JP2021032966A5 - - Google Patents
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- JP2021032966A5 JP2021032966A5 JP2019150800A JP2019150800A JP2021032966A5 JP 2021032966 A5 JP2021032966 A5 JP 2021032966A5 JP 2019150800 A JP2019150800 A JP 2019150800A JP 2019150800 A JP2019150800 A JP 2019150800A JP 2021032966 A5 JP2021032966 A5 JP 2021032966A5
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019150800A JP7385209B2 (ja) | 2019-08-21 | 2019-08-21 | 真空紫外光の発生方法及びそれに用いる装置 |
| PCT/JP2020/031549 WO2021033759A1 (ja) | 2019-08-21 | 2020-08-21 | 真空紫外光の発生方法及びそれに用いる装置 |
| TW109128546A TW202122897A (zh) | 2019-08-21 | 2020-08-21 | 真空紫外光之產生方法及用於此的裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019150800A JP7385209B2 (ja) | 2019-08-21 | 2019-08-21 | 真空紫外光の発生方法及びそれに用いる装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021032966A JP2021032966A (ja) | 2021-03-01 |
| JP2021032966A5 true JP2021032966A5 (ja) | 2022-09-13 |
| JP7385209B2 JP7385209B2 (ja) | 2023-11-22 |
Family
ID=74661170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019150800A Active JP7385209B2 (ja) | 2019-08-21 | 2019-08-21 | 真空紫外光の発生方法及びそれに用いる装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7385209B2 (ja) |
| TW (1) | TW202122897A (ja) |
| WO (1) | WO2021033759A1 (ja) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3333495B2 (ja) | 2000-05-17 | 2002-10-15 | 科学技術振興事業団 | 高次高調波発生・分光システム |
| US6525868B2 (en) | 2000-06-20 | 2003-02-25 | Actinix | System and method for generating coherent radiation at vacuum ultraviolet wavelengths using efficient four wave mixing |
| EP2148241A4 (en) | 2007-04-18 | 2010-11-03 | Nikon Corp | WAVE LENGTH CONVERTING ELEMENT, WAVE LENGTH CONVERTING METHOD, PHASE SYNCHRONIZATION METHOD, AND LIGHT SOURCE DEVICE |
| JP5515147B2 (ja) | 2009-09-29 | 2014-06-11 | 日立化成株式会社 | 光学素子及び光源 |
| EP3518041A1 (en) | 2018-01-30 | 2019-07-31 | ASML Netherlands B.V. | Inspection apparatus and inspection method |
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2019
- 2019-08-21 JP JP2019150800A patent/JP7385209B2/ja active Active
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2020
- 2020-08-21 WO PCT/JP2020/031549 patent/WO2021033759A1/ja active Application Filing
- 2020-08-21 TW TW109128546A patent/TW202122897A/zh unknown