JP2020138283A - Method for manufacturing fluid handling apparatus - Google Patents

Abstract

To provide a method for manufacturing a fluid handling apparatus which can easily correct a diaphragm shape.SOLUTION: A fluid handling apparatus 100 includes a base plate 120, and a film 110 which is joined to one surface of the base plate 120 and includes a diaphragm 111. A method for manufacturing the fluid handling apparatus 100 includes: a process in which a first metal mold 11 having a recess 13 for the diaphragm 111, the film 110, the base plate 120, and a second metal mold 12 are laminated in this order; and a process in which gas is introduced into a space between the film 110 and the base plate 120 at positions facing the recess 13 with the film 110 interposed therebetween, or gas is sucked from a space between the recess 13 and the film 110, thereby bringing a part of the film 110 into contact with an inner surface of the recess 13 and molding the diaphragm 111.SELECTED DRAWING: Figure 1

Description

The present invention relates to a method for manufacturing a fluid handling device.

In recent years, fluid handling devices have been used in order to analyze minute amounts of substances such as proteins and nucleic acids with high accuracy and high speed. The fluid handling device has an advantage that the amount of reagents and samples required for analysis can be small, and is expected to be used in various applications such as clinical tests, food tests, and environmental tests. As a fluid handling device, there is known a fluid handling device that has a plurality of flow paths and a plurality of microvalves and can sequentially send different types of liquids by sequentially driving the microvalves (for example, a patent). Reference 1).

Patent Document 1 describes a fluid handling device having a substrate, a film, and a rotatable sliding member. The substrate has a first flow path, a second flow path, and partition walls arranged at one end of the first flow path and one end of the second flow path. The film has a diaphragm formed so as to project toward the opposite side of the substrate, and the diaphragm is arranged on the substrate so as to face the partition wall. The sliding member is arranged so that the back surface on which the convex portion is formed faces the film.

In the fluid handling device described in Patent Document 1, the diaphragm is brought into contact with the partition wall by rotating the sliding member and pushing the diaphragm by the convex portion, thereby blocking the first flow path and the second flow path. Yes (micro valve closed). On the other hand, by further rotating the sliding member to separate the convex portion from the diaphragm, the diaphragm and the partition wall can be separated from each other, and the first flow path and the second flow path can be communicated with each other (micro valve open). ..

Further, Patent Document 1 also discloses a fluid handling device having not only a micro valve but also a micro pump. The micropump is formed by arranging a film pump diaphragm on a flat surface of a substrate. The diaphragm for a pump is formed so as to have an arcuate shape in a plan view and to protrude toward the opposite side of the substrate.

By rotating the sliding member and pushing the pump diaphragm by the convex portion, the space between the substrate and the pump diaphragm is in a pressurized state or a negative pressure state. The micropump utilizes this pressurized or negative pressure state to move the fluid in the flow path.

International Publication No. 2018/030253

The fluid handling device described in Patent Document 1 can be considered to be manufactured by joining a substrate on which a flow path or the like is formed and a film on which a diaphragm or the like is formed. In this case, it is conceivable that the diaphragm of the film is formed by sandwiching the film with a pair of molds having a shape complementary to the shape of the diaphragm. However, in such a method for forming a diaphragm, when it is desired to modify the shape of the diaphragm, it is necessary to modify the corresponding surfaces of both molds.

An object of the present invention is a method for manufacturing a fluid handling device having a substrate and a film containing a diaphragm bonded to one surface of the substrate, and a fluid capable of easily modifying the shape of the diaphragm. The purpose is to provide a method for manufacturing a handling device.

The method for manufacturing a fluid handling device according to the present invention is a method for manufacturing a fluid handling device having a substrate and a film containing a diaphragm bonded to one surface of the substrate, and has a recess for the diaphragm. The step of laminating the first mold, the film, the substrate, and the second mold in this order, and the space between the film and the substrate at a position facing the recess across the film. This includes a step of forming the diaphragm by bringing a part of the film into contact with the inner surface of the recess by introducing a gas into the recess or sucking the gas from the space between the recess and the film.

According to the present invention, it is possible to provide a method for manufacturing a fluid handling device that can easily modify the shape of a diaphragm.

1A to 1C are diagrams for explaining the manufacturing method of the fluid handling device according to the first embodiment of the present invention. 2A and 2B are other views for explaining the manufacturing method of the fluid handling device according to the first embodiment of the present invention. 3A to 3C are diagrams showing the configuration of a fluid handling device. 4A and 4B are diagrams showing the configuration of a fluid handling device of a modified example. 5A to 5C are diagrams for explaining the manufacturing method of the fluid handling device according to the second embodiment of the present invention. 6A and 6B are other views for explaining the manufacturing method of the fluid handling device according to the second embodiment of the present invention.

Hereinafter, a method for manufacturing a fluid handling device according to an embodiment of the present invention will be described in detail with reference to the drawings.

[Embodiment 1]
1A to 1C and 2A and 2B are diagrams for explaining a method of manufacturing a fluid handling device according to the first embodiment of the present invention. 1A is a plan view when the film 110 and the substrate 120 are sandwiched between the molds 10, FIG. 1B is a cross-sectional view taken along the line AA shown in FIG. 1A, and FIG. 1C is shown in FIG. 1A. It is sectional drawing of the BB line shown. FIG. 2A is a cross-sectional view taken along the line CC shown in FIG. 1A in the first step, and FIG. 2B is a cross-sectional view taken along the line AA shown in FIG. 1A in the second step.

The method for manufacturing the fluid handling device according to the present embodiment uses a mold 10 having a first mold 11 and a second mold 12. Therefore, after explaining the mold 10, the manufacturing methods of the fluid handling devices 100 and 200 and the fluid handling devices 100 and 200 will be described.

(Mold configuration)
As shown in FIGS. 1A to 1C and 2A and 2B, the mold 10 has a first mold 11 and a second mold 12. The diaphragm 111 is formed by deforming a part of the film 110 with the film 110 and the substrate 120 arranged between the first mold 11 and the second mold 12.

The first mold 11 has a recess 13 for the diaphragm 111. The shape of the first mold 11 is not particularly limited as long as the film 110 and the substrate 120 can be sandwiched together with the second mold 12. In the present embodiment, the shape of the first mold 11 is a substantially rectangular parallelepiped shape.

The recess 13 is formed on the surface on which the film 110 is arranged. The recess 13 has a shape complementary to the diaphragm 111 formed on the film 110. The shape of the recess 13 is appropriately designed according to the shape of the diaphragm 111 to be molded. The plan view shape of the recess 13 may be a substantially arc shape or a circular shape. In the present embodiment, the plan view shape of the recess 13 is a substantially arc shape. Further, the cross-sectional shape of the recess 13 in the width direction is a substantially arc shape. One opening of the first air hole 14 may be formed on the inner surface of the recess 13. The first air hole 14 is a region in which the diaphragm 111 does not function as a diaphragm pump 133 (see FIG. 3) (a region in which the diaphragm 111 faces the first flow path groove 122 and the second flow path groove 123), or a diaphragm valve described later. It is preferably formed in a region that does not function as 233 (a region in which the diaphragm 211 does not contact the partition wall 244). When one opening of the first air hole 14 is formed on the inner surface of the recess 13, the other opening of the first air hole 14 is formed, for example, on the side surface of the first mold 11.

The first mold 11 may be configured so that the film 110 and the substrate 120 can be heated. The method for heating the film 110 and the substrate 120 is not particularly limited. The method of heating the film 110 and the substrate 120 may be to directly heat the first mold 11 by generating heat, or indirectly by heating the first mold 11 by an external heating unit (not shown). May be heated to.

The second mold 12 is arranged so as to face the first mold 11. The shape of the second mold 12 is not particularly limited as long as the film 110 and the substrate 120 can be sandwiched together with the first mold 11. In the present embodiment, the shape of the second mold 12 is a substantially rectangular parallelepiped shape. One opening of the second air hole 15 is formed on the surface of the second mold 12 facing the first mold 11. The second air hole 15 may be opened at a position corresponding to the through hole formed in the substrate 120, for example, or may be opened at a position facing the flow path groove. The other opening of the second air hole 15 is formed, for example, on the side surface of the second mold 12. A pump 16 for sending air to the second air hole 15 is connected to the other opening of the second air hole 15.

(Configuration of fluid handling device)
Next, the fluid handling device 100 using the film 110 including the diaphragm 111 will be described.

3A to 3C are diagrams showing the configuration of the fluid handling device 100. 3A is a plan view of the fluid handling device 100, FIG. 3B is a sectional view taken along line AA shown in FIG. 3A, and FIG. 3C is a sectional view taken along line BB shown in FIG. 3A. is there.

As shown in FIGS. 3A to 3C, the fluid handling device 100 is composed of a film 110 and a substrate 120, and the film 110 is bonded to one surface of the substrate 120. The area surrounded by the substrate 120 and the film serves as a flow path for flowing a fluid such as a reagent, a liquid sample, a gas, or a powder. The fluid handling device 100 has an introduction port 131, a first flow path 132, a diaphragm pump 133, a second flow path 134, and a discharge port 135.

The substrate 120 is a transparent substantially rectangular resin substrate. The thickness of the substrate 120 is not particularly limited, but is, for example, 1 mm to 10 mm. The material of the substrate 120 is not particularly limited and may be appropriately selected from known resins and glass. Examples of materials for the substrate 120 include cycloolefin polymers, cyclic olefin copolymers, polyethylene terephthalates, polycarbonates, polymethyl methacrylate, polyvinyl chloride, polypropylene, polyethers, polyethylenes, polystyrenes, silicone resins and elastomers.

The substrate 120 is formed with a first through hole 121, a first flow path groove 122, a second flow path groove 123, and a second through hole 124. The film 110 is bonded to the surface of the substrate 120 on which the first flow path groove 122 and the second flow path groove 123 are formed. By joining the film 110 to the surface on which the first flow path groove 122 and the second flow path groove 123 are formed, the first through hole 121 becomes an introduction port 131, and the first flow path groove 122 becomes the first flow path. It becomes 132, the second flow path groove 123 becomes the second flow path 134, and the second through hole 124 becomes the discharge port 135.

The film 110 is a flexible, transparent, substantially rectangular resin film. A diaphragm 111 is formed on the film 110. The plan-view shape of the diaphragm 111 is not particularly limited. In the present embodiment, the plan view shape of the diaphragm 111 is substantially arcuate. The thickness of the film 110 is not particularly limited as long as it can function as a diaphragm. For example, the thickness of the film 110 is 30 μm or more and 300 μm or less. Further, the material of the film 110 is not particularly limited. For example, the material of the film 110 can be appropriately selected from known resins. Examples of materials for film 110 include cycloolefin polymers, cyclic olefin copolymers, polyethylene terephthalates, polycarbonates, methyl methacrylate, polyvinyl chloride, polypropylene, polyethers, polyethylenes, polystyrenes, silicone resins and elastomers. The film 110 is bonded to the substrate 120 by, for example, thermocompression bonding, laser welding, an adhesive, or the like.

The glass transition temperature of the film 110 is lower than the glass transition temperature of the substrate 120. The glass transition temperature of the film 110 is preferably 3 ° C. or higher, more preferably 7 ° C. or higher, lower than the glass transition temperature of the substrate 120. Since the glass transition temperature of the film 110 is 3 ° C. or more lower than the glass transition temperature of the substrate 120, only the film 110 can be reliably softened in the step of forming the diaphragm 111 described later.

The introduction port 131 is a bottomed recess that is connected to the upstream end of the first flow path 132 and is open to the outside. The introduction port 131 is composed of a first through hole 121 formed in the substrate 120 and a film 110 that closes one opening of the first through hole 121. The shape and size of the introduction port 131 are not particularly limited, and can be appropriately designed as needed. The shape of the introduction port 131 is, for example, a substantially cylindrical shape. The width of the introduction port 131 is, for example, about 2 mm.

The first flow path 132 is a flow path connecting the introduction port 131 and the diaphragm pump 133. The first flow path 132 is composed of a first flow path groove 122 formed on the substrate 120 and a film 110 that closes the first flow path groove 122.

The diaphragm pump 133 cooperates with a rotary member (not shown) to move the fluid from the introduction port 131 to the discharge port 135. The diaphragm pump 133 has a pump flow path 136 composed of a diaphragm 111 and a flat surface of a substrate 120. The diaphragm 111 projects on the side opposite to the substrate 120, and has a substantially arcuate shape in a plan view. The pump flow path 136 is a space formed between the diaphragm 111 and the substrate 120 and extending in a substantially arc shape, and connects the first flow path 132 and the second flow path 134. The upstream end of the pump flow path 136 is connected to the downstream end of the first flow path 132. Further, the downstream end of the pump flow path 136 is connected to the upstream end of the second flow path 134. The size of the pump flow path 136 is not particularly limited. In the present embodiment, the width of the diaphragm 111 and the substrate 120 of the pump flow path 136 is about several tens of μm.

The diaphragm 111 is arranged so that, for example, a pressing portion (for example, a convex portion) of a rotary member (not shown) can move on the diaphragm 111 while pressing a part of the diaphragm 111 against the substrate 120.

The second flow path 134 is a flow path connecting the diaphragm pump 133 and the discharge port 135. The second flow path 134 is composed of a second flow path groove 123 formed on the substrate 120 and a film 110 that closes the second flow path groove 123.

The cross-sectional area and cross-sectional shape of the first flow path 132 and the second flow path 134 are not particularly limited. For example, the first flow path 132 and the second flow path 134 are flow paths through which the fluid can move. In this case, the cross-sectional shape of the first flow path 132 and the second flow path 134 is, for example, a substantially rectangular shape having a side length (width and depth) of about several tens of μm.

The discharge port 135 is a bottomed recess that is connected to the downstream end of the second flow path 134 and is open to the outside. In the present embodiment, the discharge port 135 is composed of a second through hole 124 formed in the substrate 120 and a film 110 that closes one opening of the second through hole 124. The shape and size of the discharge port 135 are not particularly limited and may be appropriately designed as needed. The shape of the discharge port 135 is, for example, a substantially cylindrical shape. The width of the discharge port 135 is, for example, about 2 mm.

The fluid handling device 100 presses the upstream end of the diaphragm 111 with a pressing portion of a rotary member (not shown), for example, with the introduction port 131 filled with fluid. Then, when the rotary member is rotated to move the pressing portion from the upstream end to the downstream end of the diaphragm 111, the inside of the flow path becomes negative pressure on the upstream side of the pressing portion, and the fluid flows from the introduction port 131. Move in. Next, the rotary member is further rotated to move the pressing portion that has moved to the downstream end of the diaphragm 111 to the upstream end of the diaphragm 111 again. In this state, when the rotary member is rotated to move the pressing portion from the upstream end to the downstream end of the diaphragm 111, the inside of the flow path becomes negative pressure on the upstream side of the pressing portion, and the fluid flows from the introduction port 131. Move into the road. Further, on the downstream side of the pressing portion, the pressure inside the flow path becomes positive, and the fluid in the pump flow path 136 moves to the discharge port 135. By repeating this step, the fluid in the introduction port 131 can be moved to the discharge port 135.

Next, the fluid handling device 200 using the film 210 including the diaphragm 211 having a circular shape in a plan view will be described. The fluid handling device 200 of the modified example differs from the fluid handling device 100 in that it has a diaphragm valve 233 instead of the diaphragm pump 133. Therefore, the same components as those of the fluid handling device 100 are designated by the same reference numerals, and the description thereof will be omitted.

FIG. 4 is a diagram showing a configuration of a fluid handling device 200 of a modified example. FIG. 4A is a plan view of the fluid handling device 200 of the modified example, and FIG. 4B is a cross-sectional view taken along the line AA shown in FIG. 4A.

As shown in FIGS. 4A and 4B, the fluid handling device 200 of the modified example is composed of a film 210 and a substrate 220, and the film 210 is bonded to one surface of the substrate 220. The other fluid handling device 200 has an introduction port 131, a first flow path 132, a diaphragm valve 233, a second flow path 134, and a discharge port 135.

The diaphragm valve 233 is composed of a diaphragm 211, a downstream end portion of the first flow path 132, and an upstream end portion of the second flow path 134. In the present embodiment, the plan view shape of the diaphragm 211 is a circular shape. The diaphragm 211 is arranged so as to cover the downstream end of the first flow path 132, the upstream end of the second flow path 134, and the partition wall 244 between the first flow path 132 and the second flow path 134. ..

In the fluid handling device 200, when the diaphragm 211 is pressed by a pressing portion (not shown) or the like, the diaphragm 211 is deformed toward the partition wall 244. When the diaphragm 211 and the partition wall 244 come into contact with each other, the flow path between the first flow path 132 and the second flow path 134 is blocked, so that the valve is closed. On the other hand, when the pressing of the diaphragm 211 by the pressing portion (not shown) is released, the diaphragm 211 is deformed so as to return to its original position. When the diaphragm 211 and the partition wall 244 are separated from each other, the first flow path 132 and the second flow path 134 communicate with each other to open the flow path and open the valve, and the fluid passes through the first flow path 132 and the second flow path 134.

(Manufacturing method of fluid handling device)
The method for manufacturing the fluid handling device 100 of the present invention is a step of laminating the first mold 11 in which the recess 13 for the diaphragm 111 is formed, the film 110, the substrate 120, and the second mold 12 in this order. (First step) and a step of introducing air into the space between the substrate 120 and the film 110 to bring a part of the film 110 into contact with the inner surface of the recess 13 for the diaphragm 111 to form the diaphragm 111 (second step). Step) and included.

As shown in FIGS. 1A to 1C and FIG. 2A, in the first step, the first mold 11, the film 110, the substrate 120, and the second mold 12 are laminated in this order. A laminate of the film 110 and the substrate 120 may be arranged between the first mold 11 and the second mold 12, or the film 110, the substrate 120 and the second mold 12 may be placed on the first mold 11. It may be arranged in order. In the laminated body of the first mold 11, the film 110, the substrate 120, and the second mold 12, the film 110 faces the surface of the first mold 11 where the recess 13 for the diaphragm 111 is formed. Is placed. The substrate 120 is arranged so as to face the surface of the film 110 opposite to the surface on which the first mold 11 is arranged. The second mold 12 is arranged so as to face the surface of the substrate 120 opposite to the surface on which the film 110 is arranged. The second mold 12 is arranged so that the second air hole 15 is positioned so as to correspond to the through hole of the substrate 120. It is preferable that the first mold 11 and the film 110, the film 110 and the substrate 120, and the substrate and the second mold 12 are arranged in close contact with each other. An elastic member having elasticity may be arranged between the substrate 120 and the second mold 12. Examples of elastic members include silicone, polytetrafluoroethylene, phosphor bronze. By sandwiching the elastic member between the substrate 120 and the second mold 12, the mold 10 can press the film 110 and the substrate 120 more uniformly.

As shown in FIG. 2B, in the second step, a part of the film 110 is brought into contact with the inner surface of the recess 13 for the diaphragm 111 to form the diaphragm 111. First, in the second step, the film 110 and the substrate 120 are heated in a state where the first mold 11, the film 110, the substrate 120, and the second mold 12 are laminated. The heating temperature is not particularly limited as long as the film 110 is softened. When the material of the film 110 is a cycloolefin polymer (COP), the heating temperature is 140 to 150 ° C., and when the material of the film 110 is a cyclic olefin copolymer, the heating temperature is 100 to 110 ° C. As a result, the film 110 is softened and the diaphragm 111 can be easily formed. Next, the air compressed by the pump 16 is sent to the space between the film 110 and the substrate 120 at a position facing the recess 13 across the film 110. The pressure generated by the pump 16 is not particularly limited as long as the diaphragm 111 can be appropriately formed. For example, the pressure from the pump 16 is preferably about 20 to 40 kPa. The compressed air sent by the pump 16 reaches the space between the film 110 and the substrate 120 through the second air hole 15 and the through hole of the substrate 120. Then, gas is introduced between the film 110 and the substrate 120, and a part of the softened film 110 is deformed toward the inner surface of the recess 13 by the compressed air. The diaphragm 111 is formed by bringing a part of the film 110 into close contact with the inner surface of the recess 13.

The heating of the film 110 and the pressurization by the pump 16 may be performed at the same time. By simultaneously heating the film 110 and pressurizing the film 110, a part of the film 110 can be deformed toward the inner surface of the recess 13 for the diaphragm 111 immediately after the film 110 is softened.

Finally, the film 110 on which the diaphragm 111 is formed is obtained by releasing the mold.

In the step of forming the diaphragm (second step), the first mold 11 is heated to a temperature equal to or higher than the glass transition temperature of the film 110 to form the diaphragm 111, and the film 110 and the substrate 120 are thermocompression bonded. You may. Further, in the step of forming the diaphragm (second step), the diaphragm 111 is formed by heating the first mold 11 to a temperature equal to or higher than the glass transition temperature of the film 110 and lower than the glass transition temperature of the substrate 120. At the same time, the film 110 and the substrate 120 may be thermocompression bonded. When the materials of the film 110 and the substrate 120 are cycloolefin polymers, the heating temperature is 110 to 150 ° C. When the materials of the film 110 and the substrate 120 are cyclic olefin copolymers, the heating temperature is 110 to 170 ° C. As a result, when manufacturing the fluid handling device 100, the step of joining the film 110 and the substrate 120 can be omitted, and the misalignment of the film 110 and the substrate 120 can be prevented. When the elastic member is sandwiched between the substrate 120 and the second mold 12, the heating temperature is set in consideration of the heat being absorbed by the elastic member.

Further, by using the first mold 21 having the recess 13 for the diaphragm 211 having a circular shape in a plan view, the diaphragm 211 having a circular shape in a plan view can be formed.

(effect)
As described above, in the method for manufacturing the fluid handling devices 100 and 200 according to the first embodiment, the recess 13 for the diaphragm 111 that is complementary to the shapes of the diaphragms 111 and 211 may be formed on only one of the molds 10. .. As a result, when modifying the shapes of the diaphragms 111 and 211, the corresponding surface (inner surface of the recess 13) of the first mold 11 may be modified, so that the shapes of the diaphragms 111 and 211 can be easily modified. Further, if the first air hole 14 is not formed in the recess 13 for the diaphragm 111, the diaphragm 111 can be appropriately formed even if the pressure is excessively applied.

[Embodiment 2]
5A to 5C and 6A and 6B are diagrams for explaining a method of manufacturing the fluid handling device according to the second embodiment of the present invention. 5A is a plan view when the film 110 and the substrate 120 are sandwiched between the molds 10, FIG. 5B is a cross-sectional view taken along the line AA shown in FIG. 5A, and FIG. 5C is shown in FIG. 5A. It is sectional drawing of the BB line shown. FIG. 6A is a cross-sectional view taken along the line CC shown in FIG. 5A in the first step, and FIG. 6B is a cross-sectional view taken along the line AA shown in FIG. 5A in the second step.

In the method for molding the diaphragm 111 according to the second embodiment, the mold 20 used is different from the mold 10 in the first embodiment. Therefore, after explaining the mold 20 used in the present embodiment, the molding method of the diaphragm 111 according to the present embodiment will be described. In the description of the mold 20 shown below, a portion different from the mold 10 in the first embodiment will be mainly described.

(Mold configuration)
As shown in FIGS. 5A to 5C and 6A and 6B, the mold 20 uses the first mold 21 and the second mold 22. The diaphragm 111 is formed by deforming a part of the film 110 with the substrate 120 and the film 110 arranged between the first mold 21 and the second mold 22.

The first mold 21 has a recess 13 for the diaphragm 111. Further, in the present embodiment, the shape of the first mold 21 is a substantially rectangular parallelepiped shape.

The recess 13 is formed on the surface on which the film 110 is arranged. The recess 13 has a shape complementary to the diaphragm 111 formed on the film 110. The plan view shape of the recess 13 may be a substantially arc shape or a circular shape. Further, the cross-sectional shape of the recess 13 in the width direction is a substantially arc shape. One opening of the first air hole 24 is formed on the inner surface of the recess 13. The other opening of the first air hole 24 is formed on the side surface of the first mold 21. A suction pump 26 for sucking air from the first air hole 24 is connected to the other opening of the first air hole 24.

The second mold 22 is arranged so as to face the first mold 21. In the present embodiment, the shape of the second mold 22 is a substantially rectangular parallelepiped shape. One opening of the second air hole 25 may be formed on the surface of the second mold 22 facing the first mold 21. The second air hole 25 is opened at a position corresponding to the through hole formed in the substrate 120, for example. The other opening of the second air hole 25 is formed, for example, on the side surface of the second mold 22.

(Manufacturing method of fluid handling device)
The molding method of the manufacturing method of the fluid handling devices 100 and 200 according to the present embodiment differs from the manufacturing method of the fluid handling devices 100 and 200 according to the first embodiment only in the second step. Therefore, in the present embodiment, the second step will be mainly described.

The method for manufacturing the fluid handling devices 100 and 200 according to the present embodiment is a step of laminating the first mold 11, the film 110, the substrate 120, and the second mold 12 in this order (first step). A step (second step) of forming the diaphragm 111 by bringing a part of the film 110 into contact with the inner surface of the recess 13 for the diaphragm 111 by making the space between the substrate 120 and the film 110 negative pressure is included.

As shown in FIGS. 5A to 5C and 6A, in the first step, the first mold 11, the film 110, the substrate 120, and the second mold 12 are laminated in this order.

As shown in FIG. 6B, in the second step, a part of the film 110 is brought into contact with the inner surface of the recess 13 to form the diaphragm 111. First, in the second step, the film 110 and the substrate 120 are heated in a state where the first mold 21, the film 110, the substrate 120, and the second mold 22 are laminated. The heating temperature is not particularly limited as long as the film 110 is softened. The heating temperature is the same as in the first embodiment. Next, the suction pump 26 sucks the gas between the recess 13 and the film 110. The pressure by the suction pump 26 is not particularly limited as long as the diaphragm 111 can be appropriately molded. For example, the pressure of the suction pump 26 is preferably about -20 to -40 kPa. By sucking the gas with the suction pump 26, the space between the film 110 and the substrate 120 is made negative pressure, and a part of the softened film 110 is deformed toward the inner surface of the recess 13 for the diaphragm 111. The diaphragm 111 is formed by bringing a part of the film 110 into close contact with the inner surface of the recess 13 for the diaphragm 111.

Finally, the film 110 on which the diaphragm 111 is formed is obtained by releasing the mold.

Further, by using the first mold 21 having the concave portion 13 having a circular shape in a plan view, the diaphragm 211 having a circular shape in a plan view can be formed.

Also in the present embodiment, in the second step, the diaphragm 111 is formed by heating the first mold 11 to a temperature equal to or higher than the glass transition temperature of the film 110 and lower than the glass transition temperature of the substrate 120. At the same time, the film 110 and the substrate 120 may be thermocompression bonded.

Since the configurations of the fluid handling devices 100 and 200 using the diaphragms 111 and 211 are the same as those of the fluid handling devices 100 and 200 in the first embodiment, the description thereof will be omitted.

(effect)
In the method for manufacturing the fluid handling devices 100 and 200 according to the second embodiment, since it is only necessary to form a shape complementary to the shapes of the diaphragms 111 and 211 on only one of the molds 20, the shapes of the diaphragms 111 and 211 are modified. At that time, the corresponding surface of the first mold 21 may be modified. Therefore, the shapes of the diaphragms 111 and 211 can be easily modified.

The fluid handling device manufactured by the present invention is useful in various applications such as clinical tests, food tests, and environmental tests.

10, 20 Molds 11, 21 First molds 12, 22 Second molds 13 Recesses 14, 24 First air holes 15, 25 Second air holes 16 Pump 26 Suction pump 100, 200 Fluid handling device 110, 210 Film 111, 211 Diaphragm 120, 220 Substrate 121 First through hole 122 First flow path groove 123 Second flow path groove 124 Second through hole 131 Introductory port 132 First flow path 133 Diaphragm pump 134 Second flow path 135 Outlet port 136 Pump flow path 233 Diaphragm valve 244 Partition

Claims (4)

A method for manufacturing a fluid handling device having a substrate and a film containing a diaphragm bonded to one surface of the substrate.
A step of laminating a first mold having a recess for the diaphragm, the film, the substrate, and the second mold in this order.
The recess is provided by introducing a gas into the space between the film and the substrate at a position facing the recess across the film, or by sucking gas from the space between the recess and the film. Including a step of forming the diaphragm by bringing a part of the film into contact with the inner surface of the film.
Manufacturing method of fluid handling equipment. The method for manufacturing a fluid handling device according to claim 1, wherein in the step of molding the diaphragm, gas is introduced into the space between the film and the substrate at a position facing the recess with the film sandwiched therein. The method for manufacturing a fluid handling device according to claim 1, wherein in the step of forming the diaphragm, gas is sucked from the space between the recess and the film. In the step of molding the diaphragm, the first mold is heated to a temperature equal to or higher than the glass transition temperature of the film to form the diaphragm, and the film and the substrate are bonded by thermocompression bonding. Item 8. The method for manufacturing a fluid handling apparatus according to any one of Items 1 to 3.

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