JP2020194112A - Liquid crystal device manufacturing apparatus, liquid crystal device manufacturing method, and liquid crystal device - Google Patents

Abstract

To provide a liquid crystal device manufacturing apparatus which can simultaneously produce a plurality of liquid crystal devices having a counter substrate having a size smaller than a drive substrate.SOLUTION: A substrate holding plate 31 holds, in correspondence to a plurality of openings 32, a plurality of drive substrates 110 having pixel areas 111 in which a plurality of pixels are formed. A stage 20 is arranged below the substrate holding plate 31 and holds, at positions facing the openings 32, a plurality of counter substrates 103 having light permeability each having a size smaller than the drive substrate 110 and capable of passing through the opening 32. A weighting member 50 is arranged on the plurality of drive substrates 110. A drive unit 21 drives the stage 20 or the substrate holding plate 31 so that the stage 20 and the substrate holding plate 31 are moved closer to or away from each other. A control unit 4 controls the drive unit 21 so that the stage 20 and the substrate holding plate 31 are moved closer to or away from each other by the drive unit 21.SELECTED DRAWING: Figure 1

Description

The present invention relates to a liquid crystal device manufacturing apparatus, a liquid crystal device manufacturing method, and a liquid crystal device.

Liquid crystal devices are used in display devices, optical switching devices, and the like. The liquid crystal device generates image light by light-modulating the irradiated illumination light for each pixel, or adjusts the refractive index of the liquid crystal to change the wave surface of the signal light. Patent Document 1 describes an example of a method for manufacturing a liquid crystal device.

Japanese Unexamined Patent Publication No. 2001-91931

There is a batch bonding method in which a semiconductor substrate and a glass substrate are bonded to each other to produce a structure, and the structure is divided into liquid crystal device units to simultaneously produce a plurality of liquid crystal devices. In the batch bonding method, if a defective region exists on the semiconductor substrate, the liquid crystal device corresponding to the defective region becomes a defective product. That is, in the batch bonding method, if the semiconductor substrate has a defective region, a defective liquid crystal device is also manufactured.

Efficiently manufacture a good liquid crystal device by dividing a semiconductor substrate to select a non-defective drive substrate, dividing a glass substrate to produce an opposed substrate, and laminating the non-defective drive substrate and the opposing substrate. Can be done.

However, since the drive board and the opposing substrate, which are separated for each liquid crystal device, are bonded to each other, it is not possible to efficiently bond the drive board and the facing substrate so as to be parallel to each other as compared with the batch bonding method. Have difficulty. Therefore, the in-plane variation of the cell gap corresponding to the gap between the drive substrate and the facing substrate becomes large, which causes deterioration of the performance of the liquid crystal device.

By the way, in the liquid crystal device described in Patent Document 1, the opposed substrate made of a glass substrate is smaller than the drive substrate. A liquid crystal device manufacturing apparatus and a liquid crystal device manufacturing method capable of simultaneously manufacturing a plurality of liquid crystal devices having a configuration in which the facing substrate is smaller than the driving board by laminating a plurality of driving boards and a plurality of facing boards in parallel. Desired.

INDUSTRIAL APPLICABILITY The present invention is an apparatus for manufacturing a liquid crystal device and a liquid crystal device capable of simultaneously manufacturing a plurality of liquid crystal devices having a configuration in which the facing substrate is smaller than the driving substrate by bonding a plurality of driving boards and a plurality of facing substrates in parallel. It is an object of the present invention to provide a liquid crystal device having a terminal structure suitable for a structure in which a counter substrate is smaller than a drive substrate.

In the present invention, a substrate holding plate for holding a plurality of driving boards having a pixel region in which a plurality of openings are formed and a plurality of pixels are formed corresponding to the openings, and a substrate holding plate below the substrate holding plate. A stage for holding a plurality of light-transmitting facing substrates, which are arranged and facing each of the openings, which are smaller than the driving substrate and have a size capable of inserting the openings, and the substrate holding plate. A weighting member arranged on the plurality of drive boards held above, and a drive unit that drives the stage or the board holding plate so as to approach or separate the stage and the board holding plate from each other. Provided is an apparatus for manufacturing a liquid crystal device including a control unit that controls the drive unit so that the stage and the substrate holding plate are brought close to each other or separated from each other by the drive unit.

In the present invention, a plurality of drive substrates having pixel regions in which a plurality of pixels are formed are arranged so as to correspond to each opening of the substrate holding plate in which the plurality of openings are formed, and below the substrate holding plate. A plurality of light-transmitting facing substrates that are smaller than the drive substrate and have a size that allows the openings to be inserted are arranged at positions facing the respective openings on the arranged stage, and each facing substrate is arranged. A liquid crystal is dropped onto the drive substrate, a sealing material is applied at a position surrounding the pixel region of the drive substrate, and a weighting member is arranged on the plurality of drive substrates arranged on the substrate holding plate. The stage or the substrate holding plate is driven to bring the stage and the substrate holding plate close to each other, and each opposed substrate is inserted through the opening to approach each drive substrate. Provided is a method for manufacturing a liquid crystal device in which each drive substrate and each opposite substrate are bonded to each other via the liquid crystal and the sealing material, and the sealing material is cured to produce a plurality of liquid crystal devices.

In the present invention, a drive substrate having a pixel region in which a plurality of pixels are formed, an opposing substrate having light transmittance and smaller than the drive substrate, and the driven substrate are arranged in an annular shape along the outer periphery of the pixel region. A sealing material for bonding the substrate and the facing substrate with a gap, a liquid crystal filled in the gap and sealed by the sealing material, and a protrusion in the drive substrate in a first direction from the facing substrate. It is formed in a first terminal group formed in the first region to be formed and a second region of the drive substrate protruding in a second direction opposite to the first direction with respect to the opposed substrate. Provided is a liquid crystal device including a second terminal group.

According to the liquid crystal device manufacturing apparatus and the liquid crystal device manufacturing method of the present invention, a plurality of drive substrates and a plurality of facing substrates are bonded in parallel to form a plurality of liquid crystal devices having a configuration in which the facing substrates are smaller than the drive substrates. It can be produced at the same time. According to the liquid crystal device of the present invention, the terminal structure can be made suitable for a structure in which the opposing substrate is smaller than the drive substrate.

It is a block diagram which shows the manufacturing apparatus of the liquid crystal device of one Embodiment. It is a top view which shows the 1st structural example of the liquid crystal device of one Embodiment. It is sectional drawing which cut at AA of FIG. It is sectional drawing which cut at BB of FIG. FIG. 2 is a partially enlarged view of FIG. 2 showing an electrical connection between a transparent electrode provided on a facing substrate and a drive substrate. FIG. 4 is a partially enlarged view of FIG. 4 showing an electrical connection between a transparent electrode provided on a facing substrate and a drive substrate. It is a top view which shows the 2nd structural example of the liquid crystal device of one Embodiment. It is a top view which shows the 3rd structural example of the liquid crystal device of one Embodiment. FIG. 5 is a partial cross-sectional view showing a state in which a drive substrate and an opposing substrate are bonded together while being weighted by using a weighting member selected from a plurality of weighting members having different thicknesses or weights. FIG. 5 is a partial cross-sectional view showing a state in which a drive substrate and an opposing substrate are bonded together while being weighted by using a plurality of weighting members selectively combined from a plurality of weighting members. It is a flowchart which shows the manufacturing method of the liquid crystal device of one Embodiment. Brightness of an image when a red liquid crystal device, a green liquid crystal device, and a blue liquid crystal device are manufactured by preventing the pixel region from being irradiated with ultraviolet rays by a shading mask by the liquid crystal device manufacturing apparatus of one embodiment. It is a characteristic diagram which conceptually shows the time-dependent change of. The liquid crystal device manufacturing apparatus of one embodiment is used to produce a red liquid crystal device and a green liquid crystal device so that the pixel region is not irradiated with ultraviolet rays by a light-shielding mask, and the pixel region is irradiated with ultraviolet rays. It is a characteristic diagram which conceptually shows the time-dependent change of the brightness of an image when the liquid crystal device for blue is manufactured. It is a block diagram which shows the manufacturing apparatus of the liquid crystal device of one Embodiment which removed the light-shielding mask.

The liquid crystal device manufacturing apparatus of one embodiment will be described with reference to FIG. Hereinafter, the manufacturing apparatus for the liquid crystal device will be simply referred to as the manufacturing apparatus. The manufacturing apparatus 1 includes a light source 2, a substrate bonding unit 3, and a control unit 4. The control unit 4 controls the light source 2 and the substrate bonding unit 3 based on a set program or instruction information from the operator. A computer device or a CPU (Central Processing Unit) may be used as the control unit 4.

The substrate bonding unit 3 has a chamber 10, a decompression drive unit 11, a stage 20, a stage drive unit 21, and a plate holding unit 30. The chamber 10 has a chamber body 12, a lid 13, and a light transmitting portion 14. The stage 20 and the plate holding portion 30 are housed in the chamber 10. A vacuum pump may be used as the decompression drive unit 11. The stage 20 and the light transmitting portion 14 have light transmitting property. Specifically, the stage 20 and the light transmitting portion 14 transmit ultraviolet rays. A quartz glass plate may be used as the stage 20 and the light transmitting portion 14.

The control unit 4 can open and close the lid 13 by controlling the substrate bonding unit 3. The control unit 4 can seal the inside of the chamber 10 by bringing the lid 13 into close contact with the chamber body 12. The operator may open and close the lid 13. In a state where the inside of the chamber 10 is sealed, the control unit 4 can reduce the pressure inside the chamber 10 by driving the decompression drive unit 11.

A first configuration example of the liquid crystal device manufactured by the manufacturing apparatus 1 will be described with reference to FIGS. 2 to 4. FIG. 2 shows a state in which the liquid crystal device 100 of one embodiment is viewed from the opposite substrate side. FIG. 3 is a cross-sectional view of the liquid crystal device 100 cut at AA of FIG. 2, and FIG. 4 is a cross-sectional view of the liquid crystal device 100 cut at BB of FIG.

The liquid crystal device 100 of the first configuration example includes a drive substrate 110, an opposing substrate 103, a sealing material 102, and a liquid crystal 101. For example, by cutting a semiconductor substrate produced by a semiconductor process to a desired size, a plurality of drive substrates 110 can be produced at the same time. The facing substrate 103 has light transmission. For example, by cutting a glass substrate to a desired size, a plurality of opposed substrates 103 can be manufactured at the same time.

The drive board 110 has a pixel region 111 in which a plurality of pixels are formed. The drive board 110 has a plurality of end faces EF110a to EF110d. Each of the plurality of end faces EF110a to EF110d is a cut surface having a shape that is continuously cut. The end face EF110a is an end face in the first direction, and the end face EF110b is an end face in the second direction opposite to the first direction. The end face EF110c is an end face in the third direction, and the end face EF110d is an end face in the fourth direction opposite to the third direction.

The first and second directions are, for example, the longitudinal direction of the drive board 110, and the left-right direction in FIG. The third and fourth directions are, for example, the lateral direction of the drive board 110 and the vertical direction of FIG. The first and second directions and the third and fourth directions are orthogonal to each other. The lateral direction of the drive board 110 may be the first and second directions, and the longitudinal direction of the drive board 110 may be the first and second directions.

In the drive board 110 shown in FIG. 2, the end face EF110a is the left end face, the end face EF110b is the right end face, the end face EF110c is the lower end face, and the end face EF110d is the upper end face.

The facing substrate 103 has a plurality of end faces EF103a to EF103d. Each of the plurality of end faces EF103a to EF103d is a cut surface having a shape that is continuously cut. The end face EF103a is an end face in the first direction, and the end face EF103b is an end face in the second direction. The end face EF103c is an end face in the third direction, and the end face EF103d is an end face in the fourth direction. In the opposed substrate 103 shown in FIG. 2, the end face EF103a is the left end face, the end face EF103b is the right end face, the end face EF103c is the lower end face, and the end face EF103d is the upper end face.

In the drive board 110, the end face EF110a is located outside the end face EF103a of the facing board 103, and the end face EF110b is located outside the end face EF103b of the facing board 103. The drive substrate 110 has a region RG110a (first region) protruding in the first direction from the facing substrate 103, and a region RG110b (second region) protruding in the second direction from the facing substrate 103. ..

In the drive board 110, the end face EF110c is located outside the end face EF103c of the facing board 103, and the end face EF110d is located outside the end face EF103d of the facing board 103. The drive board 110 has a region RG110c (third region) protruding in a third direction from the facing substrate 103, and a region RG110d (fourth region) protruding in a fourth direction from the facing board 103. .. Regions RG110c and RG110d may be the first and second regions, and regions RG110a and RG110b may be the third and fourth regions.

The drive board 110 has a plurality of terminal groups 112a to 112d in which a plurality of terminals are arranged. The terminal group 112a (first terminal group) is formed on the drive substrate 110 in a region RG110a which is a region near the end face EF110a (a region on the end face EF110a side). The terminal group 112b (second terminal group) is formed on the drive substrate 110 in a region RG110b which is a region near the end face EF110b (a region on the end face EF110b side).

The terminal group 112c (third terminal group) is formed in a region RG110c which is a region near the end face EF110c (a region on the end face EF110c side) on the drive substrate 110. The terminal group 112d (fourth terminal group) is formed on the drive substrate 110 in a region RG110d which is a region near the end face EF110d (a region on the end face EF110d side). The terminal groups 112c and 112d may be the first and second terminal groups, and the terminal groups 112a and the terminal group 112b may be the third and fourth terminal groups.

The terminal groups 112a to 112d are terminals that supply a control signal to the liquid crystal device 100, terminals that supply a timing signal to the liquid crystal device 100, terminals that supply an applied voltage to each pixel of the pixel region 111, and data signals from the liquid crystal device 100. Includes output terminals.

The sealing material 102 is arranged in an area outside the pixel area 111, and is arranged in an annular shape along the outer circumference of the pixel area 111 so as to surround the pixel area 111. The drive board 110 and the facing board 103 are bonded to each other with a gap by the sealing material 102 so that the pixel region 111 faces the facing board 103. The liquid crystal 101 is filled in the gap between the drive substrate 110 and the facing substrate 103, and is sealed by the sealing material 102.

Although not shown in FIGS. 2 to 4, the transparent electrode provided on the facing substrate 103 and the driving substrate 110 are electrically connected to each other. As shown in FIGS. 5 and 6 which are partially enlarged views of FIGS. 2 and 4, the drive board 110 is provided with a connection pad 115. The conductive material 105 is arranged at a position facing the connection pad 115 on the surface of the facing board 103 facing the drive board 110.

Typically, the conductive material 105 is constructed by mixing silica particles coated with gold or silver into a sealing material. The particle size of the particles is slightly larger than the thickness of the liquid crystal 101 between the driving substrate 110 and the facing substrate 103, that is, the thickness of the sealing material 102. The conductive material 105 is pressurized by bonding the drive substrate 110 and the counter substrate 103 by the manufacturing apparatus 1 described later, and the conductive material 105 bites into both the connection pad 115 and the transparent electrode of the counter substrate 103, and the transparent electrode and the drive substrate The 110 is electrically connected. The number and position of the connecting portions of the conductive material 105 and the connecting pad 115 are arbitrary.

7 and 8 show second and third configuration examples of the liquid crystal device 100, respectively. The same components as those of the liquid crystal device 100 shown in FIG. 2 are designated by the same reference numerals. As shown in FIG. 7, the liquid crystal device 100 of the second configuration example has regions RG110a and RG110b in which terminal groups 112a and 112b are formed, respectively. As shown in FIG. 8, the liquid crystal device 100 of the third configuration example has regions RG110c and RG110d in which terminal groups 112c and 112d are formed, respectively.

That is, as shown in FIG. 7, the liquid crystal device 100 manufactured by the manufacturing apparatus 1 has at least a region RG110a in which the terminal group 112a is formed so as to project in the first direction from the facing substrate 103, and the facing substrate 103. It has a region RG110b in which a terminal group 112b is formed so as to project in a second direction. Alternatively, as shown in FIG. 8, the liquid crystal device 100 manufactured by the manufacturing apparatus 1 protrudes in a third direction from the facing substrate 103, and has a region RG110c in which the terminal group 112c is formed and the facing substrate 103. It has a region RG110d in which a terminal group 112d is formed so as to project in a fourth direction.

As described above, the direction in which the region RG110c in which the terminal group 112c is formed may be the first direction, and the direction in which the region RG110d in which the terminal group 112d is formed may be the second direction. The direction in which the region RG110a in which the terminal group 112a is formed may be the third direction, and the direction in which the region RG110b in which the terminal group 112b is formed may be the fourth direction.

As shown in FIG. 1, the stage 20 has a plurality of recesses 22 for positioning and holding the plurality of opposed substrates 103. The stage 20 positions the plurality of opposed substrates 103 by the plurality of recesses 22 and holds them in a detachable manner. The light-shielding mask 40 is arranged on the bottom surface of the recess 22. The light-shielding mask 40 can be formed by forming a light-shielding film such as chromium in a predetermined region on the bottom surface of the recess 22.

The facing substrate 103 is held on the stage 20 in a state where a predetermined amount of liquid crystal 101 is dropped onto the facing substrate 103 and the sealing material 102 is applied. An ultraviolet curable resin may be used as the sealing material 102.

The plate holding portion 30 is fixed to the chamber body 12. The plate holding portion 30 holds the substrate holding plate 31 so as to be parallel to the stage 20. The substrate holding plate 31 has a plurality of openings 32 at positions facing the plurality of recesses 22 of the stage 20. The opening 32 has a size capable of inserting the facing substrate 103.

The substrate holding plate 31 has a step 33 (see FIG. 9 or 10) in each opening 32 for positioning and holding the drive substrate 110. The step 33 is formed at the end of the opening 32. In the drive board 110, the region RG110a (or region RG110c) and the region RG110b (or region RG110d) are held by the step 33. The substrate holding plate 31 positions the plurality of drive substrates 110 by the step portions 33 in the plurality of openings 32 and holds them in a detachable manner. That is, the plate holding portion 30 holds a plurality of drive boards 110 via the board holding plate 31.

Only the drive board 110 determined to be a non-defective product by inspection is held on the board holding plate 31. The drive board 110 is held by the board holding plate 31 so that the pixel region 111 faces the facing board 103.

The liquid crystal 101 is dropped on the facing substrate 103 at a position corresponding to the central portion of the pixel region 111. The sealing material 102 is annularly coated on the facing substrate 103 at a position corresponding to the outer peripheral portion of the pixel region 111 so as to surround the pixel region 111.

In a state where the plurality of opposing boards 103 are held by the stage 20 and the board holding plates 31 holding the plurality of driving boards 110 are held by the plate holding portion 30, the plurality of driving boards 110 and the plurality of facing boards 103 Are positioned parallel to each other and facing each other. While the substrate holding plate 31 is held by the plate holding portion 30, the control unit 4 can move the stage 20 closer to or further from the substrate holding plate 31 by controlling the stage driving unit 21. ..

In a state where the plurality of opposed substrates 103 are held on the stage 20 and the substrate holding plate 31 on which the plurality of driving boards 110 are held is held by the plate holding portion 30, the light-shielding mask 40 covers the range corresponding to the pixel area 111. It is located in the area containing.

The weighting member 50 is arranged on a plurality of drive boards 110. The weighting member 50 is made of a metal plate. A surface plate may be used as the weighting member 50. The surface of the weighting member 50 facing the drive substrate 110 is flat. The manufacturing apparatus 1 may include a transfer mechanism for moving or retracting the weighting member 50 onto the plurality of drive boards 110, and the operator may execute the above transfer.

As shown in FIG. 9, a plurality of weighting members 50 having different thicknesses t50 or weights may be prepared, and the weighting members 50 selected from the plurality of weighting members 50 may be arranged on the plurality of drive boards 110. .. The manufacturing apparatus 1 selects a weighting member 50 having a desired thickness or weight from a plurality of weighting members 50 based on a set program or instruction information from the operator. The manufacturing apparatus 1 may include a transfer mechanism for moving or retracting the selected weighting member 50 onto the plurality of drive boards 110, and the operator may execute the above transfer.

As shown in FIG. 10, a plurality of weighting members 50 may be prepared, and an arbitrary number of weighting members 50 selectively combined from the plurality of weighting members 50 may be arranged on the plurality of drive boards 110. FIG. 10 shows a state in which the three weighting members 50 are arranged on the plurality of drive boards 110. Based on the set program or the instruction information from the operator, the manufacturing apparatus 1 selects a set number of weighting members 50 from the plurality of weighting members 50. The manufacturing apparatus 1 may include a transfer mechanism for moving or retracting a selected number or combination of weighting members 50 so as to be stacked on a plurality of drive boards 110, and the operator executes the above transfer. You may.

The method of manufacturing the liquid crystal device of one embodiment will be described with reference to the flowchart shown in FIG. As shown in FIG. 1, the plurality of opposed substrates 103 are held in the plurality of recesses 22 of the stage 20. The plurality of drive boards 110 are held by a plurality of step portions 33 of the board holding plate 31 so that the pixel region 111 faces the facing board 103. The substrate holding plate 31 is held by the plate holding portion 30.

As shown in FIG. 1, the light-shielding mask 40 is arranged on the bottom surface of the recess 22 of the stage 20 corresponding to the pixel area 111. A set thickness, a set weight, or a set number of weighting members 50 are arranged on the plurality of drive boards 110. The weighting member 50 and the plurality of drive boards 110 are in surface contact with each other.

In a state where the inside of the chamber 10 is sealed, the control unit 4 decompresses the inside of the chamber 10 by controlling the decompression drive unit 11 in step S1. In a state where the inside of the chamber 10 is depressurized, the control unit 4 moves the stage 20 from the initial position to a predetermined position by controlling the stage drive unit 21 in step S2 (moves upward in FIG. 1). ), And the stage 20 and the substrate holding plate 31 are brought close to each other. Then, each of the opposing substrates 103 approaches each of the driving substrates 110 through the opening 32, and each of the driving substrates 110 and each of the opposing substrates 103 are bonded to each other via the liquid crystal 101 and the sealing material 102.

The stage 20 may have a heating unit. The control unit 4 may heat the facing substrate 103 within a predetermined temperature range by controlling the heating unit. By heating the opposed substrate 103, the viscosity of the liquid crystal 101 is lowered and the liquid crystal 101 is flattened, so that the sealing material 102 can be brought into contact with the drive substrate 110 before the liquid crystal 101.

9 and 10 show a state in which the drive substrate 110 and the facing substrate 103 are bonded to each other via the sealing material 102 and the liquid crystal 101. The drive board 110 is pushed up by the stage 20 (opposite board 103) and is slightly separated from the board holding plate 31. As a result, the gravity of the weighting member 50 is applied to the drive board 110. The degree of weighting on the drive substrate 110 can be changed according to the thickness, weight, or number of the weighting members 50. By adjusting the degree of load on the drive board 110, the distance (cell gap) between the drive board 110 and the facing board 103 can be adjusted.

Since the gravity of the weighting member 50 is applied to the plurality of drive boards 110 in a state where the weighting member 50 and the plurality of drive boards 110 are in surface contact, the in-plane distribution of the cell gap is compared with the case where the weight member 50 is not used. Can be improved. Further, the in-plane distribution of the cell gap can be improved by adjusting the degree of load on the plurality of drive substrates 110.

In step S3, the control unit 4 controls the decompression drive unit 11 to change the inside of the chamber 10 from the decompression state to the atmospheric pressure state. The control unit 4 may stop the decompression drive unit 11 and the operator may bring the chamber 10 into an atmospheric pressure state.

In a state where the inside of the chamber 10 is at atmospheric pressure and the gravity of the weighting member 50 is applied to the plurality of drive boards 110, the control unit 4 controls the light source 2 in step S4 from the light source 2. Light having a predetermined wavelength band (for example, ultraviolet UV) is irradiated toward the substrate bonding portion 3. The ultraviolet UV rays pass through the light transmitting portion 14, the stage 20, and the facing substrate 103 and irradiate the sealing material 102. Since the pixel region 111 of the drive substrate 110 is shielded by the light-shielding mask 40, the ultraviolet UV is not irradiated to the pixel region 111.

Since the sealing material 102 is cured by ultraviolet UV, the manufacturing apparatus 1 has the drive substrate 110 and the facing substrate 103 in a state where the cell gap is adjusted to the target cell gap and the target in-plane distribution by the weighting member 50. Can be bonded by the sealing material 102. The liquid crystal 101 is filled in the gap between the drive substrate 110 and the facing substrate 103, and is sealed by the sealing material 102. As a result, a plurality of liquid crystal devices 100 as shown in FIGS. 2, 7, or 8 can be manufactured at the same time.

In step S5, the control unit 4 controls the light source 2 to stop the irradiation of ultraviolet UV rays. Further, the control unit 4 opens the lid 13 by controlling the substrate bonding unit 3. The operator may open the lid 13. After the operator takes out the weighting member 50 and the plurality of liquid crystal devices 100 from the chamber 10, the control unit 4 moves the stage 20 from the predetermined position to the initial position in step S6 (moves downward in FIG. 1). Let me. The manufacturing apparatus 1 ends the bonding process between the drive board 110 and the facing board 103. The operator may execute at least one step of steps S1 to S6, or a part of the process of the step.

According to the liquid crystal device manufacturing apparatus and manufacturing method of the present embodiment, the drive substrate 110 and the opposing substrate 103 are bonded to each other by the sealing material 102 in the above steps S1 to S6, and the liquid crystal 101 is attached to the driving substrate 110 and the opposing substrate 103. It is filled in the gap with the seal material 102 and sealed with the sealing material 102. According to the liquid crystal device manufacturing apparatus and manufacturing method of the present embodiment, it is possible to simultaneously manufacture a plurality of liquid crystal devices 100 having a target cell gap and having a cell gap adjusted to a target in-plane distribution. Therefore, according to the liquid crystal device manufacturing apparatus and manufacturing method of the present embodiment, a plurality of liquid crystal devices 100 can be manufactured at the same time by laminating a plurality of drive substrates 110 and a plurality of facing substrates 103 in parallel.

According to the liquid crystal device manufacturing apparatus and manufacturing method of the present embodiment, the substrate holding plate 31 for holding the plurality of drive substrates 110 is arranged above, and the stage 20 for holding the plurality of opposed substrates 103 is arranged below. Therefore, according to the liquid crystal device manufacturing apparatus and manufacturing method of the present embodiment, it is possible to simultaneously manufacture a plurality of liquid crystal devices 100 having a configuration in which the opposed substrate 103 is smaller than the drive substrate 110.

In the liquid crystal device 100 of the present embodiment, the first terminal group is formed in the first region of the drive substrate 110 that protrudes in the first direction from the facing substrate 103, and the second terminal group is formed on the side opposite to the first direction. A second terminal group is formed in the second region protruding in the direction of. Preferably, in the liquid crystal device 100, in addition to the first and second terminal groups, a third terminal group is formed in a third region projecting in a third direction orthogonal to the first direction, and a third terminal group is formed. A fourth terminal group is formed in a fourth region protruding in a fourth direction opposite to the direction of the above. The liquid crystal device 100 has a terminal structure suitable for a structure in which the facing substrate 103 is smaller than the drive substrate 110.

When the liquid crystal device 100 is used as a display device, the liquid crystal device 100 generates image light by light-modulating the irradiated illumination light for each pixel. The display device displays an image by projecting image light onto a screen or the like. 12 and 13 conceptually show the change in brightness of the image over time.

The lines indicated by the reference numerals R1 and R2 in FIGS. 12 and 13 show an example of the change over time in the brightness of the image (red image) when the liquid crystal device 100 (liquid crystal device for red) is irradiated with the red illumination light. There is. The lines indicated by the reference numerals G1 and G2 show an example of the change over time in the brightness of the image (green image) when the liquid crystal device 100 (green liquid crystal device) is irradiated with the green illumination light. The lines indicated by reference numerals B1 and B2 show an example of the time-dependent change in the brightness of the image (blue image) when the liquid crystal device 100 (blue liquid crystal device) is irradiated with the blue illumination light.

FIG. 12 shows the brightness R1, G1 and brightness of the red image, the green image, and the blue image when the light-shielding mask 40 is used when the red liquid crystal device, the green liquid crystal device, and the blue liquid crystal device are manufactured. An example of the time course of B1 is shown. At time t1 (for example, at the time of shipment), the red liquid crystal device, the green liquid crystal device, and the blue liquid crystal device are adjusted so that the brightness of the red image, the green image, and the blue image is the same. Generally, at time t2 after a predetermined time has elapsed from time t1, the brightness B1 of the blue image becomes darker than the brightness R1 and G1 of the red image and the green image. Therefore, at time t2, the white balance of the image deteriorates as compared with time t1.

FIG. 13 shows a red image, a green image, and a blue image when the light-shielding mask 40 is used when the red liquid crystal device and the green liquid crystal device are manufactured, and the light-shielding mask 40 is not used when the blue liquid crystal device is manufactured. Shows an example of changes in brightness R2, G2, and B2 over time.

FIG. 14 shows a manufacturing apparatus 1 having a configuration in which the light-shielding mask 40 is not arranged on the stage 20. When producing a blue liquid crystal device, the light-shielding mask 40 is not arranged on the stage 20 shown in FIG. 14 instead of the manufacturing apparatus 1 having the light-shielding mask 40 arranged on the stage 20 shown in FIG. It is preferable to use the manufacturing apparatus 1. When manufacturing a blue liquid crystal device, the manufacturing apparatus 1 shown in FIG. 14 irradiates the liquid crystal 101 on the pixel region 111 with ultraviolet UV in step S4, so that the brightness B2 of the blue image becomes stable over time. A liquid crystal device for blue color can be produced.

As shown in FIG. 13, at time t1 (for example, at the time of shipment), the red liquid crystal device, the green liquid crystal device, and the blue liquid crystal device have the same brightness of the red image, the green image, and the blue image. It has been adjusted to. Since the brightness B2 of the blue image is stable over time, it is possible to reduce the variation due to the change over time between the brightness R2 of the red image, the brightness G2 of the green image, and the brightness B2 of the blue image at time t2. it can. As a result, deterioration of the white balance of the image at time t2 can be suppressed.

The manufacturing apparatus 1 may be configured such that the light-shielding mask 40 is detachably attached from the stage 20. In this case, when the red liquid crystal device and the green liquid crystal device are manufactured, the liquid crystal device 100 is manufactured with the light-shielding mask 40 attached to the stage 20. When producing a blue liquid crystal device, the liquid crystal device 100 is produced with the light-shielding mask 40 removed from the stage 20.

The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention.

In the present embodiment, the stage 20 is driven so as to approach or separate from the substrate holding plate 31, and the plate holding portion 30 for holding the substrate holding plate 31 is fixed to the chamber body 12. The substrate holding plate 31 may be driven so as to approach or separate from the stage 20, and the stage 20 may be fixed to the chamber body 12.

In this case, the manufacturing apparatus 1 includes a plate driving unit that drives the substrate holding plate 31 (or the plate holding unit 30) instead of the stage driving unit 21, and the control unit 4 controls the plate driving unit to hold the substrate. The plate 31 is brought closer to or further away from the stage 20. That is, the manufacturing apparatus 1 includes a drive unit that drives the stage 20 or the substrate holding plate 31 (plate holding unit 30) so that the stage 20 and the substrate holding plate 31 are brought close to or separated from each other, and the control unit 4 is driven. You just have to control the part.

A light-shielding mask 40 may be used when manufacturing a red liquid crystal device and a green liquid crystal device, and a dimming mask may be used when manufacturing a blue liquid crystal device. In this case, the dimming mask is arranged on the bottom surface of the recess 22 of the stage 20 corresponding to the pixel area 111 of the drive substrate 110. The amount or intensity of the ultraviolet UV emitted to the liquid crystal 101 on the pixel region 111 can be set according to the transmittance of the dimming mask. By setting the dimming mask to an appropriate transmittance, the brightness B2 of the blue image can be stabilized over time.

The light source 2 is not limited to being arranged outside the chamber 10, and may be housed inside the chamber 10. In this case, the light transmitting portion 14 may not be provided. By controlling the light source 2, the control unit 4 irradiates the light source 2 with light having a predetermined wavelength band (for example, ultraviolet UV) toward the substrate bonding unit 3. The ultraviolet UV rays pass through the stage 20 and the opposing substrate 103 and irradiate the sealing material 102.

1 Manufacturing equipment 2 Light source 4 Control unit 10 Chamber 11 Decompression drive unit 20 Stage 21 Stage drive unit (drive unit)
30 Plate holding part 31 Board holding plate 32 Opening 50 Weighting member 100 Liquid crystal device 101 Liquid crystal 102 Sealing material 103 Opposing board 110 Drive board 111 Pixel area

Claims (8)

A substrate holding plate in which a plurality of openings are formed and a plurality of drive substrates having a pixel region in which a plurality of pixels are formed are held corresponding to the respective openings.
A plurality of light-transmitting opposed substrates, which are arranged below the substrate holding plate and are smaller than the drive substrate and have a size capable of inserting the openings, are held at positions facing the respective openings. Stage and
A weighting member arranged on the plurality of drive boards held on the board holding plate, and
A drive unit that drives the stage or the substrate holding plate so as to approach or separate the stage and the substrate holding plate from each other.
A control unit that controls the drive unit so that the stage and the substrate holding plate are brought close to or separated from each other by the drive unit.
A liquid crystal device manufacturing apparatus comprising. A chamber that houses the substrate holding plate, the stage, and the weighting member, and
A decompression drive unit that depressurizes the inside of the chamber,
With more
The liquid crystal device manufacturing apparatus according to claim 1, wherein the control unit controls the decompression drive unit so as to reduce the pressure in the chamber before the stage and the substrate holding plate are brought close to each other by the drive unit. A sealing material is applied to the facing substrate at a position surrounding the pixel region of the driving substrate facing the facing substrate.
Liquid crystal is dropped on the facing substrate,
A claim further comprising a light source that irradiates the sealing material with light for curing the sealing material in a state where the driving substrate and the facing substrate are bonded to each other by bringing the stage and the substrate holding plate close to each other. 2. The liquid crystal device manufacturing apparatus according to 2. The control unit controls the decompression drive unit so that the inside of the chamber is changed from the decompression state to the atmospheric pressure state, and the sealing material is irradiated with light while the inside of the chamber is in the atmospheric pressure state. The apparatus for manufacturing a liquid crystal device according to claim 3, wherein the light source is controlled. The stage has a light transmittance for transmitting light emitted from the light source.
The chamber has a light transmitting portion that transmits light emitted from the light source.
The light source is located outside the chamber.
The liquid crystal device manufacturing apparatus according to claim 3 or 4, wherein the light source irradiates the sealing material with light via the light transmitting portion, the stage, and the facing substrate. A plurality of drive boards having a pixel region in which a plurality of pixels are formed are arranged so as to correspond to each opening of the substrate holding plate in which the plurality of openings are formed.
A plurality of light-transmitting facing substrates that are smaller than the driving substrate and have a size that allows the openings to be inserted at positions facing each opening on the stage arranged below the substrate holding plate. Place and
A liquid crystal is dropped onto each of the opposing substrates, and a sealing material is applied to a position surrounding the pixel region of the drive substrate.
A weighting member is arranged on the plurality of drive boards arranged on the substrate holding plate, and the weight is applied to the plurality of drive boards.
By driving the stage or the substrate holding plate, the stage and the substrate holding plate are brought close to each other, and each opposing substrate is brought close to each driving substrate by inserting the opening, each of the driving substrates and each of them. The facing substrate is bonded to the liquid crystal and the sealing material via the liquid crystal and the sealing material.
A method for manufacturing a liquid crystal device for producing a plurality of liquid crystal devices by curing the sealing material. A drive board having a pixel region in which a plurality of pixels are formed,
An opposing substrate that has light transmission and is smaller than the drive substrate,
A sealing material that is arranged in an annular shape along the outer circumference of the pixel region and that adheres the driving substrate and the facing substrate with a gap.
The liquid crystal filled in the gap and sealed by the sealing material,
A first terminal group formed in a first region of the drive board that protrudes in a first direction from the facing board, and
A second terminal group formed in a second region of the drive board that protrudes in a second direction opposite to the first direction with respect to the facing board.
Liquid crystal device equipped with. A third terminal group formed in a third region of the drive board that protrudes in a third direction orthogonal to the first direction from the facing board.
A fourth terminal group formed in a fourth region of the drive board that protrudes in a fourth direction opposite to the third direction from the opposite board.
7. The liquid crystal device according to claim 7.

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