr, it is possible to realize the ejection of the gas from the nozzle N suitable for the detachment of the component E by making the positive pressures of the gas ejected from each nozzle N uniform. Moreover, the positive pressure supply mechanism 6 does not cover all 18 (M) nozzles N for adjusting the difference in positive pressure of the gas, but works at the working position Sl among the 18 nozzles N. Since it is sufficient to target the two (L) nozzles N of Sr, the positive pressure supply mechanism 6 can be configured with a small number of components. In this way, in this embodiment, it is possible to execute the ejection of gas suitable for the detachment of the component E by the nozzle N while suppressing the increase in the number of components and the cost increase.

That is, in this embodiment, paying attention to the fact that the two working positions Sl and Sr are provided, the adjustment of the positive pressure difference of the gas is targeted to the two nozzles N of the two working positions Sl and Sr. Is limited. Therefore, it is possible to more reliably suppress the increase in the number of components and the cost increase.

Further, of the two positive pressure introduction holes Hl and Hr, the gap Δl between the inner wall of the housing body 361 on the positive pressure introduction hole Hl side and the shaft holder 32 is on the other positive pressure introduction hole Hr side. It is narrower than the gap Δr between the inner wall of the housing body 361 and the shaft holder 32. Correspondingly, the positive pressure supply mechanism 6 makes the positive pressure of the gas flowing into one positive pressure introduction hole Hl smaller than the positive pressure of the gas flowing into the other positive pressure introduction hole Hr. That is, the positive pressure of the gas flowing into one positive pressure introduction hole Hl is set to be smaller than the positive pressure of the gas flowing into the other positive pressure introduction hole Hr according to the difference between these gaps Δl and Δr. .. As a result, the positive pressures of the gases ejected from the two nozzles N located at the two working positions Sl and Sr can be made uniform, and the nozzle N can eject the gas suitable for the detachment of the component E. ..

Further, the number of nozzles N (= M) is five times or more the number of working positions Sl and Sr (= L). In such a configuration, the number of nozzles N (= L) for adjusting the difference in positive pressure of the gas can be limited to one-fifth or less of the total number of nozzles N (= M). Therefore, it is possible to more reliably suppress the increase in the number of components and the cost increase.

FIG. 11 is a flowchart showing a first example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. This nozzle blow pressure calibration method is performed, for example, by an operator before the start of component mounting on the component mounting machine 1.

In step S301, the nozzle N is positioned at each of the working positions Sl and Sr. In step S302, the output pressure of each of the two pressure reducing valves 65 of the positive pressure supply mechanism 6 is set to the maximum (that is, the pressure reducing amount is set to the minimum). Then, the blow pressure of the gas ejected from the nozzle N at the working position Sl and the blow pressure of the gas ejected from the nozzle N at the working position Sr are detected (step S303).

Based on such a detection result, in step S304, of the two nozzles N located at the two working positions Sl and Sr, the positive pressure communication path (positive pressure communication) communicating with the nozzle N that ejects the gas at the maximum blow pressure. The reduction of the output pressure of the pressure reducing valve 65 provided in the path 61l or 61r) is started. Here, since the gap Δl is narrower than the gap Δr, the blow pressure of the nozzle N at the working position Sl is higher than the blow pressure of the nozzle N at the working position Sr. Therefore, the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl is gradually reduced.

As the output pressure of the pressure reducing valve 65 decreases, the positive pressure of the gas flowing from the positive pressure introduction pipe 61l into the positive pressure introduction hole Hl decreases. As a result, the positive pressure of the gas ejected from the nozzle N at the working position Sl decreases, and the blow pressure of the gas ejected from the nozzle N at the working position Sl and the gas ejected from the nozzle N at the working position Sr The difference from the blow pressure (difference in blow pressure) is reduced. Therefore, in step S305, while monitoring the difference in blow pressure, it is confirmed whether or not this is within the permissible range. Then, when the difference in blow pressure is within the permissible range (“YES” in step S305), the decrease in the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61l communicating with the nozzle N at the working position Sl stops. (Step S306). As a result, the output pressure of each pressure reducing valve 65 is set to the output pressure at the time when the decrease in the output pressure is stopped.

In this nozzle blow pressure calibration method, gas is allowed to flow from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 into the two nozzles N at the working positions Sl and Sr (step S301). , S302), the difference between the two positive pressure introduction holes Hl and Hr of the positive pressure of the gas flowing into the positive pressure introduction holes Hl and Hr is changed (step S304). In this way, while changing the difference in the positive pressure of the gas, the blow pressure of the gas ejected from the two nozzles is detected (steps S304 and S305), and the positive pressure of the gas between the two positive pressure introduction holes Hl and Hr is detected. The difference is set based on this blow pressure (steps S305 and S306). Therefore, in component mounting, the positive pressure of the gas supplied to the two positive pressure introduction holes Hl and Hr is adjusted so that the difference in the positive pressure of the gas set by the blow pressure calibration method of this nozzle occurs. Therefore, the blow pressures of the gases ejected from the two nozzles N at the working positions Sl and Sr can be made uniform. That is, it is sufficient to adjust the difference in the positive pressure of the gas not for all 18 (M) nozzles N but for 2 nozzles N out of 18 nozzles. Therefore, the blow pressure of the nozzle N can be made uniform with a small number of components. In this way, it is possible for the nozzle N to eject a gas suitable for detachment of the component E while suppressing an increase in the number of components and an increase in cost.

FIG. 12 is a flowchart showing a second example of a nozzle blow pressure calibration method in the positive pressure supply mechanism shown in FIG. This nozzle blow pressure calibration method is performed, for example, by an operator before the start of component mounting on the component mounting machine 1.

In step S401, the nozzle N is positioned at each of the working positions Sl and Sr. In step S402, the output pressure of each of the two pressure reducing valves 65 of the positive pressure supply mechanism 6 is set to the minimum (that is, the pressure reducing amount is set to the maximum). Then, the blow pressure of the gas ejected from the nozzle N at the working position Sl and the blow pressure of the gas ejected from the nozzle N at the working position Sr are detected (step S403).

Based on the detection result, in step S404, of the two nozzles N located at the two working positions Sl and Sr, the positive pressure communication path (positive pressure communication) communicating with the nozzle N that ejects the gas at the lowest blow pressure. The increase in the output pressure of the pressure reducing valve 65 provided in the path 61l or 61r) is started. Here, since the gap Δr is wider than the gap Δl, the blow pressure of the nozzle N at the working position Sr is lower than the blow pressure of the nozzle N at the working position Sl. Therefore, the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr is gradually increased.

As the output pressure of the pressure reducing valve 65 increases, the positive pressure of the gas flowing from the positive pressure introduction pipe 61r into the positive pressure introduction hole Hr increases. As a result, the positive pressure of the gas ejected from the nozzle N at the working position Sr increases, and the blow pressure of the gas ejected from the nozzle N at the working position Sr and the gas ejected from the nozzle N at the working position Sl increase. The difference from the blow pressure (difference in blow pressure) is reduced. Therefore, in step S405, it is confirmed whether or not this is within the permissible range while monitoring the difference in blow pressure. Then, when the difference in blow pressure falls within the permissible range (“YES” in step S405), the increase in the output pressure of the pressure reducing valve 65 provided in the positive pressure introduction pipe 61r communicating with the nozzle N at the working position Sr stops. (Step S406). As a result, the output pressure of each pressure reducing valve 65 is set to the output pressure at the time when the decrease in the output pressure is stopped.

In this nozzle blow pressure calibration method, gas is allowed to flow from the two (L) positive pressure introduction holes Hl and Hr provided in the housing 36 into the two nozzles N at the working positions Sl and Sr (step S401). , S402), the difference between the two positive pressure introduction holes Hl and Hr of the positive pressure of the gas flowing into the positive pressure introduction holes Hl and Hr is changed (step S404). In this way, while changing the difference in the positive pressure of the gas, the blow pressure of the gas ejected from the two nozzles is detected (steps S404 and S405), and the positive pressure of the gas between the two positive pressure introduction holes Hl and Hr is detected. The difference is set based on this blow pressure (steps S405 and S406). Therefore, in component mounting, the positive pressure of the gas supplied to the two positive pressure introduction holes Hl and Hr is adjusted so that the difference in the positive pressure of the gas set by the blow pressure calibration method of this nozzle occurs. Therefore, the blow pressures of the gases ejected from the two nozzles N at the working positions Sl and Sr can be made uniform. That is, it is sufficient to adjust the difference in the positive pressure of the gas not for all 18 (M) nozzles N but for 2 nozzles N out of 18 nozzles. Therefore, the blow pressure of the nozzle N can be made uniform with a small number of components. In this way, it is possible for the nozzle N to eject a gas suitable for detachment of the component E while suppressing an increase in the number of components and an increase in cost.

FIG. 13 is a diagram schematically showing a third example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. The third example of FIG. 13 is different from the first example of FIG. 7 in that the gas discharge mechanism 64 provided for the positive pressure introduction pipe 61r is removed, and is common to the first example of FIG. 7 in other respects. To do. Therefore, the differences from the first example will be mainly described, and the common points with the first example will be given corresponding reference numerals and the description thereof will be omitted as appropriate.

That is, in the third example of FIG. 13, among the positive pressure introduction holes Hl and Hr, only the positive pressure introduction pipe 61l connected to the positive pressure introduction hole Hl having the narrower clearance Δl and Δr with respect to the shaft holder 32. The gas discharge mechanism 64 is provided, and the gas discharge mechanism 64 is not provided for the positive pressure introduction pipe 61r connected to the wider positive pressure introduction hole Hr.

Then, the positive pressure supply mechanism 6 discharges gas from the positive pressure introduction pipe 61l through the gas discharge pipe 641 by opening the flow rate adjusting valve 642 provided for the positive pressure introduction pipe 61l. As a result, the flow rate of the gas flowing from the positive pressure introduction pipe 61l into the positive pressure introduction hole Hl is smaller than the flow rate of the gas flowing from the positive pressure introduction pipe 61r into the positive pressure introduction hole Hr. The difference is set in. As a result, the difference between the blow pressure of the gas ejected from the nozzle N located at the working position Sl and the blow pressure of the gas ejected from the nozzle N located at the working position Sr is suppressed.

That is, the positive pressure supply mechanism 6 has a gas discharge mechanism 64 that reduces the flow rate by the flow rate adjusting valve 642 (control valve). The gas discharge mechanism 64 connects the positive pressure source 62 and the positive pressure introduction hole Hl (one of the positive pressure introduction holes) among the two (L) positive pressure introduction pipes 61l and 61r (positive pressure introduction path). It is provided only in the positive pressure introduction pipe 61l (one of the positive pressure introduction paths), and the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l is compared with the flow rate of the gas flowing into the positive pressure introduction pipe 61l from the positive pressure source 62. The flow rate of the gas flowing into is reduced by the flow rate adjusting valve 642. As a result, the flow rate of the gas flowing into the positive pressure introduction hole Hl is made smaller than the flow rate of the gas flowing into the positive pressure introduction hole Hr. In such a configuration, the difference in the flow rate of the gas flowing from the positive pressure introduction pipes 61l and 61r into the positive pressure introduction holes Hl and Hr between the two positive pressure introduction pipes 61l and 61r is determined by a single flow rate adjusting valve 642. Can be adjusted. Therefore, it is possible to minimize the increase in the number of components and the cost.

FIG. 14 is a diagram schematically showing a fourth example of a positive pressure supply mechanism that supplies positive pressure to the rotary head. The fourth example of FIG. 14 is different from the second example of FIG. 10 in that the pressure reducing valve 65 provided for the positive pressure introduction pipe 61r is removed, and is common to the second example of FIG. 10 in other respects. .. Therefore, the differences from the second example will be mainly described, and the common points with the second example will be given corresponding reference numerals and the description thereof will be omitted as appropriate.

That is, in the fourth example of FIG. 14, among the positive pressure introduction holes Hl and Hr, only the positive pressure introduction pipe 61l connected to the positive pressure introduction hole Hl having the narrower clearance Δl and Δr with respect to the shaft holder 32. The pressure reducing valve 65 is provided, and the pressure reducing valve 65 is not provided for the positive pressure introduction pipe 61r connected to the wider positive pressure introduction hole Hr.

Then, the positive pressure supply mechanism 6 supplies the output pressure obtained by reducing the positive pressure output from the positive pressure source 62 to the positive pressure introduction hole Hl by the pressure reducing valve 65 provided for the positive pressure introduction pipe 61l. As a result, the positive pressure of the gas flowing from the positive pressure introduction pipe 61l into the positive pressure introduction hole Hl is smaller than the positive pressure of the gas flowing from the positive pressure introduction pipe 61r into the positive pressure introduction hole Hr. A difference is set between the pressures. As a result, the difference between the blow pressure of the gas ejected from the nozzle N located at the working position Sl and the blow pressure of the gas ejected from the nozzle N located at the working position Sr is suppressed.

That is, the positive pressure supply mechanism 6 reduces the positive pressure by the pressure reducing valve 65 (control valve, control mechanism). The pressure reducing valve 65 connects the positive pressure source 62 and the positive pressure introduction hole Hl (one of the positive pressure introduction holes) among the two (L) positive pressure introduction pipes 61l and 61r (positive pressure introduction path). It is provided only in the positive pressure introduction pipe 61l (one positive pressure introduction path), and compared with the positive pressure of the gas flowing from the positive pressure source 62 into the positive pressure introduction pipe 61l, the positive pressure introduction hole Hl from the positive pressure introduction pipe 61l. The positive pressure of the gas flowing into is reduced by the pressure reducing valve 65. As a result, the positive pressure of the gas flowing into the positive pressure introduction hole Hl is made smaller than the positive pressure of the gas flowing into the positive pressure introduction hole Hr. In such a configuration, the difference between the two positive pressure introduction pipes 61l and 61r of the positive pressure of the gas flowing into the positive pressure introduction holes Hl and Hr from the positive pressure introduction pipes 61l and 61r is determined by a single pressure reducing valve 65. Can be adjusted. Therefore, it is possible to minimize the increase in the number of components and the cost.

As described above, in the above embodiment, the component mounting machine 1 corresponds to an example of the "component mounting machine" of the present invention, the shaft holder 32 corresponds to an example of the "nozzle holder" of the present invention, and the housing 36 corresponds to the present invention. The housing body 361 corresponds to an example of the "main body" of the present invention, the hollow portion 362 corresponds to an example of the "hollow portion" of the present invention, and the positive pressure introduction pipe 61l and the positive pressure correspond to an example of the "housing". Each of the introduction pipes 61r corresponds to an example of the "positive pressure introduction path" of the present invention, the positive pressure source 62 corresponds to an example of the "positive pressure source" of the present invention, and the gas discharge mechanism 64 corresponds to the "adjustment" of the present invention. The gas discharge pipe 641 corresponds to an example of the "gas discharge path" of the present invention, and the flow control valve 642 corresponds to the "control valve" and the "flow control valve" of the present invention. The pressure reducing valve 65 corresponds to an example of the "adjustment unit", "control mechanism", "control valve" and "pressure reducing valve" of the present invention, and the positive pressure introduction hole Hl and the positive pressure introduction hole Hr correspond to one example. Each corresponds to an example of the "positive pressure introduction hole" of the present invention, the nozzle N corresponds to an example of the "nozzle" of the present invention, the opening Oi corresponds to an example of the "opening" of the present invention, and the opening Oo corresponds to the present invention. Corresponding to an example of the "opening" of the present invention, the working position Sl and the working position Sr correspond to an example of the "working position" of the present invention, respectively, and the positive pressure communication passage T corresponds to an example of the "positive pressure communication passage" of the present invention. However, the gap Δl corresponds to an example of the “gap” of the present invention, and the gap Δr corresponds to an example of the “gap” of the present invention.

The present invention is not limited to the above-described embodiment, and various modifications can be made to the above-described one without departing from the spirit of the present invention. For example, the number of nozzles N (= M) is not limited to 18.

Further, the number of working positions Sl and Sr (= L) is not limited to two, and may be three or more.

Further, the configuration of the positive pressure supply mechanism 6 may be omitted as appropriate. For example, it is not always necessary to provide the on-off valve 63.

Further, the place where the gas discharge mechanism 64 or the pressure reducing valve 65 is provided is not limited to the above example.

1 ... Parts mounting machine 32 ... Shaft holder (nozzle holder)
36 ... Housing 361 ... Housing body (main body)
362 ... Hollow part 61l ... Positive pressure introduction pipe (positive pressure introduction path)
61r ... Positive pressure introduction pipe (positive pressure introduction path)
62 ... Positive pressure source 64 ... Gas discharge mechanism (adjustment unit, control mechanism)
641 ... Gas discharge pipe (gas discharge path)
642 ... Flow rate adjusting valve (control valve, flow rate adjusting valve)
65 ... Pressure reducing valve (adjustment unit, control mechanism, control valve, pressure reducing valve)
Hl ... Positive pressure introduction hole Hr ... Positive pressure introduction hole N ... Nozzle Oi ... Opening Oo ... Opening Sl ... Working position Sr ... Working position T ... Positive pressure continuous passage Δl ... Gap Δr ... Gap

Claims (8)

It has a main body surrounding the hollow portion and L positive pressure introduction holes provided corresponding to L (L is an integer of 2 or more) working positions, and the positive pressure introduction holes penetrate the main body. With a housing that opens into the hollow portion
A nozzle holder that is rotatably arranged in the hollow portion with respect to the housing around a predetermined center of rotation and holds M nozzles (M is an integer larger than L) arranged in a circumferential shape.
A positive pressure source that outputs positive pressure and
L positive pressure introduction paths provided corresponding to the L positive pressure introduction holes and connecting the corresponding positive pressure introduction holes and the positive pressure source, respectively.
It is provided with an adjusting unit for adjusting the difference between the L positive pressure introduction holes of one target value of the pressure and the flow rate of the gas flowing into the positive pressure introduction hole from the positive pressure introduction path.
The nozzle holder is provided with M positive pressure communication passages provided corresponding to the M nozzles.
By rotating the nozzle holder, among the M nozzles, the L nozzles located at the L working positions are switched.
Of the M positive pressure communication passages, the openings of the L positive pressure communication passages corresponding to the L nozzles located at the L work positions face the openings of the L positive pressure introduction holes. , A component mounting machine in which the L nozzles and the L positive pressure input holes communicate with each other. Of the L positive pressure introduction holes, the gap between the inner wall of the main body provided with one positive pressure introduction hole and the nozzle holder is the inner wall of the main body provided with another positive pressure introduction hole. Narrower than the gap between the nozzle holder and the nozzle holder,
The component mounting machine according to claim 1, wherein the adjusting unit makes the target value of the gas flowing into the one positive pressure introduction hole smaller than the target value of the gas flowing into the other positive pressure introduction hole. The component mounting machine according to claim 2, wherein L is 2. The adjusting unit has a control mechanism for reducing the target value by a control valve.
The control mechanism is provided only in one positive pressure introduction path connecting the positive pressure source and the one positive pressure introduction hole among the L positive pressure introduction paths, and is provided from the positive pressure source to the one. The target value of the gas flowing into the positive pressure introduction hole from the one positive pressure introduction path is reduced by the control valve as compared with the target value of the gas flowing into the positive pressure introduction path. The component mounting machine according to claim 3, wherein the target value of the gas flowing into one positive pressure introduction hole is made smaller than the target value of the gas flowing into the other positive pressure introduction hole. The control mechanism has a gas discharge path that branches off from the one positive pressure introduction path.
The control valve is a flow rate adjusting valve that adjusts the flow rate of gas flowing through the gas discharge path.
The adjusting unit opens the flow rate adjusting valve and discharges the gas from the one positive pressure introduction path through the gas discharge path, so that the flow rate of the gas flowing into the one positive pressure introduction hole is measured. The component mounting machine according to claim 4, wherein the flow rate is smaller than the flow rate of the gas flowing into the other positive pressure introduction holes. The control valve is a pressure reducing valve provided in the one positive pressure introduction path.
The adjusting unit reduces the positive pressure output from the positive pressure source by the pressure reducing valve and then supplies the positive pressure to the one positive pressure introduction hole to supply the gas flowing into the one positive pressure introduction hole. The component mounting machine according to claim 4, wherein the pressure is made smaller than the pressure of the gas flowing into the other positive pressure introduction holes. The component mounting machine according to any one of claims 1 to 6, wherein M is 5 times or more of L. It has a main body surrounding the hollow portion and L positive pressure introduction holes provided corresponding to L (L is an integer of 2 or more) working positions, and the positive pressure introduction holes penetrate the main body. With respect to the housing opening in the hollow portion, M pieces arranged in a circumferential shape (M is from L) are held by nozzle holders rotatably arranged in the hollow portion around a predetermined rotation center. Of the nozzles (large integers), the step of locating the L nozzles at the L working positions and
The L positive pressures are provided from the L positive pressure introduction paths corresponding to the L positive pressure introduction holes and connecting the corresponding positive pressure introduction holes and the positive pressure source for outputting the positive pressure. A step of changing the difference between the L positive pressure introduction holes of one target value of the pressure and the flow rate of the gas flowing into the positive pressure introduction hole while flowing the gas into the introduction hole.
Of the M positive pressure communication passages provided in the nozzle holder corresponding to the M nozzles, the openings of the L positive pressure communication passages corresponding to the L nozzles located at the L working positions. Is opposed to the openings of the L positive pressure introduction holes, and the L nozzles and the L positive pressure input holes communicate with each other to reduce the blow pressure of the gas ejected from the L nozzles. The process of detection and
A method for calibrating the blow pressure of a nozzle, comprising a step of setting the difference between the target values among the L positive pressure introduction holes based on the blow pressure.

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