JP2020173170A - Optical measurement device, optical measurement method, and optical measurement program - Google Patents

Abstract

To provide an optical measurement device, an optical measurement method, and an optical measurement program which can suppress deterioration in measurement accuracy.SOLUTION: An optical measurement device 100 includes: a sensor head 30 for condensing reflection light reflected by an object TA; a light reception part 40 which is configurated in such a manner that each of a plurality of pixels can detect the amount of received light and which obtains a received light amount distribution signal Srd of the condensed light for each pixel; and a restoration part 51 for restoring a received light amount distribution original signal Srp from the received light amount distribution signal Srd on the basis of a light reception part characteristic signal Src measured by using the light reception part 40.SELECTED DRAWING: Figure 1

Description

The present invention relates to an optical measuring device, an optical measuring method, and an optical measuring program.

Conventionally, as an optical measuring device, a light source that generates irradiation light having a plurality of wavelength components and an axial chromatic aberration are generated with respect to the irradiation light from the light source, and at least a part thereof is arranged on an extension line of the optical axis. A sensor head that receives the reflected light from the measurement object, a light receiving part that separates the reflected light received by the sensor head into each wavelength component and receives the light of each wavelength component, a light source, a light receiving part, and a sensor. It is known to include a light source unit that optically connects the head and a processing unit that calculates the distance from the optical system to the object to be measured based on the amount of light received by each wavelength component in the light receiving unit. (See Patent Document 1). This optical measuring device compares the received light amount of each of the plurality of wavelength components in the received light waveform with the reference value of the received light amount, and the amount of change of the received light amount with respect to the reference value is predetermined for any of the plurality of wavelength components. If it is equal to or higher than the specified threshold value, an abnormality in the received light waveform is detected.

JP-A-2017-173159

In the optical measuring device described in Patent Document 1, the distance from the sensor head to the object is measured based on the peak light receiving amount in the light receiving amount distribution signal (waveform) obtained by the light receiving unit.

However, before the light received by the sensor head reaches the light receiving sensor (imaging element) of the light receiving unit, a component of the device characteristic waveform caused by a device such as a spectroscope is included. As a result, in the light receiving amount distribution waveform of the light receiving portion including the component of the device characteristic waveform, for example, the half width becomes large, and the measurement accuracy may decrease. In addition, the device characteristics vary from individual to optical measuring device.

Therefore, an object of the present invention is to provide an optical measuring device, an optical measuring method, and an optical measuring program capable of suppressing a decrease in measurement accuracy.

The optical measuring device according to one aspect of the present invention is an optical system that collects the reflected light reflected by an object, and a light receiving unit that is configured so that each of a plurality of pixels can detect the amount of received light. A light receiving unit that obtains a light receiving amount distribution signal for each pixel for the emitted light, and a restoring unit that restores the light receiving amount distribution original signal from the light receiving amount distribution signal based on the light receiving unit characteristic signal measured using the light receiving unit. , Equipped with.

According to this aspect, the light receiving amount distribution original signal is restored from the light receiving amount distribution signal based on the light receiving part characteristic signal measured by using the light receiving unit. Here, the inventors of the present invention have found that the light-receiving amount distribution signal obtained by the light-receiving part includes a light-receiving part characteristic signal. Further, the inventors of the present invention have found that the light-receiving part characteristic signal can be removed from the light-receiving amount distribution signal obtained by the light-receiving part by measuring the light-receiving part characteristic signal in advance using the light-receiving part. Therefore, it is possible to restore the light-receiving amount distribution original signal from which the light-receiving part characteristic signal has been removed, based on the light-receiving part characteristic signal measured by using the light-receiving part. Therefore, since the half-value width of the restored light-receiving amount distribution original signal is smaller than that of the light-receiving amount distribution original signal, it is possible to suppress a decrease in measurement accuracy based on this light-receiving amount distribution original signal.

In the above-described embodiment, the optical system causes chromatic aberration along the optical axis direction with respect to light containing a plurality of wavelength components, irradiates the object with the light causing the chromatic aberration, and the light receiving portion is focused. It may be configured to obtain a light receiving amount distribution signal for each wavelength component of light.

According to this aspect, the optical system causes chromatic aberration along the optical axis direction with respect to light containing a plurality of wavelength components, irradiates the object with the light causing the chromatic aberration, and the light receiving portion is focused. It is configured to obtain a received light distribution signal for each wavelength component of the emitted light. As a result, it is possible to easily realize a white confocal optical measuring device that suppresses a decrease in measurement accuracy.

In the above-described embodiment, the restoration unit performs a deconvolution calculation of the light receiving unit characteristic function representing the light receiving unit characteristic signal and the light receiving amount function representing the light receiving amount distribution signal, and obtains the light receiving amount original function representing the light receiving amount distribution original signal. You may.

According to this aspect, the deconvolution calculation of the light receiving amount function and the light receiving part characteristic function is performed to obtain the light receiving amount original function. As described above, in the light receiving amount distribution signal, the light receiving portion characteristic signal is combined with the light receiving amount distribution original signal. That is, the inventors of the present invention have found that the light receiving amount function is a combined product of the light receiving portion characteristic function and the light receiving amount original function, that is, a convolution. Therefore, the light receiving amount original function can be obtained by performing the deconvolution calculation of the light receiving amount function and the light receiving portion characteristic function, and the light receiving amount distribution original signal can be easily restored.

In the above-described embodiment, the light receiving unit characteristic function is selected based on the wavelength component of the peak light receiving amount in the light receiving amount distribution signal among a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit. It may be obtained by using the received light receiving part characteristic signal.

According to this aspect, the light receiving unit characteristic function is based on the wavelength component of the peak light receiving amount in the light receiving amount distribution signal among a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit. It is obtained by using the selected light receiving part characteristic signal. As a result, the light receiving unit characteristic function can be easily obtained from the light receiving unit characteristic signal having a wavelength corresponding to the wavelength component of the peak light receiving amount in the light receiving amount distribution signal.

In the above-described embodiment, the light receiving unit characteristic function may be obtained by using a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit.

According to this aspect, the light receiving unit characteristic function is obtained by using a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit. As a result, even when there is no light receiving unit characteristic signal corresponding to the wavelength component of the peak light receiving amount in the light receiving amount distribution signal, the light receiving unit characteristic function can be obtained by complementing the light receiving unit characteristic signals at the wavelengths before and after.

In the above-described embodiment, a storage unit for storing information regarding the light receiving unit characteristic signal may be further provided.

According to this aspect, information about the light receiving unit characteristic signal is stored. As a result, the response time for restoring the light reception amount distribution original signal can be shortened.

In the above-described embodiment, a measuring unit that measures the distance from the optical measuring device to the object based on the received light amount distribution original signal may be further provided.

According to this aspect, the distance from the optical measuring device to the object is measured based on the received light amount distribution original signal. As a result, the accuracy of the measured distance can be improved as compared with the distance based on the received light amount distribution signal.

Further, the optical measurement method according to another aspect of the present invention is an optical measurement method of an optical measurement device including an optical system and a light receiving unit, and collects reflected light reflected by an object by the optical system. Measurement is performed using the optical step and the light receiving step for obtaining a light receiving amount distribution signal for each pixel for the collected light by the light receiving unit configured so that each of a plurality of pixels can detect the light receiving amount. It includes a restoration step of restoring the light receiving amount distribution original signal from the light receiving amount distribution signal based on the light receiving unit characteristic signal.

According to this aspect, the light receiving amount distribution original signal is restored from the light receiving amount distribution signal based on the light receiving part characteristic signal measured by using the light receiving unit. Here, the inventors of the present invention have found that the light-receiving amount distribution signal obtained by the light-receiving part includes a light-receiving part characteristic signal. Further, the inventors of the present invention have found that the light-receiving part characteristic signal can be removed from the light-receiving amount distribution signal obtained by the light-receiving part by measuring the light-receiving part characteristic signal in advance using the light-receiving part. Therefore, it is possible to restore the light-receiving amount distribution original signal from which the light-receiving part characteristic signal has been removed, based on the light-receiving part characteristic signal measured by using the light-receiving part. Therefore, since the half-value width of the restored light-receiving amount distribution original signal is smaller than that of the light-receiving amount distribution original signal, it is possible to suppress a decrease in measurement accuracy based on this light-receiving amount distribution original signal.

In the above-described embodiment, the optical system causes chromatic aberration along the optical axis direction with respect to light containing a plurality of wavelength components, irradiates the object with the light causing the chromatic aberration, and the light receiving portion is focused. It may be configured to obtain a light receiving amount distribution signal for each wavelength component of light.

According to this aspect, the optical system causes chromatic aberration along the optical axis direction with respect to light containing a plurality of wavelength components, irradiates the object with the light causing the chromatic aberration, and the light receiving portion is focused. It is configured to obtain a received light distribution signal for each wavelength component of the emitted light. As a result, it is possible to easily realize a white confocal optical measurement method that suppresses a decrease in measurement accuracy.

In the above-described embodiment, the restoration step performs a deconvolution calculation of the light receiving part characteristic function representing the light receiving part characteristic signal and the light receiving amount function representing the light receiving amount distribution signal to obtain the light receiving amount original function representing the light receiving amount distribution original signal. May include that.

According to this aspect, the deconvolution calculation of the light receiving amount function and the light receiving part characteristic function is performed to obtain the light receiving amount original function. As described above, in the light receiving amount distribution signal, the light receiving portion characteristic signal is combined with the light receiving amount distribution original signal. That is, the inventors of the present invention have found that the light receiving amount function is a combined product of the light receiving portion characteristic function and the light receiving amount original function, that is, a convolution. Therefore, the light receiving amount original function can be obtained by performing the deconvolution calculation of the light receiving amount function and the light receiving portion characteristic function, and the light receiving amount distribution original signal can be easily restored.

In the above-described embodiment, the light receiving unit characteristic function is selected based on the wavelength component of the peak light receiving amount in the light receiving amount distribution signal among a plurality of light receiving unit characteristic signals obtained by incident light of different wavelengths on the light receiving unit. It may be obtained by using the light receiving part characteristic signal.

According to this aspect, the light receiving unit characteristic function is based on the wavelength component of the peak light receiving amount in the light receiving amount distribution signal among a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit. It is obtained by using the selected light receiving part characteristic signal. As a result, the light receiving unit characteristic function can be easily obtained from the light receiving unit characteristic signal having a wavelength corresponding to the wavelength component of the peak light receiving amount in the light receiving amount distribution signal.

In the above-described embodiment, the light receiving unit characteristic function may be obtained by using a plurality of light receiving unit characteristic signals obtained by incident light of different wavelengths on the light receiving unit.

According to this aspect, the light receiving unit characteristic function is obtained by using a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit. As a result, even when there is no light receiving unit characteristic signal corresponding to the wavelength component of the peak light receiving amount in the light receiving amount distribution signal, the light receiving unit characteristic function can be obtained by complementing the light receiving unit characteristic signals at the wavelengths before and after.

In the above-described embodiment, a storage step of storing information regarding the light receiving unit characteristic signal in the storage unit may be further included.

According to this aspect, information about the light receiving unit characteristic signal is stored. As a result, the response time for restoring the light reception amount distribution original signal can be shortened.

In the above-described embodiment, a measurement step of measuring the distance from the optical measuring device to the object based on the received light amount distribution original signal may be further included.

According to this aspect, the distance from the optical measuring device to the object is measured based on the received light amount distribution original signal. As a result, the accuracy of the measured distance can be improved as compared with the distance based on the received light amount distribution signal.

Further, the optical measurement program according to another aspect of the present invention is an optical measurement program of an optical measurement device including an optical system and a light receiving unit, which is executed by a computer, and the reflected light reflected by an object is used as an optical system. A light receiving step for obtaining a light receiving amount distribution signal for each pixel for the collected light by a light receiving step configured by each of a plurality of pixels so that the light receiving amount can be detected, and a light receiving unit. It includes a restoration step of restoring the light-receiving amount distribution original signal from the light-receiving amount distribution signal based on the light-receiving part characteristic signal measured in use.

According to this aspect, the light receiving amount distribution original signal is restored from the light receiving amount distribution signal based on the light receiving part characteristic signal measured by using the light receiving unit. Here, the inventors of the present invention have found that the light-receiving amount distribution signal obtained by the light-receiving part includes a light-receiving part characteristic signal. Further, the inventors of the present invention have found that the light-receiving part characteristic signal can be removed from the light-receiving amount distribution signal obtained by the light-receiving part by measuring the light-receiving part characteristic signal in advance using the light-receiving part. Therefore, it is possible to restore the light-receiving amount distribution original signal from which the light-receiving part characteristic signal has been removed, based on the light-receiving part characteristic signal measured by using the light-receiving part. Therefore, since the half-value width of the restored light-receiving amount distribution original signal is smaller than that of the light-receiving amount distribution original signal, it is possible to suppress a decrease in measurement accuracy based on this light-receiving amount distribution original signal.

According to the present invention, it is possible to suppress a decrease in measurement accuracy.

FIG. 1 is a configuration diagram illustrating a schematic configuration of an optical measuring device according to an embodiment. FIG. 2 is a waveform diagram illustrating a light receiving amount distribution signal obtained by the light receiving unit shown in FIG. FIG. 3 is a waveform diagram illustrating a light receiving amount distribution signal obtained by the light receiving unit. FIG. 4 is a waveform diagram illustrating a light receiving portion characteristic signal S included in the light receiving amount distribution signal shown in FIG. FIG. 5 is a waveform diagram illustrating a light reception amount distribution original signal of the light collected by the sensor head. FIG. 6 is a conceptual diagram for explaining an example of the deconvolution method. FIG. 7 is a conceptual diagram for explaining an example of a method of creating a light receiving unit characteristic matrix. FIG. 8 is a conceptual diagram for explaining another example of the method of creating the light receiving unit characteristic matrix. FIG. 9 is a flowchart illustrating a schematic operation of measuring the distance to an object in the optical measuring device according to the embodiment.

An embodiment of the present invention will be described below. In the description of the drawings below, the same or similar parts are represented by the same or similar reference numerals. However, the drawings are schematic. Therefore, the specific dimensions and the like should be determined in light of the following explanations. In addition, it goes without saying that the drawings include parts having different dimensional relationships and ratios from each other. Furthermore, the technical scope of the present invention should not be construed as limited to the embodiment.

First, the configuration of the optical measuring device according to the present embodiment will be described with reference to FIG. FIG. 1 is a configuration diagram illustrating a schematic configuration of an optical measuring device 100 according to an embodiment.

As shown in FIG. 1, the optical measuring device 100 includes a light source 10, a light guide unit 20, a sensor head 30, a light receiving unit 40, a control unit 50, a storage unit 60, an operation unit 70, and a display unit. 80 and. The light source 10, a part of the light guide unit 20, the light receiving unit 40, the control unit 50, the storage unit 60, the operation unit 70, and the display unit 80 are housed in the controller 90.

However, each part of the optical measuring device 100 is not limited to the configuration in which the sensor head 30 and the controller 90 are separately housed. For example, each part of the optical measuring device 100 may be housed in three or more parts.

The optical measuring device 100 measures the distance from the device, specifically, the sensor head 30 to the object TA in a predetermined measurement cycle. Further, the optical measuring device 100 may measure a change in distance with respect to a certain position, that is, a displacement in a predetermined measurement cycle.

The light source 10 is configured to emit light containing a plurality of wavelength components. The light source 10 operates based on a control signal input from the control unit 50, and changes the amount of light based on the control signal, for example.

The light source 10 preferably emits light containing a plurality of wavelength components. In this case, the light source 10 is configured to include, for example, a white LED (Light Emitting Diode) to generate white light. However, the light emitted by the light source 10 may be any light that includes a wavelength range that covers the distance range required for the optical measuring device 100, and is not limited to white light.

The light guide unit 20 is for propagating light. The light guide unit 20 includes, for example, a first cable 21, a second cable 22, a third cable 23, and an optical coupler 24.

One end (the left end in FIG. 1) of the first cable 21 is optically connected to the light source 10. One end (the right end in FIG. 1) of the second cable 22 is optically connected to the sensor head 30. One end (left end in FIG. 1) of the third cable 23 is optically connected to the light receiving portion 40. The other end of the first cable 21 (right end in FIG. 1), the other end of the third cable 23 (right end in FIG. 1), and the other end of the second cable 22 (left end in FIG. 1) are connected via an optical coupler 24. Is optically coupled.

The optical coupler 24 transmits the light incident from the first cable 21 to the second cable 22, and also divides the light incident from the second cable 22 and transmits the light incident from the second cable 22 to the first cable 21 and the third cable 23, respectively. .. The light transmitted from the second cable 22 to the first cable 21 by the optical coupler 24 is terminated by the light source 10.

The optical coupler 24 is configured to include, for example, a fusion-stretching type (melt-stretching type) optical coupler. On the other hand, the first cable 21, the second cable 22, and the third cable 23 are each composed of, for example, an optical fiber. Each optical fiber may be a single core having a single core or a multi-core having a plurality of cores.

The sensor head 30 is detachably configured to be attached to and detached from the controller 90 via the second cable 22.

The sensor head 30 includes, for example, a collimator lens 31, a diffraction lens 32, and an objective lens 33. The collimator lens 31, the diffractive lens 32, and the objective lens 33 are configured to irradiate the object TA with light. Further, the collimator lens 31, the diffractive lens 32, and the objective lens 33 are configured to collect the reflected light reflected by the object TA. The sensor head 30 according to the present embodiment corresponds to an example of the "optical system" of the present invention.

The collimator lens 31 is configured to convert the light incident from the second cable into parallel light. The collimator lens 31 is configured to include a single or a plurality of lenses. The collimator lens 31 is also for condensing the light incident on the sensor head 30.

The diffractive lens 32 is configured to cause chromatic aberration along the optical axis direction in parallel light. The objective lens 33 is configured to collect and irradiate the object TA with the light that causes chromatic aberration. Since axial chromatic aberration is generated by the diffractive lens 32, the light emitted from the objective lens 33 has a focal point at a different distance (position) for each wavelength.

In the example shown in FIG. 1, light L1 having a first wavelength having a relatively long focal length and light L2 having a second wavelength having a relatively short focal length are shown. The light L1 of the first wavelength is focused (focused) on the surface of the object TA, while the light L2 of the second wavelength is focused (focused) in front of the object TA.

The light reflected on the surface of the object TA passes through the objective lens 33 and the diffractive lens 32, is collected by the collimator lens 31, and is incident on the second cable 22. The light L1 of the first wavelength of the reflected light is focused on the end face of the second cable 22 which is confocal, and most of it is incident on the second cable 22. On the other hand, other wavelengths are out of focus at the end face of the second cable 22 and do not enter the second cable 22. A part of the reflected light incident on the second cable 22 is transmitted to the third cable 23 by the optical coupler 24 and emitted to the light receiving unit 40.

When the second cable 22 is an optical fiber, its core corresponds to a pinhole. Therefore, by reducing the core diameter of the optical fiber, the pinhole that collects the reflected light becomes small, and light having a wavelength focused on the surface of the object TA can be stably detected.

The light receiving unit 40 is configured to obtain a light receiving amount distribution signal, which will be described later, with respect to the light collected by the sensor head 30. The light collected by the sensor head 30 is, for example, the reflected light reflected by the object TA. The light receiving unit 40 includes, for example, a collimator lens 41, a spectroscope (diffraction grating) 42, an adjusting lens 43, a light receiving sensor 44, and a processing circuit 45.

The collimator lens 41 is configured to convert the light emitted from the third cable 23 into parallel light. The spectroscope 42 is configured to disperse (separate) this parallel light for each wavelength component. The adjusting lens 43 is configured to adjust the spot diameter of the dispersed wavelength of light.

The light receiving sensor 44 is configured to be able to detect the amount of light received for each wavelength component of the dispersed light. The light receiving sensor 44 includes a plurality of light receiving elements. The light receiving elements are arranged one-dimensionally corresponding to the spectral direction of the spectroscope 42. As a result, each light receiving element is arranged corresponding to the light of each wavelength component dispersed, and the light receiving sensor 44 can detect the amount of light received for each wavelength component.

One light receiving element of the light receiving sensor 44 corresponds to one pixel. Therefore, it can be said that the light receiving sensor 44 is configured so that each of the plurality of pixels can detect the light receiving amount. The light receiving elements are not limited to the case where they are arranged in one dimension, and may be arranged in two dimensions. It is preferable that the light receiving elements are arranged two-dimensionally on the detection surface including the spectral direction of the spectroscope 42, for example.

Each light receiving element accumulates an electric charge according to the amount of light received during a predetermined exposure time based on a control signal input from the processing circuit 45. Then, each light receiving element outputs an electric signal corresponding to the accumulated electric charge during the non-exposure time, that is, during the non-exposure time, based on the control signal input from the processing circuit 45. As a result, the amount of light received during the exposure time is converted into an electric signal.

The processing circuit 45 is configured to control light reception by the light receiving sensor 44. Further, the processing circuit 45 is configured to perform signal processing for outputting an electric signal input from each light receiving element of the light receiving sensor 44 to the control unit 50. The processing circuit 45 includes, for example, an amplifier circuit and an A / D (Analog-to-Digital) conversion circuit. The amplifier circuit amplifies the electric signal input from each light receiving element with a predetermined gain. Then, the A / D conversion circuit samples, quantizes, and encodes the electric signal of each amplified light receiving element, and converts it into a digital signal. In this way, the light receiving amount detected by each light receiving element is converted into a digital value, and a light receiving amount distribution signal for each light receiving element, that is, for each pixel (hereinafter, simply referred to as “light receiving amount distribution signal”) is obtained. The processing circuit 45 outputs this received light amount distribution signal to the control unit 50. The predetermined exposure time of each light receiving element, the predetermined gain of the amplifier circuit, and the like can be changed based on the control signal.

Here, the measurement of the distance based on the received light amount distribution signal will be described with reference to FIG. FIG. 2 is a waveform diagram illustrating a light receiving amount distribution signal obtained by the light receiving unit 40 shown in FIG. In FIG. 2, the horizontal axis is a pixel (each light receiving element of the light receiving sensor 44), and the vertical axis is the light receiving amount.

As shown in FIG. 2, it is known that the received light distribution signal usually has a Gaussian distribution (also referred to as a normal distribution). Therefore, the received light amount distribution signal has a waveform in which the received light amount of a certain pixel peaks. As described above, since the distance from the sensor head 30 to the point of focus differs depending on the wavelength, the pixels of the peak light receiving amount in the light receiving amount distribution signal obtained from the light receiving sensor 44 are irradiated from the sensor head 30 and the object TA It is a pixel corresponding to the wavelength of light focused on. Then, the wavelength corresponds to the distance from the sensor head 30 to the object TA. In the example shown in FIG. 1, the light L1 having the first wavelength focused on the surface of the object TA appears as the wavelength of the peak light receiving amount of the light receiving amount distribution signal.

Specifically, when the peak light reception amount of the light reception amount distribution signal is 100%, the intermediate point at the intersection of the 50% light reception amount line and the light reception amount distribution signal is obtained, and the pixel of the intermediate point is used. Obtain the corresponding wavelength λ.

The relationship (correspondence) between the wavelength λ and the distance is stored in advance in the memory or the like of the control unit 50. By referring to this relationship, the measuring unit 52 measures the distance from the sensor head 30 to the object TA based on the wavelength λ of the received amount of the peak in the received amount distribution signal of the reflected light. As a result, in the light receiving amount distribution for each wavelength component of the reflected light, the influence of the wavelength component other than the peak on the distance can be suppressed, and the distance can be measured based on the wavelength component of the peak focused on the object TA. it can. Therefore, the distance from the optical measuring device 100 to the object TA can be measured stably and with high accuracy.

As described above, since the waveform of the received light distribution signal has (can be regarded as) a Gaussian distribution, it can be expressed (approximate) by a Gaussian function. In addition, the half width is known as an index showing the degree of spread of the Gaussian distribution. In the example shown in FIG. 2, the full width at half maximum is the length (width) of two intersections of the line of the light receiving amount of 50% of the peak (maximum value) of the light receiving amount and the light receiving amount distribution signal, that is, the full width at half maximum. is there. In the following description, the full width at half maximum shall mean the full width at half maximum, unless otherwise specified.

Here, ideally, the received light amount distribution signal preferably has a pulsed waveform in which the pixel corresponding to the wavelength of the light focused on the object TA peaks. In other words, it is ideal that the half width of the received light distribution signal is a value of substantially zero. If the half width of the received light amount distribution signal is a small value of approximately zero, it can be said that the measurement accuracy of the optical measuring device 100 is high, for example, even a slight difference in distance can be correctly measured as a different measured value. Therefore, the half width of the received light amount distribution signal serves as an index of measurement accuracy and measurement performance in the optical measuring device 100.

However, in reality, the waveform of the received light distribution signal is not pulsed due to various factors such as the optical performance of the optical system of the sensor head 30 and the optical performance of the spectroscope. Therefore, as shown in FIG. 2, the half-value width Whm of the received light amount distribution signal becomes large, and the distribution is widened at present.

Next, the relationship between the light receiving amount distribution signal obtained by the light receiving unit 40 and the light receiving amount distribution original signal will be described with reference to FIGS. 3 to 5. FIG. 3 is a waveform diagram illustrating the light receiving amount distribution signal Srd obtained by the light receiving unit 40. FIG. 4 is a waveform diagram illustrating the light receiving portion characteristic signal Src included in the light receiving amount distribution signal shown in FIG. FIG. 5 is a waveform diagram illustrating the light reception amount distribution original signal Srp of the light collected by the sensor head 30. In FIGS. 3 to 5, the horizontal axis represents pixels (each light receiving element of the light receiving sensor 44), and the vertical axis represents the amount of light received. Further, FIGS. 3 to 5 show an example in which the front surface and the back surface of the light-transmitting object TA such as glass are detected and the thickness of the object TA is measured.

As shown in FIG. 3, the light receiving amount distribution signal Srd obtained by the light receiving unit 40 is focused on a pixel (wavelength) focused on the front surface of the transparent object TA and on the back surface of the target TA. The peak of the amount of received light appears at two points with the pixel (wavelength). In this case, an intermediate point is obtained for each peak received amount, and the difference in distance from the wavelength corresponding to each peak received amount, that is, the thickness of the object TA is measured.

However, when the value of the half width is large in each Gaussian distribution for the two light received peaks, the two Gaussian distributions are not separated as shown in FIG. 3, and the above-mentioned intermediate point for each peak received light is obtained. I couldn't. Therefore, it may not be possible to measure the thickness of the object TA from the light receiving amount distribution signal Srd of the light receiving unit 40.

Here, the inventors of the present invention have found that the light receiving amount distribution signal Srd obtained by the light receiving unit 40 includes the light receiving unit characteristic signal Src. The light receiving unit characteristic signal Src is a process in which the light collected by the light receiving unit 40, specifically, the sensor head 30, is emitted from the third cable 23 and is incident on each light receiving element of the light receiving sensor 44. , A signal (component) synthesized in the light receiving amount distribution original signal Srp according to the characteristics of each device such as the collimator lens 41, the spectroscope 42, and the adjusting lens 43. The light receiving amount distribution original signal Srp is a light receiving amount distribution signal before the light collected by the sensor head 30 is affected by the characteristics of the light receiving unit 40.

In the example shown in FIGS. 3 to 5, the light receiving amount distribution signal Srd shown in FIG. 3 obtained by the light receiving unit 40 includes the light receiving unit characteristic signal Src shown in FIG. 4 before the light reaches the light receiving sensor 44. It has been synthesized. As shown in FIG. 5, since the light receiving amount distribution original signal Srp does not include the light receiving portion characteristic signal Src shown in FIG. 4, it is possible to obtain the above-mentioned intermediate point for each peak light receiving amount. .. Therefore, the thickness of the object TA can be measured from the received light amount distribution original signal Srp.

Returning to the description of FIG. 1, the control unit 50 is configured to control the operation of each unit of the optical measuring device 100. Further, the control unit 50 is configured to realize each function described later by executing a program stored in the storage unit 60 or the like. It is configured to realize each function described later by executing a program or the like. The control unit 50 includes, for example, a microprocessor such as a CPU (Central Processing Unit), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), a ROM (Read-Time Memory) Memory Memory Memory Memory It is configured to include a memory such as a memory.

Further, the control unit 50 includes, for example, a restoration unit 51 and a measurement unit 52 as its functional configuration.

The restoration unit 51 restores the light reception amount distribution original signal Srp shown in FIG. 5 from the light reception amount distribution signal Srd shown in FIG. 3 based on the light reception unit characteristic signal Src shown in FIG. 4 measured by the light receiving unit 40. It is configured to do. As described above, the light receiving amount distribution signal Srd includes the light receiving portion characteristic signal Src. Here, the inventors of the invention can remove the light receiving unit characteristic signal Src from the light receiving amount distribution signal Srd obtained by the light receiving unit 40 by measuring the light receiving unit characteristic signal Src in advance using the light receiving unit 40. I found. Therefore, based on the light receiving unit characteristic signal Src measured using the light receiving unit 40, it is possible to restore the light receiving amount distribution original signal Srp from which the light receiving unit characteristic signal Src has been removed. Therefore, the half-value width of the restored light-receiving amount distribution original signal Srp is smaller than that of the light-receiving amount distribution signal Srd. Therefore, it is possible to suppress a decrease in measurement accuracy based on this light-receiving amount distribution original signal Srp. it can.

More specifically, the restoration unit 51 performs a deconvolution calculation of the light receiving unit characteristic function representing the light receiving unit characteristic signal Src and the function representing the light receiving amount distribution signal Srd with the light receiving amount function (hereinafter, also simply referred to as "deconvolution"). Is performed, and the light receiving amount original function representing the light receiving amount distribution original signal Srp is obtained.

As described above, in the light receiving amount distribution signal Srd shown in FIG. 3, the light receiving portion characteristic signal Src shown in FIG. 4 is synthesized with the light receiving amount distribution original signal Srp shown in FIG. That is, the function representing the light receiving amount distribution signal Srd is the light receiving amount function h (x, d), the function representing the light receiving amount distribution original signal Srp is the light receiving amount original function g (x, d), and the function representing the light receiving part characteristic signal Src. The inventors of the present invention have found that the light receiving amount function h (x, d) can be expressed by the following equation (1), where is the light receiving unit characteristic function f (x). Note that x is an individual identifier, and d is the distance from the sensor head 30 to the object TA.
h (x, d) = f (x) * g (x, d) ... (1)

Equation (1) means that the light receiving amount function h (x, d) is a combined product of the light receiving part characteristic function f (x) and the light receiving amount original function g (x, d), that is, a convolution. There is. Therefore, the restoration unit 51 can obtain the light receiving amount original function g (x, d) by performing the deconvolution calculation of the light receiving amount function h (x, d) and the light receiving unit characteristic function f (x). , The light receiving amount distribution original signal Srp can be easily restored.

Here, with reference to FIG. 6, deconvolution for obtaining the light receiving amount original function g (x, d) will be described. FIG. 6 is a conceptual diagram for explaining an example of the deconvolution method.

In the following description, as an example of the deconvolution method, the light receiving quantity original function g (x, d) is obtained by using the Jacobi method or the Gauss-Seidel method. In the Jacobi method and the Gauss-Seidel method, it is common to use a matrix. Therefore, when deconvolution is performed using the Jacobi method or the Gauss-Seidel method, the light receiving amount matrix Y whose component is the value of the dependent variable of the light receiving amount function h (x, d) and the light receiving part characteristic function f. The light receiving part characteristic matrix Λ having the value of the dependent variable of (x) as a component is determined in advance. The light receiving unit characteristic matrix Λ is a diagonal matrix in which the peak light receiving amount of the light receiving amount distribution original signal Srp is arranged in the diagonal component. The details of the light receiving unit characteristic matrix Λ will be described later.

Assuming that the matrix whose component is the value of the dependent variable of the light-receiving amount original function g (x, d) is the light-receiving amount original matrix X, the equation (1) can be paraphrased into the following equation (2).
Y (x, d) = Λ (x) * X (x, d) ... (2)

As shown in FIG. 6, assuming that the light receiving amount matrix Y is a matrix of N rows (N is an integer of 2 or more) and 1 column, and the light receiving part characteristic matrix Λ is a matrix of N rows and M columns (M is an integer of 2 or more). The light receiving amount original matrix X to be obtained is a matrix of N rows and 1 column. By using the Jacobi method or the Gauss-Seidel method for this N-dimensional simultaneous equation, the values of each component x ₁ , x ₂ , ..., X _N of the light receiving quantity primary matrix X can be obtained. The number M in the row of the light receiving unit characteristic matrix Λ is basically a value that depends on the wavelength length of the spectroscope 42.

Here, a method of creating the light receiving unit characteristic matrix Λ will be described with reference to FIGS. 7 to 8. FIG. 7 is a conceptual diagram for explaining an example of a method of creating the light receiving unit characteristic matrix Λ. FIG. 8 is a conceptual diagram for explaining another example of the method of creating the light receiving unit characteristic matrix Λ.

As shown in FIG. 7, a plurality of light receiving unit characteristic signals Src are acquired in advance in order to create the light receiving unit characteristic matrix Λ. The plurality of light receiving unit characteristic signals Src are light receiving amount distribution signals obtained by injecting light having different wavelengths on the light receiving unit 40. Specifically, the light receiving unit characteristic signal Src of the light receiving unit 40 is dominated by the characteristics of the spectroscope 42. Therefore, before the optical measuring device 100 is shipped, in the inspection device of the spectroscope 42, light of a single wavelength is incident on the spectroscope 42, and the spectroscopic light is received by the light receiving sensor to obtain a light receiving amount distribution signal. .. By repeating this series of operations for a plurality of, for example, five types of light having different wavelengths from each other, a plurality of light receiving unit characteristic signals Src can be acquired.

First, for the light-receiving amount distribution signal Srd obtained by the light-receiving unit 40, the pixels corresponding to the peak light-receiving amount, that is, the wavelength λ are obtained. Next, one of the plurality of light receiving unit characteristic signals Src is selected based on this wavelength λ. For example, among the plurality of light receiving unit characteristic signals Src, the light receiving unit characteristic signal Src whose wavelength corresponding to the peak light receiving amount is closest to the wavelength λ obtained from the light receiving amount distribution signal Srd is selected. Then, by arranging the peak light receiving amount of the selected light receiving part characteristic signal Src on the diagonal component, the light receiving part characteristic matrix Λ can be created.

As described above, the light receiving unit characteristic matrix Λ having the value of the dependent variable of the light receiving unit characteristic function f (x) as a component is a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit 40. Of the Src, the light receiving portion characteristic signal Src selected based on the wavelength component of the peak light receiving amount in the light receiving amount distribution signal Srd is used to obtain the Src. Thereby, the light receiving part characteristic function f (x) can be easily obtained from the light receiving part characteristic signal Src of the wavelength λ corresponding to the wavelength component of the peak light receiving amount in the light receiving amount distribution signal Srd.

Alternatively, as in the example shown in FIG. 7, a plurality of light receiving unit characteristic signals Src are acquired in advance, and as shown in FIG. 8, the light receiving unit characteristic matrix Λ is formed by using these plurality of light receiving unit characteristic signals Src. You may create it. Specifically, each of the peak light receiving amounts of the plurality of light receiving unit characteristic signals Src is arranged in one of the diagonal components of the light receiving unit characteristic matrix Λ. In the case of the example shown in FIG. 8, it is necessary to complement the wavelengths between the wavelengths used when obtaining the plurality of light receiving part characteristic signals Src from the light receiving part characteristic signals Src at the preceding and following wavelengths and arrange them diagonally. is there.

As described above, the light receiving unit characteristic matrix Λ having the value of the dependent variable of the light receiving unit characteristic function f (x) as a component is a plurality of light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit 40. It may be obtained by using Src. As a result, even if there is no light receiving part characteristic signal Src corresponding to the wavelength component of the peak light receiving amount in the light receiving amount distribution signal Srd, the light receiving part characteristic function f (x) is complemented from the light receiving part characteristic signals Src at the previous and next wavelengths. You can ask.

In the present embodiment, an example in which the Jacobi method or the Gauss-Seidel method is used as the deconvolution method is shown, but the method is not limited thereto. There are various methods for deconvolution other than the Jacobi method or the Gauss-Seidel method. The present invention can be applied as a means of deconvolution if it is a method of the technical idea of restoring the original signal, that is, the light receiving amount distribution original signal Srp by using the filter component, that is, the light receiving portion characteristic signal Src. .. As such a method, for example, a method of deconvolution using a Fourier transform or a neural network can be applied.

Further, as shown in the following equation (3), the light receiving amount original signal may be restored by obtaining the inverse matrix of the light receiving part characteristic matrix in advance and obtaining the product with the light receiving amount distribution signal. As a result, it is possible to speed up the calculation related to the restoration of the light receiving amount distribution original signal.
X = Λ ^-1 * Y ... (3)

Returning to the description of FIG. 1, the measuring unit 52 is configured to measure the distance from the optical measuring device 100, more accurately, the sensor head 30, to the object TA based on the received light amount distribution original signal Srp. ing. Thereby, the accuracy of the measured distance can be improved as compared with the distance based on the received light amount distribution signal Srd.

Each function of the control unit 50 can be realized by a program executed by a computer (microprocessor). Therefore, each function included in the control unit 50 can be realized by hardware, software, or a combination of hardware and software, and is not limited to any case.

Further, when each function of the control unit 50 is realized by software or a combination of hardware and software, the processing can be executed by multitasking, multithreading, or both multitasking and multithreading. It is not limited to such a case.

The storage unit 60 is configured to store programs, data, and the like. The storage unit 60 includes, for example, a hard disk drive, a solid state drive, and the like. The storage unit 60 stores in advance various programs executed by the control unit 50, data necessary for executing the programs, and the like.

Further, the storage unit 60 stores the light receiving unit characteristic function f (x) as information regarding the light receiving unit characteristic signal Src. The storage unit 60 may store the inverse function of the light receiving unit characteristic function f (x) instead of the light receiving unit characteristic function f (x), and for example, the light receiving unit characteristic matrix created in the example shown in FIG. The inverse matrix of Λ or the light receiving part characteristic matrix Λ may be stored. By storing the information regarding the light receiving unit characteristic signal Src in this way, the response time for restoring the light receiving amount distribution original signal Srp can be shortened.

The operation unit 70 is for inputting information by the operation of the user (user). The operation unit 70 includes, for example, buttons, switches, and the like. In this case, when the user operates a button, a switch, or the like, a signal corresponding to the operation is input to the control unit 50. Then, the control unit 50 generates data corresponding to the signal, so that information can be input to the optical measuring device 100.

The display unit 80 is for outputting information. Specifically, the display unit 80 is configured to display, for example, the measured distance, setting contents, operating state, communication state, and the like. The display unit 80 includes, for example, a multi-digit 7- or 11-segment display and an indicator lamp that emits light in a plurality of colors.

Next, an example of the operation of the optical measuring device according to the present embodiment will be described with reference to FIG. FIG. 9 is a flowchart illustrating a schematic operation of measuring the distance to the object TA in the optical measuring device 100 according to the embodiment.

The control unit 50 of the optical measurement device 100 executes the distance measurement process S200 shown in FIG. 9 when the optical measurement device 100 is activated by, for example, an operation of a user. In the following description, for simplification of the description, the storage unit 60 uses the light receiving unit characteristic function f (x) as information of the light receiving unit characteristic matrix Λ and the light receiving unit characteristic matrix described in the example shown in FIG. It is assumed that the information corresponding to the inverse matrix or inverse function of Λ is stored. Further, by recording the characteristics of each sensor controller, the variation of the controller can be removed and the original signal of the sensor head can be restored.

As shown in FIG. 9, first, the control unit 50 outputs a control signal at a predetermined cycle, and projects light from the light source 10 to the object TA (S201).

Next, the control unit 50 obtains a light reception amount distribution signal Srd of the light reflected by the object TA and collected by the sensor head 30 from the light receiving unit 40 (S202).

Next, the restoration unit 51 uses the light-receiving amount distribution signal Srd obtained in step S202 to derive a light-receiving amount function h (x, d) representing the light-receiving amount distribution signal Srd (S203). Specifically, the restoration unit 51 determines each component of the light receiving amount matrix Y from a part or all of the values (light receiving amount) of each pixel in the light receiving amount distribution signal Srd, and obtains the light receiving amount matrix Y.

Next, the restoration unit 51 reads out the light receiving unit characteristic matrix Λ shown in FIG. 8 from the storage unit 60 as information of the light receiving unit characteristic function f (x) (S204).

Next, the restoration unit 51 performs a deconvolution calculation using the light receiving amount function h (x, d) derived in step S203 and the information of the light receiving unit characteristic function f (x) read out in step S204 (S205). ). As a result, the light receiving amount original function g (x, d) is restored.

Specifically, the restoration unit 51 calculates the light-receiving amount original matrix X by solving the multidimensional simultaneous equations using the light-receiving amount matrix Y and the light-receiving part characteristic matrix Λ.

Next, the measuring unit 52 measures the distance from the optical measuring device 100 to the object TA based on the light receiving amount original function g (x, d) restored as a result of step S205 (S206). The measuring unit 52 may display the distance measured in step S206 on the display unit 80.

After step S206, the control unit 50 returns to step S201 and repeats the processes from step S201 to step S206 until, for example, the optical measuring device 100 is stopped.

In the present embodiment, the optical measuring device 100 measures the distance from the sensor head 30 to the object TA, but the present invention is not limited to this. The measured value measured by the optical measuring device may, for example, measure a change in distance with respect to a certain position, that is, a displacement.

Further, in the present embodiment, an example in which the optical measuring device 100 measures the distance by the white confocal method is shown, but the present invention is not limited to this. The optical measuring device may measure the distance by, for example, a triangular ranging method. The triangular distance measuring method does not use the coaxial optical system as shown in FIG. 1, but comprises the light emitted from the light source to the object and the light reflected by the object by another optical system. For example, the object is irradiated with the laser light emitted from the light source, the laser light reflected by the object is measured by the light receiving portion, and the position and orientation relationship between the optical axis of the laser light and the light receiving portion and the laser light measured by the light receiving portion are measured. It is configured to measure the distance from the optical measuring device to the object based on the incident angle of. In this case, the incident angle of the laser beam is determined based on the light receiving portion distribution signal measured by using the light receiving portion.

The exemplary embodiments of the present invention have been described above. According to the optical measuring device 100, the optical measuring method, and the optical measuring program according to the embodiment of the present invention, FIG. 3 is based on the light receiving unit characteristic signal Src shown in FIG. 4 measured by using the light receiving unit 40. The light receiving amount distribution original signal Srp shown in FIG. 5 is restored from the light receiving amount distribution signal Srd shown in FIG. Here, the inventors of the present invention have found that the light receiving amount distribution signal Srd obtained by the light receiving unit 40 includes the light receiving unit characteristic signal Src. Further, the inventors of the present invention can remove the light receiving unit characteristic signal Src from the light receiving amount distribution signal Srd obtained by the light receiving unit 40 by measuring the light receiving unit characteristic signal Src in advance using the light receiving unit 40. I found. Therefore, based on the light receiving unit characteristic signal Src measured using the light receiving unit 40, it is possible to restore the light receiving amount distribution original signal Srp from which the light receiving unit characteristic signal Src has been removed. Therefore, since the half-value width of the restored light-receiving amount distribution original signal Srp is smaller than that of the light-receiving amount distribution signal Srd, it is possible to suppress a decrease in measurement accuracy based on this light-receiving amount distribution original signal Srp. it can.

The embodiments described above are for facilitating the understanding of the present invention, and are not for limiting and interpreting the present invention. Each element included in the embodiment and its arrangement, material, condition, shape, size, etc. are not limited to those exemplified, and can be changed as appropriate. In addition, the configurations shown in different embodiments can be partially replaced or combined.

(Appendix)
1. 1. A sensor head 30 that collects the reflected light reflected by the object TA, and
A light receiving unit 40 in which each of the plurality of pixels is configured to be able to detect the received light amount, and the light receiving unit 40 obtains the received light amount distribution signal Srd for each pixel for the focused light.
A restoration unit 51 that restores the light reception amount distribution original signal Srp from the light reception amount distribution signal Srd based on the light reception unit characteristic signal Src measured by the light receiving unit 40 is provided.
Optical measuring device 100.
8. It is an optical measurement method of an optical measurement device 100 including a sensor head 30 and a light receiving unit 40.
A condensing step of condensing the reflected light reflected by the object TA by the sensor head 30 and
A light receiving step of obtaining a light receiving amount distribution signal Srd for each pixel for the collected light by a light receiving unit 40 configured so that each of a plurality of pixels can detect the light receiving amount.
A restoration step of restoring the light receiving amount distribution original signal Srp from the light receiving amount distribution signal Srd based on the light receiving part characteristic signal Src measured by using the light receiving unit is included.
Optical measurement method.
15. An optical measurement program of an optical measuring device 100 including a sensor head 30 and a light receiving unit 40, which is executed by a computer.
A condensing step of condensing the reflected light reflected by the object TA by the sensor head 30 and
A light receiving step of obtaining a light receiving amount distribution signal Srd for each pixel for the collected light by a light receiving unit 40 configured so that each of a plurality of pixels can detect the light receiving amount.
A restoration step of restoring the light receiving amount distribution original signal Srp from the light receiving amount distribution signal Srd based on the light receiving part characteristic signal Src measured by using the light receiving unit is included.
Optical measurement program.

10 ... light source, 20 ... light guide, 21 ... first cable, 22 ... second cable, 23 ... third cable, 24 ... optical coupler, 30 ... sensor head, 31 ... collimeter lens, 32 ... diffractive lens, 33 ... Objective lens, 35 ... storage unit, 40 ... light receiving unit, 41 ... collimeter lens, 42 ... spectroscope, 43 ... adjustment lens, 44 ... light receiving sensor, 45 ... processing circuit, 50 ... control unit, 51 ... restoration unit, 52 ... Measurement unit, 60 ... Storage unit, 70 ... Operation unit, 80 ... Display unit, 90 ... Controller, 100 ... Optical measurement device, L1, L2 ... Light, S200 ... Distance measurement processing, Src ... Light receiving unit characteristic signal, Srd ... Light receiving Amount distribution signal, Srp ... Light receiving amount distribution original signal, TA ... Object, Whm ... Half price width, λ ... Wavelength.

Claims (15)

An optical system that collects the reflected light reflected by the object,
A light receiving unit in which each of the plurality of pixels is configured to be able to detect the received light amount, and a light receiving unit that obtains a received light amount distribution signal for each pixel for the focused light.
A restoration unit that restores the light reception amount distribution original signal from the light reception amount distribution signal based on the light reception unit characteristic signal measured by the light receiving unit is provided.
Optical measuring device. The optical system causes chromatic aberration along the optical axis direction with respect to light containing a plurality of wavelength components, and irradiates the object with light that causes chromatic aberration.
The light receiving unit is configured to obtain the light receiving amount distribution signal for each wavelength component of the focused light.
The optical measuring device according to claim 1. The restoration unit performs a deconvolution calculation of the light receiving unit characteristic function representing the light receiving unit characteristic signal and the light receiving amount function representing the light receiving amount distribution signal, and obtains the light receiving amount original function representing the light receiving amount distribution original signal.
The optical measuring device according to claim 2. The light receiving unit characteristic function is selected based on the wavelength component of the peak light receiving amount in the light receiving amount distribution signal among a plurality of the light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit. It is obtained by using the light receiving part characteristic signal.
The optical measuring device according to claim 3. The light receiving unit characteristic function is obtained by using a plurality of the light receiving unit characteristic signals measured by incident light of different wavelengths on the light receiving unit.
The optical measuring device according to claim 3. A storage unit for storing information related to the light receiving unit characteristic signal is further provided.
The optical measuring device according to any one of claims 1 to 5. A measuring unit for measuring the distance from the optical measuring device to the object based on the received light amount distribution original signal is further provided.
The optical measuring device according to any one of claims 1 to 6. It is an optical measurement method of an optical measuring device including an optical system and a light receiving unit.
A condensing step that condenses the reflected light reflected by the object by the optical system,
A light receiving step of obtaining a light receiving amount distribution signal for each pixel for the focused light by the light receiving unit configured so that each of a plurality of pixels can detect the light receiving amount.
A restoration step of restoring the light receiving amount distribution original signal from the light receiving amount distribution signal based on the light receiving part characteristic signal measured by the light receiving part is included.
Optical measurement method. The optical system causes chromatic aberration along the optical axis direction with respect to light containing a plurality of wavelength components, and irradiates the object with light that causes chromatic aberration.
The light receiving unit is configured to obtain the light receiving amount distribution signal for each wavelength component of the focused light.
The optical measurement method according to claim 8. In the restoration step, a deconvolution calculation of the light receiving part characteristic function representing the light receiving part characteristic signal and the light receiving amount function representing the light receiving amount distribution signal is performed, and the light receiving amount original function representing the light receiving amount distribution original signal is obtained. including,
The optical measurement method according to claim 9. The light receiving unit characteristic function was selected based on the wavelength component of the peak light receiving amount in the light receiving amount distribution signal among a plurality of the light receiving unit characteristic signals obtained by injecting light having different wavelengths into the light receiving unit. Obtained using the light receiving part characteristic signal,
The optical measurement method according to claim 10. The light receiving unit characteristic function is obtained by using a plurality of the light receiving unit characteristic signals obtained by injecting light having different wavelengths into the light receiving unit.
The optical measurement method according to claim 10. A storage step of storing information about the light receiving unit characteristic signal in the storage unit is further included.
The optical measurement method according to any one of claims 8 to 12. A measurement step of measuring the distance from the optical measuring device to the object based on the received light amount distribution original signal is further included.
The optical measurement method according to any one of claims 8 to 13. It is an optical measurement program of an optical measuring device including an optical system and a light receiving unit, which is executed by a computer.
A condensing step that condenses the reflected light reflected by the object by the optical system,
A light receiving step of obtaining a light receiving amount distribution signal for each pixel for the focused light by the light receiving unit configured so that each of a plurality of pixels can detect the light receiving amount.
A restoration step of restoring the light receiving amount distribution original signal from the light receiving amount distribution signal based on the light receiving part characteristic signal measured by the light receiving part is included.
Optical measurement program.