JP2020148627A - Electrical contactor and electrical connection device - Google Patents

Abstract

To perform accurate energization test of an inspection target by contacting an electrode terminal of the inspection target flexibly and stably to secure electric connection.SOLUTION: An electrical contactor of the present invention comprises: a first coil spring part; a second coil spring part inserted into the first coil spring part; a first plunger inserting a second cylinder part into the first coil spring part, fixing one end of the first coil spring part with a step part, and bringing the tip of the first cylinder part into contact with a first contact object; a second plunger including a first rod part inserted into the first plunger and brought into contact with the first contact object, a large diameter part fixing one end of the second coil spring part, and a second rod part inserted into the second coil spring part; a third plunger fixing the other ends of the first coil spring part and the second coil spring part to one another, and brought into contact with the second contact object. The large diameter part is located inside the first coil spring part.SELECTED DRAWING: Figure 1

Description

The present invention relates to an electrical contactor and an electrical connection device, for example, an electrical contactor and a plurality of electrical contacts that are brought into contact with an electrode of the subject to be inspected in order to inspect the electrical characteristics of the subject to be inspected. It can be applied to an electrical connection device having.

Conventionally, in the manufacturing process of an integrated circuit, the electrical characteristics of the packaged integrated circuit are inspected (for example, a package test or a final test). In such an inspection, an electrical connection device (so-called test socket, socket board, etc.) having a plurality of electrical contacts (also referred to as "contacts", "probes", etc.) is subjected to an object. An integrated circuit, which is an inspection body, is installed. With the integrated circuit mounted, each electrical contact provided in the electrical connection device has one end electrically in contact with each electrode terminal of the integrated circuit and the other end provided in the electrical connection device. It makes electrical contact with the wiring board. An inspection device (hereinafter, also referred to as a "tester") is connected to this wiring board, and the inspection device supplies electrical signals and electric power required for the test to the integrated circuit via electrical contacts. Inspects the electrical properties of the object under test.

As an electrical contact, conductive terminals (also referred to as "plungers") are connected to both ends of a conductive compression coil spring (hereinafter, also simply referred to as "coil spring") in the coil central axis direction. It is known that both terminals are formed so as to be expandable and contractible in the direction of the central axis of the coil, and both terminals are electrically connected via a coil spring. Hereinafter, the direction of expansion and contraction of the terminal in the electrical contact is referred to as "axial direction". Further, in the axial direction, the other terminal side is expressed as the inside, and the side opposite to the other terminal is expressed as the outside or the tip side. Both terminals can be pushed inward in the axial direction against the elastic force of the coil spring, and are elastically urged outward in the axial direction by the elastic force of the coil spring. ..

As such an electric contact, for example, in Patent Document 1, conductive terminals (conductive needle-like bodies) are coupled to both ends of one conductive coil spring in the coil central axis direction. An electrical contact is disclosed in which both terminals conduct through a coil spring. Both terminals each have a shaft portion extending toward the inner end side in the axial direction, and by tightly winding the coil spring of the portion located on the outer circumference between the opposite inner ends of the shaft portion. The effect of inductance that occurs when current flows through the coil spring is reduced.

Further, in such an electrical contactor, one terminal has a terminal member having a tubular portion (cylindrical terminal member) and a terminal member having a rod-shaped portion inserted into a through hole of the tubular portion (rod-shaped). Some are composed of terminal members).

For example, in Patent Document 2, conductive terminals are provided at both ends, and one of the terminals (first pin portion) is a cylindrical member (second electrode member) and a rod-shaped member inserted into the through hole thereof. A contact member composed of a member (first electrode member) having a portion (extending portion) of the above is disclosed. The first electrode member is provided with a flange portion having an outer diameter larger than the outer diameter of the extending portion at the axial inner end of the extending portion. Then, the first coil spring is arranged between the inner end of the other terminal (second pin portion) and the inner end of the flange portion of the first electrode member, and the outer end of the collar portion of the first electrode member and the second electrode. A second coil spring is arranged between the inner end of the member, and the first electrode member and the second electrode member are configured to be displaceable with each other. The second electrode member is configured to rotate as it is pushed inward in the axial direction from the outer end in the axial direction. When the first pin portion is not in contact with the electrode terminal of the object to be inspected, the amount of protrusion outward in the axial direction is larger in the second electrode member than in the first electrode member, and the first electrode. When the member and the second electrode member are in contact with the electrode terminal of the object to be inspected and pushed in, the contact pressure for pressing the electrode terminal of the object to be inspected is smaller in the second electrode member than in the first electrode member. It has become. The electrical contacts configured in this way are assigned the function of rotating the second electrode member to remove oxides and organic substances on the electrode surface of the object to be inspected, and the first electrode member of the object to be inspected. The function of ensuring the contact pressure with the electrode is assigned.

Japanese Unexamined Patent Publication No. 10-239349 Japanese Unexamined Patent Publication No. 2013-8628

However, in an electric contact in which terminals at both ends are conducted via a coil spring, one terminal is provided with a tubular terminal member and a rod-shaped terminal member, and a plurality of coil springs act on these terminal members. Depending on the contact state between each terminal member and the electrode terminal of the object to be inspected or the pushed state of each terminal member, the conductive path may change or the inductance may increase, which may affect the measurement.

For example, in the case of the contact shown in Patent Document 2, when the first electrode member is in contact with the electrode terminal of the object to be inspected, the first coil passes through the extending portion and the flange portion of the first electrode member. A conduction path that passes through the spring and reaches the second pin portion is likely to occur mainly, but for some reason (for example, misalignment, influence of oxide, etc.), the tip (outer end in the axial direction) of the extending portion of the first electrode member is likely to occur. If it is difficult to conduct with the electrode terminal of the object to be inspected, conductive paths such as a second electrode member, a second coil spring, a flange portion, a first coil spring, and a second pin portion may occur. In this latter conductive path, since the two coil springs pass through, the conductive distance becomes long and the influence of reactance also becomes large.

Further, since the force applied to the terminal member from the plurality of coil springs changes depending on the contact state between each terminal member and the electrode terminal of the object to be inspected and the pushed state of each terminal member, the force applied to the terminal member is weak. In that case, the contact pressure between the electrode of the object to be inspected and the terminal member may be weakened, and the contact position may shift.

For example, in the case of the contact described in Patent Document 2, since the elastic force synthesized by connecting the first coil spring and the second coil spring in series is applied to the second electrode member, these coil springs are synthesized. The spring constant is smaller than the single spring constant. Then, in a state where both the first electrode member and the second electrode member are in contact with the electrode terminal of the object to be inspected and pushed in, the first coil spring is also pushed in by the first electrode member, so that the second electrode member However, the force that presses the electrode of the object to be inspected becomes even smaller. Further, although the elastic force of the first coil spring is applied to the first electrode member, in a state where both the first electrode member and the second electrode member are in contact with the electrode terminal of the object to be inspected and pushed in, the first electrode member is the first. Since the two-electrode member pushes the flange portion of the first electrode member via the second coil spring, the force with which the first electrode member presses the electrode of the object to be inspected becomes small.

Further, in the contact described in Patent Document 2, the contact pressure of the first electrode member is set to be larger than the contact pressure of the second electrode member, but the contact pressure is relatively small. If the electrode member is displaced with respect to the electrode terminal of the object to be inspected, the contact pressure should be relatively large because the extending portion of the first electrode member is guided by the through hole of the second electrode member. The first electrode member of the above may also be displaced with respect to the position of the electrode of the object to be inspected.

Therefore, a plurality of coil springs, which are electrical contacts in which terminals at both ends are conductive via a coil spring, have at least one terminal having a tubular terminal member and a rod-shaped terminal member, and act on those terminal members. The electrical contactor to be inspected can be stably contacted with the electrode terminal of the inspected object to ensure electrical connection to the electrode terminal of the inspected object, and the energization test of the inspected object can be performed accurately. There is a need for electrical contacts and electrical connectivity devices that enable this.

In order to solve such a problem, the first electrical contact according to the present invention is a contact that electrically connects both ends via a coil spring, and includes (1) a first coil spring portion and (2). ) It has a second coil spring portion existing inside the first coil spring portion, (3) a first cylinder portion, a step portion, and a second cylinder portion, and the second cylinder portion is the first cylinder portion. A first plunger of a tubular member that is inserted into a coil spring portion, one end of the first coil spring portion is fixed by a step portion, and the tip portion of the first tubular portion is brought into contact with the first contact target. (4) The first rod portion of the needle-shaped member that is inserted into the first plunger and comes into contact with the first contact object, and the second coil spring portion that is larger than the outer diameter of the first rod portion. A second plunger having a large diameter portion for fixing one end portion and a second rod portion smaller than the outer diameter of the large diameter portion and inserted into the second coil spring portion, and (5) second A third plunger that fixes the other end of the coil spring portion of 1 and the other end of the second coil spring portion and comes into contact with the second contact target is provided, and the second plunger The outer circumference of the large diameter portion is located inside the first coil spring portion.

The second electrical contact according to the present invention is arranged at a position corresponding to the electrode terminal of the object to be inspected in the electrical connection device for performing the test by contacting the electrode terminal of the object to be inspected. An electrical connection device comprising a plurality of electrical contacts that electrically contact terminals, and using the first electrical contact according to the present invention as each of the electrical contacts.

According to the present invention, there are a plurality of electrical contacts in which terminals at both ends are conductive via a coil spring, and at least one terminal has a tubular terminal member and a rod-shaped terminal member, and the terminal members act on the plurality of terminals. In an electrical contactor having a coil spring and an electrical connection device, regardless of the contact state between each terminal member and the electrode terminal of the object to be inspected or the pushed state of each terminal member, the electrode terminal of the object to be inspected It is possible to ensure stable electrical connection to the electrode terminals of the object to be inspected and to perform an electrical test of the object to be inspected with high accuracy.

It is sectional drawing which shows the internal structure of the electrical contactor which concerns on embodiment. It is a top view of the electrical connection device which concerns on embodiment. FIG. 2 is a cross-sectional view taken along the line AA of the electrical connection device shown in FIG. FIG. 2 is a cross-sectional view taken along the line BB of the electrical connection device shown in FIG. FIG. 5 is an enlarged cross-sectional view of a main part of a portion of the electrical connection device of the embodiment in which an electrical contactor is mounted. It is an appearance block diagram which shows the appearance structure of the electric contact according to embodiment. It is an enlarged view which shows the structure of the electrode terminal side of the electric contact at the time of contact with the electrode terminal of the object to be inspected. It is explanatory drawing explaining the conductive path of the electric contact according to Embodiment.

(A) Main Embodiments In the following, embodiments of an electrical contactor and an electrical connection device according to the present invention will be described in detail with reference to the drawings. Here, the electrical connection device is interposed between the inspection device (hereinafter, also referred to as "tester") that sends and receives the electric signal necessary for the test of the inspected object and the inspected object. It is a device that transmits signals necessary for inspection of electrical characteristics of. As the object to be inspected, the case of a semiconductor device such as an integrated circuit that has been assembled will be described. Further, as the electrical connection device, a case of a test IC socket (also referred to as a test socket) used for an electrical test (for example, a package test, a final test, etc.) of such a semiconductor device will be described.

(A-1) Configuration of Electrical Connection Device FIG. 1 is a cross-sectional view showing an internal configuration of an electrical contact according to an embodiment. FIG. 2 is a plan view of the electrical connection device according to the embodiment. FIG. 3 is a cross-sectional view taken along the line AA of the electrical connection device shown in FIG. 2, and the object to be inspected housed in the electrical connection device is represented by a dotted line. FIG. 4 is a cross-sectional view taken along the line BB of the electrical connection device shown in FIG. FIG. 5 is an enlarged cross-sectional view of a main part of a portion of the electrical connection device of the embodiment in which an electrical contactor is mounted.

In the following, "upper" and "lower" will be referred to in accordance with the vertical direction in FIGS. 1 and 3 to 5. Further, the contact pad on the wiring board is also referred to as a "first contact target", and the electrode terminal of the object to be inspected is also referred to as a "second contact target".

As shown in FIG. 3, the inspected body 12 is provided with a plurality of electrode terminals 13 (second contact targets) on the lower surface thereof. The plurality of electrode terminals 13 are provided on the lower surface of the object to be inspected 12 in a single row, a plurality of rows, in a matrix, or in another arrangement. In this embodiment, the shape of the object to be inspected 12 is substantially quadrangular, and a case where a plurality of electrode terminals 13 are arranged in a matrix on the lower surface of the object to be inspected 12 is illustrated. The shape of the 12 and the arrangement of the plurality of electrode terminals 13 are not limited to this. Further, in this embodiment, the case where the electrode terminal 13 is a bump will be described as an example.

The electrical connection device 11 mainly has an electrical contact 20 that conducts the electrode terminal 13 of the object to be inspected 12 and the wiring provided on the wiring board 15, and a housing portion 14 that holds the electrical contact 20. It has a socket portion 19 for holding the inspected body 12, and a frame portion 18 for fixing the housing portion 14 and the socket portion 19 on the wiring board 15. The electrical connection device 11 is provided on the wiring board 15.

The wiring board 15 is, for example, a plate-shaped wiring board in which wiring made of a conductive metal material is formed on a substrate formed of an electrically insulating member by a printed wiring technique or the like. The wiring of the wiring board 15 is electrically connected to the wiring of a tester (not shown) for testing the object 12 to be inspected. The frame portion 18 is fixed to the upper surface of the wiring board 15 by a fixing member 35 such as a screw or a positioning pin. The wiring board 15 cooperates with the frame portion 18 to support the housing portion 14 on the wiring board 15. A contact pad 22 (first contact target) for contacting with the electrical contact 20 is arranged on the wiring formed on the wiring board 15.

The electrical contact 20 is a member that conducts conduction between the electrode terminal 13 (second contact target) of the object 12 to be inspected and the contact pad 22 “first contact target” of the wiring board 15, and is a conductive member. It is composed of. The electrical contact 20 is mainly composed of a plunger 60 on the inspected object side, a plunger 63 on the wiring board side, and a coil spring 66. The electrical contact 20 has a straight and elongated shape, and on one end side of both ends thereof, there is a conductive plunger on the side of the subject to be inspected, which is a terminal for contacting the electrode terminal 13 of the subject 12 to be inspected. 60, and on the other end side, there is a conductive wiring board side plunger 63 which is a terminal for contacting the contact pad 22 of the wiring board 15. The plunger 60 on the inspected object side and the plunger 63 on the wiring board side are connected to both ends in the coil central axis direction of the coil spring 66 composed of a plurality of conductive compression coil springs, and the plungers 60 and 63 are connected to each other. It is conducting through the coil spring 66. Both plungers 60 and 63 are elastically urged outward in the axial direction by the elastic force of the coil spring 66, and are configured to be movable inward in the axial direction against the elastic force of the coil spring 66. There is.

The wiring board side plunger 63 has a cylindrical tip portion 632 having an outer diameter smaller than the outer diameter of the electrical contact 20 and a sharp tip formed on the tip end side thereof, and the tip portion 632 is formed on the inner end side of the tip portion 632. Is formed with a protruding portion 633 having an outer diameter larger than the outer diameter of the tip portion 632. Further, the plunger 60 on the side to be inspected has a cylindrical plunger 61 and a middle needle plunger 62, and has a cylindrical shape having an outer diameter smaller than the outer diameter of the electrical contact 20 on the tip side of the cylindrical plunger 61. The first cylinder portion 611 is formed, and a protruding portion 615 having an outer diameter larger than the outer diameter of the first cylinder portion 611 is formed on the inner end side of the first cylinder portion 611. Details of the electrical contact 20 will be described later.

The housing portion 14 is a plate-shaped member made of an electrically insulating member, and is arranged so as to be overlapped on the upper side of the wiring board 15. The housing portion 14 is a member for supporting a plurality of electrical contacts 20 perpendicularly to the lower surface of the object to be inspected and the upper surface of the wiring board. The housing portion 14 has a lower housing 16 and an upper housing 17, the lower housing 16 is arranged on the upper side of the wiring board 15, and the upper housing 17 is overlapped on the upper side of the lower housing 16. The lower housing 16 and the upper housing 17 are aligned by the guide pins 37 and are locked to the frame portion 18 by the guide pins 37.

The lower housing 16 is a member that is superposed on the lower surface of the upper housing 17 and supports a plurality of electrical contacts 20 in cooperation with the upper housing 17, and restricts the downward movement of the electrical contacts 20. The electrical contact 20 is locked as described above. The lower housing 16 is provided with a pin head fitting hole 23 (see FIG. 3), which is a hole into which the head 39 of the guide pin 37 is fitted. The inner diameter of the pin head fitting hole 23 is set to substantially the same size as the outer diameter of the head 39 of the guide pin 37, so that the head 39 of the guide pin 37 fits without play.

The lower housing 16 is provided with a plurality of first support holes 16A formed in a direction perpendicular to the upper and lower surfaces thereof, and the lower side of each of the plurality of electrical contacts 20 is inserted into the lower housing 16. The lower opening of the first support hole 16A is formed so as to correspond to the position of each contact pad 22 of the wiring board 15, and the upper opening is formed in the upper housing 17 of the second support hole 17A described later. It is formed to fit the lower opening.

The inner diameter of each of the plurality of first support holes 16A is formed to be slightly larger than the outer diameter of the electrical contact 20 so that the lower portion of each electrical contact 20 can be inserted. Further, in each of the first support holes 16A, a lower receiving portion 16B having a small inner diameter formed at the lower end thereof to receive and support the electrical contact 20 from the lower side is formed, and the lower receiving portion 16B is formed. A step is formed around the opening on the inner end side of the through hole. Since the inner diameter of the lower receiving portion 16B is formed to be slightly larger than the outer diameter of the tip portion 632 of the plunger 63 on the wiring board side of the electrical contact 20 and smaller than the outer diameter of the protruding portion 633, it is formed on the wiring board side. The protruding portion 633 of the plunger 63 is caught by the step of the lower receiving portion 16B, the downward movement of the plunger 63 on the wiring board side is restricted, and the tip portion 632 of the plunger 63 on the wiring board side is on the lower side. It projects from the lower surface of the lower housing 16 through the through hole of the receiving portion 16B.

The upper housing 17 is a member that is superposed on the upper surface of the lower housing 16 and supports the electric contact 20 in cooperation with the lower housing 16 so as to limit the upward movement of the electric contact 20. The electrical contact 20 is locked to the housing. The upper housing 17 is provided with a pin shaft portion fitting hole 28 (see FIG. 3), which is a hole into which the shaft portion 40 of the guide pin 37 is fitted. The inner diameter of the pin shaft portion fitting hole 28 is set to substantially the same size as the outer diameter of the shaft portion 40 of the guide pin 37 so that the shaft portion 40 of the guide pin 37 can be fitted without play.

The upper housing 17 is provided with a plurality of second support holes 17A formed in a direction perpendicular to the upper and lower surfaces thereof, and the upper side of each of the plurality of electrical contacts 20 is inserted. The upper opening of the second support hole 17A is formed so as to correspond to the position of each electrode terminal 13 of the inspected body 12, and the lower opening is the first support hole 16A formed in the lower housing 16. It is formed to fit the upper opening of the.

The inner diameter of each of the plurality of second support holes 17A is slightly larger than the outer diameter of the electric contact 20 in order to allow the insertion of the upper portion of each electric contact 20, that is, the first support hole 16A. It is formed to have the same inner diameter as. Further, in each of the second support holes 17A, an upper receiving portion 17B having a small inner diameter formed at the upper end thereof to receive and support the electrical contact 20 from above is formed, and a through hole of the upper receiving portion 17B is formed. A step is formed around the opening on the inner end side of the. Since the inner diameter of the upper receiving portion 17B is formed to be slightly larger than the outer diameter of the first tubular portion 611 of the plunger 60 to be inspected of the electrical contact 20 and smaller than the outer diameter of the protruding portion 615, it is to be inspected. The protruding portion 615 of the body-side plunger 60 is caught by the step of the upper receiving portion 17B, and the upward movement of the body-side plunger 60 is restricted, and the first tubular portion 611 of the body-side plunger 60 is moved. It projects from the upper surface of the upper housing 17 through the through hole of the upper receiving portion 17B.

The first support hole 16A and the second support hole 17A form an electrical contactor support hole 27 (see FIG. 5) that houses and supports the entire electrical contactor 20. The lower surface of the housing portion 14 (the lower surface of the lower housing 16) and the wiring board in a state where the lower housing 16 and the upper housing 17 are overlapped so that the electrical contact 20 is housed in the electrical contact support hole 27. By fixing the housing portion 14 on the wiring board 15 so that the upper surfaces of the 15 come into contact with each other, the tip portion 632 of the wiring board side plunger 63 of the electrical contact 20 is pushed into the second support hole 17A. The electrical contact 20 is contracted, the elastic energy of the coil spring 66 is stored, and the tip 632 of the plunger 63 on the wiring board presses the contact pad 22 on the upper surface of the wiring board 15. become.

The frame portion 18 is a member that integrally fixes and supports the wiring board 15, the lower housing 16 and the upper housing 17, and supports the socket portion 19 so as to be vertically movable.

The frame portion 18 is mainly composed of an outer frame portion 31, a fixing flange portion 32, and a vertical movement support flange portion 33.

The outer frame portion 31 is formed in a substantially quadrangular frame shape so as to surround the peripheral portions of the lower housing 16, the upper housing 17, and the socket portion 19. Positioning pins (or positioning holes; none of them are shown) are provided on the lower surface of the outer frame portion 31, and positioning pins (or positioning holes) on the outer frame portion 31 side are provided on the upper surface of the wiring board 15. ), A positioning hole (or a positioning pin; none of which is shown) is provided. As a result, the positioning pin (or positioning hole) on the lower surface of the outer frame portion 31 and the positioning hole (or positioning pin) on the upper surface of the wiring board 15 are fitted, and the outer frame portion 31 and the wiring board are fitted. 15 and 15 are accurately positioned and supported. Fixing members 35 (see FIG. 2) are attached to the four corners of the outer frame portion 31. The fixing member 35 is screwed into the screw holes (not shown) of the wiring board 15 by inserting through holes (not shown) at the four corners of the outer frame portion 31 to fix these outer frame portions 31 to the wiring board 15. are doing.

Two fixing flange portions 32 are provided on the opposite inner side surfaces of the square tubular openings of the outer frame portion 31 so as to face each other. Each fixing flange portion 32 is formed in a substantially semi-disc shape extending horizontally inward from each other. The height of the lower surface of each fixing flange portion 32 (that is, the height from the wiring board 15 to the lower surface of each fixing flange portion 32) is substantially the same as the height at which the lower housing 16 and the upper housing 17 are overlapped. It is set. As a result, in a state where the frame portion 18 is fixed to the wiring board 15, the lower housing 16 and the upper housing 17 stacked on the wiring board 15 are supported by being sandwiched between the fixing flange portions 32 and the wiring board 15. It is designed to do. Here, when the upper housing 17 and the lower housing 16 are inserted under the fixing flange portion 32, the lower surface of the lower housing 16 is made to be the same as the lower surface of the outer frame portion 31.

A pin hole 38 into which the guide pin 37 is fitted is formed in the center of each fixing flange portion 32. The inner diameter of the pin hole 38 is set to be substantially the same as the outer diameter of the shaft portion 40 of the guide pin 37.

The guide pin 37 has a head portion 39 and a shaft portion 40. The head 39 has an outer diameter substantially the same as the inner diameter of the pin head fitting hole 23 provided in the lower housing 16, and the head 39 is formed in a disk shape. The shaft portion 40 has an outer diameter substantially the same as the inner diameter of the pin shaft portion fitting hole 28 of the upper housing 17 and the pin hole 38 of the fixing flange portion 32, and the shaft portion 40 is formed in a cylindrical rod shape.

A guide pin 37 is passed through the pin head fitting hole 23 of the lower housing 16, the pin shaft fitting hole 28 of the upper housing 17, and the pin hole 38 of each fixing flange portion 32. The shafts are provided so as to be located on the same axis.

The head 39 of the guide pin 37 is fitted into the pin head fitting hole 23 of the lower housing 16, and the shaft portion 40 is the pin shaft portion fitting hole 28 of the upper housing 17 and the pin hole 38 of the fixing flange portion 32. The lower housing 16, the upper housing 17, and the frame portion 18 are positioned. The lower housing 16 and the upper housing 17 are sandwiched between the lower surface of each fixing flange portion 32 of the frame portion 18 and the wiring board 15 from above and below and supported in the opening of the frame portion 18, so that the wiring board 15 and the lower housing 17 are supported. The side housing 16, the upper housing 17, and the frame portion 18 are accurately positioned and integrally fixed to each other.

The vertical movement support flange portion 33 is a portion for supporting the socket portion 19 in the opening of the frame portion 18 so as to be vertically movable, and supports the socket portion 19 while elastically biasing it upward. The vertical movement support flange portions 33 are formed at the four corners of the openings in the frame portion 18 having a substantially quadrangular frame shape.

As shown in FIG. 4, each vertical movement support flange portion 33 is mainly composed of a plate portion 42, a guide screw 46, and a spring 47, and the guide screw 46 is attached to the plate portion 42. A guide screw hole 43 and a spring hole 44 for supporting the spring 47 are provided.

The plate portion 42 is a plate material integrated with the frame portion 18 provided at each of the four corners of the outer frame portion 31 of the frame portion 18, and is suspended so as to connect the two frame portions forming the corners. .. The height of the lower surface of the plate portion 42 (that is, the height from the wiring board 15 to the lower surface of the plate portion 42) is set to be the same as the height of the lower surface of the fixing flange portion 32. The height of the upper surface of the plate portion 42 is such that the upper surface of the plate portion 42 and the lower surface of the flange portion 54 of the socket portion 19 to be described later are in contact with each other, and the electrode terminal 13 of the inspected body 12 and the electrical contact 20 are in contact with each other. It is set so that the plunger 60 on the side of the object to be inspected is in optimal contact with the plunger 60. Specifically, the plate portion 42 is in a state in which the electrode terminal 13 of the inspected body 12 and the plunger 60 on the inspected body side of the electric contact 20 are in contact with each other and the electric contact 20 is compressed. The height of the upper surface is set.

The guide screw hole 43 is a screw hole for screwing the guide screw 46. One guide screw hole 43 is provided at the center of each plate portion 42 (see FIG. 2). The spring hole 44 is a hole for supporting the spring 47. Two spring holes 44 are provided on both sides of the guide screw holes 43 for each plate portion 42 (see FIG. 2). The guide screw hole 43 and the spring hole 44 are drilled vertically downward from the upper surface of the plate portion 42.

The guide screw 46 is a screw that defines the position of the socket portion 19 in the opening of the frame portion 18 and enables the vertical movement of the socket portion 19 to be supported. The guide screw 46 includes a head portion 48, a guide portion 49, and a screw rod portion 50.

The head 48 is a portion that comes into contact with the socket portion 19 from above to prevent it from falling off upward. A minus groove 51 with which a minus driver engages is formed on the upper surface of the head 48.

The guide portion 49 is a portion that guides the vertical movement of the socket portion 19. The guide portion 49 is provided between the head portion 48 and the screw rod portion 50, and fits into the guide hole 59 described later in the socket portion 19 to guide the vertical movement of the socket portion 19. The length of the guide portion 49 is such that the lower surface of the head 48 is in contact with the socket portion 19 (the socket portion 19 is pushed up to the maximum by the spring 47), and the electrical contact 20 is on the side to be inspected. The tip of the plunger 60 is located in the reduction hole 57 described later of the socket portion 19, and the tip of the plunger 60 on the inspected body side of the electrical contact 20 is reduced in the process of pushing down the socket portion 19. It is set so as to protrude from the upper opening of the portion 57. FIG. 5A shows a state before the socket portion 19 is pushed downward, and the tip of the plunger 60 on the inspected body side of the electrical contact 20 is located in the reduced hole portion 57 of the socket portion 19. In FIG. 5B, the socket portion 19 is pushed downward, and the tip of the plunger 60 on the inspected body side of the electrical contact 20 protrudes from the upper opening of the reduction hole portion 57. It shows a state in which the object to be inspected 12 is in contact with the electrode terminal 13.

The screw rod portion 50 is a portion for fixing the guide screw 46 to the plate portion 42. The screw rod portion 50 is screwed into the guide screw hole 43 of the plate portion 42 to fix the guide screw 46 to the plate portion 42.

The spring 47 is a member for elastically urging and supporting the socket portion 19 upward. The spring 47 is mounted in the spring hole 44 of the plate portion 42 so that the direction of the coil center axis is vertical, and the upper end of the spring 47 is in contact with the back surface of the flange portion 54 described later of the socket portion 19. .. A total of eight springs 47 urge the socket portion 19 movably supported by the guide portions 49 of the four guide screws 46 from below. As a result, the flange portion 54 of the socket portion 19 is pushed upward until it comes into contact with the lower surface of the head 48 of the guide screw 46, and is in a standby state before the contact.

The socket portion 19 is made of an insulating member, and when the inspected body 12 is attached to the electrical connection device 11, the socket portion 19 positions and supports the inspected body 12, and also includes the electrode terminals 13 of the inspected body 12 and each electrode terminal 13. It is a member for matching with the corresponding electrical contactor 20. The socket portion 19 is mainly composed of a receiving recess 53 and a flange portion 54.

The receiving recess 53 is a member for receiving and supporting the object 12 to be inspected, has a recess 52 recessed from above to below in the center of the upper surface thereof, and is formed in a substantially quadrangular dish shape. The recess 52 has an upper opening 53A located on the upper opening side thereof, a bottom 53C located on the bottom side, and an inclined surface 53B located between the upper opening 53A and the bottom 53C.

The bottom portion 53C is formed in a substantially quadrangular shape, and its dimensions are set to be slightly larger than the outer shape of the inspected body 12. As a result, the inspected body 12 is positioned while the inspected body 12 is attached to the bottom portion of the recess of the receiving recess 53. Here, since the object 12 to be inspected is quadrangular, the bottom portion of the recess of the receiving recess 53 is also formed in a quadrangle, but when the object 12 to be inspected has another shape, the bottom portion of the recess of the receiving recess 53 is also formed. Also has a shape that matches the object to be inspected 12. The upper opening 53A is formed in a substantially quadrangular shape having a size slightly larger than that of the bottom 53C. The inclined surface 53B is a portion connecting the upper opening 53A and the bottom 53C, and has an inner surface inclined so that the opening becomes wider toward the upper side. The inclined surface 53B is for guiding the body to be inspected 12 and guiding it to the bottom of the receiving recess 53.

A large number of guide holes 56 are provided in the bottom plate portion 55 forming the bottom portion 53C of the recess 52 of the receiving recess 53. The guide hole 56 guides and accepts each electrode terminal 13 of the inspected body 12 from above, and the tip of the plunger 60 on the inspected body side of each electrical contact 20 is lowered to each electrode terminal 13 of the inspected body 12. It is a through hole to allow contact from. The upper portion of each guide hole 56 is formed to be slightly larger than the electrode terminal 13 so that the electrode terminal 13 can be easily received. Each guide hole 56 is provided at a position corresponding to each electrode terminal 13 of the inspected body 12, and when the inspected body 12 is mounted in the recess of the receiving recess 53, each electrode terminal of the inspected body 12 is provided. 13 is accommodated in the upper portion of each guide hole 56.

The lower end of the guide hole 56 is a reduced hole that is thinner than the upper portion and allows the tip of the plunger 60 on the inspected body side of the electrical contact 20 to pass through from below without passing through the electrode terminal 13. The portion 57 is formed. The reduction hole portion 57 is electrically connected when the flange portion 54 of the socket portion 19 is in contact with the lower surface of the head 48 of the guide screw 46 (the socket portion 19 is pushed up to the maximum by the spring 47). When the tip of the plunger 60 on the inspected body side of the contact 20 is received with the tip positioned in the reduction hole 57 and the socket portion 19 is pushed downward, the plan on the inspected body side of the electrical contact 20 is received. The tip portion of the jar 60 is allowed to penetrate through the reduction hole portion 57, and the tip of the plunger 60 on the subject side protruding from the upper opening thereof can be brought into contact with the electrode terminal 13 of the subject body 12.

The flange portion 54 is formed at the four corners of the receiving recess 53 corresponding to the vertical movement support flange portion 33 of the frame portion 18. Each flange portion 54 is provided with a counterbore portion 58 with which the head 48 of the guide screw 46 abuts. The seating portion 58 is provided with a guide hole 59 that fits vertically and vertically into the guide portion 49 of the guide screw 46. The guide portion 49 of the guide screw 46 is fitted into the guide hole 59 of the flange portion 54 and is supported so as to be vertically movable, and the socket portion 19 is urged upward by the spring 47 by the support by the flange portion 54.

(A-2) Configuration of Electrical Contact Next, the configuration of the electrical contact 20 according to this embodiment will be described in detail with reference to the drawings.

FIG. 1 is a cross-sectional view showing the internal configuration of the electrical contactor 20 according to this embodiment. FIG. 6 is an external configuration diagram showing an external configuration of the electrical contactor 20 according to this embodiment.

The electrical contact 20 comes into contact with the electrode terminal 13 of the object to be inspected 12 and the contact pad 22 of the wiring board 15 to electrically conduct electricity between the electrode terminal 13 and the contact pad 22. Is.

The electrical contact 20 is made of a highly conductive metal member, and has a plunger 60 on the inspected object side, a plunger 63 on the wiring board side, and a coil spring 66 as shown in FIGS. 1 and 6. .. The coil spring 66 has an outer coil spring 64 and an inner coil spring 65. The plunger 60 on the side to be inspected has a cylindrical plunger 61 and a middle needle plunger 62. Hereinafter, the cylindrical plunger 61 is also referred to as a “first plunger”, the middle needle plunger 62 is also referred to as a “second plunger”, and the wiring board side plunger 63 is also referred to as a “third plunger”. Further, the outer coil spring 64 is also referred to as a "first coil spring", and the inner coil spring is also referred to as a "second coil spring".

The coil spring 66 is composed of two compression coil springs (outer coil spring 64 and inner coil spring 65) having different coil diameters, and both coil springs 64 and 65 are formed of conductive members. The coil inner diameter of the outer coil spring 64 is larger than the coil outer diameter of the inner coil spring 65, the inner coil spring 65 is housed inside the coil of the outer coil spring 64, and the coil spring 66 is formed in double inside and outside. There is. An inspected object side plunger 60 is provided on one end side of the outer coil spring 64 and the inner coil spring 65, and a wiring board side plunger 63 is provided on the other end side of the outer coil spring 64 and the inner coil spring 65. Has been done.

The cylindrical plunger 61 constituting the plunger 60 on the side to be inspected is a substantially cylindrical member having conductivity, and has through holes 618 that open outward and inward in the axial direction. The tip of the cylindrical plunger 61 is brought into contact with the electrode terminal 13 of the object 12 to be inspected, and the first tubular portion 611 located on the tip side (upper in FIGS. 1 and 6) and the inner end side (FIG. 1). And a second cylinder portion 613 located below in FIG. 6, that is, on the wiring board side plunger 63 side). Both the first cylinder portion 611 and the second cylinder portion 613 have a cylindrical shape having the same inner diameter, and are integrally formed so that their central axes are located on the same axis. The through holes of the first cylinder portion 611 and the second cylinder portion 613 communicate with each other to form the through hole 618.

The first tubular portion 611 is a portion where the tip portion 612 is in contact with the electrode terminal 13 of the inspected body 12. The shape of the tip portion 612 may be, for example, such that the tip thereof is located on the same plane perpendicular to the axial direction, or may have a plurality of portions protruding in the axial direction. In the present embodiment, it has a crown shape in which irregularities in the axial direction are arranged in a zigzag manner in the circumferential direction to form a plurality of tips. When the tip portion 612 has a crown shape, it is preferable that the tip formed on the tip portion 612 hits the electrode terminal 13 having a ball shape or the like so that the tip portion 612 can be reliably contacted and the displacement can be prevented.

The second tubular portion 613 is located on the inner end side of the first tubular portion 611, and has an outer coil locking portion 614 for locking the outer coil spring 64 and an inner end that contacts the middle needle plunger 62. It has a portion 617. The outer coil locking portion 614 has a coil press-fitting portion 616 located on the inner end side and a protruding portion 615 located on the tip end side.

The coil press-fitting portion 616 is a portion that is press-fitted into one end of the outer coil spring 64 and connected to the outer coil spring 64. The coil press-fitting portion 616 has a cylindrical shape having an outer diameter slightly larger than the coil inner diameter of the outer coil spring, and in the present embodiment, the outer diameter of the coil press-fitting portion 616 is about the same as the outer diameter of the first cylinder portion 611. Is formed in. By press-fitting the coil press-fitting portion 616 from one end of the outer coil spring 64 so as to expand the inner diameter of the coil, one end portion of the outer coil spring 64 is fixed to the cylindrical plunger 61.

The inner end portion 617 of the coil press-fitting portion 616 is a portion that comes into contact with the tip end side of the large diameter portion 624 of the middle needle plunger 62 described later, and is inclined in accordance with the taper of the large diameter portion described later. The inner end portion 617 may have a smaller outer diameter in order to facilitate the insertion of the outer coil spring 64.

The protruding portion 615 is a portion that restricts the movement of the outer coil spring 64 attached to the coil press-fitting portion 616 toward the tip end side. Further, it is a portion in which the electrical contact 20 is supported in the housing portion 14 in contact with the upper receiving portion 17B of the upper housing 17.

The protruding portion 615 is located on the tip end side of the coil press-fitting portion 616, that is, between the first cylinder portion 611 and the coil press-fitting portion 616, and has an outer diameter larger than the outer diameter of the first cylinder portion 611 and the coil press-fitting portion 616. It has a cylindrical shape. As a result, there is a step between the outer peripheral surface of the protruding portion 615 and the outer peripheral surface of the coil press-fitting portion 616, and a stepped surface 619 formed of a plane perpendicular to the axial direction is formed at the portion connecting the stepped portions. There is. The stepped surface 619 reliably regulates the movement of the outer coil spring 64 toward the tip end side.

The middle needle plunger 62 is an elongated rod-shaped member having conductivity. The middle needle plunger 62 has a substantially cylindrical first rod portion 621 housed in the through hole 618 of the cylindrical plunger 61 and a substantially cylindrical large diameter portion 624 located on the inner end side of the first rod portion 621. And a second rod portion 626 having a substantially cylindrical shape located on the inner end side of the large diameter portion 624. The first rod portion 621, the large diameter portion 624, and the second rod portion 626 are integrally formed so that their respective central axes are located on the same axis.

The first rod portion 621 of the middle needle plunger 62 has a tip portion 622 that comes into contact with the electrode terminal 13 of the object to be inspected 12, and is a portion that can come into contact with the inner wall surface of the through hole 618 of the cylindrical plunger 61. The outer diameter of the first rod portion 621 is formed to be slightly smaller than the inner diameter of the through hole 618 of the cylindrical plunger 61, that is, the inner diameter of the through holes of the first cylinder portion 611 and the second cylinder portion 613. The first rod portion 621 can slide in the axial direction while being inserted inside the through hole 618 of the cylindrical plunger 61, that is, inside the through holes of the first cylinder portion 611 and the second cylinder portion 613. is there. The first rod portion 621 is, for example, a needle-type rod-shaped portion, and the tip portion 622 of the first rod portion 621 has a needle-like shape with a sharp tip.

The large diameter portion 624 of the middle needle plunger 62 has a portion at the tip that can contact the inner end portion 617 of the cylindrical plunger 61, and has a portion at the inner end that restricts the movement of the inner coil spring 65 toward the tip side. It is a part. The large diameter portion 624 is provided on the inner end side of the first rod portion 621 of the middle needle plunger 62, and the outer diameter thereof is set to be larger than the outer diameter of the first rod portion 621. Further, the outer diameter of the large diameter portion 624 is set to be slightly smaller than the outer diameter of the second cylinder portion 613 of the cylindrical plunger 61 and the coil inner diameter of the outer coil spring 64. A step is formed between the outer peripheral surface of the first rod portion 621 and the outer peripheral surface of the large diameter portion 624, and the surface connecting the step is formed with the inner end portion 617 of the second tubular portion 613 of the cylindrical plunger 61. It is a cylinder contact portion 623 that comes into contact.

The tubular portion contact portion 623 is a tapered surface (inclined surface) whose diameter increases toward the bottom. On the other hand, the inner end portion 617 of the second tubular portion 613 of the cylindrical plunger 61 facing the tubular portion contact portion 623 is a tapered surface (inclined surface) whose diameter becomes smaller toward the upper side. .. Therefore, when the tubular portion contact portion 623 of the middle needle plunger 62 contacts the second tubular portion 613 of the cylindrical plunger 61, the middle needle plunger 62 faces the center of the second tubular portion 613 of the cylindrical plunger 61. It has a structure that attracts you. Therefore, the tip portion 622 of the middle needle plunger 62 can be positioned so as to be positioned substantially at the center of the tip portion 612 of the cylindrical plunger 61, and the cylindrical contact portion 623 of the middle needle plunger 62 and the cylindrical plan can be positioned. The contact property with the rear end portion of the second cylinder portion 613 of the jar 61 can be improved.

The second rod portion 626 of the middle needle plunger 62 is a portion that locks the inner coil spring 65 by press fitting and comes into contact with the inside of the coil of the inner coil spring 65, and the second rod portion 626 is a portion of the large diameter portion 624. It is provided on the inner end side. The second rod portion 626 has an inner coil press-fitting portion 625 located on the large diameter portion 624 side and an extension portion 627 located on the inner end side thereof. The inner coil press-fitting portion 625 is set to an outer diameter slightly larger than the coil inner diameter of the inner coil spring 65, and the outer diameter of the extension portion 627 is set to an outer diameter slightly smaller than the coil inner diameter of the inner coil spring 65. A step is formed between the second rod portion 626 and the large diameter portion 624, and this step serves as a portion that restricts the movement of the inner coil spring 65 toward the tip end side.

The inner coil press-fitting portion 625 is a portion that locks the inner coil spring 65 by being inserted into and press-fitted into the end portion of the inner coil spring 65. The extension portion 627 is a portion housed in the coil of the inner coil spring 65. Since the second rod portion 626 is inserted into the coil of the inner coil spring 65, it is possible to prevent the electrical contact 20 from bending at the portions of the outer coil spring 64 and the inner coil spring 65.

The axial length of each portion of the middle needle plunger 62 is set so that the lengths of the first rod portion 621 and the second rod portion 626 are longer than the length of the large diameter portion 624. With such a configuration, it is preferable that the inner end side of the second rod portion 626 easily contacts the inside of the coil of the inner coil spring 65, and the length of the second rod portion 626 is the length of the first rod portion 621. It is more preferable that the length is about the same or longer. In this case, the deviation from the center due to the inclination of the middle needle plunger 62 becomes large on the inner end side of the second rod portion 626, and the inner end side of the extension portion 627 may come into contact with the inside of the coil of the inner coil spring 65. it can.

The wiring board side plunger 63 is a rod-shaped member formed of a conductive member. The wiring board side plunger 63 has a tip side rod portion 631 located on the tip side (lower side of FIGS. 1 and 6) and an inner end side (upper side of FIGS. 1 and 6, that is, the plunger 60 on the inspected object side). It has an inner end side rod portion 635 located on the side). The tip side rod portion 631 and the inner end side rod portion 635 are integrally formed.

The tip side rod portion 631 of the wiring board side plunger 63 is a portion that locks the outer coil spring 64 by press fitting and contacts the contact pad 22 of the wiring board 15. The tip side rod portion 631 has a tip portion 632 having a tip that contacts the contact pad 22 of the wiring board 15, and an outer coil locking portion 637 for locking the end portion of the outer coil spring 64. The tip end portion 632 is provided on the tip end side of the tip end side rod portion 631, and the outer coil locking portion 637 is provided on the inner end side of the tip end side rod portion 631.

The tip portion 632 of the tip side rod portion 631 has a substantially cylindrical shape and has a sharp tip, and the tip thereof is a portion that comes into contact with the contact pad 22 of the wiring board 15.

The outer coil locking portion 637 of the tip end side rod portion 631 has an outer coil press-fitting portion 636 located on the inner end side thereof and a protruding portion 633 located on the tip end side thereof.

The outer coil press-fitting portion 636 of the outer coil locking portion 637 has a cylindrical shape having an outer diameter slightly larger than the coil inner diameter of the outer coil spring 64. The outer coil spring 64 is fixed to the outer coil press-fitting portion 636 by press-fitting the end portion of the outer coil spring 64 into the outer coil press-fitting portion 636.

The protruding portion 633 of the outer coil locking portion 637 is located on the tip side of the outer coil press-fitting portion 636 and has a cylindrical shape having an outer diameter larger than the outer diameter of the outer coil press-fitting portion 636, and has an outer peripheral surface of the protruding portion 633. There is a step between the outer coil press-fitting portion 636 and the outer peripheral surface of the outer coil press-fitting portion 636. This step ensures that the end of the outer coil spring 64 attached to the outer coil press-fitting portion 636 is restricted from moving to the tip side.

The inner end side rod portion 635 of the wiring board side plunger 63 is a portion that locks the inner coil spring 65 by press fitting and contacts the inside of the coil of the inner coil spring 65. The inner end side rod portion 635 is connected to the inner end side of the outer coil press-fitting portion 636 of the outer coil locking portion 637. The inner end side rod portion 635 has an inner coil press-fitting portion 634 located on the tip end side and an extension portion 638 located on the inner end side.

The extension portion 638 of the inner end side rod portion 635 is a portion that comes into contact with the inside of the coil of the inner coil spring 65 and has an elongated substantially cylindrical shape, and its outer diameter is slightly smaller than the coil inner diameter of the inner coil spring 65. It is set. The extension portion 638 is a portion housed inside the inner coil spring 65. By inserting the inner end side rod portion 635 into the lower side of the inner coil spring 65, it is possible to prevent the electrical contact 20 from bending at the portions of the outer coil spring 64 and the inner coil spring 65.

The inner coil press-fitting portion 634 of the inner end side rod portion 635 is a portion for fixing the inner coil spring 65 by press-fitting the end portion of the inner coil spring 65, and its outer diameter is larger than the coil inner diameter of the inner coil spring 65. It is set slightly larger. Since the outer diameter of the inner coil press-fitting portion 634 is smaller than the outer diameter of the outer coil press-fitting portion 636 of the outer coil locking portion 637, a step is formed between the inner coil press-fitting portion 634 and the outer coil press-fitting portion 636. This step is a portion that reliably restricts the movement of the end portion of the inner coil spring 65 toward the tip end side.

In the electrical contact 20 configured in this way, the outer coil spring 64 is connected between the cylindrical plunger 61 of the plunger 60 on the inspected object side and the plunger 63 on the wiring board side, and the inner coil spring 65 is It is connected between the middle needle plunger 62 of the plunger 60 on the inspected object side and the plunger 63 on the wiring board side.

In a state where the electrical contact 20 is not pushed in from both ends (hereinafter referred to as a no-load state), the tubular contact portion 623 of the large diameter portion 624 of the middle needle plunger 62 and the inside of the cylindrical plunger 61. It is configured to be in contact with the end (the inner end of the inner end portion 617 of the second cylindrical portion 613). At this time, it is preferable that the middle needle plunger 62 is set to negatively force the cylindrical plunger 61 outward in the axial direction. Further, in a state where the cylinder contact portion 623 of the large diameter portion 624 of the middle needle plunger 62 and the inner end of the inner end portion 617 of the second cylinder portion 613 of the cylindrical plunger 61 are in contact with each other, the middle needle plan Whether the tip of the jar 62 (the tip of the tip 622 of the first rod 621) and the tip of the cylindrical plunger 61 (the tip of the tip 612 of the first cylinder 611) are at the same position in the axial direction. The tip of the middle needle plunger 62 is set to be slightly retracted. When the tip of the middle needle plunger 62 is set to be slightly retracted, the cylindrical plan is formed even when the electrode terminal 13 of the object to be inspected 12 has a curved surface shape with a high surface center as in the case of a bump. It is preferable because the tip of the jar 61 can come into contact with the electrode terminal 13 before the tip of the middle needle plunger 62.

Further, in the electric contact 20 configured in this way, a slight gap is formed between the outer circumference of the large diameter portion 624 and the inside of the coil of the outer coil spring 64 in the no-load state. Further, there is a slight gap between the extension portion 627 and the inside of the coil of the inner coil spring 65, or there is a slight touch within a range in which the movement of the middle needle plunger 62 in the axial direction is not hindered. It has become.

Further, the inner end of the middle needle plunger 62 (the inner end of the extension portion 627 of the second rod portion 626) and the inner end of the wiring board side plunger (the inner end of the extension portion 638 of the inner end side rod portion 635). Are spaced so that both plungers do not touch even when they are pushed to the maximum expected during inspection. If this distance is made as narrow as possible, the conductive distance will be short and the influence of reactance will be small. Therefore, the inner coil spring portion corresponding to the portion where the inner ends of both plungers are spaced from each other is tightly wound. Is more preferable.

When the plunger 60 on the inspected object side is pushed inward in the axial direction, the electrical contact 20 configured in this way is urged outward in the axial direction by the elastic force of the coil spring 66, and the coil spring 66 is urged outward. Although it can move inward against the elastic force, the way in which the plurality of coil springs 64 and 65 constituting the coil spring 66 act on the plunger 60 on the inspected object side differs depending on the state at the time of being pushed. .. That is, in a state where the inner end of the cylindrical plunger 61 is in contact with the tubular contact portion 623 of the large diameter portion 624, when the cylindrical plunger 61 is pushed in, the large diameter portion 624 of the middle needle plunger 62 is pushed. The middle needle plunger 62 is also pushed inward together. Therefore, since the elastic force combined by connecting the inner coil spring 65 and the outer coil spring 64 in parallel is generated, a relatively strong elastic force is generated at the tip of the cylindrical plunger 61. Further, in a state where the cylindrical plunger 61 is pushed in without contact between the inner end of the cylindrical plunger 61 and the tubular contact portion 623 of the large diameter portion 624 (the state in which the middle needle plunger 62 is also pushed in). , The elastic force of the outer coil spring 64 alone is applied to the cylindrical plunger 61. Further, in a state where the middle needle plunger 62 is pushed in without contacting the inner end of the cylindrical plunger 61 and the tubular contact portion 623 of the large diameter portion 624, the inner coil spring 65 is applied to the middle needle plunger 62. A single elastic force is applied.

By applying the elastic force of the coil spring 66 to the plunger 60 on the inspected object side in this way, even if the positions of the electrode terminal 13 of the inspected object 12 and the tip of the plunger 60 on the inspected object side are displaced, the cylindrical plunger Since the tip of the cylinder hits the electrode terminal with a strong pressing force, the cylindrical plunger is less likely to be misaligned. If the electrode terminal 13 of the object to be inspected 12 and the tip of the plunger 60 on the object to be inspected are not displaced, the cylindrical plunger 61 is pressed by the outer coil spring 64, and the middle needle plunger 62 is the inner coil. Since it is pressed by the spring 65, it can be pressed at a set pressure.

The second rod portion 626 of the middle needle plunger 62 is inserted inside one end (upper end) of the inner coil spring 65, and one end (upper end) of the inner coil spring 65 is inserted. , It is locked to the coil locking portion of the middle needle plunger 62. Further, inside the other end (lower end) of the inner coil spring 65, the inner end side rod portion 635 of the wiring board side plunger 63 is inserted, and the other end (lower end) of the inner coil spring 65 ( The lower end portion) is locked to the inner coil press-fitting portion 634 of the plunger 63 on the wiring board side. Further, since the second rod portion 626 of the middle needle plunger 62 and the inner end side rod portion 635 of the wiring board side plunger 63 are inserted inside the inner coil spring 65, the electrical contact 20 is inserted. Deformation (for example, buckling) can be suppressed.

The inner diameter of the outer coil spring 64 is larger than the outer diameter of the inner coil spring 65, and the inner coil spring 65 is provided inside the outer coil spring 64 in a state where the electrical contact 20 is assembled. The second cylindrical portion of the cylindrical plunger 61 is inserted inside one end (upper end) of the outer coil spring 64, and one end of the outer coil spring 64 is the cylindrical plunger 61. It is locked to the outer coil locking portion 614. Further, the other end (lower end) of the outer coil spring 64 is locked to the outer coil locking portion 637 of the wiring board side plunger 63. Therefore, when the crown-shaped tip portion 612 of the cylindrical plunger 61 comes into contact with the electrode terminal 13 of the object 12 to be inspected, the tip portion 622 of the middle needle plunger 62 is the electrode terminal at the center of the crown-shaped tip portion 612. It makes contact so as to pierce 13. Further, when the electrical contactor 20 is brought into contact with the electrode terminal 13, even if the tip portion 612 of the cylindrical plunger 61 contacts only one point with the electrode terminal 13 due to misalignment, the tip of the cylindrical plunger 61 is contacted. Since the tip portion 622 of the middle needle plunger 62 can contact the electrode terminal 13 at the center of the portion 612, multipoint contact can be realized.

The position of the needle-shaped tip portion 622 of the middle needle plunger 62 is the same as or slightly lower than the position of the crown-shaped tip portion 612 of the cylindrical plunger 61. desirable. As a result, the middle needle plunger 62 receives the elastic force of the inner coil spring 65 and can move up and down independently of the cylindrical plunger 61, and the tip portion 612 of the cylindrical plunger 61 with respect to the electrode terminal 13. At the time of contact, the tip portion 622 of the middle needle plunger 62 can be reliably contacted with the electrode terminal 13.

Further, since the second rod portion 626 is housed inside the inner coil spring 65, the second rod portion 626 is inside when the inner coil spring 65 is compressed or when the middle needle plunger is tilted. Since it comes into contact with the inside of the coil spring 65, it is possible to secure a conductive path of the wiring board between the electrode terminal 13 of the object to be inspected 12 and the contact pad 22 of the wiring board 15.
Further, since the inner end side rod portion 635 is housed inside the inner coil spring 65, the inner end side rod portion 635 becomes the inner coil when the electric contact 20 bends and the inner coil spring 65 tilts. Since it comes into contact with the inside of the spring 65, it is possible to secure a conductive path of the wiring board between the electrode terminal 13 of the object to be inspected 12 and the contact pad 22 of the wiring board 15.

(A-3) Configuration of Electrical Contact 20 in Contact with Electrode Terminal 13 of Subject 12 FIG. 7 shows a configuration on the electrode terminal side of the electrical contact 20 at the time of contact with the electrode terminal 13 of the object 12 to be inspected. It is an enlarged view which shows.

FIG. 7A is an explanatory view illustrating how the tip portion 612 of the cylindrical plunger 61 and the tip portion 622 of the middle needle plunger 62 make multipoint contact with the electrode terminal 13.

FIG. 7B is an explanatory view illustrating a state when the tip portion 612 of the cylindrical plunger 61 comes into contact with the electrode terminal 13 of the object to be inspected 12. In FIG. 7B, for the sake of simplicity, the movement of the tip portion 612 of the cylindrical plunger 61 in contact with the electrode terminal 13 is shown larger than it actually is.

Since the electrical contact 20 is formed of the outer coil spring 64 and the inner coil spring 65, the flexibility of the coil spring 66 allows the electrical contact 20 to make stable contact with the electrode terminal 13. it can.

Ideally, when the electrical contact 20 comes into contact with the electrode terminal 13, the crown-shaped tip 612 of the cylindrical plunger 61 makes contact so as to cover the electrode terminal 13. At this time, as shown in FIG. 7A, the needle-shaped tip portion 622 of the middle needle plunger 62 comes into contact with each other so as to pierce the apex of the ball-shaped electrode terminal 13. Then, the middle needle plunger 62 moves relatively downward (the contact pad 22 side of the wiring board 15), so that the cylinder contact portion 623 of the middle needle plunger 62 is the second cylinder of the cylindrical plunger 61. Move away from the end of portion 613. That is, the middle needle plunger 62 can move up and down independently of the cylindrical plunger 61.

As described above, it is desirable that the crown-shaped tip portion 612 of the cylindrical plunger 61 makes contact so as to cover the ball-shaped electrode terminal 13, but as shown in FIG. 7B, the cylindrical plunger 61 It is possible that the tip portion 612 comes into contact with the electrode terminal 13 in a displaced state.

At this time, the cylindrical plunger 61 in contact with the electrode terminal 13 may be tilted. In that case, it is possible that only a part of the apex (four apex in this embodiment) of the crown-shaped tip portion 612 of the cylindrical plunger 61 comes into contact with the electrode terminal 13, but the tip of the middle needle plunger 62 When the portion 622 is in contact with the electrode terminal 13 so as to pierce the electrode terminal 13, multipoint contact can be maintained with respect to the electrode terminal 13, and the tip portion 622 of the middle needle plunger 62 is not in contact with the electrode terminal 13. In this case, since the elastic force of the inner coil spring 65 and the outer coil spring 64 is connected in parallel to the cylindrical plunger 61, the electrode terminal 13 can be reliably contacted.

(A-4) Conductive Path FIG. 8 is an explanatory diagram illustrating the conductive path of the electrical contact 20 according to the embodiment. In FIG. 8, the thick line is a portion conceptually representing the conductive path.

By interpolating the middle needle plunger 62 into the cylindrical plunger 61, the tip portion 612 of the cylindrical plunger 61 and the tip portion 622 of the middle needle plunger 62 come into contact with the electrode terminal 13, so that the plunger on the object side to be inspected becomes Multipoint contact is made with the electrode terminal 13. The conductive path starting from the tip end portion 622 of the middle needle plunger 62 passes in the order of the first rod portion 621, the large diameter portion 624, and the second rod portion 626, and the second rod portion 626 comes into contact with the inner coil spring 65. It is connected to the inner coil spring 65 at the innermost end side of the portion.
Further, the conductive path starting from the tip portion 612 of the cylindrical plunger 61 passes through the cylindrical plunger 61, and is the contact portion between the inner surface of the through hole 618 and the first rod portion of the middle needle plunger 62, or the second cylinder. The contact portion between the inner end portion 617 of the portion 613 and the tubular portion contact portion 623 of the large diameter portion 624 of the middle needle plunger 62 is connected to the middle needle plunger 62, and thereafter, the tip portion 622 of the middle needle plunger 62 described above. It is connected to the inner coil spring 65 in the same manner as the path described in the conductive path starting from.

After being connected to the inner coil spring by any of the above paths, wiring is performed on the innermost end side of the portion where the inside of the coil of the inner coil spring 65 is in contact with the inner end side rod portion 635 of the wiring board side plunger 63. It is connected to the plunger 63 on the board side. After being connected to the inner end side rod portion 635 of the wiring board side plunger 63, the inner end side rod portion 635 is connected to the tip end side rod portion 631 through the tip side rod portion 631.

In this way, even when the plunger 60 on the inspected body side is composed of a plurality of members of the tubular body and the needle-shaped body, and the contact state and the pushed state of each member with the inspected body 12 change. Since the conductive path is integrated in the large diameter portion 624 and then connected to the inner coil spring 66, the change in the conductive path is reduced and the influence on the measurement can be reduced.

Further, since the inner end of the second rod portion 626 of the middle needle plunger 62 and the inner end of the inner end side rod portion 635 of the wiring board side plunger 63 are close to each other without contacting each other. It is possible to prevent high inductance due to the influence of the spiral length of the inner coil spring 65. In particular, the length from the large diameter portion 624 of the middle needle plunger 62 to the inner end of the second rod portion 626 is set to be equal to or greater than the length from the large diameter portion 624 to the tip of the first rod portion 621. 2 The contact between the extension portion 627 of the rod portion 626 and the inside of the coil of the inner coil spring 65 becomes easier to contact on the inner end side of the extension portion 627, and the distance passing through the inner coil spring can be shortened, which is preferable. It is more preferable that the length from 624 to the inner end of the second rod portion 626 is longer than the length from the large diameter portion 624 to the tip of the first rod portion 621. As a result, the electrical connection of the energization test of the object to be inspected 12 using the electrical connection device 11 can be improved, and the test can be performed with high accuracy.

An insulating film is coated on a part of the surface of each component of the electrical contact 20 in order to ensure a conductive path between the electrode terminal 13 of the object 12 and the contact pad 22 of the wiring board 15. You may try to do so. For example, the contact surface between the wiring board side plunger 63 and the outer coil spring 64 may be coated with an insulating film, or in addition to or separately from this, the second tubular portion 613 and the outer side of the cylindrical plunger 61. An insulating film may be coated on the contact surface with the coil spring 64.

(A-5) Effect of Embodiment As described above, according to this embodiment, the electrode terminal of the object to be inspected is in flexible and stable contact, and the electrical connection to the electrode terminal of the object to be inspected is made. It is possible to carry out the energization test of the object to be inspected with high accuracy.
In the present embodiment, the case where the electrical connection device is a test socket has been described, but it can be a probe card or a relay board.

11 ... Electrical connection device, 12 ... Subject to be inspected, 13 ... Electrode terminal, 15 ... Wiring board, 16 ... Lower housing, 16A ... First support hole, 16B ... Lower receiving part, 17 ... Upper housing, 17A ... 2nd support hole, 17B ... upper receiving part, 18 ... frame part, 19 ... socket part, 22 ... contact pad, 23 ... pin head fitting hole, 27 ... electrical contact support hole, 28 ... pin shaft part fitting Joint hole, 31 ... outer frame part, 32 ... fixing flange part, 33 ... vertical movement support flange part, 35 ... fixing member, 37 ... guide pin, 38 ... pin hole, 39 ... head, 40 ... shaft part, 42 ... Plate part, 43 ... Guide screw hole, 44 ... Spring hole, 46 ... Guide screw, 47 ... Spring, 48 ... Head, 49 ... Guide part, 50 ... Screw rod part, 51 ... Minus groove, 53 ... Receiving recess , 53A ... Upper opening, 53B ... Inclined surface, 54 ... Flange part, 55 ... Bottom plate part, 56 ... Guide hole, 57 ... Reduction hole part, 58 ... Seating part, 59 ... Guide hole,
20 ... Electrical contactor, 60 ... Plunger on the side to be inspected, 64 ... Outer coil spring, 65 ... Inner coil spring,
61 ... Cylindrical plunger, 611 ... First cylinder, 612 ... Tip, 613 ... Step, 614 ... Outer coil locking, 613 ... Second cylinder, 615 ... Protruding,
62 ... Middle needle plunger, 621 ... 1st rod part, 622 ... Tip part, 623 ... Cylinder part locking part, 624 ... Large diameter part, 625 ... Coil locking part, 626 ... 2nd rod part,
63 ... Wiring board side plunger, 631 ... Main body part, 632 ... Tip part, 633 ... Outer coil locking part, 634 ... Inner coil locking part, 635 ... Rod part.

Claims (5)

In a contact that electrically connects both ends via a coil spring
The first coil spring part and
The second coil spring portion existing inside the first coil spring portion and
It has a first cylinder portion, a step portion, and a second cylinder portion, the second cylinder portion is inserted into the first coil spring portion, and one end portion of the first coil spring portion is inserted into the first coil spring portion. The first plunger of the tubular member, which is fixed at the step portion and the tip portion of the first tubular portion is brought into contact with the first contact target,
One of the first rod portion of the needle-shaped member inserted into the first plunger and in contact with the first contact object and the second coil spring portion having a diameter larger than the outer diameter of the first rod portion. A second plunger having a large diameter portion for fixing the end portion and a second rod portion smaller than the outer diameter of the large diameter portion and inserted into the second coil spring portion.
A third plunger that fixes the other end of the first coil spring portion and the other end of the second coil spring portion and comes into contact with the second contact target is provided.
An electrical contact that is characterized in that the outer circumference of the large diameter portion of the second plunger is located inside the first coil spring portion. The outer circumference of the second cylinder portion of the first plunger is located inside the first coil spring portion.
The electrical contact according to claim 1, wherein the end portion of the large diameter portion of the second plunger can be contacted with the end portion of the second cylinder portion of the first plunger. Child. The electricity according to claim 1 or 2, wherein the outer diameter of the large diameter portion of the second plunger is slightly smaller than the outer diameter of the second cylinder portion of the first plunger. Plunger. The first aspect of the present invention is characterized in that the second rod portion of the second plunger inserted in the second coil spring portion prevents deformation of the electrical contactor. The described electrical contactor. In an electrical connection device that contacts the electrode terminals of the object to be inspected for testing.
It is provided at a position corresponding to the electrode terminal of the object to be inspected, and is provided with an electrical contactor that electrically contacts the electrode terminal.
An electrical connection device comprising the electrical contact according to any one of claims 1 to 4 as the electrical contact.

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