JP2020537152A5

JP2020537152A5 -

Info

Publication number: JP2020537152A5
Application number: JP2020521313A
Authority: JP
Filing date: 2018-10-09
Publication date: 2021-10-21
Anticipated expiration: 2038-10-09

Description

図４の例によれば、走査ヘッド２に配置された評価電子回路４は、一定の振幅の（１ＭＨｚから約１００ＭＨｚの範囲の）高周波キャリア電流を生成するように構成された信号発生器４１を有する。（Ｓ＋、Ｓ−、Ｃ＋、Ｃ−と示されている）４つのセンサ素子６のそれぞれは、信号発生器に電気的に接続されているので、キャリア電流ｉはそれらを通って流れる。ここに示す例では、センサ素子６が直列に接続されているため、同じキャリア電流ｉがセンサ素子６を流れる。 According to the example of FIG. 4, the evaluation electronic circuit 4 arranged in the scanning head 2 is a signal generator 41 configured to generate a high frequency carrier current (in the range of 1 MHz to about 100 MHz) having a constant amplitude. Have. Since each of the four sensor elements 6 (indicated as S +, S-, C +, C-) is electrically connected to the signal generator, the carrier current i flows through them. In the example shown here, since the sensor elements 6 are connected in series, the same carrier current i flows through the sensor elements 6.

センサユニット３に配置されたセンサ素子６（薄片）には、スケール１が発生する磁界（磁束密度Ｂ）が侵入する。前述のように、磁場は測定方向（ｘ方向）に沿ったスケールの分割に従って変化し、その結果、センサ素子６の局所的な磁場の強さ／磁束密度は、センサユニット３とスケール１の相対位置に依存する。センサユニットに対してスケールが移動すると、それに応じて磁場が移動する。 The magnetic field (magnetic flux density B) generated by the scale 1 penetrates into the sensor element 6 (thin section) arranged in the sensor unit 3. As described above, the magnetic field changes according to the division of the scale along the measurement direction (x direction), and as a result, the local magnetic field strength / magnetic flux density of the sensor element 6 is relative to the sensor unit 3 and the scale 1. It depends on the position. As the scale moves relative to the sensor unit, the magnetic field moves accordingly.

例１：距離又は角度を測定する測定装置であって、
測定方向ｘに沿って変化するように磁化され、この磁化により対応して変化する磁場Ｂを引き起こすスケール１と、
前記磁場Ｂが貫通する少なくとも１つのセンサユニット３と、
を有し、前記センサユニット２は、
磁気インピーダンス効果により、磁場Ｂに依存し、かつ前記測定方向ｘに沿って変化する局所的な電気的インピーダンスを有する、少なくとも１つの強磁性の薄片６と、
前記薄片６の領域で前記局所的な電気的インピーダンスに依存するセンサ信号（例えば、Ｕ_Ｓ＋、Ｕ_Ｓ−、Ｕ_Ｃ＋、Ｕ_Ｃ−）を生成するように構成された少なくとも１つのセンサ素子（例えば、図３、５、６、符号６、７、１０参照）と、
を有する。 Example 1: A measuring device that measures a distance or an angle.
Scale 1 which is magnetized so as to change along the measurement direction x and causes a magnetic field B which changes correspondingly by this magnetization.
At least one sensor unit 3 through which the magnetic field B penetrates,
The sensor unit 2 has
Due to the magnetic impedance effect, at least one ferromagnetic flakes 6 that are dependent on the magnetic field B and have a local electrical impedance that changes along the measurement direction x.
At least one sensor element (eg _{, U S +} , U _S- , U _{C +} , U _C- ) configured to generate a sensor signal (eg, US +, US-, U C +, U C-) that depends on the local electrical impedance in the region of the flakes 6. , Fig. 3, 5, 6, reference numerals 6, 7, 10) and
Have.

例１０：例１乃至例９の何れか１つに記載の測定装置であって、前記スケールは、前記センサ素子３に対する前記スケールの位置を一意に定義する絶対コーディングを有する。 Example 10: The measuring device according to any one of Examples 1 to 9, wherein the scale has an absolute coding that uniquely defines the position of the scale with respect to the sensor element 3.

例１２：スケール１と前記スケール１から離間したセンサユニット３との間の相対位置を測定する方法であって、
測定方向に沿って変化するように磁化されたスケール１によって、前記測定方向ｘに沿って変化する磁場Ｂを生成するステップと、
センサユニット３に配置された少なくとも１つの薄片６の局所的で電気的なインピーダンスに影響を与えるステップであって、局所的で電気的な前記インピーダンスは、磁気インピーダンス効果による局所磁場に依存し、したがって、前記センサユニット３に対する前記スケール１の位置に依存するステップと、
なくとも１つの薄片６のある領域における局所的で電気的な前記インピーダンスを表す信号をセンサ素子により検出するステップと、
を有する。 Example 12: A method of measuring the relative position between the scale 1 and the sensor unit 3 separated from the scale 1.
A step of generating a magnetic field B that changes along the measurement direction x by a scale 1 that is magnetized so as to change along the measurement direction.
A step that affects the local and electrical impedance of at least one flakes 6 placed on the sensor unit 3, where the local and electrical impedance depends on the local magnetic field due to the magnetic impedance effect and therefore. , A step that depends on the position of the scale 1 with respect to the sensor unit 3.
A step of detecting by a sensor element a signal representing the local and electrical impedance in a region of at least one flakes 6.
Have.

Claims

A measuring device that measures distances or angles.
A scale (1) that is magnetized so as to change along the measurement direction (x) and causes a magnetic field (B) that changes correspondingly by this magnetization.
With at least one scanning head (2) through which the changing magnetic field (B) penetrates the measurement direction (x) depending on its position relative to the scale (1).
The scanning head (2) has
Due to the magnetic impedance effect, at least one ferromagnetic flakes (6) that are dependent on the magnetic field (B) and have a local electrical impedance that changes along the measurement direction (x).
At least two phase-shifted sensor signal (U _{S, U} _C) for locally dependent on the electrical said impedance of said lamina (6) at least one sensor unit configured to generate a (3) ,
Measuring device with .

The measuring device according to claim 1.
A signal source configured to supply an alternating current (i) of constant amplitude and frequency, the alternating current (i) being spaced apart along the measurement direction (x). Further having a signal source supplied to at least two flakes (6),
The at least two flakes (6) are themselves configured as sensor elements of the sensor unit (3).
The magnetic field (B), which changes along the measurement direction (x) depending on the position of the scale (1) with respect to the scanning head (2), affects the impedance of the at least two flakes (6). A measuring device that gives and evaluates the impedance as measurement information (US ₊ , _US- , UC ₊ , _UC- ).

The measuring device according to claim 1 or 2.
A measuring device in which a planar coil (10) detects a local current intensity in the ferromagnetic flakes (6), which changes locally due to the magnetic field (B).

The measuring device according to claim 1, wherein the measuring device is
It has a signal source configured to supply alternating current (i) with constant amplitude and constant frequency.
The sensor unit (3) has at least one transmitting coil (11) connected to the signal source and transformedly coupled to at least one planar receiving coil (10).
At least one slice (6) functions as an iron core, and the transmission coil (11) induces an eddy current in the iron core that depends on the local impedance of the at least one slice (6). Measuring device .

The measuring device according to any one of claims 1 to 4.
Here, the generation of each of the sensor signals _{(U S} and _{U C),} respectively, the two measurement information _{_{_{(U S +, U S-;}}} U C +, U C-) is performed by taking the difference between,
The two measurement information (US ₊ , _US- ; U _{C +} , U _C- ) are respectively arranged in the sensor unit (3) at intervals along the measurement direction (x), at least one. A measuring device generated by a set of individual sensor elements (S +, S-; C +, C-).

The measuring device according to any one of claims 1 to 5.
The scale (1) has a regular division with a double period (2 · λ).
The sensor unit (3) includes at least two sensor elements in the first group and at least two sensor elements in the second group.
The sensor elements of the first group are arranged so as to be offset from each other by a distance ((2n + 1) · λ / 2) substantially corresponding to an odd multiple of half of the cycle.
The sensor element of the second group is a distance (n.) Corresponding to the length of the sensor element of the first group, which is a multiple of half of the period plus a quarter of the period. A measuring device that is displaced by λ + λ / 4).

The measuring device according to any one of claims 1 to 6.
The scale (1) is a measuring device having a plurality of magnetic tracks arranged adjacent to each other.

The measuring device according to any one of claims 1 to 7.
The scale is a measuring device having an absolute coding that uniquely defines the position of the scale with respect to the scanning head (2).

The measuring device according to any one of claims 1 to 8.
A measuring device in which the scale has a cylindrical shape and the division of the scale is an angular division.

The measuring device according to any one of claims 1 to 8.
The ferromagnetic flakes are measuring devices that function in the range of linear, non-linear, and magnetically saturated states.

A method of measuring the relative position between the scale (1) and the scanning head (2) separated from the scale (1).
A step of generating a magnetic field (B) that changes along the measurement direction (x) by a scale (1) magnetized so as to change along the measurement direction.
A step that affects the local and electrical impedance of at least one piece (6) placed in the sensor unit (3), where the local and electrical impedance is local due to the magnetic impedance effect. A step in which at least two phase-shifted measurement signals are generated, depending on the magnetic field and thus the position of the scale (1) with respect to the sensor unit (3).
A step of detecting a signal representing the local and electrical impedance of the at least one slice (6) in a certain region by a sensor element.
Method to have.

The method according to claim 11.
In the step of supplying a high-frequency alternating current to the at least one slice (6), the current distribution along the measurement direction (x) becomes the local and electrical impedance of the at least one slice (6). Dependent steps and
Evaluation of the signal detected by the sensor element, particularly the step of demodulating,
A method of further having.

The method according to claim 12.
The step of detecting the signal by the sensor element is
A sensor signal representing the strength of the magnetic field caused by the step of applying a voltage depending on the impedance locally to the at least one piece (6) or the AC current locally flowing through the at least one piece (6). , A step detected by a planar coil, a semiconductor element sensitive to a magnetic field, or a thin film sensor element,
Method to have.

The method according to claim 13.
The local and electrical impedance of the at least one flakes (6) affects the eddy currents induced by at least one transmit coil (11).
A planar receiving coil (10) is used as a sensor element, the planar receiving coil (10) is transformerally coupled to the transmitting coil (11), and the ferromagnetic at least one flakes (6) are iron cores. How to function as.