JP2020203373A - Non-contact retaining device - Google Patents

Abstract

To provide a non-contact retaining device which can retain even an article having a ring form securely.SOLUTION: A non-contact retaining device 10 includes: a pad part 12 which faces an article XA1 having a ring form and configured to be able to jet a pressure fluid in a plane direction of the article; and auxiliary retaining means 13 which restricts movement of the article XA1 in a state where the auxiliary retaining means 13 does not contact with the article XA1. The non-contact retaining device 10 retains the article XA1 in a non-contact state by a negative pressure.SELECTED DRAWING: Figure 1

Description

The present invention relates to a non-contact holding device that holds and conveys an article in a non-contact manner by a negative pressure.

Conventionally, there are known holders that generate a negative pressure by ejecting a fluid to hold an object in a non-contact manner (see, for example, Patent Document 1).

Such holders are used for holding or transporting thin and brittle articles such as glass plates and semiconductor wafers.

By the way, even in the packaging line for foods and the like, the transportation efficiency is improved by using robots and the like. However, for some products, such as Baumkuchen and donuts, which have a soft surface and a coating on the surface, supply to packaging machines, etc. is relied on manually to prevent scratches. In many cases.

Further, for example, a chuck may be attached to a robot arm to hold an article such as Baumkuchen, but there is a problem that the processing speed cannot be improved in order to prevent the article from collapsing or being scratched.

Therefore, a device for holding soft and brittle foods and the like by using a holder that holds articles in a non-contact manner by negative pressure has been studied.

FIG. 10 is a schematic view showing a state of holding and transporting the article XA1 by the conventional non-contact holding device 100, and is a cross-sectional view of the article XA1 in the thickness direction. Further, the article XA1 in this case is a substantially annular and soft food such as Baumkuchen and donut.

As shown in FIG. 10A, the non-contact holding device 100 is attached to, for example, a robot arm (not shown) and has a substantially circular pad portion 101. The pad portion 101 has, for example, lead-out portions (not shown) scattered in the circumferential direction, and the pressure fluid supplied from above the pad portion 101 is passed through the lead-out portion to the lower surface of the pad portion 101 (the surface facing the article XA1). ) Side, and circulates along the lower surface of the pad portion 101 in the outer peripheral direction at high speed as indicated by the arrow.

In this state, as shown in FIG. 3B, when the non-contact holding device 100 is moved above the article XA1 by the robot arm and brought close to the article XA1, the lower surface of the pad portion 101 and the article XA1 are moved. Negative pressure is generated by the Bernoulli effect due to the pressure fluid flowing at high speed. Due to the negative pressure, the article XA1 is sucked toward the pad portion 101 and held in a non-contact manner.

Japanese Patent No. 4766824

However, when the pad portion 101 is moved at high speed, for example, as shown in FIG. 10 (C) in order to convey the article XA1 held in the state shown in FIG. 10 (B) to the next step, the article XA1 moves the pad portion 101. There was a problem that the pad portion 101 could not be followed and the pad portion 101 was displaced. This is because when the shape of the article XA1 is a substantially annular body, the area facing the lower surface of the pad portion 101, that is, the area sucked by the negative pressure is smaller (compared to the case of a circle). ..

The present invention has been made in view of the above problems, and an object of the present invention is to provide a non-contact holding device capable of reliably holding even an annular article.

The present invention is a non-contact holding device that holds an annular article in a non-contact state by a negative pressure, and is a pad portion configured to face the article and eject a pressure fluid in the surface direction of the article. , A non-contact holding device comprising an auxiliary holding means for restricting the movement of the article in a non-contact state with the article.

According to the present invention, it is possible to provide a non-contact holding device capable of reliably holding even an annular article.

(A) Schematic side sectional view of the non-contact holding device and the article according to the embodiment of the present invention, (B) Schematic sectional view of the non-contact holding device, (C) Plane (top) view of the non-contact holding device, (D). ) It is a plane (top surface) view of an article. It is the schematic of the non-contact holding device which concerns on embodiment of this invention, is (A) side sectional view, (B) plane (bottom) view. It is the schematic of the non-contact holding device which concerns on embodiment of this invention, (A) side sectional view, (B) side sectional view of the base part, (C) side sectional view of pad part and auxiliary holding means, (D). , (E) is a partially enlarged side sectional view of FIG. (A). It is a bottom view of (A) the non-contact holding device, the pad part and the auxiliary holding means in embodiment of this invention. It is a side schematic of the non-contact holding device which concerns on other embodiment of this invention. It is a schematic side sectional view of the non-contact holding device which concerns on embodiment of this invention. It is (A) schematic side sectional view, (B)) plan view, (C) schematic side sectional view of the non-contact holding device which concerns on other embodiment of this invention. It is (A) schematic side sectional view, (B)) plan view, (C) schematic view of the non-contact holding device which concerns on other embodiment of this invention. It is the schematic of the non-contact holding device which concerns on other embodiment of this invention. It is sectional drawing which explains the prior art.

<Embodiment 1>
Hereinafter, the configuration of the non-contact holding device 10 according to the embodiment of the present invention will be described with reference to the drawings. 1A and 1B are views showing an outline of the non-contact holding device 10, FIG. 1A is a side sectional view of the non-contact holding device 10 and the article XA1, and FIG. 1B is a non-contact holding device 10. It is a side sectional view shown by disassembling, FIG. 3C is a plan view (upper surface) view of the non-contact holding device 10, and FIG. ) It is a figure. FIG. 3A is a cross section corresponding to the X-ray line of FIG. 6C. 2A and 2B are views showing an outline of the non-contact holding device 10, FIG. 2A is a side sectional view of the non-contact holding device 10, and FIG. 2B is a plan view (lower surface). .. In this drawing and each of the following drawings, some configurations will be omitted as appropriate to simplify the drawings. Then, in this drawing and each subsequent drawing, the size, shape, thickness, etc. of the member are appropriately exaggerated and expressed.

As shown in FIG. 1A, the non-contact holding device 10 of the present embodiment has, for example, a pad portion 12 and an auxiliary holding means 13, and is attached to the tip of a robot arm (not shown) or the like to be negative. The article XA1 is held in a non-contact state by pressure. In the following embodiment, as an example, the non-contact holding device 10 will be described by taking the case where the pad portion 12 is fixed and the base portion 11 that can be attached to the robot arm is provided.

As shown in FIGS. (A) and (D), the article XA1 of the present embodiment is an annular body having a space (hole H) near the center, and specifically, is a substantially annular body. is there. One example is foods such as Baumkuchen and donuts, but the present invention is not limited to this, and for example, a long product such as a tape or a sheet (film) may be wound (rolled).

The pad portion 12 faces the article XA1, and the auxiliary holding means 13 is provided substantially in the center of the pad portion 12 and is inserted near the center of the article XA1 (in this example, a (omitted) circular hole portion H).

In a plan view, the size of the base portion 11 is set to be substantially equal to or slightly smaller than the size of the article XA1 to be held, and the size of the auxiliary holding portion 13 is (slightly) smaller than the hole portion H of the article XA1 which is an annular body. It is set small.

As shown in FIGS. (A) to (C), the base portion 11 has a first surface 11AS on the robot arm side and a second surface 11BS on the article XA1 side, and is viewed in a plan view. It has a substantially disk shape. Hereinafter, for convenience of explanation, the robot arm side is defined as the upward direction and the article XA1 side is defined as the downward direction as the definition of the direction in the non-contact holding device 10. That is, the first surface 11AS is referred to as "upper surface", and the second surface 11BS is referred to as "lower surface".

The upper surface 11AS of the base portion 11 is provided with an engaging means (not shown) for attaching to the tip of the robot arm and a supply port 25. The supply port 25 is supplied with a pressure fluid from a pressure fluid supply source (not shown) through a pipe (not shown).

The lower surface 11BS of the base portion 11 serves as an end surface facing the article XA1 to be held, and has a concave portion 14 that is circular in a plan view and can accommodate the pad portion 12 at a substantially central portion thereof.

The pad portion 12 has an end surface (lower surface 12BS) facing the article XA1 and is configured to be able to eject a pressure fluid from the center to the outside. Specifically, the pad portion 12 has an upper surface 12AS and a lower surface 12BS, and has a disk shape in a plan view (FIGS. 1B and 1C). The pad portion 12 is attached to the lower surface 11BS (end surface facing the article XA1) of the base portion 11 by accommodating the upper surface 12AS in the concave portion 14 so as to face the base portion 11 (FIG. (A)). With the pad portion 12 attached to the base portion 11, a gap is formed between the outer edge portion 12P of the pad portion 12 and the edge portion of the concave portion 14 of the base portion 11, and the lower surface (end surface) 12BS of the pad portion 12 is formed. And the lower surface (end surface) 11BS of the base portion 11 around the base portion 11 are configured to be located on substantially the same plane (FIG. (A)).

FIG. 2 is a diagram showing a state of flow of a pressure fluid when the article XA1 is held by the non-contact holding device 10 of the present embodiment. In this example, the gap between the outer edge portion 12P of the pad portion 12 and the edge portion of the concave portion 14 of the base portion 11 serves as the pressure fluid outlet path 15. The configuration of the lead-out path 15 will be described later, but the pressure fluid supplied between the base portion 11 and the pad portion 12 via the supply port 25 of the base portion 11 is led out downward from the outer edge portion of the pad portion 12 and is also led out. It is configured so that it can be ejected outward from the center of the pad portion 12. In this case, as shown by the white arrow A in FIG. 2, the pressure fluid flows in the outer edge direction (diameter outside) of the base portion 11 along the lower surface (end surface) 12BS of the pad portion 12 and the lower surface 11BS of the base portion 11. It spouts toward.

The auxiliary holding means 13 is provided substantially in the center of the lower surface 12BS of the pad portion 12, assists the holding of the article XA1 in the vicinity of the center, and guides the article XA1 so as not to separate from the pad portion 12. More specifically, the auxiliary holding means 13 assists the holding state of the article XA1 to be maintained at least when the pad portion 12 moves in a direction parallel to the end surface 12BS (the lower surface 11BS of the base portion 11). Guide the article XA1 so that it does not separate from the pad portion 12.

As an example, the auxiliary holding means (auxiliary holding portion) 13 is a columnar member protruding downward from the pad portion 12, and its outer shape (cross-sectional shape in the radial direction of the columnar column) corresponds to the shape of the hole portion H of the article XA1. It is desirable to do. The cross-sectional shape of the auxiliary holding portion 13 in this example is a columnar member corresponding to the circular hole portion H. The auxiliary holding portion 13 is configured to generate a negative pressure along the outer peripheral surface 13S of the cylinder. Specifically, as shown in FIG. 2 (A), it has a plurality of lead-out paths 16 for leading out the pressure fluid to the outside along the outer peripheral surface 13S of the cylinder, and is based on the base portion 11 via the supply port 25. The pressure fluid supplied between the portion 11 and the pad portion 12 is ejected downward along the outer peripheral surface 13S as shown by the white arrow B.

As shown in FIG. 2, the non-contact holding device 100 in a state where the pressure fluid is ejected is moved above the article XA1 by a robot arm or the like, brought close to the article XA1, and the auxiliary holding portion 13 is moved to the annular article XA1. When inserted into the hole, a negative pressure is generated on the lower surface 12BS of the pad portion 12 (and the lower surface 11BS of the base portion 11) due to the Bernoulli effect due to the pressure fluid flowing at high speed as shown by the white arrow A. Due to the negative pressure, the article XA1 is sucked toward the pad portion 12 side and held in a non-contact manner as shown in FIG. 1 (A).

Similarly, in the auxiliary holding portion 13, a negative pressure is generated around the outer peripheral surface 13S due to the Bernoulli effect due to the pressure fluid flowing at high speed as shown by the white arrow B. Due to the negative pressure, the article XA1 (hole H) is sucked toward the auxiliary holding portion 13 and held in a non-contact manner.

In this way, since the outer peripheral surface 13S of the auxiliary holding portion 13 functions as a suction surface of the article XA1 (hole portion H), the article XA1 can be reliably held. In the annular article XA1, the area of the base portion 11 facing the lower surface 11BS (lower surface 12BS of the pad portion 12) is smaller than that of the disk (whole circle) -shaped article, but according to the present embodiment. Since the hole H can also be sucked, a sufficient area to be sucked can be secured even for the annular article XA1, and reliable holding is possible.

Further, in the case where the non-contact holding device 10 is moved at high speed while holding the article XA1 and the article XA1 is conveyed to the next step, the holding force by the pad portion 12 is insufficient, and the lower surface 12BS of the pad portion 12 The article XA1 may be displaced relative to (the lower surface 11BS of the base portion 11) (move in a direction relatively parallel to the lower surface 12BS of the pad portion 12 (lower surface 11BS of the base portion 11)). Further, when the auxiliary holding portion 13 comes into contact with the hole portion H of the article XA1, the article XA1 can be prevented from being separated from the pad portion 12.

The derivation paths 15 and 16 of the present embodiment will be described with reference to FIGS. 3 and 4. 3A and 3B are schematic views illustrating an example of the lead paths 15 and 16 in the present embodiment, FIG. 3A is a schematic side sectional view of the non-contact holding device 10, and FIG. 3B is a base portion 11. Schematic side sectional view, FIG. 6C is a schematic side sectional view of the pad portion 12 and the auxiliary holding portion 13, and FIGS. (D) and (E) are in the vicinity of the outer edge portion of the pad portion 12 in FIG. It is a partially enlarged view. Further, FIG. 4A is a schematic view of the lower surface of the non-contact holding device 10, and FIG. 4B is a schematic view of the lower surface of the pad portion 12.

With reference to FIGS. 3A and 3B, the concave portion 14 of the base portion 11 is more specifically configured such that the side surface (inner peripheral surface) is stepped. That is, the concave portion 14 has a plurality of diameters that are gradually reduced in the radial direction of the base portion 11 from the lower side to the upper side (from the lower surface 11BS to the upper surface 11AS) in the thickness direction (vertical direction) of the base portion 11. It is composed of recesses 14A, 14B, and 14C (three here).

As shown in FIG. 3B, the recess 14A has the largest diameter among the three, and is located on the lowermost surface 11BS side of the base portion 11. Further, the side surface (inner peripheral surface) 14AS is formed in a tapered shape so as to gradually increase the diameter in the outward radius from the upper side to the lower side.

Further, the recess 14B has an intermediate diameter among the three and is located above the recess 14A. The side surface (inner peripheral surface) 14BS of the recess 14B is a surface substantially perpendicular to the upper surface 11AS of the base portion 11. Further, the side surface 14BS is adjacent to the supply port 25 and communicates with each other.

Further, the recess 14C has the smallest diameter of the three and is located above the recess 14B. The side surface (inner peripheral surface) 14CS of the recess 14C is a surface substantially perpendicular to the upper surface 11AS of the base portion 11.

The pad portion 12 has a convex portion 18. The convex portion 18 is a portion that has a reduced diameter with respect to the circular lower surface 12BS and protrudes at a predetermined height so as to be accommodated in the concave portion 14 of the base portion 11. The outer peripheral diameter of the convex portion 18 is set to be substantially the same as the inner peripheral diameter of the concave portion 14C located at the uppermost position of the base portion 11 (FIG. (A)).

The side surface (outer peripheral surface) 18S of the convex portion 18 is a surface substantially perpendicular to the lower surface 12BS of the pad portion 12, and has a diameter smaller than that of the lower surface 12BS. Therefore, it is shown enlarged in FIGS. (D) and (E). As described above, a collar portion 19 is formed around the convex portion 18.

Further, as shown in FIG. 6E, a communication hole 20 is provided in the circumferential direction of the collar portion 19 with a part thereof cut out in a stepped shape. As shown in FIG. 4, a plurality of communication holes 20 are provided at equal intervals in the circumferential direction at the outer edge portion 12P of the pad portion 12 in a plan view (bottom view) of the pad portion 12.

Returning to FIG. 3A, the pad portion 12 is housed in the concave portion 14 of the base portion 11, and both are fixed by, for example, bolts 27. In that state, a gap is formed between the pad portion 12 (near the outer edge portion 12P of the lower surface 12BS) and the base portion 11. This gap serves as a pressure fluid lead-out path 15.

When a pressure fluid is supplied from a pressure fluid supply source (not shown) to the supply port 25 via a pipe (not shown), it is composed of a side surface 14BS of a recess 14B communicating with the supply port 25 and an outer peripheral surface of a convex portion 18. The pressure fluid flows into the lead path 15 (see FIG. 3D) and goes around. Then, when the pressure fluid reaches the partially formed communication hole 20 (FIG. (E)), the pressure is applied from the lead-out path 15 formed between the lower surface 11BS of the base portion 11 and the lower surface 12BS of the pad portion 12. The fluid is discharged to the outside and circulates along the lower surface 11BS of the base portion 11 toward the outer edge portion of the base portion 11. That is, the pressure fluid is ejected radially from the lower surface 11BS of the base portion 11 (lower surface 12BS of the pad portion 12) toward the outer periphery of the base portion 11.

Further, as shown in FIGS. 3A and 3C, the non-contact holding device 10 of the present embodiment assists and holds the pressure fluid supplied through the supply port 25 in addition to the lead-out path 15. It has a lead-out path 16 ejected from the portion 13. The lead-out path 16 is formed by communicating, for example, the first lead-out path 16A and the second lead-out path 16B. The first lead-out path 16A is, for example, a distribution path provided in the pad portion 12, extending from the side surface 18S of the convex portion 18 toward the center of the convex portion 18, and having an opening 16AO in the central portion of the lower surface 12BS of the pad portion 12. Further, the second lead-out path 16B is provided in the auxiliary holding portion 13. The auxiliary holding portion 13 is provided so that, for example, the upper surface 13AS of the columnar member abuts near the center of the lower surface 12BS of the pad portion 12. One end of the second lead-out path 16B communicates with the opening 16AO of the first lead-out path 16A, extends vertically downward from the opening, and then descends from the center (axis center) of the auxiliary holding portion 13 to form an outer peripheral surface 13S. It is a distribution path that branches into a plurality of lines (branches radially) and has an opening 16BO on the outer peripheral surface 13S.

As a result, the pressure fluid supplied through the supply port 25 passes through the first lead-out path 16A and the second lead-out path 16B from the outer peripheral surface 13S of the auxiliary holding portion 13 to the white arrow B in FIG. 2A. It spouts like this.

Then, as the pressure fluid flows at high speed, negative pressure is generated below the pad portion 12 and on the outer circumference of the auxiliary holding portion 13, and the negative pressure attracts the article XA1 to the pad portion 12 side and the auxiliary holding portion 13. It is sucked to the side and held non-contact.

Since the hole H is sucked into the auxiliary holding portion 13, the article XA1 can be prevented from being detached from the pad portion 12 even when the pad portion 12 moves at high speed, and can be reliably held. ..

The shape of the lead-out path 15 described above is an example, and the pressure fluid can be ejected from the center to the outside in the pad portion 12 (and the base portion 11) (as shown by the white arrow A shown in FIG. 2A). This example is not limited to the case where the lead-out path 15 is capable of ejecting).

Similarly, the shape of the lead-out path 16 described above is an example, and the lead-out path capable of ejecting the pressure fluid from the outer peripheral surface 13S of the auxiliary holding portion 13 (as shown by the white arrow B shown in FIG. 2A). If it is 16, it is not limited to this example.

<Other embodiments>
Other embodiments of the present invention will be described with reference to FIG. The figure is a side sectional schematic view of the non-contact holding device 10 according to another embodiment. In addition, another embodiment is an example in which the configuration of the auxiliary holding means 13 is different. Although the details of the base portion 11 and the pad portion 12 are omitted in the figure, the same configuration as in the above-described embodiment is used except for the configuration described below.

As shown in FIG. 3A, the auxiliary holding means (auxiliary holding portion) 13 may have, for example, a configuration that does not have a lead-out path 16 (first lead-out path 16A and second lead-out path 16B). That is, the auxiliary holding portion is, for example, a (solid) cylindrical member or a cylindrical member, and is provided so as to project downward from the lower surface 12BS of the pad portion 12. Other configurations are the same as those in the above-described embodiment.

In the case of this configuration, the pressure fluid is not ejected from the auxiliary holding portion 13, but the pressure fluid is ejected from the outer edge portion of the pad portion 12 as shown by the white arrow A, and the pad portion 12 and the base portion 11 are ejected. Negative pressure is generated below. Further, the air inside the hole H of the article XA1 narrowed by inserting the auxiliary holding portion 13 into the hole H of the article XA1 is sucked in the direction of the pad portion 12 as indicated by the white arrow C, and is assisted. Since the circumference of the holding portion 13 is negative pressure, the article XA1 can be reliably held. Further, by any chance, the holding force of the pad portion 12 is insufficient, and the article XA1 is relatively displaced with respect to the lower surface 12BS of the pad portion 12 (lower surface 11BS of the base portion 11) (the lower surface 12BS of the pad portion 12 (base portion 11). Even if it moves in a direction relatively parallel to the lower surface 11BS), the article XA1 is separated from the pad portion 12 by abutting the hole portion H of the article XA1. Can be prevented.

Further, referring to FIG. 3B, the auxiliary holding means 13 is a pressure fluid (the flow FR itself) ejected directly below the center of the pad portion 12, and an ejection hole 16AO for ejecting the pressure fluid. You may. In this case, a cylindrical (or cylindrical) auxiliary holding means is not required, and the ejection hole 16AO, which is an opening of the first lead-out path 16A, is exposed at the center of the lower surface 12BS of the pad portion 12. In this case, the configuration of the first lead-out path 16A is the same as that shown in FIG. 3, etc., but the size (diameter) of the opening (spouting hole) 16AO in a plan view is slightly smaller than the hole H of the article XA1. (The size is such that the flow FR of the pressure fluid to be ejected does not come into contact with the inner wall of the hole H of the article XA1). Other configurations are the same as those in the above-described embodiment.

As shown by the white arrow D in the figure, the pressure fluid of the appropriately selected flow velocity and flow rate can be ejected from the ejection hole 16AO directly under the center of the pad portion 12 to generate a negative pressure around it. It can and / or restrict the movement of the article XA1 in the horizontal direction (plane direction) so that the article XA1 can be reliably held.

Further, referring to FIG. 3C, the auxiliary holding means (auxiliary holding portion) 13 is a substantially columnar member protruding downward from the lower surface 12BS of the pad portion 12, and is a substantially cylindrical member protruding downward from the bottom 13B of the auxiliary holding portion 13. It may be configured to have a lead-out path 16B for ejecting a pressure fluid downward. In this case, the auxiliary holding portion 13 may be provided with a cover member 13CV capable of covering the periphery of the bottom portion 13B and forming the fluid (air) inflow port 13I.

That is, the second lead-out path 16B in this example communicates with the opening 16AO of the first lead-out path 16A (both not shown), but the path extends in the axial direction of the auxiliary holding portion 13 and of the auxiliary holding portion 13. It has an opening at the bottom 13B. Further, the bottom portion 13B has a tapered shape, and a cover member 13CV is provided so as to cover the tapered portion. However, the upper end portion of the cover member 13CV is arranged apart from the auxiliary holding portion 13 so as to form the fluid (air) inflow port 13I around the bottom portion 13B. Other configurations are the same as those in the above-described embodiment.

By ejecting the pressure fluid downward from the bottom 13B of the auxiliary holding portion 13, air near the outer peripheral surface 13S of the auxiliary holding portion 13 is sucked into the inside of the cover member 13CV from the inflow port 13I. As a result, a negative pressure is generated inside the periphery of the auxiliary holding portion 13 (hole portion H of the article XA1), so that the article XA1 can be reliably held. Further, in the normal (normal) holding state, the auxiliary holding portion 13 is not in contact with any part of the article XA1, but by any chance an abnormality occurs such as insufficient holding force by the pad portion 12, and the pad portion 12 The article XA1 is relatively displaced with respect to the lower surface 12BS (lower surface 11BS of the base portion 11) of the pad portion 12 (moves in a direction relatively parallel to the lower surface 12BS of the pad portion 12 (lower surface 11BS of the base portion 11)). Even if there is, the auxiliary holding portion 13 comes into contact with the hole portion H of the article XA1 to prevent the article XA1 from being separated from the pad portion 12.

As described above, the non-contact holding device 10 of the present invention has a pad portion 12 facing the annular article XA1 and an auxiliary holding means 13. The pad portion 12 is configured to be able to eject a pressure fluid in the plane direction of the article XA1. More specifically, the pad portion 12 is provided with a pressure fluid ejection means (for example, a lead-out path 15) in a region outside the auxiliary holding means 13 in the surface direction of the article XA1 (outside in the radial direction of the pad portion 12). Be done. By ejecting a pressure fluid from the ejection means (leading path 15) at high speed, a negative pressure is generated between the pressure fluid and the article XA1, thereby holding the article XA1 in a non-contact state.

Further, the auxiliary holding means 13 provided near the center 12C of the pad portion 12 is a columnar member (auxiliary holding portion 13) inserted into the hole portion H of the article XA1 in the holding state of the article XA1, for example, as shown in FIG. ), Or the pressure fluid (the flow FR itself) injected so as to pass through the hole H of the article XA1 shown in FIG. 5 (B).

The auxiliary holding means 13 regulates the horizontal movement (displacement from the pad portion 12) of the article XA1 in a non-contact state with the article XA1 in the normal (normal) holding state of the article XA1.

FIG. 6 is a schematic side sectional view (FIG. 6A) of the non-contact holding device 10 shown in FIG. 1 and the like, and a schematic side sectional view (FIG. 6B) showing a holding state of the article XA1. is there.

The auxiliary holding means 13 is inserted into the hole H of the article XA1 in the holding state of the article XA1. When the auxiliary holding means 13 is, for example, a columnar member (auxiliary holding portion 13), in the present embodiment, in the holding state of the article XA1, a pressure fluid is provided between the hole H of the article XA1 and the auxiliary holding means (auxiliary holding portion 13). Flow path R is formed (the auxiliary holding portion 13 is thus configured).

That is, as shown in FIG. 6A, the non-contact holding device 10 has a first ejection means (for example, a lead-out path 15) and a second ejection means (for example, FIGS. 6A and 5C). The second lead-out path 16B of the above, the ejection hole 16AO of FIG. 5 (B), etc.). The first ejection means (leading path 15) is provided outside the auxiliary holding means 13 in the plane direction of the article XA1 (the radial side of the pad portion 12 and the article XA1), and is provided between the article XA1 and the pad portion 12. As shown by the white arrow A in FIG. 6 (A), the pressure fluid can be ejected from the overall center 12C of the pad portion 12 toward the outside (the radial outside of the pad portion 12) (FIG. 6, FIG. 5). By ejecting the pressure fluid from the first ejection means, a negative pressure is generated between the pad portion 12 and the article XA1, and the article XA1 can be sucked and held. That is, the first ejection means is a means for ejecting a pressure fluid capable of generating a negative pressure between the pad portion 12 and the article XA1.

On the other hand, the second ejection means (second lead-out path 16B, ejection hole 16AO in FIG. 5B) is provided, for example, on the radial inside of the pad portion 12 with respect to the first ejection means, and the first ejection means is provided. The pressure fluid can be ejected in a direction different from that of the means, for example, in a direction along the auxiliary holding means 13 as shown by the white arrow B in FIG. 6 (A). In the example of FIG. 6, the second ejection means (second lead-out path 16B) is provided in (inside) the auxiliary holding portion 13 (inside), but is not limited to this example as shown in FIG. 5 (B).

For example, in the case of the configuration shown in FIG. 6B, the second ejection means (second lead-out path 16) is a pressure fluid toward a region (clearance region R) between the hole H of the article XA1 and the auxiliary holding portion 13. Squirt. That is, in this case, the clearance region R becomes a path for the pressure fluid, and an air flow is generated in the clearance region R along the axial direction of the auxiliary holding portion 13 as shown by the broken line arrow.

The non-contact holding device 10 of the present embodiment has a configuration in which the auxiliary holding means 13 is inserted into the hole H of the article XA1 in order to restrict the movement of the article XA1 in the holding state. For example, the article XA1 is a Baumkuchen or the like. In the case of food (baked confectionery), the shape of the article XA1 (hole H) itself may be slightly different from that of a hard article having the same ring (disk) shape (for example, an optical disk). .. Therefore, even if the shape of the article XA1 is uneven, it is assisted so that an appropriate (sufficient) gap, that is, a clearance region R is secured between the auxiliary holding portion 13 and the hole portion H so as not to interfere with each other. The holding unit 13 is configured.

On the other hand, if the clearance region R is too large, there is a problem that the pressure fluid ejected from the first ejection means flows into the clearance region R and the holding force is lowered.

Therefore, in the present embodiment, a second ejection means (for example, a lead-out path 16) is provided, and the pressure fluid is ejected in a direction different from that of the first ejection means for holding suction, so that the first ejection means becomes a hole. Prevents the flow into the part H and the like, and regulates the movement of the article XA1 while increasing the holding force.

Specifically, for example, as shown by the white arrow B in FIG. 6A, from the second ejection means in the direction along the auxiliary holding portion 13 (for example, toward the clearance region R with the hole portion H). Separately eject pressure fluid. As a result, the pressure fluid ejected from the first ejection means enters the hole H (clearance region R) of the article XA1 while ensuring an appropriate (sufficient) gap between the auxiliary holding portion 13 and the hole H. It is possible to prevent the inflow and increase the holding force of the pad portion 12.

Further, in the case of FIG. 3B, the clearance region R serves as a path for the pressure fluid, and a layer in which an air flow (indicated by a broken line in FIG. 3B) is generated is formed in the clearance region R. As a result (a negative pressure may be generated in the clearance region R by the pressure fluid), the distance between the auxiliary holding portion 13 and the hole portion H can be maintained at a predetermined distance (the auxiliary holding portion 13 can be stably held at the center of the hole portion H). Can be centered in the vicinity).

Here, the width D1 of the clearance region R of the present embodiment (distance between the auxiliary holding means 13 and the hole H in the radial direction of the pad portion 12) is, for example, about 1% to 15% of the diameter of the hole H. More preferably, it is about 3% to 10%, and more preferably about 4% to 6%.

In this way, for example, even when the moving speed of the pad portion 12 is increased, it is possible to prevent the article XA1 from moving (shifting) in the horizontal direction with respect to the pad portion 12, and it is possible to reliably hold the article XA1. it can.

Further, by ejecting the pressure fluid from the second ejection means, it is possible to prevent debris of the article XA1 from adhering to the periphery of the auxiliary holding portion 13.

Also in the example of FIG. 5B, the second ejection means (ejection hole 16AO) is provided, for example, radially inside the pad portion 12 with respect to the first ejection means, and is different from the first ejection means. The pressure fluid can be ejected in the direction (direction along the auxiliary holding means 13). The second ejection means creates an air flow (pressure fluid flow FR) in the hole H in the direction along the axial direction of the auxiliary holding means 13, and the pressure fluid ejected from the first ejection means is the hole of the article XA1. It is possible to prevent the flow into the portion H and increase the holding force of the pad portion 12.

Further, in the example of FIG. 5C, the second ejection means (second lead-out path 16B) is provided, for example, in the radial direction of the pad portion 12 with respect to the first ejection means, and the first ejection means. The pressure fluid can be ejected in a direction different from that (direction along the auxiliary holding means 13). The second ejection means creates an air flow in the direction along the auxiliary holding means 13 between the hole H and the auxiliary holding means 13, and the pressure fluid ejected from the first ejecting means flows into the hole H of the article XA1. This can be prevented and the holding force of the pad portion 12 can be increased.

In the present embodiment, regardless of the configuration of the auxiliary holding means 13, any part of the article XA1 is held in a non-contact state with the non-contact holding device 10 in a normal holding state.

<Embodiment 2>
Yet another embodiment of the non-contact holding device 10 of the present invention will be described with reference to FIGS. 7 to 9.

7 and 8 are views showing an outline of the non-contact holding device 10, where FIG. 7 (A) is a side view and FIG. 7 (B) is an article XA1 (lower side of FIG. 7 (A)). A plan view (bottom surface) view of the pad portion 12 viewed from the side, FIG. 7 (C) is a side schematic view of a state in which the article XA1 is held. 8 (A) and 8 (B) are partially enlarged views of FIGS. 7 (A) and 7 (B), respectively, and FIG. 8 (C) conceptually refers to FIG. 7 (B). It is a plan view shown in. In the following description, the description of the same configuration as that of the first embodiment will be omitted.

As shown in FIG. 7A, the base portion 11 is configured to be attachable to, for example, a robot arm (not shown), and a pad portion 12 facing the article XA1 is fixedly supported. The pad portion 12 has a ejection means and is configured to be capable of ejecting a pressure fluid in the plane direction of the article XA1, and has an auxiliary holding means 13 in the vicinity of the overall center 12C thereof. The auxiliary holding means 13 of this example is, for example, a cylindrical member (auxiliary holding portion 13) that can be inserted into the hole H in the holding state of the article XA1 (FIGS. (B), FIG. C)).

As shown in FIG. 7B, the pad portion 12 is divided into a plurality of pads (four in this example) so as to surround the entire center 12C (surround the auxiliary holding portion 13) on the surface side facing the article XA1. To.

More specifically, the pad portion 12 is composed of a pad support portion 12BA and a plurality of divided pad portions 12PT having a configuration independent of each other (in this example, a cylindrical shape). The pad support portion 12BA is configured, for example, in a cross shape in a bottom view (plan view), and has an upper surface on the base portion 11 side and a lower surface on the article XA1 side. The shape of the pad support portion 12BA is not limited to this, and may be, for example, an annular shape (disk) or a rectangular shape. The divided pad portions 12PT are arranged at equal distances from each other along the circumferential direction of the pad portion 12 (circumferential direction of the auxiliary holding portion 13), and are fixed and supported on the lower surface of the pad support portion 12BA (FIG. FIG. (A)). The arrangement of the divided pad portions P is an example, and the plurality of divided pad portions 12PT are arranged according to the shape of the holding surface of the article XA1 to be held (along the shape). That is, in this example, since the article XA1 to be held has an annular shape, the four divided pad portions 12PT are also arranged in an annular shape along the shape. However, when the article XA1 to be held has an elliptical shape, for example, the plurality of divided pad portions 12PT are also arranged in an elliptical shape along the article XA1. Since each of the plurality of divided pad portions 12PT has the same configuration, one divided pad portion 12PT will be described below.

The split pad portion 12PT has an upper surface on the pad support portion 12BA side and a lower surface on the article XA1 side. That is, in this example, as shown in FIG. 3A, the lower surface of the split pad portion 12PT corresponds to the end surface of the pad portion 12 facing the article XA1 (lower surface 12BS of the pad portion 12) (FIG. 3A). reference).

The split pad portion 12PT has a first ejection means 122 and a second ejection means 123. The first ejection means 122 is a means for ejecting a pressure fluid in a certain direction on the surface of the pad portion P between the article XA1 and the split pad portion 12PT (pad portion 12), for example, FIG. 7A. As shown by the white arrow A in the figure (B), the pad is a means configured to be able to eject a pressure fluid from the overall center 12C of the pad portion 12 toward the outside (the radial outside of the pad portion 12). It is a means for ejecting a pressure fluid capable of generating a negative pressure between the part 12 and the article XA1. In the following description, the overall center 12C side of the pad portion 12 is referred to as the pad portion inner PI, and the pad portion 12 outer edge portion side is referred to as the pad portion outer PO. Further, the direction from the overall center 12C of the pad portion 12 toward the outside in the radial direction (the direction from the pad portion inner PI to the pad portion outer PO) is referred to as the pad portion outer direction. Further, the direction from the radial outer side of the pad portion 12 toward the overall center 12C (the direction from the pad portion outer PO to the pad portion inner PI) is referred to as the pad portion inner direction.

The second ejection means 123 is a means configured to be able to eject a pressure fluid in a direction different from that of the first ejection means 122 (for example, in a direction opposite to that of the first ejection region 126). The second ejection means 123 of this example is, for example, a pad between the article XA1 and the split pad portion 12PT (pad portion 12) as shown by a white arrow B in FIGS. 7 (A) and 7 (B). It is a means that can eject a pressure fluid in the direction of the inside of the part. Further, the second ejection means 123 in this case is a means for ejecting a pressure fluid that creates an air flow between the hole H of the article XA1 and the auxiliary holding means 13 in the holding state of the article XA1.

8 (A) and 8 (B) are views showing one divided pad portion 12PT extracted, FIG. 8 (A) is a side view corresponding to FIG. 7 (A), and FIG. 8 (B) is a view. It is a bottom view (plan view) corresponding to 7 (B). In FIGS. 8 (A) and 8 (B), the right side in the drawing is the outer PO of the pad portion, and the left side in the drawing is the inner PI of the pad portion.

As shown in FIG. 3A, the split pad portion 12PT is provided with a ejection portion 121, for example, on the lower surface 12BS side thereof. The ejection portion 121 has, for example, an inverted mortar-shaped slope 121A having the split pad portion center 12PC as an apex and extending toward the outer edge of the split pad portion 12PT, and a columnar island shape provided at the split pad portion center 12PC portion, for example. It has a portion 121B. A lead-out path 124 is provided inside the split pad portion 12PT. For example, the lead-out paths 124 extend from the upper surface to the lower surface of the split pad portion 12PT in the axial direction (center 12PC of the split pad portion), and a plurality of the lead paths 124 are provided toward the outer peripheral surface of the island-shaped portion 121B (8 in this example). Branches (branches radially) into books) at regular intervals. Further, the lead-out path 124 communicates with the supply port 25 on the upper surface of the split pad portion 12PT (FIG. 7 (A)).

As shown in FIG. 8B, the island-shaped portion 121B is provided with a plurality of openings (spouting holes) 125 (eight openings 125A to 125H in this example) at equal intervals along the outer peripheral surface thereof. The branched lead-out paths 124 reach the openings 125A to 125H, respectively. The conditions (flow rate, flow velocity) of the pressure fluid ejected from each opening 125 are the same, and are also the same among the plurality of divided pad portions 12PT.

When the pressure fluid supplied to the lead-out path 124 through the supply port 25 reaches the openings 125A to 125H, it is shown by an arrow in FIG. 8A and FIG. 8B along the slope 121A of the ejection portion 121. Radially ejected from the center 12PC of the split pad portion. That is, the split pad portion 12PT can eject the pressure fluid at least in the outer direction of the pad portion (the direction from the inner PI of the pad portion in FIG. 8B toward the outer PO of the pad portion), and the inner side of the pad portion (FIG. 8). The pressure fluid can be ejected in the direction (B) from the outer PO of the pad portion to the inner PI of the pad portion).

More specifically, when eight openings 125A to 125H are provided as shown in the figure, the openings including at least the openings 125A provided in the approximately right half (PO outside the pad portion) of FIG. 8B. Pressure fluid ejected from a plurality of openings 125 (for example, openings 125H, 125A, 125B, and (a part of) the opening 125G, (a part of) the opening 125C) centered on the opening 125A. Is ejected toward the outside of the pad portion. That is, in this example, one or more openings 125 (for example, openings 125H, 125A, 125B (and openings 125G) that eject pressure fluid toward the outside of the pad portion) are ejected. , Each part of the opening 125C) is the first ejection means 122, and the region where the first ejection means 122 is provided is hereinafter referred to as the first ejection means 126.

Further, one or a plurality of openings 125 including at least the opening 125E (a plurality of openings 125 centered on the opening 125E) provided on the substantially left half (PI inside the pad portion) of FIG. 8 (B). For example, it can be said that the pressure fluid ejected from the openings 125F, 125E, 125D, and (a part of) the opening 125G and (a part of) the opening 125C) is ejected toward the inside of the pad portion. In the example, one or more openings 125 (for example, openings 125F, 125E, 125D (and a part of each of the openings 125G and 125C) that eject the pressure fluid inward of the pad portion) are the second ejection means 123. The area where the second ejection means 123 is provided is hereinafter referred to as the second ejection area 127.

When a plurality of (for example, four) divided pad portions 12P are arranged at equal intervals around the auxiliary holding means 13, 4 in the vicinity of the outer edge portion of the pad portion 12 as shown in FIG. It can be said that the first ejection regions 126 of the divided pad portions 12P are arranged in a substantially annular shape. In FIG. 8C, in the pressure fluid ejected from each divided pad portion 12PT, the pressure fluid ejected along the circumferential direction of the bad portion 12P is directed to the inside in the radial direction and the outside in the radial direction of the pad portion 12. Since the effects (actions) of are considered to be equivalent, the description is omitted (the same applies in the figure below).

That is, as the pad portion 12, the pressure fluid is ejected in the outward direction of the pad portion by the first ejection means 122 provided near the outer edge portion. Therefore, in the holding state of the article XA1, the pressure fluid flows in 12P in the outward direction of the pad portion along the lower surface 12BS of the pad portion 12, that is, between the pad portion 12 and the article XA1 (solid line in FIG. 7C). (Refer to the arrow), a negative pressure is generated between the pad portion 12 and the article XA1, and the article XA1 can be sucked and held.

Further, the second ejection regions 127 of each of the four divided pad portions 12P are arranged (substantially in a ring shape) so as to surround the outside of the auxiliary holding means 13 inside the outer edge portion of the pad portion 12. That is, as the pad portion 12, the pressure fluid is ejected toward the inside of the pad portion by the second ejection means 123 provided on the outer periphery of the auxiliary holding means 13. Then, the pressure fluid ejected inward of the pad portion reaches the outer peripheral surface 13S of the auxiliary holding portion 13 and flows downward along the outer peripheral surface 13S, as shown by the white arrow B in FIG. 7A.

Therefore, in the holding state of the article XA1, the pressure fluid ejected downward along the auxiliary holding portion 13 is between the hole portion H of the article XA1 and the auxiliary holding portion 13 as shown by the broken line arrow in FIG. 7 (C). An air flow is generated in the clearance region R of. In other words, the second ejection means 123 ejects the pressure fluid toward the clearance region R which is the flow path.

Here, as described above, the distance D1 of the clearance region R between the hole H of the article XA1 and the auxiliary holding portion 13 is, for example, about 1% to 15% of the diameter of the hole H, which is more preferable. Is about 3% to 10%, and more preferably about 4% to 6%.

In the present embodiment, the pressure fluid ejected as compared with the case of the first embodiment by providing a plurality of divided pad portions 12PT scattered at equal intervals in the circumferential direction corresponding to the shape of the annular article XA1. The dispersion of the pressure fluid can be reduced and the ejection of the pressure fluid can be concentrated on the shape of the holding surface of the article XA1, so that the holding force of the article XA1 can be enhanced.

Further, since a layer of airflow can be generated around the auxiliary holding portion 13 (or a negative pressure is also generated around the auxiliary holding portion 13), the auxiliary holding portion 13 exists substantially in the center of the hole portion H. The position is stabilized (the auxiliary holding portion 13 is centered with respect to the hole portion H). As a result, the auxiliary holding portion 13 can regulate the horizontal movement (deviation from the pad portion 12) of the article XA1 in a non-contact state with the article XA1 in the normal (normal) holding state of the article XA1. it can.

Therefore, even when the base portion 11 is moved at high speed by a robot arm or the like, the problem that the article XA1 is detached or dropped can be significantly reduced.

In addition, the article XA1 can be held without contacting any part of the article XA1 (that is, non-contact throughout the article XA1).

Further, by using a plurality of independent divided pad portions 12PT, for example, a sensor for detecting the suction state of the article XA1 can be arranged in the area between the divided pad portions 12PT, and the degree of freedom in design is high. Can be enhanced.

The shape and pattern of the lead-out path 124 described above are an example, and are limited to the illustrated example as long as the pressure fluid is evenly ejected from the center 12PC of the split pad portion 12PT to the plurality of openings 125. Absent. Further, the number of openings 125 is not limited to the illustrated example. Further, the shape and arrangement of the split pad portion 12PT are also examples, and there is a first ejection means 122 that ejects a pressure fluid in a certain direction (for example, the outer direction of the pad portion) in order to suck and hold the article XA1. The example is not limited to the illustrated example as long as the configuration includes the second ejection means 123 for ejecting the pressure fluid in a direction different from the direction (for example, the inner direction of the pad portion).

Further, although not shown, in this example as well, a lead-out path 16 (see FIG. 3) may be provided in the auxiliary holding portion 13 in addition to the lead-out path 124. The lead-out path 16 ejects the pressure fluid supplied through the supply port 25 from the auxiliary holding portion 13, and functions as (a part of) the second ejection means 123.

Another example of the second embodiment will be described with reference to FIG. FIG. 6 is a plan view corresponding to FIG. 8C showing an outline of the ejection mode of the pressure fluid of the split pad portion 12PT.

In FIGS. 7 and 8, the lead-out path 124 and its opening 125 are respectively provided so that the split pad portion 12PT ejects the pressure fluid radially (equally spaced (equally) in the circumferential direction) from the center 12PC of the split pad portion. The case where it is provided, that is, the case where it has both the first ejection region 126 and the second ejection region 127 is illustrated. In other words, each divided pad portion 12P is configured to eject a pressure fluid to both the pad portion outer PO and the pad portion inner PI.

However, the pad portion 12 is not limited to this, and the pad portion 12 is provided with a pressure fluid ejection means in a region outside the auxiliary holding means 13 in the surface direction of the article XA1 so that the pressure fluid can be ejected in the surface direction of the article XA1. Anything is fine. That is, each divided pad portion 12P has either a first ejection region 126 or a second ejection region 127, and is configured to eject a pressure fluid to either the pad portion outer PO or the pad portion inner PI. You may.

As an example, in FIG. 8A, each divided pad portion 12P has only the first ejection region 126 (for example, the openings 125H, 125A, 125B shown in FIG. 8B and the lead-out path 124 leading to them). The pressure fluid is ejected only to the PO outside the pad portion.

In FIG. 8B, each divided pad portion 12P has only a second ejection region 127 (for example, openings 125F, 125E, 125D shown in FIG. 8B and a lead-out path 124 leading to them). The pressure fluid is ejected only to the PI inside the pad portion.

Further, the first ejection region 126 ejects the pressure fluid in one direction on the surface of the pad portion P, and the second ejection region 127 is the region where the pressure fluid is ejected in the direction opposite to the first ejection region 126. It should be. That is, the direction on the surface of the pad portion P is not limited to the radial direction but may be the circumferential direction. As an example, in FIG. 3C, each divided pad portion 12PT is configured such that the first ejection region 126 ejects the pressure fluid in the clockwise direction of the pad portion 12, and the second ejection region 126. The 127 is configured to eject the pressure fluid in the direction opposite to the first ejection region 126, that is, in the counterclockwise circumferential direction of the pad portion 12. Such a configuration is also possible by configuring the pad portion 12 with a plurality of divided pad portions 12PT.

In addition, for example, the pad support portion 12BA may be configured so that its shape can be changed (for example, by a link mechanism or the like). Further, the fixed position and the fixed number of the split pad portion 12PT may be appropriately changed. By doing so, the arrangement pattern and the number of arrangements of the plurality of divided pad portions 12PT can be changed, and the degree of freedom of the change can be increased. That is, even if the shape of the article XA1 to be held changes, the shape and the like can be easily changed by moving the split pad portion 12P individually (independently) along the shape of the holding surface. It becomes possible to make it.

In the above-described embodiment, the base portion 11 and the pad portion 12 have been described as separate configurations, but both may be provided integrally.

Further, in the first embodiment, an example is shown in which the gap formed between the base portion 11 and the pad portion 12 is used as a flow path for the pressure fluid (pressure fluid ejection means, outlet path 15 (first ejection means)). , The pad portion 12 may be provided with a pressure fluid ejection means (leading path 15 (first ejection means)). Specifically, for example, the supply port 25 is made to communicate with the pad portion 12, and the lead path 15 (first) that penetrates the inside of the pad portion 12 and ejects radially from the lower surface 12BS of the pad portion 12 toward the outer edge portion. (Ejecting means) may be provided. In that case, the base portion 11 for accommodating the pad portion 12 is not required, and the base portion as an engaging portion with the robot arm may be provided on the upper surface of the pad portion 12.

Further, for example, the supply port 25 may be configured to supply the pressure fluid from the side surface of the base portion 11.

When the auxiliary holding means (auxiliary holding portion) 13 is a columnar member protruding downward, the cross-sectional shape in the radial direction is not limited to a circular shape, and is elliptical if a negative pressure can be generated between the auxiliary holding means (auxiliary holding portion) 13 and the article XA1. , Polygons such as quadrangles and pentagons, and shapes having an uneven outer peripheral shape can be adopted.

Further, the article XA1 is not limited to an annular body, and may be a square ring body such as a pentagonal ring body or an octagonal ring body, and the shape of the hole H is not limited to a circular shape, for example, a pentagonal shape or an octagonal shape. And so on.

As described above, the non-contact holding device 10 according to the present invention is not limited to the above-described embodiment, and can be variously modified without departing from the spirit and technical idea of the present invention.

That is, in the above embodiment, the position, size, length, shape, material, orientation, etc. of each configuration can be appropriately changed.

10 Non-contact holding device 11 Base 11AS Upper surface 11BS Lower surface 12 Pad portion 12P Outer edge portion 12AS Upper surface 12BS Lower surface 13 Auxiliary holding means 13S Outer peripheral surface 14 Concave portion 14A, 14B, 14C Recessed portion 15, 16, 16A, 16B Outlet path 16AO 16BO Opening 12BA Pad Support 12C Overall Center 12PT Divided Pad 12P Divided Pad 12PC Divided Pad Center 121 Ejecting 122 First Ejecting Means 123 Second Ejecting Means 124 Leading Path 125 Opening 126 First Ejecting Area 127 Second ejection area PI Pad part inside PO Pad part outside R Clearance area 18 Convex part 18S Side surface 19 Flange part 20 Communication hole 25 Supply port 27 Bolt 100 Non-contact holding device 101 Pad part

Claims (13)

A non-contact holding device that holds an annular article in a non-contact state by negative pressure.
A pad portion that faces the article and is configured to eject a pressure fluid in the direction of the surface of the article.
Auxiliary holding means that regulates the movement of the article in a non-contact state with the article,
Have,
A non-contact holding device characterized in that. The auxiliary holding means is inserted into a hole of the article in the holding state of the article.
A pressure fluid ejection means is provided in a region outside the auxiliary holding means in the plane direction of the article.
The non-contact holding device according to claim 1. It has a first ejection means and a second ejection means,
The first ejection means is configured to be able to eject a pressure fluid from the entire center of the pad portion to the outside between the article and the pad portion.
The second ejection means is configured to be capable of ejecting a pressure fluid in a direction different from that of the first ejection means.
The non-contact holding device according to claim 1. The pressure fluid ejected from the second ejection means creates an air flow along the axial direction of the auxiliary holding means in the holding state of the article.
The non-contact holding device according to claim 3. The first ejection means is provided outside the auxiliary holding means in the plane direction of the article.
The non-contact holding device according to claim 3 or 4, wherein the non-contact holding device according to claim 4. The auxiliary holding means has the second ejection means.
The non-contact holding device according to any one of claims 3 to 5, wherein the non-contact holding device according to any one of claims 3 to 5. The pad portion is composed of a plurality of divided pad portions surrounding the auxiliary holding means.
The non-contact holding device according to any one of claims 1 to 6, wherein the non-contact holding device is characterized. The article is an annular body,
The non-contact holding device according to any one of claims 1 to 7, wherein the non-contact holding device is characterized. The auxiliary holding means is a columnar member.
The non-contact holding device according to any one of claims 1 to 8, wherein the non-contact holding device according to any one of claims 1 to 8. Negative pressure is generated along the outer peripheral surface of the columnar member.
9. The non-contact holding device according to claim 9. The pad portion is fixed and has a base portion that can be attached to the robot arm.
The non-contact holding device according to any one of claims 1 to 10, wherein the non-contact holding device is characterized. The article is held in a non-contact state at any part.
The non-contact holding device according to any one of claims 1 to 11, wherein the non-contact holding device according to claim 11. The distance from the hole to the auxiliary holding means in the holding state of the article is about 1% to 15% of the diameter of the hole.
2. The non-contact holding device according to claim 2.

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