JP2020188269A - Imaging element, laminated imaging element, solid-state imaging device, and driving method of solid-state imaging device - Google Patents

Abstract

To provide an imaging element, for suppressing deterioration of image quality, in which a photoelectric conversion unit is disposed on or above a semiconductor substrate, a laminated imaging element, a solid-state imaging device, and a driving method of the solid-state imaging device.SOLUTION: The imaging element includes a photoelectric conversion unit in which a first electrode 11, a photoelectric conversion layer and a second electrode 16 are laminated. The photoelectric conversion unit further includes a charge storage electrode 12, provided apart from the first electrode 11 to face the photoelectric conversion layer via an insulating layer 82. The photoelectric conversion layer has a laminated layer structure of a lower semiconductor layer 15A and an upper photoelectric conversion layer 15B from the first electrode side.SELECTED DRAWING: Figure 46

Description

The present disclosure relates to an image pickup device, a stacked image pickup device, a solid-state image pickup device, and a method for driving the solid-state image pickup device.

An image sensor that uses an organic semiconductor material for the photoelectric conversion layer can perform photoelectric conversion of a specific color (wavelength band). Because of these characteristics, when used as an image sensor in a solid-state image sensor, sub-pixels are formed from a combination of an on-chip color filter (OCCF) and an image sensor, and the sub-pixels are arranged in two dimensions. It is possible to obtain a structure in which sub-pixels are laminated (stacked image sensor), which is impossible with a conventional solid-state image sensor (see, for example, Japanese Patent Application Laid-Open No. 2011-138927). Further, since no demosaic processing is required, there is an advantage that false color does not occur. In the following description, an image pickup element provided with a photoelectric conversion unit provided above or above the semiconductor substrate is referred to as a "first type image pickup element" for convenience, and the photoelectric light constituting the first type image pickup element is referred to. The conversion unit is referred to as a "first type photoelectric conversion unit" for convenience, and the image pickup element provided in the semiconductor substrate is referred to as a "second type image pickup element" for convenience, and constitutes a second type image pickup element. For convenience, the photoelectric conversion unit may be referred to as a "second type photoelectric conversion unit".

FIG. 49 shows a structural example of a conventional stacked image sensor (stacked solid-state image sensor). In the example shown in FIG. 49, the third photoelectric conversion unit 331, which is a second type photoelectric conversion unit constituting the third image sensor 330, which is the second type image sensor, and the second image sensor 320, are contained in the semiconductor substrate 370. And the second photoelectric conversion unit 321 are laminated and formed. Further, above the semiconductor substrate 370 (specifically, above the second imaging element 320), a first photoelectric conversion unit 311 which is a first type photoelectric conversion unit is arranged. Here, the first photoelectric conversion unit 311 includes a first electrode 311, a photoelectric conversion layer 315 made of an organic material, and a second electrode 316, and constitutes a first image pickup element 310 which is a first type image pickup element. .. In the second photoelectric conversion unit 321 and the third photoelectric conversion unit 331, for example, blue and red light are photoelectrically converted due to the difference in absorption coefficient, respectively. Further, in the first photoelectric conversion unit 311 for example, green light is photoelectrically converted.

The electric charges generated by the photoelectric conversion in the second photoelectric conversion unit 321 and the third photoelectric conversion unit 331 are temporarily stored in the second photoelectric conversion unit 321 and the third photoelectric conversion unit 331, and then the vertical transistors (respectively). It is transferred to the second floating diffusion layer (Floating Diffusion) FD ₂ and the third floating diffusion layer FD ₃ by a gate portion 322 (shown) and a transfer transistor (gate portion 332 is shown), and further, an external readout circuit (FIG. (Not shown) is output. These transistors and the floating diffusion layers FD ₂ and FD ₃ are also formed on the semiconductor substrate 370.

The electric charge generated by the photoelectric conversion in the first photoelectric conversion unit 311 is accumulated in the first floating diffusion layer FD ₁ formed on the semiconductor substrate 370 via the contact hole portion 361 and the wiring layer 362. Further, the first photoelectric conversion unit 311 is also connected to the gate portion 318 of the amplification transistor that converts the amount of electric charge into a voltage via the contact hole portion 361 and the wiring layer 362. The first floating diffusion layer FD ₁ constitutes a part of the reset transistor (gate portion 317 is shown). Reference number 371 is an element separation region, reference number 372 is an oxide film formed on the surface of the semiconductor substrate 370, reference numbers 376 and 381 are interlayer insulating layers, and reference number 383 is a protective layer. , Reference number 390 is an on-chip microlens.

JP 2011-138927

By the way, the electric charges generated by the photoelectric conversion in the second photoelectric conversion unit 321 and the third photoelectric conversion unit 331 are once accumulated in the second photoelectric conversion unit 321 and the third photoelectric conversion unit 331, and then the second floating diffusion layer FD. It is transferred to the _2nd and 3rd floating diffusion layer FD ₃ . Therefore, the second photoelectric conversion unit 321 and the third photoelectric conversion unit 331 can be completely depleted. However, the electric charge generated by the photoelectric conversion in the first photoelectric conversion unit 311 is directly accumulated in the first floating diffusion layer FD ₁ . Therefore, it is difficult to completely deplete the first photoelectric conversion unit 311. As a result of the above, the kTC noise becomes large, the random noise deteriorates, and the image quality is deteriorated.

Therefore, an object of the present disclosure is an image sensor in which a photoelectric conversion unit is arranged on or above a semiconductor substrate, and is composed of an image sensor having a structure and a structure capable of suppressing deterioration of image quality, and such an image sensor. It is an object of the present invention to provide a stacked image pickup device, a solid-state image pickup device including such an image pickup element or a stack-type image pickup element, and a method for driving the solid-state image pickup device.

The image pickup device of the present disclosure for achieving the above object is
It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode arranged apart from the first electrode and facing the photoelectric conversion layer via an insulating layer.

The stacked image sensor of the present disclosure for achieving the above object has at least one image sensor of the present disclosure.

The solid-state image sensor according to the first aspect of the present disclosure for achieving the above object includes a plurality of image pickup elements of the present disclosure. In addition, the solid-state image pickup device according to the second aspect of the present disclosure for achieving the above object includes a plurality of stacked image pickup devices of the present disclosure.

The method of driving the solid-state image sensor of the present disclosure for achieving the above object is described.
It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode that is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer.
This is a method of driving a solid-state image pickup device provided with a plurality of image pickup elements having a structure in which light is incident from the second electrode side and light is not incident on the first electrode.
In all the image sensors, while accumulating charges in the photoelectric conversion layer all at once, the charges in the first electrode are discharged to the outside of the system, and then.
In all the image pickup devices, the electric charge accumulated in the photoelectric conversion layer is transferred to the first electrode all at once, and after the transfer is completed, the electric charge transferred to the first electrode in each image sensor is sequentially read out.
Repeat each process.

The image sensor of the present disclosure, the image sensor of the present disclosure constituting the stacked image sensor of the present disclosure, and the image sensor of the present disclosure constituting the solid-state image sensor according to the first to second aspects of the present disclosure (these). The image sensor (hereinafter, may be collectively referred to as "the image sensor and the like of the present disclosure") is arranged apart from the first electrode and faces the photoelectric conversion layer via an insulating layer. Since the charge storage electrode is provided, the charge can be stored in the photoelectric conversion layer when the photoelectric conversion unit is irradiated with light and the photoelectric conversion unit performs photoelectric conversion. Therefore, at the start of exposure, the charge storage portion is completely depleted and the charge can be erased. As a result, it is possible to suppress the occurrence of a phenomenon in which the kTC noise becomes large, the random noise deteriorates, and the image quality is deteriorated. In the driving method of the solid-state image pickup device of the present disclosure, each image pickup element has a structure in which the light incident from the second electrode side does not enter the first electrode, and all the image pickup elements are simultaneously photoelectric. Since the electric charge in the first electrode is discharged to the outside of the system while accumulating the electric charge in the conversion layer, it is possible to reliably reset the first electrode at the same time in all the image pickup devices. Then, after that, the electric charges accumulated in the photoelectric conversion layer are simultaneously transferred to the first electrode in all the image pickup elements, and after the transfer is completed, the electric charges transferred to the first electrode in each image pickup element are sequentially read out. Therefore, the so-called global shutter function can be easily realized. The effects described in the present specification are merely examples and are not limited, and may have additional effects.

FIG. 1 is a schematic partial cross-sectional view of the image sensor and the stacked image sensor of the first embodiment. FIG. 2 is an equivalent circuit diagram of the image sensor and the stacked image sensor of the first embodiment. FIG. 3 is an equivalent circuit diagram of the image sensor and the stacked image sensor of the first embodiment. FIG. 4 is a schematic layout diagram of the first electrode constituting the image pickup device of the first embodiment, the charge storage electrode, and the transistor constituting the control unit. FIG. 5 is a diagram schematically showing a state of electric potential at each portion during operation of the image pickup device of Example 1. FIG. 6 is a schematic layout diagram of the first electrode and the charge storage electrode constituting the image pickup device of the first embodiment. FIG. 7 is a schematic perspective perspective view of the first electrode, the charge storage electrode, the second electrode, and the contact hole portion constituting the image pickup device of the first embodiment. FIG. 8 is a conceptual diagram of the solid-state image sensor of the first embodiment. FIG. 9 is an equivalent circuit diagram of a modified example of the image sensor and the stacked image sensor of the first embodiment. FIG. 10 is a schematic layout diagram of a first electrode, a charge storage electrode, and a transistor constituting a control unit, which constitute a modification of the image pickup device of the first embodiment shown in FIG. FIG. 11 is a schematic partial cross-sectional view of the image pickup device and the stacked image pickup device of the second embodiment. FIG. 12 is a schematic partial cross-sectional view of the image pickup device and the stacked image pickup device of the third embodiment. FIG. 13 is a schematic partial cross-sectional view of a modified example of the image pickup device and the stacked image pickup device of the third embodiment. FIG. 14 is a schematic partial cross-sectional view of another modified example of the image sensor of the third embodiment. FIG. 15 is a schematic partial cross-sectional view of still another modification of the image sensor of Example 3. FIG. 16 is a schematic partial cross-sectional view of a part of the image pickup device and the stacked image pickup device of the fourth embodiment. FIG. 17 is an equivalent circuit diagram of the image sensor and the stacked image sensor of the fourth embodiment. FIG. 18 is an equivalent circuit diagram of the image sensor and the stacked image sensor of the fourth embodiment. FIG. 19 is a schematic layout diagram of the first electrode constituting the image pickup device of the fourth embodiment, the transfer control electrode, the charge storage electrode, and the transistor constituting the control unit. FIG. 20 is a diagram schematically showing a state of electric potential at each portion during operation of the image pickup device of Example 4. FIG. 21 is a diagram schematically showing a state of electric potential at each portion during another operation of the image pickup device of the fourth embodiment. FIG. 22 is a schematic layout diagram of the first electrode, the transfer control electrode, and the charge storage electrode constituting the image pickup device of the fourth embodiment. FIG. 23 is a schematic perspective perspective view of the first electrode, the transfer control electrode, the charge storage electrode, the second electrode, and the contact hole portion constituting the image pickup device of the fourth embodiment. FIG. 24 is a schematic layout diagram of a first electrode, a transfer control electrode, a charge storage electrode, and a transistor constituting a control unit, which constitute a modification of the image pickup device of the fourth embodiment. FIG. 25 is a schematic partial cross-sectional view of a part of the image pickup device and the stacked image pickup device of the fifth embodiment. FIG. 26 is a schematic layout diagram of the first electrode, the charge storage electrode, and the charge discharge electrode constituting the image pickup device of the fifth embodiment. FIG. 27 is a schematic perspective perspective view of the first electrode, the charge storage electrode, the charge discharge electrode, the second electrode, and the contact hole portion constituting the image pickup device of the fifth embodiment. FIG. 28 is a schematic partial cross-sectional view of a part of the image pickup device and the stacked image pickup device of the sixth embodiment. FIG. 29 is an equivalent circuit diagram of the image sensor and the stacked image sensor of the sixth embodiment. FIG. 30 is an equivalent circuit diagram of the image sensor and the stacked image sensor of the sixth embodiment. FIG. 31 is a schematic layout diagram of the first electrode constituting the image pickup device of the sixth embodiment, the charge storage electrode, and the transistor constituting the control unit. FIG. 32 is a diagram schematically showing a state of potential at each portion during operation of the image pickup device of Example 6. FIG. 33 is a diagram schematically showing the state of the potential at each portion of the image pickup device of the sixth embodiment during another operation (during transfer). FIG. 34 is a schematic layout diagram of the first electrode and the charge storage electrode constituting the image pickup device of the sixth embodiment. FIG. 35 is a schematic perspective perspective view of the first electrode, the charge storage electrode, the second electrode, and the contact hole portion constituting the image pickup device of the sixth embodiment. FIG. 36 is a schematic layout diagram of the first electrode and the charge storage electrode constituting the modified example of the image pickup device of the sixth embodiment. FIG. 37 is a schematic partial cross-sectional view of another modification of the image pickup device and the stacked image pickup device of the first embodiment. FIG. 38 is a schematic partial cross-sectional view of still another modified example of the image pickup device and the stacked image pickup device of the first embodiment. 39A, 39B, and 39C are enlarged schematic partial cross-sectional views of the image pickup device of the first embodiment, the first electrode portion of still another modification of the stacked image pickup device, and the like. FIG. 40 is an enlarged schematic partial cross-sectional view of the image pickup device of Example 5, the charge discharge electrode portion of another modification of the stacked image pickup device, and the like. FIG. 41 is a schematic partial cross-sectional view of still another modified example of the image pickup device and the stacked image pickup device of the first embodiment. FIG. 42 is a schematic partial cross-sectional view of still another modified example of the image pickup device and the stacked image pickup device of the first embodiment. FIG. 43 is a schematic partial cross-sectional view of still another modified example of the image pickup device and the stacked image pickup device of the first embodiment. FIG. 44 is a schematic partial cross-sectional view of another modification of the image pickup device and the stacked image pickup device of the fourth embodiment. FIG. 45 is a schematic partial cross-sectional view of still another modified example of the image pickup device and the stacked image pickup device of the first embodiment. FIG. 46 is a schematic partial cross-sectional view of still another modified example of the image pickup device and the stacked image pickup device of the first embodiment. FIG. 47 is a schematic partial cross-sectional view of still another modified example of the image pickup device and the stacked image pickup device of the fourth embodiment. FIG. 48 is a conceptual diagram of an example of a solid-state image sensor composed of the image sensor and the stacked image sensor of the present disclosure using an electronic device (camera). FIG. 49 is a conceptual diagram of a conventional stacked image sensor (stacked solid-state image sensor).

Hereinafter, the present disclosure will be described based on examples with reference to the drawings, but the present disclosure is not limited to the examples, and various numerical values and materials in the examples are examples. The description will be given in the following order.
1. 1. Description of the image pickup device of the present disclosure, the stacked image pickup device of the present disclosure, the solid-state image pickup device according to the first to second aspects of the present disclosure, and the driving method of the solid-state image pickup device in general. Example 1 (the image pickup device of the present disclosure, the stacked image sensor of the present disclosure, and the solid-state image pickup device according to the second aspect of the present disclosure).
3. 3. Example 2 (Modification of Example 1)
4. Example 3 (Modifications of Examples 1 and 2)
5. Example 4 (Imaging element provided with electrodes for controlling transfer and deformation of Examples 1 to 3)
6. Example 5 (deformation of Examples 1 to 4 and an image sensor provided with a charge discharge electrode)
7. Example 6 (Modifications of Examples 1 to 5, an image sensor provided with a plurality of charge storage electrode segments)
8. Other

<Explanation of the image pickup device of the present disclosure, the stacked image pickup device of the present disclosure, the solid-state image pickup device according to the first to second aspects of the present disclosure, and the driving method of the solid-state image pickup device in general>
In the image sensor and the like of the present disclosure,
It also has a semiconductor substrate,
The photoelectric conversion unit may be arranged above the semiconductor substrate. The first electrode, the charge storage electrode, and the second electrode are connected to a drive circuit described later.

The second electrode located on the light incident side may be shared by a plurality of image pickup devices. That is, the second electrode can be a so-called solid electrode. The photoelectric conversion layer may be shared by a plurality of image pickup elements, that is, one photoelectric conversion layer may be formed in the plurality of image pickup elements, or may be provided for each image pickup element. Good.

Further, in the image pickup device and the like of the present disclosure including various preferable forms and configurations described above, the first electrode extends in the opening provided in the insulating layer and is connected to the photoelectric conversion layer. Can be. Alternatively, the photoelectric conversion layer may extend in the opening provided in the insulating layer and be connected to the first electrode, in this case.
The edge of the top surface of the first electrode is covered with an insulating layer.
The first electrode is exposed on the bottom surface of the opening.
When the surface of the insulating layer in contact with the top surface of the first electrode is the first surface and the surface of the insulating layer in contact with the portion of the photoelectric conversion layer facing the charge storage electrode is the second surface, the side surface of the opening is the first surface. It can be in a form having an inclination extending from the first surface to the second surface, and further, the side surface of the opening having an inclination extending from the first surface to the second surface is located on the charge storage electrode side. It can be in the form of In addition, a form in which another layer is formed between the photoelectric conversion layer and the first electrode (for example, a form in which a material layer suitable for charge accumulation is formed between the photoelectric conversion layer and the first electrode). Including.

Furthermore, in the image sensor and the like of the present disclosure including various preferable forms and configurations described above,
It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode and the charge storage electrode are connected to the drive circuit.
In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode, the potential V ₁₂ is applied to the charge storage electrode, charges are accumulated in the photoelectric conversion layer,
During the charge transfer period, the potential V ₂₁ is applied to the first electrode from the drive circuit, the potential V ₂₂ is applied to the charge storage electrode, and the charge accumulated in the photoelectric conversion layer is transferred to the control unit via the first electrode. It can be configured to be read out. However, when the potential of the first electrode is higher than the potential of the second electrode,
V ₁₂ ≥ V ₁₁ and V ₂₂ <V ₂₁
When the potential of the first electrode is lower than the potential of the second electrode,
V ₁₂ ≤ V ₁₁ and V ₂₂ > V ₂₁
Is.

Further, in the image pickup device and the like of the present disclosure including the various preferable forms and configurations described above, the first electrode and the charge storage electrode are separated from each other between the first electrode and the charge storage electrode. It is possible to form a form in which a transfer control electrode (charge transfer electrode) is further provided, which is arranged so as to face the photoelectric conversion layer via an insulating layer. The image sensor and the like of the present disclosure having such a form are referred to as "the image sensor and the like of the present disclosure provided with transfer control electrodes" for convenience.

Further, in the image pickup device and the like of the present disclosure provided with the transfer control electrode,
It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode, the charge storage electrode, and the transfer control electrode are connected to the drive circuit.
During the charge storage period, the drive circuit applies the potential V ₁₁ to the first electrode, the potential V ₁₂ to the charge storage electrode, the potential V ₁₃ to the transfer control electrode, and charges to the photoelectric conversion layer. Accumulated,
In the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode, the potential V ₂₂ is applied to the charge storage electrode, the potential V ₂₃ is applied to the transfer control electrodes are accumulated in the photoelectric conversion layer The charge can be read out to the control unit via the first electrode. However, when the potential of the first electrode is higher than the potential of the second electrode,
V ₁₂ > V ₁₃ and V ₂₂ ≤ V ₂₃ ≤ V ₂₁
When the potential of the first electrode is lower than the potential of the second electrode,
V ₁₂ <V ₁₃ and V ₂₂ ≧ V ₂₃ ≧ V ₂₁
Is.

Further, in the image pickup device and the like of the present disclosure including the various preferable forms and configurations described above, the charge discharge is connected to the photoelectric conversion layer and is arranged apart from the first electrode and the charge storage electrode. The form may be further provided with electrodes. The image sensor and the like of the present disclosure having such a form are referred to as "the image sensor and the like of the present disclosure provided with a charge discharge electrode" for convenience. Then, in the image pickup device and the like of the present disclosure provided with the charge discharge electrode, the charge discharge electrode may be arranged so as to surround the first electrode and the charge storage electrode (that is, in a frame shape). .. The charge discharge electrode can be shared (common) in a plurality of image pickup devices. And in this case
The photoelectric conversion layer extends in the second opening provided in the insulating layer and is connected to the charge discharge electrode.
The edge of the top surface of the charge discharge electrode is covered with an insulating layer.
The charge discharge electrode is exposed on the bottom surface of the second opening.
When the surface of the insulating layer in contact with the top surface of the charge discharge electrode is the third surface and the surface of the insulating layer in contact with the portion of the photoelectric conversion layer facing the charge storage electrode is the second surface, the side surface of the second opening is , The form may have an inclination extending from the third surface to the second surface.

Furthermore, in the image pickup device and the like of the present disclosure provided with the charge discharge electrode,
It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode, the charge storage electrode, and the charge discharge electrode are connected to the drive circuit.
In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode, the potential V ₁₂ is applied to the charge storage electrode, the potential V ₁₄ is applied to the charge discharging electrodes, electric charges accumulated in the photoelectric conversion layer Being done
In the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode, the potential V ₂₂ is applied to the charge storage electrode, the potential V ₂₄ is applied to the charge discharging electrode, which is accumulated in the photoelectric conversion layer The electric charge can be read out to the control unit via the first electrode. However, when the potential of the first electrode is higher than the potential of the second electrode,
V ₁₄ > V ₁₁ and V ₂₄ <V ₂₁
When the potential of the first electrode is lower than the potential of the second electrode,
V ₁₄ <V ₁₁ and V ₂₄ > V ₂₁
Is.

Further, in the various preferable forms and configurations described above in the image pickup device and the like of the present disclosure, the charge storage electrode may be in a form composed of a plurality of charge storage electrode segments. The image pickup device and the like of the present disclosure having such a form are referred to as "the image pickup device and the like of the present disclosure provided with a plurality of charge storage electrode segments" for convenience. The number of charge storage electrode segments may be 2 or more. Then, in the image sensor or the like of the present disclosure provided with a plurality of charge storage electrode segments,
When the potential of the first electrode is higher than the potential of the second electrode, the potential applied to the charge storage electrode segment located closest to the first electrode during the charge transfer period is the farthest from the first electrode. Higher than the potential applied to the charge storage electrode segment located at
When the potential of the first electrode is lower than the potential of the second electrode, the potential applied to the charge storage electrode segment located closest to the first electrode during the charge transfer period is the farthest from the first electrode. The form can be lower than the potential applied to the charge storage electrode segment located in.

In the image pickup device and the like of the present disclosure including various preferable forms and configurations described above,
The semiconductor substrate is provided with at least a floating diffusion layer and an amplification transistor constituting a control unit.
The first electrode can be configured to be connected to the floating diffusion layer and the gate portion of the amplification transistor, and in this case, further
The semiconductor substrate is further provided with a reset transistor and a selection transistor that form a control unit.
The stray diffusion layer is connected to one source / drain region of the reset transistor and
One source / drain region of the amplification transistor may be connected to one source / drain region of the selection transistor, and the other source / drain region of the selection transistor may be connected to the signal line.

Further, in the image pickup device and the like of the present disclosure including various preferable forms and configurations described above, the size of the charge storage electrode can be made larger than that of the first electrode. The area of the charge storage electrode S ₁ ', when the area of the first electrode and S _1, but are not limited to,
4 ≤ S ₁ '/ S ₁
It is preferable to satisfy.

Furthermore, in the image pickup device and the like of the present disclosure including the various preferable forms and configurations described above, light is incident from the second electrode side, and a light shielding layer is formed on the light incident side from the second electrode. It can be in the form. Alternatively, the light may be incident from the second electrode side, and the light may not be incident on the first electrode (in some cases, the first electrode and the transfer control electrode). In this case, the light is incident from the second electrode. A light-shielding layer may be formed above the first electrode (in some cases, the first electrode and the transfer control electrode) on the light incident side of the above.
An on-chip micro lens is provided above the charge storage electrode and the second electrode.
The light incident on the on-chip microlens can be focused on the charge storage electrode. Here, the light-shielding layer may be disposed above the surface of the second electrode on the light incident side, or may be disposed on the surface of the second electrode on the light incident side. In some cases, a light-shielding layer may be formed on the second electrode. Examples of the material constituting the light-shielding layer include chromium (Cr), copper (Cu), aluminum (Al), tungsten (W), and a light-impermeable resin (for example, a polyimide resin).

Specifically, the image pickup element of the present disclosure is sensitive to blue color having a photoelectric conversion layer (referred to as "first type blue photoelectric conversion layer" for convenience) that absorbs blue light (light of 425 nm to 495 nm). (For convenience, it is referred to as "first type blue imaging element"), and a photoelectric conversion layer that absorbs green light (light of 495 nm to 570 nm) (for convenience, "first type green photoelectric conversion layer"). An image pickup element having a sensitivity to green (referred to as "first type green image pickup element" for convenience) and a photoelectric conversion layer (for convenience, referred to as "light of 620 nm to 750 nm") that absorbs red light. An imaging element having sensitivity to red (referred to as a "first type red photoelectric conversion layer") (referred to as a "first type red imaging element" for convenience) can be mentioned. Further, a conventional image sensor that does not have a charge storage electrode and has sensitivity to blue is referred to as a "second type image sensor for blue" for convenience, and an image sensor having sensitivity to green is referred to. For the sake of convenience, the image sensor having a sensitivity to red is referred to as a "second type image sensor for red" for convenience, and is referred to as a "second type image sensor for red" to form a second type image sensor for blue. For convenience, the photoelectric conversion layer is referred to as a "second type blue photoelectric conversion layer", and the photoelectric conversion layer constituting the second type green image sensor is referred to as a "second type green photoelectric conversion layer" for convenience. The photoelectric conversion layer constituting the second type red image sensor is referred to as a "second type red photoelectric conversion layer" for convenience.

The stacked image sensor of the present disclosure has at least one image sensor (photoelectric conversion element) of the present disclosure, and specifically, for example,
[A] The first type blue photoelectric conversion unit, the first type green photoelectric conversion unit, and the first type red photoelectric conversion unit are vertically laminated.
Each of the control units of the first type blue image sensor, the first type green image sensor, and the first type red image sensor is provided on the semiconductor substrate in a configuration and structure [B] first type blue. The photoelectric conversion unit for green and the photoelectric conversion unit for green of the first type are laminated in the vertical direction.
A second type red photoelectric conversion unit is arranged below the first type photoelectric conversion unit of these two layers.
Each of the control units of the first type blue image sensor, the first type green image sensor, and the second type red image sensor is provided on the semiconductor substrate in the configuration and structure [C] first type green. A second type photoelectric conversion unit for blue and a second type photoelectric conversion unit for red are arranged below the photoelectric conversion unit for red.
Each of the control units of the first type green image sensor, the second type blue image sensor, and the second type red image sensor is provided on the semiconductor substrate in a configuration and structure [D] first type blue. A second type of green photoelectric conversion unit and a second type of red photoelectric conversion unit are arranged below the photoelectric conversion unit for red.
The configuration and structure of each of the control units of the first type blue image sensor, the second type green image sensor, and the second type red image sensor are provided on the semiconductor substrate. The order of arrangement of the photoelectric conversion units of these imaging elements in the vertical direction is from the light incident direction to the blue photoelectric conversion unit, the green photoelectric conversion unit, the red photoelectric conversion unit, or from the light incident direction to green. The order is preferably the photoelectric conversion unit, the blue photoelectric conversion unit, and the red photoelectric conversion unit. This is because light having a shorter wavelength is more efficiently absorbed on the incident surface side. Since red has the longest wavelength among the three colors, it is preferable to position the red photoelectric conversion unit at the bottom layer when viewed from the light incident surface. One pixel is formed by the laminated structure of these image pickup elements. Further, it may be provided with a first type photoelectric conversion unit for infrared rays. Here, the photoelectric conversion layer of the first type infrared photoelectric conversion unit is composed of, for example, an organic material, and is the lowest layer of the laminated structure of the first type image sensor, and is more than the second type image sensor. Is also preferably placed on top. Alternatively, a second type infrared photoelectric conversion unit may be provided below the first type photoelectric conversion unit.

In the first type image sensor, for example, the first electrode is formed on an interlayer insulating layer provided on a semiconductor substrate. The image pickup device formed on the semiconductor substrate may be a back-illuminated type or a front-illuminated type.

When the photoelectric conversion layer is composed of an organic material, the photoelectric conversion layer is
(1) It is composed of a p-type organic semiconductor.
(2) It is composed of an n-type organic semiconductor.
(3) It is composed of a laminated structure of a p-type organic semiconductor layer / n-type organic semiconductor layer. It is composed of a p-type organic semiconductor layer / a mixed layer of a p-type organic semiconductor and an n-type organic semiconductor (bulk heterostructure) / a laminated structure of an n-type organic semiconductor layer. It is composed of a laminated structure of a p-type organic semiconductor layer / a mixed layer (bulk heterostructure) of a p-type organic semiconductor and an n-type organic semiconductor. It is composed of an n-type organic semiconductor layer / a laminated structure of a mixed layer (bulk heterostructure) of a p-type organic semiconductor and an n-type organic semiconductor.
(4) It is composed of a mixture of a p-type organic semiconductor and an n-type organic semiconductor (bulk heterostructure).
It can be any of the four aspects. However, the stacking order can be arbitrarily changed.

As p-type organic semiconductors, naphthalene derivatives, anthracene derivatives, phenanthrene derivatives, pyrene derivatives, perylene derivatives, tetracene derivatives, pentacene derivatives, quinacridone derivatives, thiophene derivatives, thienothiophene derivatives, benzothiophene derivatives, benzothienobenzothiophene derivatives, triarylamine derivatives , Carbazole derivative, Perylene derivative, Picene derivative, Chrycene derivative, Fluolanthene derivative, Phthalocyanin derivative, Subphthalocyanine derivative, Subporphyrazine derivative, Metal complex with heterocyclic compound as ligand, Polythiophene derivative, Polybenzothiasizole derivative, Polyfluorene Derivatives and the like can be mentioned. Examples of the n-type organic semiconductor include fullerenes and fullerene derivatives (for example, fullerenes (higher-order fullerenes) such as C60, C70 and C74, encapsulated fullerenes, etc.) or fullerenes derivatives (eg, fullerenes fluoride, PCBM fullerene compounds, fullerene multimers, etc.). )>, Organic semiconductors having a larger HOMO and LUMO (deeper) than p-type organic semiconductors, and transparent inorganic metal oxides can be mentioned. Specific examples of the n-type organic semiconductor include heterocyclic compounds containing nitrogen atoms, oxygen atoms, and sulfur atoms, such as pyridine derivatives, pyrazine derivatives, pyrimidine derivatives, triazine derivatives, quinoline derivatives, quinoxalin derivatives, isoquinoline derivatives, and acrydin. Derivatives, phenazine derivatives, phenanthroline derivatives, tetrazole derivatives, pyrazole derivatives, imidazole derivatives, thiazole derivatives, oxazole derivatives, imidazole derivatives, benzimidazole derivatives, benzotriazole derivatives, benzoxazole derivatives, benzoxazole derivatives, carbazole derivatives, benzofuran derivatives, dibenzofuran derivatives , Subporphyrazine derivative, polyphenylene vinylene derivative, polybenzothianidazole derivative, polyfluorene derivative and the like as a part of the molecular skeleton, organic molecule, organic metal complex and subphthalocyanine derivative can be mentioned. Examples of the group contained in the fullerene derivative include a halogen atom; a linear, branched or cyclic alkyl group or phenyl group; a group having a linear or condensed aromatic compound; a group having a halide; a partial fluoroalkyl group; Fluoroalkyl group; silylalkyl group; silylalkoxy group; arylsilyl group;arylsulfanyl group; alkylsulfanyl group; arylsulfonyl group;alkylsulfonyl group;arylsulfide group; alkylsulfide group;amino group; alkylamino group;arylamino group Hydroxy group; alkoxy group; acylamino group; acyloxy group; carbonyl group; carboxy group; carboxoamide group; carboalkoxy group; acyl group; sulfonyl group; cyano group; nitro group; chalcogenized group; phosphine group; phosphon Groups; These derivatives can be mentioned. The thickness of the photoelectric conversion layer (sometimes referred to as "organic photoelectric conversion layer") composed of an organic material is not limited, but is, for example, 1 × 10 ^-8 m to 5 × 10 ^-7 m. , Preferably 2.5 × 10 ^-8 m to 3 × 10 ^-7 m, more preferably 2.5 × 10 ^-8 m to 2 × 10 ^-7 m, and even more preferably 1 × 10 ^-7 m to 1. 8 × 10 ^-7 m can be exemplified. Organic semiconductors are often classified into p-type and n-type, but p-type means that holes are easily transported, and n-type means that electrons are easily transported, and they are inorganic. It is not limited to the interpretation that it has holes or electrons as a majority carrier of thermal excitation like a semiconductor.

Alternatively, as a material constituting the organic photoelectric conversion layer that photoelectrically converts light having a green wavelength, for example, a rhodamine dye, a melanicin dye, a quinacridone derivative, a subphthalocyanine dye (subphthalocyanine derivative) and the like can be mentioned. Examples of the material constituting the organic photoelectric conversion layer for photoelectric conversion of blue light include coumarin acid dye, tris-8-hydroxyquinolialuminum (Alq3), melocyanine dye, and the like, and red. Examples of the material constituting the organic photoelectric conversion layer that photoelectrically converts light include a phthalocyanine dye and a subphthalocyanine dye (subphthalocyanine derivative).

Alternatively, as the inorganic material constituting the photoelectric conversion layer, crystalline silicon, amorphous silicon, microcrystalline silicon, crystalline selenium, amorphous selenium, and calcopalite compounds CIGS (CuInGaSe), CIS (CuInSe ₂ ), CuInS ₂ , CuAlS ₂ , CuAlSe ₂ , CuGaS ₂ , CuGaSe ₂ , AgAlS ₂ , AgAlSe ₂ , AgInS ₂ , AgInSe ₂ , or also group III-V compounds GaAs, InP, AlGaAs, InGaP, AlGaInP, InGaAsP, and more. Examples thereof include compound semiconductors such as CdSe, CdS, In ₂ Se ₃ , In ₂ S ₃ , Bi ₂ Se ₃ , Bi ₂ S ₃ , ZnSe, ZnS, PbSe, and PbS. In addition, quantum dots made of these materials can also be used in the photoelectric conversion layer.

Alternatively, the photoelectric conversion layer can have a laminated structure of a lower semiconductor layer and an upper photoelectric conversion layer. By providing the lower semiconductor layer in this way, recombination during charge accumulation can be prevented, the transfer efficiency of the charge accumulated in the photoelectric conversion layer to the first electrode can be increased, and the dark current can be increased. The generation can be suppressed. The material constituting the upper photoelectric conversion layer may be appropriately selected from the various materials constituting the above-mentioned photoelectric conversion layer. On the other hand, as a material constituting the lower semiconductor layer, a material having a large bandgap energy value (for example, a bandgap energy value of 3.0 eV or more) and having a higher mobility than the material constituting the photoelectric conversion layer. Is preferably used. Specific examples thereof include oxide semiconductor materials such as IGZO; transition metal dichalcogenides; silicon carbide; diamonds; graphene; carbon nanotubes; organic semiconductor materials such as condensed polycyclic hydrocarbon compounds and condensed heterocyclic compounds. Alternatively, as a material constituting the lower semiconductor layer, when the charge to be accumulated is a hole, a material having an ionization potential smaller than the ionization potential of the material constituting the photoelectric conversion layer can be mentioned and accumulated. When the power charge is an electron, a material having an electron affinity larger than the electron affinity of the material constituting the photoelectric conversion layer can be mentioned. Alternatively, the impurity concentration in the material constituting the lower semiconductor layer is preferably 1 × 10 ¹⁸ cm ^-3 or less. The lower semiconductor layer may have a single-layer structure or a multi-layer structure. Further, the material forming the lower semiconductor layer located above the charge storage electrode and the material forming the lower semiconductor layer located above the first electrode may be different from each other.

A single-plate color solid-state image sensor can be configured by the solid-state image sensor according to the first to second aspects of the present disclosure.

The solid-state image sensor according to the second aspect of the present disclosure provided with a stacked image sensor is different from the solid-state image sensor provided with a bayer-arranged image sensor (that is, blue, green, and red using a color filter). In the incident direction of light in the same pixel, image sensors having sensitivity to light of multiple kinds of wavelengths are laminated to form one pixel, so that the sensitivity is improved and the unit is It is possible to improve the pixel density per volume. Further, since the organic material has a high absorption coefficient, the film thickness of the organic photoelectric conversion layer can be made thinner than that of the conventional Si photoelectric conversion layer, and the light leakage from the adjacent pixels and the incident angle of light can be reduced. The restrictions are relaxed. Further, in the conventional Si-based image sensor, false colors are generated because the color signal is created by performing interpolation processing between the pixels of three colors, but the second aspect of the present disclosure including the stacked image sensor is provided. In the solid-state image sensor, the generation of false color is suppressed. Since the organic photoelectric conversion layer itself also functions as a color filter, color separation is possible without disposing a color filter.

On the other hand, in the solid-state image sensor according to the first aspect of the present disclosure, by using a color filter, the requirements for the spectral characteristics of blue, green, and red can be alleviated, and high mass productivity can be achieved. Has. As the arrangement of the imaging elements in the solid-state imaging device according to the first aspect of the present disclosure, in addition to the bayer arrangement, the interline arrangement, the G stripe RB checkered arrangement, the G stripe RB complete checkered arrangement, the checkered complementary color arrangement, the stripe arrangement, and the diagonal stripe Examples thereof include an array, a primary color difference array, a field color difference sequential array, a frame color difference sequential array, a MOS type array, an improved MOS type array, a frame interleaved array, and a field interleaved array. Here, one pixel (or sub-pixel) is configured by one image sensor.

The pixel region in which a plurality of the image pickup devices of the present disclosure or the stacked image pickup devices of the present disclosure are arranged is composed of pixels that are regularly arranged in a two-dimensional array. The pixel area is usually an effective pixel area that actually receives light, amplifies the signal charge generated by photoelectric conversion, and reads it out to a drive circuit, and a black reference pixel for outputting optical black that serves as a reference for the black level. It is composed of areas. The black reference pixel region is usually arranged on the outer peripheral portion of the effective pixel region.

In the image pickup device and the like of the present disclosure including various preferable forms and configurations described above, light is irradiated, photoelectric conversion occurs in the photoelectric conversion layer, and holes and electrons are carrier-separated. The electrode from which holes are taken out is used as an anode, and the electrode from which electrons are taken out is used as a cathode. In some forms, the first electrode constitutes the anode and the second electrode forms the cathode, and conversely, in the form, the first electrode forms the cathode and the second electrode forms the anode.

When the stacked image sensor is configured, the first electrode, the charge storage electrode, the transfer control electrode, the charge discharge electrode, and the second electrode can be made of a transparent conductive material. The first electrode, the charge storage electrode, the transfer control electrode, and the charge discharge electrode may be collectively referred to as the "first electrode or the like". Alternatively, when the imaging elements and the like of the present disclosure are arranged in a plane as in a bayer arrangement, the second electrode may be made of a transparent conductive material and the first electrode may be made of a metal material. In this case, specifically, the second electrode located on the light incident side is made of a transparent conductive material, and the first electrode and the like are, for example, Al-Nd (alloy of aluminum and neodium) or ASC (aluminum, sumalium and It can be composed of an alloy of copper). An electrode made of a transparent conductive material may be referred to as a "transparent electrode". Here, it is desirable that the bandgap energy of the transparent conductive material is 2.5 eV or more, preferably 3.1 eV or more. Examples of the transparent conductive material constituting the transparent electrode include conductive metal oxides. Specifically, indium oxide and indium-tin oxide (ITO, Indium Tin Oxide, Sn-doped In ₂ O _{3) can be mentioned.} (Including crystalline ITO and amorphous ITO), indium-zinc oxide (IZO, Indium Zinc Oxide) in which indium is added as a dopant to zinc oxide, indium-gallium oxide (IGO) in which indium is added as a dopant to gallium oxide. , Indium-gallium-zinc oxide (IGZO, In-GaZnO ₄ ) with indium and gallium added as dopants to zinc oxide, indium-tin-zinc oxide (ITZO) with indium and tin added as dopants to zinc oxide, IFO (F-doped In ₂ O ₃ ), tin oxide (SnO ₂ ), ATO (Sb-doped SnO ₂ ), FTO (F-doped SnO ₂ ), zinc oxide (including ZnO doped with other elements), oxidation Aluminum-zinc oxide (AZO) with aluminum added as a dopant to zinc, gallium-zinc oxide (GZO) with gallium added as a dopant to zinc oxide, titanium oxide (TIO ₂ ), and niobium added as a dopant to titanium oxide Niob-titanium oxide (TNO), antimony oxide, spinel-type oxide, and oxide having a YbFe ₂ O ₄ structure can be exemplified. Alternatively, a transparent electrode having gallium oxide, titanium oxide, niobium oxide, nickel oxide or the like as a base layer can be mentioned. Examples of the thickness of the transparent electrode include 2 × 10 ^-8 m to 2 × 10 ^-7 m, preferably 3 × 10 ^-8 m to 1 × 10 ^-7 m. When the first electrode is required to be transparent, it is preferable that the charge discharging electrode is also made of a transparent conductive material from the viewpoint of simplifying the manufacturing process.

Alternatively, when transparency is not required, from a conductive material having a high work function (for example, φ = 4.5 eV to 5.5 eV) as a conductive material constituting an anode having a function as an electrode for extracting holes. It is preferably configured, and specifically, gold (Au), silver (Ag), chromium (Cr), nickel (Ni), palladium (Pd), platinum (Pt), iron (Fe), and iridium (Ir). , Germanium (Ge), osmium (Os), renium (Re), tellurium (Te) can be exemplified. On the other hand, the conductive material constituting the cathode having a function as an electrode for extracting electrons is preferably composed of a conductive material having a low work function (for example, φ = 3.5 eV to 4.5 eV), specifically. , Alkali metals (eg Li, Na, K, etc.) and their fluorides or oxides, alkaline earth metals (eg Mg, Ca, etc.) and their fluorides or oxides, aluminum (Al), zinc (Zn), tin Examples thereof include rare earth metals such as (Sn), tarium (Tl), sodium-potassium alloy, aluminum-lithium alloy, magnesium-silver alloy, indium and itteribium, or alloys thereof. Alternatively, as materials constituting the anode and the cathode, platinum (Pt), gold (Au), palladium (Pd), chromium (Cr), nickel (Ni), aluminum (Al), silver (Ag), and tantalum (Ta). ), Tungsten (W), Copper (Cu), Titanium (Ti), Indium (In), Tin (Sn), Iron (Fe), Cobalt (Co), Molybdenum (Mo) and other metals, or these metals Alloys containing elements, conductive particles made of these metals, conductive particles of alloys containing these metals, polysilicon containing impurities, carbon-based materials, oxide semiconductors, carbon nanotubes, conductivity of graphene, etc. A sex material can be mentioned, and a laminated structure of layers containing these elements can also be used. Further, as a material constituting the anode and the cathode, an organic material (conductive polymer) such as poly (3,4-ethylenedioxythiophene) / polystyrene sulfonic acid [PEDOT / PSS] can be mentioned. Further, these conductive materials may be mixed with a binder (polymer) to form a paste or ink, which may be cured and used as an electrode.

As a film forming method for the first electrode and the like and the second electrode (anode or cathode), a dry method or a wet method can be used. Examples of the dry method include a physical vapor deposition method (PVD method) and a chemical vapor deposition method (CVD method). As a film forming method using the principle of PVD method, vacuum vapor deposition method using resistance heating or high frequency heating, EB (electron beam) deposition method, various sputtering methods (magnettron sputtering method, RF-DC coupled bias sputtering method, ECR) Sputtering method, opposed target sputtering method, high frequency sputtering method), ion plating method, laser ablation method, molecular beam epitaxy method, laser transfer method can be mentioned. Further, examples of the CVD method include a plasma CVD method, a thermal CVD method, an organic metal (MO) CVD method, and an optical CVD method. On the other hand, as wet methods, electroplating method, electroless plating method, spin coating method, inkjet method, spray coating method, stamp method, micro contact printing method, flexographic printing method, offset printing method, gravure printing method, dip method, etc. The method can be mentioned. Examples of the patterning method include chemical etching such as shadow mask, laser transfer, and photolithography, and physical etching by ultraviolet rays, laser, and the like. As a flattening technique for the first electrode and the like and the second electrode, a laser flattening method, a reflow method, a CMP (Chemical Mechanical Polishing) method, or the like can be used.

As the material constituting the insulating layer, a silicon oxide materials; silicon nitride (SiN _Y); as well inorganic insulating materials exemplified in the metal oxide high dielectric insulating material such as aluminum oxide (Al ₂ O _3), poly Methyl methacrylate (PMMA); Polyvinylphenol (PVP); Polypolyalcohol (PVA); Polyethylene; Polycarbonate (PC); Polyethylene terephthalate (PET); Polystyrene; N-2 (Aminoethyl) 3-Aminopropyltrimethoxysilane (AEAPTMS) , 3-Mercaptopropyltrimethoxysilane (MPTMS), octadecyltrichlorosilane (OTS) and other silanol derivatives (silane coupling agents); novolak-type phenolic resin; fluororesin; octadecanethiol, dodecylisosocyanate, etc. Examples thereof include organic insulating materials (organic polymers) exemplified by linear hydrocarbons having a functional group capable of binding to, and combinations thereof can also be used. As the silicon oxide-based material, silicon oxide (SiO _X ), BPSG, PSG, BSG, AsSG, PbSG, silicon oxide nitride (SiON), SOG (spin-on glass), low dielectric constant material (for example, polyaryl ether, cyclo). Perfluorocarbon polymer and benzocyclobutene, cyclic fluororesin, polytetrafluoroethylene, aryl ether fluoride, polyimide fluoride, amorphous carbon, organic SOG) can be exemplified. The materials constituting the various interlayer insulating layers and insulating films may be appropriately selected from these materials.

The configuration and structure of the floating diffusion layer, amplification transistor, reset transistor and selection transistor constituting the control unit can be the same as the configuration and structure of the conventional floating diffusion layer, amplification transistor, reset transistor and selection transistor. .. The drive circuit can also have a well-known configuration and structure.

The first electrode is connected to the floating diffusion layer and the gate portion of the amplification transistor, but a contact hole portion may be formed for connecting the first electrode to the floating diffusion layer and the gate portion of the amplification transistor. Materials constituting the contact hole include polysilicon doped with impurities, refractory metals such as tungsten, Ti, Pt, Pd, Cu, TiW, TiN, TiNW, WSi ₂ , and MoSi _2, and metal silicides thereof. A laminated structure of layers made of a material (eg, Ti / TiN / W) can be exemplified.

A first carrier blocking layer may be provided between the organic photoelectric conversion layer and the first electrode, or a second carrier blocking layer may be provided between the organic photoelectric conversion layer and the second electrode. Further, a first charge injection layer may be provided between the first carrier blocking layer and the first electrode, or a second charge injection layer may be provided between the second carrier blocking layer and the second electrode. .. For example, as a material constituting the electron injection layer, for example, alkali metals such as lithium (Li), sodium (Na) and potassium (K) and their fluorides and oxides, and alkaline soils such as magnesium (Mg) and calcium (Ca). Examples thereof include similar metals and their fluorides and oxides.

Examples of the method for forming various organic layers include a dry film forming method and a wet film forming method. As a dry film forming method, resistance heating, high frequency heating, vacuum vapor deposition method using electron beam heating, flash vapor deposition method, plasma vapor deposition method, EB vapor deposition method, various sputtering methods (bipolar sputtering method, DC sputtering method, DC magnetron sputtering) Method, high frequency sputtering method, magnetron sputtering method, RF-DC coupled bias sputtering method, ECR sputtering method, opposed target sputtering method, high frequency sputtering method, ion beam sputtering method), DC (Direct Current) method, RF method, multi-cathode Various ion plating methods such as methods, activation reaction methods, electrodeposition methods, high frequency ion plating methods and reactive ion plating methods, laser ablation methods, molecular beam epitaxy methods, laser transfer methods, molecular beam epitaxy methods (MBE). Law) can be mentioned. Further, examples of the CVD method include a plasma CVD method, a thermal CVD method, a MOCVD method, and an optical CVD method. On the other hand, as the wet method, specifically, spin coating method; immersion method; casting method; micro contact printing method; drop casting method; screen printing method, inkjet printing method, offset printing method, gravure printing method, flexo printing method, etc. Various printing methods; Stamp method; Spray method; Air doctor coater method, Blade coater method, Rod coater method, Knife coater method, Squeeze coater method, Reverse roll coater method, Transfer roll coater method, Gravure coater method, Kiss coater method, Cast coater Various coating methods such as a method, a spray coater method, a slit orifice coater method, and a calendar coater method can be exemplified. In the coating method, examples of the solvent include non-polar or low-polar organic solvents such as toluene, chloroform, hexane, and ethanol. Examples of the patterning method include chemical etching such as shadow mask, laser transfer, and photolithography, and physical etching by ultraviolet rays, laser, and the like. As a flattening technique for various organic layers, a laser flattening method, a reflow method, or the like can be used.

As described above, the image sensor or the solid-state image sensor may be provided with an on-chip microlens or a light-shielding layer, if necessary, and is provided with a drive circuit and wiring for driving the image sensor. .. If necessary, a shutter for controlling the incident of light on the image pickup device may be provided, or an optical cut filter may be provided depending on the purpose of the solid-state image pickup device.

For example, when a solid-state image pickup device is laminated with a read-out integrated circuit (ROIC), a drive substrate on which a read-out integrated circuit and a connection portion made of copper (Cu) are formed, and an image pickup device on which the connection portion is formed are formed. , The connecting portions can be overlapped so as to be in contact with each other, and the connecting portions can be joined to each other, or the connecting portions can be joined to each other by using a solder bump or the like.

The first embodiment relates to the image pickup device of the present disclosure, the stacked image pickup device of the present disclosure, and the solid-state image pickup device according to the second aspect of the present disclosure.

A schematic partial cross-sectional view of the image sensor and the stacked image sensor of the first embodiment is shown in FIG. 1, and an equivalent circuit diagram of the image sensor and the stacked image sensor of the first embodiment is shown in FIGS. 2 and 3. FIG. 4 shows a schematic layout diagram of the first electrode constituting the image sensor of Example 1, the charge storage electrode, and the transistor constituting the control unit, and shows the potential of each part during operation of the image sensor of Example 1. The state is schematically shown in FIG. Further, FIG. 6 shows a schematic layout diagram of the first electrode and the charge storage electrode constituting the image pickup device of the first embodiment, and the first electrode, the charge storage electrode, and the first electrode constituting the image pickup device of the first embodiment are shown in FIG. A schematic perspective perspective view of the two electrodes and the contact hole portion is shown in FIG. 7, and a conceptual diagram of the solid-state image sensor of Example 1 is shown in FIG.

The image pickup device of the first embodiment (for example, a green image pickup device described later) includes a photoelectric conversion section in which a first electrode 11, a photoelectric conversion layer 15 and a second electrode 16 are laminated, and the photoelectric conversion section includes a photoelectric conversion section. Further, the charge storage electrode 12 is provided which is arranged apart from the first electrode 11 and is arranged so as to face the photoelectric conversion layer 15 via the insulating layer 82.

Further, the stacked image sensor of Example 1 has at least one image sensor of Example 1, and in Example 1, one image sensor of Example 1.

Further, the solid-state image pickup device of the first embodiment includes a plurality of stacked image pickup devices of the first embodiment.

A semiconductor substrate (more specifically, a silicon semiconductor layer) 70 is further provided, and the photoelectric conversion unit is arranged above the semiconductor substrate 70. Further, a control unit provided on the semiconductor substrate 70 and having a drive circuit to which the first electrode 11 is connected is further provided. Here, the light incident surface of the semiconductor substrate 70 is upward, and the opposite side of the semiconductor substrate 70 is downward. A wiring layer 62 composed of a plurality of wirings is provided below the semiconductor substrate 70. Further, the semiconductor substrate 70 is provided with at least a floating diffusion layer FD ₁ and an amplification transistor TR1 _amp constituting a control unit, and the first electrode 11 is provided at a gate portion of the floating diffusion layer FD ₁ and the amplification transistor TR1 _amp. It is connected. The semiconductor substrate 70 is further provided with a reset transistor TR1 _rst and a selection transistor TR1 _sel that form a control unit. Further, the floating diffusion layer FD ₁ is connected to one source / drain region of the reset transistor TR1 _rst , and one source / drain region of the amplification transistor TR1 _amp is one source / drain region of the selection transistor TR1 _sel. It is connected to a region and the other source / drain region of the selection transistor TR1 _sel is connected to the signal line VSL ₁ . These amplification transistor TR1 _amp , reset transistor TR1 _rst, and selection transistor TR1 _sel constitute a drive circuit.

Specifically, the image sensor and the laminated image sensor of the first embodiment are a back-illuminated image sensor and a laminated image sensor, and are green having a first type green photoelectric conversion layer that absorbs green light. Sensitivity to blue with the first type of image sensor for green of Example 1 (hereinafter referred to as "first image sensor") and the second type of blue photoelectric conversion layer that absorbs blue light. A second type of conventional blue image sensor (hereinafter referred to as "second image sensor") having a second type, and a second type having sensitivity to red having a second type red photoelectric conversion layer that absorbs red light. It has a structure in which three image pickup elements of a conventional red image sensor (hereinafter referred to as "third image pickup element") are laminated. Here, the red image sensor (third image sensor) and the blue image sensor (second image sensor) are provided in the semiconductor substrate 70, and the second image sensor is lighter than the third image sensor. Located on the incident side. Further, the green image sensor (first image sensor) is provided above the blue image sensor (second image sensor). One pixel is formed by the laminated structure of the first image sensor, the second image sensor, and the third image sensor. No color filter is provided.

In the first image pickup device, the first electrode 11 and the charge storage electrode 12 are formed on the interlayer insulating layer 81 so as to be separated from each other. The interlayer insulating layer 81 and the charge storage electrode 12 are covered with the insulating layer 82. A photoelectric conversion layer 15 is formed on the insulating layer 82, and a second electrode 16 is formed on the photoelectric conversion layer 15. A protective layer 83 is formed on the entire surface including the second electrode 16, and an on-chip micro lens 90 is provided on the protective layer 83. The first electrode 11, the charge storage electrode 12, and the second electrode 16 are composed of, for example, a transparent electrode made of ITO. The photoelectric conversion layer 15 is composed of a layer containing at least a well-known organic photoelectric conversion material having sensitivity to green (for example, an organic material such as a rhodamine dye, a melanin dye, or quinacridone). Further, the photoelectric conversion layer 15 may further include a material layer suitable for charge accumulation. That is, a material layer suitable for charge accumulation may be further formed between the photoelectric conversion layer 15 and the first electrode 11 (for example, in the connection portion 67). The interlayer insulating layer 81, the insulating layer 82, and the protective layer 83 are made of a well-known insulating material (for example, SiO ₂ or SiN). The photoelectric conversion layer 15 and the first electrode 11 are connected by a connecting portion 67 provided in the insulating layer 82. A photoelectric conversion layer 15 extends in the connection portion 67. That is, the photoelectric conversion layer 15 extends in the opening 84 provided in the insulating layer 82 and is connected to the first electrode 11.

The charge storage electrode 12 is connected to the drive circuit. Specifically, the charge storage electrode 12 is connected to the vertical drive circuit 112 constituting the drive circuit via the connection hole 66, the pad portion 64, and the wiring _VOA provided in the interlayer insulating layer 81. ..

The size of the charge storage electrode 12 is larger than that of the first electrode 11. The area of the charge storage electrode 12 S ₁ ', when the area of the first electrode 11 and the S _1, but are not limited to,
4 ≤ S ₁ '/ S ₁
Is preferable, and in Example 1, for example, although not limited to
S ₁ '/ S ₁ = 8
And said.

An element separation region 71 is formed on the side of the first surface (front surface) 70A of the semiconductor substrate 70, and an oxide film 72 is formed on the first surface 70A of the semiconductor substrate 70. Further, on the first surface side of the semiconductor substrate 70, a reset transistor TR1 _rst , an amplification transistor TR1 _amp, and a selection transistor TR1 _sel constituting the control unit of the first image sensor are provided, and further, a first floating diffusion layer. FD ₁ is provided.

The reset transistor TR1 _rst is composed of a gate portion 51, a channel forming region 51A, and source / drain regions 51B and 51C. The gate portion 51 of the reset transistor TR1 _rst is connected to the reset line RST ₁ , and one source / drain region 51C of the reset transistor TR1 _rst also serves as the first floating diffusion layer FD ₁ and the other source / drain. The area 51B is connected to the power supply V _DD .

The first electrode 11 is a connection hole 65 provided in the interlayer insulating layer 81, a pad portion 63, a contact hole portion 61 formed in the semiconductor substrate 70 and the interlayer insulating layer 76, and a wiring layer formed in the interlayer insulating layer 76. It is connected to _one source / drain region 51C (first floating diffusion layer FD ₁ ) of the reset transistor TR1 _rst via 62.

The amplification transistor TR1 _amp is composed of a gate portion 52, a channel forming region 52A, and source / drain regions 52B and 52C. The gate portion 52 is connected to the source / drain region 51C (first floating diffusion layer FD ₁ ) of _{one of} the first electrode 11 and the reset transistor TR1 _rst via the wiring layer 62. Further, one source / drain region 52B shares an area with the other source / drain region 51B constituting the reset transistor TR1 _rst, and is connected to the power supply V _DD .

The selection transistor TR1 _sel is composed of a gate portion 53, a channel formation region 53A, and source / drain regions 53B and 53C. The gate portion 53 is connected to the selection line SEL ₁ . Further, one source / drain region 53B shares an area with the other source / drain region 52C constituting the amplification transistor TR1 _amp , and the other source / drain region 53C is a signal line (data output line). It is connected to VSL ₁ (117).

The second image sensor includes an n-type semiconductor region 41 provided on the semiconductor substrate 70 as a photoelectric conversion layer. The gate portion 45 of the transfer transistor TR2 _trs composed of a vertical transistor extends to the n-type semiconductor region 41 and is connected to the transfer gate line TG ₂ . Further, a second floating diffusion layer FD ₂ is provided in the region 45C of the semiconductor substrate 70 near the gate portion 45 of the transfer transistor TR2 _trs . The electric charge accumulated in the n-type semiconductor region 41 is read out to the second floating diffusion layer FD ₂ via the transfer channel formed along the gate portion 45.

In the second image sensor, a reset transistor TR2 _rst , an amplification transistor TR2 _amp, and a selection transistor TR2 _sel , which form a control unit of the second image sensor, are further provided on the first surface side of the semiconductor substrate 70. There is.

The reset transistor TR2 _rst is composed of a gate portion, a channel forming region, and a source / drain region. The gate of the reset transistor TR2 _rst is connected to the reset line RST ₂ , one source / drain region of the reset transistor TR2 _rst is connected to the power supply V _DD , and the other source / drain region is the second floating diffusion layer. Also serves as FD ₂ .

The amplification transistor TR2 _amp is composed of a gate portion, a channel forming region, and a source / drain region. The gate portion is connected to the other source / drain region (second floating diffusion layer FD ₂ ) of the reset transistor TR2 _rst . Further, one source / drain region shares an region with one source / drain region constituting the reset transistor TR2 _rst, and is connected to the power supply V _DD .

The selection transistor TR2 _sel is composed of a gate portion, a channel forming region, and a source / drain region. The gate portion is connected to the selection line SEL ₂ . Further, one source / drain region shares an area with the other source / drain region constituting the amplification transistor TR2 _amp , and the other source / drain region is on the signal line (data output line) VSL ₂ . It is connected.

The third image sensor includes an n-type semiconductor region 43 provided on the semiconductor substrate 70 as a photoelectric conversion layer. The gate portion 46 of the transfer transistor TR3 _trs is connected to the transfer gate line TG ₃ . Further, a third floating diffusion layer FD ₃ is provided in the region 46C of the semiconductor substrate 70 near the gate portion 46 of the transfer transistor TR3 _trs . The electric charge accumulated in the n-type semiconductor region 43 is read out to the third floating diffusion layer FD ₃ via the transfer channel 46A formed along the gate portion 46.

In the third image sensor, a reset transistor TR3 _rst , an amplification transistor TR3 _amp, and a selection transistor TR3 _sel , which constitute a control unit of the third image sensor, are further provided on the first surface side of the semiconductor substrate 70. There is.

The reset transistor TR3 _rst is composed of a gate portion, a channel forming region, and a source / drain region. The gate of the reset transistor TR3 _rst is connected to the reset line RST ₃ , one source / drain region of the reset transistor TR3 _rst is connected to the power supply V _DD , and the other source / drain region is the third floating diffusion layer. Also serves as FD ₃ .

The amplification transistor TR3 _amp is composed of a gate portion, a channel forming region, and a source / drain region. The gate portion is connected to the other source / drain region (third floating diffusion layer FD ₃ ) of the reset transistor TR3 _rst . Further, one source / drain region shares an region with one source / drain region constituting the reset transistor TR3 _rst, and is connected to the power supply V _DD .

The selection transistor TR3 _sel is composed of a gate portion, a channel forming region, and a source / drain region. The gate portion is connected to the selection line SEL ₃ . Further, one source / drain region shares an region with the other source / drain region constituting the amplification transistor TR3 _amp , and the other source / drain region is on the signal line (data output line) VSL ₃ . It is connected.

The reset lines RST ₁ , RST ₂ , RST ₃ , selection lines SEL ₁ , SEL ₂ , SEL ₃ , transfer gate lines TG ₂ , and TG ₃ are connected to the vertical drive circuit 112 that constitutes the drive circuit, and the signal line (data output). Line) VSL ₁ , VSL ₂ , and VSL ₃ are connected to the column signal processing circuit 113 constituting the drive circuit.

A p ⁺ layer 44 is provided between the n-type semiconductor region 43 and the surface 70A of the semiconductor substrate 70 to suppress the generation of dark current. A p ⁺ layer 42 is formed between the n-type semiconductor region 41 and the n-type semiconductor region 43, and a part of the side surface of the n-type semiconductor region 43 is further surrounded by the p ⁺ layer 42. .. A p ⁺ layer 73 is formed on the back surface 70B side of the semiconductor substrate 70, and an HfO ₂ film 74 and insulation are formed on the portion where the contact hole portion 61 inside the semiconductor substrate 70 should be formed from the p ⁺ layer 73. A film 75 is formed. Wiring is formed in a plurality of layers in the interlayer insulating layer 76, but the illustration is omitted.

The HfO ₂ film 74 is a film having a negative fixed charge, and by providing such a film, the generation of dark current can be suppressed. Instead of HfO ₂ film, aluminum oxide (Al ₂ O ₃ ) film, zirconium oxide (ZrO ₂ ) film, tantalum oxide (Ta ₂ O ₅ ) film, titanium oxide (TIO ₂ ) film, lanthanum oxide (La ₂₎ O ₃ ) membrane, placeodymium oxide (Pr ₂ O ₃ ) membrane, cerium oxide (CeO ₂ ) membrane, neodymium oxide (Nd ₂ O ₃ ) membrane, promethium oxide (Pm ₂ O ₃ ) membrane, samarium oxide (Sm ₂ O ₃₎ ) Membrane, Europium Oxide (Eu ₂ O ₃ ) Membrane, Gadolinium Oxide ((Gd ₂ O ₃ ) Membrane, Terbium Oxide (Tb ₂ O ₃ ) Membrane, Disprosium Oxide (Dy ₂ O ₃ ) Membrane, Formium Oxide (Ho ₂ O) ₃ ) Film, thurium oxide (Tm ₂ O ₃ ) film, ytterbium oxide (Yb ₂ O ₃ ) film, lutetium oxide (Lu ₂ O ₃ ) film, yttrium oxide (Y ₂ O ₃ ) film, hafnium nitride film, aluminum nitride A film, a hafnium oxynitride film, and an aluminum oxynitride film can also be used. Examples of the film forming method for these films include a CVD method, a PVD method, and an ALD method.

Hereinafter, the operation of the image pickup device (first image pickup device) of the first embodiment will be described with reference to FIG. Here, the potential of the first electrode 11 was made higher than the potential of the second electrode. That is, for example, the first electrode 11 has a positive potential, the second electrode has a negative potential, and the electrons generated by the photoelectric conversion in the photoelectric conversion layer 15 are read out to the floating diffusion layer. The same applies to other examples. The following describes a mode in which the first electrode 11 has a negative potential, the second electrode has a positive potential, and the holes generated by the photoelectric conversion in the photoelectric conversion layer 15 are read out to the floating diffusion layer. The high and low potentials may be reversed.

Reference numerals used in FIGS. 5, 20 and 21 in FIG. 5 and FIG. 21 and FIGS. 32 and 33 in the sixth embodiment, which will be described later, are as follows.
PA: The potential at the point PA in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12, or the potential at the point PA in the region of the photoelectric conversion layer 15 facing the charge storage electrode segment 12C. PB: The potential at the point PB in the region of the photoelectric conversion layer 15 facing the region located between the charge storage electrode 12 and the first electrode 11, or the transfer control electrode (charge transfer electrode). The potential at the point PB in the region of the photoelectric conversion layer 15 facing the 13 or the potential PC at the point PB in the region of the photoelectric conversion layer 15 facing the charge storage electrode segment 12B. The potential at the point PC in the region of the photoelectric conversion layer 15 facing the charge PD, or the potential PD at the point PC in the region of the photoelectric conversion layer 15 facing the charge storage electrode segment 12A. Potential FD at point PD in the region of the photoelectric conversion layer 15 facing the region located between 12C and the first electrode 11 ..... Electric charge VOA in the first floating diffusion layer FD ₁ ... Potential VOA-A in the charge storage electrode 12 ... Potential VOA-B in the charge storage electrode segment 12A ... Potential VOA-C in the charge storage electrode segment 12B ... Charge storage electrode segment 12C Potential VOT in the transfer control electrode (charge transfer electrode) 13 Potential RST ... Potential in the gate 51 of the reset transistor TR1 _rst VDD ... Power supply potential VSL_1・ ・ ・ ・ Signal line (data output line) VSL ₁
TR1_rst ... reset transistor TR1 _rst
TR1_amp ... Amplification transistor TR1 _amp
TR1_sel ... Selective transistor TR1 _sel

In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode 11, the potential V ₁₂ is applied to the charge storage electrode 12. The light incident on the photoelectric conversion layer 15 causes photoelectric conversion in the photoelectric conversion layer 15. The holes generated by the photoelectric conversion are sent from the second electrode 16 to the drive circuit via the wiring V _OU . On the other hand, since the potential of the first electrode 11 is made higher than the potential of the second electrode 16, that is, for example, when a positive potential is applied to the first electrode 11 and a negative potential is applied to the second electrode 16. Therefore, V ₁₂ ≥ V ₁₁ , preferably V ₁₂ > V ₁₁ . As a result, the electrons generated by the photoelectric conversion are attracted to the charge storage electrode 12, and stay in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12. That is, electric charges are accumulated in the photoelectric conversion layer 15. Since V ₁₂ > V ₁₁ , the electrons generated inside the photoelectric conversion layer 15 do not move toward the first electrode 11. With the passage of time of photoelectric conversion, the potential in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12 becomes a value on the more negative side.

A reset operation is performed in the latter part of the charge accumulation period. As a result, the potential of the first floating diffusion layer FD ₁ is reset, and the potential of the first floating diffusion layer FD ₁ becomes the potential V _DD of the power supply.

After the reset operation is completed, the electric charge is read out. That is, in the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode 11, the potential V ₂₂ is applied to the charge storage electrode 12. Here, V ₂₂ <V ₂₁ . As a result, the electrons that have stopped in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12 are read out to the first electrode 11 and further to the first floating diffusion layer FD ₁ . That is, the electric charge accumulated in the photoelectric conversion layer 15 is read out to the control unit.

This completes a series of operations such as charge accumulation, reset operation, and charge transfer.

The operation of the amplification transistor TR1 _amp and the selection transistor TR1 _sel after the electrons are read out to the first floating diffusion layer FD ₁ is the same as the operation of these conventional transistors. Further, a series of operations such as charge storage, reset operation, and charge transfer of the second image sensor and the third image sensor are the same as the conventional series of operations such as charge storage, reset operation, and charge transfer. Further, the reset noise of the first floating diffusion layer FD ₁ can be removed by the correlation double sampling (CDS, Correlated Double Sampling) processing as in the conventional case.

As described above, in the first embodiment, the charge storage electrode is provided which is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via the insulating layer. When the photoelectric conversion unit is irradiated with light and the photoelectric conversion unit performs photoelectric conversion, a kind of capacitor is formed by the photoelectric conversion layer, the insulating layer, and the charge storage electrode, and the charge can be stored in the photoelectric conversion layer. Therefore, at the start of exposure, the charge storage portion is completely depleted and the charge can be erased. As a result, it is possible to suppress the occurrence of a phenomenon in which the kTC noise becomes large, the random noise deteriorates, and the image quality is deteriorated. Moreover, since all the pixels can be reset at once, the so-called global shutter function can be realized.

FIG. 8 shows a conceptual diagram of the solid-state image sensor of the first embodiment. The solid-state image pickup device 100 of the first embodiment includes an image pickup region 111 in which stacked image pickup elements 101 are arranged in a two-dimensional array, a vertical drive circuit 112 as a drive circuit (peripheral circuit) thereof, and a column signal processing circuit 113. It is composed of a horizontal drive circuit 114, an output circuit 115, a drive control circuit 116, and the like. It should be noted that these circuits can be configured from well-known circuits, or can be configured using other circuit configurations (for example, various circuits used in a conventional CCD imaging device or a CMOS imaging device). It goes without saying that you can do it. In FIG. 8, the reference number “101” in the stacked image sensor 101 is displayed on only one line.

The drive control circuit 116 generates a clock signal or a control signal that serves as a reference for the operation of the vertical drive circuit 112, the column signal processing circuit 113, and the horizontal drive circuit 114 based on the vertical synchronization signal, the horizontal synchronization signal, and the master clock. .. Then, the generated clock signal and control signal are input to the vertical drive circuit 112, the column signal processing circuit 113, and the horizontal drive circuit 114.

The vertical drive circuit 112 is composed of, for example, a shift register, and sequentially selects and scans each stacked image sensor 101 in the image pickup region 111 in the vertical direction in row units. Then, the pixel signal (image signal) based on the current (signal) generated according to the amount of light received by each stacked image sensor 101 is sent to the column signal processing circuit 113 via the signal line (data output line) 117 and VSL. Be done.

The column signal processing circuit 113 is arranged for each row of the stacked image sensor 101, for example, and outputs an image signal output from the stacked image sensor 101 for one row to a black reference pixel (not shown) for each image sensor. , The signal from (formed around the effective pixel area) is used to perform signal processing for noise removal and signal amplification. A horizontal selection switch (not shown) is provided in the output stage of the column signal processing circuit 113 so as to be connected to the horizontal signal line 118.

The horizontal drive circuit 114 is composed of, for example, a shift register, and by sequentially outputting horizontal scanning pulses, each of the column signal processing circuits 113 is sequentially selected, and signals from each of the column signal processing circuits 113 are sequentially output to the horizontal signal line 118. Output.

The output circuit 115 performs signal processing on signals sequentially supplied from each of the column signal processing circuits 113 via the horizontal signal line 118 and outputs the signals.

FIG. 9 shows an equivalent circuit diagram of a modified example of the image pickup device and the stacked image sensor of the first embodiment, and constitutes a first electrode, a charge storage electrode, and a control unit that constitute a modified example of the image pickup device of the first embodiment. As shown in FIG. 10 for a schematic layout diagram of the transistors, the other source / drain region 51B of the reset transistor TR1 _rst may be grounded instead of being connected to the power supply V _DD .

The image pickup device and the stacked image pickup device of the first embodiment can be manufactured by, for example, the following methods. That is, first, the SOI substrate is prepared. Then, a first silicon layer is formed on the surface of the SOI substrate based on the epitaxial growth method, and a p ⁺ layer 73 and an n-type semiconductor region 41 are formed on the first silicon layer. Next, a second silicon layer is formed on the first silicon layer based on the epitaxial growth method, and the element separation region 71, the oxide film 72, the p ⁺ layer 42, the n-type semiconductor region 43, and the p ⁺ layer are formed on the second silicon layer. Form 44. Further, various transistors and the like constituting the control unit of the image pickup device are formed on the second silicon layer, and a wiring layer 62, an interlayer insulating layer 76, and various wirings are formed on the transistor, and then supported by the interlayer insulating layer 76. Attach to the substrate (not shown). After that, the SOI substrate is removed to expose the first silicon layer. The surface of the second silicon layer corresponds to the surface 70A of the semiconductor substrate 70, and the surface of the first silicon layer corresponds to the back surface 70B of the semiconductor substrate 70. Further, the first silicon layer and the second silicon layer are collectively referred to as a semiconductor substrate 70. Next, an opening for forming the contact hole portion 61 is formed on the back surface 70B side of the semiconductor substrate 70, the HfO ₂ film 74, the insulating film 75 and the contact hole portion 61 are formed, and further, the pad portion 63, 64, the interlayer insulating layer 81, the connection holes 65 and 66, the first electrode 11, the charge storage electrode 12, and the insulating layer 82 are formed. Next, the connection portion 67 is opened to form the photoelectric conversion layer 15, the second electrode 16, the protective layer 83, and the on-chip micro lens 90. From the above, the image pickup device and the stacked image pickup device of Example 1 can be obtained.

The second embodiment is a modification of the first embodiment. The image sensor and the stacked image sensor of the second embodiment showing a schematic partial cross-sectional view in FIG. 11 are a surface-illuminated image sensor and a stacked image sensor, and are the first type of green that absorbs green light. First type of image sensor for green (first image sensor) of the first type having a photoelectric conversion layer and having sensitivity to green, and sensitivity to blue having a second type of blue photoelectric conversion layer that absorbs blue light. A second type conventional blue image sensor (second image sensor) having a red light, and a second type conventional red image sensor having a sensitivity to red with a second type red photoelectric conversion layer that absorbs red light. It has a structure in which three image pickup elements of the element (third image pickup element) are laminated. Here, the red image sensor (third image sensor) and the blue image sensor (second image sensor) are provided in the semiconductor substrate 70, and the second image sensor is lighter than the third image sensor. Located on the incident side. Further, the green image sensor (first image sensor) is provided above the blue image sensor (second image sensor).

Similar to the first embodiment, various transistors constituting the control unit are provided on the surface 70A side of the semiconductor substrate 70. These transistors can have substantially the same configuration and structure as the transistors described in the first embodiment. Further, the semiconductor substrate 70 is provided with a second image sensor and a third image sensor, and these image sensors are also substantially the same as the second image sensor and the third image sensor described in the first embodiment. It can be configured and structured.

Interlayer insulation layers 77 and 78 are formed on the surface 70A of the semiconductor substrate 70, and the photoelectric conversion unit (first electrode 11, photoelectric) constituting the image pickup element of Example 1 is formed on the interlayer insulation layer 78. The conversion layer 15 and the second electrode 16), the charge storage electrode 12, and the like are provided.

As described above, the configuration and structure of the image sensor and the laminated image sensor of the second embodiment are the same as those of the image sensor and the laminated image sensor of the first embodiment except that the surface irradiation type is used. Therefore, detailed description will be omitted.

Example 3 is a modification of Example 1 and Example 2.

The image sensor and the stacked image sensor of the third embodiment showing a schematic partial cross-sectional view in FIG. 12 are a back-illuminated image sensor and a laminated image sensor, and the first image sensor of the first type of the first embodiment. It has a structure in which two image pickup elements, an element and a second type second image pickup element, are laminated. Further, modifications of the image sensor and the stacked image sensor of the third embodiment showing a schematic partial cross-sectional view in FIG. 13 are a surface-illuminated image sensor and a stacked image sensor, and are examples of the first type. It has a structure in which two image pickup elements, a first image pickup element of 1 and a second image pickup element of the second type, are laminated. Here, the first image sensor absorbs the light of the primary color, and the second image sensor absorbs the light of the complementary color. Alternatively, the first image sensor absorbs white light and the second image sensor absorbs infrared light.

A modified example of the image pickup device of Example 3 showing a schematic partial cross-sectional view in FIG. 14 is a back-illuminated image pickup device, which is composed of the first image pickup device of Example 1 of the first type. Further, a modified example of the image pickup device of Example 3 showing a schematic partial cross-sectional view in FIG. 15 is a surface-illuminated image pickup device, which is composed of the first image pickup device of Example 1 of the first type. There is. Here, the first image sensor is composed of three types of image sensors: an image sensor that absorbs red light, an image sensor that absorbs green light, and an image sensor that absorbs blue light. Further, a solid-state image pickup device according to the first aspect of the present disclosure is configured from a plurality of these image pickup elements. A Bayer array can be mentioned as an arrangement of a plurality of these image pickup devices. A color filter for performing blue, green, and red spectroscopy is provided on the light incident side of each image sensor, if necessary.

In addition, instead of providing one image pickup element of the first type of Example 1, two are laminated (that is, two photoelectric conversion units are laminated, and the control unit of the two image pickup elements is provided on the semiconductor substrate. It is also possible to form a form in which three photoelectric conversion units are laminated (that is, three photoelectric conversion units are laminated and a control unit for three image pickup elements is provided on the semiconductor substrate). An example of the laminated structure of the first type image sensor and the second type image sensor is illustrated in the table below.

The fourth embodiment is a modification of the first to third embodiments, and relates to an image pickup device and the like of the present disclosure provided with a transfer control electrode (charge transfer electrode). FIG. 16 shows a schematic partial cross-sectional view of a part of the image sensor and the stacked image sensor of the fourth embodiment, and FIGS. 17 and 18 show equivalent circuit diagrams of the image sensor and the stacked image sensor of the fourth embodiment. FIG. 19 shows a schematic layout diagram of the first electrode constituting the image pickup device of Example 4, the transfer control electrode, the charge storage electrode, and the transistor constituting the control unit, and the operation of the image pickup device of Example 4. The state of the electric potential at each part of time is schematically shown in FIGS. 20 and 21. Further, FIG. 22 shows a schematic arrangement diagram of the first electrode constituting the image pickup device of Example 4, the transfer control electrode, and the charge storage electrode, and the first electrode constituting the image pickup device of Example 4 and transfer. FIG. 23 shows a schematic perspective perspective view of the control electrode, the charge storage electrode, the second electrode, and the contact hole portion.

In the image pickup element and the stacked image pickup device of the fourth embodiment, the first electrode 11 and the charge storage electrode 12 are arranged apart from each other and separated from the first electrode 11 and the charge storage electrode 12. Further, a transfer control electrode (charge transfer electrode) 13 arranged to face the photoelectric conversion layer 15 via the insulating layer 82 is further provided. The transfer control electrode 13, connection hole 68B provided in the interlayer insulating layer 81, through the pad portion 68A and the wiring V _OT, and is connected to the pixel drive circuit included in the driver circuit. The various image sensor components located below the interlayer insulating layer 81 are collectively shown by reference number 91 for convenience in order to simplify the drawing.

Hereinafter, the operation of the image pickup device (first image pickup device) of the fourth embodiment will be described with reference to FIGS. 20 and 21. In particular, the values of the potential applied to the charge storage electrode 12 and the potential at the point PB are different between FIGS. 20 and 21.

In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode 11, the potential V ₁₂ is applied to the charge storage electrode 12, the potential V ₁₃ is applied to the transfer control electrode 13. The light incident on the photoelectric conversion layer 15 causes photoelectric conversion in the photoelectric conversion layer 15. The holes generated by the photoelectric conversion are sent from the second electrode 16 to the drive circuit via the wiring V _OU . On the other hand, since the potential of the first electrode 11 is made higher than the potential of the second electrode 16, that is, for example, when a positive potential is applied to the first electrode 11 and a negative potential is applied to the second electrode 16. Therefore, V ₁₂ > V ₁₃ (for example, V ₁₂ > V ₁₁ > V ₁₃ or V ₁₁ > V ₁₂ > V ₁₃ ). As a result, the electrons generated by the photoelectric conversion are attracted to the charge storage electrode 12, and stay in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12. That is, electric charges are accumulated in the photoelectric conversion layer 15. Since V ₁₂ > V _13, it is possible to reliably prevent the electrons generated inside the photoelectric conversion layer 15 from moving toward the first electrode 11. With the passage of time of photoelectric conversion, the potential in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12 becomes a value on the more negative side.

A reset operation is performed in the latter part of the charge accumulation period. As a result, the potential of the first floating diffusion layer FD ₁ is reset, and the potential of the first floating diffusion layer FD ₁ becomes the potential V _DD of the power supply.

After the reset operation is completed, the electric charge is read out. That is, in the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode 11, the potential V ₂₂ is applied to the charge storage electrode 12, the potential V ₂₃ is applied to the transfer control electrode 13. Here, V ₂₂ ≤ V ₂₃ ≤ V ₂₁ . As a result, the electrons that have stopped in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12 are surely read out to the first electrode 11 and further to the first floating diffusion layer FD ₁ . That is, the electric charge accumulated in the photoelectric conversion layer 15 is read out to the control unit.

This completes a series of operations such as charge accumulation, reset operation, and charge transfer.

The operation of the amplification transistor TR1 _amp and the selection transistor TR1 _sel after the electrons are read out to the first floating diffusion layer FD ₁ is the same as the operation of these conventional transistors. Further, for example, a series of operations such as charge storage, reset operation, and charge transfer of the second image sensor and the third image sensor are the same as the conventional series of operations such as charge storage, reset operation, and charge transfer.

As shown in FIG. 24, a schematic layout diagram of the first electrode and the charge storage electrode constituting the modified example of the image pickup device of the fourth embodiment and the transistor constituting the control unit is shown in FIG. 24, and the other source of the reset transistor TR1 _rst. The / drain region 51B may be grounded instead of being connected to the power supply V _DD .

The fifth embodiment is a modification of the first to fourth embodiments, and relates to an image pickup device and the like of the present disclosure provided with a charge discharge electrode. FIG. 25 shows a schematic partial cross-sectional view of a part of the image pickup element of Example 5 and the stacked image pickup device, and is a schematic view of the first electrode, the charge storage electrode, and the charge discharge electrode constituting the image pickup device of Example 5. A schematic layout of the first electrode, the charge storage electrode, the charge discharge electrode, the second electrode, and the contact hole portion constituting the image pickup element of the fifth embodiment is shown in FIG. 26. Shown.

In the image pickup device and the stacked image pickup device of the fifth embodiment, the charge discharge electrode is connected to the photoelectric conversion layer 15 via the connection portion 69 and is arranged apart from the first electrode 11 and the charge storage electrode 12. 14 is further provided. Here, the charge discharge electrode 14 is arranged so as to surround the first electrode 11 and the charge storage electrode 12 (that is, in a frame shape). The charge discharge electrode 14 is connected to a pixel drive circuit that constitutes the drive circuit. A photoelectric conversion layer 15 extends in the connection portion 69. That is, the photoelectric conversion layer 15 extends in the second opening 85 provided in the insulating layer 82 and is connected to the charge discharge electrode 14. The charge discharge electrode 14 is shared (common) in a plurality of image pickup devices.

In Example 5, the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode 11, the potential V ₁₂ is applied to the charge storage electrode 12, the potential V ₁₄ to the charge discharging electrode 14 Is applied, and charges are accumulated in the photoelectric conversion layer 15. The light incident on the photoelectric conversion layer 15 causes photoelectric conversion in the photoelectric conversion layer 15. The holes generated by the photoelectric conversion are sent from the second electrode 16 to the drive circuit via the wiring V _OU . On the other hand, since the potential of the first electrode 11 is made higher than the potential of the second electrode 16, that is, for example, when a positive potential is applied to the first electrode 11 and a negative potential is applied to the second electrode 16. Therefore, V ₁₄ > V ₁₁ (for example, V ₁₂ > V ₁₄ > V ₁₁ ). As a result, the electrons generated by the photoelectric conversion are attracted to the charge storage electrode 12, stay in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12, and surely move toward the first electrode 11. Can be prevented. However, the electrons that are not sufficiently attracted by the charge storage electrode 12 or cannot be completely stored in the photoelectric conversion layer 15 (so-called overflow electrons) are sent to the drive circuit via the charge discharge electrode 14. To.

A reset operation is performed in the latter part of the charge accumulation period. As a result, the potential of the first floating diffusion layer FD ₁ is reset, and the potential of the first floating diffusion layer FD ₁ becomes the potential V _DD of the power supply.

After the reset operation is completed, the electric charge is read out. That is, in the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode 11, the potential V ₂₂ is applied to the charge storage electrode 12, the potential V ₂₄ is applied to the charge discharging electrode 14. Here, V ₂₄ <V ₂₁ (for example, V ₂₄ <V ₂₂ <V ₂₁ ). As a result, the electrons that have stopped in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12 are surely read out to the first electrode 11 and further to the first floating diffusion layer FD ₁ . That is, the electric charge accumulated in the photoelectric conversion layer 15 is read out to the control unit.

This completes a series of operations such as charge accumulation, reset operation, and charge transfer.

The operation of the amplification transistor TR1 _amp and the selection transistor TR1 _sel after the electrons are read out to the first floating diffusion layer FD ₁ is the same as the operation of these conventional transistors. Further, for example, a series of operations such as charge storage, reset operation, and charge transfer of the second image sensor and the third image sensor are the same as the conventional series of operations such as charge storage, reset operation, and charge transfer.

In the fifth embodiment, since the so-called overflowed electrons are sent to the drive circuit via the charge discharge electrode 14, it is possible to suppress leakage of adjacent pixels to the charge storage portion and cause blooming. It can be suppressed. As a result, the image pickup performance of the image sensor can be improved.

The sixth embodiment is a modification of the first to fifth embodiments, and relates to the image sensor and the like of the present disclosure provided with a plurality of charge storage electrode segments.

A schematic partial cross-sectional view of a part of the image sensor of Example 6 is shown in FIG. 28, and an equivalent circuit diagram of the image sensor and the stacked image sensor of Example 6 are shown in FIGS. 29 and 30, respectively. FIG. 31 shows a schematic layout diagram of the first electrode constituting the image sensor, the charge storage electrode, and the transistor constituting the control unit, and illustrates the state of the potential at each part during the operation of the image sensor according to the sixth embodiment. It is shown in FIGS. 32 and 33. Further, FIG. 34 shows a schematic layout diagram of the first electrode and the charge storage electrode constituting the image pickup device of the sixth embodiment, and the first electrode, the charge storage electrode, and the charge storage electrode constituting the image pickup device of the sixth embodiment are shown in FIG. A schematic perspective perspective view of the two electrodes and the contact hole portion is shown in FIG. 35.

In Example 6, the charge storage electrode 12 is composed of a plurality of charge storage electrode segments 12A, 12B, 12C. The number of charge storage electrode segments may be 2 or more, and is set to “3” in Example 6. Then, in the image pickup element and the stacked image pickup device of the sixth embodiment, the potential of the first electrode 11 is higher than the potential of the second electrode 16, that is, for example, a positive potential is applied to the first electrode 11. Then, a negative potential is applied to the second electrode 16, so that the potential applied to the charge storage electrode segment 12A located closest to the first electrode 11 during the charge transfer period is applied to the first electrode 11. It is higher than the potential applied to the charge storage electrode segment 12C located at the farthest place. By applying the potential gradient to the charge storage electrode 12 in this way, the electrons that have stopped in the region of the photoelectric conversion layer 15 facing the charge storage electrode 12 are transferred to the first electrode 11 and further to the first floating. It is read more reliably to the diffusion layer FD ₁ . That is, the electric charge accumulated in the photoelectric conversion layer 15 is read out to the control unit.

In the example shown in FIG. 32, in the charge transfer period, the potential of the charge storage electrode segment 12C <the potential of the charge storage electrode segment 12B <the potential of the charge storage electrode segment 12A is set so that the region of the photoelectric conversion layer 15 is formed. The stopped electrons are read out to the first floating diffusion layer FD ₁ all at once. On the other hand, in the example shown in FIG. 33, the potential of the charge storage electrode segment 12C, the potential of the charge storage electrode segment 12B, and the potential of the charge storage electrode segment 12A are gradually changed during the charge transfer period (that is,). The electrons that had stopped in the region of the photoelectric conversion layer 15 facing the charge storage electrode segment 12C in a stepped shape or a slope shape are moved to the region of the photoelectric conversion layer 15 facing the charge storage electrode segment 12B. The electrons are then moved and then stopped in the region of the photoelectric conversion layer 15 facing the charge storage electrode segment 12B, moved to the region of the photoelectric conversion layer 15 facing the charge storage electrode segment 12A, and then charged. The electrons stopped in the region of the photoelectric conversion layer 15 facing the electrode segment 12A for use are surely read out to the first floating diffusion layer FD ₁ .

As shown in FIG. 36, a schematic layout diagram of the first electrode and the charge storage electrode constituting the modified example of the image pickup device of the sixth embodiment and the transistor constituting the control unit is shown in FIG. 36, and the other source of the reset transistor TR1 _rst. The / drain region 51B may be grounded instead of being connected to the power supply V _DD .

Although the present disclosure has been described above based on preferred examples, the present disclosure is not limited to these examples. The structure and configuration of the image pickup device, the stacked image pickup device, and the solid-state image pickup device described in the examples, the manufacturing conditions, the manufacturing method, and the materials used are examples and can be changed as appropriate. Not only a form in which one floating diffusion layer is provided in one image sensor, but also a form in which one floating diffusion layer is provided in a plurality of image pickup elements can be used. That is, by appropriately controlling the timing of the charge transfer period, it becomes possible for a plurality of image pickup devices to share one floating diffusion layer. Then, in this case, it is possible for a plurality of image pickup devices to share one contact hole portion.

FIG. 37 shows, for example, a modification of the image pickup device and the laminated image pickup device described in the first embodiment. The first electrode 11 extends in the opening 84A provided in the insulating layer 82 and is photoelectric. It may be configured to be connected to the conversion layer 15.

Alternatively, FIG. 38 shows, for example, a modified example of the imaging element and the laminated imaging element described in the first embodiment, and FIG. 39A shows an enlarged schematic partial cross-sectional view of a portion of the first electrode and the like. As described above, the edge of the top surface of the first electrode 11 is covered with the insulating layer 82, and the first electrode 11 is exposed on the bottom surface of the opening 84B, and the insulation is in contact with the top surface of the first electrode 11. When the surface of the layer 82 is the first surface 82a and the surface of the insulating layer 82 in contact with the portion of the photoelectric conversion layer 15 facing the charge storage electrode 12 is the second surface 82b, the side surface of the opening 84B is the first surface. It has an inclination extending from 82a toward the second surface 82b. By inclining the side surface of the opening 84B in this way, the transfer of electric charge from the photoelectric conversion layer 15 to the first electrode 11 becomes smoother. In the example shown in FIG. 39A, the side surfaces of the opening 84B are rotationally symmetric with respect to the axis of the opening 84B, but as shown in FIG. 39B, from the first surface 82a to the second surface 82b. The opening 84C may be provided so that the side surface of the opening 84C having a widening inclination is located on the charge storage electrode 12 side. This makes it difficult for the charge to move from the portion of the photoelectric conversion layer 15 on the side opposite to the charge storage electrode 12 with the opening 84C interposed therebetween. Further, the side surface of the opening 84B has an inclination extending from the first surface 82a to the second surface 82b, and the side edge of the opening 84B on the second surface 82b is as shown in FIG. 39A. It may be located outside the edge of the first electrode 11, or may be located inside of the edge of the first electrode 11, as shown in FIG. 39C. By adopting the former configuration, charge transfer becomes easier, and by adopting the latter configuration, it is possible to reduce the shape variation at the time of forming the opening.

These openings 84B and 84C tilt the opening side surfaces of the etching mask by reflowing an etching mask made of a resist material formed when the openings are formed in the insulating layer based on the etching method. It can be formed by etching the insulating layer 82 with an etching mask.

Alternatively, regarding the charge discharge electrode 14 described in the fifth embodiment, as shown in FIG. 40, the photoelectric conversion layer 15 extends in the second opening 85A provided in the insulating layer 82, and the charge discharge electrode 14 extends. The edge of the top surface of the charge discharge electrode 14 is covered with an insulating layer 82, and the charge discharge electrode 14 is exposed on the bottom surface of the second opening 85A. When the surface of the insulating layer 82 in contact with the top surface is the third surface 82c and the surface of the insulating layer 82 in contact with the portion of the photoelectric conversion layer 15 facing the charge storage electrode 12 is the second surface 82b, the second opening 85A The side surface of the above can be in a form having an inclination extending from the third surface 82c toward the second surface 82b.

Further, as shown in FIG. 41, for example, as shown in a modified example of the image pickup device and the stacked image pickup device described in the first embodiment, light is incident from the side of the second electrode 16 and the light incident side from the second electrode 16. The light-shielding layer 92 may be formed on the surface. It should be noted that various wirings provided on the light incident side of the photoelectric conversion layer can function as a light shielding layer.

In the example shown in FIG. 41, the light-shielding layer 92 is formed above the second electrode 16, that is, on the light incident side of the second electrode 16 and above the first electrode 11. Although the light-shielding layer 92 is formed, as shown in FIG. 42, it may be arranged on the surface of the second electrode 16 on the light incident side. Further, in some cases, as shown in FIG. 43, a light shielding layer 92 may be formed on the second electrode 16.

Alternatively, the structure may be such that light is incident from the second electrode 16 side and light is not incident on the first electrode 11. Specifically, as shown in FIG. 41, a light-shielding layer 92 is formed on the light incident side of the second electrode 16 and above the first electrode 11. Alternatively, as shown in FIG. 45, an on-chip micro lens 90 is provided above the charge storage electrode 12 and the second electrode 16, and the light incident on the on-chip micro lens 90 is emitted. The structure may be such that the light is focused on the charge storage electrode 12 and does not reach the first electrode 11. As described in the fourth embodiment, when the transfer control electrode 13 is provided, the first electrode 11 and the transfer control electrode 13 can be configured so that no light is incident on the first electrode 11 and the transfer control electrode 13. As shown in FIG. 44, a light-shielding layer 92 may be formed above the first electrode 11 and the transfer control electrode 13. Alternatively, the structure may be such that the light incident on the on-chip microlens 90 does not reach the first electrode 11 and the transfer control electrode 13.

By adopting these configurations and structures, or by providing a light-shielding layer 92 so that light is incident only on the portion of the photoelectric conversion layer 15 located above the charge storage electrode 12, or also on-chip. By designing the micro lens 90, the portion of the photoelectric conversion layer 15 located above the first electrode 11 (or above the first electrode 11 and the transfer control electrode 13) does not contribute to photoelectric conversion. All pixels can be reset all at once more reliably, and the global shutter function can be realized more easily. That is, in the driving method of the solid-state image pickup device provided with a plurality of image pickup elements having these configurations and structures,
In all the image pickup devices, the electric charges in the first electrode 11 are discharged to the outside of the system while accumulating the electric charges in the photoelectric conversion layer 15 all at once, and then.
In all the image pickup devices, the electric charges accumulated in the photoelectric conversion layer 15 are transferred to the first electrode 11 all at once, and after the transfer is completed, the electric charges transferred to the first electrode 11 are sequentially read out in each image sensor.
Repeat each process.

The photoelectric conversion layer is not limited to the configuration of one layer. For example, as shown in FIG. 46, a modification of the image pickup device and the laminated image pickup device described in Example 1, the photoelectric conversion layer 15 is, for example, a lower semiconductor layer 15A made of IGZO and the photoelectric beam described in Example 1. It is also possible to have a laminated layer structure of the upper photoelectric conversion layer 15B made of the material constituting the conversion layer 15. By providing the lower semiconductor layer 15A in this way, recombination at the time of charge accumulation can be prevented, and the transfer efficiency of the charge accumulated in the photoelectric conversion layer 15 to the first electrode 11 can be increased. The generation of dark current can be suppressed. Further, as a modification of the fourth embodiment, as shown in FIG. 47, a plurality of transfer control electrodes may be provided from the position closest to the first electrode 11 toward the charge storage electrode 12. Note that FIG. 47 shows an example in which two transfer control electrodes 13A and 13B are provided.

Needless to say, the various modifications described above can be applied to examples other than the first embodiment.

In the embodiment, electrons are used as signal charges and the conductive type of the photoelectric conversion layer formed on the semiconductor substrate is n-type, but the present invention can also be applied to a solid-state image sensor using holes as signal charges. In this case, each semiconductor region may be composed of the opposite conductive type semiconductor region, and the conductive type of the photoelectric conversion layer formed on the semiconductor substrate may be p-type.

Further, in the embodiment, a case where the unit pixels for detecting the signal charge according to the amount of incident light as a physical quantity are arranged in a matrix is applied to a CMOS type solid-state image sensor has been described as an example. The application is not limited to the type solid-state image sensor, and can also be applied to the CCD type solid-state image sensor. In the latter case, the signal charge is transferred in the vertical direction by the vertical transfer register having a CCD type structure, transferred in the horizontal direction by the horizontal transfer register, and amplified to output a pixel signal (image signal). Further, the present invention is not limited to all column-type solid-state image pickup devices in which pixels are formed in a two-dimensional matrix and column signal processing circuits are arranged for each pixel row. Furthermore, in some cases, the selection transistor can be omitted.

Further, the image pickup device and the stacked image sensor of the present disclosure are not limited to application to a solid-state image pickup device that detects the distribution of the amount of incident light of visible light and captures an image as an image, but also infrared rays, X-rays, particles, or the like. It can also be applied to a solid-state image sensor that captures the distribution of incident amount as an image. Further, in a broad sense, it can be applied to all solid-state imaging devices (physical quantity distribution detecting devices) such as fingerprint detection sensors that detect the distribution of other physical quantities such as pressure and capacitance and capture images as images.

Furthermore, the present invention is not limited to a solid-state image sensor that sequentially scans each unit pixel in the imaging region line by line and reads a pixel signal from each unit pixel. It is also applicable to an XY address type solid-state image sensor in which an arbitrary pixel is selected in pixel units and a pixel signal is read from the selected pixels in pixel units. The solid-state image sensor may be formed as a single chip, or may be a modular form having an image pickup function in which an image pickup region and a drive circuit or an optical system are packaged together.

Further, the application is not limited to a solid-state image sensor, and can also be applied to an image sensor. Here, the imaging device refers to a camera system such as a digital still camera or a video camera, or an electronic device having an imaging function such as a mobile phone. In some cases, a modular form mounted on an electronic device, that is, a camera module is used as an image pickup device.

An example in which the solid-state image sensor 201 composed of the image sensor and the stacked image sensor of the present disclosure is used in the electronic device (camera) 200 is shown as a conceptual diagram in FIG. 48. The electronic device 200 includes a solid-state imaging device 201, an optical lens 210, a shutter device 211, a drive circuit 212, and a signal processing circuit 213. The optical lens 210 forms an image light (incident light) from the subject on the image pickup surface of the solid-state image pickup device 201. As a result, signal charges are accumulated in the solid-state image sensor 201 for a certain period of time. The shutter device 211 controls the light irradiation period and the light blocking period of the solid-state image sensor 201. The drive circuit 212 supplies a drive signal that controls the transfer operation of the solid-state image sensor 201 and the shutter operation of the shutter device 211. The signal transfer of the solid-state image sensor 201 is performed by the drive signal (timing signal) supplied from the drive circuit 212. The signal processing circuit 213 performs various signal processing. The video signal after signal processing is stored in a storage medium such as a memory or output to a monitor. In such an electronic device 200, the pixel size of the solid-state image sensor 201 can be miniaturized and the transfer efficiency can be improved, so that the electronic device 200 with improved pixel characteristics can be obtained. The electronic device 200 to which the solid-state imaging device 201 can be applied is not limited to a camera, but can be applied to an imaging device such as a digital still camera or a camera module for mobile devices such as mobile phones.

The present disclosure may also have the following configuration.
[A01] << Image sensor >>
It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit is an image pickup device further provided with a charge storage electrode arranged separately from the first electrode and facing the photoelectric conversion layer via an insulating layer.
[A02] Further equipped with a semiconductor substrate,
The image pickup device according to [A01], wherein the photoelectric conversion unit is arranged above the semiconductor substrate.
[A03] The image pickup device according to [A01] or [A02], wherein the first electrode extends in an opening provided in the insulating layer and is connected to the photoelectric conversion layer.
[A04] The image pickup device according to [A01] or [A02], wherein the photoelectric conversion layer extends in an opening provided in the insulating layer and is connected to the first electrode.
[A05] The edge of the top surface of the first electrode is covered with an insulating layer.
The first electrode is exposed on the bottom surface of the opening.
When the surface of the insulating layer in contact with the top surface of the first electrode is the first surface and the surface of the insulating layer in contact with the portion of the photoelectric conversion layer facing the charge storage electrode is the second surface, the side surface of the opening is the first surface. The image pickup device according to [A04], which has an inclination extending from the first surface to the second surface.
[A06] The image pickup device according to [A05], wherein the side surface of the opening having an inclination extending from the first surface to the second surface is located on the charge storage electrode side.
[A07] << Control of potential of first electrode and charge storage electrode >>
It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode and the charge storage electrode are connected to the drive circuit.
In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode, the potential V ₁₂ is applied to the charge storage electrode, charges are accumulated in the photoelectric conversion layer,
During the charge transfer period, the potential V ₂₁ is applied to the first electrode from the drive circuit, the potential V ₂₂ is applied to the charge storage electrode, and the charge accumulated in the photoelectric conversion layer is transferred to the control unit via the first electrode. The image pickup device according to any one of [A01] to [A06] read out in 1.
However, when the potential of the first electrode is higher than that of the second electrode,
V ₁₂ ≥ V ₁₁ and V ₂₂ <V ₂₁
When the potential of the first electrode is lower than that of the second electrode,
V ₁₂ ≤ V ₁₁ and V ₂₂ > V ₂₁
Is.
[A08] << Electrode for transfer control >>
A transfer control electrode is arranged between the first electrode and the charge storage electrode so as to be separated from the first electrode and the charge storage electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer. The image pickup device according to any one of [A01] to [A06].
[A09] << Control of potential of first electrode, charge storage electrode and transfer control electrode >>
It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode, the charge storage electrode, and the transfer control electrode are connected to the drive circuit.
During the charge storage period, the drive circuit applies the potential V ₁₁ to the first electrode, the potential V ₁₂ to the charge storage electrode, the potential V ₁₃ to the transfer control electrode, and charges to the photoelectric conversion layer. Accumulated,
In the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode, the potential V ₂₂ is applied to the charge storage electrode, the potential V ₂₃ is applied to the transfer control electrodes are accumulated in the photoelectric conversion layer The image pickup device according to [A08], wherein the electric charge is read out to the control unit via the first electrode.
However, when the potential of the first electrode is higher than that of the second electrode,
V ₁₂ > V ₁₃ and V ₂₂ ≤ V ₂₃ ≤ V ₂₁
When the potential of the first electrode is lower than that of the second electrode,
V ₁₂ <V ₁₃ and V ₂₂ ≧ V ₂₃ ≧ V ₂₁
Is.
[A10] << Charge discharge electrode >>
The image pickup device according to any one of [A01] to [A09], further comprising a charge discharge electrode connected to a photoelectric conversion layer and arranged apart from a first electrode and a charge storage electrode.
[A11] The image pickup device according to [A10], wherein the charge discharge electrode is arranged so as to surround the first electrode and the charge storage electrode.
[A12] The photoelectric conversion layer extends in the second opening provided in the insulating layer and is connected to the charge discharge electrode.
The edge of the top surface of the charge discharge electrode is covered with an insulating layer.
The charge discharge electrode is exposed on the bottom surface of the second opening.
When the surface of the insulating layer in contact with the top surface of the charge discharge electrode is the third surface and the surface of the insulating layer in contact with the portion of the photoelectric conversion layer facing the charge storage electrode is the second surface, the side surface of the second opening is The image pickup device according to [A10] or [A11], which has an inclination extending from the third surface to the second surface.
[A13] << Control of potential of first electrode, charge storage electrode and charge discharge electrode >>
It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode, the charge storage electrode, and the charge discharge electrode are connected to the drive circuit.
In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode, the potential V ₁₂ is applied to the charge storage electrode, the potential V ₁₄ is applied to the charge discharging electrodes, electric charges accumulated in the photoelectric conversion layer Being done
In the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode, the potential V ₂₂ is applied to the charge storage electrode, the potential V ₂₄ is applied to the charge discharging electrode, which is accumulated in the photoelectric conversion layer The imaging device according to any one of [A10] to [A12], wherein the electric charge is read out to the control unit via the first electrode.
However, when the potential of the first electrode is higher than that of the second electrode,
V ₁₄ > V ₁₁ and V ₂₄ <V ₂₁
When the potential of the first electrode is lower than that of the second electrode,
V ₁₄ <V ₁₁ and V ₂₄ > V ₂₁
Is.
[A14] << Electrode segment for charge storage >>
The image pickup device according to any one of [A01] to [A13], wherein the charge storage electrode is composed of a plurality of charge storage electrode segments.
[A15] When the potential of the first electrode is higher than that of the second electrode, the potential applied to the charge storage electrode segment located closest to the first electrode during the charge transfer period is the farthest from the first electrode. Higher than the potential applied to the charge storage electrode segment located at
When the potential of the first electrode is lower than that of the second electrode, the potential applied to the charge storage electrode segment located closest to the first electrode is located farthest from the first electrode during the charge transfer period. The imaging device according to [A14], which is lower than the potential applied to the charge storage electrode segment.
[B01] The semiconductor substrate is provided with at least a floating diffusion layer and an amplification transistor constituting a control unit.
The image pickup device according to any one of [A01] to [A15], wherein the first electrode is connected to the floating diffusion layer and the gate portion of the amplification transistor.
[B02] The semiconductor substrate is further provided with a reset transistor and a selection transistor constituting a control unit.
The stray diffusion layer is connected to one source / drain region of the reset transistor and
The image pickup according to [B01], wherein one source / drain region of the amplification transistor is connected to one source / drain region of the selection transistor, and the other source / drain region of the selection transistor is connected to the signal line. element.
[B03] The image pickup device according to any one of [A01] to [B02], wherein the size of the charge storage electrode is larger than that of the first electrode.
[B04] The image pickup device according to any one of [A01] to [B03], wherein light is incident from the second electrode side and a light shielding layer is formed on the light incident side from the second electrode.
[B05] The image pickup device according to any one of [A01] to [B03], wherein light is incident from the second electrode side and light is not incident on the first electrode.
[B06] The image pickup device according to [B05], which is on the light incident side of the second electrode and has a light-shielding layer formed above the first electrode.
[B07] An on-chip microlens is provided above the charge storage electrode and the second electrode.
The image sensor according to [B05], wherein the light incident on the on-chip micro lens is focused on the charge storage electrode.
[C01] << Stacked image sensor >>
A stacked image sensor having at least one image sensor according to any one of [A01] to [B07].
[D01] << Solid-state image sensor ... First aspect >>
A solid-state image pickup device including a plurality of image pickup devices according to any one of [A01] to [B04].
[D02] << Solid-state image sensor ... Second aspect >>
A solid-state image pickup device including a plurality of stacked image pickup devices according to [C01].
[E01] << Driving method of solid-state image sensor >>
It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode that is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer.
This is a method of driving a solid-state image pickup device provided with a plurality of image pickup elements having a structure in which light is incident from the second electrode side and light is not incident on the first electrode.
In all the image sensors, while accumulating charges in the photoelectric conversion layer all at once, the charges in the first electrode are discharged to the outside of the system, and then.
In all the image pickup devices, the electric charge accumulated in the photoelectric conversion layer is transferred to the first electrode all at once, and after the transfer is completed, the electric charge transferred to the first electrode in each image sensor is sequentially read out.
A method of driving a solid-state image sensor that repeats each process.

11 ... 1st electrode, 12 ... Charge storage electrode, 12A, 12B, 12C ... Charge storage electrode segment, 13, 13A, 13B ... Transfer control electrode (charge transfer electrode), 14 ... Charge discharge electrode, 15 ... Photoelectric conversion layer, 16 ... Second electrode, 41 ... N-type semiconductor region constituting the second image pickup element, 43 ... Third image pickup element. n-type semiconductor region, 42, 44, 73 ... p ⁺ layer, FD ₁ , FD ₂ , FD ₃ , 45C, 46C ... floating diffusion layer, TR1 _amp ... amplification transistor, TR1 _rst ... reset Transistor, TR1 _sel ... Selected transistor, 51 ... Reset transistor TR1 _rst gate, 51A ... Reset transistor TR1 _rst channel formation region, 51B, 51C ... Reset transistor TR1 _rst source / drain regions, 52 ... gate section of the amplifying transistor TR1 _{# 038,} 52A ... amplifying transistor TR1 _{# 038} channel formation region, 52B, 52C ... source / drain region of the amplifying transistor TR1 _{# 038,} 53 ... selection Transistor TR1 _sel gate, 53A ... channel formation region of selective transistor TR1 _sel , 53B, 53C ... source / drain region of selective transistor TR1 _sel , TR2 _trs ... transfer transistor, 45 ... transfer transistor Gate part, TR2 _rst ... reset transistor, TR2 _amp ... amplification transistor, TR2 _sel ... selection transistor, TR3 _trs ... transfer transistor, 46 ... transfer transistor gate, TR3 _rst ...・ ・ Reset transistor, TR3 _amp・ ・ ・ Amplification transistor, TR3 _sel・ ・ ・ Select transistor, V _DD・ ・ ・ Power supply, RST ₁ , RST ₂ , RST ₃・ ・ ・ Reset line, SEL ₁ , SEL ₂ , SEL ₃ ... Selection line 117, VSL ₁ , VSL ₂ , VSL ₃ ... Signal line, TG ₂ , TG ₃ ... Transfer gate line, V _OA , V _OT , V _OU ... Wiring, 61. .. Contact hole part, 62 ... Wiring layer, 63, 64, 68A ... Pad part, 65, 68B ... Connection hole, 66, 67, 69 ... Connection part, 70 ... Semiconductor substrate , 70A ... First surface (front surface) of the semiconductor substrate, 70B ... Second surface (back surface) of semiconductor substrate, 71 ... element separation region, 72 ... oxide film, 74 ... HfO ₂ film, 75 ... insulating film, 76 ... interlayer insulating layer, 77, 78, 81 ... Interlayer insulation layer, 82 ... Insulation layer, 82a ... First surface of insulation layer, 82b ... Second surface of insulation layer, 82c ... Third surface of insulation layer, 83 ... protective layer, 84, 84A, 84B, 84C ... opening, 85, 85A ... second opening, 90 ... on-chip micro lens, 91 ... interlayer insulation layer 81 Various imaging element components located below, 92 ... light-shielding layer, 100 ... solid-state imaging device, 101 ... stacked imaging element, 111 ... imaging region, 112 ... vertical drive circuit , 113 ... Column signal processing circuit, 114 ... Horizontal drive circuit, 115 ... Output circuit, 116 ... Drive control circuit, 118 ... Horizontal signal line, 200 ... Electronic equipment (camera) , 201 ... Solid-state imaging device, 210 ... Optical lens, 211 ... Shutter device, 212 ... Drive circuit, 213 ... Signal processing circuit

Claims (27)

It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode that is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer.
The photoelectric conversion layer is an image sensor having a laminated layer structure of a lower semiconductor layer and an upper photoelectric conversion layer from the first electrode side. The image pickup device according to claim 1, wherein the material constituting the lower semiconductor layer has a bandgap value of 3.0 eV or more and has a higher mobility than the material constituting the upper photoelectric conversion layer. The image pickup device according to claim 1 or 2, wherein the lower semiconductor layer is made of an oxide semiconductor material. Any one of claims 1 to 3 in which the material constituting the lower semiconductor layer located above the charge storage electrode and the material constituting the lower semiconductor layer located above the first electrode are different. The image pickup device according to the section. It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode that is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer.
An image sensor further including a charge discharge electrode connected to a photoelectric conversion layer, separated from the first electrode and the charge storage electrode, and arranged so as to surround the first electrode and the charge storage electrode. .. The photoelectric conversion layer extends in the second opening provided in the insulating layer and is connected to the charge discharge electrode.
The edge of the top surface of the charge discharge electrode is covered with an insulating layer.
The charge discharge electrode is exposed on the bottom surface of the second opening.
When the surface of the insulating layer in contact with the top surface of the charge discharge electrode is the third surface and the surface of the insulating layer in contact with the portion of the photoelectric conversion layer facing the charge storage electrode is the second surface, the side surface of the second opening is The image pickup device according to claim 5, which has an inclination extending from the third surface to the second surface. It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode, the charge storage electrode, and the charge discharge electrode are connected to the drive circuit.
In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode, the potential V ₁₂ is applied to the charge storage electrode, the potential V ₁₄ is applied to the charge discharging electrodes, electric charges accumulated in the photoelectric conversion layer Being done
In the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode, the potential V ₂₂ is applied to the charge storage electrode, the potential V ₂₄ is applied to the charge discharging electrode, which is accumulated in the photoelectric conversion layer The imaging device according to claim 5 or 6, wherein the electric charge is read out to the control unit via the first electrode.
However, when the potential of the first electrode is higher than the potential of the second electrode,
V ₁₄ > V ₁₁ and V ₂₄ <V ₂₁
When the potential of the first electrode is lower than the potential of the second electrode,
V ₁₄ <V ₁₁ and V ₂₄ > V ₂₁
Is. It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode that is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer.
An image sensor in which light is incident from the second electrode side, a light-shielding layer is formed on the light incident side of the second electrode, and light is not incident on the first electrode. The image pickup device according to claim 8, wherein a light-shielding layer is formed above the first electrode on the light incident side of the second electrode, and no light is incident on the first electrode. It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode that is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer.
An on-chip micro lens is provided above the charge storage electrode and the second electrode.
An image sensor in which light incident on an on-chip micro lens is focused on a charge storage electrode and no light is incident on the first electrode. It also has a semiconductor substrate,
The image pickup device according to any one of claims 1 to 10, wherein the photoelectric conversion unit is arranged above the semiconductor substrate. The image pickup device according to any one of claims 1 to 11, wherein the first electrode extends in an opening provided in the insulating layer and is connected to the photoelectric conversion layer. The image pickup device according to any one of claims 1 to 11, wherein the photoelectric conversion layer extends in an opening provided in the insulating layer and is connected to the first electrode. The edge of the top surface of the first electrode is covered with an insulating layer.
The first electrode is exposed on the bottom surface of the opening.
When the surface of the insulating layer in contact with the top surface of the first electrode is the first surface and the surface of the insulating layer in contact with the portion of the photoelectric conversion layer facing the charge storage electrode is the second surface, the side surface of the opening is the first surface. The image pickup device according to claim 13, which has an inclination extending from the first surface to the second surface. The image pickup device according to claim 14, wherein the side surface of the opening having an inclination extending from the first surface to the second surface is located on the charge storage electrode side. It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode and the charge storage electrode are connected to the drive circuit.
In the charge accumulation period, the driving circuit, the potential V ₁₁ is applied to the first electrode, the potential V ₁₂ is applied to the charge storage electrode, charges are accumulated in the photoelectric conversion layer,
During the charge transfer period, the potential V ₂₁ is applied to the first electrode from the drive circuit, the potential V ₂₂ is applied to the charge storage electrode, and the charge accumulated in the photoelectric conversion layer is transferred to the control unit via the first electrode. The image pickup device according to any one of claims 1 to 15, which is read out from the above.
However, when the potential of the first electrode is higher than the potential of the second electrode,
V ₁₂ ≥ V ₁₁ and V ₂₂ <V ₂₁
When the potential of the first electrode is lower than the potential of the second electrode,
V ₁₂ ≤ V ₁₁ and V ₂₂ > V ₂₁
Is. A transfer control electrode is arranged between the first electrode and the charge storage electrode so as to be separated from the first electrode and the charge storage electrode, and is arranged so as to face the photoelectric conversion layer via an insulating layer. The imaging device according to any one of claims 1 to 16, further provided. It is further provided with a control unit provided on a semiconductor substrate and having a drive circuit.
The first electrode, the charge storage electrode, and the transfer control electrode are connected to the drive circuit.
During the charge storage period, the drive circuit applies the potential V ₁₁ to the first electrode, the potential V ₁₂ to the charge storage electrode, the potential V ₁₃ to the transfer control electrode, and charges to the photoelectric conversion layer. Accumulated,
In the charge transfer period, the driving circuit, the potential V ₂₁ is applied to the first electrode, the potential V ₂₂ is applied to the charge storage electrode, the potential V ₂₃ is applied to the transfer control electrodes are accumulated in the photoelectric conversion layer The imaging device according to claim 17, wherein the electric charge is read out to the control unit via the first electrode.
However, when the potential of the first electrode is higher than the potential of the second electrode,
V ₁₂ > V ₁₃ and V ₂₂ ≤ V ₂₃ ≤ V ₂₁
When the potential of the first electrode is lower than the potential of the second electrode,
V ₁₂ <V ₁₃ and V ₂₂ ≧ V ₂₃ ≧ V ₂₁
Is. The image pickup device according to any one of claims 1 to 18, wherein the charge storage electrode is composed of a plurality of charge storage electrode segments. When the potential of the first electrode is higher than the potential of the second electrode, the potential applied to the charge storage electrode segment located closest to the first electrode during the charge transfer period is the farthest from the first electrode. Higher than the potential applied to the charge storage electrode segment located at
When the potential of the first electrode is lower than the potential of the second electrode, the potential applied to the charge storage electrode segment located closest to the first electrode during the charge transfer period is the farthest from the first electrode. The imaging device according to claim 19, wherein the potential is lower than the potential applied to the charge storage electrode segment located in. The semiconductor substrate is provided with at least a floating diffusion layer and an amplification transistor constituting a control unit.
The image pickup device according to any one of claims 1 to 20, wherein the first electrode is connected to a floating diffusion layer and a gate portion of an amplification transistor. The semiconductor substrate is further provided with a reset transistor and a selection transistor that form a control unit.
The stray diffusion layer is connected to one source / drain region of the reset transistor and
21. The imaging according to claim 21, wherein one source / drain region of the amplification transistor is connected to one source / drain region of the selection transistor, and the other source / drain region of the selection transistor is connected to the signal line. element. The image pickup device according to any one of claims 1 to 22, wherein the size of the charge storage electrode is larger than that of the first electrode. A stacked image sensor having at least one image sensor according to any one of claims 1 to 23. A solid-state image pickup device including a plurality of image pickup devices according to any one of claims 1 to 23. A solid-state image pickup device including a plurality of stacked image pickup devices according to claim 24. It is provided with a photoelectric conversion unit in which a first electrode, a photoelectric conversion layer, and a second electrode are laminated.
The photoelectric conversion unit further includes a charge storage electrode that is arranged apart from the first electrode and is arranged so as to face the photoelectric conversion layer via an insulating layer.
This is a method of driving a solid-state image pickup device provided with a plurality of image pickup elements having a structure in which light is incident from the second electrode side and light is not incident on the first electrode.
In all the image sensors, while accumulating charges in the photoelectric conversion layer all at once, the charges in the first electrode are discharged to the outside of the system, and then.
In all the image pickup devices, the electric charge accumulated in the photoelectric conversion layer is transferred to the first electrode all at once, and after the transfer is completed, the electric charge transferred to the first electrode in each image sensor is sequentially read out.
A method of driving a solid-state image sensor that repeats each process.