JP2020204562A

JP2020204562A - Moment sensor

Info

Publication number: JP2020204562A
Application number: JP2019112874A
Authority: JP
Inventors: 石倉　義之; Yoshiyuki Ishikura; 義之石倉; 田中　達夫; Tatsuo Tanaka; 達夫田中
Original assignee: Azbil Corp
Current assignee: Azbil Corp
Priority date: 2019-06-18
Filing date: 2019-06-18
Publication date: 2020-12-24

Abstract

To obtain directivity.SOLUTION: The moment sensor comprises: a sensing unit part; a pedestal 1 to which the sensing unit part is attached; a connecting part 6 having higher rigidity against deformation in a first direction than that against deformation in a second other direction, for connecting the pedestal 1 to a measurement object; a connecting part 7 adjacent to the connecting part 6 in the first direction and having higher rigidity against deformation in the first direction than that against deformation in the second other direction, for connecting the pedestal 1 to the measurement object; a connecting part 8 having higher rigidity against deformation in the first direction than that against deformation in the second other direction, for connecting the pedestal 1 to the measurement object; and a connecting part 9 adjacent to the connecting part 8 in the first direction and having higher rigidity against deformation in the first direction than that against deformation in the second other direction, for connecting the pedestal 1 to the measurement object. The connecting parts 6, 7 are connected to one side across an area of the pedestal 1 where the sensing unit part is attached, and the connecting parts 8, 9 are connected to the other side across an area of the pedestal 1 where the sensing unit part is attached.SELECTED DRAWING: Figure 1

Description

この発明は、モーメントを計測するモーメントセンサに関する。 The present invention relates to a moment sensor that measures a moment.

従来から、トルクを計測するトルクセンサが知られている（例えば特許文献１参照）。 Conventionally, a torque sensor for measuring torque has been known (see, for example, Patent Document 1).

特開２００２−１３９３９１号公報JP-A-2002-139391

従来のトルクセンサでは、例えば、３次元空間におけるＺ軸をトルク軸とした場合、Ｙ軸方向の力から創出されたトルクと、Ｘ軸方向の力から創出されたトルクは、同じトルクとして検知される。そのため、従来のトルクセンサでは、所望の方向の力成分（例えばＹ軸方向の力成分）から創出されるトルクのみを検知することは困難である。 In a conventional torque sensor, for example, when the Z axis in a three-dimensional space is used as the torque axis, the torque created from the force in the Y axis direction and the torque created from the force in the X axis direction are detected as the same torque. Toque. Therefore, it is difficult for a conventional torque sensor to detect only the torque generated from a force component in a desired direction (for example, a force component in the Y-axis direction).

この発明は、上記のような課題を解決するためになされたもので、指向性を有するモーメントセンサを提供することを目的としている。 The present invention has been made to solve the above problems, and an object of the present invention is to provide a moment sensor having directivity.

この発明に係るモーメントセンサは、センシング部、及び当該センシング部が取付けられた取付部材から成るセンシングユニット部と、センシングユニット部が取付けられた台座と、直交する３方向のうちの第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座を計測対象に連結する第１の連結部と、第１の方向で第１の連結部と隣り合い、当該第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座を計測対象に連結する第２の連結部と、第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座を計測対象に連結する第３の連結部と、第１の方向で第３の連結部と隣り合い、当該第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座を計測対象に連結する第４の連結部とを備え、第１の連結部及び第２の連結部は、台座のうちのセンシングユニット部が取付けられた領域を挟んで一方側に接続され、第３の連結部及び第４の連結部は、台座のうちのセンシングユニット部が取付けられた領域を挟んで他方側に接続されたことを特徴とする。 The moment sensor according to the present invention is in the first of three directions orthogonal to the sensing unit, the sensing unit consisting of the sensing unit and the mounting member to which the sensing unit is attached, and the pedestal to which the sensing unit is attached. The rigidity against deformation of is higher than the rigidity against deformation in the other two directions, and the first connecting portion that connects the pedestal to the measurement target and the first connecting portion in the first direction are adjacent to each other and the first direction. The rigidity to the deformation in the other two directions is higher than the rigidity to the deformation in the other two directions, and the rigidity for the second connecting portion connecting the pedestal to the measurement target and the deformation in the first direction is for the deformation in the other two directions. A third connecting portion that is higher than the rigidity and connects the pedestal to the measurement target and a third connecting portion that is adjacent to the third connecting portion in the first direction, and the rigidity with respect to the deformation in the first direction is the deformation in the other two directions. It is provided with a fourth connecting portion that is higher in rigidity than the pedestal and connects the pedestal to the measurement target, and the first connecting portion and the second connecting portion sandwich the region of the pedestal to which the sensing unit portion is attached. It is connected to the side, and the third connecting portion and the fourth connecting portion are connected to the other side with a region of the pedestal to which the sensing unit portion is attached.

この発明によれば、上記のように構成したので、指向性が得られる。 According to the present invention, since it is configured as described above, directivity can be obtained.

実施の形態１に係るモーメントセンサの構成例を示す斜視図である。It is a perspective view which shows the structural example of the moment sensor which concerns on Embodiment 1. FIG. 実施の形態１に係るモーメントセンサによる効果を説明するための斜視図である。It is a perspective view for demonstrating the effect by the moment sensor which concerns on Embodiment 1. FIG. 実施の形態１に係るモーメントセンサによる効果を説明するための斜視図である。It is a perspective view for demonstrating the effect by the moment sensor which concerns on Embodiment 1. FIG. 実施の形態１に係るモーメントセンサによる効果を説明するための斜視図である。It is a perspective view for demonstrating the effect by the moment sensor which concerns on Embodiment 1. FIG. 実施の形態１に係るモーメントセンサによる効果を説明するための斜視図である。It is a perspective view for demonstrating the effect by the moment sensor which concerns on Embodiment 1. FIG. 実施の形態１に係るモーメントセンサの別の構成例を示す斜視図である。It is a perspective view which shows another configuration example of the moment sensor which concerns on Embodiment 1. FIG. 実施の形態１に係るモーメントセンサの別の構成例を示す斜視図である。It is a perspective view which shows another configuration example of the moment sensor which concerns on Embodiment 1. FIG.

以下、この発明の実施の形態について図面を参照しながら詳細に説明する。
実施の形態１．
図１は実施の形態１に係るモーメントセンサの構成例を示す斜視図である。
モーメントセンサは、モーメントを計測する。モーメントセンサは、図１に示すように、台座１、板状部（第１の板状部）２、板状部（第２の板状部）３、センシング部４、連結棒５、連結部（第１の連結部）６、連結部（第２の連結部）７、連結部（第３の連結部）８及び連結部（第４の連結部）９を備えている。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
Embodiment 1.
FIG. 1 is a perspective view showing a configuration example of the moment sensor according to the first embodiment.
The moment sensor measures the moment. As shown in FIG. 1, the moment sensor includes a pedestal 1, a plate-shaped portion (first plate-shaped portion) 2, a plate-shaped portion (second plate-shaped portion) 3, a sensing portion 4, a connecting rod 5, and a connecting portion. It includes (first connecting portion) 6, connecting portion (second connecting portion) 7, connecting portion (third connecting portion) 8, and connecting portion (fourth connecting portion) 9.

台座１は、台座部（第１の台座部）１１、台座部（第２の台座部）１２及び台座部（第３の台座部）１３を有している。台座１は、例えばステンレスから構成される。 The pedestal 1 has a pedestal portion (first pedestal portion) 11, a pedestal portion (second pedestal portion) 12, and a pedestal portion (third pedestal portion) 13. The pedestal 1 is made of, for example, stainless steel.

台座部１１は、ブロック状の部材である。
台座部１２は、ブロック状の部材である。
台座部１３は、台座部１１が有する一側面と台座部１２が有する一側面とを接続する。 The pedestal portion 11 is a block-shaped member.
The pedestal portion 12 is a block-shaped member.
The pedestal portion 13 connects one side surface of the pedestal portion 11 and one side surface of the pedestal portion 12.

台座１は、例えば、１つのブロック状部材に矩形状の開口が１つ以上（図１では２つ）形成されることで、台座部１１、台座部１２及び台座部１３が構成される。図１に示す台座１では、台座部１３は３枚の薄板部材から構成される。 The pedestal 1 includes, for example, a pedestal portion 11, a pedestal portion 12, and a pedestal portion 13 by forming one or more rectangular openings (two in FIG. 1) in one block-shaped member. In the pedestal 1 shown in FIG. 1, the pedestal portion 13 is composed of three thin plate members.

板状部２は、幅広面が台座部１１が有する上記一側面を向き、一端が台座部１１が有する上面に接続されている。板状部２は、台座１に対し、センシング部４と熱物性（熱膨張係数）の近い材料から構成されている。例えば、センシング部４がシリコンから構成されたセンサ素子である場合には、板状部２は、鉄にニッケル及びコバルトを配合した合金等から構成される。
図１では、板状部２は、台座部１１が有する上面における、台座部１１が有する上記一側面付近に、配置されている。 The plate-shaped portion 2 has a wide surface facing the one side surface of the pedestal portion 11, and one end is connected to the upper surface of the pedestal portion 11. The plate-shaped portion 2 is made of a material having similar thermal properties (thermal expansion coefficient) to the sensing portion 4 with respect to the pedestal 1. For example, when the sensing portion 4 is a sensor element made of silicon, the plate-shaped portion 2 is made of an alloy or the like in which nickel and cobalt are mixed with iron.
In FIG. 1, the plate-shaped portion 2 is arranged on the upper surface of the pedestal portion 11 near the one side surface of the pedestal portion 11.

板状部３は、幅広面が台座部１２が有する上記一側面を向き、一端が台座部１２が有する上面に接続されている。板状部３は、台座１に対し、センシング部４と熱物性（熱膨張係数）の近い材料から構成されている。例えば、センシング部４がシリコンから構成されたセンサ素子である場合には、板状部３は、鉄にニッケル及びコバルトを配合した合金等から構成される。
図１では、板状部３は、台座部１２が有する上面における、台座部１２が有する上記一側面付近に、配置されている。 The plate-shaped portion 3 has a wide surface facing the one side surface of the pedestal portion 12, and one end is connected to the upper surface of the pedestal portion 12. The plate-shaped portion 3 is made of a material having similar thermal properties (thermal expansion coefficient) to the sensing portion 4 with respect to the pedestal 1. For example, when the sensing portion 4 is a sensor element made of silicon, the plate-shaped portion 3 is made of an alloy or the like in which nickel and cobalt are mixed with iron.
In FIG. 1, the plate-shaped portion 3 is arranged on the upper surface of the pedestal portion 12 near the one side surface of the pedestal portion 12.

センシング部４は、板状部２が有する２つの幅広面及び板状部３が有する２つの幅広面のうちの少なくとも１つの面に取付けられている。図１では、センシング部４は、板状部２が有する外側の幅広面に搭載されている。センシング部４としては、例えば、センサ素子、歪ゲージ、又は成膜された抵抗ゲージが挙げられる。図１では、センシング部４としてセンサ素子が用いられている。 The sensing portion 4 is attached to at least one of the two wide surfaces of the plate-shaped portion 2 and the two wide surfaces of the plate-shaped portion 3. In FIG. 1, the sensing portion 4 is mounted on the outer wide surface of the plate-shaped portion 2. Examples of the sensing unit 4 include a sensor element, a strain gauge, and a film-formed resistance gauge. In FIG. 1, a sensor element is used as the sensing unit 4.

連結棒５は、一端が板状部２の他端側に接続され、他端が板状部３の他端側に接続されている。連結棒５は、板状部２及び板状部３に対し、台座１と熱物性（熱膨張係数）の近い材料から構成されている。連結棒５は、例えば、台座１と同一材料から構成される。 One end of the connecting rod 5 is connected to the other end side of the plate-shaped portion 2, and the other end is connected to the other end side of the plate-shaped portion 3. The connecting rod 5 is made of a material having similar thermal properties (thermal expansion coefficient) to the pedestal 1 with respect to the plate-shaped portion 2 and the plate-shaped portion 3. The connecting rod 5 is made of the same material as the pedestal 1, for example.

なお、板状部（第１の板状部）２、板状部（第２の板状部）３及び連結棒５は、センシング部４が取付けられた取付部材を構成する。
また、センシング部４及び取付部材は、センシングユニット部を構成する。 The plate-shaped portion (first plate-shaped portion) 2, the plate-shaped portion (second plate-shaped portion) 3, and the connecting rod 5 constitute a mounting member to which the sensing portion 4 is mounted.
Further, the sensing unit 4 and the mounting member constitute a sensing unit unit.

連結部６〜９は、計測対象である物体が有する設置面に台座１をネジ等により連結するための部位である。図１では、連結部６〜９は台座１と一体に構成されているが、これに限らず、別体に構成されていてもよい。 The connecting portions 6 to 9 are portions for connecting the pedestal 1 to the installation surface of the object to be measured by screws or the like. In FIG. 1, the connecting portions 6 to 9 are integrally formed with the pedestal 1, but the present invention is not limited to this, and the connecting portions 6 to 9 may be formed separately.

連結部６は、幅方向が厚み方向に対して広い板状部材が折り曲げられることで構成されている。連結部６は、台座１が有する一対の側面のうちの一方側に、幅方向が当該側面に沿った向きに接続されている。連結部６は、付け根部６１、先端部６２及び継手部６３を有している。 The connecting portion 6 is formed by bending a plate-shaped member whose width direction is wider than the thickness direction. The connecting portion 6 is connected to one side of the pair of side surfaces of the pedestal 1 so that the width direction is along the side surface. The connecting portion 6 has a base portion 61, a tip portion 62, and a joint portion 63.

付け根部６１は、一端が台座１に接続されている。図１では、付け根部６１は、一端が、台座１が有する下面における一端側に接続されている。
先端部６２は、台座１が有する下面に平行（略平行の意味を含む）であり、計測対象である物体が有する設置面に設置される部位である。先端部６２には、ネジ穴６４が設けられている。
継手部６３は、付け根部６１と先端部６２とを接続する。すなわち、継手部６３は、一端が付け根部６１の他端に接続され、他端が先端部６２の一端に接続されている。図１では、継手部６３は、双方の側面に突出した波状に折り曲げられている。 One end of the base portion 61 is connected to the pedestal 1. In FIG. 1, one end of the base portion 61 is connected to one end side on the lower surface of the pedestal 1.
The tip portion 62 is parallel to the lower surface of the pedestal 1 (including the meaning of substantially parallel), and is a portion to be installed on the installation surface of the object to be measured. The tip portion 62 is provided with a screw hole 64.
The joint portion 63 connects the base portion 61 and the tip portion 62. That is, one end of the joint portion 63 is connected to the other end of the base portion 61, and the other end is connected to one end of the tip portion 62. In FIG. 1, the joint portion 63 is bent in a wavy shape protruding from both side surfaces.

連結部７は、幅方向が厚み方向に対して広い板状部材が折り曲げられることで構成されている。連結部７は、台座１が有する一対の側面のうちの一方側に、幅方向が当該側面に沿った向きに、連結部６と並んで接続されている。連結部７は、付け根部７１、先端部７２及び継手部７３を有している。 The connecting portion 7 is formed by bending a plate-shaped member whose width direction is wider than the thickness direction. The connecting portion 7 is connected to one side of the pair of side surfaces of the pedestal 1 in a width direction along the side surface, side by side with the connecting portion 6. The connecting portion 7 has a base portion 71, a tip portion 72, and a joint portion 73.

付け根部７１は、一端が台座１に接続されている。図１では、付け根部７１は、一端が、台座１が有する下面における一端側に、付け根部６１と並んで接続されている。
先端部７２は、台座１が有する下面に平行（略平行の意味を含む）であり、計測対象である物体が有する設置面に設置される部位である。先端部７２には、ネジ穴７４が設けられている。
継手部７３は、付け根部７１と先端部７２とを接続する。すなわち、継手部７３は、一端が付け根部７１の他端に接続され、他端が先端部７２の一端に接続されている。図１では、継手部７３は、双方の側面に突出した波状に折り曲げられている。 One end of the base portion 71 is connected to the pedestal 1. In FIG. 1, one end of the base portion 71 is connected to one end side of the lower surface of the pedestal 1 side by side with the base portion 61.
The tip portion 72 is parallel to the lower surface of the pedestal 1 (including the meaning of substantially parallel), and is a portion to be installed on the installation surface of the object to be measured. The tip portion 72 is provided with a screw hole 74.
The joint portion 73 connects the base portion 71 and the tip portion 72. That is, one end of the joint portion 73 is connected to the other end of the base portion 71, and the other end is connected to one end of the tip portion 72. In FIG. 1, the joint portion 73 is bent in a wavy shape protruding from both side surfaces.

連結部８は、幅方向が厚み方向に対して広い板状部材が折り曲げられることで構成されている。連結部８は、台座１が有する一対の側面のうちの他方側に、幅方向が当該側面に沿った向きに接続されている。連結部８は、付け根部８１、先端部８２及び継手部８３を有している。 The connecting portion 8 is formed by bending a plate-shaped member whose width direction is wider than the thickness direction. The connecting portion 8 is connected to the other side of the pair of side surfaces of the pedestal 1 so that the width direction is along the side surface. The connecting portion 8 has a base portion 81, a tip portion 82, and a joint portion 83.

付け根部８１は、一端が台座１に接続されている。図１では、付け根部８１は、一端が、台座１が有する下面における他端側に接続されている。
先端部８２は、台座１が有する下面に平行（略平行の意味を含む）であり、計測対象である物体が有する設置面に設置される部位である。先端部８２には、ネジ穴８４が設けられている。
継手部８３は、付け根部８１と先端部８２とを接続する。すなわち、継手部８３は、一端が付け根部８１の他端に接続され、他端が先端部８２の一端に接続されている。図１では、継手部８３は、双方の側面に突出した波状に折り曲げられている。 One end of the base portion 81 is connected to the pedestal 1. In FIG. 1, one end of the base portion 81 is connected to the other end side of the lower surface of the pedestal 1.
The tip portion 82 is parallel to the lower surface of the pedestal 1 (including the meaning of substantially parallel), and is a portion to be installed on the installation surface of the object to be measured. The tip portion 82 is provided with a screw hole 84.
The joint portion 83 connects the base portion 81 and the tip portion 82. That is, one end of the joint portion 83 is connected to the other end of the base portion 81, and the other end is connected to one end of the tip portion 82. In FIG. 1, the joint portion 83 is bent in a wavy shape protruding from both side surfaces.

連結部９は、幅方向が厚み方向に対して広い板状部材が折り曲げられることで構成されている。連結部９は、台座１が有する一対の側面のうちの他方側に、幅方向が当該側面に沿った向きに、連結部８と並んで接続されている。連結部９は、付け根部９１（不図示）、先端部９２及び継手部９３を有している。 The connecting portion 9 is formed by bending a plate-shaped member whose width direction is wider than the thickness direction. The connecting portion 9 is connected to the other side of the pair of side surfaces of the pedestal 1 in a width direction along the side surface, side by side with the connecting portion 8. The connecting portion 9 has a base portion 91 (not shown), a tip portion 92, and a joint portion 93.

付け根部９１は、一端が台座１に接続されている。図１では、付け根部９１は、一端が、台座１が有する下面における他端側に、付け根部８１と並んで接続されている。
先端部９２は、台座１が有する下面に平行（略平行の意味を含む）であり、計測対象である物体が有する設置面に設置される部位である。先端部９２には、ネジ穴９４（不図示）が設けられている。
継手部９３は、付け根部９１と先端部９２とを接続する。すなわち、継手部９３は、一端が付け根部９１の他端に接続され、他端が先端部９２の一端に接続されている。図１では、継手部９３は、双方の側面に突出した波状に折り曲げられている。 One end of the base portion 91 is connected to the pedestal 1. In FIG. 1, one end of the base portion 91 is connected to the other end side of the lower surface of the pedestal 1 along with the base portion 81.
The tip portion 92 is parallel to the lower surface of the pedestal 1 (including the meaning of substantially parallel), and is a portion to be installed on the installation surface of the object to be measured. The tip portion 92 is provided with a screw hole 94 (not shown).
The joint portion 93 connects the base portion 91 and the tip portion 92. That is, one end of the joint portion 93 is connected to the other end of the base portion 91, and the other end is connected to one end of the tip portion 92. In FIG. 1, the joint portion 93 is bent in a wavy shape protruding from both side surfaces.

図１に示すモーメントセンサでは、台座部１１と台座部１２を互い違いに変位させる力が加えられると、台座部１１及び台座部１２は変位するが連結棒５は変位しないため、センシング部４にせん断が生じる。よって、センシング部４は上記力により生じるモーメントを計測可能である。 In the moment sensor shown in FIG. 1, when a force that causes the pedestal portion 11 and the pedestal portion 12 to be displaced alternately is applied, the pedestal portion 11 and the pedestal portion 12 are displaced but the connecting rod 5 is not displaced, so that the sensing portion 4 is sheared. Occurs. Therefore, the sensing unit 4 can measure the moment generated by the above force.

次に、図１に示すモーメントセンサによる効果について説明する。
上述したように、従来のトルクセンサでは、所望の方向の力成分（例えばＹ軸方向の力成分）から創出されるトルクのみを検知することは困難である。
これに対し、実施の形態１に係るモーメントセンサでは、所望の方向に加えられた力に対しては高い剛性を有し、他の方向に加えられた力に対しては柔軟性を有する連結部６〜９が設けられている。これにより、実施の形態１に係るモーメントセンサは指向性が得られる。 Next, the effect of the moment sensor shown in FIG. 1 will be described.
As described above, it is difficult for a conventional torque sensor to detect only the torque generated from a force component in a desired direction (for example, a force component in the Y-axis direction).
On the other hand, in the moment sensor according to the first embodiment, the connecting portion has high rigidity against a force applied in a desired direction and flexibility against a force applied in another direction. 6 to 9 are provided. As a result, the moment sensor according to the first embodiment has directivity.

例えば図２に示すように、連結部６に対して設置面からＸ軸方向の力が加えられた場合、連結部６の先端部６２はＸ軸方向に移動させられる。この際、連結部６の継手部６３が初期状態よりも設置面に平行な方向に倒れることになり、連結部６の付け根部６１のＸ軸方向への移動は先端部６２よりも大幅に抑制される。 For example, as shown in FIG. 2, when a force is applied to the connecting portion 6 in the X-axis direction from the installation surface, the tip portion 62 of the connecting portion 6 is moved in the X-axis direction. At this time, the joint portion 63 of the connecting portion 6 is tilted in a direction parallel to the installation surface from the initial state, and the movement of the base portion 61 of the connecting portion 6 in the X-axis direction is significantly suppressed as compared with the tip portion 62. Will be done.

また、図３，４に示すように、連結部６に対して設置面からＺ軸方向の力が加えられた場合、連結部６の先端部６２はＺ軸方向に移動させられる。この際、連結部６の継手部６３が伸縮することになり、連結部６の付け根部６１のＺ軸方向への移動は先端部６２よりも大幅に抑制される。 Further, as shown in FIGS. 3 and 4, when a force is applied to the connecting portion 6 in the Z-axis direction from the installation surface, the tip portion 62 of the connecting portion 6 is moved in the Z-axis direction. At this time, the joint portion 63 of the connecting portion 6 expands and contracts, and the movement of the base portion 61 of the connecting portion 6 in the Z-axis direction is significantly suppressed as compared with the tip portion 62.

また、図５に示すように、連結部６に対して設置面からＹ軸方向の力が加えられた場合、台座１は連結棒５に対して回転しようとするため、付け根部６１のＹ軸方向への移動は、先端部６２のＹ軸方向への移動より軽減されるものの、他の方向の力が加えられた場合よりは効率的に付け根部６１が変位される。 Further, as shown in FIG. 5, when a force is applied to the connecting portion 6 in the Y-axis direction from the installation surface, the pedestal 1 tends to rotate with respect to the connecting rod 5, so that the Y-axis of the base portion 61 is formed. Although the movement in the direction is reduced as compared with the movement of the tip portion 62 in the Y-axis direction, the base portion 61 is displaced more efficiently than when a force in another direction is applied.

連結部７〜９についても連結部６と同様である。 The same applies to the connecting portions 7 to 9 as in the connecting portion 6.

すなわち、連結部６及び連結部７にＹ軸方向における一方向の力が加えられ、連結部８及び連結部９にＹ軸方向における他方向の力が加えられることによってモーメントが加えられると、他の方向の力が加えられた場合に対し、効率的にセンシング部４に変位が伝達される。すなわち、実施の形態１に係るモーメントセンサは、指向性を持ったモーメントセンサとなり得る。 That is, when a force is applied to the connecting portion 6 and the connecting portion 7 in one direction in the Y-axis direction and a force is applied to the connecting portion 8 and the connecting portion 9 in the other direction in the Y-axis direction, a moment is applied. Displacement is efficiently transmitted to the sensing unit 4 when a force in the direction of is applied. That is, the moment sensor according to the first embodiment can be a moment sensor having directivity.

また、実施の形態１に係るモーメントセンサでは、板状部２及び板状部３は、連結棒５側が拘束されておらず、長手方向に自由に伸縮可能に構成されている。また、板状部２及び板状部３は、台座１に対し、センシング部４と熱物性の近い材料から構成されている。これにより、実施の形態１に係るモーメントセンサは、従来構成に対して熱応力が抑制され、すなわち、温度変化によりセンシング部４に不要な歪が生じることを軽減可能となる。
また、実施の形態１に係るモーメントセンサは、連結棒５が、板状部２及び板状部３に対し、台座１と熱物性の近い材料から構成されている。これにより、実施の形態１に係るモーメントセンサは、温度変化により板状部２及び板状部３が曲げられる影響も軽減可能となる。 Further, in the moment sensor according to the first embodiment, the plate-shaped portion 2 and the plate-shaped portion 3 are configured so that the connecting rod 5 side is not restrained and can be freely expanded and contracted in the longitudinal direction. Further, the plate-shaped portion 2 and the plate-shaped portion 3 are made of a material having similar thermal properties to the sensing portion 4 with respect to the pedestal 1. As a result, the moment sensor according to the first embodiment can suppress the thermal stress as compared with the conventional configuration, that is, it is possible to reduce the occurrence of unnecessary distortion in the sensing unit 4 due to the temperature change.
Further, in the moment sensor according to the first embodiment, the connecting rod 5 is made of a material having similar thermal properties to the pedestal 1 with respect to the plate-shaped portion 2 and the plate-shaped portion 3. As a result, the moment sensor according to the first embodiment can reduce the influence of bending of the plate-shaped portion 2 and the plate-shaped portion 3 due to the temperature change.

なお図１では、連結部６〜９が台座１が有する下面に取付けられた場合を示した。しかしながら、これに限らず、連結部６〜９は、台座１が有する他の面（側面）に取付けられていてもよい。 Note that FIG. 1 shows a case where the connecting portions 6 to 9 are attached to the lower surface of the pedestal 1. However, the present invention is not limited to this, and the connecting portions 6 to 9 may be attached to another surface (side surface) of the pedestal 1.

また図１では、継手部６３〜９３が双方の側面に突出した波状に折り曲げられている。しかしながら、これに限らず、継手部６３〜９３は、側面方向及び上下方向に対する力を吸収可能な形状であればよく、例えば、厚み方向に突出した部位が波状以外の形状に構成されていてもよいし、板状のままでもよい。 Further, in FIG. 1, the joint portions 63 to 93 are bent in a wavy shape protruding from both side surfaces. However, the present invention is not limited to this, and the joint portions 63 to 93 may have a shape capable of absorbing forces in the side surface direction and the vertical direction, and for example, even if the portion protruding in the thickness direction is formed in a shape other than wavy. It may be in the form of a plate.

また、連結部６〜９の構成は、図１に示す構成に限らず、直交する３方向（Ｘ軸方向、Ｙ軸方向及びＺ軸方向）のうちの第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座１を計測対象である物体に連結する構成であればよい。
例えば図６では、図１に示す連結部６に対し、付け根部６１及び継手部６３が円筒部６５に変更されている。円筒部６５は、軸心方向が上記第１の方向を向き、一つの辺が台座１に接続され、当該一つの辺に対向する辺が先端部６２に接続されている。連結部７〜９についても同様である。
また、図６に示す連結部６に対し、円筒部６５が角筒部に変更されてもよい。この場合、角筒部は、軸心方向が上記第１の方向を向き、一つの角が台座１に接続され、当該一つの角に対向する角が先端部６２に接続される。連結部７〜９についても同様である。 Further, the configuration of the connecting portions 6 to 9 is not limited to the configuration shown in FIG. 1, and the rigidity against deformation in the first direction among the three orthogonal directions (X-axis direction, Y-axis direction and Z-axis direction) is high. The structure may be such that the rigidity is higher than the rigidity against deformation in the other two directions, and the pedestal 1 is connected to the object to be measured.
For example, in FIG. 6, the base portion 61 and the joint portion 63 are changed to the cylindrical portion 65 with respect to the connecting portion 6 shown in FIG. In the cylindrical portion 65, the axial direction is oriented in the first direction, one side is connected to the pedestal 1, and the side facing the one side is connected to the tip portion 62. The same applies to the connecting portions 7 to 9.
Further, the cylindrical portion 65 may be changed to a square tubular portion with respect to the connecting portion 6 shown in FIG. In this case, the axial center direction of the square tube portion faces the first direction, one corner is connected to the pedestal 1, and the angle facing the one corner is connected to the tip portion 62. The same applies to the connecting portions 7 to 9.

また、連結部６〜９は、第１の方向への変形に対する剛性が他の２方向への変形に対する剛性に対して１０倍以上高いことが望ましい。 Further, it is desirable that the connecting portions 6 to 9 have a rigidity of 10 times or more with respect to deformation in the first direction and 10 times or more with respect to the rigidity with respect to deformation in the other two directions.

また図１では、モーメントセンサが板状部２，３を有する場合を示した。しかしながら、これに限らず、モーメントセンサは、板状部２，３に代えて、２つの四角柱部材である棒部（第１の棒部及び第２の棒部）を有していてもよい。
この場合、一方の棒部は、一側面が台座部１１が有する上記一側面を向き、一端が台座部１１が有する上面に接続される。また、他方の棒部は、一側面が台座部１２が有する上記一側面を向き、一端が台座部１２が有する上面に接続される。２つの棒部の材質については板状部２，３と同様である。また、センシング部４は、一方の棒部が有する４つの側面及び他方の棒部が有する４つの側面のうちの少なくとも１つの面に取付けられる。 Further, FIG. 1 shows a case where the moment sensor has plate-shaped portions 2 and 3. However, the present invention is not limited to this, and the moment sensor may have two rod portions (first rod portion and second rod portion) which are square pillar members, instead of the plate-shaped portions 2 and 3. ..
In this case, one side of the rod portion faces the one side surface of the pedestal portion 11, and one end thereof is connected to the upper surface of the pedestal portion 11. Further, one side surface of the other rod portion faces the one side surface of the pedestal portion 12, and one end is connected to the upper surface of the pedestal portion 12. The materials of the two rod portions are the same as those of the plate-shaped portions 2 and 3. Further, the sensing unit 4 is attached to at least one surface of the four side surfaces of one rod portion and the four side surfaces of the other rod portion.

また図１では、モーメントセンサが、温度変化の際にセンシング部４に不要な歪が生じることを軽減可能な構成とされた場合を示した。しかしながら、これに限らず、連結部６〜９以外の構成（台座１から上の構成）は、センシングユニット部と、センシングユニット部が取付けられた台座１とを備え、連結部６，７が台座１のうちのセンシングユニット部が取付けられた領域を挟んで一方側に接続され、連結部８，９が台座１のうちのセンシングユニット部が取付けられた領域を挟んで他方側に接続された構成であればよい。 Further, FIG. 1 shows a case where the moment sensor is configured to be able to reduce the occurrence of unnecessary distortion in the sensing unit 4 when the temperature changes. However, not limited to this, the configuration other than the connecting portions 6 to 9 (the configuration above the pedestal 1) includes a sensing unit portion and a pedestal 1 to which the sensing unit portion is attached, and the connecting portions 6 and 7 are pedestals. A configuration in which the sensing unit portion of 1 is connected to one side across the area where the sensing unit portion is attached, and the connecting portions 8 and 9 are connected to the other side across the area where the sensing unit portion of the pedestal 1 is attached. It should be.

例えば図７に示すモーメントセンサは、連結部６〜９以外の構成として、台座１、板状部２ｂ、センシング部４を備えている。
台座１は、図１に示す台座１と同様である。
板状部２ｂは、台座部１１と台座部１２とを橋渡しするように接続されている。
センシング部４は、構成自体は図１に示すセンシング部４と同様であり、板状部２ｂ上に取付けられている。
なお、板状部２ｂは、センシング部４が取付けられた取付部材を構成する。 For example, the moment sensor shown in FIG. 7 includes a pedestal 1, a plate-shaped portion 2b, and a sensing portion 4 as configurations other than the connecting portions 6 to 9.
The pedestal 1 is the same as the pedestal 1 shown in FIG.
The plate-shaped portion 2b is connected so as to bridge the pedestal portion 11 and the pedestal portion 12.
The sensing unit 4 has the same configuration as the sensing unit 4 shown in FIG. 1, and is mounted on the plate-shaped portion 2b.
The plate-shaped portion 2b constitutes a mounting member to which the sensing portion 4 is mounted.

また図１，６，７では、台座部１３が薄板部材から構成された場合を示した。しかしながら、これに限らず、台座部１３は、第１の方向への変形に対する剛性が台座部１１，１２の第１の方向への変形に対する剛性に対して低い構成、又は、第１の方向への変形に対する剛性が他の２方向への変形に対する剛性よりも低い構成であればよい。 Further, FIGS. 1, 6 and 7 show a case where the pedestal portion 13 is composed of a thin plate member. However, not limited to this, the pedestal portion 13 has a configuration in which the rigidity with respect to the deformation in the first direction is lower than the rigidity with respect to the deformation of the pedestals 11 and 12 in the first direction, or toward the first direction. It suffices if the rigidity of the above is lower than the rigidity of the other two directions.

また図１，６，７では、台座１が台座部１１〜１３から構成された場合を示した。しかしながら、これに限らず、台座１は台座部１１，１２から構成され、台座部１１の一側面と台座部１２の一側面とがセンシングユニット部により接続されていてもよい。この場合、センシングユニット部は、第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より低い。 Further, FIGS. 1, 6 and 7 show a case where the pedestal 1 is composed of the pedestal portions 11 to 13. However, the present invention is not limited to this, and the pedestal 1 may be composed of the pedestals 11 and 12, and one side surface of the pedestal portion 11 and one side surface of the pedestal portion 12 may be connected by a sensing unit portion. In this case, the sensing unit unit has a lower rigidity for deformation in the first direction than the rigidity for deformation in the other two directions.

以上のように、この実施の形態１に係るモーメントセンサは、センシング部４、及び当該センシング部４が取付けられた取付部材から成るセンシングユニット部と、センシングユニット部が取付けられた台座１と、直交する３方向のうちの第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座１を計測対象に連結する連結部６と、第１の方向で連結部６と隣り合い、当該第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座１を計測対象に連結する連結部７と、第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座１を計測対象に連結する連結部８と、第１の方向で連結部８と隣り合い、当該第１の方向への変形に対する剛性が他の２方向への変形に対する剛性より高く、台座１を計測対象に連結する連結部９とを備え、連結部６及び連結部７は、台座１のうちのセンシングユニット部が取付けられた領域を挟んで一方側に接続され、連結部８及び連結部９は、台座１のうちのセンシングユニット部が取付けられた領域を挟んで他方側に接続された。これにより、実施の形態１に係るモーメントセンサは、指向性が得られる。 As described above, the moment sensor according to the first embodiment is orthogonal to the sensing unit 4 and the sensing unit composed of the mounting member to which the sensing unit 4 is attached, and the pedestal 1 to which the sensing unit is attached. The rigidity for deformation in the first direction out of the three directions is higher than the rigidity for deformation in the other two directions, and the connecting portion 6 for connecting the pedestal 1 to the measurement target and the connecting portion 6 in the first direction Adjacent to each other, the rigidity against deformation in the first direction is higher than the rigidity against deformation in the other two directions, and the connecting portion 7 connecting the pedestal 1 to the measurement target and the rigidity against deformation in the first direction are other. The rigidity for deformation in two directions is higher than that of the connecting portion 8 that connects the pedestal 1 to the measurement target, and the other 2 is adjacent to the connecting portion 8 in the first direction and has rigidity for deformation in the first direction. It is provided with a connecting portion 9 that is higher in rigidity against deformation in the direction and connects the pedestal 1 to the measurement target, and the connecting portion 6 and the connecting portion 7 sandwich the region of the pedestal 1 to which the sensing unit portion is attached. It was connected to the side, and the connecting portion 8 and the connecting portion 9 were connected to the other side with the region of the pedestal 1 to which the sensing unit portion was attached. As a result, the moment sensor according to the first embodiment has directivity.

なお、本願発明はその発明の範囲内において、実施の形態の任意の構成要素の変形、若しくは実施の形態の任意の構成要素の省略が可能である。 In the present invention, within the scope of the invention, it is possible to modify any component of the embodiment or omit any component of the embodiment.

１台座
２板状部（第１の板状部）
３板状部（第２の板状部）
４センシング部
５連結棒
６連結部（第１の連結部）
７連結部（第２の連結部）
８連結部（第３の連結部）
９連結部（第４の連結部）
１１台座
１２台座
１３接続部
６１付け根部
６２先端部
６３継手部
６４ネジ穴
７１付け根部
７２先端部
７３継手部
７４ネジ穴
８１付け根部
８２先端部
８３継手部
８４ネジ穴
９１付け根部
９２先端部
９３継手部
９４ネジ穴 1 Pedestal 2 Plate-shaped part (1st plate-shaped part)
3 Plate-shaped part (second plate-shaped part)
4 Sensing unit 5 Connecting rod 6 Connecting unit (first connecting unit)
7 Connecting part (second connecting part)
8 Connecting part (third connecting part)
9 Connecting part (4th connecting part)
11 Pedestal 12 Pedestal 13 Connection part 61 Base part 62 Tip part 63 Joint part 64 Screw hole 71 Base part 72 Tip part 73 Joint part 74 Screw hole 81 Base part 82 Tip part 83 Joint part 84 Screw hole 91 Base part 92 Tip part 93 Fitting 94 screw hole

Claims

A sensing unit, a sensing unit consisting of a sensing unit and a mounting member to which the sensing unit is attached,
The pedestal to which the sensing unit is attached and
The rigidity for deformation in the first direction out of the three orthogonal directions is higher than the rigidity for deformation in the other two directions, and the first connecting portion that connects the pedestal to the measurement target
A second unit that is adjacent to the first connecting portion in the first direction, has a higher rigidity for deformation in the first direction than the rigidity for deformation in the other two directions, and connects the pedestal to the measurement target. Connection part and
The rigidity against the deformation in the first direction is higher than the rigidity against the deformation in the other two directions, and the third connecting portion that connects the pedestal to the measurement target and the third connecting portion.
A fourth that is adjacent to the third connecting portion in the first direction, has a higher rigidity for deformation in the first direction than the rigidity for deformation in the other two directions, and connects the pedestal to the measurement target. Equipped with a connecting part of
The first connecting portion and the second connecting portion are connected to one side of the pedestal with a region to which the sensing unit portion is attached.
A moment sensor characterized in that the third connecting portion and the fourth connecting portion are connected to the other side of the pedestal with a region to which the sensing unit portion is attached.

The first connecting portion, the second connecting portion, the third connecting portion, and the fourth connecting portion are each
At the base where one end is connected to the pedestal,
The tip part parallel to the lower surface of the pedestal and
The moment sensor according to claim 1, further comprising a joint portion connecting the base portion and the tip portion.

The moment sensor according to claim 2, wherein the joint portion is made of a plate-shaped member whose width direction is wider than the thickness direction, and the width direction is directed to the first direction.

The moment sensor according to claim 3, wherein the joint portion has a portion protruding in the thickness direction.

The moment sensor according to claim 4, wherein the portion has a wavy shape protruding in both directions in the thickness direction.

The first connecting portion, the second connecting portion, the third connecting portion, and the fourth connecting portion are each rigid with respect to deformation in the first direction and rigidity with respect to deformation in the other two directions. The moment sensor according to any one of claims 1 to 5, which is 10 times or more higher than the above.

The pedestal has a first pedestal portion, a second pedestal portion, and a third pedestal portion connecting one side surface of the first pedestal portion and one side surface of the second pedestal portion. And
The first pedestal portion is connected to the first connecting portion, the second connecting portion, and one end of the sensing unit portion.
The second pedestal portion is connected to the third connecting portion, the fourth connecting portion, and the other end of the sensing unit portion.
The third pedestal portion is characterized in that its rigidity with respect to deformation in the first direction is lower than the rigidity of the first pedestal portion and the second pedestal portion with respect to deformation in the first direction. The moment sensor according to any one of claims 1 to 6.

The pedestal has a first pedestal portion, a second pedestal portion, and a third pedestal portion connecting one side surface of the first pedestal portion and one side surface of the second pedestal portion. And
The first pedestal portion is connected to the first connecting portion, the second connecting portion, and one end of the sensing unit portion.
The second pedestal portion is connected to the third connecting portion, the fourth connecting portion, and the other end of the sensing unit portion.
The third pedestal portion according to any one of claims 1 to 7, wherein the rigidity of the third pedestal portion with respect to the deformation in the first direction is lower than the rigidity with respect to the deformation in the other two directions. Moment sensor.

The moment sensor according to claim 7 or 8, wherein the third pedestal portion has a total thickness in the first direction thinner than that of the first pedestal portion and the second pedestal portion. ..

The sensing unit unit
A first plate-shaped portion having a wide surface facing the one side surface of the first pedestal portion and one end connected to the upper surface of the first pedestal portion.
A second plate-shaped portion having a wide surface facing the one side surface of the second pedestal portion and one end connected to the upper surface of the second pedestal portion.
A connecting rod having one end connected to the other end side of the first plate-shaped portion and the other end connected to the other end side of the second plate-shaped portion is provided.
The sensing portion is attached to at least one of the two wide surfaces of the first plate-shaped portion and the two wide surfaces of the second plate-shaped portion.
The first plate-shaped portion and the second plate-shaped portion are made of a material having similar thermal properties to the sensing portion with respect to the pedestal.
The connecting rod according to any one of claims 1 to 9, wherein the connecting rod is made of a material having similar thermophysical properties to the pedestal with respect to the first plate-shaped portion and the second plate-shaped portion. The moment sensor according to any one item.

The sensing unit unit
A first rod portion which is a quadrangular prism member having one side surface facing the one side surface of the first pedestal portion and one end connected to the upper surface of the first pedestal portion.
A second rod portion which is a quadrangular prism member having one side surface facing the one side surface of the second pedestal portion and one end connected to the upper surface of the second pedestal portion.
A connecting rod having one end connected to the other end side of the first rod portion and the other end connected to the other end side of the second rod portion is provided.
The sensing portion is attached to at least one of the four side surfaces of the first rod portion and the four side surfaces of the second rod portion.
The first rod portion and the second rod portion are made of a material having similar thermal properties to the sensing portion with respect to the pedestal.
Any one of claims 1 to 9, wherein the connecting rod is made of a material having similar thermophysical properties to the pedestal with respect to the first rod portion and the second rod portion. The moment sensor according to item 1.

The sensing unit is a sensor element made of silicon.
The moment sensor according to claim 10, wherein the first plate-shaped portion and the second plate-shaped portion are made of an alloy in which nickel and cobalt are mixed with iron.

The sensing unit is a sensor element made of silicon.
The moment sensor according to claim 11, wherein the first rod portion and the second rod portion are made of an alloy in which nickel and cobalt are mixed with iron.

The pedestal has a first pedestal portion and the second pedestal portion.
The first pedestal portion is connected to the first connecting portion and the second connecting portion.
The third connecting portion and the fourth connecting portion are connected to the second pedestal portion.
One end of the sensing unit is connected to one side surface of the first pedestal portion, and the other end is connected to one side surface of the second pedestal portion.
The moment according to any one of claims 1 to 6, wherein the sensing unit unit has a lower rigidity with respect to deformation in the first direction than the rigidity with respect to deformation in the other two directions. Sensor.