JP2021025918A - Three-dimensional shape measurement device and three-dimensional shape measurement method - Google Patents

Abstract

To make it possible to safely measure a long object to be measured even when the object to be measured is placed on a rotary stage and rotated.SOLUTION: A three-dimensional shape measurement device 500 comprises: a support unit 700 that fixedly supports a light projection unit 110 and a light receiving unit 120; a point group data generation unit 260 that generates point group data indicating the three-dimensional shape of an object to be measured WK based on a light receiving signal output from the light receiving unit 120 that is supported by the support unit 700; and a movement control unit 144 that, when a portion of the object to be measured WK placed on the placement unit 140 projects from a placement surface 142, and the amount of projection from a peripheral edge of the placement surface 142 is larger than the shortest distance between the placement surface 142 and support unit 700 when the placement surface 142 is taken as a reference position, controls the movement of the placement surface 142 along with a translation stage 141 that is directed in a direction in which the portion of the object to be measured WK projecting from the placement surface 142 moves away from the support unit 700, and the rotation of the placement surface 142 along with a rotary stage 143.SELECTED DRAWING: Figure 1

Description

The present invention relates to a three-dimensional shape measuring device and a three-dimensional shape measuring method for performing a predetermined inspection including height information on a three-dimensional measurement object.

A three-dimensional shape measuring device of a triangular ranging method is known (for example, Patent Document 1). In this three-dimensional shape measuring device, a mounting portion on which a measurement object is placed and a head portion that projects measurement light toward the measurement object or receives reflected light from the measurement object are provided. It is fixedly connected. Further, the three-dimensional shape measuring device is provided with a rotation stage for rotating the measurement object in order to measure the three-dimensional shape of the measurement object from a plurality of directions.

Japanese Unexamined Patent Publication No. 2018-4278

In such a three-dimensional shape measuring device, the size of the rotating stage on which the object to be measured is placed is limited, and it may be desired to measure the three-dimensional shape of a long object to be measured that does not fit in the rotating stage. In order to deal with such a case, it is conceivable to mount a translation stage that translates in the XY plane in addition to the rotating rotation stage.

However, depending on the placement position of the long measurement object and the rotation direction of the rotating stage, it is conceivable that the measurement object interferes with the three-dimensional shape measuring device when the stage is moved.

One of the objects of the present invention is to make it possible to safely measure a long measurement object that would protrude when placed on a rotating stage, even when the long object is placed on the rotating stage and rotated. An object of the present invention is to provide an original shape measuring device and a three-dimensional shape measuring method.

Means for Solving Problems and Effects of Invention

In order to achieve the above object, according to the three-dimensional shape measuring device according to the first aspect of the present invention, it is a three-dimensional shape measuring device that measures the three-dimensional shape of the object to be measured, and the object to be measured is measured. A rotating stage that rotates the mounting surface to be mounted around a rotation axis included in the mounting surface, and the mounting surface described above with reference to a predetermined reference position included in the mounting surface. A mounting portion having a translational stage that moves within the plane to which the mounting surface belongs, a light projecting unit that irradiates a measurement object mounted on the above-mentioned mounting unit with measurement light having a predetermined pattern, and the light projecting unit. A light receiving unit that receives measurement light that is irradiated by the unit and is reflected by the object to be measured and outputs a light receiving signal that indicates the amount of light received, a pedestal portion that supports the above-mentioned mounting portion, and the pedestal portion are connected to the pedestal portion. At the same time, the output is output by the support portion that fixedly supports the light projecting portion and the light receiving portion so that the measurement region by the measurement light is formed above the above-mentioned placement portion, and the light receiving portion supported by the support portion. A point group data generation unit that generates point group data representing the three-dimensional shape of the object to be measured based on the received light signal, and a part of the object to be measured mounted on the above-mentioned placement part protrude from the above-mentioned placement surface. When the amount of protrusion from the peripheral edge of the mounting surface of the portion is larger than the shortest distance between the mounting surface and the support portion with the mounting surface as a reference position, the above-mentioned placement is performed. A movement control unit that controls the movement of the previously described mounting surface by the translational stage and the rotation of the previously described mounting surface by the rotation stage in which the portion of the measurement object protruding from the surface is directed away from the support portion. Can be provided. With the above configuration, the movement control unit avoids contact with the measurement object by moving the rotation stage and the translation stage even when a part of the end portion of the measurement object cannot rotate due to contact with the support portion as it is. It is possible to rotate the rotating stage while doing so.

Further, according to the three-dimensional shape measuring device according to the second aspect of the present invention, in addition to the above configuration, the movement control unit has a part of the measurement object mounted on the above-described installation unit. When the amount of protrusion of the portion protruding from the mounting surface from the peripheral edge of the mounting surface is larger than the shortest distance between the mounting surface and the support portion with the mounting surface as a reference position. If the translational stage can be moved to a position where the amount of protrusion of the object to be measured from the peripheral edge of the above-mentioned mounting surface is smaller than the shortest distance between the above-mentioned mounting surface and the support portion, the above-mentioned description is made. When the mounting surface is rotated by the rotating stage, the translational stage can be configured to move the portion of the measurement object protruding from the previously described mounting surface in a direction away from the support portion. With the above configuration, even if a part of the end of the object to be measured cannot rotate due to contact with the support as it is, the movement control unit moves the translation stage if collision can be avoided, thereby moving the object to be measured. It is possible to rotate the rotating stage while avoiding the contact of.

Further, according to the three-dimensional shape measuring device according to the third aspect of the present invention, in addition to any of the above configurations, the movement control unit uses the rotation center of the rotation stage as the support unit or the object to be measured. It can be configured to rotate with respect to. With the above configuration, by offsetting the rotation center of the rotation stage, it is possible to prevent the object to be measured from interfering with the three-dimensional shape measuring device.

Furthermore, according to the three-dimensional shape measuring device according to the fourth aspect of the present invention, in addition to any of the above configurations, a part of the measurement object placed on the above-mentioned placement portion is described above. Whether or not the amount of protrusion of the portion protruding from the mounting surface from the peripheral edge of the mounting surface is larger than the shortest distance between the mounting surface and the support portion with the mounting surface as a reference position. An end detection unit for detecting the temperature can be provided.

Furthermore, according to the three-dimensional shape measuring device according to the fifth aspect of the present invention, in addition to any of the above configurations, the rotary stage rotates and moves based on the detection result of the end detection unit. The rotation control unit includes a retractable position specifying unit that specifies a retracted position at which the end portion does not collide with the support portion, and the movement control unit moves the rotation stage in parallel with the retracted position. It can be configured to rotate.

Furthermore, according to the three-dimensional shape measuring device according to the sixth aspect of the present invention, in addition to any of the above configurations, the end detection unit is a point cloud data generated by the point cloud data generation unit. Can be configured to detect the end based on.

Furthermore, according to the three-dimensional shape measuring device according to the seventh aspect of the present invention, in addition to any of the above configurations, the above-described resting portion is of the rotating stage rotatably supported by the pedestal portion. The translation stage can be provided above the translation stage.

Furthermore, according to the three-dimensional shape measuring device according to the eighth aspect of the present invention, in addition to any of the above configurations, the above-described resting portion is a translational stage supported by the pedestal portion so as to be translatable. The rotating stage can be rotatably provided above.

Furthermore, according to the three-dimensional shape measuring device according to the ninth aspect of the present invention, in addition to any of the above configurations, the translation stage was further irradiated at the first position moved from the reference position. Based on the measurement light, the first point cloud data generated by the point cloud data generation unit and the second point cloud data generated based on the measurement light irradiated at the second position different from the first position are combined. A point cloud data synthesizing unit can be provided.

Furthermore, according to the three-dimensional shape measuring method according to the tenth aspect of the present invention, it is a three-dimensional shape measuring method for measuring the three-dimensional shape of a measurement object, and a mounting surface on which the measurement object is placed. A rotating stage that rotates around a rotation axis included in the mounting surface, and the above-mentioned mounting surface in the plane to which the mounting surface belongs, with reference to a predetermined reference position included in the mounting surface. The step of mounting the measurement object on the front-described mounting surface of the mounting portion provided with the translational stage to be moved by the above, and a part of the measurement object mounted on the front-described placement portion protrudes from the front-described mounting surface. Whether or not the amount of protrusion of the portion to be projected from the peripheral edge of the mounting surface is larger than the shortest distance between the mounting surface and the support portion with the mounting surface as a reference position is determined at the end. If the step of determining by the unit detection unit and the determination result by the end detection unit show that the protrusion amount is larger than the shortest distance between the previously described mounting surface and the supporting portion, the previously described mounting surface is placed on the rotating stage. When the portion of the measurement object protruding from the previously described mounting surface is rotated and passed near the support portion, the portion of the measurement object protruding from the previously described mounting surface moves away from the supporting portion. A step of controlling the previously described placement unit by the movement control unit so as to move the translational stage can be included. As a result, even if a part of the end portion of the measurement object cannot be rotated by contacting the support portion as it is, the movement control unit moves the rotation stage and the translation stage in conjunction with each other to bring the measurement object into contact. It is possible to rotate the rotating stage while avoiding.

It is a block diagram which shows the image inspection apparatus which concerns on Embodiment 1 of this invention. It is a block diagram which shows the structure of the measuring part of FIG. It is a block diagram which shows the structure of the CPU of the controller of FIG. It is a block diagram which shows the 3D shape measurement system. It is an exploded perspective view of the 3D shape measuring apparatus main body shown in FIG. It is a side view of the 3D shape measuring apparatus main body shown in FIG. It is a side view of the three-dimensional shape measuring apparatus provided with a plurality of light receiving parts having different magnifications. It is a top view which shows the driving direction of a mounting surface. It is a top view which shows the driving direction of a mounting surface. It is a block diagram which shows the structure of a rotating stage. It is a block diagram which shows the structure of a translation stage. It is a block diagram which shows the 3D shape measuring apparatus which concerns on a modification. It is a schematic diagram which shows how the object to be measured collides with the rotation of a rotation stage. It is an image diagram which shows the observation image which looked at the measurement object from obliquely above. It is an image figure which shows the measurable range. It is a schematic side view which shows the state of observing the measurement object placed on the mounting surface in a horizontal posture from diagonally above. It is a schematic side view which shows the state of observing the measurement object placed on the mounting surface in an inclined posture from diagonally above. 18A and 18B show how the rotation stage is rotated and the measurement object collides with the pedestal portion, and FIGS. 18C and 18D show how the translational stage is translated and the measurement object collides with the pedestal portion. It is a schematic plan view which shows each. It is a flowchart which shows the procedure which detects the end part of the measurement object at the time of performing a wide range measurement of a measurement object. 20A to 20H are schematic plan views showing an example of a procedure for regulating the moving direction of the mounting surface. 21A to 21P are schematic plan views showing another example of the procedure for restricting the moving direction of the mounting surface. 22A to 22C are schematic plan views showing how to determine whether or not the translational stage can be moved toward the front. 23A to 23C are schematic plan views showing how to determine whether or not the translational stage can be moved to the right. 24A to 24D are schematic plan views showing how to determine whether or not the rotary stage can be rotated clockwise. FIG. 25A is a schematic side view showing a measurable range of the three-dimensional shape measuring device, and FIG. 25B is a schematic plan view. It is a schematic plan view which shows the amount of protrusion of the object to measure from a mounting surface. 27A to 27D are schematic plan views showing how the translation center offset function avoids the collision from the state of FIG. 26 in the configuration in which the translational stage is placed on the rotation stage. 28A to 28D are schematic plan views showing a state in which a rotation stage is placed on a translation stage and a collision is avoided by a rotation center offset function from the state of FIG. 26.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiments shown below exemplify a three-dimensional shape measuring device for embodying the technical idea of the present invention, and the present invention does not specify the three-dimensional shape measuring device to the following. Further, the present specification does not specify the member shown in the claims as the member of the embodiment. In particular, the dimensions, materials, shapes, relative arrangements, etc. of the components described in the embodiments are not intended to limit the scope of the present invention to the specific description unless otherwise specified, and are merely described. It's just an example. The size and positional relationship of the members shown in each drawing may be exaggerated to clarify the explanation. Further, in the following description, members of the same or the same quality are shown with the same name and reference numeral, and detailed description thereof will be omitted as appropriate. Further, each element constituting the present invention may be configured such that a plurality of elements are composed of the same member and the plurality of elements are combined with one member, or conversely, the function of one member is performed by the plurality of members. It can also be shared and realized.

In the present specification, the "texture image" is an observation image having texture information represented by an optical image. On the other hand, the "height image" is also called a distance image or the like, and is used to mean an image including height information. For example, an image in which height information is converted into brightness, chromaticity, etc. and displayed as a two-dimensional image, and an image in which height information is displayed as Z coordinate information in a three-dimensional manner can be mentioned. The height image also includes a three-dimensional composite image in which a texture image is pasted as texture information on such a height image. Further, in the present specification, the display form of the height image is not limited to the one displayed in a two-dimensional shape, but also includes the one displayed in a three-dimensional shape. For example, the height information of the height image is converted into brightness and displayed as a two-dimensional image, and the height information is displayed as Z coordinate information in a three-dimensional manner.

Further, in the present specification, the "posture" of placing the measurement object on the stage means the rotation angle of the measurement object. When the object to be measured has a point-symmetrical shape in a plan view such as a cone, the same result can be obtained regardless of the rotation angle, so it is not necessary to specify the posture.

In the following embodiment, in order to acquire height information of the measurement object, a predetermined pattern of measurement light is applied to the measurement object, and a signal obtained from the reflected light reflected on the surface of the measurement object is obtained. The height information is acquired using. For example, as the measurement light of a predetermined pattern, a measurement method using a triangular distance measurement using a fringe projection image obtained by projecting onto a measurement object using structured illumination and using the reflected light can be used. However, the present invention is not limited to this, and other methods can be applied to the principle and configuration for acquiring the height information of the object to be measured.
(Embodiment 1)

The three-dimensional shape measuring device can measure the three-dimensional height of the image to be measured. In addition to three-dimensional measurement, two-dimensional dimensional measurement can also be performed. FIG. 1 shows a block diagram of the three-dimensional shape measuring device according to the first embodiment of the present invention. The three-dimensional shape measuring device 500 shown in this figure includes a measuring unit 100, a pedestal unit 600, a controller 200, a light source unit 300, and a display unit 400. The three-dimensional shape measuring device 500 performs structured illumination with the light source unit 300, captures a fringe projection image to generate a height image having height information, and based on this, three-dimensional dimensions of the measurement object WK. And shape can be measured. The measurement using such fringe projection has an advantage that the measurement time can be shortened because the height can be measured without moving the optical system such as the measurement object WK or the lens in the Z direction.

The measuring unit 100 includes a light emitting unit 110, a light receiving unit 120, a measurement control unit 150, and an illumination light output unit 130. The light projecting unit 110 irradiates the measurement object WK placed on the mounting unit 140 with measurement light having a predetermined pattern. The light receiving unit 120 is fixed to the mounting surface 142 in an inclined posture. The light receiving unit 120 receives the measurement light that is irradiated by the light projecting unit 110 and reflected by the measurement object WK, and outputs a light receiving signal indicating the amount of light received. The light receiving unit 120 can generate an observation image for observing the overall shape of the measurement object WK by imaging the measurement object WK mounted on the mounting unit 140.

The pedestal unit 600 includes a mounting unit 140 and a movement control unit 144. The pedestal portion 600 supports the mounting portion 140 on the base plate 602. The movement control unit 144 is a member that moves the mounting unit 140. The movement control unit 144 may be provided on the pedestal unit 600 side or may be arranged on the controller side.

The light source unit 300 is connected to the measurement unit 100. The light source unit 300 generates measurement light and supplies it to the measurement unit 100. The controller 200 controls the imaging of the measuring unit 100. The display unit 400 is connected to the controller 200 and serves as an HMI that displays the generated image and makes necessary settings.
(Mounting unit 140)

The pedestal portion 600 shown in FIG. 1 includes a mounting portion 140 and a movement control portion 144. The mounting unit 140 has a mounting surface 142 on which the measurement object WK is mounted. The mounting portion 140 includes a rotating stage 143 that rotates the mounting surface 142 and a translation stage 141 that translates the mounting surface 142.
(Movement control unit 144)

The movement control unit 144 controls the rotational movement of the rotary stage 143 and the translational movement of the translation stage 141 based on the measurement area set by the measurement area setting unit 264. Further, the movement control unit 144 controls the movement operation of the mounting unit 140 by the mounting movement unit based on the measurement area set by the measurement area setting unit 264 described later.

The controller 200 includes a CPU (central processing unit) 210, a ROM (read-only memory) 220, a working memory 230, a storage device 240, and an operation unit 250. A PC (personal computer) or the like can be used as the controller 200. Further, the CPU 210 instructs the point group data generation unit 260 that generates the point group data, the collision avoidance information input unit 269 that inputs the collision avoidance information, and the collision avoidance by moving the mounting unit based on the collision avoidance information. Functions such as the measurement area setting unit 264 for setting the measurement area on the observation image displayed by the avoidance operation instruction unit 270 and the display unit 400 are realized (details will be described later).
(Block diagram of measuring unit 100)

The configuration of the measuring unit 100 of the three-dimensional shape measuring device 500 of FIG. 1 is shown in the block diagram of FIG. The measuring unit 100 is, for example, a microscope, and includes a light emitting unit 110, a light receiving unit 120, an illumination light output unit 130, a measurement control unit 150, a main body case 101 for accommodating these, and a mounting unit 140. The light projecting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, 115. The light receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. The object to be measured WK is placed on the mounting portion 140. The main body case 101 is a housing made of resin or metal.
(Light projecting unit 110)

The light projecting unit 110 is arranged diagonally above the mounting unit 140. The measuring unit 100 may include a plurality of light projecting units 110. In the example of FIG. 2, the measuring unit 100 includes two projecting units 110. Here, the first measurement light projecting unit 110A (on the right side in FIG. 2) capable of irradiating the measurement object WK with the first measurement light ML1 from the first direction, and the second measurement object WK different from the first direction. The second measurement light projection unit 110B (on the left side in FIG. 2) capable of irradiating the measurement object WK with the second measurement light ML2 from the direction is arranged respectively. The first measurement light projection unit 110A and the second measurement light projection unit 110B are symmetrically arranged with the optical axis of the light receiving unit 120 interposed therebetween. It is also possible to provide three or more light projecting units, or to move the light projecting unit and the stage relative to each other so that the light projecting can be projected in different directions while using a common light projecting unit. Further, in the above example, a plurality of light emitting units 110 are prepared and a common light receiving unit 120 receives light, but conversely, a plurality of light receiving units are prepared and received light for the common light emitting unit. It may be configured. Further, in this example, the irradiation angle of the illumination light projected by the light projecting unit in the vertical direction is fixed, but this can also be made variable.
(Measurement light source 111)

Each of the first measurement light projection unit 110A and the second measurement light projection unit 110B includes a first measurement light source and a second measurement light source as measurement light sources 111, respectively. The measurement light source 111 is, for example, a halogen lamp that emits white light. The measurement light source 111 may be a light source that emits monochromatic light, for example, another light source such as a white LED (light emitting diode) that emits white light or an organic EL. The light emitted from the measurement light source 111 (hereinafter, referred to as “measurement light”) is appropriately focused by the lens 113 and then incident on the pattern generation unit 112.
(Pattern generator 112)

The pattern generation unit 112 reflects the light emitted from the measurement light source 111 so that the measurement light is projected onto the measurement object WK. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted by the pattern generation unit 112 is converted into light having a diameter larger than the observable / measurable field of view of the light receiving unit 120 by the plurality of lenses 114 and 115, and then the measurement target on the mounting unit 140. The object WK is irradiated.

The pattern generation unit 112 is a member capable of switching between a projection state in which the measurement light is projected onto the measurement object WK and a non-projection state in which the measurement light is not projected on the measurement object WK. For such a pattern generation unit 112, for example, a DMD (Digital Micromirror Device) can be preferably used. The pattern generation unit 112 using the DMD is controlled by the measurement control unit 150 so as to be able to switch between a reflection state in which the measurement light is reflected on the optical path as a light projection state and a light shielding state in which the measurement light is blocked as a non-light projection state. it can.

A DMD is an element in which a large number of micromirror (micromirror surface) MMs are arranged on a plane. Since each micromirror can be individually switched between the ON state and the OFF state by the measurement control unit 150, a desired projection pattern can be configured by combining the ON state and the OFF state of a large number of micromirrors. As a result, the pattern required for triangular distance measurement can be generated, and the measurement target WK can be measured. In this way, the DMD functions as a projection pattern optical system that projects a periodic projection pattern for measurement onto the measurement object WK at the time of measurement. In addition, DMD has an excellent response speed, and has an advantage that it can be operated at a higher speed than a shutter or the like.

In the above examples, an example in which DMD is used for the pattern generation unit 112 has been described, but the present invention does not limit the pattern generation unit 112 to DMD, and other members can also be used. For example, as the pattern generation unit 112, a transmission type member may be used instead of the reflection type member to adjust the amount of transmitted light. In this case, the pattern generation unit 112 is arranged on the optical path of the measurement light to switch between a light projection state in which the measurement light is transmitted and a light shielding state in which the measurement light is blocked. For such a pattern generation unit 112, for example, an LCD (liquid crystal display) can be used. In addition, LCOS (Liquid Crystal on Silicon), a mask, or the like can also be used as the pattern generation unit 112.

Further, in the example of FIG. 2 and the like, an example in which two measurement light projection units are provided has been described, but the present invention is not limited to this, and it is possible to provide three or more measurement light projection units. Alternatively, the number of measurement light projection units may be one. In this case, by making the position of the measurement light projection unit movable, the measurement light can be projected onto the measurement object WK from different directions.
(Light receiving unit 120)

The light receiving unit 120 is arranged above the mounting unit 140. The measurement light reflected above the mounting portion 140 by the measurement object WK is collected and imaged by the plurality of lenses 122 and 123 of the light receiving portion 120, and then received by the camera 121.
(Camera 121)

The camera 121 is, for example, a CCD (charge-coupled device) camera including an image sensor 121a and a lens. The image pickup device 121a is, for example, a monochrome CCD (charge-coupled device). The image pickup device 121a may be another image pickup device such as a CMOS (complementary metal oxide semiconductor) image sensor. Since each pixel of a color image sensor needs to correspond to light reception for red, green, and blue, the measurement resolution is lower than that of a monochrome image sensor, and it is necessary to provide a color filter for each pixel. Sensitivity decreases. Therefore, in the present embodiment, a monochrome CCD is used as the image pickup element, and a color image is acquired by irradiating the illumination light output unit 130, which will be described later, with illumination corresponding to RGB in a time-divided manner for imaging. There is. With such a configuration, it is possible to acquire a color image of the measured object without deteriorating the measurement accuracy.

However, it goes without saying that a color image sensor may be used as the image sensor 121a. In this case, although the measurement accuracy and sensitivity are lowered, it is not necessary to irradiate the illumination light output unit 130 with the illumination corresponding to RGB in time division, and the color image can be acquired only by irradiating the white light. The optical system can be configured simply. From each pixel of the image sensor 121a, an analog electric signal (hereinafter, referred to as “light receiving signal”) corresponding to the amount of received light is output to the measurement control unit 150.

The image of the measurement object WK captured in this way has an extremely accurate similarity to the measurement object WK due to the characteristics of the lens. Further, by calibrating using the magnification of the lens, it is possible to accurately associate the dimensions on the image with the dimensions on the actual measurement object WK.
(Measurement control unit 150)

An A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted on the measurement control unit 150. The received light signal output from the camera 121 is sampled at a constant sampling cycle by the A / D converter of the measurement control unit 150 and converted into a digital signal based on the control by the light source unit 300. The digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the controller 200 as pixel data.
(Controller 200)

As shown in FIG. 1, the controller 200 includes a CPU 210, a ROM 220, a working memory 230, a storage device 240, and an operation unit 250. The operation unit 250 can include a keyboard and a pointing device. As the pointing device, a mouse, a joystick, or the like is used.

The system program is stored in the ROM 220. The working memory 230 comprises a RAM (random access memory) and is used for processing various data. The storage device 240 includes a hard disk or the like. The storage device 240 stores a three-dimensional shape measurement program for operating the three-dimensional shape measurement device. Further, the storage device 240 is used to store various data such as pixel data given by the measurement control unit 150. Further, the storage device stores the luminance information, the height information, and the attribute information for each pixel constituting the measurement image.
(CPU210)

The CPU 210 is a control circuit or control element that processes a given signal or data, performs various calculations, and outputs a calculation result. In the present specification, the CPU means an element or a circuit that performs an operation, and is not limited to a CPU for a general-purpose PC or a processor such as an MPU, GPU, or TPU, regardless of its name, and is not limited to an FPGA, an ASIC, or an LSI. It is used in the sense that it includes a processor such as a processor, a microcomputer, or a chipset such as an ASIC.

The CPU 210 generates image data based on the pixel data given by the measurement control unit 150. Further, the CPU 210 performs various processes on the generated image data by using the working memory 230, and displays an image based on the image data on the display unit 400. A block diagram of the CPU 210 is shown in FIG. This CPU includes a point cloud data generation unit 260, a top view map image generation unit 261, a measurement area setting unit 264, an end detection unit 265, a regulation determination unit 266, a height image acquisition unit 228, and points. It realizes functions such as a group data synthesis unit 211, a collision avoidance information input unit 269, an avoidance operation instruction unit 270, and a retract position identification unit 268.
(End detection unit 265)

The end detection unit 265 detects at least one end of both ends of the measurement object WK mounted on the mounting unit 140 in the longitudinal direction. The end detection unit 265 is configured to determine the rotation direction in which the rotation stage 143 is rotationally moved based on the detection result when one end of the measurement object WK is detected and the other end is not detected. You may. By doing so, the rotation direction can be determined so as to avoid the rotation direction in which the detected end portion interferes with the rotation of the rotation stage 143, so that the safety of the rotation operation is enhanced.

Further, when none of the ends of the object to be measured WK is detected, the end detection unit 265 prompts the user to select whether or not to rotate the rotation stage 143, or is placed on a mounting table. It may be configured to guide the user to reposition the measurement object WK. By doing so, even if neither end of the measurement object WK is detected, the user can be asked to select whether to rotate the measurement object WK or to replace the measurement object WK. It can be expected that the user will select a highly secure option.

Further, the end detection unit 265 may determine the allowance or regulation of the translational movement of the translation stage 141.
(Regulatory Judgment Department 266)

The regulation determination unit 266 rotates the rotation stage 143 in the direction in which the end portion approaches the support column 702, or translates the translation stage 141, based on whether or not the end portion can be detected by the end detection unit 265 or the detection position. Decide whether to regulate movement. As a result, it is possible to suppress the increase in size of the three-dimensional shape measuring device and to avoid the situation where the measurement object WK interferes with the three-dimensional shape measuring device.

The regulation determination unit 266 can output the result of determination based on the detection possibility and the detection position in various forms. For example, the regulation determination unit 266 may collide if the end of the object to be measured WK is approaching the support column 702 as a result of the end detection by the end detection unit 265, or if the measurement is continued as it is. The user is notified of such things by blinking a lamp, a buzzer, a voice such as a warning message, or text, an image, or a video. In this way, by giving a warning to the user before the measurement object WK comes into contact with the three-dimensional shape measuring device, it is possible to promote appropriate measures such as workarounds and preventive measures.

Based on the end detection result by the end detection unit 265, the regulation determination unit 266 determines the movement direction and / or movement amount of the mounting unit 140 so that the end of the measurement object WK does not approach the support column 702. The movement control unit 144 can be instructed to change. This makes it possible to limit the movement of the mounting portion 140 so that the end portion of the measurement object WK does not come into contact with the support column portion 702. Further, the regulation determination unit 266 may determine the rotation direction for rotating the rotation stage 143 based on the end detection result by the end detection unit 265.

The end detection unit 265 can detect the end based on the point cloud data generated by the point cloud data generation unit 260. At this time, the end portion may be detected directly from the point cloud data generated by the point cloud data generation unit 260. Alternatively, it is extracted from the top view map image showing the plan view when the measurement object WK placed on the mounting unit 140 is looked down from directly above, which is generated by the top view map image generation unit based on the point group data. The end portion may be detected based on the contour of the measured object WK. As a result, by using the top view map image of the measurement target WK viewed from directly above, the outline of the plan view of the measurement target WK can be obtained, so that the end portion can be easily grasped and the accuracy of collision avoidance can be improved. The advantage of improving accuracy is obtained. For extracting the contour of the object to be measured, a known method such as edge extraction for extracting the outer edge constituting the outer shape of the object to be measured can be used.
(Point cloud data generation unit 260)

The point cloud data generation unit 260 generates point cloud data, which is a set of points having three-dimensional position information representing the three-dimensional shape of the measurement target WK, based on the light receiving signal output by the light receiving unit 120.
(Top view map image generation unit 261)

The top view map image generation unit 261 views a plan view of the measurement object WK placed on the mounting unit 140 from directly above based on the point cloud data generated by the point cloud data generation unit 260. Generate a top view map image to show. By generating a top view map image of the measurement object WK viewed from directly above, the overall shape of the measurement object WK can be easily grasped, and thus the measurement area can be easily set. For example, the top view map image generation unit 261 uses the point cloud data generated by the point cloud data generation unit 260 as a two-dimensional texture image obtained by imaging the measurement target WK by the light receiving unit 120, and adds a three-dimensional image of the point cloud data. A top view map image is generated by pasting each position information. Alternatively, a mesh image in which polygons are attached to each point of the point cloud data generated by the point cloud data generation unit 260 to form a surface shape may be generated. A top view map image is generated from this mesh image. The mesh image may be generated by the top view map image generation unit 261 or may be generated by the mesh image generation unit.

The top view map image generation unit 261 can also generate a composite top view map image in which a plurality of top view map images obtained by acquiring a plurality of different regions of the measurement target WK by the light receiving unit 120 are combined. As a result, it is possible to obtain a top view map image with a wider field of view by synthesizing a plurality of top view map images, and it is possible to provide an environment in which it is easy for the user to perform work such as designating a measurement area.

In this case, the top view map image generation unit 261 can also accept the designation of the position to add the top view map image to the top view map image displayed in the top view map image display area. In response to this designation, the top view map image generation unit 261 can generate a top view map image at a designated position, update the composite top view map image, and display it in the top view map image display area. .. From the obtained top view map image in this way, it is possible for the user to add a top view map image of the part where the measurement object WK is deficient according to the instruction of the user, and the measurement purpose and purpose. An appropriate top view map image can be obtained according to the above.
(Measurement area setting unit 264)

The measurement area setting unit 264 sets the measurement area on the observation image displayed on the display unit 400.

The height image acquisition unit 228 acquires a height image having height information based on a plurality of fringe projection images. Further, the point cloud data synthesis unit 211 synthesizes a plurality of point cloud data generated by the point cloud data generation unit 260. Here, the point cloud is also called a point cloud or the like, and has coordinates in a three-dimensional space (for example, Cartesian coordinates of XYZ). Therefore, by superimposing the point cloud data of the measurement object generated at different positions of the mounting unit on the coordinates of the common three-dimensional space by the point cloud data generation unit 211, more detailed and precise measurement can be performed. The surface shape of the object can be expressed.
(Image Inspection Department 216)

The image inspection unit 216 executes a predetermined image inspection on the image of the measurement object WK captured by the measurement unit 100. The image inspection unit 216 can include a measurement unit 216b for performing a predetermined measurement on the image to be measured. As a result, the image inspection can be executed based on the measurement result measured by the measurement unit 216b. For example, based on the result of measurement such as the length and angle of a predetermined portion of the object to be measured WK, it is possible to perform an inspection such as determination of a non-defective product or a defect. For the measurement performed by the measuring unit 216b, the contour line cut on the plane perpendicular to the screen is calculated by passing through the profile line specified on the texture image and displayed on the display unit 400 as a profile graph, or the profile graph. It is possible to extract circles and straight lines from the contour lines shown by and obtain their radii and distances.
(Evacuation position identification unit 268)

The retracted position specifying unit 268 specifies a retracted position where the measurement object WK does not collide with the support portion 700 when the rotation stage 143 is rotationally moved by the movement control unit 144. The movement control unit 144 rotates the rotation stage 143 in a state where the translation stage 141 is translated to the evacuation position specified by the evacuation position specifying unit 268.
(Collision avoidance information input unit 269)

The collision avoidance information input unit 269 acquires collision avoidance information for avoiding a situation in which a mounted measurement object collides with the movement of the mounting surface 142. Examples of the collision avoidance information include external shape information indicating the outer shape of the measurement object, position information of a corner of the measurement object, direction information indicating the moving direction of the measurement surface, and the like.
(Avoidance operation instruction unit 270)

The avoidance operation instruction unit 270 instructs the avoidance of the collision due to the movement of the mounting unit 140 based on the collision avoidance information input by the collision avoidance information input unit 269. The avoidance operation instruction unit 270 is configured to restrict the movement of the mounting unit 140, for example, to the movement control unit 144 so as to avoid an operation in which the ends of the measurement objects mounted on the mounting surface 142 collide with each other. You may.

Alternatively, the avoidance operation instruction unit 270 serves as a warning unit 215 that notifies that there is a risk of collision if the mounting unit 140 is moved in a specific direction based on the collision avoidance information input by the collision avoidance information input unit 269. May be good. The warning unit 215 causes the display unit to display collision avoidance information for avoiding a collision between the end portion of the measurement object and the support portion, for example.

By providing the collision avoidance information input unit 269 in this way, it is possible to avoid a situation in which the measurement object unexpectedly collides with a member located around or a part of the three-dimensional shape measuring device based on the collision avoidance information. It becomes possible to plan.

The collision avoidance information input unit 269 can acquire the collision avoidance information by accepting the input from the user. For example, as collision avoidance information, the user is made to input information on the outer shape of the measurement object mounted on the mounting unit 140. In this way, by inputting the collision avoidance information by the user, it is possible to prevent the situation where the measurement object interferes.

Further, the avoidance operation instruction unit 270 may be operated independently or may be linked with the detection result of the end detection unit 265. That is, at least one end of both ends of the object to be measured mounted on the mounting surface 142 in the longitudinal direction is detected by the end detection unit 265. Then, when the end portion is detected, the avoidance operation instruction unit 270 instructs the avoidance measure to avoid the situation where the end portions of the measurement target collide with each other based on the detection result. On the other hand, when the end portion is not detected by the end portion detection unit 265, an avoidance measure is instructed to avoid the situation where the end portions collide based on the collision avoidance information input by the collision avoidance information input unit 269. For example, the movement control unit 144 is instructed to move the mounting unit 140 so as to avoid a situation where the end portions of the measurement object collide, and this is prohibited for movements that may cause a collision. Restrictions such as doing. With such a configuration, the end portion of the object to be measured is automatically detected by the end portion detection unit 265, and if it can be detected, the movement control unit 144 can be controlled to automatically avoid the collision. If it cannot be detected, the movement can be controlled based on the collision avoidance information manually input by the user, so that collision avoidance can be achieved even if the end detection fails.

As described above, the CPU 210 also uses different means for realizing various functions. However, it is needless to say that the configuration is not limited to a configuration in which one member also serves a plurality of means, and it is also possible to provide a plurality of members or members that realize functions separately or separately.
(Display unit 400)

The display unit 400 displays a fringe projection image acquired by the measurement unit 100, a height image generated by the height image acquisition unit 228 based on the fringe projection image, or a texture image captured by the measurement unit 100. It is a member of. The display unit 400 is composed of, for example, an LCD panel or an organic EL (electroluminescence) panel. Furthermore, by using a touch panel for the display unit, it can also be used as an operation unit.

Further, the display unit 400 displays the observation image generated by the light receiving unit 120.
(Mounting unit 140)

In FIG. 2, two directions orthogonal to each other in the plane (referred to as “mounting surface”) on the mounting portion 140 on which the measurement object WK is mounted are defined as the X direction and the Y direction, respectively. , Y. The direction orthogonal to the mounting surface 142 of the mounting portion 140 is defined as the Z direction, and is indicated by an arrow Z. The direction of rotation about an axis parallel to the Z direction is defined as the θ direction, and is indicated by the arrow θ.

The mounting unit 140 includes a translation stage 141 and a rotation stage 143. The translation stage 141 has an X-direction moving mechanism and a Y-direction moving mechanism. The rotation stage 143 has a θ-direction rotation mechanism. The mounting portion 140 is configured by the translation stage 141 and the rotation stage 143. Further, the mounting portion 140 may include a fixing member (clamp) for fixing the measurement object WK on the mounting surface 142. Further, the mounting portion 140 may include a tilt stage having a mechanism that can rotate about an axis parallel to the mounting surface 142.

Here, as shown in FIG. 2, the light receiving unit 120 and the light receiving unit 120 are projected so that the central axes of the left and right light emitting units 110 and the central axes of the light receiving unit 120 intersect each other in the focus plane where the mounting unit 140 is most focused. The relative positional relationship between the light unit 110 and the mounting unit 140 is defined. Further, since the center of the rotation axis in the θ direction coincides with the central axis of the light receiving unit 120, the rotation axis does not deviate from the field of view when the mounting unit 140 rotates in the θ direction. It is designed to rotate in the field of view around. In this figure, the measuring unit 100 has an arrangement rotated about the X direction on the paper surface, and the optical axis of the light receiving unit 120 and the top normal line (Z direction) of the mounting unit 140 do not necessarily coincide with each other. There is no need.
(Light source unit 300)

The light source unit 300 includes a control board 310 and an illumination light source 320 for observation. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting unit 110, the light receiving unit 120, and the measurement control unit 150 based on a command from the CPU 210 of the controller 200. Note that this configuration is an example, and other configurations may be used. For example, the measurement control unit 150 may control the light projecting unit 110 and the light receiving unit 120, or the controller 200 may control the light emitting unit 110 and the light receiving unit 120, so that the control board may be omitted. Alternatively, the light source unit 300 may be provided with a power supply circuit for driving the measurement unit 100.
(Illumination light source for observation 320)

The observation illumination light source 320 includes, for example, three-color LEDs that emit red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, light of an arbitrary color can be generated from the observation illumination light source 320. The illumination light IL generated from the observation illumination light source 320 is output from the illumination light output unit 130 of the measurement unit 100 through the light guide member (light guide). In addition to LEDs, other light sources such as semiconductor lasers (LDs), halogen lights, and HIDs can be appropriately used as the observation illumination light sources. In particular, when a color image sensor is used as the image sensor, a white light source can be used as the observation illumination light source.

The illumination light IL output from the illumination light output unit 130 switches between red light, green light, and blue light in a time-divided manner to irradiate the measurement target WK. As a result, the texture images captured by each of these RGB lights can be combined to obtain a color texture image and displayed on the display unit 400.

The illumination light output unit 130 of FIG. 2 has a ring shape and is arranged above the mounting unit 140 so as to surround the light receiving unit 120. As a result, the illumination light output unit 130 irradiates the measurement object WK with illumination light in a ring shape so as not to generate a shadow.

In addition to such ring illumination, the illumination light output unit 130 can also add transmission illumination and coaxial epi-illumination. In the example of FIG. 2, a transmission illumination unit is provided on the mounting unit 140. The transmission illumination unit illuminates the measurement object WK from below the mounting unit 140. Therefore, the mounting portion 140 is provided with a transmission illumination light source, a reflector, and an illumination lens system.

The ring illumination and the transmitted illumination can be omitted as appropriate. When these are omitted, it is also possible to take a two-dimensional image by using the illumination for three-dimensional measurement, that is, the light projecting unit.

In the example of FIG. 1, the observation illumination light source 320 is not included in the main body case 101, and the observation illumination light source 320 is arranged in the light source unit 300 as an external attachment to the measurement unit 100. By doing so, it is possible to easily improve the quality of the illumination light supplied from the observation illumination light source 320. For example, since each of the RGB LEDs constituting the observation illumination light source 320 has different light distribution characteristics, when each of the RGB texture images is captured by the monochrome image pickup element 121a, the illumination color unevenness occurs in the field of view as it is. .. Therefore, a dedicated optical system that matches the light distribution characteristics of each LED is individually prepared and combined to absorb the difference in the light distribution characteristics, create uniform white illumination with no color unevenness, and then use the measuring unit 100. Can be introduced.

Further, it is possible to avoid a situation in which the heat generated by the observation illumination light source 320 affects the optical system of the measuring unit 100. That is, if there is a heat source in the vicinity of the members of the optical system, the dimensions may be out of order due to thermal expansion, and the measurement accuracy may decrease. However, by removing the observation illumination light source, which is the heat generation source, from the main body case 101, It is possible to avoid the problem caused by the heat generation of the observation illumination light source. Further, as a result, there is an advantage that a high-power light source having a large calorific value can be used as an observation illumination light source.

The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a blue LED (light emitting diode). The measurement light source 111 may be another light source such as a halogen lamp. The light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately focused by the lens 113 and then enters the pattern generation unit 112.

The pattern generator 112 is, for example, a DMD (Digital Micromirror Device). The pattern generation unit 112 may be an LCD (liquid crystal display), an LCOS (Liquid Crystal on Silicon: reflective liquid crystal element), or a mask. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted from the pattern generation unit 112 is converted into light having a diameter larger than the size of the measurement object WK by the lens 114, and then irradiated to the measurement object WK on the mounting unit 140.

The measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110A are arranged so as to be substantially parallel to the optical axis of the light receiving unit 120. Similarly, the measurement light source 111, the lens 113, and the pattern generation unit 112 of the light projecting unit 110B are arranged so as to be substantially parallel to the optical axis of the light receiving unit 120. On the other hand, the lenses 114 of the light projecting units 110A and 110B are arranged so as to be offset with respect to the measurement light source 111, the lens 113, and the pattern generation unit 112. As a result, the optical axes of the light emitting units 110A and 110B are inclined with respect to the optical axis of the light receiving unit 120, and the measurement light is emitted from both sides of the light receiving unit 120 toward the measurement object WK, respectively.

In the present embodiment, the light projecting units 110A and 110B are configured to have a constant angle of view in order to widen the irradiation range of the measurement light. The angles of view of the light projecting units 110A and 110B are determined, for example, by the dimensions of the pattern generation unit 112 and the focal length of the lens 114. When it is not necessary to widen the irradiation range of the measurement light, a telecentric optical system having an angle of view of approximately 0 degrees may be used for each of the light projecting units 110A and 110B.

The measurement light reflected above the mounting unit 140 by the measurement object WK is focused and imaged by the lens 122 of the light receiving unit 120, and is received by the image sensor 121a of the camera 121.

In the present embodiment, the light receiving unit 120 is configured to have a constant angle of view in order to widen the imaging field of view of the light receiving unit 120. In the present embodiment, the imaging field of view of the light receiving unit 120 means a region in space where imaging can be performed by the light receiving unit 120. The angle of view of the light receiving unit 120 is determined, for example, by the dimensions of the image sensor 121a and the focal length of the lens 122. If a wide field of view is not required, a telecentric optical system may be used for the light receiving unit 120. Here, the magnifications of the lenses 122 of the two light receiving units 120 provided in the measuring unit 100 are different from each other. Thereby, by selectively using the two light receiving units 120, the measurement object WK can be imaged at two different magnifications. It is preferable that the two light receiving units 120 are arranged so that the optical axes of the two light receiving units 120 are parallel to each other.

The camera 121 is, for example, a CCD (charge-coupled device) camera. The image pickup device 121a is, for example, a monochrome CCD (charge-coupled device). The image pickup device 121a may be another image pickup device such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electric signal (hereinafter, referred to as a light receiving signal) corresponding to the amount of received light is output to the control board 150.

Unlike a color CCD, a monochrome CCD does not need to be provided with a pixel that receives light having a red wavelength, a pixel that receives light having a green wavelength, and a pixel that receives light having a blue wavelength. Here, when a specific wavelength such as a blue wavelength is adopted as the measurement light, the color CCD can use only the pixels that receive the light of the specific wavelength for the measurement, but the monochrome CCD has no such restriction. Therefore, the measurement resolution of the monochrome CCD is higher than the resolution of the color CCD. Further, unlike a color CCD, a monochrome CCD does not need to be provided with a color filter for each pixel. Therefore, the sensitivity of the monochrome CCD is higher than that of the color CCD. Therefore, the point cloud data described later can be obtained with high accuracy. For these reasons, the camera 121 in this embodiment is provided with a monochrome CCD.

In the present embodiment, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement object WK in a time-divided manner. According to this configuration, a color image of the measurement object WK can be captured by the light receiving unit 120 using the monochrome CCD.

On the other hand, if the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement target WK with red wavelength light, green wavelength light, and blue wavelength light in a time-divided manner, and irradiates the measurement target WK with white light. Therefore, the configuration of the illumination light source 320 can be simplified.

FIG. 4 shows a three-dimensional shape measuring system 1000 including the three-dimensional shape measuring device 500 according to the first embodiment. The three-dimensional shape measuring system 1000 shown in this figure inputs a control PC 1, a monitor 2, a keyboard 3, a mouse, etc. to the three-dimensional shape measuring device 500 composed of a three-dimensional shape measuring device main body 500A and a controller 200. The device 4 is connected. A three-dimensional shape measurement program for performing three-dimensional shape measurement using the three-dimensional shape measuring device 500 is installed in the control PC 1. The user can instruct the setting, imaging, measurement, and the like of the three-dimensional shape measuring device 500 by using the three-dimensional shape measuring program.

In the example of FIG. 4, the controller 200 is configured separately from the three-dimensional shape measuring device main body 500A, but the controller may be integrated on the three-dimensional shape measuring device main body side. Alternatively, the function of the controller can be integrated with the control PC.

The three-dimensional shape measuring device 500 includes a measuring unit 100, a support unit 700, a pedestal unit 600, and a light-shielding cover 102. The measuring unit 100, the support unit 700, the pedestal unit 600, and the light-shielding cover 102 are configured as a detachable unit type as shown in the exploded perspective view of FIG. This is advantageous for maintainability and portability of each member. The light-shielding cover 102 is extended in front of the light receiving unit 120 and the light emitting unit 110 to cover them, and is held above the mounting surface 142 in a posture separated from the mounting surface 142. The upper measurement area is shielded from outside light. The light-shielding cover 102 is removable according to the object to be measured, and the basic minimum configuration in measurement is a combination of the measuring unit 100 and the pedestal unit 600.

The pedestal portion 600 includes a mounting portion 140. The mounting unit 140 includes a rotating stage 143 that rotates the mounting surface 142 on which the object to be measured is mounted as described above, and a translation stage 141 that translates the mounting surface 142. Here, the mounting portion 140 is composed of an XY θ stage in which the XY stage, which is the translation stage 141, is mounted on the upper surface of the θ stage, which is the rotation stage 143.

The pedestal portion 600 holds the measuring portion 100 in a vertical posture via the support portion 700. Further, the measuring unit 100 fixes the light emitting unit 110 and the light receiving unit 120 in a posture in which the optical axis is inclined with respect to the mounting surface 142. Therefore, the light projecting unit 110 includes a fixing unit 125 for fixing the light projecting unit 110 and the light receiving unit 120. As shown in FIG. 7, which will be described later, the fixing portion 125 is supported by the support column portion 702 in a posture separated from the pedestal portion 600. Further, the light projecting unit 110 and the light receiving unit 120 are fixed in a posture in which the optical axis is inclined with respect to the mounting surface 142. As a result, a measurement region by the measurement light is formed above the mounting portion 140. Further, the optical systems such as the light projecting unit 110 and the light receiving unit 120 are held in a posture of looking down at the measurement region obliquely downward.

The support portion 700 connects the pedestal portion 600 and the measuring portion 100. The measuring unit 100 is held so as to be located above the mounting unit 140 via the support unit 700. The measuring unit 100 includes a light emitting unit 110 and a light receiving unit 120 as an observation optical system as described above. The measuring unit 100 is held in a posture of looking down from an oblique direction rather than vertically above the mounting surface 142 of the mounting unit 140 provided on the pedestal unit 600. With such an arrangement, there is an advantage that the shapes of the upper surface and the side surface of the object to be measured can be easily obtained by one measurement. In particular, in order to acquire information in the height direction, information on the side surface of the measurement object having a height difference is useful. On the other hand, it is difficult to grasp the overall shape of the object to be measured only from the side surface. Therefore, the measuring unit is in a posture that allows the object to be measured to be captured from an obliquely upward viewpoint so that both the upper surface, which makes it easy to grasp the overall outer shape, and the side surface, which makes it easy to obtain height information, can be obtained at once. It is beneficial to hold the 100 in an inclined position with respect to the mounting surface 142. In the example shown in the side view of FIG. 6, the optical axes of the light projecting unit 110 and the light receiving unit 120 of the measuring unit 100 are held in an inclined posture so as to form an angle of about 45 ° with respect to the mounting surface 142 of the XYθ stage. doing. In this way, the measuring unit 100 is connected to the pedestal unit 600 by the support unit 700 in a state where the bird's-eye view angle of 45 ° is kept constant. As a result, the measuring unit 100 can always see the mounting surface 142 at a constant angle and a constant position, and the positional relationship between the three axes of XYθ, which are the driving axes of the mounting surface 142, and the observation optical system is kept constant. Dripping.

The light receiving unit 120 may include a plurality of optical systems having different magnifications. An example of this is shown in FIG. In this example, the light receiving unit 120 includes a first optical system having a first magnification and a second optical system having a second magnification higher than the first magnification. As described above, by providing the optical systems having different magnifications, the field of view can be switched according to the size of the measurement object WK placed on the mounting surface 142. In this example, the light receiving element includes a first light receiving element 121b optically coupled to the first optical system and a second light receiving element 121c optically coupled to the second optical system. The first optical system and the first light receiving element 121b may be collectively referred to as the first camera 121B, and the second optical system and the second light receiving element 121c may be collectively referred to as the second camera 121C. By preparing a plurality of light receiving elements in this way and configuring each optical system to take an image with an individual light receiving element, it is possible to perform the image receiving processing received by each optical system in parallel, and to speed up the processing. Simplification of optical coupling is realized. However, a common light receiving element may be optically connected to a plurality of optical systems.

The first optical system and the second optical system are arranged so that their optical axes are parallel to each other. The first optical axis LA1 of the first optical system and the second optical axis LA2 of the second optical system are inclined at about 45 ° with respect to the mounting surface 142, respectively. Here, the high-magnification second optical system, that is, the second camera 121C is arranged vertically side by side in the fixed portion 125 so as to be below the first camera 121B which is the first optical system. With such an arrangement, the movement of the viewpoint when switching from the first optical system to the second optical system becomes the front side of the measurement object WK, and there is an advantage that the change in the visual field can be relatively easily grasped by the user. Is obtained. More precisely, in the first optical system having a wide field of view (low magnification), even if the measurement object WK placed on the mounting surface is large, the second optical system having a narrow field of view (high magnification) In the above case, even if the measurement object WK placed on the mounting surface is small, it is possible to capture the entire measurement object WK when the entire circumference is rotated.
(XYθ stage)

Next, a configuration example of the pedestal portion 600 will be described with reference to FIGS. 7 to 9. In the example of FIG. 7, in the XYθ stage, the XY stage, which is the translational stage 141, is placed on the θ stage, which is the rotation stage 143 fixed on the pedestal portion 600. The rotation axis of the rotation stage 143 is arranged so as to intersect the optical axes of the first optical system and the second optical system at an angle of 45 °, respectively. As shown in the plan views of FIGS. 8 and 9, the translational stage 141 mounted on the rotary stage 143 is configured to rotate together with the XY drive shaft as the rotary stage 143 rotates. By configuring the translational stage 141 on the rotating stage 143 in this way, the optical axis of the measuring unit 100 and the rotating shaft of the rotating stage 143 maintain a mechanically fastened constant relationship. It becomes easy. Further, if necessary, the stage drive axis in the coordinate system in the observation space of the measurement unit 100 can be grasped by calibrating the moving direction of the translational stage 141 and the rotation direction of the stage rotation axis.

Further, as shown in FIG. 8, the reference position for movement of the translational stage 141 is, for example, a position that serves as a reference for translation. Typically, it is the origin D (0,0) on the XY plane. Further, the point C shown in FIG. 9 is the center of the θ rotation, and in the case of FIG. 9, it coincides with the rotation axis of the rotation stage 143. By arranging the translation stage 141 above the rotation stage 143 so that the points C and D coincide with each other, it becomes easy to control the movement of the translation stage 141.

Here, a configuration example of a rotation mechanism that rotates the rotation stage 143 is shown in FIG. 10, and a configuration example of a movement mechanism that moves the translational stage 141 is shown in FIG. 11, respectively. The mounting unit 140 shown in these examples shows a configuration in which the translational stage 141 is mounted on the rotary stage 143 as described above.

As shown in FIG. 10, the rotation mechanism of the rotation stage 143 includes a rotation drive guide 800, a rotation pulse indicating unit 810, an actual rotation amount reading unit 820, a rotation drive motor 830, a reduction mechanism 840, and an origin sensor 850 in the pedestal portion 600. , A translation stage fastening unit 860 and a movement control unit 144 are provided. Since the rotation drive guide 800 is directly fastened to the pedestal portion 600, the rotation axis is mechanically uniquely determined. The movement control unit 144 sends a control signal to the rotation pulse instruction unit 810. The rotation pulse indicating unit 810 receives a control signal from the movement control unit 144 to generate a rotation pulse, and rotates the rotation drive motor 830 by the amount of the rotation pulse. The rotary drive motor 830 transmits power to the rotary drive guide 800 via the reduction mechanism 840, and generates a rotary motion of the rotary stage 143 through the rotary drive guide 800. In the example of FIG. 10, the speed reduction mechanism 840 performs deceleration and power transmission by a timing belt. Further, the rotation drive amount of the rotation stage 143 is detected by the actual rotation amount reading unit 820. By comparing the estimated rotation amount converted from the rotation pulse amount from the rotation pulse indicating unit 810 with the actual rotation amount detected by the actual rotation amount reading unit 820, it is determined whether the control state of the rotation stage 143 is good or bad. Is possible. For example, it is possible to detect an unexpected rotation stop state due to a collision or the like. The origin sensor 850 also determines the initial coordinates of the rotation stage 143. As a result, the initial coordinates of the rotation stage 143 that can rotate infinitely can be grasped.

Further, the rotary stage 143 is fixed to the translation stage 141 via the translation stage fastening portion 860. The rotational movement of the rotary stage 143 through the rotary drive guide 800 is also transmitted to the translational stage 141, and the rotational posture of the mounting surface 142 on the pedestal portion 600 can be changed.

As shown in FIG. 11, the drive mechanism of the translation stage 141 includes a linear motion guide 900, a linear motion power transmission unit 910, a movement pulse indicator unit 920, an actual movement amount reading unit 930, and a translation drive motor 940 in the pedestal unit 600. It includes an infinite rotation connector 950 and a movement control unit 144. In this way, the infinite rotation connector 950 enables the control signal or drive power sent from the fixed side of the rotation stage 143 to be transmitted to the drive side of the rotation stage 143, that is, the fixed side of the translation stage 141, and the rotation stage 143. Infinite rotation is realized. If the harness is not provided with an infinite rotation connector, the rotation stroke is finite because the drive is accompanied by a twist of the harness. The translational drive motor 940 is rotated by the amount of movement by the movement pulse indicating unit 920 from the movement control unit 144 arranged on the fixed side of the rotation stage 143 via the infinite rotation connector 950, and the linear power transmission unit 910 and the direct drive motor 940 are rotated. The translational stage 141 is driven through the dynamic guide 900. The movement amount of the translation stage 141 is detected by the actual movement amount reading unit 930. By comparing the estimated movement amount converted from the movement pulse from the movement pulse indicating unit 920 and the actual movement amount detected by the actual movement amount reading unit 930, it is possible to judge whether the control state of the translation stage 141 is good or bad. Become.

Further, in the above example, a configuration example of the mounting portion 140 in which the translational stage 141 is arranged on the upper surface of the rotating stage 143 has been described. With such an arrangement, the rotary stage 143 can be rotatably fixed to the pedestal portion, and the translational stage 141 can be rotated by the rotary stage 143 together with the measurement object on the upper surface thereof. By rotating the measurement object and the translation stage 141 together in this way, the positional relationship between the measurement object and the translation stage 141 can be maintained constant as long as the placement posture of the measurement object is not changed. As a result, the three-dimensional measurement from a plurality of different viewpoints obtained by rotating the rotation stage 143 is always performed within the range of the same measurement object, and the same points on the measurement object are averaged with data from the plurality of viewpoints. It is possible to perform stable measurement over the entire object to be measured, and the measurement accuracy is improved.

However, the present invention does not limit the mounting portion 140 to such a configuration, and for example, as shown in the three-dimensional shape measuring device 500B according to the modified example shown in FIG. 12, the rotating stage 143 is arranged on the upper surface of the translation stage 141. It may be configured. Even with such an arrangement of the mounting portion 140, it is possible to acquire omnidirectional full 3D data of the measurement object that also protrudes from the field of view by the same measurement and superposition.
(Top view map image)

The three-dimensional shape measuring device according to the embodiment has a top view map image generation function. The top view map image is an image seen from above, which corresponds to a plan view of a measurement object placed on the mounting portion 140. In particular, in a three-dimensional shape measuring device for observing a measurement object from diagonally above instead of directly above as shown in FIG. 6, it may not be easy to visually grasp the outer shape of the measurement object. Therefore, by preparing a plan view image of the measurement object as a top view map image, the entire image of the measurement object is shown to the user, and which part is currently being observed from an oblique direction is relative. It is possible to easily grasp the positional relationship.

The viewpoint of the top view map image is basically in a direction orthogonal to the mounting surface 142. However, the image may be viewed from a slightly inclined angle. For example, when the vertical direction of the mounting surface 142 is 0 °, the image may be viewed from a direction inclined by about ± 5 °. As described above, even an image slightly tilted from the vertical direction is also referred to as a top view map image in the present specification. Further, since the top view map image is intended to be used for navigation purposes such as grasping the measurement position of the measurement object, it does not have to be an optical image captured by the image sensor, and the measurement object is simulated. The image shown is sufficient. Further, since the measurement in the three-dimensional shape measuring device is performed on a separately generated three-dimensional image or the like and not on the top view map image, high accuracy is not required for the top view map image itself.

The non-contact type three-dimensional shape measuring device as shown in FIG. 6 from an obliquely upward view is considered to be used for measuring not only the upper surface of the object to be measured but also the three-dimensional shape including the outer peripheral side surface. In this configuration, the object to be measured is seen from diagonally above (45 ° in FIG. 6) so that the upper surface and the side surface of the object to be measured are included in the observation field of view. In such a three-dimensional measurement, in order to acquire the outer shape of the object to be measured, the rotation stage 143 may be rotated to allow the entire circumference of the object to be measured. It is also conceivable to employ a translational stage 141 so that a larger object to be measured can be measured. On the other hand, there is also a demand for measuring a larger object to be measured. In such a case, if a long object to be measured WK1 is placed and the mounting portion 140 is rotated as shown in FIG. 13, a situation may occur in which the mounting portion 140 collides with the support column portion 702 or the like of the three-dimensional shape measuring device. In this figure, a collision occurs when the amount of protrusion of the measurement object WK1 and the distance DT1 between the support columns 702 are larger than the distance DT2 between the outermost circumference of the mounting surface 142 and the support column 702.
(Outer shape detection function of the object to be measured)

Therefore, the three-dimensional shape measuring device according to the present embodiment has an outer shape detecting function for detecting the outer shape of the object to be measured. The outer shape of the measurement object is detected based on the image information obtained by acquiring the image of the measurement object mounted on the mounting surface 142 by using the imaging optical system included in the measurement unit 100. The outer shape of the object to be measured is detected by, for example, the end detection unit 265 of the CPU 210. As the external shape detection algorithm, a known method such as edge detection can be appropriately used. As described above, in the configuration in which the imaging optical system has two light receiving elements of low magnification and high magnification, even when the high magnification light receiving element is selected for observation, the low magnification light receiving element is used. By using the obtained image, it is possible to obtain a wider range of external shape information with respect to the object to be measured. As described above, even when the measurement mode of the three-dimensional shape measuring device has the low magnification measurement mode and the high magnification measurement mode, the imaging for grasping the outer shape of the measurement object depends on the selected measurement mode. It is preferable that the light receiving element has a low magnification.

FIG. 14 shows the acquired observation image OI1 of the measurement object in the oblique bird's-eye view, and FIG. 15 shows the observation image OI2 in which the measurable range MA is superimposed. Generally, a low-magnification lens that performs wide-area measurement is often a wide-angle lens having an angle of view, and the field of view changes with depth. Due to the structure of the wide-angle optical system, the image pickup optical system that looks down at an angle with respect to the mounting surface 142 is in a perspective state, and the contour line does not necessarily accurately describe the outer shape of the object to be measured. There was a problem of not showing. This is because the magnification is different toward the depth direction and the pixel length is different.

Further, in the bird's-eye view image viewed from diagonally above, in addition to the lack of external shape information on the back side of the measurement object, the contour line on the front side of the measurement object included in the field of view is not necessarily on the mounting surface 142. It also includes the problem that the "end" in the state of being placed on the surface cannot be accurately expressed. Here, the problems of edge detection from a wide-angle bird's-eye view are shown in FIGS. 16 to 17. As shown in FIG. 16, if the bottom surface of the measurement object WK2 is in a mounted state in which it accurately touches the mounting surface 142, the contour line of the measurement object WK2 (indicated by a black circle in FIG. 16) is It matches the outer shape of the object to be measured WK2. However, as shown in FIG. 17, when the measurement object WK3 is placed on the mounting surface 142 in an inclined posture, the contour line (indicated by a white circle in FIG. 17) visible on the image is the measurement target. It does not match the end of the object WK3. Further, even in the case of FIG. 16, if the protruding portion exists on the upper side, the contour line and the end portion do not match.

Even if the measurement range due to the movement of the mounting surface 142 is drawn in such a state, the user cannot recognize the end portion, which leads to a problem that the accuracy of the range setting cannot be recognized. For example, in the observation image OI2 in which the measurable range MA is overlapped as shown in FIG. 15, not only is it uncertain whether the back side is included in the measurement range, but also the measurement object is tilted or the installation position is in the back. It turns out that it is difficult to determine whether they are out of alignment.

Therefore, the three-dimensional shape measuring device according to the present embodiment changes the viewpoint and generates a plan view upper bird's-eye view image viewed from the upper surface in response to the difficulty of detecting the outer shape of the measurement object. This makes it possible to show the measurement range to the user in an easy-to-understand manner. In addition, by grasping the posture in which the object to be measured is placed on the mounting surface 142 and the outer shape of the object to be measured, it is possible to unintentionally move another object when moving the object to be measured. Advantages such as movement control in consideration of collision prevention can be obtained so as not to collide with a part.
(Collision automatic detection function)

Next, in order to specify the evacuation position where the object to be measured does not collide with the support portion 700 in the evacuation position specifying unit 268, it is first necessary to detect that the object to be measured may collide with the support unit 700. Therefore, the three-dimensional shape measuring device according to the present embodiment has a collision automatic detection function that automatically detects a situation in which a measurement object collides with a support column 702 or the like. Specifically, the size of the object to be measured mounted on the mounting unit 140 is detected by the end detection unit 265 at the start of measurement or immediately before the collision behavior, and is autonomously detected by the regulation judgment unit 266. It is configured to regulate the rotation and parallel movement of the mounting portion 140.

Here, as shown in FIG. 13, when the measurement object WK1 is placed in a posture protruding from the mounting surface 142, if the rotation stage 143 is rotated as it is, there is a risk of collision with the support column 702 or the like. is there. Here, a collision occurs when the protrusion amount of the measurement object WK1 and the distance DT1 between the support columns 702 are larger than the distance DT2 between the outermost circumference of the mounting surface 142 and the support column 702. On the other hand, when the distance DT2 is larger than the distance DT1, no collision occurs. Therefore, if DT2> DT1, rotation is allowed. However, even in this case, a collision may occur by moving the translational stage 141. For example, in the example of FIG. 1310, when the translational stage 141 is moved to the front side (downward in the figure), the distance DT2 between the outermost circumference of the mounting surface 142 and the support column 702 becomes shorter, and as a result, DT2> DT1 at some point. The relationship is broken, and when it is rotated, a collision occurs. As described above, in the configuration in which the rotation stage 143 and the translation stage 141 coexist, whether or not the rotation stage 143 is rotated to cause a collision depends on the position of the translation stage 141. Therefore, when rotating the rotation stage 143, it is preferable to return the translation stage 141 to a predetermined reference position and then rotate the stage. As a result, it is possible to avoid a state in which the radius of gyration of the mounting portion 140 on which the measurement object is placed becomes large, and to avoid a situation in which the measurement object unintentionally collides with another member. The reference position is, for example, the origin position of the XY plane on which the translational stage 141 is moved. Alternatively, a specific coordinate position may be used as a reference position. Further, the rotation stage 143 and the translation stage 141 are not moved at the same time, and when one of the stages is moved, the other stage is stopped. This facilitates collision detection and collision prevention and enhances safety.

Hereinafter, a method of detecting in advance a situation in which the end of the object to be measured collides with the three-dimensional shape measuring device by the end detection unit 265 will be described. As a pattern in which a collision may occur during the operation of the XYθ stage including the translational stage 141 and the rotation stage 143 described above, a collision during linear motion by the translational stage 141 and a collision during rotation movement by the rotation stage 143 can be mentioned. in this case,
(1) When it occurs during the movement of the translational stage 141 or the rotation of the rotation stage 143 during operations such as shooting and measurement.
(2) When the mounting portion 140 occurs during movement when returning to the reference position
Can be mentioned. Here, with respect to (1) and (2), procedures for automatically detecting a collision in advance will be described. Regarding (1), it is assumed that the drive shafts of the translation stage 141 and the rotation stage 143 have already completed the process of returning to the reference position, and the current coordinate position can be detected on the three-dimensional shape measuring device side. It is said. That is, in (1), the interference between the outer peripheral edge of the detail and the support column 702 is not considered. On the other hand, with respect to (2), it is assumed that the state immediately after the start of the three-dimensional shape measuring device is started, and the state where the current position and the posture of the mounting portion 140 are unknown is returned to the reference position.
(Collision pre-detection function during operation)

By moving the mounting portion 140 while using the three-dimensional shape measuring device, it is conceivable that the measurement object mounted on the upper surface of the mounting portion 140 interferes with surrounding objects. For example, other measuring devices and stands placed around the user, or members of a three-dimensional shape measuring device existing around the mounting table can be mentioned. Here, as shown in FIG. 8 and the like, attention is paid to the support portion 702 that constitutes the support portion 700 that connects the pedestal portion 600 provided with the mounting portion 140 and the measurement portion 100, and XYθ on the pedestal portion 600. Consider a control that automatically avoids a situation in which the object to be measured placed on the stage collides with the support column 702 due to the movement of the stage. The position and size of the support column 702, that is, the contour information, is held in advance on the three-dimensional shape measuring device side.

For the collision of the object to be measured with the support column 702, some patterns shown in FIGS. 18A to 18D are assumed. 18A and 18B show the translation stage 141 being translated toward the front side (downward in the figure) and the measurement object WK4 colliding with the support column 702. FIGS. 18C and 18D show the translation stage 141 in the left-right direction. The state in which the object to be measured WK5 collides with the support column 702 is shown. In either case, the measurement objects WK4 and WK5 protruding from the mounting surface 142 collide with the support column 702. Therefore, in the present embodiment, the contour of the end portion of the object to be measured is detected by the end portion detection unit 265 during or before the operation, and the collision is detected in advance. For example, measurement is performed from a position designated by the user to be measured from a position where safe movement is possible, and the end detection unit 265 detects the end of the object to be measured. Then, from the detected end, the range where safer movement is possible is determined and added. Measurements are performed at all positions where safe movement is determined in this way.

Here, when performing a wide range measurement of the measurement target, the end detection unit 265 detects the end of the measurement target, and based on this, the regulation determination unit 266 regulates the mounting unit 140 so as to avoid a collision. A specific procedure for performing the measurement while performing the measurement will be described with reference to the flowchart of FIG. In this example, as a premise, when the object to be measured is placed on the mounting surface, the support column and the object to be measured may be in contact with each other, but no interference (collision) such as digging into the object has occurred. It is assumed that the position (θ angle, XY position) at which the object to be measured is to be measured has been input in advance by the user.

First, in step S1901, the object to be measured is placed on the stage. Next, in step S1902, the measurement conditions are measured. Here, the user specifies the brightness, posture, measurement range, and the like. Then, in step S1903, the measurement execution is instructed.

Next, in step S1904, it is determined whether or not there is an unmeasured and safely movable measurement position. This determination is performed by the three-dimensional shape measuring device side, for example, the regulation determination unit 266 or the movement control unit 144. If there is, the process proceeds to step S1905, the measurement position is moved to the safely movable measurement position, and the three-dimensional shape measurement is performed in step S1906. Further, in step S1907, the edge of the object to be measured is detected from the measured measurement data, and a position that can be safely moved is added. Then, the process returns to step S1904 and the above process is repeated.

On the other hand, if it is determined in step S1904 that there is no measurement position that can be safely moved, the process proceeds to step S1908, and the automatically arranged measurement data is preview-displayed on the display unit 400. Then, in step S1909, the user is made to determine whether or not the measurement data can be acquired correctly. If it has not been acquired correctly, the process returns to step S1902 and the above process is repeated. On the other hand, if it is determined that the data can be acquired correctly, the process proceeds to step S1910, and the measurement data are combined. This combination is performed, for example, by the point cloud data synthesis unit 211. Further, in step S1911, measurement and analysis using the analysis function are executed, and the measurement is completed in step S1912. In this way, while performing wide-range measurement, the protrusion of the object to be measured can be automatically detected, and measurement and analysis can be safely performed while avoiding collision.

Next, a detailed example of a procedure in which the end detection unit 265 detects the end of the object to be measured during operation and the regulation determination unit 266 regulates the moving direction of the mounting surface 142 based on the detection result is shown in FIG. 20A to 20H will be described. Here, the point cloud data synthesizing unit 211 arranges the measurement object WK6 vertically placed on the mounting surface 142 at the reference position into four on the front side, left and right, and on the back side, left and right. An example will be described in which the measurement area is divided and the rotation stage 143 is rotated by 180 ° for measurement. First, as shown in FIG. 20A, the end detection unit 265 detects the end of the measurement object WK6 from the observation field of view obtained with the translation stage 141 in the reference position. The contour of the detected end portion, that is, the object to be measured WK6 is shown by a thick line in FIGS. 20A to 20H. Then, from the obtained contour, the regulation determination unit 266 determines the moving direction of the mounting surface 142. The determination of the moving direction includes the identification of the movable direction, the identification of the immovable direction, the identification of the direction in which the determination of whether or not the movement is possible is unknown, or the determination of all directions. In the example of FIG. 20A, as a result of the end detection by the end detection unit 265, the left and right and front contours of the measurement object WK6 are obtained, and the back contour is not obtained. From this detection result, it can be determined by the regulated portion that the left and right sides of the object to be measured WK6 are contained in the mounting surface 142, in other words, they do not protrude from the mounting surface 142. That is, since the measurement object WK6 does not extend in the left-right direction of the mounting surface 142, the situation shown in FIGS. 18C and 18D cannot occur, and the measurement object WK6 is moved in the XY direction. It is determined that there is no collision, that is, it is possible to move the translation stage 141 in the left-right direction. Therefore, the regulated unit allows the translation stage 141 to move in the left-right direction, and the movement control unit 144 moves the translation stage 141 in the lateral direction accordingly. Here, as shown in FIG. 20B, the translational stage 141 is first moved to the left to perform measurement (here, acquisition of single-field measurement data). As a result, single-field measurement data on the front right side of the measurement object WK6 can be obtained. Next, as shown in FIG. 20C, the translational stage 141 is moved to the right and the measurement is performed in the same manner, and the single-field measurement data on the front left side of the measurement object WK6 is obtained. In this example, the procedure for moving the translation stage 141 to the left and then to the right has been described, but the order is changed so that the translation stage 141 is first moved to the right and then moved to the left. Needless to say, it may be.

Since the left and right single-field measurement data on the front side of the measurement object WK6 have been obtained as described above, the left and right single-field measurement data on the back side are next acquired. Here, if the translational stage 141 is to be moved to the front side (downward in the figure) as shown in FIG. 20D so that the back side is included in the observation field of view, the front side of the measurement object WK6 is moved to the support column 702. The Regulatory Judgment Department 266 does not allow such movements as it is known to collide. Therefore, the movement of the prohibited translational stage 141 is skipped, and instead, the rotation stage 143 is rotated as shown in FIG. 20E. By rotating the rotation stage 143 by 180 °, the back side, that is, the front side of the rotated measurement object WK6 is included in the visual field range. Therefore, the end detection unit 265 performs end detection to perform the contour of the front side (FIG. The upper contour) is detected at 20A. In the posture of FIG. 20E, the upper side of the object to be measured WK6 is out of the visual field range, but since the contour information of this portion has already been obtained in the measurement of FIG. 20A and the like, the obtained contour information can be combined. At this point, all the contours of the measurement object WK6 in the plan view can be obtained. In this state, from the detection result, that is, the contour information, the regulation determination unit 266 can determine that the translation stage 141 can be moved left and right from the position shown in FIG. 20E. Therefore, the translation stage 141 is similarly moved to the left as shown in FIG. 20F. Move in the direction to obtain the single-field measurement data on the front right side of the measurement object WK6 (the back left side in the posture of FIG. 20A), and move the translation stage 141 to the right as shown in FIG. 20G to measure the measurement object WK6. It is possible to obtain single-field measurement data on the front left side (the back right side in the posture of FIG. 20A). Since the contour on the front side of the measurement object WK6 rotated at the position of FIG. 20E (the contour on the upper side in FIG. 20A) is obtained, the translational stage 141 is similarly moved to the front side (as shown in FIG. 20H). When trying to move the object WK6 downward (in FIG. 20H), it is found that the front side of the object to be measured WK6 collides with the support column 702. Therefore, the regulation determination unit 266 permits the translation stage 141 to move in such a direction. Do not skip. In this way, based on the contour information of the vertically long measurement object WK6, it is possible to safely perform the measurement while restricting the moving direction of the mounting surface 142 so as to avoid a collision.

In the above example, after moving the translation stage 141 left and right, the rotation stage 143 is rotated 180 ° and the translation stage 141 is similarly moved left and right, and the procedure for sequentially synthesizing the single field measurement data has been described. However, the present invention does not limit the rotation angle of the rotation stage 143 to 180 °, but can set it to any angle. However, the finer the angle, the more detailed the obtained data, but the longer the measurement time, so the appropriate rotation angle is set according to the required accuracy and processing time. In addition, as described above, the collision prevention function regulates rotational movement and parallel movement while performing measurements with enhanced safety. In addition, it is desirable to efficiently take an image with a small number of measurements according to the shape of the object to be measured.

Next, as another example of end detection, a horizontally long measurement object is divided into four measurement areas, back, left, right, and front, and the rotation stage 143 is rotated by 90 ° for measurement. , 21A to 21P will be described. Here, the point cloud data synthesizing unit 211 arranges the measurement object WK7 horizontally placed on the mounting surface 142 at the reference position into four on the front side, left and right, and on the back side, left and right. An example will be described in which the measurement area is divided and the rotation stage 143 is rotated by 90 ° for measurement. First, as shown in FIG. 21A, from the observation field of view obtained by the translational stage 141 at the reference position, the end detection unit 265 is a part of the front side of the measurement object WK7 (the lower center shown by the thick line in FIG. 21A). ) Detect the contour. In this state, since the portion extending from the measurement object WK7 to the support column 702 side is not included, the regulation determination unit 266 does not collide with the support column 702 even if the translation stage 141 is moved left and right. Judged. Therefore, the regulated portion allows the translational stage 141 to move in the left-right direction. According to this, the translation stage 141 is moved left and right. Here, first, as shown in FIG. 21B, the movement control unit 144 moves the translation stage 141 to the left, and acquires the single-field measurement data on the front right side of the measurement object WK7. As a result, contour information from the front side to the right side surface of the measurement target WK7 can be obtained, so that the regulation determination unit 266 can determine that the rotation stage 143 can be rotated 90 ° or more clockwise. Next, the translational stage 141 is moved to the right to acquire the single-field measurement data on the front left side of the measurement object WK7. As a result, contour information from the front side to the left side surface of the measurement object WK7 can be obtained, so that the regulation determination unit 266 can determine that the rotation stage 143 can be rotated by 90 ° or more counterclockwise. In addition, the contour of the lower half of the object to be measured WK7 is found together with the contour information obtained in FIG. 21B.

Next, the rotation stage 143 is rotated by 180 °. Here, first, as shown in FIG. 21D, the translational stage 141 is once returned to the reference position (for example, the origin or the initial position of the XY stage), and then the rotation stage 143 is rotated 90 ° clockwise as shown in FIG. 21E. Let me. In this way, instead of rotating the rotation stage 143 directly from the state shown in FIG. 21C, the translational stage 141 is once returned to the reference position and then rotated, so that the radius of gyration can be kept small, so that there is a risk of collision. Can be reduced. Then, in the observation field of FIG. 21E, the single field of view measurement data is acquired, and the contour information of the middle portion on the right side of the measurement object WK7 is acquired. In this state, although the upper right and lower left contours of the measurement object WK7 have not yet been obtained, the regulation determination unit 266 can determine that the translation stage 141 can be translated left and right. Therefore, similarly, the movement control unit 144 is instructed to move the translation stage 141 left and right.

Further, since the contour of the lower part of the object to be measured WK7 has already been obtained and the amount of protrusion from the mounting surface 142 is known, the translational stage 141 can be moved toward the front side (downward in FIG. 21E). The amount can also be calculated by the regulation determination unit 266. Specifically, since it is found that the translation stage 141 cannot be moved beyond the position shown in FIG. 21H, the translation stage 141 is moved to the front side and further to the left within that limit. As a result, as shown in FIG. 21F, the upper right contour of the measurement object WK7 is obtained. Further, as shown in FIG. 21G, the translation stage 141 is moved to the right. No additional contour information is available at this position. Further, as described above, since the translational stage 141 cannot be moved to the front side as in FIG. 21H, this movement is skipped and the rotation stage 143 is rotated clockwise as shown in FIG. 21I.

In the posture of FIG. 21I, since the left and right contours of the measurement object WK7 are generally known except for a part on the upper left, it can be determined that the translation stage 141 can be moved left and right, and thus the translation stage 141 is moved left and right. .. Further, in this posture, the contour of the front side (lower side in FIG. 21I) of the measurement object WK7 has already been obtained, so as shown in FIG. 21L, the amount of movement that allows the translation stage 141 to move toward the front side is calculated. it can. According to this, while slightly moving the translation stage 141 toward you, first move it to the left as shown in FIG. 21J. No additional contour information can be obtained at this position. Next, as shown in FIG. 21K, the translation stage 141 is moved to the right side to acquire single-field measurement data. As a result, the upper left contour of the measurement object WK7 is obtained, and all the contours are acquired, so that the movable range and direction of the mounting surface 142 are determined. As described above, since the translational stage 141 cannot be moved to the front side as shown in FIG. 21L, this movement is skipped and the rotation stage 143 is further rotated 90 ° clockwise as shown in FIG. 21M. As described above, with the translational stage 141 returned to the reference position, the rotary stage 143 is rotated to take the posture shown in FIG. 21M.

At this position, the single-field measurement data is measured in the same manner, and the translation stage 141 is further moved left and right to measure the single-field measurement data in the same manner. Here, as shown in FIG. 21N, the translation stage 141 is moved to the left, then the translation stage 141 is moved to the right as shown in FIG. 21O, and finally the translation stage 141 is returned to the reference position to end the process. In this way, a larger number of single-field measurement data can be synthesized in 90 ° increments, and detailed measurement becomes possible.

As described above, whether or not the translational stage 141 can be moved or not, and the rotation stage 143 can be rotationally moved by the end of the measurement object acquired by the data measured by moving the translational stage 141 in the back direction. Whether or not it can be determined by the regulatory determination unit 266. Here, the determination of whether or not the translational stage 141 can be moved will be described with reference to FIGS. 22A to 24D. First, as shown in the schematic plan views of FIGS. 22A to 22C, whether or not the translational stage 141 can be moved toward the front is determined from the front end of the object to be measured. That is, in FIGS. 22A to 22C, the lower contour of the object to be measured is allowed to move within a range where it does not contact the support column 702. For example, as shown in FIG. 22A, when the lower part of the measurement object WK8 is contained in the mounting surface 142, the movement of the translation stage 141 is not restricted. That is, the translational stage 141 has a distance D1 between the position where the mounting surface 142 is closest to the support column 702 side (lower end in FIG. 22A) and the support column 702, or a portion considering a margin thereof, or shorter than this. It is possible to move to the front side by a distance restricted by the movement mechanism of the translation stage 141. In the figure, for the sake of explanation, the margin is not considered, and the amount of movement that allows the translation stage 141 to move toward the front side without the object to be measured is set to D0.

On the other hand, as shown in FIG. 22B, when the portion partially protrudes from the mounting surface 142, the portion of the protruding portion closest to the support portion 702 from the movement amount D0 so as not to come into contact with the support portion 702. The amount of movement toward the front side of the normal translation stage 141 is limited by the amount obtained by subtracting the sudden output D2 and the margin. Further, as shown in FIG. 22C, when the protrusion amount of the end portion of the measurement object WK9 is large and is in contact with or is about to come into contact with the support column portion 702, or when the end portion cannot be detected, the front of the translation stage 141. Prohibit movement to the side.

Whether or not it can be moved in the left-right direction is determined from the end on the diagonally front side. Here, whether or not the translational stage 141 is restricted from being translated to the right as an example will be described with reference to FIGS. 23A to 23C. First, as shown in FIG. 23A, when the lower portion of the measurement object WK10 is contained in the mounting surface 142, the movement of the translation stage 141 is not restricted. Further, as shown in FIG. 23B, when the object to be measured WK11 partially protrudes from the mounting surface 142, the protrusion amount D2 from the lower end of the mounting surface 142 is examined, and this is the range of the movement amount D0 of the mounting table. If it fits inside, the parallel movement is not restricted because it does not come into contact with the support column 702 even if it is moved to the right. On the other hand, as shown in FIG. 23C, if the protrusion amount of the measurement object WK12 is large and exceeds the movement amount D0 of the mounting table, or if the end cannot be detected, the translation stage 141 is moved to the right. , Since there is a risk of contacting the support column 702, movement is restricted.

Further, whether or not the rotary stage 143 can be rotationally moved is determined based on the amount of protrusion. Here, the operation of whether or not to limit the clockwise rotational movement of the rotary stage 143 will be described with reference to FIGS. 24A to 24D. First, as shown in FIG. 24A, when the measurement object WK13 is contained in the mounting surface 142, the movement of the rotation stage 143 is not restricted. Further, as shown in FIG. 23B, when the portion partially protrudes from the mounting surface 142, the value in which the protruding portion from the mounting surface 142 is maximized, that is, the measurement object WK13 is rotationally moved by the rotation stage 143. The maximum value D3 of the turning radius is measured. Then, the maximum value D3 of this turning radius is compared with the distance DR from the rotation center of the rotating stage 143 to the support column 702, and if D3 is shorter than the DR, the object to be measured even if the rotating stage 143 is rotated. It is determined that the WK 13 does not collide with the support column 702, and the rotation of the rotation stage 143 is allowed. As described above, a margin may be taken into consideration when comparing D3 and DR. Further, as shown in FIG. 24C, when the maximum value D4 of the protrusion amount is larger than the distance DR from the rotation center of the rotation stage 143 to the support column portion 702, when the rotation stage 143 is moved clockwise, the support column portion 702 Restrict rotational movement as it may come into contact with. Further, as shown in FIG. 24D, even when the contour of the end portion of the protruding portion of the measurement object WK14 cannot be detected, the rotational movement is similarly restricted.

The above-mentioned restriction or regulation of movement by the regulation determination unit 266 may include prohibiting the movement itself or allowing the movement to the point of contact. In this way, even if it is determined that it is impossible to move to the specified measurement position, the loss of measurement data can be minimized by moving to the position where it can be moved and performing the measurement. ..
(Moveability approval department)

Even if the edge of the object to be measured cannot be detected and it is determined that safe movement is not possible, the user is asked if it is possible to move, and if the user determines that it is possible, move. The measurement may be continued. In this case, a moveability approval unit is provided to request the user to approve the moveability. For example, the display unit 400 displays the moveability approval screen. On the move permission approval screen, the user displays options such as "Allow movement" and "Prohibit movement" along with explanations such as "I can't check the edge of the work. Can I rotate the stage?" Prompt for confirmation and selection.

In the above example, the end detection unit 265 and the regulation judgment unit 266 are used so as to avoid a situation in which the object to be measured interferes with a part of the three-dimensional shape measuring device (support portion 702) due to the movement of the mounting surface 142. The configuration for restricting the movement of the mounting surface 142 has been described. In this case, if the translational stage 141 moves in the direction away from it (upward in FIG. 18A or the like), there is no possibility of collision. Therefore, the regulation determination unit 266 does not move the translational stage 141 in the direction away from the support column 702. Do not regulate. In this case, a measurement object having a special shape, for example, a shape having a curved arm that wraps around the back surface of the strut portion is excluded.

As shown in FIG. 6 and the like, in the configuration in which the measurement is performed from diagonally above the mounting surface 142, the surroundings are compared with the configuration in which the camera is provided directly above the mounting surface 142 and looked down directly below. Easy to receive external light. In order to reduce this, in addition to the light-shielding cover 102 that covers the upper part of the mounting surface 142 to block light, a light-shielding curtain may be arranged under the light-shielding cover 102. In this configuration, the light-shielding curtain is arranged behind the mounting surface 142, but if the light-shielding curtain is made of a flexible member such as a cloth, the measurement target is measured by the movement of the mounting surface 142. Even if an object comes into contact with the light-shielding curtain, the light-shielding curtain can be deformed reasonably accordingly, so that it is sufficient without considering interference.

Further, the automatic collision detection function of the present invention is not limited to avoiding a collision with the support column 702, and operates, for example, another measuring device or stand placed around the three-dimensional shape measuring device, or the three-dimensional shape measuring device. The user may also be configured to control so that the measurement object does not interfere with the measurement object. For example, a detector such as an objective sensor or a camera is prepared so that the shape and position of an object existing around the three-dimensional shape measuring device are notified to the three-dimensional shape measuring device side. Then, the signal and information obtained by the detector are collected on the three-dimensional shape measuring device side, and the moving direction of the mounting surface 142 is compared with the information such as the contour of the measurement object detected by the end detection unit 265. And the movement range are calculated by the regulation determination unit 266, and the movement of the mounting surface 142 by the movement control unit 144 is regulated.

That is, in the above example, the contour of the support column 702 is held in advance on the three-dimensional shape measuring device side as an object to avoid a collision, and necessary control is performed so that the measurement object does not come into contact with the support column 702. However, the same collision avoidance operation can be realized by designating another member (foreign matter) in addition to or instead of the support column portion as a target for avoiding a collision. It should be noted that the designation of other members can be performed relatively easily, for example, when the instrument placed around the three-dimensional shape measuring device is stationary. On the other hand, for members that are not always stationary and may move, such as movable appliances and users, avoid contact with them while considering the position of the contour that changes from moment to moment. It is necessary to perform an operation that limits the movement of the mounting surface 142 in real time.
(Measurable range (yellow dotted line) and data acquisition range (red dotted line))

In a three-dimensional shape measuring device that looks down on the mounting surface 142 from diagonally above, that is, measures from a bird's-eye view, the measurement range on the inner front side of the mounting surface 142 is relatively large as shown in the schematic side view of FIG. 25A. In addition to a wide and highly accurate measurement area, there is a tendency for a wide area around which 3D data can be acquired, regardless of accuracy. In the present embodiment, as described with reference to FIG. 2, the light projecting units 110 are provided on the left and right sides, respectively, and the pattern light is projected from the two light projecting units 110A and 110B. In FIG. 25B, when the light receiving range by the light receiving unit 120 is considered as a red region and the pattern projection range by the light emitting unit 110 is considered as a light ink region, the common region where these overlap is the data acquisition range (red dotted line). Further, within the data acquisition range, a region where the measurement accuracy is sufficiently exhibited can be defined as a measurable range (yellow dotted line).
(End detection position)

Further, instead of judging only from the measurement data of the measurement position specified by the user, the mounting surface 142 is moved to a predetermined end detection position where the object to be measured can be detected in as wide a range as possible before the measurement. May be configured to detect the end of the object to be measured and detect a collision based on that end. This is because the edge of the measurement object may not be detected depending on the actual measurement position specified by the user. Therefore, after moving the mounting surface 142 from the designated position of the mounting portion 140 designated by the user to a predetermined end detection position where it is easy to acquire the end portion of the measurement target object, the contour of the measurement target object is obtained. Is acquired and returned to the specified position. Here, the predetermined end detection position is, for example, a position where the mounting surface 142 is away from the imaging optical system. By separating the measurement object from the imaging optical system as much as possible, a wider observation field of view is secured by the angle of view of the imaging optical system, and the end portion of the measurement object is easily included. In this way, when the end detection operation is executed by the end detection unit 265, the translation stage 144 is translated by the movement control unit 144 so that the translation stage 141 is translated to a predetermined end detection position. It may be configured to move 141. This makes it possible to increase the accuracy of edge detection.

For the end detection before measurement, it is sufficient if the outer shape and contour of the end can be detected, and the accuracy as in the measurement is not required. Therefore, it is preferable to detect in a short time, and it is desirable to use simple imaging conditions that simplify the imaging conditions as compared with normal three-dimensional measurement. It is also possible to divert other images without performing imaging for edge detection. For example, the edge detection may be performed using the above-mentioned top view map image. As a result, the work for detecting the end portion can be significantly reduced and the tact time can be shortened.
(Notification to user)

As a response when the possibility of collision is detected in advance by the end detection unit 265 or the regulation judgment unit 266, the data of the measurement position avoided by the collision, that is, the data of the measurement position avoided by the collision without explicitly notifying the user. The data of the portion where the processing is skipped may be lost. Alternatively, it can be explicitly notified to the user. For example, after the measurement, the measurement position avoiding the collision is displayed on the display unit 400 as a result report. Alternatively, it is notified that a collision has been detected in advance after or during the measurement. At this time, it may be requested to determine whether to continue the measurement process or interrupt it there. Alternatively, when the pre-detection is performed before the measurement, a message such as "Because the pre-collision is detected, some measurements are avoided" is displayed on the display unit 400 after the pre-detection or before the start of the measurement.
(Rotation center offset function)

In the above example, in the configuration in which the rotation stage 143 and the translation stage 141 coexist, when the rotation stage 143 is rotated, the translation stage 141 is returned to a predetermined reference position and then rotated. did. However, the present invention is not limited to this configuration, and the rotation stage may be rotated at a position other than the reference position of the translation stage. Further, in this case, as shown in FIG. 13, if the rotation stage 143 is rotated as it is while the measurement object WK1 is mounted in a posture protruding from the mounting surface 142, it may collide with the support column 702 or the like. When it is determined that there is, the rotation center offset function for avoiding a collision may be provided by offsetting the rotation center.

The rotation center offset function can be realized, for example, by offsetting the rotation center of the rotation stage 143 with respect to the support unit 700 or the object to be measured by the movement control unit 144. By rotating the rotation stage 143 with the rotation center offset in this way, it is possible to avoid a state in which the object to be measured interferes with the three-dimensional shape measuring device. In executing the rotation center offset function, the peripheral edge of the mounting surface 142 at the portion where a part of the measurement object mounted on the mounting unit 140 protrudes from the mounting surface 142 in the end detection unit 265 in advance. It is detected whether or not the amount of protrusion from the mounting surface 142 is larger than the shortest distance between the mounting surface 142 and the support portion 700 with the mounting surface 142 as a reference position. The end detection unit 265 detects the end based on the point cloud data generated by the point cloud data generation unit 260, for example. According to this detection result, if the amount of protrusion is larger than the shortest distance between the mounting surface 142 and the support portion 700, the movement control unit 144 executes the rotation center offset function because it collides if it is rotated as it is. For example, the movement control unit 144 rotates the rotation stage 143 in a state where the translation stage 141 is translated to the evacuation position specified by the evacuation position specifying unit.

The procedure for executing the rotation center offset function will be described below. First, the object to be measured is placed on the mounting surface 142 of the mounting portion 140. For example, the user may be urged to place the object to be measured on the mounting surface 142. Next, the amount of protrusion from the peripheral edge of the mounting surface 142 at the portion where a part of the measurement object mounted on the mounting portion 140 protrudes from the mounting surface 142 is the reference position of the mounting surface 142. The end detection unit 265 determines whether or not the distance between the mounting surface 142 and the support portion 700 is larger than the shortest distance in the above-mentioned state. When the determination result by the end detection unit 265 shows that the protrusion amount is larger than the shortest distance between the mounting surface 142 and the support portion 700, the mounting surface 142 is rotated by the rotation stage 143 to be rotated from the mounting surface 142. When passing the protruding portion of the measurement object in the vicinity of the support portion 700, the translational stage 141 is moved in the direction in which the portion of the measurement object protruding from the mounting surface 142 moves away from the support portion 700. The movement control unit 144 controls the mounting unit 140. As a result, even if a part of the end portion of the object to be measured cannot rotate due to contact with the support portion 700 as it is, the movement control unit 144 can measure by moving the rotation stage 143 and the translation stage 141 in conjunction with each other. It is possible to rotate the rotary stage 143 while avoiding contact with the object.

A specific example will be described with reference to FIG. At the current position of the mounting surface 142, when the distance DT1 between the protrusion amount of the measurement object WK1 and the support column 702 is larger than the distance DT2 between the outermost circumference of the mounting surface 142 and the support column 702, that is, DT1> In the case of DT2, the translational stage 141 is moved away from the support column 702, that is, toward the back side (upward in FIG. 13) to increase the distance DT2 between the outermost circumference of the mounting surface 142 and the support column 702. .. If DT1 <DT2 can be set, the end of the measurement object WK1 can be prevented from colliding with the support column 702 even if the rotation stage 143 is rotated. Hereinafter, this rotation center offset function will be described with reference to FIGS. 26 to 28D.

In a three-dimensional shape measuring device that acquires a three-dimensional appearance shape of a measurement object, not only one side surface of the measurement object installed on the mounting surface 142 but also a viewpoint in which the mounting posture is inverted by 180 °. Measurement from is also important. On the other hand, if the object to be measured is larger than the outer shape of the mounting surface 142, it may collide with the three-dimensional shape measuring device itself as described above, and it may not be possible to invert the object to be measured. Therefore, in the present embodiment, the operation of the mounting surface 142 is controlled after detecting the amount of protrusion and the outer shape of the measurement target from the mounting surface 142 by using the above-mentioned edge detection function of the measurement target. We propose a method of reversing the line-of-sight direction in which the measurement object is seen without colliding with the support column 702. Here, the translational stage 141 is retracted and rotated to a position where the object to be measured does not collide with the support column 702. First, an example in which the rotation center offset function is performed in the configuration in which the translation stage 141 is arranged on the rotation stage 143 as shown in FIG. 1 and the like will be described.
(XY stage on θ stage)

In the configuration in which the translational stage 141 is placed on the rotation stage 143 provided on the pedestal portion 600 as shown in FIG. 1, the rotation axis is always in a fixed position, so that the rotation axis is infinite with respect to a large object to be measured. Rotation is not guaranteed. Therefore, it is necessary to control the amount of protrusion of the object to be measured from the mounting surface 142 and the translation stage 141 and the rotation stage 143 according to the protrusion direction. As shown in the plan view of FIG. 26, from the edge of the mounting surface 142 when the amount of protrusion of the object to be measured from the mounting surface 142 is DT1 and the translation stage 141 is the reference position (for example, the origin of the XY plane). Assuming that the distance to the support column 702 is DT2 and the circular radius of the mounting surface 142 is RD0, the radius RDsafe of the "rotational safety range circle" in which the object to be measured can be safely rotated is defined by RDsafe <RD0 + DT2. In the state of FIG. 26 in which the translational stage 141 is in the reference position, the object to be measured collides with the support column 702 when the rotation stage 143 is rotated under the condition that DT2 ≦ DT1. Examples of operations for avoiding this are shown in FIGS. 27A to 27D. Here, an example of rotating the rotary stage 143 clockwise in the state of FIG. 26 will be considered.

First, in FIG. 27A, the translational stage 141 is moved by the movement control unit 144 so that the protruding portion (the portion that approaches the support column portion 702 by rotation) protruding from the mounting surface 142 is within the rotation safety range circle. .. Assuming that the evacuation operation amount at this time is AV, the relationship of AV = DT1-DT2 is established. In the state of being moved to this point, even if the rotation stage 143 is rotated as shown in FIGS. 27B and 27C, the end portion of the object to be measured is within the rotation safety range and no collision occurs. The rotating stage 143 stops at a rotation angle at which the end of the object to be measured safely exceeds the strut portion 702, and the movement of the translational stage 141 causes the object to be measured to be in its original position, eg, FIG. 27D, as shown in FIG. 27D. It returns to the reference position shown in 26. In this way, it is possible to safely change the posture during rotation without apparently changing the center position of the object to be measured. In the rotation operation, it is assumed that the object to be measured and the end of the mounting surface 142 always protrude in the direction opposite to the support column 702, and the rotation is mainly 180 ° or less from the start of rotation. Further, in order to minimize the case where the support column 702 collides with the measurement object during the retracting operation, the measurement object retracting operation is above the circular horizontal center line of the mounting surface 142 in FIG. 26 (support section). Only movements toward (opposite side of 702) shall be allowed.
(Θ stage on XY stage)

Next, as shown in FIG. 12, in a configuration in which the rotation stage 143 is mounted on the translation stage 141 as the mounting portion 140, an example in which the retracting operation is performed by the rotation center offset function is based on FIGS. 28A to 28D. I will explain. In this example as well, as in the case of FIGS. 27A to 27D described above, an example in which the rotation stage 143 is rotated clockwise from the state of FIG. 26 will be considered.

In this configuration, the translational stage 141 can be used to move the center position for rotating the rotation stage 143 in the θ direction.

In DT1, DT2, DT3, and RD0 as shown in FIG. 26, the radius RDmax in the "maximum rotation range circle" when the object to be measured rotates can be defined as RDmax = RD0 + DT1 + DT2. Here, if the distance DT3 = RD0 + DT2 from the center of rotation to the support column 702 when the translational stage 141 is in the reference position is defined, a collision will occur under the condition of RDmax ≧ RD0 + DT2. Here, as shown in FIG. 28A, the center of rotation is moved by using the translation stage 141 to a position where DT3> RDmax. As a result, the distance DT4 from the new rotation center to the support column 702 as the evacuation amount AV becomes DT4 = RD0 + DT2 + AV. Under this condition, if DT4> RDmax, safe rotation is guaranteed as shown in FIGS. 28B and 28C. At this time, the relationship of evacuation amount AV> DT1-DT2 is established. In this way, the translation amount AV is moved in the direction opposite to that of the support column 702 by the translation stage 141, and the θ rotation center is offset to the region where the maximum rotation range circle does not interfere with the support column 702. At this position, the object to be measured can be freely rotated.

In the above example, the rotation center offset function has been described. The rotation center offset function may be configured to operate only when necessary. For example, when it is determined from the positions of the end of the current measurement object and the mounting surface that the rotation stage can be rotated, the rotation center offset function is not operated. Further, it may be used in combination with the above-mentioned function of returning the translation stage to the reference position before the rotation of the rotation stage. For example, when the rotation stage 143 can be rotated by returning the translation stage 141 to the reference position, in other words, the protrusion amount of the measurement object WK1 and the distance DT1 from the support column 702 at the reference position are the maximum of the mounting surface 142142. When the distance between the outer circumference and the support column 702 is smaller than DT2, and DT1 <DT2, the reference position return function is operated. Then, when DT1 ≥ DT2 at the reference position, if it is possible to set DT1 <DT2 in the state after the offset by operating the rotation center offset function, the rotation center offset function is operated to move the translation stage 141. Let me. As a result, the range in which collision can be avoided is wider than that of the reference position return function, and a larger object to be measured can be measured. Further, the present invention does not specify the presence or absence of the reference position return function, and for example, even in a three-dimensional shape measuring device having no reference position return function, it is possible to avoid a collision of a measurement object by the rotation center offset function. It becomes.

Further, the movement control unit 144 rotates the rotation axis of the rotation stage 143 after shifting it before rotation, and shortens the radius of gyration of the object to be measured when the rotation stage 143 is rotated and becomes near the support column 702. It may be controlled to shift.

Further, in the above example, as a rotation center offset function, a procedure for interlocking the translation stage and the rotation stage to move them at the same time has been described. In this case, in the movement control unit 144, the amount of protrusion from the peripheral edge of the mounting surface 142 at the portion where a part of the measurement object WK mounted on the mounting unit 140 protrudes from the mounting surface 142 is determined. When the distance between the mounting surface 142 and the support portion 700 is larger than the shortest distance with the mounting surface 142 as the reference position, the mounting surface 142 is rotated by the rotation stage 143 and protrudes from the mounting surface 142. When the portion of the measurement object WK to be measured is passed in the vicinity of the support portion 700, the portion of the measurement object WK protruding from the mounting surface 142 is mounted by the translation stage 141 in the direction away from the support portion 700. The movement of the mounting surface 142 and the rotation of the mounting surface 142 by the rotation stage 143 are controlled.

However, the present invention is not limited to the above control, and before the rotation of the rotation stage, the translational stage is placed at a position farthest from the support column so that the end of the object to be measured is at the position farthest from the support column. The rotation stage may be rotated after being moved to. Also in this method, it is possible to avoid the situation where the end portion of the object to be measured comes into contact with the support column portion due to the rotation of the rotating stage. Further, with this method, it is not necessary to move the rotation stage and the translation stage at the same time. However, in this case, since it is possible that the end of the object to be measured protrudes greatly around the 3D shape measuring device, it is possible to avoid collision with the support column, while it is placed around the 3D shape measuring device. Care must be taken not to come into contact with the members or the user. When the translational movement of the translational stage 141 and the rotation movement of the rotation stage 143 are performed separately, in addition to the control of rotating the rotation stage 143 after the translational movement of the translational stage 141 described above, the translational stage 141 after the rotation of the rotation stage 143 It may be a control for translating the movement of.

The three-dimensional shape measuring device and the three-dimensional shape measuring method of the present invention are based on the three-dimensional shape measuring device or digitizer that measures the height of the object to be measured by using a principle such as triangular distance measurement, or the inspection results thereof. Therefore, it can be suitably used as an inspection device for determining whether a product is a good product or a defective product.

1 ... Control PC
2 ... Monitor 3 ... Keyboard 4 ... Input device 100 ... Measurement unit 101 ... Main body case 102 ... Light-shielding cover 110 ... Light projection unit; 110A ... First measurement light projection unit; 110B ... Second measurement light projection unit 111 ... Measurement Light source 112 ... Pattern generation units 113 to 115, 122, 123 ... Lens 120 ... Light receiving unit 121 ... Camera 121B ... First camera; 121C ... Second camera 121a ... Imaging element; 121b ... First light receiving element; 121c ... Second light receiving element Element 125 ... Fixed unit 130 ... Illumination light output unit 140 ... Mounting unit 141 ... Translation stage 142 ... Mounting surface 143 ... Rotation stage 144 ... Movement control unit 150 ... Measurement control unit 200 ... Controller 210 ... CPU
211 ... Point cloud data synthesis unit 215 ... Warning unit 216 ... Image inspection unit; 216b ... Measurement unit 220 ... ROM
228 ... Height image acquisition unit 230 ... Working memory 240 ... Storage device 250 ... Operation unit 260 ... Point group data generation unit 261 ... Top view map image generation unit 262 ... Mesh image generation unit 264 ... Measurement area setting unit 265 ... Edge Unit detection unit 266 ... Regulation judgment unit 268 ... Retracting position identification unit 269 ... Collision avoidance information input unit 270 ... Avoidance operation instruction unit 300 ... Light source unit 310 ... Control board 320 ... Observation illumination light source 400 ... Display unit 500, 500B ... Tertiary Original shape measuring device 500A ... Three-dimensional shape measuring device main body 600 ... Pedestal part 602 ... Base plate 700 ... Support part 702 ... Support part 800 ... Rotation drive guide 810 ... Rotation pulse indicator part 820 ... Actual rotation amount reading part 830 ... Rotation drive motor 840 ... Deceleration mechanism 850 ... Origin sensor 860 ... Translation stage fastening portion 900 ... Linear guide 910 ... Linear power transmission unit 920 ... Movement pulse indicator 930 ... Actual movement amount reading unit 940 ... Translation drive motor 950 ... Infinite rotation connector 1000 ... Three-dimensional shape measurement system WK, WK2 to WK14 ... Measurement object; WK1 ... Horizontal measurement object ML ... Measurement light; ML1 ... First measurement light; ML2 ... Second measurement light LA1 ... First optical axis; LA2 ... Second optical axis IL ... Illumination light OI1 to OI2 ... Observation image MA ... Measurable range

Claims (10)

A three-dimensional shape measuring device that measures the three-dimensional shape of an object to be measured.
A rotating stage that rotates the mounting surface on which the object to be measured is placed around the rotation axis included in the mounting surface, and
A mounting portion including a translation stage for moving the previously described mounting surface in the plane to which the mounting surface belongs, based on a predetermined reference position included in the mounting surface.
A light projecting unit that irradiates a measurement object placed on the above-mentioned storage unit with measurement light having a predetermined pattern,
A light receiving unit that receives the measurement light that is irradiated by the light projecting unit and is reflected by the measurement object and outputs a light receiving signal that indicates the amount of received light.
The pedestal part that supports the above-mentioned placement part and
A support portion that is connected to the pedestal portion and that fixedly supports the light projecting portion and the light receiving portion so that a measurement region by measurement light is formed above the above-mentioned placement portion.
A point cloud data generation unit that generates point cloud data representing the three-dimensional shape of the object to be measured based on the light reception signal output by the light receiving unit supported by the support unit.
The amount of protrusion from the peripheral edge of the mounting surface at the portion where a part of the measurement object mounted on the previously described mounting portion protrudes from the previously described mounting surface is in a state where the mounting surface is used as a reference position. When it is larger than the shortest distance between the mounting surface and the support portion of
Movement that controls the movement of the previously described mounting surface by the translational stage and the rotation of the previously described mounting surface by the rotation stage so that the portion of the measurement object protruding from the previously described mounting surface faces the direction away from the supporting portion. Control unit and
A three-dimensional shape measuring device including. The three-dimensional shape measuring device according to claim 1.
The movement control unit
The amount of protrusion from the peripheral edge of the mounting surface at the portion where a part of the measurement object mounted on the previously described mounting portion protrudes from the previously described mounting surface is in a state where the mounting surface is used as a reference position. When it is larger than the shortest distance between the mounting surface and the support portion of
When it is possible to move the translation stage to a position where the amount of protrusion of the object to be measured from the peripheral edge of the above-mentioned mounting surface is smaller than the shortest distance between the above-mentioned mounting surface and the support portion, the translation stage is moved.
Three-dimensional shape measurement configured such that when the above-mentioned mounting surface is rotated by the rotating stage, the portion of the measurement object protruding from the previously described mounting surface is moved in a direction away from the support portion. apparatus. The three-dimensional shape measuring device according to claim 1 or 2.
The movement control unit is a three-dimensional shape measuring device configured to rotate the rotation center of the rotation stage by offsetting it with respect to the support unit or the object to be measured. The three-dimensional shape measuring device according to any one of claims 1 to 3, further comprising.
The amount of protrusion from the peripheral edge of the mounting surface at the portion where a part of the measurement object placed on the previously described mounting portion protrudes from the previously described mounting surface is in a state where the mounting surface is used as a reference position. A three-dimensional shape measuring device including an end detecting portion for detecting whether or not the distance between the mounting surface and the supporting portion is larger than the shortest distance. The three-dimensional shape measuring device according to claim 4, further
Based on the detection result of the end portion detecting unit, the evacuation position specifying unit is provided to specify a retracted position where the end portion does not collide with the support portion when the rotating stage rotates.
The movement control unit is a three-dimensional shape measuring device configured to rotate and move the rotary stage in a state where the translational stage is translated to the retracted position. The three-dimensional shape measuring device according to claim 4 or 5.
The end portion detection unit is a three-dimensional shape measuring device configured to detect the end portion based on the point cloud data generated by the point cloud data generation unit. The three-dimensional shape measuring device according to any one of claims 1 to 6.
The above-mentioned placing portion is a three-dimensional shape measuring device comprising the translational stage rotatably provided above the rotation stage rotatably supported by the pedestal portion. The three-dimensional shape measuring device according to any one of claims 1 to 6.
The above-mentioned placing portion is a three-dimensional shape measuring device in which the rotating stage is rotatably provided above the translational stage supported by the pedestal portion in a translational manner. The three-dimensional shape measuring device according to any one of claims 1 to 8, further comprising.
Based on the measurement light emitted at the first position where the translation stage is moved from the reference position, the first point cloud data generated by the point cloud data generation unit and the second position different from the first position A three-dimensional shape measuring device including a point cloud data compositing unit that synthesizes a second point cloud data generated based on the irradiated measurement light. A three-dimensional shape measuring method that measures the three-dimensional shape of an object to be measured.
A rotating stage that rotates the mounting surface on which the object to be measured is placed around the rotation axis included in the mounting surface, and
The measurement target is on the front-described mounting surface of the mounting portion including the translational stage for moving the previously described mounting surface in the plane to which the mounting surface belongs, based on a predetermined reference position included in the mounting surface. The process of placing things and
The amount of protrusion from the peripheral edge of the mounting surface at the portion where a part of the measurement object placed on the previously described mounting portion protrudes from the previously described mounting surface is in a state where the mounting surface is used as a reference position. The step of determining whether or not the distance between the mounting surface and the support portion is larger than the shortest distance by the end detection unit, and
When the determination result by the end detection unit is that the protrusion amount is larger than the shortest distance between the front-described mounting surface and the support portion, the front-state mounting surface is rotated by the rotation stage and protrudes from the front-described mounting surface. When passing the portion of the measurement object to be measured in the vicinity of the support portion, the portion of the measurement object protruding from the above-mentioned mounting surface is moved so as to move the translation stage in a direction away from the support portion. The process of controlling the above-mentioned placement unit with the control unit,
Three-dimensional shape measurement method including.