JP2020534709A - 光伝導性の電荷トラップ装置 - Google Patents
光伝導性の電荷トラップ装置 Download PDFInfo
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4295—Coupling light guides with opto-electronic elements coupling with semiconductor devices activated by light through the light guide, e.g. thyristors, phototransistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
- H01L31/16—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the semiconductor device sensitive to radiation being controlled by the light source or sources
- H01L31/167—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the semiconductor device sensitive to radiation being controlled by the light source or sources the light sources and the devices sensitive to radiation all being semiconductor devices characterised by potential barriers
- H01L31/173—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto the semiconductor device sensitive to radiation being controlled by the light source or sources the light sources and the devices sensitive to radiation all being semiconductor devices characterised by potential barriers formed in, or on, a common substrate
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
- H03K17/78—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used using opto-electronic devices, i.e. light-emitting and photoelectric devices electrically- or optically-coupled
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- Engineering & Computer Science (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Optics & Photonics (AREA)
- Light Receiving Elements (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
米国政府は、ローレンス・リバモア国立研究所の運営のための、アメリカ合衆国エネルギー省とローレンス・リバモアナショナルセキュリティLLCとの間の契約番号DE−AC52−07NA27344に従って、本発明において権利を有する。
をとり、ここでξinは、制御入力である。電界効果デバイスでは、ξinは、ゲートに印加される電圧である。その結果、増幅は、Vout=VggmZoとなり、ここで、Vgは入力電圧、Zoは負荷インピーダンスである。これらの単純な関係は、電子回路の基本的な基盤としての役割を果たす。相互コンダクタンスは、Ge、Si、ZnO、グラフェン、カーボンナノチューブ、InAsナノワイヤチャネル、GaN/InAlN、有機半導体及びゲル溶液ゲート構造から製造された接合デバイスにおいて観察されている。
光伝導デバイスで使用される材料は、適切に設計されている場合、標準的接合トランジスタの相互コンダクタンス特性に似た能力を有する。上記で検討したように、相互コンダクタンスgmは、デバイスの出力を制御入力に関連付ける特性である。半導体接合において、この特性は、接合での物理的力学がもたらす外部から加えられた電界の影響下での電荷キャリアの挙動の直接的な結果である。
ここで、τは再結合時間、g0は最大伝導率、S(t)は正規化された光強度である。式(1)は、関数S(t)による電荷キャリアの励起と、それに続く時定数τを有するトラッピングを記述している。
従って、光ポンプ下の光伝導材料内のキャリアは、上記の積分方程式により記述することができる。一例として、迅速な励起インパルス「スパイク」δ(t)に関して、g(t)の積分は、指数関数的減衰である。しかし、τと比較して緩慢に変化するS(t)を別にすると、g(t)の積分は、S(t)に比例して減少する。従って、ξin’は、
上記の近似は、キャリアの単純な指数関数的減衰の仮定を行う。しかしながら、多くの材料では、減衰はより複雑である。バナジウムなどのドーパントを使用して材料をドープすることは、材料の再結合時間に作用する1つの手法である。
放射線に応答して電荷トラップ領域を形成する光伝導デバイスのための多くの基材は、僅かにドープされた炭化ケイ素などのワイドバンドギャップ材料とすることができる。炭化ケイ素などの材料は、大幅な電力を減少して伝導できるため有利である。それの場合でも、放熱の要件は、かなりのものになる可能性がある(例えば、10kW−cm-2より大きい)。最新の冷却技術は、概して約27kW−cm-2の容量を有するので、デバイスから熱を除去するために幾つかの追加の冷却技術が必要になる場合がある。伝導手段と対流手段の両方を利用することができるが、従来の手段が実装できるように、熱流束をより低い値にまで低減することが望ましい。
403 用具
405 白色光プローブ
407 EとCは垂直
409 EとCは平行
411 c軸
Claims (28)
- 光伝導デバイスであって、
光を放出するように構成された光源と、
前記光源から前記光を受けるように位置決めされた結晶性物質であって、前記結晶性物質が、該結晶性物質の再結合時間を制御するために前記結晶性物質のバンドギャップ内に中間ギャップ状態を形成するドーパントでドープされる、結晶性物質と、
前記結晶性物質に結合されて、前記結晶性物質のための第1の電気接点を提供する第1の電極と、
前記結晶性物質に結合されて、前記結晶性物質のための第2の電気接点を提供する第2の電極と、
を含み、
前記第1及び第2の電極は、前記結晶性物質にわたって電界を確立するように構成され、前記結晶性物質は、前記光源から前記光を受けることに応答して実質的に線形の相互コンダクタンスを示すように構成される、光伝導デバイス。 - 前記光が前記結晶性物質内で反射することを可能にするために、前記結晶性物質上に反射コーティングを更に含む、請求項1に記載のデバイス。
- 前記結晶性物質が、前記光が第1の端部から前記結晶性物質に入射するのを可能にする入力アパーチャーと、前記結晶性物質に入射する前記光の経路に対して傾斜した前記入力アパーチャーの反対側端部上のファセットと、を含む、請求項1に記載のデバイス。
- 前記結晶性物質に入射する前記光の波長は、前記結晶性物質のバンドギャップに対応する波長よりも長い、請求項1に記載のデバイス。
- 前記結晶性物質は曲面を有する、請求項1に記載のデバイス。
- 前記結晶性物質は炭化ケイ素を含む、請求項1に記載のデバイス。
- 前記ドーパントが、バナジウム、窒素、アルミニウム又はホウ素のうちの1つを含む、請求項1に記載のデバイス。
- 前記光源と前記結晶性物質との間の前記光の経路内に位置決めされて、前記光源から前記結晶性物質に前記光を配向する光導波路を更に備える、請求項1に記載のデバイス。
- 前記第1の電極は、金属、金属合金又は金属マトリックスのうちの1つを含むベースプレートとして形成される、請求項1に記載のデバイス。
- 前記光によって励起されたときに前記結晶性物質によって生成された熱を拡散させるために、前記結晶性物質と前記第1の電極との間に位置決めされた基板を更に備える、請求項1に記載のデバイス。
- 前記基板が、金属化ダイヤモンド、酸化アルミニウム上のダイレクトボンド銅、窒化アルミニウム、銀化学蒸着ダイヤモンド(CVD)、アルミニウムCVD又は銅CVDのうちの1つを含む、請求項10に記載のデバイス。
- 前記基板と前記結晶性物質の間又は前記基板とベースプレートの間の熱膨張係数の勾配を低減するために、前記基板と前記結晶性物質の間又は前記基板と前記第1の電極の間に位置決めされる結合剤を更に含む、請求項10に記載のデバイス。
- 前記結合剤は、96.5%の錫、3%の銀及び0.5%の銅を含む、請求項12に記載のデバイス。
- 前記結晶性物質の周りに絶縁コーティングを更に含む、請求項1に記載のデバイス。
- 前記絶縁コーティングが、多層ポリイミド薄膜を含む、請求項14に記載のデバイス。
- 前記結晶性物質は、前記光源を制御する電気信号の最高周波数成分の特性時間よりも少なくとも1桁小さい再結合時間を生成するようにドープされる、請求項1に記載のデバイス。
- 前記結晶性物質は、特定の波長又は波長範囲を有する前記光によって励起されたときに、前記再結合時間に対する所定の値を達成するために、特定の量のキャリアを含むようにドープされる、請求項1に記載のデバイス。
- 前記結晶性物質は、前記光源からの前記光を受ける構造の一部として形成され、前記構造が、前記結晶性物質を介して伝播する前記光が複数の内部反射を受けるような形状にされる、請求項1に記載のデバイス。
- 電荷トラップ装置であって、
ドーパントでドープされた結晶性物質であって、前記ドーパントが、前記結晶性物質のバンドギャップ内に中間ギャップ状態を形成して、特定の波長又は波長範囲の光による前記結晶性物質の励起時に所定の値の再結合時間を達成する、結晶性物質と、
前記結晶性物質に結合され、前記結晶性物質にわたって電場を確立可能にするように構成された電極のペアと、
を備える、電荷トラップ装置。 - 前記結晶性物質が炭化ケイ素を含む、請求項19に記載の装置。
- 前記ドーパントが、バナジウム、窒素、アルミニウム又はホウ素のうちの1つを含む、請求項19に記載の装置。
- 前記結晶性物質が曲面を有する、請求項19に記載の装置。
- 前記結晶性物質は、光のビームが第1の端部から前記結晶性物質に入射することを可能にする入力アパーチャーと、前記結晶性物質に入射する前記光のビームの経路に対して傾斜した前記入力アパーチャーの反対端部上のファセットと、を含む、請求項19に記載の装置。
- 前記光のビームが前記結晶性物質内で反射することを可能にするため前記結晶性物質上に反射コーティングを更に含む、請求項23に記載の装置。
- 前記結晶性物質は、前記光のビームを受けることに応答して実質的に線形の相互コンダクタンスを示すように構成される、請求項23に記載の装置。
- 前記結晶性物質は、前記光源を制御する電気信号の最高周波数成分の特性時間よりも少なくとも1桁小さい再結合時間を生成するようにドープされる、請求項19に記載の装置。
- 前記結晶性物質は、前記再結合時間のための所定の値を達成するために特定の量のキャリアを含むようにドープされる、請求項19に記載の装置。
- 前記結晶性物質は、光源からの光のビームを受ける構造の一部として形成され、前記構造は、前記結晶性物質を介して伝播する光が複数の内部反射を受けるような形状にされる、請求項19に記載の装置。
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