JP7344708B2 - 3D shape measuring device - Google Patents

Description

The present invention relates to a three-dimensional shape measuring device for performing a predetermined inspection including height information on a three-dimensional measurement object.

A triangulation type three-dimensional shape measuring device is known (for example, Patent Document 1). This three-dimensional shape measuring device has a mounting section on which the object to be measured is placed, and a head section that emits measurement light toward the object and receives reflected light from the object. Fixedly connected. This increases robustness against changes in the external environment, such as vibration resistance, and enables stable measurement of the three-dimensional shape of the object to be measured. Further, this three-dimensional shape measuring device is provided with a rotation stage that rotates the object to be measured in order to measure the three-dimensional shape of the object to be measured from multiple directions.

JP 2018-4278 Publication

In such a three-dimensional shape measuring device, the size of the rotation stage on which the object to be measured is placed is limited, but there are cases where it is desired to measure the three-dimensional shape of a long object to be measured that does not fit on the rotation stage. In order to deal with such a case, it is conceivable to mount a translation stage that moves in parallel within the XY plane in addition to the rotating rotation stage. In this case, it is preferable that the stroke amount of the translation stage is as large as possible. This is because the larger the stroke amount, the larger or longer the object to be measured can be measured.

However, if a translation stage with such a large stroke amount is prepared, the size of the stage becomes correspondingly large, resulting in a problem that the three-dimensional shape measuring apparatus becomes larger.

One object of the present invention is to provide a three-dimensional shape measuring device that secures the stroke amount of a translation stage while avoiding an increase in the size of the three-dimensional shape measuring device.

Means for solving the problem and effects of the invention

In order to achieve the above object, a three-dimensional shape measuring device according to a first aspect of the present invention is a three-dimensional shape measuring device that measures a three-dimensional shape of an object to be measured. A translation stage that has a mounting surface to be placed on and moves the mounting surface in parallel along X-axis and Y-axis that are orthogonal to each other , and rotates the translation stage about a predetermined rotation axis. a mounting section having a rotation stage for controlling the measurement target; a light projecting section that irradiates measurement light having a predetermined pattern onto the measurement target placed on the mounting section; a light receiving section that receives measurement light reflected by an object and outputs a light reception signal representing the amount of received light; a pedestal section that supports the mounting section; and a pedestal section that is connected to the pedestal section and that supports the mount section. a support part that fixedly supports the light emitting part and the light receiving part so as to look diagonally downward ; a measurement area setting part that sets a measurement area for measuring a three-dimensional shape of the object to be measured; and the measurement area setting part. a movement control section that controls the movement operation of the mounting section based on the measurement area set by; and a movement control section that moves the translation stage in parallel, or a movement control section that moves the rotation stage rotationally. and a point cloud data generation section that generates point cloud data representing the three-dimensional shape of the object to be measured based on the light reception signal output by the light reception section, and the X axis and the Y axis are arranged on the mounting surface. In a plan view, the mounting section is arranged to be inclined with respect to a depth direction in which the mounting section approaches and moves away from the support section, and a lateral direction perpendicular to the depth direction, and the movement control section When a plurality of measurement regions are set in the lateral direction by the region setting section, the translation stage is controlled so that the placement surface moves in parallel along the lateral direction, which is the direction in which the plurality of measurement regions are lined up. It can be configured to do so . With the above configuration, the X-axis and Y-axis directions of the translation stage are shifted diagonally in plan view, allowing for larger vertical and horizontal strokes without increasing the size of the mounting surface, allowing for larger measurements. This is advantageous for measuring objects.

According to the three-dimensional shape measuring device according to the second aspect of the present invention, in addition to the above configuration, the X-axis and the Y-axis are such that when the mounting surface is viewed from above, the mounting portion is attached to the support. It can be configured to form an angle of approximately 45° with respect to a depth direction in which the portion approaches and moves away from the portion, and a lateral direction perpendicular to the depth direction. With the above configuration, the X-axis and Y-axis directions of the translation stage are shifted by approximately 45 degrees in plan view, thereby increasing the stroke amount of the translation stage by √2 without increasing the size of the mounting surface. becomes possible.

Furthermore, according to the three-dimensional shape measuring device according to the third aspect of the present invention, in addition to any of the above configurations, the movement control section interlocks the X-axis direction and the Y-axis direction of the mounting section. By causing the placement surface to move in parallel, the placement surface can be configured to move in parallel in the depth direction and in a lateral direction orthogonal to the depth direction.

Furthermore, according to the three-dimensional shape measuring device according to the fourth aspect of the present invention, in addition to any of the above configurations, the movement control section moves a corner of the measurement area facing the support section. Can be set to restricted area. With the above configuration, by ensuring a wide left and right stroke of the placement part and restricting movement toward the front side, it is possible to avoid a situation in which the object to be measured or the placement part collides with the support part.

Furthermore, the three-dimensional shape measuring device according to the fifth aspect of the present invention is a three-dimensional shape measuring device for measuring the three-dimensional shape of an object to be measured, the mounting surface on which the object to be measured is placed. , a rotation stage for rotationally moving the mounting surface around a rotation axis, and a translation stage for moving the mounting surface in parallel along X-axis and Y-axis that are orthogonal to each other. a placing part; a light projecting part that irradiates the measuring object placed on the placing part with measurement light having a predetermined pattern; and a measuring light irradiated by the light projecting part and reflected by the measuring object. a light-receiving section that receives the light and outputs a light-receiving signal representing the amount of received light; a pedestal section that supports the mounting section; and a measurement area connected to the pedestal section and using the measurement light above the mount section. a support section that fixedly supports the light projecting section and the light receiving section so that the light projecting section and the light receiving section are formed; a movement control section that controls a movement operation of the mounting section; and a movement control section that moves the translation stage in parallel; or a point cloud data generation section that rotates the rotary stage by the movement control section and generates point cloud data representing the three-dimensional shape of the measurement target based on the light reception signal outputted by the light reception section; The amount of protrusion from the periphery of the placement surface of a portion of the measurement object placed on the placement section that protrudes from the placement surface, with the placement surface as the reference position. an edge detection section that detects whether the distance between the placement surface and the support section is greater than the shortest distance , and the X-axis and the Y-axis are arranged so that the placement section It can be arranged so as to be inclined with respect to a depth direction in which the support portion approaches and moves away from the support portion, and a lateral direction perpendicular to the depth direction .

Furthermore, according to the three-dimensional shape measuring device according to the sixth aspect of the present invention, in addition to any of the above configurations, the rotary stage further rotates based on the detection result of the end detection section. an evacuation position specifying section for specifying a evacuation position at which the end portion does not collide with the supporting section when the end portion collides with the supporting section; It can be configured to rotate.

Furthermore, according to the three-dimensional shape measuring device according to the seventh aspect of the present invention, in addition to any of the above configurations, the edge detecting section may detect point cloud data generated by the point cloud data generating section. The end portion can be configured to be detected based on.

Furthermore, according to the three-dimensional shape measuring device according to the eighth aspect of the present invention, in addition to any of the above configurations, the placement surface can be formed into a circular shape.

Furthermore, according to the three-dimensional shape measuring device according to the ninth aspect of the present invention, in addition to any of the above-mentioned configurations, the device is fixed to the upper part of the support part so as to look diagonally downward into the measurement area. a fixing part that fixes the light projecting part and the light receiving part in a posture in which the optical axis is inclined with respect to the mounting surface; A tilting table having a tilted surface tilted with respect to the mounting surface may be provided. With the above configuration, by placing the object to be measured in an oblique position using the tilt table, a plan view image of the object to be measured can be obtained using the light projecting section and the light receiving section fixed diagonally upward.

Furthermore, according to the three-dimensional shape measuring device according to the tenth aspect of the present invention, in addition to any of the above configurations, the mounting section is configured to support the rotary stage rotatably supported by the pedestal section. The translation stage can be provided above in a freely translatable manner. With the above configuration, by rotating both the measurement object and the translation stage, the positional relationship between the measurement object and the translation stage can be maintained constant within the range where the mounting posture of the measurement object is not changed. Thereby, three-dimensional measurement from multiple viewpoints during rotation can always be performed within the same range of the measurement target. As a result, data from multiple viewpoints at the same point on the object to be measured can be averaged, stable measurement can be achieved over the entire object to be measured, and measurement accuracy can be improved.

Furthermore, according to the three-dimensional shape measuring device according to the eleventh aspect of the present invention, in addition to any of the above configurations, the mounting section is configured to support the translation stage supported on the pedestal section so as to be freely translatable. The rotation stage can be rotatably provided above.

Furthermore, according to the three-dimensional shape measuring device according to the twelfth aspect of the present invention, in addition to any of the above configurations, the translation stage is further irradiated at a first position moved from the reference position. Synthesizing first point cloud data generated by the point cloud data generation unit based on measurement light and second point cloud data generated based on measurement light irradiated at a second position different from the first position. A point cloud data synthesis unit may be provided.

Furthermore, according to the three-dimensional shape measuring device according to the thirteenth aspect of the present invention, in addition to any of the above configurations , the movement control section may include two measurement areas set in the lateral direction. After controlling the translation stage so that the mounting surface is moved in parallel to a position corresponding to one of the two measurement regions, the mounting surface is moved to a position corresponding to the other measurement region. The translation stage may be configured to be controlled to move in parallel.
Furthermore, according to the three-dimensional shape measuring device according to the fourteenth aspect of the present invention, the three-dimensional shape measuring device measures the three-dimensional shape of a measurement target, the mounting surface on which the measurement target is placed. a mounting section having a rotation stage for rotationally moving the mounting surface, and a translation stage for parallelly moving the mounting surface, and a measuring object placed on the mounting section. a light projecting section that emits measurement light having a predetermined pattern; a light receiving section that receives the measurement light that is emitted by the light projecting section and reflected by the object to be measured and outputs a light reception signal representing the amount of received light; a pedestal part that supports the mounting part; a support part that is connected to the pedestal part and fixedly supports the light emitting part and the light receiving part so as to look diagonally downward at the mounting part; a measurement area setting unit that sets a measurement area for measuring a three-dimensional shape of a target; a movement control unit that controls movement of the placement unit; and a movement control unit that moves the translation stage in parallel; a point cloud data generation section configured to rotationally move the rotary stage by a movement control section and generate point cloud data representing a three-dimensional shape of the object to be measured based on a light reception signal outputted by the light reception section; The unit includes the translation stage movable in translation above the rotary stage rotatably supported by the pedestal, and the movement control unit is configured to horizontally set a plurality of measurement areas by the measurement area setting unit. is set, the translation stage can be configured to be controlled so that the placement surface moves in parallel along the lateral direction, which is the direction in which the plurality of measurement regions are lined up.

Furthermore, according to the three-dimensional shape measuring device according to the fifteenth aspect of the present invention, in addition to any of the above configurations, the X-axis and Y-axis, which are orthogonal to each other , The writing section can be arranged to be inclined with respect to a depth direction in which the writing section approaches and moves away from the support section and the lateral direction that is orthogonal to the depth direction. With the above configuration, the X-axis and Y-axis directions of the translation stage are shifted diagonally in plan view, allowing for larger vertical and horizontal strokes without increasing the size of the mounting surface, allowing for larger measurements. This is advantageous for measuring objects.

1 is a block diagram showing an image inspection apparatus according to Embodiment 1 of the present invention. FIG. FIG. 2 is a block diagram showing the configuration of a measuring section in FIG. 1. FIG. 2 is a block diagram showing the configuration of a CPU of the controller in FIG. 1. FIG. FIG. 1 is a block diagram showing a three-dimensional shape measurement system. 5 is an exploded perspective view of the three-dimensional shape measuring device main body shown in FIG. 4. FIG. 5 is a side view of the three-dimensional shape measuring device main body shown in FIG. 4. FIG. FIG. 2 is a side view of a three-dimensional shape measuring device including a plurality of light receiving sections with different magnifications. FIG. 3 is a plan view showing the driving direction of the mounting surface. FIG. 3 is a plan view showing the driving direction of the mounting surface. FIG. 2 is a block diagram showing the configuration of a rotation stage. FIG. 2 is a block diagram showing the configuration of a translation stage. FIG. 2 is a block diagram showing a three-dimensional shape measuring device according to a second embodiment. FIG. 3 is a schematic diagram illustrating how a measurement object collides with the rotation of the rotation stage. FIG. 2 is an image diagram showing an observation image of the measurement target viewed diagonally from above. It is an image diagram showing a measurable range. FIG. 3 is a schematic side view showing how a measurement target placed in a horizontal position on a mounting surface is observed from diagonally above. FIG. 3 is a schematic side view showing how a measurement target placed in an inclined posture on a mounting surface is observed from diagonally above. 18A and 18B show how the object to be measured collides with the pedestal when the translation stage is moved toward the front, and FIGS. 18C and 18D show how the object to be measured collides with the pedestal when the translation stage is moved left and right. FIG. 2 is a flowchart showing a procedure for detecting an edge of a measurement target when performing wide-range measurement of the measurement target. 20A to 20H are schematic plan views showing an example of a procedure for regulating the moving direction of the mounting surface. 21A to 21P are schematic plan views showing other examples of procedures for regulating the moving direction of the mounting surface. 22A to 22C are schematic plan views showing how it is determined whether or not the translation stage can be moved in the forward direction. 23A to 23C are schematic plan views showing how it is determined whether the translation stage can be moved to the right. 24A to 24D are schematic plan views showing how it is determined whether or not the rotation stage can be rotated clockwise. FIG. 25A is a schematic side view showing the measurable range of the three-dimensional shape measuring device, and FIG. 25B is a schematic plan view. FIG. 2 is a schematic side view showing a three-dimensional shape measuring device according to a first embodiment, which includes a mounting section in which a translation stage is placed on a rotation stage. FIG. 7 is a schematic side view showing a three-dimensional shape measuring device according to a second embodiment, which includes a mounting section in which a rotation stage is placed on a translation stage. FIG. 3 is a schematic plan view showing an example in which the parallel translation of the translation stage is performed with the X-axis directed horizontally and the Y-axis directed vertically. FIG. 29A is a schematic plan view of a mounting surface in which the XY axes of the translation stage are arranged in a cross shape, and FIG. 29B is a schematic plan view showing the XY stroke and safe operating range circle of this translation stage. FIG. 30A is a schematic plan view of a mounting surface on which the XY axes of the translation stage are arranged obliquely, and FIG. 30B is a schematic plan view showing the XY stroke and safe operating range circle of this translation stage. FIG. 2 is a schematic plan view showing a state in which an object to be measured that is long in one direction is placed on a placement surface. FIG. 32A is a schematic plan view showing the correspondence between the expansion stroke of a translation stage on which a long measurement object is placed and the measurement object, and FIG. 32B is a schematic plan view showing the correspondence between the expansion stroke of the rotation stage and the measurement object. . FIG. 3 is a schematic plan view showing the relationship between the coordinates (x, y) seen from the measurement unit and the amount of movement of the translation stage in the XY directions. It is a flowchart which shows the procedure when moving a translation stage in the X-axis direction and the Y direction, respectively. It is a flowchart which shows the procedure when moving a translation stage in the X-axis direction and Y direction sequentially. FIG. 36A is a schematic plan view showing a state in which a long object to be measured is placed on the placing section according to Embodiment 1, and FIG. 36B is a schematic plan view showing a state in which a long object to be measured is placed on the placing section according to Embodiment 2. FIG. FIG. 37A is a schematic plan view showing a state in which a long object to be measured is placed on the placing section according to Embodiment 1, and FIG. 37B is a schematic plan view showing a state in which a long object to be measured is placed on the placing section according to Embodiment 2. FIG. 38A to 38C are schematic plan views showing how the placing section according to the first embodiment is rotated. FIGS. 39A to 39C are schematic plan views showing how the mounting section according to the second embodiment is rotated. 40A is a schematic side view showing a three-dimensional shape measuring device according to Embodiment 3, FIG. 40B is a schematic plan view showing a state in which the inclined surface is folded, and FIG. 40C is a schematic plan view showing a state in which the inclined surface is raised and the object to be measured is placed on the inclined surface. FIG.

Embodiments of the present invention will be described below based on the drawings. However, the embodiments described below illustrate a three-dimensional shape measuring device for embodying the technical idea of the present invention, and the present invention does not specify the three-dimensional shape measuring device as follows. Moreover, this specification does not in any way specify the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative positions, etc. of the components described in the embodiments are not intended to limit the scope of the present invention, unless otherwise specified, and are merely illustrative. Just an example. Note that the sizes, positional relationships, etc. of members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same names and symbols indicate the same or homogeneous members, and detailed descriptions will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured so that a plurality of elements are made of the same member so that one member serves as a plurality of elements, or conversely, the function of one member may be performed by a plurality of members. It can also be accomplished by sharing.

In this specification, a "texture image" is an observed image having texture information, typically an optical image. On the other hand, a "height image" is also called a distance image or the like, and is used to mean an image that includes height information. Examples include an image in which height information is converted into brightness, chromaticity, etc. and displayed as a two-dimensional image, and an image in which height information is displayed in a three-dimensional manner as Z coordinate information. A three-dimensional composite image in which a texture image is pasted as texture information on such a height image is also included in the height image. Furthermore, in this specification, the display format of the height image is not limited to one in which it is displayed two-dimensionally, but also includes one in which it is displayed three-dimensionally. Examples include those in which the height information of a height image is converted into luminance or the like and displayed as a two-dimensional image, and those in which the height information is displayed three-dimensionally as Z coordinate information.

Furthermore, in this specification, the "posture" in which the measurement target is placed on the stage means the rotation angle of the measurement target. Note that if the object to be measured has a point-symmetrical shape in plan view, such as a cone, the same result can be obtained regardless of the rotation angle, so there is no need to specify the orientation.

In the following example, in order to obtain height information of the measurement target, a predetermined pattern of measurement light is irradiated onto the measurement target, and a signal is obtained from the reflected light reflected from the surface of the measurement target. is used to obtain height information. For example, it is possible to use a measurement method that uses structured illumination as a predetermined pattern of measurement light, projects it onto the measurement target, and uses triangulation distance measurement using a fringe projection image obtained from the reflected light. However, the present invention is not limited to this principle and configuration for acquiring height information of a measurement target, and other methods can also be applied.
(Embodiment 1)

The three-dimensional shape measuring device can measure the three-dimensional height of an image to be measured. In addition to three-dimensional measurement, two-dimensional dimension measurement can also be performed. FIG. 1 shows a block diagram of a three-dimensional shape measuring device according to a first embodiment of the present invention. A three-dimensional shape measuring device 500 shown in this figure includes a measuring section 100, a pedestal section 600, a controller 200, a light source section 300, and a display section 400. This three-dimensional shape measuring device 500 performs structured illumination with a light source unit 300, captures a fringe projection image to generate a height image having height information, and based on this, the three-dimensional dimension of the measurement object WK is measured. It is possible to measure shapes and shapes. Measurement using such fringe projection has the advantage that the measurement time can be shortened because the height can be measured without moving the measurement target WK or the optical system such as the lens in the Z direction.

The measuring section 100 includes a light projecting section 110, a light receiving section 120, a measurement control section 150, and an illumination light output section 130. The light projecting section 110 irradiates the measuring object WK placed on the mounting section 140 with measurement light having a predetermined pattern. The light receiving unit 120 is fixed in an inclined position with respect to the mounting surface 142. The light receiving section 120 receives the measurement light emitted by the light projecting section 110 and reflected by the measurement object WK, and outputs a light reception signal representing the amount of received light. The light receiving unit 120 can generate an observation image for observing the entire shape of the measurement target WK by capturing an image of the measurement target WK placed on the mounting unit 140.

The pedestal section 600 includes a mounting section 140 and a movement control section 144. This pedestal section 600 supports the mounting section 140 on a base plate 602. The movement control section 144 is a member that moves the mounting section 140. The movement control section 144 may be provided on the pedestal section 600 side or may be arranged on the controller side.

The light source section 300 is connected to the measurement section 100. The light source section 300 generates measurement light and supplies it to the measurement section 100. The controller 200 controls imaging by the measurement unit 100. The display unit 400 serves as an HMI that is connected to the controller 200, displays generated images, and performs necessary settings.
(Placement section 140)

The pedestal section 600 shown in FIG. 1 includes a placing section 140 and a movement control section 144. The mounting section 140 has a mounting surface 142 on which the measurement target object WK is mounted. This mounting section 140 includes a rotation stage 143 that rotates the mounting surface 142 and a translation stage 141 that moves the mounting surface 142 in parallel.
(Movement control unit 144)

The movement control unit 144 controls the rotational movement of the rotation stage 143 and the parallel movement of the translation stage 141 based on the measurement area set by the measurement area setting unit 264. Furthermore, the movement control unit 144 controls the movement operation of the placement unit 140 by the placement movement unit based on a measurement area set by a measurement area setting unit 264, which will be described later.

The controller 200 includes a CPU (central processing unit) 210, a ROM (read only memory) 220, a working memory 230, a storage device 240, and an operation section 250. A PC (personal computer) or the like can be used as the controller 200. Further, the CPU 210 operates a point cloud data generation unit 260 that generates point cloud data, a collision avoidance information input unit 269 that inputs collision avoidance information, and instructs the collision avoidance by moving the mounting unit based on the collision avoidance information. The functions of the avoidance operation instruction unit 270, the measurement area setting unit 264 that sets a measurement area on the observation image displayed by the display unit 400, etc. are realized (details will be described later).
(Block diagram of measurement unit 100)

The configuration of the measuring section 100 of the three-dimensional shape measuring apparatus 500 of FIG. 1 is shown in the block diagram of FIG. 2. The measuring section 100 is, for example, a microscope, and includes a light projecting section 110, a light receiving section 120, an illumination light output section 130, a measurement control section 150, a main body case 101 that houses these, and a mounting section 140. The light projection section 110 includes a measurement light source 111, a pattern generation section 112, and a plurality of lenses 113, 114, and 115. The light receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. A measurement target object WK is placed on the placement unit 140. The main body case 101 is made of resin or metal.
(Light projector 110)

The light projecting section 110 is arranged diagonally above the mounting section 140. This measuring section 100 may include a plurality of light projecting sections 110. In the example of FIG. 2, the measuring section 100 includes two light projecting sections 110. Here, a first measurement light projector 110A (on the right side in FIG. 2) that can irradiate the first measurement light ML1 onto the measurement target WK from a first direction, and a second measurement light projector 110A (on the right side in FIG. A second measurement light projector 110B (on the left side in FIG. 2) that can irradiate the second measurement light ML2 from the direction to the measurement target object WK is arranged. The first measuring light projecting section 110A and the second measuring light projecting section 110B are arranged symmetrically across the optical axis of the light receiving section 120. Note that it is also possible to provide three or more light projecting sections, or to relatively move the light projecting section and the stage to project light in different directions while using a common light projecting section. Furthermore, in the above example, a plurality of light emitting sections 110 are prepared and the light is received by a common light receiving section 120, but conversely, a plurality of light receiving sections are prepared for a common light emitting section and the light is received. may be configured. Further, in this example, the irradiation angle of the illumination light projected by the light projecting section with respect to the vertical direction is fixed, but it can also be made variable.
(Measurement light source 111)

Each of the first measurement light projection section 110A and the second measurement light projection section 110B includes a first measurement light source and a second measurement light source as the measurement light source 111, respectively. These measurement light sources 111 are, for example, halogen lamps that emit white light. The measurement light source 111 may be a light source that emits monochromatic light, for example, another light source such as a white LED (light emitting diode) or an organic EL that emits white light. Light emitted from the measurement light source 111 (hereinafter referred to as “measurement light”) is appropriately focused by the lens 113 and then enters the pattern generation unit 112.
(Pattern generation unit 112)

The pattern generation unit 112 reflects the light emitted from the measurement light source 111 so as to project the measurement light onto the measurement object WK. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and preset intensity (brightness) and then emitted. The measurement light emitted by the pattern generation unit 112 is converted by a plurality of lenses 114 and 115 into light having a diameter larger than the field of view that can be observed and measured by the light receiving unit 120, and then the measurement light is applied to the measurement target on the mounting unit 140. The object WK is irradiated.

The pattern generation unit 112 is a member that can switch between a light projection state in which the measurement light is projected onto the measurement target object WK and a non-light projection state in which the measurement light is not projected onto the measurement target object WK. For example, a DMD (digital micromirror device) can be suitably used for such a pattern generation section 112. The pattern generation unit 112 using a DMD is controlled by the measurement control unit 150 to be able to switch between a reflection state in which the measurement light is reflected onto the optical path as a light projection state and a light shielding state in which the measurement light is blocked as a non-light projection state. can.

A DMD is an element in which a large number of micromirrors (microscopic mirror surfaces) MM are arranged on a plane. Since each micromirror can be individually switched between ON and OFF states by the measurement control unit 150, a desired projection pattern can be configured by combining the ON and OFF states of a large number of micromirrors. As a result, it is possible to generate a pattern necessary for triangulation and measure the object to be measured WK. In this manner, the DMD functions as a projection pattern optical system that projects a periodic projection pattern for measurement onto the measurement target WK during measurement. Furthermore, the DMD has an excellent response speed and has the advantage of being able to operate at a higher speed than a shutter or the like.

Although the above example uses a DMD as the pattern generation section 112, the present invention does not limit the pattern generation section 112 to the DMD, and other members may also be used. For example, an LCOS (Liquid Crystal on Silicon: reflective liquid crystal element) may be used as the pattern generation unit 112. Alternatively, a transmissive member may be used instead of a reflective member to adjust the amount of measurement light transmitted. In this case, the pattern generation unit 112 is placed on the optical path of the measurement light to switch between a light projection state in which the measurement light is transmitted and a light blocking state in which the measurement light is blocked. For example, an LCD (liquid crystal display) can be used for such a pattern generation section 112. Alternatively, a projection method using multiple line LEDs, a projection method using multiple optical paths, an optical scanner method consisting of a laser and a galvano mirror, etc., or interference fringes generated by superimposing beams split by a beam splitter may be used. The pattern generation unit 112 may be configured using an AFI (Accordion Fringe Interferometry) method, a projection method using a moving mechanism and a solid grid composed of a piezo stage, a high-resolution encoder, etc., or the like.

Further, in the example shown in FIG. 2 and the like, an example in which two measurement light projectors are provided has been described, but the present invention is not limited to this, and it is also possible to provide three or more measurement light projectors. Alternatively, only one measurement light projecting section may be provided. In this case, by making the position of the measurement light projector movable, the measurement light can be projected onto the measurement object WK from different directions.
(Light receiving section 120)

The light receiving section 120 is arranged above the mounting section 140. The measurement light reflected above the mounting section 140 by the measurement object WK is collected and imaged by the plurality of lenses 122 and 123 of the light receiving section 120, and then received by the camera 121.
(Camera 121)

The camera 121 is, for example, a CCD (charge coupled device) camera including an image sensor 121a and a lens. The image sensor 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. Color image sensors require each pixel to receive red, green, and blue light, so their measurement resolution is lower than that of monochrome image sensors, and each pixel requires a color filter. Sensitivity decreases. Therefore, in this embodiment, a monochrome CCD is adopted as an image sensor, and a color image is acquired by irradiating the illumination light output unit 130 (described later) with illumination corresponding to RGB in a time-division manner. There is. With such a configuration, a color image of the object to be measured can be obtained without reducing measurement accuracy.

However, it goes without saying that a color image sensor may be used as the image sensor 121a. In this case, although the measurement accuracy and sensitivity decrease, it is no longer necessary to irradiate the illumination light output unit 130 with illumination corresponding to RGB in a time-sharing manner, and it is possible to obtain a color image by simply irradiating white light. The optical system can be configured simply. Each pixel of the image sensor 121a outputs an analog electrical signal (hereinafter referred to as a "light reception signal") corresponding to the amount of light received to the measurement control unit 150.

The image of the measurement object WK captured in this manner has an extremely accurate resemblance to the measurement object WK due to the characteristics of the lens. Further, by performing calibration using the magnification of the lens, it is possible to accurately associate the dimensions on the image with the dimensions on the actual measurement target WK.
(Measurement control unit 150)

The measurement control unit 150 is equipped with an A/D converter (analog/digital converter) and a FIFO (First In First Out) memory (not shown). The light reception signal output from the camera 121 is sampled at a constant sampling period by the A/D converter of the measurement control section 150 and converted into a digital signal under the control of the light source section 300. Digital signals output from the A/D converter are sequentially stored in a FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the controller 200 as pixel data.
(controller 200)

As shown in FIG. 1, the controller 200 includes a CPU 210, a ROM 220, a working memory 230, a storage device 240, and an operation section 250. This operation unit 250 can include a keyboard and a pointing device. A mouse, joystick, or the like is used as the pointing device.

The ROM 220 stores a system program. The working memory 230 is made up of RAM (Random Access Memory) and is used for processing various data. The storage device 240 consists of a hard disk or the like. The storage device 240 stores a three-dimensional shape measurement program for operating the three-dimensional shape measurement device. Furthermore, the storage device 240 is used to store various data such as pixel data provided from the measurement control section 150. Furthermore, the storage device stores brightness information, height information, and attribute information for each pixel that constitutes the measurement image.
(CPU210)

The CPU 210 is a control circuit or control element that processes applied signals and data, performs various calculations, and outputs calculation results. In this specification, CPU means an element or circuit that performs arithmetic operations, and regardless of its name, it is not limited to processors such as CPUs, MPUs, GPUs, and TPUs for general-purpose PCs, but also refers to processors such as FPGAs, ASICs, and LSIs. It is used to include chipsets such as processors, microcomputers, and SoCs.

CPU 210 generates image data based on pixel data given from measurement control section 150. Further, the CPU 210 performs various processes on the generated image data using the working memory 230, and causes the display unit 400 to display an image based on the image data. A block diagram of the CPU 210 is shown in FIG. This CPU includes a point cloud data generation section 260, a top view map image generation section 261, a measurement area setting section 264, an edge detection section 265, a regulation judgment section 266, a height image acquisition section 228, The functions of a group data synthesis section 211, a collision avoidance information input section 269, an avoidance operation instruction section 270, an evacuation position specifying section 268, etc. are realized.
(End detection unit 265)

The end detecting section 265 detects at least one end among both ends in the longitudinal direction of the measurement target object WK placed on the placing section 140. The end detection section 265 is configured to determine the rotational direction in which the rotary stage 143 is rotated based on the detection result when one end of the measurement target WK is detected and the other end is not detected. It's okay. By doing so, the rotation direction can be determined so as to avoid a rotation direction in which the detected end portion interferes with the rotation of the rotation stage 143, thereby increasing the safety of the rotation operation.

In addition, when no end of the measurement target object WK is detected, the end detection unit 265 prompts the user to select whether or not to rotate the rotation stage 143, or when the rotation stage 143 is placed on the mounting table. The configuration may be such that the user is guided to relocate the measurement target object WK. By doing this, when neither end of the measurement object WK is detected, by asking the user to select whether or not to rotate the measurement object WK or to relocate the measurement object WK, it is possible to It can be expected that the user will select a highly secure option.

Alternatively, the end detection unit 265 may determine whether parallel movement of the translation stage 141 is permitted or restricted.
(Regulation Judgment Department 266)

The regulation determining unit 266 determines whether or not the end can be detected by the end detecting unit 265, or whether the end is detected or not, or whether the rotating stage 143 is rotated in a direction in which the end approaches the support 702, or whether the translation stage 141 is parallel. Determine whether or not to restrict movement. Thereby, the three-dimensional shape measuring device can be operated so as to avoid a situation in which the measurement target object WK interferes with the three-dimensional shape measuring device while suppressing the increase in size of the three-dimensional shape measuring device.

The regulation determination unit 266 can output the results of determination based on whether detection is possible or not and the detection position in various forms. For example, the regulation determining unit 266 determines that, as a result of the edge detection by the edge detecting unit 265, the edge of the object to be measured WK is approaching the support 702, or that there is a risk of collision if the measurement is continued in the current state. The user is notified of this by flashing a lamp, buzzer, warning message, voice, text, image, video, etc. In this way, by giving a warning to the user before the measurement target WK comes into contact with the three-dimensional shape measuring device, it is possible to prompt the user to take appropriate measures such as workarounds and preventive measures.

The restriction determining unit 266 determines the moving direction and/or amount of movement of the mounting unit 140 based on the edge detection result by the edge detecting unit 265 so that the edge of the measurement target object WK does not approach the support 702. The movement control unit 144 can be instructed to change. Thereby, it becomes possible to restrict the movement of the mounting section 140 so that the end of the measurement target object WK does not come into contact with the support section 702. Further, the regulation determining unit 266 may determine the rotation direction in which the rotary stage 143 is to be rotated based on the detection result of the end by the end detecting unit 265.

The edge detection section 265 can detect an edge based on the point cloud data generated by the point cloud data generation section 260. At this time, the end portion may be directly detected from the point cloud data generated by the point cloud data generation unit 260. Alternatively, it is extracted from a top view map image generated by a top view map image generation unit based on point cloud data and showing a plan view when looking down from directly above the measurement target object WK placed on the mounting unit 140. The end portion may be detected based on the contour of the measured object WK. As a result, by using the top view map image of the measurement object WK viewed from directly above, it is possible to obtain the outline of the plan view of the measurement object WK, making it easier to grasp the edges and improving the accuracy of collision avoidance. This has the advantage of improving accuracy. In order to extract the outline of the object to be measured, a known method such as edge extraction, which extracts the outline edges that constitute the outline of the object to be measured, can be used.
(Point cloud data generation unit 260)

The point cloud data generation section 260 generates point cloud data, which is a set of points having three-dimensional position information representing the three-dimensional shape of the measurement object WK, based on the light reception signal output by the light reception section 120.
(Top view map image generation unit 261)

The top view map image generation unit 261 generates a plan view of the measurement target WK placed on the placement unit 140 when looking down from directly above, based on the point cloud data generated by the point cloud data generation unit 260. Generate a top view map image shown. By generating such a top-view map image of the measurement object WK viewed from directly above, the overall shape of the measurement object WK can be easily grasped, and the measurement area can be easily set. For example, the top view map image generation unit 261 adds a two-dimensional texture image obtained by imaging the measurement target WK by the light receiving unit 120 to the point cloud data generated by the point cloud data generation unit 260, and adds a three-dimensional texture image to the point cloud data generated by the point cloud data generation unit 260. Paste each location information to generate a top view map image. Alternatively, a mesh image may be generated in which polygons are attached to each point of the point cloud data generated by the point cloud data generation unit 260 to form a planar shape. A top view map image is generated from this mesh image. The mesh image may be generated by the top view map image generation section 261 or may be generated by the mesh image generation section.

The top view map image generation unit 261 can also generate a composite top view map image by combining a plurality of top view map images obtained by respectively acquiring a plurality of different areas of the measurement target object WK by the light receiving unit 120. As a result, a top view map image with a wider field of view can be obtained by combining a plurality of top view map images, and an environment in which it is easy to perform tasks such as specifying a measurement area can be provided to the user.

In this case, the top view map image generation unit 261 can also accept a designation of a position where a top view map image is to be added to the top view map image displayed in the top view map image display area. Upon receiving this designation, the top view map image generation unit 261 can generate a top view map image at the designated position, update the composite top view map image, and display it in the top view map image display area. . In this way, from the obtained top view map image, it becomes possible to add top view map images of missing parts of the measurement target WK according to the user's instructions as necessary, and it is possible to An appropriate top view map image can be obtained.
(Measurement area setting section 264)

The measurement area setting unit 264 sets a measurement area on the observation image displayed on the display unit 400.

The height image acquisition unit 228 acquires a height image having height information based on a plurality of fringe projection images. Further, the point cloud data synthesis section 211 synthesizes the plurality of point cloud data generated by the point cloud data generation section 260. Here, the point group is also called a point cloud or the like, and has coordinates in a three-dimensional space (for example, XYZ orthogonal coordinates). For this reason, the point cloud data generation unit 211 superimposes the point cloud data of the measurement object generated at different positions on the mounting unit on the coordinates of a common three-dimensional space, allowing for more detailed and precise measurements. Can express the surface shape of an object.
(Image inspection unit 216)

The image inspection unit 216 performs a predetermined image inspection on the image of the measurement object WK captured by the measurement unit 100. The image inspection section 216 can include a measurement section 216b for performing predetermined measurements on the measurement target image. Thereby, an image inspection can be performed based on the measurement results measured by the measurement unit 216b. For example, it becomes possible to perform an inspection such as determining whether a product is good or defective based on the results of measurements such as the length and angle of a predetermined portion of the measurement target WK. The measurement performed by the measurement unit 216b includes calculating a contour line cut by a plane perpendicular to the screen that passes through a specified profile line on the texture image, and displaying the contour line on the display unit 400 as a profile graph. You can extract circles, straight lines, etc. from the contour line shown in and find their radius and distance.
(Evacuation position identification unit 268)

The evacuation position specifying unit 268 specifies a evacuation position where the measurement target object WK does not collide with the support unit 700 when the rotation stage 143 is rotationally moved by the movement control unit 144. The movement control unit 144 rotates the rotation stage 143 while the translation stage 141 is moved in parallel to the retreat position specified by the retreat position specifying unit 268.
(Collision avoidance information input section 269)

The collision avoidance information input unit 269 acquires collision avoidance information for avoiding a situation in which the placed measurement object collides due to movement of the mounting surface 142. Examples of the collision avoidance information include external shape information indicating the external shape of the object to be measured, information on the position of a corner of the object to be measured, and direction information indicating the moving direction of the measurement surface.
(Avoidance motion instruction section 270)

The avoidance operation instruction section 270 instructs avoidance of a collision by moving the mounting section 140 based on the collision avoidance information input by the collision avoidance information input section 269. The avoidance operation instruction section 270 is configured to, for example, restrict the movement of the mounting section 140 to the movement control section 144 so as to avoid an operation in which the end of the measurement object placed on the mounting surface 142 collides with the movement control section 144. You may.

Alternatively, the avoidance operation instruction section 270 may act as a warning section 215 that notifies you that there is a risk of a collision if the mounting section 140 is moved in a specific direction based on the collision avoidance information input by the collision avoidance information input section 269. Good too. The warning section 215 causes the display section to display, for example, collision avoidance information for avoiding a collision between the end of the object to be measured and the support section.

In this way, by providing the collision avoidance information input section 269, it is possible to avoid a situation where the measurement target unexpectedly collides with surrounding members or a part of the three-dimensional shape measuring device based on the collision avoidance information. It becomes possible to aim for.

The collision avoidance information input unit 269 can acquire collision avoidance information by accepting input from the user. For example, as collision avoidance information, the user is allowed to input information regarding the external shape of the object to be measured placed on the placing section 140. In this way, by inputting collision avoidance information by the user, it is possible to prevent a situation in which the object to be measured interferes.

Further, the avoidance motion instruction section 270 may be operated independently or may be operated in conjunction with the detection result of the edge detection section 265. That is, the end detecting section 265 detects at least one of both ends in the longitudinal direction of the object to be measured placed on the placing surface 142. If an edge is detected, based on the detection result, the avoidance operation instructing unit 270 instructs an avoidance measure to avoid a situation where the edge of the object to be measured collides with the object. On the other hand, if the end detecting section 265 does not detect an end, an avoidance measure is given to avoid a situation where the end collides based on the collision avoidance information inputted by the collision avoidance information input section 269. For example, it may instruct the movement control unit 144 to move the mounting unit 140 to avoid collisions between the ends of the measurement target, or prohibit movement that may cause a collision. Applying restrictions such as With such a configuration, the end detecting section 265 can automatically detect the end of the object to be measured, and if the end can be detected, the movement control section 144 can automatically control the end to avoid a collision. Furthermore, if detection is not possible, movement can be controlled based on collision avoidance information manually input by the user, so it is possible to avoid a collision even if end detection fails.

In this way, the CPU 210 serves as different means for realizing various functions. However, it goes without saying that the present invention is not limited to a configuration in which one member serves as multiple means, and that it is also possible to provide a plurality of members or each member separately to realize each part or function.
(Display section 400)

The display unit 400 displays the fringe projection image acquired by the measurement unit 100, the height image generated by the height image acquisition unit 228 based on the fringe projection image, or the texture image captured by the measurement unit 100. It is a member of The display section 400 is composed of, for example, an LCD panel or an organic EL (electroluminescence) panel. Furthermore, by using a touch panel as the display section, it can also be used as an operation section.

Further, the display unit 400 displays the observation image generated by the light receiving unit 120.
(Placement section 140)

In FIG. 2, two directions perpendicular to each other within a plane (referred to as a "placing surface") on the placing part 140 on which the measurement target object WK is placed are defined as the X direction and the Y direction, and arrows X , denoted by Y. A direction perpendicular to the mounting surface 142 of the mounting section 140 is defined as a Z direction, and is indicated by an arrow Z. The direction of rotation around an axis parallel to the Z direction is defined as the θ direction, and is indicated by an arrow θ.

The mounting section 140 includes a translation stage 141 and a rotation stage 143. Translation stage 141 has an X-direction movement mechanism and a Y-direction movement mechanism. The rotation stage 143 has a θ direction rotation mechanism. The translation stage 141 and the rotation stage 143 constitute the mounting section 140. Furthermore, the mounting section 140 may include a fixing member (clamp) that fixes the measurement target object WK to the mounting surface 142. Further, the mounting section 140 may include a tilt stage having a mechanism rotatable around an axis parallel to the mounting surface 142.

Here, as shown in FIG. 2, the central axes of the left and right light projecting sections 110 and the central axes of the light receiving section 120 are determined by the arrangement of the measurement target WK on the mounting section 140 and the coverage of the light projecting section 110 and the light receiving section 120. The relative positional relationship of the light receiving section 120, the light projecting section 110, and the mounting section 140 is determined so that they intersect at a position where the depth of field is appropriate. In addition, since the center of the rotation axis in the θ direction coincides with the central axis of the light receiving unit 120, when the mounting unit 140 rotates in the θ direction, the measurement target WK does not fall out of the field of view, and the rotation axis It rotates within the field of view around . In addition, in this figure, the measurement unit 100 has an arrangement rotated around the X direction on the plane of the paper, and the optical axis of the light receiving unit 120 and the normal to the top surface of the mounting unit 140 (Z direction) do not necessarily match. There's no need.
(Light source section 300)

The light source section 300 includes a control board 310 and an observation illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting section 110, the light receiving section 120, and the measurement control section 150 based on commands from the CPU 210 of the controller 200. Note that this configuration is an example, and other configurations may be used. For example, the measurement control section 150 may control the light projecting section 110 and the light receiving section 120, or the controller 200 may control the light projecting section 110 and the light receiving section 120, and the control board may be omitted. Alternatively, the light source section 300 may be provided with a power circuit for driving the measuring section 100.
(Observation illumination light source 320)

The observation illumination light source 320 includes three-color LEDs that emit, for example, red light, green light, and blue light. By controlling the brightness of the light emitted from each LED, light of any color can be generated from the observation illumination light source 320. The illumination light IL generated from the observation illumination light source 320 is output from the illumination light output section 130 of the measurement section 100 through a light guide member (light guide). In addition to the LED, other light sources such as a semiconductor laser (LD), a halogen light, and an HID may be used as the observation illumination light source. In particular, when an element capable of capturing color images is used as the image sensor, a white light source can be used as the observation illumination light source.

The illumination light IL outputted from the illumination light output unit 130 illuminates the measurement object WK by switching red light, green light, and blue light in a time-sharing manner. Thereby, the texture images captured using these RGB lights can be combined to obtain a color texture image, which can be displayed on the display unit 400.

The illumination light output section 130 in FIG. 2 has an annular shape and is arranged above the mounting section 140 so as to surround the light receiving section 120. Thereby, illumination light is irradiated from the illumination light output unit 130 onto the measurement target WK in a ring shape so that no shadows are generated.

In addition to such ring illumination, the illumination light output unit 130 can also add transmitted illumination or coaxial epi-illumination. In the example of FIG. 2, a transmitted illumination section is provided on the mounting section 140. The transmitted illumination section illuminates the measurement object WK from below the mounting section 140. For this purpose, the mounting section 140 is provided with a transmitted illumination light source, a reflector, and an illumination lens system.

Note that ring illumination and transmitted illumination can be omitted as appropriate. If these are omitted, a two-dimensional image can also be captured using illumination for three-dimensional measurement, that is, a light projector.

In the example shown in FIG. 1, the observation illumination light source 320 is not included in the main body case 101, but is provided externally to the measurement section 100 in the light source section 300. By doing so, the quality of the illumination light supplied from the observation illumination light source 320 can be easily improved. For example, since the RGB LEDs that make up the observation illumination light source 320 have different light distribution characteristics, when RGB texture images are captured using the monochrome image sensor 121a, uneven illumination colors will occur within the field of view. . Therefore, by separately preparing dedicated optical systems that match the light distribution characteristics of each LED and combining them, we can absorb the differences in light distribution characteristics and create uniform white illumination without color unevenness. can be introduced.

Further, it is possible to avoid a situation in which the heat generated by the observation illumination light source 320 affects the optical system of the measuring section 100. That is, if there is a heat source near the optical system members, the dimensions may be distorted due to thermal expansion, resulting in a decrease in measurement accuracy. Such problems caused by heat generated by the observation illumination light source can be avoided. Further, as a result, there is an advantage that a high-output light source with a large amount of heat can be used as an observation illumination light source.

The measurement light source 111 of each light projecting section 110A, 110B is, for example, a blue LED (light emitting diode). The measurement light source 111 may be another light source such as a halogen lamp. Light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately focused by the lens 113 and then enters the pattern generation unit 112 .

The pattern generation unit 112 is, for example, a DMD (digital micromirror device). The pattern generation unit 112 may be an LCD (liquid crystal display), an LCOS (liquid crystal on silicon: reflective liquid crystal element), or a mask. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and preset intensity (brightness) and then emitted. The measurement light emitted from the pattern generation section 112 is converted by the lens 114 into light having a diameter larger than the dimensions of the measurement object WK, and then is irradiated onto the measurement object WK on the mounting section 140.

The measurement light source 111, lens 113, and pattern generation section 112 of the light projecting section 110A are arranged substantially parallel to the optical axis of the light receiving section 120. Similarly, the measurement light source 111, lens 113, and pattern generation section 112 of the light projecting section 110B are arranged substantially parallel to the optical axis of the light receiving section 120. On the other hand, the lenses 114 of each of the light projectors 110A and 110B are arranged so as to be offset with respect to the measurement light source 111, the lens 113, and the pattern generator 112. As a result, the optical axes of the light projecting sections 110A and 110B are inclined with respect to the optical axis of the light receiving section 120, and measurement light is emitted from both sides of the light receiving section 120 toward the measurement object WK.

In this embodiment, in order to widen the irradiation range of measurement light, the light projectors 110A and 110B are configured to have a constant angle of view. The angle of view of the light projectors 110A and 110B is determined by, for example, the dimensions of the pattern generator 112 and the focal length of the lens 114. If it is not necessary to widen the irradiation range of the measurement light, a telecentric optical system with an angle of view of approximately 0 degrees may be used for each of the light projectors 110A and 110B.

The measurement light reflected above the mounting section 140 by the measurement object WK is focused and imaged by the lens 122 of the light receiving section 120, and is received by the image sensor 121a of the camera 121.

In this embodiment, in order to widen the imaging field of the light receiving section 120, the light receiving section 120 is configured to have a constant angle of view. In the present embodiment, the imaging field of view of the light receiving unit 120 means a spatial region that can be imaged by the light receiving unit 120. The angle of view of the light receiving unit 120 is determined by, for example, the dimensions of the image sensor 121a and the focal length of the lens 122. If a wide field of view is not required, a telecentric optical system may be used for the light receiving section 120. Here, the magnifications of the lenses 122 of the two light receiving sections 120 provided in the measuring section 100 are different from each other. Thereby, by selectively using the two light receiving sections 120, the measurement target object WK can be imaged at two different magnifications. The two light receiving sections 120 are preferably arranged such that the optical axes of the two light receiving sections 120 are parallel to each other.

The camera 121 is, for example, a CCD (charge coupled device) camera. The image sensor 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. Each pixel of the image sensor 121a outputs an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the amount of light received to the control board 150.

Unlike a color CCD, a monochrome CCD does not need to be provided with a pixel that receives red wavelength light, a pixel that receives green wavelength light, and a pixel that receives blue wavelength light. Here, if a specific wavelength such as a blue wavelength is used as the measurement light, a color CCD can only use pixels that receive light of a specific wavelength for measurement, but a monochrome CCD does not have such restrictions. Therefore, the measurement resolution of a monochrome CCD is higher than that of a color CCD. Furthermore, unlike color CCDs, monochrome CCDs do not require a color filter for each pixel. Therefore, the sensitivity of a monochrome CCD is higher than that of a color CCD. Therefore, point cloud data, which will be described later, can be obtained with high accuracy. For these reasons, the camera 121 in this embodiment is provided with a monochrome CCD.

In this embodiment, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement target object WK in a time-sharing manner. According to this configuration, a color image of the measurement target object WK can be captured by the light receiving section 120 using a monochrome CCD.

On the other hand, if the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to time-divisionally irradiate the measurement target object WK with red wavelength light, green wavelength light, and blue wavelength light, and irradiates the measurement target object WK with white light. Therefore, the configuration of the illumination light source 320 can be simplified.

FIG. 4 shows a three-dimensional shape measuring system 1000 including a three-dimensional shape measuring device 500 according to the first embodiment. A three-dimensional shape measuring system 1000 shown in this figure has a three-dimensional shape measuring device 500 that is composed of a three-dimensional shape measuring device main body 500A and a controller 200, and inputs such as a control PC 1, a monitor 2, a keyboard 3, a mouse, etc. Device 4 is connected. A three-dimensional shape measurement program for performing three-dimensional shape measurement using the three-dimensional shape measurement device 500 is installed in the control PC 1. Using the three-dimensional shape measurement program, the user can instruct the three-dimensional shape measurement device 500 to set up, take an image, perform measurement, and the like.

In the example of FIG. 4, the controller 200 is configured separately from the three-dimensional shape measuring device main body 500A, but the controller may be integrated into the three-dimensional shape measuring device main body. Alternatively, the functions of the controller can be integrated with the control PC.

The three-dimensional shape measuring device 500 includes a measuring section 100, a supporting section 700, a pedestal section 600, and a light shielding cover 102. The measurement section 100, the support section 700, the pedestal section 600, and the light-shielding cover 102 are configured as a detachable unit as shown in the exploded perspective view of FIG. This is advantageous in terms of maintainability and portability of each member. The light-shielding cover 102 is extended in front of the light receiving section 120 and the light projecting section 110 to cover them, and is held above the mounting surface 142 in a position spaced apart from the mounting surface 142. The upper measurement area is shielded from external light. This light-shielding cover 102 is detachable depending on the object to be measured, and the basic minimum configuration for measurement is a combination of the measuring section 100 and the pedestal section 600.

The pedestal section 600 includes a mounting section 140. The mounting section 140 includes a rotation stage 143 that rotates the mounting surface 142 on which the measurement target is mounted as described above, and a translation stage 141 that moves the mounting surface 142 in parallel. Here, the mounting section 140 is constituted by an XYθ stage in which an XY stage, which is a translation stage 141, is placed on the upper surface of a θ stage, which is a rotation stage 143.

The pedestal section 600 holds the measurement section 100 in a vertical position via the support section 700. Furthermore, the measuring section 100 fixes the light projecting section 110 and the light receiving section 120 in a posture in which the optical axis is inclined with respect to the mounting surface 142. For this reason, the measuring section 100 includes a fixing section 125 that fixes the light projecting section 110 and the light receiving section 120. As shown in FIG. 7, which will be described later, the fixed part 125 is supported by a support 702 in a position spaced apart from the pedestal part 600. Further, the light projecting section 110 and the light receiving section 120 are fixed in a posture such that their optical axes are inclined with respect to the mounting surface 142. As a result, a measurement area using the measurement light is formed above the mounting section 140. Further, the optical systems such as the light projecting section 110 and the light receiving section 120 are held in a posture looking down diagonally over the measurement area.

The support section 700 connects the pedestal section 600 and the measurement section 100. The measuring section 100 is held so as to be located above the mounting section 140 via the supporting section 700 . The measuring section 100 includes a light projecting section 110 and a light receiving section 120 as described above as an observation optical system. The measuring section 100 is held in a position looking down from an oblique direction, not vertically upward, with respect to a mounting surface 142 of a mounting section 140 provided on a pedestal section 600. Such an arrangement provides the advantage that the shapes of the top and side surfaces of the object to be measured can be easily obtained in a single measurement. In particular, in order to obtain information in the height direction, information on sides of the object to be measured that have height differences is useful. On the other hand, it is difficult to grasp the overall shape of the object to be measured from only the side surface. Therefore, we designed the measuring unit to be in a position that allows us to capture the object to be measured from an obliquely upward perspective, allowing us to obtain both the top surface, which makes it easy to grasp the overall outline, and the side surface, which makes it easy to obtain height information, at the same time. It is advantageous to hold the device 100 in an inclined position relative to the mounting surface 142. In the example shown in the side view of FIG. 6, the measuring unit 100 is held in an inclined position such that the optical axes of the light emitting unit 110 and the light receiving unit 120 form an angle of about 45° with respect to the mounting surface 142 of the XYθ stage. are doing. In this way, the measurement section 100 is connected to the pedestal section 600 by the support section 700 so as to keep the bird's-eye view angle of 45 degrees constant. This makes it possible for the measuring unit 100 to always look at the mounting surface 142 at a constant angle and at a constant position, and the positional relationship between the three axes of XYθ, which are the driving axes of the mounting surface 142, and the observation optical system is maintained constant. drooping

The light receiving unit 120 may include a plurality of optical systems with different magnifications. Such an example is shown in FIG. In this example, the light receiving unit 120 includes a first optical system having a first magnification and a second optical system having a second magnification higher than the first magnification. In this way, by providing optical systems with different magnifications, the field of view can be switched depending on the size of the measurement object WK placed on the placement surface 142. In this example, the light receiving elements include a first light receiving element 121b optically coupled to the first optical system and a second light receiving element 121c optically coupled to the second optical system. Note that the first optical system and the first light receiving element 121b may be collectively referred to as the first camera 121B, and the second optical system and the second light receiving element 121c may be collectively referred to as the second camera 121C. By preparing multiple light-receiving elements in this way and configuring each optical system to capture an image with a separate light-receiving element, it is possible to process the images received by each optical system in parallel, speeding up the processing, and Simplification of optical coupling is achieved. However, a common light receiving element may be optically connected to a plurality of optical systems.

The first optical system and the second optical system are arranged so that their optical axes are parallel to each other. The first optical axis LA1 of the first optical system and the second optical axis LA2 of the second optical system are each inclined at about 45 degrees with respect to the mounting surface 142. Here, the second optical system with high magnification, that is, the second camera 121C, is arranged vertically on the fixed part 125 so as to be below the first camera 121B, which is the first optical system. This arrangement has the advantage that when switching from the first optical system to the second optical system, the viewpoint moves to the front side of the measurement target WK, making it relatively easy for the user to understand the change in visual field. is obtained. More precisely, even if the measurement object WK placed on the mounting surface is large in the first optical system with a wide field of view (low magnification), the second optical system with a narrow field of view (high magnification) In this case, even if the measurement object WK placed on the mounting surface is small, it is possible to keep the entire measurement object WK within the field of view when the object WK is rotated all the way around.
(XYθ stage)

Next, a configuration example of the pedestal section 600 will be described based on FIGS. 7 to 9. In the example of FIG. 7, in the XYθ stage, an XY stage that is a translation stage 141 is placed on a θ stage that is a rotation stage 143 fixed on a pedestal 600. Further, the rotation axis of the rotation stage 143 is arranged to intersect with the optical axes of the first optical system and the second optical system at an angle of 45 degrees. The translation stage 141 placed on the rotation stage 143 is configured such that its XY drive axes also rotate as the rotation stage 143 rotates, as shown in the plan views of FIGS. 8 and 9. 8 shows the X-axis and Y-axis for moving the translation stage 141, and FIG. 9 shows the θ direction for rotating the rotation stage 143, respectively. In this way, by having the configuration in which the translation stage 141 is placed on the rotation stage 143, the optical axis of the measurement unit 100 and the rotation axis of the rotation stage 143 maintain a fixed mechanically connected relationship. This makes it easier. Furthermore, by calibrating the moving direction of the translation stage 141 and the rotating direction of the stage rotation axis as necessary, the stage drive axis in the coordinate system in the observation space of the measurement unit 100 can be grasped.

Further, as shown in FIG. 8, the reference position for the movement of the translation stage 141 is, for example, a position that serves as a reference for parallel movement. Typically, this is the origin D(0,0) of the XY plane. Further, point C shown in FIG. 9 is the center of the θ rotation, and in the case of FIG. 9 coincides with the rotation axis of the rotation stage 143. By arranging the translation stage 141 above the rotation stage 143 so that points C and D coincide, the movement of the translation stage 141 can be easily controlled.

Here, an example of the configuration of a rotation mechanism for rotating the rotation stage 143 is shown in FIG. 10, and an example of the configuration of a movement mechanism for moving the translation stage 141 is shown in FIG. 11, respectively. The mounting section 140 shown in these examples has a configuration in which the translation stage 141 is mounted on the rotation stage 143 as described above.

As shown in FIG. 10, the rotation mechanism of the rotation stage 143 includes a rotation drive guide 800, a rotation pulse instruction section 810, an actual rotation amount reading section 820, a rotation drive motor 830, a deceleration mechanism 840, and an origin sensor 850 in a pedestal section 600. , a translation stage fastening section 860, and a movement control section 144. Since the rotation drive guide 800 is directly fastened to the pedestal portion 600, the rotation axis is uniquely determined mechanically. Movement control section 144 sends a control signal to rotation pulse instruction section 810. The rotation pulse instruction section 810 receives a control signal from the movement control section 144, generates a rotation pulse, and rotates the rotation drive motor 830 by the amount of the rotation pulse. The rotary drive motor 830 transmits power to the rotary drive guide 800 via the speed reduction mechanism 840, and generates rotational movement of the rotary stage 143 through the rotary drive guide 800. In the example of FIG. 10, the speed reduction mechanism 840 performs speed reduction and power transmission using a timing belt. Further, the rotational drive amount of the rotation stage 143 is detected by the actual rotation amount reading section 820. Determining whether the control state of the rotation stage 143 is good or bad by comparing the expected rotation amount converted from the rotation pulse amount from the rotation pulse instruction section 810 and the actual rotation amount detected by the actual rotation amount reading section 820. becomes possible. For example, it is possible to detect an unexpected state of rotation stoppage due to a collision or the like. The origin sensor 850 also determines the initial coordinates of the rotation stage 143. Thereby, the initial coordinates of the rotary stage 143, which can rotate infinitely, can be grasped.

Further, the rotation stage 143 is fixed to the translation stage 141 via a translation stage fastening portion 860. The rotational movement of the rotation stage 143 through the rotation drive guide 800 is also transmitted to the translation stage 141, making it possible to change the rotational attitude of the mounting surface 142 on the pedestal section 600.

As shown in FIG. 11, the drive mechanism of the translation stage 141 includes a linear motion guide 900, a linear motion power transmission section 910, a movement pulse instruction section 920, an actual movement amount reading section 930, a translation drive motor 940, It includes an infinite rotation connector 950 and a movement control section 144. In this way, the infinite rotation connector 950 allows the control signal or drive power sent from the fixed side of the rotation stage 143 to be transmitted to the drive side of the rotation stage 143, that is, the fixed side of the translation stage 141, so that the rotation stage 143 An infinite rotation is realized. Note that if the infinite rotation connector is not provided, the rotation stroke will be finite because the drive involves twisting the harness. The translational drive motor 940 is rotated by the amount of movement by the movement pulse instruction section 920 from the movement control section 144 arranged on the fixed side of the rotation stage 143 via the infinite rotation connector 950, and the translation drive motor 940 is rotated by the amount of movement by the movement pulse instruction section 920. The translation stage 141 is driven through the motion guide 900. The amount of movement of translation stage 141 is detected by actual movement amount reading section 930. By comparing the estimated movement amount converted from the movement pulse from the movement pulse instruction section 920 and the actual movement amount detected by the actual movement amount reading section 930, it is possible to determine whether the control state of the translation stage 141 is good or bad. Become.

Furthermore, in the above example, a configuration example of the mounting section 140 in which the translation stage 141 is arranged on the upper surface of the rotation stage 143 has been described. With this arrangement, the rotation stage 143 can be rotatably fixed to the pedestal, and the translation stage 141 can be rotated by the rotation stage 143 together with the object to be measured on its upper surface. By rotating the measurement object and the translation stage 141 together in this way, the positional relationship between the measurement object and the translation stage 141 can be maintained constant as long as the mounting orientation of the measurement object is not changed. As a result, three-dimensional measurements from multiple different viewpoints by rotating the rotary stage 143 are always performed within the same range of the measurement target, and data from multiple viewpoints are averaged at the same point on the measurement target. This allows stable measurement to be performed over the entire measurement target and improves measurement accuracy.

However, the present invention does not limit the mounting section 140 to such a configuration. For example, as shown in a three-dimensional shape measuring device 500B according to the second embodiment shown in FIG. (Details will be described later). With such an arrangement of the mounting section 140, it is also possible to similarly obtain omnidirectional full 3D data of a measurement object protruding from the field of view through similar measurements and superimposition.
(Top view map image)

The three-dimensional shape measuring device according to the embodiment has a top view map image generation function. The top view map image is an image viewed from above, which corresponds to a plan view of the measurement target placed on the placement unit 140. Particularly in a three-dimensional shape measuring device as shown in FIG. 6, which observes the object to be measured not from directly above but from diagonally above, it may not be easy to visually grasp the outer shape of the object to be measured. Therefore, by preparing a plan-like image of the measurement target as a top view map image, the user can be shown the entire image of the measurement target, and can easily determine which part of the measurement target is currently being observed from an oblique direction. This makes it easier to understand the positional relationships.

The viewpoint of the top view map image is basically the direction perpendicular to the mounting surface 142. However, the image may be viewed from a slightly inclined angle. For example, when the vertical direction of the mounting surface 142 is 0°, the image may be viewed from a direction inclined by about ±5°. In this manner, even an image that is somewhat tilted from the vertical direction is referred to as a top-view map image in this specification. Furthermore, since the top view map image is intended to be used for navigational purposes such as grasping the measurement position of the measurement target, it does not need to be an optical image captured by an image sensor, and can be used to simulate the measurement target. The image shown is sufficient. Further, the measurement by the three-dimensional shape measuring device is performed on a separately generated three-dimensional image, etc., and not on the top-view map image, so the top-view map image itself does not require high accuracy.

A non-contact three-dimensional shape measuring device that can be viewed diagonally from above, as shown in FIG. 6, can be used to measure not only the top surface of an object to be measured, but also the three-dimensional shape including the outer circumferential side surface. In this configuration, the object to be measured is viewed from diagonally above (45° in FIG. 6) so that the top and side surfaces of the object to be measured are included in the field of view. During such three-dimensional measurement, in order to obtain the outer shape of the object to be measured, the rotation stage 143 may be rotated to view the entire circumference of the object to be measured. Furthermore, it is also possible to employ the translation stage 141 so that a larger measurement target can be measured. On the other hand, there is also a demand for measuring larger objects. In such a case, if the long object WK1 to be measured is placed and the placing part 140 is rotated as shown in FIG. 13, it is conceivable that it will collide with the pillar part 702 of the three-dimensional shape measuring device. In this figure, a collision occurs when the distance DT1 between the protruding amount of the measurement object WK1 and the support 702 is larger than the distance DT2 between the outermost circumference of the mounting surface 142 and the support 702.
(Measurement object external shape detection function)

Therefore, the three-dimensional shape measuring device according to the present embodiment includes an outer shape detection function for detecting the outer shape of the object to be measured. Detection of the outer shape of the object to be measured is performed based on image information obtained by acquiring an image of the object to be measured placed on the mounting surface 142 using an imaging optical system included in the measurement unit 100. This detection of the outer shape of the object to be measured is performed, for example, by the edge detection section 265 of the CPU 210. As the outer shape detection algorithm, known methods such as edge detection can be used as appropriate. As mentioned above, in a configuration where the imaging optical system has two light-receiving elements, one with low magnification and one with high magnification, even if the high-magnification light-receiving element is selected for observation, the low-magnification light-receiving element may not be used. By using the obtained image, a wider range of external shape information about the object to be measured can be obtained. In this way, even if the three-dimensional shape measuring device has a low-magnification measurement mode and a high-magnification measurement mode, the imaging for grasping the external shape of the object to be measured depends on the selected measurement mode. It is preferable to use a light-receiving element with a low magnification.

FIG. 14 shows an obliquely overhead observation image OI1 of the object to be measured, and FIG. 15 shows an observation image OI2 overlapping the measurable range MA. In general, low magnification lenses used to perform wide-area measurements are often wide-angle lenses with a field of view that changes with depth. Due to the configuration of the wide-angle optical system, the image capturing optical system that is viewed diagonally from the mounting surface 142 is in a perspective state, and the contour line does not necessarily accurately represent the external shape of the measurement target. The problem was that it was not shown. This is due to the fact that the magnification differs as you go in the depth direction, and the pixel length also differs.

In addition, in an overhead image viewed diagonally from above, in addition to missing the contour information on the back side of the measurement target, the front outline of the measurement target included in the field of view is not always on the mounting surface 142. This also includes the problem that it is not possible to accurately represent the "ends" when placed on the board. Here, problems with edge detection using a wide-angle bird's-eye view are shown in FIGS. 16 and 17. As shown in FIG. 16, if the measurement object WK2 is placed in such a state that the bottom surface is accurately touching the placement surface 142, the contour line (indicated by a black circle in FIG. 16) of the measurement object WK2 is It matches the outer shape of the measurement object WK2. However, as shown in FIG. 17, when the measurement target WK3 is placed on the mounting surface 142 in a tilted posture, the contour line visible on the image (indicated by a white circle in FIG. 17) It does not match the edge of object WK3. Furthermore, even in the case of FIG. 16, if a protrusion exists on the upper side, the contour line and the end do not match.

Even if the measurable range is drawn by moving the mounting surface 142 in such a state, the user cannot recognize the edges, leading to the problem that the accuracy of the range setting cannot be recognized. For example, even in the observation image OI2 in which the measurable range MA is superimposed as shown in Fig. 15, it is not only uncertain whether the back side is included in the measurable range, but also whether the object to be measured is tilted or the installation position is too far. It can be seen that it is difficult to determine whether there is a deviation.

Therefore, the three-dimensional shape measuring device according to the present embodiment changes the viewpoint and generates a top-view overhead image viewed from the top, in response to such difficulty in detecting the outer shape of the object to be measured. This makes it possible to clearly show the measurement range to the user. In addition, by understanding the posture of placing the object to be measured on the mounting surface 142 and the external shape of the object, it is possible to avoid unintentional damage to other objects when moving the mounting surface 142. Benefits include the ability to perform movement control that takes collision prevention into account so as not to collide with other parts.
(Automatic collision detection function)

Next, in order to specify a retreat position where the object to be measured does not collide with the support section 700, the evacuation position specifying section 268 first needs to detect that there is a possibility that the object to be measured will collide with the support section 700. For this reason, the three-dimensional shape measuring device according to the present embodiment is equipped with an automatic collision detection function that automatically detects a situation in which the object to be measured collides with the support 702 or the like. Specifically, the size of the object to be measured placed on the mounting section 140 is detected by the edge detection section 265 at the start of measurement or just before the collision behavior, and the regulation judgment section 266 autonomously detects the size of the object to be measured placed on the mounting section 140. The configuration is such that rotation and parallel movement of the mounting section 140 are restricted.

Hereinafter, a method will be described in which the edge detection unit 265 detects in advance a situation in which the edge of the object to be measured collides with the three-dimensional shape measuring device. Examples of patterns in which a collision may occur during the operation of the XYθ stage including the translation stage 141 and the rotation stage 143 described above include a collision during linear movement by the translation stage 141 and a collision during rotational movement by the rotation stage 143. in this case,
(1) When the occurrence occurs during movement of the translation stage 141 or rotational movement of the rotation stage 143 during operations such as photographing or measurement,
(2) If the occurrence occurs during movement when the placing unit 140 returns to the reference position,
can be mentioned. Here, a procedure for automatically detecting a collision in advance will be explained for each of (1) and (2). Regarding (1), it is assumed that each drive shaft of the translation stage 141 and rotation stage 143 has already completed the return process to the reference position, and the current coordinate position can be detected by the three-dimensional shape measuring device. It is said that In other words, in (1), interference between the outer peripheral edge of the detail and the support portion 702 is not considered. On the other hand, regarding (2), it is assumed that the three-dimensional shape measuring device is in a state immediately after startup, and that the mounting section 140 returns to the reference position from a state where the current position and orientation are unknown.
(Collision advance detection function during operation)

By moving the mounting section 140 during use of the three-dimensional shape measuring device, various situations are conceivable in which the object to be measured placed on its upper surface interferes with surrounding objects. For example, other measuring devices, stands, users, or members of a three-dimensional shape measuring device located around the mounting table may be included. Here, as shown in FIG. 8 etc., we will focus on the support section 702 that constitutes the support section 700 that connects the measurement section 100 and the pedestal section 600 provided with the mounting section 140, and Consider control that automatically avoids a situation in which a measurement object placed on the stage collides with the support 702 due to movement of the stage. Note that the position and size of the support column 702, that is, the contour information, is held in advance by the three-dimensional shape measuring device.

Several patterns shown in FIGS. 18A to 18D are assumed for the collision of the object to be measured with the support column 702. 18A and 18B show how the object to be measured WK4 collides with the support 702 by moving the translation stage 141 in parallel to the front side (downward in the figure), and FIGS. 18C and 18D show how the translation stage 141 is moved in the left-right direction. 2A and 2B show how the object to be measured WK5 collides with the support column 702 after being moved in parallel. In either case, this occurs when the measurement objects WK4 and WK5 protruding from the mounting surface 142 collide with the support portion 702. Therefore, in the present embodiment, the edge detection section 265 detects the outline of the edge of the object to be measured during or before the operation, thereby detecting a collision in advance. For example, the measurement is performed from a position where safe movement is possible from among the desired measurement positions specified by the user, and the edge detection section 265 detects the edge of the object to be measured. Then, from the detected edge, a range where safer movement is possible is determined and added. Measurements will be taken at all locations where safe movement is determined to be possible.

When performing wide-range measurement of the object to be measured, the edge detecting section 265 detects the edge of the object, and based on this, the restriction determining section 266 regulates the mounting section 140 to avoid collision. The specific procedure for performing the measurement will be explained based on the flowchart of FIG. 19. This example assumes that when the object to be measured is placed on the mounting surface, even though the support and the object are in contact with each other, there is no interference (collision) such as digging into the object. It is assumed that the position (θ angle, XY position) at which the object to be measured is desired to be measured has been input in advance by the user.

First, in step S1901, an object to be measured is placed on a stage. Next, in step S1902, measurement conditions are measured. Here, the user specifies brightness, orientation, measurement range, etc. Then, in step S1903, execution of measurement is instructed.

Next, in step S1904, it is determined whether there is a measurement position that has not yet been measured and can be moved safely. This determination is performed by the three-dimensional shape measuring device, for example, the regulation determining section 266 or the movement control section 144. If there is, the process advances to step S1905 to move to the safely movable measurement position, and three-dimensional shape measurement is performed in step S1906. Further, in step S1907, the edge of the object to be measured is detected from the measured data, and a position where it can be safely moved is added. Then, the process returns to step S1904 and repeats the above processing.

On the other hand, if it is determined in step S1904 that there is no measurement position that can be safely moved, the process advances to step S1908, and the automatically arranged measurement data is displayed as a preview on the display unit 400. Then, in step S1909, the user is asked to determine whether or not the measurement data has been correctly acquired. If the information has not been acquired correctly, the process returns to step S1902 and the above process is repeated. On the other hand, if it is determined that the data have been acquired correctly, the process advances to step S1910 and the measurement data are combined. This combination is performed, for example, by the point cloud data synthesis unit 211. Furthermore, in step S1911, measurement and analysis using the analysis function are performed, and the measurement is ended in step S1912. In this way, while performing wide-range measurements, the protrusion of the object to be measured is automatically detected, and measurements and analyzes can be performed safely while avoiding collisions.

Next, a detailed example of a procedure in which the edge detecting section 265 detects the edge of the object to be measured during operation and the regulation determining section 266 regulates the moving direction of the mounting surface 142 based on the detection result is shown in FIG. This will be explained based on FIGS. 20A to 20H. Here, the point cloud data synthesis unit 211 divides the measurement object WK6 placed vertically on the mounting surface 142 at the reference position into four parts: left and right on the front side, and left and right on the back side. An example will be described in which the measurement areas are divided and the rotation stage 143 is rotated by 180 degrees for measurement. First, as shown in FIG. 20A, the edge detection unit 265 detects the edge of the measurement target WK6 from the observation field obtained with the translation stage 141 at the reference position. The detected edge, ie, the outline of the measurement target object WK6, is shown by a thick line in FIGS. 20A to 20H. Then, the regulation determining unit 266 determines the moving direction of the placement surface 142 from the obtained contour. The direction of movement is determined by specifying a direction in which movement is possible, a direction in which movement is not possible, a direction in which it is unclear whether or not movement is possible, or all directions cannot be determined. In the example of FIG. 20A, as a result of end detection by the end detection unit 265, the left and right and front side contours of the measurement target object WK6 are obtained, but the back side contour is not obtained. From this detection result, the regulated portion can determine that the right and left sides of the measurement target object WK6 are within the mounting surface 142, or in other words, that it does not protrude from the mounting surface 142. In other words, since the measurement target WK6 does not extend in the horizontal direction of the mounting surface 142, the situation shown in FIGS. 18C, 18D, etc. cannot occur, and even if the measurement target WK6 is moved in the XY direction, It is determined that there will be no collision, that is, it is possible to move the translation stage 141 in the left and right direction. Therefore, the restricted section permits the translation stage 141 to move in the left-right direction, and the movement control section 144 accordingly moves the translation stage 141 in the lateral direction. Here, as shown in FIG. 20B, the translation stage 141 is first moved to the left, and measurement (here, acquisition of single field measurement data) is performed. As a result, single field measurement data for the front right side of the measurement target WK6 is obtained. Next, as shown in FIG. 20C, the translation stage 141 is moved to the right and measurement is performed in the same manner, thereby obtaining single field measurement data on the left side in front of the measurement target WK6. In addition, in this example, the procedure of first moving the translation stage 141 to the left and then moving it to the right has been explained, but it is possible to change the order and move it to the right first and then to the left. Needless to say, it is okay.

Since the single field measurement data for the left and right sides on the near side of the measurement object WK6 have been obtained as described above, next, the single field measurement data for the left and right sides on the back side are acquired. Here, if you try to move the translation stage 141 to the front side (downward in the figure) as shown in FIG. Since it is known that a collision will occur, the restriction determining unit 266 does not permit such movement. Therefore, the prohibited movement of the translation stage 141 is skipped, and instead, the rotation stage 143 is rotated as shown in FIG. 20E. By rotating the rotation stage 143 by 180 degrees, the back side, that is, the front side of the rotated measurement object WK6 is included in the field of view. 20A) is detected. Note that in the attitude shown in Fig. 20E, the upper side of the measurement target WK6 is out of the field of view, but the contour information of this part has already been obtained in measurements such as in Fig. 20A, so by combining the obtained contour information, , all contours of the measurement object WK6 in plan view are obtained at this point. In this state, based on the detection result, that is, the contour information, the restriction determining unit 266 can determine that the translation stage 141 can be moved left and right from the position shown in FIG. 20E. The translation stage 141 is moved to the right as shown in FIG. 20G to obtain single field measurement data on the front right side of the measurement target WK6 (back left side in the posture of FIG. 20A), and the translation stage 141 is moved to the right as shown in FIG. It is possible to obtain single-field measurement data on the front left side (back right side in the posture of FIG. 20A). It should be noted that by obtaining the near side contour (the upper contour in FIG. 20A) of the rotated measurement object WK6 at the position shown in FIG. 20E, it is assumed that the translation stage 141 is similarly moved to the near side (the upper contour in FIG. 20A) as shown in FIG. 20H. If an attempt is made to move the object WK6 in the downward direction in FIG. Skip. In this way, it is possible to perform measurements safely while regulating the moving direction of the mounting surface 142 to avoid collisions based on the contour information of the vertically long measurement object WK6.

In the above example, a procedure was described in which the translation stage 141 is moved left and right, the rotation stage 143 is rotated 180 degrees, and the translation stage 141 is similarly moved left and right, and single field measurement data are sequentially synthesized. However, in the present invention, the rotation angle of the rotation stage 143 is not limited to 180 degrees, but can be set to any angle. However, the finer the angle, the more detailed the data obtained, but the longer the measurement time, so the rotation angle is set appropriately according to the required accuracy and processing time. In addition, as mentioned above, the collision prevention function restricts rotational movement and parallel movement, making measurements with increased safety. In addition, depending on the shape of the object to be measured, it is desirable to efficiently take images with a small number of measurements.

Next, as another example of edge detection, an example is shown in which a horizontally long object to be measured is divided into four measurement areas: back, left, right, and front, and the rotary stage 143 is rotated 90 degrees. , will be explained based on FIGS. 21A to 21P. Here, the point cloud data synthesis unit 211 divides the measurement object WK7 placed horizontally on the mounting surface 142 at the reference position into four parts: left and right on the front side, and left and right on the back side. An example will be described in which the measurement areas are divided and the rotation stage 143 is rotated by 90 degrees for measurement. First, as shown in FIG. 21A, from the observation field of view obtained by the translation stage 141 in the reference position, the edge detection unit 265 detects a part of the near side of the measurement target WK7 (the lower center indicated by the thick line in FIG. 21A). ) is detected. In this state, since the part extending from the measurement target WK7 toward the support column 702 is not included, the regulation determination unit 266 determines that there will be no collision with the support column 702 even if the translation stage 141 is moved left and right. be judged. Therefore, the restricted portion allows the translation stage 141 to move in the left-right direction. Accordingly, the translation stage 141 is moved left and right. Here, first, as shown in FIG. 21B, the movement control unit 144 moves the translation stage 141 to the left, and acquires single field measurement data on the front right side of the measurement object WK7. As a result, contour information from the front side to the right side of the measurement target object WK7 is obtained, so the regulation determining unit 266 can determine that it is possible to rotate the rotation stage 143 clockwise by 90 degrees or more. Next, the translation stage 141 is moved to the right to obtain single field measurement data on the left side in front of the measurement target WK7. As a result, contour information from the front side to the left side of the measurement target object WK7 is obtained, so the restriction determining unit 266 can determine that it is possible to rotate the rotation stage 143 counterclockwise by 90 degrees or more. In addition, the contour of the lower half of the measurement target WK7 is determined together with the contour information obtained in FIG. 21B.

Next, the rotation stage 143 is rotated 180 degrees. Here, the translation stage 141 is first returned to the reference position (for example, the origin or initial position of the XY stage) as shown in FIG. 21D, and then the rotation stage 143 is rotated 90 degrees clockwise as shown in FIG. 21E. let In this way, instead of directly rotating the rotation stage 143 from the state shown in FIG. 21C, by first returning the translation stage 141 to the reference position and then rotating it, the radius of rotation can be kept small, thereby reducing the risk of collision. can be reduced. Then, in the observation field of FIG. 21E, single field measurement data is acquired, and contour information of the middle part on the right side of the measurement object WK7 is acquired. In this state, although the upper right and lower left contours of the measurement object WK7 have not yet been obtained, the regulation determining unit 266 can determine that the translation stage 141 can be translated left and right. Therefore, the movement control unit 144 is similarly instructed to move the translation stage 141 left and right.

Furthermore, since the contour of the lower part of the measurement target WK7 has already been obtained and the amount of protrusion from the mounting surface 142 is known, the translation stage 141 can be moved forward (downward in FIG. 21E). The amount can also be calculated by the regulation determining section 266. Specifically, since it is found that the translation stage 141 cannot be moved beyond the position shown in FIG. 21H, the translation stage 141 is moved to the front side within that limit, and then further moved to the left. As a result, the upper right contour of the measurement object WK7 is obtained as shown in FIG. 21F. Furthermore, the translation stage 141 is moved to the right as shown in FIG. 21G. At this position, no additional contour information is available. Further, as described above, since the translation stage 141 cannot be moved to the front side as shown in FIG. 21H, this movement is skipped and the rotation stage 143 is rotated clockwise as shown in FIG. 21I.

In the attitude shown in FIG. 21I, the left and right contours of the measurement target WK7 are generally known except for the upper left part, so it can be determined that the translation stage 141 can be moved left and right, and therefore it can be moved left and right. . In addition, in this posture, the contour of the near side (lower side in FIG. 21I) of the measurement target WK7 has already been obtained, so as shown in FIG. 21L, the amount of movement that can move the translation stage 141 toward the near side is calculated. can. In accordance with this, the translation stage 141 is moved slightly toward the front and first moved to the left as shown in FIG. 21J. No additional contour information is available at this location. Next, as shown in FIG. 21K, the translation stage 141 is moved to the right to obtain single field measurement data. As a result, the upper left contour of the measurement object WK7 is obtained, and all the contours are acquired, so the movable range and direction of the mounting surface 142 are determined. As described above, since the translation stage 141 cannot be moved to the front side as shown in FIG. 21L, this movement is skipped and the rotation stage 143 is further rotated 90 degrees clockwise as shown in FIG. 21M. As described above, once the translation stage 141 is returned to the reference position, the rotation stage 143 is rotated to take the posture shown in FIG. 21M.

At this position, single field measurement data is similarly measured, and the translation stage 141 is further moved left and right to measure single field measurement data in the same manner. Here, the translation stage 141 is moved to the left as shown in FIG. 21N, then moved to the right as shown in FIG. 21O, and finally returned to the reference position to complete the process. In this way, a larger number of single-field measurement data are synthesized in 90° increments, making it possible to perform detailed measurements.

As described above, depending on the end of the object to be measured, which is obtained from the data measured by moving the translation stage 141 in the back direction, it is possible to determine whether the translation stage 141 can be moved or not, and whether the rotation stage 143 can be rotated. The regulation determining unit 266 can determine whether or not this is the case. Here, the determination of whether or not the translation stage 141 can be moved will be explained based on FIGS. 22A to 24D. First, as shown in the schematic plan views of FIGS. 22A to 22C, whether or not the translation stage 141 can be moved toward the front is determined from the front end of the object to be measured. That is, in FIGS. 22A to 22C, the lower contour of the object to be measured is allowed to move within a range where it does not come into contact with the support column 702. For example, as shown in FIG. 22A, when the lower part of the measurement object WK8 is contained within the mounting surface 142, the movement of the translation stage 141 is not restricted. That is, the translation stage 141 has a distance D1 between the position where the mounting surface 142 is closest to the support column 702 side (lower end in FIG. 22A) and the support column 702, or a distance D1 considering the margin, or shorter than this. The translation stage 141 can be moved forward by a distance limited by the movement mechanism. In the figure, for the sake of explanation, margins are not taken into consideration, and the amount of movement by which the translation stage 141 can be moved toward the front side without the object to be measured is set as D0.

On the other hand, as shown in FIG. 22B, if it partially protrudes from the mounting surface 142, the portion of the protruding portion closest to the support 702 is determined from the movement amount D0 so as not to contact the support 702. The amount of movement toward the front side of the normal translation stage 141 is limited by the amount by which the protrusion force D2 and the margin are subtracted. Furthermore, as shown in FIG. 22C, if the protruding amount of the end of the measurement target WK9 is large and it is in contact with the support 702 or is about to contact the support 702, or if the end cannot be detected, Prohibit movement to the side.

Also, whether or not it can be moved in the left-right direction is determined from the diagonally front end. Here, as an example, whether or not to restrict parallel movement of the translation stage 141 in the right direction will be explained based on FIGS. 23A to 23C. First, as shown in FIG. 23A, when the lower part of the measurement object WK10 is contained within the mounting surface 142, the movement of the translation stage 141 is not restricted. Further, as shown in FIG. 23B, when the measurement target WK11 partially protrudes from the mounting surface 142, the amount of protrusion D2 from the lower end of the mounting surface 142 is checked, and this is the range of the movement amount D0 of the mounting table. If it is within the range, the parallel movement is not restricted because it does not come into contact with the support column 702 even if it is moved to the right. On the other hand, as shown in FIG. 23C, if the amount of protrusion of the measurement target WK12 is large and exceeds the movement amount D0 of the mounting table, or if the end cannot be detected, moving the translation stage 141 to the right , there is a risk of contact with the support column 702, so movement is restricted.

Furthermore, whether or not the rotary stage 143 can be rotated is determined based on the amount of protrusion. Here, the operation of determining whether to limit the clockwise rotational movement of the rotation stage 143 will be explained based on FIGS. 24A to 24D. First, as shown in FIG. 24A, when the measurement target WK13 is contained within the mounting surface 142, the movement of the rotation stage 143 is not restricted. Further, as shown in FIG. 23B, when the part protrudes from the mounting surface 142, the value at which the protruding part from the mounting surface 142 is the maximum, that is, the measurement target WK13 is rotated by the rotation stage 143. Measure the maximum value D3 of the radius of rotation. Then, the maximum value D3 of this rotation radius is compared with the distance DR from the rotation center of the rotation stage 143 to the support column 702, and if D3 is shorter than DR, even if the rotation stage 143 is rotated, the measurement target cannot be detected. It is determined that WK13 will not collide with support column 702, and rotation of rotation stage 143 is allowed. Note that, as described above, the margin may be taken into consideration when comparing D3 and DR. Further, as shown in FIG. 24C, if the maximum protrusion amount D4 is greater than the distance DR from the rotation center of the rotation stage 143 to the support column 702, when the rotation stage 143 is moved clockwise, the support column 702 Limit rotational movement as there is a risk of contact. Furthermore, as shown in FIG. 24D, when the contour of the end of the protruding portion of the measurement target WK14 cannot be detected, the rotational movement is similarly restricted.

The above-mentioned restriction and regulation of movement by the restriction determining unit 266 may include not only prohibiting movement itself but also allowing movement up to the point of contact. In this way, even if it is determined that it is impossible to move to the specified measurement position, the loss of measurement data can be minimized by moving to the closest possible position and taking measurements. .
(Moveability approval department)

In addition, even if the edge of the object to be measured cannot be detected and it is determined that safe movement is impossible, the user will be asked if it is possible to move it, and if the user determines that it is possible to move it, the user will be able to move it. The measurement may be continued. In this case, a movement permission approval section is provided to request the user's permission to move. For example, a movement permission approval screen is displayed on the display unit 400. The movement permission approval screen displays explanations such as ``The edge of the workpiece cannot be confirmed. Is it OK to rotate the stage?'' and options such as ``Allow movement'' and ``Prohibit movement.'' Encourage confirmation and selection.

In the above example, the end detection section 265 and the regulation determination section 266 are configured to prevent the object to be measured from interfering with a part of the three-dimensional shape measuring device (the support section 702) due to the movement of the mounting surface 142. The configuration for regulating the movement of the mounting surface 142 has been described. In this case, if the translation stage 141 moves in the direction away from the supporting column 702 (upward in FIG. 18A etc.), there is no possibility of a collision. Not regulated. In this case, a measurement object having a special shape, for example, a shape having a curved arm that wraps around the back surface of a support column, is excluded from consideration.

As shown in FIG. 6, etc., in a configuration in which measurements are taken from diagonally above the mounting surface 142, compared to a configuration in which a camera is installed directly above the mounting surface 142 and looks down directly below, it is difficult to measure the surrounding area. Easily receives external light. In order to reduce this, in addition to the light-shielding cover 102 that covers the upper part of the mounting surface 142 to block light, a light-shielding curtain may be arranged below the light-shielding cover 102. In this configuration, a light-shielding curtain is placed behind the mounting surface 142, but if the light-shielding curtain is made of a flexible material such as cloth, the movement of the mounting surface 142 can Even if an object comes into contact with the light-shielding curtain, the light-shielding curtain can easily deform accordingly, so there is no need to consider interference.

Furthermore, the automatic collision detection function of the present invention is not limited to avoiding collisions with the support column 702, but is also effective when, for example, operating other measuring instruments or stands placed around the three-dimensional shape measuring device, or the three-dimensional shape measuring device. It may also be configured to control the user so that the object to be measured does not interfere with the user. For example, a detector such as an object sensor or a camera is prepared so as to inform the three-dimensional shape measuring device of the shape and position of objects existing around the three-dimensional shape measuring device. Then, the three-dimensional shape measuring device collects the signals and information obtained by the detector, and compares them with information such as the outline of the object to be measured detected by the edge detection unit 265. The restriction determining unit 266 calculates the amount of the load, the movement range, etc., and restricts the movement of the mounting surface 142 by the movement control unit 144.

That is, in the above example, the outline of the support column 702 is held in advance in the three-dimensional shape measuring device as an object to avoid collision, and necessary control is performed to prevent the object to be measured from coming into contact with the support column 702. However, by specifying another member (foreign object) in addition to or instead of the support column as the object to avoid collision, it becomes possible to realize a similar collision avoidance operation. Note that designation of other members can be performed relatively easily, for example, when instruments placed around the three-dimensional shape measuring device are stationary. On the other hand, for parts that are not always stationary and may move, such as movable equipment or users, contact with them should be avoided while taking into account the position of the contour that changes from time to time. It is necessary to perform calculations to limit the movement of the mounting surface 142 in real time.
(Measurable range (yellow dotted line) and data acquisition range (red dotted line))

In a three-dimensional shape measuring device that measures the placement surface 142 from diagonally above, that is, in a bird's-eye view, the measurement range on the inner front side of the placement surface 142 is relatively small, as shown in the schematic side view of FIG. 25A. In addition to a wide measurement area with high measurement accuracy, there also tends to be a wide area around that area where three-dimensional data can be obtained, regardless of the accuracy. In this embodiment, as explained in FIG. 2, the light projecting sections 110 are provided on the left and right sides, and pattern light is projected from the two light projecting sections 110A and 110B. In FIG. 25B, assuming that the light receiving range by the light receiving unit 120 is a red area and the pattern projection range by the light projecting unit 110 is a light black area, the common area where these overlap becomes the data acquisition range (red dotted line). Furthermore, within the data acquisition range, an area where measurement accuracy is sufficiently demonstrated can be defined as a measurable range (yellow dotted line).
(End detection position)

In addition, instead of making a judgment based only on the measurement data at the measurement position specified by the user, before measurement, the mounting surface 142 is moved to a predetermined edge detection position where the object to be measured can be detected over as wide a range as possible. Alternatively, the edge of the object to be measured may be detected, and a collision may be detected based on the edge. This is because the end of the object to be measured may not be detected depending on the actual measurement position specified by the user. Therefore, after moving the mounting surface 142 from the specified position of the mounting section 140 specified by the user to a predetermined edge detection position where it is easy to obtain the edge of the measurement object, and return it to the specified position. Here, the predetermined end detection position is, for example, a position where the mounting surface 142 is away from the imaging optical system. By separating the object to be measured from the imaging optical system as much as possible, a wider observation field of view is ensured by the angle of view of the imaging optical system, and the edges of the object to be measured are more likely to be included. In this way, when the end detection section 265 executes the end detection operation, the movement control section 144 controls the translation stage 141 so that the translation stage 141 is translated in parallel to a predetermined end detection position. 141 may be moved. This makes it possible to increase the accuracy of edge detection.

Note that edge detection before measurement only requires detecting the outer shape and outline of the edge, and does not require the same level of accuracy as during measurement. Therefore, it is preferable to perform detection in a short time, and it is desirable to use simpler imaging conditions than those for normal three-dimensional measurement. Furthermore, it is also possible to use other images without performing imaging for edge detection. For example, edge detection may be performed using the above-mentioned top view map image. This greatly saves labor for end detection and shortens takt time.
(Notice to users)

As a response when the possibility of a collision is detected in advance by the edge detection unit 265 or the regulation determination unit 266, the user is not explicitly notified of anything, and the data of the measurement position avoided due to the collision, i.e. A state may also be created in which data of the portion for which processing is skipped is missing. Alternatively, it is also possible to explicitly notify the user. For example, after the measurement, the measurement position where the collision was avoided is displayed on the display unit 400 as a result report. Alternatively, after or during measurement, it is reported that a collision has been detected in advance. At this time, a determination may be made as to whether to continue the measurement process or to interrupt it. Alternatively, when pre-detection is performed before measurement, a message such as "Some measurements will be avoided because pre-collision has been detected" is displayed on the display unit 400 after pre-detection or before the start of measurement.
(Diagonal arrangement of translation stage 141)

Further, in the three-dimensional shape measuring device according to the present embodiment, by devising the arrangement of the drive shaft of the translation stage 141, it is possible to measure a larger object to be measured even with a short stroke. As described above, in a three-dimensional shape measuring device that acquires a three-dimensional shape by switching a plurality of viewpoints on the rotation stage 143, the mounting section 140 is configured to be movable in order to widen the field of view, specifically, the translation stage 141 and rotation are used. The configuration of the mounting section 140 including the stage 143 includes the three-dimensional shape measuring device according to the first embodiment in which the translation stage 141 is arranged on the rotation stage 143 as shown in FIG. 26, and the three-dimensional shape measuring device as shown in FIG. A three-dimensional shape measuring device 500B according to the second embodiment in which a rotation stage 143 is arranged on a translation stage 141 is considered.

Among these, in the configuration according to Embodiment 1 shown in FIG. 26, the driving direction of the translation stage 141 can be rotated together with the mounted measurement target, and the measurement Since the XY stroke can maintain a one-to-one relationship with respect to the object, an advantage is obtained that three-dimensional measurement from multiple viewpoints during rotation can always be performed within the same measurement object range. This has the advantage that data from multiple viewpoints at the same point on the object to be measured can be averaged, and stable measurement can be achieved over the entire area of the object to be measured.

On the other hand, in such a measurement system that combines the translation stage 141 and the rotation stage 143, there is a possibility that not only the object to be measured is moved by the translation stage 141, but also the mounting surface 142 itself collides with the support section 702. Therefore, it is necessary to limit the amount of movement of the mounting surface 142, that is, the stroke, within a certain range. For example, as shown in the schematic plan view of FIG. 28, in a configuration in which the X-axis on which the translation stage 141 moves in parallel is in the horizontal direction and the Y-axis in the vertical direction, the translation It is assumed that the movement stroke of the stage 141 is Wx and Wy in the X direction and the Y direction, respectively, and the clearance between the outer shape of the mounting surface 142 and the support portion 702 at the center of the stroke of the translation stage 141 is L. In this case, the strokes Wx and Wy of the mounting surface 142 are considered to be subject to the following constraints.

Wx/2<L, that is, Wx<2L,

Wy/2<L, that is, Wy<2L, and

√{(Wx/2) ² +(Wy/2) ² }<L

In the first embodiment, since the drive direction of the translation stage 141 changes depending on the rotational posture of θ, if the distance from the center to the stroke end (=total stroke ÷ 2) is not shorter than L for any direction, the mounting The end of the surface 142 and the support portion 702 will collide. Therefore, for all the strokes of translation stage 141 shown in FIG. 29A, a safe stroke that can avoid collision is a circular region shown by a solid line in FIG. 29B. As a result, the effective stroke range shown by the broken line in FIG. 29B, which the placing section 140 originally has, is reduced.
(XY-axis cross arrangement)

In this embodiment, in view of such stroke reduction, a configuration is proposed that can provide a wider field of view by devising the arrangement of the mounting surface 142. Here, the X-axis and Y-axis for parallel translation of the translation stage 141 are defined as the depth direction in which the mounting section 140 approaches and moves away from the support section 700 and the horizontal direction orthogonal to this depth direction in a plan view of the mounting surface 142. It is arranged at an angle to the direction. Specifically, as shown in FIGS. 30A and 30B, the effective stroke range of the rectangle is tilted from the posture of FIGS. 29A and 29B, and the corners of the rectangle are positioned vertically and horizontally. ing. In other words, it is rotated so that the diagonals of the rectangular effective stroke range become the X and Y axes in FIG. 29B. In this way, by configuring the X-axis and Y-axis directions of the translation stage 141 to be shifted diagonally in plan view, the amount of vertical and horizontal strokes can be increased without increasing the size of the mounting surface 142. This is advantageous for measuring large objects. In the example of FIG. 30B, the X-axis and Y-axis for parallel translation of the translation stage 141 are the depth direction (the vertical direction in FIG. ) and forms an angle of 45° with respect to the lateral direction (left-right direction in FIG. 30B) orthogonal to this depth direction. With this arrangement, it is possible to increase the stroke amount in the lateral direction by a factor of √2 while keeping the translation stage 141 the same size as in FIG. 29B. Note that the angle at which the X-axis and Y-axis are tilted in the depth direction and the lateral direction is not limited to 45°, and the same effect can be achieved as long as the angle is diagonal, such as 40° to 50°. However, if the inclination is small, the effect of expanding the stroke range in which the translation stage 141 is moved laterally will be reduced. Therefore, it is preferable to set the stroke range to around 45 degrees, where the amount of expansion of the stroke range is the largest.

In conventional three-dimensional shape measuring devices, the direction of movement of the translation stage in the By arranging the Y-axis direction at an angle of 45 degrees, it is possible to effectively utilize strokes in the left-right direction and the depth direction when viewed from above on the mounting surface. That is, in the example of FIG. 29B, the four corners of the effective stroke range could not be utilized, but by adopting the arrangement as shown in FIG. 30B, such dead space can be effectively utilized.

On the other hand, in the corner on the near side of the three-dimensional shape measuring device in FIG. 30B, since the support section 702 is present, movement of the mounting surface 142 in this direction is restricted. In other words, among the four corners of the effective stroke range of translation stage 141, the corner facing column 702 is not used, or its use is restricted to a range in which the object to be measured does not collide with column 702.

Such control of the moving direction of the mounting surface is performed by, for example, the movement control section 144. In this case, the movement control unit 144 sets the corner of the measurement area facing the support column 702 as the movement restriction area. As a result, while ensuring a wide left and right stroke of the mounting section 140, the movement toward the front side is restricted, thereby avoiding a situation where the object to be measured collides with the support section 700, thereby ensuring safety.

In applications where large objects are to be measured, the measurement range can be expanded by using the translation stage 141. Here, there is a tendency for large objects to be measured to be long only in one specific direction rather than objects that are large in all directions in a plane. Therefore, as shown in the schematic plan view of FIG. 31, by extending the stroke of the translation stage 141 only in a single axis, for example in the left-right direction, three-dimensional measurement of a larger measurement target WKL than before is possible. In addition, many of the measurement objects WKL that are long in a single direction are so large that they protrude from the upper surface of the mounting surface 142. Therefore, in order to avoid collision by moving the mounting surface 142, it is necessary to avoid collisions between the mounting surface itself and the supporting column. 702, but also from the perspective of a collision between the measurement object WKL placed on the mounting surface 142 and the support section 702, moving the field of view in the left and right direction has less risk of collision, and it is easier to expand the field of view. It becomes the axis.

As described above, in the stage configuration of the mounting section 140 according to the first embodiment, the measurement object placed on the mounting surface 142 and the drive shaft of the translation stage 141 always have a one-to-one relationship. With this arrangement, for a long measurement object placed on the placement surface 142 as shown in FIGS. 32A and 32B, the expansion direction and the longitudinal direction of the stroke of the placement surface 142 are approximately equal to each other. Three-dimensional measurements can be taken from multiple different viewpoints while maintaining consistency.

Note that in order to accurately drive the translation stage 141 in the left-right direction with respect to the measurement unit 100 (or the base plate 602), (1) the inclination of the X-axis and Y-axis of the mounting surface 142, (2) the measurement unit 100 It is necessary for the three-dimensional shape measuring device to recognize in advance the inclination between the X-axis and the Y-axis, or both. Therefore, when starting up the three-dimensional shape measuring device for the first time, the user uses a calibration board or the like to measure and record (1) and (2) to recognize the inclination of each axis with respect to the measuring section 100.

Furthermore, the movement control unit 144 moves the placement surface 142 in parallel in the depth direction and in the lateral direction perpendicular to the depth direction by interlocking and parallel movement of the X-axis direction and the Y-axis direction of the placement unit 140. . For example, the amount of drive required to drive the translation stage 141 is determined by calculating the inclination of each axis from the measurement unit 100 in plane coordinates as seen from the measurement unit 100. Then, the drive amount per unit time required for each is given to the translation stage 141. FIG. 33 shows an example of a procedure for calculating the drive amount of the translation stage 141 in the mounting section 140 in which the XY coordinates are arranged in a crossed manner. In this example, consider moving the translation stage 141 a distance α in the X direction from the reference position, that is, the origin, as indicated by a black circle in the figure. In this case, when the coordinate axes x and y of the movement target position as seen from the measurement unit are shown by dashed lines, the target position is (x, y)=(0, 0). Further, the rotation angle θ of the X-axis and Y-axis of the translation stage 141 as seen from the measurement unit is 45°. Therefore, the amount of drive in the X-axis direction of the translation stage 141 whose movement axis is rotated by 45 degrees from the horizontal direction is αcos 45 degrees, and the amount of movement in the Y-axis direction is αsin 45 degrees.

It should be noted that although the mounting section 140 is individually driven in the X-axis direction and the Y-axis direction, it appears to move smoothly from side to side from the measuring section. Note that the movement in the X-axis direction and the Y-axis direction may be performed separately, or may be driven in order. As an example, the flowchart in FIG. 34 shows the procedure for moving in the X-axis direction and the Y-direction, and the flowchart in FIG. 35 shows the procedure for moving in the X-axis direction and Y-direction sequentially. .

Here, the procedure for moving in the X-axis direction and the Y-direction will be explained based on the flowchart of FIG. 34. Note that the operation of actually rotating the rotation stage 143 will not be considered here. First, in step S3401, each axis is measured when the three-dimensional shape measuring device is started for the first time. Here, the translation stage 141 is calibrated. Next, in step S3402, it is determined whether there is rotational drive from the user. If there is an instruction for rotational drive, the process advances to step S3403, where the XY axes of the translation stage 141 are calculated from the rotation angle for which the drive is instructed, and the process advances to step S3404.

On the other hand, in step S3402, if there is no rotation instruction from the user, the process proceeds to step S3404, and the required movement amount from the angle of the XY axes is converted into an XY movement amount. Here, the required amount of movement may be calculated as an absolute value or as a relative value. For example, as shown in FIG. 33, when the required amount of movement is α, the amount of drive in the X-axis direction is α cos 45°. Then, in step S3405, the translation stage 141 is driven in the X-axis direction and the Y-axis direction.

The procedures for moving in the X-axis direction and the Y-direction have been described above. Next, a procedure for sequentially moving in the X-axis direction and Y-direction will be described based on the flowchart of FIG. 35. In step S3501, each axis is measured when the three-dimensional shape measuring device is started for the first time. Next, in step S3502, it is determined whether or not there is a rotational drive from the user, and if there is a rotational drive instruction, the process proceeds to step S3503, where the XY axes of the translation stage 141 are calculated from the rotation angle at which the drive is instructed. , the process advances to step S3504. On the other hand, if there is no rotation instruction from the user in step S3502, the process advances to step S3504, and the required amount of movement from the angle of the XY axes is converted into an amount of XY movement. The above procedure is similar to steps S3401 to S3404 in FIG. 34.

Next, in step S3505, the translation stage 141 is driven in either the X-axis direction or the Y direction. Next, in step S3506, it is driven in either the X-axis direction or the Y-direction. In this way, by moving the translation stage 141 in a posture with the XY axes rotated relative to the base plate 602 and the like, and moving the translation stage 141 in the X-axis direction and the Y-axis direction by the respective converted movement amounts, the result is measured. It can move in the x and y directions, which are the horizontal and vertical directions as seen from the object.
(Difference in configuration between Embodiment 1 and Embodiment 2)

Here, the configuration of the mounting section 140 of the three-dimensional shape measuring device according to the first embodiment shown in FIG. 26 and the configuration of the mounting section 140 of the three-dimensional shape measuring device 500B according to the second embodiment shown in FIG. The advantages and disadvantages will be explained with reference to FIGS. 36A to 37B. In these figures, FIGS. 36A and 37A show the configuration in which the translation stage 141 is placed on the rotation stage 143 according to the first embodiment, and FIGS. 36B and 37B show the configuration in which the translation stage 141 is placed on the rotation stage 141 according to the second embodiment. A configuration in which a rotation stage 143 is mounted is shown in each case. Furthermore, in each figure, the measurement area measured by the measurement unit 100 is shown as a circular visual field indicated by a solid line.

First, as shown in the schematic plan views of FIGS. 36A and 37A, when the object to be measured is parallel to the measurement section, the size of the object to be measured remains the same in both the first and third embodiments. On the other hand, as shown in FIGS. 36B and 37B, when the object to be measured is tilted with respect to the measuring section, the center of rotation is different in the first and third embodiments. Therefore, in the second embodiment, the edge of the object to be measured is outside the measurement field of view. Therefore, the measurement range in the second embodiment is narrower.

Furthermore, by providing the rotation stage 143 with a deceleration mechanism, even a heavy object to be measured can be rotated. Here, although the load capacity of the mounting surface 142 is improved by increasing the size of the speed reduction mechanism, in this case, a space is required to provide the speed reduction mechanism. In the three-dimensional shape measuring device according to this embodiment, in order to maximize the load capacity, a large-sized deceleration mechanism that exceeds the size of the translation stage 141 is used as the deceleration mechanism. Here, if the configuration of Embodiment 2 is adopted, a deceleration mechanism larger in size than the translation stage 141 is mounted on the translation stage 141, so when the rotation stage 143 rotates, the deceleration mechanism interferes with the measurement unit main body. There is a problem with putting it away. In order to avoid this, it is necessary to either (1) reduce the size of the reduction mechanism to reduce the load capacity and maintain the measurement range, or (2) reduce the measurement range while maintaining the load capacity. We also have to accept the disadvantages. In contrast, in the configuration of the first embodiment, since the rotation stage 143 exists below the translation stage 141, interference of the rotation stage 143 due to the XY stroke does not occur. Furthermore, with the configuration of the first embodiment, it is also possible to further enlarge the speed reduction mechanism without any disadvantages in the measurement range. Furthermore, when the weight of the three-dimensional shape measuring device increases due to its size, the center of gravity is lowered, which improves vibration resistance, stabilizes measurements, and contributes to improved safety. On the other hand, in the configuration of Embodiment 2, when the speed reduction mechanism is increased in size, the size of the three-dimensional shape measuring apparatus main body becomes larger, the center of gravity becomes higher, and the stability decreases. Therefore, the configuration of the mounting section 140 according to the first embodiment is considered to be superior to the configuration of the mounting section 140 according to the second embodiment.

Furthermore, the number of times the position is calculated is different between the first embodiment and the second embodiment. That is, in the configuration of Embodiment 1, as shown in FIGS. 38A to 38C, as the rotation stage 143 rotates, the XY axes of the translation stage 141 also rotate in conjunction. Therefore, regardless of the amount of rotation, the amount of XY drive to the coordinates of the object to be measured remains constant. In FIGS. 38A to 38C, the lengths of the arrows indicating the amount of movement are equal, that is, constant. Therefore, the XY position calculation in the three-dimensional shape measuring device only needs to be performed once.

On the other hand, in the configuration of Embodiment 2, as shown in FIGS. 39A to 39C, the XY axes do not move in conjunction with the rotation of the rotation stage 143, so it is necessary to recalculate the coordinates of the measurement target each time the rotation stage 143 rotates. Become. In FIGS. 39A to 39C, it can be seen that the length of the arrow indicating the amount of movement changes. In this respect as well, it can be said that the configuration of the mounting section 140 according to the first embodiment has an advantage.

As described above, in the configuration of the mounting section 140 that combines the translation stage 141 and the rotation stage 143, when rotating the rotation stage 143, the translation stage 141 is first returned to the reference position, for example, the origin of the XY coordinates. It is preferable to rotate it after washing. Thereby, collision avoidance of the object to be measured is achieved. However, the present invention does not necessarily require that the translation stage be returned to the center position during θ rotation. For example, if a collision avoidance configuration or safety is ensured, θ rotation may be allowed even when the translation stage is at a position other than the center position, thereby shortening the measurement time. In this case, in the configuration of Embodiment 1, even if the rotation stage is rotated θ while the translation stage remains in the same position, the object to be measured is held at the center of the measurement field of view, so there is no need to drive the translation stage. You can enjoy the benefits of time savings. On the other hand, in the configuration of Embodiment 2, since the object to be measured shifts from the center of the field of view as the rotation stage rotates, it is necessary to additionally drive the translation stage, so it is considered that it cannot contribute to shortening the measurement time. Further, in this case, in the configuration of the first embodiment, only the rotation stage 143 is driven, while in the configuration of the second embodiment, both the translation stage and the rotation stage are driven. Therefore, from the viewpoint of accuracy in repeatedly positioning the mounting surface 142, the first embodiment in which there is only one mounting surface 142 and only θ is driven is more advantageous.
(Embodiment 3)
(Slope 146)

Furthermore, the mounting section 140 may include a tilting table 146 for changing the mounting posture of the measurement target. For example, in a three-dimensional shape measuring device configured such that the optical axes of the light projecting section 110 and the light receiving section 120 are inclined so that the measurement area on the mounting surface 142 is viewed diagonally downward, the light projecting section 110 and the light receiving section 120 An inclined surface 147 that is inclined with respect to the mounting surface 142 may be provided in a position facing the optical axis of the measuring section 100 such as the above. Such an example is shown in FIGS. 40A to 40C as a three-dimensional shape measuring device according to the third embodiment. In these figures, FIG. 40A is a schematic side view showing a three-dimensional shape measuring device according to Embodiment 3, FIG. 40B is a schematic plan view showing a state in which the inclined surface 147 is folded, and FIG. 40C is a schematic plan view showing a state in which the inclined surface 147 is raised. A schematic plan view showing a state in which the object is placed on the inclined surface 147 is shown. In the three-dimensional shape measuring device shown in these figures, as an example of forming the inclined surface 147, an inclined surface 147 that is tilted about the tilting axis TAX is provided on a part of the mounting surface 142. As shown in FIG. 40B, this inclined surface 147 partially forms a recess 148 in which the inclined surface 147 is accommodated so that it is flush with the mounting surface 142 in the folded state. Furthermore, by tilting and raising the inclined surface 147 around the tilting axis TAX, the object to be measured is placed here, as shown in FIGS. By placing the top surface of the object to be measured, it is possible to easily observe the top surface of the object to be measured. In other words, an image close to a planar image captured from above with the object to be measured placed on the mounting surface 142 can be obtained. In this way, the inclined table 146 provided on the top surface of the mounting surface 142 is arranged in advance so as to directly face the measuring section, that is, so that the perpendicular to the inclined surface 147 is parallel to the optical axis of the light receiving section 120, etc. This allows the user to switch between the normal mode and the long mode without having to relocate the object to be measured.

A stopper may be provided so that the inclination angle θ2 of the inclined surface 147 can be maintained at a predetermined angle. Further, the stopper may be configured so that it can be held at a plurality of inclination angles θ2. Alternatively, the stopper may be configured so that the inclination angle θ2 can be adjusted steplessly.

Furthermore, as shown in FIG. 40B, the tilting axis TAX is preferably provided so as to overlap with the diameter line DML passing through the center of the circular mounting surface 142, or in parallel with this diameter line DML. In particular, in the configuration of the first embodiment in which the translation stage 141 is arranged on the rotation stage 143 as shown in FIG. The axis TAX and the horizontal direction (FIG. 40B) in plan view of the translation stage 141 are arranged to match, and the diagonal arrangement of the translation stage 141, which matches the tilting axis TAX and the direction of expansion of the measurement field of view, allows measurement in the lateral direction. Benefits can be obtained in terms of usability for the target object.

Furthermore, as shown in FIG. 40B, it is preferable to arrange the inclined surface 147 so as to fall within the upper half of the diameter line DML of the circular mounting surface 142 in a posture with the mounting surface 142 as the reference position. When the sloped surface 147 is tilted, the object to be measured placed on the sloped surface 147 tends to move or expand toward the front side (lower side in the figure) of the measurement field of view, as shown in FIG. 40C. By arranging the inclined surface 147 unevenly above the mounting surface 142 so as to secure a wide area on the near side, there is an advantage that the object to be measured can be easily included in the measurement field of view.

Note that in the above example, the inclined surface 147 was configured to be incorporated into the mounting surface 142 in advance, but the present invention does not limit the inclined surface to this configuration. For example, the same effect can be obtained by providing an inclined surface on a separate member from the mounting surface and placing the inclined surface on the mounting surface in a stationary state.

The three-dimensional shape measuring device of the present invention is a three-dimensional shape measuring device or digitizer that measures the height of the object to be measured using principles such as triangulation, or determines whether the product is good or defective based on the inspection results thereof. It can be suitably used as an inspection device for determining whether

1...Control PC
2... Monitor 3... Keyboard 4... Input device 100... Measuring section 101... Main body case 102... Light shielding cover 110... Light projecting section; 110A... First measuring light projecting section; 110B... Second measuring light projecting section 111... Measurement Light source 112...Pattern generation section 113 to 115, 122, 123...Lens 120...Light receiving section 121...Camera 121B...First camera; 121C...Second camera 121a...Imaging element; 121b...First light receiving element; 121c...Second light receiving element Element 125... Fixed part 130... Illumination light output part 140... Placement part 141... Translation stage 142... Placement surface 143... Rotation stage 144... Movement control part 146... Inclined table 147... Inclined surface 148... Recessed part 150... Measurement control part 200...Controller 210...CPU
211...Point cloud data synthesis unit 215...Warning unit 216...Image inspection unit; 216b...Measurement unit 220...ROM
228...Height image acquisition unit 230...Work memory 240...Storage device 250...Operation unit 260...Point cloud data generation unit 261...Top view map image generation unit 262...Mesh image generation unit 264...Measurement area setting unit 265...End section detection section 266...Regulation judgment section 268...Evacuation position identification section 269...Collision avoidance information input section 270...Avoidance operation instruction section 300...Light source section 310...Control board 320...Illumination light source for observation 400...Display section 500, 500B...Tertiary Original shape measuring device 500A...Three-dimensional shape measuring device main body 501...Function selection menu screen 600...Pedestal section 602...Base plate 700...Support section 702...Strut section 800...Rotation drive guide 810...Rotation pulse instruction section 820...Actual rotation amount reading Section 830...Rotary drive motor 840...Deceleration mechanism 850...Origin sensor 860...Translation stage fastening section 900...Linear motion guide 910...Linear motion power transmission section 920...Movement pulse instruction section 930...Actual movement amount reading section 940...Translational drive motor 950...Infinite rotation connector 1000...Three-dimensional shape measurement system WK, WK2 to WK14...Measurement object; WK1...Longitudinal measurement object WKL...Measurement object long in a single direction ML...Measurement light; ML1...First measurement light ML2...Second measurement light LA1...First optical axis;LA2...Second optical axis IL...Illumination light TAX...Tilt axis θ2...Inclination angle of inclined surface DML...Diameter line OI1-OI2...Observation image MA...Measurable range

Claims (15)

A three-dimensional shape measuring device that measures the three-dimensional shape of a measurement target,
A translation stage that has a mounting surface on which the measurement target is placed and moves the mounting surface in parallel along the X-axis and Y-axis that are orthogonal to each other, and the translation stage is moved around a predetermined rotation axis. a mounting section having a rotation stage for rotating the center;
a light projection unit that irradiates the measurement target placed on the mounting unit with measurement light having a predetermined pattern;
a light receiving unit that receives the measurement light emitted by the light projecting unit and reflected by the measurement target and outputs a light reception signal representing the amount of received light;
a pedestal portion that supports the mounting portion;
a support part that is connected to the pedestal part and fixedly supports the light projecting part and the light receiving part so as to look diagonally downward at the mounting part;
a measurement area setting unit that sets a measurement area for measuring the three-dimensional shape of the measurement target;
a movement control section that controls a movement operation of the placement section based on the measurement area set by the measurement area setting section;
The translation stage is translated in parallel by the movement control unit, or the rotation stage is rotationally moved by the movement control unit, and a point group representing the three-dimensional shape of the measurement target is generated based on the light reception signal output by the light reception unit. a point cloud data generation unit that generates data;
Equipped with
The X-axis and the Y-axis are arranged to be inclined with respect to a depth direction in which the mounting section approaches and moves away from the support section and a lateral direction perpendicular to the depth direction, in a plan view of the mounting surface. has been
The movement control unit is configured to move the mounting surface in parallel along the lateral direction, which is a direction in which the plurality of measurement areas are lined up, when the measurement area setting unit sets a plurality of measurement areas in the lateral direction. A three-dimensional shape measuring device configured to control the translation stage so as to. The three-dimensional shape measuring device according to claim 1,
The X-axis and the Y-axis are at an angle of approximately 45° with respect to a depth direction in which the mounting portion approaches and moves away from the support portion and a lateral direction perpendicular to the depth direction, in a plan view of the mounting surface. A three-dimensional shape measuring device that forms an angle. The three-dimensional shape measuring device according to claim 1 or 2,
The movement control unit moves the mounting surface in parallel in the depth direction and in a lateral direction perpendicular to the depth direction by interlocking and parallelly moving the X-axis direction and the Y-axis direction of the mounting unit. A three-dimensional shape measuring device configured to The three-dimensional shape measuring device according to any one of claims 1 to 3,
The movement control section is a three-dimensional shape measuring device in which a corner of the measurement area facing the support section is set as a movement restriction area. A three-dimensional shape measuring device that measures the three-dimensional shape of a measurement target,
It has a mounting surface on which the object to be measured is placed,
a rotation stage for rotationally moving the mounting surface around a rotation axis;
a mounting section having a translation stage for translating the mounting surface along the X-axis and the Y-axis that are orthogonal to each other;
a light projection unit that irradiates the measurement target placed on the mounting unit with measurement light having a predetermined pattern;
a light receiving unit that receives the measurement light emitted by the light projecting unit and reflected by the measurement target and outputs a light reception signal representing the amount of received light;
a pedestal portion that supports the mounting portion;
a support part that is connected to the pedestal part and fixedly supports the light projecting part and the light receiving part so that a measurement area using the measurement light is formed above the placing part;
a movement control section that controls the movement operation of the mounting section;
The translation stage is translated in parallel by the movement control unit, or the rotation stage is rotationally moved by the movement control unit, and a point group representing the three-dimensional shape of the measurement target is generated based on the light reception signal output by the light reception unit. a point cloud data generation unit that generates data;
The amount of protrusion from the periphery of the placement surface of the part of the measurement target placed on the placement section that protrudes from the placement surface is determined when the placement surface is used as a reference position. an end detection unit that detects whether the distance between the mounting surface and the support unit is greater than the shortest distance;
Equipped with
The X-axis and the Y-axis are arranged to be inclined with respect to a depth direction in which the mounting section approaches and moves away from the support section and a lateral direction perpendicular to the depth direction, in a plan view of the mounting surface. A three-dimensional shape measuring device. The three-dimensional shape measuring device according to claim 5, further comprising:
an evacuation position specifying unit that specifies an evacuation position where the end portion does not collide with the support portion when the rotary stage rotates, based on the detection result of the end detection portion;
The three-dimensional shape measuring device is configured such that the movement control section rotationally moves the rotation stage while the translation stage is moved in parallel to the retracted position. The three-dimensional shape measuring device according to claim 5 or 6,
The three-dimensional shape measuring device is configured such that the edge detection section detects an edge based on point cloud data generated by the point cloud data generation section. The three-dimensional shape measuring device according to any one of claims 1 to 7,
A three-dimensional shape measuring device in which the mounting surface is formed into a circular shape. The three-dimensional shape measuring device according to any one of claims 1 to 8, further comprising:
a fixing part that is fixed to the upper part of the support part and fixes the light projecting part and the light receiving part in a posture in which the optical axis is inclined with respect to the mounting surface so as to look diagonally downward at the measurement area;
an inclined table having an inclined surface inclined with respect to the mounting surface so as to face the optical axis of the light projecting section and the light receiving section;
A three-dimensional shape measuring device equipped with The three-dimensional shape measuring device according to any one of claims 1 to 9,
The mounting section is a three-dimensional shape measuring device including the translation stage that is freely translatable above the rotation stage that is rotatably supported by the pedestal section. The three-dimensional shape measuring device according to any one of claims 1 to 9,
The mounting section is a three-dimensional shape measuring device, in which the rotary stage is rotatably provided above the translation stage that is supported on the pedestal section so as to be freely translatable. The three-dimensional shape measuring device according to any one of claims 5 to 7, further comprising:
Based on the measurement light irradiated at a first position where the translation stage is moved from the reference position, first point cloud data generated by the point cloud data generation section and at a second position different from the first position A three-dimensional shape measuring device including a point cloud data synthesis section that synthesizes the second point group data generated based on the irradiated measurement light. The three-dimensional shape measuring device according to any one of claims 1 to 12,
When two measurement areas are set in the lateral direction , the movement control unit controls the translation so that the placement surface is moved in parallel to a position corresponding to one of the two measurement areas. A three-dimensional shape measuring device configured to control the translation stage so that, after controlling the stage, the mounting surface moves in parallel to a position corresponding to the other measurement area. A three-dimensional shape measuring device that measures the three-dimensional shape of a measurement target,
a mounting section having a mounting surface on which the measurement target is mounted, a rotation stage for rotationally moving the mounting surface, and a translation stage for translating the mounting surface;
a light projection unit that irradiates the measurement target placed on the mounting unit with measurement light having a predetermined pattern;
a light receiving unit that receives the measurement light emitted by the light projecting unit and reflected by the measurement target and outputs a light reception signal representing the amount of received light;
a pedestal portion that supports the mounting portion;
a support part that is connected to the pedestal part and fixedly supports the light projecting part and the light receiving part so as to look diagonally downward at the mounting part;
a measurement area setting unit that sets a measurement area for measuring the three-dimensional shape of the measurement target;
a movement control section that controls the movement operation of the mounting section;
The translation stage is translated in parallel by the movement control unit, or the rotation stage is rotationally moved by the movement control unit, and a point group representing the three-dimensional shape of the measurement target is generated based on the light reception signal output by the light reception unit. a point cloud data generation unit that generates data;
Equipped with
The mounting unit includes the translation stage in a freely translatable manner above the rotation stage rotatably supported by the pedestal part,
The movement control unit is configured to move the placement surface in parallel along the lateral direction, which is a direction in which the plurality of measurement areas are lined up, when a plurality of measurement areas are set in a lateral direction by the measurement area setting unit. A three-dimensional shape measuring device configured to control the translation stage as follows. The three-dimensional shape measuring device according to claim 14,
The X-axis and Y-axis, which are orthogonal to each other, are inclined with respect to a depth direction in which the mounting section approaches and moves away from the support section, and a lateral direction that is orthogonal to the depth direction, in a plan view of the mounting surface. A three-dimensional shape measuring device that is arranged as follows.

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