JP2020201517A - Pellicle frame, and pellicle - Google Patents

Abstract

To provide a pellicle frame capable of preventing a pellicle film from being pulled which is caused by the fact that an inner edge part of an adhesive layer on a pellicle frame is a curved surface in a cross-sectional view, and a pellicle excellent in appearance without the pellicle film being pulled.SOLUTION: The present invention is a frame-like pellicle frame provided with an inclined plane inclined downward from an inner edge side toward an outer edge side regarding a surface on which a pellicle film is set, and provided with a flat plane from an outer edge side end of the inclined plane to an outer edge of the surface on which the pellicle film is set. In the pellicle, an adhesive layer is provided on the inclined plane and the flat plane regarding the surface on which the pellicle film of the pellicle frame is set, and the pellicle film is set through the adhesive layer.SELECTED DRAWING: Figure 9

Description

The present invention relates to a pellicle frame and a pellicle used as a dust shield when manufacturing a semiconductor device, a liquid crystal display, an organic EL display, or the like.

In the manufacture of semiconductors such as LSIs and superLSIs and the manufacture of liquid crystal displays, a pattern is formed by irradiating a semiconductor wafer or a liquid crystal original plate with light. A photomask or reticle used at this time (hereinafter, simply referred to as a photomask). If dust adheres to (described), there is a problem that the dimensions, quality, and appearance are impaired, such as the edges becoming rough and the base becoming black and dirty.

For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean at all times, so exposure is performed after a pellicle is attached to the surface of the photomask as a dust shield. In this case, the foreign matter does not adhere directly to the surface of the photomask but adheres to the pellicle. Therefore, if the focus is on the pattern of the photomask during lithography, the foreign matter on the pellicle becomes irrelevant to transfer.

Generally, a pellicle is provided with a transparent pellicle film made of nitrocellulose, cellulose acetate, fluororesin, etc., which allows light to pass through well, on one end surface of a pellicle frame made of aluminum, steel, carbon steel, stainless steel, engineering plastic, or the like. Further, on the opposite end surface of the pellicle frame, an adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, silicone resin, etc. for mounting on the photomask and a separator for protecting the adhesive layer are provided. (See Patent Documents 1 and 2).

Japanese Unexamined Patent Publication No. 2005-338722 Japanese Unexamined Patent Publication No. 2008-176102

Usually, the pellicle film is installed via an adhesive layer formed on the surface of the pellicle frame. The adhesive applied on the surface of the pellicle frame rises at a contact angle determined by its surface tension and the surface condition of the pellicle frame, and becomes a convex shape. If this convex shape is remarkable, only the vicinity of the apex of the convex shape comes into contact with the pellicle film, so that there is a problem that the adhesive area is small and the adhesive force with the pellicle film is weakened.

Further, since the inner edge of the adhesive layer has a curved surface when viewed in cross section, when the pellicle film adheres to this region, minute wrinkles are generated in which the film is twitched as shown in FIGS. It can be a problem. In particular, in a large pellicle used for manufacturing a display such as a liquid crystal or an organic EL, this problem becomes remarkable because the frame width is wide and the film adhesive layer is thick.

Therefore, it is necessary to apply the adhesive layer for installing the pellicle film so as to be as flat as possible, and Patent Document 1 proposes a method of controlling the shape of the adhesive layer by providing a groove on the surface of the pellicle frame. There is. Further, Patent Document 2 proposes a method of applying an adhesive having a relatively low viscosity to a wide pellicle frame while suppressing the height of the adhesive layer by utilizing the capillary phenomenon.

The methods described in Patent Documents 1 and 2 can lower the apex of the film-adhesive layer, and can sufficiently solve the problem in terms of securing the adhesive area with the pellicle film. However, the curved surface of the inner edge of the adhesive layer formed by surface tension has not been completely eliminated, and the twitching of the pellicle film generated near the inner edge of the film adhesive layer has not always been completely solved. ..

Further, in the method described in Patent Document 1, when the amount of the adhesive to be applied is small, the surface of the film adhesive layer becomes concave, and air pools are formed between the film and the pellicle film, making adhesion difficult. There is also the problem of becoming.

Therefore, the present invention has been made in view of the above problems, and the pellicle frame and the pellicle frame capable of preventing the pellicle film from being twitching caused by the inner edge of the film adhesive layer being curved when viewed in cross section. It is an object of the present invention to provide a pellicle having an excellent appearance without twitching of the pellicle membrane.

The pellicle frame and pellicle of the present invention are as follows.
(1) A frame-shaped pellicle frame on which an inclined surface is provided, which is lowered from the inner edge side to the outer edge side, and the pellicle film is installed from the outer edge side end of the inclined surface. A pellicle frame characterized in that a flat surface is provided over the outer edge of the surface.
(2) The pellicle frame according to claim 1, wherein the inclined surface is provided over the entire circumference of the surface on which the pellicle film is installed.
(3) The pellicle frame according to claim 1 or 2, wherein the width of the inclined surface is 50% or less of the width of the surface on which the pellicle film is installed.
(4) The pellicle frame according to any one of claims 1 to 3, wherein the angle formed by the inclined surface and the surface perpendicular to the flat surface is 60 to 89 °.
(5) The pellicle frame according to any one of claims 1 to 4, wherein the starting end on the inner edge side of the inclined surface is located within 0.2 mm from the inner edge of the surface on which the pellicle film is installed.
(6) The pellicle frame according to any one of claims 1 to 5, wherein the starting end on the inner edge side of the inclined surface is the inner edge of the surface on which the pellicle film is installed.
(7) The pellicle frame according to any one of claims 1 to 6, wherein the width of the inclined surface is 0.3 to 3 mm.
(8) The pellicle frame according to any one of claims 1 to 7, wherein the height of the inclined surface is 0.03 to 0.3 mm.
(9) The pellicle frame according to any one of claims 1 to 8, wherein the inclined surface is formed of a flat surface.
(10) The pellicle frame according to any one of claims 1 to 8, wherein the inclined surface is formed of a curved surface.
(11) A pellicle including the pellicle frame according to any one of claims 1 to 10, wherein the surface of the pellicle frame on which the pellicle film is installed is on the inclined surface and the flat surface. A pellicle is provided with an adhesive layer, and the pellicle film is installed via the adhesive layer.
(12) A pellicle in which a pellicle film is installed on a frame-shaped pellicle frame via an adhesive layer, and the pellicle film adhesive surface of the adhesive layer is directed from the inner edge side to the outer edge side of the pellicle film adhesive surface. A pellicle provided with a lowered inclined surface, wherein the thickness of the adhesive layer at the inner edge side starting end of the inclined surface is smaller than the thickness of the adhesive layer at the outer edge side end of the inclined surface.

According to the present invention, the pellicle film in the vicinity of the film adhesive layer is not twitched, and a pellicle having an excellent appearance can be obtained.

It is a top view explaining one Embodiment of the pellicle frame by this invention. It is a figure explaining one Embodiment of the pellicle frame by this invention, and is the cross-sectional view AA in FIG. It is a figure explaining one Embodiment of the pellicle frame by this invention, and is BB sectional view in FIG. It is a figure explaining one Embodiment of the pellicle frame by this invention, and is the enlarged view of the part C in FIG. It is sectional drawing explaining one Embodiment of the pellicle frame by this invention. It is sectional drawing explaining one Embodiment of the pellicle frame by this invention. It is a perspective view explaining one Embodiment of the pellicle frame by this invention. It is a perspective view explaining one Embodiment of the pellicle according to this invention. It is an enlarged sectional view explaining one Embodiment of the pellicle according to this invention. It is sectional drawing explaining one Embodiment of the pellicle by this invention, and shows the adhesive application process. It is a perspective view explaining the pellicle of the conventional example (comparative example). It is a perspective view explaining the vicinity of the inner edge of the pellicle frame of the conventional example (comparative example). It is sectional drawing explaining the pellicle of the conventional example (comparative example). It is sectional drawing explaining the pellicle frame of the conventional example (comparative example).

Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings, but the present invention is not limited thereto.

The present invention can be applied to pellicle of all sizes and applications, but is particularly effective when applied to a large pellicle mainly used for display manufacturing applications having a side width of more than 5 mm. Is big. This is because a pellicle having a large size and a wide pellicle frame also has a thick film adhesive layer, and the appearance is significantly deteriorated when the pellicle film is twitched.

1 to 4 show an embodiment of the pellicle frame according to the present invention. 1 is a plan view, FIG. 2 is a sectional view taken along line AA in FIG. 1, FIG. 3 is a sectional view taken along line BB in FIG. 1, and FIG. 4 is an enlarged view of portion C in FIG.

An inclined surface 12a that is lowered from the inner edge side toward the outer edge side is provided on the surface (membrane adhesive surface) 12 on which the pellicle film of the frame-shaped pellicle frame 11 is installed, and the pellicle film is provided from the outer edge side end b of the inclined surface. A flat surface 12b is provided over the outer edge of the surface to be installed. Here, the inclined surface 12a is provided over the entire circumference of the surface on which the pellicle film is installed.

Next, the height h, the inclination angle α, and the width w of the inclined surface 12a will be described in detail. The numerical values listed below include the width of the pellicle frame to be applied, the viscosity of the film adhesive to be used, the coating amount, the drying speed, and the like. It is appropriately determined according to the properties of.

The width w of the inclined surface 12a is preferably 50% or less of the width W of the film adhesive surface 12 of the pellicle frame 11. In this way, it is possible to sufficiently secure a region of the flat surface 12b used as a pressurizing region when the pellicle is attached to the photomask. Therefore, the width w'of the flat surface 12b is preferably 50% or more of the width W of the film adhesive surface 12 of the pellicle frame 11, which is 1 mm or more for a small pellicle for semiconductor manufacturing and for display manufacturing. For a large pellicle, if it is 2 mm or more, it can be sufficiently used as a pressurized region.

Since the inclined surface 12a protrudes from the flat surface 12b and is not parallel to the mask adhesive surface 13 facing the mask, if the region of the inclined surface 12a is pressed when the pellicle is attached to the photomask, the inclined surface 12a is displaced or attached. There is a concern that it will cause defects. Therefore, since the flat surface 12b is used as a pressure region when the pellicle is attached to the photomask, it is preferable that the flat surface 12b is parallel to the surface (mask adhesive surface) 13 to be attached to the photomask of the pellicle frame.

The angle (inclination angle) α formed by the inclined surface 12a and the surface 14 perpendicular to the flat surface 12b is preferably 60 to 89 °, more preferably 80 to 87 °. If the inclination angle α exceeds 89 °, the effect of preventing the pellicle membrane from twitching cannot be sufficiently exerted. The smaller the inclination angle α, the greater the effect of sharpening the inner edge of the film adhesive layer, and accordingly, the appearance of the inner edge of the pellicle film is also improved. However, if the inclination angle α is less than 60 °, there is a concern that the pellicle film to which the sharp edge is adhered may be damaged, and burrs and defects are likely to occur during the manufacture and handling of the pellicle frame, and the pellicle is manufactured. Sometimes it becomes difficult to adhere the pellicle film to the film adhesive layer without entrainment of air.

The inclined surface 12a is preferably composed of one plane as shown in FIG. 4 from the viewpoint of ease of design and processing, but from two or more planes 52 and 53 as shown in FIG. 5 (b). It may be configured. Further, as shown in FIG. 5A, the curved surface 51 may be formed. In these cases, the two or more planes and curved surfaces preferably form a concave surface, and the boundary between the inclined surface and the flat surface can be made inconspicuous.
When the inclined surface is composed of a curved surface, the inclination angle α is an angle formed by the tangent line 54 of the inclined surface (curved surface) 51 at the start end a on the inner edge side and the surface perpendicular to the flat surface. Further, when the inclined surface is composed of two or more planes, the inclination angle α is an angle formed by the surface 52 including the inner edge side start end a and the surface perpendicular to the flat surface.

Further, it is preferable that the start end a on the inner edge side of the inclined surface coincides with the inner edge of the film adhesive surface of the pellicle frame 11 from the viewpoint of ease of design and processing, which are shown in FIGS. 6 (a) and 6 (b). As described above, a flat surface portion 61 or an inclined surface (reverse inclined surface) 62 that is lowered from the outer edge side toward the inner edge side may be provided from the inner edge side starting end a to the inner edge of the film adhesive surface. If such a flat surface portion 61 or an inverted inclined surface 62 is provided, the angle of the angle with the inner edge side starting end a as the apex can be increased, so that burrs, burrs, defects, etc. may occur in the processing of the pellicle frame. Can be prevented.
The inner edge side starting end a of the inclined surface is preferably located within 0.2 mm from the inner edge of the surface on which the pellicle film is installed.

When the inclined surface 12a is configured by one plane as shown in FIG. 4, the inclination angle α is determined by the width w and the height h of the inclined surface 12a. The smaller the width w and the larger the height h, the smaller the inclination angle α, and a more reliable effect of preventing the pellicle film from twitching can be expected.

On the other hand, since the overall height of the pellicle is determined by the specifications of the exposure apparatus to be used, the height H of the pellicle frame main body decreases as the height h of the inclined surface 12a increases. As a result, the cross-sectional area of the pellicle frame is reduced, and the rigidity and strength are lowered. Further, as the height h becomes larger, it becomes more difficult to adhere the pellicle film to the film adhesive layer without entraining air. Therefore, the height h of the inclined surface 12a is preferably 0.5 to 5% of the height (h + H) of the entire pellicle frame. Further, it is preferably in the range of 0.03 to 0.3 mm, and more preferably in the range of 0.05 to 0.15 mm.

Further, when the width w of the inclined surface 12a is increased, it is necessary to increase the height h of the inclined surface 12a in order to make the inclination angle α within a desired range, and as described above, in terms of appearance and use. It can be a problem. Therefore, the width w of the inclined surface 12a is preferably in the range of 0.3 to 3 mm, and more preferably in the range of 0.5 to 1.5 mm.

In particular, as large pellicle used for display applications, many pellicle frame widths on the long side and the short side are different. In that case, the inclined surface 12a is the same on both the long side and the short side. It is preferable to use the dimensions and shape. By having the same size and shape, the inclined surface 12a is convenient when manufactured by machining, and the appearance of the connection shape of the corner portion can be smoothed. FIG. 7 shows the corner portions of the pellicle frame 11, and it is preferable that the inclined surface 12a is uniformly formed including the sides and corner portions having different widths.

The material of the pellicle frame 11 used in the present invention is not only a general aluminum alloy, but also a magnesium alloy, steel, carbon steel, stainless steel, ceramics such as Inver, SiC and SiC, engineering plastics, and fiber reinforced plastics such as CFRP. Can be used. As a manufacturing method, in the case of metal-based materials, machine cutting from plate materials and pipe materials is the most preferable, but in order to reduce costs, rod-shaped materials should be assembled and manufactured from cast products such as die casting and lost wax. You can also. Further, when a plastic material is used, injection molding can be used in addition to the machine cutting process from the plate material.

FIG. 8 is a perspective view showing an embodiment in which the pellicle 80 is configured by using the pellicle frame 11 described above, and FIG. 9 is an enlarged cross-sectional view of a long side. If necessary, the pellicle frame 11 may be provided with a vent hole 84 for ventilating the inside and outside of the pellicle, and a jig hole 85 and a groove 86 used for handling during manufacturing and sticking. Further, on the mask adhesive surface 13 on which the mask adhesive layer 83 is provided, steps, chamfers, and grooves (not shown) may be provided for the purpose of controlling the shape and width of the mask adhesive layer 83.

A film adhesive layer 82 is provided on the film adhesive surface 12 forming the frame shape of the pellicle frame 11, and the pellicle film 81 is adhered thereto. A mask adhesive layer 83 is provided on the mask adhesive surface 13 facing the mask, and silicone is applied to a film having a thickness of 0.5 mm or less such as PET as necessary to protect the adhesive layer on the surface. A separator 88 coated with a system-based or fluorine-based release agent is provided. Further, in the ventilation hole 84 provided on the side surface of the pellicle frame 11, a sheet-like filter 87 made of a porous film such as PTFE is attached via an adhesive layer (not shown) in order to prevent dust from entering the inside. ing.

As the film adhesive layer 82, known ones such as an acrylic adhesive, a fluorine adhesive, and a silicone adhesive can be used. The viscosity of these adhesives is adjusted by diluting them with an appropriate solvent, and the adhesive is applied onto the film adhesive surface 12 which is one surface of the pellicle frame 11 in a liquid amount having a desired thickness. As the coating means, a known one such as an air pressurizing dispenser can be used. The thickness of the film adhesive layer 82 needs to be determined from the adhesive strength, the ease of adhesion, and the appearance, but as an example, the thickness is preferably in the range of 20 to 300 μm.

FIG. 10 shows a state when the film adhesive layer 82 is formed. Immediately after the adhesive is applied, the inclined surface 12a is buried in the adhesive as shown in FIG. 10A. After that, as the solvent dries as shown in FIG. 10B, the adhesive shrinks along the inclined surface 12a to expose the inner edge side starting end a of the inclined surface 12a. Finally, as shown in FIG. 10C, the thickness of the film adhesive layer 82 at the inner edge side start end a of the inclined surface 12a is smaller (thinner) than the thickness of the adhesive layer at the outer edge side end b of the inclined surface 12a. , The effect of the curved surface caused by the surface tension of the film adhesive layer 82 is formed so thin that it can be ignored. At this time, the surface (film adhesive surface) 92 of the adhesive layer in contact with the pellicle film 81 has an inclined surface 92a that is lowered from the inner edge side toward the outer edge side.

When the thickness of the film adhesive layer 82 at the inner edge side starting end a of the inclined surface 12a is thin, an adhesive surface in the direction along the pellicle film 119 such as the curved surface portion 112a as shown in FIG. 13 is formed on the film adhesive layer 82. Since there is no room for the pellicle film 81 to be partially adhered to the film adhesive layer 82, the pellicle film 81 as shown in FIG. 13A of the conventional example is partially contacted and adhered. Therefore, it is possible to prevent a situation in which twitching occurs.

The inner edge side starting end of the inclined surface 92a of the film bonding surface 92 does not necessarily have to coincide with the inner edge of the film bonding surface 12 of the pellicle frame 11, but it is preferable that it coincides with the inner edge side starting end of the film bonding layer 82. This is because when the film adhesive layer 82 shown in FIG. 10C is formed from the inner edge side starting end of the inclined surface 92a of the film adhesive surface 92 to the inner edge side, it depends on the shape of the adhesive layer, but the pellicle film This is because twitching may occur.

However, in the pellicle frame 11 as shown in FIGS. 4 and 5, it is unlikely that the film adhesive layer 82 is formed on the inner edge side of the inclined surface 92a of the film adhesive surface 92 from the inner edge side starting end. In particular, in the pellicle frame 11 as shown in FIG. 6B, it is assumed that the film adhesive layer 82 is formed on the inverted inclined surface 62. In this case, when the film adhesive layer 82 is formed on the inner edge side of the inclined surface 92a from the inner edge side start end a, the film adhesive layer 82 on the inner edge side is a curved surface as shown in FIGS. 13 (a) and 13 (b). The portion 112a may be formed and cause the pellicle film 81 to be twitched. Further, even in the pellicle frame 11 as shown in FIG. 6A, if the film adhesive layer 82 is formed up to the flat surface portion 61 of the inner edge, the pellicle film 81 may be similarly twitched. If the flat surface portion 61 is not too wide and narrow, even if the film adhesive layer 82 is formed up to the inner edge side, there is no room for partial adhesion of the pellicle film 81, so that the pellicle film 81 is hardly twitched. There is no particular problem because it does not occur.

Therefore, in the case of the shape of the pellicle frame 11 as shown in FIGS. 6 (a) and 6 (b), it is preferable not to provide an adhesive layer on the flat surface portion 61 or the reverse inclined portion 62, but the flat surface portion 61 or the reverse This does not apply when the width of the inclined portion 62 is sufficiently narrow and the gradient of the reverse inclined portion 62 is small.

The pellicle film 81 was produced by applying a film material solution such as a cellulosic resin or a fluororesin onto a smooth substrate using a known method such as a spin coating method or a slit coating method, and drying and solidifying the film, for example, 0.1 to 1. A thickness of about 10 μm can be used.

As the material of the mask adhesive layer 83, known materials such as acrylic resin, polybutene resin, SEBS, and silicone resin can be used. As with the film adhesive layer 82, the mask adhesive layer 83 is diluted with an appropriate solvent as necessary and air-added. It is preferable to apply it on the adhesive surface 13 of the mask using a pressure dispenser or the like. As shown in FIG. 9, the shape of the mask adhesive layer 83 may be provided in a plurality of rows or may be formed on the entire surface, in addition to being provided only in a part region of the mask adhesive surface 13. Further, the cross-sectional shape may be convex, or the height of the mask adhesive layer 83 may be adjusted and a flat surface may be crushed in order to improve the flatness.

Then, as shown in FIG. 9, the pellicle constructed as described above has almost no convex curved surface formed by surface tension on the inner edge side of the film adhesive layer 82, or even if the curved surface is formed. Since the influence can be ignored, the pellicle film 81 is completely adhered to the inner edge of the film adhesive layer 82 without any gap, and the pellicle film 81 is not pulled by the film adhesive layer 82 and twitched. As a result, the appearance of the pellicle film 81 is extremely improved near the inner edge of the pellicle frame 11.

<Example 1>
Hereinafter, the present invention will be described in more detail with reference to Examples.

8 and 9 show perspective views and cross-sectional views of the pellicle produced by using the pellicle frame shown in FIGS. 1, 2, 3 and 4.

The pellicle frame 11 was manufactured by machining using a 5000 series aluminum alloy and subjected to black alumite treatment. At this time, the dimensions of the pellicle frame 11 were 756 × 937.5 mm in outer dimensions, 740 × 925.5 mm in inner dimensions, and 5.8 mm in height. The surface (membrane adhesive surface) 12 on which the pellicle film is installed is provided with an inclined surface 12a that is lowered from the inner edge side toward the outer edge side over the entire circumference, and the pellicle film is installed from the outer edge side end b of the inclined surface 12a. A flat surface 12b was formed over the outer edge of the surface.

The inclined surface 12a has a width w = 1 mm and a height h = 0.1 mm, an inclined angle α of about 84.3 °, and a flat surface width of 7 mm on a long side and 5 mm on a short side. The inner edge side starting end a of the inclined surface 12a coincides with the inner edge of the film adhesive surface. The pellicle frame 11 was carried into a class 10 clean room, washed with a surfactant and pure water, and completely dried.

A silicone pressure-sensitive adhesive (manufactured by Shin-Etsu Chemical Co., Ltd.) diluted with toluene was applied onto the mask pressure-sensitive adhesive surface 13 of the pellicle frame 11 with an air pressure dispenser to form the mask pressure-sensitive adhesive layer 83. Further, on the film adhesive surface 12, a silicone adhesive (manufactured by Shin-Etsu Chemical Co., Ltd.) as a pellicle film adhesive is applied with an air pressure dispenser so as to have a thickness of about 80 μm to form a film adhesive layer 82. did. Then, it was heated to 120 ° C. or higher to completely remove the solvent and heat-cure the silicone pressure-sensitive adhesive.

The film adhesive layer 82 has a cross-sectional shape as shown in FIGS. 9 and 10 (c), and the thickness of the film adhesive layer 82 at the inner edge side start end a of the inclined surface 12a is the film adhesion at the outer edge side end b of the inclined surface. It became smaller than the thickness of the layer 82. At this time, the surface (film adhesive surface) 92 of the film adhesive layer 82 in contact with the pellicle film has an inclined surface 92a that is lowered from the inner edge side toward the outer edge side. Further, the inner edge side starting end of the inclined surface 92a of the film adhesive surface 92 coincides with the inner edge side starting end of the film adhesive layer 82.

Then, on the surface of the mask adhesive layer 83, a release agent was applied to a PET film having a thickness of 0.125 mm to protect the surface, and a separator 88 cut out to have substantially the same shape as the outer shape of the frame 11 was attached. Further, a dustproof filter 87 made of a PTFE porous membrane was attached to the outside of the ventilation holes 84 provided on the side surface of the pellicle frame 11 via an acrylic adhesive layer (not shown).

Finally, a fluoropolymer (manufactured by Asahi Glass Co., Ltd.) was formed on a smooth-polished quartz glass substrate by a slit coating method, dried and peeled to obtain a pellicle film 81 having a thickness of about 2.2 μm. The pellicle 80 was completed by pasting through the film adhesive layer 82.

When the completed pellicle 80 was observed, as shown in FIG. 9, the film adhesive layer 82 was formed so as to completely cover the film adhesive surface 12, and was directed toward the inner edge side starting end a of the inclined surface 12a of the pellicle frame 11. The thickness became thinner, and it was extremely thin in the vicinity of the opening end a on the inner edge side, and the cross-sectional shape had a sharp edge.

When the vicinity of the pellicle frame of the pellicle film 81 was observed with respect to the pellicle 80, almost no unadhered region of the pellicle film 81 was observed in the film adhesive layer 82 over the entire inner edge of the pellicle frame 11. Further, the pellicle film 81 was vibrated by an air blow assuming vibration during transportation, but no local wrinkles or twitches were observed in the pellicle film 81, and a good appearance was maintained.

<Comparative example 1>
As Comparative Example 1, the pellicle 110 shown in FIG. 11 was produced using a pellicle frame 111 having the same dimensions as that of Example 1 but different only in cross-sectional shape. Except for the pellicle frame 111 used, the manufacturing process and conditions were all the same as in Example 1. The cross-sectional shape of the pellicle frame 111 used at this time is as shown in FIG. 14, and has a rectangular cross section without protrusions near the inner edge of the pellicle frame 11 as in the first embodiment.

In the pellicle film 119 of the completed pellicle 110, minute film twitching 120 as shown in the enlarged view in FIG. 12 was generated in places near the inner edge of the pellicle frame 111. Further, the cross section of the pellicle 110 is as shown in FIG. 13 (a) where the membrane twitching 120 occurs, while the place where the membrane twitching 120 does not occur is shown in FIG. 13 (b). It was supposed to be.

Further, although the pellicle film adhesive layer 112 was formed to have a substantially uniform thickness, a convex curved surface portion 112a was formed near the inner edge due to the action of the surface tension of the adhesive layer. Then, when the pellicle film 119 sways in a region where the pellicle film 119 has a large slack or when the pellicle film 119 sways due to transportation between processes, the pellicle film 119 comes into contact with and adheres to the curved surface portion 112a, and a twitching 120 occurs. Inferred. And this was not preferable because it made the appearance worse.

11 Pellicle frame 12 Film adhesive surface 12a Inclined surface 12b Flat surface 13 Mask adhesive surface 14 Surface perpendicular to flat surface 51 Curved surface 52 Inclined surface 53 Inclined surface 61 Flat surface 62 Reversely inclined surface 80 Pellicle 81 Pellicle film 82 Film adhesive layer 83 Mask adhesive layer 84 Ventilation hole 85 Jig hole 86 Groove 87 Filter 88 Separator 92 Film adhesive surface of film adhesive layer 92a Inclined surface of film adhesive surface 92b Flat surface of film adhesive surface 110 Pellicle 111 Pellicle frame 112 Film adhesive layer 112a Curved surface Part 113 Mask adhesive layer 114 Ventilation hole 115 Jig hole 116 Groove 117 Filter 118 Separator 119 Pellicle film 120 Twitching part a Inner edge side start end of inclined surface b Outer edge side end of inclined surface w Inclined surface width w'Flat surface Width h Inclined surface height α Inclined surface angle W Width of film adhesive surface of pellicle frame H Height of pellicle frame body

Claims (10)

A pellicle to which a pellicle film is adhered by an adhesive layer provided on one end surface of the pellicle frame.
A pellicle that does not have a convex curved surface portion of the adhesive layer on the inner edge side of the adhesive layer from a portion that is actually adhered to the pellicle film and the adhesive layer. A pellicle to which a pellicle film is adhered by an adhesive layer provided on one end surface of the pellicle frame.
A pellicle in which the pellicle film and the adhesive layer are adhered without gaps at the inner edge of the adhesive layer. A pellicle to which a pellicle film is adhered by an adhesive layer provided on one end surface of the pellicle frame.
A pellicle in which the pellicle film and the adhesive layer are adhered to each other without a gap causing twitching. The pellicle according to claim 1 or 2, wherein the pellicle film and the adhesive layer are adhered to each other without a gap causing twitching. The pellicle according to any one of claims 1 to 4, wherein the adhesive layer has an inclined surface that is lowered from the inner edge side toward the outer edge side. The pellicle according to claim 5, wherein the thickness of the adhesive layer at the start end on the inner edge side of the inclined surface is smaller than the thickness of the adhesive layer at the end on the outer edge side of the inclined surface. A photomask with a pellicle, wherein the pellicle according to any one of claims 1 to 6 is attached to the photomask. An exposure method characterized by exposure using the photomask with a pellicle according to claim 7. A method for manufacturing a semiconductor, which comprises a step of exposing using the photomask with a pellicle according to claim 7. A method for manufacturing a display, which comprises a step of exposing using the photomask with a pellicle according to claim 7.

Images