JP2020193687A - Spring member, actuator and lens driving device - Google Patents

Spring member, actuator and lens driving device Download PDF

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JP2020193687A
JP2020193687A JP2019100968A JP2019100968A JP2020193687A JP 2020193687 A JP2020193687 A JP 2020193687A JP 2019100968 A JP2019100968 A JP 2019100968A JP 2019100968 A JP2019100968 A JP 2019100968A JP 2020193687 A JP2020193687 A JP 2020193687A
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spring
fixed
spring member
leaf spring
fixing portion
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JP7330761B2 (en
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日向 章二
Shoji Hiuga
章二 日向
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Nidec Sankyo Corp
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Nidec Sankyo Corp
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Priority to JP2019100968A priority Critical patent/JP7330761B2/en
Priority to CN202010439654.XA priority patent/CN112018987A/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K33/00Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/02Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with armatures moved one way by energisation of a single coil system and returned by mechanical force, e.g. by springs
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification

Abstract

To provide a spring member that can utilize characteristics of both a leaf spring and a viscoelastic body, and make efficient an operation to connect a movable body and a fixed body.SOLUTION: A spring member 10 has a leaf spring 8 and a viscoelastic body 9 fixed to the leaf spring 8, and the viscoelastic body 9 is arranged at a spring part 80 of the leaf spring 8. Characteristics of both the leaf spring 8 and the viscoelastic body 9 can, therefore, be utilized, so desired vibration characteristics are easily obtained. Further, the viscoelastic body 9 can suppress the leaf spring 8 from deforming large owing to an impact to become unable to restore itself into its original shape to have high impact resistance. The leaf spring 8 comprises arms 83 which extend spirally between a first fixed part 81 and a second fixed part 82, and also comprises a slit-shaped separation hole 89 provided between adjacent arms 83. The viscoelastic body 9 comprises a filling part 90 arranged in the separation hole 89 and a part protruding from the spring part 80 to both sides in a plate thickness direction LA (surface outward direction).SELECTED DRAWING: Figure 1

Description

本発明は、固定体と可動体とを接続するばね部材、固定体に対して可動体を振動させるアクチュエータ、ならびにレンズを光軸方向に移動させるレンズ駆動装置に関する。 The present invention relates to a spring member that connects a fixed body and a movable body, an actuator that vibrates the movable body with respect to the fixed body, and a lens driving device that moves a lens in the optical axis direction.

アクチュエータとして、固定体および可動体と、可動体を駆動する磁気駆動機構を備えるとともに、可動体と固定体とを接続体によって接続したものがある。特許文献1のアクチュエータ(リニアアクチュエータ)は、可動体と固定体とを接続するばね部材と、可動体と固定体とが可動体の振動方向で対向する箇所に配置される粘弾性部材を備える。粘弾性部材は、シリコーンゲルなどのゲル状ダンパー部材である。可動体は、ばね部材によって固定体に対して振動可能に支持される。また、可動体が振動する際、ゲル状ダンパー部材が潰れる方向に変形するので、ばね部材と可動体との共振が抑制される。これにより、可動体の過度な振動を抑制でき、可動体と固定体とが衝突することを抑制できる。 Some actuators include a fixed body and a movable body, and a magnetic drive mechanism for driving the movable body, and the movable body and the fixed body are connected by a connecting body. The actuator (linear actuator) of Patent Document 1 includes a spring member that connects the movable body and the fixed body, and a viscoelastic member that is arranged at a position where the movable body and the fixed body face each other in the vibration direction of the movable body. The viscoelastic member is a gel-like damper member such as a silicone gel. The movable body is oscillatedly supported by the spring member with respect to the fixed body. Further, when the movable body vibrates, the gel-like damper member is deformed in the crushing direction, so that the resonance between the spring member and the movable body is suppressed. As a result, excessive vibration of the movable body can be suppressed, and collision between the movable body and the fixed body can be suppressed.

特開2016−032417号公報Japanese Unexamined Patent Publication No. 2016-032417

特許文献1では、弾性部材であるばね部材と粘弾性部材であるゲル状ダンパー部材の両方を用いて可動体と固定体を接続するが、ばね部材とゲル状ダンパー部材が別部材になっており、異なる場所に配置されるため、2部材を個別に取り付ける工程を行わなければならない。従って、可動体と固定体を接続する作業を効率化できない。 In Patent Document 1, the movable body and the fixed body are connected by using both the spring member which is an elastic member and the gel-like damper member which is a viscoelastic member, but the spring member and the gel-like damper member are separate members. , Since they are placed in different places, the process of attaching the two members individually must be performed. Therefore, the work of connecting the movable body and the fixed body cannot be made efficient.

ゲル状ダンパー部材を用いずにばね部材のみで可動体と固定体を接続すると、可動体の過度な振動を抑制できず、可動体と固定体が衝突するおそれがある。また、ばね部材は薄型で固定しやすいが、衝撃などによって一旦延びてしまうと元の形状に復帰できない。従って、衝撃によって壊れやすいという問題がある。また、振動特性の変更などの設計変更に対応する場合には、ばね形状の変更が必要であるが、容易とはいえない。 If the movable body and the fixed body are connected only by the spring member without using the gel-like damper member, excessive vibration of the movable body cannot be suppressed, and the movable body and the fixed body may collide with each other. Further, although the spring member is thin and easy to fix, once it is extended due to an impact or the like, it cannot return to its original shape. Therefore, there is a problem that it is easily broken by impact. Further, when responding to a design change such as a change in vibration characteristics, it is necessary to change the spring shape, but it cannot be said that it is easy.

一方、ばね部材を用いずにゲル状ダンパー部材のみで可動体と固定体を接続した場合には、ばね定数を大きくしようとしても限界があるため、求める振動特性を達成しにくい。また、ばね定数を大きくするとゲル状ダンパー部材が大型化し、重量も重くなってしまう。さらに、ゲル状ダンパー部材を直接、可動体および固定体に固定するので、ゲル状ダンパー部材として難接着性のシリコーンゲルを用いた場合は、使用可能な接着剤の選定が困難である。 On the other hand, when the movable body and the fixed body are connected only by the gel-like damper member without using the spring member, there is a limit even if the spring constant is increased, so that it is difficult to achieve the desired vibration characteristics. Further, if the spring constant is increased, the gel-like damper member becomes larger and heavier. Further, since the gel-like damper member is directly fixed to the movable body and the fixed body, it is difficult to select a usable adhesive when a poorly adhesive silicone gel is used as the gel-like damper member.

以上の問題点に鑑みて、本発明の課題は、板ばねと粘弾性体の両方の特性を利用でき、可動体と固定体を接続する作業を効率化できるばね部材を提案することにある。 In view of the above problems, an object of the present invention is to propose a spring member that can utilize the characteristics of both a leaf spring and a viscoelastic body and can streamline the work of connecting a movable body and a fixed body.

上記課題を解決するために、本発明に係るばね部材は、板ばねと、前記板ばねに固定される粘弾性体と、を有し、前記板ばねは、可動体に固定される第1固定部と、固定体に固定される第2固定部と、前記第1固定部と前記第2固定部とを接続するばね部と、を備え、前記粘弾性体は、前記ばね部に配置されることを特徴とする。 In order to solve the above problems, the spring member according to the present invention includes a leaf spring and a viscoelastic body fixed to the leaf spring, and the leaf spring is first fixed to be fixed to a movable body. A portion, a second fixing portion fixed to the fixed body, and a spring portion connecting the first fixing portion and the second fixing portion are provided, and the viscoelastic body is arranged on the spring portion. It is characterized by that.

本発明のばね部材は、板ばねのばね部に粘弾性体が配置される。従って、板ばねと粘弾性体の両方の特性を利用できるので、求める振動特性を達成しやすい。また、衝撃等によって板ばねが大きく変形して元の形状に復帰できなくなることを粘弾性体によって抑制できる。従って、板ばねのみを用いる場合よりも耐衝撃性が高い。また、板ばねは薄型であるため、粘弾性体のみを用いる場合と比較して、小型化および軽量化に適している。また、可動体および固定体に対する固定部は板ばねの部分であるため、難接着性の粘弾性体を直接固定する場合よりも、接着材の選定が容易である。さらに、1部材として取り扱うことができるので、可動体と固定体を接続する作業を効率化できる。 In the spring member of the present invention, a viscoelastic body is arranged in the spring portion of the leaf spring. Therefore, since the characteristics of both the leaf spring and the viscoelastic body can be utilized, it is easy to achieve the desired vibration characteristics. In addition, the viscoelastic body can prevent the leaf spring from being greatly deformed by an impact or the like and unable to return to its original shape. Therefore, the impact resistance is higher than when only the leaf spring is used. Further, since the leaf spring is thin, it is suitable for miniaturization and weight reduction as compared with the case where only a viscoelastic body is used. Further, since the fixing portion for the movable body and the fixed body is a leaf spring portion, it is easier to select an adhesive material than in the case of directly fixing a poorly adhesive viscoelastic body. Further, since it can be handled as one member, the work of connecting the movable body and the fixed body can be made more efficient.

本発明において、前記粘弾性体は、前記ばね部に設けられた切り欠きまたは孔の少なくとも一部を含む範囲に配置されることが好ましい。このようにすると、粘弾性体を板ばねの板厚内に配置して、切り欠きまたは孔を囲む部分を板ばねの面内方向で接続できる。また、粘弾性体が板ばねから分離しにくく、粘弾性体と板ばねとを一体になって変形させることができるので、板ばねと粘弾性体の両方の特性を利用しやすい。 In the present invention, the viscoelastic body is preferably arranged in a range including at least a part of a notch or a hole provided in the spring portion. In this way, the viscoelastic body can be arranged within the leaf thickness of the leaf spring, and the notch or the portion surrounding the hole can be connected in the in-plane direction of the leaf spring. Further, since the viscoelastic body is difficult to separate from the leaf spring and the viscoelastic body and the leaf spring can be deformed integrally, it is easy to utilize the characteristics of both the leaf spring and the viscoelastic body.

本発明において、前記粘弾性体は、前記ばね部の板厚よりも厚く、前記ばね部から板厚方向の少なくとも一方側へ突出している。例えば、前記粘弾性体は、前記ばね部から板厚方向(面外方向)の両側へ突出している。このようにすると、粘弾性体を板ばねより厚くすることができるので、粘弾性体の特性を利用しやすい。また、粘弾性体が板ばねから分離しにくくなるとともに、粘弾性体によって板ばねを保護できるので、ばね部材の耐久性を高めることができる In the present invention, the viscoelastic body is thicker than the plate thickness of the spring portion and protrudes from the spring portion in at least one side in the plate thickness direction. For example, the viscoelastic body protrudes from the spring portion on both sides in the plate thickness direction (out-of-plane direction). In this way, the viscoelastic body can be made thicker than the leaf spring, so that the characteristics of the viscoelastic body can be easily utilized. In addition, the viscoelastic body is difficult to separate from the leaf spring, and the leaf spring can be protected by the viscoelastic body, so that the durability of the spring member can be improved.

あるいは、本発明において、前記粘弾性体は、前記ばね部の板厚内に配置される構成を採用することもできる。このようにすると、薄型でありながら、板ばねと粘弾性体の両方の特性を備えたばね部材が得られる。 Alternatively, in the present invention, the viscoelastic body may adopt a configuration in which the viscoelastic body is arranged within the plate thickness of the spring portion. In this way, a spring member having the characteristics of both a leaf spring and a viscoelastic body can be obtained while being thin.

本発明において、前記孔は、前記第1固定部と前記第2固定部の間に延在するスリット状の分離孔であり、前記分離孔に配置される前記粘弾性体によって、前記分離孔を囲む部分が前記板ばねの面内方向で連結されることが好ましい。このように、板ばねに分離孔を設けることにより、板ばねに弾性を持たせることができる。また、分離孔を囲む部分を粘弾性体によって面内方向で接続できるので、板ばねが面外方向に大きく変形しすぎることを抑制できる。従って、ばね部材の耐衝撃性を高めることができる。また、分離孔に配置した粘弾性体によって、ばね部材の面内方向の剛性を高めることができる。 In the present invention, the hole is a slit-shaped separation hole extending between the first fixing portion and the second fixing portion, and the separation hole is formed by the viscoelastic body arranged in the separation hole. It is preferable that the surrounding portions are connected in the in-plane direction of the leaf spring. By providing the leaf spring with a separation hole in this way, the leaf spring can be made elastic. Further, since the portion surrounding the separation hole can be connected in the in-plane direction by a viscoelastic body, it is possible to prevent the leaf spring from being deformed too much in the out-of-plane direction. Therefore, the impact resistance of the spring member can be improved. Further, the viscoelastic body arranged in the separation hole can increase the rigidity of the spring member in the in-plane direction.

本発明において前記第1固定部および前記第2固定部は環状であり、前記第2固定部は、前記第1固定部の外周側に配置され、前記ばね部は、前記第1固定部と前記第2固定部の間で螺旋状に延びるアームを備え、前記孔は、隣り合う前記アームの間に設けられたスリット状の分離孔であり、前記分離孔に配置される前記粘弾性体によって、前記分離孔の両側に位置する前記アームが前記板ばねの面内方向で連結されることが好ましい。このように、内周側から外周側へ螺旋状に延びるアームを設けることにより、板ばねを面外方向に弾性変形させることができる。従って、第1固定部に固定される可動体を、第2固定部に固定される固定体に対して板ばねに対して垂直な方向に振動させることができる。また、分離孔に配置される粘弾性体によって、ばね部材の面内方向の剛性を高めることができる。従って、第1固定部に固定される可動体が板ばねの面内方向に移動することを抑制できる。 In the present invention, the first fixing portion and the second fixing portion are annular, the second fixing portion is arranged on the outer peripheral side of the first fixing portion, and the spring portion is the first fixing portion and the said. An arm extending spirally between the second fixing portions is provided, and the hole is a slit-shaped separation hole provided between the adjacent arms, and is provided by the viscoelastic body arranged in the separation hole. It is preferable that the arms located on both sides of the separation hole are connected in the in-plane direction of the leaf spring. By providing the arm spirally extending from the inner peripheral side to the outer peripheral side in this way, the leaf spring can be elastically deformed in the out-of-plane direction. Therefore, the movable body fixed to the first fixed portion can be vibrated in the direction perpendicular to the leaf spring with respect to the fixed body fixed to the second fixed portion. Further, the viscoelastic body arranged in the separation hole can increase the rigidity of the spring member in the in-plane direction. Therefore, it is possible to prevent the movable body fixed to the first fixing portion from moving in the in-plane direction of the leaf spring.

本発明において、前記粘弾性体の表面に固定されるフィルムを備えることが好ましい。このようにすると、粘弾性体に直接触れないようにすることができるので、ばね部材を取り扱いやすい。また、フィルムを介してばね部材を他部材に容易に固定することができる。 In the present invention, it is preferable to provide a film fixed to the surface of the viscoelastic body. In this way, the spring member can be easily handled because the viscoelastic body can be prevented from coming into direct contact with the viscoelastic body. Further, the spring member can be easily fixed to another member via the film.

本発明において、前記粘弾性体に一部が埋め込まれたインサート部品を備えることが好ましい。このようにすると、このようにすると、接着剤を用いずに、インサート部品を粘弾性体に固定できる。従って、インサート部品の固定が容易であり、インサート部品を用いて他部品とばね部材とを固定できる。 In the present invention, it is preferable to include an insert component in which a part is embedded in the viscoelastic body. In this way, the insert component can be fixed to the viscoelastic body without using an adhesive. Therefore, the insert component can be easily fixed, and the other component and the spring member can be fixed by using the insert component.

次に、本発明に係るアクチュエータは、上記のばね部材と、前記ばね部材の前記第2固定部に固定される固定体と、前記ばね部材の前記第1固定部に固定され、前記ばね部材によって前記固定体と接続される可動体と、前記ばね部材の板厚方向に前記可動体を振動させる磁気駆動機構と、を備えることを特徴とする。 Next, the actuator according to the present invention is fixed to the spring member, the fixed body fixed to the second fixing portion of the spring member, and the first fixing portion of the spring member, and is fixed by the spring member. It is characterized by including a movable body connected to the fixed body and a magnetic drive mechanism for vibrating the movable body in the plate thickness direction of the spring member.

次に、本発明に係るレンズ駆動装置は、上記のばね部材と、前記ばね部材の前記第2固定部に固定される固定体と、レンズを備えると共に、前記ばね部材の前記第1固定部に固定される可動体と、前記レンズの光軸方向に前記可動体を移動させるレンズ駆動機構と、を備えることを特徴とする。 Next, the lens driving device according to the present invention includes the spring member, a fixed body fixed to the second fixing portion of the spring member, and a lens, and is attached to the first fixing portion of the spring member. It is characterized by including a movable body to be fixed and a lens driving mechanism for moving the movable body in the optical axis direction of the lens.

本発明によれば、板ばねのばね部に粘弾性体が配置されるため、板ばねと粘弾性体の両方の特性を利用できる。従って、求める振動特性を達成しやすい。また、衝撃等によって板ばねが大きく変形して元の形状に復帰できなくなることを粘弾性体によって抑制できる。従って、板ばねのみを用いる場合よりも耐衝撃性が高い。また、板ばねは薄型であるため、粘弾性体のみを用いる場合と比較して、小型化および軽量化に適している。また、可動体および固定体に対する固定部は板ばねの部分であるため、難接着性の粘弾性体を直接固定する場合よりも、接着材の選定が容易である。さらに、1部材として取り扱うことができるので、可動体と固定体を接続する作業を効率化できる。 According to the present invention, since the viscoelastic body is arranged in the spring portion of the leaf spring, the characteristics of both the leaf spring and the viscoelastic body can be utilized. Therefore, it is easy to achieve the desired vibration characteristics. In addition, the viscoelastic body can prevent the leaf spring from being greatly deformed by an impact or the like and unable to return to its original shape. Therefore, the impact resistance is higher than when only the leaf spring is used. Further, since the leaf spring is thin, it is suitable for miniaturization and weight reduction as compared with the case where only a viscoelastic body is used. Further, since the fixing portion for the movable body and the fixed body is a leaf spring portion, it is easier to select an adhesive material than in the case of directly fixing a poorly adhesive viscoelastic body. Further, since it can be handled as one member, the work of connecting the movable body and the fixed body can be made more efficient.

本発明の実施形態1に係るばね部材の平面図および断面図である。It is a top view and a cross-sectional view of the spring member which concerns on Embodiment 1 of this invention. 板ばねの平面図およびその部分拡大図である。It is a top view of a leaf spring and a partially enlarged view thereof. 図1のばね部材の製造方法の説明図である。It is explanatory drawing of the manufacturing method of the spring member of FIG. 図1のばね部材を備えたアクチュエータの断面図である。It is sectional drawing of the actuator provided with the spring member of FIG. 図1のばね部材を備えたレンズ駆動装置の断面図である。It is sectional drawing of the lens drive device provided with the spring member of FIG. 実施形態2に係るばね部材の平面図である。It is a top view of the spring member which concerns on Embodiment 2. FIG. 実施形態3〜5に係るばね部材の断面図である。It is sectional drawing of the spring member which concerns on Embodiments 3-5. 実施形態6に係るばね部材の断面図である。It is sectional drawing of the spring member which concerns on Embodiment 6. 実施形態7に係るばね部材の断面図である。It is sectional drawing of the spring member which concerns on Embodiment 7.

以下に、図面を参照して、本発明の実施形態を説明する。なお、以下の説明において、ばね部材10における板ばね8の板厚方向をLAとし、板厚方向LAの一方側をLA1とし、板厚方向LAの他方側をLA2とする。また、軸線Lは、アクチュエータ1における可動体3の中心軸線方向であり、軸線Lが延在する方向(軸線L方向)の一方側をL1とし、軸線L方向の他方側をL2とする。ばね部材10によって可動体3と固定体2とを接続したとき、板ばね8の板厚方向LAと軸線Lとが一致する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the plate thickness direction of the leaf spring 8 in the spring member 10 is LA, one side of the plate thickness direction LA is LA1, and the other side of the plate thickness direction LA is LA2. Further, the axis L is the central axis direction of the movable body 3 in the actuator 1, and one side in the direction in which the axis L extends (axis L direction) is L1 and the other side in the axis L direction is L2. When the movable body 3 and the fixed body 2 are connected by the spring member 10, the leaf thickness direction LA of the leaf spring 8 and the axis L coincide with each other.

[実施形態1]
(全体構成)
図1(a)は、本発明の実施形態1に係るばね部材10の平面図であり、図1(b)は、本発明の実施形態1に係るばね部材10の断面図(図1(a)のA−A断面図)である。図2は、板ばね8の平面図およびその部分拡大図である。図1に示すように、ばね部材
10は、円形の板ばね8と、板ばね8に固定される粘弾性体9を備える。本形態では、板ばね8は金属製である。なお、金属以外の素材からなる板ばね8を用いてもよい。例えば、板ばね8は樹脂製でもよい。粘弾性体9は、板ばね8の中央部分に配置される。粘弾性体9は、板ばね8の板厚より厚く、板ばね8から板厚方向LAの両側へ突出している。本形態では、粘弾性体9はゲル状ダンパー部材である。例えば、粘弾性体9として、針入度が90度から110度のシリコーンゲルを用いることができる。
[Embodiment 1]
(overall structure)
1 (a) is a plan view of the spring member 10 according to the first embodiment of the present invention, and FIG. 1 (b) is a cross-sectional view of the spring member 10 according to the first embodiment of the present invention (FIG. 1 (a). ) AA cross-sectional view). FIG. 2 is a plan view of the leaf spring 8 and a partially enlarged view thereof. As shown in FIG. 1, the spring member 10 includes a circular leaf spring 8 and a viscoelastic body 9 fixed to the leaf spring 8. In this embodiment, the leaf spring 8 is made of metal. A leaf spring 8 made of a material other than metal may be used. For example, the leaf spring 8 may be made of resin. The viscoelastic body 9 is arranged in the central portion of the leaf spring 8. The viscoelastic body 9 is thicker than the plate thickness of the leaf spring 8 and projects from the leaf spring 8 to both sides in the plate thickness direction LA. In this embodiment, the viscoelastic body 9 is a gel-like damper member. For example, as the viscoelastic body 9, a silicone gel having a needle insertion degree of 90 degrees to 110 degrees can be used.

図1、図2に示すように、板ばね8は、環状の第1固定部81と、第1固定部81の外周に配置される環状の第2固定部82と、第1固定部81と第2固定部82を接続するばね部80を備える。ばね部80は、板ばね8の板厚方向LAに弾性変形する。ばね部80は、周方向に延在するアーム83を複数備えている。各アーム83は、第1固定部81に接続される内側接続部84、第2固定部82に接続される外側接続部85、および、内側接続部84から外側接続部85へ向かって周方向の一方側CCWへ延びる螺旋部86を備える。 As shown in FIGS. 1 and 2, the leaf spring 8 includes an annular first fixing portion 81, an annular second fixing portion 82 arranged on the outer periphery of the first fixing portion 81, and a first fixing portion 81. A spring portion 80 for connecting the second fixing portion 82 is provided. The spring portion 80 elastically deforms in the leaf thickness direction LA of the leaf spring 8. The spring portion 80 includes a plurality of arms 83 extending in the circumferential direction. Each arm 83 has an inner connecting portion 84 connected to the first fixing portion 81, an outer connecting portion 85 connected to the second fixing portion 82, and a circumferential direction from the inner connecting portion 84 toward the outer connecting portion 85. A spiral portion 86 extending to one side CCW is provided.

ばね部80は、第1固定部81と第2固定部82の間に延在するスリット状の分離孔89を備える。分離孔89は、隣り合うアーム83の間に1本ずつ設けられ、後述するアーム83の形状に沿って螺旋状に延びている。板ばね8には、複数の分離孔89が周方向に等間隔で複数設けられている。本形態では、3箇所の分離孔89が設けられている。各分離孔89は、各アーム83の内側接続部84から外側接続部85まで延びている。 The spring portion 80 includes a slit-shaped separation hole 89 extending between the first fixing portion 81 and the second fixing portion 82. The separation holes 89 are provided one by one between the adjacent arms 83, and extend spirally along the shape of the arms 83 described later. The leaf spring 8 is provided with a plurality of separation holes 89 at equal intervals in the circumferential direction. In this embodiment, three separation holes 89 are provided. Each separation hole 89 extends from the inner connection portion 84 of each arm 83 to the outer connection portion 85.

粘弾性体9は、板ばね8のばね部80に配置される。図1(a)に示すように、本形態では、粘弾性体9は、板厚方向LAから見てばね部80よりもわずかに大きい円形であり、粘弾性体9の外周部分は、第2固定部82の内周部分を覆っている。また、粘弾性体9の内周部分は、第1固定部81全体を覆っている。粘弾性体9は板ばね8の板厚より厚い部材であり、板ばね8から板厚方向LAの少なくとも一方側へ突出している。 The viscoelastic body 9 is arranged in the spring portion 80 of the leaf spring 8. As shown in FIG. 1A, in the present embodiment, the viscoelastic body 9 has a circular shape slightly larger than the spring portion 80 when viewed from the plate thickness direction LA, and the outer peripheral portion of the viscoelastic body 9 is the second. It covers the inner peripheral portion of the fixed portion 82. Further, the inner peripheral portion of the viscoelastic body 9 covers the entire first fixed portion 81. The viscoelastic body 9 is a member thicker than the plate thickness of the leaf spring 8, and projects from the leaf spring 8 toward at least one side in the plate thickness direction LA.

図1(b)に示すように、本形態では、粘弾性体9は、板ばね8の分離孔89に配置される充填部分90と、板ばね8の板厚方向LAの一方側LA1に配置される第1突出部分91と、板ばね8の板厚方向LAの他方側LA2に配置される第2突出部分92を備える。第1突出部分91と第2突出部分92の板厚方向LAの高さ(厚さ)は同一であるが、異なっていてもよい。 As shown in FIG. 1B, in the present embodiment, the viscoelastic body 9 is arranged in the filling portion 90 arranged in the separation hole 89 of the leaf spring 8 and LA1 on one side of the leaf spring 8 in the plate thickness direction LA. A first protruding portion 91 to be formed and a second protruding portion 92 arranged on the other side LA2 of the leaf spring 8 in the plate thickness direction LA are provided. The height (thickness) of the first protruding portion 91 and the second protruding portion 92 in the plate thickness direction LA is the same, but may be different.

(アームの詳細な形状)
図2に示すように、板ばね8は、複数のアーム83として、第1アーム83Aと、第1アーム83Aに対して周方向の一方側CCWに配置される第2アーム83Bと、第2アーム83Bに対して周方向の一方側CCWに配置される第3アーム83Cの3本を備える。3本のアーム83のそれぞれは、上記のように、内側接続部84、外側接続部85、および螺旋部86を備えている。内側接続部84は、第1固定部81から外周側へ突出しており、螺旋部86と屈曲した形状に繋がっている。また、外側接続部85は、第2固定部82から内周側へ突出しており、螺旋部86と屈曲した形状に繋がっている。
(Detailed shape of the arm)
As shown in FIG. 2, the leaf spring 8 includes a first arm 83A, a second arm 83B arranged on one side CCW in the circumferential direction with respect to the first arm 83A, and a second arm as a plurality of arms 83. It is provided with three third arms 83C arranged on one side CCW in the circumferential direction with respect to 83B. Each of the three arms 83 includes an inner connecting portion 84, an outer connecting portion 85, and a spiral portion 86, as described above. The inner connecting portion 84 projects from the first fixing portion 81 toward the outer peripheral side, and is connected to the spiral portion 86 in a bent shape. Further, the outer connecting portion 85 projects from the second fixing portion 82 toward the inner peripheral side, and is connected to the spiral portion 86 in a bent shape.

各アーム83の螺旋部86は、一周分の角度範囲(360°)より大きい角度範囲にわたって周方向に延びている。従って、径方向から見たとき、どの角度位置においても、4本の螺旋部86が重なっており、板厚方向LAと交差する全方向に4本の螺旋部86が配置される。従って、板ばね8は、板厚方向LAと直交する方向の剛性が高い。 The spiral portion 86 of each arm 83 extends in the circumferential direction over an angle range larger than the angle range (360 °) for one circumference. Therefore, when viewed from the radial direction, the four spiral portions 86 overlap each other at any angle position, and the four spiral portions 86 are arranged in all directions intersecting the plate thickness direction LA. Therefore, the leaf spring 8 has high rigidity in the direction orthogonal to the leaf thickness direction LA.

各アーム83の螺旋部86は、周方向に離間した複数の屈曲部87を備える。本形態では、各アーム83の螺旋部86には、複数の屈曲部87として、内側接続部84に周方向で最も近い第1屈曲部87Aと、第1屈曲部87Aの周方向の一方側CCWに位置する第
2屈曲部87Bと、第2屈曲部87Bの周方向の一方側CCWに位置する第3屈曲部87Cが設けられている。
The spiral portion 86 of each arm 83 includes a plurality of bent portions 87 separated in the circumferential direction. In the present embodiment, the spiral portion 86 of each arm 83 has a first bent portion 87A closest to the inner connecting portion 84 in the circumferential direction and a CCW on one side in the circumferential direction of the first bent portion 87A as a plurality of bent portions 87. A second bent portion 87B located at 1 and a third bent portion 87C located at one CCW in the circumferential direction of the second bent portion 87B are provided.

屈曲部87は、周方向に対して傾斜した傾斜部分871と、傾斜部分871の一端(外周側の端部)から周方向の一方側CCWへ屈曲した第1屈曲部分872と、傾斜部分871の他端(内周側の端部)から周方向の他方側CWへ屈曲した第2屈曲部分873を備える。屈曲部87は、このように、板厚方向LAに直交する面内で屈曲した形状であるため、屈曲部87を設けることにより、各アーム83の板厚方向LAと直交する方向の剛性が高い。従って、板ばね8は、板厚方向LAと直交する方向の剛性が高い。 The bent portion 87 includes an inclined portion 871 inclined with respect to the circumferential direction, a first bent portion 872 bent from one end (end portion on the outer peripheral side) of the inclined portion 871 to one CCW in the circumferential direction, and an inclined portion 871. A second bent portion 873 bent from the other end (the end on the inner peripheral side) to the other side CW in the circumferential direction is provided. Since the bent portion 87 has a shape that is bent in a plane orthogonal to the plate thickness direction LA in this way, the rigidity in the direction orthogonal to the plate thickness direction LA of each arm 83 is high by providing the bent portion 87. .. Therefore, the leaf spring 8 has high rigidity in the direction orthogonal to the leaf thickness direction LA.

板ばね8は、3本のアーム83が周方向に120°間隔で配置されると共に、各アーム83において、3箇所の屈曲部87(第1屈曲部87A、第2屈曲部87B、第3屈曲部87C)は周方向に120°間隔で配置される。さらに、内側接続部84と第1屈曲部87Aが120°間隔で配置され、第3屈曲部87Cと外側接続部85が120°間隔で配置される。第1屈曲部87A、第2屈曲部87B、第3屈曲部87Cは相似形であり、第1屈曲部87A、第2屈曲部87B、第3屈曲部87Cの順で傾斜部分871の長さが増大している。 In the leaf spring 8, three arms 83 are arranged at intervals of 120 ° in the circumferential direction, and each arm 83 has three bent portions 87 (first bent portion 87A, second bent portion 87B, third bent portion 87). Parts 87C) are arranged at intervals of 120 ° in the circumferential direction. Further, the inner connecting portion 84 and the first bent portion 87A are arranged at 120 ° intervals, and the third bent portion 87C and the outer connecting portion 85 are arranged at 120 ° intervals. The first bent portion 87A, the second bent portion 87B, and the third bent portion 87C have similar shapes, and the length of the inclined portion 871 is longer in the order of the first bent portion 87A, the second bent portion 87B, and the third bent portion 87C. It is increasing.

このような配置により、板ばね8では、互いに異なるアーム83に設けられた第1屈曲部87A、第2屈曲部87B、第3屈曲部87Cが内周側から外周側へ1列に並んでいる。さらに、第1屈曲部87Aの内周側に内側接続部84が配置され、第3屈曲部87Cの外周側に外側接続部85が配置されるので、5箇所の屈曲部が内周側から外周側へ1列に並んでいる。5箇所の屈曲部が内周側から外周側へ1列に配列された構成は、板ばね8において、等角度間隔で3箇所に設けられている。 With such an arrangement, in the leaf spring 8, the first bent portion 87A, the second bent portion 87B, and the third bent portion 87C provided on the arms 83 different from each other are arranged in a row from the inner peripheral side to the outer peripheral side. .. Further, since the inner connecting portion 84 is arranged on the inner peripheral side of the first bent portion 87A and the outer connecting portion 85 is arranged on the outer peripheral side of the third bent portion 87C, the five bent portions are arranged from the inner peripheral side to the outer peripheral side. They are lined up in a row to the side. A configuration in which five bent portions are arranged in a row from the inner peripheral side to the outer peripheral side is provided at three locations at equal angular intervals in the leaf spring 8.

(ばね部材の製造方法)
図3は、図1のばね部材10の製造方法の説明図である。ばね部材10は、円形凹部111が形成された第1型部材110、円形凹部111が形成された第2型部材120、および、スペーサ130を組み立てた型を用いて製造される。まず、第1型部材110と第2型部材120との間にスペーサ130を配置して組み立てるが、その際、第1型部材110の円形凹部111と第2型部材120の円形凹部121との間に板ばね8を配置する。板ばね8の表面には、予め、円形凹部111および円形凹部121と対向する部分にプライマーを塗布しておく。次に、円形凹部111、121の間の空間にゲル材料140を充填して、型ごとゲル材料140を硬化させ、粘弾性体9を成形する。
(Manufacturing method of spring member)
FIG. 3 is an explanatory view of a method of manufacturing the spring member 10 of FIG. The spring member 10 is manufactured by using a mold in which the first mold member 110 in which the circular recess 111 is formed, the second mold member 120 in which the circular recess 111 is formed, and the spacer 130 are assembled. First, the spacer 130 is arranged and assembled between the first mold member 110 and the second mold member 120, and at that time, the circular recess 111 of the first mold member 110 and the circular recess 121 of the second mold member 120 are assembled. A leaf spring 8 is arranged between them. On the surface of the leaf spring 8, a primer is applied in advance to the portions facing the circular recess 111 and the circular recess 121. Next, the space between the circular recesses 111 and 121 is filled with the gel material 140, the gel material 140 is cured together with the mold, and the viscoelastic body 9 is formed.

例えば、熱硬化型のゲル材料140を用いる場合には、恒温槽内に型ごと入れて規定温度に規定時間保つことによってゲル材料140を加熱硬化させる。ゲル材料140は、加熱硬化する際に、プライマーに接する部分がプライマーと反応して、板ばね8の表面および分離孔89の内面に固定される。従って、硬化後の粘弾性体9は、接着剤を用いることなく、粘弾性体9自体の接着力によって、板ばね8に固定される。 For example, when a thermosetting gel material 140 is used, the gel material 140 is heat-cured by placing the entire mold in a constant temperature bath and keeping the gel material 140 at a specified temperature for a specified time. When the gel material 140 is heat-cured, the portion in contact with the primer reacts with the primer and is fixed to the surface of the leaf spring 8 and the inner surface of the separation hole 89. Therefore, the cured viscoelastic body 9 is fixed to the leaf spring 8 by the adhesive force of the viscoelastic body 9 itself without using an adhesive.

続いて、型を恒温槽から取り出した後、第1型部材110から第2型部材120およびスペーサ130を取り外した後、突き出しピンなどを用いて、第1型部材110からばね部材10を取り外す。これにより、板ばね8の分離孔89に粘弾性体9の充填部分90が配置されると共に、板ばね8の表面に円形凹部111の反転形状である第1突出部分91と、円形凹部121の反転形状である第2突出部分92が配置されたばね部材10が完成する。 Subsequently, after the mold is taken out from the constant temperature bath, the second mold member 120 and the spacer 130 are removed from the first mold member 110, and then the spring member 10 is removed from the first mold member 110 using a protrusion pin or the like. As a result, the filling portion 90 of the viscoelastic body 9 is arranged in the separation hole 89 of the leaf spring 8, and the first protruding portion 91, which is an inverted shape of the circular recess 111, and the circular recess 121 are formed on the surface of the leaf spring 8. The spring member 10 in which the second protruding portion 92 having an inverted shape is arranged is completed.

なお、粘弾性体9の反転形状の凹部を備えた型部材を使用する代わりに、粘弾性体9の厚さと同一厚さのスペーサを上下の型部材の間に配置することにより、型を形成してもよ
い。このようにすると、粘弾性体9の厚さの変更への対応が容易である。
Instead of using a mold member having an inverted concave portion of the viscoelastic body 9, a spacer having the same thickness as that of the viscoelastic body 9 is arranged between the upper and lower mold members to form a mold. You may. In this way, it is easy to respond to changes in the thickness of the viscoelastic body 9.

(ばね部材を備えたアクチュエータ)
図4は、図1のばね部材10を備えたアクチュエータ1の断面図である。アクチュエータ1は、固定体2および可動体3と、固定体2と可動体3とを接続するばね部材10と、固定体2に対して可動体3を軸線L方向に相対移動させる磁気駆動機構6を備える。磁気駆動機構6は、可動体3に配置される磁石61と、固定体2に配置されるコイル62を備える。なお、磁石61とコイル62の配置を逆にすることも可能である。
(Actuator with spring member)
FIG. 4 is a cross-sectional view of the actuator 1 provided with the spring member 10 of FIG. The actuator 1 includes a fixed body 2 and a movable body 3, a spring member 10 that connects the fixed body 2 and the movable body 3, and a magnetic drive mechanism 6 that moves the movable body 3 relative to the fixed body 2 in the axis L direction. To be equipped. The magnetic drive mechanism 6 includes a magnet 61 arranged on the movable body 3 and a coil 62 arranged on the fixed body 2. It is also possible to reverse the arrangement of the magnet 61 and the coil 62.

ばね部材10は、軸線L方向に離間した2箇所において可動体3と固定体2を接続しており、可動体3を軸線L方向に移動可能に支持する。本形態では、ばね部材10として、可動体3のL1側の端部に配置される第1ばね部材10Aと、可動体3のL2側の端部に配置される第2ばね部材10Bを備える。第1ばね部材10Aは、第1固定部81が可動体3のL1側の端部に固定され、第2固定部82が固定体2に固定される。また、第2ばね部材10Bは、第1固定部81が可動体3のL2側の端部に固定され、第2固定部82が固定体2に固定される。 The spring member 10 connects the movable body 3 and the fixed body 2 at two positions separated in the axis L direction, and supports the movable body 3 so as to be movable in the axis L direction. In the present embodiment, the spring member 10 includes a first spring member 10A arranged at the end of the movable body 3 on the L1 side and a second spring member 10B arranged at the end of the movable body 3 on the L2 side. In the first spring member 10A, the first fixing portion 81 is fixed to the end portion of the movable body 3 on the L1 side, and the second fixing portion 82 is fixed to the fixed body 2. Further, in the second spring member 10B, the first fixing portion 81 is fixed to the end portion of the movable body 3 on the L2 side, and the second fixing portion 82 is fixed to the fixed body 2.

(固定体)
固定体2は、樹脂製のケース20と、ケース20に保持されるホルダ4を備える。ケース20は、筒状ケース21と、筒状ケース21のL1側の端部に固定される第1蓋部材22と、筒状ケース21のL2側の端部に固定される第2蓋部材23を備える。第1蓋部材22は、可動体3のL1側の端部と軸線L方向に対向する対向面221を備える。また、第1蓋部材22は、外周部分がホルダ4側(L2側)へ突出している。図4に示すように、第1ばね部材10Aは、外周部分が第1蓋部材22の外周部分とホルダ4との間に挟まれて固定体2に固定される。
(Fixed body)
The fixed body 2 includes a resin case 20 and a holder 4 held by the case 20. The case 20 includes a tubular case 21, a first lid member 22 fixed to the end of the tubular case 21 on the L1 side, and a second lid member 23 fixed to the end of the tubular case 21 on the L2 side. To be equipped with. The first lid member 22 includes an facing surface 221 that faces the end of the movable body 3 on the L1 side in the L direction of the axis. Further, the outer peripheral portion of the first lid member 22 projects toward the holder 4 side (L2 side). As shown in FIG. 4, the outer peripheral portion of the first spring member 10A is sandwiched between the outer peripheral portion of the first lid member 22 and the holder 4, and is fixed to the fixed body 2.

第2蓋部材23は、可動体3のL3側の端部と軸線L方向に対向する対向面231を備える。筒状ケース21のL2側の端部には、内周側へ突出する環状突出部29が設けられている。図4に示すように、第2ばね部材10Bは、外周部分が環状突出部29と第2蓋部材23の外周部分との間に挟まれて固定体2に固定される。 The second lid member 23 includes an facing surface 231 that faces the end of the movable body 3 on the L3 side in the L direction of the axis. At the end of the tubular case 21 on the L2 side, an annular projecting portion 29 projecting toward the inner peripheral side is provided. As shown in FIG. 4, the outer peripheral portion of the second spring member 10B is sandwiched between the annular protrusion 29 and the outer peripheral portion of the second lid member 23 and fixed to the fixed body 2.

ホルダ4は、第1蓋部材22の外周部分のL2側に配置される環状部42と、環状部42の内周部分からL2側へ突出するコイル固定部43を備える。コイル62は、コイル固定部43の外周側に巻かれている。端子ピン64は、環状部42に設けられた端子保持部44から径方向外側に突出する。筒状ケース21には、端子ピン64を介してコイル線と接続される基板63が固定される。基板63は、筒状ケース21の外周面に設けられた凹部24に配置される。 The holder 4 includes an annular portion 42 arranged on the L2 side of the outer peripheral portion of the first lid member 22, and a coil fixing portion 43 projecting from the inner peripheral portion of the annular portion 42 toward the L2 side. The coil 62 is wound around the outer peripheral side of the coil fixing portion 43. The terminal pin 64 projects radially outward from the terminal holding portion 44 provided on the annular portion 42. A substrate 63 connected to the coil wire via a terminal pin 64 is fixed to the tubular case 21. The substrate 63 is arranged in a recess 24 provided on the outer peripheral surface of the tubular case 21.

(可動体)
可動体3は、固定体2の径方向の中心において軸線L方向に延びるシャフト31と、シャフト31の軸線L方向の略中央に固定される磁石61と、磁石61にL1側で重なる第1ヨーク32と、磁石61にL2側で重なる第2ヨーク33と、第1ヨーク32にL1側から当接する錘30と、錘30にL1側から当接する第1受け部材36と、第2ヨーク33にL2側から当接する第2受け部材37を備える。可動体3のL1側の端部には、シャフト31のL1側の端部にL1側から嵌まる第1部材38が取り付けられ、可動体3のL2側の端部には、シャフト31のL2側の端部にL2側から嵌まる第2部材39が取り付けられている、
(Movable body)
The movable body 3 includes a shaft 31 extending in the axial L direction at the center of the fixed body 2 in the radial direction, a magnet 61 fixed at substantially the center of the shaft 31 in the axial L direction, and a first yoke that overlaps the magnet 61 on the L1 side. 32, a second yoke 33 that overlaps the magnet 61 on the L2 side, a weight 30 that abuts on the first yoke 32 from the L1 side, a first receiving member 36 that abuts on the weight 30 from the L1 side, and a second yoke 33. A second receiving member 37 that comes into contact with the L2 side is provided. A first member 38 that fits from the L1 side to the end on the L1 side of the shaft 31 is attached to the end on the L1 side of the movable body 3, and L2 on the shaft 31 is attached to the end on the L2 side of the movable body 3. A second member 39 that fits from the L2 side is attached to the end on the side.

第1受け部材36とシャフト31の外周面との間には、L1側に開口する第1環状溝361が設けられている。第1部材38は、シャフト31の端部が嵌まる筒部381と、筒
部381のL1側の端部から外周側へ拡がる円板部382を備えており、筒部381は、第1受け部材36の第1環状溝361に嵌まっている。円板部382は、第1蓋部材22の径方向の中央に設けられた対向面221と軸線L方向で対向している。第1ばね部材10Aは、第1受け部材36のL1側の端部と、円板部382の内周部分との隙間に挟まれて可動体3に固定される。
A first annular groove 361 that opens on the L1 side is provided between the first receiving member 36 and the outer peripheral surface of the shaft 31. The first member 38 includes a tubular portion 381 into which the end portion of the shaft 31 is fitted, and a disc portion 382 that extends from the end portion of the tubular portion 381 on the L1 side to the outer peripheral side, and the tubular portion 381 is the first receiver. It is fitted in the first annular groove 361 of the member 36. The disk portion 382 faces the facing surface 221 provided at the center of the first lid member 22 in the radial direction in the axis L direction. The first spring member 10A is sandwiched between the end portion of the first receiving member 36 on the L1 side and the inner peripheral portion of the disk portion 382 and fixed to the movable body 3.

同様に、第2受け部材37とシャフト31の外周面との間には、L2側に開口する第2環状溝371が設けられている。第2部材39は、シャフト31の端部が嵌まる筒部391と、筒部391のL2側の端部から外周側へ拡がる円板部392を備えており、筒部391は、第2受け部材37の第2環状溝371に嵌まっている。円板部392は、第2蓋部材23の径方向の中央に設けられた対向面231と軸線L方向で対向している。第2ばね部材10Bは、第2受け部材37のL2側の端部と、円板部392の内周部分との隙間に挟まれて可動体3に固定される。 Similarly, a second annular groove 371 that opens on the L2 side is provided between the second receiving member 37 and the outer peripheral surface of the shaft 31. The second member 39 includes a tubular portion 391 into which the end portion of the shaft 31 is fitted, and a disc portion 392 extending from the end portion of the tubular portion 391 on the L2 side to the outer peripheral side, and the tubular portion 391 is the second receiver. It is fitted in the second annular groove 371 of the member 37. The disk portion 392 faces the facing surface 231 provided at the center of the second lid member 23 in the radial direction in the axis L direction. The second spring member 10B is sandwiched between the end portion of the second receiving member 37 on the L2 side and the inner peripheral portion of the disk portion 392 and fixed to the movable body 3.

磁石61は円筒状であり、軸線L方向においてN極とS極とに分極するように着磁されている。シャフト31は、固定体2の径方向の中心において軸線L方向に延びている。磁石61の外周側には、ホルダ4に設けられたコイル固定部43が磁石61と同軸に配置される。従って、磁石61とコイル62は同軸に配置される。 The magnet 61 has a cylindrical shape and is magnetized so as to be polarized into the north and south poles in the L direction of the axis. The shaft 31 extends in the axis L direction at the center of the fixed body 2 in the radial direction. On the outer peripheral side of the magnet 61, a coil fixing portion 43 provided on the holder 4 is arranged coaxially with the magnet 61. Therefore, the magnet 61 and the coil 62 are arranged coaxially.

第1ヨーク32は、外径寸法が磁石61の外径寸法よりわずかに大きい磁性板である。第1ヨーク32の外周面は、磁石61の外周面より径方向外側に張り出している。第1ヨーク32は、磁石61のL1側の面に接着等の方法で固定されている。第2ヨーク33は、2枚の磁性板(第1磁性板34、第2磁性板35)によって構成される。第1磁性板34は、磁石61のL2側に配置される端板部341と、端板部341の外縁からL1側に延在する円筒状の側板部342とを備えている。側板部342は、コイル固定部43の外周側に配置される。第2磁性板35は、第1磁性板34の端板部341よりわずかに小さな円板状である。第2磁性板35は、第1磁性板34の端板部341にL2側で積層され、端板部341に溶接されている。第2ヨーク33は、第2磁性板35が磁石61のL2側の面に接着等の方法で固定されている。 The first yoke 32 is a magnetic plate whose outer diameter dimension is slightly larger than the outer diameter dimension of the magnet 61. The outer peripheral surface of the first yoke 32 projects radially outward from the outer peripheral surface of the magnet 61. The first yoke 32 is fixed to the surface of the magnet 61 on the L1 side by a method such as adhesion. The second yoke 33 is composed of two magnetic plates (first magnetic plate 34, second magnetic plate 35). The first magnetic plate 34 includes an end plate portion 341 arranged on the L2 side of the magnet 61, and a cylindrical side plate portion 342 extending from the outer edge of the end plate portion 341 to the L1 side. The side plate portion 342 is arranged on the outer peripheral side of the coil fixing portion 43. The second magnetic plate 35 has a disc shape slightly smaller than the end plate portion 341 of the first magnetic plate 34. The second magnetic plate 35 is laminated on the end plate portion 341 of the first magnetic plate 34 on the L2 side and welded to the end plate portion 341. In the second yoke 33, the second magnetic plate 35 is fixed to the surface of the magnet 61 on the L2 side by a method such as adhesion.

(アクチュエータの動作)
アクチュエータ1は、コイル62に通電することにより、磁気駆動機構6が、可動体3を軸線L方向に駆動する駆動力を発生させる。コイル62への通電を切ると、可動体3は、ばね部材10の復帰力によって原点位置へ戻る。従って、コイル62への通電を断続的に行うことにより、可動体3は、軸線L方向で振動する。
(Actuator operation)
When the actuator 1 energizes the coil 62, the magnetic drive mechanism 6 generates a driving force for driving the movable body 3 in the axis L direction. When the energization of the coil 62 is turned off, the movable body 3 returns to the origin position by the returning force of the spring member 10. Therefore, by intermittently energizing the coil 62, the movable body 3 vibrates in the axis L direction.

(実施形態1の主な効果)
以上のように、実施形態1のばね部材10は、板ばね8と、板ばね8に固定される粘弾性体9とを有し、板ばね8は、可動体3に接続される第1固定部81と、固定体2に接続される第2固定部82と、第1固定部81と第2固定部82とを接続するばね部80を備え、粘弾性体9は、ばね部80に配置される。
(Main effect of Embodiment 1)
As described above, the spring member 10 of the first embodiment has the leaf spring 8 and the viscoelastic body 9 fixed to the leaf spring 8, and the leaf spring 8 is the first fixed body connected to the movable body 3. A spring portion 80 is provided which connects the portion 81, the second fixing portion 82 connected to the fixed body 2, and the first fixing portion 81 and the second fixing portion 82, and the viscoelastic body 9 is arranged in the spring portion 80. Will be done.

また、実施形態1のばね部材10を備えたアクチュエータ1は、ばね部材10の第1固定部81に固定される固定体2と、ばね部材10の第2固定部82に固定され、ばね部材10によって固定体2と接続される可動体3と、ばね部材10の板厚方向に可動体3を振動させる磁気駆動機構と、を備える。 Further, the actuator 1 provided with the spring member 10 of the first embodiment is fixed to the fixed body 2 fixed to the first fixing portion 81 of the spring member 10 and the second fixing portion 82 of the spring member 10, and is fixed to the spring member 10. A movable body 3 connected to the fixed body 2 and a magnetic drive mechanism for vibrating the movable body 3 in the plate thickness direction of the spring member 10 are provided.

実施形態1のばね部材10は、板ばね8のばね部80に粘弾性体9が配置される。従って、板ばね8と粘弾性体9の両方の特性を利用できるので、求める振動特性を達成しやすい。また、衝撃等によって板ばね8が大きく変形して元の形状に復帰できなくなることを
粘弾性体9によって抑制できる。従って、板ばね8のみを用いる場合よりも耐衝撃性が高い。従って、アクチュエータ1の耐久性を高めることができる。また、板ばね8は薄型であるため、粘弾性体9のみを用いる場合と比較して、小型化および軽量化に適している。また、可動体3および固定体2に対する固定部は板ばね8に設けられた第1固定部81および第2固定部82であるため、難接着性の粘弾性体9を直接固定する場合よりも、接着材の選定が容易である。さらに、1部材として取り扱うことができるので、アクチュエータ1において可動体3と固定体2とを接続する接続体として用いる場合に、可動体3と固定体2を接続する工程を効率化できる。
In the spring member 10 of the first embodiment, the viscoelastic body 9 is arranged in the spring portion 80 of the leaf spring 8. Therefore, since the characteristics of both the leaf spring 8 and the viscoelastic body 9 can be utilized, it is easy to achieve the desired vibration characteristics. Further, the viscoelastic body 9 can suppress that the leaf spring 8 is greatly deformed due to an impact or the like and cannot return to the original shape. Therefore, the impact resistance is higher than when only the leaf spring 8 is used. Therefore, the durability of the actuator 1 can be improved. Further, since the leaf spring 8 is thin, it is suitable for miniaturization and weight reduction as compared with the case where only the viscoelastic body 9 is used. Further, since the fixing portions for the movable body 3 and the fixed body 2 are the first fixing portion 81 and the second fixing portion 82 provided on the leaf spring 8, the viscoelastic body 9 having poor adhesiveness is more than directly fixed. , It is easy to select the adhesive. Further, since it can be handled as one member, when the actuator 1 is used as a connecting body for connecting the movable body 3 and the fixed body 2, the step of connecting the movable body 3 and the fixed body 2 can be made more efficient.

実施形態1において、粘弾性体9は、ばね部80に設けられた分離孔89を含む範囲に配置される。従って、粘弾性体9が板ばね8から分離しにくく、粘弾性体9と板ばね8とが一体になって変形するので、板ばね8と粘弾性体9の両方の特性を利用しやすい。 In the first embodiment, the viscoelastic body 9 is arranged in a range including the separation hole 89 provided in the spring portion 80. Therefore, the viscoelastic body 9 is difficult to separate from the leaf spring 8, and the viscoelastic body 9 and the leaf spring 8 are integrally deformed, so that the characteristics of both the leaf spring 8 and the viscoelastic body 9 can be easily utilized.

なお、本形態では、ばね部80に分離孔89が設けられているが、板ばね8は、ばね部80に切り欠きが設けられている構成であってもよい。この場合には、切り欠きを含む範囲に粘弾性体9を配置することにより、同様の作用効果を得ることができる。 In this embodiment, the spring portion 80 is provided with the separation hole 89, but the leaf spring 8 may be configured such that the spring portion 80 is provided with a notch. In this case, the same effect can be obtained by arranging the viscoelastic body 9 in the range including the notch.

実施形態1において、粘弾性体9は、ばね部80の板厚よりも厚く、ばね部80から板厚方向LA(面外方向)の両側へ突出している。このようにすると、粘弾性体9を板ばね8より厚くすることができるので、粘弾性体9の特性を利用しやすい。また、粘弾性体9が板ばね8から分離しにくくなるとともに、粘弾性体9によって板ばね8を保護できるので、ばね部材10の耐久性を高めることができる In the first embodiment, the viscoelastic body 9 is thicker than the plate thickness of the spring portion 80, and protrudes from the spring portion 80 to both sides in the plate thickness direction LA (out-of-plane direction). In this way, the viscoelastic body 9 can be made thicker than the leaf spring 8, so that the characteristics of the viscoelastic body 9 can be easily utilized. Further, since the viscoelastic body 9 is difficult to separate from the leaf spring 8 and the leaf spring 8 can be protected by the viscoelastic body 9, the durability of the spring member 10 can be enhanced.

実施形態1において、粘弾性体9は、第1固定部81と第2固定部82の間に延在するスリット状の分離孔89に配置されるため、板ばね8は、分離孔89を挟んで対向する部分が板ばね8の面内方向で連結される。このように、板ばね8にスリット状の分離孔89を設けると、分離孔89によって分割された部分が弾性変形可能なアーム83になる。従って、板ばね8に弾性を持たせることができる。また、分離孔89に粘弾性体9を配置することにより、板ばね8が面外方向に変形する際に、大きく変形しすぎることを抑制できる。従って、ばね部材10の耐衝撃性を高めることができる。また、分離孔89に配置した粘弾性体9によって、ばね部材10の面内方向の剛性を高めることができる。 In the first embodiment, since the viscoelastic body 9 is arranged in the slit-shaped separation hole 89 extending between the first fixing portion 81 and the second fixing portion 82, the leaf spring 8 sandwiches the separation hole 89. The portions facing each other are connected in the in-plane direction of the leaf spring 8. When the leaf spring 8 is provided with the slit-shaped separation hole 89 in this way, the portion divided by the separation hole 89 becomes an elastically deformable arm 83. Therefore, the leaf spring 8 can be made elastic. Further, by arranging the viscoelastic body 9 in the separation hole 89, it is possible to prevent the leaf spring 8 from being deformed too much when it is deformed in the out-of-plane direction. Therefore, the impact resistance of the spring member 10 can be improved. Further, the viscoelastic body 9 arranged in the separation hole 89 can increase the rigidity of the spring member 10 in the in-plane direction.

実施形態1において第1固定部81および第2固定部82は環状であり、第2固定部82は、第1固定部81の外周側に配置される。ばね部80は、第1固定部81と第2固定部82の間で螺旋状に延びるアーム83を備えると共に、隣り合うアーム83の間に設けられたスリット状の分離孔89を備える。そして、分離孔89に配置される粘弾性体9によって、分離孔89の両側に位置するアーム83が板ばね8の面内方向で連結される。このように、内周側から外周側へ螺旋状に延びるアーム83を設けることにより、板ばね8を面外方向に弾性変形させることができる。従って、第1固定部81に固定される可動体3を、第2固定部82に固定される固定体2に対して板ばね8に対して垂直な方向に振動可能な状態で支持することができる。また、分離孔89に配置される粘弾性体9によって、ばね部材10の面内方向の剛性を高めることができる。これにより、第1固定部81に固定される可動体3が板ばね8の面内方向に移動することを抑制できるため、アクチュエータ1は、可動体3を振動させる際に、可動体3が振動方向(軸線L方向)と交差する方向へ動くことを抑制できる。従って、可動体3と固定体2との衝突を抑制できるので、アクチュエータ1の耐衝撃性を高めることができる。 In the first embodiment, the first fixing portion 81 and the second fixing portion 82 are annular, and the second fixing portion 82 is arranged on the outer peripheral side of the first fixing portion 81. The spring portion 80 includes an arm 83 extending spirally between the first fixing portion 81 and the second fixing portion 82, and also includes a slit-shaped separation hole 89 provided between adjacent arms 83. Then, the viscoelastic bodies 9 arranged in the separation holes 89 connect the arms 83 located on both sides of the separation holes 89 in the in-plane direction of the leaf spring 8. By providing the arm 83 spirally extending from the inner peripheral side to the outer peripheral side in this way, the leaf spring 8 can be elastically deformed in the out-of-plane direction. Therefore, the movable body 3 fixed to the first fixed portion 81 can be supported in a state in which it can vibrate in a direction perpendicular to the leaf spring 8 with respect to the fixed body 2 fixed to the second fixed portion 82. it can. Further, the viscoelastic body 9 arranged in the separation hole 89 can increase the rigidity of the spring member 10 in the in-plane direction. As a result, it is possible to prevent the movable body 3 fixed to the first fixing portion 81 from moving in the in-plane direction of the leaf spring 8. Therefore, when the actuator 1 vibrates the movable body 3, the movable body 3 vibrates. It is possible to suppress the movement in the direction intersecting the direction (axis L direction). Therefore, since the collision between the movable body 3 and the fixed body 2 can be suppressed, the impact resistance of the actuator 1 can be improved.

(ばね部材を備えたレンズ駆動装置)
図5は、図1のばね部材を備えたレンズ駆動装置1Aの断面図である。実施形態1のばね部材10は、レンズ等の光学素子を光軸方向へ移動させるレンズ駆動装置1Aにおいて
、可動体3Aと固定体2Aとを接続する接続体として用いることができる。図5に示すように、レンズ駆動装置1Aは、固定体2Aおよび可動体3Aと、固定体2Aと可動体3Aとを接続するばね部材10と、固定体2Aに対して可動体3Aを軸線L方向に相対移動させる磁気駆動機構6を備える。磁気駆動機構6はレンズ駆動機構であり、可動体3Aに配置される磁石61と、固定体2Aに配置されるコイル62を備える。なお、磁石61とコイル62の配置を逆にすることも可能である。
(Lens drive device with spring member)
FIG. 5 is a cross-sectional view of the lens driving device 1A provided with the spring member of FIG. The spring member 10 of the first embodiment can be used as a connecting body for connecting the movable body 3A and the fixed body 2A in the lens driving device 1A for moving an optical element such as a lens in the optical axis direction. As shown in FIG. 5, the lens driving device 1A has a fixed body 2A and a movable body 3A, a spring member 10 connecting the fixed body 2A and the movable body 3A, and an axis L of the movable body 3A with respect to the fixed body 2A. A magnetic drive mechanism 6 for relative movement in a direction is provided. The magnetic drive mechanism 6 is a lens drive mechanism, and includes a magnet 61 arranged on the movable body 3A and a coil 62 arranged on the fixed body 2A. It is also possible to reverse the arrangement of the magnet 61 and the coil 62.

固定体2Aは、第1ケース25および第2ケース26と、第2ケース26に保持される撮像素子27と、図示しないコイルホルダを備える。コイルホルダは、第1ケース25もしくは第2ケース26と一体に形成されていてもよいし、別体の部材を第1ケース25もしくは第2ケース26に固定したものでもよい。可動体3Aは、レンズ51と、レンズ51を保持するレンズホルダ52を備えた光学モジュールである。レンズホルダ52には、磁石61が直接または間接的に固定される。また、レンズホルダ52のL1側の端部は、第1ケース25に設けられた開口部からL1側へ突出する。レンズ51の光軸は、可動体3Aの軸線Lと一致し、撮像素子27は、レンズ51の光軸(軸線L)上に配置される。 The fixed body 2A includes a first case 25 and a second case 26, an image sensor 27 held in the second case 26, and a coil holder (not shown). The coil holder may be integrally formed with the first case 25 or the second case 26, or a separate member may be fixed to the first case 25 or the second case 26. The movable body 3A is an optical module including a lens 51 and a lens holder 52 that holds the lens 51. The magnet 61 is directly or indirectly fixed to the lens holder 52. Further, the end portion of the lens holder 52 on the L1 side projects toward the L1 side from the opening provided in the first case 25. The optical axis of the lens 51 coincides with the axis L of the movable body 3A, and the image sensor 27 is arranged on the optical axis (axis L) of the lens 51.

ばね部材10は、軸線L方向に離間した2箇所において可動体3Aと固定体2Aを接続しており、可動体3Aを軸線L方向に移動可能に支持する。本形態では、ばね部材10として、可動体3AのL1側の端部に配置される第1ばね部材10Aと、可動体3AのL2側の端部に配置される第2ばね部材10Bを備える。第1ばね部材10Aは、第1固定部81が可動体3のL1側の端部に固定され、第2固定部82が固定体2に固定される。また、第2ばね部材10Bは、第1固定部81が可動体3のL2側の端部に固定され、第2固定部82が固定体2に固定される。 The spring member 10 connects the movable body 3A and the fixed body 2A at two positions separated in the axis L direction, and supports the movable body 3A so as to be movable in the axis L direction. In the present embodiment, the spring member 10 includes a first spring member 10A arranged at the end of the movable body 3A on the L1 side and a second spring member 10B arranged at the end of the movable body 3A on the L2 side. In the first spring member 10A, the first fixing portion 81 is fixed to the end portion of the movable body 3 on the L1 side, and the second fixing portion 82 is fixed to the fixed body 2. Further, in the second spring member 10B, the first fixing portion 81 is fixed to the end portion of the movable body 3 on the L2 side, and the second fixing portion 82 is fixed to the fixed body 2.

(レンズ駆動装置の動作)
レンズ駆動装置1Aは、コイル62に通電することにより、磁気駆動機構6が、可動体3Aを軸線L方向に駆動する駆動力を発生させる。これにより、レンズ51の光軸(軸線L)上の位置が調節される。従って、レンズ51を備えた光学モジュールの焦点合わせを行うことができる。
(Operation of lens drive device)
In the lens driving device 1A, when the coil 62 is energized, the magnetic driving mechanism 6 generates a driving force for driving the movable body 3A in the axis L direction. As a result, the position of the lens 51 on the optical axis (axis L) is adjusted. Therefore, the optical module provided with the lens 51 can be focused.

上記のように、ばね部材10は、板ばね8と粘弾性体9の両方の特性を利用できるので、板ばね8のみを用いる場合よりも耐衝撃性が高い。従って、レンズ駆動装置1Aの耐久性を高めることができる。また、板ばね8は薄型であるため、粘弾性体9のみを用いる場合と比較して、レンズ駆動装置1Aの小型化および軽量化に適している。また、可動体3および固定体2に対する固定部は板ばね8に設けられた第1固定部81および第2固定部82であるため、難接着性の粘弾性体9を直接固定する場合よりも、接着材の選定が容易である。さらに、1部材として取り扱うことができるので、レンズ駆動装置1Aにおいて可動体3と固定体2とを接続する接続体として用いる場合に、可動体3と固定体2を接続する工程を効率化できる。 As described above, the spring member 10 can utilize the characteristics of both the leaf spring 8 and the viscoelastic body 9, and therefore has higher impact resistance than the case where only the leaf spring 8 is used. Therefore, the durability of the lens driving device 1A can be improved. Further, since the leaf spring 8 is thin, it is suitable for downsizing and weight reduction of the lens driving device 1A as compared with the case where only the viscoelastic body 9 is used. Further, since the fixing portions for the movable body 3 and the fixed body 2 are the first fixing portion 81 and the second fixing portion 82 provided on the leaf spring 8, the viscoelastic body 9 having poor adhesiveness is more than directly fixed. , It is easy to select the adhesive. Further, since it can be handled as one member, when it is used as a connecting body for connecting the movable body 3 and the fixed body 2 in the lens driving device 1A, the step of connecting the movable body 3 and the fixed body 2 can be made more efficient.

[実施形態2]
図6は、実施形態2に係るばね部材10Cの平面図である。実施形態1は、ばね部80全体に粘弾性体9を配置し、分離孔89全体に粘弾性体9を配置した構成であったが、粘弾性体9を配置する範囲は、実施形態1とは異なっていてもよい。図6に示すように、実施形態2のばね部材10Cは、ばね部80の複数個所に部分的に配置された粘弾性体9Cを備える。このように、粘弾性体9の位置および大きさを限定することにより、板ばね8の振動特性を利用できる。
[Embodiment 2]
FIG. 6 is a plan view of the spring member 10C according to the second embodiment. The first embodiment has a configuration in which the viscoelastic body 9 is arranged in the entire spring portion 80 and the viscoelastic body 9 is arranged in the entire separation hole 89, but the range in which the viscoelastic body 9 is arranged is the same as that in the first embodiment. May be different. As shown in FIG. 6, the spring member 10C of the second embodiment includes viscoelastic bodies 9C partially arranged at a plurality of positions of the spring portion 80. By limiting the position and size of the viscoelastic body 9 in this way, the vibration characteristics of the leaf spring 8 can be utilized.

[実施形態3]
図7(a)は、実施形態3に係るばね部材10Dの断面図である。実施形態1は、板ば
ね8の板厚方向LAの両側に粘弾性体9が突出した形状であったが、板ばね8の板厚方向LAのいずれか一方の側のみに粘弾性体が突出する構成にすることもできる。図7(a)に示すばね部材10Dは、板ばね8および粘弾性体9Dを備えており、粘弾性体9Dは、板ばね8の分離孔89に充填される充填部分90と、板ばね8の板厚方向LAの他方側LA2に配置される第2突出部分92を備えており、板ばね8の板厚方向LAの一方側LA1に配置される部分を備えていない。実施形態3では、ばね部材10Dの板厚方向LAの一方側LA1の表面をフラットな面にすることができる。また、ばね部材10Dの板厚方向LAの厚さを小さくすることができる。
[Embodiment 3]
FIG. 7A is a cross-sectional view of the spring member 10D according to the third embodiment. In the first embodiment, the viscoelastic bodies 9 protrude on both sides of the leaf spring 8 in the plate thickness direction LA, but the viscoelastic bodies project only on either side of the leaf spring 8 in the plate thickness direction LA. It can also be configured to. The spring member 10D shown in FIG. 7A includes a leaf spring 8 and a viscoelastic body 9D, and the viscoelastic body 9D includes a filling portion 90 filled in a separation hole 89 of the leaf spring 8 and a leaf spring 8. It is provided with a second protruding portion 92 arranged on the other side LA2 of the leaf thickness direction LA, and is not provided with a portion of the leaf spring 8 arranged on one side LA1 of the plate thickness direction LA. In the third embodiment, the surface of one side LA1 of the spring member 10D in the plate thickness direction LA can be made flat. Further, the thickness of the spring member 10D in the plate thickness direction LA can be reduced.

[実施形態4]
図7(b)は、実施形態4に係るばね部材10Eの断面図である。実施形態1は、板ばね8から板厚方向LAに突出する粘弾性体9の部分の厚さが一定であったが、粘弾性体9の厚さは一定でなくてもよい。図7(b)に示すばね部材10Eは、板ばね8および粘弾性体9Eを備えており、粘弾性体9Eは、板ばね8の分離孔89に充填される充填部分90と、板ばね8の板厚方向LAの一方側LA1に配置される第1突出部分91Eと、板ばね8の板厚方向LAの他方側LA2に配置される第2突出部分92Eを備えており、第1突出部分91Eおよび第2突出部分92Eは、中央が最も厚く、外周側へ向かうに従って厚さが減少している。このようにすると、ばね部材10Eの中央部分を外周部分より変形しにくくすることができる。
[Embodiment 4]
FIG. 7B is a cross-sectional view of the spring member 10E according to the fourth embodiment. In the first embodiment, the thickness of the portion of the viscoelastic body 9 protruding from the leaf spring 8 in the plate thickness direction LA was constant, but the thickness of the viscoelastic body 9 does not have to be constant. The spring member 10E shown in FIG. 7B includes a leaf spring 8 and a viscoelastic body 9E, and the viscoelastic body 9E includes a filling portion 90 filled in a separation hole 89 of the leaf spring 8 and a leaf spring 8. A first protruding portion 91E arranged on one side LA1 of the leaf thickness direction LA and a second protruding portion 92E arranged on the other side LA2 of the leaf spring 8 in the plate thickness direction LA are provided. The 91E and the second protruding portion 92E are the thickest in the center and decrease in thickness toward the outer peripheral side. In this way, the central portion of the spring member 10E can be made less likely to be deformed than the outer peripheral portion.

[実施形態5]
図7(c)は、実施形態5に係るばね部材10Fの断面図である。図7(c)に示すばね部材10Fは、板ばね8および粘弾性体9Fを備えており、粘弾性体9Fは、板ばね8の分離孔89に充填される充填部分90を備えており、粘弾性体9Fは、板ばね8の板厚内に配置される。このようにすると、薄型でありながら、板ばね8と粘弾性体9Fの両方の特性を備えたばね部材10Fが得られる。また、ばね部材10Fの板厚方向LAの両面をフラットな面にすることができる。
[Embodiment 5]
FIG. 7C is a cross-sectional view of the spring member 10F according to the fifth embodiment. The spring member 10F shown in FIG. 7C includes a leaf spring 8 and a viscoelastic body 9F, and the viscoelastic body 9F includes a filling portion 90 filled in the separation hole 89 of the leaf spring 8. The viscoelastic body 9F is arranged within the plate thickness of the leaf spring 8. In this way, a spring member 10F having the characteristics of both the leaf spring 8 and the viscoelastic body 9F can be obtained while being thin. Further, both sides of the spring member 10F in the plate thickness direction LA can be made flat.

[実施形態6]
図8は、実施形態6に係るばね部材10Gの断面図である。図8に示すばね部材10Fは、板ばね8および粘弾性体9Gと、インサート部品11を備える。インサート部品11は、例えばボルトであり、図8に示す例では、ボルトの頭部が粘弾性体9Gに埋め込まれている。ボルトのねじ部は、板ばね8の孔(図示省略)に通され、粘弾性体9Gから露出している。粘弾性体9Gは、ボルト(インサート部品11)の凹部を埋め込んだ部分がLA2方向へ突出した形状をしている。このように、板ばね8に加えてインサート部品11を粘弾性体9Gに固定することで、ばね部材10Gと他部品との接続を容易に行うことができる。
[Embodiment 6]
FIG. 8 is a cross-sectional view of the spring member 10G according to the sixth embodiment. The spring member 10F shown in FIG. 8 includes a leaf spring 8, a viscoelastic body 9G, and an insert component 11. The insert component 11 is, for example, a bolt, and in the example shown in FIG. 8, the head of the bolt is embedded in the viscoelastic body 9G. The threaded portion of the bolt is passed through a hole (not shown) of the leaf spring 8 and is exposed from the viscoelastic body 9G. The viscoelastic body 9G has a shape in which a portion of the bolt (insert component 11) in which the recess is embedded protrudes in the LA2 direction. By fixing the insert component 11 to the viscoelastic body 9G in addition to the leaf spring 8 in this way, the spring member 10G and other components can be easily connected.

なお、インサート部品11の種類や、インサート部品を埋め込む位置および粘弾性体9Gの形状は、図8に示す例に限定されるものではなく、適宜変更可能である。例えば、インサート部品11は、ボルトでなくナットであってもよい。 The type of the insert component 11, the position where the insert component is embedded, and the shape of the viscoelastic body 9G are not limited to the example shown in FIG. 8, and can be changed as appropriate. For example, the insert component 11 may be a nut instead of a bolt.

[実施形態7]
図9は、実施形態7に係るばね部材10Hの断面図である。図9に示すばね部材10Hは、板ばね8および粘弾性体9Gと、フィルム12を備える。フィルム12は、粘弾性体9Gの表面に接着されている。このように、粘弾性体9Gの表面をフィルム12で覆うことにより、フィルム12を介して他部品との接着を容易に行うことができる。また、粘弾性体9Gの表面にフィルム12を配置することにより、ばね部材10Hを容易に取り扱うことができる。
[Embodiment 7]
FIG. 9 is a cross-sectional view of the spring member 10H according to the seventh embodiment. The spring member 10H shown in FIG. 9 includes a leaf spring 8, a viscoelastic body 9G, and a film 12. The film 12 is adhered to the surface of the viscoelastic body 9G. By covering the surface of the viscoelastic body 9G with the film 12 in this way, adhesion to other parts can be easily performed via the film 12. Further, by arranging the film 12 on the surface of the viscoelastic body 9G, the spring member 10H can be easily handled.

フィルム12は、粘弾性体9Gの成型後に粘弾性体9Gの表面に接着してもよいし、型部材の内面にプライマーを塗布したフィルム12を配置して成型することもできる。なお、フィルム12を取り付ける面をフラットな面にした場合には、大判のフィルムを型にセットして、板ばね8と共に粘弾性体と一体成形した後に、フィルムごと粘弾性体を打ち抜き加工することによって、ばね部材を製造することもできる。あるいは、フィルムにハーフカットや切込み、ミシン目などを入れておくことにより、離型時に簡単にフィルムが切り離されるようにすることもできる。 The film 12 may be adhered to the surface of the viscoelastic body 9G after molding the viscoelastic body 9G, or the film 12 coated with the primer may be arranged on the inner surface of the mold member and molded. When the surface to which the film 12 is attached is a flat surface, a large-sized film is set in a mold, integrally molded with the viscoelastic body together with the leaf spring 8, and then the viscoelastic body is punched together with the film. It is also possible to manufacture a spring member. Alternatively, the film can be easily separated at the time of mold release by making a half cut, a notch, a perforation, or the like in the film.

1…アクチュエータ、1A…レンズ駆動装置、2、2A…固定体、3、3A…可動体、4…ホルダ、6…磁気駆動機構、8…板ばね、9、9C、9D、9E、9E、9F、9G、9H…粘弾性体、10、10C、10D、10E、10F、10G、10H…ばね部材、10A…第1ばね部材、10B…第2ばね部材、11…インサート部品、12…フィルム、20…ケース、21…筒状ケース、22…第1蓋部材、23…第2蓋部材、24…凹部、25…第1ケース、26…第2ケース、27…撮像素子、29…環状突出部、30…錘、31…シャフト、32…第1ヨーク、33…第2ヨーク、34…第1磁性板、35…第2磁性板、36…第1受け部材、37…第2受け部材、38…第1部材、39…第2部材、42…環状部、43…コイル固定部、44…端子保持部、51…レンズ、52…レンズホルダ、61…磁石、62…コイル、63…基板、64…端子ピン、80…ばね部、81…第1固定部、82…固定部、83…アーム、83A…第1アーム、83B…第2アーム、83C…第3アーム、84…内側接続部、85…外側接続部、86…螺旋部、87…屈曲部、87A…第1屈曲部、87B…第2屈曲部、87C…第3屈曲部、89…分離孔、90…充填部分、91、91E…第1突出部分、92、92E…第2突出部分、110…第1型部材、111…円形凹部、120…第2型部材、121…円形凹部、130…スペーサ、140…ゲル材料、221、231…対向面、341…端板部、342…側板部、361…第1環状溝、371…第2環状溝、381…筒部、382…円板部、391…筒部、392…円板部、871…傾斜部分、872…第1屈曲部分、873…第1屈曲部分、CCW…周方向の一方側、CW…周方向の他方側、L…軸線、LA…板厚方向 1 ... Actuator, 1A ... Lens drive device, 2, 2A ... Fixed body, 3, 3A ... Movable body, 4 ... Holder, 6 ... Magnetic drive mechanism, 8 ... Leaf spring, 9, 9C, 9D, 9E, 9E, 9F , 9G, 9H ... Viscoelastic body, 10, 10C, 10D, 10E, 10F, 10G, 10H ... Spring member, 10A ... 1st spring member, 10B ... 2nd spring member, 11 ... Insert part, 12 ... Film, 20 ... Case, 21 ... Cylindrical case, 22 ... 1st lid member, 23 ... 2nd lid member, 24 ... Recessed, 25 ... 1st case, 26 ... 2nd case, 27 ... Imaging element, 29 ... annular protrusion, 30 ... weight, 31 ... shaft, 32 ... first yoke, 33 ... second yoke, 34 ... first magnetic plate, 35 ... second magnetic plate, 36 ... first receiving member, 37 ... second receiving member, 38 ... 1st member, 39 ... 2nd member, 42 ... annular part, 43 ... coil fixing part, 44 ... terminal holding part, 51 ... lens, 52 ... lens holder, 61 ... magnet, 62 ... coil, 63 ... substrate, 64 ... Terminal pin, 80 ... Spring part, 81 ... First fixing part, 82 ... Fixed part, 83 ... Arm, 83A ... First arm, 83B ... Second arm, 83C ... Third arm, 84 ... Inner connection part, 85 ... Outer connection part, 86 ... spiral part, 87 ... bent part, 87A ... first bent part, 87B ... second bent part, 87C ... third bent part, 89 ... separation hole, 90 ... filled part, 91, 91E ... 1 protruding part, 92, 92E ... second protruding part, 110 ... first type member, 111 ... circular recess, 120 ... second type member, 121 ... circular recess, 130 ... spacer, 140 ... gel material, 221.231 ... Facing surface, 341 ... end plate part, 342 ... side plate part, 361 ... first annular groove, 371 ... second annular groove, 381 ... cylinder part, 382 ... disk part, 391 ... cylinder part, 392 ... disk part, 871 ... Inclined portion, 872 ... First bent portion, 873 ... First bent portion, CCW ... One side in the circumferential direction, CW ... One side in the circumferential direction, L ... Axial line, LA ... Plate thickness direction

Claims (11)

板ばねと、前記板ばねに固定される粘弾性体と、を有し、
前記板ばねは、可動体に固定される第1固定部と、固定体に固定される第2固定部と、前記第1固定部と前記第2固定部とを接続するばね部と、を備え、
前記粘弾性体は、前記ばね部に配置されることを特徴とするばね部材。
It has a leaf spring and a viscoelastic body fixed to the leaf spring.
The leaf spring includes a first fixing portion fixed to the movable body, a second fixing portion fixed to the fixed body, and a spring portion connecting the first fixing portion and the second fixing portion. ,
The viscoelastic body is a spring member characterized in that it is arranged in the spring portion.
前記粘弾性体は、前記ばね部に設けられた切り欠きまたは孔の少なくとも一部を含む範囲に配置されることを特徴とする請求項1に記載のばね部材。 The spring member according to claim 1, wherein the viscoelastic body is arranged in a range including at least a part of a notch or a hole provided in the spring portion. 前記粘弾性体は、前記ばね部の板厚よりも厚く、前記ばね部から前記板ばねの板厚方向の少なくとも一方側へ突出していることを特徴とする請求項2に記載のばね部材。 The spring member according to claim 2, wherein the viscoelastic body is thicker than the plate thickness of the spring portion and protrudes from the spring portion in at least one side in the plate thickness direction of the leaf spring. 前記粘弾性体は、前記ばね部から前記板厚方向の両側へ突出していることを特徴とする請求項3に記載のばね部材。 The spring member according to claim 3, wherein the viscoelastic body protrudes from the spring portion to both sides in the plate thickness direction. 前記粘弾性体は、前記ばね部の板厚内に配置されることを特徴とする請求項2に記載のばね部材。 The spring member according to claim 2, wherein the viscoelastic body is arranged within the plate thickness of the spring portion. 前記孔は、前記第1固定部と前記第2固定部の間に延在するスリット状の分離孔であり、
前記分離孔に配置される前記粘弾性体によって、前記分離孔を挟んで対向する部分が前記板ばねの面内方向で連結されることを特徴とする請求項2から5の何れか一項に記載のばね部材。
The hole is a slit-shaped separation hole extending between the first fixing portion and the second fixing portion.
According to any one of claims 2 to 5, the viscoelastic body arranged in the separation hole connects the portions facing each other with the separation hole in the in-plane direction of the leaf spring. The spring member described.
前記第1固定部および前記第2固定部は環状であり、
前記第2固定部は、前記第1固定部の外周側に配置され、
前記ばね部は、前記第1固定部と前記第2固定部の間で螺旋状に延びるアームを備え、
前記孔は、隣り合う前記アームの間に設けられたスリット状の分離孔であり、
前記分離孔に配置される前記粘弾性体によって、前記分離孔の両側に位置する前記アームが前記板ばねの面内方向で連結されることを特徴とする請求項6に記載のばね部材。
The first fixing portion and the second fixing portion are annular and have an annular shape.
The second fixing portion is arranged on the outer peripheral side of the first fixing portion.
The spring portion includes an arm that extends spirally between the first fixing portion and the second fixing portion.
The hole is a slit-shaped separation hole provided between the adjacent arms.
The spring member according to claim 6, wherein the arms located on both sides of the separation hole are connected in the in-plane direction of the leaf spring by the viscoelastic body arranged in the separation hole.
前記粘弾性体の表面に固定されるフィルムを備えることを特徴とする請求項2から7の何れか一項に記載のばね部材。 The spring member according to any one of claims 2 to 7, further comprising a film fixed to the surface of the viscoelastic body. 前記粘弾性体に一部が埋め込まれたインサート部品を備えることを特徴とする請求項2から8の何れか一項に記載のばね部材。 The spring member according to any one of claims 2 to 8, further comprising an insert component partially embedded in the viscoelastic body. 請求項1から9のいずれか一項に記載のばね部材と、
前記ばね部材の前記第2固定部に固定される固定体と、
前記ばね部材の前記第1固定部に固定され、前記ばね部材によって前記固定体と接続される可動体と、
前記ばね部材の板厚方向に前記可動体を振動させる磁気駆動機構と、を備えることを特徴とするアクチュエータ。
The spring member according to any one of claims 1 to 9,
A fixed body fixed to the second fixing portion of the spring member,
A movable body fixed to the first fixing portion of the spring member and connected to the fixed body by the spring member.
An actuator including a magnetic drive mechanism that vibrates the movable body in the plate thickness direction of the spring member.
請求項1から9のいずれか一項に記載のばね部材と、
前記ばね部材の前記第2固定部に固定される固定体と、
レンズを備えると共に、前記ばね部材の前記第1固定部に固定される可動体と、
前記レンズの光軸方向に前記可動体を移動させるレンズ駆動機構と、を備えることを特徴とするレンズ駆動装置。
The spring member according to any one of claims 1 to 9,
A fixed body fixed to the second fixing portion of the spring member,
A movable body provided with a lens and fixed to the first fixing portion of the spring member, and
A lens driving device including a lens driving mechanism for moving the movable body in the optical axis direction of the lens.
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