JP2020527243A - バイオセンシング素子及びその製造方法及び生体分子の検出方法 - Google Patents
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Abstract
【解決手段】基板と、前記基板の上に配置され、且つ上面を有する金属導電層と、前記金属導電層の前記上面の上に配置され、それぞれ前記金属導電層の前記上面よりも高い頂面を含む複数の作用電極と、前記金属導電層を覆い且つ前記作用電極を囲み、上面が前記頂面と前記金属導電層の前記上面との間にあるので、前記作用電極を前記絶縁層の前記上面から突出させる絶縁層と、を含むバイオセンシング素子。また、バイオセンシング素子の製造方法、及びこのバイオセンシング素子による生体分子の検出方法を更に提供する。本発明は、これらの突出した作用電極によって、電界被覆範囲が広く、電気化学反応の効率の向上に寄与し、更に信号の強度を増加させるメリットを有する。
【選択図】図1
Description
電界分析シミュレーション
表1
表2
102、103、202、203、302、303 基板
104、204、304 第1の絶縁層
105、109、113、205、209、213、307、311、313 上面
106、206 金属導電層
107、207、211、305、309、111 側壁
108、218、308 第2の絶縁層
110、212、310 作用電極
112、314 生物学的プローブ
208 導電層
210、214 フォトマスク
216 絶縁材料層
300 バイオセンシング装置
306a、306b 金属層
312 対電極
316 信号検出ユニット
318 ワイヤ
H1 第1の高さ
H2 第2の高さ
E、E75、E50 電界
Claims (10)
- 基板を提供する工程と、
上面を有する金属導電層を前記基板の上に形成する工程と、
複数の作用電極を前記金属導電層の前記上面に形成して、前記金属導電層の前記上面よりも高い頂面を各前記作用電極に持たせる工程と、
前記金属導電層を覆い且つ前記作用電極を囲む絶縁層を形成し、前記絶縁層の上面が前記頂面と前記金属導電層の前記上面との間にあるので、前記作用電極を前記絶縁層の前記上面から突出させる工程と、
を含むことを特徴とするバイオセンシング素子の製造方法。 - 各前記作用電極は、0.125〜7.5であるアスペクト比を有することを特徴とする請求項1に記載の方法。
- 前記絶縁層を形成する工程は、
絶縁材料層を前記金属導電層及び前記作用電極の上に堆積する工程と、
前記絶縁材料層に対して平坦化プロセスを実行して、平坦化された絶縁材料層を形成する工程と、
前記平坦化された絶縁材料層をエッチングして、前記絶縁層を形成する工程と、
を含むことを特徴とする請求項1に記載の方法。 - 核酸、細胞、抗体、酵素、ポリペプチド、又はそれらの組み合わせである生物学的プローブを、前記作用電極に接続させる工程を更に備えることを特徴とする請求項1に記載の方法。
- 基板と、
前記基板の上に配置され、且つ上面を有する金属導電層と、
前記金属導電層の前記上面の上に配置され、それぞれ前記金属導電層の前記上面よりも高い頂面を含む複数の作用電極と、
前記金属導電層を覆い且つ前記作用電極を囲み、上面が前記頂面と前記金属導電層の前記上面との間にあるので、前記作用電極を前記絶縁層の前記上面から突出させる絶縁層と、
を含むことを特徴とするバイオセンシング素子。 - 各前記作用電極は、0.125〜7.5であるアスペクト比を有することを特徴とする請求項5に記載のバイオセンシング素子。
- 各前記作用電極は、前記上面の第2の高さから突出し、且つ前記第2の高さが0.01ミクロン〜0.5ミクロンであることを特徴とする請求項5に記載のバイオセンシング素子。
- 核酸、細胞、抗体、酵素、ポリペプチド、又はそれらの組み合わせである生物学的プローブを、前記作用電極に接続させる工程を更に備えることを特徴とする請求項5に記載のバイオセンシング素子。
- 標的分子を含むサンプルを提供する工程と、
請求項5に記載のバイオセンシング素子を提供する工程と、
生物学的プローブを前記作用電極に接続する工程と、
電圧を前記作用電極に印加して、前記作用電極を囲む電界を前記作用電極に発生させる工程と、
前記サンプルと前記生物学的プローブを接触させて、前記サンプルにおける前記標的分子と前記生物学的プローブとを結合させて、更に、前記作用電極に信号を発生させる工程と、
を備えることを特徴とする生体分子の検出方法。 - 前記電圧を前記作用電極に印加する工程は、電圧を前記作用電極に印加して、75%の前記電界の最大強度が前記絶縁層の前記上面から27%〜40%の前記第2の高さの箇所に現れるようにする工程を含むことを特徴とする請求項9に記載の方法。
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CN201710566313.7A CN109211994B (zh) | 2017-06-29 | 2017-07-12 | 生物感测元件及其制造方法以及生物分子检测方法 |
PCT/CN2018/095440 WO2019011296A1 (zh) | 2017-06-29 | 2018-07-12 | 生物感测元件及其制造方法以及生物分子检测方法 |
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EP3654024A1 (en) | 2020-05-20 |
KR20200023476A (ko) | 2020-03-04 |
JP6942250B2 (ja) | 2021-09-29 |
CN109211994B (zh) | 2021-08-17 |
TW201905988A (zh) | 2019-02-01 |
EP3654024A4 (en) | 2021-04-28 |
KR102346959B1 (ko) | 2022-01-03 |
TWI745392B (zh) | 2021-11-11 |
US11105765B2 (en) | 2021-08-31 |
CN109211994A (zh) | 2019-01-15 |
WO2019011296A1 (zh) | 2019-01-17 |
US20190004002A1 (en) | 2019-01-03 |
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