JP2021025912A - Three-dimensional shape measurement device and three-dimensional shape measurement method - Google Patents

Abstract

To provide a three-dimensional shape measurement device and three-dimensional shape measurement method that can safely measure a long object to be measured even when the object to be measured is placed on a rotary stage and rotated.SOLUTION: A three-dimensional shape measurement device 500 comprises: a placement unit 140 including a rotary stage 143 that rotates a placement surface 142 on which an object to be measured WK, and a translation stage 141 that moves the placement surface 142 with a predetermined reference position included in the placement surface 142 as a reference; a light projection unit 110 that irradiates the object to be measured WK with measurement light; a light receiving unit 120 that outputs a light receiving signal; a point group data generation unit 260 that generates point group data representing the three-dimensional shape of the object to be measured based on the light receiving signal; a point group data combination unit 211 that combines the generated point group data; and a movement control unit 144 that, in rotating the rotary stage 143, controls the placement unit 140 to return the translation stage 141 to a place corresponding to the reference position.SELECTED DRAWING: Figure 1

Description

The present invention relates to a three-dimensional shape measuring device and a three-dimensional shape measuring method for performing a predetermined inspection including height information on a three-dimensional measurement object.

A three-dimensional shape measuring device of a triangular ranging method is known (for example, Patent Document 1). In this three-dimensional shape measuring device, a mounting portion on which a measurement object is placed and a head portion that projects measurement light toward the measurement object or receives reflected light from the measurement object are provided. It is fixedly connected. As a result, robustness against changes in the external environment such as vibration resistance and earthquake resistance is enhanced, and the three-dimensional shape of the object to be measured can be stably measured. Further, the three-dimensional shape measuring device is provided with a rotation stage for rotating the measurement object in order to measure the three-dimensional shape of the measurement object from a plurality of directions.

Japanese Unexamined Patent Publication No. 2018-4278

On the other hand, there is a demand for measuring the three-dimensional shape of a long object to be measured that does not fit in the rotating stage. In order to meet such demands, it is conceivable to mount a translation stage in addition to the rotation stage. However, when the rotating stage rotates in a position where the translational stage is not in the center position, the maximum turning radius becomes large, so that there is a risk that the end of the measurement object protruding from the rotating stage collides with the three-dimensional shape measuring device. ..

One of the objects of the present invention is to provide a three-dimensional shape measuring device and a three-dimensional shape measuring method capable of safely measuring a long object to be measured even when it is placed on a rotating stage and rotated. It is in.

Means for Solving Problems and Effects of Invention

According to the three-dimensional shape measuring device according to the first aspect of the present invention, the three-dimensional shape measuring device for measuring the three-dimensional shape of the object to be measured is a mounting surface on which the object to be measured is placed. The rotating stage that rotates around the rotation axis included in the mounting surface and the previously described mounting surface are moved in the plane to which the mounting surface belongs, with reference to a predetermined reference position included in the mounting surface. A mounting unit provided with a translational stage, a light projecting unit that irradiates a measurement object mounted on the above-mentioned mounting unit with measurement light having a predetermined pattern, and a light projecting unit that irradiates the measurement object with a predetermined pattern. A light receiving unit that receives the reflected measurement light and outputs a light receiving signal indicating the amount of received light, and a point group data representing the three-dimensional shape of the measurement object is generated based on the light receiving signal output by the light receiving unit. The group data generation unit, the point group data synthesis unit that synthesizes a plurality of point group data generated by the point group data generation unit, and the translation stage correspond to the reference position when the rotation stage is rotated. The movement control unit is provided with a movement control unit that controls the above-described placement unit so as to return to the position where the above-mentioned position is to be performed. Based on the measurement light emitted from the light projecting unit, the point group data generation unit generates the first point group data, and the translation stage is returned to a position corresponding to the reference position. By rotating the stage to a predetermined rotation angle and further moving the translational stage from a position corresponding to the reference position to a second position, based on the measurement light emitted from the light projecting unit at the second position. , The above-mentioned setting unit is controlled so that the point group data generation unit generates the second point group data, and the point group data synthesis unit synthesizes the first point group data and the second point group data. be able to. With the above configuration, in a three-dimensional shape measuring device including a rotating stage and a translational stage, it is possible to reduce the possibility that the object to be measured interferes with the three-dimensional shape measuring device and other members when the rotating stage is rotationally moved. Further, since the point cloud data generated at different positions and different angles are combined, the three-dimensional shape of the object to be measured can be measured with higher accuracy.

Further, according to the three-dimensional shape measuring device according to the second side surface, in addition to the above configuration, the translational stage is different from the first position without rotating the rotation stage from the first position. By moving to the three positions, the point cloud data generation unit generates the third point cloud data based on the measurement light emitted from the light projecting unit at the third position, and the translation stage is moved to the third position. By moving the rotation stage from the two positions to a fourth position different from the second position without rotating the rotation stage, the point cloud data is based on the measurement light emitted from the light projecting unit at the fourth position. The generation unit generates the fourth point cloud data, and the point cloud data synthesis unit is configured to synthesize the first point cloud data, the second point cloud data, the third point cloud data, and the fourth point cloud data. be able to. With the above configuration, point cloud data can be generated at a plurality of different positions at the same angle, so that the shape of the object to be measured can be measured based on more data. Therefore, the object to be measured can be measured with high accuracy.

Further, according to the three-dimensional shape measuring device according to the third side surface, in addition to any of the above configurations, the reference position is the most of the side surfaces of the above-mentioned mounting portion when the rotation stage is rotated. The radius of gyration at the protruding portion can be set to the minimum position. With the above configuration, the object to be measured is returned to the position where the radius of gyration is minimized, and the object to be measured is rotated. Therefore, the possibility that the object to be measured interferes with the three-dimensional shape measuring device can be reduced.

Further, according to the three-dimensional shape measuring device according to the fourth side surface, in addition to any of the above configurations, the reference position is set to the above-mentioned mounting portion and the mounting portion when the rotating stage is rotated. The radius of gyration at the most protruding portion of the outer shape of the object to be measured placed on the above can be set to the minimum position. With the above configuration, the object to be measured is returned to the position where the radius of gyration is minimized, and the object to be measured is rotated. Therefore, the possibility that the object to be measured interferes with the three-dimensional shape measuring device can be reduced.

Furthermore, according to the three-dimensional shape measuring device according to the fifth side surface, in addition to any of the above configurations, a pedestal portion that supports the above-mentioned pedestal portion and a pedestal portion that is connected to the pedestal portion and described above. A measurement region by measurement light is formed above the placement portion, and the light projection portion and the light receiving portion are fixed in a posture in which the optical axis is tilted with respect to the above-mentioned mounting surface so as to look down on the measurement region diagonally downward. A portion and a support portion that supports the fixed portion in a posture separated from the pedestal portion can be provided. With the above configuration, it is possible to reduce the possibility that the object to be measured interferes with the support portion when the rotary stage is rotationally moved.

Furthermore, according to the three-dimensional shape measuring device according to the sixth side surface, in addition to any of the above configurations, the above-described mounting portion is above the rotating stage rotatably supported by the pedestal portion. It can be equipped with a translation stage. With the above configuration, the rotating stage is rotatably fixed to the pedestal portion, and the translation stage can be rotated together with the measurement object placed on the translation stage. By rotating the measurement object and the translation stage together, the positional relationship between the measurement object and the translation stage can be maintained constant as long as the placement posture of the measurement object is not changed. As a result, three-dimensional measurement from a plurality of viewpoints in rotation can always be performed within the same measurement target range. As a result, the same point on the measurement object can be averaged with data from a plurality of viewpoints, stable measurement can be realized over the entire measurement object, and measurement accuracy can be improved.

Furthermore, according to the three-dimensional shape measuring device according to the seventh aspect, in addition to any of the above configurations, the rotation axis of the rotation stage can be made to coincide with the reference position of the movement of the translation stage. it can. With the above configuration, it becomes easy to control the movement of the translation stage.

Furthermore, according to the three-dimensional shape measuring device according to the eighth side surface, in addition to any of the above configurations, the first point cloud data and the second point cloud data are irradiated at each of a plurality of positions. It can include a plurality of point cloud data generated based on the measured light. With the above configuration, since one point cloud data can include point cloud data generated at a plurality of locations, the shape of the object to be measured can be measured based on more data. Therefore, the object to be measured can be measured with high accuracy.

Furthermore, according to the three-dimensional shape measuring method according to the ninth aspect, it is a three-dimensional shape measuring method for measuring the three-dimensional shape of a measurement object using a three-dimensional shape measuring device, and the measurement object is mounted. The translation stage for moving the mounting surface to be placed in the plane to which the mounting surface belongs is set to the first position in the plane to which the translation stage belongs, based on a predetermined reference position included in the mounting surface. The measurement object is moved and placed on the above-mentioned mounting surface, and the measurement light having a predetermined pattern is irradiated from the light projecting unit, and the measurement light reflected by the measurement object is received by the light receiving unit to receive light. A step of outputting a light receiving signal representing an amount and causing the point group data generator to generate first point group data representing the three-dimensional shape of the object to be measured based on the output light receiving signal, and the translation stage as the reference. A rotating stage that is arranged so as to overlap with the translational stage so that the step of moving to a position corresponding to the position and the previously described mounting surface are common, and the previously described mounting surface is rotated around a rotation axis included in the mounting surface. The step of rotating and moving the translation stage, the translation stage is moved from the reference position to the second position, the measurement light is irradiated from the projection unit, and the second point group data is generated by the point group data generation unit based on the measurement light. Can be included, and a step of synthesizing the first point group data and the second point group data can be included. With the above configuration, when generating point group data representing the three-dimensional shape of the measurement object, the translation stage is set to the reference position and the rotation stage is rotated so that the measurement object interferes with the measuring device, the user, or the like. Can be suppressed.

Furthermore, according to the three-dimensional shape measuring method according to the tenth aspect, it is a three-dimensional shape measuring method for measuring the three-dimensional shape of a measurement object using a three-dimensional shape measuring device, and the measurement object is mounted. A translational stage that is moved in the plane to which the mounting surface belongs, based on a predetermined reference position included in the mounting surface in a state of being mounted on the mounting surface of the mounting portion, is set as described above. The movement control unit that controls the step of moving the measurement object from the reference position to the first position and the measurement light having a predetermined pattern on the measurement object placed on the above-mentioned mounting surface at the first position. Irradiates from the light projecting unit, receives the measurement light reflected by the object to be measured by the light receiving unit, outputs a light receiving signal indicating the amount of received light, and based on the output light receiving signal, the point group data generator is the measurement target. The process of generating the first point group data representing the three-dimensional shape of an object and the translation stage are overlapped with the translation stage so as to have the same mounting surface as described above in a state where the translation stage is returned to a position corresponding to the reference position. The step of rotating the rotation stage, which is arranged in the above-mentioned manner and rotates the above-mentioned mounting surface around the rotation axis included in the mounting surface, by the movement control unit, and the location where the translational stage corresponds to the reference position. Therefore, in the step of moving the measurement object to a second position different from the first position by the movement control unit, and in the second position, the measurement object is irradiated with the measurement light from the light projecting unit, and the measurement object is used. The reflected measurement light is received by the light receiving unit, a light receiving signal indicating the amount of received light is output, and based on the output light receiving signal, the point group data generator represents the three-dimensional shape of the measurement object. A koto can be formed, which includes a step of generating the first point group data and a step of synthesizing the first point group data and the second point group data by the point group data synthesizing unit. With the above configuration, it is possible to reduce the possibility that the object to be measured interferes with the three-dimensional shape measuring device or other members when the rotary stage is rotationally moved. In addition, since the point cloud data generated at different positions are combined, the three-dimensional shape of the object to be measured can be measured with higher accuracy.

Furthermore, according to the three-dimensional shape measuring method according to the eleventh aspect surface, in addition to the above configuration, a step of rotating the rotation stage after the step of generating the first point group data. Previously, the step of moving the translational stage to a third position different from the first position and the second position by the movement control unit, and at the third position, with respect to the object to be measured from the light projecting unit. The measurement light is irradiated, the measurement light reflected by the measurement object is received by the light receiving unit, the light receiving signal indicating the amount of light received is output, and the point group data generation unit receives the measurement object based on the output light receiving signal. After the step of generating the third point group data representing the three-dimensional shape of the above and the step of generating the second point group data, and before the step of synthesizing the point group data, the translation stage is performed. In the step of moving the movement control unit to a fourth position different from the first position, the second position, and the third position, and in the fourth position, the measurement light is emitted from the light projecting unit to the measurement object. The light receiving unit receives the measurement light that is irradiated and reflected by the measurement object, outputs a light receiving signal that indicates the amount of light received, and the point group data generator determines the three-dimensional shape of the measurement object based on the output light receiving signal. Including the step of generating the fourth point group data representing the above, the step of synthesizing the point group data includes the first point group data, the second point group data, the third point group data, and the fourth point group data. , It can be a step of synthesizing by the point group data synthesizing unit. With the above configuration, point cloud data can be generated at a plurality of different positions at the same angle, so that the shape of the object to be measured can be measured based on more data. Therefore, the object to be measured can be measured with high accuracy.

It is a block diagram which shows the image inspection apparatus which concerns on Embodiment 1 of this invention. It is a block diagram which shows the structure of the measuring part of FIG. It is a block diagram which shows the structure of the CPU of the controller of FIG. It is a block diagram which shows the 3D shape measurement system. It is an exploded perspective view of the 3D shape measuring apparatus main body shown in FIG. It is a side view of the 3D shape measuring apparatus main body shown in FIG. It is a side view of the three-dimensional shape measuring apparatus provided with a plurality of light receiving parts having different magnifications. It is a top view which shows the driving direction of a mounting surface. It is a top view which shows the driving direction of a mounting surface. It is a block diagram which shows the structure of a rotating stage. It is a block diagram which shows the structure of a translation stage. It is a perspective view of the 3D shape measuring apparatus which shows an example of the light-shielding member attached to the light-shielding cover. FIG. 13A is an observation image of a measurement object that does not fit in the measurement area, and FIG. 13B is an image diagram of single-field measurement data generated from the measurement object of FIG. 13A. FIG. 14A is a schematic plan view of a state in which a measurement object that does not fit in the measurement area is placed on the translation stage, and FIG. 14B is a schematic plan view of a state in which the translation stage is translated to the right from the state of FIG. 14A. 14C is a schematic plan view of a state in which the translational stage is translated to the left from the state of FIG. 14B. 15A is an observation image of the left half of the measurement object, FIG. 15B is an image diagram of the single-field measurement data A generated from the measurement object of FIG. 15A, FIG. 15C is an observation image of the right half of the measurement object, and FIG. 15D is a diagram. An image diagram of the single-field measurement data B generated from the measurement object of 15C, and FIG. 15E is an image diagram of a composite image obtained by synthesizing FIGS. 15B and 15D. FIG. 16A is a schematic plan view showing a state in which a measurement object is placed on a mounting surface, FIG. 16B is a schematic plan view showing a state in which a translational stage is moved, and FIG. 16C shows a state in which the measurement object is a three-dimensional shape measuring device. It is a schematic plan view which shows the state of collision. It is a flowchart which shows the procedure of measuring the whole shape of a measurement object. FIG. 18A is a schematic plan view showing a state in which the object to be measured is placed on the mounting surface, FIG. 18B is a schematic plan view showing a state in which the translation stage is moved to the left, and FIG. 18C is a schematic plan view showing the translation stage moved to the right. A schematic plan view showing the moved state, FIG. 18D is a schematic plan view showing the state in which the translation stage is returned to the reference position, FIG. 18E is a schematic plan view showing the state in which the translation stage is rotated, and FIG. 18F is a schematic plan view showing the translation stage. A schematic plan view showing a state in which the translation stage is moved to the left, FIG. 18G is a schematic plan view showing a state in which the translation stage is moved to the right, and FIG. 18H is a schematic plan view showing a state in which the translation stage is returned to the reference position. Is. FIG. 19A is a schematic plan view showing the relationship between the mounting surface and the measurement area, FIG. 19B is a schematic plan view of the translation stage moved to the left, and FIG. 19C is a schematic plan view of the translation stage moved to the right. FIG. 19D is a schematic plan view of a state in which the translational stage is moved to the left while the rotation stage is rotated by 180 °, and FIG. 19E is a schematic plan view of a state in which the translational stage is moved to the right. 20A is an observation image of the measurement object acquired at the position of FIG. 19B, FIG. 20B is a single-field measurement data generated from the observation image of FIG. 20A, and FIG. 20C is an observation image of the measurement object acquired at the position of FIG. 19C. 20D is the single-field measurement data generated from the observation image of FIG. 20C, FIG. 20E is the observation image of the measurement object acquired at the position of FIG. 19D, and FIG. 20F is the single-field measurement data generated from the observation image of FIG. 20E. 20G is an observation image of the measurement object acquired at the position of FIG. 19E, FIG. 20H is single-field measurement data generated from the observation image of FIG. 20G, and FIG. 20I is a composite of FIGS. 20B, 20D, 20F and 20H. It is each image figure of the image. FIG. 21A is a schematic plan view of interference with a light-shielding member when moving in the left-right direction, and FIG. 21B is a schematic plan view of interference with a light-shielding member when moving in the θ direction. It is a block diagram which shows the 3D shape measuring apparatus which concerns on a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiments shown below exemplify a three-dimensional shape measuring device and a three-dimensional shape measuring method for embodying the technical idea of the present invention, and the present invention is a three-dimensional shape measuring device and a tertiary. The original shape measurement method is not specified as follows. Further, the present specification does not specify the member shown in the claims as the member of the embodiment. In particular, the dimensions, materials, shapes, relative arrangements, etc. of the components described in the embodiments are not intended to limit the scope of the present invention to the specific description unless otherwise specified, and are merely described. It's just an example. The size and positional relationship of the members shown in each drawing may be exaggerated to clarify the explanation. Further, in the following description, members of the same or the same quality are shown with the same name and reference numeral, and detailed description thereof will be omitted as appropriate. Further, each element constituting the present invention may be configured such that a plurality of elements are composed of the same member and the plurality of elements are combined with one member, or conversely, the function of one member is performed by the plurality of members. It can also be shared and realized.

In the present specification, the "texture image" is an observation image having texture information represented by an optical image. On the other hand, the "height image" is also called a distance image or the like, and is used to mean an image including height information. For example, an image in which height information is converted into brightness, chromaticity, etc. and displayed as a two-dimensional image, and an image in which height information is displayed as Z coordinate information in a three-dimensional manner can be mentioned. The height image also includes a three-dimensional composite image in which a texture image is pasted as texture information on such a height image. Further, in the present specification, the display form of the height image is not limited to the one displayed in a two-dimensional shape, but also includes the one displayed in a three-dimensional shape. For example, the height information of the height image is converted into brightness and displayed as a two-dimensional image, and the height information is displayed as Z coordinate information in a three-dimensional manner.

Further, in the present specification, the "posture" of placing the measurement object on the stage means the rotation angle of the measurement object. When the object to be measured has a point-symmetrical shape in a plan view such as a cone, the same result can be obtained regardless of the rotation angle, so it is not necessary to specify the posture.

In the following embodiment, in order to acquire height information of the measurement object, a predetermined pattern of measurement light is applied to the measurement object, and a signal obtained from the reflected light reflected on the surface of the measurement object is obtained. The height information is acquired using. For example, as the measurement light of a predetermined pattern, a measurement method using a triangular distance measurement using a fringe projection image obtained by projecting onto a measurement object using structured illumination and using the reflected light can be used. However, the present invention is not limited to this, and other methods can be applied to the principle and configuration for acquiring the height information of the object to be measured.
(Embodiment)

The three-dimensional shape measuring device can measure the three-dimensional height of the image to be measured. In addition to three-dimensional measurement, two-dimensional dimensional measurement can also be performed. FIG. 1 shows a block diagram of a three-dimensional shape measuring device according to an embodiment of the present invention. The three-dimensional shape measuring device 500 shown in this figure includes a measuring unit 100, a pedestal unit 600, a controller 200, a light source unit 300, and a display unit 400. The three-dimensional shape measuring device 500 performs structured illumination with the light source unit 300, captures a fringe projection image to generate a height image having height information, and based on this, three-dimensional dimensions of the measurement object WK. And shape can be measured. The measurement using such fringe projection has an advantage that the measurement time can be shortened because the height can be measured without moving the optical system such as the measurement object WK or the lens in the Z direction.

The measuring unit 100 includes a light emitting unit 110, a light receiving unit 120, a measurement control unit 150, and an illumination light output unit 130. The light projecting unit 110 irradiates the measurement object WK placed on the mounting unit 140 with measurement light having a predetermined pattern. The light receiving unit 120 is fixed to the mounting surface 142 in an inclined posture. The light receiving unit 120 receives the measurement light that is irradiated by the light projecting unit 110 and reflected by the measurement object WK, and outputs a light receiving signal indicating the amount of light received.

The pedestal unit 600 includes a mounting unit 140 and a movement control unit 144. The pedestal portion 600 supports the mounting portion 140. The movement control unit 144 is a member that moves the mounting unit 140. The movement control unit 144 may be provided on the pedestal unit 600 side or may be arranged on the controller side.

The light source unit 300 is connected to the measurement unit 100. The light source unit 300 generates measurement light and supplies it to the measurement unit 100. The controller 200 controls the imaging of the measuring unit 100. The display unit 400 is connected to the controller 200 and serves as an HMI that displays the generated image and makes necessary settings.
(Mounting unit 140)

The pedestal portion 600 shown in FIG. 1 includes a mounting portion 140 and a movement control portion 144. The mounting unit 140 has a mounting surface 142 on which the measurement object WK is mounted. The mounting portion 140 includes a rotating stage 143 that rotates the mounting surface 142 and a translation stage 141 that translates the mounting surface 142.
(Movement control unit 144)

The movement control unit 144 controls the rotational movement of the rotary stage 143 and the translational movement of the translation stage 141 based on the measurement area set by the measurement area setting unit 264 described later.

The controller 200 includes a CPU (central processing unit) 210, a ROM (read-only memory) 220, a working memory 230, a storage device 240, and an operation unit 250. A PC (personal computer) or the like can be used as the controller 200. The CPU 210 also functions as a point cloud data generation unit 260 that generates point cloud data and a top view map image generation unit 261 that generates a top view map image based on the point cloud data generated by the point cloud data generation unit 260. To realize.
(Block diagram of measuring unit 100)

The configuration of the measuring unit 100 of the three-dimensional shape measuring device 500 of FIG. 1 is shown in the block diagram of FIG. The measuring unit 100 is, for example, a microscope, and includes a light emitting unit 110, a light receiving unit 120, an illumination light output unit 130, a measurement control unit 150, and a main body case 101 for accommodating these. The light projecting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, 115. The light receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. The main body case 101 is a housing made of resin or metal.
(Light projecting unit 110)

The light projecting unit 110 is arranged diagonally above the mounting unit 140. The measuring unit 100 may include a plurality of light projecting units 110. In the example of FIG. 2, the measuring unit 100 includes two projecting units 110. Here, the first measurement light projecting unit 110A (on the right side in FIG. 2) capable of irradiating the measurement object WK with the first measurement light ML1 from the first direction, and the second measurement object WK different from the first direction. The second measurement light projection unit 110B (on the left side in FIG. 2) capable of irradiating the measurement object WK with the second measurement light ML2 from the direction is arranged respectively. The first measurement light projection unit 110A and the second measurement light projection unit 110B are symmetrically arranged with the optical axis of the light receiving unit 120 interposed therebetween. It is also possible to provide three or more light projecting units, or to move the light projecting unit and the stage relative to each other so that the light projecting can be projected in different directions while using a common light projecting unit. Further, in the above example, a plurality of light emitting units 110 are prepared and a common light receiving unit 120 receives light, but conversely, a plurality of light receiving units are prepared and received light for the common light emitting unit. It may be configured. Further, in this example, the irradiation angle of the illumination light projected by the light projecting unit in the vertical direction is fixed, but this can also be made variable.
(Measurement light source 111)

Each of the first measurement light projection unit 110A and the second measurement light projection unit 110B includes a first measurement light source and a second measurement light source as measurement light sources 111, respectively. The measurement light source 111 is, for example, a halogen lamp that emits white light. The measurement light source 111 may be a light source that emits monochromatic light, for example, another light source such as a white LED (light emitting diode) that emits white light or an organic EL. The light emitted from the measurement light source 111 (hereinafter, referred to as “measurement light”) is appropriately focused by the lens 113 and then incident on the pattern generation unit 112.
(Pattern generator 112)

The pattern generation unit 112 reflects the light emitted from the measurement light source 111 so that the measurement light is projected onto the measurement object WK. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted by the pattern generation unit 112 is converted into light having a diameter larger than the observable / measurable field of view of the light receiving unit 120 by the plurality of lenses 114 and 115, and then the measurement target on the mounting unit 140. The object WK is irradiated.

The pattern generation unit 112 is a member capable of switching between a projection state in which the measurement light is projected onto the measurement object WK and a non-projection state in which the measurement light is not projected on the measurement object WK. For such a pattern generation unit 112, for example, a DMD (Digital Micromirror Device) can be preferably used. The pattern generation unit 112 using the DMD is controlled by the measurement control unit 150 so as to be able to switch between a reflection state in which the measurement light is reflected on the optical path as a light projection state and a light shielding state in which the measurement light is blocked as a non-light projection state. it can.

A DMD is an element in which a large number of micromirror (micromirror surface) MMs are arranged on a plane. Since each micromirror can be individually switched between the ON state and the OFF state by the measurement control unit 150, a desired projection pattern can be configured by combining the ON state and the OFF state of a large number of micromirrors. As a result, the pattern required for triangular distance measurement can be generated, and the measurement target WK can be measured. In this way, the DMD functions as a projection pattern optical system that projects a periodic projection pattern for measurement onto the measurement object WK at the time of measurement. In addition, DMD has an excellent response speed, and has an advantage that it can be operated at a higher speed than a shutter or the like.

In the above examples, an example in which DMD is used for the pattern generation unit 112 has been described, but the present invention does not limit the pattern generation unit 112 to DMD, and other members can also be used. For example, LCOS (Liquid Crystal on Silicon: reflective liquid crystal element) may be used as the pattern generation unit 112. Alternatively, a transmissive member may be used instead of the reflective member to adjust the amount of transmitted light. In this case, the pattern generation unit 112 is arranged on the optical path of the measurement light to switch between a light projection state in which the measurement light is transmitted and a light shielding state in which the measurement light is blocked. For such a pattern generation unit 112, for example, an LCD (liquid crystal display) can be used. Further, as the pattern generation unit 112, a form in which a mask provided with a slit is physically moved, a method in which a line laser is scanned, and the like can be used.

Further, in the example of FIG. 2 and the like, an example in which two measurement light projection units are provided has been described, but the present invention is not limited to this, and it is possible to provide three or more measurement light projection units. Alternatively, the number of measurement light projection units may be one. In this case, by making the position of the measurement light projection unit movable, the measurement light can be projected onto the measurement object WK from different directions.
(Light receiving unit 120)

The light receiving unit 120 is arranged above the mounting unit 140. The measurement light reflected above the mounting portion 140 by the measurement object WK is collected and imaged by the plurality of lenses 122 and 123 of the light receiving portion 120, and then received by the camera 121.
(Camera 121)

The camera 121 is, for example, a CCD (charge-coupled device) camera including an image sensor 121a and a lens. The image pickup device 121a is, for example, a monochrome CCD (charge-coupled device). The image pickup device 121a may be another image pickup device such as a CMOS (complementary metal oxide semiconductor) image sensor. Since each pixel of a color image sensor needs to correspond to light reception for red, green, and blue, the measurement resolution is lower than that of a monochrome image sensor, and it is necessary to provide a color filter for each pixel. Sensitivity decreases. Therefore, in the present embodiment, a monochrome CCD is used as the image pickup element, and a color image is acquired by irradiating the illumination light output unit 130, which will be described later, with illumination corresponding to RGB in a time-divided manner for imaging. There is. With such a configuration, it is possible to acquire a color image of the measured object without deteriorating the measurement accuracy.

However, it goes without saying that a color image sensor may be used as the image sensor 121a. In this case, although the measurement accuracy and sensitivity are lowered, it is not necessary to irradiate the illumination light output unit 130 with the illumination corresponding to RGB in time division, and the color image can be acquired only by irradiating the white light. The optical system can be configured simply. From each pixel of the image sensor 121a, an analog electric signal (hereinafter, referred to as “light receiving signal”) corresponding to the amount of received light is output to the measurement control unit 150.

The image of the measurement object WK captured in this way has an extremely accurate similarity to the measurement object WK due to the characteristics of the lens. Further, by calibrating using the magnification of the lens, it is possible to accurately associate the dimensions on the image with the dimensions on the actual measurement object WK.
(Measurement control unit 150)

An A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted on the measurement control unit 150. The received light signal output from the camera 121 is sampled at a constant sampling cycle by the A / D converter of the measurement control unit 150 and converted into a digital signal based on the control by the light source unit 300. The digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the controller 200 as pixel data.
(Controller 200)

As shown in FIG. 1, the controller 200 includes a CPU 210, a ROM 220, a working memory 230, a storage device 240, and an operation unit 250. The operation unit 250 can include a keyboard and a pointing device. As the pointing device, a mouse, a joystick, or the like is used.

The system program is stored in the ROM 220. The working memory 230 comprises a RAM (random access memory) and is used for processing various data. The storage device 240 includes a hard disk or the like. The storage device 240 stores a three-dimensional shape measurement program for operating the three-dimensional shape measurement device. Further, the storage device 240 is used to store various data such as pixel data given by the measurement control unit 150. Further, the storage device stores the luminance information, the height information, and the attribute information for each pixel constituting the measurement image.
(CPU210)

The CPU 210 is a control circuit or control element that processes a given signal or data, performs various calculations, and outputs a calculation result. In the present specification, the CPU means an element or a circuit that performs an operation, and is not limited to a CPU for a general-purpose PC or a processor such as an MPU, GPU, or TPU, regardless of its name, and is not limited to an FPGA, an ASIC, or an LSI. It is used in the sense that it includes a processor such as a processor, a microcomputer, or a chipset such as an ASIC.

The CPU 210 generates image data based on the pixel data given by the measurement control unit 150. Further, the CPU 210 performs various processes on the generated image data by using the working memory 230, and displays an image based on the image data on the display unit 400. A block diagram of the CPU 210 is shown in FIG. This CPU realizes functions such as a point cloud data generation unit 260, a top view map image generation unit 261, a measurement area setting unit 264, a height image acquisition unit 228, and a point cloud data synthesis unit 211.
(Point cloud data generation unit 260)

The point cloud data generation unit 260 generates point cloud data, which is a set of points having three-dimensional position information representing the three-dimensional shape of the measurement target WK, based on the light receiving signal output by the light receiving unit 120.
(Top view map image generation unit 261)

The top view map image generation unit 261 views a plan view of the measurement object WK placed on the mounting unit 140 from directly above based on the point cloud data generated by the point cloud data generation unit 260. Generate a top view map image to show. By generating a top view map image of the measurement object WK viewed from directly above, the overall shape of the measurement object WK can be easily grasped, and thus the measurement area can be easily set.
(Measurement area setting unit 264)

The measurement area setting unit 264 sets the measurement area on the top view map image displayed in the top view map image display area.

The height image acquisition unit 228 acquires a height image having height information based on a plurality of fringe projection images. Further, the point cloud data synthesis unit 211 synthesizes a plurality of point cloud data generated by the point cloud data generation unit 260. Here, the point cloud is also called a point cloud or the like, and has coordinates in a three-dimensional space (for example, Cartesian coordinates of XYZ). Therefore, by superimposing the point cloud data of the measurement object generated at different positions of the mounting unit on the coordinates of the common three-dimensional space by the point cloud data generation unit 211, more detailed and precise measurement can be performed. The surface shape of the object can be expressed.
(Image Inspection Department 216)

The image inspection unit 216 executes a predetermined image inspection on the image of the measurement object WK captured by the measurement unit 100. The image inspection unit 216 can include a measurement unit 216b for performing a predetermined measurement on the image to be measured. As a result, the image inspection can be executed based on the measurement result measured by the measurement unit 216b. For example, based on the result of measurement such as the length and angle of a predetermined portion of the object to be measured WK, it is possible to perform an inspection such as determination of a non-defective product or a defect. For the measurement performed by the measuring unit 216b, the contour line cut on the plane perpendicular to the screen is calculated by passing through the profile line specified on the texture image and displayed on the display unit 400 as a profile graph, or the profile graph. It is possible to extract circles and straight lines from the contour lines shown by and obtain their radii and distances.

In this way, the CPU 210 also has different parts for realizing various functions. However, it is needless to say that the configuration is not limited to a configuration in which one member also serves a plurality of parts, and it is also possible to provide a plurality of members or members that realize functions separately or separately.
(Display unit 400)

The display unit 400 displays a fringe projection image acquired by the measurement unit 100, a height image generated by the height image acquisition unit 228 based on the fringe projection image, or a texture image captured by the measurement unit 100. It is a member of. The display unit 400 is composed of, for example, an LCD panel or an organic EL (electroluminescence) panel. Furthermore, by using a touch panel for the display unit, it can also be used as an operation unit.
(Mounting unit 140)

In FIG. 2, two directions orthogonal to each other in the plane (hereinafter, referred to as “mounting surface”) on the mounting portion 140 on which the measurement object WK is mounted are defined as the X direction and the Y direction, respectively. It is indicated by arrows X and Y. The direction orthogonal to the mounting surface 142 of the mounting portion 140 is defined as the Z direction, and is indicated by an arrow Z. The direction of rotation about an axis parallel to the Z direction is defined as the θ direction, and is indicated by the arrow θ.

The mounting unit 140 includes a translation stage 141 and a rotation stage 143. The translation stage 141 has an X-direction moving mechanism and a Y-direction moving mechanism. The rotation stage 143 has a θ-direction rotation mechanism. The mounting portion 140 is configured by the translation stage 141 and the rotation stage 143. Further, the mounting portion 140 may include a fixing member (clamp) for fixing the measurement object WK on the mounting surface 142. Further, the mounting portion 140 may include a tilt stage having a mechanism that can rotate about an axis parallel to the mounting surface 142.

Here, as shown in FIG. 2, the central axes of the left and right light projecting units 110 and the central axes of the light receiving unit 120 are the arrangement of the measurement object WK on the mounting unit 140 and the covering of the light emitting unit 110 and the light receiving unit 120. The relative positional relationship between the light receiving unit 120, the light emitting unit 110, and the mounting unit 140 is determined so that they intersect at positions where the depth of field is appropriate. Further, since the center of the rotation axis in the θ direction coincides with the central axis of the light receiving unit 120, the rotation axis does not deviate from the field of view when the mounting unit 140 rotates in the θ direction. It is designed to rotate in the field of view around. In this figure, the measuring unit 100 has an arrangement rotated about the X direction on the paper surface, and the optical axis of the light receiving unit 120 and the top normal line (Z direction) of the mounting unit 140 do not necessarily coincide with each other. There is no need.
(Light source unit 300)

The light source unit 300 includes a control board 310 and an illumination light source 320 for observation. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting unit 110, the light receiving unit 120, and the measurement control unit 150 based on a command from the CPU 210 of the controller 200. Note that this configuration is an example, and other configurations may be used. For example, the measurement control unit 150 may control the light projecting unit 110 and the light receiving unit 120, or the controller 200 may control the light emitting unit 110 and the light receiving unit 120, so that the control board may be omitted. Alternatively, the light source unit 300 may be provided with a power supply circuit for driving the measurement unit 100.
(Illumination light source for observation 320)

The observation illumination light source 320 includes, for example, three-color LEDs that emit red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, light of an arbitrary color can be generated from the observation illumination light source 320. The illumination light IL generated from the observation illumination light source 320 is output from the illumination light output unit 130 of the measurement unit 100 through the light guide member (light guide). In addition to LEDs, other light sources such as semiconductor lasers (LDs), halogen lights, and HIDs can be appropriately used as the observation illumination light sources. In particular, when a color image sensor is used as the image sensor, a white light source can be used as the observation illumination light source.

The illumination light IL output from the illumination light output unit 130 switches between red light, green light, and blue light in a time-divided manner to irradiate the measurement target WK. As a result, the texture images captured by each of these RGB lights can be combined to obtain a color texture image and displayed on the display unit 400.

The illumination light output unit 130 of FIG. 2 has a ring shape and is arranged above the mounting unit 140 so as to surround the light receiving unit 120. As a result, the illumination light output unit 130 irradiates the measurement object WK with illumination light in a ring shape so as not to generate a shadow.

In addition to such ring illumination, the illumination light output unit 130 can also add transmission illumination and coaxial epi-illumination. In the example of FIG. 2, a transmission illumination unit is provided on the mounting unit 140. The transmission illumination unit illuminates the measurement object WK from below the mounting unit 140. Therefore, the mounting portion 140 is provided with a transmission illumination light source, a reflector, and an illumination lens system.

The ring illumination and the transmitted illumination can be omitted as appropriate. When these are omitted, it is also possible to take a two-dimensional image by using the illumination for three-dimensional measurement, that is, the light projecting unit.

In the example of FIG. 1, the observation illumination light source 320 is not included in the main body case 101, and the observation illumination light source 320 is arranged in the light source unit 300 as an external attachment to the measurement unit 100. By doing so, it is possible to easily improve the quality of the illumination light supplied from the observation illumination light source 320. For example, since each of the RGB LEDs constituting the observation illumination light source 320 has different light distribution characteristics, when each of the RGB texture images is captured by the monochrome image pickup element 121a, the illumination color unevenness occurs in the field of view as it is. .. Therefore, a dedicated optical system that matches the light distribution characteristics of each LED is individually prepared and combined to absorb the difference in the light distribution characteristics, create uniform white illumination with no color unevenness, and then use the measuring unit 100. Can be introduced.

Further, it is possible to avoid a situation in which the heat generated by the observation illumination light source 320 affects the optical system of the measuring unit 100. That is, if there is a heat source in the vicinity of the members of the optical system, the dimensions may be out of order due to thermal expansion, and the measurement accuracy may decrease. However, by removing the observation illumination light source, which is the heat generation source, from the main body case 101, It is possible to avoid the problem caused by the heat generation of the observation illumination light source. Further, as a result, there is an advantage that a high-power light source having a large calorific value can be used as an observation illumination light source.

The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a blue LED (light emitting diode). The measurement light source 111 may be another light source such as a halogen lamp. The light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately focused by the lens 113 and then enters the pattern generation unit 112.

The pattern generator 112 is, for example, a DMD (Digital Micromirror Device). The pattern generation unit 112 may be an LCD (liquid crystal display), an LCOS (Liquid Crystal on Silicon: reflective liquid crystal element), or a mask. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted from the pattern generation unit 112 is converted into light having a diameter larger than the size of the measurement object WK by the lens 114, and then irradiated to the measurement object WK on the mounting unit 140.

The measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110A are arranged so as to be substantially parallel to the optical axis of the light receiving unit 120. Similarly, the measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110B are arranged so as to be substantially parallel to the optical axis of the light receiving unit 120. On the other hand, the lenses 114 of the light projecting units 110A and 110B are arranged so as to be offset with respect to the measurement light source 111, the lens 113, and the pattern generation unit 112. As a result, the optical axes of the light emitting units 110A and 110B are inclined with respect to the optical axis of the light receiving unit 120, and the measurement light is emitted from both sides of the light receiving unit 120 toward the measurement object WK, respectively.

In the present embodiment, the light projecting units 110A and 110B are configured to have a constant angle of view in order to widen the irradiation range of the measurement light. The angles of view of the light projecting units 110A and 110B are determined, for example, by the dimensions of the pattern generation unit 112 and the focal length of the lens 114. When it is not necessary to widen the irradiation range of the measurement light, a telecentric optical system having an angle of view of approximately 0 degrees may be used for each of the light projecting units 110A and 110B.

The measurement light reflected above the mounting unit 140 by the measurement object WK is focused and imaged by the lens 122 of the light receiving unit 120, and is received by the image sensor 121a of the camera 121.

In the present embodiment, the light receiving unit 120 is configured to have a constant angle of view in order to widen the imaging field of view of the light receiving unit 120. In the present embodiment, the imaging field of view of the light receiving unit 120 means a region in space where imaging can be performed by the light receiving unit 120. The angle of view of the light receiving unit 120 is determined, for example, by the dimensions of the image sensor 121a and the focal length of the lens 122. If a wide field of view is not required, a telecentric optical system may be used for the light receiving unit 120. Here, the measuring unit 100 may be provided with two light receiving units 120 having different magnifications of the lenses 122. By selectively using the two light receiving units 120, the measurement object WK can be imaged at two different magnifications. It is preferable that the two light receiving units 120 are arranged so that the optical axes of the two light receiving units 120 are parallel to each other.

The camera 121 is, for example, a CCD (charge-coupled device) camera. The image pickup device 121a is, for example, a monochrome CCD (charge-coupled device). The image pickup device 121a may be another image pickup device such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electric signal (hereinafter, referred to as a light receiving signal) corresponding to the amount of received light is output to the control board 150.

Unlike a color CCD, a monochrome CCD does not need to be provided with a pixel that receives light having a red wavelength, a pixel that receives light having a green wavelength, and a pixel that receives light having a blue wavelength. Here, when a specific wavelength such as a blue wavelength is adopted as the measurement light, the color CCD can use only the pixels that receive the light of the specific wavelength for the measurement, but the monochrome CCD has no such restriction. Therefore, the measurement resolution of the monochrome CCD is higher than the resolution of the color CCD. Further, unlike a color CCD, a monochrome CCD does not need to be provided with a color filter for each pixel. Therefore, the sensitivity of the monochrome CCD is higher than that of the color CCD. Therefore, the point cloud data described later can be obtained with high accuracy. For these reasons, the camera 121 in this embodiment is provided with a monochrome CCD.

In the present embodiment, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement object WK in a time-divided manner. According to this configuration, a color image of the measurement object WK can be captured by the light receiving unit 120 using the monochrome CCD.

On the other hand, if the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement target WK with red wavelength light, green wavelength light, and blue wavelength light in a time-divided manner, and irradiates the measurement target WK with white light. Therefore, the configuration of the illumination light source 320 can be simplified.

FIG. 4 shows a three-dimensional shape measuring system 1000 including the three-dimensional shape measuring device 500 according to the embodiment. The three-dimensional shape measuring system 1000 shown in this figure inputs a control PC 1, a monitor 2, a keyboard 3, a mouse, etc. to the three-dimensional shape measuring device 500 composed of a three-dimensional shape measuring device main body 500A and a controller 200. The device 4 is connected. A three-dimensional shape measurement program for performing three-dimensional shape measurement using the three-dimensional shape measuring device 500 is installed in the control PC 1. The user can instruct the setting, imaging, measurement, and the like of the three-dimensional shape measuring device 500 by using the three-dimensional shape measuring program.

In the example of FIG. 4, the controller 200 is configured separately from the three-dimensional shape measuring device main body 500A, but the controller may be integrated on the three-dimensional shape measuring device main body side. Alternatively, the function of the controller can be integrated with the control PC.

The three-dimensional shape measuring device 500 includes a measuring unit 100, a support unit 700, a pedestal unit 600, and a light-shielding cover 102. The measuring unit 100, the support unit 700, the pedestal unit 600, and the light-shielding cover 102 are configured as a detachable unit type as shown in the exploded perspective view of FIG. This is advantageous for maintainability and portability of each member.

The pedestal portion 600 includes a mounting portion 140. The mounting unit 140 includes a rotating stage 143 that rotates the mounting surface 142 on which the object to be measured is mounted as described above, and a translation stage 141 that translates the mounting surface 142. Here, the mounting portion 140 is composed of an XY θ stage in which the XY stage, which is the translation stage 141, is mounted on the upper surface of the θ stage, which is the rotation stage 143.

The pedestal portion 600 holds the measuring portion 100 in a vertical posture via the support portion 700. Further, the measuring unit 100 fixes the light emitting unit 110 and the light receiving unit 120 in a posture in which the optical axis is inclined with respect to the mounting surface 142. Therefore, the measuring unit 100 includes a fixing unit 125 for fixing the light emitting unit 110 and the light receiving unit 120. As shown in FIG. 7, which will be described later, the fixing portion 125 is supported by the support column portion 702 in a posture separated from the pedestal portion 600. Further, the light projecting unit 110 and the light receiving unit 120 are fixed in a posture in which the optical axis is inclined with respect to the mounting surface 142. As a result, a measurement region by the measurement light is formed above the mounting portion 140. Further, the optical systems such as the light projecting unit 110 and the light receiving unit 120 are held in a posture of looking down at the measurement region obliquely downward. With such a configuration, a mounting unit 140 which is supported by the pedestal unit 600 and mounts the measurement object WK, and a light projecting unit 110 and a light receiving unit 120 for measuring the measurement object WK are mounted on one measuring device. This makes it possible to do so, eliminating the need for a large installation space. Further, since the light projecting unit 110 and the light receiving unit 120 are supported at a predetermined position of the support unit 700 for measurement, blurring or the like is less likely to occur during the measurement. Furthermore, the robustness against changes in the external environment such as vibration resistance is enhanced, and the object to be measured can be measured stably.

The support portion 700 connects the pedestal portion 600 and the measuring portion 100. The measuring unit 100 is held so as to be located above the mounting unit 140 via the support unit 700. The measuring unit 100 includes a light emitting unit 110 and a light receiving unit 120 as an observation optical system as described above. The measuring unit 100 is held in a posture of looking down from an oblique direction rather than vertically above the mounting surface 142 of the mounting unit 140 provided on the pedestal unit 600. With such an arrangement, there is an advantage that the shapes of the upper surface and the side surface of the object to be measured can be easily obtained by one measurement. In particular, in order to acquire information in the height direction, information on the side surface of the measurement object having a height difference is useful. On the other hand, it is difficult to grasp the overall shape of the object to be measured only from the side surface. Therefore, the measuring unit is in a posture that allows the object to be measured to be captured from an obliquely upward viewpoint so that both the upper surface, which makes it easy to grasp the overall outer shape, and the side surface, which makes it easy to obtain height information, can be obtained at once. It is beneficial to hold the 100 in an inclined position with respect to the mounting surface 142. In the example shown in the side view of FIG. 6, the optical axes of the light projecting unit 110 and the light receiving unit 120 of the measuring unit 100 are held in an inclined posture so as to form an angle of about 45 ° with respect to the mounting surface 142 of the XYθ stage. doing. In this way, the measuring unit 100 is connected to the pedestal unit 600 by the support unit 700 in a state where the bird's-eye view angle of 45 ° is kept constant. As a result, the measuring unit 100 can always see the mounting surface 142 at a constant angle and a constant position, and the positional relationship between the three axes of XYθ, which are the drive axes of 142, and the observation optical system is kept constant.

The light receiving unit 120 may include a plurality of optical systems having different magnifications. An example of this is shown in FIG. In this example, the light receiving unit 120 includes a first optical system having a first magnification and a second optical system having a second magnification higher than the first magnification. As described above, by providing the optical systems having different magnifications, the field of view can be switched according to the size of the measurement object WK placed on the mounting surface 142. In this example, the light receiving element includes a first light receiving element 121b optically coupled to the first optical system and a second light receiving element 121c optically coupled to the second optical system. The first optical system and the first light receiving element 121b may be collectively referred to as the first camera 121B, and the second optical system and the second light receiving element 121c may be collectively referred to as the second camera 121C. By preparing a plurality of light receiving elements in this way and configuring each optical system to take an image with an individual light receiving element, it is possible to perform the image receiving processing received by each optical system in parallel, and to speed up the processing. Simplification of optical coupling is realized. However, a common light receiving element may be optically connected to a plurality of optical systems.

The first optical system and the second optical system are arranged so that their optical axes are parallel to each other. The first optical axis LA1 of the first optical system and the second optical axis LA2 of the second optical system are inclined at about 45 ° with respect to the mounting surface 142, respectively. Here, the high-magnification second optical system, that is, the second camera 121C is arranged vertically side by side in the fixed portion 125 so as to be below the first camera 121B which is the first optical system. With such an arrangement, the movement of the viewpoint when switching from the first optical system to the second optical system becomes the front side of the measurement object WK, and there is an advantage that the change in the visual field can be relatively easily grasped by the user. Is obtained. More precisely, in the first optical system having a wide field of view (low magnification), even if the measurement object WK placed on the mounting surface is large, the second optical system having a narrow field of view (high magnification) In the above case, even if the measurement object WK placed on the mounting surface is small, it is possible to capture the entire measurement object WK when the entire circumference is rotated.
(XYθ stage)

Next, a configuration example of the pedestal portion 600 will be described with reference to FIGS. 7 to 9. In the example of FIG. 7, in the XYθ stage, the XY stage, which is the translational stage 141, is placed on the θ stage, which is the rotation stage 143 fixed on the pedestal portion 600. The rotation axis of the rotation stage 143 is arranged so as to intersect the optical axes of the first optical system and the second optical system at an angle of 45 °, respectively. As shown in the plan views of FIGS. 8 and 9, the translational stage 141 mounted on the rotary stage 143 is configured to rotate together with the XY drive shaft as the rotary stage 143 rotates. FIG. 8 shows the X-axis and the Y-axis for moving the translational stage 141, and FIG. 9 shows the θ direction for rotating the rotation stage 143. By configuring the translational stage 141 on the rotating stage 143 in this way, the optical axis of the measuring unit 100 and the rotating shaft of the rotating stage 143 maintain a mechanically fastened constant relationship. It becomes easy. Further, if necessary, the moving direction of the translational stage 141 is calibrated, and in addition, the rotation direction of the stage rotation axis is calibrated in advance to drive the stage in the coordinate system in the observation space of the measuring unit 100. You can grasp the axis. That is, since the translational stage 141 drive axis direction with respect to the posture of the rotation stage 143 is calibrated in advance, it is possible to uniquely determine the translational stage 141 drive axis direction in the arbitrary posture of the rotation stage 143.

Further, as shown in FIG. 8, the reference position for movement of the translational stage 141 is, for example, a position that serves as a reference for translation. Typically, it is the origin D (0,0) on the XY plane. Further, the point C shown in FIG. 9 is the center of the θ rotation, and in the case of FIG. 9, it coincides with the rotation axis of the rotation stage 143. By arranging the translation stage 141 above the rotation stage 143 so that the points C and D coincide with each other, it becomes easy to control the movement of the translation stage 141.

Here, a configuration example of a rotation mechanism that rotates the rotation stage 143 is shown in FIG. 10, and a configuration example of a movement mechanism that moves the translational stage 141 is shown in FIG. 11, respectively. The mounting unit 140 shown in these examples shows a configuration in which the translational stage 141 is mounted on the rotary stage 143 as described above.

As shown in FIG. 10, the rotation mechanism of the rotation stage 143 includes a rotation drive guide 800, a rotation pulse indicating unit 810, an actual rotation amount reading unit 820, a rotation drive motor 830, a reduction mechanism 840, and an origin sensor 850 in the pedestal portion 600. , A translation stage fastening unit 860 and a movement control unit 144 are provided. Since the rotation drive guide 800 is directly fastened to the pedestal portion 600, the rotation axis is mechanically uniquely determined. The movement control unit 144 sends a control signal to the rotation pulse instruction unit 810. The rotation pulse indicating unit 810 receives a control signal from the movement control unit 144 to generate a rotation pulse, and rotates the rotation drive motor 830 by the amount of the rotation pulse. The rotary drive motor 830 transmits power to the rotary drive guide 800 via the reduction mechanism 840, and generates a rotary motion of the rotary stage 143 through the rotary drive guide 800. In the example of FIG. 10, the speed reduction mechanism 840 performs deceleration and power transmission by a timing belt. Further, the rotation drive amount of the rotation stage 143 is detected by the actual rotation amount reading unit 820. By comparing the estimated rotation amount converted from the rotation pulse amount from the rotation pulse indicating unit 810 with the actual rotation amount detected by the actual rotation amount reading unit 820, it is determined whether the control state of the rotation stage 143 is good or bad. Is possible. For example, it is possible to detect an unexpected rotation stop state due to a collision or the like. The origin sensor 850 also determines the initial coordinates of the rotation stage 143. As a result, the initial coordinates of the rotation stage 143 that can rotate infinitely can be grasped.

Further, the rotary stage 143 is fixed to the translation stage 141 via the translation stage fastening portion 860. The rotational movement of the rotary stage 143 through the rotary drive guide 800 is also transmitted to the translational stage 141, and the rotational posture of the mounting surface 142 on the pedestal 600 can be changed.

As shown in FIG. 11, the translation mechanism of the translation stage 141 includes a linear motion guide 900, a linear motion power transmission unit 910, a movement pulse indicator unit 920, an actual movement amount reading unit 930, and a translation drive motor 940 in the pedestal unit 600. It includes an infinite rotation connector 950 and a movement control unit 144. In this way, the infinite rotation connector 950 enables the control signal or drive power sent from the fixed side of the rotation stage 143 to be transmitted to the drive side of the rotation stage 143, that is, the translation stage 141 fixed side, and the rotation stage 143. Infinite rotation is realized. If the harness is not provided with an infinite rotation connector, the rotation stroke is finite because the drive is accompanied by a twist of the harness. The translational drive motor 940 is rotated by the amount of movement by the movement pulse indicating unit 920 from the movement control unit 144 arranged on the fixed side of the rotation stage 143 via the infinite rotation connector 950, and the linear power transmission unit 910 and the direct drive motor 940 are rotated. The translational stage 141 is driven through the dynamic guide 900. The movement amount of the translation stage 141 is detected by the actual movement amount reading unit 930. By comparing the estimated movement amount converted from the movement pulse from the movement pulse indicating unit 920 and the actual movement amount detected by the actual movement amount reading unit 930, it is possible to judge whether the control state of the translation stage 141 is good or bad. Become.
(Shading member)

Further, the three-dimensional shape measuring device 500 may further include the following light-shielding members in order to shield the ambient light. FIG. 12 is a perspective view of a three-dimensional shape measuring device 500 showing an example of a light-shielding member 160 attached to the light-shielding cover 102. As shown in FIG. 12, a light-shielding member 160 is attached to the light-shielding cover 102 so as to extend downward from the lower end of the outer edge of the light-shielding cover 102 having a substantially U-shape to the periphery of the pedestal portion 600.

As shown in FIG. 12, by attaching the light-shielding member 160 to the three-dimensional shape measuring device 500, the space on the mounting portion 140 is surrounded by the light-shielding member 160. As a result, the ambient light incident on the space on the mounting portion 140 is shielded by the light-shielding member 160. Therefore, the ambient light incident on the light receiving unit 120 is further reduced, so that the noise component caused by the disturbance light is further reduced. As a result, the decrease in the accuracy of the point cloud data is further suppressed.

The light-shielding member 160 may be made of resin or metal, or may be made of cloth or rubber. The light-shielding member 160 is preferably formed of a soft material having flexibility such as cloth or rubber. In this case, for example, when the mounting portion 140 rotates, even if a part of the measurement target WK on the mounting portion 140 comes into contact with the light-shielding member 160, the measurement target WK is not damaged.

The light-shielding member 160 of FIG. 12 includes a nylon cloth and a plurality of metal bone members, and is formed in a bellows shape that can be expanded and contracted in the vertical direction. In this case, the user can expand and contract the light-shielding member 160 up and down as shown by the white arrow in FIG. Therefore, the user can easily perform the work of placing the measurement object WK on the mounting unit 140 from the outside and the work of taking out the measurement object WK from the mounting unit 140 to the outside. However, the light-shielding member 160 is not limited to the form formed in a bellows shape. The light-shielding member 160 may be formed in a curtain shape with a soft material having flexibility such as cloth or rubber.

The color of the light-shielding member 160 is not particularly limited, but is composed of a color that absorbs light (for example, black) in order to suppress the generation of ambient light caused by the measurement light emitted from the measurement unit 100. Is preferable. As a result, the noise component caused by the measurement light reflected or scattered from the light shielding member 160 is reduced.
(Wide range measurement function by translation stage 141)

The three-dimensional shape measuring device 500 according to the present embodiment measures the entire measurement object by synthesizing a plurality of measurement data acquired by changing the field of view even when the measurement object is too large to fit in the measurement area. It has a wide range measurement function that enables it. Here, an example of performing a wide range measurement using the translational stage 141 will be described. For example, as shown in FIG. 13A, if the object to be measured is large and the measurement area of the measuring unit 100 is exceeded even if the measurement is to be performed as it is, it is impossible to measure the whole image, and the field of view as shown in FIG. 13B. The measurement data is only for the area that fits inside. In addition, the amount of information is insufficient only by measuring the shape from a single direction, and in order to acquire the overall shape of the solid, the installation posture of the object to be measured may be rotated by approximately 180 degrees from the initial state for measurement. Can be. Therefore, in this embodiment, the translational stage 141 is used to translate the measurement object with respect to the measurement area so that the entire measurement object can be measured even in such a case, and the size exceeds the measurement area. A wide range of measurements can be made even for a measurement object by acquiring a plurality of measurement data and combining them.

Specifically, the translational stage 141 moves the mounting surface 142 in the plane to which the mounting surface 142 belongs, in the XY plane in the present embodiment, with reference to a predetermined reference position included in the mounting surface. By doing so, the measurement area can be changed to an arbitrary position, and a desired portion can be measured with high accuracy, including the shapes of both ends protruding from the object to be measured.

As shown in the image diagram of FIG. 13A and the schematic plan view of FIG. 14A described above, when the horizontally long measurement object WK1 is placed on the mounting surface 142 beyond the measurement area, a wide range measurement is performed to measure the measurement. The procedure for making the entire image of the object WK1 measurable will be described with reference to the schematic plan views of FIGS. 14A to 14C and the image views of FIGS. 15A to 15E. In FIG. 14A, the measurement area MR0 in the state where the translation stage 141 is the reference position (origin position) is shown by a thick broken line, and the measurement area MR1 in the state where the translation stage 141 is moved to the right from this state is shown by a thin line. The broken line indicates the measurement area MR2 in the state of being moved to the left, and the dotted line indicates each. Due to the movement of the translational stage 141, the measurement area appears to be relatively moving in the opposite direction.

First, as shown in FIG. 14B from the state of FIG. 14A, the translational stage 141 is moved to the right of the measurement area so that the left half of the measurement object WK1 is contained in the measurement area MR1. In FIG. 14B, the measurement area MR1 is indicated by an inverted isosceles trapezoidal dashed line. The observation image obtained at this position is as shown in FIG. 15A.

Next, the three-dimensional measurement is executed at this position, and the single-field measurement data SI1 shown in FIG. 15B is acquired. The single-field measurement data SI1 may be displayed on the display unit 400 as shown in FIG. 15B so that the user can visually confirm the obtained three-dimensional shape. Alternatively, the intermediate single-field measurement data may not be displayed on the display unit, and only the finally obtained composite image may be displayed on the display unit.

Further, as shown in FIG. 14B, the translational stage 141 is moved to the left of the measurement area so that the right half of the measurement object WK1 is contained in the measurement area MR2. The observation image obtained at this position is as shown in FIG. 15C.

Next, a three-dimensional measurement is performed at this position to obtain the single-field measurement data SI2 shown in FIG. 15D. As described above, the single-field measurement data SI2 may be displayed on the display unit 400 as shown in FIG. 15D, or may be hidden.

Finally, the single-field measurement data SI1 and SI2 are automatically arranged on the coordinate system of the measurement space from the moving stroke and the moving direction of the translation stage 141, and the respective data are combined to show the composite image CI1 shown in FIG. 15E. Is generated and displayed on the display unit 400. In this way, even if the measurement object WK1 is large enough to fit in the measurement area, by synthesizing the single-field measurement data SI1 and SI2 obtained by multiple imaging, the whole tertiary of the measurement object WK1 can be combined. The original shape can be measured. In this example, as shown in FIG. 14A, the measurement areas MR1 and MR2 are set so that the measurement object WK1 is divided into two parts on the left and right for imaging, so that the entire image can be acquired by a total of two imagings. did it. However, it goes without saying that, depending on the size of the object to be measured, the entire image can be obtained in the same manner by dividing the image into three or more times of imaging and synthesizing these.
(Wide range measurement function by combining rotary stage 143 and translation stage 141)

In the above example, an example of synthesizing the whole image of the measurement object WK1 by translation using only the translation stage 141 has been described. This configuration can be realized by a three-dimensional shape measuring device provided with only the translation stage 141 on the mounting portion 140. On the other hand, as described above, the three-dimensional shape measuring device according to the present embodiment may include a rotating stage 143 in addition to the translation stage 141. As a result, the rotation stage 143 can be rotated to acquire the shape of the back surface side of the object to be measured. In this configuration, when the wide range measurement function by the translational stage 141 described above is realized, the rotation stage 143 is held at the origin position.

(Reference position return function)
In such a configuration in which the translation stage 141 and the rotation stage 143 are combined, the radius of gyration becomes large depending on the positional relationship between the translation stage 141 and the rotation stage 143, and the measurement object placed on the mounting surface 142. May unintentionally touch the three-dimensional shape measuring device, members placed around it, users, etc. This situation will be described with reference to the schematic plan views of FIGS. 16A to 16C. Here, as shown in FIG. 10 and the like, consider a configuration in which the mounting portion 140 arranges the translation stage 141 on the upper surface of the rotation stage 143. As shown in FIG. 16A, the translational stage 141 is translated in the direction of arrow A from the state where the measurement object WK2 is placed on the mounting surface 142 whose center of rotation in the θ direction is C, as shown in FIG. 16B. Further, consider a case where the rotary stage 143 is rotationally moved counterclockwise as shown in FIG. 14C. In this case, the radius of gyration is the distance RD1 between the outermost point PM of the object to be measured WK2 and the central axis C of θ rotation in the state shown in FIG. 16A. However, in the state of FIG. 16C, the translation radius in FIG. 16B increases the radius of gyration including the measurement object WK2 to RD2 due to the translation in FIG. 16B. If the rotation stage 143 is rotated in this state, as shown in FIG. 16C, the measurement object WK2 may collide with the support column 702 of the three-dimensional shape measuring device 500.

Therefore, in the present embodiment, an increase in the turning radius can be avoided by returning the translation stage 141 to or near a predetermined reference position. That is, the translational stage 141 is temporarily returned to a position where the radius of gyration of the object WK to be measured becomes small, and the rotation stage 143 is rotated at this position so that the object WK to be measured interferes with the three-dimensional shape measuring device 500 or the like. Can be suppressed. In particular, in the case where the measurement object WK rotates in an offset state, the operation tends to occur at the blind spot position from the user's point of view, and it may be difficult for the user to avoid a collision. Even in such a case, by returning the translation stage 141 to the vicinity of the reference position, even if the measurement object WK protrudes from the mounting surface 142, it can be safely operated.
(Reference position)

The reference position is a predetermined position and can be set arbitrarily. For example, when the rotation stage 143 is rotated, the radius of gyration at the most protruding portion of the side surface of the mounting portion 140 can be set to the minimum position. Alternatively, the reference position has the minimum turning radius at the most protruding portion of the outer shape of the mounting portion 140 and the measurement object WK mounted on the mounting portion 140 when the rotating stage 143 is rotated. It can be a position that becomes. Further, although the reference position is typically the origin of the coordinate axes, it may be a position offset from the origin. Furthermore, "returning to the reference position" does not mean that it returns to the reference position accurately, but also means that it is sufficient to return to the vicinity of the reference position. For example, a location within a predetermined range from the reference position. Returning to the reference position is also included in "returning to the reference position".
(Three-dimensional shape measurement method)

A method of performing a wide range measurement for acquiring the entire shape of the object to be measured by the three-dimensional shape measuring device while avoiding a collision will be described with reference to the flowchart of FIG. First, in step S1701, the positions of the rotation stage 143 and the translation stage 141 of the mounting portion 140 are initialized.

Next, in step S1702, the user places the measurement object WK on the mounting surface 142. If necessary, the three-dimensional shape measuring device may urge the user to place the measurement object WK on the mounting surface 142 by voice guidance, text displayed on the display unit, a still image, a moving image, or the like. .. Further, the translation stage 141 is moved in step S1703. Here, the movement control unit moves the translation stage 141 according to a designated movement amount and direction. Then, in step S1704, the measurement object WK is irradiated with the measurement light at the position after the movement. Further, in step S1705, the point cloud data generation unit 260 generates point cloud data based on the measurement light radiated to the measurement object WK.

In step S1706, it is determined whether or not the designated number of imaging times has been completed. Here, the movement control unit determines whether or not the specified number of shots determined by the movement amount of the translation stage and the number of divisions of the measurement area has been reached. If not, the process returns to step S1703 and the above procedure is repeated. If it is determined in step S1706 that the designated number of shots has been reached, the process proceeds to step S1707.

In step S1707, the movement control unit determines whether or not the rotational movement of the rotation stage 143 is completed. If the rotational movement of the rotary stage 143 remains, the process proceeds to step S1709, and the movement control unit returns the translational stage 141 to the reference position. Further, after rotating the rotation stage 143 in step S1710, the process returns to step S1703 and the above procedure is repeated.

On the other hand, if it is determined in step S1707 that the rotation of the rotation stage 143 is completed, the process proceeds to step S1708, the generated point cloud data is synthesized, and the measurement is completed in step S1711. When rotating the rotation stage 143 in this way, by adding an operation of returning the translation stage 141 to the reference position, it is possible to prevent the rotation radius from becoming large regardless of the amount of movement of the translation stage 141. It is possible to avoid a situation in which the measurement object placed on the placement surface 142 interferes with other members.

Next, as shown in the schematic plan view of FIG. 16A described above, when the horizontally long measurement object WK2 is placed on the mounting surface 142 beyond the measurement area, a wide range measurement is performed and the measurement object is measured. An example of a three-dimensional shape measuring method that enables measurement of the entire image of WK2 will be described with reference to the schematic plan views of FIGS. 18A to 18H. As the operation of the translation stage 141 in this example, first, the translation stage 141 is moved to the first position, and then moved to a third position different from the first position without being rotated. Then, after returning the translation stage 141 to the reference position, the rotation stage 143 is rotated. Then, after moving the translation stage 141 to the second position, the translation stage 141 is moved to a fourth position different from the second position without being rotated. Further, in this example, the mounting portion 140 has a configuration in which the translational stage 141 is arranged on the upper surface of the rotary stage 143.

First, as shown in FIG. 18B from the state of FIG. 18A, the translational stage 141 is moved to the first position by moving it to the left so that the right side of the measurement object WK2 is contained in the measurement area MR3. In FIG. 18B and the like, the measurement area MR3 is indicated by a broken line having an inverted isosceles trapezoidal shape. Then, the three-dimensional measurement is executed at this position, and the point cloud data generation unit 260 generates the first point cloud data.

Next, as shown in FIG. 18C, the translational stage 141 is moved to the third position by moving it to the right so that the left side of the measurement object WK2 is contained in the measurement area MR3. Then, the three-dimensional measurement is executed at this position, and the point cloud data generation unit 260 generates the third point cloud data.

Next, when the rotary stage 143 is rotationally moved, the translational stage 141 is returned to the reference position in advance as shown in FIG. 18D. Then, as shown in FIG. 18E, the rotation stage 143 is rotated approximately 180 degrees in the θ direction (counterclockwise in the example of the figure).

By rotating the rotation stage 143 by approximately 180 degrees in this way, it is possible to generate more detailed data such as the side surface of the object to be measured WK2 on the opposite side, and it is possible to realize more accurate measurement. Therefore, as shown in FIG. 18F, the translational stage 141 is moved to the second position by moving it to the left so that the right side of the measurement object WK2 is contained in the measurement area MR3. Then, the three-dimensional measurement is executed at this position, and the point cloud data is generated by the second point cloud data generation unit 260.

Next, as shown in FIG. 18G, the translational stage 141 is moved to the fourth position by moving it to the right so that the left side of the measurement object WK2 is contained in the measurement area MR3. Then, the three-dimensional measurement is executed at this position, and the point cloud data generation unit 260 generates the fourth point cloud data.

Next, as shown in FIG. 18H, the translation stage 141 is returned to the reference position.

Finally, the point cloud data synthesis unit 211 synthesizes the first point cloud data, the second point cloud data, the third point cloud data, and the fourth point cloud data.
(Point cloud data synthesis in 3D shape measurement method)

Further, the synthesis of point cloud data in the three-dimensional shape measurement method will be described. First, as shown in FIG. 19B, the translational stage 141 is moved to the left of the measurement area from the state of FIG. 19A so that the right side of the measurement object WK3 is contained in the measurement area MR4. The observation image OI3 obtained at this position is as shown in FIG. 20A.

Then, the three-dimensional measurement is executed at this position, and the single-field measurement data SI3 shown in FIG. 20B is acquired. As described above, the single-field measurement data SI3 may also be displayed on the display unit 400 as shown in FIG. 20B, or may be hidden.

Next, as shown in FIG. 19C, the translational stage 141 is moved from the state of FIG. 19B to the right of the measurement area so that the left side of the measurement object WK3 is contained in the measurement area MR5. The observation image OI4 obtained at this position is as shown in FIG. 20C. Then, the three-dimensional measurement is executed at this position, and the single-field measurement data SI4 shown in FIG. 20D is acquired.

Further, the rotation stage 143 is rotated 180 ° so that the back side of the measurement object can be seen, and then the translation stage 141 is moved to the left again to measure the right side of the measurement object WK1 as shown in FIG. 19D. It is in a state of being contained in the area MR6. The observation image OI5 obtained at this position looks like the single-field measurement data SI5 shown in FIG. 20E. Then, the three-dimensional measurement is executed at this position, and the single-field measurement data SI5 shown in FIG. 14F is obtained.

Next, as shown in FIG. 19E from the state of FIG. 19D, the translational stage 141 is moved to the right so that the left side of the measurement object WK3 is contained in the measurement area MR7. The observation image OI6 obtained at this position is as shown in FIG. 20G. Then, the three-dimensional measurement is executed at this position, and the single-field measurement data SI6 shown in FIG. 20H is acquired.

Finally, the single-field measurement data SI3, SI4, SI5, and SI6 are automatically arranged on the coordinate system of the measurement space from the movement stroke and the movement direction of the translation stage 141, and the respective data, that is, FIGS. 20B and 20D. , 20F and 20H are combined to generate the composite image CI2 shown in FIG. 20I and displayed on the display unit 400. In this example, the composite image CI2 is a collection of point cloud data, and the user can drag and rotate the composite image CI2 from the screen to check the shape data of the obtained measurement object from a desired viewpoint. In this way, even if the large measurement object WK3 does not fit in the measurement area, the entire tertiary of the measurement object WK3 can be combined by synthesizing the single-field measurement data SI3 and SI4 obtained by multiple imaging. The original shape can be measured.

In the above example, the translation stage 141 has been moved in the left-right direction (X direction) in the drawing, but the translation stage 141 may be moved in the up-down direction (Y direction), or a combination of these may be used diagonally. You may move it in the direction. Similarly, the rotation angle of the rotation stage 143 is not limited to 180 ° and can be adjusted to any angle such as 90 ° or 45 °. The moving direction of the translational stage 141 can be appropriately adjusted according to the longitudinal direction of the object to be measured, how to place the object on the mounting surface 142, the complexity of the shape of the object to be measured, and the like.

As described above, the wide range measurement can be realized in any line-of-sight direction in the state where the rotation stage 143 is rotated. By correctly recognizing the moving direction of the translation stage 141, even when the rotation stage 143 is rotated, for example, in order to acquire the right side of the measurement object WK1 as shown in FIG. 20A, the translation stage 141 is moved to the left side of the screen. As shown in FIG. 20C, in order to acquire the left side of the measurement object WK1, the translational stage 141 may be translated to the right of the screen. Further, such control of the moving direction of the mounting surface 142 is performed by the movement control unit 144. The movement control unit 144 holds the moving direction of the mounting surface 142 and the position of the moved mounting surface 142, that is, the measurement area of the measurement object WK1 placed on the mounting surface 142 in association with each other. In addition, how each single-field measurement data acquired in each measurement area should be arranged in the measurement space is also coordinate-transformed based on the movement amount of the translation stage 141, the XY movement direction, and the rotation amount of θ. Since it can be calculated, automatic alignment and composition processing can be realized.

In the above example, data acquisition in each line-of-sight direction has been described. However, the present invention is not limited to this configuration, and for example, the rotation stage 143 may be rotated to a plurality of angles so that the wide range measurement results acquired at each angle are superimposed. In this case, measurement data can be acquired and superimposed on a large and three-dimensional object to be measured from any direction of 360 °, and full 3D data from all directions can be measured.

By adopting this three-dimensional shape measurement method, the mounting surface 142 always exists at the center of the stroke in the left-right direction and rotates, so that the required space size at the time of rotation is the size of the mounting surface 142 or mounted. It is uniquely determined by the amount of protrusion of the measurement object WK protruding from the placement surface 142. For this reason, the user only needs to confirm in advance that the object to be measured can rotate with the object to be measured placed on it, and it is not necessary to individually consider the risk of collision in a wide range measurement. Further, it is easy to consider not only the collision with the three-dimensional shape measuring device 500 but also the collision with the installation object around the three-dimensional shape measuring device.

If the translation stage 141 is rotated in an offset state, it tends to operate at the blind spot position, which is difficult to confirm and may be difficult to avoid. On the other hand, the above can be solved by returning to the reference position before rotation. In addition, the pop-out in the movement of the translation stage 141 is intuitively easy for the user to understand.

Further, when the light-shielding member 160 for removing ambient light is installed, the measurement object moves even if the light-shielding member 160 and the measurement object WK4 slightly interfere with each other in the movement in the θ direction as shown in FIG. 21B. There is a problem. On the other hand, as shown in FIG. 21A, in the case of linear movement in the left-right direction, the influence on the object to be measured can be minimized by adopting a structure in which the curtain side is bent.

In the above example, the case where the translational stage 141 is moved left and right, then rotated, and then moved left and right again has been described. However, the present invention does not limit the operation of the translation stage and the rotation stage to the present embodiment. The translational stage may be moved in the vertical direction, or may be moved diagonally upward or diagonally downward from the reference position. Further, the rotation stage 143 may also rotate clockwise instead of counterclockwise, and the rotation angle is not limited to approximately 180 degrees. Furthermore, it is not necessary to rotate the rotation stage 143 after measuring both ends of the object to be measured WK. For example, one end of the measurement object WK may be measured and the rotation stage 143 may be rotated.

Further, in the above example, a configuration example of the mounting portion 140 in which the translational stage 141 is arranged on the upper surface of the rotating stage 143 has been described. With such an arrangement, the rotary stage 143 is rotatably fixed to the pedestal portion 600, and the translational stage 141 can be rotated together with the measurement object WK mounted on the translational stage 141. By rotating both the measurement target WK and the translation stage 141, the positional relationship between the measurement target WK and the translation stage 141 can be maintained constant as long as the placement posture of the measurement target WK is not changed. As a result, three-dimensional measurement from a plurality of viewpoints in rotation can always be performed within the same measurement object WK range. As a result, the same points on the measurement target WK can be averaged with data from a plurality of viewpoints, stable measurement can be realized over the entire measurement target WK, and measurement accuracy can be improved.

However, the present invention does not limit the mounting portion 140 to such a configuration, and for example, as shown in the three-dimensional shape measuring device 500B according to the modified example shown in FIG. 22, the rotating stage 143 is arranged on the upper surface of the translation stage 141. It may be configured. Even with such an arrangement of the mounting portion 140, it is possible to acquire omnidirectional full 3D data of the measurement object that also protrudes from the field of view by the same measurement and superposition.

The three-dimensional shape measuring device and the three-dimensional shape measuring method of the present invention are based on the three-dimensional shape measuring device or digitizer that measures the height of the object to be measured by using a principle such as triangular distance measurement, or the inspection results thereof. Therefore, it can be suitably used as an inspection device for determining whether a product is a good product or a defective product.

1 ... Control PC
2 ... Monitor 3 ... Keyboard 4 ... Input device 100 ... Measurement unit 101 ... Main body case 102 ... Light-shielding cover 110 ... Light projection unit; 110A ... First measurement light projection unit; 110B ... Second measurement light projection unit 111 ... Measurement Light source 112 ... Pattern generation units 113 to 115, 122, 123 ... Lens 120 ... Light receiving unit 121 ... Camera 121B ... First camera; 121C ... Second camera 121a ... Imaging element; 121b ... First light receiving element; 121c ... Second light receiving element Element 125 ... Fixed unit 130 ... Illumination light output unit 140 ... Mounting unit 141 ... Translation stage 142 ... Mounting surface 143 ... Rotating stage 144 ... Movement control unit 150 ... Measurement control unit 160 ... Shading member 200 ... Controller 210 ... CPU
211 ... Point cloud data synthesis unit 216 ... Image inspection unit; 216b ... Measurement unit 220 ... ROM
228 ... Height image acquisition unit 230 ... Working memory 240 ... Storage device 250 ... Operation unit 260 ... Point group data generation unit 261 ... Top view map image generation unit 264 ... Measurement area setting unit 300 ... Light source unit 310 ... Control board 320 ... Observation illumination light source 400 ... Display 500, 500A, 500B ... Three-dimensional shape measuring device main body 600 ... Pedestal 700 ... Support 702 ... Support 800 ... Rotation drive guide 810 ... Rotation pulse indicator 820 ... Actual rotation amount reading Unit 830 ... Rotary drive motor 840 ... Deceleration mechanism 850 ... Origin sensor 860 ... Translation stage fastening unit 900 ... Linear guide 910 ... Linear transmission unit 920 ... Movement pulse indicator 930 ... Actual movement amount reading unit 940 ... Translation drive motor 950 ... Infinite rotation connector 1000 ... Three-dimensional shape measurement system WK, WK1, WK2, WK3, WK4 ... Measurement object ML ... Measurement light; ML1 ... First measurement light; ML2 ... Second measurement light LA1 ... First optical axis; LA2 ... Second optical axis MR0, MR1, MR2, MR3, MR4, MR5, MR6, MR7 ... Measurement areas OI3 to OI6 ... Observation images SI1, SI2, SI3, SI4, SI5, SI6 ... Single-field measurement data CI1, CI2 ... Synthesis Image IL ... Illumination light D ... Origin C of XY plane ... θ Rotation center RD1, RD2 ... Rotation radius

Claims (11)

A three-dimensional shape measuring device that measures the three-dimensional shape of an object to be measured.
A rotating stage that rotates the mounting surface on which the object to be measured is placed around the rotation axis included in the mounting surface, and
A mounting portion including a translation stage for moving the previously described mounting surface in the plane to which the mounting surface belongs, based on a predetermined reference position included in the mounting surface.
A light projecting unit that irradiates a measurement object placed on the above-mentioned storage unit with measurement light having a predetermined pattern,
A light receiving unit that receives the measurement light emitted by the light projecting unit and reflected by the measurement object and outputs a light receiving signal indicating the amount of received light.
A point cloud data generation unit that generates point cloud data representing the three-dimensional shape of the object to be measured based on the light receiving signal output by the light receiving unit.
A point cloud data synthesizing unit that synthesizes a plurality of point cloud data generated by the point cloud data generating unit,
A movement control unit that controls the above-mentioned placement unit so as to return the translational stage to a position corresponding to the reference position when the rotation stage is rotated.
With
The movement control unit
By moving the translation stage from the reference position to the first position, the point cloud data generation unit generates the first point cloud data based on the measurement light emitted from the light projecting unit at the first position. Let me and
With the translational stage returned to the position corresponding to the reference position, the rotation stage is rotated to a predetermined rotation angle.
Further, by moving the translation stage from the position corresponding to the reference position to the second position, the point cloud data generation unit seconds based on the measurement light emitted from the light projecting unit at the second position. Control the above-mentioned place to generate point cloud data,
The point cloud data synthesis unit
A three-dimensional shape measuring device configured to synthesize the first point cloud data and the second point cloud data. The three-dimensional shape measuring device according to claim 1.
The movement control unit
By moving the translational stage from the first position to a third position different from the first position without rotating the rotation stage, the measurement light emitted from the light projecting unit at the third position. Based on the above, the point group data generation unit generates the third point group data, and at the same time,
By moving the translational stage from the second position to a fourth position different from the second position without rotating the rotation stage, the measurement light emitted from the light projecting unit at the fourth position. The fourth point group data is generated by the point group data generation unit based on the above.
A three-dimensional shape measuring device configured such that the point cloud data synthesizing unit synthesizes the first point cloud data, the second point cloud data, the third point cloud data, and the fourth point cloud data. The three-dimensional shape measuring device according to claim 1 or 2.
The reference position is a three-dimensional shape measuring device in which the radius of gyration at the most protruding portion of the side surface of the above-described mounting portion is minimized when the rotating stage is rotated. The three-dimensional shape measuring device according to any one of claims 1 to 3.
The reference position is a position where the radius of gyration at the most protruding portion of the external shape of the above-described mounting portion and the measurement object mounted on the mounting portion is minimized when the rotating stage is rotated. Is a three-dimensional shape measuring device. The three-dimensional shape measuring device according to any one of claims 1 to 4, further comprising.
The pedestal part that supports the above-mentioned placement part and
The light projecting portion and the light receiving portion are placed on the previously described mounting surface so as to be connected to the pedestal portion, a measurement region by measurement light is formed above the previously described mounting portion, and the measurement region is viewed diagonally downward. A fixed part that fixes the optical axis in an inclined position,
A support portion that supports the fixed portion in a posture separated from the pedestal portion, and a support portion.
A three-dimensional shape measuring device including. The three-dimensional shape measuring device according to any one of claims 1 to 5.
The above-mentioned placing portion is a three-dimensional shape measuring device including the translational stage above the rotating stage rotatably supported by the pedestal portion. The three-dimensional shape measuring device according to claim 6.
The rotation axis of the rotation stage is a three-dimensional shape measuring device that coincides with a reference position for movement of the translation stage in a plan view of the above-mentioned mounting surface. The three-dimensional shape measuring device according to claim 1.
The first point cloud data and the second point cloud data are three-dimensional shape measuring devices including a plurality of point cloud data generated based on measurement light irradiated at each of a plurality of positions. A three-dimensional shape measuring method for measuring the three-dimensional shape of an object to be measured using a three-dimensional shape measuring device.
A translation stage for moving the mounting surface on which the object to be measured is placed in the plane to which the mounting surface belongs is in the plane to which the translation stage belongs, based on a predetermined reference position included in the mounting surface. The measurement object placed on the above-mentioned mounting surface is irradiated with the measurement light having a predetermined pattern from the light emitting unit, and the measurement light reflected by the measurement object is emitted by the light receiving unit. A step of receiving light, outputting a light receiving signal representing the amount of light received, and having the point group data generator generate first point group data representing the three-dimensional shape of the object to be measured based on the output light receiving signal.
A step of moving the translation stage to a position corresponding to the reference position, and
A step of rotating a rotating stage which is arranged so as to be overlapped with the translational stage so that the previously described mounting surface is common and rotates the previously described mounting surface around a rotation axis included in the mounting surface.
A step of moving the translation stage from the reference position to the second position, irradiating the measurement light from the light projecting unit, and generating the second point cloud data by the point cloud data generation unit based on the measurement light.
A three-dimensional shape measuring method including a step of synthesizing the first point cloud data and the second point cloud data. A three-dimensional shape measuring method for measuring the three-dimensional shape of an object to be measured using a three-dimensional shape measuring device.
A translational stage that moves the object to be measured in the plane to which the mounting surface belongs, based on a predetermined reference position included in the mounting surface in a state where the object to be measured is mounted on the mounting surface of the mounting portion. The step of moving from the reference position to the first position by the movement control unit that controls the above-mentioned placement unit,
At the first position, the measurement object placed on the above-mentioned mounting surface is irradiated with measurement light having a predetermined pattern from the light projecting unit, and the measurement light reflected by the measurement object is received by the light receiving unit. Then, a light receiving signal representing the amount of light received is output, and the point group data generator generates first point group data representing the three-dimensional shape of the object to be measured based on the output light receiving signal.
In a state where the translation stage is returned to a position corresponding to the reference position, the translation stage is arranged so as to be in common with the above-mentioned mounting surface, and the above-mentioned mounting surface is included in the mounting surface. The process of rotating the rotation stage around the rotation axis by the movement control unit, and
A step of moving the translation stage from a position corresponding to the reference position to a second position different from the first position by the movement control unit.
At the second position, the measurement object is irradiated with the measurement light from the light projecting unit, the measurement light reflected by the measurement object is received by the light receiving unit, and a light receiving signal indicating the amount of light received is output and output. A step of causing the point group data generator to generate second point group data representing the three-dimensional shape of the object to be measured based on the received light signal.
A step of synthesizing the first point cloud data and the second point cloud data in the point cloud data synthesis unit, and
Three-dimensional shape measurement method including. The three-dimensional shape measuring method according to claim 10, further
After the step of generating the first point cloud data and before the step of rotating the rotation stage,
A step of moving the translation stage to a third position different from the first position and the second position by the movement control unit, and
At the third position, the measurement object is irradiated with the measurement light from the light projecting unit, the measurement light reflected by the measurement object is received by the light receiving unit, and a light receiving signal indicating the amount of received light is output and output. A step of causing the point group data generator to generate third point group data representing the three-dimensional shape of the object to be measured based on the received light signal.
After the step of generating the second point cloud data and before the step of synthesizing the point cloud data.
A step of moving the translation stage to a fourth position different from any of the first position, the second position, and the third position by the movement control unit.
At the fourth position, the measurement object is irradiated with the measurement light from the light projecting unit, the measurement light reflected by the measurement object is received by the light receiving unit, and a light receiving signal indicating the amount of received light is output and output. Based on the received light signal, the point group data generator generates the fourth point group data representing the three-dimensional shape of the object to be measured.
Including
The step of synthesizing the point cloud data is
A three-dimensional shape measurement method that is a step of synthesizing the first point cloud data, the second point cloud data, the third point cloud data, and the fourth point cloud data in the point cloud data synthesis unit.