JP2021001108A - Disk-like plate glass - Google Patents

Abstract

To provide a plate glass capable of easily recognizing a border of an edge face part in plan view with a camera or the like while sufficiently securing hardness of the edge face part.SOLUTION: A disk-like plate glass 1 comprises: a first main surface 3 and a second main surface 4 facing each other in a plate thickness direction; an edge face 5; a first chamfer part 6 connecting the first main surface 3 with the edge face 5; and a second chamfer part 7 connecting the second main surface 4 with the edge face 5. A surface roughness Ra of the first and second chamfer parts 6, 7 is larger than a surface roughness Ra of the first and second main surfaces 3, 4, and a surface roughness Ra of the edge face 5 is smaller than a surface roughness Ra of the first and second chamfer parts 6, 7.SELECTED DRAWING: Figure 2

Description

The present invention relates to a disk-shaped flat glass.

During the semiconductor wafer manufacturing process, a disk-shaped flat glass may be used as a member that supports the semiconductor wafer.

The end face portion of the flat glass for this type of semiconductor wafer may be configured as follows in order to prevent chipping or cracking due to contact with other members. That is, a chamfered portion is formed at a portion connecting the first and second main surfaces and the end faces facing each other in the plate thickness direction of the plate glass, and the surface roughness of the entire end face portion including the end face and the chamfered portion is reduced by polishing or the like. (For example, refer to Patent Document 1). Patent Document 1 discloses that the arithmetic mean roughness of the entire end face portion is 440 nm or less.

JP-A-2009-16771

By the way, in the case of flat glass for semiconductor wafers, it is required to correctly position the flat glass at a predetermined position in the manufacturing process of semiconductor wear. Therefore, when positioning the flat glass, a configuration may be adopted in which the boundary of the end face portion of the flat glass is automatically recognized in a plan view using a camera or the like.

However, if the surface roughness of the entire end face portion becomes too small, the entire end face portion becomes a mirror surface or a state close to a mirror surface. Therefore, when the plate glass is positioned, the end face portion shines brightly and it becomes difficult to recognize the boundary of the end face portion. As a result, a positioning error of the flat glass may occur.

On the other hand, if the surface roughness of the entire end face portion is increased so that the boundary of the end face portion can be recognized, the problem that the strength of the end face portion is lowered and the risk of damage to the flat glass is increased may occur again.

An object of the present invention is to provide a flat glass that can easily recognize the boundary of the end face portion in a plan view while ensuring sufficient strength of the end face portion.

The plate glass according to the present invention, which was devised to solve the above problems, has a first chamfer that connects the first and second main surfaces, end faces, and the first main surface and end faces that face each other in the plate thickness direction. A disk-shaped flat glass having a portion and a second chamfered portion connecting the second main surface and the end face, and the surface roughness Ra of the first chamfered portion is the surface roughness Ra of the first and second main surfaces. It is characterized in that it is larger than each surface roughness Ra, the surface roughness Ra of the end face is smaller than the surface roughness Ra of the first chamfered portion, and has a notch in a part of the peripheral edge portion.

According to such a configuration, the surface roughness of the first chamfered portion and the surface roughness of the end face are different. The first chamfered portion has a rough surface as compared with the first and second main surfaces, and the end surface has a smooth surface as compared with the first chamfered portion. The first chamfered portion and the second chamfered portion are easily observed as a region having a relatively large area when the boundary of the end face portion of the flat glass is automatically recognized by a camera or the like in a plan view. Therefore, if the first chamfered portion has a relatively rough surface as described above, it becomes easy to accurately recognize the boundary of the end face portion, and the positioning error of the flat glass can be suppressed. On the other hand, since the end face projects outward from the chamfered portion, other members are more likely to come into contact with the chamfered portion. Therefore, if the end face becomes a relatively smooth surface and has high strength as described above, the strength of the entire end face portion including the end face and the chamfered portion is sufficient from the viewpoint of preventing damage due to contact with other members. It becomes a thing. Further, since the notch portion has a smooth surface as compared with the first chamfered portion, the strength of the notch portion is increased. Therefore, when adjusting the orientation of the plate glass with reference to the notch portion, it is possible to prevent the plate glass from being damaged starting from the notch portion. Here, for example, if the orientation of the crystal orientation of the semiconductor wafer supported by the plate glass is made to correspond to the position of the notch portion of the plate glass, the orientation of the crystal orientation of the semiconductor wafer is recognized with reference to the notch portion of the plate glass. be able to. Further, when the semiconductor wafer is also provided with a notch in order to align the crystal orientation of the semiconductor wafer with a predetermined orientation, the positions of the notch of the semiconductor wafer and the notch of the flat glass are matched. It is preferable to keep it.

In the above configuration, the surface roughness Ra of the second chamfered portion is larger than the surface roughness Ra of the second main surface, and the surface roughness Ra of the end face is larger than the surface roughness Ra of the second chamfered portion. It is also preferable that the surface roughness Ra of the notch portion is smaller than the surface roughness Ra of the second chamfered portion. In this way, the second chamfered portion also becomes a rough surface as compared with the first and second main surfaces, and the boundary of the end face portion becomes easier to recognize.

In the above configuration, the surface roughness Ra of the end face is preferably 0.003 to 0.03 μm. Further, in the above configuration, it is preferable that the surface roughness Ra of each of the first and second chamfered portions is 0.01 to 0.20 μm. Further, in the above configuration, the surface roughness Ra of each of the first and second main surfaces is preferably 0.2 to 1.5 nm. Here, "surface roughness Ra" refers to a value measured by a method conforming to JIS B0601: 2001 (hereinafter, the same applies).

In the above configuration, the surface roughness Ra of the notch portion may be larger than the surface roughness Ra of the end surface. In this way, the cutout portion has a rough surface as compared with the end surface, so that it is easy to recognize the orientation of the flat glass in a plan view using a camera or the like.

In the above configuration, the surface roughness Ra of the notch portion is preferably 0.003 to 0.03 μm.

In the above configuration, the notch may be a concave notch recessed inside the peripheral edge.

According to the present invention, it is possible to provide a flat glass in which the boundary of the end face portion can be easily recognized in a plan view by a camera or the like while sufficiently ensuring the strength of the end face portion.

It is a top view which shows an example of the flat glass which concerns on embodiment of this invention. It is sectional drawing of the flat glass of FIG. It is sectional drawing which shows the modification of the plate glass which concerns on embodiment of this invention. It is sectional drawing which shows the modification of the plate glass which concerns on embodiment of this invention. (A) and (b) are side views for demonstrating the chamfering process included in the method for manufacturing a flat glass according to the embodiment of the present invention. (A) and (b) are both side views showing a modified example of the chamfering process. It is a perspective view for demonstrating the polishing process included in the manufacturing method of the flat glass which concerns on embodiment of this invention. FIG. 7 is a sectional view taken along the line AA of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

(Disc-shaped flat glass)
As shown in FIG. 1, in the disk-shaped flat glass 1 according to the present embodiment, a V-shaped (or U-shaped) notch 2 as a notch is formed in a part of the peripheral edge portion. The plate glass 1 is used as a wafer support plate glass that supports a semiconductor wafer. The semiconductor wafer is held in a state of being adhered to, for example, the plate glass 1. The notch 2 may be omitted.

As shown in FIG. 2, the plate glass 1 is a first surface that connects the first main surface 3 and the second main surface 4 facing each other in the plate thickness direction, the end surface 5, and the first main surface 3 and the end surface 5. A chamfered portion 6 and a second chamfered portion 7 connecting the second main surface 4 and the end surface 5 are provided. That is, the end face portion of the flat glass 1 includes the end face 5 and the first and second chamfered portions 6 and 7. In this embodiment, a chamfered portion is also formed in the notch 2. In the illustrated example, the first main surface 3 is the upper surface and the second main surface 4 is the lower surface, but either the first main surface 3 or the second main surface 4 is used as the upper surface to support the semiconductor wafer. You may do so.

In this embodiment, the first and second chamfered portions 6 and 7 are formed of inclined planes inclined with respect to the first and second main surfaces 3 and 4. That is, the flat glass 1 is C-chamfered.

The end face 5 includes the most protruding portion on the outward side in the plane direction. In this embodiment, the end face 5 is composed of planes substantially orthogonal to the first and second main surfaces 3 and 4.

The surface roughness Ra of each of the first and second chamfered portions 6 and 7 is larger than the surface roughness Ra of each of the first and second main surfaces 3 and 4. Further, the surface roughness Ra of the end face 5 is smaller than the surface roughness Ra of each of the first and second chamfered portions 6 and 7.

In this embodiment, the first main surface 3, the second main surface 4 and the end surface 5 are mirror surfaces, and the first chamfered portion 6 and the second chamfered portion 7 are non-mirror surfaces that are coarser than the mirror surface. Either one of the first and second chamfered portions 6 and 7 may have the same surface roughness (mirror surface) as the end surface 5.

Further, in this embodiment, the first and second chamfered portions 6 and 7, which are non-mirror surfaces, are composed of etched surfaces that have been etched.

The surface roughness Ra of the end face 5 is preferably 0.003 to 0.03 μm, more preferably 0.01 to 0.02 μm. The surface roughness Ra of each of the first and second chamfered portions 6 and 7 is preferably 0.01 to 0.20 μm, and more preferably more than 0.03 μm to 0.15 μm. Further, the surface roughness Ra of each of the first and second main surfaces 3 and 4 is preferably 0.2 to 1.5 nm, and more preferably 0.6 to 1.1 nm.

Therefore, in the flat glass 1, (the surface roughness Ra of the first and second main surfaces 3 and 4 respectively) <(the surface roughness Ra of the end face 5) <(the first and second chamfered portions 6 and 7 It is preferable that the relationship of each surface roughness Ra) is established.

The surface roughness Ra of the notch 2 is smaller than the surface roughness Ra of the first and second chamfered portions 6 and 7. The surface roughness Ra of the notch 2 may be larger than the surface roughness Ra of the end face 5.

The notch 2 may be a mirror surface. In this case, the surface roughness Ra of the notch 2 is preferably 0.003 to 0.03 μm, more preferably 0.01 to 0.02 μm.

The notch 2 may be non-mirror surface. In this case, the surface roughness Ra of the notch 2 is preferably 0.01 to 0.20 μm, more preferably more than 0.03 μm to 0.15 μm.

The diameter D of the flat glass 1 is, for example, 100 mm to 500 mm. The plate thickness T of the plate glass 1 is, for example, 0.5 mm to 1.5 mm. The diameter D and the plate thickness T of the plate glass 1 are not limited to this.

The average coefficient of thermal expansion of the plate glass 1 in the temperature range of 30 ° C. to 380 ° C. is preferably increased when the proportion of semiconductor chips is small and the proportion of encapsulant is large in the semiconductor wafer supported by the plate glass 1. .. On the contrary, the average coefficient of thermal expansion of the plate glass 1 in the temperature range of 30 ° C. to 380 ° C. is preferably lowered when the proportion of the semiconductor chip is large and the proportion of the encapsulant is small in the semiconductor wafer.

When it is desired to regulate the average coefficient of thermal expansion of the plate glass 1 in the temperature range of 30 ° C to 380 ° C to 0 × 10 ^-7 / ° C or more and less than 50 × 10 ^-7 / ° C, the plate glass 1 has a glass composition of% by mass. SiO ₂ : 55-75%, Al ₂ O ₃ : 15-30%, Li ₂ O: 0.1-6%, Na ₂ O + K ₂ O (total amount of Na ₂ O and K ₂ O): 0-8 %, MgO + CaO + SrO + BaO (total amount of MgO, CaO, SrO and BaO): preferably 0 to 10%, or SiO ₂ : 55 to 75%, Al ₂ O ₃ : 10 to 30%, Li ₂ O + Na. It is also preferable to contain ₂ O + K ₂ O (total amount of Li ₂ O, Na ₂ O and K ₂ O): 0 to 0.3%, and MgO + CaO + SrO + BaO: 5 to 20%.

When it is desired to regulate the average thermal expansion coefficient of the plate glass 1 in the temperature range of 30 ° C to 380 ° C to 50 × 10 ^-7 / ° C or more and less than 70 × 10 ^-7 / ° C, the plate glass 1 has a glass composition of% by mass. , SiO ₂ : 55-75%, Al ₂ O ₃ : 3-15%, B ₂ O ₃ : 5-20%, MgO: 0-5%, CaO: 0-10%, SrO: 0-5%, It preferably contains BaO: 0 to 5%, ZnO: 0 to 5%, Na ₂ O: 5 to 15%, K ₂ O: 0 to 10%, SiO ₂ : 64 to 71%, Al ₂ O ₃ : 5-10%, B ₂ O ₃ : 8-15%, MgO: 0-5%, CaO: 0-6%, SrO: 0-3%, BaO: 0-3%, ZnO: 0-3% , Na ₂ O: 5 to 15%, K ₂ O: 0 to 5%, more preferably.

When it is desired to regulate the average thermal expansion coefficient of the plate glass 1 in the temperature range of 30 ° C. to 380 ° C. to 70 × 10 ^-7 / ° C. or higher and 85 × 10 ^-7 / ° C. or lower, the plate glass 1 has a glass composition of% by mass. , SiO ₂ : 60-75%, Al ₂ O ₃ : 5-15%, B ₂ O ₃ : 5-20%, MgO: 0-5%, CaO: 0-10%, SrO: 0-5%, It preferably contains BaO: 0 to 5%, ZnO: 0 to 5%, Na ₂ O: 7 to 16%, K ₂ O: 0 to 8%, SiO ₂ : 60 to 68%, Al ₂ O ₃ : 5 to 15%, B ₂ O ₃ : 5 to 20%, MgO: 0 to 5%, CaO: 0 to 10%, SrO: 0 to 3%, BaO: 0 to 3%, ZnO: 0 to 3% , Na ₂ O: 8 to 16%, K ₂ O: 0 to 3%, more preferably.

When it is desired to regulate the average coefficient of thermal expansion of the plate glass 1 in the temperature range of 30 ° C. to 380 ° C. to more than 85 × 10 ^-7 / ° C. and 120 × 10 ^-7 / ° C. or less, the plate glass 1 has a glass composition of% by mass. , SiO ₂ : 55-70%, Al ₂ O ₃ : 3-13%, B ₂ O ₃ : 2-8%, MgO: 0-5%, CaO: 0-10%, SrO: 0-5%, It preferably contains BaO: 0 to 5%, ZnO: 0 to 5%, Na ₂ O: 10 to 21%, and K ₂ O: 0 to 5%.

When it is desired to regulate the average coefficient of thermal expansion of the plate glass 1 in the temperature range of 30 ° C. to 380 ° C. to more than 120 × ^10-7 / ° C. and 165 × ^10-7 / ° C. or less, the plate glass 1 has a glass composition of% by mass. , SiO ₂ : 53 to 65%, Al ₂ O ₃ : _{3 to} 13%, B ₂ O ₃ : 0 to 5%, MgO: 0.1 to 6%, CaO: 0 to 10%, SrO: 0 to 5 %, BaO: 0-5%, ZnO: 0-5%, Na ₂ O + K ₂ O: 20-40%, Na ₂ O: 12-21%, K ₂ O: 7-21%. ..

With the above glass composition, it becomes easy to regulate the average coefficient of thermal expansion of the plate glass 1 within a desired range and the devitrification resistance is improved, so that there is an advantage that the plate glass 1 having a small variation in plate thickness can be easily obtained. ..

Here, as shown in FIG. 3, the first chamfered portion 6 and the second chamfered portion 7 of the flat glass 1 may be formed of a curved surface. That is, the flat glass 1 may be R-chamfered. Further, as shown in FIG. 4, the end face 5 of the flat glass 1 may also be formed with a curved surface. That is, the first main surface 3 and the second main surface 4 may be connected by a curved surface composed of the first chamfered portion 6, the end surface 5, and the second chamfered portion 7.

According to the flat glass 1 having the above configuration, since the first and second chamfered portions 6 and 7 are non-mirror surfaces, it becomes easy to accurately recognize the boundary of the end face portion in a plan view by a camera or the like. , The positioning error of the flat glass 1 can be suppressed. If any one of the first and second chamfered portions 6 and 7 is a non-mirror surface, positioning error can be suppressed.

Further, since the end face 5 is a mirror surface, the strength of the end face 5 is increased. The end face 5 is more likely to come into contact with other members than the chamfered portions 6 and 7. Therefore, from the viewpoint of preventing damage due to contact with other members, if the strength of the end face 5 is high, the strength of the entire end face portion is sufficiently secured even if the strength of the chamfered portion 6 is slightly lowered.

(Manufacturing method of disk-shaped flat glass)
Next, a method for manufacturing the flat glass 1 having the above configuration will be described.

The method for manufacturing the flat glass 1 according to the present embodiment includes a chamfering step and a polishing step as main configurations. In this embodiment, the chamfering step is performed before the polishing step.

In the chamfering step, as shown in FIGS. 5A and 5B, the first main surface 3a and the end surface 5a are substantially orthogonal to each other while the disk-shaped base glass 1a is held in a predetermined posture. The chamfered portions 6a and 7a are roughly machined on the portion P1 and the second portion P2 in which the second main surface 4a and the end surface 5a are substantially orthogonal to each other.

Specifically, in this embodiment, the first and second portions P1 and P2 are moved closer to each other while rotating a grinding tool 11 having a grinding surface 12 having a V-shaped cross section capable of simultaneously grinding. As a result, the grinding surface 12 of the grinding tool 11 is pressed against the first and second portions P1 and P2 of the base glass 1a to grind.

When such grinding is completed, as shown in FIG. 5B, the first and second chamfered portions P1 and P2 of the base glass 1a are formed of inclined planes, and the first and second chamfered portions 6a and 7a. Is processed into. This grinding process proceeds in a state where a gap C is provided between the end surface 5a located at the center of the base glass 1a in the plate thickness direction and the bottom of the grinding surface 12 of the grinding tool 11. Therefore, in this embodiment, the end face 5a is unprocessed in the chamfering process. For example, in the case of the end face 5a having a curved surface as shown in FIG. 4, the chamfered portions 6a and 7a and the end face 5a may be processed together in the chamfering step.

Here, as the grinding tool 11 used in the chamfering step, a tool having a tapered grinding surface 13 as shown in FIG. 6A can be used, or a disk as shown in FIG. 6B can be used. It is also possible to use one having a shaped grinding surface 14. When such a grinding tool 11 is used, the first portion P1 and the second portion P2 may be ground individually, or the first two grinding tools 11 may be arranged one above the other. Grinding of the portion P1 and the second portion P2 may be performed at the same time.

In this embodiment, the chamfering step includes an etching process. Although not shown, the etching process includes the end faces 5 and chamfered portions 6a and 7a of the base glass 1a in a state where the first main surface 3a and the second main surface 4a of the base glass 1a are protected by masking or the like. This is done by immersing the end face in an etching solution. The etching process may be performed by applying or spraying an etching solution on the end face portion of the base glass 1a. Further, the etching process may be omitted.

In this embodiment, in the polishing step, the first and second main surfaces 3a and 4a and the end surface 5 of the base glass 1a are mirror-polished (finished) by using the lap polishing device 21 as shown in FIG. To do.

The lap polishing device 21 has a carrier mounting portion 24 having a ring gear 22 and a sun gear 23 that are rotationally driven in the same direction, and an upper surface plate 25 that is rotationally driven in opposite directions with the carrier mounting portion 24 sandwiched from both the upper and lower sides. And a lower surface plate 26.

A plurality of carriers 27, which are arranged between the ring gear 22 and the sun gear 23 and mesh with both gears 22 and 23, are mounted on the carrier mounting portion 24. Each carrier 27 is provided with a plurality of circular holes 28 for holding the base glass 1a. The hole 28 is slightly larger than the flat glass 1a. By rotationally driving the ring gear 22 and the sun gear 23, each carrier 27 revolves around the sun gear 23 while rotating around the central axis x of each carrier 27.

As shown in FIGS. 7 and 8, the upper surface plate 25 and the lower surface plate 26 are provided with polishing pads 25a and 26a on the sides facing the carrier 27, respectively. A slurry containing abrasive grains is supplied between the polishing pad 25a of the upper surface plate 25 and the polishing pad 26a of the lower surface plate 26.

Then, due to the planetary gear movement accompanied by the rotation and revolution of the carrier 27 as described above, both main surfaces 3a and 4a of the plurality of original glass plates 1a held by the carrier 27 are polished pads 25a and 26a of the upper and lower surface plates 25 and 26. Is mirror-polished by.

As shown in FIG. 8, in this embodiment, the polishing pad 28a is also provided on the inner peripheral surface of the hole 28 of the carrier 27. Therefore, the planetary gear movement of the carrier 27 causes the base glass 1a to rotate randomly in the hole 28, so that the end surface 5a of the base glass 1a is also mirror-polished by the polishing pad 28a of the hole 28. As a result, the end surface 5a composed of the etched surface is processed into a mirror surface. In this process, the polishing pad 25a of the upper surface plate 25, the polishing pad 26a of the lower surface plate 26, and the polishing pad 28a of the hole 28 do not come into contact with the chamfered portions 6a and 7a of the base glass 1a. Therefore, the chamfered portions 6a and 7a are maintained on a non-mirror surface (etched surface in this embodiment) without being mirror-polished in the polishing step.

In this embodiment, the method for manufacturing the disk-shaped flat glass 1 further includes a notch forming step before the chamfering step. Although not shown, in the notch forming step, a notch is formed in a part of the peripheral edge of the base glass 1a. The notch is formed at a predetermined position on the peripheral edge of the base glass 1a, for example, by cutting, grinding, or laser machining. Since the notch is recessed inward from the peripheral edge of the base glass 1a, it comes into contact with the polishing pad 25a of the upper surface plate 25, the polishing pad 26a of the lower surface plate 26, and the polishing pad 28a of the hole 28 in the above polishing step. do not do. Therefore, the notch is kept on a non-mirror surface (etched surface in this embodiment) without being mirror-polished in the polishing step.

By processing the original plate glass 1a as described above, the plate glass 1 in which the end surface 5 has a mirror surface and the first and second chamfered portions 6 and 7 have a non-mirror surface rougher than the mirror surface is manufactured.

The present invention is not limited to the configuration of the above-described embodiment, nor is it limited to the above-mentioned effects. The present invention can be modified in various ways without departing from the gist of the present invention.

In the above embodiment, the case where the disk-shaped flat glass has a notch as the notch portion has been described, but the notch portion may be a linear one called an orientation flat.

In the above embodiment, in the method for manufacturing a disk-shaped plate glass, a case where the first and second main surfaces and end faces of the original plate glass are simultaneously mirror-polished in the polishing step is described, but the present invention is not limited thereto. .. For example, in the polishing step, only the end surface of the original glass may be mirror-polished. In this case, for example, the end face may be mirror-polished by pressing the tape against only the end face of the base glass while reciprocating the tape. Here, the tape has a polished surface on at least one surface, and preferably has flexibility to the extent that it can be deformed following the surface of the polished portion when pressed against the polished portion. As the polished surface of the tape, abrasive grains of a known material such as alumina, silicon carbide, or diamond may be fixed to the substrate of the tape (resin film such as PE). The particle size is set to, for example, 300 or more and 10000 or less, and preferably 500 or more and 3000 or less. Further, for example, the end face may be mirror-polished by pressing the rotary grindstone only against the end face of the base glass.

In the above embodiment, in the method for manufacturing a disk-shaped flat glass, the case where the notch is not mirror-polished in the polishing process and the notch is left as a non-mirror surface has been described. However, even if the notch is mirror-polished in the polishing process. Good. In this case, it is preferable to perform the above tape polishing on the notch.

In the above embodiment, in the method for manufacturing a disk-shaped flat glass, the case where the chamfering step is performed before the polishing step has been described, but the chamfering step may be performed after the polishing step. In this case, for example, after mirror polishing (finishing) the entire end face portion of the original plate glass having no chamfered portion, the chamfered portion is roughened by machining such as grinding on the portion excluding the end face located in the central portion in the plate thickness direction. It may be processed. Further, for example, after mirror-polishing the entire end face portion of the base glass having the chamfered portion in advance, only the portion corresponding to the chamfered portion may be roughened to roughen the chamfered portion.

The present application includes the following inventions.

The plate glass according to the present invention has the first and second main surfaces facing each other in the plate thickness direction, the end face, the first chamfered portion connecting the first main surface and the end face, and the second main surface and the end face. A disk-shaped flat glass having a second chamfered portion to be connected, in which the surface roughness Ra of the first chamfered portion is larger than the surface roughness Ra of each of the first and second main surfaces, and the end face is The surface roughness Ra of the first chamfered portion is smaller than the surface roughness Ra of the first chamfered portion.

According to such a configuration, the surface roughness of the first chamfered portion and the surface roughness of the end face are different. The first chamfered portion has a rough surface as compared with the first and second main surfaces, and the end surface has a smooth surface as compared with the first chamfered portion. The first chamfered portion and the second chamfered portion are easily observed as a region having a relatively large area when the boundary of the end face portion of the flat glass is automatically recognized by a camera or the like in a plan view. Therefore, if the first chamfered portion has a relatively rough surface as described above, it becomes easy to accurately recognize the boundary of the end face portion, and the positioning error of the flat glass can be suppressed. On the other hand, since the end face projects outward from the chamfered portion, other members are more likely to come into contact with the chamfered portion. Therefore, if the end face becomes a relatively smooth surface and has high strength as described above, the strength of the entire end face portion including the end face and the chamfered portion is sufficient from the viewpoint of preventing damage due to contact with other members. It becomes a thing.

In the above configuration, the surface roughness Ra of the second chamfered portion is larger than the surface roughness Ra of the second main surface, and the surface roughness Ra of the end face is larger than the surface roughness Ra of the second chamfered portion. Is also preferably small. In this way, the second chamfered portion also becomes a rough surface as compared with the first and second main surfaces, and the boundary of the end face portion becomes easier to recognize.

In the above configuration, the relationship of surface roughness Ra of each of the first and second main surfaces <surface roughness Ra of the end face <surface roughness Ra of each of the first and second chamfered portions can be established. preferable. In this way, the surface roughness of each surface is optimized. Further, since the surface roughness of the end face can be made rougher than the surface roughness of the main surface, the time required for processing can be shortened.

In the above configuration, the surface roughness Ra of the end face is preferably 0.003 to 0.03 μm. Further, in the above configuration, it is preferable that the surface roughness Ra of each of the first and second chamfered portions is 0.01 to 0.20 μm. Further, in the above configuration, the surface roughness Ra of each of the first and second main surfaces is preferably 0.2 to 1.5 nm.

In the above configuration, it is preferable to have a notch in a part of the peripheral edge. In this way, the orientation of the flat glass can be adjusted with reference to the notch. Therefore, for example, if the orientation of the crystal orientation of the semiconductor wafer supported by the plate glass is made to correspond to the position of the notch portion of the plate glass, the orientation of the crystal orientation of the semiconductor wafer can be recognized with reference to the notch portion of the plate glass. Can be done. Here, in order to align the crystal orientation of the semiconductor wafer with a predetermined orientation, when the semiconductor wafer is also provided with a notch, the positions of the notch of the semiconductor wafer and the notch of the flat glass are matched. It is preferable to keep it.

In the above configuration, the surface roughness Ra of the notch portion may be smaller than the surface roughness Ra of the first chamfered portion. By doing so, the surface becomes smoother than that of the first chamfered portion, so that the strength of the notched portion is increased. Therefore, when adjusting the orientation of the plate glass with reference to the notch portion, it is possible to prevent the plate glass from being damaged starting from the notch portion.

In the above configuration, the surface roughness Ra of the notch portion may be larger than the surface roughness Ra of the end surface. In this way, the cutout portion has a rough surface as compared with the end surface, so that it is easy to recognize the orientation of the flat glass in a plan view using a camera or the like.

In this case, the surface roughness Ra of the notched portion is preferably 0.01 to 0.20 μm.

The flat glass according to the present invention, which was devised to solve the above problems, has a first chamfer that connects the first and second main surfaces, end faces, and the first main surface and end faces that face each other in the plate thickness direction. A disk-shaped flat glass having a portion and a second chamfered portion connecting the second main surface and the end face, the end face is a mirror surface, and at least one of the first chamfered portion and the second chamfered portion is It is characterized by having a non-mirror surface that is coarser than a mirror surface.

According to such a configuration, since at least one of the first and second chamfered portions is a non-mirror surface, it becomes easy to accurately recognize the boundary of the end face portion, and it is possible to prevent a positioning error of the flat glass. .. On the other hand, the end face, which is more likely to come into contact with other members than the chamfered portion, is a mirror surface and therefore has high strength. Therefore, from the viewpoint of preventing damage due to contact with other members, the strength of the entire end face portion including the end face and the chamfered portion is sufficiently ensured.

In the above configuration, the surface roughness Ra of the end face is preferably 0.003 to 0.03 μm.

The method for manufacturing a plate glass according to the present invention includes a chamfering step of roughly forming a chamfered portion at a portion connecting at least one of a pair of main surfaces facing each other in the plate thickness direction of a disk-shaped original plate glass and an end surface, and mirror polishing the end surface. It is characterized by having a polishing process for performing.

According to such a configuration, it is possible to manufacture a flat glass having an end surface made of a mirror surface and a chamfered portion made of a non-mirror surface coarser than the mirror surface. Therefore, it is possible to enjoy the same effects as the corresponding configurations already described.

In the above configuration, it is preferable that the chamfering step is performed before the polishing step, and the end face excluding the chamfered portion is mirror-polished in the polishing step. By doing so, it is easy to maintain the surface texture of the mirror-polished portion as it is.

In this case, it is preferable to mirror-polish the pair of main surfaces together with the end faces in the polishing step. In this way, the end face and the main surface are mirror-polished together, so that the flat glass can be efficiently manufactured.

In the above configuration, it is preferable to etch the chamfered portion in the chamfering step. In this way, the surface of the chamfered portion becomes a unique surface property due to the etching process. Due to this, when the chamfered portion is composed of an etched surface, it becomes easier to recognize the boundary of the end face portion in a plan view as compared with the case where the chamfered portion is composed of a machined surface such as grinding. In other words, if the chamfered portion is composed of an etched surface, it is possible to recognize the boundary of the end face portion in a plan view even if the surface roughness Ra is relatively small.

In the above configuration, it is preferable to include a notch forming step of forming a notch in a part of the peripheral edge of the flat glass.

1 Disc-shaped plate glass 1a Disc-shaped base glass 2 Notch 3 First main surface 4 Second main surface 5 End surface 6 First chamfered part 7 Second chamfered part 11 Grinding tool 12 Grinding surface 21 Lap polishing device 22 Ring gear 23 Sun gear 24 Carrier mounting part 25 Upper surface plate 25a Polishing pad 26 Lower surface plate 26a Polishing pad 27 Carrier 28 Hole 28a Polishing pad

Claims (8)

A disk-shaped plate glass having first and second main surfaces facing each other in the plate thickness direction and a notch provided in a part of the peripheral edge portion.
In the portion of the peripheral edge portion other than the notch portion, the end face, the first chamfered portion connecting the first main surface and the end face, and the second chamfering portion connecting the second main surface and the end face are connected. Equipped with a chamfer
The surface roughness Ra of the first chamfered portion is larger than the surface roughness Ra of each of the first and second main surfaces.
The surface roughness Ra of the end face is smaller than the surface roughness Ra of the first chamfered portion.
A disk-shaped plate glass characterized in that the surface roughness Ra of the notch portion is smaller than the surface roughness Ra of the first chamfered portion. The surface roughness Ra of the second chamfered portion is larger than the surface roughness Ra of each of the first and second main surfaces.
The surface roughness Ra of the end face is smaller than the surface roughness Ra of the second chamfered portion.
The disk-shaped flat glass according to claim 1, wherein the surface roughness Ra of the notch portion is smaller than the surface roughness Ra of the second chamfered portion. The disk-shaped flat glass according to claim 1 or 2, wherein the surface roughness Ra of the end face is 0.003 to 0.03 μm. The disk-shaped flat glass according to any one of claims 1 to 3, wherein the surface roughness Ra of each of the first and second chamfered portions is 0.01 to 0.20 μm. The disk-shaped flat glass according to any one of claims 1 to 4, wherein the surface roughness Ra of each of the first and second main surfaces is 0.2 to 1.5 nm. The disk-shaped flat glass according to any one of claims 1 to 5, wherein the surface roughness Ra of the cutout portion is larger than the surface roughness Ra of the end surface. The disk-shaped flat glass according to any one of claims 1 to 6, wherein the surface roughness Ra of the cutout portion is 0.003 to 0.03 μm. The disk-shaped plate glass according to any one of claims 1 to 7, wherein the notch is a concave notch recessed inside the peripheral edge.

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