JP2021025938A5 - - Google Patents
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- JP2021025938A5 JP2021025938A5 JP2019145411A JP2019145411A JP2021025938A5 JP 2021025938 A5 JP2021025938 A5 JP 2021025938A5 JP 2019145411 A JP2019145411 A JP 2019145411A JP 2019145411 A JP2019145411 A JP 2019145411A JP 2021025938 A5 JP2021025938 A5 JP 2021025938A5
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- JP
- Japan
- Prior art keywords
- photodetector
- laser light
- light intensity
- indicated
- light detected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
図３Ａは、ミラー部１３の振り角と第１光検出器２２及び第２光検出器２３で検出されるレーザ光の光強度と時間との関係を示すグラフである。ここでは、第１光検出器２２で検出されるレーザ光の光強度をＤ１、第２光検出器２３で検出されるレーザ光の光強度をＤ２として示している。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019145411A JP7341782B2 (ja) | 2019-08-07 | 2019-08-07 | 角度検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019145411A JP7341782B2 (ja) | 2019-08-07 | 2019-08-07 | 角度検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021025938A JP2021025938A (ja) | 2021-02-22 |
| JP2021025938A5 true JP2021025938A5 (ja) | 2022-08-09 |
| JP7341782B2 JP7341782B2 (ja) | 2023-09-11 |
Family
ID=74663050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019145411A Active JP7341782B2 (ja) | 2019-08-07 | 2019-08-07 | 角度検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7341782B2 (ja) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4647240B2 (ja) | 2004-05-19 | 2011-03-09 | 日本信号株式会社 | プレーナ型アクチュエータ |
| JP2006078186A (ja) | 2004-09-07 | 2006-03-23 | Y E Data Inc | ミラーの平面測定方法 |
| JP2006337251A (ja) | 2005-06-03 | 2006-12-14 | Victor Co Of Japan Ltd | 光検出装置 |
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2019
- 2019-08-07 JP JP2019145411A patent/JP7341782B2/ja active Active
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