JP2021076417A - Correlation generation method, measurement force adjustment method, and surface property measuring device - Google Patents

Abstract

To provide a correlation generation method, a measurement force adjustment method and a surface property measuring device with which it is possible to adjust a measurement force simply at low cost.SOLUTION: In a surface property measurement in which an arm (204) equipped with a contactor (202) is swingably supported at a swing fulcrum (212) using a tabular elastic member (220) and an urging force is applied, using a measurement force adding part (206), to an arm portion that is opposite the contactor across the swing fulcrum, thereby adding a measurement force to the contactor via the arm and detecting the displacement (D) of the contactor, the displacement of the contactor is detected via the arm while changing the set value (SV) of the measurement force adding part that corresponds to the urging force while the contactor is kept out of contact with a workpiece; the measurement force added to the contactor when the displacement of the contactor is detected is calculated on the basis of the detection value of displacement and the physical property value of the tabular elastic member; and a correlation between the set value of the measurement force adding part and the measurement force is created on the basis of the calculation result.SELECTED DRAWING: Figure 6

Description

The present invention relates to a correlation generation method, a measuring force adjusting method, and a surface texture measuring device.

In a contact-type detector for measuring surface properties, a contactor that comes into contact with an object to be measured, an arm that supports the contact, a swing support shaft that swingably supports the arm, and a sensor that detects the swing displacement of the arm. The lever type detector provided with the above is widely used. In the lever type detector, an elastic body such as a coil spring is used to apply a measuring force that presses the contactor against the object to be measured. The measuring force is adjusted using the measuring force adjusting mechanism. Setting accuracy was an issue for measuring force.

Patent Document 1 describes a contact-type inner diameter measuring device that performs measurement by bringing a contactor into contact with an object to be measured. The device described in the document is provided with a contactor at one end of a measuring arm swayably supported at a swing fulcrum, and a detector is used to detect the displacement of the other end. The swing fulcrum of the arm provided in the device is configured by using a cross spring. Such a configuration enables highly accurate measurement with a constant measuring force.

Japanese Unexamined Patent Publication No. 11-257905

However, when there are mechanical individual differences for each device, the measuring force actually applied to the object to be measured may be different even if the setting of the measuring force applying mechanism is the same. Therefore, it is necessary to actually measure the correlation between the setting of the measuring force applying mechanism and the measuring force for each device. Similar problems exist when the arm, contactor, and the like are replaceable.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a correlation generation method, a measuring force adjusting method, and a surface texture measuring device capable of performing simple adjustment of measuring force at low cost. To do.

In order to achieve the above object, the following aspects of the invention are provided.

In the correlation generation method according to the first aspect, the arm provided with the contact is oscillatingly supported at the oscillating fulcrum by using a plate-shaped elastic member, and is on the opposite side of the fulcrum from the contact. It is a correlation generation method in surface texture measurement that applies a measuring force to the contact via the arm by applying a urging force to the arm part using a measuring force applying portion to detect the displacement of the contact. Then, with the contactor in non-contact with the work, the detection process of detecting the displacement of the contactor via the arm while changing the set value of the measuring force applying unit corresponding to the urging force, and the detection value of the displacement. A calculation process that calculates the measuring force applied to the contact when displacement is detected based on the physical property values of the plate-shaped elastic member, and a set value and measuring force of the measuring force applying unit based on the calculation result of the calculation process. It is a correlation generation method including a creation step of creating a correlation with.

According to the first aspect, the displacement of the contact is detected with respect to the set value of the plurality of measuring force applying mechanisms, with the contact as non-contact. From the detection result of the displacement of the contactor, the correlation between the set value of the measuring force applying mechanism and the measuring force applied to the contact is derived by using the physical property value of the plate-shaped elastic member supporting the arm at the swing fulcrum. .. As a result, it is possible to generate a correlation applied to low-cost and simple measurement force adjustment without the need for a measuring device or the like for actually measuring the measuring force.

The concept of adjusting the measuring force may include the concept of initial setting of the measuring force and the configuration after the measuring force is set.

The second aspect is the correlation generation method of the first aspect, in which the measurement force is _Fmeas , the bending stiffness of the plate-shaped elastic member is B, the detection value of the displacement detection position on the arm is D, and the plate-shaped elastic member. of the length L, a distance from the fulcrum to the displacement detecting position _{L arm,} the distance from the fulcrum to contact the _{L tip, F meas = B ×} D / (L × L arm × L tip) The measurement force derived using the above may be applied.

According to the second aspect, the bending stiffness B of the plate-shaped elastic member, the displacement detection value D of the contactor, the length L of the plate-shaped elastic member, the distance Larm from the swing fulcrum to the displacement detection position on the _arm, and the swing. _{Using the distance L tip} from the fulcrum to _{the contactor, the measuring force Fmeas} can be derived from the detected value D of the displacement of the contactor.

The measuring force adjusting method according to the third aspect is a measuring force adjusting method for adjusting the measuring force using the correlation created by the correlation generation method described in the first aspect, and the value of the measuring force is input. The measurement is performed based on the determination step of determining the set value of the measuring force applying unit corresponding to the value of the measuring force and the setting value of the measuring force applying unit determined in the determination process with reference to the input process to be performed and the correlation. This is a measuring force adjusting method including an adjusting step of operating a force applying unit to adjust the measuring force applied to the contactor.

According to the third aspect, it is possible to adjust the measuring force using the correlation described in the first aspect.

The fourth aspect may be configured to include a correlation selection step of selecting a correlation according to a measurement condition from a plurality of correlations in the measuring force adjusting method of the third aspect.

According to the fourth aspect, the measuring force can be adjusted according to the measuring conditions.

The surface property measuring device according to the fifth aspect includes a contactor, an arm to which the contactor is attached, an arm support portion that swingably supports the arm by using a plate-shaped elastic member at a swinging fulcrum of the arm, and the like. A measuring force applying portion that applies a measuring force to the contact via the arm by applying an urging force to the part of the arm opposite to the contact with the swinging fulcrum in between, and a measuring force applying portion that applies the measuring force to the contact via the arm, and the contact via the arm. It is provided with a detection unit that detects displacement and a correlation storage unit that stores the correlation between the set value of the measuring force applying unit and the measuring force, and the correlation is in a state where the contactor is not in contact with the work. , The displacement of the contactor is detected while changing the set value of the measuring force applying part corresponding to the urging force, and when the displacement is detected, the contactor is detected based on the detected value of the displacement and the physical property value of the plate-shaped elastic member. It is a surface property measuring device that calculates the applied measuring force and applies the correlation between the set value of the measuring force applying unit generated based on the calculation result and the measuring force.

According to the fifth aspect, it is possible to adjust the measuring force using the correlation described in the first aspect.

According to the present invention, the displacement of the contact is detected with respect to the set value of a plurality of measuring force applying mechanisms, with the contact as non-contact. From the detection result of the displacement of the contactor, the correlation between the set value of the measuring force applying mechanism and the measuring force applied to the contact is derived by using the physical property value of the plate-shaped elastic member supporting the arm at the swing fulcrum. .. As a result, it is possible to generate a correlation applied to low-cost and simple measurement force adjustment without the need for a measuring device or the like for actually measuring the measuring force.

FIG. 1 is an overall configuration diagram of a roundness measuring device according to an embodiment. FIG. 2 is a functional block diagram of the roundness measuring device shown in FIG. FIG. 3 is a flowchart showing the procedure of the measuring force adjusting method applied to the roundness measuring device shown in FIG. FIG. 4 is a conceptual diagram of a lever type detector. FIG. 5 is a schematic view showing a configuration example of a detector applied to the roundness measuring device shown in FIG. FIG. 6 is a schematic diagram showing the relationship between the set value of the measuring force applying mechanism and the detected value of the displacement sensor. FIG. 7 is a detailed explanatory view of the rotational moment generated by the leaf spring. FIG. 8 is an explanatory diagram of the measurement force calculation generated by the leaf spring. FIG. 9 is an explanatory diagram for calculating the measuring force acting on the contactor. FIG. 10 is a graph showing the detected value of the displacement sensor with respect to the set value of the measuring force applying mechanism. FIG. 11 is a graph showing the measuring force with respect to the set value of the measuring force applying mechanism. FIG. 12 is a schematic view of a leaf spring applied to the swing fulcrum of the arm. FIG. 13 is a schematic view of a cross spring applied to the swing fulcrum of the arm. FIG. 14 is a schematic view of a detection unit including a replaceable contactor. FIG. 15 is a schematic view of a detection unit having a different contact shape and the like. FIG. 16 is a schematic view when the mounting angle of the contactor with respect to the arm is different.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification, the same components are designated by the same reference numerals, and duplicate description will be omitted as appropriate.

[Roundness measuring device]
[Overall configuration of roundness measuring device]
FIG. 1 is an overall configuration diagram of a roundness measuring device according to an embodiment. The roundness measuring device 10 shown in the figure measures the roundness of the cylindrical work 9. A disk shape, a cylindrical shape, or the like can be applied to the work 9 of the object to be measured.

The roundness measuring device 10 includes a base 11. The base 11 is a support base that supports each part of the roundness measuring device 10. The support base is synonymous with the base. The roundness measuring device 10 includes a table 13. The table 13 is sometimes called a loading platform.

The table 13 has a disk shape and is attached to the upper surface of the base 11. The table 13 is rotatably supported by the base 11 at the position of the rotating shaft 22 that passes through the center of the table 13 and extends in the vertical direction. The inclination of the table 13 with respect to the reference plane is adjusted so as to be parallel to the reference plane in the horizontal direction.

Here, the term upward in the present specification means a vertical upward direction. The term downward refers to the vertical downward direction.

The work 9 is placed on the upper surface of the table 13. The work 9 is placed on the upper surface of the table 13 so that the shape center of the measurement target portion coincides with the rotation axis. FIG. 1 shows an example in which the outer peripheral surface of the cylindrical work 9 is the measurement target portion, and the work 9 is placed so that the central axis of the cylinder coincides with the rotation axis 22 of the table 13.

The roundness measuring device 10 includes a motor 14. The motor 14 is arranged inside the base 11. The rotating shaft of the motor 14 is connected to the rotating shaft of the table 13 via a drive transmission mechanism. The motor 14 rotates the table 13 around the rotation shaft 22 as the center of rotation. The drive transmission mechanism may include gears. The drive transmission mechanism is not shown.

The roundness measuring device 10 includes a column 15, a carriage 16, a horizontal arm 17, and a detector 18. The column 15 is the upper surface of the base 11 and is arranged on the side side of the base 11 in the horizontal direction. Column 15 is a pillar extending in the vertical direction.

The carriage 16 is supported so as to be able to move up and down using the column 15. The carriage 16 is attached so that the horizontal arm 17 can move in the horizontal direction. A detector 18 is attached to the tip of the horizontal arm 17.

The detector 18 includes a contactor 18A and a displacement sensor. Note that the displacement sensor is not shown in FIG. The displacement sensor is illustrated in FIG. 2 using reference numeral 18B. The detector 18 detects the displacement of the contactor 18A moving along the direction indicated by reference numeral A. The detector 18 outputs a detection signal indicating the displacement of the contact 18A. The detection signal is transmitted to the control device 19.

The detector 18 includes a measuring force applying mechanism. The measuring force applying mechanism applies the measuring force corresponding to the set value of the measuring force to the contact 18A. In FIG. 1, the measurement force applying mechanism is not shown. The measuring force applying mechanism is illustrated in FIG. 2 using reference numeral 56.

The roundness measuring device 10 includes a control device 19. A display device 19A and an input device 19B are connected to the control device 19. The display device 19A may apply a display device such as a liquid crystal display. The input device 19B may apply a keyboard and a mouse. A touch panel type display device may be applied to the display device 19A, and the display device 19A and the input device 19B may be used in combination.

[Explanation of control device]
FIG. 2 is a functional block diagram of the roundness measuring device shown in FIG. The control device 19 includes a detection signal acquisition unit 40 and a signal processing unit 42. The detection signal acquisition unit 40 acquires the detection signal transmitted from the detector 18. The detection signal acquisition unit 40 stores the detection result using the detection signal storage unit 44. The signal processing unit 42 generates the measurement result of the work 9 by using the detection signal of the detector 18. The signal processing unit 42 stores the measurement result using the measurement result storage unit 46.

The control device 19 includes a display control unit 48. The display control unit 48 controls the display device 19A. The signal processing unit 42 transmits an electric signal representing the measurement result to the display control unit 48. The display control unit 48 converts an electric signal representing the measurement result into a display signal applied to the display device 19A, and transmits the display signal to the display device 19A. The display device 19A displays the measurement result of the detector 18 represented by the display signal transmitted from the display control unit 48.

The control device 19 includes a measuring force applying control unit 50, a measuring force setting unit 52, and a table storage unit 54. The measuring force applying control unit 50 controls the operation of the measuring force applying mechanism 56 provided in the detector 18. The measuring force setting unit 52 sets the measuring force, which is a control parameter of the measuring force applying mechanism 56.

The table storage unit 54 stores a measuring force setting table 58 showing the correlation between the set value of the measuring force applying mechanism 56 and the measuring force applied to the contactor. The measuring force applying control unit 50 controls the operation of the measuring force applying mechanism 56 based on the set value of the measuring force setting unit 52. The table storage unit 54 shown in the embodiment corresponds to an example of the correlation storage unit. Details of the operation control of the measuring force applying mechanism 56 will be described later.

The control device 19 includes a drive control unit 60. The drive control unit 60 controls the operation of the drive mechanism 62 based on the control parameters of the drive mechanism 62. The drive mechanism 62 may include a motor 14 shown in FIG. 1, a motor that operates the carriage 16, and a motor that operates the horizontal arm 17.

The control device 19 includes an input unit 64. The input unit 64 acquires an input signal transmitted from the input device 19B. The input unit 64 transmits information corresponding to the input signal to each unit of the control device 19. For example, when the set value of the control parameter is input using the input device 19B, the input unit 64 transmits the control parameter corresponding to the acquired input signal to the corresponding control unit.

The control device 19 includes a program storage unit 66. The program storage unit 66 stores various programs applied to the roundness measuring device 10 and the control device 19. An example of a program is a measuring force adjusting program used to adjust the measuring force applied to a contactor.

[Hardware configuration of control device]
The control device 19 may apply a computer. The control device 19 executes a specified program to realize the function of the roundness measuring device 10 by using the hardware described below. Various processors can be applied to the hardware of each control unit. An example of a processor is a CPU (Central Processing Unit). The CPU executes a program and functions as various processing units.

FIG. 3 is a flowchart showing the procedure of the measuring force adjusting method applied to the roundness measuring device shown in FIG. In the measuring force setting step S10, the measuring force setting unit 52 shown in FIG. 2 sets the measuring force applied to the measurement of the work 9. The measuring force setting step S10 described in the embodiment corresponds to an example of an input step for inputting a value of the measuring force. The measurement of the work 9 described in the embodiment corresponds to an example of surface texture measurement.

The measuring force is determined according to the standard of the work 9, the measuring accuracy, and the measuring conditions such as the contactor 18A. The measuring force setting unit 52 sets the measuring force based on the measuring conditions applied to the measurement of the work 9. After the measuring force setting step S10, the process proceeds to the measuring force setting information acquisition step S12. The setting of the measuring force described in the embodiment corresponds to an example of inputting the value of the measuring force.

In the measuring force setting information acquisition step S12, the measuring force applying control unit 50 acquires the input information of the measuring force set in the measuring force setting step S10. As an example of the measuring force setting information, the set value of the measuring force applying mechanism 56 can be mentioned. Set value of the measuring force application mechanism 56 is shown in FIG. 6 with reference numeral S _V. After the measurement force setting information acquisition step S12, the process proceeds to the operation parameter reading step S14.

In the operation parameter reading step S14, the measuring force applying control unit 50 reads the operating parameters corresponding to the measuring force setting information from the measuring force setting table 58. After the operation parameter reading step S14, the process proceeds to the operation parameter setting step S16.

In the operation parameter setting step S16, the measuring force applying control unit 50 sets the operating parameters of the measuring force applying mechanism 56 read in the operation parameter reading step S14. After the operation parameter setting step S16, the process proceeds to the measurement imparting mechanism operation step S18. The operation parameter reading step S14 and the operation parameter setting step S16 described in the embodiment correspond to an example of the components of the determination process.

In the measurement force applying mechanism operation step S18, the measuring force applying control unit 50 operates the measuring force applying mechanism 56 based on the operation parameters set in the operation parameter setting step S16. After the measurement imparting mechanism operation step S18, the process proceeds to the adjustment completion confirmation step S20.

In the adjustment completion confirmation step S20, the measuring force applying control unit 50 determines whether or not the adjustment of the measuring force applying mechanism 56 is completed. The measuring force applying control unit 50 may determine whether or not the adjustment of the measuring force applying mechanism 56 is completed based on the detection result of the position sensor that detects the position of the measuring force applying mechanism 56.

In the adjustment completion confirmation step S20, when the measuring force applying control unit 50 determines that the adjustment of the measuring force applying mechanism 56 is not completed, a No determination is made. If No, the process proceeds to the measurement granting mechanism operation step S18, and the measurement granting mechanism operation step S18 and the adjustment completion confirmation step S20 are repeatedly carried out until a Yes determination is made in the adjustment completion confirmation step S20.

On the other hand, in the adjustment completion confirmation step S20, when the measuring force applying control unit 50 determines that the adjustment of the measuring force applying mechanism 56 is completed, a Yes determination is made. In the case of Yes determination, the measuring force applying control unit 50 ends the measuring force adjusting method.

The measurement imparting mechanism operation step S18 and the adjustment completion confirmation step S20 shown in the embodiment correspond to an example of the components of the adjustment step.

When the table storage unit 54 shown in FIG. 2 stores a plurality of measuring force applying mechanisms 56, a table switching step of switching the measuring force setting table 58 according to the measurement conditions of the work 9 may be performed. In such an embodiment, the table switching step may be carried out after the measurement condition acquisition step of acquiring the measurement condition of the work 9 is carried out.

The control device 19 may display the identification information of the measuring force setting table 58 applied to the measurement value adjustment on the display device 19A. That is, the measurement force setting table identification information display step for displaying the identification information of the measurement force setting table 58 applied to the measurement value adjustment may be carried out.

The control device 19 may generate a new measuring force setting table 58. That is, in the operation parameter reading step S14, when there is no measuring force setting table 58 that matches the measuring conditions such as the type of the arm and the mounting direction of the arm, the contactor 202 is in non-contact with the object to be measured 210. A table creation step of reading out the detected value of the displacement sensor 208 for each set value of the measuring force, calculating the measured force from the detected value of the displacement sensor 208, and creating a new measuring force setting table 58 can be performed.

The table creation step shown in the embodiment corresponds to an example of the correlation creation step. Each set value of the measuring force shown in the embodiment corresponds to an example for each setting of the measuring force. According to such an aspect, it is possible to carry out the measurement force adjustment for new measurement conditions.

When the control device 19 includes a plurality of measuring force setting tables 58, the control device 19 may carry out a table selection step of selecting the measuring force setting table 58 according to the measurement conditions. The table selection step shown in the embodiment corresponds to an example of the correlation selection step. According to such an aspect, the measuring force can be adjusted according to the measuring conditions.

[Description of a general lever-type detector]
FIG. 4 is a conceptual diagram of a lever type detector. The lever type detector 100 includes a contact 102, an arm 104, a measuring force applying mechanism 106, and a displacement sensor 108. The lever type detector 100 brings the contactor 102 into contact with the object to be measured 110, relatively operates the contactor 102 and the object to be measured 110, and detects the unevenness of the surface of the object to be measured 110. The contact 102 corresponds to the contact 18A shown in FIG. The object to be measured 110 corresponds to the work 9.

The arm 104 shown in FIG. 4 holds the contactor 102 at the tip. The arm 104 is swingably supported by the swing fulcrum 112. The arrow line attached to the swing fulcrum 112 indicates the swing direction of the arm 104.

The measuring force applying mechanism 106 adjusts the measuring force that presses the contactor 102 against the object to be measured 110 by applying an urging force to the arm 104. The measuring force applying mechanism 106 includes an elastic body such as a coil spring 114 that generates a measuring force. One end of the coil spring 114 is connected to the arm 104. The other end of the coil spring 114 is connected to the elevating mechanism. The arrow line attached to the measuring force applying mechanism 106 indicates the moving direction of the other end of the coil spring 114. The elevating mechanism is not shown.

The displacement sensor 108 detects the displacement of the displacement detection position 116, which is the base end position of the arm 104. The lever type detector 100 outputs an output signal representing the detection result of the displacement sensor 108. The measuring force applied to the object to be measured 110 is set and adjusted by using the measuring force applying mechanism 106, but the setting accuracy of the measuring force ensures the measurement accuracy for measuring the surface texture of the object to be measured 110. It has become an issue for.

For convenience of explanation, FIG. 4 illustrates a mode in which the tip of the contact 102 faces downward. However, the lever-type detector shown in FIG. 4 has the same contact 102 as the detector 18 shown in FIG. The tip of the contact 102 may be oriented horizontally and the tip of the contact 102 may be directed upward. The same applies to the detector 200 and the like shown in FIG.

[Structure example of a detector applied to the roundness measuring device according to this embodiment]
FIG. 5 is a schematic view showing a configuration example of a detector applied to the roundness measuring device shown in FIG. The detector 200 includes a contact 202, an arm 204, a measuring force applying mechanism 206, and a displacement sensor 208. The measuring force applying mechanism 206 includes a coil spring 214.

The contactor 202 shown in FIG. 5 corresponds to the contactor 18A shown in FIG. The object to be measured 210 corresponds to the work 9. Reference numeral 212 represents a swing fulcrum of the arm 204. Reference numeral 216 represents the displacement detection position of the arm 204.

In FIG. 5, an embodiment in which the base end of the arm 204 is set to the displacement detection position 216 is applied, but the displacement detection position 216 applies an arbitrary position of the arm 204 opposite to the contactor 202 with respect to the swing fulcrum 212. obtain.

In the detector 200, a leaf spring 220 is applied to a support member that swingably supports the arm 204. The midpoint of the leaf spring 220 is the swing fulcrum 212 of the arm 204. The arrow line attached to the arm 204 indicates the swing direction of the arm 204. The leaf spring 220 is connected to the arm 204 by using the arm connecting member 222. The arm 204 is connected to the leaf spring 220 at a position closer to the contactor 202 than the swing fulcrum 212.

The leaf spring 220 is connected to the frame 226 that supports the displacement sensor 208 by using the frame connecting member 224. The detector 200 measures the object to be measured 210 to which the specified measuring force is applied by using the correlation between the set value of the measuring force applying mechanism 206 and the measuring force.

Using the physical property value of the leaf spring 220, the measuring force is calculated from the detected value of the displacement sensor 208, and the correlation between the set value of the measuring force applying mechanism 206 and the detected value of the displacement sensor 208 is derived.

As for the correlation between the set value of the measuring force applying mechanism 206 and the measuring force, the measuring force setting table 58 shown in FIG. 2 can be applied. The measuring force applying mechanism 206 corresponds to the measuring force applying mechanism 56 shown in FIG. The calculation of the measuring force will be described in detail below.

The leaf spring 220 shown in the embodiment corresponds to an example of a component of an arm support portion that supports the arm by using a plate-shaped elastic member. Further, the leaf spring 220 shown in the embodiment corresponds to an example of a plate-shaped elastic member. Further, the measuring force applying mechanism 206 described in the embodiment corresponds to an example of the measuring force applying unit.

[Explanation of derivation of the correlation between the set value of the measuring force applying mechanism and the measuring force]
FIG. 6 is a schematic diagram showing the relationship between the set value of the measuring force applying mechanism and the detected value of the displacement sensor. According to the following procedure, performing the detection step of detecting a detection value of the displacement sensor 208 for each set value S _V measuring force applying mechanism 206. The set value S _V measuring force applying mechanism 206 in FIG. 6 illustrates schematically. First, the contact 202 is freed. That is, the contact element 202 is brought into a non-contact state with respect to the object to be measured 210 shown in FIG.

Next, to determine the set value _{S V} measuring force applying mechanism 206. The set value _SV is the moving distance with respect to the reference position of the elevating mechanism provided in the measuring force applying mechanism 206. The moving distance when raising the elevating mechanism with respect to the reference position is a positive value, and the moving distance when lowering the elevating mechanism with respect to the reference position is a negative value. The arrow line attached to the measuring force applying mechanism 206 represents the ascent of the elevating mechanism.

The reaction force of the plate spring 220 in accordance with the set value S _V is applied to the arm 204, the rotation moment which the plate spring 220 is generated, and the rotation moment measuring force application mechanism 206 generates balance, swinging the arm 204 Stand still.

The arrow line attached to the position on the tip side of the swing fulcrum 212 of the arm 204 shown in FIG. 6 represents the rotational moment generated by the leaf spring 220. The arrow line attached to the connection position 204B of the coil spring 214 in the arm 204, which is the part of the arm opposite to the contact 202 across the swing fulcrum 212 of the arm 204, indicates the rotational moment generated by the measuring force applying mechanism 206. Represent. The same applies to FIGS. 7 and 9.

The rotational moment generated by the leaf spring 220 is the moment of force acting on the connecting position 204A of the leaf spring 220 on the arm 204. The rotational moment generated by the measuring force applying mechanism 206 is the moment of force acting on the connection position 204B of the coil spring 214 on the arm 204.

The detection value D of the displacement sensor 208 in a state where the swing of the arm 204 is stationary is acquired. Using physical properties of the plate spring 220, and calculates the reaction force of the plate spring 220 corresponding to the set value S _V measuring force application mechanism 206 from the detected value D of the displacement sensor 208. It is possible to calculate the measuring force applied to the contact 202 corresponding to the force generated by the leaf spring 220 from the reaction force of the leaf spring 220.

By changing the set value S _V measuring force application mechanism 206, and calculates the measured force for the set value S _V of the plurality of measuring force applying mechanism 206. Based on the calculation result and the set value S _V measuring force applying mechanism 206 derives a correlation between the measuring force. The calculation of the measuring force described in the embodiment corresponds to an example of the calculation process. The procedure for generating the correlation described in the embodiment corresponds to an example of the method for generating the correlation. The calculation of the measuring force will be described in detail below.

Contacts 202 and the arm 204 illustrated with reference to the solid line in FIG. 6, the set value S _V measuring force applying mechanism 206 represents the case of any value except zero. Contacts 202 and the arm 204 illustrated with dashed line in the figure, the set value S _V measuring force applying mechanism 206 represents the case of zero. Set value S _V measuring force application mechanism 206 is a reference value detected value D of the displacement sensor 208 in the case of zero. In the following description, the reference value is set to zero. The displacement of the displacement detection position 216 of the arm 204 is applied to the detection value D of the displacement sensor 208.

Displacement of the displacement detection position 216 of the arm 204, the set value S _V measuring force application mechanism 206 is distance is applied with respect to the position of the displacement detection position 216 of the arm 204 in the case of zero. For the displacement of the displacement detection position 216 of the arm 204, a unit representing a distance such as millimeters is used.

Code _{P A} represents the reaction force of the plate spring 220. Reaction force _{P A} acts on the coupling position 204A of the plate spring 220 in the arm 204. The symbol F _mf represents a force generated by the coil spring 214. _{The force F mf} generated by the coil spring 214 forms an angle φ with respect to the arm 204.

Reference numeral L indicates the length of the leaf spring 220 along the longitudinal direction of the arm 204. The length L of the leaf spring 220 is the length of the portion of the leaf spring 220 that can be elastically deformed, and the length of the leaf spring 220 in the non-deformed state is applied. The length L of the leaf spring 220 is a fixed value.

[Calculation of rotational moment generated by leaf spring]
FIG. 7 is a detailed explanatory view of the rotational moment generated by the leaf spring. The symbol L _arm is the distance from the swing fulcrum 212 of the arm 204 to the displacement detection position 216. Reference numeral θ is the angle of the arm 204 when the _{set value S V} of the measuring force applying mechanism 206 is an arbitrary value with respect to the arm 204 when _{the set value S V} of the measuring force applying mechanism 206 is zero.

Rotation moment reaction force of the plate spring 220 is generated, using the reaction force _{P A} of length L and the plate spring 220 of the leaf spring 220 is expressed as _{(L / 2) × P A} . For convenience of calculation, the swing fulcrum 212 of the arm was set as the midpoint of the leaf spring 220. The midpoint of the leaf spring 220 is the midpoint of the elastically deformable portion of the leaf spring 220.

[Calculation of measuring force generated by leaf spring]
FIG. 8 is an explanatory diagram of the measurement force calculation generated by the leaf spring. The displacement δ (x) at the position where the distance from the base end 220A of the leaf spring 220 is x is δ (x) = (P × L × x ² ) / [(6 × B) × {3- (x / L). )}].

Here, the force P of the leaf spring 220 is generated is the same reaction force P _A and size of the plate spring 220 shown in FIG. 7, facing the opposite direction to the reaction force P _A of the leaf spring 220. B is bending stiffness and is ^{expressed as B = (b × t 3} × E) / {12 × (1-ν ² )}.

b is the width of the leaf spring 220. The width of the leaf spring 220 is the total length of the leaf spring 220 in the width direction orthogonal to the direction of the length L of the leaf spring 220. t is the thickness of the leaf spring 220. E is the Young's modulus of the leaf spring 220. ν is the Poisson's ratio of the leaf spring 220.

The arm angle θ (x) of the detector 200 at the position where the distance from the base end 220A of the leaf spring 220 is x is expressed as θ (x) = {δ (x + dx) −δ (x)} / dx. That is, the arm angle θ (x) of the detector 200 is dδ (x) / dx obtained by differentiating δ (x) with respect to x. The arm angle θ (x) of the detector 200 is expressed as θ (L) = (P × L ² ) / (2 × B) with the length L of the leaf spring 220 as a parameter.

Here, the arm angle θ (x) of the detector 200 shown in FIG. 8 is the angle θ shown in FIG. 7. In FIG. 8, the arm 204 is schematically shown using the alternate long and short dash line. _{On the other hand, using the distance L arm} from the swing fulcrum 212 of the arm 204 to the displacement sensor 208 and the detection value D of the detector 200, the tangent of θ is expressed as _{tan (θ) = D / L arm.}

Applying the minute angle approximation, and setting tan (θ) = θ, the above formula is solved for P, and P (D) = (2 × B × D) / (L ² × _Arm ) is obtained. The force P generated by the leaf spring 220 is expressed as a function having the detection value D of the detector 200 as a parameter.

In the above P (D), the bending stiffness B of the leaf spring 220 and the length L of the leaf spring 220 are defined as the physical property values of the leaf spring 220. The distance _{L arm} from rocking fulcrum 212 of the arm 204 until the displacement sensor 208 is defined on the basis of the mechanical specifications of the arm 204.

[Calculation of measuring force acting on contacts]
FIG. 9 is an explanatory diagram for calculating the measuring force acting on the contactor. The distance from the fulcrum 212 in the arm 204 to the position of the contactor 202 and _{L tip,} the measuring force acting on the contactor 202 and _{F meas.}

The rotational moment generated by the measuring force applying mechanism 206 is expressed as (L / 2) × P = B × D / (L × _Arm ). Rotation moment measuring force application mechanism 206 is _generated, balances the _{F meas} × _{L tip.} That, _{F meas} acting on the contactor 202 _is represented as _{F meas (D) = B ×} D / (L × L arm).

[Explanation of measuring force setting table]
FIG. 10 is a graph showing the detected value of the displacement sensor with respect to the set value of the measuring force applying mechanism. The horizontal axis of the graph shown in the figure is a set value S _V measuring force applying mechanism 206, the vertical axis represents the detected value D of the displacement sensor 208.

Set value S _V measuring force application mechanism 206 may apply the operating parameters of the moving mechanism for moving the coil spring 214 shown in FIG. 5 or the like. When the moving mechanism includes a controlled motor such as a pulse motor, the control parameter may apply the number of pulses corresponding to the moving distance of the coil spring 214.

By changing the set value S _V measuring force applying mechanism 206, measures the detected value D of the displacement sensor 208 for a plurality of set values S _V. The plot representing the measured value is subjected to processing such as linear interpolation and data extrapolation to generate the graph shown in FIG.

FIG. 11 is a graph showing the measuring force with respect to the set value of the measuring force applying mechanism. The horizontal axis of the graph shown in FIG. 11, similarly to the graph shown in FIG. 10, a set value S _V measuring force applying mechanism 206. The vertical axis of the graph shown in FIG. 11 is the measuring force F _meas acting on the contactor 202. The unit of measuring force F _{meas is millinewton.}

The graph shown in FIG. 11 can be derived by applying the detection value D of the displacement sensor 208 shown in FIG. 10 for _Fmes (D) = B × D / (L × _Arm × L _tip). The graph shown in FIG. 11 is an example of the measuring force setting table 58 shown in FIG. The measuring force applying control unit 50 shown in FIG. 2 refers to the measuring force setting table 58 and uses the measuring force setting unit 52 as an operating parameter of the measuring force applying mechanism 206 corresponding to _{the measuring force F meas.} It reads the setting values _{S V} measuring force applying mechanism 206, on the basis of the set value _{S V} measuring force applying mechanism 206, to operate the measurement applying mechanism 206.

[Desirable embodiment of creating a measuring force setting table]
<Extrapolation>
When detecting the detection value D of the displacement sensor 208 with respect to the set value S _V measuring force applying mechanism 206, the set value S _V measuring force applying mechanism 206 of the detection value D of the displacement sensor 208 is out of detection range is present obtain. In such a case, by extrapolating a plot in the graph shown in FIG. 10 can interpolate the set value S _V measuring force applying mechanism 206 corresponding to the detection value D of the displacement sensor 208 to be outside the detection range. For extrapolation of plots, known approximation methods such as polynomial approximation may be applied.

<Linearity>
Measuring force _{F meas} for setting values _{S V} measuring force application mechanism 206 has a linear characteristic. This makes it possible to improve the accuracy of extrapolation of the plot. The alignment here is not limited to a strict alignment. Substantial linearity, which is non-linear but has the same effect as linearity, may be applied.

<Update of measuring force setting table>
The measuring force setting table 58 can be generated and stored in the initial state of the roundness measuring device 10. The measuring force setting table 58 can be updated according to the state of the detector 200 and the object to be measured 110. The update referred to here may include both a mode of rewriting an existing table and a mode of leaving an existing table and adding a new table.

When the measuring force setting table 58 is updated, it is preferable to store the updated information. That is, the roundness measuring device 10 may include an update information storage unit that stores the update information of the measuring force setting table 58. The update information may include information such as the update date and time.

[Explanation of plate-shaped elastic member]
FIG. 12 is a schematic view of a leaf spring applied to the swing fulcrum of the arm. The veneer-shaped leaf spring 300 shown in FIG. 12 is composed of a veneer having a flat plate shape. As the leaf spring 220 shown in FIG. 5 and the like, the veneer leaf spring 300 shown in FIG. 12 is applied.

One side of the veneer-shaped leaf spring 300 is supported by the swing-side connecting member 302, and the other side is supported by the fixed-side swing member 304. The swing side connecting member 302 corresponds to the arm connecting member 222 shown in FIG. 5 and the like. The rocking side connecting member 302 is connected to the contactor 202 and the core shown in FIG. 5 and the like. The fixed side swing member 304 corresponds to the frame connecting member 224. The fixed side swing member 304 is connected to the main body side of the detector 200.

FIG. 13 is a schematic view of a cross spring applied to the swing fulcrum of the arm. The cross spring 320 shown in FIG. 13 has improved characteristics as a rotary bearing as compared with the veneer leaf spring 300 shown in FIG.

The cross spring 320 shown in FIG. 13 is supported by the swing side connecting member 322 and the fixed side swing member 324. The function of the swing-side connecting member 322 is the same as that of the swing-side connecting member 302 shown in FIG. The function of the fixed-side swing member 324 is the same as that of the fixed-side swing member 304. The cross spring 320 shown in FIG. 13 corresponds to an example of a plate-shaped elastic member.

[Action effect]
[Zero point calibration of displacement sensor detection value]
In operation of reading a detection value D of the measuring force applying mechanism 206 of the set value S while changing the _V displacement sensor 208 detects the set value S _V measuring force applying mechanism 206 of the detection value D of the displacement sensor 208 is zero. Accordingly, the measuring force _{F meas} can detect the set value _{S V} measuring force imparting mechanism 206 serving as a neutral.

FIG. 14 is a schematic view of a detection unit including a replaceable contactor. FIG. 15 is a schematic view of a detection unit having a different contact shape and the like. FIG. 16 is a schematic view when the mounting angle of the contactor with respect to the arm is different.

As shown in FIG. 14, in the detector 200A in which the contactor 202A is replaced according to the purpose of measurement or the like, the zero point of the detection value D of the displacement sensor 208 changes according to the shape or the like of the contactor 202. When the measuring force adjustment shown in the present embodiment is not performed, it is necessary to directly measure the _{measuring force F meas with respect to the state of the contactor 202A by using a measuring device such as a scale.}

In the detector 200A shown in FIG. 14, the contactor 202A can be replaced with respect to the detector 200 shown in FIG. 5 and the like, and the rotational moment with respect to the contactor 202 changes according to the mass of the contactor 202A. ..

The detector 200B shown in FIG. 15 includes a detector 200B having a different shape and mass from the contactor 202 provided in the detector 200 shown in FIG. 5 and the like, depending on the mass and shape of the contactor 202B. , A change in rotational moment with respect to the contact 202 occurs.

The detector 200C shown in FIG. 16 has a different mounting angle of the contactor 202C with respect to the contactor 202 provided in the detector 200 shown in FIG. A change in rotational moment with respect to 202 occurs.

Detector 200A shown in FIG. 14, the detector 200C shown in detector 200B and 16 shown in FIG. 15 uses the measuring force setting table 58 shown in FIG. 2, the displacement of the setting value _{S V} measuring force applying mechanism 206 The zero point of the detection value D of the sensor 208 can be calibrated.

[No need for measuring devices such as scales to directly measure measuring force]
It is possible to adjust and calibrate the measuring force more easily at lower cost. In addition, on-site work at the installation location of the roundness measuring device 10 is possible, and accurate measurement force calibration is possible in the actual operating environment of the roundness measuring device 10. In addition, the calibration value of the measuring force in the latest state can always be used. As a result, the reproducibility of the measurement result of the roundness measuring device 10 is improved, and high accuracy of the measurement can be realized.

[Elimination of the effects of individual differences in detectors and contacts]
If individual difference detector 200 and the contactor 202 is present, it is necessary to manage the correlation between the set values S _V measuring force applying mechanism 206 and the measuring force F _meas for each individual roundness measuring apparatus 10 .. In addition, it takes time and effort to manage individuals, and there is a concern that setting mistakes may occur.

On the other hand, the roundness measuring device 10 shown in the present embodiment does not require the trouble of individual management such as serial number input, suppresses the occurrence of setting mistakes, and reduces the processing period of individual management. obtain.

[Application example]
In the present embodiment, as an example of the surface texture measuring device for measuring the surface shape of the work 9, the roundness measuring device 10 for measuring the roundness, straightness, parallelism, squareness, etc. of the work 9 is taken as an example. However, the present invention is not limited to this, and various surface texture measuring devices such as a surface roughness measuring device and a contour shape measuring device may be used.

In the embodiment of the present invention described above, the constituent requirements can be appropriately changed, added, or deleted without departing from the spirit of the present invention. The present invention is not limited to the embodiments described above, and many modifications can be made by a person having ordinary knowledge in the art within the technical idea of the present invention.

10 ... Roundness measuring device, 19 ... Control device, 19A ... Display device, 48 ... Display control unit, 50 ... Measuring force applying control unit, 54 ... Table storage unit, 56, 206 ... Measuring force applying mechanism, 58 ... Measurement Force setting table, 66 ... Program storage, 200, 200A, 200B, 200C ... Detector, 202, 202A, 202B, 202C ... Contact, 204 ... Arm, 208 ... Displacement sensor, 212 ... Swing fulcrum, 220 ... Plate Spring 222 ... Arm connecting member, 224 ... Frame connecting member, 300 ... Single plate-shaped leaf spring, 302, 322 ... Swinging side connecting member, 304, 324 ... Fixed side swinging member, 320 ... Cross spring

Claims (5)

An arm provided with a contact is swingably supported at a swing fulcrum by using a plate-shaped elastic member, and a measuring force is applied to a portion of the arm on the opposite side of the swing fulcrum from the contact. It is a correlation generation method in surface property measurement in which a measuring force is applied to the contact via the arm by applying an urging force using a portion to detect the displacement of the contact.
A detection step of detecting the displacement of the contactor via the arm while changing the set value of the measuring force applying unit corresponding to the urging force in a state where the contactor is not in contact with the work.
A calculation step of calculating the measuring force applied to the contact when the displacement is detected based on the detected value of the displacement and the physical property value of the plate-shaped elastic member.
Based on the calculation result of the calculation step, a creation step of creating a correlation between the set value of the measuring force applying unit and the measuring force, and
Correlation generation method including. The correlation is such that the measuring force is _Fmeas , the bending stiffness of the plate-shaped elastic member is B, the detection value of the displacement detection position on the arm is D, the length of the plate-shaped elastic member is L, and the swing fulcrum. distance L _arm to said displacement detecting _position, the distance from the rocking fulcrum to the contactor as L _tip from
_Fmeas = B x D / (L x _Arm x L _tip )
The correlation generation method according to claim 1, wherein the measuring force derived using the above-mentioned measuring force is applied. A measuring force adjusting method for adjusting the measuring force using the correlation generated by the correlation generating method according to claim 1.
An input process for inputting the value of the measuring force and
With reference to the correlation, a determination step of determining a set value of the measuring force applying unit corresponding to the value of the measuring force, and a determination step.
An adjustment step of operating the measuring force applying unit based on the set value of the measuring force applying unit determined in the determining step to adjust the measuring force applied to the contactor.
Measuring force adjustment method including. The measuring force adjusting method according to claim 3, further comprising a correlation selection step of selecting the correlation according to the measurement conditions from the plurality of the correlations. With the contactor
The arm to which the contact is attached and
At the swing fulcrum of the arm, an arm support portion that swingably supports the arm using a plate-shaped elastic member, and an arm support portion.
A measuring force applying portion that applies a measuring force to the contact via the arm by applying an urging force to a portion of the arm opposite to the contact with the swing fulcrum in between.
A detection unit that detects the displacement of the contact via the arm, and
A correlation storage unit that stores the correlation between the set value of the measuring force applying unit and the measuring force, and a correlation storage unit.
With
In the correlation, the displacement of the contactor is detected while changing the set value of the measuring force applying unit corresponding to the urging force in a state where the contactor is not in contact with the work, and the displacement is different from the detected value of the displacement. Based on the physical property values of the plate-shaped elastic member, the measuring force applied to the contact when the displacement is detected is calculated, and the set value of the measuring force applying unit and the measurement created based on the calculation result. A surface property measuring device to which a correlation with force is applied.

Images