JP2020167667A - 5g communication antenna array, antenna structure, noise suppression heat conduction sheet, and heat conduction sheet - Google Patents

Abstract

To provide a 5G communication antenna array demonstrating excellent heat radiation and crosstalk suppression effect.SOLUTION: A 5G communication antenna array 1 comprises: a substrate 10; at least one radio frequency semiconductor device 20, noise suppression heat conduction sheet 30, and first heat radiation member 41 formed sequentially on one surface 10a of the substrate 10; and at least one antenna 50 and second heat radiation member 42 formed sequentially on the other surface 10b of the substrate 10.SELECTED DRAWING: Figure 1

Description

The present invention provides a noise-suppressing heat-conducting sheet and heat suitable for use in a 5G communication antenna array and antenna structure having excellent heat dissipation and cross-talk suppression effect, and the 5G communication antenna array and antenna structure. It is about a conduction sheet.

Various communication technologies corresponding to ultra-high-speed and large-capacity communication have been developed for 5G of next-generation high-speed and large-capacity communication. As one of them, "Massive MIMO" is known. Massive MIMO is an elemental technology that employs "ultra-multi-element antennas", which are expected to have as many antennas as tens or 100 or more on the base station side.
It is said that by increasing the number of antenna elements horizontally and vertically as in the Massive MIMO structure, the beam of the communication propagation tends to become thinner. It is thinner and longer, and as an image, by drawing a straight line like a laser light and controlling it, it is possible to pinpoint radio waves with high directivity to a communication device such as a specific smartphone. .. Therefore, by adopting this Massive MIMO, it is expected to be more effective in terms of large-capacity communication and utilization efficiency than ever before.

In the above-mentioned antenna array (aggregate of antenna structure) such as Massive MIMO, a large amount of heat is generated by the high frequency semiconductor device (hereinafter, also referred to as "RFIC") used, so a heat radiating member such as a heat sink is used. It is common to dissipate heat to the outside.
However, in the antenna array, although many RFICs exist, they are present in one device, so that the amount of heat generated becomes large, and there is a possibility that sufficient heat dissipation cannot be ensured by the conventional technique.

Further, when a plurality of antennas and RFICs are aligned as in an antenna array, there is a problem that crosstalk occurs between the RFICs. If this crosstalk becomes large, it causes communication jamming and erroneous communication. Therefore, it has been desired to develop a technique capable of effectively suppressing crosstalk in addition to the above-mentioned heat dissipation.

For example, Patent Document 1 describes a rectangular dielectric and input / output formed on the outer surface of the dielectric for the purpose of suppressing loss due to reflection or radiation of an electromagnetic field in the input / output portion of the dielectric waveguide. A derivative waveguide composed of an electrode and a conductor film, in which an input / output electrode extends inward of the bottom surface from the first end near the apex of the dielectric on the bottom surface of the dielectric, and a conductor non-forming portion is provided. Massive MIMO systems with filters are disclosed.
However, although the technique disclosed in Patent Document 1 can obtain a certain noise suppression effect in the input / output portion of the dielectric waveguide, the heat dissipation is not sufficient, and there is a problem that heat is generated by long-term use. was there. Further, further improvement in the crosstalk suppression effect when the number of antennas is increased has been desired.

Japanese Unexamined Patent Publication No. 2012-171557

The present invention has been made in view of such circumstances, and an object of the present invention is to provide an antenna array and an antenna structure for 5G communication having excellent heat dissipation and crosstalk suppressing effect. Another object of the present invention is to provide a noise-suppressing heat-conducting sheet and a heat-conducting sheet suitable for use in a 5G communication antenna array and an antenna structure having excellent heat dissipation and cross-talk suppressing effect.

The present inventors have repeatedly studied to solve the above problems, and by providing a noise suppression heat conductive sheet on a high frequency semiconductor device (RFIC) formed on one surface of a substrate, a high electromagnetic wave suppression effect can be obtained. It was found that the crosstalk generated between each RFIC can be suppressed. Further, since the noise suppression heat conduction sheet is provided between the high frequency semiconductor device and the heat radiating member, the heat generated from the high frequency semiconductor device can be efficiently transferred to the heat radiating member (first heat radiating member). It has also been found that the heat generated from the antenna can be diffused by the heat radiating member (second heat radiating member), so that the heat radiating property can be improved.

The present invention has been made based on the above findings, and the gist thereof is as follows.
(1) Board and
At least one high-frequency semiconductor device, a noise-suppressing heat-conducting sheet, and a first heat-dissipating member sequentially formed on one surface of the substrate.
With at least one antenna and a second heat radiating member sequentially formed on the other surface of the substrate.
An antenna array for 5G communication, which comprises.
With the above configuration, excellent heat dissipation and crosstalk suppression effect can be realized.
(2) The antenna array for 5G communication according to (1) above, wherein a heat conductive sheet is further provided between the at least one antenna and the second heat radiating member.
(3) The antenna array for 5G communication according to (1) or (2) above, wherein the noise suppression heat conductive sheet contains magnetic powder.
(4) The antenna array for 5G communication according to any one of (1) to (3) above, wherein the noise suppression heat conductive sheet contains carbon fibers.
(5) The antenna array for 5G communication according to any one of (1) to (4) above, wherein the noise suppression heat conductive sheet has a dielectric constant of 20 or more.
(6) The antenna array for 5G communication according to any one of (1) to (5) above, wherein the noise suppression heat conductive sheet has a magnetic permeability of more than 1.
(7) The antenna array for 5G communication according to any one of (1) to (6) above, wherein the noise suppression heat conductive sheet has a thermal resistance of 300 Kmm ² / W or less.
(8) The 5G communication antenna array according to any one of (1) to (7) above, wherein the 5G communication antenna array is used for Massive MIMO.
(9) Board and
A high-frequency semiconductor device, a noise-suppressing heat-conducting sheet, and a first heat-dissipating member sequentially formed on one surface of the substrate.
An antenna and a second heat radiating member sequentially formed on the other surface of the substrate.
An antenna structure characterized by being provided with.
With the above configuration, excellent heat dissipation and crosstalk suppression effect can be realized.
(10) A noise-suppressing heat-conducting sheet used in an antenna array for 5G communication.
A noise-suppressing heat-conducting sheet provided between at least one high-frequency semiconductor device formed on a substrate and a heat-dissipating member.
With the above configuration, a noise suppressing heat conductive sheet suitable for a semiconductor device having excellent heat dissipation and crosstalk suppressing effect can be obtained.
(11) A heat conductive sheet used for an antenna array for 5G communication.
A heat conductive sheet provided between at least one antenna formed on a substrate and a heat radiating member.
With the above configuration, a heat conductive sheet suitable for a semiconductor device having excellent heat dissipation and crosstalk suppressing effect can be obtained.

According to the present invention, it is possible to provide an antenna array and an antenna structure for 5G communication having excellent heat dissipation and crosstalk suppressing effect. Further, according to the present invention, it is possible to provide a noise-suppressing heat-conducting sheet and a heat-conducting sheet suitable for use in a 5G communication antenna array and an antenna structure having excellent heat dissipation and cross-talk suppressing effect. Become.

It is a figure which showed typically the state of the cross section about one Embodiment of the antenna array for 5G communication of this invention. It is a figure which showed the state of the cross section schematically about the other embodiment of the antenna array for 5G communication of this invention. It is a graph which showed the amount of near-end crosstalk (S31) when the condition of the noise suppression heat conduction sheet of the antenna array for 5G communication was changed in Example 1. FIG. In Example 3, it is a graph which showed the amount of near-end crosstalk (S31) when the dielectric constant of the noise suppression heat conduction sheet of the antenna array for 5G communication was changed, and (a) is the near-end crosstalk at 10GHz. The amount of talk, (b) is the amount of near-end crosstalk at 20 GHz, (c) is the amount of near-end crosstalk at 40 GHz, and (d) is the amount of near-end crosstalk at 60 GHz. In Example 4, it is a graph which showed the amount of near-end crosstalk (S31) at 28GHz when the magnetic permeability of the noise suppression heat conduction sheet of the antenna array for 5G communication was changed.

Hereinafter, an example of the embodiment of the present invention will be specifically described with reference to the drawings.
Here, FIGS. 1 and 2 are diagrams schematically showing cross sections of an example of an embodiment of the antenna array for 5G communication of the present invention. For convenience of explanation, each drawing is shown in a state in which the shape and scale of each member are different from the actual ones. The shape and scale of each member can be appropriately changed for each semiconductor device, except as specified in this specification.

<Antenna array for 5G communication>
As shown in FIG. 1, the antenna array 1 for 5G communication according to the embodiment of the present invention is
Board 10 and
At least one high-frequency semiconductor device 20, a noise-suppressing heat conductive sheet 30, and a first heat-dissipating member 41 sequentially formed on one surface 10a of the substrate 10.
It includes at least one antenna 50, a second heat radiating member 42, and 60 sequentially formed on the other surface 10b of the substrate 10.

In the antenna array 1 for 5G communication according to the embodiment of the present invention, by providing the noise suppression heat conductive sheet 30, it is possible to absorb and / or block electromagnetic waves that become noise generated from the high frequency semiconductor device 20. Therefore, it is possible to suppress an increase in crosstalk without hindering the transmission and reception of radio waves. In addition, in the 5G communication antenna array 1 according to the embodiment of the present invention, since the noise suppression heat conduction sheet 30 is provided between the high frequency semiconductor device 20 and the first heat dissipation member 41, the high frequency semiconductor The heat generated from the device 20 can be efficiently transferred to the first heat radiating member 41, and excellent heat radiating property can be realized.
Further, in the 5G communication antenna array 1 according to the embodiment of the present invention, the heat generated from the antenna can be efficiently radiated by the second heat radiating member 42 formed on the other surface 10b side of the substrate 20. The heat dissipation of the entire 5G communication antenna array 1 can be further improved.

On the other hand, in the antenna array for 5G communication according to the prior art, since the noise suppression heat conduction sheet 30 is not provided in the state of being in contact with the high frequency semiconductor device 20 as in the present invention, a sufficient crosstalk suppression effect cannot be obtained. .. Further, since the noise suppressing heat conductive sheet 30 is not provided between the high frequency semiconductor device 20 and the first heat radiating member 41, it is considered that sufficient heat radiating property cannot be obtained.

The "antenna array for 5G communication" in the present invention means an "antenna array used in a fifth generation (5G) mobile communication system". Further, the "antenna array" means an aggregate of antennas composed of at least one antenna.
Therefore, the 5G communication antenna array 1 according to the embodiment of the present invention is preferably used in a technique such as Massive MIMO from the viewpoint of being able to transmit and receive high frequency radio waves with low power consumption.

Next, each member constituting the 5G communication antenna array 1 according to the embodiment of the present invention will be described.
(substrate)
As shown in FIG. 1, the 5G communication antenna array 1 according to the embodiment of the present invention includes a substrate 10.
Here, the substrate 10 is a so-called double-sided substrate having circuits on both sides (one surface 10a and the other surface 10b). The other detailed conditions of the substrate 10 are not particularly limited, and a known substrate can be appropriately selected and used according to the required performance.

(High frequency semiconductor device)
As shown in FIG. 1, the 5G communication antenna array 1 according to the embodiment of the present invention includes a high-frequency semiconductor device 20 formed on one surface 10a of the substrate 10.
Here, the high frequency semiconductor device is a semiconductor device that processes a high frequency (RF) signal. Among electronic components made of semiconductors, those that can process high-frequency signals are not particularly limited. For example, integrated circuits such as RFICs and LSIs, CPUs, MPUs, graphic arithmetic elements, and the like can be mentioned.

In the 5G communication antenna array 1 according to the embodiment of the present invention, in order to operate the antenna 50 described later, for example, as shown in FIG. 1, the number of antennas 50 in the 5G communication antenna array 1 is the same as that of the antenna 50. The high frequency semiconductor device 20 is provided. However, the number of the high-frequency semiconductor devices 20 and the number of the antennas 50 do not necessarily have to be the same, and one high-frequency semiconductor device 20 may operate a plurality of antennas depending on the design. ..

Further, in the antenna array 1 for 5G communication according to the embodiment of the present invention, a land is laid all around or partially on one surface 10a of the substrate 10 so as to surround the high frequency semiconductor device 20. (Not shown) can also be provided.

(Noise suppression heat conduction sheet)
As shown in FIG. 1, the semiconductor device 1 of the present invention includes a noise suppressing heat conductive sheet 30 between the high frequency semiconductor device 20 and the first heat radiating member 41 described later.
Since the noise suppression heat conduction sheet 30 can absorb and / or block electromagnetic waves that become noise, it is possible to suppress an increase in crosstalk without hindering the transmission and reception of radio waves by the antenna, and the high frequency. Since the heat generated from the semiconductor device 20 can be efficiently transferred to the first heat dissipation member 41, excellent heat dissipation can be realized.

Here, the noise suppression heat conductive sheet is, as its name suggests, a sheet-like member having an electromagnetic wave noise suppression effect and heat conductivity. The noise suppression effect and the thermal conductivity performance are not particularly limited, and basically, they can be appropriately changed according to the performance required for the antenna array for 5G communication of the present invention. ..
Further, the noise suppression effect of the noise suppression heat conductive sheet may be any as long as it can suppress noise generated from the high frequency semiconductor device 20 and the antenna 50 described later, and has, for example, an effect of blocking electromagnetic wave noise. It may have an effect of absorbing electromagnetic noise.

The size of the noise suppression heat conductive sheet 30 (the size along the extending direction of the sheet) is not particularly limited.
For example, as shown in FIG. 1, it can be composed of a plurality of sheets having a size corresponding to the size of the high-frequency semiconductor device 20. By adopting the embodiment shown in FIG. 1, the pattern design of the substrate 10 can be facilitated.
Further, as shown in FIG. 2, the size of the noise suppression heat conduction sheet 30 is increased so that a plurality of the high frequency semiconductor devices 20 are formed on one noise suppression heat conduction sheet 30. You can also. In the case of the embodiment shown in FIG. 2, a better noise suppression effect and heat dissipation may be obtained.

Further, the thickness of the noise suppression heat conductive sheet 30 (thickness along the stacking direction of each member of the antenna array for 5G communication) is not particularly limited, and the high frequency semiconductor device 20 and the first heat radiation member 41 It can be appropriately changed according to the distance between the antenna array 1 and the size of the antenna array 1 for 5G communication.
For example, the thickness of the noise suppressing heat conductive sheet 30 is preferably 10 to 3000 μm, more preferably 200 to 500 μm, from the viewpoint that heat dissipation and crosstalk suppressing effect can be realized at a higher level. If the thickness of the noise suppression heat conductive sheet 30 exceeds 3000 μm, the distance between the semiconductor element 30 and the first heat radiating member 41 becomes long, so that the heat conductivity may decrease, while the noise suppression If the thickness of the heat conductive sheet 30 is less than 10 μm, the crosstalk suppressing effect may be reduced.

The noise suppressing heat conductive sheet 30 preferably has a high dielectric constant (relative permittivity) from the viewpoint of realizing an excellent crosstalk suppressing effect.
Specifically, the dielectric constant of the noise suppressing heat conductive sheet 30 is preferably 20 or more, more preferably 25 or more, and even more preferably 30 or more. This is because a more excellent crosstalk suppressing effect can be obtained by setting the dielectric constant of the noise suppressing heat conductive sheet 30 to 20 or more.
The method for adjusting the dielectric constant of the noise-suppressing heat conductive sheet 30 is not particularly limited, but the type of binder resin, the material of the heat conductive filler, the blending amount, the orientation direction, and the like, which will be described later, may be changed. It is possible to adjust as appropriate.

Further, the noise suppressing heat conductive sheet 30 preferably has a high magnetic permeability (specific magnetic permeability) from the viewpoint of realizing an excellent crosstalk suppressing effect.
Specifically, the magnetic permeability of the noise suppression heat conductive sheet 30 is preferably more than 1, more preferably 2 or more, and even more preferably 5 or more. This is because when the magnetic permeability of the noise suppressing heat conductive sheet 30 exceeds 1, a more excellent crosstalk suppressing effect can be obtained.
The method for adjusting the magnetic permeability of the noise-suppressing heat conductive sheet 30 is not particularly limited, but the type of binder resin, the material of the heat conductive filler, the blending amount, the orientation direction, and the like, which will be described later, may be changed. It is possible to adjust as appropriate.

Further, the noise suppression thermal conductive sheet 30 is preferably thermal resistance is less than 300Kmm ² / W, more preferably 35Kmm ² / W or less, even more preferably at most 30Kmm ² / W. This is because the heat generated from the high-frequency semiconductor device 20 can be more efficiently transferred to the first heat radiating member 41, and the heat radiating property can be further improved. The heat resistance of the noise suppressing thermal conductive sheet 30 is preferably at 1Kmm ² / W or more, more preferably 10Kmm ² / W or more. By setting the thermal resistance of the noise suppression thermal conductive sheet 30 to 1 Kmm ² / W or more, the rate of change in thermal resistance can be reduced even when the contact thermal resistance changes.

Further, the noise suppression heat conductive sheet 30 preferably has magnetic characteristics. This is because the noise suppression heat conductive sheet 30 can be provided with electromagnetic wave absorption performance, so that a more excellent crosstalk suppression effect can be obtained.
Here, the method for adjusting the magnetic characteristics of the noise suppressing heat conductive sheet 30 is not particularly limited, but by incorporating magnetic powder or the like in the noise suppressing heat conductive sheet 30 and changing the blending amount or the like, the noise suppressing heat conductive sheet 30 is contained. It is possible to adjust.

Further, the noise suppression heat conductive sheet 30 preferably has adhesiveness or adhesiveness on the surface. This is because the adhesiveness between the noise suppressing heat conductive sheet 30 and other members (high frequency semiconductor device 20, first heat radiating member 41) can be improved.
The method of imparting tackiness to the surface of the noise suppression heat conductive sheet 30 is not particularly limited. For example, the binder resin constituting the noise-suppressing heat-conducting sheet 30 described later can be optimized to have tackiness, or a tacky adhesive layer is separately provided on the surface of the noise-suppressing heat-conducting sheet 30. It is also possible.

Furthermore, it is preferable that the noise suppression heat conductive sheet 30 has flexibility. Since the shape of the noise suppression heat conductive sheet 30 can be easily changed, the ease of assembling the antenna array 1 for 5G communication is improved, and the surface shape of the high frequency semiconductor device 20 can be followed, so that the high frequency semiconductor device can be followed. It is also possible to increase the bonding force with 20. The flexibility of the noise suppression heat conductive sheet 30 is not particularly limited, but for example, the storage elastic modulus at 25 ° C. measured by dynamic elastic modulus measurement is preferably in the range of 50 kPa to 50 MPa.

The material constituting the noise suppressing heat conductive sheet 30 is not particularly limited as long as it has a noise suppressing effect and heat conductivity.
For example, the noise suppression heat conductive sheet 30 can be made of a material containing a binder resin, a heat conductive filler, and other components.

Hereinafter, the materials constituting the noise suppression heat conductive sheet 30 will be described.
-Binder resin The binder resin constituting the noise-suppressing heat-conducting sheet is a resin component that is a base material of the noise-suppressing heat-conducting sheet. The type is not particularly limited, and a known binder resin can be appropriately selected. For example, one of the binder resins is a thermosetting resin.

Examples of the thermosetting resin include crosslinkable rubber, epoxy resin, polyimide resin, bismaleimide resin, benzocyclobutene resin, phenol resin, unsaturated polyester, diallyl phthalate resin, silicone, polyurethane, polyimide silicone, and thermosetting type. Examples thereof include polyphenylene ether and thermosetting modified polyphenylene ether. These may be used alone or in combination of two or more.

Examples of the crosslinkable rubber include natural rubber, butadiene rubber, isoprene rubber, nitrile rubber, hydrogenated nitrile rubber, chloroprene rubber, ethylene propylene rubber, chlorinated polyethylene, chlorosulfonated polyethylene, butyl rubber, and halogenated butyl rubber. Fluorine rubber, urethane rubber, acrylic rubber, polyisobutylene rubber, silicone rubber and the like can be mentioned. These may be used alone or in combination of two or more.

Further, among the above-mentioned thermosetting resins, it is preferable to use silicone from the viewpoint of excellent molding processability and weather resistance, as well as adhesion and followability to electronic components. The silicone is not particularly limited, and the type of silicone can be appropriately selected depending on the intended purpose.
From the viewpoint of obtaining the above-mentioned molding processability, weather resistance, adhesion and the like, the silicone is preferably a silicone composed of a main agent of a liquid silicone gel and a curing agent. Examples of such silicones include addition reaction type liquid silicones and heat vulcanization type mirable type silicones using peroxides for vulcanization.

As the addition reaction type liquid silicone, it is preferable to use a two-component addition reaction type silicone or the like using a polyorganosiloxane having a vinyl group as a main agent and a polyorganosiloxane having a Si—H group as a curing agent.
In the combination of the main agent of the liquid silicone gel and the curing agent, the mixing ratio of the main agent and the curing agent may be the mass ratio of the main agent: curing agent = 35:65 to 65:35. preferable.

Further, the content of the binder resin in the noise suppressing heat conductive sheet is not particularly limited and can be appropriately selected depending on the intended purpose. For example, from the viewpoint of ensuring the molding processability of the sheet, the adhesion of the sheet, etc., it is preferably about 20% by volume to 50% by volume of the noise-suppressing heat conductive sheet, and 30% by volume to 40% by volume. More preferably.

-Thermal conductive filler The noise-suppressing thermal conductive sheet 30 can contain the thermal conductive filler in the binder resin. The thermal conductivity filler is a component for improving the thermal conductivity of the sheet.
The shape, material, average particle size, etc. of the heat conductive filler are not particularly limited as long as they can improve the heat conductivity of the sheet.

For example, the shape may be spherical, elliptical spherical, lumpy, granular flat, needle-like, fibrous, coil-like, or the like. Among them, it is preferable to use a fibrous thermal conductivity filler from the viewpoint of achieving higher thermal conductivity.
The "fibrous" of the fibrous thermal conductive filler means a shape having a high aspect ratio (about 6 or more). Therefore, in the present invention, not only fibrous or rod-shaped thermally conductive fillers, but also granular fillers having a high aspect ratio, flake-shaped thermally conductive fillers, and the like can be used as fibrous thermally conductive fillers. included.

Here, the material of the heat conductive filler is not particularly limited as long as it is a material having high heat conductivity, and for example, metals such as silver, copper and aluminum, alumina, aluminum nitride, silicon carbide, graphite and the like. Ceramics, carbon fiber, etc.
The heat conductive filler may be used alone or in combination of two or more. Further, when two or more kinds of heat conductive fillers are used, they may have the same shape, or may be used by mixing heat conductive fillers having different shapes.
Among these fibrous thermally conductive fillers, fibrous metal powder or carbon fiber is preferably used, and carbon fiber is more preferable, from the viewpoint of obtaining higher thermal conductivity.

The type of the carbon fiber is not particularly limited and may be appropriately selected depending on the intended purpose. For example, pitch-based, PAN-based, graphitized PBO fibers, arc discharge method, laser evaporation method, CVD method (chemical vapor deposition method), CCVD method (catalytic chemical vapor deposition method), etc. Can be used. Among these, carbon fibers obtained by graphitizing PBO fibers and pitch-based carbon fibers are more preferable from the viewpoint of obtaining high thermal conductivity and conductivity.

Further, the carbon fiber can be used by surface-treating a part or all of the carbon fiber, if necessary. The surface treatment includes, for example, oxidation treatment, nitriding treatment, nitration, sulfonate treatment, or adhesion of a metal, a metal compound, an organic compound, or the like to the surface of a functional group or carbon fiber introduced into the surface by these treatments. Examples include the process of combining. Examples of the functional group include a hydroxyl group, a carboxyl group, a carbonyl group, a nitro group, an amino group and the like.

Further, the average length of the major axis (average major axis length) of the prethermally conductive filler can be appropriately selected without any particular limitation, but from the viewpoint of surely obtaining high thermal conductivity, it is 50 μm or more. It is preferably in the range of 300 μm, more preferably in the range of 75 μm to 275 μm, and particularly preferably in the range of 90 μm to 250 μm.
Furthermore, the average minor axis length of the thermally conductive filler is not particularly limited and can be appropriately selected. For example, the average uniaxial length is preferably in the range of 4 μm to 20 μm, and more preferably in the range of 5 μm to 14 μm from the viewpoint of surely obtaining high thermal conductivity.

The aspect ratio (average major axis length / average minor axis length) of the thermally conductive filler is preferably 6 or more, and more preferably 7 to 30 from the viewpoint of obtaining high thermal conductivity. preferable. Even if the aspect ratio is small, the effect of improving the thermal conductivity and the like can be seen, but the effect of improving the characteristics cannot be obtained due to the decrease in orientation, so the aspect ratio is set to 6 or more. On the other hand, if it exceeds 30, the dispersibility in the noise suppression heat conductive sheet is lowered, so that sufficient thermal conductivity may not be obtained.
Here, the average major axis length and the average minor axis length of the thermally conductive filler can be measured by, for example, a microscope, a scanning electron microscope (SEM), or the like, and the average can be calculated from a plurality of samples. ..

The content of the heat conductive filler in the noise suppressing heat conductive sheet 30 is not particularly limited and may be appropriately selected depending on the intended purpose, but is 4% by volume to 40% by volume. Is preferable, 5% by volume to 30% by volume is more preferable, and 6% by volume to 20% by volume is particularly preferable. If the content is less than 4% by volume, it may be difficult to obtain a sufficiently low thermal resistance, and if it exceeds 40% by volume, the moldability of the noise-suppressing heat conductive sheet and the fibrous heat It may affect the orientation of the conductive filler.

Further, in the noise suppression heat conductive sheet 30, it is preferable that the heat conductive filler is oriented in one direction or a plurality of directions. This is because higher thermal conductivity and electromagnetic wave absorption can be realized by orienting the thermally conductive filler.
For example, when it is desired to increase the thermal conductivity of the noise-suppressing thermal conductive sheet 30 and improve the heat dissipation of the 5G communication antenna array of the present invention, the thermal conductive filler is substantially perpendicular to the sheet surface. Can be oriented to. On the other hand, when changing the flow of electricity in the noise suppressing heat conductive sheet to enhance the noise suppressing effect, the heat conductive filler may be oriented substantially parallel to the sheet surface or in another direction. it can.
Here, a direction substantially perpendicular to or substantially parallel to the sheet surface means a direction substantially perpendicular to or substantially parallel to the sheet surface direction. However, since the orientation direction of the heat conductive filler varies slightly during manufacturing, in the present invention, it is about ± 20 ° from the direction perpendicular to or parallel to the extending direction of the sheet surface described above. Misalignment is acceptable.

The method of adjusting the orientation angle of the heat conductive filler is not particularly limited. For example, the orientation angle can be adjusted by producing a sheet molded body that is the basis of the noise suppression heat conductive sheet and adjusting the cutting angle in a state where the fibrous heat conductive filler is oriented. Become.

-Inorganic filler Further, the noise suppressing heat conductive sheet 30 can further contain an inorganic filler in addition to the binder resin and the heat conductive fiber described above. This is because the thermal conductivity of the noise-suppressed thermal conductive sheet can be further enhanced and the strength of the sheet can be improved.
The shape, material, average particle size and the like of the inorganic filler are not particularly limited and may be appropriately selected depending on the intended purpose. Examples of the shape include a spherical shape, an elliptical spherical shape, a lump shape, a granular shape, a flat shape, and a needle shape. Among these, a spherical shape and an elliptical shape are preferable from the viewpoint of filling property, and a spherical shape is particularly preferable.

Examples of the material of the inorganic filler include aluminum nitride (aluminum nitride: AlN), silica, alumina (aluminum oxide), boron nitride, titania, glass, zinc oxide, silicon carbide, silicon (silicon), silicon oxide, and aluminum oxide. , Metal particles and the like. These may be used alone or in combination of two or more. Among these, alumina, boron nitride, aluminum nitride, zinc oxide, and silica are preferable, and alumina and aluminum nitride are particularly preferable from the viewpoint of thermal conductivity.

Further, as the inorganic filler, a surface-treated one can be used. When the inorganic filler is treated with a coupling agent as the surface treatment, the dispersibility of the inorganic filler is improved and the flexibility of the noise suppressing heat conductive sheet is improved.

The average particle size of the inorganic filler can be appropriately selected depending on the type of the inorganic substance and the like.
When the inorganic filler is alumina, the average particle size is preferably 1 μm to 10 μm, more preferably 1 μm to 5 μm, and particularly preferably 4 μm to 5 μm. If the average particle size is less than 1 μm, the viscosity may increase and it may be difficult to mix. On the other hand, if the average particle size exceeds 10 μm, the thermal resistance of the noise suppressing heat conductive sheet may increase.
Further, when the inorganic filler is aluminum nitride, the average particle size thereof is preferably 0.3 μm to 6.0 μm, more preferably 0.3 μm to 2.0 μm, and particularly preferably 0.5 μm to 1.5 μm. preferable. If the average particle size is less than 0.3 μm, the viscosity may increase and it may be difficult to mix, and if it exceeds 6.0 μm, the thermal resistance of the noise suppressing heat conductive sheet may increase.
The average particle size of the inorganic filler can be measured by, for example, a particle size distribution meter or a scanning electron microscope (SEM).

-Magnetic metal powder Further, it is preferable that the noise suppressing heat conductive sheet 30 further contains magnetic metal powder in addition to the above-mentioned binder resin, fibrous heat conductive fiber and inorganic filler. By containing the magnetic metal powder, the noise absorption performance of the noise suppression heat conductive sheet can be enhanced, and the crosstalk suppression effect of the antenna array for 5G communication of the present invention can be further improved.

The type of the magnetic metal powder is not particularly limited except that the magnetic characteristics of the noise suppressing heat conductive sheet 30 can be enhanced and the electromagnetic wave absorption can be improved, and a known magnetic metal powder is appropriately selected. Can be done. For example, amorphous metal powder or crystalline metal powder can be used. Examples of the amorphous metal powder include Fe-Si-B-Cr type, Fe-Si-B type, Co-Si-B type, Co-Zr type, Co-Nb type, Co-Ta type and the like. The crystalline metal powder includes, for example, pure iron, Fe-based, Co-based, Ni-based, Fe-Ni-based, Fe-Co-based, Fe-Al-based, Fe-Si-based, and Fe-Si-Al-based. , Fe-Ni-Si-Al type and the like. Further, as the crystalline metal powder, a fine crystalline metal obtained by adding a small amount of N (nitrogen), C (carbon), O (oxygen), B (boron), etc. to the crystalline metal powder to make it finer. You may use powder.
As the magnetic metal powder, those having different materials or those having different average particle diameters may be mixed in two or more kinds.

Further, it is preferable to adjust the shape of the magnetic metal powder such as spherical or flat. For example, when increasing the filling property, it is preferable to use a magnetic metal powder having a particle size of several μm to several tens of μm and a spherical shape. Such a magnetic metal powder can be produced, for example, by an atomizing method or a method of thermally decomposing a metal carbonyl. The atomizing method has the advantage that spherical powder can be easily formed, and the molten metal is discharged from a nozzle, and a jet stream of air, water, an inert gas, etc. is blown onto the discharged molten metal to solidify it as droplets. This is a method of making powder. When producing amorphous magnetic metal powder by the atomizing method, it is preferable to set the cooling rate to about 1 × 10 ⁶ (K / s) in order to prevent the molten metal from crystallizing.

When the amorphous alloy powder is produced by the atomizing method described above, the surface of the amorphous alloy powder can be made smooth. When the amorphous alloy powder having less surface irregularities and a small specific surface area is used as the magnetic metal powder, the filling property with respect to the binder resin can be improved. Further, the filling property can be further improved by performing the coupling treatment.

In addition to the binder resin, the heat conductive filler, the inorganic filler and the magnetic metal powder described above, the noise-suppressing heat conductive sheet may appropriately contain other components depending on the purpose.
Examples of other components include thixotropy-imparting agents, dispersants, curing accelerators, retarders, slight tackifiers, plasticizers, flame retardants, antioxidants, stabilizers, colorants and the like.

(First heat dissipation member)
As shown in FIG. 1, the semiconductor device 1 of the present invention includes a first heat radiating member 41 on one surface 10a side of the substrate 10 at a position in contact with the noise suppressing heat conductive sheet 30.
Here, the first heat radiating member 41 is a member that absorbs heat generated from the heat source (high frequency semiconductor device 20) and dissipates it to the outside. By connecting to the high-frequency semiconductor device 20 via the noise-suppressing heat conductive sheet 30, the heat generated by the high-frequency semiconductor device 20 can be diffused to the outside, and high heat dissipation of the antenna array 1 for 5G communication can be realized.

The type of the first heat radiating member 41 is not particularly limited, and can be appropriately selected according to the heat radiating property required for the 5G communication antenna array of the present invention. Examples thereof include radiators, coolers, heat sinks, heat spreaders, die pads, cooling fans, heat pipes, metal covers, housings and the like. Among these heat radiating members, it is preferable to use a radiator, a cooler, or a heat sink from the viewpoint of obtaining more excellent heat radiating property. The material constituting the first heat radiating member 41 described above may contain metals such as aluminum, copper and stainless steel, graphite and the like from the viewpoint of increasing the thermal conductivity.

(antenna)
As shown in FIG. 1, the 5G communication antenna array 1 according to the embodiment of the present invention includes at least one antenna 50 formed on the other surface 10b of the substrate 10.
Here, the antenna is a device for transmitting and receiving radio waves in a wireless communication environment. In the 5G communication antenna array 1 according to the embodiment of the present invention, an antenna used for a normal antenna array can be used, and an antenna can be appropriately selected according to the performance required for the 5G communication antenna array.

In the 5G communication antenna array 1 according to the embodiment of the present invention, the arrangement pitch P of the antenna 50 is preferably 1/4 or more and 1/4 or less with respect to the communication wavelength. It is preferably more than 1/2 and less than 1/2. For example, when the communication wavelength used is 28 GHz, the arrangement pitch P of the antenna 50 is preferably 2.5 to 10 mm, more preferably 2.5 to 5 mm. When the communication wavelength used is 24 Ghz, it is preferably 18 to 75 mm, more preferably 18 to 37 mm. This is because the radio wave radiation characteristics of the antenna array can be improved.

Further, the number of the antennas 50 in the 5G communication antenna array 1 according to the embodiment of the present invention is not particularly limited as long as it is at least one, depending on the specifications of the 5G communication antenna array and the required performance. Can be determined as appropriate.
Further, the number of the antennas 50 is preferably a plurality (two or more) from the viewpoint of improving the communication speed and the utilization efficiency. For example, when the 5G communication antenna array 1 according to the embodiment of the present invention is Massive MIMO, the number of the antennas 50 can be 128.

(Second heat dissipation member)
As shown in FIG. 1, the 5G communication antenna array 1 according to the embodiment of the present invention includes the second heat radiating member 42 on the other surface 10b side of the substrate 10.
Here, the second heat radiating member 42 is a member that absorbs heat generated from a heat source (antenna 50) and dissipates it to the outside.

The type of the second heat radiating member 42 is not particularly limited, and can be appropriately selected according to the heat radiating property required for the half 5G communication antenna array of the present invention. For example, similarly to the first heat dissipation member 41 described above, a radiator, a cooler, a heat sink, a heat spreader, a die pad, a cooling fan, a heat pipe, a metal cover, a housing, and the like can be used. Among these heat radiating members, it is preferable to use a heat spreader from the viewpoint that excellent heat radiating property can be obtained and excellent space saving property can be realized.

As shown in FIG. 1, an antenna 50 is provided under the second heat radiating member 42, and a heat conductive sheet 60, which will be described later, is placed between the second heat radiating member 42 and the antenna 50. When not intervening, it is preferable to leave a certain distance between the second heat radiating member 42 and the antenna 50 so that the second heat radiating member 42 and the antenna 50 do not come into contact with each other. The distance between the second heat radiating member 42 and the antenna 50 at that time is not particularly limited, but is preferably about 500 to 2000 μm.

(Heat conduction sheet)
Further, as shown in FIG. 1, the 5G communication antenna array 1 according to the embodiment of the present invention further includes a heat conductive sheet 60 between the at least one antenna 50 and the second heat radiating member 42. Is preferable. By connecting the antenna 50 and the second heat radiating member 42 via the heat conductive sheet 60, the heat generated from the antenna 50 is diffused to the outside, and high heat dissipation of the antenna array 1 for 5G communication is realized. it can.

Here, the heat conductive sheet 60 is a sheet-like member having heat conductivity. The performance of the thermal conductivity is not particularly limited, and basically, it can be appropriately changed according to the performance required for the antenna array for 5G communication of the present invention. The heat conductive sheet 60 does not have a noise suppressing effect, unlike the noise suppressing heat conductive sheet 30 described above. This is because if the heat conductive sheet 60 has a noise suppressing effect, the radio wave transmission / reception performance of the antenna 50 may be deteriorated.

Further, the size of the heat conductive sheet 60 (size along the extending direction of the sheet (excluding the thickness direction of the sheet)) is not particularly limited. For example, as shown in FIG. 1, it can be composed of a plurality of sheets having a size similar to the size of the antenna 50. Further, as shown in FIG. 2, the size of the heat conductive sheet 60 can be increased so that a plurality of the antennas 50 are formed on one heat conductive sheet 30.

Further, the thickness of the heat conductive sheet 60 (thickness along the stacking direction of each member of the antenna array for 5G communication) is not particularly limited, and the distance between the antenna 50 and the second heat radiating member 42 and the like. It can be appropriately changed according to the size of the antenna array 1 for 5G communication and the like.
For example, the thickness of the heat conductive sheet 60 is preferably 500 μm or less, and more preferably 300 μm or less, from the viewpoint that heat dissipation can be realized at a higher level. If the thickness of the heat conductive sheet 60 exceeds 500 μm, the distance between the antenna 50 and the second heat radiating member 42 becomes long, so that the heat conductivity may decrease.

Further, the heat conductive sheet 60 is preferably thermal resistance is less than 300Kmm ² / W, more preferably 35Kmm ² / W or less, even more preferably at most 30Kmm ² / W. This is because the heat generated from the antenna 50 can be transferred to the second heat radiating member 42 more efficiently, and the heat radiating property can be further improved. The heat resistance of the heat conduction sheet 60 is preferably at 1Kmm ² / W or more, more preferably 10Kmm ² / W or more. By setting the thermal resistance of the heat conductive sheet 60 to 1 Kmm ² / W or more, the rate of change in thermal resistance is reduced even when the contact thermal resistance changes.

Further, the heat conductive sheet 60 preferably has adhesiveness or adhesiveness on the surface. This is because the adhesiveness between the heat conductive sheet 60 and other members (the antenna 50, the second heat radiating member 42) can be improved.
The method of imparting tackiness to the surface of the heat conductive sheet 60 is not particularly limited. For example, the binder resin constituting the heat conductive sheet 60, which will be described later, can be optimized to have tackiness, or an adhesive layer having tackiness can be separately provided on the surface of the heat conductive sheet 60. is there.

Furthermore, the heat conductive sheet 60 preferably has flexibility. Since the shape of the heat conductive sheet 60 can be easily changed, the ease of assembling the antenna array 1 for 5G communication is improved, and the surface shape of the antenna 50 can be followed, so that the bonding force with the antenna 50 can be increased. It can also be increased. The flexibility of the heat conductive sheet 60 is not particularly limited, but for example, the storage elastic modulus at 25 ° C. measured by dynamic elastic modulus measurement is preferably in the range of 50 kPa to 50 MPa.

The material constituting the heat conductive sheet 60 is not particularly limited as long as it has high heat conductivity.
For example, the heat conductive sheet 30 can be made of a material containing a binder resin, a heat conductive filler, and other components.

Hereinafter, the materials constituting the heat conductive sheet 60 will be described.
The binder resin constituting the heat conductive sheet 60 is a resin component that serves as a base material for the heat conductive sheet. The type and content thereof are the same as those of the binder resin of the noise suppression heat conductive sheet 30 described above.

The heat conductive filler contained in the heat conductive sheet 60 is a component for improving the heat conductivity of the sheet. The shape, material, average particle size, content, etc. are the same as those of the binder resin of the noise suppression heat conductive sheet 30 described above.

The heat conductive sheet 60 may appropriately contain other components depending on the purpose, in addition to the binder resin and the heat conductive filler described above.
Examples of other components include the inorganic filler described in the noise suppression heat conductive sheet 30 described above, a thixotropy imparting agent, a dispersant, a curing accelerator, a retarding agent, a slight tackifier, a plasticizer, and a flame retardant. Examples include antioxidants, stabilizers, colorants and the like.
Since the heat conductive sheet 60 is not required to have a high noise suppressing effect, it is preferable that the heat conductive sheet 60 does not contain magnetic powder, or even if it contains a small amount of magnetic powder.

(Other parts)
The antenna array 1 for 5G communication according to an embodiment of the present invention includes the substrate 10, the high frequency semiconductor device 20, the noise suppression heat conductive sheet 30, the first heat radiating member 41, the second heat radiating member 42, the antenna 50, and the above-mentioned antenna array 1. In addition to the heat conductive sheet 60 as a suitable member, a member usually used for an antenna array can be appropriately provided.

For example, as shown in FIG. 1, the 5G communication antenna array 1 according to the embodiment of the present invention can further include a case member 70.
Further, although not shown, an adhesive layer or the like for adhering each member can be formed as needed.

<Manufacturing method of antenna array for 5G communication>
The method for manufacturing the antenna array for 5G communication of the present invention is not particularly limited except that the noise suppression heat conductive sheet 30 is formed above or below the at least one high frequency semiconductor device 20.
For example, as shown in FIG. 1, when the noise suppression heat conduction sheet 30 is composed of a plurality of sheets having a size similar to the size of the high frequency semiconductor device 20, the noise suppression heat conduction sheet 30 is prepared in advance. A step of cutting 30 and adjusting the size, laminating them on each high-frequency semiconductor device 20 and crimping them is provided. Further, as shown in FIG. 2, in the case of being composed of one noise suppression heat conduction sheet 30, after forming all the high frequency semiconductor devices 20 on the substrate 10, one noise suppression heat conduction sheet 30 is formed. A step of laminating and crimping the sheets 30 is provided.
The other steps can be performed according to the conventional antenna array manufacturing process.

When the heat conductive sheet 60 is provided between the antenna 50 and the second heat radiating member 42, after the antenna 50 is formed, the antenna 50 is formed in the same manner as in the step of forming the noise suppressing heat conductive sheet 30. A step of laminating the heat conductive sheet 60 on the antenna 50 and crimping the heat conductive sheet 60 is further provided.

<Antenna structure>
The antenna structure according to an embodiment of the present invention includes a substrate, a high-frequency semiconductor device, a noise-suppressing heat conductive sheet and a first heat-dissipating member sequentially formed on one surface of the substrate, and the other surface of the substrate. The antenna and the second heat radiating member, which are sequentially formed, are provided.
In the antenna structure according to the embodiment of the present invention, by providing the noise suppression heat conductive sheet on one surface side of the substrate, it is possible to absorb and / or block the electromagnetic waves that become noise. It is possible to suppress an increase in crosstalk without hindering the transmission and reception of radio waves. Further, in the antenna structure according to the embodiment of the present invention, since the noise suppressing heat conduction sheet is provided between the high frequency semiconductor device and the first heat radiating member, the heat generated from the high frequency semiconductor device is efficiently generated. It can be transmitted to the first heat dissipation member, and excellent heat dissipation can be realized.

The antenna structure in the present invention means a structure having an antenna function, including an antenna device composed of one antenna, an antenna array composed of a plurality of antennas, and the like.
Further, each member constituting the antenna structure according to the embodiment of the present invention is the same as the member described in the above-described 5G communication antenna array according to the embodiment of the present invention.

<Noise suppression heat conduction sheet>
The noise suppression heat conduction sheet according to the embodiment of the present invention is a noise suppression heat conduction sheet used for a 5G communication antenna array.
Then, in the present invention, as shown in FIG. 1, at least one high-frequency semiconductor device 20 formed on the substrate 10 of the antenna array 1 for 5G communication and a heat radiating member (first heat radiating member 41 in FIG. 1) It is provided between.

The noise-suppressing heat-conducting sheet 30 according to the embodiment of the present invention can absorb and / or block electromagnetic waves that become noise, and is excellent in heat conductivity. Therefore, in the 5G communication antenna array 1, by using it between the high frequency semiconductor device 20 and the heat radiating member, it is possible to suppress an increase in crosstalk and improve heat radiating property. Therefore, the noise suppression heat conductive sheet 30 according to the embodiment of the present invention is suitable for use in a 5G communication antenna array.

The configuration of the noise suppression heat conduction sheet 30 according to the embodiment of the present invention is the same as the noise suppression heat conduction sheet described in the 5G communication antenna array according to the embodiment of the present invention described above. ..

<Heat conduction sheet>
The heat conductive sheet according to the embodiment of the present invention is a heat conductive sheet used for a 5G communication antenna array.
Then, in the present invention, as shown in FIG. 1, between at least one antenna 50 formed on the substrate 10 of the 5G communication antenna array 1 and the heat radiating member (second heat radiating member 42 in FIG. 1). It is provided in.

Since the heat conductive sheet 60 according to the embodiment of the present invention is excellent in heat conductivity, the heat dissipation can be improved by using the heat conductive sheet 60 between the antenna 50 and the heat radiating member in the 5G communication antenna array 1. .. Therefore, the heat conductive sheet 60 according to the embodiment of the present invention is suitable for use in an antenna array for 5G communication.

The configuration of the heat conductive sheet 60 according to the embodiment of the present invention is the same as the heat conductive sheet described in the antenna array for 5G communication according to the embodiment of the present invention described above.

Next, the present invention will be specifically described based on examples. However, the present invention is not limited to the following examples.

<Example 1>
In Example 1, a three-dimensional electromagnetic field simulator ANSYS HFSS (manufactured by Ansys) was used to create an analysis model of the antenna array as shown in FIG. 1, and crosstalk when the conditions of the noise suppression heat conduction sheet were changed. The suppression effect and heat dissipation were evaluated.

(1) Regarding the crosstalk suppression effect of the antenna array, the same conditions were set except for the noise suppression heat conduction sheet. The conditions of each member constituting the antenna array are shown below. In order to simulate the antenna array, a model of the antenna array was created by cutting out only the two antenna parts of the antenna array, and repeated boundary conditions were applied. The size of the model of the cut-out antenna part is 10 mm in width, 10 mm in depth, and 5 mm in height.
In addition, in the model of the antenna array in which only the two antenna parts are cut out, two microstrip lines are simulated by arranging them in parallel or in a straight line, and the size is assumed to be an antenna array with 128 antennas.
For the substrate 10, the substrate material was a FR4 double-sided glass epoxy substrate.
The high-frequency semiconductor device 20 was simulated with a microstrip line having a width of 55 μm, a thickness of 20 μm, and a length of 2000 μm. The output of the high frequency semiconductor device 20 in each sample is 5 W.
The first heat radiating member 41 is a heat sink made of an aluminum plate having the same size (width 20 mm, depth 10 mm) as the antenna array model.
The antenna 50 is a patch antenna having 28 GHz as a resonance frequency.
Regarding the heat conductive sheet 60, a two-component addition reaction type liquid silicone was used as the resin binder, and 15% by mass of pitch-based carbon fibers having an average fiber length of 150 μm was contained as the fibrous heat conductive filler. The size of the heat conductive sheet 60 is 5 mm in width, 5 mm in depth and 0.5 mm in thickness, and the thermal resistance is 40 Kmm ² / W.
The second heat radiating member 42 is a heat spreader made of aluminum nitride having the same size as the antenna array model.
As the case member 70, a resin case was used.

(2) The configuration of the noise suppression heat conduction sheet used for each analysis model of the antenna array is as follows.
Comparative Example 1-1: Air was used as a noise-suppressing heat conductive sheet. That is, the noise suppression heat conductive sheet 30 was not used, and a distance of 500 μm was provided between the high frequency semiconductor device 20 and the first heat radiating member 41.
Comparative Example 1-2: An insulating sheet containing 85% by mass of magnetic powder was used as the noise suppression heat conductive sheet 30. The thickness of the sheet is 500 μm and the thermal resistance is 300 Kmm ² / W.
Comparative Example 1-3: A sheet made of a dielectric (relative permittivity 4) was used as the noise suppression heat conductive sheet 30. The thickness of the sheet is 500 μm and the thermal resistance is 200 Kmm ² / W.
INDUSTRIAL APPLICABILITY A sheet containing 6% by mass of a fibrous thermal conductive filler (pitch-based carbon fiber having an average fiber length of 200 μm) and 85% by mass of magnetic powder was used as the noise-suppressing thermal conductive sheet 30. The thickness of the sheet is 500 μm and the thermal resistance is 40 Kmm ² / W.

(Evaluation of crosstalk suppression effect)
The crosstalk suppression effect of each analysis model of the antenna array was evaluated by measuring the transmission characteristics between the two microstrip lines. The terminals at both ends of the microstrip line, which are likened to one high-frequency semiconductor device, are port 1 and port 2, respectively, along the longitudinal direction of the model, and the other is also port 3 and port 4, which are predicted in each analysis model. The amount of near-end crosstalk (S31) to be performed was calculated. The calculated S31 is shown in FIG.

From the results of FIG. 3, a good crosstalk suppression effect was confirmed for the analysis model of Invention Example 1-1 and the analysis model of Comparative Example 1-1 without the noise suppression heat conduction sheet 30 included in the scope of the present invention. It was.

(Evaluation of heat dissipation)
For the evaluation of the heat dissipation of each analysis model of the antenna array, the predicted surface temperature of the high-frequency semiconductor device 20 after the steady state was calculated under the condition of the temperature of 25 ° C. The calculated surface temperature is shown in Table 1.

From the results in Table 1, it was found that the analytical model of Invention Example 1-1 included in the scope of the present invention has the best heat dissipation. On the other hand, in the analysis model of Comparative Example 1-1 which does not use the noise suppression heat conductive sheet 30, it was found that the surface temperature of the high frequency semiconductor device 20 was high and the heat dissipation was not obtained.

<Example 2>
In the second embodiment, under the same conditions as in the first embodiment, the analysis model of the antenna array as shown in FIG. 1 was produced by using the three-dimensional electromagnetic field simulator, and the dielectric constant of the noise suppression heat conductive sheet was changed. The crosstalk suppression effect was evaluated.

(1) The conditions for each analysis model of the antenna array are the same except for the conditions of the noise suppression heat conduction sheet, and the conditions are as described in Example 1.
(2) The dielectric constant and magnetic permeability of the noise suppression heat conductive sheet used in each analysis model of the antenna array are as follows. In Samples 1 and 2, all the conditions other than the dielectric constant of the noise suppression heat conductive sheet were the same.
Sample 2-1: A sheet having a dielectric constant of 10 and a magnetic permeability of 5 was used as the noise-suppressing heat conductive sheet 30.
Sample 2-2: A sheet having a dielectric constant of 20 and a magnetic permeability of 5 was used as the noise-suppressing heat conductive sheet 30.

Then, for the evaluation of the crosstalk suppression effect, the amount of near-end crosstalk (S31) expected in each analysis model at 10 GHz, 20 GHz, 40 GHz, and 60 GHz was calculated by electromagnetic field analysis software (ANSYS, HFSS). Figures 4 (a) to 4 (d) show S31 calculated at 10 GHz, 20 GHz, 40 GHz, and 60 GHz.

From the results of FIGS. 4 (a) to 4 (d), the sample 2-2 having a dielectric constant of 20 for the noise suppression heat conductive sheet 30 can obtain a higher crosstalk suppression effect in any frequency band. I understood.

<Example 3>
In Example 3, under the same conditions as in Example 1, an analysis model of the antenna array as shown in FIG. 1 was produced by using the three-dimensional electromagnetic field simulator, and the dielectric constant of the noise suppression heat conductive sheet was changed. The crosstalk suppression effect was evaluated.

(1) All the analysis models of the antenna array have the same conditions except for the conditions of the noise suppression heat conduction sheet, and each condition is as described in Example 1.
(2) The dielectric constant and magnetic permeability of the noise suppression heat conductive sheet used in each analysis model of the antenna array are as follows. In Samples 1 and 2, all the conditions other than the dielectric constant of the noise suppression heat conductive sheet were the same.
Sample 3-1: A sheet having a dielectric constant of 10 and a magnetic permeability of 5 was used as the noise-suppressing heat conductive sheet 30.
Sample 3-2: A sheet having a dielectric constant of 10 and a magnetic permeability of 1 was used as the noise-suppressing heat conductive sheet 30.

Then, for the evaluation of the crosstalk suppression effect, the amount of near-end crosstalk (S31) expected in each analysis model at 28 GHz was calculated by electromagnetic field analysis software (ANSYS, HFSS). The calculated S31 is shown in FIG.

From the results shown in FIG. 5, it was found that the sample 3-1 having a high magnetic permeability of the noise suppression heat conductive sheet 30 can obtain a higher crosstalk suppression effect.

According to the present invention, it is possible to provide an antenna array and an antenna structure for 5G communication having excellent heat dissipation and crosstalk suppressing effect. Further, according to the present invention, it is possible to provide a noise-suppressing heat-conducting sheet and a heat-conducting sheet suitable for use in a 5G communication antenna array and an antenna structure having excellent heat dissipation and cross-talk suppressing effect. Become.

1 5G communication antenna array 10 Board 10a One side of the board 10b The other side of the board 20 High frequency semiconductor device 30 Noise suppression heat conduction sheet 41 First heat dissipation member 42 Second heat dissipation member 50 Antenna 60 Heat conduction sheet 70 Case member Arrangement pitch of P antenna

Claims (11)

With the board
At least one high-frequency semiconductor device, a noise-suppressing heat-conducting sheet, and a first heat-dissipating member sequentially formed on one surface of the substrate.
With at least one antenna and a second heat radiating member sequentially formed on the other surface of the substrate.
An antenna array for 5G communication, which comprises. The antenna array for 5G communication according to claim 1, further comprising a heat conductive sheet between the at least one antenna and the second heat radiating member. The antenna array for 5G communication according to claim 1 or 2, wherein the noise suppression heat conductive sheet contains magnetic powder. The antenna array for 5G communication according to any one of claims 1 to 3, wherein the noise suppressing heat conductive sheet contains carbon fibers. The antenna array for 5G communication according to any one of claims 1 to 4, wherein the noise suppression heat conductive sheet has a dielectric constant of 20 or more. The antenna array for 5G communication according to any one of claims 1 to 5, wherein the noise suppression heat conductive sheet has a magnetic permeability of more than 1. The antenna array for 5G communication according to any one of claims 1 to 6, wherein the noise-suppressing heat conductive sheet has a thermal resistance of 300 Kmm ² / W or less. The 5G communication antenna array according to any one of claims 1 to 7, wherein the 5G communication antenna array is used for Massive MIMO. With the board
A high-frequency semiconductor device, a noise-suppressing heat-conducting sheet, and a first heat-dissipating member sequentially formed on one surface of the substrate.
An antenna and a second heat radiating member sequentially formed on the other surface of the substrate.
An antenna structure characterized by being provided with. A noise-suppressing heat-conducting sheet used in 5G communication antenna arrays.
A noise-suppressing heat-conducting sheet provided between at least one high-frequency semiconductor device formed on a substrate and a heat-dissipating member. A heat conductive sheet used for 5G communication antenna arrays.
A heat conductive sheet provided between at least one antenna formed on a substrate and a heat radiating member.

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