JP2020129572A5 - - Google Patents

Download PDF

Info

Publication number
JP2020129572A5
JP2020129572A5 JP2019020273A JP2019020273A JP2020129572A5 JP 2020129572 A5 JP2020129572 A5 JP 2020129572A5 JP 2019020273 A JP2019020273 A JP 2019020273A JP 2019020273 A JP2019020273 A JP 2019020273A JP 2020129572 A5 JP2020129572 A5 JP 2020129572A5
Authority
JP
Japan
Prior art keywords
less
piezoelectric material
material according
range
lattice constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019020273A
Other languages
Japanese (ja)
Other versions
JP2020129572A (en
JP7097074B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2019020273A priority Critical patent/JP7097074B2/en
Priority claimed from JP2019020273A external-priority patent/JP7097074B2/en
Priority to PCT/JP2019/046057 priority patent/WO2020161997A1/en
Publication of JP2020129572A publication Critical patent/JP2020129572A/en
Publication of JP2020129572A5 publication Critical patent/JP2020129572A5/ja
Application granted granted Critical
Publication of JP7097074B2 publication Critical patent/JP7097074B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (5)

化学式Ａｌ１-ＸＺｒＸＮで表され、Ｘは０．３１５以上で０．４以下の範囲にあることを特徴とする圧電体。 A piezoelectric material represented by the chemical formula Al 1-X Zr X N, wherein X is 0.315 or more and 0.4 or less. Ｘが０．３２８以上で０．３９１以下の範囲にあることを特徴とする請求項１に記載の圧電体。 The piezoelectric body according to claim 1, wherein X is in the range of 0.328 or more and 0.391 or less. 格子定数比ｃ／ａが１．２８以上で１．４３以下の範囲にあることを特徴とする請求項１に記載の圧電体。 The piezoelectric material according to claim 1, wherein the lattice constant ratio c / a is 1.28 or more and 1.43 or less. 格子定数比ｃ／ａが１．２８以上で１．３９以下の範囲にあることを特徴とする請求項２に記載の圧電体。 The piezoelectric material according to claim 2, wherein the lattice constant ratio c / a is in the range of 1.28 or more and 1.39 or less. 請求項１〜４の何れか１項に記載の圧電体を用いたＭＥＭＳデバイス。
A MEMS device using the piezoelectric material according to any one of claims 1 to 4.
JP2019020273A 2019-02-07 2019-02-07 Nitride piezoelectric material and MEMS device using it Active JP7097074B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2019020273A JP7097074B2 (en) 2019-02-07 2019-02-07 Nitride piezoelectric material and MEMS device using it
PCT/JP2019/046057 WO2020161997A1 (en) 2019-02-07 2019-11-26 Nitride piezoelectric substance and mems device using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019020273A JP7097074B2 (en) 2019-02-07 2019-02-07 Nitride piezoelectric material and MEMS device using it

Publications (3)

Publication Number Publication Date
JP2020129572A JP2020129572A (en) 2020-08-27
JP2020129572A5 true JP2020129572A5 (en) 2021-09-30
JP7097074B2 JP7097074B2 (en) 2022-07-07

Family

ID=71947553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019020273A Active JP7097074B2 (en) 2019-02-07 2019-02-07 Nitride piezoelectric material and MEMS device using it

Country Status (2)

Country Link
JP (1) JP7097074B2 (en)
WO (1) WO2020161997A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5815329B2 (en) 2011-08-22 2015-11-17 太陽誘電株式会社 Elastic wave device
JP5904591B2 (en) 2012-03-15 2016-04-13 太陽誘電株式会社 Elastic wave device
JP6395008B2 (en) 2014-12-26 2018-09-26 株式会社村田製作所 Manufacturing method of resonator
KR101843244B1 (en) 2016-02-17 2018-05-14 삼성전기주식회사 Acoustic resonator and manufacturing method thereof
KR102052795B1 (en) 2017-03-23 2019-12-09 삼성전기주식회사 Acoustic resonator

Similar Documents

Publication Publication Date Title
JP2016033937A5 (en) Piezoelectric device
JP2021502979A5 (en)
JP2018500990A5 (en)
JP2019508789A5 (en)
JP2019058014A5 (en)
JP2009295786A5 (en)
JP2014195262A5 (en)
JP2010260863A5 (en)
JP2016524664A5 (en)
JP2013543253A5 (en)
JP2020532288A5 (en)
JP2020528637A5 (en)
JP2007511626A5 (en)
JP2013093561A5 (en) Oxide semiconductor film
JP2015134755A5 (en)
JP2020129572A5 (en)
JP2018099679A5 (en)
JP2015134710A5 (en)
JP2016109212A5 (en)
MX2015011857A (en) Pigments of simultaneously substituted pyrochlore and related structures.
JP2020054657A5 (en)
JP2018086647A5 (en)
JP2019515274A5 (en)
JP2017147380A5 (en)
JPWO2021149780A5 (en)