JP2021011383A5 - - Google Patents

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Publication number
JP2021011383A5
JP2021011383A5 JP2019153346A JP2019153346A JP2021011383A5 JP 2021011383 A5 JP2021011383 A5 JP 2021011383A5 JP 2019153346 A JP2019153346 A JP 2019153346A JP 2019153346 A JP2019153346 A JP 2019153346A JP 2021011383 A5 JP2021011383 A5 JP 2021011383A5
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JP
Japan
Prior art keywords
substrate
transport
roller
shaft
mounting roller
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JP2019153346A
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English (en)
Japanese (ja)
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JP2021011383A (ja
JP7332391B2 (ja
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Priority to CN201910892149.8A priority Critical patent/CN110970337A/zh
Publication of JP2021011383A publication Critical patent/JP2021011383A/ja
Publication of JP2021011383A5 publication Critical patent/JP2021011383A5/ja
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JP2019153346A 2018-09-28 2019-08-26 基板搬送装置および基板処理装置 Active JP7332391B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910892149.8A CN110970337A (zh) 2018-09-28 2019-09-20 基板输送装置以及基板处理装置

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2018185327 2018-09-28
JP2018185327 2018-09-28
JP2019115089 2019-06-21
JP2019115089 2019-06-21
JP2019133261 2019-07-19
JP2019133261 2019-07-19

Publications (3)

Publication Number Publication Date
JP2021011383A JP2021011383A (ja) 2021-02-04
JP2021011383A5 true JP2021011383A5 (enrdf_load_stackoverflow) 2022-05-17
JP7332391B2 JP7332391B2 (ja) 2023-08-23

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JP2019153346A Active JP7332391B2 (ja) 2018-09-28 2019-08-26 基板搬送装置および基板処理装置

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JP (1) JP7332391B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113148657B (zh) * 2021-05-08 2023-07-04 深圳市华星光电半导体显示技术有限公司 一种基板传送装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6381075U (enrdf_load_stackoverflow) * 1986-11-15 1988-05-28
JP4079579B2 (ja) 2000-06-23 2008-04-23 Ｎｅｃ液晶テクノロジー株式会社 ウェット処理装置
JP3960087B2 (ja) 2001-05-30 2007-08-15 東京エレクトロン株式会社 搬送装置
JP4881575B2 (ja) 2005-04-28 2012-02-22 芝浦メカトロニクス株式会社 基板の搬送装置
KR100672964B1 (ko) 2005-08-22 2007-01-22 주식회사 케이씨텍 대면적 기판 이송장치
KR101131181B1 (ko) 2009-02-24 2012-03-28 (유)에스엔티 기판이송장치
CN106571326B (zh) 2016-10-19 2019-11-26 京东方科技集团股份有限公司 一种对压滚轮及基板传送装置

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