JP2021001784A - Airtightness inspection method - Google Patents

Airtightness inspection method Download PDF

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JP2021001784A
JP2021001784A JP2019115061A JP2019115061A JP2021001784A JP 2021001784 A JP2021001784 A JP 2021001784A JP 2019115061 A JP2019115061 A JP 2019115061A JP 2019115061 A JP2019115061 A JP 2019115061A JP 2021001784 A JP2021001784 A JP 2021001784A
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set pressure
container
airtightness
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vacuum
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JP7317588B2 (en
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清水　昭宏
Akihiro Shimizu
昭宏 清水
直樹 小芦
Naoki Koashi
直樹 小芦
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Toyooki Kogyo Co Ltd
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Abstract

To provide an airtightness inspection method enabling airtightness to be inspected with a high degree of accuracy using an inexpensive airtightness inspection device employing a general-purpose sensor.SOLUTION: An airtightness inspection method comprises: a first step T1 of depressurizing the inside of a container to a first set pressure A1 of vacuum; a second step T2 of depressurizing the inside of the container set to the first set pressure A1, to a second set value A2 whose degree of vacuum is higher than that of the first set pressure A1; a third step T3 of retaining the degree of vacuum of the inside of the container set to the second set pressure A2, to the second set pressure A2 for a fixed period; a fourth step T4 of increasing the degree of vacuum of the inside of the container retained to the second set pressure A2, to the first set pressure A1 again; and a fifth step T5 of depressurizing the inside of the container set to the first set pressure A1, to the second set pressure A2 again. An inspection object leaked out from inspection objects in the second step T2 is detected and defined as a reference value S1, and an inspection object leaked out from the inspection objects in the fifth step T5 is detected and defined as a detection value S2. The detection value S2 is compared with the reference value S1 to determine the airtightness of the inspection object.SELECTED DRAWING: Figure 2

Description

本発明は、密封構造の容器内に収容した検査対象物の気密性を検査する機密性検査方法に関する。 The present invention relates to a confidentiality inspection method for inspecting the airtightness of an inspection object housed in a container having a sealed structure.

この種の気密性検査方法は、検査対象物を密封構造の容器としての真空チャンバに収容し、真空チャンバと真空ポンプとの間を検査排気配管で接続し、検査排気配管に気体状の検出対象物を検出するセンサを配設している。そして、真空ポンプを作動して真空チャンバ内の気体を排気し、この気体に含まれている検出対象物の濃度をセンサで検知し、検査対象物の気密性に問題があるか否かを判定している。 In this type of airtightness inspection method, the inspection object is housed in a vacuum chamber as a container having a sealed structure, the vacuum chamber and the vacuum pump are connected by an inspection exhaust pipe, and a gaseous detection target is connected to the inspection exhaust pipe. A sensor for detecting an object is arranged. Then, the vacuum pump is operated to exhaust the gas in the vacuum chamber, the concentration of the detection object contained in this gas is detected by the sensor, and it is determined whether or not there is a problem in the airtightness of the inspection object. doing.

特許第５９４２０６５号公報Japanese Patent No. 5942065

ところが、かかる従来の気密性検査方法では、真空チャンバと真空ポンプとの間を接続する検査排気配管に配設したセンサは、小さいピンホールを検出できる高精度のものである。そして、センサは、ホルダ部の内部に導入された気体を通す供給口をセンサ部のセンサ面に近づけた状態に配置した複雑な構成で高価なものとなり、気密性検査装置が高価になってしまうという問題点があった。 However, in such a conventional airtightness inspection method, the sensor arranged in the inspection / exhaust pipe connecting the vacuum chamber and the vacuum pump is of high accuracy capable of detecting a small pinhole. Then, the sensor has a complicated structure in which the supply port for passing the gas introduced inside the holder portion is arranged close to the sensor surface of the sensor portion, which makes the airtightness inspection device expensive. There was a problem.

本発明の課題は、汎用のセンサを用いた安価な気密性検査装置で、高精度の気密性検査を行い得る気密性検査方法を提供するものである。 An object of the present invention is to provide an airtightness inspection method capable of performing a highly accurate airtightness inspection with an inexpensive airtightness inspection apparatus using a general-purpose sensor.

かかる課題を達成すべく、本発明は次の手段をとった。即ち、
密封構造の容器内に収容した検査対象物から漏出する検出対象物をセンサで検出して検査対象物の気密性を検査する気密性検査方法であって、検査対象物を収容する密封構造の容器内を真空の第１設定圧に減圧する第１工程と、第１設定圧にした容器内を第１設定圧より真空度が高い第２設定圧に減圧する第２工程と、第２設定圧にした容器内の真空度を一定期間第２設定圧に保持する第３工程と、第２設定圧に保持した容器内の真空度を第１設定圧に増圧する第４工程と、第１設定圧にした容器内を再度第２設定圧に減圧する第５工程から成り、第２工程で検査対象物から漏出する検出対象物を検出して基準値とし、第５工程で検査対象物から漏出する検出対象物を検出して検出値とし、基準値と検出値とを比較して検査対象物の気密性を判定することを特徴とする気密性検査方法がそれである。 In order to achieve such a problem, the present invention has taken the following measures. That is,
This is an airtightness inspection method in which a sensor detects an object to be detected leaking from an object to be inspected contained in a container having a sealed structure and inspects the airtightness of the object to be inspected. A first step of reducing the inside to the first set pressure of vacuum, a second step of reducing the inside of the container set to the first set pressure to a second set pressure having a higher degree of vacuum than the first set pressure, and a second set pressure. The third step of holding the vacuum degree in the container at the second set pressure for a certain period of time, the fourth step of increasing the vacuum degree in the container held at the second set pressure to the first set pressure, and the first setting. It consists of a fifth step of reducing the pressure inside the container to the second set pressure again. In the second step, the detection target that leaks from the inspection target is detected and used as the reference value, and in the fifth step, it leaks from the inspection target. It is an airtightness inspection method characterized in that an object to be detected is detected and used as a detected value, and the airtightness of the object to be inspected is determined by comparing the reference value and the detected value.

以上詳述したように、請求項１に記載の発明は、第２工程で検査対象物から漏出する検出対象物を検出して基準値とし、第５工程で検査対象物から漏出する検出対象物を検出して検出値とし、検出値を基準値と比較して検査対象物の気密性を判定する。このため、基準値と検出値とは相互に近似した条件で検出するから、汎用のセンサを用いて安価な気密性検査装置で、高精度の気密性検査を行うことができる。 As described in detail above, in the invention according to claim 1, the detection target object leaking from the inspection target object is detected in the second step and used as a reference value, and the detection target object leaking from the inspection target object in the fifth step is used. Is detected and used as the detected value, and the detected value is compared with the reference value to determine the airtightness of the inspection object. Therefore, since the reference value and the detected value are detected under conditions that are close to each other, it is possible to perform a highly accurate airtightness inspection with an inexpensive airtightness inspection device using a general-purpose sensor.

本発明の一実施形態の機密性検査方法を行う機密性検査装置の気体回路図である。It is a gas circuit diagram of the confidentiality inspection apparatus which performs the confidentiality inspection method of one Embodiment of this invention. 一実施形態の機密性検査方法のフローチャートである。It is a flowchart of the confidentiality inspection method of one Embodiment. 一実施形態を示し、容器内の圧力の推移を示したグラフ図である。It is a graph which shows one Embodiment and showed the transition of the pressure in a container.

以下、本発明の一実施形態を図面に基づき説明する。
図１は、機密性検査方法を行う機密性検査装置を示している。
１Ａ、１Ｂは密封構造の容器で、２個を有し、内部に検査対象物としてのリチウムイオンキャパシタ（図示せず）を収容している。２Ａ、２Ｂは粗検知に用いる大型の真空ポンプで、２個を有している。真空ポンプ２Ａは吸気側を容器１Ａと配管３Ａにより接続し、容器１Ｂと配管３Ｂにより接続している。真空ポンプ２Ｂは吸気側を容器１Ａと配管４Ａにより接続し、容器１Ｂと配管４Ｂにより接続している。各配管３Ａ、３Ｂ、４Ａ、４Ｂには電磁操作の開閉弁５Ａ、５Ｂ、６Ａ、６Ｂをそれぞれ配設し、各開閉弁５Ａ〜６Ｂは通電により各配管３Ａ〜４Ｂを開き、非通電により各配管３Ａ〜４Ｂを閉じる。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 shows a confidentiality inspection device that performs a confidentiality inspection method.
1A and 1B are containers having a sealed structure, which have two containers and contain a lithium ion capacitor (not shown) as an inspection object inside. 2A and 2B are large vacuum pumps used for coarse detection, and have two. In the vacuum pump 2A, the intake side is connected to the container 1A by a pipe 3A, and the container 1B is connected to the pipe 3B. In the vacuum pump 2B, the intake side is connected to the container 1A by the pipe 4A, and the container 1B is connected to the pipe 4B. Electromagnetically operated on-off valves 5A, 5B, 6A, and 6B are arranged in each of the pipes 3A, 3B, 4A, and 4B, and each of the on-off valves 5A to 6B opens each of the pipes 3A to 4B by energization and is not energized. Close the pipes 3A to 4B.

７は粗検知に用いるセンサで、中継容器８の内部に配置し、気体に含まれている検出対象物としての気化した電解液の濃度を検知する。センサ７の検知精度は、例えば２５ppmごとの単位である。センサ７は真空ポンプ２Ａの排気側と配管９Ａにより接続し、真空ポンプ２Ｂの排気側と配管９Ｂによりそれぞれ接続している。１０Ａ、１０Ｂ、１０Ｃ、１０Ｄ、１０Ｅ、１０Ｆ、１０Ｇ、１０Ｈは精密検知に用いる小型の真空ポンプで、８個を有している。８個のなかで４個の真空ポンプ１０Ａ〜１０Ｄは吸気側を容器１Ａと配管１１Ａ、１１Ｂ、１１Ｃ、１１Ｄにより接続し、残りの４個の真空ポンプ１０Ｅ〜１０Ｈは吸気側を容器１Ｂと配管１１Ｅ、１１Ｆ、１１Ｇ、１１Ｈにより接続している。 Reference numeral 7 denotes a sensor used for coarse detection, which is arranged inside the relay container 8 to detect the concentration of the vaporized electrolytic solution as a detection target contained in the gas. The detection accuracy of the sensor 7 is, for example, in units of 25 ppm. The sensor 7 is connected to the exhaust side of the vacuum pump 2A by a pipe 9A, and is connected to the exhaust side of the vacuum pump 2B by a pipe 9B, respectively. The 10A, 10B, 10C, 10D, 10E, 10F, 10G, and 10H are small vacuum pumps used for precision detection, and have eight. Of the eight, four vacuum pumps 10A to 10D connect the intake side to the container 1A by pipes 11A, 11B, 11C, 11D, and the remaining four vacuum pumps 10E to 10H connect the intake side to the container 1B and pipe. It is connected by 11E, 11F, 11G, 11H.

各配管１１Ａ〜１１Ｄには電磁操作の開閉弁１２Ａ、１２Ｂ、１２Ｃ、１２Ｄをそれぞれ配設し、各開閉弁１２Ａ〜１２Ｄは通電により各配管１１Ａ〜１１Ｄを開き、非通電により各配管１１Ａ〜１１Ｄを閉じる。同様に、各配管１１Ｅ〜１１Ｈには電磁操作の開閉弁１２Ｅ、１２Ｆ、１２Ｇ、１２Ｈをそれぞれ配設し、各開閉弁１２Ｅ〜１２Ｈは通電により各配管１１Ｅ〜１１Ｈを開き、非通電により各配管１１Ｅ〜１１Ｈを閉じる。 Electromagnetically operated on-off valves 12A, 12B, 12C, and 12D are arranged in the pipes 11A to 11D, and the on-off valves 12A to 12D open the pipes 11A to 11D by energization and the pipes 11A to 11D by non-energization. Close. Similarly, electromagnetically operated on-off valves 12E, 12F, 12G, and 12H are arranged in the pipes 11E to 11H, and the on-off valves 12E to 12H open the pipes 11E to 11H by energization and each pipe by non-energization. Close 11E-11H.

１３Ａ、１３Ｂ、１３Ｃ、１３Ｄ、１３Ｅ、１３Ｆ、１３Ｇ、１３Ｈは精密検知に用いるセンサで、検知精度は、例えば１ppmごとの単位で、８個を有している。８個のなかで４個のセンサ１３Ａ〜１３Ｄは４個の真空ポンプ１０Ａ〜１０Ｄの排気側と配管１４Ａ、１４Ｂ、１４Ｃ、１４Ｄにより接続し、残りの４個のセンサ１３Ｅ〜１３Ｈは４個の真空ポンプ１０Ｅ〜１０Ｈの排気側と配管１４Ｅ、１４Ｆ、１４Ｇ、１４Ｈにより接続し、気体に含まれている気化した電解液の濃度を検知する。 13A, 13B, 13C, 13D, 13E, 13F, 13G, 13H are sensors used for precision detection, and have eight detection accuracy, for example, in units of 1 ppm. Of the eight, four sensors 13A to 13D are connected to the exhaust side of the four vacuum pumps 10A to 10D by pipes 14A, 14B, 14C, 14D, and the remaining four sensors 13E to 13H are four. It is connected to the exhaust side of the vacuum pumps 10E to 10H by pipes 14E, 14F, 14G, 14H, and the concentration of the vaporized electrolytic solution contained in the gas is detected.

１５Ａは大気を容器１Ａに導入する大口径の配管で、容器１Ａに接続している。１５Ｂは大気を容器１Ａに導入する小口径の配管で、配管１５Ａより小径で容器１Ａに接続している。配管１５Ａ、１５Ｂは相互に接続し、ラインフィルタ１６Ａを介して大気を導入する。配管１５Ａ、１５Ｂには電磁操作の開閉弁１７Ａ、１７Ｂをそれぞれ配設し、各開閉弁１７Ａ、１７Ｂは通電により各配管１５Ａ、１５Ｂを開き、非通電により各配管１５Ａ、１５Ｂを閉じる。 Reference numeral 15A is a large-diameter pipe that introduces air into the container 1A and is connected to the container 1A. Reference numeral 15B is a small-diameter pipe that introduces air into the container 1A, and is connected to the container 1A with a diameter smaller than that of the pipe 15A. The pipes 15A and 15B are connected to each other and introduce the atmosphere through the line filter 16A. Electromagnetically operated on-off valves 17A and 17B are arranged in the pipes 15A and 15B, respectively, and the on-off valves 17A and 17B open the pipes 15A and 15B by energization and close the pipes 15A and 15B by non-energization.

１５Ｃは大気を容器１Ｂに導入する大口径の配管で、容器１Ｂに接続している。１５Ｄは大気を容器１Ｂに導入する小口径の配管で、配管１５Ｃより小径で容器１Ｂに接続している。配管１５Ｃ、１５Ｄは相互に接続し、ラインフィルタ１６Ｂを介して大気を導入する。配管１５Ｃ、１５Ｄには電磁操作の開閉弁１７Ｃ、１７Ｄをそれぞれ配設し、各開閉弁１７Ｃ、１７Ｄは通電により各配管１５Ｃ、１５Ｄを開き、非通電により各配管１５Ｃ、１５Ｄを閉じる。１８Ａ、１８Ｂは各容器１Ａ、１Ｂの圧力を検知する圧力センサである。 Reference numeral 15C is a large-diameter pipe for introducing the atmosphere into the container 1B, which is connected to the container 1B. Reference numeral 15D is a small-diameter pipe that introduces the atmosphere into the container 1B, and is connected to the container 1B with a diameter smaller than that of the pipe 15C. The pipes 15C and 15D are connected to each other and introduce the atmosphere through the line filter 16B. Electromagnetically operated on-off valves 17C and 17D are arranged on the pipes 15C and 15D, respectively, and the on-off valves 17C and 17D open the pipes 15C and 15D by energization and close the pipes 15C and 15D by non-energization. 18A and 18B are pressure sensors that detect the pressure of each container 1A and 1B.

次に、かかる気密性検査装置を用いた機密性検査方法を説明する。
図２は、機密性検査方法のフローチャートを示し、第１工程Ｔ１、第２工程Ｔ２、第３工程Ｔ３、第４工程Ｔ４、第５工程Ｔ５等から成っている。図３は、各工程Ｔ１〜Ｔ５における容器１Ａ、１Ｂ内の圧力を示している。
第１工程Ｔ１は、リチウムイオンキャパシタを収容する密封構造の容器１Ａ、１Ｂ内を大気圧Ａ０から真空の第１設定圧Ａ１に減圧する。第１設定圧Ａ１には、開閉弁５Ａ〜６Ｂを通電して配管３Ａ〜４Ｂを開き、大型の真空ポンプ２Ａ、２Ｂを作動して減圧する。そして、粗検知のセンサ７で真空ポンプ２Ａ、２Ｂから排気する気体に含まれている気化した電解液の濃度を検知し、検知した濃度の値が第１規定値Ｙ１以内であれば、第２工程Ｔ２に進む。また、検知した濃度の値が第１規定値Ｙ１を超えていれば、容器１Ａ、１Ｂ内に収容したリチウムイオンキャパシタは不合格となり、検査を終了する。第１規定値Ｙ１は、センサ７の検知精度に対応するものである。 Next, a confidentiality inspection method using such an airtightness inspection device will be described.
FIG. 2 shows a flowchart of a confidentiality inspection method, which is composed of a first step T1, a second step T2, a third step T3, a fourth step T4, a fifth step T5, and the like. FIG. 3 shows the pressure in the containers 1A and 1B in each of the steps T1 to T5.
In the first step T1, the pressure inside the sealed containers 1A and 1B accommodating the lithium ion capacitor is reduced from the atmospheric pressure A0 to the vacuum first set pressure A1. For the first set pressure A1, the on-off valves 5A to 6B are energized to open the pipes 3A to 4B, and the large vacuum pumps 2A and 2B are operated to reduce the pressure. Then, the coarse detection sensor 7 detects the concentration of the vaporized electrolytic solution contained in the gas exhausted from the vacuum pumps 2A and 2B, and if the value of the detected concentration is within the first specified value Y1, the second Proceed to step T2. If the detected concentration value exceeds the first specified value Y1, the lithium ion capacitors housed in the containers 1A and 1B are rejected, and the inspection is completed. The first specified value Y1 corresponds to the detection accuracy of the sensor 7.

第２工程Ｔ２は、第１設定圧Ａ１にした容器１Ａ、１Ｂ内を、第１設定圧Ａ１より真空度が高い第２設定圧Ａ２に減圧する。第２設定圧Ａ２には、開閉弁１２Ａ〜１２Ｈを通電して配管１１Ａ〜１１Ｈを開き、真空ポンプ１０Ａ〜１０Ｈを作動して減圧する。そして、精密検知のセンサ１３Ａ〜１３Ｈで真空ポンプ１０Ａ〜１０Ｈから排気する気体に含まれている気化した電解液の濃度を検知し、検知した濃度の値を基準値Ｓ１として図示しない制御装置に記憶する。 In the second step T2, the inside of the containers 1A and 1B set to the first set pressure A1 is depressurized to the second set pressure A2 having a higher degree of vacuum than the first set pressure A1. For the second set pressure A2, the on-off valves 12A to 12H are energized to open the pipes 11A to 11H, and the vacuum pumps 10A to 10H are operated to reduce the pressure. Then, the precision detection sensors 13A to 13H detect the concentration of the vaporized electrolytic solution contained in the gas exhausted from the vacuum pumps 10A to 10H, and the value of the detected concentration is stored in a control device (not shown) as a reference value S1. To do.

第３工程Ｔ３は、第２設定圧Ａ２にした容器１Ａ、１Ｂ内の真空度を一定期間第２設定圧Ａ２に保持する工程で、リチウムイオンキャパシタから電解液が漏出するのを待つものである。一定期間を第２設定圧Ａ２に保持するには、開閉弁５Ａ〜６Ｂ、１２Ａ〜１２Ｈを非通電にして配管３Ａ〜４Ｂ、１１Ａ〜１１Ｈを閉じる。 The third step T3 is a step of maintaining the degree of vacuum in the containers 1A and 1B at the second set pressure A2 at the second set pressure A2 for a certain period of time, and waits for the electrolytic solution to leak from the lithium ion capacitor. .. To maintain the second set pressure A2 for a certain period of time, the on-off valves 5A to 6B and 12A to 12H are de-energized and the pipes 3A to 4B and 11A to 11H are closed.

第４工程Ｔ４は、第２設定圧Ａ２に保持した容器１Ａ、１Ｂ内の真空度を第１設定圧Ａ１に増圧する。第１設定圧Ａ１に増圧するには、開閉弁１７Ｂ、１７Ｄを通電して小口径の配管１５Ｂ、１５Ｄを開く。 In the fourth step T4, the degree of vacuum in the containers 1A and 1B held at the second set pressure A2 is increased to the first set pressure A1. To increase the pressure to the first set pressure A1, the on-off valves 17B and 17D are energized to open the small diameter pipes 15B and 15D.

第５工程Ｔ５は、第１設定圧Ａ１にした容器１Ａ、１Ｂ内を再度第２設定圧Ａ２に減圧する。第２設定圧Ａ２には、第２工程Ｔ２と同様に、開閉弁１２Ａ〜１２Ｈを通電して配管１１Ａ〜１１Ｈを開き、真空ポンプ１０Ａ〜１０Ｈを作動して減圧する。そして、精密検知のセンサ１３Ａ〜１３Ｈで真空ポンプ１０Ａ〜１０Ｈから排気する気体に含まれている気化した電解液の濃度を検知し、検知した濃度の値を検出値Ｓ２とする。 In the fifth step T5, the pressure inside the containers 1A and 1B set to the first set pressure A1 is reduced to the second set pressure A2 again. Similar to the second step T2, the on-off valves 12A to 12H are energized to the second set pressure A2 to open the pipes 11A to 11H, and the vacuum pumps 10A to 10H are operated to reduce the pressure. Then, the precision detection sensors 13A to 13H detect the concentration of the vaporized electrolytic solution contained in the gas exhausted from the vacuum pumps 10A to 10H, and the value of the detected concentration is set as the detection value S2.

そして、検出値Ｓ２を第２工程Ｔ２で制御装置に記憶した基準値Ｓ１と比較し、検出値Ｓ２から基準値Ｓ１を差し引いた判定値Ｓ３が第２規定値以Ｙ２内であればリチウムイオンキャパシタは合格となり、判定値Ｓ３が第２規定値Ｙ２を超えていればリチウムイオンキャパシタは不合格となる。第２規定値以Ｙ２は、センサ１３Ａ〜１３Ｈの検知精度に対応するもので、第１規定値Ｙ１より検知精度が細分されている。検査が完了したら、開閉弁１７Ａ、１７Ｃを通電して大口径の配管１５Ａ、１５Ｃを開き、容器１Ａ、１Ｂ内を大気圧Ａ０に増圧する。 Then, the detected value S2 is compared with the reference value S1 stored in the control device in the second step T2, and if the determination value S3 obtained by subtracting the reference value S1 from the detected value S2 is within Y2 of the second specified value or more, the lithium ion capacitor Is passed, and if the determination value S3 exceeds the second specified value Y2, the lithium ion capacitor is rejected. The second specified value and Y2 correspond to the detection accuracy of the sensors 13A to 13H, and the detection accuracy is subdivided from the first specified value Y1. When the inspection is completed, the on-off valves 17A and 17C are energized to open the large-diameter pipes 15A and 15C, and the pressure inside the containers 1A and 1B is increased to atmospheric pressure A0.

かかる機密性検査方法で、第２工程Ｔ２でリチウムイオンキャパシタから漏出する気化した電解液の濃度を検出して基準値Ｓ１とし、第５工程Ｔ５でリチウムイオンキャパシタから漏出する気化した電解液の濃度を検出して検出値Ｓ２とし、検出値Ｓ２を基準値Ｓ１と比較してリチウムイオンキャパシタの気密性を判定する。このため、基準値Ｓ２と検出値Ｓ１とは相互に近似した条件で検出するから、精密検知のサンサ１３Ａ〜１３Ｈは汎用で安価なものを用いることができ、汎用のセンサ１３Ａ〜１３Ｈを用いて安価な気密性検査装置で、高精度の気密性検査を行うことができる。 In this confidentiality inspection method, the concentration of the vaporized electrolytic solution leaking from the lithium ion capacitor in the second step T2 is detected and set as the reference value S1, and the concentration of the vaporized electrolytic solution leaking from the lithium ion capacitor in the fifth step T5. Is detected and used as the detected value S2, and the detected value S2 is compared with the reference value S1 to determine the airtightness of the lithium ion capacitor. Therefore, since the reference value S2 and the detection value S1 are detected under conditions that are close to each other, general-purpose and inexpensive sensors 13A to 13H can be used for precision detection, and general-purpose sensors 13A to 13H are used. Highly accurate airtightness inspection can be performed with an inexpensive airtightness inspection device.

なお、前述の一実施形態では、真空ポンプ２Ａ、２Ｂ、１０Ａ〜１０Ｄ、１０Ｅ〜１０Ｈの排気側にセンサ７、１３Ａ〜１３Ｄ、１３Ｅ〜１３Ｈを接続したが、真空ポンプ２Ａ、２Ｂ、１０Ａ〜１０Ｄ、１０Ｅ〜１０Ｈの吸気側にセンサ７、１３Ａ〜１３Ｄ、１３Ｅ〜１３Ｈを接続してもよい。また、内部に検査対象物を収容する密封構造の容器１Ａ、１Ｂは２個設けたが、１個であったり、３個以上設けてもよい。 In the above-described embodiment, the sensors 7, 13A to 13D, and 13E to 13H are connected to the exhaust side of the vacuum pumps 2A, 2B, 10A to 10D, 10E to 10H, but the vacuum pumps 2A, 2B, 10A to 10D. Sensors 7, 13A to 13D, and 13E to 13H may be connected to the intake side of 10E to 10H. Further, although two containers 1A and 1B having a sealed structure for accommodating the inspection object are provided inside, one container or three or more containers may be provided.

１Ａ、１Ｂ：容器
７、１３Ａ、１３Ｂ、１３Ｃ、１３Ｄ、１３Ｅ、１３Ｆ、１３Ｇ、１３Ｈ：センサ
Ｔ１：第１工程
Ｔ２：第２工程
Ｔ３：第３工程
Ｔ４：第４工程
Ｔ５：第５工程
Ｓ１：基準値
Ｓ２：検出値 1A, 1B: Containers 7, 13A, 13B, 13C, 13D, 13E, 13F, 13G, 13H: Sensor T1: First step T2: Second step T3: Third step T4: Fourth step T5: Fifth step S1 : Reference value S2: Detected value

Claims (1)

密封構造の容器内に収容した検査対象物から漏出する検出対象物をセンサで検出して検査対象物の気密性を検査する気密性検査方法であって、検査対象物を収容する密封構造の容器内を真空の第１設定圧に減圧する第１工程と、第１設定圧にした容器内を第１設定圧より真空度が高い第２設定圧に減圧する第２工程と、第２設定圧にした容器内の真空度を一定期間第２設定圧に保持する第３工程と、第２設定圧に保持した容器内の真空度を第１設定圧に増圧する第４工程と、第１設定圧にした容器内を再度第２設定圧に減圧する第５工程から成り、第２工程で検査対象物から漏出する検出対象物を検出して基準値とし、第５工程で検査対象物から漏出する検出対象物を検出して検出値とし、検出値を基準値と比較して検査対象物の気密性を判定することを特徴とする気密性検査方法。 This is an airtightness inspection method in which a sensor detects an object to be detected leaking from an object to be inspected contained in a container having a sealed structure and inspects the airtightness of the object to be inspected. A first step of reducing the inside to the first set pressure of vacuum, a second step of reducing the inside of the container set to the first set pressure to a second set pressure having a higher degree of vacuum than the first set pressure, and a second set pressure. The third step of holding the vacuum degree in the container at the second set pressure for a certain period of time, the fourth step of increasing the vacuum degree in the container held at the second set pressure to the first set pressure, and the first setting. It consists of a fifth step of reducing the pressure inside the container to the second set pressure again. In the second step, the detection target that leaks from the inspection target is detected and used as the reference value, and in the fifth step, it leaks from the inspection target. An airtightness inspection method characterized in that an object to be detected is detected and used as a detected value, and the detected value is compared with a reference value to determine the airtightness of the object to be inspected.
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JP2005283349A (en) * 2004-03-30 2005-10-13 Cornes Dodwell Ltd Leakage inspection method for content-filled container and its device
JP2010256018A (en) * 2009-04-21 2010-11-11 Nissan Motor Co Ltd Device and method of airtightness test
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