JP2021000683A - Truing method and truing apparatus - Google Patents
Truing method and truing apparatus Download PDFInfo
- Publication number
- JP2021000683A JP2021000683A JP2019114929A JP2019114929A JP2021000683A JP 2021000683 A JP2021000683 A JP 2021000683A JP 2019114929 A JP2019114929 A JP 2019114929A JP 2019114929 A JP2019114929 A JP 2019114929A JP 2021000683 A JP2021000683 A JP 2021000683A
- Authority
- JP
- Japan
- Prior art keywords
- abrasive grains
- cutting edge
- grindstone
- tip
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 31
- 239000006061 abrasive grain Substances 0.000 claims abstract description 119
- 239000010432 diamond Substances 0.000 claims abstract description 81
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 81
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 72
- 239000010453 quartz Substances 0.000 claims abstract description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 34
- 238000004070 electrodeposition Methods 0.000 claims abstract description 22
- 238000012545 processing Methods 0.000 claims description 50
- 229910044991 metal oxide Inorganic materials 0.000 claims description 9
- 150000004706 metal oxides Chemical class 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 15
- 238000005530 etching Methods 0.000 description 14
- 238000003754 machining Methods 0.000 description 13
- 230000003746 surface roughness Effects 0.000 description 10
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 238000003746 solid phase reaction Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- -1 SiO 2 Chemical class 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
本発明はツルーイング方法及びツルーイング装置に関する。詳しくは、ダイヤモンド砥粒またはＣＢＮ砥粒を有する電着砥石を、短時間かつ高精度にツルーイングすることが可能なツルーイング方法及びツルーイング装置に係るものである。 The present invention relates to a truing method and a truing device. More specifically, the present invention relates to a truing method and a truing device capable of truing an electrodeposited grindstone having diamond abrasive grains or CBN abrasive grains in a short time and with high accuracy.
金属ベースの表面に、ダイヤモンド砥粒やＣＢＮ砥粒をめっきにて固着した電着砥石は、複雑または微小な形状の砥石を作ることができ、切削特性及び耐摩耗性に優れ、比較的安価であることから、種々の加工に用いられている。 An electrodeposition grindstone in which diamond abrasive grains or CBN abrasive grains are plated on the surface of a metal base can make a grindstone with a complicated or minute shape, has excellent cutting characteristics and wear resistance, and is relatively inexpensive. Because of this, it is used in various processes.
この電着砥石は、金属ベースに固着された多数の砥粒のうち、金属ベース表面からの切れ刃先端位置が高い砥粒から、その先端が被加工物に接触して、被加工物の表面を研削する。 In this electrodeposition grindstone, among a large number of abrasive grains fixed to the metal base, the abrasive grains having a high cutting edge tip position from the surface of the metal base come into contact with the workpiece, and the tip of the abrasive grains comes into contact with the workpiece, and the surface of the workpiece Grind.
ここで、電着砥石の砥粒は、めっきにより固着するため、金属ベース表面からの砥粒の突き出し高さのバラツキが大きかった。そのため、切れ刃先端位置が高い砥粒にかかる負担が大きく、砥粒の脱落が生じやすかった。また、研削に関わる砥粒が限定されるため、被加工物の表面の加工精度が低い問題があった。 Here, since the abrasive grains of the electrodeposited grindstone are fixed by plating, there is a large variation in the protrusion height of the abrasive grains from the surface of the metal base. Therefore, the load on the abrasive grains having a high cutting edge tip position is large, and the abrasive grains are likely to fall off. Further, since the abrasive grains involved in grinding are limited, there is a problem that the processing accuracy of the surface of the workpiece is low.
特に、光学ガラスやセラミックス等の硬脆材料の延性モード研削を実現するためには、砥石の表面における砥粒の切れ刃先端位置を精密に揃えることが求められている。この電着砥石の砥粒の切れ刃先端位置を揃える作業は、切れ刃トランケーション、マイクロツルーイング（精密ツルーイング）と呼ばれている。 In particular, in order to realize ductile mode grinding of hard and brittle materials such as optical glass and ceramics, it is required to precisely align the cutting edge positions of the abrasive grains on the surface of the grindstone. The work of aligning the cutting edge tip positions of the abrasive grains of the electrodeposition grindstone is called cutting edge truncation or micro-truing (precision tsuruing).
この砥粒の切れ刃先端位置を揃えるツルーイングを行うことで、被加工物の研削に関与する砥粒切れ刃数が増え、被加工物の表面の加工精度が向上すると共に、ひとつの砥粒にかかる負荷が分散され、砥石の長寿命化が期待できる。 By performing truing to align the tip positions of the cutting edges of the abrasive grains, the number of abrasive grain cutting edges involved in grinding the workpiece increases, the processing accuracy of the surface of the workpiece is improved, and one abrasive grain is used. Such a load is dispersed, and the life of the grindstone can be expected to be extended.
しかしながら、高硬度材であるダイヤモンド砥粒やＣＢＮ砥粒に対して、一般的な機械的ツルーイング法で、砥粒の切れ刃先端位置を揃えることは困難であった。 However, with respect to diamond abrasive grains and CBN abrasive grains, which are high-hardness materials, it has been difficult to align the cutting edge tip positions of the abrasive grains by a general mechanical truing method.
こうしたなか、ダイヤモンド砥粒やＣＢＮ砥粒を有する電着砥石に対して、複数の砥粒で、その切れ刃先端位置を揃えることを試みたツルーイング方法が存在する。 Under these circumstances, there is a truing method in which an attempt is made to align the cutting edge tip positions of a plurality of abrasive grains with respect to an electrodeposited grindstone having diamond abrasive grains or CBN abrasive grains.
例えば、ダイヤモンド表面に、導電性皮膜処理を施し、工具電極との間に放電を発生させることで、導電性皮膜と共に、ダイヤモンドを除去するツルーイング方法が提案されている（例えば、非特許文献１参照）。 For example, a trueing method has been proposed in which a diamond surface is treated with a conductive film and a discharge is generated between the diamond surface and the tool electrode to remove the diamond together with the conductive film (see, for example, Non-Patent Document 1). ).
しかしながら、非特許文献１に記載のツルーイング方法では、砥粒の切れ刃先端位置のバラツキが減少するものの、切れ刃先端位置を精密に揃えるという点で不充分であり、改善の余地があった。 However, although the truing method described in Non-Patent Document 1 reduces the variation in the cutting edge tip positions of the abrasive grains, it is insufficient in that the cutting edge tip positions are precisely aligned, and there is room for improvement.
また、電着砥石に対するツルーイングには、より簡易な装置構成で、かつ、短時間でツルーイングが行えることが望まれている。 Further, for the truing of the electrodeposited grindstone, it is desired that the truing can be performed in a shorter time with a simpler device configuration.
本発明は以上の点に鑑みて創案されたものであって、ダイヤモンド砥粒、または、ＣＢＮ砥粒を有する電着砥石を、短時間かつ高精度にツルーイングすることが可能なツルーイング方法及びツルーイング装置を提供することを目的とするものである。 The present invention has been devised in view of the above points, and is a truing method and a truing device capable of truing diamond abrasive grains or electrodeposited grindstones having CBN abrasive grains in a short time and with high accuracy. The purpose is to provide.
［加工方法について］
上記の目的を達成するために、本発明のツルーイング方法は、ダイヤモンドまたはＣＢＮで構成された多数の砥粒を有する電着砥石に対して、前記電着砥石表面から突出した複数の前記砥粒の切れ刃高さを均一化するツルーイング方法であって、金属酸化物で構成された加工部材を前記砥粒の切れ刃先端と接触させ、接触部位に窒素ガスを供給すると共に、前記加工部材を前記砥粒の切れ刃先端に接触させた状態で変位させる工程を備える。
[About processing method]
In order to achieve the above object, the truing method of the present invention relates to an electrodeposited grindstone having a large number of abrasive grains composed of diamond or CBN, and a plurality of the abrasive grains protruding from the surface of the electrodeposited grindstone. This is a trueing method for making the cutting edge height uniform. A processed member made of a metal oxide is brought into contact with the tip of the cutting edge of the abrasive grains to supply nitrogen gas to the contact portion, and the processed member is brought into contact with the processing member. It is provided with a step of displacementing the abrasive grains in contact with the tip of the cutting edge.
なお、ここでいう、電着砥石表面とは、平面的な表面だけでなく、略円柱状に形成された電着砥石の側面である円周に沿った面も含んでいるものを意味する。 The surface of the electrodeposited grindstone referred to here means not only a flat surface but also a surface along the circumference which is a side surface of the electrodeposited grindstone formed in a substantially columnar shape.
ここで、金属酸化物で構成された加工部材を砥粒の切れ刃先端と接触させ、加工部材を砥粒の切れ刃先端に接触させた状態で変位させることによって、加工部材と砥粒の切れ刃先端との間に電荷移動（摩擦帯電）が起こり、接触部位に引き込まれた空気中で放電が生じる。この放電により、空気中の窒素が励起され、励起窒素がダイヤモンドまたはＣＢＮのエッチング種として作用し、エッチングにより砥粒の切れ刃先端位置におけるダイヤモンドまたはＣＢＮを除去することができる。また、エッチングによる加工により、砥粒の切れ刃先端の位置を、均一かつ精度高く揃えることが可能となる。 Here, the machined member made of metal oxide is brought into contact with the tip of the cutting edge of the abrasive grains, and the machined member is displaced while being in contact with the tip of the cutting edge of the abrasive grains to cut the machined member and the abrasive grains. Charge transfer (triboelectric charging) occurs between the blade and the tip of the blade, and discharge occurs in the air drawn into the contact area. By this discharge, nitrogen in the air is excited, and the excited nitrogen acts as an etching species of diamond or CBN, and the diamond or CBN at the tip position of the cutting edge of the abrasive grains can be removed by etching. Further, by processing by etching, it is possible to align the positions of the cutting edge tips of the abrasive grains uniformly and with high accuracy.
また、金属酸化物で構成された加工部材を砥粒の切れ刃先端と接触させ、接触部位に窒素ガスを供給することによって、接触部位を窒素ガス環境下におくことができる。即ち、加工部材と砥粒の切れ刃先端との接触部位に、窒素ガスが供給され、エッチング種となる励起窒素が生成しやすくなる。この結果、砥粒の切れ刃先端位置における励起窒素によるエッチングでの、ダイヤモンドまたはＣＢＮの除去効率を高めることができ、短時間での砥粒のツルーイングが可能となる。さらに、励起窒素で切れ刃先端位置が高精度に揃えられた電着砥石によれば、この電着砥石で研削加工した被加工物の加工面に対して、表面粗さの精度に優れた研削加工を施すことが可能となる。 Further, the contact portion can be kept in a nitrogen gas environment by bringing a processed member made of a metal oxide into contact with the tip of the cutting edge of the abrasive grains and supplying nitrogen gas to the contact portion. That is, nitrogen gas is supplied to the contact portion between the processed member and the tip of the cutting edge of the abrasive grains, and excited nitrogen as an etching species is easily generated. As a result, the efficiency of removing diamond or CBN by etching with excited nitrogen at the tip position of the cutting edge of the abrasive grains can be improved, and the abrasive grains can be trued in a short time. Furthermore, according to an electrodeposition grindstone whose cutting edge tip positions are aligned with high precision with excited nitrogen, grinding with excellent surface roughness accuracy is performed on the machined surface of the workpiece ground with this electrodeposition grindstone. It becomes possible to perform processing.
本発明では、加工部材と砥粒の切れ刃先端の接触部位、即ち、ダイヤモンド砥粒またはＣＢＮ砥粒の切れ刃の先端位置で、接触部位で生成する化学反応性の高い励起窒素を利用して、ダイヤモンドまたはＣＢＮのエッチングを行い、電着砥石の表面から突出した複数の砥粒の切れ刃先端位置を揃えるツルーイングを、高精度かつ効率よく行うものである。 In the present invention, the highly chemically reactive excited nitrogen generated at the contact portion between the machined member and the cutting edge of the abrasive grain, that is, the tip position of the cutting edge of the diamond abrasive grain or the CBN abrasive grain, is used. , Diamond or CBN is etched to align the cutting edge tip positions of a plurality of abrasive grains protruding from the surface of the electrodeposited grindstone with high accuracy and efficiency.
また、加工部材を加熱する場合には、砥粒の切れ刃先端位置において、加工部材と、ダイヤモンドまたはＣＢＮとの間の固相反応が促進され、より精度高く、かつ、より均一に、複数の砥粒の切れ刃先端位置を揃えることが可能となる。また、窒素ガスの供給と、加工部材の過熱を組み合わせたツルーイングによれば、ツルーイング後の電着砥石で研削加工した被加工物の加工面に対して、より一層、表面粗さの精度に優れた研削加工を施すことが可能となる。 Further, when the processed member is heated, a solid-phase reaction between the processed member and diamond or CBN is promoted at the position of the cutting edge tip of the abrasive grains, so that a plurality of processed members are more accurately and more uniformly. It is possible to align the tip positions of the cutting edges of the abrasive grains. In addition, according to the trueing that combines the supply of nitrogen gas and the overheating of the processed member, the surface roughness accuracy of the processed surface of the workpiece ground by the electrodeposition grindstone after the true is even more excellent. It is possible to perform grinding.
なお、「加工部材」としては、例えば、ＳｉＯ２、ＺｒＯ２、Ａｌ２Ｏ３、ＴｉＯ２ 、Ｆｅ２ Ｏ３ 、ＭｇＯ、ＣａＯ，Ｎａ２Ｏ、Ｋ２Ｏ、ＣｅＯ２等の金属酸化物、及びそれらからなる構成材料で構成された加工部材が挙げられる。特に、耐摩耗性、耐熱性、化学的安定性に優れる合成石英、サファイアが好ましい。 The "processed member" includes, for example, metal oxides such as SiO 2 , ZrO 2 , Al 2 O 3 , TiO 2 , Fe 2 O 3 , MgO, CaO, Na 2 O, K 2 O, and CeO 2 . And a processed member made of a constituent material made of them. In particular, synthetic quartz and sapphire, which are excellent in wear resistance, heat resistance, and chemical stability, are preferable.
また、砥粒がダイヤモンドで構成され、加工部材が、合成石英である場合には、ダイヤモンドに対して、より精度高く、かつ、より均一に、複数の砥粒の切れ刃先端位置を揃えることが可能となる。 Further, when the abrasive grains are made of diamond and the processed member is synthetic quartz, it is possible to align the cutting edge tips of a plurality of abrasive grains with higher accuracy and more uniformly with respect to diamond. It will be possible.
［加工装置について］
また、上記の目的を達成するために、本発明に係る加工装置は、ダイヤモンドまたはＣＢＮで構成された多数の砥粒を有する電着砥石に対して、前記電着砥石表面から突出した複数の前記砥粒の切れ刃高さを均一化するツルーイング装置であって、金属酸化物で構成された加工部材と、前記砥粒の切れ刃先端を前記加工部材と接触させて前記電着砥石を保持する保持機構と、前記加工部材及び前記砥粒の切れ刃先端との接触部位に窒素ガスを供給する窒素ガス供給部と、前記加工部材と前記砥粒の切れ刃先端とを接触させた状態で、同加工部材と前記電着砥石を相互に摺動させる摺動手段とを備える。
[About processing equipment]
Further, in order to achieve the above object, the processing apparatus according to the present invention has a plurality of the electrodeposition grindstones protruding from the surface of the electrodeposition grindstone with respect to the electrodeposition grindstone having a large number of abrasive grains composed of diamond or CBN. A trueing device for equalizing the cutting edge height of abrasive grains, in which a processing member made of a metal oxide and the tip of the cutting edge of the abrasive grains are brought into contact with the processing member to hold the electrodeposited grindstone. In a state where the holding mechanism, the nitrogen gas supply unit that supplies nitrogen gas to the contact portion between the processing member and the cutting edge tip of the abrasive grain, and the processing member and the cutting edge tip of the abrasive grain are in contact with each other. The machined member and a sliding means for sliding the electrodeposited grindstone with each other are provided.
ここで、砥粒の切れ刃先端を加工部材と接触させて電着砥石を保持する保持機構と、金属酸化物で構成された加工部材と、加工部材と砥粒の切れ刃先端とを接触させた状態で、加工部材と電着砥石を相互に摺動させる摺動手段によって、加工部材と砥粒の切れ刃先端との間に電荷移動（摩擦帯電）が起こり、接触部位に引き込まれた空気中で放電が生じる。この放電により、空気中の窒素が励起され、励起窒素がダイヤモンドまたはＣＢＮのエッチング種として作用し、エッチングにより砥粒の切れ刃先端位置におけるダイヤモンドまたはＣＢＮを除去することができる。また、エッチングによる加工により、砥粒の切れ刃先端の位置を、均一かつ精度高く揃えることが可能となる。 Here, a holding mechanism that holds the electrodeposited grindstone by contacting the cutting edge tip of the abrasive grains with the machining member, a machining member composed of a metal oxide, and the machining member and the cutting edge tip of the abrasive grains are brought into contact with each other. In this state, the sliding means that slides the machining member and the electrodeposited grindstone to each other causes charge transfer (triboelectric charging) between the machining member and the tip of the cutting edge of the abrasive grains, and the air drawn into the contact portion. A discharge occurs inside. By this discharge, nitrogen in the air is excited, and the excited nitrogen acts as an etching species of diamond or CBN, and the diamond or CBN at the tip position of the cutting edge of the abrasive grains can be removed by etching. Further, by processing by etching, it is possible to align the positions of the cutting edge tips of the abrasive grains uniformly and with high accuracy.
また、加工部材及び砥粒の切れ刃先端との接触部位に窒素ガスを供給する窒素ガス供給部によって、接触部位を窒素ガス環境下におくことができる。即ち、加工部材と砥粒の切れ刃先端との接触部位に、窒素ガスが供給され、エッチング種となる励起窒素が生成しやすくなる。この結果、砥粒の切れ刃先端位置における励起窒素によるエッチングでの、ダイヤモンドまたはＣＢＮの除去効率を高めることができる。これにより、短時間での砥粒のツルーイングが可能となる。さらに、励起窒素で切れ刃先端位置が高精度に揃えられた電着砥石によれば、この電着砥石で研削加工した被加工物の加工面に対して、表面粗さの精度に優れた研削加工を施すことが可能となる。 Further, the contact portion can be placed in a nitrogen gas environment by the nitrogen gas supply unit that supplies nitrogen gas to the contact portion between the processed member and the tip of the cutting edge of the abrasive grains. That is, nitrogen gas is supplied to the contact portion between the processed member and the tip of the cutting edge of the abrasive grains, and excited nitrogen as an etching species is easily generated. As a result, the efficiency of removing diamond or CBN by etching with excited nitrogen at the tip position of the cutting edge of the abrasive grains can be improved. This makes it possible to truing the abrasive grains in a short time. Furthermore, according to an electrodeposition grindstone whose cutting edge tip positions are aligned with high precision with excited nitrogen, grinding with excellent surface roughness accuracy is performed on the machined surface of the workpiece ground with this electrodeposition grindstone. It becomes possible to perform processing.
本発明では、加工部材と砥粒の切れ刃先端の接触部位、即ち、ダイヤモンド砥粒またはＣＢＮ砥粒の切れ刃の先端位置で、接触部位で生成する化学反応性の高い励起窒素を利用して、ダイヤモンドまたはＣＢＮのエッチングを行い、電着砥石の表面から突出した複数の砥粒の切れ刃先端位置を揃えるツルーイングを、高精度かつ効率よく行うものである。 In the present invention, the highly chemically reactive excited nitrogen generated at the contact portion between the machined member and the cutting edge of the abrasive grain, that is, the tip position of the cutting edge of the diamond abrasive grain or the CBN abrasive grain, is used. , Diamond or CBN is etched to align the cutting edge tip positions of a plurality of abrasive grains protruding from the surface of the electrodeposited grindstone with high accuracy and efficiency.
また、加工部材を加熱する加熱部を備える場合には、砥粒の切れ刃先端位置において、加工部材と、ダイヤモンドまたはＣＢＮとの間の固相反応が促進され、より精度高く、かつ、より均一に、複数の砥粒の切れ刃先端位置を揃えることが可能となる。また、窒素ガスの供給と、加工部材の過熱を組み合わせたツルーイングによれば、ツルーイング後の電着砥石で研削加工した被加工物の加工面に対して、より一層、表面粗さの精度に優れた研削加工を施すことが可能となる。 Further, when a heating portion for heating the processed member is provided, a solid phase reaction between the processed member and diamond or CBN is promoted at the cutting edge tip position of the abrasive grains, and the solid phase reaction is promoted to be more accurate and more uniform. In addition, it is possible to align the cutting edge tip positions of a plurality of abrasive grains. In addition, according to the trueing that combines the supply of nitrogen gas and the overheating of the processed member, the surface roughness accuracy of the processed surface of the workpiece ground by the electrodeposition grindstone after the true is even more excellent. It is possible to perform grinding.
なお、「加工部材」としては、例えば、ＳｉＯ２、ＺｒＯ２、Ａｌ２Ｏ３、ＴｉＯ２、Ｆｅ２Ｏ３、ＭｇＯ、ＣａＯ，Ｎａ２Ｏ、Ｋ２Ｏ、ＣｅＯ２等の金属酸化物、及びそれらからなる構成材料で構成された加工部材が挙げられる。特に、耐摩耗性、耐熱性、化学的安定性に優れる合成石英、サファイアが好ましい。 The "processed member" includes, for example, metal oxides such as SiO 2 , ZrO 2 , Al 2 O 3 , TiO 2 , Fe 2 O 3 , MgO, CaO, Na 2 O, K 2 O, and CeO 2 . And a processed member made of a constituent material made of them. In particular, synthetic quartz and sapphire, which are excellent in wear resistance, heat resistance, and chemical stability, are preferable.
また、砥粒がダイヤモンドで構成され、加工部材が、合成石英である場合には、ダイヤモンドに対して、より精度高く、かつ、より均一に、複数の砥粒の切れ刃先端位置を揃えることが可能となる。 Further, when the abrasive grains are made of diamond and the processed member is synthetic quartz, it is possible to align the cutting edge tips of a plurality of abrasive grains with higher accuracy and more uniformly with respect to diamond. It will be possible.
前記摺動手段が、加工部材と砥粒の切れ刃先端を接触させた状態で、加工部材を回転駆動する加工部材駆動部と、加工部材に向けて電着砥石を付勢する付勢部と、加工部材と砥粒の切れ刃先端を接触させた状態で、電着砥石を揺動、かつ、回転駆動する電着砥石駆動部とを有する場合には、加工部材に砥粒の切れ刃先端を当接させた状態を維持しながら、接触部位に、電荷移動（摩擦帯電）による放電を生じさせることができる。即ち、励起窒素を効率良く生成でき、砥粒のダイヤモンドまたはＣＢＮの除去の効率を高めることができる。 A machining member driving unit that rotationally drives the machining member and an urging portion that urges the electrodeposited grindstone toward the machining member with the sliding means in contact with the machining member and the tip of the cutting edge of the abrasive grains. If the machining member has an electrodeposited grindstone drive unit that swings and rotates the electrodeposited grindstone in a state where the machining member and the cutting edge tip of the abrasive grain are in contact with each other, the machining member has the cutting edge tip of the abrasive grain. It is possible to generate a discharge due to charge transfer (triboelectric charging) at the contact portion while maintaining the state of being in contact with the grindstone. That is, excited nitrogen can be efficiently generated, and the efficiency of removing diamond or CBN of abrasive grains can be increased.
本発明を適用したツルーイング方法及びツルーイング装置では、ダイヤモンド砥粒、または、ＣＢＮ砥粒を有する電着砥石を、短時間かつ高精度にツルーイングすることが可能なものとなっている。 In the truing method and the truing device to which the present invention is applied, a diamond abrasive grain or an electrodeposited grindstone having a CBN abrasive grain can be trued in a short time and with high accuracy.
以下、本発明を実施するための形態（以下、「発明の実施の形態」と称する）について説明する。
図１は本発明を適用したツルーイング装置を説明するための模式図であり、装置を平面視した状態の図である。図１で示すツルーイング装置１は、合成石英定盤２と、電着ダイヤモンド砥石３を保持する試料ホルダー４を有している。また、ツルーイング装置１は、合成石英定盤２と電着ダイヤモンド砥石３の先端部３ａとの接触部位に、窒素ガスを供給する窒素ガス供給部５を有している。なお、電着ダイヤモンド砥石３は電着砥石の一例である。
Hereinafter, embodiments for carrying out the present invention (hereinafter, referred to as “embodiments of the invention”) will be described.
FIG. 1 is a schematic view for explaining a truing device to which the present invention is applied, and is a view of the device in a plan view. The truing device 1 shown in FIG. 1 has a synthetic quartz surface plate 2 and a sample holder 4 for holding an electrodeposited diamond grindstone 3. Further, the truing device 1 has a nitrogen gas supply unit 5 that supplies nitrogen gas to a contact portion between the synthetic quartz surface plate 2 and the tip portion 3a of the electrodeposited diamond grindstone 3. The electrodeposited diamond grindstone 3 is an example of an electrodeposited grindstone.
なお、合成石英定盤２は、その加工面２ａが鉛直方向に略平行な向きとなるように配置されている。また、電着ダイヤモンド砥石３は、略円柱状の形状の金属ベース部の先端の面と、その側面の円周上の面に沿って、多数のダイヤモンド砥粒がめっきにより固着されて形成されている。 The synthetic quartz surface plate 2 is arranged so that its processed surface 2a is oriented substantially parallel to the vertical direction. Further, the electrodeposited diamond grindstone 3 is formed by plating a large number of diamond abrasive grains along the surface of the tip of the metal base portion having a substantially columnar shape and the surface on the circumference of the side surface thereof. There is.
そして、合成石英定盤２の加工面２ａに、電着ダイヤモンド砥石３の先端部３ａが接して、ダイヤモンド砥粒の切れ刃先端が加工される。また、合成石英定盤２は加工部材の一例である。 Then, the tip portion 3a of the electrodeposited diamond grindstone 3 comes into contact with the machined surface 2a of the synthetic quartz surface plate 2, and the tip of the cutting edge of the diamond abrasive grains is machined. The synthetic quartz surface plate 2 is an example of a processed member.
窒素ガス供給部５は、窒素ガスを供給する先端部５ａが、合成石英定盤２の加工面２ａと、電着ダイヤモンド砥石３の先端部３ａとの接触部位に向けられて配置されている。これにより、接触部位が窒素ガス環境下となる。 In the nitrogen gas supply unit 5, the tip portion 5a for supplying nitrogen gas is arranged so as to face the contact portion between the processed surface 2a of the synthetic quartz surface plate 2 and the tip portion 3a of the electrodeposited diamond grindstone 3. As a result, the contact portion becomes a nitrogen gas environment.
ここで、本実施の形態では、加工部材が合成石英定盤２で形成されている場合を例に挙げて説明を行っているが、ダイヤモンド砥粒またはＣＢＮ砥粒の切れ刃先端を加工可能な材料であれば充分であって、必ずしも合成石英定盤２で形成される必要はない。例えば、ＳｉＯ２、ＺｒＯ２、Ａｌ２Ｏ３、ＴｉＯ２、Ｆｅ２Ｏ３、ＭｇＯ、ＣａＯ，Ｎａ２Ｏ、Ｋ２Ｏ、ＣｅＯ２等の無機酸化物、及びそれらからなる構成材料で形成されていても構わない。なお、耐摩耗性、耐熱性、化学的安定性に優れる観点から、加工部材として、合成石英、サファイアが採用されることが好ましい。 Here, in the present embodiment, the case where the processing member is formed of the synthetic quartz surface plate 2 is described as an example, but the cutting edge tip of the diamond abrasive grain or the CBN abrasive grain can be processed. Any material is sufficient, and it is not always necessary to form the synthetic quartz surface plate 2. For example, it is formed of inorganic oxides such as SiO 2 , ZrO 2 , Al 2 O 3 , TIO 2 , Fe 2 O 3 , MgO, CaO, Na 2 O, K 2 O, and CeO 2 , and constituent materials composed of them. It doesn't matter if you do. From the viewpoint of excellent wear resistance, heat resistance, and chemical stability, it is preferable to use synthetic quartz or sapphire as the processed member.
また、合成石英定盤２は、回転数が制御可能な加工テーブル６上に固定され、加工テーブル６の回転によって合成石英定盤２が図１中符号Ｒ１で示す方向に回転可能に構成されている。 Further, the synthetic quartz surface plate 2 is fixed on a processing table 6 whose rotation speed can be controlled, and the synthetic quartz surface plate 2 is configured to be rotatable in the direction indicated by reference numeral R1 in FIG. 1 by the rotation of the processing table 6. There is.
また、試料ホルダー４は、合成石英定盤２の回転軸に対して偏心した回転軸７を中心として図１中符号Ｒ２で示す方向に回転可能に構成されている。また、試料ホルダー４は、駆動ステージ８で支持され、駆動ステージ８は、試料ホルダー４と一体的に図１中符号Ｙで示す方向に揺動可能に構成されている。 Further, the sample holder 4 is configured to be rotatable in the direction indicated by reference numeral R2 in FIG. 1 with the rotation axis 7 eccentric to the rotation axis of the synthetic quartz plate 2 as the center. Further, the sample holder 4 is supported by the drive stage 8, and the drive stage 8 is configured to be integrally swingable with the sample holder 4 in the direction indicated by reference numeral Y in FIG.
また、試料ホルダー４は、電着ダイヤモンド砥石３が合成石英定盤２の方向（図１中符号Ｘで示す方向）に一定の圧力で押し付けられるように、図示しない付勢バネにより付勢されている。 Further, the sample holder 4 is urged by an urging spring (not shown) so that the electrodeposited diamond grindstone 3 is pressed in the direction of the synthetic quartz surface plate 2 (direction indicated by reference numeral X in FIG. 1) with a constant pressure. There is.
ここで、本実施の形態では、試料ホルダー４に保持される電着砥石として電着ダイヤモンド砥石３を例に挙げて説明を行っているが、電着砥石はこれに限定されるものではなく、電着ＣＢＮ砥石であっても構わない。 Here, in the present embodiment, the electrodeposition diamond grindstone 3 is taken as an example as the electrodeposition grindstone held in the sample holder 4, but the electrodeposition grindstone is not limited to this. It may be an electrodeposited CBN grindstone.
また、電着ダイヤモンド砥石３の形状は、略円柱状の金属ベース部の先端の面と側面の円周上の面に多数のダイヤモンド砥粒が固着された形状に限定されるものではなく、本形状は、一例である。例えば、電着ダイヤモンド砥石は、略平坦な金属ベース部の面に、多数のダイヤモンド砥粒が固着された形状であってもよく、種々の金属ベース部の形状のものが、ツルーイングの対象となりうる。 Further, the shape of the electrodeposited diamond grindstone 3 is not limited to a shape in which a large number of diamond abrasive grains are fixed to the front surface and the peripheral surface of the side surface of the substantially cylindrical metal base portion. The shape is an example. For example, the electrodeposited diamond grindstone may have a shape in which a large number of diamond abrasive grains are fixed to a surface of a substantially flat metal base portion, and those having various metal base portions may be the target of truing. ..
また、窒素ガス供給部５は、合成石英定盤２の加工面２ａと、電着ダイヤモンド砥石３の先端部３ａとの接触部位に窒素ガスを供給して、接触部位を窒素ガス環境下とすることができれば、その配置位置は特に限定されるものではない。 Further, the nitrogen gas supply unit 5 supplies nitrogen gas to the contact portion between the processed surface 2a of the synthetic quartz surface plate 2 and the tip portion 3a of the electrodeposited diamond grindstone 3, and puts the contact portion in a nitrogen gas environment. If possible, the arrangement position is not particularly limited.
本発明を適用したツルーイング装置の一例であるツルーイング装置１は、上記のような構成を有することで、合成石英定盤２と電着ダイヤモンド砥石３の先端部３ａとの接触部位で、励起窒素を生成して、これをエッチング種とするエッチングを進行させ、ダイヤモンド砥粒の切れ刃先端位置を加工して、複数の砥粒の切れ刃先端位置を、精度高く、均一に揃えることが可能となる。 The truing device 1, which is an example of the truing device to which the present invention is applied, has the above-mentioned configuration, so that excited nitrogen is generated at the contact portion between the synthetic quartz surface plate 2 and the tip portion 3a of the electrodeposited diamond grindstone 3. It is possible to generate and proceed with etching using this as an etching type, process the cutting edge tip positions of diamond abrasive grains, and align the cutting edge tip positions of a plurality of abrasive grains with high accuracy and uniformly. ..
以下、上記の様に構成されたツルーイング装置１を用いたツルーイング方法について説明を行う。即ち、本発明を適用したツルーイング方法の一例について説明を行う。 Hereinafter, a truing method using the truing device 1 configured as described above will be described. That is, an example of a true wing method to which the present invention is applied will be described.
本発明を適用したツルーイング方法の一例では、合成石英定盤２を回転させると共に、電着ダイヤモンド砥石３を回転及び揺動させながら、付勢バネにより、一定の圧力で合成石英定盤２に当接させ、接触部位に窒素ガス供給部５から窒素ガスを供給する。 In an example of the truing method to which the present invention is applied, the synthetic quartz surface plate 2 is rotated and the electrodeposited diamond grindstone 3 is rotated and swung, and the synthetic quartz surface plate 2 is hit by an urging spring at a constant pressure. Nitrogen gas is supplied from the nitrogen gas supply unit 5 to the contact portion.
即ち、合成石英定盤２の加工面２ａと、電着ダイヤモンド砥石３の先端部３ａとの接触部位で、両部材が当接して相対的に変異することで、接触部位に電荷移動（摩擦帯電）を生じさせる。そして、接触部位の空気中に電荷移動（摩擦帯電）により放電が生じ、空気中の窒素や、窒素ガス供給部５から供給された窒素ガス５から励起窒素が生成される。 That is, at the contact portion between the machined surface 2a of the synthetic quartz surface plate 2 and the tip portion 3a of the electrodeposited diamond grindstone 3, both members abut and relatively mutate, so that charge transfer (triboelectric charging) to the contact portion. ). Then, an electric discharge is generated by charge transfer (triboelectric charging) in the air at the contact portion, and excited nitrogen is generated from nitrogen in the air and nitrogen gas 5 supplied from the nitrogen gas supply unit 5.
また、接触部位で生成した励起窒素は、化学反応性の高いエッチング種として、電着ダイヤモンド砥石３の先端部３ａの切れ刃先端に作用して、同部分のダイヤモンドを除去する。これにより、先端部３ａにおける複数のダイヤモンド砥粒の切れ刃先端位置が均一化される。 Further, the excited nitrogen generated at the contact site acts on the cutting edge tip of the tip portion 3a of the electrodeposited diamond grindstone 3 as an etching species having high chemical reactivity to remove the diamond in the same portion. As a result, the positions of the cutting edge tips of the plurality of diamond abrasive grains in the tip portion 3a are made uniform.
本実施の形態の変形例として、図１に記載の装置構成に、更に、加熱処理部を設けることもできる。この加熱処理部は、一例として、合成石英定盤２の加工面２とは反対側の位置に配置され、合成石英定盤２を加熱する。 As a modification of the present embodiment, a heat treatment unit may be further provided in the apparatus configuration shown in FIG. As an example, this heat treatment unit is arranged at a position opposite to the processed surface 2 of the synthetic quartz surface plate 2, and heats the synthetic quartz surface plate 2.
この加熱処理部で合成石英定盤２を１００℃に加温すると、ダイヤモンド砥粒の切れ刃先端位置において、合成石英定盤２と、ダイヤモンド砥粒との間の固相反応が促進され、この固相反応によっても、砥粒の切れ刃先端位置のダイヤモンドが除去される。即ち、励起窒素のエッチングに加えて、固相反応も促進されるため、より一層、効率良く、かつ、高精度に、砥粒の切れ刃先端位置が揃える加工を施すことができる。 When the synthetic quartz surface plate 2 is heated to 100 ° C. in this heat treatment section, the solid phase reaction between the synthetic quartz surface plate 2 and the diamond abrasive grains is promoted at the tip position of the cutting edge of the diamond abrasive grains. The solid phase reaction also removes the diamond at the tip of the cutting edge of the abrasive grains. That is, since the solid-phase reaction is promoted in addition to the etching of the excited nitrogen, it is possible to perform the process of aligning the cutting edge positions of the abrasive grains more efficiently and with high accuracy.
［効果］
本発明を適用したツルーイング方法及びツルーイング装置は、励起窒素を効率良く生成することで、ダイヤモンド砥粒またはＣＢＮ砥粒を有する電着砥石を、短時間かつ高精度にツルーイングすることが可能なものとなっている。
[effect]
The truing method and the truing device to which the present invention is applied are capable of truing an electrodeposited grindstone having diamond abrasive grains or CBN abrasive grains in a short time and with high accuracy by efficiently generating excited nitrogen. It has become.
以下、本発明の実施例及び比較例について説明する。なお、ここで示す実施例は一例であり本発明を限定するものではない。 Hereinafter, examples and comparative examples of the present invention will be described. The examples shown here are examples and do not limit the present invention.
［１．ツルーイング加工による砥石表面の評価］
［実施例１〜２及び比較例１］
本発明の実施例１のツルーイング方法として、以下の条件で加工を行った。先ず、本発明の実施例１のツルーイング方法として、合成石英定盤（Φ100）に対して、付勢バネ（バネ定数：0.54N/mm、バネ長さ：4mm）で電着ダイヤモンド砥石（#100）に2.16Nの荷重をかけて当接させた状態で、合成石英定盤を回転数1000rpmで回転させ、電着ダイヤモンド砥石を保持させた試料ホルダーを回転数1000rpmで回転、かつ、揺動（揺動距離：5mm、揺動速度：0.1mm/s）させた。また、窒素ガス供給部より、合成石英定盤と電着ダイヤモンド砥石の先端部との接触部位に窒素ガス（5L/min）を供給した。この様な状況で１時間の加工を行った。
実施例１と同様の方法で、窒素ガス供給部による窒素ガス供給を行わないものを比較例１とした。
また、実施例１と同様の方法で、さらに、ヒーターで合成石英定盤を約100℃に加熱しながら加工する条件の方法を実施例２とした。
[1. Evaluation of the surface of the grindstone by trueing]
[Examples 1 and 2 and Comparative Example 1]
As the truing method of Example 1 of the present invention, processing was performed under the following conditions. First, as the truing method of Example 1 of the present invention, an electrodeposited diamond grindstone (# 100) is used with an urging spring (spring constant: 0.54 N / mm, spring length: 4 mm) for a synthetic quartz platen (Φ100). ) With a load of 2.16N, the synthetic quartz platen was rotated at a rotation speed of 1000 rpm, and the sample holder holding the electrodeposited diamond grindstone was rotated at a rotation speed of 1000 rpm and rocked ( The swing distance: 5 mm, the swing speed: 0.1 mm / s). In addition, nitrogen gas (5 L / min) was supplied from the nitrogen gas supply unit to the contact portion between the synthetic quartz surface plate and the tip of the electrodeposited diamond grindstone. Processing was carried out for 1 hour in such a situation.
Comparative Example 1 was obtained in the same manner as in Example 1 in which the nitrogen gas supply unit did not supply nitrogen gas.
Further, the method of processing under the same method as in Example 1 while further heating the synthetic quartz surface plate to about 100 ° C. with a heater was set as Example 2.
上記の実施例１〜２及び比較例１について、加工前後の電着ダイヤモンド砥石の砥粒の切れ刃先端を観察して、評価を行った。 For Examples 1 and 2 and Comparative Example 1 described above, the cutting edge tips of the abrasive grains of the electrodeposited diamond grindstone before and after processing were observed and evaluated.
図２に実施例１及び比較例１の結果、図３に実施例２の結果を示す。また、図４に、実施例２の加工後の電着砥石における砥粒Ａ及び砥粒Ｂの２箇所の切れ刃先端位置の差を模式図で示す。また、図５に、ツルーイング加工した電着ダイヤモンド砥石の砥石表面の一部における、切れ刃先端が平坦化した部分が観察領域の中で占める割合（ａ：平均摩耗面積率）と、平坦化され、研削加工に作用する砥粒の総数（ｎ：平均平坦化砥粒数）の結果を示す。 FIG. 2 shows the results of Example 1 and Comparative Example 1, and FIG. 3 shows the results of Example 2. Further, FIG. 4 is a schematic view showing the difference between the cutting edge tip positions of the abrasive grains A and the abrasive grains B in the electrodeposited grindstone after the processing of the second embodiment. Further, in FIG. 5, the ratio of the flattened tip of the cutting edge to the observed area (a: average wear area ratio) in a part of the grindstone surface of the trued electrodeposited diamond grindstone is flattened. , The result of the total number of abrasive grains acting on the grinding process (n: average number of flattened abrasive grains) is shown.
なお、図２及び図３中の符号Ｓで示す比較的白くなっている部分が、切れ刃先端が平坦化した領域の一部を示している。なお、図２及び図３では、図面が不明確になることを避けるため、切れ刃先端が平坦化した領域の全てには符号を付けていない。また、図２のうち、（ａ）は比較例１の加工前、（ｂ）は比較例１の加工後、（ｃ）は実施例１の加工前、（ｄ）は実施例１の加工後の結果である。また、図３のうち、（ａ）は実施例２の加工前、（ｂ）は実施例２の加工後の結果である。また、図５のうち、（ｂ）は比較例１の加工後、（ｃ）は実施例１の加工後、（ｄ）は、実施例２の加工後の結果である。 The relatively white portion indicated by reference numeral S in FIGS. 2 and 3 indicates a part of the region where the tip of the cutting edge is flattened. In addition, in FIGS. 2 and 3, in order to avoid unclear drawing, all the regions where the tip of the cutting edge is flattened are not marked. Further, in FIG. 2, (a) is before the processing of Comparative Example 1, (b) is after the processing of Comparative Example 1, (c) is before the processing of Example 1, and (d) is after the processing of Example 1. Is the result of. Further, in FIG. 3, (a) is the result before processing of Example 2, and (b) is the result after processing of Example 2. Further, in FIG. 5, (b) is the result after the processing of Comparative Example 1, (c) is the result after the processing of Example 1, and (d) is the result after the processing of Example 2.
図２及び図３から明らかなように、比較例１の加工後の電着ダイヤモンド砥石の砥石表面に比べ、実施例１の加工後の電着ダイヤモンド砥石の砥石表面では、切れ刃先端が平坦化した砥粒の割合が多くなっていた。また、実施例２の加工後の電着ダイヤモンド砥石の砥石表面では、実施例１よりも更に、切れ刃先端が平坦化した砥粒の割合が多くなっていた。 As is clear from FIGS. 2 and 3, the tip of the cutting edge is flattened on the grindstone surface of the electrodeposited diamond grindstone after processing of Example 1 as compared with the grindstone surface of the electrodeposited diamond grindstone after processing of Comparative Example 1. The proportion of grindstones was high. Further, on the grindstone surface of the electrodeposited diamond grindstone after processing in Example 2, the proportion of abrasive grains having a flattened cutting edge tip was higher than that in Example 1.
図４から明らかなように、実施例２の加工後の電着ダイヤモンド砥石では、砥石表面上の２つの砥粒Ａ及び砥粒Ｂの切れ刃先端位置の差が、0.1μmとなっており、実施例２の加工によって、ダイヤモンド砥粒の切れ刃先端位置が、精度高く、均一に揃えられていることが分かった。 As is clear from FIG. 4, in the electrodeposited diamond grindstone after processing of Example 2, the difference between the cutting edge tip positions of the two abrasive grains A and the abrasive grains B on the surface of the grindstone is 0.1 μm. By the processing of Example 2, it was found that the cutting edge tip positions of the diamond abrasive grains were highly accurate and evenly aligned.
図５から明らかなように、平均摩耗面積率と、平均平坦化砥粒数において、実施例１は比較例１よりも大きな値を示した。また、実施例２は実施例１よりも更に大きな値を示した。 As is clear from FIG. 5, in the average wear area ratio and the average number of flattened abrasive grains, Example 1 showed larger values than Comparative Example 1. In addition, Example 2 showed a larger value than that of Example 1.
［２．ツルーイング加工した電着ダイヤモンド砥石による研削評価］
続いて、上記の実施例１〜２及び比較例１について、ツルーイング加工した電着ダイヤモンド砥石を用いて、被加工物を研削加工した際の、被加工物の研削面の表面粗さについて評価を行った。
被加工物の研削加工は以下の条件で行った。実施例１〜２、又は、比較例１の方法でツルーイング加工した電着ダイヤモンド砥石（#100）と、被加工物である超硬合金のＫＤ２０（登録商標）を試験機（ファナック株式会社製の加工機：FANUC ROBODRILLα-D14MiA5）に取り付け、回転数3000rpm、送り速度50mm/min、切り込み量5μｍの条件で、被加工物の端部に対して、一往復の研削を行った。
研削後の被加工物の研削面の表面粗さを、非接触形状測定機を用いて測定した。なお、比較対照として、加工する前の被加工物の表面粗さも測定した。
[2. Grinding evaluation with a truly electrodeposited diamond grindstone]
Subsequently, with respect to Examples 1 and 2 and Comparative Example 1 described above, the surface roughness of the ground surface of the workpiece when the workpiece was ground using the trued electrodeposited diamond grindstone was evaluated. went.
The work piece was ground under the following conditions. An electrodeposited diamond grindstone (# 100) that has been trued by the method of Examples 1 and 2 or Comparative Example 1 and a cemented carbide KD20 (registered trademark) that is a workpiece are tested by a testing machine (manufactured by FANUC Corporation). It was attached to a processing machine: FANUC ROBODRILL α-D14MiA5), and one reciprocating grinding was performed on the end of the workpiece under the conditions of a rotation speed of 3000 rpm, a feed rate of 50 mm / min, and a depth of cut of 5 μm.
The surface roughness of the ground surface of the workpiece after grinding was measured using a non-contact shape measuring machine. As a comparative control, the surface roughness of the work piece before processing was also measured.
図６に、被加工物の研削面の測定範囲における算術平均粗さ（Ｓａ）の結果をグラフで示す。また、図７に、被加工物を研削加工した加工領域の一部の表面粗さを非接触形状測定機で測定した結果を示す。なお、図６及び図７において、（ａ）は加工前の被加工物、（ｂ）は比較例１の加工後の砥石、（ｃ）は実施例１の加工後の砥石、（ｄ）は実施例２の加工後の砥石で研削加工した結果である。 FIG. 6 is a graph showing the result of the arithmetic mean roughness (Sa) in the measurement range of the ground surface of the workpiece. Further, FIG. 7 shows the result of measuring the surface roughness of a part of the processed region obtained by grinding the workpiece with a non-contact shape measuring machine. In FIGS. 6 and 7, (a) is a work piece before processing, (b) is a grindstone after processing of Comparative Example 1, (c) is a grindstone after processing of Example 1, and (d) is. This is the result of grinding with the grindstone after the processing of Example 2.
図６に示すように、実施例１の算術平均粗さ（Ｓａ）の値は１１．５ｎｍであり、実施例２の算術平均粗さ（Ｓａ）の値は４．０ｎｍであった。図６及び図７の結果から、実施例１は比較例１よりも研削面が平滑に加工され、実施例２は実施例１よりも更に、研削面が平滑に加工されていたことが分かった。 As shown in FIG. 6, the value of the arithmetic mean roughness (Sa) of Example 1 was 11.5 nm, and the value of the arithmetic mean roughness (Sa) of Example 2 was 4.0 nm. From the results of FIGS. 6 and 7, it was found that the ground surface of Example 1 was processed to be smoother than that of Comparative Example 1, and that the ground surface of Example 2 was processed to be smoother than that of Example 1. ..
１ ツルーイング装置
２ 合成石英定盤
２ａ 加工面
３ 電着ダイヤモンド砥石
３ａ 先端部
４ 試料ホルダー
５ 窒素ガス供給部
５ａ 先端部
６ 加工テーブル
７ 回転軸
８ 駆動ステージ
1 Truing device 2 Synthetic quartz surface plate 2a Machined surface 3 Electroplated diamond grindstone 3a Tip 4 Sample holder 5 Nitrogen gas supply 5a Tip 6 Machining table 7 Rotating shaft 8 Drive stage
Claims (7)
金属酸化物で構成された加工部材を前記砥粒の切れ刃先端と接触させ、接触部位に窒素ガスを供給すると共に、前記加工部材を前記砥粒の切れ刃先端に接触させた状態で変位させる工程を備える
ツルーイング方法。 A trueing method for equalizing the cutting edge heights of a plurality of the abrasive grains protruding from the surface of the electrodeposited grindstone with respect to an electrodeposited grindstone having a large number of abrasive grains composed of diamond or CBN.
A processed member made of a metal oxide is brought into contact with the tip of the cutting edge of the abrasive grains to supply nitrogen gas to the contact portion, and the processed member is displaced in a state of being in contact with the tip of the cutting edge of the abrasive grains. A trueing method with a process.
請求項１に記載のツルーイング方法。 The truing method according to claim 1, wherein the processed member is heated.
前記加工部材は、合成石英である
請求項１または請求項２に記載のツルーイング方法。 The abrasive grains are composed of diamond.
The truing method according to claim 1 or 2, wherein the processed member is synthetic quartz.
金属酸化物で構成された加工部材と、
前記砥粒の切れ刃先端を前記加工部材と接触させて前記電着砥石を保持する保持機構と、
前記加工部材及び前記砥粒の切れ刃先端との接触部位に窒素ガスを供給する窒素ガス供給部と、
前記加工部材と前記砥粒の切れ刃先端とを接触させた状態で、同加工部材と前記電着砥石を相互に摺動させる摺動手段とを備える
ツルーイング装置。 A trueing device for equalizing the cutting edge heights of a plurality of the abrasive grains protruding from the surface of the electrodeposited grindstone with respect to an electrodeposited grindstone having a large number of abrasive grains composed of diamond or CBN.
Processing members made of metal oxides and
A holding mechanism that holds the electrodeposited grindstone by bringing the tip of the cutting edge of the abrasive grains into contact with the processing member.
A nitrogen gas supply unit that supplies nitrogen gas to a contact portion between the processed member and the tip of the cutting edge of the abrasive grains.
A trueing device including a sliding means for sliding the processed member and the electrodeposited grindstone with each other in a state where the processed member and the tip of the cutting edge of the abrasive grain are in contact with each other.
請求項４に記載のツルーイング装置。 The truing device according to claim 4, further comprising a heating portion for heating the processed member.
前記加工部材は、合成石英である
請求項４または請求項５に記載のツルーイング装置。 The abrasive grains are composed of diamond.
The truing device according to claim 4 or 5, wherein the processed member is synthetic quartz.
前記加工部材と前記砥粒の切れ刃先端を接触させた状態で、前記加工部材を回転駆動する加工部材駆動部と、
前記加工部材に向けて前記電着砥石を付勢する付勢部と、
前記加工部材と前記砥粒の切れ刃先端を接触させた状態で、前記電着砥石を揺動、かつ、回転駆動する電着砥石駆動部とを有する
請求項４、請求項５または請求項６に記載のツルーイング装置。 The sliding means
A processing member driving unit that rotationally drives the processing member in a state where the processing member and the tip of the cutting edge of the abrasive grain are in contact with each other.
An urging portion that urges the electrodeposition grindstone toward the processed member, and
Claim 4, claim 5 or claim 6 having an electrodeposition grindstone driving unit that swings and rotationally drives the electrodeposition grindstone in a state where the processing member and the tip of the cutting edge of the abrasive grain are in contact with each other. The truing device described in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019114929A JP7309177B2 (en) | 2019-06-20 | 2019-06-20 | Truing method and truing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019114929A JP7309177B2 (en) | 2019-06-20 | 2019-06-20 | Truing method and truing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2021000683A true JP2021000683A (en) | 2021-01-07 |
| JP7309177B2 JP7309177B2 (en) | 2023-07-18 |
Family
ID=73994627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019114929A Active JP7309177B2 (en) | 2019-06-20 | 2019-06-20 | Truing method and truing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7309177B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360972A (en) * | 1989-07-27 | 1991-03-15 | Agency Of Ind Science & Technol | Dressing method for diamond grinding stone |
| JPH0453675A (en) * | 1990-06-18 | 1992-02-21 | Toyoda Mach Works Ltd | Method and device for dressing |
| JP2010076013A (en) * | 2008-09-24 | 2010-04-08 | Fujifilm Corp | Polishing method of rotary grindstone and polishing apparatus, grinding grindstone and grinding apparatus using the grindstone |
-
2019
- 2019-06-20 JP JP2019114929A patent/JP7309177B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0360972A (en) * | 1989-07-27 | 1991-03-15 | Agency Of Ind Science & Technol | Dressing method for diamond grinding stone |
| JPH0453675A (en) * | 1990-06-18 | 1992-02-21 | Toyoda Mach Works Ltd | Method and device for dressing |
| JP2010076013A (en) * | 2008-09-24 | 2010-04-08 | Fujifilm Corp | Polishing method of rotary grindstone and polishing apparatus, grinding grindstone and grinding apparatus using the grindstone |
Non-Patent Citations (1)
| Title |
|---|
| 久保田 章亀: "乾式環境下でのダイヤモンドの高効率・高精度加工法の開発ー窒素を利用した方法の提案ー", 2016年度精密工学会秋季大会学術講演会講演論文集, JPN7023000819, 31 December 2016 (2016-12-31), JP, pages 287 - 288, ISSN: 0005000091 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7309177B2 (en) | 2023-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6506103B1 (en) | ELID centerless grinding apparatus | |
| TWI586615B (en) | Engraving wheel, retainer unit, scribing device and marking wheel manufacturing method | |
| US20210078133A1 (en) | Methods and systems for processing one or more integrated circuit probes | |
| JPH0775944A (en) | Brittle material machining method and device therefor | |
| JP2010076013A (en) | Polishing method of rotary grindstone and polishing apparatus, grinding grindstone and grinding apparatus using the grindstone | |
| JPH11239969A (en) | Grinding method for formed mirror surface, and device for it | |
| JP2017209816A (en) | Cutter wheel | |
| JP2021000683A (en) | Truing method and truing apparatus | |
| JP6145548B1 (en) | Chamfering grinding method and chamfering grinding apparatus | |
| JP2001353648A (en) | Device and method of grinding elid mirror surface of large diameter work | |
| JP5114701B2 (en) | Micro tool grinding apparatus and method | |
| JP2000246634A (en) | Plasma discharge trueing device and fine machining method using this device | |
| JP6422009B2 (en) | Scribing wheel and manufacturing method thereof | |
| JPH10175165A (en) | Centerless grinding method using metal bond grinding wheel, and its device | |
| JP4145273B2 (en) | CMP pad conditioner | |
| CN110573301A (en) | method for treating workpiece and grinding and etching machine | |
| WO2023286288A1 (en) | Method for sharpening diamond-coated tool, plasma surface treatment device, and diamond-coated tool | |
| JP6976713B2 (en) | Chamfer grinding method and chamfer grinding equipment | |
| JP2002321146A (en) | Method for processing metal mold for diffraction optical element | |
| TWI602667B (en) | Scoring wheel and its manufacturing method | |
| CN110497305B (en) | Wafer polishing apparatus and wafer polishing method | |
| JPH08216021A (en) | Truing method for and manufacture of grinding wheel | |
| JP2863339B2 (en) | Chamfering polishing tool for inner circumference | |
| KR100561771B1 (en) | Plasma discharge truing apparatus and fine-machining methods using the apparatus | |
| JPH07195261A (en) | Spherical grinding method and device thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A80 | Written request to apply exceptions to lack of novelty of invention |
Free format text: JAPANESE INTERMEDIATE CODE: A80 Effective date: 20190708 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220510 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230228 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230228 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20230426 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230509 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230627 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230628 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7309177 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |