JP2021080080A - Conveyance vehicle - Google Patents

Abstract

To provide a conveyance vehicle which can convey a workpiece efficiently and safely.SOLUTION: A conveyance vehicle travels on a conveyance path installed above a processing device to convey a workpiece and includes: a frame attached with travelling wheels; a container which houses the workpiece; and a lifting unit which is provided at the frame and hangs the container to move up or down the container. The lifting unit includes: hanging members, each of which is connected to the container at one end side. Each hanging member is connected to the container through an elastic member.SELECTED DRAWING: Figure 9

Description

The present invention relates to a transport vehicle used for transporting a workpiece.

In the manufacturing process of device chips incorporated in electronic devices and the like, plate-shaped workpieces typified by semiconductor wafers and resin package substrates are processed by various processing devices. When transporting a work piece to this processing device, a cassette capable of accommodating a plurality of work pieces is usually used. When the processing apparatus receives a cassette containing a plurality of workpieces, the processing apparatus takes out the workpieces in order from the cassette and processes the cassette.

In order to increase the efficiency of processing the workpiece, a plurality of processing devices may be used in parallel. In this case, the workpiece must be conveyed to each of the plurality of processing devices at an appropriate timing. Therefore, a transfer system has been proposed in which a plurality of processing devices are connected by a transfer path (transport path) to realize transfer of a work piece to each processing device (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 6-177244

By the way, in order to maximize the capabilities of the plurality of processing devices, it is important to efficiently and safely transport the workpiece to each processing device. However, due to structural reasons of various devices for transporting the workpiece, it may not be possible to smoothly transport the workpiece.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a transport vehicle capable of efficiently and safely transporting a work piece.

According to one aspect of the present invention, it is a transport vehicle that travels on a transport path installed above a processing apparatus to transport a work piece, and has a frame on which running wheels are mounted and the work piece. The elevating unit includes a container for accommodating the container and an elevating unit provided on the frame for suspending and elevating the container. Provides a transport vehicle connected to the container via an elastic member.

The elastic member is preferably rubber or a spring.

By using the transport vehicle according to one aspect of the present invention, the workpiece can be transported efficiently and safely.

FIG. 1 is a plan view showing a configuration example of a transport system. FIG. 2 is a functional block diagram showing an example of the connection relationship of the transport system. FIG. 3 is a side view schematically showing a configuration example of a loader / unloader. FIG. 4A is a partial cross-sectional side view showing a state in which the outer door is closed and the inner door is open, and FIG. 4B is a part showing a state in which the outer door is open and the inner door is closed. It is a cross-sectional side view. FIG. 5 (A) is a partial cross-sectional side view showing a cassette mounting table and the like, and FIG. 5 (B) is a bottom view showing a cassette mounting table. FIG. 6 (A) is a partial cross-sectional side view showing how the cassette mounting table is pulled out from the internal storage area, and FIG. 6 (B) is a partial cross-sectional side view showing how the rollers have fallen off from the support table. FIG. 6C is a partial cross-sectional side view showing how the cassette mounting table is returned to the internal storage area. FIG. 7 (A) is a partial cross-sectional side view showing a state in which the workpiece unit is temporarily placed on the two upper guide rails, and FIG. 7 (B) shows the workpiece on the two lower guide rails. It is a partial cross-sectional side view which shows the state of temporarily placing a unit. FIG. 8A is a plan view showing two upper guide rails and the like, and FIG. 8B is a plan view showing a state in which the distance between the two upper guide rails is narrowed. 9 (A) is a perspective view showing the upper surface side of the transport vehicle, and FIG. 9 (B) is a perspective view showing the bottom surface side of the transport vehicle 10. FIG. 10 is an enlarged perspective view showing a front end portion of the transport vehicle. 11 (A) is a perspective view showing the container, and FIG. 11 (B) is a front view showing the container. FIG. 12 is a perspective view showing a transport vehicle in a state where the container is placed in the mounting area. FIG. 13 is a perspective view showing a transport vehicle in which the container is connected to the suspension member via an elastic member (expandable member). FIG. 14A is a plan view showing a configuration example of the elevating unit, and FIG. 14B is a side view showing a configuration example of the elevating unit. FIG. 15A is a plan view showing another configuration example of the elevating unit, and FIG. 15B is a side view showing another configuration example of the elevating unit. 16 (A) is a plan view showing a reel, and FIG. 16 (B) is a side view showing a reel. FIG. 17 is an enlarged perspective view showing the cover. FIG. 18A is a side view showing a cover in a state where the container is not stored in the storage area, and FIG. 18B is a side view showing a cover in a state where the container is stored in the storage area. .. FIG. 19A is a side view showing a transport vehicle when the container stored in the storage area is placed in the mounting area, and FIG. 19B is a current of the motor when the container is lowered. It is a graph which shows the value. FIG. 20 (A) is a side view showing a transport vehicle when the container placed in the mounting area is stored in the storage area, and FIG. 20 (B) is a current of the motor when the container is raised. It is a graph which shows the value. FIG. 21 is a perspective view showing the appearance of the processing apparatus and the transport path. FIG. 22 is a perspective view showing the internal structure of the processing apparatus. FIG. 23 is a perspective view showing a part of the transport path installed in the processing apparatus. 24 (A) and 24 (B) are perspective views showing a lower frame unit constituting the lower frame. FIG. 25 is a plan view showing the arrangement of the lower frame units constituting the lower frame. 26 (A) and 26 (B) are perspective views showing an upper frame unit constituting the upper frame. FIG. 27 is a plan view showing the arrangement of the upper frame units constituting the upper frame. FIG. 28 is a plan view showing a transport path formed by arranging a plurality of road surface panels. FIG. 29 is a functional block diagram showing a control unit of the transport vehicle. FIG. 30 is a diagram for explaining an example of a control method of the transport system. FIG. 31 is a perspective view showing the internal structure of the processing apparatus according to the second embodiment.

Embodiments of the present invention will be described with reference to the accompanying drawings. In each of the following embodiments, a case where a plurality of processing devices to be transported to the work piece are all cutting devices will be described, but the transport system is used for any kind of processing device for the work piece. It suffices if it is configured so that such as can be transported. That is, the destination of the workpiece or the like may be a processing device other than the cutting device.

For example, the transfer system may be configured to be able to transfer an workpiece to a plurality of laser processing devices. Further, the transfer system may be configured so that the workpiece can be sequentially conveyed to a plurality of types of processing devices used for a series of processing. Further, the transport system may be configured to transport the workpiece to various devices used in any process associated with the machining of the workpiece. That is, the destination of the work piece or the like may include a tape sticking device, an ultraviolet irradiation device, a cleaning device, or the like that is not intended to process the work piece.

(Embodiment 1)
FIG. 1 is a plan view showing a configuration example of a transport system 2 according to the present embodiment, and FIG. 2 is a functional block diagram showing an example of a connection relationship of the transport system 2. As shown in FIG. 1, the transport system 2 according to the present embodiment is a plate-shaped workpiece 11 processed by a processing device (cutting device) 4 (see FIGS. 8A, 8B, etc.). Includes a transport path 6 for transporting.

The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The surface side of the workpiece 11 is divided into a plurality of small areas by a plurality of scheduled division lines (streets) intersecting each other, and each small area includes an IC (Integrated Circuit) and a MEMS (Micro Electro Mechanical Systems). ) Etc. are formed.

A tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached to the back surface side of the workpiece 11. The outer peripheral portion of the tape 13 is fixed to an annular frame 15 surrounding the workpiece 11. As described above, in the transfer system 2 according to the present embodiment, the workpiece 11 is conveyed to the machining apparatus 4 in the state of the workpiece unit 17 supported by the frame 15 via the tape 13.

The workpiece 11 of the present embodiment is a disk-shaped wafer made of a semiconductor material such as silicon, but the material, shape, structure, size, etc. of the workpiece 11 are not limited. For example, a substrate or the like made of other materials such as semiconductors, ceramics, resins, and metals can be used as the workpiece 11.

Similarly, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the device. A device may not be formed on the workpiece 11. Further, in the present embodiment, the work piece unit 17 in which the work piece 11 is supported by the frame 15 via the tape 13 is to be conveyed, but the work piece 11 to which the tape 13 is not attached or the frame. The workpiece 11 or the like that is not supported by 15 may be the target of transportation.

The size of the frame 15 described above is set according to the size of the work piece 11 (diameter of the work piece 11 and the like). For example, the outer diameter of the frame 15 that supports the workpiece 11 having a diameter of about 300 mm is larger than the outer diameter of the frame 15 that supports the workpiece 11 having a diameter of about 200 mm. That is, when a large workpiece 11 is used, the outer diameter of the workpiece unit 17 also increases.

Further, the processing apparatus 4 for processing the workpiece 11 is connected to the transport system 2 as a transport destination of the workpiece 11, but is not necessarily a component of the transport system 2. Therefore, as described above, the processing apparatus 4 may be changed or omitted according to the mode of use of the transport system 2.

Note that FIG. 1 shows only one processing device 4a and FIG. 2 shows two processing devices 4a and 4b for convenience of explanation. However, in the present embodiment, the transfer destination of the workpiece 11 is shown. As a result, two or more processing devices 4 are required. That is, the number of processing devices 4 connected to the transfer system 2 is 2 or more.

The transport path 6 is installed above each processing device 4 so as to connect the plurality of processing devices 4. The workpiece 11 is transported to each processing device 4 through the transport path 6. Since the transport path 6 is installed above the processing device 4, the transport path 6 does not interfere with the piping 21 or the like connected to the side surface of each processing device 4.

Below the transport path 6, in addition to the processing device 4, a loader / unloader (conveyor) 8 for accommodating the work piece 11 before processing and the work piece 11 after processing is provided. The work piece 11 before processing contained in the loader / unloader 8 is carried into the transport vehicle 10 at an arbitrary timing.

The transport vehicle 10 travels on the transport path 6 and transports the work piece 11 before processing received from the loader / unloader 8 to each processing device 4. Further, when the transport vehicle 10 receives the processed workpiece 11 from the processing apparatus 4, it travels on the transport path 6 and conveys the processed workpiece 11 to the loader / unloader 8.

However, when a plurality of types of devices (processing device 4 and the like) are connected to the transfer system 2, when the transfer vehicle 10 receives the processed workpiece 11 from a certain processing device 4, the transfer path 6 It may travel on and transport the processed workpiece 11 to an apparatus used in the next process. Although two transport vehicles 10a and 10b are shown in FIGS. 1 and 2, the number of transport vehicles 10 is not limited.

As shown in FIG. 2, a control unit 12 for controlling these operations is wirelessly connected to the processing device 4, the loader / unloader 8, and the transport vehicle 10. However, the control unit 12 may be configured so as to be able to control the operations of the processing device 4, the loader / unloader 8, the transport vehicle 10, and the like, and may be connected to them by wire.

FIG. 3 is a side view schematically showing a configuration example of the loader / unloader 8. In FIG. 3, some components are shown by functional blocks. As shown in FIG. 3, the loader / unloader 8 includes a housing 22 that houses various components. In FIG. 3, for convenience of explanation, the housing 22 is shown only by the outline.

The positions of the two different heights along the height direction of the housing 22 (Z ₁ axial direction), respectively, the cassette accommodating mechanism 24 is provided. That is, the loader / unloader 8 of the present embodiment includes a first cassette accommodating mechanism 24a and a second cassette accommodating mechanism 24b arranged above the first cassette accommodating mechanism 24a. However, there is no limit to the number of cassette accommodating mechanisms 24 included in the loader / unloader 8. The loader / unloader 8 may include one or more cassette accommodating mechanisms 24.

Each cassette accommodating mechanism 24 has a flat plate-shaped support base 26. The upper surface side of the support base 26, the guide mechanism (not shown) are provided, this guide mechanism, flat cassette so that it can slide along the depth direction of the housing 22 (Y ₁ axial direction) A mounting table 28 is mounted.

On the upper surface of the cassette mounting table 28, a cassette 30 capable of accommodating a plurality of (for example, 10 or more) workpieces 11 is placed. The cassette 30 is used when a plurality of workpiece units 17 are collectively conveyed. By using such a cassette 30, the operator can carry a plurality of workpiece units 17 together into the loader / unloader 8.

At a position corresponding to each cassette accommodating mechanism 24 of the housing 22, a carry-in outlet 32 through which the cassette mounting table 28 on which the cassette 30 is mounted can be passed is formed. At the time of loading / unloading the cassette 30, the cassette 30 passes through the loading / unloading port 32 by sliding the cassette mounting table 28 on which the cassette 30 is mounted.

An outer door (second door) 34 capable of closing each carry-in outlet 32 is arranged at a position corresponding to each carry-in outlet 32 of the housing 22. The lower portion of the outer door 34 is connected to the outer end of the support base 26 via, for example, a rotary connecting member 36 such as a hinge having a horizontal rotating shaft, and the outer door 34 rotates the rotary connecting member 36. It is opened and closed by rotating around the axis.

When the outer door 34 is open, the cassette mounting table 28 can be pulled out to the external carry-in / out area (external area) 38a (see FIG. 6A and the like) located outside the carry-in / exit port 32. An air-driven lock mechanism (not shown) for fixing the closed outer door 34 so as not to open is provided at a position corresponding to each carry-in / exit port 32 of the housing 22.

For example, the operator places the carried cassette 30 on the cassette mounting table 28 pulled out to the external loading / unloading area 38a. After that, when the operator pushes the cassette mounting table 28 into the housing 22, the cassette mounting table 28 and the cassette 30 have an internal storage area (internal area) 38b located inside the carry-in outlet 32 (FIG. 6 (A)). Etc.).

In the present specification, the internal storage area 38b may be referred to as a first mounting area on which the cassette 30 is mounted. When the cassette 30 is carried out from the cassette storage mechanism 24, the cassette mounting table 28 may be pulled out from the internal storage area 38b to the external loading / unloading area 38a after the outer door 34 is opened.

An inner door (first door) 40 that can move along the height direction is provided at a position opposite to the carry-in outlet 32 with respect to the internal storage area 38b of each cassette storage mechanism 24. The inner door 40 of the first cassette accommodating mechanism 24a moves between the upper closed position and the lower open position adjacent to the internal accommodating area 38b of the first cassette accommodating mechanism 24a, and is on the side of the second cassette accommodating mechanism 24b. The inner door 40 moves between an upper open position and a lower closed position adjacent to the internal accommodation area 38b of the second cassette accommodation mechanism 24b. Therefore, the two inner doors 40 do not interfere with each other.

FIG. 4A is a partial cross-sectional side view showing the first cassette accommodating mechanism 24a in a state where the outer door 34 is closed and the inner door 40 is open. In FIG. 4A, some components of the loader / unloader 8 are shown by functional blocks. The structure and operation of the second cassette accommodating mechanism 24b are the same as the structure and operation of the first cassette accommodating mechanism 24a except for the operation of moving the inner door 40.

As shown in FIG. 4A, an elevating mechanism 42 is connected to the inner door 40. The elevating mechanism 42 is, for example, an air actuator (air cylinder) that moves an object by using air pressure, and has a cylinder tube 42a and a piston rod 42b that can move with respect to the cylinder tube 42a.

A piston (not shown) is connected to the base end of the piston rod 42b housed in the cylinder tube 42a. Further, a connecting member 42c fixed to a surface of the inner door 40 opposite to the internal accommodating area 38b is connected to the tip of the piston rod 42b exposed from the cylinder tube 42a.

If the piston and the piston rod 42b are moved from above to below by controlling the intake and exhaust to the cylinder tube 42a, the inner door 40 of the first cassette accommodating mechanism 24a moves from the closed position to the open position. Further, if the piston and the piston rod 42b are moved from the lower side to the upper side, the inner door 40 of the first cassette accommodating mechanism 24a moves from the open position to the closed position. The elevating mechanism 42 may be realized by another mechanism such as a rodless air cylinder.

At a position of the support base 26 facing the inner door 40, a first sensor 44 used for detecting whether or not the inner door 40 is open is provided. The first sensor 44 is, for example, a magnet sensor, and detects the strength of the magnetic field by the magnet 44a (see FIG. 4B) attached to a predetermined position of the inner door 40.

For example, as shown in FIG. 4A, when the inner door 40 is opened and the magnet 44a is separated from the first sensor 44, the strength of the magnetic field generated by the magnet 44a becomes weaker at the position of the first sensor 44. Therefore, it can be determined whether or not the inner door 40 is open by using the strength of the magnetic field detected by the first sensor 44.

A control device 46 that controls each component of the loader / unloader 8 is connected to the first sensor 44, and the first sensor 44 sends information regarding the detected magnetic field strength to the control device 46. The control device 46 determines that the inner door 40 has opened when the strength of the magnetic field detected by the first sensor 44 becomes weaker than the reference, and when the strength of the magnetic field detected by the first sensor 44 becomes stronger than the reference, the inner door It is determined that 40 is closed. The first sensor 44 may be wirelessly connected to the control device 46.

The control device 46 is composed of, for example, a computer including a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. .. The function of the control device 46 is realized by operating the processing device or the like according to the software stored in the auxiliary storage device.

A second sensor 48 used for detecting whether or not the outer door 34 is open is provided at a position corresponding to the carry-in / exit 32 of the housing 22. The second sensor 48 is, for example, a magnet sensor, and detects the strength of the magnetic field by the magnet 48a attached to a predetermined position of the outer door 34. The second sensor 48 is connected to the control device 46. The second sensor 48 may be wirelessly connected to the control device 46.

FIG. 4B is a partial cross-sectional side view showing a state in which the outer door 34 is open and the inner door 40 is closed. In FIG. 4B, the control device 46 is shown as a functional block. As shown in FIG. 4B, when the outer door 34 is opened and the magnet 48a is separated from the second sensor 48, the strength of the magnetic field generated by the magnet 48a becomes weaker at the position of the second sensor 48.

Therefore, it can be determined whether or not the outer door 34 is open by using the strength of the magnetic field detected by the second sensor 48. Specifically, the second sensor 48 sends information regarding the detected magnetic field strength to the control device 46. The control device 46 determines that the outer door 34 has opened when the strength of the magnetic field detected by the second sensor 48 becomes weaker than the reference, and when the strength of the magnetic field detected by the second sensor 48 becomes stronger than the reference, the outer door It is determined that 34 is closed.

The control device 46 has a function as a first safety mechanism for restricting access from the outside to the inside of the loader / unloader 8. The first safety mechanism is realized by the control device 46 appropriately controlling an air-driven lock mechanism that fixes the closed outer door 34 so as not to open.

Specifically, when it is determined that the outer door 34 is closed and the inner door 40 is open, the control device 46 uses a lock mechanism to prevent the outer door 34 from opening. To fix. In this way, by controlling whether or not the outer door 34 can be opened and closed by the control device 46, it is possible to prevent the operator from accidentally accessing the moving moving portion or the like located inside the loader / unloader 8.

Further, the control device 46 has a function as a second safety mechanism for restricting access from the outside to the inside of the loader / unloader 8. The second safety mechanism is realized by appropriately managing the power supply of the loader / unloader 8 by the control device 46. Specifically, when it is determined that the outer door 34 is open and the inner door 40 is closed, and the inner door 40 is opened for some reason, the control device 46 causes the loader un. Turn off the power of the loader 8.

Due to the second safety mechanism, the loader / unloader 8 is stopped in a situation where the outer door 34 and the inner door 40 are opened at the same time. In this way, by appropriately managing the power supply of the loader / unloader 8 by the control device 46, it is possible to prevent the operator from accidentally accessing the moving moving part or the like located inside the loader / unloader 8. ..

FIG. 5 (A) is a partial cross-sectional side view showing the cassette mounting table 28 and the like, and FIG. 5 (B) is a bottom view showing the cassette mounting table 28. A stopper member 50 is arranged on the lower surface 28a side of the cassette mounting table 28. The stopper member 50 has, for example, a square bar 50a that is long in the depth direction. However, the length of the square bar 50a in the depth direction is shorter than the length of the cassette mounting table 28 in the depth direction. Further, the square bar 50a is made of a metal such as stainless steel. However, there are no major restrictions on the material and shape of the square bar 50a.

One end of the square bar 50a is located inwardly in the depth direction (i.e., the end portion of the inner door 40 side) rotation, the along the generally perpendicular width direction with respect to the height direction and the depth direction (X ₁ axial direction) A shaft (not shown) is provided, and the rotating shaft is supported in such a manner that the roller 50b can rotate. The diameter of the roller 50b is smaller than the distance between the lower surface 28a of the cassette mounting table 28 and the upper surface 26a of the support table 26.

A shaft mechanism 52 that supports the square bar 50a in a rotatable manner is provided at a position between the inner end and the outer other end of the square bar 50a. The shaft mechanism 52 has a rotation shaft 52a along the width direction. The rotating shaft 52a is connected to a position on the other end side (outside) of the center of the square bar 50a in the longitudinal direction (depth direction).

Both ends of the rotating shaft 52a in the width direction are inserted into bearing holes of a pair of bearings 52b fixed to the lower surface 28a side of the cassette mounting table 28. As a result, the square bar 50a is supported by the bearing 52b so that it can rotate around the rotation shaft 52a in a plane parallel to the height direction and the depth direction (in a plane perpendicular to the width direction).

As described above, the rotating shaft 52a is connected to the position on the other end side of the center of the square bar 50a. Therefore, the direction of the moment around the rotation axis 52a of gravity acting on the stopper member 50 is such that one end of the square bar 50a is moved downward. That is, unless a sufficient force is applied to the square bar 50a, the position of one end of the square bar 50a is lower than the position of the other end of the square bar 50a due to the action of gravity.

Therefore, for example, when the entire cassette mounting table 28 is positioned in the internal storage area 38b, the roller 50b comes into contact with the upper surface 26a of the support table 26. Further, when the cassette mounting base 28 is moved above the support base 26, the roller 50b rolls on the upper surface 26a of the support base 26.

The lower end of a pin (pressing portion) 54 long in the height direction is connected to the other end of the square bar 50a. A through hole 28c that penetrates the cassette mounting table 28 in the height direction is formed at a position corresponding to the pin 54 of the cassette mounting table 28, and the pin 54 is inserted into the through hole 28c. The through hole 28c is formed in a size that does not hinder the movement of the inserted pin 54 in the height direction.

The length of the pin 54 in the height direction is longer than the thickness of the cassette mounting table 28. Therefore, when the roller 50b is in contact with the upper surface 26a of the support base 26, the upper portion of the pin 54 is exposed to the upper surface 28b side of the cassette mounting base 28. A disk-shaped button 54b having an outer diameter larger than the diameter of the pin 54 is fixed to the exposed portion of the pin 54.

When the button 54b fixed to the pin 54 is pushed down from above, the other end of the square bar 50a moves downward, and one end of the square bar 50a moves upward. That is, the roller 50b moves upward. A ring 54a having an outer diameter larger than the diameter of the through hole 28c is fixed in the vicinity of the lower portion of the pin 54.

FIG. 6A is a partial cross-sectional side view showing how the cassette mounting table 28 is pulled out from the internal storage area 38b. The cassette mounting base 28 is mounted so as to be slidable with respect to the support base 26 by the above-mentioned guide mechanism (not shown), and is pulled out toward the outside of the carry-in outlet 32.

When the cassette mounting base 28 slides outward and the roller 50b goes out of the outer end of the upper surface 26a of the support base 26, the square bar is caused by the moment around the rotating shaft 52a of gravity acting on the stopper member 50. One end of 50a moves downward. That is, the roller 50b is in a state of falling off from the support base 26.

FIG. 6B is a partial cross-sectional side view showing how the roller 50b has fallen off from the support base 26. When the roller 50b falls off the support base 26, the roller 50b is positioned lower than the upper surface 26a. As a result, the inward movement of the cassette mounting base 28 is restricted by the stopper member 50 coming into contact with the outer surface 26b of the support base 26. The pin 54 rises as the roller 50b falls off, and the ring 54a comes into contact with the lower surface 28a of the cassette mounting table 28.

In this way, the stopper member 50 and the shaft mechanism 52 function as a movement regulating mechanism that regulates the movement of the cassette mounting table 28 inward when the cassette mounting table 28 is pulled out. By providing the movement control mechanism, for example, the relatively heavy cassette 30 can be easily carried in and out, so that the risk that the workpiece 11 housed in the cassette 30 is damaged due to the loading and unloading can be reduced.

That is, if the cassette mounting table 28 moves inward when the cassette 30 is placed (carried in) on the cassette mounting table 28, there is a risk that the operator will drop the cassette 30 or the operator will open the cassette 30 to the outer door 34. Although the risk of collision with the door increases, these risks can be sufficiently suppressed by restricting the movement of the cassette mounting table 28 to the inside by the movement regulation mechanism.

Further, if the cassette mounting table 28 moves inward when the operator carries out the cassette 30 from the cassette mounting table 28, the cassette 30 to be carried out is a part of the housing 22 located above the carry-in / exit port 32. The risk of collision with the like is high, but this risk can be sufficiently suppressed by restricting the movement of the cassette mounting table 28 to the inside by the movement regulation mechanism.

Since the movement regulation mechanism of the present embodiment is realized by the rotation of the square bar 50a in a plane parallel to the height direction and the depth direction, for example, the movement regulation mechanism is located on the outer portion of the cassette mounting table 28 in the width direction. The cassette accommodating mechanism 24 does not become large in the width direction as in the case of providing. Therefore, it becomes easier to realize a cassette accommodating mechanism 24 that is compact in the width direction as compared with the case where the movement restricting mechanism is provided on the outer portion of the cassette mounting table 28 in the width direction.

As for the conditions such as the length of the square bar 50a and the position of the shaft mechanism 52, the area on the cassette mounting table 28 on which the cassette 30 is placed is the housing 22 with the square bar 50a falling off from the support base 26. It is set to be completely exposed from. Therefore, the operator can place (carry in) the cassette 30 on the cassette mounting table 28 with the cassette 30 completely exposed from the housing 22.

FIG. 6C is a partial cross-sectional side view showing how the cassette mounting table 28 is returned to the internal storage area 38b. When returning the cassette mounting table 28 to the internal storage area 38b, the operator pushes down the button 54b. The operator pushes down the button 54b, for example, until the lower part of the button 54b touches the upper surface 28b of the cassette mounting table 28. As a result, the pin 54 is pushed downward, and the roller 50b moves above the upper surface 26a of the support base 26.

The roller 50b rises until it comes into contact with, for example, the lower surface 28a of the cassette mounting table 28. As a result, the restriction on the movement of the cassette mounting table 28 to the inside is lifted, and the cassette mounting table 28 can be returned to the internal storage area 38b. The operator may push the cassette mounting table 28 into the internal storage area 38b with the button 54b pressed down.

The cassette accommodating mechanism 24 is not limited to the above example. For example, the stopper members 50 may be provided at two positions different in the width direction of the cassette mounting table 28, respectively. In this case, a through hole 28c is formed at a position corresponding to each pin 54. Further, in this case, the two square bars 50a constituting the two stopper members 50 may be connected to each other at arbitrary positions. If the two square bars 50a are connected to each other, one pin 54 can be omitted.

Further, the through hole 28c may be formed in the region where the cassette 30 of the cassette mounting table 28 is arranged. In this case, when the cassette 30 is placed on the cassette mounting table 28, the pin 54 is pushed down by the weight of the cassette 30. That is, it is not necessary for the operator to push down the pin 54 to release the regulation by the stopper member 50.

As shown in FIG. 3, the loader / unloader 8 includes an elevating mechanism 56 arranged on the side opposite to the internal accommodation area 38b of the inner door 40. The elevating mechanism 56 has a support column 56a that is long in the height direction. A pair of guide rails (not shown) along the longitudinal direction (that is, the height direction) of the support column 56a are provided on the inner door 40 side of the support column 56a.

A plate-shaped lifting table 58 is attached to the pair of guide rails of the lifting mechanism 56 so as to be slidable in the height direction. The upper surface of the lift 58 is formed to be substantially flat. The lift 58 slides in the height direction along a pair of guide rails while keeping its upper surface substantially perpendicular to the height direction.

A motor (not shown) and a drive pulley (not shown) connected to the rotating shaft of the motor are provided below the support column 56a. A driven pulley (not shown) is provided on the upper portion of the support column 56a. One toothless endless belt (not shown) is hung on the drive pulley and the driven pulley, and a part of the toothless endless belt is fixed to the lift 58. Therefore, when the rotation shaft of the motor is rotated in one direction, the elevating table 58 is raised, and when the rotating shaft of the motor is rotated in the other direction, the elevating table 58 is lowered.

On the upper surface side of the elevating table 58, a work piece 11 carried out from the cassette 30 in the cassette housing mechanism 24 and a work piece 11 carried into the cassette 30 in the cassette housing mechanism 24 are temporarily placed. A unit 60 is provided. The temporary storage unit 60 has a square tubular housing 62 having an opening formed on the cassette accommodating mechanism 24 side. Inside the housing 62, a plurality of transport units (transport mechanisms) 64 that can grip each of the workpieces 11 and move in the depth direction are arranged.

When the workpiece unit 17 is handed over between the temporary storage unit 60 and the first cassette 30a of the first cassette storage mechanism 24a, the height of the temporary storage unit 60 is set to the height of the first cassette storage mechanism 24a. match. That is, the temporary storage unit 60 is arranged in _{the first transport area B 1} a adjacent to the inner door 40 side in the depth direction with respect to _{the first mounting area A 1} a of the first cassette accommodating mechanism 24 a.

When the temporary storage unit 60 is _{arranged in the first transport area B 1} a and the inner door 40 of the first cassette accommodating mechanism 24 a is opened, the transport unit 64 is placed in the first cassette 30 a of the first _{mounting area A 1 a.} You will be able to access it. For example, the transport unit 64 grips the workpiece unit 17 housed in the first cassette 30a and pulls it out to the temporary storage unit 60.

Further, the transport unit 64 grips the workpiece unit 17 temporarily placed in the temporary placement unit 60 and accommodates it in the first cassette 30a. In this way, the transport unit 64 can transport the workpiece 11 between the temporary storage unit 60 in _{the first transport area B 1 a and the first cassette 30 a in the first mounting region A 1 a.}

When handing over the workpiece unit 17 between the temporary storage unit 60 and the second cassette 30b of the second cassette storage mechanism 24b, the height of the temporary storage unit 60 is set to the height of the second cassette storage mechanism 24b. match. That is, the temporary storage unit 60 is arranged in _{the first transport area B 1} b adjacent to the inner door 40 side in the depth direction with respect to _{the first mounting area A 1} b of the second cassette accommodating mechanism 24 b.

When the temporary storage unit 60 is _{arranged in the first transport area B 1} b and the inner door 40 of the second cassette accommodating mechanism 24 b is opened, the transport unit 64 is placed in the second cassette 30 b of the _{first mounting area A 1 b.} You will be able to access it. For example, the transport unit 64 grips the workpiece unit 17 housed in the second cassette 30b and pulls it out to the temporary storage unit 60.

Further, the transport unit 64 grips the workpiece unit 17 temporarily placed in the temporary placement unit 60 and accommodates it in the second cassette 30b. In this way, the transport unit 64 can transport the workpiece 11 between the temporary placement unit 60 in _{the first transport region B 1 b and the second cassette 30 b in the first mounting region A 1 b.}

A mounting table 66 is provided above the second cassette accommodating mechanism 24b. Further, in the area directly above the mounting table 66, an opening 22b that vertically penetrates the ceiling 22a of the housing 22 is provided. Further, in the region directly above the mounting table 66 and the opening 22b, an opening 6a that vertically penetrates the transport path 6 is provided.

When transporting the workpiece unit 17 between the transport vehicle 10 and the temporary storage unit 60, first, the transport vehicle 10 provided with the container (cassette) 102 capable of accommodating the workpiece unit 17 is opened at the opening 6a. Move it upwards. Then, the container 102 is lowered so as to be suspended by the hanging member 112, and the container 102 is placed on the upper surface (second mounting area A ₂ ) of the mounting table 66.

Further, the height of the temporary storage unit 60 is adjusted to the height of the container 102 mounted on the mounting table 66. That is, the temporary placement unit 60 is arranged in _{the second transport area B 2} adjacent to the mounting table 66 in the depth direction. Thus, the transport unit 64 will be able to access the container 102 placed on the depositing area A ₂ the second loading. For example, the transport unit 64 grips the workpiece unit 17 housed in the container 102 and pulls it out to the temporary storage unit 60.

Further, the transport unit 64 grips the workpiece unit 17 temporarily placed in the temporary placement unit 60 and stores it in the container 102. Thus, the transport unit 64, between the second temporary unit 60 of the transport region B _2, a container 102 mounted on the mounting table 66, can transfer the workpiece 11. The elevating mechanism 56 for raising and lowering the temporary storage unit 60 and the transport unit 64 in the temporary storage unit 60 are connected to the above-mentioned control device 46. The operation of the elevating mechanism 56 and the transport unit 64 is controlled by the control device 46.

The control device 46 is further connected to a receiver 68 that receives a signal (information) from the outside and sends it to the control device 46, and a transmitter 70 that transmits the signal (information) received from the control device 46 to the outside. Has been done. The receiver 68 receives, for example, a signal transmitted from the control unit 12 of the transport system 2 and sends it to the control device 46.

The control device 46 controls the operation of each component of the loader / unloader 8 based on, for example, a signal received from the receiver 68. Further, the control device 46 generates, for example, a notification signal and sends it to the transmitter 70. The transmitter 70 transmits, for example, a signal received from the control device 46 to the control unit 12 of the transfer system 2.

In the loader / unloader 8 of the present embodiment, the workpiece unit 17 is placed between the cassette 30 in which the plurality of workpiece units 17 are housed and the container 102 of the transport vehicle 10 via the temporary storage unit 60. Can be transported. Therefore, the workpiece unit 17 can be transported to each processing apparatus 4 in a timely manner, and the workpiece unit 17 processed by each processing apparatus 4 can be recovered in a timely manner.

FIG. 7 (A) is a partial cross-sectional side view showing a state in which the workpiece unit 17 is temporarily placed on the upper stage of the temporary placement unit 60, and FIG. 7 (B) is a partial cross-sectional side view showing a state in which the workpiece unit 17 is temporarily placed on the upper stage of the temporary placement unit 60. It is a partial cross-sectional side view which shows the state which the thing unit 17 is temporarily placed. The housing 62 of the temporary storage unit 60 includes, for example, an upper plate 62a arranged at the upper part and a lower plate 62b arranged at the lower part.

An upper end portion of a pillar (not shown) is connected to each of the two end portions in the width direction of the upper plate 62a. Further, the lower end portions of the columns are connected to the two end portions in the width direction of the lower plate 62b, respectively. That is, the upper plate 62a and the lower plate 62b are connected to each other via two sets of pillars. In the space between the upper plate 62a and the lower plate 62b, a pair of side plates 62c separated in the width direction are arranged. Further, an opening 62d is formed at the end of the housing 62 on the cassette accommodating mechanism 24 side.

At the same height inside the pair of side plates 62c, long upper guide rails (first temporary placement portions) 72a are arranged along the depth direction, respectively. Each upper guide rail 72a has a support surface that supports the workpiece unit 17 (frame 15) from below, and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction. ..

Inside the pair of side plates 62c, lower guide rails (second temporary placement portions) 72b, which are long in the depth direction, are arranged at positions below the upper guide rails 72a. Each lower guide rail 72b includes a support surface that supports the workpiece unit 17 (frame 15) from below, and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction.

As described above, by providing the upper guide rail 72a and the lower guide rail 72b at different height positions inside the housing 62, the temporary placement unit 60 can simultaneously accommodate the two workpiece units 17. Therefore, the workpiece unit 17 can be efficiently placed between the container 102 or the cassette 30 of the transport vehicle 10 and the temporary placement unit 60, as compared with the case where the temporary placement unit can accommodate only one workpiece unit 17. Can be transported.

For example, the upper guide rail 72a is used to accommodate the workpiece unit 17 before machining, and the lower guide rail 72b is used to accommodate the workpiece unit 17 after machining. However, there is no limitation on the mode of accommodating the workpiece unit 17. The upper guide rail 72a may be used to accommodate the workpiece unit 17 after processing, and the lower guide rail 72b may be used to accommodate the workpiece unit 17 before machining.

A first transport unit 64a is provided at a height position corresponding to the upper guide rail 72a, and a second transport unit 64b is provided at a height position corresponding to the lower guide rail 72b. Each transport unit 64 includes a grip portion that includes two plate members arranged one above the other. The two plate members are arranged so that the lower surface of the upper plate member and the upper surface of the lower plate member are substantially parallel to each other.

The grip of each transport unit 64 further includes an actuator (not shown) that adjusts the spacing between the two plate members. By narrowing the distance between the two plate members by this actuator, the frame 15 of the workpiece unit 17 is gripped. Further, by widening the distance between the two plate members, the frame 15 of the workpiece unit 17 is released from the two plate members.

Further, each transport unit 64 is provided with a horizontal movement mechanism (not shown) for moving the grip portion in the depth direction. The horizontal movement mechanism has a linear guide (not shown) provided along the depth direction. The transport unit 64 is connected to the linear guide in a slidable manner.

For example, a driven pulley (not shown) having a rotation axis substantially parallel to the width direction is provided on one end side of the linear guide. Further, on the other end side of the linear guide, a drive pulley (not shown) having a rotation shaft substantially parallel to the width direction and a motor (not shown) in which the rotation shaft is connected to the drive pulley are provided. There is.

A toothless endless belt (not shown) is hung on the driven pulley and the drive pulley, and a part of the toothed endless belt is fixed to the grip portion. Therefore, when the rotation shaft of the motor is rotated in one direction, the grip portion moves to one side in the depth direction, and when the rotation shaft of the motor is rotated in the other direction, the grip portion moves to the other side in the depth direction.

When temporarily placing the workpiece unit 17 on the upper guide rail 72a, first, as shown in FIG. 7A, the height of the temporary placement unit 60 is adjusted by the elevating mechanism 56, and then the upper guide rail 72a The height is adjusted to the height of the container 102 or the cassette 30 in which the workpiece unit 17 is housed.

Next, the grip portion of the first transport unit 64a is moved to the inside of the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 housed in the container 102 or the cassette 30 is gripped by the grip portion of the first transport unit 64a. After that, the grip portion of the first transport unit 64a is moved in a direction away from the container 102 or the cassette 30. As a result, the workpiece unit 17 is placed on the upper guide rail 72a.

The same applies to the operation when the workpiece unit 17 temporarily placed on the upper guide rail 72a is housed in the container 102 or the cassette 30. In this case, after the workpiece unit 17 temporarily placed on the upper guide rail 72a is gripped by the grip portion of the first transport unit 64a, the grip portion of the first transport unit 64a is gripped by the container 102 or the cassette 30. You can move it inside.

When temporarily placing the workpiece unit 17 on the lower guide rail 72b, first, as shown in FIG. 7B, the height of the temporary placement unit 60 is adjusted by the elevating mechanism 56, and then the lower guide rail 72b is placed. The height is adjusted to the height of the container 102 or the cassette 30 in which the workpiece unit 17 is housed.

Next, the grip portion of the second transport unit 64b is moved to the inside of the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 housed in the container 102 or the cassette 30 is gripped by the grip portion of the second transport unit 64b. After that, the grip portion of the second transport unit 64b is moved in a direction away from the container 102 or the cassette 30. As a result, the workpiece unit 17 is placed on the lower guide rail 72b.

The same applies to the operation when the workpiece unit 17 temporarily placed on the lower guide rail 72b is housed in the container 102 or the cassette 30. In this case, after the workpiece unit 17 temporarily placed on the lower guide rail 72b is gripped by the grip portion of the second transport unit 64b, the grip portion of the second transport unit 64b is gripped by the container 102 or the cassette 30. You can move it inside.

The operation related to the transfer of the workpiece unit 17 between the cassette 30 and the container 102 is, for example, as follows. First, the height of the temporary storage unit 60 is adjusted by the elevating mechanism 56, and the unprocessed workpiece unit 17 housed in the cassette 30 is pulled out to the upper guide rail 72a. Next, the temporary placement unit 60 is raised by the elevating mechanism 56, and the processed workpiece unit 17 housed in the container 102 on the mounting table 66 is pulled out to the lower guide rail 72b.

Then, the height of the temporary placement unit 60 is adjusted by the elevating mechanism 56, and the work piece unit 17 before processing temporarily placed on the upper guide rail 72a is housed in the container 102 on the mounting table 66. By this operation, the work piece unit 17 after processing is efficiently carried out (collected) from the container 102 and the work piece unit 17 before processing is carried in (distributed) into the container 102 efficiently. However, the operation related to the transport of the workpiece unit 17 is not limited to this. Further, the relationship between the upper guide rail 72a and the lower guide rail 72b may be replaced as necessary.

FIG. 8A is a plan view of the two upper guide rails 72a and the like. The upper guide rail 72a and the lower guide rail 72b located on one side in the width direction are fixed to _{the first side plate 62c 1.} Further, the upper guide rail 72a and the lower guide rail 72b located on the other side in the width direction are fixed to _{the second side plate 62c 2.}

On one end side in the depth direction of the lower plate 62b through a first opening 62e ₁ passing through the one side portion in the width direction of the lower plate 62b vertically, the other side portion in the width direction of the lower plate 62b vertically A second opening 62e ₂ is formed. A part of the first side plate 62c ₁ on the one end side in the depth direction is inserted into _{the first opening 62e 1,} and a part of the second side plate 62c ₂ on the one end side in the depth direction _{is inserted into the second opening 62e 2.} Is inserted.

A base portion of the first air actuator 74a and a base portion of the second air actuator 74b are fixed in a region adjacent to _{the first opening 62e 1} and the second opening 62e ₂ on the lower surface of the lower plate 62b. The movable portion (for example, the piston rod) of the first air actuator 74a is connected to a part of the first side plate 62c _{1 inserted into the first opening 62e 1.} The movable portion (for example, the piston rod) of the second air actuator 74b is connected to a part of the second side plate 62c _{2 inserted into the second opening 62e 2.}

A first guide mechanism 76a and a second guide mechanism 76b are provided on the other end side of the lower plate 62b in the depth direction. The first guide mechanism 76a includes a guide rail fixed to the upper surface of the lower plate 62b and long _{in the width direction, a slider fixed to the lower side of the first side plate 62c 1} and attached to the guide rail so as to be slidable in the width direction. including. Further, the second guide mechanism 76b includes a guide rail fixed to the upper surface of the lower plate 62b _{and a slider fixed to the lower side of the second side plate 62c 2} and attached to the guide rail so as to be slidable in the width direction. Including.

_{Therefore, if the distance between the first side plate 62c 1} and the second side plate 62c ₂ is changed between the first air actuator 74a and the second air actuator 74b, the two upper guide rails 72a can be maintained in parallel with each other. The distance between the two lower guide rails 72b can be changed while maintaining the state of being parallel to each other.

That is, the first side plate 62c ₁ , the first air actuator 74a, the first guide mechanism 76a, the second side plate 62c ₂ , the second air actuator 74b, and the second guide mechanism 76b have the distance between the two upper guide rails 72a and 2 It functions as an interval adjusting mechanism 78 for adjusting the interval between the lower guide rails 72b of the book.

The operation of the first air actuator 74a and the second air actuator 74b is controlled by the control device 46 described above. That is, the control device 46 controls the operation of the first air actuator 74a and the second air actuator 74b according to the size of the workpiece unit 17 (workpiece 11), and the two upper guide rails 72a. Adjust the distance and the distance between the two lower guide rails 72b.

For example, when the diameter of the workpiece 11 is 300 mm, the frame 15 having a width of about 400 mm is used. In this case, the control device 46 makes the distance between the side surfaces of the two upper guide rails 72a 72c (the distance between the side surfaces of the two lower guide rails 72b 72c) slightly larger than 400 mm (for example, several mm). , The first air actuator 74a and the second air actuator 74b are operated.

Further, for example, when the diameter of the workpiece 11 is 200 mm, the frame 15 having a width of about 300 mm is used. In this case, the control device 46 makes the distance between the side surfaces of the two upper guide rails 72a 72c (the distance between the side surfaces of the two lower guide rails 72b 72c) slightly larger than 300 mm (for example, several mm). , The first air actuator 74a and the second air actuator 74b are operated.

FIG. 8B is a plan view showing a state in which the distance between the two upper guide rails 72a is narrowed. If the distance between the two upper guide rails 72a is narrowed, the distance between the two lower guide rails 72b is also narrowed. In this way, by adjusting the distance between the two upper guide rails 72a and the distance between the two lower guide rails 72b according to the diameter of the work piece 11, the work pieces 11 of different sizes are temporarily placed. It can be temporarily placed in the unit 60. That is, one temporary storage unit 60 can support the transfer of work piece units 17 having a plurality of types of sizes.

FIG. 9A is a perspective view showing the upper surface side of the transport vehicle 10 traveling on the transport path 6 and transporting the workpiece unit 17, and FIG. 9B is a perspective view showing the bottom surface side of the transport vehicle 10. It is a perspective view which shows. As shown in FIGS. 9A and 9B, the transport vehicle 10 includes a plate-shaped frame 82 on which various components are mounted. A pair of axles 84 are arranged at both side ends on the front side of the frame 82. The axle 84 is mounted on the lower surface side of the frame 82 so that one end side projects from the side surface of the frame 82.

Wheels (front wheels) 86 are fixed to one end side of the pair of axles 84, respectively. That is, the pair of wheels 86 are arranged at two positions separated from each other in the width direction (vehicle width direction) of the frame 82. Further, a pair of wheels (rear wheels) 88 are arranged at two positions separated from each other in the width direction of the rear end portion of the frame 82. The wheel 88 is, for example, a caster capable of rotating 360 ° around a rotation axis along the height direction, and is mounted on the lower surface side of the frame 82. The wheels 86 and 88 are wheels for traveling when the transport vehicle 10 travels on the transport path 6.

A drive unit 90 for driving a pair of wheels 86 is mounted on the front end portion of the frame 82. Each drive unit 90 includes a pair of motors 92 connected to wheels 86 via axles 84 and the like. The motor 92 includes a rotating shaft (output shaft) 92a and generates power for rotating the wheels 86.

As shown in FIG. 9B, a pulley 94 is provided on the other end side of the axle 84. An endless connecting member (not shown) such as a belt or a chain is hung on the rotating shaft 92a of the motor 92 and the pulley 94. A power transmission mechanism is formed by a rotating shaft 92a of the motor 92, a pulley 94, and a connecting member, and the axle 84 and the motor 92 are connected. As a result, the power (rotational force) generated by the motor 92 is transmitted to the wheels 86, and the wheels 86 rotate.

The drive unit 90 independently controls the rotation direction of the pair of wheels 86 by the pair of motors 92. By rotating the pair of wheels 86 in the same direction, the transport vehicle 10 moves forward or backward. Further, by rotating the pair of wheels 86 in opposite directions, the transport vehicle 10 can be rotated around a rotation axis along the height direction, and the traveling direction of the transport vehicle 10 can be controlled. There are no restrictions on the structure of the wheels 86 and 88. For example, as the wheels 86 and 88, so-called Mecanum wheels, in which a plurality of inclined barrel-shaped (cylindrical) rotating bodies are attached to the outer peripheral surface in contact with the transport path 6, can also be used.

A battery (secondary battery) 96 that supplies electric power to the motor 92 and the like is connected to the drive unit 90 via wiring for power supply (not shown). The battery 96 is attached to, for example, the front end of the frame 82, and supplies electric power for rotating the wheels 86 to the motor 92. As the battery 96, a lithium ion battery or the like is used.

FIG. 10 is an enlarged perspective view showing a front end portion of the transport vehicle 10. A pair of terminals (power receiving terminals) 100 connected to the battery 96 via a charging wiring (charging wiring) 98 are provided on the lower surface side of the front end portion of the frame 82. The pair of terminals 100 are connected to, for example, power supply terminals installed outside the transport vehicle 10, and are supplied with electric power used for charging the battery 96. The details of charging the battery 96 using the terminal 100 will be described later.

As shown in FIGS. 9A and 9B, a storage area 104 for storing a container (cassette) 102 for accommodating the workpiece unit 17 is provided on the lower side of the frame 82. The storage area 104 is surrounded by a pair of wheels 86 and a pair of wheels 88, and is located above the lower ends of the wheels 86 and the wheels 88. A container 102 capable of accommodating one or more workpiece units 17 is arranged in the storage area 104.

11 (A) is a perspective view showing the container 102, and FIG. 11 (B) is a front view showing the container 102. The container 102 is, for example, formed in a hexagonal columnar shape in a plan view, and includes an accommodating portion (accommodation space) 102a in which the workpiece unit 17 can be accommodated. The accommodating portion 102a is connected to the space outside the container 102 via a slit-shaped opening 102b that opens on one side surface side of the container 102. The workpiece unit 17 passes through the opening 102b and is carried into the accommodating portion 102a, and also passes through the opening 102b and is carried out from the accommodating portion 102a.

As shown in FIG. 11B, the container 102 is configured to accommodate, for example, two types of workpiece units 17a and workpiece units 17b having different sizes. The accommodating portion 102a of the container 102 is provided with a pair of first guide rails 106 capable of holding the workpiece unit 17a and a pair of second guide rails 108 capable of holding the workpiece unit 17b.

The pair of first guide rails 106 are fixed to the upper wall 102c of the accommodating portion 102a at predetermined intervals, and the holding surface 106a for holding the lower surface side of the workpiece unit 17a from below and the workpiece unit 17a. The side surface 106b, which defines the horizontal position of the above, is provided. Further, the pair of second guide rails 108 are fixed to the bottom wall 102d of the accommodating portion 102a at predetermined intervals, and include a holding surface 108a that holds the lower surface side of the workpiece unit 17b from below. The horizontal position of the workpiece unit 17b is defined by the inner side surface of the container 102.

The distance between the pair of first guide rails 106 is narrower than the distance between the pair of second guide rails 108. Therefore, the pair of first guide rails 106 can hold the work piece unit 17a smaller than the work piece unit 17b held by the second guide rail 108. For example, a pair of first guide rails 106 holds a workpiece 11 having a diameter of about 200 mm (8 inches), and a pair of second guide rails 108 holds a workpiece 11 having a diameter of about 300 mm (12 inches). Will be done.

As described above, the container 102 is not configured to accommodate a plurality of workpiece units 17 of the same type (same size). In this respect, the function and use of the container 102 is significantly different from the function and use of the cassette 30 that can accommodate a plurality of workpiece units 17 of the same type.

However, there are no restrictions on the structure of the container 102 or the accommodating portion 102a. For example, the accommodating portion 102a may be configured to accommodate one or more workpiece units 17. Further, the accommodating portion 102a may be configured to accommodate a plurality of workpiece units 17 of the same type.

When the workpiece unit 17 is transported by the transport vehicle 10, the container 102 is stored in the storage area 104 as shown in FIG. 9A. At this time, the lower surface of the container 102 is positioned above the lower end of the wheel 86 and the lower end of the wheel 88. Therefore, the container 102 does not come into contact with the transport path 6 while the transport vehicle 10 is traveling.

An elevating unit (elevating mechanism) 110 for suspending and elevating the container 102 is provided in an area on the upper surface side of the frame 82 located above the storage area 104. The elevating unit 110 lowers the container 102 stored in the storage area 104 and places it in a predetermined mounting area. Further, the elevating unit 110 raises the container 102 placed in the predetermined mounting area and stores the container 102 in the storage area 104.

FIG. 12 is a perspective view showing a transport vehicle 10 in a state where the container 102 is placed in the mounting area A. The elevating unit 110 includes a hanging member 112 whose one end side (lower end side) is connected to the container 102, and a drive mechanism 114 that winds up and sends out the hanging member 112. Note that mounting area A, for example, the upper surface (second mounting regions A _2, see FIG. 3) of the mounting table 66 of the loader unloader 8 is.

As shown in FIG. 12, the elevating unit 110 includes four hanging members 112. As the hanging member 112, for example, a belt having a predetermined width is used. The tip portions (lower end portions) of the four hanging members 112 are connected to the four positions on the upper surface side of the container 102, respectively.

When the hanging member 112 is sent out by the drive mechanism 114 while the container 102 is stored in the storage area 104, the container 102 is lowered and placed in the mounting area A. Further, when the hanging member 112 is wound up by the drive mechanism 114 while the container 102 is mounted on the mounting area A, the container 102 is raised and stored in the storage area 104.

When a belt is used as the hanging member 112, as shown in FIG. 12, the work piece unit 17 passes through the opening 102b when the work piece unit 17 is carried out from the accommodating portion 102a. It is preferable to adjust the orientation of the belt with respect to the container 102 so that the width direction of the belt is aligned. Since the container 102 is unlikely to swing in the width direction of the belt, in this embodiment, the possibility that the workpiece unit 17 pops out from the opening 102b while the container 102 is raised and lowered can be suppressed to a low level.

The direction of the belt with respect to the container 102 is such that the width direction of the belt follows the direction in which the work piece unit 17 passes through the opening 102b when the work piece unit 17 is carried into the accommodating portion 102a. May be adjusted to. In the present embodiment, the belt and the container 102 are connected so that the width direction of the belt is arranged along the direction perpendicular to the surface including the opening 102b of the container 102. As the hanging member 112, a member other than a belt such as a wire rope that can be wound and sent out may be used.

As shown in FIG. 9B, a plurality of contact members 116 that come into contact with the upper surface side of the container 102 are provided on the lower surface side of the frame 82. Each of the plurality of contact members 116 is formed in a columnar shape having substantially the same height, and is fixed to the frame 82 so as to project downward from the lower surface of the frame 82. When the container 102 is stored in the storage area 104, the upper surface side of the container 102 contacts the lower ends of the plurality of contact members 116 and pushes each contact member 116 upward.

The contact member 116 is formed of, for example, an elastic member that undergoes elastic deformation when the container 102 is pressed against it. That is, when the contact member 116 is pushed by the container 102 stored in the storage area 104, the contact member 116 is deformed along the shape of the upper surface side of the container 102 by an elastic body that generates a restoring force that pushes the container 102 downward. It is composed.

When an elastic member is used for the contact member 116, for example, the impact when the container 102 comes into contact with the contact member 116 is alleviated, and the container 102 and the workpiece unit 17 in the container 102 are less likely to be damaged. Further, when the transport vehicle 10 travels on the transport path 6, the contact member 116 serves as a cushioning material, and the vibration of the frame 82 is less likely to be transmitted to the container 102 and the workpiece unit 17.

As the contact member 116, for example, a columnar member made of rubber (urethane rubber, silicone rubber, etc.), sponge, or the like can be used. In particular, by using the contact member 116 made of rubber having a large frictional force acting on the container 102, the displacement of the container 102 during transportation can be suppressed. The contact member 116 does not necessarily have to be entirely composed of an elastic member, and at least a region (lower end portion) of the contact member 116 in contact with the container 102 may be composed of an elastic member.

Further, it is preferable that the contact member 116 comes into contact with the upper surface side of the container 102 at three or more positions. In this embodiment, as shown in FIG. 9B, three columnar contact members 116 are provided on the frame 82. In this case, since the upper surface of the container 102 is arranged along the plane including the lower ends of the three contact members 116, the container 102 is less likely to tilt. However, conditions such as the shape, number, and arrangement of the contact members 116 can be arbitrarily changed. For example, a pair of linear (strip-shaped) contact members 116 arranged substantially parallel to each other may be provided on the frame 82.

Further, the container 102 may be connected to the hanging member 112 via an elastic member in order to make it difficult for the vibration of the frame 82 to be transmitted to the container 102. FIG. 13 is a perspective view showing a transport vehicle 10 in which the container 102 is connected to the suspension member 112 via the elastic member (expandable member) 118. In this case, the contact member 116 may be omitted.

An elastic member 118 is provided between the tip end side (lower end side) of the hanging member 112 and the container 102. The elastic member 118 is a member that expands and contracts along the length direction of the suspension member 112 when the suspension member 112 sways, and is, for example, an elastic body that can be expanded and contracted, such as rubber and a spring. Further, as the elastic member 118, a stretchable part such as a telescopic joint can also be used.

When the container 102 is stored in the storage area 104, the winding amount of the hanging member 112 is adjusted so that the upper surface side of the container 102 does not come into contact with the frame 82 or the contact member 116. As a result, for example, even if the frame 82 vibrates, the vibration is not directly transmitted to the container 102. Further, the vibration transmitted from the frame 82 via the elevating unit 110 and the hanging member 112 is relaxed by the expansion and contraction of the elastic member 118, so that it is difficult to be transmitted to the container 102. In this way, the elastic member 118 functions as a vibration isolator.

However, when the contact member 116 is provided on the lower surface side of the frame 82, the winding amount of the hanging member 112 is increased so that the container 102 is stored in the storage area 104 in a state of being in contact with the contact member 116. It may be adjusted. In this case, the transmission of vibration from the frame 82 to the container 102 is relaxed by the contact member 116, and the transmission of vibration from the hanging member 112 to the container 102 is relaxed by the elastic member 118.

A cover 120 is provided below the rear end of the frame 82. The cover 120 covers the opening 102b (see FIG. 11A) of the container 102 when the container 102 is stored in the storage area 104. When the opening 102b is covered with the cover 120, it is possible to prevent foreign matter from entering the accommodating portion 102a of the container 102 while the transport vehicle 10 is traveling, and it is possible to prevent foreign matter from adhering to the workpiece unit 17.

Further, even if the container 102 tilts or vibrates while the transport vehicle 10 is traveling, the cover 120 prevents the work piece unit 17 from popping out from the opening 102b. The details of the structure and operation of the cover 120 will be described later (see FIGS. 17, 18 (A) and 18 (B)).

A pair of first sensors 122 are provided at the front end and the rear end of the frame 82. That is, the pair of first sensors 122 are provided at two positions separated from each other in the length direction (vehicle length direction) of the frame 82. Further, a pair of second sensors 124 are provided at both side ends of the frame 82. That is, the pair of second sensors 124 are arranged at two positions separated from each other in the width direction (vehicle width direction) of the frame 82.

The first sensor 122 and the second sensor 124 are mounted so as to face the transport path 6 on which the transport vehicle 10 travels, and detect marks provided on the transport path 6. Based on the mark detection results of the first sensor 122 and the second sensor 124, the traveling, turning, stopping, and the like of the transport vehicle 10 are controlled. Details of the control of the transport vehicle 10 using the first sensor 122 and the second sensor 124 will be described later.

The specific positions where the first sensor 122 and the second sensor 124 are installed are adjusted according to the specifications of the transport path 6 on which the transport vehicle 10 travels. For example, the pair of first sensors 122 are mounted near the center of the frame 82 in the width direction of the front end and the rear end, respectively. Further, each of the pair of second sensors 124 is mounted near the center of the frame 82 on both side ends in the length direction of the frame 82.

The pair of second sensors 124 may be fixed to the frame 82 so as to line up on a straight line passing through the pair of wheels 86. For example, the pair of second sensors 124 are provided outside the pair of wheels 86 so as to sandwich the pair of wheels 86 in the width direction of the frame 82. Further, the pair of second sensors 124 may be provided inside the pair of wheels 86 so as to be sandwiched between the pair of wheels 86 in the width direction of the frame 82.

By arranging the pair of second sensors 124 on a straight line passing through the pair of wheels 86 in this way, at the same time as the wheels 86 pass the mark to be detected by the pair of second sensors 124, this mark Can be detected by a pair of second sensors 124. Therefore, if the transport vehicle 10 is turned or stopped at the timing when this mark is detected, the traveling of the transport vehicle 10 can be appropriately controlled without any correction.

On the other hand, when the pair of second sensors 124 is separated from the straight line passing through the pair of wheels 86, in addition to the timing when the mark is detected, the pair of second sensors 124 and the pair of wheels 86 (a pair of axles). It is preferable to control the timing of turning and stopping of the transport vehicle 10 by using the distance to and from 84), the traveling speed of the transport vehicle 10, and the like.

Further, as shown in FIG. 10, a third sensor 126 for detecting that the transport vehicle 10 has collided with an obstacle is provided at the front end portion of the frame 82. For example, a pair of third sensors 126 are mounted on both ends of the front end of the frame 82. As the third sensor 126, for example, a push button type switch is used.

When the front end portion of the transport vehicle 10 collides with an obstacle, the third sensor 126 operates to detect the collision of the transport vehicle 10. Then, when the collision of the transport vehicle 10 is detected by the third sensor 126, the transport vehicle 10 stops operating. The structure and type of the third sensor 126 are not limited as long as the collision of the transport vehicle 10 can be detected.

The transport vehicle 10 may be covered, for example, by a flexible exterior cover that can reduce the impact caused by a collision or the like. In this case, when the exterior cover covering the front end side of the transport vehicle 10 collides with an obstacle, the exterior cover is deformed and comes into contact with the third sensor 126, and the collision of the transport vehicle 10 is detected.

As shown in FIGS. 9A and 9B, a plate-shaped support base 128 fixed to the frame 82 is provided on the upper side of the elevating unit 110. A control unit (control unit) 130 that controls the operation of the transport vehicle 10 is fixed to the upper surface of the support base 128. The control unit 130 is connected to each component of the transport vehicle 10 (drive unit 90, elevating unit 110, first sensor 122, second sensor 124, third sensor 126, etc.) and controls the operation of each component. To do.

The control unit 130 is composed of, for example, a computer including a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. .. The function of the control unit 130 is realized by operating the processing device or the like according to the software stored in the auxiliary storage device.

Further, on the support base 128, a receiver 132 that receives a signal (information) from the outside and sends it to the control unit 130, a transmitter 134 that transmits the signal (information) received from the control unit 130 to the outside, and a transmitter 134. Is fixed. The receiver 132 and the transmitter 134 are connected to the control unit 130, respectively.

The receiver 132 receives, for example, a signal transmitted from the control unit 12 of the transport system 2 and sends it to the control unit 130. The control unit 130 controls the operation of the transport vehicle 10 based on, for example, the signal received from the receiver 132. Further, the control unit 130 generates, for example, a notification signal and sends it to the transmitter 134. The transmitter 134 transmits, for example, a signal received from the control unit 130 to the control unit 12 (see FIG. 2) of the transfer system 2.

Each component of the transport vehicle 10 (elevating unit 110, first sensor 122, second sensor 124, third sensor 126, control unit 130, receiver 132, transmitter 134, etc.) is provided via wiring for power supply. It is connected to the battery 96 and operates by the electric power supplied from the battery 96.

FIG. 14A is a plan view showing a configuration example of the elevating unit 110, and FIG. 14B is a side view showing a configuration example of the elevating unit 110. As described above, the elevating unit 110 includes a drive mechanism 114 that winds up and sends out a plurality of hanging members 112. The drive mechanism 114 includes a motor 142 having a rotating shaft (output shaft) 142a.

The motor 142 rotates the rotating shaft 142a to generate power used for winding and feeding the suspending member 112. A first rotating shaft (first shaft) 144a and a second rotating shaft (second shaft) 144b are provided at two positions sandwiching the motor 142 so as to be substantially parallel to each other.

A pulley 146 is provided on one end side of the first rotating shaft 144a. An endless connecting member 148 such as a belt or a chain is hung on the rotating shaft 142a of the motor 142 and the pulley 146. A power transmission mechanism is formed by the rotating shaft 142a of the motor 142, the pulley 146, and the connecting member 148, and the motor 142 and the first rotating shaft 144a are connected to each other. On the other hand, one end side of the second rotating shaft 144b is not provided with a pulley or the like that realizes connection with the motor 142.

A pulley 150a is provided on the other end side of the first rotating shaft 144a, and a pulley 150b having the same diameter as the pulley 150a is provided on the other end side of the second rotating shaft 144b. An endless connecting member 152 such as a belt or a chain is hung on the pulley 150a and the pulley 150b. A power transmission mechanism is formed by the pulley 150a, the pulley 150b, and the connecting member 152, and the first rotating shaft 144a and the second rotating shaft 144b are connected to each other.

Cylindrical reels 154a around which the hanging member 112 is wound are fixed to both ends of the first rotating shaft 144a. Further, at two positions outside each reel 154a (opposite side to the motor 142) and below each reel 154a, a columnar roller 156a supporting the hanging member 112 is arranged so as to be able to rotate. There is. The rotation axis of each roller 156a is substantially parallel to the first rotation axis 144a.

On the other hand, columnar reels 154b around which the hanging member 112 is wound are fixed to both ends of the second rotating shaft 144b, respectively. Further, at two positions outside each reel 154b (on the side opposite to the motor 142) and below each reel 154b, columnar rollers 156b supporting the hanging member 112 are arranged so as to be rotatable. There is. The axis of rotation of each roller 156b is approximately parallel to the second axis of rotation 144b.

The base end side of the hanging member 112 is fixed to each of the reels 154a and 154b. The hanging member 112 fixed to the reel 154a hangs downward in contact with the outer portion of the roller 156a. Further, the hanging member 112 fixed to the reel 154b hangs downward in a state of being in contact with the outer portion of the roller 156b.

As shown in FIG. 14B, the hanging member 112 fixed to the reel 154a passes above the reel 154a and is supported by the roller 156a. On the other hand, the hanging member 112 fixed to the reel 154b passes under the reel 154b and is supported by the roller 156b.

When the rotary shaft 142a of the motor 142 in a first direction (direction indicated by the arrow _{C 1} in FIG. 14 (B)), the direction in which the reel 154a that is fixed to the first rotary shaft 144a sends out the down member 112 hanging (Figure rotates in a direction) indicated by arrow _{C 2} in 14 (B). As a result, the hanging member 112 is sent out from the reel 154a via the roller 156a.

Further, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b by the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b sends out the hanging member 112 (arrow in FIG. 14B). rotates in the direction) indicated by C _3. As a result, the hanging member 112 is sent out from the reel 154b via the roller 156b.

On the other hand, the first direction rotation shaft 142a of the motor 142 is rotated in a second direction opposite direction (indicated by arrow _{D 1} in FIG. 14 (B)), the reel which is fixed to the first rotating shaft 144a 154a is rotated in a direction to wind the lower member 112 hanging (direction indicated by the arrow _{D 2} in FIG. 14 (B)). As a result, the hanging member 112 is wound around the reel 154a via the roller 156a.

Further, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b by the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b winds up the hanging member 112 (in the direction of FIG. 14B). rotates in a direction) indicated by an arrow _{D 3.} As a result, the hanging member 112 is wound around the reel 154b via the roller 156b.

When each hanging member 112 is sent out from the drive mechanism 114, the container 102 connected to the tip end side of the hanging member 112 is lowered. As a result, the container 102 can be placed in the mounting area A (see FIG. 12). Further, when each hanging member 112 is wound up by the drive mechanism 114, the container 102 connected to the tip end side of the hanging member 112 rises. As a result, the container 102 can be stored in the storage area 104 of the transport vehicle 10 (see FIG. 9A).

An elevating unit 110 equipped with another drive mechanism having a structure different from that of the drive mechanism 114 described above can also be used. FIG. 15A is a plan view showing another configuration example of the elevating unit 110, and FIG. 15B is a side view showing another configuration example of the elevating unit 110. The elevating unit 110 shown in FIGS. 15A and 15B is equipped with a drive mechanism 162 instead of the drive mechanism 114 described above.

The drive mechanism 162 includes a motor 164 having a rotation shaft (output shaft) 164a, a first rotation shaft (first shaft) 166a, a second rotation shaft (second shaft) 166b, and a third rotation shaft (second shaft) 166b arranged substantially parallel to each other. Includes a rotating shaft (third shaft) 166c. The first rotation shaft 166a is arranged between the second rotation shaft 166b and the third rotation shaft 166c.

The motor 164 is arranged, for example, between the first rotating shaft 166a and the second rotating shaft 166b, and rotates the rotating shaft 164a to generate power used for winding and sending out the suspending member 112. However, the motor 164 may be arranged between the first rotating shaft 166a and the third rotating shaft 166c.

A pulley 168 is provided on one end side of the first rotating shaft 166a. An endless connecting member 170 such as a belt or a chain is hung on the rotating shaft 164a of the motor 164 and the pulley 168. A power transmission mechanism is formed by the rotating shaft 164a of the motor 164, the pulley 168, and the connecting member 170, and the motor 164 and the first rotating shaft 166a are connected to each other.

A plurality of columnar reels 172 around which the hanging member 112 is wound are fixed to the first rotating shaft 166a. Specifically, a pair of reels 172 are fixed to both ends of the first rotating shaft 166a. Two hanging members 112 are fixed to each reel 172 and wound in the same direction.

16 (A) is a plan view showing the reel 172, and FIG. 16 (B) is a side view showing the reel 172. The elevating unit 110 includes a columnar fixing member 174 for fixing the hanging member 112 to the reel 172, and the two hanging members 112 are collectively fixed to the reel 172 by the fixing member 174. Reel.

As shown in FIG. 16B, a groove (recess) 172a along the rotation axis (that is, the first rotation axis 166a) of the reel 172 is provided in a part of the outer peripheral portion of the reel 172. The inner surface of the groove 172a is formed in a curved surface. Further, both ends of the groove 172a reach both ends of the reel 172 in the rotation axis direction. The two suspension members 112 are arranged in the same direction so that the base end portions overlap with the groove 172a.

The fixing member 174 has a curved outer peripheral surface corresponding to the shape of the inner surface of the groove 172a. The fixing member 174 is arranged so that the base ends of the two hanging members 112 overlap with the groove 172a, and the base ends of the two hanging members 112 are directed toward the inner surface of the groove 172a. It is fitted into the groove 172a so as to be pushed. As a result, the base end portions of the two hanging members 112 are sandwiched between the inner surface of the groove 172a and the outer peripheral surface of the fixing member 174, and are fixed to the reel 172.

As shown in FIG. 16A, a pair of protrusions (convex portions) are formed on the outer peripheral portion of the reel 172 so as to sandwich the two hanging members 112 fixed to the reel 172 in the width direction thereof. 172b is provided. The pair of protrusions 172b function as guides for preventing the suspension member 112 from being displaced in the width direction. By rotating the reel 172 configured in this way, the two hanging members 112 can be wound up or the two hanging members 112 can be sent out.

As shown in FIGS. 15A and 15B, one of the two hanging members 112 fixed to the reel 172 hangs downward in contact with the second rotating shaft 166b. Further, the other of the two hanging members 112 fixed to the reel 172 hangs downward in contact with the third rotating shaft 166c.

The second rotating shaft 166b and the third rotating shaft 166c are supported in a state where they can be easily rotated according to a force applied from the outside, and their outer peripheral surfaces come into contact with the hanging member 112. A pair of guides 176 for preventing the displacement of the suspension member 112 in the width direction are provided on both sides of the region where the suspension member 112 of the second rotation shaft 166b and the third rotation shaft 166c comes into contact with each other.

When the rotary shaft 164a of the motor 164 in a first direction (direction indicated by arrow _{E 1} in FIG. 15 (B)), the direction for feeding the lower member 112 reel 172 hanging (Figure 15 (B) and FIG. 16 (B rotates in the direction) indicated by an arrow _{E 2} in). As a result, the two hanging members 112 are sent out from the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the hanging member 112 is lowered.

On the other hand, the first direction rotational shaft 164a of the motor 164 is rotated in a second direction opposite direction (the direction indicated by the arrow _{F 1} in FIG. 15 (B)), the direction in which the reel 172 takes up the lower member 112 hanging rotating (direction indicated by arrow _{F 2} in FIG. 15 (B) and FIG. 16 (B)). As a result, the two hanging members 112 are wound around the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the hanging member 112 rises.

As described above, in the drive mechanism 162 shown in FIG. 15A, two reels 172 are fixed to the first rotating shaft 166a, and two hanging members 112 are fixed to each of the two reels 172. Has been done. Therefore, the feeding and winding of the four hanging members 112 are controlled by the rotation of the first rotating shaft 166a. As a result, the number of parts constituting the drive mechanism 114 can be reduced, the weight of the transport vehicle 10 can be reduced, the possibility of failure can be reduced, and the cost can be reduced.

By using the elevating unit 110 as described above, the container 102 in which the workpiece unit 17 is housed is moved up and down between the storage area 104 and the mounting area A below the storage area 104. Can be done. The details of the elevating unit 110 can be changed within the range in which the container 102 can be appropriately elevated and lowered.

The second rotating shaft 166b and the third rotating shaft 166c may be fixed in a non-rotating state. In this case, the hanging member 112 is sent out from the reel 172 or wound up on the reel 172 while sliding on the outer peripheral surface of the second rotating shaft 166b or the third rotating shaft 166c.

FIG. 17 is an enlarged perspective view showing the cover 120. The cover 120 is arranged at the rear end portion on the lower surface side of the frame 82 so as to face one side surface (rear portion) of the container 102 stored in the storage area 104. The cover 120 includes a lid 182 connected to the frame 82 so that it can rotate with respect to the frame 82. The lid portion 182 is formed in a shape and size capable of covering the opening 102b (see FIG. 18B) of the container 102. Further, a plurality of contact portions 184 are fixed to the upper portion of the lid portion 182 so as to come into contact with the upper surface side of the container 102.

When the container 102 rises toward the storage area 104, the upper surface side of the container 102 contacts the lower end of the contact portion 184 and pushes up the contact portion 184. As a result, the lid portion 182 moves (rotates) in the direction of approaching the container 102, and the opening 102b of the container 102 is covered by the lid portion 182.

FIG. 18A is a side view showing the cover 120 in a state where the container 102 is not stored in the storage area 104, and FIG. 18B is a side view showing the cover 120 in a state where the container 102 is stored in the storage area 104. It is a side view which shows. A fixing block 186 is fixed to the lower surface of the frame 82. The fixed block 186 is connected to the fixed block 186 in such a manner that a connecting block (L-shaped block) 188 having an L-shaped shape when viewed from the width direction (vehicle width direction) of the frame 82 can be rotated.

The connecting block 188 includes a connecting portion 188a on the upper side (frame 82 side) and a fixing portion 188b below the connecting portion 188a. The connecting portion 188a is provided with a through hole penetrating in the width direction of the frame 82, and a connecting shaft 190 fixed to the fixing block 186 is inserted into the through hole. As a result, the connecting block 188 is connected to the fixed block 186 in a state where it can rotate around the connecting shaft 190.

The lid portion 182 is fixed to the storage area 104 side (front side) of the fixing portion 188b. Since the connecting shaft 190 inserted into the through hole is substantially parallel to the width direction of the frame 82, the lid portion 182 rotates along with the connecting block 188 along a plane substantially perpendicular to the width direction of the frame 82. Will be done.

The lid portion 182 includes a plate-shaped member 182a fixed to the fixing portion 188b of the connecting block 188. A flexible member 182b is provided on the surface of the plate-shaped member 182a on the storage region 104 side (front side). The flexible member 182b is formed in a shape and size capable of covering the entire opening 102b of the container 102.

Further, a contact portion 184 is arranged on the storage area 104 side (front side) of the plate-shaped member 182a. The contact portion 184 includes, for example, a fixing member 184a fixed to the plate-shaped member 182a above the flexible member 182b, and a roller 184b supported by a storage region 104 side (front side) portion of the fixing member 184a. There is.

The roller 184b is formed of, for example, an elastic member such as rubber and is supported by the fixing member 184a so that it can rotate around a rotation axis substantially parallel to the width direction of the frame 82. Further, the lower end of the roller 184b is positioned below the lower end of the fixing member 184a. Therefore, when the upper surface side of the container 102 is in contact with the roller 184b, the roller 184b also rotates in accordance with the rotation of the lid portion 182.

For example, when the container 102 rises toward the storage area 104, the upper surface side of the container 102 comes into contact with the roller 184b of the contact portion 184 and pushes up the contact portion 184. Then, the cover 120 rotates about the connecting shaft 190 in the direction in which the lower end side thereof approaches the container 102 (the direction indicated by the arrow G in FIG. 18B), and the plate-shaped member 182a is stored on the storage area 104 side (the direction indicated by the arrow G). The front surface) is substantially parallel to the lower surface of the frame 82. Then, the flexible member 182b of the lid portion 182 comes into contact with one side surface (rear portion) of the container 102 to close the opening 102b.

If the opening 102b of the container 102 stored in the storage area 104 remains exposed, foreign matter such as dust may enter the storage portion 102a of the container 102. In particular, while the transport vehicle 10 is traveling, static electricity generated by friction between the transport path 6 and the wheels 88 attracts, for example, a very small amount of foreign matter existing in the clean room where the transport path 6 is installed to the transport vehicle 10. There is a high possibility that it will enter the accommodating portion 102a.

Therefore, in the present embodiment, when the container 102 is stored in the storage area 104, the opening 102b of the container 102 is covered with the cover 120, and foreign matter is introduced into the storage portion 102a of the container 102 while the transport vehicle 10 is traveling. I try not to get in. Further, even if the container 102 tilts or vibrates while the transport vehicle 10 is traveling, the workpiece unit 17 is prevented from popping out of the container 102.

On the other hand, while the container 102 is raised and lowered by the elevating unit 110, static electricity is not generated due to friction between the transport path 6 and the wheels 88, and foreign matter is not hoisted by the movement of the transport vehicle 10. Therefore, even if the opening 102b of the container 102 is not covered while the container 102 is being raised and lowered, it is unlikely that foreign matter will enter the accommodating portion 102a.

Further, a flexible member 182b is provided in the region corresponding to the opening 102b of the cover 120. The flexible member 182b is deformed when the work piece unit 17 housed in the container 102 collides with the work piece unit 17, and cushions the impact acting on the work piece unit 17. That is, the flexible member 182b functions as a cushioning material. The flexible member 182b makes it difficult for the workpiece 11 included in the workpiece unit 17 to be damaged.

There are no restrictions on the material or structure of the flexible member 182b. For example, it is preferable to use a flexible member 182b that can alleviate the impact to the extent that the workpiece 11 of the workpiece unit 17 is not damaged. More specifically, as the flexible member 182b, a member made of sponge, rubber, cotton, cloth or the like, styrofoam, a bubble wrap or the like can be used.

In particular, since the sponge is flexible and easily deformed, when the sponge is used as the flexible member 182b, the impact acting on the workpiece unit 17 can be effectively alleviated. Further, when a sponge is used as the flexible member 182b, the flexible member 182b is appropriately deformed along the shape of the side surface of the container 102, and the opening 102b is surely closed.

As shown in FIG. 18A, the weight of each part of the cover 120 is such that when the container 102 is lowered from the storage area 104, the lower end portion of the cover 120 is separated from the storage area 104 by its own weight (FIG. 18). (B) is adjusted to rotate in the direction opposite to the direction indicated by the arrow G). Therefore, when the container 102 is not stored in the storage area 104, the surface of the plate-shaped member 182a on the storage area 104 side (front side) is inclined with respect to the lower surface of the frame 82.

There is no limit to the number and arrangement of covers 120. For example, in addition to the rear end portion of the frame 82, the front end portion of the frame 82 may be provided with a cover 120 that contacts the side surface of the container 102. In this case, when the container 102 is stored in the storage area 104, the two sides (front and rear) of the container 102 are sandwiched by a pair of covers 120. As a result, the shaking (vibration) of the container 102 is suppressed. In this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in the length direction (front-back direction) of the frame 82.

Further, covers 120 may be provided at the front end portion, the rear end portion, and both side end portions of the frame 82, respectively. In this case, the four sides (front, rear, and both sides) of the container 102 stored in the storage area 104 come into contact with the cover 120, respectively. As a result, the shaking (vibration) of the container 102 is suppressed. In this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in the length direction (front-back direction) and the width direction of the frame 82.

When the container 102 is raised and lowered, the rotation of the motor 142 and the like of the raising and lowering unit 110 is controlled by the control unit 130. FIG. 19A is a side view showing the transport vehicle 10 when the container 102 stored in the storage area 104 is placed in the mounting area A. When the container 102 is placed in the mounting area A, the rotation direction and the rotation speed of the motor 142 are controlled so that the suspension member 112 is sent out from the drive mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 so that the rotation speed of the motor 142 is maintained.

FIG. 19B is a graph showing the current value of the motor 142 when the container 102 is lowered. When the container 102 descends and reaches the mounting area A, the container 102 is supported from below in the mounting area A. As a result, the load acting on the rotating shaft 142a of the motor 142 is weakened, and the current value of the motor 142 is reduced.

The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 is placed in the mounting area A. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares this threshold value with the current value of the motor 142. Then, when the current value of the motor 142 is equal to or less than the threshold value (or less than the threshold value), the control unit 130 stops the rotation of the motor 142. As a result, the placement of the container 102 in the mounting area A is completed.

FIG. 20A is a side view showing a transport vehicle 10 when the container 102 placed in the mounting area A is stored in the storage area 104. When the container 102 is stored in the storage area 104, the rotation direction and the rotation speed of the motor 142 are controlled so that the suspension member 112 is wound up by the drive mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 so that the rotation speed of the motor 142 is maintained.

FIG. 20B is a graph showing the current value of the motor 142 when the container 102 rises. When the container 102 rises and reaches the storage area 104, the container 102 is pressed against the plurality of contact members 116 provided on the lower surface side of the frame 82. As a result, the load acting on the rotating shaft 142a of the motor 142 is increased, and the current value of the motor 142 is increased.

The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 comes into contact with the contact member 116. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares this threshold value with the current value of the motor 142. Then, when the current value of the motor 142 is equal to or greater than the threshold value (or exceeds the threshold value), the control unit 130 stops the rotation of the motor 142. As a result, the storage of the container 102 in the storage area 104 is completed.

As described above, when the operation of the motor 142 when raising and lowering the container 102 is controlled based on the current value of the motor 142, a sensor for detecting the container 102 is set in the storage area 104 or the mounting area A. There is no need to provide it. This simplifies the structure of the transport vehicle 10, the mounting area A, and the like. In addition, the weight of the transport vehicle 10 is also reduced.

However, there is no limitation on the control method of the motor 142. For example, a sensor (push button type switch or the like) for detecting that the container 102 is arranged may be provided on the lower surface side of the frame 82 or the upper surface side of the mounting area A. In this case, when the container 102 is detected by the sensor, the control unit 130 stops the rotation of the motor 142. It should be noted that the detection by the sensor and the detection by the current value of the motor 142 can be used in combination.

When detecting that the container 102 is placed in the mounting area A only on the loading area A side (for example, the loader / unloader 8 side), the control unit 12 of the transport system 2 (see FIG. 2). ) Is instructed to stop the rotation of the motor 142 after notifying the container 102 that the container 102 has been placed in the mounting area A from the mounting area A side. Then, the control unit 130 of the transport vehicle 10 stops the rotation of the motor 142.

On the other hand, as described above, when the transport vehicle 10 side detects that the container 102 is mounted in the mounting region A, the control unit 130 of the transport vehicle 10 is the control unit of the transport system 2. Without waiting for the instruction from 12, the rotation of the motor 142 is stopped at its own discretion. As a result, the time lag from when the container 102 is placed in the mounting area A until the rotation of the motor 142 is stopped can be reduced.

Further, the ascending / descending speed of the container 102 does not necessarily have to be constant. For example, the rotation speed of the motor 142 may be lowered to decelerate the container 102 immediately before the container 102 is placed in the mounting area A or immediately before being stored in the storage area 104. As a result, the impact when the container 102 comes into contact with the mounting area A or the contact member 116 can be mitigated. In this case, the control unit 130 may monitor the height of the container 102 based on, for example, the amount of rotation of the motor 142.

When the container 102 is placed in the mounting area A, the control unit 130 generates a signal for notifying that the placement of the container 102 is completed, and the transmitter 134 sends the transmitter 134 to the control unit 12 of the transfer system 2. Send. Further, when the container 102 is stored in the storage area 104, the control unit 130 generates a signal for notifying that the storage of the container 102 is completed, and the transmitter 134 sends a signal to the control unit 12 of the transport system 2 (FIG. FIG. 2). In addition, these signals may be sent to the processing apparatus 4.

FIG. 21 is a perspective view showing the appearance of the processing device 4 and the transport path 6, and FIG. 22 is a perspective view showing the internal structure of the processing device 4. In FIG. 21, some components are shown by functional blocks. As shown in FIGS. 21 and 22, the processing apparatus 4 includes a base 202 that supports each component.

A recess 202a is formed at a corner of the base 202, and a lifting platform 204 that moves up and down by an elevating mechanism (not shown) is arranged in the recess 202a. The container 102 of the transport vehicle 10 described above is mounted on the mounting area A on the upper surface of the lift 204. A plurality of position-determining members (not shown) for defining the horizontal position of the container 102 are provided on the upper surface of the lift table 204, and the container 102 lowered from the transport vehicle 10 has a plurality of position-determining members. It is placed in the mounting area A determined by.

Each positioning member is provided with, for example, a curved guide surface that guides the descending container 102 toward the mounting area A, and is fixed at a position corresponding to the side surface of the container 102 on the elevating table 204. When the container 102 is lowered toward the elevating table 204, the container 102 is guided by the guide surface of each position defining member. Therefore, even if the container 102 swings in the horizontal direction, the container 102 can be placed on the mounting area A.

For example, in the area below the mounting area A of the elevating table 204, an accommodating area capable of temporarily accommodating the processed work unit 17 is formed. The workpiece unit 17 processed by the processing apparatus 4 is housed in this storage area until it is ready to be transported to the container 102 of the transport vehicle 10. In addition to the accommodation area, an irradiation unit that irradiates ultraviolet rays, a detection unit that detects the position of the notch, a reading unit that reads barcodes, etc. are arranged in the area below the mounting area A of the elevator table 204. May be done.

On the side of the recess 202a, _{X 2} axial direction (front-rear direction, the machining feed direction) is longer recesses 202b to be formed. In the recess 202b, ball screw type of X-axis moving mechanism for moving the X-axis moving table (not shown) to the X ₂ axis direction (machining feed unit) 206 is disposed. A table cover 206a is arranged above the X-axis moving table. Further, bellows-shaped dust-proof and drip-proof covers 206b are attached to the front and back of the table cover 206a.

A chuck table 208 for holding the workpiece 11 is arranged on the upper part of the X-axis moving table so as to be exposed from the table cover 206a. The chuck table 208 is connected to a rotation drive source (not shown) such as a motor, and rotates _{around a rotation axis substantially parallel to the Z 2-} axis direction (vertical direction, cutting feed direction). The chuck table 208 is moved in the _{X 2} axis direction by the X-axis moving mechanism 206 described above (processing-feed).

The upper surface of the chuck table 208 is a holding surface 208a for holding the workpiece 11 via the tape 13. The holding surface 208a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 208. Further, around the chuck table 208, four clamps 210 for fixing the frame 15 supporting the workpiece 11 from all sides are provided.

Above the recesses 202b, Y ₂ axis direction (lateral direction, indexing direction) close while maintaining a parallel state, a pair of guide rails 212 that are spaced apart are provided. Each of the pair of guide rails 212 includes a support surface that supports the frame 15 from below and a side surface that is substantially perpendicular to the support surface, and the workpiece unit 17 (frame 15) drawn out from the container 102 in the mounting area A. ) fit in place by sandwiching the X ₂ axis direction.

Above the base 202, a gate-shaped first support structure 214 is arranged so as to straddle the recess 202b. The front surface (surface of the guide rail 212 side) of the first support structure 214, _{Y 2} and first rail 216 along the axial direction are fixed, this first rail 216, via the first moving mechanism 218, etc. The first holding unit 220 is connected to the first holding unit 220.

The first holding unit 220, for example, in contact with the upper surface of the frame 15 to adsorb the frame 15, as well as raised and lowered by a first moving mechanism 218 moves in the _{Y 2} axially along the first rail 216. A gripping mechanism 220a for gripping the frame 15 is provided on the elevating table 204 side of the first holding unit 220.

For example, the first holding unit 220 holds the frame 15 by the gripping mechanism 220a is moved to the _{Y 2} axially withdrawn from the container 102 of the mounting area A on the workpiece unit 17 a pair of guide rails 212, Alternatively, the workpiece unit 17 on the pair of guide rails 212 can be inserted into the container 102 of the mounting area A. After aligning the positions of the frames 15 with the pair of guide rails 212, the frame 15 is attracted by the first holding unit 220, and the workpiece unit 17 is carried into the chuck table 208.

On the front surface of the first support structure 214, a second rail 222 along the _{Y 2} axis direction is fixed above the first rail 216. A second holding unit 226 is connected to the second rail 222 via a second moving mechanism 224 or the like. The second holding unit 226, for example, in contact with the upper surface of the frame 15 to adsorb the frame 15, as well as raised and lowered by the second moving mechanism 224 moves in the _{Y 2} axially along the second rail 222.

A gate-shaped second support structure 228 is arranged behind the first support structure 214. Two sets of machining units (cutting units) are placed on the front surface of the second support structure 228 (the surface on the side of the first support structure 214) via a Y-axis Z-axis movement mechanism (indexing feed unit, cutting feed unit) 230, respectively. 232 is provided. _{Each machining unit 232 moves in the Y 2-} axis direction (index feed) and moves in the Z _2- axis direction (cut feed) by the corresponding Y-axis Z-axis movement mechanism 230.

Each processing unit 232 includes a spindle (not shown) to be generally parallel to the rotation axis Y ₂ axially. An annular cutting blade 234 is mounted on one end side of each spindle. A rotary drive source (not shown) such as a motor is connected to the other end side of each spindle. Further, a nozzle for supplying a cutting liquid such as pure water to the workpiece 11 and the cutting blade 234 is arranged near the cutting blade 234.

The workpiece 11 can be machined (cut) by cutting the rotated cutting blade 234 into the workpiece 11 held by the chuck table 208 while supplying the cutting fluid from this nozzle. An imaging unit (camera) 236 for imaging the workpiece 11 and the like held on the chuck table 208 is provided at a position adjacent to the processing unit 232. _{The image pickup unit 236 also moves in the Y 2-} axis direction and also moves in the Z _2- axis direction by the Y-axis Z-axis movement mechanism 230.

A cleaning unit 238 is arranged at a position opposite to the elevating table 204 with respect to the recess 202b. The cleaning unit 238 includes a spinner table 240 that holds the workpiece 11 in the tubular cleaning space. A rotation drive source (not shown) for rotating the spinner table 240 at a predetermined speed is connected to the lower portion of the spinner table 240.

Above the spinner table 240, an injection nozzle 242 that injects a cleaning fluid (typically, a mixed fluid in which water and air are mixed) toward the workpiece 11 held by the spinner table 240 is arranged. Has been done. The workpiece 11 can be cleaned by rotating the spinner table 240 holding the workpiece 11 and injecting a cleaning fluid from the injection nozzle 242.

After the workpiece 11 is cut by the processing unit 232, for example, the frame 15 is attracted by the second holding unit 226 and the workpiece unit 17 is carried into the cleaning unit 238. After cleaning the workpiece 11 with the cleaning unit 238, for example, the frame 15 is attracted by the first holding unit 220 to mount the workpiece unit 17 on the pair of guide rails 212, and then the frame 15 is gripped by the gripping mechanism. The workpiece unit 17 is gripped by 220a and accommodated in the container 102 of the mounting area A.

As shown in FIG. 21, the upper surface side of the base 202 is covered by the cover 244, and each of the above-mentioned components is housed inside the cover 244. An opening (not shown) that vertically penetrates the ceiling 244a of the cover 244 is provided in the region directly above the recess 202a. The container 102 of the transport vehicle 10 moves from the outside to the inside of the cover 244 through this opening, and moves from the inside to the outside of the cover 244 through this opening. There are no restrictions on the shape or size of the opening, but the opening must be configured to at least pass through the container 102.

Each component of the processing device 4 described above is connected to the control device 246. The control device 246 is composed of a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. .. The function of the control device 246 is realized by operating the processing device or the like according to the software stored in the auxiliary storage device.

The control device 246 is further connected to a receiver 248 that receives a signal (information) from the outside and sends it to the control device 246, and a transmitter 250 that transmits the signal (information) received from the control device 246 to the outside. Has been done. The receiver 248 receives, for example, a signal (control signal) transmitted from the control unit 12 of the transport system 2 and sends it to the control device 246.

The control device 246 controls the operation of each component of the processing device 4, for example, based on the signal received from the receiver 248. Further, the control device 246 generates, for example, a notification signal and sends it to the transmitter 250. The transmitter 250 transmits, for example, a signal received from the control device 246 to the control unit 12 of the transfer system 2.

A pipe connecting portion 202c to which various pipes 21 are connected is provided on the side wall of the base 202. Further, a door 244b that is opened and closed at the time of maintenance or the like is provided on the side wall of the cover 244. Even if the side wall of the cover 244 is provided with an operation panel (not shown) for inputting instructions to the control device 246, a display (not shown) for displaying various information about the processing device 4, and the like. good.

The processing device 4 operates in conjunction with the transfer system 2 of the present embodiment. For example, the transport vehicle 10 stops in a stop region on the transport path 6, and the container 102 in which the workpiece unit 17 is housed is placed on the upper surface (mounting region A) of the lifting table 204 of the processing device 4. To do. When the container 102 is placed on the lift 204, the control unit 130 of the transport vehicle 10 generates a signal for notifying the fact and causes the transmitter 134 to transmit the signal. This signal is transmitted from the transmitter 134 to the control unit 12 of the transport system 2.

The control unit 12 carries out the work piece unit 17 before processing from the container 102 based on the signal transmitted from the transmitter 134 of the transport vehicle 10, and carries the work piece unit 17 after processing into the container 102. A signal for instructing the processing apparatus 4 to do so is generated. When the receiver 248 of the processing device 4 receives the signal from the control unit 12 and the control device 246 receives an instruction based on this signal, the control device 246 is mounted on the upper surface (mounting area A) of the elevating table 204. The work piece unit 17 before processing is carried out from the container 102 to the first holding unit 220. As a result, the workpiece unit 17 is pulled out to the pair of guide rails 212, and the machining of the workpiece 11 is started.

For example, when the machining of the workpiece 11 is started, the control device 246 adjusts the height of the elevating table 204, and the workpiece unit after processing is adjusted from the accommodation area provided below the mounting area A. 17 is pulled out to a pair of guide rails 212. Then, the processed workpiece unit 17 on the pair of guide rails 212 is housed in the container 102 on the elevating table 204.

When the machined work unit 17 after processing is housed in the container 102, the control device 246 of the processing device 4 generates a signal for notifying that fact, and the transmitter 250 sends the control unit 12 of the transport system 2 to the control unit 12. Send. The control unit 12 generates a signal for instructing the transport vehicle 10 to go to the next destination based on the signal transmitted from the transmitter 250 of the processing device 4.

When the receiver 132 of the transport vehicle 10 receives the signal from the control unit 12 and the control unit 130 receives an instruction based on this signal, the control unit 130 causes the transport vehicle 10 to travel toward the next destination. .. In this way, by using the transport system 2, the processing apparatus 4 can receive the workpiece unit 17 before machining in a timely manner and collect the workpiece unit 17 after machining in a timely manner.

As shown in FIGS. 1 and 21, the transport path 6 constituting the transport system 2 includes the upper surface side of the ceiling 244a of the cover 244 included in each processing device 4 and the housing 22 included in the loader / unloader 8. It is installed on the upper surface side of the ceiling 22a or the like. That is, the transport path 6 is arranged directly above the processing device 4, the loader / unloader 8 and the like so as to connect between the plurality of processing devices 4 and the loader / unloader 8.

Therefore, the transport path 6 does not interfere with the structures such as the pipe connection portion 202c and the door 244b provided on the side surface of the processing device 4. That is, when designing the transport path 6, it is not necessary to consider the structure of the side surface of the processing device 4. Thereby, the transport system 2 can be easily constructed. Further, since the transport path 6 is arranged at a place lower than the ceiling of the factory, the work related to the installation of the transport path 6 becomes easy.

Then, for example, when constructing the transport path 6 in an environment in which a plurality of processing devices 4 and the like are already installed, the processing device 4 and the like are moved as in the case where the transport path is provided on the ceiling of a factory or the like. There is no need to secure a work space. Further, since the processing device 4 or the like already installed serves as the base of the transport path 6, the man-hours for the work are reduced as compared with the case where a new base is provided.

FIG. 23 is a perspective view showing a part of the transport path 6 installed in the processing device 4. The structure of the transport path 6 installed above the loader / unloader 8 is substantially the same as the structure of the transport path 6 installed above the processing device 4. The lower frame 262 is fixed to the ceiling 244a of the plurality of processing devices 4 and the ceiling 22a of the loader / unloader 8 by screws, bolts, or the like.

The lower frame 262 is, for example, a composite of rod-shaped frame members made of a material containing a metal such as aluminum, and has a shape that connects between the adjacent processing device 4 and the loader / unloader 8. It is assembled in. By fixing the lower frame 262 to the ceiling 244a of each processing device 4, the ceiling 22a of the loader / unloader 8, and the like, the base of the transport path 6 is formed.

When fixing the lower frame 262 to each processing device 4, loader / unloader 8, etc., the upper surface of the lower frame 262 is substantially horizontal, and the height of the upper surface of the lower frame 262 is substantially equal. Therefore, the height of the lower frame 262 with respect to each processing device 4, the loader / unloader 8, and the like is adjusted.

As a result, even if the heights of the ceiling 244a of each processing device 4 and the ceiling 22a of the loader / unloader 8 are not completely equal, the transport path 6 can be formed horizontally and at the same height. There is no limitation on the method of adjusting the height of the lower frame 262 with respect to the processing device 4 and the loader / unloader 8, but for example, the ceiling 244a of each processing device 4 and the ceiling 22a of the loader / unloader 8 may be used. A method of arranging a member for height adjustment between the lower surface of the lower frame 262 and the lower surface can be used.

Of course, the heights of the processing device 4 and the loader / unloader 8 may be adjusted. For example, the lower end portion (leg portion) of the processing device 4 or the loader / unloader 8 is provided with an adjustment mechanism for height adjustment. Therefore, if the heights of the processing device 4 and the loader / unloader 8 are adjusted by using this adjusting mechanism and the heights of the ceiling 244a of each processing device 4 and the ceiling 22a of the loader / unloader 8 are made equal, the transfer is performed. A lower frame 262 suitable for the base of the road 6 can be realized.

The upper frame 264 is fixed to the upper surface side of the lower frame 262 with screws, bolts, or the like. The upper frame 264 is, for example, a composite of rod-shaped frame members made of a material containing a metal such as aluminum, and has a shape that matches the arrangement of the transport paths 6 so that the transport paths 6 can be appropriately fixed. It is assembled.

A transport path 6 is provided above the upper frame 264. The transport path 6 is formed, for example, by arranging a plurality of flat road surface panels 266 in a horizontal direction. By forming the transport path 6 by combining the plurality of road surface panels 266 in this way, various transport paths 6 according to the arrangement of the plurality of processing devices 4 and the loader / unloader 8 can be easily realized.

The road surface panel 266 is formed in a rectangular shape in a plan view using a lightweight and high-strength material such as polyamide, polycarbonate, and CFRP (Carbon Fiber Reinforced Plastic), and is suitable for traveling of the transport vehicle 10. It has a flat upper surface. Further, a through hole is formed at the end of the road surface panel 266 so as to vertically penetrate the road surface panel 266.

On the other hand, on the upper surface side of the upper frame 264, a screw hole (not shown) having a diameter corresponding to the diameter of the screw 268 is opened at a position corresponding to the through hole of the road surface panel 266. Therefore, if the road surface panel 266 is arranged on the upper surface side of the upper frame 264 and the screws 268 are tightened into the screw holes of the upper frame 264 through the through holes (not shown), the road surface panel 266 can be fixed to the upper frame 264. ..

The lower frame 262 is formed, for example, by combining a plurality of lower frame units 270, each of which includes a plurality of rod-shaped frame members. Similarly, the upper frame 264 is formed, for example, by combining a plurality of upper frame units 272, each of which includes a plurality of rod-shaped frame members.

In this way, when the lower frame 262 is formed by using the plurality of lower frame units 270 and the upper frame 264 is formed by using the plurality of upper frame units 272, the processing apparatus 4 is installed in a factory or the like. The frame member is carried in the form of the lower frame unit 270 and the upper frame unit 272.

That is, the high-quality lower frame unit 270 and the upper frame unit 272 produced in a stable environment are used to form the high-quality lower frame 262 and upper frame 264. In addition, complicated work such as connecting the rod-shaped frame members above the processing device 4 does not occur. Therefore, a high-quality transport path 6 can be formed in a short period of time.

FIG. 24A is a perspective view showing the lower frame unit 270a constituting the lower frame 262, and FIG. 24B is a perspective view showing the lower frame unit 270b constituting the lower frame 262. The lower frame unit 270a and the lower frame unit 270b are selectively used, for example, according to the mode of the transport path 6.

FIG. 25 is a plan view showing the arrangement of the lower frame units 270 constituting the lower frame 262. FIG. 25 shows a case where a transport path 6 capable of transporting the workpiece unit 17 can be formed between a total of eight devices (processing device 4, loader / unloader 8, etc.). For example, the lower frame unit 270a is used for the region corresponding to the portion of the transport path 6 excluding the corner portion (the linear region of the transport path 6), and the region corresponding to the corner portion of the transport path 6 is used. The lower frame unit 270b is used.

In the lower frame 262 of FIG. 25, a lower frame unit 270c having a structure in which the lower frame unit 270a is inverted and a lower frame unit 270d having a structure in which the lower frame unit 270b is inverted are used together. That is, in the lower frame 262 of FIG. 25, two of each of the four types of lower frame units 270 are used. Each lower frame unit 270 is configured so that the rod-shaped frame member does not overlap the opening 282 (see FIG. 28, corresponding to the opening 6a in FIG. 3) formed in the transport path 6.

When forming the lower frame 262, for example, the lower frame unit 270 may be fixed to the processing device 4, the loader / unloader 8, or the like, and then the adjacent lower frame units 270 may be connected to each other. For example, a joint is used to connect the adjacent lower frame units 270. However, after connecting the lower frame unit 270, it can be fixed to the processing device 4, the loader / unloader 8, or the like.

FIG. 26A is a perspective view showing the upper frame unit 272a constituting the upper frame 264, and FIG. 26B is a perspective view showing the upper frame unit 272b constituting the upper frame 264. The upper frame unit 272a and the upper frame unit 272b are selectively used, for example, according to the mode of the transport path 6.

FIG. 27 is a plan view showing the arrangement of the upper frame units 272 constituting the upper frame 264. FIG. 27 shows a case where the transport path 6 is configured by using the lower frame 262 of FIG. 25. For example, the upper frame unit 272a is used as a part of the area connecting the adjacent processing devices 4 and the loader / unloader 8, and the upper frame unit is used in the area directly above the processing device 4 and the loader / unloader 8. 272b is used.

That is, in the upper frame 264 of FIG. 27, two upper frame units 272a and eight upper frame units 272b are used. Each upper frame unit 272 is configured so that the rod-shaped frame member does not overlap the opening 282 (see FIG. 28) formed in the transport path 6.

When forming the upper frame 264, for example, the upper frame unit 272 is fixed to the lower frame 262. The two adjacent upper frame units 272 are not connected to each other and may be separated from each other. Further, if necessary, an upper frame unit 272 having an inverted structure of the upper frame unit 272a and an upper frame unit 272 having an inverted structure of the upper frame unit 272b can also be used.

FIG. 28 is a plan view schematically showing a transport path 6 formed by arranging a plurality of road surface panels 266 side by side. FIG. 28 shows a case where the transport path 6 is configured by using the lower frame 262 of FIG. 25 and the upper frame 264 of FIG. 27. Further, in FIG. 28, the boundary between the adjacent road surface panels 266 is shown by a broken line.

When forming the transport path 6, for example, the road surface panel 266 is fixed to the upper frame 264. In the upper frame 264 of FIG. 27, for example, a small gap is formed between the adjacent upper frame unit 272a and the upper frame unit 272b, and a large gap is formed between the two adjacent upper frame units 272b. .. Therefore, the transport path 6 cannot be formed in the portion corresponding to this gap only with the rectangular road surface panel 266 in a plan view. That is, a gap is also formed in the transport path 6.

Therefore, a flat plate-shaped bridging panel 274a and a flat plate-shaped bridging panel 274b are used so as to fill these gaps. A small bridging panel 274a is arranged in a small gap between the adjacent upper frame unit 272a and the upper frame unit 272b. A large bridging panel 274b is arranged in a large gap between two adjacent upper frame units 272b.

The bridging panel 274a and the bridging panel 274b are fixed to the upper frame 264 so as to sufficiently reduce the gaps and steps formed in the transport path 6, for example. As a result, the impact on the transport vehicle 10 during traveling can be suppressed to a small value, and damage to the workpiece 11 and the like can be prevented. If a small gap remains in the transport path 6, for example, a tape or the like provided with a core material along the direction in which the transport vehicle 10 travels may be used to close the gap.

Further, instead of the bridging panel 274a and the bridging panel 274b, a bridging panel having slopes formed at both ends in the direction in which the transport vehicle 10 travels may be used. In this case, for example, the bridging panel can be stacked on the road surface panel 266 and used, so that the demand for the size of the bridging panel is relaxed. This increases the versatility of the bridging panel. It is also possible to connect adjacent road surface panels 266 using a flexible thin plate-shaped bridging panel.

When the transport vehicle 10 travels on the transport vehicle 10 configured in this way, for example, static electricity is generated due to friction between the wheels 86 of the transport vehicle 10 and the transport path 6, and the vehicle is housed in the container 102 of the transport vehicle 10. The workpiece 11 may be adversely affected. For example, when a semiconductor device is formed on the workpiece 11, the semiconductor device may be destroyed by static electricity.

Therefore, it is preferable to expose the conductive member to the portion of the road surface panel 266 that serves as the transport path 6 that comes into contact with the wheels 86 and the like. As the conductive member, for example, CFRP or the like is used in addition to a metal such as aluminum or copper. When the road surface panel 266 is made of CFRP, CFRP is also exposed on the upper surface thereof. That is, a state in which the conductive member is exposed on the upper surface of the road surface panel 266 is realized.

By exposing the conductive member on the upper surface of the road surface panel 266 in this way, it is possible to suppress the generation and accumulation of static electricity due to friction and prevent the work piece 11 from being adversely affected. it can. The conductive member exposed on the upper surface of the road surface panel 266 may be grounded via a conducting wire (not shown) or the like. In this case, the static electricity generated by the contact between the wheels 86 and the road surface panel 266 is discharged through the conducting wire, so that the static electricity does not accumulate on the road surface panel 266. Therefore, the workpiece 11 is more safely transported by the transport vehicle 10.

In the transport system 2 of the present embodiment, as a general rule, the operation of the transport vehicle 10 is controlled so that the transport vehicle 10 does not reach the end of the transport path 6. However, if some trouble occurs in the transport vehicle 10 or the control unit 12, the transport vehicle 10 may reach the end of the transport path 6 and the transport vehicle 10 may fall from the end of the transport path 6. There is also.

Therefore, as shown in FIG. 23, it is desirable to provide a guard portion 276 at the end of the transport path 6 as a barrier for preventing the transport vehicle 10 from falling from the transport path 6. The guard portion 276 is formed of, for example, a material containing a metal such as aluminum, and is fixed to the upper frame 264 and the road surface panel 266. The height from the upper surface of the road surface panel 266 to the upper end of the guard portion 276 is, for example, larger than the radius of the wheels 86 of the transport vehicle 10. Preferably, it is larger than the diameter of the wheel 86.

The guard portion 276 may be formed at a height that contacts the third sensor 126 of the transport vehicle 10 and the exterior cover. In this case, when the guard portion 276 comes into contact with the third sensor 126 of the transport vehicle 10 or the exterior cover, the transport vehicle 10 detects a collision with an obstacle and stops. Therefore, the transport vehicle 10 can be driven more safely.

As shown in FIG. 28, the transport path 6 has a travel area 278 mainly used for traveling the transport vehicle 10, a stop area 280 mainly used for stopping the transport vehicle 10, and mainly the transport vehicle 10. Includes a standby area 284 used for standby. The workpiece unit 17 is transported between the transport vehicle 10 stopped in the stop area 280 and the processing device 4 and the loader / unloader 8 located below the stop area 280.

The traveling area 278 is formed in an annular shape along the arrangement of the processing device 4, the loader / unloader 8, and the like, for example. For example, the transport vehicle 10 travels in one direction along the annular traveling region 278 and does not travel in the other direction (that is, one-way). As a result, the transport vehicle 10 can be safely driven with simple control.

However, there are no restrictions on the shape of the traveling area 278, the traveling mode of the transport vehicle 10, and the like. For example, the traveling region 278 may be configured to allow the transport vehicle 10 to travel in both directions. Further, the traveling region 278 does not have to be formed in an annular shape without an end, and may be formed in a straight line having an end, for example.

On the other hand, the stop area 280 is provided with an opening 282 that vertically penetrates the road surface panel 266. The opening 282 is formed, for example, slightly larger than the upper surface and the lower surface of the container 102, and allows the container 102 to pass up and down. On the other hand, the width of the opening 282 in the direction perpendicular to the approach direction when the transport vehicle 10 enters the stop area 280 is narrower than the distance between the pair of wheels 86 of the transport vehicle 10. As a result, if the direction of approach when the transport vehicle 10 enters the stop area 280 is appropriate, the wheel 86 does not fall into the opening 282.

The standby area 284 is arranged, for example, in an area where the transport vehicle 10 is likely to be on standby. By making the transport vehicle 10 stand by in the standby area 284, the other transport vehicle 10 can overtake the standby transport vehicle 10. Further, when the transport vehicle 10 is allowed to travel in both directions, the two transport vehicles 10 can be mistaken for each other by temporarily making the transport vehicle 10 stand by in the standby area 284. .. The transport path 6 does not necessarily include the standby area 284.

On the upper surfaces of the road surface panel 266, the bridging panel 274a, the bridging panel 274b, etc. that constitute the transport path 6, a plurality of types of guidance marks 286 (see FIG. 23) detected by sensors included in the transport vehicle 10 are provided. ing. The transport vehicle 10 controls traveling, turning, stopping, and the like based on various marks 286 detected by sensors.

As shown in FIG. 23, the mark 286 is formed in a linear shape having a color different from that of other regions on the upper surface such as the road surface panel 266. In the present embodiment, as the mark 286, as shown in FIG. 28, the first mark 286a, the second mark 286b, the third mark 286c, and the fourth mark 286d are used.

However, there is no limitation on the aspect of the mark 286. The mark 286 may include, for example, a curved line, or may be composed of a broken line. Further, as the mark 286, characters, numbers, symbols and the like can also be used. Further, there is no limitation on the color of the mark 286 and the like. For example, a plurality of marks 286 having different colors may be used, and the transport vehicle 10 may be configured to perform various controls based on the colors of the marks 286.

The traveling area 278 is provided with a first mark 286a along the direction in which the transport vehicle 10 travels. The first mark 286a is formed, for example, in an area where the transport vehicle 10 traveling in the traveling area 278 should pass. More specifically, the first mark 286a is provided directly below the pair of first sensors 122 of the transport vehicle 10 traveling in the traveling region 278.

FIG. 29 is a functional block diagram showing the control unit 130 of the transport vehicle 10. As shown in FIG. 29, the control unit 130 of the transport vehicle 10 causes each of the pair of first sensors 122 to monitor the upper surface of the traveling area 278 and the like (transport path 6) to detect the first mark 286a. It includes a control unit 130a and a travel instruction unit 130b that identifies the direction indicated by the first mark 286a detected by the first sensor 122 and causes the transport vehicle 10 to travel along the direction.

Each of the pair of first sensors 122 detects the first mark 286a according to the control signal input from the first sensor control unit 130a. Information about the first mark 286a detected by the first sensor 122 is sent to the traveling instruction unit 130b via the first sensor control unit 130a.

The travel instruction unit 130b identifies the direction indicated by the first mark 286a based on the information of the first mark 286a sent from the first sensor control unit 130a. Then, the travel instruction unit 130b controls the drive unit 90 to travel the transport vehicle 10 along the specified direction. That is, the transport vehicle 10 can detect the first mark 286a by the pair of first sensors 122 and travel on the transport path 6 along the first mark 286a.

As shown in FIG. 28, two linear first marks 286a intersect at a predetermined portion of the traveling region 278. While traveling along one first mark 286a, the transport vehicle 10 detects the other first mark 286a that intersects the one first mark 286a with the second sensor 124. When the other first mark 286a is detected by the second sensor 124, the transport vehicle 10 turns as necessary.

That is, the traveling direction of the transport vehicle 10 is changed at an arbitrary intersection where the two linear first marks 286a intersect. As described above, a part of the other first mark 286a detected by the second sensor 124 functions as the second mark 286b indicating the position where the transport vehicle 10 turns. In the transport path 6, there are a number of second marks 286b corresponding to the number of intersections where the two first marks 286a intersect. That is, a plurality of second marks 286b exist in the transport path 6 of FIG. 28.

As shown in FIG. 29, the control unit 130 of the transport vehicle 10 has a second sensor control unit 130c that causes the second sensor 124 to monitor the upper surface of the traveling region 278 and the like (transport path 6) to detect the second mark 286b. , The number of the second mark 286b detected by the second sensor 124 is counted, and the turning instruction unit 130d for turning the transport vehicle 10 based on the counted number of the second mark 286b is included.

The second sensor 124 detects the second mark 286b according to the control signal input from the second sensor control unit 130c. Then, for example, every time the second sensor 124 detects the second mark 286b, the second sensor control unit 130c notifies the turning instruction unit 130d of the control unit 130 to that effect.

The turning instruction unit 130d counts the number of the second marks 286b detected by the second sensor 124 based on the notification from the second sensor control unit 130c, and receives an instruction from the control unit 12 of the transfer system 2, for example. Compare with the number of corresponding second marks 286b (predetermined number). Then, when the number of the second marks 286b detected by the second sensor 124 reaches the number of the second marks 286b corresponding to the instruction from the control unit 12, the turning instruction unit 130d controls the drive unit 90 to control the drive unit 90. The transport vehicle 10 is turned.

That is, the turning instruction unit 130d changes the direction of the transport vehicle 10 according to the number of detected second marks 286b. In this way, the transport vehicle 10 can detect the second mark 286b by the second sensor 124 and change the direction as needed. The second mark 286b is, for example, a corner portion of the traveling region 278 (corner portion of the transport path 6), a portion of the traveling region 278 adjacent to the stop region 280, and a portion of the traveling region 278 adjacent to the standby region 284. Etc. are provided.

By the way, when the pair of second sensors 124 are arranged on a straight line passing through the pair of wheels 86, the wheels 86 pass through the second mark 286b and at the same time, the second mark 286b is passed through the pair of second sensors. It can be detected by the sensor 124. Therefore, by turning the transport vehicle 10 at the timing when the second mark 286b is detected, the pair of first sensors 122 will not be significantly deviated from the first mark 286a to be detected after turning. That is, the transport vehicle 10 can be appropriately turned without any correction.

As shown in FIG. 28, the stop area 280 is provided with a third mark 286c along the direction in which the transport vehicle 10 enters. That is, the third mark 286c indicates the direction in which the transport vehicle 10 enters the stop area 280. The third mark 286c is formed at two positions sandwiching the opening 282 in a direction perpendicular to the approaching direction of the transport vehicle 10, and is detected by the second sensor 124 of the transport vehicle 10.

As shown in FIG. 29, the control unit 130 of the transport vehicle 10 includes an approach control unit 130e that causes the transport vehicle 10 to enter the stop region 280 along the direction indicated by the third mark 286c detected by the second sensor 124. .. The approach control unit 130e is connected to the second sensor control unit 130c.

The second sensor control unit 130c causes the second sensor 124 to monitor the upper surface of the stop area 280 and the like (transport path 6) to detect the third mark 286c. Information about the third mark 286c detected by the second sensor 124 is sent to the approach control unit 130e via the second sensor control unit 130c.

The approach control unit 130e identifies the direction indicated by the third mark 286c based on the information of the third mark 286c input from the second sensor control unit 130c. Then, the approach control unit 130e controls the drive unit 90 to bring the transport vehicle 10 into the stop area 280 along the specified direction. The third mark 286c is typically provided in an area where the wheels 86 of the transport vehicle 10 should pass. However, there are no restrictions on the arrangement of the third mark 286c.

As shown in FIG. 28, the first mark 286a is on the rear side (front side) of the stop area 280 (or the standby area 284) in the direction in which the transport vehicle 10 enters the stop area 280 (or the standby area 284). And a fourth mark 286d that intersects the third mark 286c is provided. The fourth mark 286d indicates the position of the stop area 280 (or the standby area 284).

As shown in FIG. 29, the control unit 130 of the transport vehicle 10 detects the fourth mark 286d by the first sensor 122 (one of the pair of first sensors 122) located behind the transport vehicle 10 in the traveling direction. It includes a stop control unit 130f that stops the transport vehicle 10 when the vehicle is stopped. The vehicle stop control unit 130f is connected to the first sensor control unit 130a.

The first sensor control unit 130a causes the first sensor 122 to monitor the upper surface of the traveling area 278, the stopped area 280, etc. (transportation path 6), and causes the first sensor 122 to detect the fourth mark 286d. When the fourth mark 286d is detected by the first sensor 122, the stop control unit 130f is notified to that effect via the first sensor control unit 130a.

When the vehicle stop control unit 130f is notified by the first sensor control unit 130a that the fourth mark 286d has been detected, the vehicle stop control unit 130f controls the drive unit 90 to quickly stop the transport vehicle 10. That is, for example, when the first sensor 122 on the rear side detects the fourth mark 286d, the transport vehicle 10 stops immediately.

The fourth mark 286d may be provided on the front side (back side) of the stop area 280 (or the standby area 284) in the direction in which the transport vehicle 10 enters the stop area 280 (or the standby area 284). .. In this case, when the transport vehicle 10 detects the fourth mark 286d by the first sensor 122 on the front side, the transport vehicle 10 stops immediately.

The fourth mark 286d may be provided at a position that can be detected by the second sensor 124. In this case, the vehicle stop control unit 130f shown in FIG. 29 is connected to the second sensor control unit 130c. Then, when the second sensor 124 controlled by the second sensor control unit 130c detects the fourth mark 286d, the vehicle stop control unit 130f controls the drive unit 90 to stop the transport vehicle 10.

Further, the vehicle stop control unit 130f may stop the transport vehicle 10 after a predetermined time has elapsed from the detection of the fourth mark 286d by the first sensor 122 or the second sensor 124. The time from the detection of the fourth mark 286d to the stop of the transport vehicle 10 is adjusted based on, for example, the distance between the fourth mark 286d and the stop area 280, the speed at which the transport vehicle 10 travels, and the like.

As shown in FIG. 28, power supply terminals (power supply terminals) connected to a power supply (not shown) are located at positions on the front side (back side) of the stop area 280 and the standby area 284 in the direction in which the transport vehicle 10 enters. 288 are arranged. For example, if the transport vehicle 10 is stopped in the stop area 280 or the standby region 284 and the terminal (power receiving terminal) 100 of the transport vehicle 10 is brought into contact with the terminal 288, the terminal 100 and the charging wiring (charging wiring) 98 are connected. Power for charging is supplied to the battery (secondary battery) 96 via the battery (secondary battery) 96. That is, the battery 96 can be charged.

As shown in FIG. 23, the terminal 288 is supported by the terminal support portion 290 fixed to the road surface panel 266 or the upper frame 264, and is connected to the power supply wiring (power supply wiring) 292. That is, the terminal 288 is connected to the power supply via the power supply wiring 292.

The terminal support portion 290 includes, for example, an urging member (not shown) that urges the terminal 288 toward the stop area 280 or the standby area 284. By urging the terminal 288 with the urging member, the terminal 288 can be appropriately connected to the terminal 100. However, there are no restrictions on the structure of the terminal 288 and the terminal support portion 290.

For example, after the transport vehicle 10 is stopped in the stop area 280, the container 102 is moved up and down by the elevating unit 110. In the present embodiment, since the power supply terminal 288 is arranged in the stop area 280, the battery 96 is charged even when the container 102 is moved up and down. Therefore, it is possible to sufficiently cover a large amount of electric power consumed by the elevating unit 110 when elevating and lowering the container 102.

In this embodiment, the terminal 288 is also arranged in the standby area 284. Therefore, for example, the battery 96 is charged even when the transport vehicle 10 is made to stand by in the standby area 284. As a result, the operating time of the transport vehicle 10 can be extended, and the efficiency of transporting the workpiece 11 can be increased.

The operation when moving the transport vehicle 10 from a certain position (starting point) to another position (destination) on the transport path 6 is as follows, for example. First, the control unit 12 of the transport system 2 sends a signal corresponding to an instruction to move from the departure point to the destination to the transport vehicle 10 to be moved.

Upon receiving the instruction from the control unit 12, the control unit 130 of the transport vehicle 10 first determines a route to the destination with its current position as the departure point, and the transport vehicle 10 moves from the departure point to the destination along this route. The number of the second marks 286b existing up to each position to be turned and the direction of turning at each position to be turned are obtained. Then, the control unit 130 of the transport vehicle 10 controls the drive unit 90 and the like based on the number of the second marks 286b obtained by itself and the direction of turning.

For example, the control unit 130 of the transport vehicle 10 runs the transport vehicle 10 while monitoring the upper surface of the transport path 6 with the first sensor 122 and the second sensor 124. That is, the control unit 130 moves the transport vehicle 10 along the direction indicated by the first mark 286a detected by the first sensor 122, and passes the second mark 286b through which the second sensor 124 passes through the second sensor. Let 124 detect it.

When the number of the second marks 286b passed by the second sensor 124 reaches the number of the second marks 286b obtained by the control unit 130, the control unit 130 turns the transport vehicle 10 in the turning direction requested by the control unit 130. After that, the control unit 130 re-runs the transport vehicle 10 along the direction indicated by the first mark 286a. When the transport vehicle 10 arrives at the destination, the control unit 130 sends a signal to the control unit 12 to notify the fact.

When the transport vehicle 10 is brought into the stop area 280, the control unit 130 causes the second sensor 124 to detect the third mark 286c and finely adjusts the direction in which the transport vehicle 10 travels. As a result, it is possible to prevent the wheels 86 of the transport vehicle 10 from falling into the opening 282. In this case, it is preferable to keep the traveling speed lower than when the transport vehicle 10 is traveled along the direction indicated by the first mark 286a. After that, the control unit 130 causes the first sensor 122 to detect the fourth mark 286d, and stops the transport vehicle 10 in the stop area 280.

As a general rule, the transport vehicle 10 travels so that the wheels 86 are located in front of the traveling direction and the wheels 88 are located behind in the traveling direction. However, when moving from the stop area 280 or the standby area 284 to the traveling area 278, the transport vehicle 10 has the wheels 86 located behind in the traveling direction and the wheels 88 located in front of the traveling direction. Will run to.

When the transport vehicle 10 stops in the stop area 280, the container 102 is positioned directly above the opening 282. Further, the terminal 100 on the transport vehicle 10 side comes into contact with the terminal 288 on the transport path 6 side. As a result, the transport vehicle 10 can lower the container 102 while charging the battery 96, and place the container 102 in the mounting area A located below the opening 282.

In the above-described mode of operation, the control unit 130 determines the number of the second marks 286b and the direction of turning, but the judgment by the control unit 130 may be kept to a minimum. In this case, for example, a signal including the number of second marks 286b existing between the departure point and each position where the transport vehicle 10 should turn, and information on the direction of turning at each position to turn. Is sent from the control unit 12. In this operation, the control unit 130 does not have to obtain the number of the second marks 286b and the direction of turning, so that the control unit 130 can be simplified.

Next, an example of the control method of the transport system 2 according to the present embodiment will be described. FIG. 30 is a diagram for explaining an example of a control method of the transport system 2. For example, the control device 246 of the processing device 4 generates a signal (workpiece request signal) for notifying when the work piece 11 before machining becomes a new necessary situation. The signal (workpiece request signal) generated by the control device 246 is transmitted from the transmitter 250 to the control unit 12.

As shown in FIG. 30, the control unit 12 includes a control unit (signal generation unit) 302 that generates signals for performing various controls. The control unit 302 includes, for example, a computer including a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. There is. The function of the control unit 302 is realized by operating the processing device or the like according to the software stored in the auxiliary storage device.

The control unit 302 includes a receiver 304 that receives a signal transmitted from the processing device 4, the loader / unloader 8, the transport vehicle 10, etc. A transmitter 306 that transmits a signal is connected.

When the receiver 304 of the control unit 12 receives the notification signal (workpiece request signal) transmitted from the transmitter 250 of the processing device 4, it sends this to the control unit 302. When the control unit 302 confirms the notification signal (workpiece request signal) from the processing device 4, the control unit 302 moves to the stop area 280 directly above the loader / unloader 8 for any transport vehicle 10, and the container. An instruction is given to mount the 102 on the upper surface (second mounting area A _{2) of the mounting table 66 of the loader / unloader 8.} Specifically, the control unit 302 generates a control signal (first mounting instruction signal) corresponding to this instruction and transmits it from the transmitter 306 to the transport vehicle 10.

When the receiver 132 of the transport vehicle 10 receives the signal (first mounting instruction signal) from the control unit 12, it sends the signal to the control unit 130. The control unit 130 controls the drive unit 90 and the like based on this signal (first mounting instruction signal), and causes the transport vehicle 10 to travel along the transport path 6. When the transport vehicle 10 stops in the stop area 280 directly above the loader / unloader 8, the container 102 is positioned directly above the opening 282.

With the transport vehicle 10 stopped in the stop area 280, the control unit 130 controls the elevating unit 110 to send out the suspension member 112. As a result, the container 102 can be lowered so as to pass through the opening 282 and the like, and the container 102 can be placed on the upper surface of the mounting table 66.

After mounting the container 102 on the upper surface of the mounting table 66, the control unit 130 sends a notification signal (first mounting completed) for notifying that the mounting of the container 102 on the upper surface of the mounting table 66 is completed. Signal) is generated. The signal generated by the control unit 130 (first mounting completion signal) is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (first mounting completion signal) transmitted from the transmitter 134 of the transport vehicle 10, it sends this to the control unit 302. When the control unit 302 confirms the signal from the transport vehicle 10 (first mounting completion signal), the control unit 302 notifies the loader / unloader 8 that the mounting of the container 102 on the upper surface of the mounting table 66 is completed. To do. Specifically, the control unit 302 generates a notification signal (second mounting completion signal) for notifying that the mounting of the container 102 on the upper surface of the mounting table 66 is completed, and the transmitter 306. To the loader / unloader 8.

When the receiver 68 of the loader / unloader 8 receives the signal (second mounting completion signal) from the control unit 12, it sends the signal to the control device 46. Upon receiving this signal (second mounting completion signal), the control device 46 controls the operation of each component and carries the workpiece 11 before processing into the container 102. When the processed work piece 11 is housed in the container 102, the processed work piece 11 is carried out from the container 102, and then the unprocessed work piece 11 is carried into the container 102.

When the workpiece 11 before processing is carried into the container 102, the control device 46 notifies that the delivery of the workpiece 11 to the container 102 is completed (first transport completion signal). ) Is generated. The signal generated by the control device 46 (first transport completion signal) is transmitted from the transmitter 70 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (first transport completion signal) transmitted from the transmitter 70 of the loader / unloader 8, it sends this to the control unit 302. When the control unit 302 confirms the signal from the loader / unloader 8 (first transport completion signal), the control unit 302 moves to the stop area 280 directly above the processing device 4 with respect to the transport vehicle 10, and moves the container 102 to the processing device 4. An instruction is given to place the vehicle on the upper surface (mounting area A) of the lifting platform 204. Specifically, the control unit 302 generates a control signal (second mounting instruction signal) corresponding to this instruction and transmits it from the transmitter 306 to the transport vehicle 10.

When the receiver 132 of the transport vehicle 10 receives the signal (second mounting instruction signal) from the control unit 12, it sends the signal to the control unit 130. The control unit 130 controls the elevating unit 110 based on this signal (second mounting instruction signal), and winds up the hanging member 112. As a result, the container 102 can be raised so as to pass through the opening 282 and the like and stored in the storage area 104. After that, the control unit 130 controls the drive unit 90 and the like to drive the transport vehicle 10 along the transport path 6.

When the transport vehicle 10 stops in the stop area 280 directly above the processing device 4, the container 102 is positioned directly above the opening 282. With the transport vehicle 10 stopped in the stop area 280, the control unit 130 controls the elevating unit 110 to send out the suspension member 112. As a result, the container 102 can be lowered so as to pass through the opening 282 and the like, and the container 102 can be placed on the upper surface of the elevating table 204 of the processing apparatus 4.

After the container 102 is placed on the upper surface of the elevating table 204, the control unit 130 notifies that the mounting of the container 102 on the upper surface of the elevating table 204 is completed (third mounting completed). Signal) is generated. The signal generated by the control unit 130 (third mounting completion signal) is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (third mounting completion signal) transmitted from the transmitter 134 of the transport vehicle 10, it sends this to the control unit 302. When the control unit 302 confirms the signal from the transport vehicle 10 (third mounting completion signal), the control unit 302 notifies the processing device 4 that the mounting of the container 102 on the upper surface of the elevating table 204 is completed. Specifically, the control unit 302 generates a notification signal (fourth mounting completion signal) for notifying that the mounting of the container 102 on the upper surface of the mounting table 66 is completed, and the transmitter 306. To the processing device 4.

When the receiver 248 of the processing device 4 receives the signal (fourth mounting completion signal) from the control unit 12, it sends the signal to the control device 246. Upon receiving this signal (fourth mounting completion signal), the control device 246 controls the operation of each component and carries out the workpiece 11 before processing from the container 102. When the processed workpiece 11 is present in the processing apparatus 4, the processed workpiece 11 before processing is carried out from the container 102, and then the processed workpiece 11 is carried into the container 102.

When the workpiece 11 before processing is carried out from the container 102, for example, the control device 246 notifies that the delivery of the workpiece 11 from the container 102 is completed (second transport). Completion signal) is generated. The signal generated by the control device 246 (second transport completion signal) is transmitted from the transmitter 250 to the control unit 12.

By such a procedure, the work piece 11 before processing contained in the loader / unloader 8 can be conveyed to an arbitrary processing device 4. Although the procedure for transporting the workpiece 11 from the loader / unloader 8 to the processing apparatus 4 has been mainly described here, the workpiece 11 from the processing apparatus 4 to the loader / unloader 8 has been mainly described. The procedure and the like for transporting the above are the same.

The above-mentioned procedure can be arbitrarily changed within a range in which the workpiece 11 can be appropriately conveyed. For example, a plurality of steps included in the above-mentioned procedure may be performed at the same time, or the order of the steps may be changed within a range that does not interfere with the transportation of the workpiece 11. Similarly, any step may be added, changed, or omitted as long as the transportation of the workpiece 11 is not hindered.

As described above, the transport path 6, the loader / unloader (conveyor) 8, the transport vehicle 10, the cassette accommodating mechanism 24, and the elevating unit (elevation mechanism) 110 according to the present embodiment are all the workpieces 11. Is configured to be able to be transported efficiently and safely. Therefore, by using the transport system 2 incorporating these, the workpiece 11 can be transported efficiently and safely.

(Embodiment 2)
In this embodiment, a processing apparatus having a mode different from that of the above-described embodiment will be described. FIG. 31 is a perspective view showing the internal structure of the processing apparatus (cutting apparatus) 402 according to the present embodiment. In the following description, the same components as those in the above-described embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

The container 102 of the transport vehicle 10 is not placed on the elevating table 404 of the processing device 402. Instead, the elevating table 404 of the processing apparatus is similar to the two-stage cassette accommodating mechanism 24 (that is, the first cassette accommodating mechanism 24a and the second cassette accommodating mechanism 24b) of the loader / unloader 8 of the above-described embodiment. The two-stage cassette accommodating mechanism 406 (first cassette accommodating mechanism 406a and second cassette accommodating mechanism 406b) is provided.

That is, the cassette 30 is carried into the processing apparatus 402 of the present embodiment. The processing device 402 is also equipped with a movement restricting mechanism including a stopper member 50 and a shaft mechanism 52. As a result, the relatively heavy cassette 30 can be easily carried in and out, so that the risk that the workpiece 11 housed in the cassette 30 is damaged due to the loading and unloading can be reduced. Further, it becomes easy to realize a cassette accommodating mechanism 406 that is compact in the width direction.

Further, also in the processing apparatus 402 of the present embodiment, a first safety mechanism and a second safety mechanism for restricting access from the outside to the inside of the processing apparatus 402 are realized. As a result, it is possible to prevent the operator from accidentally accessing the moving moving portion or the like located inside the processing apparatus 402 during operation.

The processing apparatus 402 of the present embodiment may be independent of the above-mentioned transport system 2. That is, the processing apparatus 402 according to this embodiment does not necessarily have to be connected to the above-mentioned transport system 2.

The cassette accommodating mechanism 406 according to the present embodiment is configured so that the workpiece 11 can be efficiently and safely conveyed, similarly to the cassette accommodating mechanism 24 of the above-described embodiment. Therefore, by using the processing device 4 incorporating this, the workpiece 11 can be transported efficiently and safely.

In addition, the structures, methods, and the like related to the above-described embodiments and modifications can be appropriately modified and implemented without departing from the scope of the object of the present invention.

2: Conveyance system 4: Machining equipment (cutting equipment)
4a: Processing equipment 4b: Processing equipment 6: Transport path 6a: Opening 8: Loader / unloader (conveyor)
10: Transport vehicle 10a: Transport vehicle 10b: Transport vehicle 12: Control unit 21: Piping 22: Housing 22a: Ceiling 22b: Opening 24: Cassette accommodating mechanism 24a: First cassette accommodating mechanism 24b: Second cassette accommodating mechanism 26: Support base 26a: Upper surface 26b: Outer surface 28: Cassette mounting table 28a: Lower surface 28b: Upper surface 28c: Through hole 30: Cassette 30a: First cassette 30b: Second cassette 32: Carry-in outlet 34: Outer door (second door)
36: Rotational connecting member 38a: External loading / unloading area (external area)
38b: Internal accommodation area (internal area)
40: Inner door (1st door)
42: Elevating mechanism 42a: Cylinder tube 42b: Piston rod 42c: Connecting member 44: First sensor 44a: Magnet 46: Control device 48: Second sensor 48a: Magnet 50: Stopper member 50a: Square rod 50b: Roller 52: Shaft Mechanism 52a: Rotating shaft 52b: Bearing 54: Pin (pressing part)
54a: Ring 54b: Button 56: Elevating mechanism 56a: Support pillar 58: Elevating stand 60: Temporary storage unit 62: Housing 62a: Upper plate 62b: Lower plate 62c: Side plate 62c ₁ : First side plate 62c ₂ : Second side plate 62d: Opening 62e ₁ : First opening 62e ₂ : Second opening 64: Conveying unit (conveying mechanism)
64a: 1st transport unit 64b: 2nd transport unit 66: Mounting stand 68: Receiver 70: Transmitter 72a: Upper guide rail (1st temporary placement part)
72b: Lower guide rail (second temporary storage part)
72c: Spacing 74a: 1st air actuator 74b: 2nd air actuator 76a: 1st guide mechanism 76b: 2nd guide mechanism 78: Spacing adjustment mechanism 82: Frame 84: Axle 86: Wheels (front wheels)
88: Wheels (rear wheels)
90: Drive unit 92: Motor 92a: Rotating shaft (output shaft)
94: Pulley 96: Battery (secondary battery)
98: Wiring (charging wiring)
100: Terminal (power receiving terminal)
102: Container (cassette)
102a: Containment section (accommodation space)
102b: Opening 102c: Upper wall 102d: Bottom wall 104: Storage area 106: First guide rail 106a: Holding surface 106b: Side surface 108: Second guide rail 108a: Holding surface 110: Elevating unit (elevating mechanism)
112: Suspended member 114: Drive mechanism 116: Contact member 118: Elastic member (expandable member)
120: Cover 122: 1st sensor 124: 2nd sensor 126: 3rd sensor 128: Support base 130: Control unit (control unit)
130a: 1st sensor control unit 130b: Travel instruction unit 130c: 2nd sensor control unit 130d: Turning instruction unit 130e: Approach control unit 130f: Stop control unit 132: Receiver 134: Transmitter 142: Motor 142a: Rotation shaft ( Output shaft)
144a: 1st rotation shaft (1st shaft)
144b: 2nd rotation shaft (2nd shaft)
146: Pulley 148: Connecting member 150a: Pulley 150b: Pulley 152: Connecting member 154a: Reel 154b: Reel 156a: Roller 156b: Roller 162: Drive mechanism 164: Motor 164a: Rotating shaft (output shaft)
166a: 1st rotation shaft (1st shaft)
166b: 2nd rotation shaft (2nd shaft)
166c: 3rd rotation shaft (3rd shaft)
168: Pulley 170: Connecting member 172: Reel 172a: Groove (recess)
172b: Protrusion (convex part)
174: Fixing member 176: Guide 182: Lid part 182a: Plate-shaped member 182b: Flexible member 184: Contact part 184a: Fixing member 184b: Roller 186: Fixed block 188: Connecting block (L-shaped block)
188a: Connecting part 188b: Fixed part 190: Connecting shaft 202: Base 202a: Recessed part 202b: Recessed part 202c: Piping connection part 204: Elevating table 206: X-axis moving mechanism (machining feed unit)
206a: Table cover 206b: Dust-proof and drip-proof cover 208: Chuck table 208a: Holding surface 210: Clamp 212: Guide rail 214: First support structure 216: First rail 218: First moving mechanism 220: First holding unit 220a: Gripping mechanism 222: 2nd rail 224: 2nd moving mechanism 226: 2nd holding unit 228: 2nd support structure 230: Y-axis Z-axis moving mechanism (indexing feed unit, cutting feed unit)
232: Machining unit (cutting unit)
234: Cutting blade 236: Imaging unit (camera)
238: Cleaning unit 240: Spinner table 242: Injection nozzle 244: Cover 244a: Ceiling 244b: Door 246: Control device 248: Receiver 250: Transmitter 262: Lower frame 264: Upper frame 266: Road panel 268: Screw 270: Lower frame unit 270a: Lower frame unit 270b: Lower frame unit 270c: Lower frame unit 270d: Lower frame unit 272: Upper frame unit 272a: Upper frame unit 272b: Upper frame unit 274a: Bridging panel 274b: Bridging panel 276: Guard 278: Travel area 280: Stop area 288: Opening 284: Standby area 286: Mark 286a: 1st mark 286b: 2nd mark 286c: 3rd mark 286d: 4th mark 288: Terminal (power supply terminal)
290: Terminal support 292: Wiring (power supply wiring)
302: Control unit 304: Receiver 306: Transmitter 402: Machining equipment (cutting equipment)
404: Lifting platform 406: Cassette accommodating mechanism 406a: First cassette accommodating mechanism 406b: Second cassette accommodating mechanism 11: Work piece 13: Tape (dicing tape)
15: Frame 17: Work piece unit 17a: Work piece unit 17b: Work piece unit A: Mounting area A ₁ a: First mounting area A ₁ b: First mounting area A ₂ : Second mounting Placement area B ₁ a: 1st transport area B ₁ b: 1st transport area B ₂ : 2nd transport area C ₁ : Arrow C ₂ : Arrow C ₃ : Arrow D ₁ : Arrow D ₂ : Arrow D ₃ : Arrow E ₁ : Arrow E ₂ : Arrow F ₁ : Arrow F ₂ : Arrow G: Arrow

Claims (2)

A transport vehicle that travels on a transport path installed above the processing equipment to transport the workpiece.
The frame on which the wheels for running are mounted and
A container for accommodating the work piece and
The frame is provided with an elevating unit for suspending and elevating the container.
The elevating unit comprises a hanging member to which one end is connected to the container.
The suspending member is a transport vehicle characterized in that it is connected to the container via an elastic member. The transport vehicle according to claim 1, wherein the elastic member is rubber or a spring.

Images