JP2020159795A - Three-dimensional coordinate measurement device - Google Patents

Abstract

To provide a three-dimensional coordinate measurement device capable of measuring even a long measurement object without deterioration in measurement accuracy.SOLUTION: A three-dimensional coordinate measurement device 1 comprises: a surface plate 10 which includes an upper surface 10T; an X-axis which moves a measurement probe in an X-axis direction orthogonal to a normal direction of the upper surface 10T; a Y-axis which moves the measurement probe in a Y-axis direction orthogonal to the normal direction of the upper surface 10T and to the X-axis direction; a Z-axis which moves the measurement probe in the normal direction of the upper surface 10T; and a fourth axis which is set separately from the X-, Y-, and Z-axes, and moves a measurement object in a direction orthogonal to the normal direction of the upper surface 10T.SELECTED DRAWING: Figure 4

Description

The present invention relates to a three-dimensional coordinate measuring device, and more particularly to a three-dimensional coordinate measuring device that measures a three-dimensional shape of an object to be measured by moving a measuring probe along the X-axis, Y-axis, and Z-axis orthogonal to each other.

A general three-dimensional coordinate measuring device has a surface plate on which an object to be measured is placed, and a Y carriage is movably supported on the upper portion of the surface plate in the front-rear direction (Y-axis direction). The Y carriage has an X guide that is bridged along the left-right direction (X-axis direction), and the X-carriage is supported by the X guide so as to be movable in the X-axis direction. Further, the Z carriage is movably supported in the vertical direction (Z axis direction) of the X carriage, and a measurement probe is attached to the lower end of the Z carriage. As a result, the stylus of the measuring probe is moved in the X-axis, Y-axis, and Z-axis directions to measure the three-dimensional shape of the object to be measured placed on the surface plate (see Patent Document 1). ..

Japanese Unexamined Patent Publication No. 2016-145823

When, for example, an attempt is made to measure a long object to be measured by a three-dimensional coordinate measuring device, for example, the moving stroke of the Y carriage must be widened, so that the surface plate needs to be enlarged. However, when the surface plate is enlarged, there is a problem that the amount of change in the deflection of the surface plate becomes large and the measurement accuracy deteriorates.

Therefore, it is difficult for the conventional three-dimensional coordinate measuring device to measure a long object to be measured without deteriorating the measurement accuracy.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a three-dimensional coordinate measuring device capable of measuring even a long object to be measured without deteriorating the measurement accuracy. And.

The three-dimensional coordinate measuring device for achieving the object of the present invention is a three-dimensional coordinate measuring device that measures the three-dimensional coordinates of an object to be measured by using a measuring probe, and includes a platen having an upper surface and a measuring probe. A first axis that moves the measurement probe in the first direction that is orthogonal to the normal direction of the upper surface, and a second direction that moves the measurement probe in the second direction that is orthogonal to the normal direction of the upper surface and is orthogonal to the first direction. The axis, the third axis that moves the measurement probe in the normal direction of the upper surface, and the first axis, the second axis, and the third axis are configured separately, and the object to be measured is oriented in a direction orthogonal to the normal direction of the upper surface. It includes a fourth axis to be moved.

In one embodiment of the present invention, the fourth axis is preferably parallel to the second axis.

One embodiment of the present invention preferably comprises a table that is movable along a fourth axis, and the table has a mounting surface on which the object to be measured is placed.

In one embodiment of the present invention, the table is mounted on the upper surface of the surface plate, and a guide member for movably supporting the table along the fourth axis is provided between the upper surface of the surface plate and the lower surface of the table. Is preferable.

In one embodiment of the present invention, the first pillar member and the second pillar member erected extending in the normal direction of the upper surface and the upper ends of the first pillar member and the second pillar member are bridged to each other. A first moving body that has a guide member extending along one axis and can move along the second axis, and a guide member of the first moving body that is provided and can move along the first axis. It is preferable to have a second moving body, and a third moving body provided on the second moving body and to which a measurement probe is attached and movable along a third axis with respect to the second moving body.

According to the present invention, even a long object to be measured can be measured without deteriorating the measurement accuracy.

Perspective view showing the appearance of the three-dimensional coordinate measuring device to which the present invention is applied. Front view showing the appearance of the three-dimensional coordinate measuring device shown in FIG. Front view showing the right side of the surface plate enlarged Overall perspective view of the table moving device mounted on the surface plate Top view of the table moving device shown in FIG. Explanatory drawing for measuring the left side part of the object to be measured with a three-dimensional coordinate measuring device Explanatory drawing for measuring the right part of the object to be measured with a three-dimensional coordinate measuring device

Hereinafter, the three-dimensional coordinate measuring device according to the present invention will be described with reference to the accompanying drawings.

1 and 2 are a perspective view and a front view showing the appearance of the three-dimensional coordinate measuring device 1 to which the present invention is applied.

The three-dimensional coordinate measuring device 1 shown in these figures has a surface plate 10 supported on an installation surface (floor surface) via a gantry 12. The surface plate 10 is formed of a stone material such as granite or marble in a rectangular shape in a plan view, and has a flat upper surface 10T.

In the present specification, a three-dimensional Cartesian coordinate system of the X-axis, the Y-axis, and the Z-axis will be described.

The X-axis shown in FIGS. 1 and 2 is an axis for moving the measurement probe 26 described later in the X-axis direction orthogonal to the normal direction of the upper surface 10T, and corresponds to the first axis of the present invention, and the X-axis direction is Corresponds to the first direction of the present invention. The Y-axis is an axis that moves the measurement probe 26 in the Y-axis direction orthogonal to the normal direction of the upper surface 10T and in the Y-axis direction orthogonal to the X-axis direction, and corresponds to the second axis of the present invention. The axial direction corresponds to the second direction of the present invention. The Z-axis is an axis for moving the measurement probe 26 in the normal direction of the upper surface 10T, and corresponds to the third axis of the present invention.

A table 70, which will be described later, is mounted on the upper surface 10T of the surface plate 10, and the upper surface 70T of the table 70 is configured as a mounting surface on which an object to be measured is placed. This table 70 corresponds to the table of the present invention.

A gate-shaped Y carriage 14 is installed on the upper surface 10T side of the surface plate 10. The Y carriage 14 has a right Y carriage 16 and a left Y that extend in the Z-axis direction on each of the right side and the left side of the surface plate 10 when the surface plate 10 is viewed from the front side (see FIG. 2). It has a carriage 18, and a columnar X guide 20 that spans the upper ends of the right Y carriage 16 and the left Y carriage 18 and extends in the X-axis direction. Here, the Y carriage 15 corresponds to the first moving body of the present invention. Further, the right Y carriage 16, the left Y carriage 18, and the X guide 20 correspond to the first pillar member, the second pillar member, and the guide member of the present invention.

The lower end of the right Y carriage 16 is movably supported by a Y guide 42 described later along the Y axis formed on the surface plate 10. Further, a drive unit (not shown) that abuts on the Y guide 42 is provided at the lower end of the right Y carriage 16, and the right Y carriage 16 moves along the Y guide 42 by the driving force of the drive unit. .. The lower end of the left Y carriage 18 is slidably supported by the upper surface 10T of the surface plate 10.

With the above configuration, the Y carriage 14 is movably supported with respect to the platen 10 in the Y-axis direction, and the right Y carriage 16 is set as the drive side by the drive unit at the lower end of the right Y carriage 16, and the left It reciprocates in the Y-axis direction with the Y carriage 18 as the driven side.

A Z column 22 is movably supported by the X guide 20 along the X guide 20. The Z column 22 has a built-in drive unit (not shown) that abuts on the X guide 20, and moves along the X guide 20 by the driving force of the drive unit. Here, the Z column 22 corresponds to the second moving body of the present invention.

Further, inside the Z column 22, a columnar Z carriage 24 extending in the Z axis direction is supported so as to be movable in the Z axis direction (see FIG. 2), and the lower end side of the Z carriage 24 is the Z column. It protrudes from the lower end side of 22. The Z column 22 has a built-in drive unit (not shown) that abuts on the Z carriage 24, and the drive force of the drive unit causes the Z carriage 24 to move in the Z axis direction with respect to the Z column 22.

A measurement probe 26 such as a touch probe is attached to the lower end of the Z carriage 24. The measuring probe 26 has, for example, a rod-shaped stylus 28 having a tip sphere, and the measuring probe 26 includes the presence or absence of contact of the tip (tip sphere) of the stylus 28 with the object to be measured and the object to be measured at the tip of the stylus 28. The amount of displacement of the stylus 28 caused by contact with the stylus 28 is detected. Here, the Z carriage 24 corresponds to the third moving body of the present invention.

The three-dimensional coordinate measuring device 1 configured as described above measures by moving the Y carriage 14 in the Y-axis direction, moving the Z column 22 in the X-axis direction, and moving the Z carriage 24 in the Z-axis direction. The stylus 28 of the probe 26 is moved in the X, Y, and Z axis directions, and the tip (tip sphere) of the stylus 28 is moved along the surface of the object to be measured placed on the table 70. Then, the position of the Y carriage 14 in the Y-axis direction (movement amount), the position of the Z column 22 in the X-axis direction (movement amount), the position of the Z carriage 24 in the Z-axis direction (movement amount), and the stylus 28 at that time. By measuring the position (displacement amount) of, the three-dimensional coordinates of each position on the surface of the object to be measured are measured. Since the processing related to the measurement of the three-dimensional coordinates is well known, detailed description thereof will be omitted.

Next, an example of the Y guide 42 that movably supports the Y carriage 14 in the Y-axis direction will be described.

FIG. 3 is an enlarged front view showing the right side portion of the surface plate 10.

As shown in FIG. 3, the surface plate 10 has an upper surface 10T and a lower surface 10B perpendicular to the Z axis, and a right side surface 10R perpendicular to the X axis. Further, a groove 40 along the Y-axis direction is provided on the upper surface 10T side of the surface plate 10 near the right side surface 10R of the surface plate 10.

In addition, in FIGS. 1 and 2, a stretchable covering member such as a bellows cover is installed in the upper opening of the groove 40, and a plate-shaped covering member such as a metal cover is attached to the front side and the rear side of the surface plate 10. Although the state is shown, FIG. 3 shows a state in which those covering members are removed.

The groove 40 has a right side surface 40R and a left side surface 40L perpendicular to the X axis and a bottom surface 40B perpendicular to the Z axis.

As a result, the right side surface 40R of the groove 40, the right side surface 10R of the surface plate 10, the upper surface 10T of the surface plate 10 between them, and the lower surface 10B of the surface plate 10 extend in the Y-axis direction. 42 is configured. In the following description, the right side surface 40R is also referred to as the left side surface 42L of the Y guide 42, the right side surface 10R is also referred to as the right side surface 42R of the Y guide 42, and the lower surface 10B is also referred to as the lower surface 42B of the Y guide 42.

A wide support portion 50 is provided in the Y-axis direction at the lower end portion of the right Y carriage 16. As shown in FIG. 3, the support portion 50 faces the upper surface 42T of the Y guide 42 and is arranged along the direction (horizontal direction) orthogonal to the Z axis, and the base end portions 52 to Z. The right side portion 54 extending in the axial direction and arranged on the side facing the right side surface 42R of the Y guide 42, and the right side portion 54 extending in the Z-axis direction from the base end portion 52 facing the left side surface 42L of the Y guide 42. It has a left side portion 56 arranged on the side.

Further, a support plate 58 extending in the X-axis direction to a position facing the lower surface 42B of the Y guide 42 is provided at the lower end of the right side portion 54.

Each of the base end portion 52, the right side portion 54, the left side portion 56, and the support plate 58 of the support portion 50 has a plurality of disc shapes that are slidable with respect to the Y guide 42 by ejecting air. Air pads 60, 60 ... Are provided. Further, a disk-shaped air pad (not shown) that can slide with respect to the upper surface 10T of the surface plate 10 by ejecting air to the lower end of the left Y carriage 18 shown in FIG. 4 is also provided.

The Y carriage 14 is movably supported in the Y-axis direction by a drive unit (not shown) that abuts on the Y guide 42, the Y guide 42, a plurality of air pads 60, 60, and the like.

Regarding the configuration for moving the Y carriage 14 in the Y axis direction, the configuration for moving the Z column 22 in the X axis direction, and the configuration for moving the Z carriage 24 in the Z axis direction, for example, special features are provided. Since those disclosed in Japanese Patent Publication No. 2016-145823 may be applied, detailed description thereof will be omitted here.

Next, the table 70 shown in FIGS. 1 and 2 will be described.

4 and 5 are perspective views and top views of the table 70 and the table moving device 72 mounted on the upper surface 10T of the surface plate 10. In FIGS. 4 and 5, in order to show the configuration of the table moving device 72 in an easy-to-understand manner, the table 70 is shown by a two-dot chain line, and the table moving device 72 is shown by a solid line.

Here, the general three-dimensional coordinate measuring device is for measuring by placing the object to be measured on the upper surface of the surface plate, but the three-dimensional coordinate measuring device 1 of the embodiment is a table as described above. The object to be measured is placed on the upper surface 70T of 70 for measurement.

Therefore, in the three-dimensional coordinate measuring device 1 of the embodiment, as shown in FIGS. 4 and 5, a table 70 is mounted on the upper surface 10T of the surface plate 10, and the table 70 is mounted by the table moving device 72, for example. By making the structure movable in the Y-axis direction, it is not necessary to increase the size of the surface plate 10 even when it corresponds to a long object to be measured, so that it is possible to measure without deteriorating the measurement accuracy. ing. Here, the Y-axis, which is the moving axis of the table 70, corresponds to the fourth axis of the present invention. That is, the three-dimensional coordinate measuring device 1 of the embodiment is configured separately from the X-axis, the Y-axis, and the Z-axis, and moves the object to be measured in the Y-axis direction orthogonal to the normal direction of the upper surface 10T (Y-axis). 4th axis) is provided.

The table 70 is formed in a rectangular shape in a plan view, and as an example, the long side portions 70A and 70A (see FIG. 1) are arranged along the Y axis, and the short side portions 70B and 70B are arranged along the X axis. There is. Further, the table 70 is made of a highly rigid material that is hard to bend, for example, a stone material such as granite or marble, or a metal.

The table moving device 72 is a device that moves the table 70 with respect to the surface plate 10 along the Y axis, and is arranged between the upper surface 10T of the surface plate 10 and the lower surface of the table 70.

The table moving device 72 has a pair of linear motion guides 74 and 74 and a ball screw device 76. Here, the linear motion guide 74 corresponds to the guide member of the present invention.

The linear motion guide 74 includes a Y rail 78 and a plurality of blocks 80, 80 (two in FIG. 5) engaged with the Y rail 78. The Y rail 78 is fixed to the upper surface 82T of the base plate 82 along the Y axis, and the base plate 82 is detachably fixed to the upper surface 10T of the surface plate 10. By providing such a base plate 82, the table 70 and the table moving device 72 are detachably attached to the surface plate 10 via the base plate 82. The Y rail 78 may be directly fixed to the upper surface 10T of the surface plate 10.

The block 80 is movably supported by the Y rail 78, and the lower surface of the table 70 is fixed to the upper surface of the block 80. As a result, the table 70 is movably supported by the Y rails 78 and 78.

On the other hand, the ball screw device 76 has a screw shaft 84, a nut 86, and a motor 88. The screw shaft 84 is arranged along the Y-axis in the space between the Y rail 78 and the Y rail 78, and the upper surface of the base plate 82 is provided via bearings 90, 90 provided at both ends of the screw shaft 84. It is attached to 82T. The nut 86 is screwed onto the screw shaft 84 via a ball (not shown), and the lower surface of the table 70 is fixed to the upper surface of the nut 86. A rotation shaft (not shown) of the motor 88 is connected to one end of a screw shaft 84 via a coupler 92.

According to the ball screw device 76 configured in this way, when the motor 88 is driven to rotate the screw shaft 84, the nut 86 whose rotation is restricted by the table 70 moves along the screw shaft 84. As a result, the table 70 moves along the Y axis by the driving force of the motor 88. The driving means for moving the table 70 is not limited to the ball screw device 76, and other driving means such as a belt driving device may be applied. Further, the table 70 may be manually moved without providing the driving means.

Further, the table moving device 72 of the embodiment includes a linear scale 94 and a reading head 96. The linear scale 94 is fixed to the upper surface 82T of the base plate 82, and is arranged along the Y axis in the space between the Y rail 78 on the left side and the screw shaft 84 as shown in FIG.

The reading head 96 is provided on the lower surface of the table 70 so as to face the linear scale 94. The reading head 96 moves along the linear scale 94 by moving the table 70 in the Y-axis direction. During this movement, the reading head 96 reads the value of the linear scale 94 and transmits, for example, a pulse signal of one pulse every 1 mm to a control device (not shown) of the three-dimensional coordinate measuring device 1. Then, the control device detects the position of the table 70 in the Y-axis direction by counting the input pulse signal. Since the position detection device including the linear scale and the reading head has a known configuration, detailed description thereof will be omitted.

Next, an example of the measurement method by the three-dimensional coordinate measuring device 1 configured as described above will be described.

First, prior to the measurement of the object to be measured, the motion error of each axis of the three-dimensional coordinate measuring device 1 is acquired. The motion error of each axis is acquired with reference to the surface plate 10, and the acquisition procedure is as follows. Here, the moving axis of the table 70 is the Y-axis, but in order to distinguish it from the Y-axis which is the moving axis of the Y carriage 14, it will be referred to as “α-axis” for convenience.

a) First, a laser length measuring device is installed on the surface plate 10, the laser beam is reflected by the mirror installed at the tip of the stylus 28, and the mirror is moved at a pitch of several mm to acquire the displacement of the laser.

b) Based on the displacement of the laser, the indication error, straightness error, and rotation error (pitching, yawing, rolling) of each of the X-axis, Y-axis, and Z-axis are obtained. In addition, the pitch is linearized by the ratio calculation.

c) Let Rb be the error obtained in b) above.

d) Let Ew be the squareness error of the three-dimensional coordinate measuring device 1 (excluding the α axis).

e) Next, a laser length measuring device is installed on the surface plate 10, the laser beam is reflected by a mirror fixed to the table 70 on the α-axis, and the mirror is moved at a pitch of several mm to acquire the displacement of the laser.

f) Obtain the α-axis indication error, straightness error, and rotation error (pitching, yawing, rolling) based on the displacement of the laser. The pitches are straightened by ratio calculation.

g) Let Re be the error obtained in e) above.

h) Let Ewα be the squareness error between the surface plate 10 and the α axis.

By the above work, the motion error of each axis (X, Y, Z, α axis) of the three-dimensional coordinate measuring device 1 can be acquired. Then, at the time of measurement of the object to be measured, the contact coordinate value measured by the measurement probe 26 is complemented (spatial correction) by using the above motion error to obtain the true coordinate value. That is, when the contact coordinate value by the measurement probe 26 is (X, Y, Z) and the true coordinate value is (Xa, Ya, Za), the true coordinate value is acquired by the following equation 1.

<Equation 1>
(Xa, Ya, Za, 1) = (X, Y, Z, 1) ・ Rb ・ Ew ・ Re ・ Ewα
Next, the three-dimensional shape of the object to be measured is measured using the three-dimensional coordinate measuring device 1 of the embodiment.

6 and 7 show an example in which the object W to be measured is placed on the upper surface 70T of the table 70 and the three-dimensional shape of the object W to be measured is measured. The object W to be measured illustrated in FIGS. 6 and 7 has a size larger than the measurement range (moving stroke of the Y carriage 14 in the Y-axis direction) P of the three-dimensional coordinate measuring device 1 itself (excluding the table 70). It is a thing.

When measuring the object W to be measured as described above, first, as shown in FIG. 7, the table 70 is positioned on one end side (right end side in FIG. 6) in the Y-axis direction, and the upper surface of the table 70 is measured. The object W to be measured is placed on the 70T. At this time, the left side portion W1 of the object to be measured W within the measurement range P can be measured, but the right portion W2 of the object to be measured outside the measurement range P cannot be measured. In such a state, first, the left side portion W1 is measured while moving the Y carriage 14 in the measurement range P in the Y-axis direction.

Next, as shown in FIG. 7, the table 70 is moved to the other end side (left end side in FIG. 7) in the Y-axis direction. As a result, the right side portion W2, which could not be measured at the time of the measurement in FIG. 6, is located within the measurement range P. Therefore, the right side portion W2 is measured while moving the Y carriage 14 in the measurement range P in the Y-axis direction.

As shown in FIGS. 6 and 7, when the measurement of the left side portion W1 and the right side portion W2 of the object to be measured is completed, the control device (not shown) of the three-dimensional coordinate measuring device 1 is subjected to the contact coordinates by the measuring probe 26. The value is corrected according to the movement amount of the table 70, and the true coordinate value is calculated based on the corrected coordinate value.

By mounting the table 70 that moves in the Y-axis direction on the surface plate 10 in this way, it is possible to measure an object W having a size larger than the measurement range P without using a surface plate that is long in the Y-axis direction. it can. In other words, even if the surface plate 10 having a short length in the Y-axis direction is used, it is possible to measure the long object W to be measured.

Therefore, according to the three-dimensional coordinate measuring device 1 of the embodiment, the X-axis, the Y-axis and the Z-axis for moving the measuring probe 26 and the X-axis, the Y-axis and the Z-axis are separately configured to provide the object W to be measured. Since it is provided with a Y-axis (fourth axis) that moves in the Y-axis direction, even a long object to be measured can be measured without deteriorating the measurement accuracy.

Since the measurement of the object to be measured W from FIG. 6 to FIG. 7 is a method of measuring the object to be measured W by moving the measurement coordinate system together with the measurement coordinate system in the Y-axis direction, the left side portion W1 shown in FIG. Evaluation is possible at the measurement points and the measurement points on the right side portion W2 shown in FIG.

Here, for example, when a moving stroke in the Y-axis direction of 1000 mm is required based on the size of the object to be measured, the conventional three-dimensional coordinate measuring device (comparative example) uses only the Y carriage to make the moving stroke (1000 mm). Since it must be covered, the length of the surface plate in the Y-axis direction becomes long. As a result, the amount of change in the deflection of the surface plate becomes large, and the measurement accuracy deteriorates.

On the other hand, in the three-dimensional coordinate measuring device 1 of the embodiment, for example, even if the moving stroke of the Y carriage 14 in the Y-axis direction is 500 mm, the moving amount of the table 70 in the Y-axis direction is set to 500 mm. Therefore, the movement stroke (1000 mm) in the Y-axis direction required for the measurement can be obtained. As a result, the length of the surface plate 10 in the Y-axis direction can be significantly shortened as compared with the above comparative example, so that the measurement accuracy is improved.

In addition, although FIG. 6 and FIG. 7 exemplify the object to be measured W having a size larger than the measurement range S as the object to be measured, the object to be measured may have a size smaller than the measurement range S. Even in this case, since the moving stroke in the Y-axis direction required for the measurement can be shared by the table 70 side, the moving stroke in the Y-axis direction of the Y carriage 14 can be shortened. As a result, the length of the surface plate 10 in the Y-axis direction can be shortened, so that the measurement accuracy is improved.

Further, in the embodiment, the embodiment in which the fourth axis, which is the moving axis of the table 70, is parallel to the Y axis has been described, but the present invention is not limited to this, and the fourth axis is in the normal direction of the upper surface 10T. The directions may be orthogonal to each other. For example, the fourth axis may be parallel to the X axis. In this case, even an object to be measured that is long in the X-axis direction can be measured without increasing the length of the surface plate in the X-axis direction. Further, the fourth axis may be parallel to an oblique axis that is not parallel to the Y axis and the X axis. In this case, even an object to be measured that is long in the Y-axis direction and the X-axis direction can be measured without increasing the length of the surface plate in the Y-axis direction and the X-axis direction. In any case, by correcting the contact coordinate value by the measuring probe 26 based on the amount of movement in the direction of the fourth axis, the measurement can be performed without deteriorating the measurement accuracy.

Further, in the embodiment, as a preferred embodiment, the object W to be measured is moved along the fourth axis (Y axis) using the table 70, but the present invention is not limited to this, and means other than the table 70 can be used. You may use it to move the object W to be measured along the fourth axis.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above examples, and it goes without saying that various improvements and modifications may be made without departing from the gist of the present invention. ..

1 ... 3D coordinate measuring device, 10 ... Plate, 10T ... Top surface, 12 ... Stand, 14 ... Y carriage, 16 ... Right Y carriage, 18 ... Left Y carriage, 20 ... X guide, 22 ... Z column, 24 ... Z carriage, 26 ... measurement probe, 28 ... stylus, 40 ... groove, 42 ... Y guide, 50 ... support, 52 ... base end, 54 ... right side, 56 ... left side, 58 ... support plate, 60 ... air pad , 70 ... table, 72 ... table moving device, 74 ... linear motion guide, 76 ... ball screw device, 78 ... Y rail, 80 ... block, 82 ... base plate, 84 ... screw shaft, 86 ... nut, 88 ... motor, 90 ... bearing, 92 ... coupler, 94 ... linear scale, 96 ... reading head

Claims (5)

A three-dimensional coordinate measuring device that measures the three-dimensional coordinates of an object to be measured using a measuring probe.
A surface plate with an upper surface and
A first axis that moves the measurement probe in the first direction orthogonal to the normal direction of the upper surface, and
A second axis that moves the measurement probe in a second direction orthogonal to the normal direction of the upper surface and orthogonal to the first direction, and
A third axis that moves the measurement probe in the normal direction of the upper surface, and
A fourth axis, which is configured separately from the first axis, the second axis, and the third axis, and moves the object to be measured in a direction orthogonal to the normal direction of the upper surface.
A three-dimensional coordinate measuring device. The fourth axis is parallel to the second axis.
The three-dimensional coordinate measuring device according to claim 1. A table that can be moved along the fourth axis is provided.
The table has a mounting surface on which the object to be measured is placed.
The three-dimensional coordinate measuring device according to claim 1 or 2. The table is mounted on the upper surface of the surface plate.
A guide member for movably supporting the table along the fourth axis is provided between the upper surface of the surface plate and the lower surface of the table.
The three-dimensional coordinate measuring device according to claim 3. The first pillar member and the second pillar member erected extending in the normal direction of the upper surface, and the first pillar member and the upper end portion of the second pillar member. A first moving body that has a guide member extending along the second axis and can move along the second axis.
A second moving body provided on the guide member and movable along the first axis,
A third moving body provided on the second moving body and to which the measuring probe is attached and movable along the third axis with respect to the second moving body.
The three-dimensional coordinate measuring device according to any one of claims 1 to 4.

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