CN114427820B - Deflection measuring method and device for rotating shaft mechanism - Google Patents

Deflection measuring method and device for rotating shaft mechanism Download PDF

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Publication number
CN114427820B
CN114427820B CN202210104707.1A CN202210104707A CN114427820B CN 114427820 B CN114427820 B CN 114427820B CN 202210104707 A CN202210104707 A CN 202210104707A CN 114427820 B CN114427820 B CN 114427820B
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value
measurement
deflection
measuring
rotating shaft
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CN114427820A (en
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刘颖
关宏武
王浩楠
赵东雷
林继柱
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Beijing Semiconductor Equipment Institute
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Beijing Semiconductor Equipment Institute
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/24Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/70Wind energy
    • Y02E10/72Wind turbines with rotation axis in wind direction

Abstract

The application provides a deflection measuring method and a deflection measuring device of a rotating shaft mechanism, wherein a deflection measuring system comprises a measuring mechanism and a dial indicator, a plurality of measuring positions are arranged on the measuring mechanism along a preset direction, in each measuring process, a measuring probe of the dial indicator is arranged to be contacted with a corresponding measuring position, and the following processing is executed for each measuring process: controlling the rotating shaft mechanism to rotate for a preset number of turns; determining the maximum measured value detected by the dial indicator in the rotating process of the rotating shaft mechanism; obtaining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator; and determining a target deflection value interval of the rotating shaft mechanism according to deflection test values obtained in all measurement processes. According to the deflection measuring system, deflection measurement of the rotating shaft mechanism is converted into deflection measurement of the measuring mechanism, so that amplification test of tiny numerical values is realized, and deflection measuring precision is improved.

Description

Deflection measuring method and device for rotating shaft mechanism
Technical Field
The application relates to the technical field of deflection measuring machinery, in particular to a deflection measuring method and device of a rotating shaft mechanism.
Background
In the application fields of high-end precision manufacturing industry and the like, a plurality of high-precision rotating shaft mechanisms are often used, and the rotating shaft mechanisms have great differences in performance and main parameters, so that the precision of equipment is greatly influenced, and particularly the deflection of the rotating shaft mechanisms is greatly influenced. The rotating shaft mechanism mainly comprises a rotating shaft, a bearing for supporting the shaft and the like, and the rotating shaft rotates through sliding relative to the bearing, so that a gap is formed in the rotating shaft mechanism, the rotating shaft can generate a shaking phenomenon, namely, an angle deviation is generated, and the angle deviation is deflection.
Some mechanisms adopt a capacitive sensor and a standard ball mode to measure deflection, the measurement method has high requirements on the roundness of the standard ball, and if the roundness error of the standard ball is larger than the measured error, accurate measurement cannot be performed.
Disclosure of Invention
Therefore, the application aims to provide at least a deflection measuring method and a deflection measuring device of a rotating shaft mechanism, and the deflection measuring system is used for converting deflection measurement of the rotating shaft mechanism into deflection measurement of a measuring mechanism, so that amplification test of tiny values is realized, and deflection measuring precision is improved.
The application mainly comprises the following aspects:
in a first aspect, an embodiment of the present application provides a yaw measurement method of a rotating shaft mechanism, where the yaw measurement method is applied to a yaw measurement system, the yaw measurement system includes a measurement mechanism and a dial indicator, where the measurement mechanism is fixedly connected with the rotating shaft mechanism, an axis of the measurement mechanism coincides with an axis of the rotating shaft mechanism, and the dial indicator is disposed around the measurement mechanism and a measurement probe of the dial indicator is disposed in contact with the measurement mechanism along with rotation of the rotating shaft mechanism to drive the measurement mechanism to rotate together; wherein a plurality of measurement positions are provided on the measurement mechanism in a predetermined direction, and in each measurement process, the measurement probe of the dial gauge is arranged to be in contact with a corresponding one of the measurement positions, and the following processing is performed for each measurement process: controlling the rotating shaft mechanism to rotate for a preset number of turns; determining the maximum measured value detected by the dial indicator in the rotating process of the rotating shaft mechanism; obtaining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator; and determining a target deflection value interval of the rotating shaft mechanism according to deflection test values obtained in all measurement processes.
In one possible embodiment, the spindle means is fixed on a fixed base, the fixed base is fixed on a table, or the spindle means is arranged on the table through a fixed bracket, a first side of the fixed bracket is fixedly connected with the table, the spindle means is fixed on a second side of the fixed bracket, the second side is a side opposite to the first side, the dial gauge is adsorbed on the table through a magnetic attraction base, the dial gauge is adsorbed on the table through the magnetic attraction base, and the predetermined direction is a direction perpendicular to a rotation plane of the spindle means.
In one possible embodiment, the deflection test value of the spindle mechanism corresponding to each measurement procedure is obtained by: determining a first distance value from the current measurement position to the top end of the measurement mechanism according to the current measurement position contacted by the measurement probe of the dial indicator; determining a second distance value according to the maximum measured value detected by the dial indicator in the current measurement process and the radius value of the measurement mechanism; determining a first measurement angle value and a third distance value according to the first distance value and the second distance value; determining a second measurement angle value according to the radius value and the third distance value of the measurement mechanism; and determining a deflection test value of the rotating shaft mechanism corresponding to the current measuring process according to the first measuring angle value and the second measuring angle value.
In one possible embodiment, the step of determining the first measured angle value and the third distance value from the first distance value and the second distance value comprises: according to the first distance value and the second distance value, calculating a third distance value by using the Pythagorean theorem, wherein a first side corresponding to the first distance value and a second side corresponding to the second distance value are mutually perpendicular, and the first side, the second side and a third side corresponding to the third distance value form a right triangle; calculating a first ratio of the second distance value to the first distance value; and performing arctangent function operation on the first ratio to obtain a first measurement angle value.
In one possible embodiment, the step of determining the second measurement angle value from the radius value and the third distance value of the measurement mechanism comprises: calculating a second ratio of the radius value to the third distance value; and performing inverse cosine function operation on the second ratio to obtain a second measurement angle value.
In one possible implementation manner, the step of determining the yaw test value of the rotating shaft mechanism corresponding to the current measurement process according to the first measurement angle value and the second measurement angle value includes: determining a calculated angle value according to a first difference between the right angle and the second measured angle value; and determining a second difference value between the first measured angle value and the calculated angle value as a deflection test value of the rotating shaft mechanism corresponding to the current measuring process.
In one possible embodiment, the step of determining the target yaw value interval of the spindle mechanism according to the yaw test values obtained in all measurement processes includes: aiming at each measurement process, calculating a residual square value corresponding to the measurement process according to the deflection test value obtained in the measurement process; calculating a deflection standard deviation value of the rotating shaft mechanism according to residual square values obtained in all measurement processes; and determining a target deflection value interval corresponding to the rotating shaft mechanism according to the deflection standard deflection value.
In one possible embodiment, the step of calculating the yaw standard deviation value of the spindle mechanism according to the residual square values obtained in all measurement processes includes: calculating the sum of residual square values obtained in all measurement processes; calculating a third ratio of the sum to a target number of measurements, the target number being one minus the number of measurements performed for all measurement processes; and determining the first square value of the third ratio as a deflection standard deflection value of the rotating shaft mechanism.
In one possible embodiment, the step of determining the target yaw value interval corresponding to the spindle mechanism according to the yaw standard deviation value includes: calculating a second evolution value of the number of measurements performed for all measurement processes; determining the ratio of the deflection standard deflection value of the rotating shaft mechanism to the second square value as a deflection reference value; and determining the product of the deflection reference value and the first preset value as the lower limit value of the target deflection value interval, and determining the product of the deflection reference value and the second preset value as the upper limit value of the target deflection value interval to form the target deflection value interval.
In a second aspect, an embodiment of the present application further provides a yaw measurement device of a rotating shaft mechanism, where the yaw measurement device is applied to a yaw measurement system, the yaw measurement system includes a measurement mechanism and a dial indicator, where the measurement mechanism is fixed on the rotating shaft mechanism, an axis of the measurement mechanism coincides with an axis of the rotating shaft mechanism, and the dial indicator is disposed around the measurement mechanism and a measurement probe of the dial indicator is disposed in contact with the measurement mechanism along with rotation of the rotating shaft mechanism to drive the measurement mechanism to rotate together; wherein a plurality of measurement positions are provided on the measurement mechanism in a predetermined direction, and in each measurement process, the measurement probe of the dial gauge is arranged to be in contact with a corresponding one of the measurement positions, and the yaw measurement device performs the following processing for each measurement process: the control module controls the rotating shaft mechanism to rotate for a preset number of turns; the measuring module is used for determining the maximum measured value detected by the dial indicator in the rotating process of the rotating shaft mechanism; the calculation module is used for obtaining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator; and the result output module is used for determining a target deflection value interval of the rotating shaft mechanism according to deflection test values obtained in all measurement processes.
The embodiment of the application provides a deflection measuring method of a rotating shaft mechanism, which is applied to a deflection measuring system, wherein the deflection measuring system comprises a measuring mechanism and a dial indicator, the measuring mechanism is fixed on the rotating shaft mechanism, the axle center of the measuring mechanism is coincident with the axle center of the rotating shaft mechanism, the measuring mechanism is driven to rotate together with the rotation of the rotating shaft mechanism, the dial indicator is arranged around the measuring mechanism, and a measuring probe of the dial indicator is arranged in contact with the measuring mechanism; wherein a plurality of measurement positions are provided on the measurement mechanism in a predetermined direction, and in each measurement process, the measurement probe of the dial gauge is arranged to be in contact with a corresponding one of the measurement positions, and the following processing is performed for each measurement process: controlling the rotating shaft mechanism to rotate for a preset number of turns; determining the maximum measured value detected by the dial indicator in the rotating process of the rotating shaft mechanism; obtaining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator; and determining a target deflection value interval of the rotating shaft mechanism according to deflection test values obtained in all measurement processes. And through the deflection measuring system, deflection measurement of the rotating shaft mechanism is converted into deflection measurement of the measuring mechanism, so that amplification test of tiny numerical values is realized, and deflection measuring precision is improved.
In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 illustrates a front view of a yaw measurement system provided by an embodiment of the present application;
FIG. 2 illustrates a top view of a yaw measurement system provided by an embodiment of the present application;
FIG. 3 illustrates a front view of another deflection measurement system provided by an embodiment of the present application;
FIG. 4 illustrates a left side view of another deflection measurement system provided by an embodiment of the present application;
FIG. 5 is a flowchart showing a yaw measurement method of a spindle mechanism according to an embodiment of the present application;
fig. 6 shows a second flow chart of a yaw measurement method of a rotating shaft mechanism according to an embodiment of the present application;
FIG. 7 is a schematic diagram showing a yaw of a spindle mechanism according to an embodiment of the present application;
fig. 8 is a schematic structural diagram of a yaw measurement device of a spindle mechanism according to an embodiment of the present application.
Fig. 9 shows a schematic structural diagram of an electronic device according to an embodiment of the present application.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application, and it should be understood that the drawings in the present application are for the purpose of illustration and description only and are not intended to limit the scope of the present application. In addition, it should be understood that the schematic drawings are not drawn to scale. A flowchart, as used in this disclosure, illustrates operations implemented according to some embodiments of the present application. It should be appreciated that the operations of the flow diagrams may be implemented out of order and that steps without logical context may be performed in reverse order or concurrently. Moreover, one or more other operations may be added to or removed from the flow diagrams by those skilled in the art under the direction of the present disclosure.
In addition, the described embodiments are only some, but not all, embodiments of the application. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by a person skilled in the art based on embodiments of the application without making any inventive effort, fall within the scope of the application.
In the prior art, deflection measurement is often carried out in two ways, namely, deflection measurement is carried out by high-precision detection equipment such as an interferometer, a deflection detector and the like in the first method, the method has high cost, long period and complex operation, and deflection measurement is carried out by adopting a mode of combining a capacitance sensor with a standard ball in the second method, the roundness requirement of the standard ball is very high, and if the roundness error of the standard ball is larger than the measured error, accurate measurement cannot be carried out.
Based on this, the embodiment of the application provides a deflection measuring method and a deflection measuring device of a rotating shaft mechanism, which converts deflection measurement of the rotating shaft mechanism into deflection measurement of a measuring mechanism through a deflection measuring system, realizes amplification test of tiny values, improves deflection measuring precision, and comprises the following specific steps:
referring to fig. 1, fig. 1 is a front view of a deflection measuring system according to an embodiment of the present application, referring to fig. 2, fig. 2 is a top view of a deflection measuring system according to an embodiment of the present application, and as shown in fig. 1 and fig. 2, the deflection measuring system according to an embodiment of the present application includes a measuring mechanism 1 and a dial indicator 2.
In an embodiment, the measuring mechanism is fixedly connected with the rotating shaft mechanism, specifically, as shown in fig. 1 and 2, the measuring mechanism 1 is fixed on the rotating shaft mechanism 3, the axis of the measuring mechanism 1 coincides with the axis of the rotating shaft mechanism 3, the measuring mechanism 1 is driven to rotate together with the rotation of the rotating shaft mechanism 3, the dial indicator 2 is arranged around the measuring mechanism 1, and the measuring probe of the dial indicator 2 is arranged in contact with the measuring mechanism 1.
In a preferred embodiment, the spindle mechanism 3 is fixed on the fixing base 4, the fixing base 4 is fixed on the workbench 5, the dial indicator 2 is adsorbed on the workbench through a magnetic attraction base, specifically, the bottom of the spindle mechanism 3 may be fixed on the fixing base 4 through a bolt, the fixing base 4 may be a magnetic attraction base, so that the fixing base 4 can be adsorbed on the workbench 5, and the fixing base 4 may also be directly fixed on the workbench 5 through a bolt, where the mode of fixing the fixing base 4 on the workbench 5 is not particularly limited.
Referring to fig. 3, fig. 3 is a front view of another deflection measuring system according to an embodiment of the present application, referring to fig. 4, fig. 4 is a left side view of another deflection measuring system according to an embodiment of the present application, as shown in fig. 3 and fig. 4, a rotating shaft mechanism 3 is disposed on a workbench 5 through a fixing bracket, a first side of the fixing bracket is fixedly connected with the workbench 5, the rotating shaft mechanism 3 is fixed on a second side of the fixing bracket, the second side is a side opposite to the first side, and a dial indicator 2 is adsorbed on the workbench through a magnetic attraction seat.
In another specific embodiment, the fixing support comprises two supporting rods 6 and two fixing seats 4, wherein one fixing seat 4 is used as a first side of the fixing support and fixedly connected with the workbench 5 and one ends of the two supporting rods 6, the other fixing seat 4 is used as a second side of the fixing support and fixedly connected with the other ends of the two supporting rods 6, the rotating shaft mechanism 3 is fixed on the other fixing seat 4, the measuring mechanism 1 is fixedly connected with the rotating shaft mechanism 3, likewise, the axle center of the measuring mechanism 1 coincides with the axle center of the rotating shaft mechanism 3, the measuring mechanism 1 is driven to rotate together along with the rotation of the rotating shaft mechanism 3, the dial indicator 2 is arranged around the measuring mechanism 1, and the measuring probes of the dial indicator 2 are in contact with the measuring mechanism 1, wherein the heights of the two supporting rods 6 can be adjusted, and the parallelism of the fixing seats 4 positioned on the second side of the fixing support can be adjusted through adjusting the heights of the supporting rods 6, so that the measuring probes are in a reasonable range.
The measuring mechanism 1 is provided with a plurality of measuring positions along a preset direction, and in each measuring process, the measuring probe of the dial indicator 2 is arranged to be contacted with a corresponding measuring position, and particularly, the preset direction is a direction perpendicular to the rotation plane of the rotating shaft mechanism 3, so that the rotating shaft mechanism 3 and the measuring mechanism 1 are not affected by the installation mode, and the rotating shaft mechanism and the operation are simple and convenient for later maintenance.
Referring to fig. 5, fig. 5 shows a flow chart of a yaw measurement method of a rotating shaft mechanism according to an embodiment of the present application, as shown in fig. 5, for each measurement process, the following processes are performed:
s100, controlling the rotating shaft mechanism to rotate for a preset number of turns.
In a preferred embodiment, the spindle mechanism may be connected to a spindle mechanism control device on which a user may set the number of rotations of the spindle mechanism to control the spindle mechanism to rotate. In each measuring process, the number of turns of the control rotating shaft mechanism can be the same or different.
S200, determining the maximum measured value detected by the dial indicator in the rotating process of the rotating shaft mechanism.
In a preferred embodiment, if the preset number of turns is 30, at this time, the change of the reading of the dial indicator needs to be observed during the rotation of the spindle mechanism for 30 turns, and the maximum measured value of the dial indicator during the rotation for 30 turns is recorded, where, during each measurement, the dial indicator is usually provided with an initial reading when the measuring probe of the dial indicator is arranged to be in contact with a corresponding measuring position, and therefore, the measured value of the dial indicator is actually the difference between the real-time reading and the initial reading of the dial indicator, and the maximum measured value is actually the maximum difference between the real-time reading and the initial reading of the dial indicator.
And S300, obtaining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator.
In a preferred embodiment, the rotation shaft mechanism generates a shake phenomenon during rotation, and at this time, the axis of the rotation shaft mechanism generates an angular deviation with respect to the initial position, and the angular deviation is a yaw, referring to fig. 6, fig. 6 shows a second flow chart of a yaw measurement method of the rotation shaft mechanism according to the embodiment of the present application, and as shown in fig. 6, a yaw test value of the rotation shaft mechanism corresponding to each measurement process may be obtained by the following method:
s301, determining a first distance value from the current measurement position to the top end of the measurement mechanism according to the current measurement position contacted by the measurement probe of the dial indicator.
In a preferred embodiment, referring to fig. 7, fig. 7 shows a schematic diagram of a structure of a yaw generated by a rotating mechanism of a spindle mechanism according to an embodiment of the present application, and as shown in fig. 7, when a measuring probe of a dial indicator contacts a current measuring position a, at this time, an axis of the measuring mechanism is shifted from a position L to a position L, at this time, a yaw test value θ is generated, and specifically, the first distance value a may be directly obtained through the current measuring position a on the dial indicator 1.
Returning to fig. 6, S302, a second distance value is determined according to the maximum measured value detected by the dial indicator and the radius value of the measuring mechanism in the current measuring process.
In a preferred embodiment, as shown in fig. 7, the second distance value b is equal to the sum of the maximum measured value detected by the dial gauge and the radius value of the measuring means, wherein the radius value of the measuring means is known.
Returning to fig. 6, S303, determining a first measurement angle value and a third distance value according to the first distance value and the second distance value.
In a preferred embodiment, as shown in fig. 7, the step of determining the first measured angle value α and the third distance value c from the first distance value a and the second distance value b includes:
according to a first distance value a and a second distance value b, calculating a third distance value c by using the Pythagorean theorem, wherein a first edge corresponding to the first distance value a and a second edge corresponding to the second distance value b are mutually perpendicular, the first edge, the second edge and a third edge corresponding to the third distance value c form a right triangle, a first ratio of the second distance value b to the first distance value a is calculated, and an arctangent function operation is performed on the first ratio to obtain a first measurement angle value alpha.
In a specific embodiment, the third distance value c may be obtained by the following formula:
in the formula (1), a represents a first distance value, b represents a second distance value, and c represents a third distance value.
In another specific embodiment, the first measured angle value α may be obtained by the following formula:
α=arctan b/a (2)
in the formula (2), α represents a first measured angle value, b represents a second distance value, and a represents a first distance value.
Returning to fig. 6, S304, a second measurement angle value is determined according to the radius value and the third distance value of the measurement mechanism.
In a preferred embodiment, as shown in fig. 7, the step of determining the second measurement angle value β according to the radius value of the measurement mechanism and the third distance value c includes:
and calculating a second ratio of the radius value to the third distance value c, and performing inverse cosine function operation on the second ratio to obtain a second measurement angle value beta.
In a specific embodiment, the second measurement angle value β may be obtained by the following formula:
β=arccos d/c (3)
in the formula (3), β represents a second measurement angle value, d represents a radius value of the measurement mechanism, and c represents a third distance value.
Returning to fig. 6, S305, determining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the first measurement angle value and the second measurement angle value.
In a preferred embodiment, as shown in fig. 7, the step of determining the yaw test value θ of the spindle mechanism corresponding to the current measurement process according to the first measurement angle value α and the second measurement angle value β includes:
determining a calculated angle value gamma according to a first difference value between the right angle and a second measured angle value beta; and determining a second difference value between the first measurement angle value alpha and the calculated angle value gamma as a deflection test value theta of the rotating shaft mechanism corresponding to the current measurement process.
In a specific embodiment, the calculated angle value γ may be obtained by the following formula:
γ=90°-β (4)
in the formula (4), β represents a second measured angle value, and γ represents a calculated angle value.
In another embodiment, the yaw test value θ of the spindle mechanism may be obtained by the following formula:
θ=α-γ (5)
in the formula (5), θ represents a yaw test value, α represents a first measured angle value, and γ represents a calculated angle value.
Returning to fig. 5, S400 determines a target yaw value interval of the spindle mechanism according to the yaw test values obtained in all measurement processes.
In a preferred embodiment, the step of determining the target yaw rate interval of the spindle means based on the yaw test values obtained during all the measurements comprises:
and for each measurement process, calculating a residual square value corresponding to the measurement process according to the deflection test value obtained in the measurement process.
In a preferred embodiment, the arithmetic mean value of all the yaw test values obtained in the whole measurement process may be calculated first, and for each measurement process, the difference between the yaw test value obtained in the measurement and the arithmetic mean value of the yaw test value is calculated, and the difference is determined as the residual value in the measurement process, and the residual square value corresponding to the measurement process is determined according to the residual value.
In one embodiment, the arithmetic mean of all yaw test values may be obtained by the following formula
In the formula (6) of the present application,representing the arithmetic average of all yaw test values, n representing the number of measurements performed for all measurement processes, θ i Representing the deflection test value obtained from the ith measurement.
In a preferred embodiment, the residual value v during each measurement can be obtained by the following formula i
In the formula (7), v i Representing the residual value, θ, of the ith measurement i Representing the deflection test value obtained from the ith measurement,representing the arithmetic mean of all deflection test values.
And calculating a deflection standard deviation value of the rotating shaft mechanism according to residual square values obtained in all measurement processes.
In a preferred embodiment, the step of calculating the yaw standard deviation value of the spindle mechanism based on the residual square values obtained in all measurement processes comprises:
and calculating the sum of residual square values obtained in all measurement processes, calculating a third ratio of the sum to target times, wherein the target times are the measurement times of all measurement processes, subtracting one from the measurement times of all measurement processes, and determining a first evolution value of the third ratio as a deflection standard deviation value of the rotating shaft mechanism.
In one embodiment, the yaw standard deviation σ of the spindle mechanism may be determined by the following formula:
in the formula (8), σ represents a yaw standard deviation value, n represents the number of measurements performed for all measurement processes,representing the square value of the residual obtained during the ith measurement.
And determining a target deflection value interval corresponding to the rotating shaft mechanism according to the deflection standard deflection value.
In a preferred embodiment, the step of determining the target yaw value interval corresponding to the rotation axis mechanism according to the yaw standard deviation value includes:
calculating a second square value of the measurement times of all the measurement processes, determining the ratio of the deflection standard deflection value of the rotating shaft mechanism to the second square value as a deflection reference value, determining the product of the deflection reference value and a first preset value as the lower limit value of a target deflection value interval, and determining the product of the deflection reference value and the second preset value as the upper limit value of the target deflection value interval to form the target deflection value interval.
In one embodiment, the yaw reference value may be obtained by the following formula
In the formula (9) of the present application,representing the yaw reference value +.>σ represents the deflection standard deviation value, and n represents the number of measurements performed for all measurement procedures.
Specifically, the target yaw value interval may be obtained by using a Laida criterion, if the Laida criterion is used, the first preset value is-3, the second preset value is +3, that is, the lower limit value of the target yaw value interval is equal to the product of-3 and the yaw reference value, and the upper limit value of the target yaw value interval is the product of +3 and the yaw reference value, that is, the lower limit value of the target yaw value interval isThe upper limit value of the target deflection value interval is +.>
Therefore, the application adopts the Laida criterion to process the data and obtain the target deflection value interval, thereby improving the reliability and the precision of deflection measurement results.
Based on the same application conception, the embodiment of the application also provides a deflection measuring device of the rotating shaft mechanism corresponding to the deflection measuring method of the rotating shaft mechanism provided by the embodiment, and because the principle of solving the problem by the device in the embodiment of the application is similar to that of the deflection measuring method of the rotating shaft mechanism of the embodiment of the application, the implementation of the device can refer to the implementation of the method, and the repetition is omitted.
Referring to fig. 8, fig. 8 is a schematic structural diagram of a yaw measurement device of a rotating shaft mechanism according to an embodiment of the present application, and as shown in fig. 8, the yaw measurement device includes:
the control module 510 is used for controlling the rotating shaft mechanism to rotate for a preset number of turns;
the measurement module 520 is configured to determine a maximum measurement value detected by the dial indicator during a rotation process of the spindle mechanism;
the calculating module 530 is configured to obtain a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator;
the result output module 540 is configured to determine a target yaw value interval of the spindle mechanism according to yaw test values obtained in all measurement processes.
Optionally, the rotating shaft mechanism is fixed on a fixed seat, the fixed seat is fixed on a workbench, the dial indicator is adsorbed on the workbench through a magnetic attraction seat, and the preset direction is a direction perpendicular to a rotating plane of the rotating shaft mechanism.
Optionally, the computing module 530 is further configured to: determining a first distance value from the current measurement position to the top end of the measurement mechanism according to the current measurement position contacted by the measurement probe of the dial indicator; determining a second distance value according to the maximum measured value detected by the dial indicator in the current measurement process and the radius value of the measurement mechanism; determining a first measurement angle value and a third distance value according to the first distance value and the second distance value; determining a second measurement angle value according to the radius value and the third distance value of the measurement mechanism; and determining a deflection test value of the rotating shaft mechanism corresponding to the current measuring process according to the first measuring angle value and the second measuring angle value.
Optionally, the computing module 530 is further configured to: according to the first distance value and the second distance value, calculating a third distance value by using the Pythagorean theorem, wherein a first side corresponding to the first distance value and a second side corresponding to the second distance value are mutually perpendicular, and the first side, the second side and a third side corresponding to the third distance value form a right triangle; calculating a first ratio of the second distance value to the first distance value; and performing arctangent function operation on the first ratio to obtain a first measurement angle value.
Optionally, the computing module 530 is further configured to: calculating a second ratio of the radius value to the third distance value; and performing inverse cosine function operation on the second ratio to obtain a second measurement angle value.
Optionally, the computing module 530 is further configured to: determining a calculated angle value according to a first difference between the right angle and the second measured angle value; and determining a second difference value between the first measured angle value and the calculated angle value as a deflection test value of the rotating shaft mechanism corresponding to the current measuring process.
Optionally, the result output module 540 is further configured to: aiming at each measurement process, calculating a residual square value corresponding to the measurement process according to the deflection test value obtained in the measurement process; calculating a deflection standard deviation value of the rotating shaft mechanism according to residual square values obtained in all measurement processes; and determining a target deflection value interval corresponding to the rotating shaft mechanism according to the deflection standard deflection value.
Optionally, the result output module 540 is further configured to: calculating the sum of residual square values obtained in all measurement processes; calculating a third ratio of the sum to a target number of measurements, the target number being one minus the number of measurements performed for all measurement processes; and determining the first square value of the third ratio as a deflection standard deflection value of the rotating shaft mechanism.
Optionally, the result output module 540 is further configured to: calculating a second evolution value of the number of measurements performed for all measurement processes; determining the ratio of the deflection standard deflection value of the rotating shaft mechanism to the second square value as a deflection reference value; and determining the product of the deflection reference value and the first preset value as the lower limit value of the target deflection value interval, and determining the product of the deflection reference value and the second preset value as the upper limit value of the target deflection value interval to form the target deflection value interval.
Based on the same application concept, referring to fig. 9, fig. 9 shows a schematic structural diagram of an electronic device 600 according to an embodiment of the present application, including: a processor 610, a memory 620 and a bus 630, the memory 620 storing machine readable instructions executable by the processor 610, the processor 610 and the memory 620 communicating via the bus 630 when the electronic device 600 is running, the machine readable instructions being executed by the processor 610 to perform the steps of the yaw measurement method of a spindle mechanism according to any of the embodiments described above.
Based on the same application conception, the embodiment of the application also provides a computer readable storage medium, wherein the computer readable storage medium stores a computer program, and the computer program executes the steps of the deflection measuring method of the rotating shaft mechanism provided by the embodiment when being run by a processor.
Specifically, the storage medium can be a general-purpose storage medium, such as a mobile magnetic disk, a hard disk, or the like, and when the computer program on the storage medium is executed, the yaw measurement method of the spindle mechanism described above can be executed.
It will be clear to those skilled in the art that, for convenience and brevity of description, specific working procedures of the above-described system and apparatus may refer to corresponding procedures in the foregoing method embodiments, which are not described herein again. In the several embodiments provided in the present application, it should be understood that the disclosed system, apparatus and method may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.
The functions, if implemented in the form of software functional units and sold or used as a stand-alone product, may be stored in a non-volatile computer readable storage medium executable by a processor. Based on this understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM), a random access Memory (Random Access Memory, RAM), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
The foregoing is merely illustrative of the present application, and the present application is not limited thereto, and any person skilled in the art will readily appreciate variations or alternatives within the scope of the present application. Therefore, the protection scope of the application is subject to the protection scope of the claims.

Claims (6)

1. A deflection measuring method of a rotating shaft mechanism is characterized in that the deflection measuring method is applied to a deflection measuring system, the deflection measuring system comprises a measuring mechanism and a dial indicator,
wherein the measuring mechanism is fixedly connected with the rotating shaft mechanism, the axle center of the measuring mechanism is coincident with the axle center of the rotating shaft mechanism, and the measuring mechanism is driven to rotate together with the rotation of the rotating shaft mechanism,
the dial indicator is arranged around the measuring mechanism, and a measuring probe of the dial indicator is arranged in contact with the measuring mechanism;
wherein a plurality of measurement positions are provided on the measurement mechanism in a predetermined direction, and in each measurement process, the measurement probe of the dial gauge is arranged to be in contact with a corresponding one of the measurement positions, and the following processing is performed for each measurement process:
controlling the rotating shaft mechanism to rotate for a preset number of turns;
determining a maximum measured value detected by the dial indicator in the rotating process of the rotating shaft mechanism;
obtaining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator;
determining a target deflection value interval of the rotating shaft mechanism according to deflection test values obtained in all measurement processes;
the deflection test value of the rotating shaft mechanism corresponding to each measuring process is obtained through the following modes:
determining a first distance value from the current measurement position to the top end of the measurement mechanism according to the current measurement position contacted by the measurement probe of the dial indicator;
determining a second distance value according to the maximum measured value detected by the dial indicator and the radius value of the measuring mechanism in the current measuring process;
determining a first measurement angle value and a third distance value according to the first distance value and the second distance value;
determining a second measurement angle value according to the radius value of the measurement mechanism and the third distance value;
determining a deflection test value of the rotating shaft mechanism corresponding to the current measuring process according to the first measuring angle value and the second measuring angle value;
wherein determining the first measured angle value and the third distance value from the first distance value and the second distance value comprises:
calculating a third distance value according to the first distance value and the second distance value by using the Pythagorean theorem, wherein a first side corresponding to the first distance value and a second side corresponding to the second distance value are mutually perpendicular, and the first side, the second side and a third side corresponding to the third distance value form a right triangle;
calculating a first ratio of the second distance value to the first distance value;
performing arctangent function operation on the first ratio to obtain a first measurement angle value;
the step of determining a second measured angle value from the radius value of the measuring mechanism and the third distance value comprises:
calculating a second ratio of the radius value to the third distance value;
performing inverse cosine function operation on the second ratio to obtain a second measurement angle value;
according to the first measurement angle value and the second measurement angle value, the step of determining the deflection test value of the rotating shaft mechanism corresponding to the current measurement process comprises the following steps:
determining a calculated angle value according to a first difference between the right angle and the second measured angle value;
and determining a second difference value between the first measurement angle value and the calculated angle value as a deflection test value of the rotating shaft mechanism corresponding to the current measurement process.
2. The yaw measurement method according to claim 1, wherein the rotation shaft mechanism is fixed on a fixing base, the fixing base is fixed on a table, the dial gauge is adsorbed on the table by a magnetic attraction base,
or the rotating shaft mechanism is arranged on the workbench through a fixed bracket, the first side of the fixed bracket is fixedly connected with the workbench, the rotating shaft mechanism is fixed on the second side of the fixed bracket, the second side is the side opposite to the first side, the dial indicator is adsorbed on the workbench through a magnetic attraction seat,
the predetermined direction is a direction perpendicular to a rotation plane of the rotation shaft mechanism.
3. The yaw measurement method according to claim 1, wherein the step of determining the target yaw value interval of the spindle mechanism based on the yaw test values obtained in all measurement processes includes:
aiming at each measurement process, calculating a residual square value corresponding to the measurement process according to the deflection test value obtained in the measurement process;
calculating a deflection standard deviation value of the rotating shaft mechanism according to residual square values obtained in all measurement processes;
and determining a target deflection value interval corresponding to the rotating shaft mechanism according to the deflection standard deflection value.
4. A runout measuring method according to claim 3, wherein the step of calculating a runout standard runout value of the spindle mechanism from residual square values obtained in all measuring processes comprises:
calculating the sum of residual square values obtained in all measurement processes;
calculating a third ratio of the sum to a target number of measurements, the target number being the number of measurements performed for all measurement processes minus one;
and determining the first evolution value of the third ratio as a deflection standard deviation value of the rotating shaft mechanism.
5. A runout measuring method according to claim 3, wherein the step of determining a target runout value interval corresponding to the spindle mechanism according to the runout standard runout value comprises:
calculating a second evolution value of the number of measurements performed for all measurement processes;
determining the ratio of the deflection standard deviation value of the rotating shaft mechanism to the second square value as a deflection reference value;
and determining the product of the deflection reference value and a first preset value as a lower limit value of the target deflection value interval, and determining the product of the deflection reference value and a second preset value as an upper limit value of the target deflection value interval so as to form the target deflection value interval.
6. A deflection measuring device of a rotating shaft mechanism is characterized in that the deflection measuring device is applied to a deflection measuring system, the deflection measuring system comprises a measuring mechanism and a dial indicator,
wherein the measuring mechanism is fixed on the rotating shaft mechanism, the axle center of the measuring mechanism is overlapped with the axle center of the rotating shaft mechanism, and the measuring mechanism is driven to rotate together with the rotation of the rotating shaft mechanism,
the dial indicator is arranged around the measuring mechanism, and a measuring probe of the dial indicator is arranged in contact with the measuring mechanism;
wherein a plurality of measurement positions are provided on the measurement mechanism in a predetermined direction, and in each measurement process, the measurement probe of the dial gauge is arranged to be in contact with a corresponding measurement position, and the runout measurement device performs the following processing for each measurement process:
the control module is used for controlling the rotating shaft mechanism to rotate for a preset number of turns;
the measuring module is used for determining the maximum measured value detected by the dial indicator in the rotating process of the rotating shaft mechanism;
the calculation module is used for obtaining a deflection test value of the rotating shaft mechanism corresponding to the current measurement process according to the maximum measurement value and the current measurement position contacted by the measurement probe of the dial indicator;
the result output module is used for determining a target deflection value interval of the rotating shaft mechanism according to deflection test values obtained in all measurement processes;
wherein the computing module is further configured to:
determining a first distance value from the current measurement position to the top end of the measurement mechanism according to the current measurement position contacted by the measurement probe of the dial indicator;
determining a second distance value according to the maximum measured value detected by the dial indicator and the radius value of the measuring mechanism in the current measuring process;
determining a first measurement angle value and a third distance value according to the first distance value and the second distance value;
determining a second measurement angle value according to the radius value of the measurement mechanism and the third distance value;
determining a deflection test value of the rotating shaft mechanism corresponding to the current measuring process according to the first measuring angle value and the second measuring angle value;
wherein the computing module is further configured to:
calculating a third distance value according to the first distance value and the second distance value by using the Pythagorean theorem, wherein a first side corresponding to the first distance value and a second side corresponding to the second distance value are mutually perpendicular, and the first side, the second side and a third side corresponding to the third distance value form a right triangle;
calculating a first ratio of the second distance value to the first distance value;
performing arctangent function operation on the first ratio to obtain a first measurement angle value;
the computing module is further for:
calculating a second ratio of the radius value to the third distance value;
performing inverse cosine function operation on the second ratio to obtain a second measurement angle value;
the computing module is further for:
determining a calculated angle value according to a first difference between the right angle and the second measured angle value;
and determining a second difference value between the first measurement angle value and the calculated angle value as a deflection test value of the rotating shaft mechanism corresponding to the current measurement process.
CN202210104707.1A 2022-01-28 2022-01-28 Deflection measuring method and device for rotating shaft mechanism Active CN114427820B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07139290A (en) * 1993-11-11 1995-05-30 Hitachi Constr Mach Co Ltd Embedded-pipe propulsion type excavator and method for controlling direction thereof
CN104165599A (en) * 2014-08-20 2014-11-26 南京理工大学 Aspheric surface non-contact type measuring system and method for deflection workpieces
CN110145999A (en) * 2019-06-17 2019-08-20 郑州机械研究所有限公司 A kind of method of the taper of circular conical surface on inspection center axis
CN111750755A (en) * 2020-06-28 2020-10-09 珠海格力智能装备有限公司 Method and device for detecting center position of rotating shaft of cradle rotating platform

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6741074B2 (en) * 2002-03-01 2004-05-25 General Electric Company Method and apparatus for separating electrical runout from mechanical runout
JP6316858B2 (en) * 2016-03-11 2018-04-25 ファナック株式会社 Automatic measuring device for motor shaft accuracy

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07139290A (en) * 1993-11-11 1995-05-30 Hitachi Constr Mach Co Ltd Embedded-pipe propulsion type excavator and method for controlling direction thereof
CN104165599A (en) * 2014-08-20 2014-11-26 南京理工大学 Aspheric surface non-contact type measuring system and method for deflection workpieces
CN110145999A (en) * 2019-06-17 2019-08-20 郑州机械研究所有限公司 A kind of method of the taper of circular conical surface on inspection center axis
CN111750755A (en) * 2020-06-28 2020-10-09 珠海格力智能装备有限公司 Method and device for detecting center position of rotating shaft of cradle rotating platform

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
于振 ; 刘书桂 ; 张海涛 ; .一种简便的转台运动误差标定方法研究.组合机床与自动化加工技术.2016,(01),全文. *

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