JP2020100136A - Liquid jet head, liquid jet device and liquid jet system - Google Patents

Abstract

To provide a liquid jet head that is enlarged with a capacity of a pressure chamber and suppressed with increase in size of a channel substrate, and to provide a liquid jet device and a liquid jet system.SOLUTION: A liquid jet head includes: a channel substrate formed with a channel; and an energy generating element for generating pressure variation in the liquid of the channel. The channel includes: a first common liquid chamber 101; a second common liquid chamber 102; and an individual channel 200 communicated to the first common liquid chamber 101 and the second common liquid chamber 102. The individual channel 200 includes: a nozzle 21 communicated to the outside; and a pressure chamber 12 in which pressure variation is generated by the energy generating element. Of the multiple individual channels, three individual channels 200 adjacent to each other in a direction in which the nozzles 21 are arranged in parallel are respectively communicated to the first common liquid chamber 101 and the second common liquid chamber 102, and two individual channels 200 adjacent to each other in a direction in which the nozzles 21 are arranged in parallel are different in arrangement order of the pressure chamber 12 and the nozzle 21 in a direction in which liquid flows toward the second common liquid chamber 102 from the first common liquid chamber 101.SELECTED DRAWING: Figure 4

Description

The present invention relates to a liquid ejecting head that ejects liquid from a nozzle, a liquid ejecting apparatus, and a liquid ejecting system, and particularly to an inkjet recording head that ejects ink as a liquid, an inkjet recording apparatus, and an inkjet recording system.

2. Description of the Related Art As a liquid ejecting head that ejects liquid, an inkjet recording head that ejects ink as a liquid onto a print medium to perform printing is known.

An ink jet recording head has an individual flow path having a pressure chamber communicating with a nozzle, a common liquid chamber commonly communicating with a plurality of individual flow paths, and energy of a piezoelectric actuator or the like that causes a pressure change in ink in the pressure chamber. The energy generating element causes a pressure change in the ink in the pressure chamber, thereby ejecting an ink droplet from the nozzle.

In such an ink jet recording head, when the bubbles stay in the pressure chamber, the bubbles absorb the pressure change by the energy generating element, and the ink droplets cannot be normally ejected from the nozzles.

For this reason, a first common liquid chamber and a second common liquid chamber are provided as common liquid chambers common to the individual flow passages, and ink is flowed from the first common liquid chamber to the second common liquid chamber through the individual flow passages to the second common liquid chamber. An ink jet type recording head having a structure in which it circulates has been proposed (for example, see Patent Document 1).

JP, 2013-184372, A

In such an ink jet recording head, there is a demand for increasing the capacity of the pressure chamber, increasing the volume excluded by the energy generating element of the pressure chamber, and improving the ejection characteristics of the ink droplets ejected from the nozzle, particularly the ink weight. is there. However, if the width of the pressure chambers in the arranging direction is increased in order to increase the capacity of the pressure chambers and increase the excluded volume, there is a problem that the flow path substrate becomes large. Particularly when the ink is circulated from the first common liquid chamber to the second common liquid chamber through the individual flow passage as in Patent Document 1, there is a restriction on the arrangement of the pressure chambers provided in the individual flow passage, so When the capacity is increased, the size of the flow path substrate is increased.

Such a problem exists not only in the ink jet recording head but also in a liquid ejecting head that ejects a liquid other than ink.

In view of such circumstances, it is an object of the present invention to provide a liquid ejecting head, a liquid ejecting apparatus, and a liquid ejecting system in which the pressure chamber has a large capacity and the flow path substrate is prevented from increasing in size.

An aspect of the present invention which solves the above-mentioned problems includes a flow channel substrate having a flow channel formed therein, and an energy generating element for causing a pressure change in the liquid in the flow channel, wherein the flow channel is a first An individual flow in which a common liquid chamber, a second common liquid chamber, and the first common liquid chamber and the second common liquid chamber communicate with each other and the liquid flows from the first common liquid chamber toward the second common liquid chamber. And a pressure chamber in which a pressure change is generated by the energy generating element, the individual flow path including a channel, and the individual flow path including a nozzle The three individual flow channels adjacent to each other communicate with the first common liquid chamber and the second common liquid chamber, respectively, and the two individual flow channels adjacent to each other in the juxtaposed direction are the first common liquid. In the liquid ejecting head, the pressure chambers and the nozzles are arranged differently in the direction in which the liquid flows from the chamber to the second common liquid chamber.

Another aspect of the present invention includes a flow channel substrate having a flow channel formed therein, and an energy generating element for causing a pressure change in the liquid in the flow channel, wherein the flow channel has a first common structure. A liquid chamber, a second common liquid chamber, and an individual flow path that communicates with the first common liquid chamber and the second common liquid chamber and through which liquid flows from the first common liquid chamber toward the second common liquid chamber. The individual flow path includes a nozzle communicating with the outside, and a pressure chamber in which a pressure change is generated by the energy generating element, and the flow path substrate includes a first flow path substrate and a second flow path. A second flow path, wherein a flow path is formed between the first flow path substrate and the second flow path substrate at a first resolution in the juxtaposed direction. In a liquid jet head, a flow path is formed between a substrate and the third flow path substrate in the juxtaposed direction with a second resolution higher than the first resolution. ..

Further, another aspect of the present invention is a liquid-jet apparatus characterized by including the liquid-jet head described in the above aspect.

Another aspect of the present invention is to supply the liquid to the liquid jet head of the above aspect and to one of the first and second common liquid chambers, and to supply the liquid from the other common liquid chamber. And a circulation system for generating a circulation flow in the individual flow path.

FIG. 3 is a plan view of the recording head according to the first embodiment of the invention. FIG. 3 is a sectional view of the recording head according to the first embodiment of the invention. FIG. 3 is a sectional view of the recording head according to the first embodiment of the invention. FIG. 3 is a diagram schematically showing a flow channel according to the first exemplary embodiment of the present invention. FIG. 6 is a plan view showing a modified example of the recording head according to the first embodiment of the invention. FIG. 6 is a cross-sectional view showing a modified example of the recording head according to the first embodiment of the invention. FIG. 6 is a cross-sectional view showing a modified example of the recording head according to the first embodiment of the invention. FIG. 6 is a plan view showing a modified example of the recording head according to the first embodiment of the invention. FIG. 6 is a cross-sectional view showing a modified example of the recording head according to the first embodiment of the invention. FIG. 6 is a cross-sectional view showing a modified example of the recording head according to the first embodiment of the invention. FIG. 6 is a cross-sectional view showing a modified example of the recording head according to the first embodiment of the invention. FIG. 6 is a cross-sectional view showing a modified example of the recording head according to the first embodiment of the invention. 6 is a cross-sectional view showing a recording head according to a second embodiment of the invention. FIG. 6 is a cross-sectional view showing a recording head according to a second embodiment of the invention. FIG. FIG. 9 is a cross-sectional view showing a modified example of the recording head according to the second embodiment of the invention. FIG. 9 is a cross-sectional view showing a modified example of the recording head according to the second embodiment of the invention. FIG. 9 is a cross-sectional view showing a modified example of the recording head according to the second embodiment of the invention. FIG. 9 is a cross-sectional view showing a modified example of the recording head according to the second embodiment of the invention. FIG. 9 is a cross-sectional view showing a recording head according to a third embodiment of the invention. FIG. 9 is a cross-sectional view showing a recording head according to a third embodiment of the invention. FIG. 11 is a cross-sectional view showing a modified example of the recording head according to the third embodiment of the invention. FIG. 11 is a cross-sectional view showing a modified example of the recording head according to the third embodiment of the invention. FIG. 11 is a cross-sectional view showing a modified example of the recording head according to the third embodiment of the invention. FIG. 11 is a cross-sectional view showing a modified example of the recording head according to the third embodiment of the invention. FIG. 9 is a cross-sectional view showing a recording head according to a fourth embodiment of the invention. FIG. 9 is a cross-sectional view showing a recording head according to a fourth embodiment of the invention. It is a perspective view showing the flow path which concerns on Embodiment 4 of this invention. FIG. 9 is a sectional view of a recording head according to a fourth embodiment of the invention. FIG. 3 is a cross-sectional view showing a recording head according to an embodiment of the present invention. FIG. 3 is a cross-sectional view showing a recording head according to an embodiment of the present invention. FIG. 3 is a cross-sectional view showing a recording head according to an embodiment of the present invention. FIG. 3 is a cross-sectional view showing a recording head according to an embodiment of the present invention. FIG. 3 is a cross-sectional view showing a recording head according to an embodiment of the present invention. FIG. 3 is a cross-sectional view showing a recording head according to an embodiment of the present invention. It is the figure which represented typically the flow path which concerns on one Embodiment of this invention. It is a diagram showing a schematic configuration of a recording apparatus according to an embodiment of the present invention. It is a block diagram explaining the recording system which concerns on one Embodiment of this invention. It is a block diagram showing an electric configuration of a recording system according to an embodiment of the present invention. 6 is a drive waveform showing a drive signal according to an embodiment of the present invention.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
An ink jet recording head, which is an example of the liquid ejecting head of the present embodiment, will be described with reference to FIGS. 1. FIG. 1 is a plan view of the ink jet recording head, which is an example of the liquid ejecting head according to the first embodiment of the present invention, viewed from the nozzle surface side. FIG. 2 is a sectional view taken along the line AA′ of FIG. FIG. 3 is a sectional view taken along the line BB′ of FIG. FIG. 4 is a diagram schematically showing the flow path.

As shown in the figure, an ink jet recording head 1 (hereinafter, also simply referred to as a recording head 1), which is an example of the liquid ejecting head of the present embodiment, has a flow path substrate 10 as a flow path substrate, a communication plate 15, and a nozzle plate 20. , A protective substrate 30, a case member 40, a compliance substrate 49, and the like.

The flow path forming substrate 10 is made of a silicon single crystal substrate, and a vibrating plate 50 is formed on one surface thereof. The diaphragm 50 may be a single layer or a laminated layer selected from a silicon dioxide layer and a zirconium oxide layer.

The flow path forming substrate 10 is provided with a plurality of pressure chambers 12 that form the individual flow paths 200 and are partitioned by a plurality of partition walls. The plurality of pressure chambers 12 are juxtaposed at a predetermined pitch along the direction in which the plurality of nozzles 21 that eject ink are juxtaposed. Hereinafter, this direction is referred to as the juxtaposed direction of the nozzles 21, the juxtaposed direction of the pressure chambers 12, or the first direction X. Further, the flow path forming substrate 10 is provided with a plurality of rows of pressure chambers 12 arranged in parallel in the first direction X, in the present embodiment, two rows. The row-arranging direction in which a plurality of rows of the pressure chambers 12 are arranged is hereinafter referred to as a second direction Y. In the present embodiment, the portion between the pressure chambers 12 arranged in parallel in the first direction X of the flow path forming substrate 10 is referred to as a partition. The partition wall is formed along the second direction Y. That is, the partition wall refers to a portion of the flow path forming substrate 10 that overlaps the pressure chamber 12 in the second direction Y. In this embodiment, the flow channel forming substrate 10 corresponds to the first flow channel substrate described in the claims.

Further, in the present embodiment, in the two rows of pressure chambers 12, one of the pressure chambers 12 is referred to as a first pressure chamber 12A, and the other row of the pressure chambers 12 is referred to as a second pressure chamber 12B. The first pressure chamber 12A and the second pressure chamber 12B are arranged at positions where they do not overlap with each other in a plan view from the first direction X. Moreover, the first pressure chamber 12A and the second pressure chamber 12B are arranged in a so-called zigzag arrangement, which is displaced in the first direction X. In the present embodiment, a row in which the first pressure chambers 12A are arranged in parallel in the first direction X and a row in which the second pressure chambers 12B are arranged in parallel in the first direction X are in the first direction X. They are arranged at positions displaced by a half pitch from each other. In addition, a part of the first pressure chamber 12A and a part of the second pressure chamber 12B may be arranged at a position where they overlap each other in a plan view from the first direction X.

Further, in the present embodiment, a direction orthogonal to both the first direction X and the second direction Y is referred to as a third direction Z, and more specifically, a case member 40 side with respect to a nozzle plate 20 described later is a Z1 side and a case is a case. The nozzle plate 20 side with respect to the member 40 is referred to as the Z2 side. Although the first direction X, the second direction Y, and the third direction Z are orthogonal to each other, the present invention is not limited to this and may be directions intersecting at an angle other than orthogonal. ..

In the present embodiment, only the pressure chamber 12 is provided in the flow channel forming substrate 10, but the pressure chamber 12 is crossed over the flow channel so as to impart flow channel resistance to the ink supplied to the pressure chamber 12. A flow path resistance applying portion having a narrowed cross-sectional area may be provided.

The vibrating plate 50 is formed on the Z1 side, which is one surface side of the third direction Z of the flow path forming substrate 10, as described above, and the first electrode 60 and the piezoelectric element are formed on the vibrating plate 50. The body layer 70 and the second electrode 80 are stacked by film formation and a lithographic method to form the piezoelectric actuator 300. In the present embodiment, the piezoelectric actuator 300 is an energy generating element that causes a pressure change in the ink inside the pressure chamber 12. Here, the piezoelectric actuator 300 is also referred to as a piezoelectric element, and refers to a portion including the first electrode 60, the piezoelectric layer 70, and the second electrode 80. In general, one of the electrodes of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure chamber 12. In the present embodiment, the first electrode 60 is the common electrode of the piezoelectric actuator 300 and the second electrode 80 is the individual electrode of the piezoelectric actuator 300. However, there is no problem even if this is reversed due to the drive circuit and wiring. In the example described above, the diaphragm 50 and the first electrode 60 act as a diaphragm, but the invention is not limited to this, and for example, the diaphragm 50 is not provided and only the first electrode 60 is provided. You may make it act as a diaphragm. Alternatively, the piezoelectric actuator 300 itself may substantially double as the diaphragm.

A lead electrode 90 is connected to the second electrode 80 of each piezoelectric actuator 300, and a voltage is selectively applied to each piezoelectric actuator 300 via the lead electrode 90. ..

The protective substrate 30 is bonded to the surface of the flow path forming substrate 10 on the piezoelectric actuator 300 side.

In a region of the protective substrate 30 facing the piezoelectric actuator 300, a piezoelectric actuator holding portion 31 having a space that does not hinder the movement of the piezoelectric actuator 300 is provided. The piezoelectric actuator holding portion 31 may have a space that does not hinder the movement of the piezoelectric actuator 300, and the space may be sealed or may not be sealed. Further, in the present embodiment, the piezoelectric actuator holding portions 31 are independently provided for each row of the plurality of piezoelectric actuators 300 arranged in parallel in the first direction X. That is, the piezoelectric actuator holding portion 31 is formed in a size that integrally covers a row of the plurality of piezoelectric actuators 300 arranged in parallel in the first direction X. Of course, the piezoelectric actuator holding part 31 is not particularly limited to this, and may cover the piezoelectric actuators 300 individually, and is composed of two or more piezoelectric actuators 300 juxtaposed in the first direction X. It may be covered for each group.

As the protective substrate 30, it is preferable to use a material having substantially the same coefficient of thermal expansion as that of the flow path forming substrate 10, such as glass or a ceramic material. In the present embodiment, the same material as the flow path forming substrate 10 is used. It was formed by using the silicon single crystal substrate.

Further, the protective substrate 30 is provided with a through hole 32 penetrating the protective substrate 30 in the third direction Z. Then, the vicinity of the end portion of the lead electrode 90 pulled out from each piezoelectric actuator 300 is extended to be exposed in the through hole 32, and is electrically connected to the flexible cable 120 in the through hole 32. The flexible cable 120 is a flexible wiring board, and in the present embodiment, a drive circuit 121 which is a semiconductor element is mounted. The lead electrode 90 and the drive circuit 121 may be electrically connected without the flexible cable 120. Further, a flow path may be provided in the protective substrate 30.

A case member 40 is fixed to the Z1 side of the protective substrate 30. The case member 40 is provided such that the side of the protective substrate 30 opposite to the flow path forming substrate 10 is joined and also the communicating plate 15 described later is joined.

Such a case member 40 is provided with a first liquid chamber portion 41 forming a part of the first common liquid chamber 101 and a second liquid chamber portion 42 forming a part of the second common liquid chamber 102. Has been. The first liquid chamber portion 41 and the second liquid chamber portion 42 are provided on both sides in the second direction Y with the two rows of pressure chambers 12 sandwiched therebetween.

Each of the first liquid chamber portion 41 and the second liquid chamber portion 42 has a concave shape that opens to the surface on the Z2 side of the case member 40, and is provided in the plurality of pressure chambers 12 arranged in parallel in the first direction X. It is continuously provided.

Further, an inlet 43 communicating with the first liquid chamber 41 and an outlet 44 communicating with the second liquid 42 are provided on the Z1 side surface of the case member 40.

Further, the case member 40 is provided with a connection port 45 communicating with the through hole 32 of the protective substrate 30 and into which the flexible cable 120 is inserted.

On the other hand, the communication plate 15, the nozzle plate 20, and the compliance substrate 49 are provided on the Z2 side, which is the surface opposite to the protective substrate 30 of the flow path forming substrate 10.

In the present embodiment, the communication plate 15 is configured by stacking the first communication plate 151 and the second communication plate 152 in the third direction Z. The first communication plate 151 is provided on the flow path forming substrate 10 side, that is, on the Z1 side in the third direction Z, and the second communication plate 152 is on the nozzle plate 20 side, that is, in the third direction Z. It is provided on the Z2 side.

The first communication plate 151 and the second communication plate 152 that form the communication plate 15 can be manufactured from a metal such as stainless steel, glass, a ceramic material, or the like. It is preferable that the communication plate 15 be made of a material having a thermal expansion coefficient substantially the same as that of the flow path forming substrate 10. In the present embodiment, the communication plate 15 is made of a silicon single crystal substrate made of the same material as the flow path forming substrate 10. ..

The communication plate 15 is provided with a first communication portion 16 and a second communication portion 17 that form a part of each of the first common liquid chamber 101 and the second common liquid chamber 102, which will be described in detail later. Further, as will be described later in detail, the communication plate 15 has a flow path that connects the first common liquid chamber 101 and the pressure chamber 12, a flow path that connects the pressure chamber 12 and the nozzle 21, a nozzle 21 and a And a flow path communicating with the two common liquid chambers 102. These flow paths provided in the communication plate 15 form a part of the individual flow path 200. In the present embodiment, the communication plate 15 corresponds to the second flow path substrate described in the claims.

The nozzle plate 20 is formed with a plurality of nozzles 21 that communicate with the outside and also communicate with the pressure chamber 12. In the present embodiment, as shown in FIG. 1, a first nozzle row 22A in which a plurality of nozzles 21 are arranged in a first direction X and a second nozzle in which a plurality of nozzles 21 are arranged in a first direction X are arranged. The row 22B and the row 22B are arranged side by side in the second direction Y, and the first nozzle row 22A and the second nozzle row 22B are shifted in the first direction X so as not to be in the same position in the second direction Y. Staggered arrangement. In the present embodiment, the nozzles 21 of the first nozzle row 22A are called the first nozzles 21A, and the nozzles 21 of the second nozzle row 22B are called the second nozzles 21B. The first nozzle 21A of the first nozzle row 22A communicates with the first pressure chamber 12A. The second nozzle 21B of the second nozzle row 22B communicates with the second pressure chamber 12B. Then, the same type of ink is ejected from the first nozzle 21A and the second nozzle 21B. In this embodiment, the nozzle plate 20 corresponds to the third flow path substrate described in the claims. The first nozzle row 22A and the second nozzle row 22B may be aligned on a straight line in the first direction X.

Further, the communication plate 15 has a first communication portion 16 that forms a part of the first common liquid chamber 101 and a second communication portion 17 that forms a part of the second common liquid chamber 102.

The first communicating portion 16 is provided at a position overlapping the first liquid chamber portion 41 of the case member 40 in the third direction Z, and is provided so as to be open on both surfaces of the communicating plate 15 on the Z1 side and the Z2 side. ing. The first communication portion 16 constitutes the first common liquid chamber 101 by communicating with the first liquid chamber portion 41 on the Z1 side. That is, the first common liquid chamber 101 is configured by the first liquid chamber portion 41 of the case member 40 and the first communication portion 16 of the communication plate 15. Further, the first communication portion 16 is extended in the second direction Y to a position where it overlaps the pressure chamber 12 in the third direction Z on the Z2 side. The first common liquid chamber 101 may be configured by the first liquid chamber portion 41 of the case member 40 without providing the first communication portion 16 on the communication plate 15.

The second communicating portion 17 is provided at a position overlapping the second liquid chamber portion 42 of the case member 40 in the third direction Z, and is provided so as to open on both surfaces of the communicating plate 15 on the Z1 side and the Z2 side. ing. The second communication portion 17 constitutes the second common liquid chamber 102 by communicating with the second liquid chamber portion 42 on the Z1 side. That is, the second common liquid chamber 102 is composed of the second liquid chamber portion 42 of the case member 40 and the second communication portion 17 of the communication plate 15. Further, the second communication portion 17 is extended in the second direction Y to a position overlapping the pressure chamber 12 in the third direction Z on the Z2 side. The second common liquid chamber 102 may be configured by the second liquid chamber portion 42 of the case member 40 without providing the second communication portion 17 on the communication plate 15.

A compliance substrate 49 having a compliance portion 494 is provided on the surface of the communication plate 15 on the Z2 side where the first communication portion 16 and the second communication portion 17 are open. The compliance substrate 49 seals the openings of the first common liquid chamber 101 and the second common liquid chamber 102 on the nozzle surface 20a side.

In this embodiment, such a compliance substrate 49 includes a sealing film 491 made of a flexible thin film and a fixed substrate 492 made of a hard material such as metal. Since the area of the fixed substrate 492 facing the first common liquid chamber 101 and the second common liquid chamber 102 is the opening 493 that is completely removed in the thickness direction, the first common liquid chamber 101 and the second common liquid chamber 101 A part of the wall surface of the common liquid chamber 102 serves as a compliance portion 494 which is a flexible portion sealed only with the sealing film 491 having flexibility. In the present embodiment, the compliance part 494 provided in the first common liquid chamber 101 is referred to as a first compliance part 494A, and the compliance part 494 provided in the second common liquid chamber 102 is referred to as a second compliance part 494B. In this way, by providing the compliance portion 494 on a part of the wall surface of each of the first common liquid chamber 101 and the second common liquid chamber 102, the ink in the first common liquid chamber 101 and the second common liquid chamber 102 The pressure fluctuation can be absorbed by the deformation of the compliance portion 494.

By the way, when only the first compliance portion 494A is provided without providing the second compliance portion 494B, the pressure fluctuation when ink droplets are ejected in the individual flow path provided with the pressure chamber 12 and the nozzle 21 is The ejection characteristics of the ink droplets that are transmitted through the common liquid chamber 102 to the other individual channels and ejected from the other individual channels are not stable, and the ejection characteristics of the ink droplets ejected from the plurality of nozzles 21 vary. It may occur. Similarly, when only the second compliance portion 494B is provided without providing the first compliance portion 494A, the pressure fluctuation of the individual flow paths is transmitted through the first common liquid chamber 101, and the ejection characteristics of the ink droplets vary. It may occur. In the present embodiment, by providing the compliance part 494 in both the first common liquid chamber 101 and the second common liquid chamber 102, the pressure fluctuation of the individual flow path 200 causes the first common liquid chamber 101 and the second common liquid chamber 102 to change. It is difficult to reach the other individual flow paths 200 via the, and it is possible to suppress variations in ink droplet ejection characteristics.

Further, when only the first compliance portion 494A is provided without providing the second compliance portion 494B, when ink droplets are ejected from a small number of nozzles 21, the first compliance portion 494A is deformed to the pressure chamber 12. Although the ink is sufficiently supplied, the ink is not sufficiently supplied to the pressure chamber 12 only by the deformation of the first compliance portion 494A when the ink droplets are simultaneously ejected from the plurality of nozzles 21, and the ink is ejected at the same time. Depending on the number of nozzles 21, there is a possibility that the ejection characteristics of the ink droplets, especially the weight of the ink droplets, may vary. In the present embodiment, by providing both the first compliance portion 494A and the second compliance portion 494B, it is possible to prevent the shortage of ink supply to the pressure chamber 12 due to the number of nozzles 21 that eject ink droplets at the same time. As a result, it is possible to suppress variations in the ejection characteristics of the ink droplets.

Further, in the case where the compliance portion 494 is provided in both the first common liquid chamber 101 and the second common liquid chamber 102 in this way, in the present embodiment, the nozzle 21 connects the first common liquid chamber 101 and the second common liquid chamber 102. By providing the nozzle plate 20 and the compliance portion 494 so as to open on the Z2 side that opens, the individual flow path 200 having the pressure chamber 12 and the nozzle 21 in the third direction Z, which is the direction perpendicular to the nozzle surface 20a, is provided. On the other hand, they are arranged on the same side, Z2 side. By arranging the compliance part 494 on the same side as the nozzle 21 with respect to the individual flow path 200 in this way, the compliance part 494 can be provided in a region where the nozzle 21 is not provided, and the compliance part 494 can be relatively provided. It can be provided in a large area. Further, by disposing the compliance part 494 and the nozzle 21 on the same side with respect to the individual flow passage 200, the compliance part 494 is arranged at a position close to the individual flow passage 200, and the pressure of the ink in the individual flow passage 200 is increased. The fluctuation can be effectively absorbed by the compliance unit 494.

The position of the compliance portion 494 is not particularly limited to this, and the compliance portion 494 may be arranged on the opposite side of the individual flow path 200 from the nozzle 21 in the third direction Z. That is, the compliance portion 494 can be provided on the surface of the case member 40 on the Z1 side, the side surface of the case member 40 and the communication plate 15, or the like. However, as described above, when the compliance part 494 is arranged on the same Z2 side as the nozzle 21, the compliance part 494 is arranged at a position closer to the individual flow passage 200, and the pressure fluctuation of the ink in the individual flow passage 200 is suppressed. The compliance portion 494 can effectively absorb it, and the compliance portion 494 can be formed in a relatively large area.

Further, the two compliance parts 494 of this embodiment are provided on one compliance substrate 49, as shown in FIG. Of course, the compliance substrate 49 is not limited to this, and an independent compliance substrate 49 may be provided for each compliance unit 494.

In addition, the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, the compliance substrate 49, and the like that form the flow path substrate communicate with the first common liquid chamber 101 and the second common liquid chamber 102 to form the first common liquid chamber 101. A plurality of individual flow paths 200 for sending the ink in the common liquid chamber 101 to the second common liquid chamber 102 are provided. Here, the individual flow path 200 of the present embodiment is provided for each nozzle 21 in communication with the first common liquid chamber 101 and the second common liquid chamber 102, and includes the nozzle 21. The three individual flow paths 200 adjacent to each other in the first direction X, which is the direction in which the nozzles 21 are arranged side by side, are provided so as to communicate with the first common liquid chamber 101 and the second common liquid chamber 102, respectively. That is, the plurality of individual flow paths 200 provided for each nozzle 21 are provided so as to communicate with each other only by the first common liquid chamber 101 and the second common liquid chamber 102, respectively. The first common liquid chamber 101 and the second common liquid chamber 102 do not communicate with each other. That is, in the present embodiment, the flow path provided with one nozzle 21 and one pressure chamber 12 is referred to as an individual flow path 200, and the individual flow paths 200 are connected to each other by the first common liquid chamber 101 and the second common liquid. It is provided so as to communicate only with the chamber 102.

Further, in the present embodiment, of the individual flow passages 200, a flow passage on the first common liquid chamber 101 side of the nozzle 21 is referred to as an upstream flow passage, and the second common liquid chamber 102 of the individual flow passages 200 is connected to the second common liquid chamber 102. The side channel is referred to as the downstream channel.

Further, in the present embodiment, the plurality of individual flow paths 200 arranged in parallel in the first direction X are the first individual flow path 200A having the first nozzle 21A and the second individual flow path having the second nozzle 21B. And 200B. Then, the first individual flow channels 200A and the second individual flow channels 200B are alternately arranged in the first direction X.

Here, the first individual flow passage 200A includes a first flow passage 201, a first pressure chamber 12A, a second flow passage 202, a first nozzle 21A, a third flow passage 203, a fourth flow passage 204 and a fifth flow passage. And 205.

The first flow path 201 communicates between the first pressure chamber 12A and the first common liquid chamber 101, and one end on the Z2 side communicates with the first communication portion 16 forming the first common liquid chamber 101, The first communication plate 151 is provided so as to penetrate in the third direction Z so that the other end on the Z1 side communicates with one end side of the pressure chamber 12 in the second direction Y.

The first pressure chamber 12A is provided in the flow path forming substrate 10 as described above, the opening on the Z1 side of the first pressure chamber 12A is sealed by the diaphragm 50, and the Z2 of the first pressure chamber 12A is formed. A part of the side opening is covered with the communication plate 15. The first pressure chamber 12A as described above is formed with the first resolution in the direction in which the flow paths are arranged, that is, in the first direction X. That is, the flow path provided between the flow path forming substrate 10 that is the first flow path substrate and the communication plate 15 that is the second flow path substrate is the pressure chamber 12. Further, since the first pressure chamber 12A and the second pressure chamber 12B are arranged at different positions in the second direction Y, the first resolution means the first pressure chamber 12A and the second pressure chamber 12B. It means each resolution. Further, the first resolution is the pitch of the flow channels in the first direction X, which is the direction in which the flow channels are arranged.

The second flow path 202 connects the first pressure chamber 12A and the first nozzle 21A, one end on the Z1 side communicates with the other end side in the second direction Y of the first pressure chamber 12A, and Z2. The communicating plate 15 is provided so as to penetrate in the third direction Z so that the other end on the side communicates with the first nozzle 21A provided on the nozzle plate 20. That is, the second flow path 202 is provided between the nozzle 21 and the first common liquid chamber 101 so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. It corresponds to the upstream communication passage described in the claims. In addition, the second flow passage 202 is provided in the first individual flow passage 200A between the first pressure chamber 12A and the first nozzle 21A so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. The second flow passage 202 corresponds to the first communication passage described in the claims.

The first nozzle 21A is provided so as to communicate with the other end of the second flow path 202 on the Z2 side and also communicate with the outside by opening to the Z2 side nozzle surface 20a of the nozzle plate 20.

The third flow path 203 extends along the second direction Y in the in-plane direction of the nozzle surface 20 a so that one end communicates with the second flow path 202 between the second communication plate 152 and the nozzle plate 20. It is set up. The third flow path 203 is formed by providing a recess in the second communication plate 152 and covering the opening of this recess with the nozzle plate 20. The third flow path 203 is not particularly limited to this, and a recess may be provided in the nozzle plate 20, and the recess may be covered with the second communication plate 152. You may make it provide a recessed part in both. The third flow path 203 constitutes a part of the flow path provided between the communication plate 15 which is the second flow path substrate and the nozzle plate 20 which is the third flow path substrate described in the claims. To do.

The fourth flow path 204 is provided such that one end on the Z2 side communicates with the third flow path 203 and also penetrates the second communication plate 152 in the third direction.

Between the first communication plate 151 and the second communication plate 152, the fifth flow path 205 has a nozzle surface such that one end communicates with the fourth flow path 204 and the other end communicates with the second common liquid chamber 102. It extends along the second direction Y in the in-plane direction of 20a. The fifth flow path 205 of the present embodiment is formed by providing a recess in the second communication plate 152 and covering the recess with the first communication plate 151. Of course, the fifth flow path 205 may be formed by providing a recess in the first communication plate 151 and covering it with the second communication plate 152. Both the first communication plate 151 and the second communication plate 152 may be formed. You may make it provide a recessed part.

As described above, the first individual flow path 200</b>A has the first flow path 201, the pressure chamber 12, and the second flow path sequentially from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber 102. It has a flow channel 202, a first nozzle 21A, a third flow channel 203, a fourth flow channel 204 and a fifth flow channel 205. That is, in the present embodiment, as shown in FIG. 4, the first individual flow path 200A is arranged from the upstream side to the downstream side with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. The pressure chamber 12 and the first nozzle 21A are arranged in this order in this order.

In such a first individual flow path 200A, ink flows from the first common liquid chamber 101 through the first individual flow path 200A to the second common liquid chamber 102. Further, by driving the piezoelectric actuator 300, a pressure change is caused to the ink in the first pressure chamber 12A, and the pressure of the ink in the first nozzle 21A is increased, so that an ink droplet is ejected from the first nozzle 21A to the outside. Is ejected. When ink flows from the first common liquid chamber 101 to the second common liquid chamber 102 through the first individual flow passage 200A, the piezoelectric actuator 300 may be driven, or the first common liquid chamber 101 to the first individual flow passage. The piezoelectric actuator 300 may be driven when ink does not flow into the second common liquid chamber 102 through 200A. Further, the flow of ink from the second common liquid chamber 102 to the first common liquid chamber 101 may be temporarily generated due to the pressure change due to the driving of the piezoelectric actuator 300.

In the present embodiment, in the first individual flow path 200A, the second flow path 202, the first pressure chamber 12A, and the first pressure chamber 12A that are in communication with the first common liquid chamber 101 on the upstream side of the first nozzle 21A. The flow channel 201 is referred to as a first upstream flow channel. In addition, in the first individual flow path 200A, the third flow path 203, the fourth flow path 204, and the fifth flow path 205 that communicate with the second common liquid chamber 102 on the downstream side of the first nozzle 21A, 1 Downstream flow path.

The second individual flow passage 200B includes a sixth flow passage 206, a seventh flow passage 207, an eighth flow passage 208, a second nozzle 21B, a ninth flow passage 209, a second pressure chamber 12B and a tenth flow passage 210. To have.

The sixth flow path 206 is in the second direction Y in the in-plane direction of the nozzle surface 20 a so that one end communicates with the first common liquid chamber 101 between the first communication plate 151 and the second communication plate 152. It has been extended along. The sixth flow path 206 of the present embodiment is formed by providing a recess in the second communication plate 152 and covering the recess with the first communication plate 151. Of course, the sixth flow path 206 may be formed by providing a recess in the first communication plate 151 and covering the second communication plate 152 with a recess, and both the first communication plate 151 and the second communication plate 152 may be formed. You may make it provide a recessed part.

Such a sixth flow passage 206 and the first pressure chamber 12A of the first individual flow passage 200A are arranged at different positions in the third direction Z which is the direction perpendicular to the nozzle surface 20a. Specifically, the first pressure chamber 12A is provided on the Z1 side of the first communication plate 151, the sixth flow path 206 is provided on the Z2 side of the first communication plate 151, and the first pressure chamber 12A is provided. The sixth flow path 206 and the sixth flow path 206 are arranged at different positions in the third direction Z. Therefore, even if the first pressure chamber 12A and the sixth flow path 206 are arranged close to each other in the first direction X, it is possible to prevent the partition wall that separates the first pressure chamber 12A from being thin, It is possible to suppress the ink pressure in the first pressure chamber 12A from being absorbed by the deformation of the partition wall of the first pressure chamber 12A, and to prevent the ejection characteristics from varying. Further, as will be described in detail later, even if the first pressure chamber 12A and the sixth flow passage 206 are arranged so that at least a part thereof overlaps in a plan view from the third direction Z, the first pressure chamber 12A and the first pressure chamber 12A Since the sixth flow passage 206 is arranged at a different position in the third direction Z, the first pressure chamber 12A and the sixth flow passage 206 do not communicate with each other. In addition, in the present embodiment, the sixth flow path 206 is arranged at a position that does not overlap the first pressure chamber 12A in a plan view from the third direction Z.

The seventh channel 207 is provided such that one end on the Z1 side communicates with the sixth channel 206 and also penetrates the second communication plate 152 in the third direction Z. That is, the seventh flow path 207 is provided so as to extend from the nozzle 21 to the first common liquid chamber 101 in the third direction Z which is the direction perpendicular to the nozzle surface 20a. It corresponds to the upstream communication passage described in the claims.

The eighth flow path 208 extends between the second communication plate 152 and the nozzle plate 20 along the second direction Y in the in-plane direction of the nozzle surface 20 a so that one end communicates with the seventh flow path 207. It is set up. The eighth flow path 208 of the present embodiment is formed by providing a recess in the second communication plate 152 and covering the opening of this recess with the nozzle plate 20. The eighth flow path 208 is not particularly limited to this, and the nozzle plate 20 may be provided with a recess and the recess may be covered with the second communication plate 152. You may make it provide a recessed part in both. The eighth flow passage 208 constitutes a part of the flow passage provided between the communication plate 15 which is the second flow passage substrate and the nozzle plate 20 which is the third flow passage substrate described in the claims. To do. That is, the third flow paths 203 and the eighth flow paths 208 are alternately arranged in the first direction X between the communication plate 15 that is the second flow path substrate and the nozzle plate 20 that is the third flow path substrate. It is arranged. The resolution in which the third flow path 203 and the eighth flow path 208 are alternately arranged in the first direction X is referred to as the second resolution. Then, the second resolution of the third flow path 203 and the eighth flow path 208 is larger than the first resolution of the first pressure chamber 12A or the second pressure chamber 12B. For example, when the first pressure chamber 12A is formed with a first resolution of 300 dpi and the second pressure chamber 12B is formed with a first resolution of 300 dpi, the third flow passage 203 and the eighth flow passage 208 have a second resolution of 600 dpi. Will be formed. Therefore, the first resolution of each of the first pressure chamber 12A and the second pressure chamber 12B is made smaller than the second resolution of the third flow passage 203 and the eighth flow passage 208, and the first pressure chamber 12A Also, the opening width of the second pressure chamber 12B in the first direction X can be increased, and the excluded volume of the pressure chamber 12 can be increased.

The ninth flow path 209 includes the communication plate 15 so that one end on the Z2 side communicates with the second nozzle 21B and the other end on the Z1 side communicates with one end side in the second direction Y of the second pressure chamber 12B. It is provided so as to penetrate in the direction Z of 3. That is, the ninth flow path 209 is provided between the second pressure chamber 12B and the second nozzle 21B so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. In the present embodiment, the ninth flow path 209 corresponds to the second communication passage described in the claims.

The second pressure chamber 12B is provided in the flow path forming substrate 10 as described above, the opening on the Z1 side of the second pressure chamber 12B is sealed by the diaphragm 50, and the Z2 of the second pressure chamber 12B is formed. A part of the side opening is covered with the communication plate 15. Such a second pressure chamber 12B is arranged at a position different from the first pressure chamber 12A of the first individual flow path 200A in the second direction Y, and when viewed in a plan view from the first direction X, The first pressure chamber 12A and the second pressure chamber 12B are provided at positions that do not overlap each other. The second pressure chamber 12B as described above is formed with the first resolution in the first direction X similarly to the first pressure chamber 12A.

Further, the second pressure chamber 12B and the fifth flow passage 205 of the first individual flow passage 200A are arranged at different positions in the third direction Z which is the direction perpendicular to the nozzle surface 20a. Specifically, the second pressure chamber 12B is provided on the Z1 side of the first communication plate 151, the fifth flow path 205 is provided on the Z2 side of the first communication plate 151, and the second pressure chamber 12B is provided. The fifth flow path 205 and the fifth flow path 205 are arranged at different positions in the third direction Z. Therefore, even if the second pressure chamber 12B and the fifth flow path 205 are arranged close to each other in the first direction X, it is possible to prevent the partition wall that separates the second pressure chamber 12B from being thin, It is possible to suppress variations in ejection characteristics due to deformation of the partition walls of the second pressure chamber 12B and absorption of pressure. Further, as will be described later in detail, even if the second pressure chamber 12B and the fifth flow path 205 are arranged so that at least a part thereof overlaps in a plan view from the third direction Z, the second pressure chamber 12B and the second flow chamber 12B Since the fifth flow path 205 and the fifth flow path 205 are arranged at different positions in the third direction Z, the second pressure chamber 12B and the fifth flow path 205 do not communicate with each other. In addition, in the present embodiment, the fifth flow path 205 is arranged at a position that does not overlap the second pressure chamber 12B in a plan view from the third direction Z.

The second nozzle 21B is provided so as to communicate with the Z2 side end of the ninth flow path 209 and to communicate with the outside by opening at the Z2 side nozzle surface 20a of the nozzle plate 20.

The tenth flow path 210 connects the second pressure chamber 12B and the second common liquid chamber 102, and one end on the Z1 side communicates with the other end side in the second direction Y of the second pressure chamber 12B. , Z2 side is provided so as to penetrate through the first communication plate 151 in the third direction Z so that the other end on the Z2 side communicates with the second communication portion 17 forming the second common liquid chamber 102.

As described above, the second individual flow passage 200B has the sixth flow passage 206, the seventh flow passage 207, and the seventh flow passage 207 in order from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber 102. The eighth flow path 208, the second nozzle 21B, the ninth flow path 209, the second pressure chamber 12B, and the tenth flow path 210 are provided. That is, in the present embodiment, as shown in FIG. 4, the second individual flow path 200B is arranged from the upstream side to the downstream side with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. The second nozzle 21B and the second pressure chamber 12B are arranged in this order in this order. That is, in the first individual flow path 200A and the second individual flow path 200B, the order of the pressure chamber 12 and the nozzle 21 is different with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. Are arranged as follows. In the present embodiment, one pressure chamber 12 and one nozzle 21 are provided in each individual flow channel 200, so the first individual flow channel 200A and the second individual flow channel 200B are the pressure chamber 12 and the nozzle 21. The order of and is reversed.

Then, in such a second individual flow path 200B, ink flows from the first common liquid chamber 101 to the second common liquid chamber 102 through the second individual flow path 200B. Further, by driving the piezoelectric actuator 300, a pressure change is generated in the ink in the second pressure chamber 12B, and the pressure in the second nozzle 21B is increased, so that an ink droplet is ejected from the second nozzle 21B to the outside. It When ink flows from the first common liquid chamber 101 to the second common liquid chamber 102 through the second individual flow passage 200B, the piezoelectric actuator 300 may be driven, or the first common liquid chamber 101 to the second individual flow passage. The piezoelectric actuator 300 may be driven when ink does not flow into the second common liquid chamber 102 through 200B. Further, the flow of ink from the second common liquid chamber 102 to the first common liquid chamber 101 may be temporarily generated due to the pressure change due to the driving of the piezoelectric actuator 300. By the way, the ejection of the ink droplets from the second nozzle 21B is determined by the pressure of the ink in the second nozzle 21B. The pressure of the ink in the second nozzle 21B is the pressure of the ink flowing from the first common liquid chamber 101 to the second common liquid chamber 102, the so-called circulation pressure, and the second pressure chamber 12B by the driving of the piezoelectric actuator 300. From the pressure toward the second nozzle 21B.

For example, when the ink flows from the first common liquid chamber 101 to the second common liquid chamber 102, the pressure fluctuation of the ink in the second pressure chamber 12B causes the ink to flow from the second pressure chamber 12B to the second nozzle 21B. May flow backward and ink droplets may be ejected from the second nozzle 21B. As described above, the fact that the ink flows backward from the second pressure chamber 12B toward the second nozzle 21B means that the pressure of the circulation from the first common liquid chamber 101 toward the second common liquid chamber 102 is small. By making the circulation pressure relatively small, the pressure loss in the individual flow path 200 can be made small. By reducing the pressure loss of the individual flow paths 200, it is possible to reduce the difference in pressure loss between the individual flow paths 200, so that the variation in the ejection characteristics of the ink droplets ejected from each nozzle 21 is reduced. It can be reduced.

Further, for example, with respect to the flow of ink from the first common liquid chamber 101 toward the second common liquid chamber 102, the pressure of the ink in the second pressure chamber 12B fluctuates from the second pressure chamber 12B toward the second nozzle 21B. The ink may be ejected from the second nozzle 21B without the ink flowing backward. In this case, since no ink flows from the second pressure chamber 12B to the second nozzle 21B, it is difficult for bubbles to flow back from the second pressure chamber 12B to the second nozzle 21B, and the bubbles cause the bubbles to escape from the second nozzle 21B. Ink droplet ejection failure is less likely to occur.

In the present embodiment, in the second individual flow passage 200B, the sixth flow passage 206, the seventh flow passage 207, and the eighth flow passage 207 that communicate with the first common liquid chamber 101 on the upstream side of the second nozzle 21B. The flow path 208 is referred to as a second upstream flow path. Further, in the second individual flow passage 200B, the ninth flow passage 209, the second pressure chamber 12B, and the tenth flow passage 210, which communicate with the downstream side of the second nozzle 21B, that is, the second common liquid chamber 102, are formed. It is referred to as a second downstream channel.

Such first individual flow paths 200A and second individual flow paths 200B are arranged alternately in the first direction X, as shown in FIG. That is, with respect to the flow of ink from the first common liquid chamber 101 to the second common liquid chamber 102, ink droplets are ejected from the nozzle 21 due to pressure fluctuations in the pressure chamber 12 regardless of the positions of the pressure chamber 12 and the nozzle 21. Can be discharged. That is, even if the first pressure chamber 12A is arranged upstream and the first nozzle 21A is arranged downstream like the first individual passage 200A, the second nozzle 21B is arranged upstream like the second individual passage 200B. Even if the second pressure chamber 12B is arranged downstream, it is possible to selectively eject ink droplets from both the first nozzle 21A and the second nozzle 21B due to the pressure fluctuation of the ink in the pressure chamber 12. Therefore, with respect to the flow of ink from the first common liquid chamber 101 to the second common liquid chamber 102 as described above, the order of the pressure chamber 12 and the nozzle 21 is different from that of the first individual flow path 200A and the second individual flow path. By alternately arranging the flow channels 200B in the first direction X, the position of the pressure chamber 12 is changed between the first individual flow channel 200A and the second individual flow channel 200B, that is, the first pressure chamber 12A and the first pressure chamber 12A. The two pressure chambers 12B can be arranged at different positions in the second direction Y. Therefore, the pressure chambers 12 of the individual flow passages 200 can be formed wide in the first direction X, and the pressure chambers 12 can be arranged at high density in the first direction X. That is, by arranging the first pressure chamber 12A and the second pressure chamber 12B at different positions in the second direction Y, the partition wall between the first pressure chambers 12A juxtaposed in the first direction X is thickened. In addition to this, the partition walls of the second pressure chambers 12B arranged in parallel in the first direction X can be thickened. Therefore, even if the first pressure chamber 12A and the second pressure chamber 12B are formed to be wide in the first direction X, it is possible to prevent the rigidity of the partition wall from decreasing, improve the excluded volume, and increase the volume of ink droplets. The ejection characteristics, that is, the weight of the ink droplets can be increased, and the occurrence of crosstalk due to the decrease in the rigidity of the partition walls can be suppressed. Further, even if each of the first pressure chamber 12A and the second pressure chamber 12B is densely arranged in the first direction X, it is possible to suppress the rigidity of the partition wall from decreasing, and the rigidity of the partition wall decreases. Therefore, it is possible to suppress the occurrence of crosstalk.

Incidentally, for example, when only the first individual flow passages 200A are arranged in parallel in the first direction X without providing the second individual flow passages 200B, the first pressure chambers 12A are densely arranged in the first direction X. Then, the thickness of the partition wall between the first pressure chambers 12A adjacent to each other in the first direction X becomes thin, and the rigidity of the partition wall decreases. When the rigidity of the partition wall is lowered in this way, crosstalk occurs due to the deformation of the partition wall. That is, when ink droplets are simultaneously ejected from the nozzles 21 on both sides of the ink droplet ejecting nozzle 21, pressure is applied from both sides to the partition wall between the adjacent first pressure chambers 12A at the same timing. In this case, pressure is applied from both sides to the partition wall regardless of the rigidity of the partition wall, so that the partition wall is difficult to deform. On the other hand, when ink droplets are not ejected from the nozzles 21 on both sides of the nozzle 21 that ejects ink droplets, pressure is applied to only one side of the partition wall between the adjacent first pressure chambers 12A. At this time, if the rigidity of the partition wall is low, the partition wall is deformed to absorb the pressure fluctuation, and the ejection characteristic of the ink droplet is deteriorated. For this reason, the ejection characteristics of the ink droplets vary depending on the condition of which of the plurality of nozzles 21 ejects the ink droplet. Therefore, when only the first pressure chamber 12A is provided, the first pressure chamber 12A cannot be formed wide in the first direction X, and the first pressure chamber 12A can be formed in the first direction X. It cannot be arranged in high density.

In the present embodiment, the first pressure chamber 12A and the second pressure chamber 12B are arranged at different positions in the second direction Y, so that between the first pressure chambers 12A adjacent in the first direction X. The thickness of the partition wall can be made relatively thick, and the thickness of the partition wall between the second pressure chambers 12B adjacent to each other in the first direction X can be made relatively thick. Therefore, even if each of the first pressure chamber 12A and the second pressure chamber 12B is formed wide in the first direction X, the partition walls between the first pressure chambers 12A and the partition walls between the second pressure chambers 12B have the same rigidity. It is possible to suppress the decrease. Therefore, it is possible to suppress the flow path substrate from increasing in size in the first direction X and increase the volumes of the first pressure chamber 12A and the second pressure chamber 12B, and to eliminate the excluded volume due to the driving of the piezoelectric actuator 300. By increasing the size, it is possible to improve the ejection characteristics of the ink droplets, particularly the weight of the ink droplets, and it is possible to suppress the occurrence of crosstalk due to the decrease in the rigidity of the partition walls.

Further, even if the interval between the first pressure chamber 12A and the second pressure chamber 12B in the first direction X is shortened, the rigidity of the partition wall between the first pressure chamber 12A and the partition wall between the second pressure chamber 12B is Since it is possible to suppress the decrease, it is possible to arrange the first pressure chamber 12A and the second pressure chamber 12B at a high density in the first direction X. Therefore, it is possible to reduce the size of the flow path substrate in the first direction X, improve the excluded volume of the pressure chambers 12 to improve the ink droplet ejection characteristics, and increase the density of the pressure chambers 12 in the first direction X. The nozzles 21 can be arranged at a high density and the occurrence of crosstalk due to the decrease in the rigidity of the partition wall can be suppressed.

Further, in the present embodiment, the first nozzle 21A is located at a position where one end communicates with the other end of the second flow passage 202 which is the first communication passage along the third direction Z communicating with the first pressure chamber 12A. It is arranged. Therefore, the cross-sectional area of the second flow passage 202 from the first pressure chamber 12A to the first nozzle 21A is made relatively large, the flow passage resistance of the second flow passage 202 is made small, and the discharge from the first nozzle 21A is performed. The weight of the ejected ink droplet can be increased.

Similarly, in the present embodiment, a position where the second nozzle 21B communicates with the other end of the ninth flow path 209, which is a second communication path along the third direction Z, one end of which communicates with the second pressure chamber 12B. It is located in. Therefore, the cross-sectional area of the ninth flow passage 209 from the second pressure chamber 12B to the second nozzle 21B is made relatively large, the flow passage resistance of the eighth flow passage 208 is made small, and the discharge from the second nozzle 21B is performed. The weight of the ejected ink droplet can be increased.

That is, in the present embodiment, the first nozzle 21A and the second nozzle 21B are connected to the second nozzle 21A so that the first nozzle 21A and the second nozzle 21B directly communicate with the second flow path 202 and the ninth flow path 209, respectively. By arranging the nozzles 21 at different positions in the direction Y and by staggering the nozzles 21 in the first direction X, the weight of the ink droplets ejected from the first nozzle 21A and the second nozzle 21B can be increased. it can.

Of course, the first nozzle 21A may be arranged so as to communicate with the middle of the third flow path 203, and the second nozzle 21B may be arranged so as to communicate with the middle of the eighth flow path 208. Since the 203 and the eighth flow passage 208 are limited in increasing the cross-sectional area of the flow passage, particularly the height in the third direction Z, depending on the thickness of the communication plate 15 in the third direction Z, the second flow passage 203. The flow passage resistance of the third flow passage 203 and the eighth flow passage 208 is likely to be larger than that of the passage 202 and the ninth flow passage 209. Therefore, the weight of the ink droplets ejected from the first nozzle 21A and the second nozzle 21B may be relatively small.

Further, in the present embodiment, the flow path resistance of the upstream flow path on the first common liquid chamber 101 side of the nozzle 21 of the individual flow path 200 and the flow path of the downstream flow path on the second common liquid chamber 102 side of the nozzle 21. The road resistance is set to be the same.

That is, the channel resistance of the first upstream channel and the channel resistance of the first downstream channel of the first individual channel 200A are the same. That is, the total flow resistance of the first flow path 201, the first pressure chamber 12A, and the second flow path 202 that form the first upstream flow path, the third flow path 203 that forms the first downstream flow path, and the first flow path The total flow resistance of the fourth flow path 204 and the fifth flow path 205 is formed to be the same flow resistance. Here, the flow path resistance of the first upstream flow path and the first downstream flow path is determined by the cross-sectional area across the flow path, the flow path length, and the shape.

Further, the second upstream channel and the second downstream channel of the second individual channel 200B have the same channel resistance. That is, the total flow resistance of the sixth flow path 206, the seventh flow path 207, and the eighth flow path 208, which form the second upstream flow path, and the ninth flow path 209, the second pressure chamber 12B, and the tenth flow path. The total flow path resistance of the path 210 is formed to have the same flow path resistance.

Further, in the present embodiment, the first individual flow passage 200A and the second individual flow passage 200B have mutually inverted shapes with respect to the ink flowing direction from the first common liquid chamber 101 to the second common liquid chamber 102. Has become. That is, the first upstream flow path of the first individual flow path 200A and the second downstream flow path of the second individual flow path 200B are provided so as to have the same shape and the same flow path resistance. The first downstream channel of the channel 200A and the second upstream channel of the second individual channel 200B have the same shape and the same channel resistance.

In this way, the first upstream channel and the first downstream channel of the first individual channel 200A have the same channel resistance, and the second upstream channel and the second downstream channel of the second individual channel 200B are the same. By setting the same flow path resistance, the first individual flow path 200A and the second individual flow path 200B are mutually inverted with respect to the ink flowing direction from the first common liquid chamber 101 to the second common liquid chamber 102. Even with such a shape, the flow resistances of the first upstream flow path and the second upstream flow path from the first common liquid chamber to the nozzle 21 can be made uniform. Therefore, it is possible to suppress variations in the ejection characteristics of the ink droplets ejected from the first nozzle 21A of the first individual flow passage 200A and the ink droplets ejected from the second nozzle 21B of the second individual flow passage 200B. In addition, the structure of the flow path can be simplified.

Further, the ejection characteristics of the ink droplets ejected from the nozzles 21 are made uniform by aligning the flow resistances of the first downstream flow path of the first individual flow path 200A and the second downstream flow path of the second individual flow path 200B. be able to. That is, when ink droplets are simultaneously ejected from the plurality of nozzles 21, ink is supplied to the pressure chamber 12 from both the first common liquid chamber 101 and the second common liquid chamber 102, so By setting the same resistance for the two downstream flow paths, it is possible to suppress variations in the ink supply amount and variations in the ink droplet ejection characteristics.

Incidentally, for example, when the first upstream channel and the first downstream channel of the first individual channel 200A have different channel resistances, when the first individual channel 200A is reversed to form the second individual channel 200B. In addition, since the first downstream channel of the first individual channel 200A becomes the second upstream channel of the second individual channel 200B, the first upstream channel from the first common liquid chamber 101 to the nozzle 21 and the second channel The flow path resistance differs from that of the upstream flow path. Therefore, the ejection characteristics of the ink droplets ejected from the first nozzle 21A of the first individual flow passage 200A and the second nozzle 21B of the second individual flow passage 200B vary. Further, in order to make the first upstream channel and the second upstream channel have the same channel resistance, the second upstream channel is formed with a cross-sectional area, channel length, shape, etc. different from those of the first downstream channel. It has to be done and is complicated.

As described above, in the recording head 1 which is an example of the liquid ejecting head of the present embodiment, energy generation for causing a pressure change in the flow path substrate in which the flow path is formed and the ink that is the liquid in the flow path is generated. A piezoelectric actuator 300 that is an element, and the flow path communicates with the first common liquid chamber 101, the second common liquid chamber 102, and the first common liquid chamber 101 and the second common liquid chamber 102. The individual flow channel 200 includes an individual flow channel 200 through which ink flows from the common liquid chamber 101 toward the second common liquid chamber 102. The individual flow channel 200 is a pressure chamber in which a pressure change is caused by the nozzle 21 communicating with the outside and the piezoelectric actuator 300. Of the plurality of individual flow paths, three individual flow paths 200 adjacent to each other in the first direction X, which is the direction in which the nozzles 21 are juxtaposed, respectively include the first common liquid chamber 101 and the second common flow chamber 101. The first individual flow channel 200A and the second individual flow channel 200B, which are two individual flow channels 200 that communicate with the common liquid chamber 102 and are adjacent to each other in the first direction X that is the parallel installation direction, are the first common liquid chamber 101. The arrangement order of the pressure chambers and the nozzles 21 is different in the direction in which the ink flows from to the second common liquid chamber 102.

In this way, the first individual flow paths 200A and the second individual flow paths 200B, which are the individual flow paths 200 in which the pressure chambers 12 and the nozzles 21 are arranged in different order, are arranged so as to be adjacent to each other in the first direction X. Thus, the pressure chambers 12 of the adjacent individual flow paths 200 can be arranged at different positions in the second direction Y. Therefore, as compared with the case where the pressure chambers 12 and the nozzles 21 are arranged in parallel with each other in the same order, the width of the pressure chambers 12 in the direction in which the pressure chambers 12 are arranged is made wider, and the volume excluded by the piezoelectric actuator 300 of the pressure chambers 12 is increased. The flow path substrate can be downsized by increasing the discharge weight of the ink droplets or by arranging the pressure chambers 12 in the first direction X with high density. Further, since the pressure chambers 12 of the individual flow passages 200 adjacent to each other can be arranged at positions displaced in the second direction Y, the arrangement density of the pressure chambers 12 of the individual flow passages 200 adjacent to each other in the first direction X can be arranged. Therefore, the nozzles 21 can be arranged at high density.

In addition, by connecting the individual flow paths 200 independently to the first common liquid chamber 101 and the second common liquid chamber 102 without joining the individual flow paths 200 in the middle, It is possible to suppress the occurrence of crosstalk due to the influence of pressure fluctuation in the. That is, if the individual flow passages 200 join each other before communicating with the first common liquid chamber 101 and the second common liquid chamber 102, the change in ink pressure in one individual flow passage 200 causes the other individual flow passage 200 to change. 200 is greatly affected, and the ink ejection characteristics vary. In the present embodiment, since the plurality of individual flow paths 200 communicate only with the first common liquid chamber 101 and the second common liquid chamber 102 having a relatively large volume, the plurality of individual flow paths 200 are mutually connected. It is possible to reduce the influence of pressure fluctuation and suppress variations in ink ejection characteristics.

Further, since the first common liquid chamber 101 and the second common liquid chamber 102 are communicated with each other only by the individual flow passage 200, the ink is arranged in the first common liquid chamber 101 in the parallel direction of the individual flow passages 200. The ink does not flow in the direction X of 1, and the pressure difference between the inks supplied to the plurality of individual flow paths 200 is unlikely to occur, and the ejection characteristics of the ink ejected from the nozzles 21 are unlikely to vary. Incidentally, when the ink flows in the first common liquid chamber 101 in the first direction X, the pressure of the ink supplied to the individual flow path 200 communicating with the upstream side of the first common liquid chamber 101 becomes lower than the pressure of the ink supplied to the individual flow passage 200. The pressure of the ink supplied to the communicating individual flow paths 200 decreases, and the variation in the pressure of the ink supplied to each individual flow path 200 tends to cause variations in the ink ejection characteristics.

Further, in the recording head 1 of the present embodiment, in the individual flow path 200, the flow path resistance of the upstream flow path from the nozzle 21 to the first common liquid chamber 101 and the flow path resistance from the nozzle 21 to the second common liquid chamber 102. The flow path resistance of the flow path is preferably the same. In this way, by making the flow path resistance of the upstream flow path and the flow path resistance of the downstream flow path of the individual flow paths 200 adjacent in the first direction X the same, the individual flow paths adjacent in the first direction X are obtained. Even if the fluid flow paths 200 are reversed with respect to the ink flowing direction from the first common liquid chamber 101 to the second common liquid chamber 102, the upstream flow channels of the adjacent individual flow channels 200 have the same flow channel resistance. You can Therefore, it is possible to suppress variations in the ejection characteristics of the ink droplets ejected from the adjacent individual flow paths 200, and it is possible to simplify the structure of the flow paths.

Further, in the recording head 1 of the present embodiment, ink is not ejected from the nozzles 21 in a state where the liquid ink flows from the first common liquid chamber 101 to the second common liquid chamber 102 via the individual flow path 200. At the time of ejection, the pressure difference between the inks in the nozzles 21 of the two individual flow paths 200 is −2% or more and +2% or less.

As described above, when the ink is not ejected, the pressure difference between the inks in the nozzles 21 of the individual flow paths 200 adjacent to each other in the first direction X is made relatively small to −2% or more and +2% or less, so that the adjacent individual flows It is possible to suppress variations in the ejection characteristics of the ink droplets ejected from the nozzles 21 of the path 200.

Further, in the recording head 1 of the present embodiment, the voltage applied to the piezoelectric actuator 300, which is the energy generating element of each of the two individual flow paths 200, may be different. In this way, by applying different voltages to the piezoelectric actuator 300 corresponding to the first individual flow path 200A and the piezoelectric actuator 300 corresponding to the second individual flow path 200B, for example, the first individual flow path 200A The flow path resistance between the first upstream flow path from the one nozzle 21A to the first common liquid chamber 101 and the second upstream flow path from the second nozzle 21B of the second individual flow path 200B to the first common liquid chamber 101 is Even if they are different, it is possible to reduce the error in the ink weight of the ink droplets ejected from the first nozzle 21A and the second nozzle 21B. Similarly, by differentiating the voltage applied to the piezoelectric actuator 300 corresponding to the first individual flow path 200A and the piezoelectric actuator 300 corresponding to the second individual flow path 200B, the ink in the first nozzle 21A during non-ejection. Even if the pressure difference between the ink in the second nozzle 21B and the ink in the second nozzle 21B is smaller than −2% and larger than +2%, an error in the ink weight of the ink droplets ejected from the first nozzle 21A and the second nozzle 21B. Can be reduced.

Further, in the recording head 1 of the present embodiment, the plurality of individual flow passages 200 are the first individual flow passage 200A in which the nozzle 21 is provided on the downstream side of the pressure chamber 12, and the nozzle 21 is upstream of the pressure chamber 12. The second individual flow path 200B provided on the side, and the first individual flow path 200A and the second individual flow path 200B are arranged adjacent to each other in the first direction X, which is the parallel installation direction. In the third direction Z, which is the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens, the pressure chamber 12 of the first individual flow path 200A and the first common liquid more than the nozzle 21 of the second individual flow path 200B. The sixth flow path 206, which is a flow path on the chamber 101 side and extends in the in-plane direction of the nozzle surface 20a, is arranged at a different position.

In this way, by disposing the first pressure chamber 12A of the first individual flow passage 200A and the sixth flow passage 206 of the second individual flow passage 200B at different positions in the third direction Z, the first pressure chamber Even if 12A and the sixth flow path 206 are arranged close to each other in the first direction X, it is possible to suppress the thickness of the partition wall that separates the first pressure chamber 12A from decreasing, and the first pressure chamber 12A Can be formed wide in the first direction X to increase the excluded volume of the first pressure chamber 12A and improve the ejection characteristics of ink droplets. Further, it is possible to prevent the rigidity of the partition wall of the first pressure chamber 12A from decreasing, suppress the pressure absorption due to the deformation of the partition wall, and suppress the variation in the ejection characteristics of the ink droplet.

Of course, the first pressure chamber 12A of the first individual flow passage 200A and the sixth flow passage 206 of the second individual flow passage 200B may be arranged at the same position in the third direction Z.

Further, in the present embodiment, the second pressure chamber 12B of the second individual flow passage 200B and the second common liquid chamber 102 side of the nozzle 21 of the first individual flow passage 200A, which is the flow passage on the nozzle surface 20a. The fifth flow path 205, which is a flow path extending in the in-plane direction, is arranged at a different position in the third direction Z, which is the direction perpendicular to the nozzle surface 20a.

Accordingly, even if the first pressure chamber 12A and the sixth flow passage 206 are arranged close to each other in the first direction X, it is possible to prevent the partition wall that separates the second pressure chamber 12B from being thin. Therefore, the second pressure chamber 12B can be formed wide in the first direction X, the excluded volume of the second pressure chamber 12B can be increased, and the ejection characteristic of the ink droplet can be improved. Further, it is possible to prevent the rigidity of the partition wall of the second pressure chamber 12B from decreasing, suppress the pressure absorption due to the deformation of the partition wall, and suppress the variation in the ink droplet ejection characteristics.

Of course, the second pressure chamber 12B of the second individual flow passage 200B and the fifth flow passage 205 of the first individual flow passage 200A may be arranged at the same position in the third direction Z.

Further, in the recording head 1 of the present embodiment, a compliance portion 494 capable of absorbing the pressure of the liquid ink is provided on a part of each wall surface of the first common liquid chamber 101 and the second common liquid chamber 102. Has been. In this way, by providing the compliance section 494 in each of the first common liquid chamber 101 and the second common liquid chamber 102, the pressure fluctuation of ink in the first common liquid chamber 101 and the second common liquid chamber 102 can be complied with. It can be absorbed by the deformation of the portion 494, and it is possible to suppress variations in the ejection characteristics of the ink droplets.

Further, in the recording head of the present embodiment, the compliance portion 494 capable of absorbing the pressure fluctuation of the liquid ink and the nozzle plate 20 provided with the nozzle 21 are provided, and the compliance portion 494 and the nozzle plate 20 are In the third direction Z, which is the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens, the nozzle 21 is arranged on the same side with respect to the individual flow path.

By arranging the compliance portion 494 on the same side as the nozzle 21 in this way, the compliance portion 494 can be provided in a region where the nozzle 21 is not provided, and the compliance portion 494 can be provided in a relatively large area. .. Further, by disposing the compliance part 494 and the nozzle 21 on the same side, the compliance part 494 is arranged at a position close to the individual flow path 200, and the pressure fluctuation of ink in the individual flow path 200 is effected by the compliance part 494. Can be absorbed.

Further, in the recording head of this embodiment, the compliance portion 494 is formed on the compliance substrate 49 which is a member different from the nozzle plate 20.

By providing the compliance portion 494 on the compliance substrate 49, which is a member separate from the nozzle plate 20, the vibration due to the deformation of the compliance portion 494 is difficult to be transmitted to the nozzle 21 of the nozzle plate 20, and the vibration of the compliance portion 494 causes the nozzle 21 to move. It is possible to suppress variations in the flight direction of the ink droplets ejected from the device. Further, the cost can be reduced by making the area of the nozzle plate 20 relatively small.

In the recording head of the present embodiment, the first common liquid chamber 101 and the second common liquid chamber 102 are separated from each other when viewed in plan from the third direction Z which is the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens. The nozzle 21 is arranged in between.

By arranging the nozzle 21 between the first common liquid chamber 101 and the second common liquid chamber 102 in this way, a flow path that communicates with the first common liquid chamber 101, the second common liquid chamber 102, and the nozzle 21. The structure can be simplified, the flow path resistance can be reduced, and the weight of the ink droplets ejected from the nozzle 21 can be suppressed. By the way, when the nozzle 21 is arranged outside the first common liquid chamber 101 and the second common liquid chamber 102, a flow path communicating with the first common liquid chamber 101, the second common liquid chamber 102 and the nozzle 21 is formed. Since the structure becomes complicated and the flow path length becomes long, the flow path resistance increases, and the weight of the ink droplets ejected from the nozzle 21 decreases.

In the above-described configuration, the first nozzle 21A of the first individual flow passage 200A and the second nozzle 21B of the second individual flow passage 200B are arranged at positions displaced in the second direction Y, thereby forming the nozzle 21. Are arranged in a zigzag manner in the first direction X, but the arrangement is not particularly limited to this.

Here, modified examples are shown in FIGS. 5. FIG. 5 is a plan view on the nozzle surface side showing a modified example of the ink jet recording head according to the first embodiment of the present invention. FIG. 6 is a sectional view taken along the line CC′ of FIG. 5, showing a modified example of the ink jet recording head. FIG. 7 is a cross-sectional view of a modified example of the ink jet recording head, taken along the line DD′ of FIG.

As shown in FIG. 6, the first nozzle 21A is provided at a position communicating with the middle of the third flow passage 203 of the first individual flow passage 200A.

Further, as shown in FIG. 7, the second nozzle 21B is provided at a position communicating with the middle of the eighth flow passage 208 of the second individual flow passage 200B. That is, the nozzle 21 is arranged in communication with the middle of the third flow passage 203 and the eighth flow passage 208, which are the flow passages extending in the in-plane direction of the nozzle surface 20a where the nozzle 21 of the flow passage substrate opens.

Thereby, as shown in FIG. 5, the first nozzle 21A and the second nozzle 21B can be arranged at the same position in the second direction Y, and the first nozzle 21A and the second nozzle 21B can be arranged at the first position. They can be arranged in a line on a straight line along the direction X. That is, by disposing the nozzle 21 so as to communicate with the middle of the third flow path 203 and the eighth flow path 208, which are flow paths extending in the in-plane direction of the nozzle surface 20a, the first pressure chamber 12A and the second pressure chamber 12A Even if the chamber 12B is arranged at a different position in the second direction Y, the position of the nozzle 21 can be easily adjusted in the second direction Y, so that the plurality of nozzles 21 are arranged in the first direction X. They can be easily arranged in a line on a straight line along the line.

In such a configuration, when viewed in a plan view from the first direction X that is the direction in which the nozzles 21 are arranged in parallel, the two individual flow channels adjacent to each other in the first direction X, that is, the first individual flow channel 200A and the first individual flow channel 200A In the two individual flow paths 200B, the distance between the nozzles 21, that is, the distance between the first nozzle 21A and the second nozzle 21B, is the distance between the pressure chambers 12, that is, the distance between the first pressure chamber 12A and the second pressure chamber 12B. Is smaller than.

In this way, in the second direction Y, by making the distance between the first nozzle 21A and the second nozzle 21B smaller than the distance between the first pressure chamber 12A and the second pressure chamber 12B, the plurality of nozzles 21 are The first pressure chambers 12A and the second pressure chambers 12B can be arranged at positions distant from each other in the second direction Y while being arranged close to each other with high density, , Each of the rows of the second pressure chambers 12B can be arranged at a lower density than the nozzles 21. Therefore, it is possible to increase the excluded volume of each pressure chamber 12 and arrange the pressure chambers 12 at a high density to downsize the flow path substrate.

Further, by arranging the plurality of nozzles 21 at the same position in the second direction Y, there is no need to adjust the timing of ejecting ink droplets from each nozzle 21 so as to simplify the drive control of the piezoelectric actuator 300. can do. By the way, when the recording head 1 is moved in the second direction Y to eject the ink droplets, if the ink droplets are ejected from the nozzles 21 arranged at different positions in the second direction Y at the same timing, the ejection target is ejected. Since the ink droplet landing position on the medium is displaced in the second direction Y, it is necessary to adjust the drive timing of the piezoelectric actuator 300 so that the ink droplet land at the same position in the second direction Y. Is.

Further, when the first nozzle 21A and the second nozzle 21B are arranged at positions relatively distant from each other in the second direction Y, it is generated by ink droplets ejected from each of the first nozzle 21A and the second nozzle 21B. The turbulent flows may affect each other, causing a deviation in the flight direction of the ink droplet. By disposing the first nozzle 21A and the second nozzle 21B relatively close to each other as in the present embodiment, the influence of the turbulent flow of the ink droplets ejected from the nozzles 21 is suppressed, and the ink droplets are suppressed. It is possible to suppress variations in the flying directions of the ink droplets and to suppress the deviation of the landing positions of the ink droplets on the ejection target medium.

In addition, in the example shown in FIG. 5, the first nozzle 21A and the second nozzle 21B are arranged on a straight line along the first direction X, but the present invention is not limited to this. For example, when the first nozzle 21A and the second nozzle 21B are arranged at different positions in the second direction Y, and when viewed in plan from the first direction X, which is the direction in which the nozzles 21 are arranged, the first direction In the first individual flow passage 200A and the second individual flow passage 200B that are adjacent to each other at X, the distance between the first nozzle 21A and the second nozzle 21B is greater than the distance between the first pressure chamber 12A and the second pressure chamber 12B. You may make it small. That is, the first nozzles 21A and the second nozzles 21B are arranged in a zigzag pattern along the first direction X, the first nozzles 21A communicate with the third flow passage 203, and the second nozzles 21B are the eighth nozzles. You may make it connect to the flow path 208. By arranging the first nozzle 21A and the second nozzle 21B at relatively close positions in this way, the influence of turbulence generated by ink droplets ejected from the first nozzle 21A and the second nozzle 21B is suppressed. However, it is possible to suppress the variation in the flight direction of the ink droplet and suppress the deviation of the landing position of the ink droplet on the ejected medium. Further, the first nozzle 21A and the second nozzle 21B are communicated with the third flow passage 203 and the eighth flow passage 208, which are the flow passages extending in the second direction Y, so that the nozzle 21 can dry. The ink thickened by or the air bubbles that have entered from the nozzle 21 are at the corners of the boundary between the communication plate 15 and the nozzle plate 20, that is, the ends of the second flow passage 202 and the ninth flow passage 209 on the nozzle plate 20 side. It is possible to suppress the staying in the corners of the nozzles and to discharge the ink and the bubbles thickened by the nozzles 21 to the second common liquid chamber 102 on the downstream side. Further, the bubbles that have entered from the nozzle 21 can be suppressed from moving to the pressure chamber 12 side due to buoyancy, and can be discharged to the second common liquid chamber 102 on the downstream side. Therefore, it is possible to prevent the ejection failure due to the thickened ink or bubbles.

Further, in the recording head 1 of the present embodiment, the first pressure chamber 12A, which is the pressure chamber of the first individual flow path 200A, and the flow on the first common liquid chamber 101 side of the nozzle 21 in the second individual flow path 200B. The sixth flow path 206, which is a flow path and extends in the in-plane direction of the nozzle surface 20a, is located at a position where they do not overlap each other when viewed in a plan view from the third direction Z, which is the direction perpendicular to the nozzle surface 20a. Although it is arranged, it is not particularly limited thereto. For example, the first pressure chamber 12A and the sixth flow passage 206 may be arranged at positions where at least some of them overlap each other in a plan view from the third direction Z. Such a configuration is shown in FIG. 8. FIG. 8 is a plan view showing the flow path configuration of the recording head according to the first embodiment of the invention.

As shown in FIG. 8, the first pressure chamber 12A of the first individual flow channel 200A and the sixth flow channel 206 of the second individual flow channel 200B are partially mutually in plan view from the third direction Z. It is placed in the overlapping position. As described above, the configuration in which the first pressure chamber 12A and the sixth flow passage 206 are arranged at positions where they partially overlap each other in the third direction Z as in the present embodiment. This is possible because the flow path 206 is arranged at a different position in the third direction Z. As described above, by disposing the first pressure chamber 12A and the sixth flow path 206 at positions where they partially overlap each other in the third direction Z, the widths of the first pressure chamber 12A in the first direction X are compared. The first pressure chamber 12A can have a large excluded volume to increase the ejection characteristics of the ink droplets, especially the weight of the ink droplets.

Further, similarly, the second pressure chamber 12B of the second individual flow passage 200B and the fifth flow passage 205 of the first individual flow passage 200A also have positions where at least some of them overlap each other in a plan view from the third direction Z. It is located in. In this way, by disposing the second pressure chamber 12B and the fifth flow path 205 at positions where they partially overlap each other in the third direction Z, the widths of the second pressure chamber 12B in the first direction X are compared. The discharge volume of the second pressure chamber 12B can be increased to increase the ejection characteristics of the ink droplets, especially the weight of the ink droplets.

In the present embodiment, the first pressure chamber 12A and the second individual flow passage 200B are the flow passages on the first common liquid chamber 101 side with respect to the second nozzle 21B, and extend in the in-plane direction of the nozzle surface 20a. Although the sixth flow path 206, which is a path, is arranged at a different position in the third direction Z, the present invention is not limited to this. Here, a modified example of the recording head of the present embodiment will be described with reference to FIGS. 9 and 10. 9 is a cross-sectional view showing a modified example of the recording head according to the first embodiment and is a cross-sectional view taken along the line AA' in FIG. FIG. 10 is a cross-sectional view showing a modified example of the recording head of the first embodiment and is a cross-sectional view taken along the line BB′ of FIG.

As shown in FIGS. 9 and 10, the communication plate 15 is formed of a single substrate. Then, as shown in FIG. 9, the first individual flow passage 200A includes a first flow passage 201, a first pressure chamber 12A, a second flow passage 202, a first nozzle 21A, a third flow passage 203, and a fourth flow passage. 204, an eleventh channel 211 and a twelfth channel 212 are provided.

The eleventh flow passage 211 is a flow passage closer to the second common liquid chamber 102 than the first nozzle 21A of the first individual flow passage 200A, and extends in the second direction Y which is the in-plane direction of the nozzle surface 20a. Are provided. The eleventh passage 211 of the present embodiment is arranged at the same position as the pressure chamber 12 in the third direction Z. That is, the eleventh channel 211 is formed by providing the channel forming substrate 10 with a recessed portion that opens to the Z2 side and covering the recessed portion with the communication plate 15.

The twelfth flow path 212 is provided along the third direction Z so that one end communicates with the eleventh flow path 211 and the other end communicates with the second common liquid chamber 102.

Further, as shown in FIG. 10, the second individual flow passage 200B includes a thirteenth flow passage 213, a fourteenth flow passage 214, a seventh flow passage 207, an eighth flow passage 208, a second nozzle 21B and a ninth flow passage. 209, the second pressure chamber 12B, and the tenth flow path 210.

The thirteenth flow passage 213 is provided along the third direction Z so that one end communicates with the fourteenth flow passage 214 and the other end communicates with the first common liquid chamber 101.

The 14th flow path 214 is a flow path closer to the first common liquid chamber 101 than the second nozzle 21B of the second individual flow path 200B, and extends in the second direction Y which is the in-plane direction of the nozzle surface 20a. Are provided. In the present embodiment, the fourteenth flow path 214 is arranged at the same position as the pressure chamber 12 in the third direction Z. That is, the fourteenth flow path 214 is formed by providing the flow path forming substrate 10 with a recess opening on the Z2 side and covering the recess with the communication plate 15.

As described above, in the recording head 1 shown in FIGS. 9 and 10, the plurality of individual flow paths 200 includes the first individual flow path 200A in which the nozzle 21 is provided on the downstream side of the pressure chamber 12, and the nozzle 21. In the first direction X in which the first individual flow passage 200A and the second individual flow passage 200B are arranged side by side. The first pressure chamber 12A, which is a pressure chamber of the first individual flow path 200A, and the second individual chamber, which are arranged at the adjacent positions, in the third direction Z, which is the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens. The fourteenth flow path 214, which is a flow path on the first common liquid chamber 101 side of the nozzle 21 in the flow path 200B and extends in the in-plane direction of the nozzle surface 20a, is arranged at the same position. There is.

In this way, by disposing the first pressure chamber 12A and the fourteenth flow path 214 at the same position in the third direction Z, the communication plate 15 can be formed by one substrate, and the recording head 1 of the recording head 1 can be formed. The structure can be simplified, the number of parts can be reduced, and the cost can be reduced.

Further, in the present embodiment, in the third direction Z, the second pressure chamber 12B, which is the pressure chamber of the second individual flow passage 200B, and the second common liquid chamber 102 in the first individual flow passage 200A, which is closer to the nozzle 21 than the nozzle 21. The eleventh flow passage 211, which is a flow passage on the side and which extends in the in-plane direction of the nozzle surface 20a, is arranged at the same position. Also by this, the communication plate 15 can be formed by one substrate, the structure of the recording head 1 can be simplified, the number of parts can be reduced, and the cost can be reduced.

Note that in the example shown in FIGS. 9 and 10, the eleventh flow passage 211 and the fourteenth flow passage 214 are formed at the same position as the pressure chamber 12 in the third direction Z, that is, on the flow passage forming substrate 10. However, the present invention is not limited to this. Here, modified examples of the recording head 1 are shown in FIGS. 11 is a cross-sectional view showing a modified example of the recording head, which is a cross-sectional view taken along the line AA′ in FIG. FIG. 12 is a cross-sectional view showing a modified example of the recording head and is a cross-sectional view taken along the line BB′ of FIG. 1.

As shown in FIG. 11, the first individual flow path 200A includes a first flow path 201, a first pressure chamber 12A, a second flow path 202, a first nozzle 21A, a third flow path 203, and a fourth flow path 204. And an eleventh channel 211.

The eleventh flow path 211 is formed by forming a concave portion that opens toward the flow path forming substrate 10 side in the communication plate 15, and covering the opening of this concave portion with the flow path forming substrate 10.

In addition, as shown in FIG. 12, the second individual flow passage 200B includes a fourteenth flow passage 214, a seventh flow passage 207, an eighth flow passage 208, a second nozzle 21B, a ninth flow passage 209, and a second pressure chamber. 12B and the 10th flow path 210 are provided.

The fourteenth flow path 214 is formed by forming a recess in the communication plate 15 that opens toward the flow path forming substrate 10 and covering the opening of this recess with the flow path forming substrate 10.

Even with such a configuration, the communication plate 15 can be formed by one substrate, and the number of parts can be reduced and the cost can be reduced.

Further, in the recording head 1 which is an example of the liquid ejecting head of the present embodiment, the flow path substrate in which the flow path is formed and the piezoelectric element which is the energy generating element for causing the pressure change in the ink which is the liquid in the flow path. An actuator 300 is provided, and the flow path is in communication with the first common liquid chamber 101, the second common liquid chamber 102, and the first common liquid chamber 101 and the second common liquid chamber 102. From the second common liquid chamber 102 to the second common liquid chamber 102, the individual flow channel 200 includes a nozzle 21 communicating with the outside, and a pressure chamber 12 in which a pressure change is generated by the piezoelectric actuator 300. The flow channel substrate includes a flow channel forming substrate 10 that is a first flow channel substrate, a communication plate 15 that is a second flow channel substrate, and a nozzle plate 20 that is a third flow channel substrate. And the communication plate 15, the first pressure chamber 12A or the second pressure chamber 12B, which is a flow path, is formed at the first resolution in the first direction X, which is the parallel installation direction, and the communication plate 15 and the nozzle plate are formed. The third flow path 203 and the eighth flow path 208, which are flow paths with a second resolution higher than the first resolution, are formed between the first flow path 20 and the second flow path 20.

In this way, by setting the second resolution of the third flow path 203 and the eighth flow path 208 to be larger than the first resolution of the first pressure chamber 12A or the second pressure chamber 12B, the first pressure chamber 12A and the second pressure chamber 12B can widen the opening width in the first direction X, and can increase the excluded volume of the pressure chamber 12.

The difference between the first resolution and the second resolution of the flow passages of each layer is that the pressure chambers 12 of the two individual flow passages 200 adjacent to each other in the first direction X, which is the direction in which the nozzles 21 are arranged side by side. It can be applied even when the arrangement order of the nozzle 21 and the nozzle 21 is the same.

Further, in the recording head 1 of the present embodiment, the third flow path substrate includes the nozzle plate 20 in which the nozzles 21 are formed. Since the third flow path substrate includes the nozzle plate 20 as described above, the flow path communicating with the nozzle 21 between the communication plate 15 as the second flow path substrate and the nozzle plate 20 can be arranged with high resolution. Therefore, the nozzle 21 can be arranged with high resolution.

Further, in the recording head 1 of the present embodiment, the first resolution is the pitch of the flow passages in the direction in which the flow passages are arranged.

(Embodiment 2)
FIG. 13 is a cross-sectional view of an ink jet recording head which is an example of the liquid jet head according to the second embodiment of the present invention, and is a cross-sectional view taken along the line AA′ of FIG. 14 is a cross-sectional view of the ink jet recording head according to the second embodiment of the present invention, which is a cross-sectional view taken along the line BB′ of FIG. The same members as those in the above-described embodiment are designated by the same reference numerals, and overlapping description will be omitted.

The recording head 1 of the present embodiment is one in which the nozzle plate 20 and the compliance substrate 49 are integrated.

Specifically, as shown in FIGS. 13 and 14, the nozzle plate 20 is provided with a size that covers the openings of the first common liquid chamber 101 and the second common liquid chamber 102. A compliance portion 494 is provided in a portion of the nozzle plate 20 that constitutes a part of each wall of the first common liquid chamber 101 and the second common liquid chamber 102. That is, a portion of the nozzle plate 20 corresponding to the first common liquid chamber 101 is provided with the first compliance portion 494A, and a portion of the nozzle plate 20 corresponding to the second common liquid chamber 102 is provided with the second compliance portion 494B. Has been.

In the present embodiment, by forming the nozzle plate 20 with a film made of a resin material such as polyimide, each of the walls defining the first common liquid chamber 101 and the second common liquid chamber 102 of the nozzle plate 20 is formed. To function as the compliance unit 494.

In this way, by providing the compliance portion 494 capable of absorbing the pressure of the ink on a part of the wall surface of each of the first common liquid chamber 101 and the second common liquid chamber 102, the first common liquid chamber 101 and the first common liquid chamber 101 The pressure fluctuation of the ink in the second common liquid chamber 102 can be absorbed by the deformation of the compliance portion 494, and it is possible to suppress the variation in the ejection characteristics of the ink droplets.

Further, in the present embodiment, since the compliance portion 494 is provided in a part of the nozzle plate 20, the nozzle plate 20 and the compliance portion 494 are arranged in the third direction Z which is the direction perpendicular to the nozzle surface 20 a where the nozzle 21 opens. , On the same side as the individual flow path 200, that is, on the Z2 side.

By arranging the compliance part 494 on the same side as the nozzle 21, the compliance part 494 can be provided in a region where the nozzle 21 is not provided, and the compliance part 494 can be provided in a relatively large area. Further, by disposing the compliance part 494 and the nozzle 21 on the same side, the compliance part 494 is arranged at a position close to the individual flow path 200, and the pressure fluctuation of ink in the individual flow path 200 is effected by the compliance part 494. Can be absorbed.

Further, since the nozzle plate 20 covers the openings of the first common liquid chamber 101 and the second common liquid chamber 102, between the first common liquid chamber 101 and the nozzle 21 on the Z2 side of the communication plate 15, and the second common liquid chamber. A space between the liquid chamber 102 and the nozzle 21 is covered with a nozzle plate 20. Therefore, the individual flow path 200 communicating with the first common liquid chamber 101 and the second common liquid chamber 102 can be formed at the joint interface between the nozzle plate 20 and the communication plate 15. Therefore, the communication plate 15 of this embodiment does not need to be formed by stacking a plurality of substrates, and is formed by one substrate.

Here, the first common liquid chamber 101, the second common liquid chamber 102, the second common liquid chamber 102, and the second common liquid chamber 102 are provided in the flow channel forming substrate 10, the communication plate 15, the nozzle plate 20, the case member 40, etc., which are the flow channel substrates of the present embodiment. An individual flow path 200 for flowing ink from the first common liquid chamber 101 to the second common liquid chamber 102 is provided.

The individual flow channel 200 includes a first individual flow channel 200A that communicates with the first nozzle 21A and a second individual flow channel 200B that communicates with the second nozzle 21B.

As shown in FIG. 13, the first individual flow path 200A includes a first flow path 201, a first pressure chamber 12A, a second flow path 202, a first nozzle 21A, and a fifteenth flow path 215.

The first flow path 201, the first pressure chamber 12A, the second flow path 202, and the first nozzle 21A of the present embodiment are the same as those of the above-described first embodiment, and thus duplicated description will be omitted.

The fifteenth flow passage 215 has a second end in the in-plane direction of the nozzle surface 20a so that one end communicates with the second flow passage 202 and the other end communicates with the second communication portion 17 forming the second common liquid chamber 102. Is extended along the direction Y. The fifteenth flow path 215 of the present embodiment is formed by providing the communication plate 15 with a recess opening to the Z2 side and covering the opening of this recess with the nozzle plate 20. The fifteenth flow path 215 is not particularly limited to this, and the nozzle plate 20 may be provided with a concave portion, and the concave portion may be covered with the communication plate 15, or the concave portions may be formed on both the communication plate 15 and the nozzle plate 20. May be provided.

As described above, the first individual flow path 200A has the first flow path 201, the first pressure chamber 12A, and the first flow path 201 in order from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber 102. It has a second flow channel 202, a first nozzle 21A, and a fifteenth flow channel 215. That is, in the present embodiment, the first individual flow path 200A has the first pressure chamber 12A from the upstream side to the downstream side with respect to the flow of the ink from the first common liquid chamber 101 to the second common liquid chamber 102. And the first nozzle 21A are arranged in this order.

According to such a first individual flow path 200A, ink flows from the first common liquid chamber 101 through the first individual flow path 200A to the second common liquid chamber 102 when ink droplets are not ejected. When ejecting an ink droplet, the piezoelectric actuator 300 is driven to cause a pressure change in the ink in the first pressure chamber 12A, thereby increasing the pressure in the first nozzle 21A. Ink droplets are ejected from 21A to the outside.

In the present embodiment, in the first individual flow path 200A, the second flow path 202, the first pressure chamber 12A, and the first pressure chamber 12A that are in communication with the first common liquid chamber 101 on the upstream side of the first nozzle 21A. The flow channel 201 is referred to as a first upstream flow channel. Further, in the first individual flow path 200A, the downstream side of the first nozzle 21A, that is, the fifteenth flow path 215 communicating with the second common liquid chamber 102 is referred to as a first downstream flow path.

The second individual flow path 200B includes a sixteenth flow path 216, a second nozzle 21B, a ninth flow path 209, a second pressure chamber 12B and a tenth flow path 210.

The second nozzle 21B, the ninth flow passage 209, the second pressure chamber 12B, and the tenth flow passage 210 of the present embodiment are the same as those of the above-described first embodiment, and thus duplicated description will be omitted.

The sixteenth flow path 216 is extended along the second direction Y in the in-plane direction of the nozzle surface 20 a so that one end thereof communicates with the first communication portion 16 that constitutes the first common liquid chamber 101. The sixteenth flow path 216 of the present embodiment is formed by providing the communication plate 15 with a recess opening to the Z2 side and covering the opening of this recess with the nozzle plate 20. The sixteenth flow path 216 is not particularly limited to this, and the nozzle plate 20 may be provided with a recess, and the recess may be covered with the communication plate 15, or both the communication plate 15 and the nozzle plate 20 may be recessed. May be provided.

The sixteenth flow passage 216 and the first pressure chamber 12A of the first individual flow passage 200A are arranged at different positions in the third direction Z which is the direction perpendicular to the nozzle surface 20a. Specifically, the first pressure chamber 12A is provided on the Z1 side of the communication plate 15, and the sixteenth flow path 216 is provided on the Z2 side of the communication plate 15, and the first pressure chamber 12A and the sixteenth flow path are provided. The path 216 is arranged at a different position in the third direction Z. By arranging the first pressure chamber 12A of the first individual flow passage 200A and the sixteenth flow passage 216 of the second individual flow passage 200B at different positions in the third direction Z in this manner, the first pressure chamber 12A Even if the 16th flow path 216 and the 16th flow path 216 are arranged close to each other in the first direction X, it is possible to prevent the partition wall that separates the first pressure chamber 12A from being thinned, and the first pressure chamber 12A is By forming it wide in the first direction X, the excluded volume of the first pressure chamber 12A can be increased, and the ejection characteristics of ink droplets can be improved. Further, it is possible to prevent the rigidity of the partition wall of the first pressure chamber 12A from decreasing, suppress the pressure absorption due to the deformation of the partition wall, and suppress the variation in the ejection characteristics of the ink droplet.

Further, in the recording head 1 of the present embodiment, the first pressure chamber 12A, which is the pressure chamber of the first individual flow path 200A, and the flow on the first common liquid chamber 101 side of the nozzle 21 in the second individual flow path 200B. The sixteenth flow path 216, which is a flow path extending in the in-plane direction of the nozzle surface 20a, is located at a position where they do not overlap each other when viewed in a plan view from the third direction Z that is the perpendicular direction of the nozzle surface 20a. It is arranged. Of course, similarly to FIG. 8 of the first embodiment described above, the first pressure chamber 12A and the sixteenth flow path 216 may be arranged so that at least a part thereof overlaps each other in a plan view from the third direction Z. Good.

Further, the second pressure chamber 12B and the fifteenth flow passage 215 of the first individual flow passage 200A are arranged at different positions in the third direction Z which is the direction perpendicular to the nozzle surface 20a. Specifically, the second pressure chamber 12B is provided on the Z1 side of the communication plate 15, the fifteenth flow path 215 is provided on the Z2 side of the communication plate 15, and the second pressure chamber 12B and the fifteenth flow path are provided. The path 215 is arranged at a different position in the third direction Z. In this way, by disposing the second pressure chamber 12B of the second individual flow passage 200B and the fifteenth flow passage 215 of the second individual flow passage 200B at different positions in the third direction Z, the first pressure chamber 12A Even if the fifteenth flow path 215 and the fifteenth flow path 215 are arranged close to each other in the first direction X, it is possible to prevent the partition wall that separates the second pressure chamber 12B from being thinned, and the second pressure chamber 12B is By forming it wide in the first direction X, the excluded volume of the second pressure chamber 12B can be increased, and the ejection characteristics of the ink droplets can be improved. Further, it is possible to prevent the rigidity of the partition wall of the second pressure chamber 12B from decreasing, suppress the pressure absorption due to the deformation of the partition wall, and suppress the variation in the ink droplet ejection characteristics.

In addition, in the recording head 1 of the present embodiment, the second pressure chamber 12B of the second individual flow passage 200B and the flow passage on the second common liquid chamber 102 side of the nozzle 21 of the first individual flow passage 200A. The fifteenth flow path 215, which is a flow path extending in the in-plane direction of the nozzle surface 20a, is arranged at a position where they do not overlap with each other when viewed in plan from the third direction Z that is the perpendicular direction of the nozzle surface 20a. .. Of course, as in the case of FIG. 8 of the first embodiment described above, the second pressure chamber 12B and the fifteenth flow path 215 may be arranged so that at least some of them overlap each other in a plan view from the third direction Z. Good.

In this way, the second individual flow passage 200B is arranged in order from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber 102 in order of the 16th flow passage 216, the second nozzle 21B, and the second nozzle 21B. It includes a ninth flow path 209, a second pressure chamber 12B, and a tenth flow path 210. That is, in the present embodiment, the second individual flow path 200B is connected to the second nozzle 21B from the upstream side to the downstream side with respect to the flow of the ink flowing from the first common liquid chamber 101 to the second common liquid chamber 102. The second pressure chamber 12B is arranged in this order. That is, in the first individual flow path 200A and the second individual flow path 200B, the order of the pressure chamber 12 and the nozzle 21 is different with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. Are arranged as follows. In the present embodiment, one pressure chamber 12 and one nozzle 21 are provided in each individual flow channel 200, so the first individual flow channel 200A and the second individual flow channel 200B are the pressure chamber 12 and the nozzle 21. The order of and is reversed.

Then, according to the second individual flow path 200B, ink flows from the first common liquid chamber 101 to the second common liquid chamber 102 through the second individual flow path 200B when ink droplets are not ejected. When ejecting an ink droplet, the piezoelectric actuator 300 is driven to cause a pressure change in the ink in the second pressure chamber 12B, thereby increasing the pressure in the second nozzle 21B. Ink droplets are ejected from 21B to the outside.

In this way, by covering the openings of the first common liquid chamber 101 and the second common liquid chamber 102 with the nozzle plate 20 and providing the compliance portion 494 in the nozzle plate 20, the first common liquid chamber 101 is formed as the individual flow path 200. Further, the flow path connecting the second common liquid chamber 102 and the nozzle 21, that is, the fifteenth flow path 215 and the sixteenth flow path 216 can be provided at the joint interface between the nozzle plate 20 and the communication plate 15. Therefore, the structure of the individual flow path 200 can be simplified and the pressure loss can be reduced. Further, a fifteenth flow channel 215 and a sixteenth flow channel 216, which are flow channels that connect the first common liquid chamber 101 and the second common liquid chamber 102 to the nozzle 21, are provided between the nozzle plate 20 and the communication plate 15. By doing so, it is not necessary to form the communication plate 15 by laminating a plurality of substrates, and the communication plate 15 can be manufactured with one substrate. Therefore, the thickness of the communication plate 15 in the third direction Z can be made relatively thin. The length of the flow path connecting the pressure chamber 12 and the nozzle 21 can be shortened. As a result, the flow path resistance of the flow path from the pressure chamber 12 to the nozzle 21 can be reduced, and the weight of the ink droplets ejected from the nozzle 21 can be suppressed from decreasing.

Further, since it is not necessary to form the communication plate 15 by laminating a plurality of substrates and it is not necessary to separately provide the compliance substrate 49 with the nozzle plate 20 as in the above-described first embodiment, the number of parts can be reduced. The cost can be reduced.

Also in the present embodiment, the upstream flow channel of the individual flow channel 200 closer to the first common liquid chamber 101 than the nozzle 21 and the downstream flow channel closer to the second common liquid chamber 102 than the nozzle 21 have the same flow. It is provided to provide road resistance.

That is, the first upstream channel and the first downstream channel of the first individual channel 200A have the same channel resistance. That is, the total flow resistance of the first flow path 201, the first pressure chamber 12A, and the second flow path 202 that form the first upstream flow path, and the flow of the fifteenth flow path 215 that forms the first downstream flow path. The road resistance is formed to have the same flow resistance. Here, the flow path resistance of the first upstream flow path and the first downstream flow path is determined by the cross-sectional area across the flow path, the flow path length, and the shape.

Similarly, the second upstream channel and the second downstream channel of the second individual channel 200B have the same channel resistance. That is, the flow resistance of the sixteenth flow passage 216 forming the second upstream flow passage and the total flow of the ninth flow passage 209, the second pressure chamber 12B, and the tenth flow passage 210 forming the second downstream flow passage. The road resistance is formed to have the same flow resistance.

Further, in the present embodiment, the first individual flow passage 200A and the second individual flow passage 200B have mutually inverted shapes with respect to the ink flowing direction from the first common liquid chamber 101 to the second common liquid chamber 102. Has become. That is, the first upstream flow path of the first individual flow path 200A and the second downstream flow path of the second individual flow path 200B are provided so as to have the same shape and the same flow path resistance. The first downstream channel of the channel 200A and the second upstream channel of the second individual channel 200B have the same shape and the same channel resistance.

In this way, the first upstream channel and the first downstream channel of the first individual channel 200A have the same channel resistance, and the second upstream channel and the second downstream channel of the second individual channel 200B are the same. By setting the same flow path resistance, the first individual flow path 200A and the second individual flow path 200B are mutually inverted with respect to the ink flowing direction from the first common liquid chamber 101 to the second common liquid chamber 102. Even with such a shape, the flow resistances of the first upstream flow path and the second upstream flow path from the first common liquid chamber 101 to the nozzle 21 can be made uniform. Therefore, it is possible to suppress variations in the ejection characteristics of the ink droplets ejected from the first nozzle 21A of the first individual flow passage 200A and the ink droplets ejected from the second nozzle 21B of the second individual flow passage 200B. In addition, the structure of the flow path can be simplified.

Further, the ejection characteristics of the ink droplets ejected from the nozzles 21 are made uniform by aligning the flow resistances of the first downstream flow path of the first individual flow path 200A and the second downstream flow path of the second individual flow path 200B. be able to. That is, when ink droplets are simultaneously ejected from the plurality of nozzles 21, ink is supplied to the pressure chamber 12 from both the first common liquid chamber 101 and the second common liquid chamber 102, so By setting the same flow path resistance as the two downstream flow paths, it is possible to suppress variations in the ink supply amount and variations in the ink droplet ejection characteristics.

Further, in a non-ejection state in which ink droplets are not ejected from the nozzles 21 in a state where ink is allowed to flow from the first common liquid chamber 101 to the second common liquid chamber 102 via the individual flow path 200, the nozzles 21 are arranged side by side. The ink pressure difference based on the atmospheric pressure in the nozzles 21 of the individual flow paths 200 adjacent in the certain first direction X is preferably −2% or more and +2% or more. For example, when the atmospheric pressure is 1013 hPa, the pressure inside the nozzle 21 is about 1000 hPa. Therefore, the pressure difference between the inks in the nozzles 21 adjacent to each other in the first direction X is about 20 hPa at maximum.

As described above, when not ejecting, the difference between the pressure of the ink in the first nozzle 21A and the pressure of the ink in the second nozzle 21B adjacent in the first direction X is −2% or more and +2% or less. By making it relatively small, it is possible to suppress variations in the ejection characteristics of the ink droplets ejected from the first nozzle 21A and the ink droplets ejected from the second nozzle 21B.

Note that the flow path resistance between the first upstream flow path and the first downstream flow path, the flow path resistance between the second upstream flow path and the second downstream flow path, and two nozzles adjacent in the first direction X The pressure difference of the ink in 21 is not limited to the above. For example, when the channel resistances of the first upstream channel and the first downstream channel and the channel resistances of the second upstream channel and the second downstream channel are different, The pressure of the ink and the pressure of the ink in the second nozzle 21B may be smaller than -2% or larger than +2%. In such a case, the voltage applied to each piezoelectric actuator 300 of the individual flow paths adjacent to each other in the juxtaposed direction of the nozzles 21 may be made different.

As described above, in the recording head 1 which is an example of the liquid ejecting head of the present embodiment, energy generation for causing a pressure change in the flow path substrate in which the flow path is formed and the ink that is the liquid in the flow path is generated. A piezoelectric actuator 300 that is an element, and the flow path communicates with the first common liquid chamber 101, the second common liquid chamber 102, and the first common liquid chamber 101 and the second common liquid chamber 102. The individual flow channel 200 includes an individual flow channel 200 through which ink flows from the common liquid chamber 101 toward the second common liquid chamber 102. The individual flow channel 200 is a pressure chamber in which a pressure change is caused by the nozzle 21 communicating with the outside and the piezoelectric actuator 300. Of the plurality of individual flow passages 200, the three individual flow passages 200 adjacent to each other in the first direction X, which is the direction in which the nozzles 21 are juxtaposed, respectively include the first common liquid chamber 101 and the second common flow chamber 101. The first individual flow channel 200A and the second individual flow channel 200B, which are two individual flow channels 200 that communicate with the common liquid chamber 102 and are adjacent to each other in the first direction X that is the parallel installation direction, are the first common liquid chamber 101. The arrangement order of the pressure chambers and the nozzles 21 is different in the direction in which the ink flows from to the second common liquid chamber 102.

In this way, the first individual flow paths 200A and the second individual flow paths 200B, which are the individual flow paths 200 in which the pressure chambers 12 and the nozzles 21 are arranged in different order, are arranged so as to be adjacent to each other in the first direction X. Thus, the pressure chambers 12 of the adjacent individual flow paths 200 can be arranged at different positions in the second direction Y. Therefore, as compared with the case where the pressure chambers 12 and the nozzles 21 are arranged in parallel with each other in the same order, the width of the pressure chambers 12 in the direction in which the pressure chambers 12 are arranged is made wider, and the volume excluded by the piezoelectric actuator 300 of the pressure chambers 12 is increased. The flow path substrate can be downsized by increasing the discharge weight of the ink droplets or by arranging the pressure chambers 12 in the first direction X with high density. Further, since the pressure chambers 12 of the individual flow passages 200 adjacent to each other can be arranged at positions displaced in the second direction Y, the arrangement density of the pressure chambers 12 of the individual flow passages 200 adjacent to each other in the first direction X can be arranged. Therefore, the nozzles 21 can be arranged at high density.

In addition, by connecting the individual flow paths 200 independently to the first common liquid chamber 101 and the second common liquid chamber 102 without joining the individual flow paths 200 in the middle, It is possible to suppress the occurrence of crosstalk due to the influence of pressure fluctuation in the. That is, if the individual flow passages 200 join each other before communicating with the first common liquid chamber 101 and the second common liquid chamber 102, the change in ink pressure in one individual flow passage 200 causes the other individual flow passage 200 to change. 200 is greatly affected, and the ink ejection characteristics vary. In the present embodiment, since the plurality of individual flow paths 200 communicate only with the first common liquid chamber 101 and the second common liquid chamber 102 having a relatively large volume, the plurality of individual flow paths 200 are mutually connected. It is possible to reduce the influence of pressure fluctuation and suppress variations in ink ejection characteristics.

Further, since the first common liquid chamber 101 and the second common liquid chamber 102 are communicated with each other only by the individual flow passage 200, the ink is arranged in the first common liquid chamber 101 in the parallel direction of the individual flow passages 200. The ink does not flow in the direction X of 1, and the pressure difference between the inks supplied to the plurality of individual flow paths 200 is unlikely to occur, and the ejection characteristics of the ink ejected from the nozzles 21 are unlikely to vary. By the way, when the ink flows through the first common liquid chamber 101 in the first direction X, the pressure of the ink supplied to the individual flow path 200 communicating with the upstream side of the first common liquid chamber 101 is lower than that of the ink supplied to the individual flow passage 200. The pressure of the ink supplied to the individual flow paths 200 decreases, and variations in the pressure of the ink supplied to the individual flow paths 200 tend to cause variations in the ink ejection characteristics.

Further, in the recording head 1 of the present embodiment, the compliance portion 494 is formed on the nozzle plate 20. By forming the compliance portion 494 on the nozzle plate 20 in this manner, the number of parts can be reduced and the cost can be reduced. Further, by providing the compliance portion 494 in the nozzle plate 20, the nozzle 21 is arranged on the Z2 side which is the same side as the individual flow path 200 in the third direction Z which is the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens. be able to. Therefore, the compliance portion 494 can be provided in a region where the nozzle 21 is not provided, and the compliance portion 494 can be provided in a relatively wide area. Further, by disposing the compliance part 494 and the nozzle 21 on the same side, the compliance part 494 is arranged at a position close to the individual flow path 200, and the pressure fluctuation of ink in the individual flow path 200 is effected by the compliance part 494. Can be absorbed.

In the present embodiment, the first nozzles 21A and the second nozzles 21B are provided at different positions in the second direction Y, so that the first nozzles 21A are arranged side by side in the first direction X. 22A and a second nozzle row 22B in which the second nozzles 21B are arranged in the first direction X, two rows are arranged in the second direction Y, that is, the so-called nozzle 21 is arranged in the first direction X. However, the configuration is not particularly limited to this, and the first nozzle 21A and the second nozzle 21B may be arranged in the second direction Y in the same manner as in FIG. 5 of the first embodiment described above. The nozzles 21 may be arranged at the same position, and the nozzles 21 may be arranged on a straight line along the first direction X. In the case of such a configuration, although not particularly shown, the first nozzle 21A is provided at a position communicating with the middle of the fifteenth flow path 215, and the second nozzle 21B communicates with the middle of the sixteenth flow path 216. It should be provided as follows. That is, the nozzle 21 may be arranged in communication with the middle of the fifteenth flow channel 215 and the sixteenth flow channel 216, which are flow channels extending in the in-plane direction of the nozzle surface 20a where the nozzle 21 of the flow channel substrate opens. Good. Of course, the first nozzle 21A and the second nozzle 21B are provided at positions communicating with the middle of the fifteenth channel 215 and the sixteenth channel 216, respectively, and the first nozzle 21A and the second nozzle 21B are arranged in the second direction. They may be arranged at different positions depending on Y.

Further, in the above-mentioned example, the nozzle plate 20 is made of a resin material such as polyimide, but the invention is not limited to this. Here, a modified example of the nozzle plate will be described with reference to FIGS. 15 and 16. 15 is a cross-sectional view showing a modified example of the recording head of the second embodiment, which is a cross-sectional view taken along the line AA′ of FIG. FIG. 16 is a cross-sectional view showing a modified example of the recording head of the second embodiment, which is a cross-sectional view according to the line BB′ of FIG. 1.

As shown in FIGS. 15 and 16, the nozzle plate 20 is made of a metal material such as stainless steel having a higher rigidity than a resin film, and the first common liquid chamber 101 and the second common liquid chamber 102 of the nozzle plate 20 are A compliance portion 494 is formed in the nozzle plate 20 by reducing the thickness of the portion forming the wall as compared with other portions. That is, the regions of the nozzle plate 20 corresponding to the first common liquid chamber 101 and the second common liquid chamber 102 are made thinner than the region where the nozzles 21 are formed. As a result, the first compliance portion 494A, which has a lower rigidity than the region where the nozzle 21 is formed, is formed in the portion of the nozzle plate 20 corresponding to the first common liquid chamber 101, and corresponds to the second common liquid chamber 102. A second compliance portion 494B having a lower rigidity than the region where the nozzle 21 is formed is formed in the portion. As described above, even when the nozzle plate 20 is formed of a material having a relatively high rigidity, it is easy to deform by reducing the thickness of the portion that closes the first common liquid chamber 101 and the second common liquid chamber 102, The compliance portion 494 can be easily formed on a part of the walls of the first common liquid chamber 101 and the second common liquid chamber 102.

Further, a sealing film 491 may be provided between the communication plate 15 and the nozzle plate 20. Such an example will be described with reference to FIGS. 17 and 18. Note that FIG. 17 is a cross-sectional view showing a modified example of the recording head of the second embodiment, which is a cross-sectional view according to the line AA′ in FIG. 1. FIG. 18 is a cross-sectional view showing a modified example of the recording head of the second embodiment, which is a cross-sectional view taken along the line BB′ of FIG.

As shown in FIGS. 17 and 18, the nozzle plate 20 is provided with a size that does not cover the openings of the first common liquid chamber 101 and the second common liquid chamber 102. The surface on the Z2 side where the common liquid chamber 102 opens is sealed with a sealing film 491. That is, the sealing film 491 and the nozzle plate 20 are laminated in this order on the surface of the communication plate 15 on the Z2 side. Then, by providing the nozzle plate 20 with a size that does not cover the openings of the first common liquid chamber 101 and the second common liquid chamber 102, the openings of the first common liquid chamber 101 and the second common liquid chamber 102 are sealed. The compliance part 494 is sealed only by the film 491, that is, the first compliance part 494A and the second compliance part 494B. By the way, as shown in FIG. 17, a first opening 495A larger than the first nozzle 21A is provided in a portion that connects the first nozzle 21A and the second flow passage 202, and It does not hinder the flow of ink toward the first nozzle 21A. The first opening 495A may be larger than the second flow passage 202 or smaller than the second flow passage 202 as long as it has an opening area larger than that of the first nozzle 21A. Similarly, as shown in FIG. 18, a second opening 495B larger than the second nozzle 21B is provided in a portion that communicates the second nozzle 21B and the ninth flow path 209, and the ninth flow path 209 is provided. The ink flow from the second nozzle 21B to the second nozzle 21B is not hindered. The second opening 495B may be larger than the ninth passage 209 or smaller than the ninth passage 209 as long as it is provided with an opening area larger than that of the second nozzle 21B.

Even with such a configuration, the individual flow passage 200, that is, the fifteenth flow passage 215 and the sixteenth flow passage 216 can be formed between the sealing film 491 and the communication plate 15, so that the individual flow passages can be formed. It is not necessary to manufacture the communication plate 15 by laminating a plurality of substrates by simplifying the structure of 200, and the communication plate 15 can be manufactured with one substrate. Moreover, since the area of the nozzle plate 20 can be reduced, the cost can be reduced.

(Embodiment 3)
FIG. 19 is a cross-sectional view of an ink jet recording head, which is an example of the liquid ejecting head according to the third embodiment of the present invention, taken along the line AA′ in FIG. 20 is a sectional view of the ink jet recording head according to the third embodiment, taken along line BB′ in FIG. The same members as those in the above-described embodiment are designated by the same reference numerals, and overlapping description will be omitted.

As shown in FIGS. 19 and 20, in the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, the compliance substrate 49, the case member 40, etc., which are flow path substrates, the first common liquid chamber 101 and the second common liquid chamber 101 are provided. A common liquid chamber 102 and a plurality of individual flow paths 200 for flowing the ink from the first common liquid chamber 101 to the second common liquid chamber 102 are provided.

The first communication portion 16 that constitutes the first common liquid chamber 101 includes a first narrow portion 16a provided on the Z1 side, which is the pressure chamber 12 side in the third direction Z, and a first narrow portion 16a provided on the nozzle 21 side. 1 wide part 16b.

The first narrow portion 16 a is provided on the first communication plate 151 side of the first communication plate 151 and the second communication plate 152, and the first wide portion 16 b is provided on the second communication plate 152.

Further, the first narrow width portion 16a and the first wide width portion 16b are provided with the same width in the first direction X, and the first wide width portion 16b in the second direction Y is the first narrow width portion. It is formed with a width wider than 16a. The first wide portion 16b is provided so as to be wider on the nozzle 21 side than the first narrow portion 16a. That is, the end of the first wide portion 16b opposite to the nozzle 21 in the second direction Y is provided at the same position as the first narrow portion 16a, and the first wide portion 16b is in the second direction. The end portion of the Y on the nozzle 21 side is arranged outside the first narrow portion 16a.

The second communicating portion 17 forming the second common liquid chamber 102 includes a second narrow portion 17a provided on the Z1 side which is the pressure chamber 12 side in the third direction Z and a second narrow portion 17a provided on the nozzle 21 side. And two wide portions 17b.

The second narrow portion 17a is provided on the first communication plate 151 side of the first communication plate 151 and the second communication plate 152, and the second wide portion 17b is provided on the second communication plate 152.

Further, the second narrow portion 17a and the second wide portion 17b are provided with the same width in the first direction X, and the second wide portion 17b is the second narrow portion in the second direction Y. The width is wider than 17a. Further, the second wide portion 17b is provided so as to be wider on the nozzle 21 side than the second narrow portion 17a. That is, the end of the second wide portion 17b on the side opposite to the nozzle 21 in the second direction Y is provided at the same position as the second narrow portion 17a, and the second wide portion 17b in the second direction. The end portion of the Y on the nozzle 21 side is arranged outside the second narrow portion 17a.

The Z2 side openings of the first common liquid chamber 101 and the second common liquid chamber 102 are covered with the compliance substrate 49. Here, the opening area of the first wide portion 16b of the first common liquid chamber 101 covered by the compliance substrate 49 is larger than the opening area of the first narrow portion 16a. Therefore, as compared with the case where the first compliance portion 494A is provided for the opening area of the first narrow portion 16a, the first compliance portion 494A is provided for the relatively wide opening area of the first wide portion 16b. The area of the first compliance portion 494A can be increased.

Similarly, the opening area of the second wide portion 17b of the second common liquid chamber 102 covered by the compliance substrate 49 is larger than the opening area of the second narrow portion 17a. Therefore, as compared with the case where the second compliance portion 494B is provided for the opening area of the second narrow portion 17a, the second compliance portion 494B is provided for the relatively wide opening area of the second wide portion 17b. The area of the second compliance portion 494B can be increased.

In this way, by making the area of the compliance portion 494 that covers the openings of the first common liquid chamber 101 and the second common liquid chamber 102 relatively large, the ink in the first common liquid chamber 101 and the second common liquid chamber 102 It is possible to improve the reactivity of the deformation of the compliance unit 494 corresponding to the pressure fluctuation, shorten the ink droplet ejection cycle, and realize high-speed printing.

Further, in the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, and the compliance substrate 49 which form the flow path substrate, the individual flow paths 200 communicating with the first common liquid chamber 101 and the second common liquid chamber 102 are provided. It is provided.

In the present embodiment, the individual flow passage has a first individual flow passage 200A that communicates with the first nozzle 21A and a second individual flow passage 200B that communicates with the second nozzle 21B.

The first individual flow passage 200A includes a first flow passage 201, a first pressure chamber 12A, a second flow passage 202, a first nozzle 21A, a third flow passage 203, a fourth flow passage 204 and a fifth flow passage 205. To have.

The first flow channel 201, the first pressure chamber 12A, the first nozzle 21A, the third flow channel 203, the fourth flow channel 204, and the fifth flow channel 205 of this embodiment are the same as those of the above-described first embodiment. A duplicate description will be omitted.

The second flow passage 202 is provided between the first pressure chamber 12A and the first nozzle 21A in the first individual flow passage 200A so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. The second flow passage 202 corresponds to the first communication passage described in the claims.

The second flow path 202 is formed such that the opening on the first nozzle 21A side is closer to the second common liquid chamber 102 side than the opening on the first pressure chamber 12A side. Here, the opening of the second flow path 202 on the side of the first nozzle 21A is formed to be closer to the second common liquid chamber 102 than the opening on the side of the first pressure chamber 12A is in the third direction. When viewed in plan from Z, the opening of the second flow path 202 on the side of the first nozzle 21A is located in the second common liquid chamber in the second direction Y more than the opening of the second flow path 202 on the side of the first pressure chamber 12A. It means that they are arranged at a position deviated to the 102 side. Incidentally, when viewed in a plan view from the third direction Z, a part of the opening of the second flow path 202 on the side of the first nozzle 21A and the opening on the side of the first pressure chamber 12A may partially overlap with each other. It does not include a case in which one of the opening on the first nozzle 21A side and the opening on the first pressure chamber 12A side of the two flow paths 202 completely overlaps with the other.

Specifically, the second flow path 202 has a seventeenth flow path 217, one end of which is connected to the first pressure chamber 12A and which penetrates the first communication plate 151 in the third direction Z, and the seventeenth flow path 217. An eighteenth flow channel 218, which communicates with the other end of the flow channel 217 and extends along the second direction Y between the first communication plate 151 and the second communication plate 152, and the eighteenth flow channel 218. And a nineteenth flow path 219 which is provided so as to communicate with the second communication plate 152 and penetrate the second communication plate 152 in the third direction Z.

In the present embodiment, the eighteenth flow path 218 is formed by forming a recess in the second communication plate 152 and covering the opening of the recess of the second communication plate 152 with the first communication plate 151. Of course, the 18th flow path 218 is not particularly limited to this, and a recess may be formed in the first communication plate 151, or a recess may be formed in both the first communication plate 151 and the second communication plate 152. You may

By thus providing the eighteenth flow passage 218 which is a horizontal flow passage in the middle of the second flow passage 202, the nineteenth flow passage 219 can be moved to the second common liquid chamber 102 side in the second direction Y. it can. Then, by moving the nineteenth flow path 219 to the second common liquid chamber 102 side, the first wide portion 16b of the first common liquid chamber 101 is located closer to the second common liquid chamber 102 side than the first narrow portion 16a. Can be widened. By the way, if the opening of the surface of the first common liquid chamber 101 on the Z2 side is widened in the second direction Y on the side opposite to the second common liquid chamber 102 in order to increase the area of the first compliance portion 494A, communication is established. The plate 15 becomes large in the second direction Y. In this embodiment, the first common liquid chamber 102 is formed so that the opening of the second flow path 202 on the side of the first nozzle 21A is closer to the second common liquid chamber 102 than the opening on the side of the first pressure chamber 12A. Since the opening of the chamber 101 on the Z2 side can be expanded to the second common liquid chamber 102 side, it is possible to suppress the communication plate 15 from increasing in size in the second direction Y and increase the area of the first compliance portion 494A. be able to.

The second individual flow passage 200B includes a sixth flow passage 206, a seventh flow passage 207, an eighth flow passage 208, a second nozzle 21B, a ninth flow passage 209, a second pressure chamber 12B and a tenth flow passage 210. Have.

The sixth flow path 206, the seventh flow path 207, the eighth flow path 208, the second nozzle 21B, the second pressure chamber 12B, and the tenth flow path 210 of this embodiment are the same as those of the above-described first embodiment, and therefore overlap. The description will be omitted.

The ninth flow path 209 is provided in the second individual flow path 200B between the second pressure chamber 12B and the second nozzle 21B so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. The ninth flow path 209 corresponds to the second communication passage described in the claims.

The ninth flow path 209 is formed so that the opening on the second nozzle 21B side is closer to the first common liquid chamber 101 side than the opening on the second pressure chamber 12B side. Here, that the opening of the ninth flow path 209 on the second nozzle 21B side is formed closer to the first common liquid chamber 101 side than the opening on the second pressure chamber 12B side is in the third direction. When viewed in a plan view from Z, the opening of the ninth flow passage 209 on the second nozzle 21B side is closer to the first common liquid chamber in the second direction Y than the opening of the ninth flow passage 209 on the second pressure chamber 12B side. It means that they are arranged at a position deviated to the 101 side. Incidentally, when viewed in a plan view from the third direction Z, a part of the opening on the second nozzle 21B side of the ninth flow path 209 and the opening on the second pressure chamber 12B side may partially overlap with each other. It does not include a case in which any one of the opening of the nine flow paths 209 on the second nozzle 21B side and the opening of the second pressure chamber 12B completely overlaps the other.

Specifically, the ninth flow path 209 includes a twentieth flow path 220 provided at one end of the second nozzle 21B and penetrating the second communication plate 152 in the third direction Z, and a twentieth flow path 209. A second flow passage 221 that communicates with the other end of 220 and extends toward the second common liquid chamber 102 side along the second direction Y, and a second pressure chamber that communicates with the twenty-first flow passage 221. The second flow path 222 is provided so as to penetrate the first communication plate 151 in the third direction Z so as to communicate with 12B.

In the present embodiment, the twenty-first channel 221 is formed by forming a recess in the second communication plate 152 and covering the opening of the recess of the second communication plate 152 with the first communication plate. Of course, the 21st flow path 221 is not particularly limited to this, and a recess may be formed in the first communication plate 151, or a recess may be formed in both the first communication plate 151 and the second communication plate 152. You may

By thus providing the 21st flow path 221 that is a horizontal flow path in the middle of the 9th flow path 209, the 22nd flow path 222 can be moved to the first common liquid chamber 101 side in the second direction Y. it can. Then, by moving the 22nd flow path 222 to the first common liquid chamber 101 side, the second wide portion 17b of the second common liquid chamber 102 is moved to the first common liquid chamber 101 side rather than the second narrow portion 17a. Can be widened. By the way, if the opening of the surface of the second common liquid chamber 102 on the Z2 side is widened to the side opposite to the first common liquid chamber 101 in the second direction Y in order to increase the area of the second compliance portion 494B, communication is established. The plate 15 becomes large in the second direction Y. In the present embodiment, the second common liquid is formed by forming the opening of the ninth flow path 209 on the side of the first nozzle 21A so as to be closer to the first common liquid chamber 101 than the opening on the side of the first pressure chamber 12A. Since the opening of the chamber 102 on the Z2 side can be expanded to the first common liquid chamber 101 side, it is possible to suppress the communication plate 15 from increasing in size in the second direction Y and increase the area of the second compliance portion 494B. be able to.

Further, as shown in FIG. 19, since the first common liquid chamber 101 is provided with a step due to the first narrow portion 16a and the first wide portion 16b, bubbles are likely to stay in this step. However, in the present embodiment, as shown in FIG. 20, the sixth flow passage 206 of the second individual flow passage 200B is open at the step portion, so that the bubbles accumulated due to the step are generated in the second individual flow passage 200B. Is moved to the second common liquid chamber 102 side. Therefore, it is possible to prevent the bubbles from staying in the first common liquid chamber 101, the bubbles in the first common liquid chamber 101 grow, and the supply of the ink to the pressure chamber 12 fails, or the bubbles are generated at an unexpected timing. It is possible to suppress ejection failure of ink droplets and the like due to flowing into the pressure chamber 12.

Further, the second common liquid chamber 102 is also provided with a step due to the second narrow portion 17a and the second wide portion 17b, but the bubbles at the step are discharged by the flow of ink in the second common liquid chamber 102. Since the bubbles move to the outlet 44 side, it is possible to suppress the bubbles from growing in the second common liquid chamber 102 and flowing into the pressure chamber 12.

In this way, the second flow passage 202 and the ninth flow passage 209, which are communication passages that connect the pressure chamber 12 and the nozzle 21, communicate with each other in the second direction Y, that is, the first common liquid chamber 101 and the second common liquid chamber 101. By arranging on the center side between the common liquid chamber 102 and the common liquid chamber 102, the Z2 side opening of the first common liquid chamber 101 and the second common liquid chamber 102 can be achieved without the communication plate 15 increasing in size in the second direction Y. The compliance portion 494 can be formed to have a large area, and the compliance portion 494 is formed to have a large area so that the pressure variation of the ink in the individual flow path 200 can be prevented by the compliance portion of the first common liquid chamber 101 and the second common liquid chamber 102. Can be absorbed at 494. Therefore, it is possible to reduce variations in ink droplet ejection characteristics and stabilize ink droplet ejection.

As described above, in the recording head 1 which is an example of the liquid ejecting head of the present embodiment, energy generation for causing a pressure change in the flow path substrate in which the flow path is formed and the ink that is the liquid in the flow path is generated. A piezoelectric actuator 300 that is an element, and the flow path communicates with the first common liquid chamber 101, the second common liquid chamber 102, and the first common liquid chamber 101 and the second common liquid chamber 102. The individual flow channel 200 includes an individual flow channel 200 through which ink flows from the common liquid chamber 101 toward the second common liquid chamber 102. The individual flow channel 200 is a pressure chamber in which a pressure change is caused by the nozzle 21 communicating with the outside and the piezoelectric actuator 300. Of the plurality of individual flow passages 200, the three individual flow passages 200 adjacent to each other in the first direction X, which is the direction in which the nozzles 21 are juxtaposed, respectively include the first common liquid chamber 101 and the second common flow chamber 101. The first individual flow channel 200A and the second individual flow channel 200B, which are two individual flow channels 200 that communicate with the common liquid chamber 102 and are adjacent to each other in the first direction X that is the parallel installation direction, are the first common liquid chamber 101. The arrangement order of the pressure chambers and the nozzles 21 is different in the direction in which the ink flows from to the second common liquid chamber 102.

In this way, the first individual flow paths 200A and the second individual flow paths 200B, which are the individual flow paths 200 in which the pressure chambers 12 and the nozzles 21 are arranged in different order, are arranged so as to be adjacent to each other in the first direction X. Thus, the pressure chambers 12 of the adjacent individual flow paths 200 can be arranged at different positions in the second direction Y. Therefore, as compared with the case where the pressure chambers 12 and the nozzles 21 are arranged in parallel with each other in the same order, the width of the pressure chambers 12 in the direction in which the pressure chambers 12 are arranged is made wider, and the volume excluded by the piezoelectric actuator 300 of the pressure chambers 12 is increased. The flow path substrate can be downsized by increasing the discharge weight of the ink droplets or by arranging the pressure chambers 12 in the first direction X with high density. Further, since the pressure chambers 12 of the individual flow passages 200 adjacent to each other can be arranged at positions displaced in the second direction Y, the arrangement density of the pressure chambers 12 of the individual flow passages 200 adjacent to each other in the first direction X can be arranged. Therefore, the nozzles 21 can be arranged at high density.

In addition, by connecting the individual flow paths 200 independently to the first common liquid chamber 101 and the second common liquid chamber 102 without joining the individual flow paths 200 in the middle, It is possible to suppress the occurrence of crosstalk due to the influence of pressure fluctuation in the. That is, if the individual flow passages 200 join each other before communicating with the first common liquid chamber 101 and the second common liquid chamber 102, the change in ink pressure in one individual flow passage 200 causes the other individual flow passage 200 to change. 200 is greatly affected, and the ink ejection characteristics vary. In the present embodiment, since the plurality of individual flow paths 200 communicate only with the first common liquid chamber 101 and the second common liquid chamber 102 having a relatively large volume, the plurality of individual flow paths 200 are mutually connected. It is possible to reduce the influence of pressure fluctuation and suppress variations in ink ejection characteristics.

Further, since the first common liquid chamber 101 and the second common liquid chamber 102 are communicated with each other only by the individual flow passage 200, the ink is arranged in the first common liquid chamber 101 in the parallel direction of the individual flow passages 200. The ink does not flow in the direction X of 1, and the pressure difference between the inks supplied to the plurality of individual flow paths 200 is unlikely to occur, and the ejection characteristics of the ink ejected from the nozzles 21 are unlikely to vary. By the way, when the ink flows through the first common liquid chamber 101 in the first direction X, the pressure of the ink supplied to the individual flow path 200 communicating with the upstream side of the first common liquid chamber 101 is lower than that of the ink supplied to the individual flow passage 200. The pressure of the ink supplied to the individual flow paths 200 decreases, and variations in the pressure of the ink supplied to the individual flow paths 200 tend to cause variations in the ink ejection characteristics.

Further, in the recording head 1 of the present embodiment, the plurality of individual flow passages 200 includes the first individual flow passage 200</b>A in which the nozzle 21 is provided on the downstream side of the pressure chamber 12, and the nozzle 21 is higher than the pressure chamber 12. The second individual flow path 200B provided on the upstream side is provided, and the first individual flow path 200A and the second individual flow path 200B are arranged at positions adjacent to each other in the first direction X which is the parallel installation direction. The first individual flow path 200A is the first communication path extending from the pressure chamber 12 to the nozzle 21 in the third direction Z which is the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens. The second individual flow path 200B has a flow path 202, and the second individual flow path 200B has a ninth flow path 209 which is a second communication path extending in the third direction Z between the pressure chamber 12 and the nozzle 21. The flow path 202 has an opening on the nozzle 21 side located closer to the second common liquid chamber 102 side than an opening on the pressure chamber 12 side, and a ninth flow path 209 has an opening on the nozzle 21 side from the opening on the pressure chamber 12 side. Is also located on the first common liquid chamber 101 side.

By thus shifting the opening of the second flow passage 202, which is the first communication passage, on the nozzle 21 side and the opening of the ninth flow passage 209, which is the second communication passage, on the nozzle 21 side of the first common liquid chamber 101. The opening can be widened to the second common liquid chamber 102 side and the opening of the second common liquid chamber 102 on the nozzle 21 side can be widened to the first common liquid chamber 101 side. Therefore, the compliance part 494 can be formed in a relatively large area, and the pressure fluctuation of the ink in the first common liquid chamber 101 and the second common liquid chamber 102 can be absorbed by the compliance part 494.

Further, in the present embodiment, the opening area of the first common liquid chamber 101 on the nozzle 21 side is provided by providing the first narrow portion 16a and the first wide portion 16b in the first communication portion 16 of the first common liquid chamber 101. Although the opening area is larger than the opening area on the side of the flow path forming substrate 10, it is not particularly limited to this. Here, modified examples of the first common liquid chamber 101 and the second common liquid chamber 102 will be described with reference to FIGS. 21 and 22. 21 is a cross-sectional view showing a modified example of the recording head of the third embodiment, which is a cross-sectional view taken along the line AA′ of FIG. 22 is a cross-sectional view of a modification of the recording head of the third embodiment, which is taken along the line BB′ of FIG.

As shown in FIGS. 21 and 22, the side surface of the first communication section 16 of the first common liquid chamber 101 on the second common liquid chamber 102 side is inclined so that the nozzle 21 side widens in the second direction Y. It is provided.

Similarly, the side surface of the second communication portion 17 of the second common liquid chamber 102 on the side of the first common liquid chamber 101 is provided so as to be inclined so that the nozzle 21 side widens in the second direction Y.

Even with such a configuration, as described above, the opening area of the first common liquid chamber 101 and the second common liquid chamber 102 on the Z2 side, which is the nozzle 21 side, is widened, and the compliance portion 494 has a relatively large area. Can be formed. In addition, by sloping the side surface of the first common liquid chamber 101 without providing a step on the side surface, it is possible to suppress bubbles from staying on the step. Of course, such inclined side surfaces may be applied only to the side surfaces of the first wide portion 16b and the second wide portion 17b shown in FIGS.

Further, in the present embodiment, by providing the eighteenth flow passage 218 and the twenty-first flow passage 221 which are horizontal flow passages in the middle of the second flow passage 202 and the ninth flow passage 209, the second flow passage 202 and the second flow passage 202 Although the opening of the nine flow paths 209 on the nozzle 21 side is moved inward in the second direction Y with respect to the opening on the pressure chamber 12 side, the invention is not particularly limited to this. Here, modified examples of the second flow path 202 and the ninth flow path 209 will be described with reference to FIGS. 23 and 24. 23 is a cross-sectional view showing a modified example of the recording head of the third embodiment, which is a cross-sectional view taken along the line AA′ of FIG. FIG. 24 is a cross-sectional view showing a modified example of the recording head of the third embodiment, which is a cross-sectional view taken along the line BB′ of FIG.

As shown in FIG. 23, the second flow path 202 is provided so as to be inclined with respect to the third direction Z. Specifically, in the second flow path 202, the end communicating with the first pressure chamber 12A is the first common liquid chamber 101 side, and the end communicating with the first nozzle 21A is the second common liquid chamber 102 side. So that it is inclined in the second direction Y. As a result, the opening of the first common liquid chamber 101 on the Z2 side, which is the nozzle 21 side, can be widened to the second common liquid chamber 102 side, and the first compliance portion 494A can be formed in a relatively large area.

Further, as shown in FIG. 24, the ninth flow path 209 is provided so as to be inclined with respect to the third direction Z. Specifically, in the ninth flow path 209, the end communicating with the second pressure chamber 12B is the second common liquid chamber 102 side, and the end communicating with the second nozzle 21B is the first common liquid chamber 101 side. So that it is inclined in the second direction Y. As a result, the opening of the second common liquid chamber 102 on the Z2 side, which is the nozzle 21 side, can be widened to the first common liquid chamber 101 side, and the second compliance portion 494B can be formed in a relatively large area.

The inclined second flow passage 202 and the ninth flow passage 209 shown in FIGS. 23 and 24 are combined with the inclined wall surfaces of the first wide portion 16b and the second wide portion 17b shown in FIGS. Good.

In the present embodiment, the first nozzles 21A and the second nozzles 21B are provided at different positions in the second direction Y, so that the first nozzles 21A are arranged side by side in the first direction X. 22A and a second nozzle row 22B in which the second nozzles 21B are arranged in the first direction X, two rows are arranged in the second direction Y, that is, the so-called nozzle 21 is arranged in the first direction X. However, the configuration is not particularly limited to this, and the first nozzle 21A and the second nozzle 21B may be arranged in the second direction Y in the same manner as in FIG. 5 of the first embodiment described above. The nozzles 21 may be arranged at the same position, and the nozzles 21 may be arranged on a straight line along the first direction X. In the case of such a configuration, although not particularly shown, the first nozzle 21A is provided at a position communicating with the middle of the fifteenth flow path 215, and the second nozzle 21B communicates with the middle of the sixteenth flow path 216. It should be provided as follows. That is, the nozzle 21 may be arranged in communication with the middle of the fifteenth flow channel 215 and the sixteenth flow channel 216, which are flow channels extending in the in-plane direction of the nozzle surface 20a where the nozzle 21 of the flow channel substrate opens. Good.

Further, in the recording head 1 of the present embodiment, the first pressure chamber 12A, which is the pressure chamber of the first individual flow path 200A, and the flow on the first common liquid chamber 101 side of the nozzle 21 in the second individual flow path 200B. The sixth flow path 206, which is a flow path and extends in the in-plane direction of the nozzle surface 20a, is located at a position where they do not overlap each other when viewed in a plan view from the third direction Z, which is the direction perpendicular to the nozzle surface 20a. Deploy. Of course, the present invention is not limited to this, and the first pressure chamber 12A and the sixth flow passage 206 may be arranged at positions where at least some of them overlap each other in a plan view from the third direction Z. As described above, by disposing the first pressure chamber 12A and the sixth flow path 206 at positions where they partially overlap each other in the third direction Z, the widths of the first pressure chamber 12A in the first direction X are compared. The first pressure chamber 12A can have a large excluded volume to increase the ejection characteristics of the ink droplets, especially the weight of the ink droplets.

Further, similarly, the second pressure chamber 12B of the second individual flow passage 200B and the fifth flow passage 205 of the first individual flow passage 200A also have positions where at least some of them overlap each other in a plan view from the third direction Z. It may be arranged at. In this way, by disposing the second pressure chamber 12B and the fifth flow path 205 at positions where they partially overlap each other in the third direction Z, the widths of the second pressure chamber 12B in the first direction X are compared. The discharge volume of the second pressure chamber 12B can be increased to increase the ejection characteristics of the ink droplets, especially the weight of the ink droplets.

(Embodiment 4)
FIG. 25 is a cross-sectional view of an ink jet recording head which is an example of the liquid jet head according to the fourth embodiment of the present invention, and is a cross-sectional view taken along the line AA′ of FIG. 1. FIG. 26 is a cross-sectional view of the inkjet recording head according to the fourth embodiment and is a cross-sectional view taken along the line BB′ of FIG. 1. FIG. 27 is a perspective view showing the flow path from the Z2 side. FIG. 28 is a cross-sectional view of the recording head according to the fourth embodiment and is a cross-sectional view taken along the line EE′, the line FF′ and the line GG′ of FIG. 25. The same members as those in the above-described embodiment are designated by the same reference numerals, and overlapping description will be omitted.

As shown in FIGS. 25 and 26, the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, the compliance substrate 49, the case member 40, and the like that form the flow path substrate include the first common liquid chamber 101 and the first common liquid chamber 101. Two common liquid chambers 102 and a plurality of individual flow paths 200 for flowing the ink from the first common liquid chamber 101 to the second common liquid chamber 102 are provided.

The individual flow passage has a first individual flow passage 200A having a first nozzle 21A and a second individual flow passage 200B having a second nozzle 21B.

As shown in FIG. 25, the first individual flow path 200A includes a first flow path 201, a first pressure chamber 12A, a second flow path 202, a first nozzle 21A, a third flow path 203, and a fourth flow path 204. And a fifth flow path 205.

In the present embodiment, the second flow path 202 is provided between the nozzle 21 and the first common liquid chamber 101 so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. The passage 202 corresponds to the upstream communication passage described in the claims.

Further, in the present embodiment, the fifth flow path 205 is provided between the nozzle 21 and the second common liquid chamber 102 so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. The five flow paths 205 correspond to the downstream communication path.

As shown in FIG. 26, the second individual flow passage 200B includes a sixth flow passage 206, a seventh flow passage 207, an eighth flow passage 208, a second nozzle 21B, a ninth flow passage 209, and a second pressure chamber 12B. And a tenth flow path 210.

In the present embodiment, the seventh flow path 207 is provided between the nozzle 21 and the first common liquid chamber 101 so as to extend in the third direction Z which is the direction perpendicular to the nozzle surface 20a. The passage 207 corresponds to the upstream communication passage described in the claims.

The ninth flow path 209 is provided so as to extend in the third direction Z, which is the direction perpendicular to the nozzle surface 20a, between the nozzle 21 and the second common liquid chamber 102, and the ninth flow path 209 is provided. It corresponds to the downstream communication passage.

Then, as shown in FIGS. 27 and 28, the individual flow path 200 has a third direction Z, which is the direction perpendicular to the nozzle surface 20 a where the nozzle 21 opens, between the nozzle 21 and the first common liquid chamber 101. Having the second flow passage 202 and the seventh flow passage 207 which are upstream communication passages extending in parallel to each other, and the upstream communication passages of the individual flow passages adjacent to each other in the first direction X which is the direction in which the nozzles 21 are arranged, that is, The second flow channel 202 of the first individual flow channel 200A and the seventh flow channel 207 of the second individual flow channel 200B do not overlap each other when viewed from the first direction X that is the direction in which the nozzles 21 are arranged in parallel. Have parts. In the present embodiment, the second flow path 202 and the seventh flow path 207 are arranged at positions that do not completely overlap in the second direction Y. Of course, the second flow channel 202 and the seventh flow channel 207 may partially overlap each other when they do not completely overlap each other when viewed in a plan view in the first direction X. As described above, the second flow path 202 and the seventh flow path 207 are arranged at different positions in the second direction Y, so that they are arranged in a so-called zigzag pattern along the first direction X. ..

With such a configuration, the rigidity of the wall between the second flow paths 202 adjacent to each other in the first direction X can be improved, and the wall of the second flow path 202 is separated by the pressure fluctuation when ejecting the ink droplets. It is possible to suppress the deformation, suppress the pressure absorption due to the deformation of the wall of the second flow path 202, and suppress the occurrence of crosstalk due to the decrease in the rigidity of the wall.

Similarly, the rigidity of the wall between the seventh flow paths 207 adjacent to each other in the first direction X can be improved, and the wall of the seventh flow path 207 can be deformed by the pressure fluctuation when ejecting the ink droplets. It is possible to suppress the pressure absorption due to, and to suppress the occurrence of crosstalk due to the decrease in the rigidity of the wall. By the way, when the second flow path 202 and the seventh flow path 207 are arranged at a position where they are completely overlapped with each other in a plan view from the first direction X, the second flow path 202 and the seventh flow path 207. The wall between and is thinly formed in the third direction Z, the wall is deformed by the pressure fluctuation of the ink in the second flow path 202 and the seventh flow path 207, and crosstalk occurs. Resulting in. Further, if the second flow passage 202 and the seventh flow passage 207 are arranged at positions separated in the first direction X in order to increase the rigidity of the walls of the second flow passage 202 and the seventh flow passage 207, the nozzles 21 are arranged at low density in the first direction X, and the flow path substrate becomes large in the first direction X. As in the present embodiment, by arranging the second flow path 202 and the seventh flow path 207 so that at least a part thereof does not overlap in a plan view from the first direction X, the second flow path 202 and the Even if the 7-channel 207 and the 7-channel 207 are arranged relatively close to the first direction X, it is possible to prevent the rigidity of the wall from lowering, and to suppress the density of the nozzles 21 and the size of the channel substrate from increasing. You can

In addition, in the present embodiment, the individual flow passage 200 has a downstream communication passage extending between the nozzle 21 and the second common liquid chamber 102 in the third direction Z which is the direction perpendicular to the nozzle surface 20 a where the nozzle 21 opens. Which have the fifth flow passage 205 and the ninth flow passage 209, which are adjacent to each other in the first direction X, which is the direction in which the nozzles 21 are arranged side by side, that is, the first individual flow passage 200A. The fifth flow path 205 and the ninth flow path 209 of the second individual flow path 200B have portions that do not overlap each other when viewed from the first direction X that is the direction in which the nozzles 21 are arranged side by side. In the present embodiment, the fifth flow passage 205 and the ninth flow passage 209 are arranged at positions that do not completely overlap in the second direction Y. Of course, the fifth flow channel 205 and the ninth flow channel 209 may partially overlap each other if they do not completely overlap each other when viewed in a plan view in the first direction X. As described above, the fifth flow passage 205 and the ninth flow passage 209 are arranged in different positions in the second direction Y, and are thus arranged in a so-called zigzag pattern along the first direction X. ..

With such a configuration, the rigidity of the wall between the fifth flow paths 205 adjacent to each other in the first direction X can be improved, and the wall of the fifth flow path 205 is separated due to the pressure fluctuation when ejecting the ink droplets. It is possible to suppress deformation, suppress pressure absorption, and reduce crosstalk. Similarly, the rigidity of the wall between the ninth flow paths 209 adjacent to each other in the first direction X can be improved, and the wall of the ninth flow path 209 is deformed due to pressure fluctuations when ejecting ink droplets. Can be suppressed, pressure absorption can be suppressed, and crosstalk can be reduced.

By the way, when the fifth flow path 205 and the ninth flow path 209 are arranged at positions where they are completely overlapped with each other in a plan view from the first direction X, the fifth flow path 205 and the ninth flow path 209. The wall between and is thinly formed in the third direction Z, and the wall is deformed due to the pressure fluctuation of the ink in the fifth flow passage 205 and the ninth flow passage 209, and crosstalk occurs. Resulting in. Further, in order to increase the rigidity of the walls of the fifth flow path 205 and the ninth flow path 209, if the fifth flow path 205 and the ninth flow path 209 are arranged at positions separated in the first direction X, the nozzle 21 are arranged at low density in the first direction X, and the flow path substrate becomes large in the first direction X. As in the present embodiment, by arranging the fifth flow path 205 and the ninth flow path 209 so that at least a part thereof does not overlap in a plan view from the first direction X, the fifth flow path 205 and the ninth flow path 205 Even if the nine flow paths 209 and the nine flow paths 209 are arranged relatively close to each other in the first direction X, it is possible to prevent the rigidity of the wall from decreasing, and to suppress the density of the nozzles 21 and the size of the flow path substrate from increasing. You can

Also in the present embodiment, the sixth flow passage 206 and the first pressure chamber 12A of the first individual flow passage 200A are arranged at different positions in the third direction Z which is the direction perpendicular to the nozzle surface 20a. .. Specifically, the first pressure chamber 12A is provided on the Z1 side of the first communication plate 151, the sixth flow path 206 is provided on the Z2 side of the first communication plate 151, and the first pressure chamber 12A is provided. The sixth flow path 206 and the sixth flow path 206 are arranged at different positions in the third direction Z. Therefore, even if the first pressure chamber 12A and the sixth flow path 206 are arranged close to each other in the first direction X, it is possible to prevent the partition wall that separates the first pressure chamber 12A from being thin, It is possible to suppress the ink pressure in the first pressure chamber 12A from being absorbed by the deformation of the partition wall of the first pressure chamber 12A, and to prevent the ejection characteristics from varying. Further, in the present embodiment, the first pressure chamber 12A and the sixth flow passage 206 are arranged at positions where they do not overlap with each other in plan view from the third direction Z. Similarly, the first pressure chamber 12A and the sixth flow passage 206 may be arranged so that at least some of them overlap each other.

Further, the second pressure chamber 12B and the fifth flow passage 205 of the first individual flow passage 200A are arranged at different positions in the third direction Z which is the direction perpendicular to the nozzle surface 20a. Specifically, the second pressure chamber 12B is provided on the Z1 side of the first communication plate 151, the fifth flow path 205 is provided on the Z2 side of the first communication plate 151, and the second pressure chamber 12B is provided. The fifth flow path 205 and the fifth flow path 205 are arranged at different positions in the third direction Z. Therefore, even if the second pressure chamber 12B and the fifth flow path 205 are arranged close to each other in the first direction X, it is possible to prevent the partition wall that separates the second pressure chamber 12B from being thin, It is possible to suppress variations in ejection characteristics due to deformation of the partition walls of the second pressure chamber 12B and absorption of pressure. In addition, in the present embodiment, the second pressure chamber 12B and the fifth flow passage 205 are arranged at a position where they do not overlap with each other in a plan view from the third direction Z, but the second pressure chamber 12B and the fifth flow passage are arranged. You may arrange|position so that 205 may mutually overlap at least one part.

As described above, in the recording head 1 which is an example of the liquid ejecting head of the present embodiment, energy generation for causing a pressure change in the flow path substrate in which the flow path is formed and the ink that is the liquid in the flow path is generated. A piezoelectric actuator 300 that is an element, and the flow path communicates with the first common liquid chamber 101, the second common liquid chamber 102, and the first common liquid chamber 101 and the second common liquid chamber 102. The individual flow channel 200 includes an individual flow channel 200 through which ink flows from the common liquid chamber 101 toward the second common liquid chamber 102. The individual flow channel 200 is a pressure chamber in which a pressure change is caused by the nozzle 21 communicating with the outside and the piezoelectric actuator 300. Of the plurality of individual flow passages 200, the three individual flow passages 200 adjacent to each other in the first direction X, which is the direction in which the nozzles 21 are juxtaposed, respectively include the first common liquid chamber 101 and the second common flow chamber 101. The first individual flow channel 200A and the second individual flow channel 200B, which are two individual flow channels 200 that communicate with the common liquid chamber 102 and are adjacent to each other in the first direction X that is the parallel installation direction, are the first common liquid chamber 101. The arrangement order of the pressure chambers and the nozzles 21 is different in the direction in which the ink flows from to the second common liquid chamber 102.

In this way, the first individual flow paths 200A and the second individual flow paths 200B, which are the individual flow paths 200 in which the pressure chambers 12 and the nozzles 21 are arranged in different order, are arranged so as to be adjacent to each other in the first direction X. Thus, the pressure chambers 12 of the adjacent individual flow paths 200 can be arranged at different positions in the second direction Y. Therefore, as compared with the case where the pressure chambers 12 and the nozzles 21 are arranged in parallel with each other in the same order, the width of the pressure chambers 12 in the direction in which the pressure chambers 12 are arranged is made wider, and the volume excluded by the piezoelectric actuator 300 of the pressure chambers 12 is increased. The flow path substrate can be downsized by increasing the discharge weight of the ink droplets or by arranging the pressure chambers 12 in the first direction X with high density. Further, since the pressure chambers 12 of the individual flow passages 200 adjacent to each other can be arranged at positions displaced in the second direction Y, the arrangement density of the pressure chambers 12 of the individual flow passages 200 adjacent to each other in the first direction X can be arranged. Therefore, the nozzles 21 can be arranged at high density.

In addition, by connecting the individual flow paths 200 independently to the first common liquid chamber 101 and the second common liquid chamber 102 without joining the individual flow paths 200 in the middle, It is possible to suppress the occurrence of crosstalk due to the influence of pressure fluctuation in the. That is, if the individual flow passages 200 join each other before communicating with the first common liquid chamber 101 and the second common liquid chamber 102, the change in ink pressure in one individual flow passage 200 causes the other individual flow passage 200 to change. 200 is greatly affected, and the ink ejection characteristics vary. In the present embodiment, since the plurality of individual flow paths 200 communicate only with the first common liquid chamber 101 and the second common liquid chamber 102 having a relatively large volume, the plurality of individual flow paths 200 are mutually connected. It is possible to reduce the influence of pressure fluctuation and suppress variations in ink ejection characteristics.

Further, since the first common liquid chamber 101 and the second common liquid chamber 102 are communicated with each other only by the individual flow passage 200, the ink is arranged in the first common liquid chamber 101 in the parallel direction of the individual flow passages 200. The ink does not flow in the direction X of 1, and the pressure difference between the inks supplied to the plurality of individual flow paths 200 is unlikely to occur, and the ejection characteristics of the ink ejected from the nozzles 21 are unlikely to vary. By the way, when the ink flows through the first common liquid chamber 101 in the first direction X, the pressure of the ink supplied to the individual flow path 200 communicating with the upstream side of the first common liquid chamber 101 is lower than that of the ink supplied to the individual flow passage 200. The pressure of the ink supplied to the individual flow paths 200 decreases, and variations in the pressure of the ink supplied to the individual flow paths 200 tend to cause variations in the ink ejection characteristics.

Further, in the recording head 1 of the present embodiment, the individual flow path 200 extends between the nozzle 21 and the first common liquid chamber 101 in the third direction Z, which is the direction perpendicular to the nozzle surface 20a where the nozzle 21 opens. The second flow passage 202 and the seventh flow passage 207, which are upstream communication passages that extend, and the upstream flow passages of the first individual flow passage 200A and the second individual flow passage 200B that are the two individual flow passages 200, that is, The second flow path 202 and the seventh flow path 207 have portions that do not overlap each other when viewed in the first direction X, which is the parallel installation direction.

In this way, by disposing the second flow path 202 and the seventh flow path 207 so as to have portions that do not overlap each other in a plan view from the first direction X, the second flow adjacent to each other in the first direction X can be obtained. The rigidity of the wall between the passages 202 can be improved, the deformation of the wall of the second flow path 202 due to the pressure fluctuation when ejecting the ink droplet is suppressed, and the wall of the second flow path 202 is deformed. By doing so, it is possible to suppress the pressure absorption and suppress the occurrence of crosstalk due to the decrease in the rigidity of the wall. Similarly, the rigidity of the wall between the seventh flow paths 207 adjacent to each other in the first direction X can be improved, and the wall of the seventh flow path 207 can be deformed by the pressure fluctuation when ejecting the ink droplets. It is possible to suppress the pressure absorption due to, and to suppress the occurrence of crosstalk due to the decrease in the rigidity of the wall.

By the way, when the second flow path 202 and the seventh flow path 207 are arranged at a position where they are completely overlapped with each other in a plan view from the first direction X, the second flow path 202 and the seventh flow path 207. The wall between and is thinly formed in the third direction Z, the wall is deformed by the pressure fluctuation of the ink in the second flow path 202 and the seventh flow path 207, and crosstalk occurs. Resulting in. Further, if the second flow passage 202 and the seventh flow passage 207 are arranged at positions separated in the first direction X in order to increase the rigidity of the walls of the second flow passage 202 and the seventh flow passage 207, the nozzles 21 are arranged at low density in the first direction X, and the flow path substrate becomes large in the first direction X. As in the present embodiment, by arranging the second flow path 202 and the seventh flow path 207 so that at least a part thereof does not overlap in a plan view from the first direction X, the second flow path 202 and the Even if the 7-channel 207 and the 7-channel 207 are arranged relatively close to the first direction X, it is possible to prevent the rigidity of the wall from lowering, and to suppress the density of the nozzles 21 and the size of the channel substrate from increasing. You can

In the present embodiment, the first nozzles 21A and the second nozzles 21B are provided at different positions in the second direction Y, so that the first nozzles 21A are arranged side by side in the first direction X. 22A and a second nozzle row 22B in which the second nozzles 21B are arranged in the first direction X, two rows are arranged in the second direction Y, that is, the so-called nozzle 21 is arranged in the first direction X. However, the configuration is not particularly limited to this, and the first nozzle 21A and the second nozzle 21B may be arranged in the second direction Y in the same manner as in FIG. 5 of the first embodiment described above. The nozzles 21 may be arranged at the same position, and the nozzles 21 may be arranged on a straight line along the first direction X. In such a configuration, although not particularly shown, the first nozzle 21A is provided at a position communicating with the middle of the third flow path 203, and the second nozzle 21B communicates with the middle of the eighth flow path 208. It should be provided as follows. That is, the nozzle 21 may be arranged in communication with the middle of the third flow passage 203 and the eighth flow passage 208, which are the flow passages extending in the in-plane direction of the nozzle surface 20a where the nozzle 21 of the flow passage substrate opens. Good. Of course, the first nozzle 21A and the second nozzle 21B are provided at positions communicating with the middle of the third flow path 203 and the eighth flow path 208, respectively, and the first nozzle 21A and the second nozzle 21B are in the second direction. They may be arranged at different positions depending on Y.

(Other embodiments)
Although the respective embodiments of the present invention have been described above, the basic configuration of the present invention is not limited to the above.

For example, in each of the above-described embodiments, a configuration in which one first common liquid chamber 101 and one second common liquid chamber 102 are provided on one flow path substrate has been illustrated, but the present invention is not particularly limited to this. Absent.

Here, a modified example of the recording head 1 will be described with reference to FIGS. 29 and 30. Note that FIG. 29 is a schematic cross-sectional view for explaining the flow channel configuration and is a schematic cross-sectional view according to the line AA′ in FIG. 1. FIG. 30 is a schematic cross-sectional view for explaining the flow channel configuration and is a schematic cross-sectional view according to the line BB′ of FIG. 1.

As shown in FIGS. 29 and 30, on the flow path substrate 400, the first common liquid chamber 101 and the second common liquid chamber 102 are alternately and repeatedly arranged in the second direction Y. Further, a plurality of individual flow paths 200 that supply the ink from the first common liquid chamber 101 to the second common liquid chamber 102 are provided. A plurality of individual flow paths 200 are provided along the first direction X for one set including one first common liquid chamber 101 and one second common liquid chamber 102. In the second direction Y, the individual flow path 200 is located between the first common liquid chamber 101 and the second common liquid chamber 102.

The individual flow passage 200 has a first individual flow passage 200A having a first nozzle 21A and a second individual flow passage 200B having a second nozzle 21B.

As shown in FIG. 29, the first individual flow passage 200A has a first flow passage 201, a first pressure chamber 12A, a second flow passage 202, a first nozzle 21A and a fifteenth flow passage 215.

As described above, the first individual flow path 200</b>A has the first flow path 201, the pressure chamber 12, and the second flow path sequentially from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber 102. It has a flow channel 202, a first nozzle 21A, and a fifteenth flow channel 215. That is, in the present embodiment, the first individual flow passage 200A has the first pressure chamber 12A from the upstream side to the downstream side with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. And the first nozzle 21A are arranged in this order.

As shown in FIG. 30, the second individual flow passage 200B has a sixteenth flow passage 216, a second nozzle 21B, a ninth flow passage 209, a second pressure chamber 12B and a tenth flow passage 210.

In this way, the second individual flow passage 200B is arranged in order from the upstream side communicating with the first common liquid chamber 101 to the downstream side communicating with the second common liquid chamber 102 in order of the 16th flow passage 216, the second nozzle 21B, and the second nozzle 21B. It includes a ninth flow path 209, a second pressure chamber 12B, and a tenth flow path 210. That is, in the present embodiment, the second individual flow path 200B is connected to the second nozzle 21B from the upstream side to the downstream side with respect to the flow of the ink flowing from the first common liquid chamber 101 to the second common liquid chamber 102. The second pressure chamber 12B is arranged in this order. That is, in the first individual flow path 200A and the second individual flow path 200B, the order of the pressure chamber 12 and the nozzle 21 is different with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. Are arranged as follows. In the present embodiment, one pressure chamber 12 and one nozzle 21 are provided in each individual flow channel 200, so the first individual flow channel 200A and the second individual flow channel 200B are the pressure chamber 12 and the nozzle 21. The order of and is reversed.

And in this embodiment, the 1st nozzle 21A and the 2nd nozzle 21B are located in a line on the straight line of the 1st direction X. Incidentally, the first nozzle 21A and the second nozzle 21B do not have to be aligned on a straight line in the first direction X. 29 and 30, only two sets of the first common liquid chamber 101 and the second common liquid chamber 102 are shown, but three or more sets may be provided in the second direction Y, They may be arranged in a so-called matrix. Further, the common flexible cable 120 may be connected to the piezoelectric actuators 300 corresponding to three or more sets of the first common liquid chamber 101 and the second common liquid chamber 102.

Further, modified examples of the recording head 1 of FIGS. 29 and 30 are shown in FIGS. 31 and 32. Note that FIG. 31 is a schematic cross-sectional view for explaining the flow channel configuration and is a schematic cross-sectional view according to the line AA′ in FIG. 1. 32 is a schematic cross-sectional view for explaining the flow path configuration and is a schematic cross-sectional view according to the line BB′ of FIG. 1.

As shown in FIGS. 31 and 32, the first common liquid chamber 101 and the second common liquid chamber 102 are alternately arranged in the second direction Y.

Ink is sent from one first common liquid chamber 101 to the second common liquid chambers 102 on both sides in the second direction Y by the two rows of the individual flow paths 200. Further, the ink is sent to the one second common liquid chamber 102 from the first common liquid chambers 101 on both sides in the second direction Y by the two rows of the individual flow paths 200. That is, the first common liquid chamber 101 and the two rows of the individual channels 200 are communicated with each other, and the one second common liquid chamber 102 and the two rows of the individual channels 200 are communicated with each other. In this way, the first common liquid chamber 101 and the second common liquid chamber 102 are shared by the two rows of the individual flow paths 200, so that the nozzles 21 are arranged at high density and the flow path substrate 400 is downsized. Can be planned.

Further, in each of the above-described embodiments, the configuration in which the individual flow path 200 is provided between the first common liquid chamber 101 and the second common liquid chamber 102 in the second direction Y has been illustrated, but this is particularly the case. Not limited. Here, a modified example of the recording head 1 will be described with reference to FIGS. Note that FIG. 33 is a schematic cross-sectional view for explaining the flow path configuration and is a schematic cross-sectional view according to the line AA′ in FIG. 1. 34 is a schematic cross-sectional view for explaining the flow path configuration and is a schematic cross-sectional view according to the line BB′ of FIG. 1. FIG. 35 is a diagram schematically showing the flow path.

As shown in FIGS. 33 and 34, the first common liquid chamber 101 and the second common liquid chamber 102 are juxtaposed in the second direction Y. Further, each nozzle 21 of the individual flow path 200 that sends ink from the first common liquid chamber 101 to the second common liquid chamber 102 is connected to the second common liquid chamber 102 of the first common liquid chamber 101 in the second direction Y. Are located on the opposite side.

Specifically, the individual flow channel 200 has a first individual flow channel 200A having the first nozzle 21A and a second individual flow channel 200B having the second nozzle 21B.

As shown in FIG. 33, the first individual flow path 200A has a 23rd flow path 223, a first pressure chamber 12A, a 24th flow path 224, a first nozzle 21A, and a 25th flow path 225.

The 23rd flow path 223 extends along the second direction Y from the first common liquid chamber 101 toward the side opposite to the second common liquid chamber 102 in the second direction Y.
The first pressure chamber 12A is arranged on the Z1 side of the flow path substrate 400.
The 24th flow path 224 is formed along the 3rd direction Z, and connects the 1st pressure chamber 12A and the 1st nozzle 21A.
The 25th flow path 225 is formed along the second direction Y, and connects the 24th flow path 224 and the second common liquid chamber 102.

That is, the first individual flow path 200A extends from the first common liquid chamber 101 toward the side opposite to the second common liquid chamber 102 in the second direction Y and communicates with the second common liquid chamber 102. Are provided.

In such a first individual flow path 200A, the first pressure chamber 12A and the first nozzle 21A are arranged in this order in the direction of ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. Has been done.

As shown in FIG. 34, the second individual flow path 200B includes a 26th flow path 226, a 27th flow path 227, a second nozzle 21B, a 28th flow path 228, a second pressure chamber 12B, and a 29th flow path 229. It is equipped with.

The 26th flow path 226 extends from the first common liquid chamber 101 toward the Z2 side in the third direction Z.
The 27th flow channel 227 extends from the 26th flow channel 226 toward the side opposite to the second common liquid chamber 102 in the second direction Y.
The 28th flow path 228 is extended along the third direction Z at a position communicating with the second nozzle 21B.
The second pressure chamber 12B is arranged at a position different from the first pressure chamber 12A in the second direction Y.
The 29th flow path 229 extends along the second direction Y so as to connect the second pressure chamber 12B and the second common liquid chamber 102.

That is, the second individual flow path 200B extends from the first common liquid chamber 101 toward the opposite side of the second common liquid chamber 102 in the second direction Y and communicates with the second common liquid chamber 102. Are provided.

In such a second individual flow path 200B, the second nozzle 21B and the second pressure chamber 12B are arranged in this order with respect to the direction in which the ink flows from the first common liquid chamber 101 to the second common liquid chamber 102. Has been done. That is, as shown in FIG. 35, in the first individual flow passage 200A and the second individual flow passage 200B, the pressure chamber 12 is formed with respect to the ink flow from the first common liquid chamber 101 to the second common liquid chamber 102. The nozzles 21 are arranged in a different order. In the present embodiment, one pressure chamber 12 and one nozzle 21 are provided in each individual flow channel 200, so the first individual flow channel 200A and the second individual flow channel 200B are the pressure chamber 12 and the nozzle 21. The order of and is reversed.

In such a configuration, the order of the pressure chamber 12 and the nozzle 21 is different between the first individual flow passage 200A and the second individual flow passage 200B, so that the first pressure chamber 12A and the second pressure chamber 12B are separated from each other. The pressure chambers 12 can be arranged at different positions in the second direction Y, and the width of the pressure chambers 12 in the first direction X, which is the direction in which the pressure chambers 12 are juxtaposed, can be increased to increase the excluded volume, or to make the pressure chambers 12 highly dense. Can be placed.

Further, in the recording head 1 of FIGS. 33 and 34, the first nozzle 21A and the second nozzle 21B are connected to the first common liquid chamber 101 and the second common liquid chamber 102 in the second direction Y, respectively. Although it is arranged on the side, it may be arranged on both sides. That is, the individual flow paths 200 are provided on both sides in the second direction Y with respect to one first common liquid chamber 101, and are individually provided on both sides in the second direction Y with respect to one second common liquid chamber 102. The flow path 200 may be provided.

Note that, as shown in FIGS. 33 and 34 described above, in the configuration in which the nozzle 21 is not provided between the first common liquid chamber 101 and the second common liquid chamber 102 in a plan view from the third direction Z. On the other hand, in the configuration in which the nozzle 21 is provided between the first common liquid chamber 101 and the second common liquid chamber 102 in the plan view from the third direction Z as in the above-described embodiments, the individual flow is different. The structure of the passage 200 can be simplified, and the communication plate 15 can be prevented from being multilayered.

Further, in each of the above-described embodiments, the configuration in which each of the individual flow paths 200 is provided with one nozzle 21 and one pressure chamber 12 is illustrated, but the number of nozzles 21 and pressure chambers 12 is not particularly limited. Two or more nozzles 21 may be provided for one pressure chamber 12, or two or more pressure chambers 12 may be provided for one nozzle 21. However, the ink droplets are simultaneously ejected from one nozzle 21 provided in one individual flow path 200 in one ejection cycle. That is, even if a plurality of nozzles 21 are provided in one individual flow path 200, either the ink droplets are simultaneously ejected from the plurality of nozzles 21 or the non-ejection is not performed at the same time. Good. That is, in the configuration in which a plurality of nozzles 21 are provided in one individual flow passage 200, it is sufficient that ink droplets are ejected and non-ejected from the plurality of nozzles 21 at the same time.

Further, in each of the above-described embodiments, the flow channel substrate has the flow channel forming substrate 10, the communication plate 15, the nozzle plate 20, the compliance substrate 49, the case member 40, etc., but is not particularly limited to this. Instead, the flow path substrate may be a single substrate or may be a laminate of two or more substrates. For example, the flow channel substrate may include the flow channel forming substrate 10 and the nozzle plate 20, and may not include the communication plate 15, the compliance substrate 49, and the case member 40. Further, one pressure chamber 12 may be formed by a plurality of flow passage forming substrates 10, or the pressure chamber 12, the first common liquid chamber 101, and the second common liquid chamber 102 may be formed in the flow passage forming substrate 10. May be.

Further, in each of the above-described embodiments, the thin film type piezoelectric actuator 300 is used as the energy generating element that causes the pressure change in the pressure chamber 12, but the invention is not particularly limited to this, and, for example, a green sheet is attached. It is possible to use a thick film type piezoelectric actuator formed by the above method, or a longitudinal vibration type piezoelectric actuator in which a piezoelectric material and an electrode forming material are alternately laminated to expand and contract in the axial direction. Further, as an energy generating element, a heating element is arranged in the pressure chamber, and a liquid droplet is ejected from a nozzle by a bubble generated by heat generation of the heating element, or static electricity is generated between the diaphragm and the electrode. It is possible to use a so-called electrostatic actuator or the like that deforms the vibrating plate by electrostatic force to eject droplets from the nozzle opening.

Here, an example of an ink jet recording apparatus which is an example of the liquid ejecting apparatus of the present embodiment will be described with reference to FIG. Note that FIG. 36 is a diagram showing a schematic configuration of the ink jet recording apparatus of the present invention.

As shown in FIG. 36, in an ink jet type recording apparatus I which is an example of a liquid ejecting apparatus, a plurality of recording heads 1 are mounted on a carriage 3. The carriage 3 on which the recording head 1 is mounted is provided on a carriage shaft 5 attached to the apparatus main body 4 so as to be axially movable. In this embodiment, the moving direction of the carriage 3 is the second direction Y.

Further, the apparatus main body 4 is provided with a tank 2 that is a storage unit that stores ink as a liquid. The tank 2 is connected to the recording head 1 via a supply pipe 2a such as a tube, and the ink from the tank 2 is supplied to the recording head 1 via the supply pipe 2a. Further, the recording head 1 and the tank 2 are connected via a discharge pipe 2b such as a tube, and the ink discharged from the recording head 1 is returned to the tank 2 via the discharge pipe 2b, so-called circulation is performed. Be seen. The tank 2 may be composed of a plurality of tanks.

Then, the driving force of the drive motor 7 is transmitted to the carriage 3 via a plurality of gears (not shown) and the timing belt 7a, so that the carriage 3 on which the recording head 1 is mounted is moved along the carriage shaft 5. On the other hand, the apparatus body 4 is provided with a carrying roller 8 as a carrying means, and the recording sheet S, which is an ejected medium such as paper, is carried by the carrying roller 8. The transporting means for transporting the recording sheet S is not limited to the transport roller 8 and may be a belt, a drum, or the like. In this embodiment, the conveyance direction of the recording sheet S is the first direction X.

In the above-described ink jet recording apparatus I, the recording head 1 is mounted on the carriage 3 and moves in the main scanning direction. However, the recording head 1 is not limited to this, and the recording head 1 is fixed, for example. The present invention can also be applied to a so-called line-type recording apparatus that performs printing only by moving a recording sheet S such as paper in the sub-scanning direction.

Here, an example of the liquid circulation system of the present embodiment will be described with reference to FIG. Note that FIG. 37 is a block diagram illustrating an ink jet recording system that is a liquid ejecting system of the present invention.

As shown in FIG. 37, an ink jet recording system (hereinafter, abbreviated as a recording system) that is a liquid circulation system includes a main tank 500, the recording head 1 of each of the above-described embodiments, a first tank 501, and A second tank 502, a compressor 503, a vacuum pump 504, a first liquid feed pump 505, and a second liquid feed pump 506 are provided.

The recording head 1 and the compressor 503 are connected to the first tank 501, and the ink in the first tank 501 is supplied to the recording head 1 at a predetermined positive pressure by the compressor 503.

The second tank 502 is connected to the first tank 501 via the first liquid feed pump 505, and the ink of the second tank 502 is fed to the first tank 501 by the first liquid feed pump 505.

Further, the recording head 1 and a vacuum pump 504 are connected to the second tank 502, and the ink of the recording head 1 is discharged to the second tank 502 with a predetermined negative pressure by the vacuum pump 504.

That is, the ink is supplied from the first tank 501 to the recording head 1, and the ink is discharged from the recording head 1 to the second tank 502. Then, the ink is circulated by the ink being sent from the second tank 502 to the first tank 501 by the first liquid sending pump 505.

A main tank 500 is connected to the second tank 502 via a second liquid feed pump 506, and ink consumed by the recording head 1 is replenished from the main tank 500 to the second tank 502. It The ink can be replenished from the main tank 500 to the second tank 502 at a timing when, for example, the liquid level of the ink in the second tank 502 becomes lower than a predetermined height.

In addition, in the present embodiment, the ink is supplied to the first common liquid chamber 101 and the ink is collected from the second common liquid chamber 102. However, the present invention is not particularly limited to this, and the ink is supplied to the second common liquid chamber 102. May be supplied to collect the ink from the first common liquid chamber 101. That is, even when the direction of the circulation flow of the individual flow passage 200 is changed, in the above-described recording head 1, the first individual flow passage 200A and the second individual flow passage 200B are changed from the first common liquid chamber 101 to the first common liquid chamber 101. The ejection characteristics of the ink droplets ejected from the nozzles 21 do not change because the shapes are opposite to each other with respect to the ink flowing direction toward the second common liquid chamber 102.

Further, in a non-ejection state in which ink droplets are not ejected from the nozzles 21 in a state where ink is allowed to flow from the first common liquid chamber 101 to the second common liquid chamber 102 via the individual flow path 200, the nozzles 21 are arranged side by side. The pressure difference of the ink based on the atmospheric pressure in the nozzles 21 of the individual flow paths 200 adjacent to each other in the certain first direction X is preferably within ±2%, that is, −2% or more and +2% or less. For example, when the atmospheric pressure is 1013 hPa, the pressure inside the nozzle 21 is about 1000 hPa. Therefore, the pressure difference between the inks in the nozzles 21 adjacent to each other in the first direction X is about 20 hPa at maximum.

As described above, when not ejecting, the difference between the pressure of the ink in the first nozzle 21A and the pressure of the ink in the second nozzle 21B adjacent in the first direction X is −2% or more and +2% or less. By making it relatively small, it is possible to suppress variations in the ejection characteristics of the ink droplets ejected from the first nozzle 21A and the ink droplets ejected from the second nozzle 21B. As described above, in order to make the difference between the pressure of the ink in the first nozzle 21A and the pressure of the ink in the second nozzle 21B relatively small, the flow path from the first common liquid chamber 101 to the first nozzle 21A is used. It is necessary to make the resistance and the flow path resistance from the first common liquid chamber 101 to the second nozzle 21B uniform so that the pressure difference of the ink in the nozzle 21 is −2% or more and +2% or less. Then, the flow path resistance from the first common liquid chamber 101 to the first nozzle 21A and the flow path resistance from the first common liquid chamber 101 to the second nozzle 21B are equal to each other when the pressure difference of the ink in the nozzle 21 is −2. % And +2% or less, by forming the first individual flow path 200A and the second individual flow path 200B in the same shape and mutually inverted with respect to the ink flowing direction, The structure of the individual flow path 200 can be simplified and the first pressure chamber 12A and the second pressure chamber 12B can be arranged at different positions in the second direction Y.

Further, the flow path resistance between the first upstream flow path and the first downstream flow path, the flow path resistance between the second upstream flow path and the second downstream flow path, and two nozzles that are adjacent in the first direction X The pressure difference of the ink in 21 is not limited to the above. For example, when the channel resistances of the first upstream channel and the first downstream channel and the channel resistances of the second upstream channel and the second downstream channel are different, The pressure of the ink and the pressure of the ink in the second nozzle 21B may be smaller than -2% or larger than +2%. In such a case, the voltages applied to the piezoelectric actuators 300 of the individual flow paths 200 adjacent to each other in the juxtaposed direction of the nozzles 21 may be different.

Here, the recording system of the present embodiment will be described. Note that FIG. 38 is a diagram illustrating an electrical configuration of an inkjet recording system that is an example of the liquid ejecting system of the present invention.

The recording system of this embodiment includes a control unit 600 that supplies a drive pulse to the piezoelectric actuator 300 that is an energy generating element.

The control unit 600 includes an external interface 601 (hereinafter, abbreviated as an external I/F 601), a RAM 602 that temporarily stores various data, a ROM 603 that stores a control program and the like, and a control process including a CPU and the like. Unit 604, an oscillation circuit 605 that generates a clock signal (CK), a drive signal generation unit 606 that generates a drive signal to be supplied to the recording head 1, and a dot pattern developed based on the drive signal and print data. An internal interface 607 (hereinafter, abbreviated as internal I/F 607) for transmitting data (bitmap data) and the like to the recording head 1 is provided.

The external I/F 601 receives, for example, print data including a character code, a graphic function, image data, and the like from a host computer (not shown) or the like. Also, a busy signal (BUSY) and an acknowledge signal (ACK) are output to an external device such as a host computer through the external I/F 601. The RAM 602 functions as a reception buffer 602A, an intermediate buffer 602B, an output buffer 602C, and a work memory (not shown). The reception buffer 602A temporarily stores the print data received by the external I/F 601, the intermediate buffer 602B stores the intermediate code data converted by the control processing unit 604, and the output buffer 602C stores the dot pattern data. To do. The dot pattern data is composed of recording data (SI) obtained by decoding (translating) the gradation data.

The drive signal generator 606 is a first drive signal generator 606A that is a first drive signal generator that can generate the first drive signal COM1, and a second drive signal generator that can generate a second drive signal COM2. A second drive signal generator 606B.

Here, the first drive signal COM1 generated by the first drive signal generation unit 606A is a signal having a first ejection pulse DP1 for driving the piezoelectric actuator 300 so as to eject an ink droplet from the nozzle 21 within one recording cycle T. And is repeatedly generated every recording period T.

The second drive signal COM2 generated by the second drive signal generation unit 606B will be described in detail later, but the second ejection pulse DP2 for driving the piezoelectric actuator 300 so that ink droplets are ejected from the nozzles is recorded in one recording cycle T. Is a signal contained in the signal, and is repeatedly generated at every recording cycle T. The second ejection pulse DP2 is generated at the same timing within the same recording cycle T as the first ejection pulse DP1. The recording cycle T is a repeating unit of the drive signal COM, is a kind of ejection cycle in the present invention, and corresponds to one pixel of an image printed on the recording sheet S. The details of the first drive signal COM1 and the second drive signal COM2 will be described later.

The ROM 603 stores font data, graphic functions, etc. in addition to a control program (control routine) for performing various data processing. The control processing unit 604 reads the print data in the reception buffer 602A and stores the intermediate code data obtained by converting the print data in the intermediate buffer 602B. Further, the intermediate code data read from the intermediate buffer 602B is analyzed, and the intermediate code data is expanded into dot pattern data by referring to the font data and the graphic function stored in the ROM 603. Then, the control processing unit 604 stores the developed dot pattern data in the output buffer 602C after performing necessary decoration processing.

When dot pattern data corresponding to one row of the print head 1 is obtained, the dot pattern data for one row is output to the print head 1 through the internal I/F 607. When one line of dot pattern data is output from the output buffer 602C, the expanded intermediate code data is erased from the intermediate buffer 602B, and expansion processing is performed on the next intermediate code data.

As will be described in detail later, when the control processing unit 604 of the control unit 600 generates print data such as dot pattern data based on print data received from an external device via the external I/F 601, In the dot pattern data of a row, adjacent nozzles 21 that eject ink droplets form a nozzle group, and the ejection timing of ink droplets ejected from the end nozzles 21 of the nozzles 21 that form the nozzle group. Is realized with respect to the ejection timing of the ink droplets ejected from the nozzles 21 other than the end portions. Such a control program is read from a recording medium such as a floppy disk, a CDROM, a DVDROM, or a USB memory which is directly connected via the external I/F 601 or is connected via a host computer. Of course, the control program may be provided in the host computer as a printer driver. When the control program is provided in the host computer as described above, the control unit described in the claims is a host computer provided with the control program.

On the other hand, the recording head 1 includes a shift register circuit including a first shift register 122A and a second shift register 122B, a latch circuit including a first latch circuit 123A and a second latch circuit 123B, a decoder 124, and a control logic 125. , A level shifter circuit including a first level shifter 126A and a second level shifter 126B, a switch circuit including a first switch 127A and a second switch 127B, and a piezoelectric actuator 300. The shift registers 122A and 122B, the latch circuits 123A and 133B, the level shifters 126A and 126B, the switches 127A and 127B, and the piezoelectric actuator 300 are provided corresponding to the respective nozzles 21.

The recording head 1 ejects ink droplets based on recording data (SI) from the controller 600. In the present embodiment, since the upper bit group of the print data and the lower bit group of the print data are sent to the print head 1 in order, the upper bit group of the print data is first set in the second shift register 122B. When the high-order bit group of print data for all nozzles 21 is set in the second shift register 122B, these high-order bit group are shifted to the first shift register 122A. At the same time, the lower bit group of the recording data is set in the second shift register 122B.

The first latch circuit 123A is electrically connected to the rear stage of the first shift register 122A, and the second latch circuit 123B is electrically connected to the rear stage of the second shift register 122B. Then, when the latch signal (LAT) from the control unit 600 is input to each of the latch circuits 123A and 123B, the first latch circuit 123A latches the upper bit group of the recording data, and the second latch circuit 123B stores the recording data. Latch lower bits. The recording data (upper bit group, lower bit group) latched by the latch circuits 123A and 123B are output to the decoder 124, respectively. The decoder 124 is a pulse for selecting the first ejection pulse DP1 and the second ejection pulse DP2 that form the first drive signal COM1 and the second drive signal COM2 based on the upper bit group and the lower bit group of the print data. Generate selection data.

The pulse selection data is generated for each of the first drive signal COM1 and the second drive signal COM2. That is, the first pulse selection data corresponding to the first drive signal COM1 is composed of 1-bit data. The second pulse selection data corresponding to the second drive signal COM2 is composed of 1-bit data.

In addition, the timing signal from the control logic 125 is also input to the decoder 124. The control logic 125 generates a timing signal in synchronization with the input of the latch signal or the channel signal. This timing signal is also generated for each of the first drive signal COM1 and the second drive signal COM2. The pulse selection data generated by the decoder 124 are sequentially input to the level shifters 126A and 126B from the upper bit side at the timing specified by the timing signal. These level shifters 126A and 126B function as voltage amplifiers, and when the pulse selection data is “1”, the voltage values that the corresponding switches 127A and 127B can drive, for example, electric signals boosted to several tens of volts are output. Output. That is, when the first pulse selection data is "1", an electric signal is output to the first switch 127A, and when the second pulse selection data is "1", an electric signal is output to the second switch 127B. The connection is established.

The first drive signal COM1 from the first drive signal generator 606A is supplied to the input side of the first switch 127A, and the second drive from the second drive signal generator 606B is supplied to the input side of the second switch 127B. The signal COM2 is supplied. The piezoelectric actuator 300 is electrically connected to the output side of each of the switches 127A and 127B. The first switch 127A and the second switch 127B are provided for each type of drive signal to be generated. The first switch 127A and the second switch 127B are interposed between the drive signal generation unit 606 and the piezoelectric actuator 300, and the first drive signal COM1 and The second drive signal COM2 is selectively supplied to the piezoelectric actuator 300. When both the first switch 127A and the second switch 127B are in the disconnection state, the first drive signal COM1 and the second drive signal COM2 are not supplied to the piezoelectric actuator 300.

Such pulse selection data controls the operations of the switches 127A and 127B. That is, during a period in which the pulse selection data input to the first switch 127A is “1”, the first switch 127A is connected and is in a conductive state, and the first drive signal COM1 is supplied to the piezoelectric actuator 300. Similarly, during a period in which the pulse selection data input to the second switch 127B is “1”, the second switch 127B is connected and is in the conductive state, and the second drive signal COM2 is supplied to the piezoelectric actuator 300. .. Then, the drive signal applied to the piezoelectric actuator 300 changes according to the supplied first drive signal COM1 and second drive signal COM2. On the other hand, while the pulse selection data input to the switches 127A and 127B are both "0", the switches 127A and 127B are in a disconnected state, and the piezoelectric actuator 300 has the first drive signal COM1 and the second drive signal COM2. Is not supplied. In short, the pulse in the period in which “1” is set as the pulse selection data is selectively supplied to the piezoelectric actuator 300. It should be noted that in the period in which both the pulse selection data are “0”, each piezoelectric actuator 300 holds the immediately preceding potential, so that the immediately preceding displacement state is maintained.

As described above, in the present embodiment, the decoder 124, the control logic 125, the level shifters 126A and 125B, and the switches 127A and 127B function as a drive element control unit, and according to the recording data (gradation data), the first The behavior of the piezoelectric actuator 300 is controlled by controlling the supply of the drive signal COM1 and the second drive signal COM2.

Next, the first drive signal COM1 and the second drive signal COM2 generated by the drive signal generation unit 606 and the supply control of the first drive signal COM1 and the second drive signal COM2 to the piezoelectric actuator 300 will be described. Note that FIG. 39 is a drive waveform showing a drive signal.

The drive waveform showing the drive signal shown in FIG. 39 includes a first drive signal COM1 and a second drive signal COM2.

The first drive signal COM1 is generated by the drive signal generator 606 in each unit cycle T (the ejection cycle T, which is also referred to as a recording cycle T) defined by the clock signal transmitted from the oscillation circuit 605. It is repeatedly generated from the unit 606A. The unit cycle T corresponds to one pixel of an image or the like printed on the recording sheet S. In the present embodiment, the first ejection pulse DP1 which is a drive pulse is generated in the unit cycle T.

Similarly, the second drive signal COM2 is repeatedly generated from the second drive signal generation unit 606B of the drive signal generation unit 606 at the same unit cycle T as the first drive signal COM1. In the present embodiment, the second ejection pulse DP2 that is a drive pulse is generated in the unit cycle T. When a dot pattern for one row (for one raster) is formed in the recording area of the recording sheet S during printing, the piezoelectric actuator 300 corresponding to each nozzle 21 has a first ejection pulse DP1 and a second ejection pulse DP1. Either one of DP2 is selectively supplied. In the present embodiment, the first drive signal COM1 and the second drive signal COM2 are supplied to the second electrode 80, which is an individual electrode, using the first electrode 60, which is the common electrode of the piezoelectric actuator 300, as the reference potential (vbs). To be done. That is, the voltage applied to the second electrode 80 by the drive signal is represented as a potential with the reference potential (vbs) as a reference.

Specifically, the first ejection pulse DP1 of the first drive signal COM1, the first expansion for expanding by applying a state where the intermediate potential Vm is applied to a first electric potential V ₁ the volume of the pressure chamber 12 from the reference volume The element P01, the first expansion maintaining element P02 that maintains the volume of the pressure chamber 12 expanded by the first expansion element P01 for a certain period of time, and the volume of the pressure chamber 12 by applying the first potential V ₁ to the second potential V ₂ a first contraction element P03 to contract, the first contraction maintaining element P04 maintaining the volume of the pressure chamber 12 that is contracted by the first contracting element P03 predetermined time, the reference intermediate potential Vm from the second contracted state of the potential V ₂ A first expansion return element P05 for returning the pressure chamber 12 to the volume.

When the first ejection pulse DP1 as described above is supplied to the piezoelectric actuator 300, the piezoelectric actuator 300 is deformed by the first expansion element P01 in a direction to expand the volume of the pressure chamber 12, and the meniscus in the nozzle 21 is changed to the pressure chamber. Ink is supplied to the pressure chamber 12 from the first common liquid chamber 101 and the second common liquid chamber 102 while being drawn to the 12 side. The expanded state of the pressure chamber 12 is maintained by the first expansion maintaining element P02. After that, the first contraction element P03 is supplied and the pressure chamber 12 is rapidly contracted from the expansion volume to the contraction volume corresponding to the second potential V _2, and the ink in the pressure chamber 12 is pressurized and the ink droplets are ejected from the nozzle 21. Is discharged. The contraction state of the pressure chamber 12 is maintained by the first contraction maintaining element P04, and the ink pressure in the pressure chamber 12 which is decreased by the ejection of the ink droplet during this time is increased again by its natural vibration. The first expansion return element P05 is supplied in synchronization with this rising timing, the pressure chamber 12 returns to the reference volume, and the pressure fluctuation in the pressure chamber 12 is absorbed.

In contrast, the second ejection pulse DP2 of the second drive signal COM2, the second expansion is applied from the state where the intermediate potential Vm is applied to a first electric potential V ₁ to inflate the volume of the pressure chamber 12 from the reference volume The element P11, the second expansion maintaining element P12 that maintains the volume of the pressure chamber 12 expanded by the second expansion element P11 for a certain time, and the volume of the pressure chamber 12 by applying the first potential V ₁ to the third potential V ₃ The second contraction element P13 that contracts the second contraction element P13, the second contraction maintaining element P14 that maintains the volume of the pressure chamber 12 contracted by the second contraction element P13 for a certain time, and the reference of the intermediate potential Vm from the contracted state of the _third potential V3 A second expansion return element P15 for returning the pressure chamber 12 to its volume.

The second applied voltage ΔV _B applied from the first potential V ₁ to the third potential V ₃ of the second contraction element P13 of the second drive signal COM2 is equal to that of the first contraction element P03 of the first drive signal COM1. It is smaller than the first applied potential ΔV _A applied from the first potential V ₁ to the second potential V ₂ . In the present embodiment, the second applied voltage ΔV _B is set by making the third potential V ₃ which is the end point potential of the second contraction element P13 smaller than the second potential V ₂ which is the end point potential of the first contraction element P03. It is smaller than the first applied potential ΔV _A. Of course, the first potential V ₁ which is the starting point potential of the second contraction element P13 of the second ejection pulse DP2 is made larger than the first potential V ₁ which is the starting point potential of the first contraction element P03 of the first ejection pulse DP1. Thus, the second applied voltage ΔV _B may be smaller than the first applied potential ΔV _A , and both the start point potential and the end point potential may be changed.

As described above, the second applied potential ΔV _B of the second ejection pulse DP2 is smaller than the first applied potential ΔV _A of the first ejection pulse DP1, and the ink droplet ejected by the second ejection pulse DP2 is the first The weight is smaller than that of the ink droplet ejected by the ejection pulse DP1.

Here, for example, when the channel resistance of the first upstream channel of the first individual channel 200A is larger than that of the first downstream channel, the first individual channel 200A and the second individual channel 200B are reversed. With the structure, the channel resistance of the second upstream channel of the second individual channel 200B is smaller than the channel resistance of the second downstream channel. Therefore, the pressure of the ink in the first nozzle 21A becomes smaller than the pressure of the ink in the second nozzle 21B, and the weight of the ink droplet ejected from the first nozzle 21A is ejected from the second nozzle 21B. It is smaller than the weight of the ink drop.

Therefore, the control unit 600 of the recording system of the present embodiment supplies different drive pulses to the piezoelectric actuators 300 corresponding to the first individual flow passage 200A and the second individual flow passage 200B, respectively. Specifically, when the first ejection pulse DP1 of the first drive signal COM1 is applied to the piezoelectric actuator 300 corresponding to the first individual flow path 200A in which the weight of the ink droplet becomes small, the weight of the ink droplet becomes large. The second ejection pulse DP2 of the second drive signal COM2 is applied to the piezoelectric actuator 300 corresponding to the two individual flow paths 200B. As a result, even if there is a relatively large difference between the ink pressure inside the first nozzle 21A and the ink pressure inside the second nozzle 21B, by adjusting the voltage applied to the piezoelectric actuator 300, the first nozzle can be adjusted. The print quality can be improved by reducing the variation in the weight of the ink droplets ejected from the nozzle 21A and the second nozzle 21B.

In the present embodiment, the first applied potential ΔV _A of the first contraction element P03 of the first ejection pulse DP1 and the second applied voltage ΔV _B of the second contraction element P13 of the second ejection pulse DP2 are changed. Although the weight of the ink droplets ejected from the nozzle 21 is changed, the present invention is not limited to this. For example, the weight of the ejected ink droplet is changed by changing at least one of the applied potential and the slope of the first expansion element P01 of the first ejection pulse DP1 and the second expansion element P11 of the second ejection pulse DP2. can do. The weight of the ejected ink droplet can also be changed by changing the time components of the first expansion maintaining element P02 of the first ejection pulse DP1 and the second expansion maintaining element P12 of the second ejection pulse DP2. Furthermore, the weight of the ink droplet can also be changed by changing the inclination between the first contraction element P03 of the first ejection pulse DP1 and the second contraction element P13 of the second ejection pulse DP2. In addition, these may be changed by combining two or more.

That is, the weight of the ink droplet is changed by changing at least one of the applied potential, the slope, and the time related to the weight of the ink droplet between the first ejection pulse DP1 and the second ejection pulse DP2, and the first nozzle is changed. 21A and the second nozzle 21B, it is possible to reduce the variation in the weight of the ink droplets ejected, it is possible to improve the print quality.

In each of the embodiments, an ink jet recording head is described as an example of a liquid ejecting head, and an ink jet recording apparatus is illustrated as an example of a liquid ejecting apparatus. However, the present invention is broadly applicable to liquid ejecting heads and liquid ejecting apparatuses in general. The present invention can be applied to a liquid ejecting head or a liquid ejecting apparatus that ejects liquid other than ink. Other liquid ejecting heads include, for example, various recording heads used in image recording devices such as printers, color material ejecting heads used in manufacturing color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejecting head used for forming electrodes, a bio-organic substance ejecting head used for biochip manufacturing, and the like, and can be applied to a liquid ejecting apparatus and a liquid ejecting system including such a liquid ejecting head.

I... Inkjet recording device (liquid ejecting device), 1... Inkjet recording head (liquid ejecting head), 2... Tank, 2a... Supply pipe, 2b... Discharge pipe, 3... Carriage, 4... Device body, 5... Carriage Shaft, 7... Driving motor, 7a... Timing belt, 8... Conveying roller, 10... Flow path forming substrate, 12... Pressure chamber, 12A... First pressure chamber, 12B... Second pressure chamber, 15... Communication plate, 151... 1st communicating plate, 152... 2nd communicating plate, 16... 1st communicating part, 16a... 1st narrow part, 16b... 1st wide part, 17... 2nd communicating part, 17a... 2nd narrow part, 17b ... 2nd wide part, 20... Nozzle plate, 20a... Nozzle surface, 21... Nozzle, 21A... 1st nozzle, 21B... 2nd nozzle, 22A... 1st nozzle row, 22B... 2nd nozzle row, 30... Protective substrate , 31... Piezoelectric actuator holding part, 32... Through hole, 40... Case member, 41... First liquid chamber part, 42... Second liquid chamber part, 43... Inlet port, 44... Discharge port, 45... Connection port, 49 ...Compliance substrate, 491... Sealing film, 492... Fixed substrate, 493... Opening portion, 494... Compliance portion, 494A... First compliance portion, 494B... Second compliance portion, 495A... First opening, 495B... Second opening , 50... Vibration plate, 60... First electrode, 70... Piezoelectric layer, 80... Second electrode, 90... Lead electrode, 101... First common liquid chamber, 102... Second common liquid chamber, 120... Flexible cable, 121... Driving circuit, 122A... First shift register, 122B... Second shift register, 123A... First latch circuit, 123B... Second latch circuit, 124... Decoder, 125... Control logic, 126A... First level shifter, 126B ...Second level shifter, 127A...first switch, 127B...second switch, 200...individual flow path, 200A...first individual flow path, 200B...second individual flow path, 201...first flow path, 202...second 2nd flow path, 203... 3rd flow path, 204... 4th flow path, 205... 5th flow path, 206... 6th flow path, 207... 7th flow path, 208... 8th flow path, 209... 9th Flow passage, 210... 10th flow passage, 211... 11th flow passage, 212... 12th flow passage, 213... 13th flow passage, 214... 14th flow passage, 215... 15th flow passage, 216... 16th flow Passage 217... 17th passage, 218... 18th passage, 219... 19th passage, 220... 20th passage, 221, 21st passage, 222... 22nd passage, 223... 23rd passage 224... 24th channel, 225... 25th channel, 226... 26th channel 227... 27th channel, 228... 28th channel, 229... 29th channel, 300... Piezoelectric actuator, 400... Channel substrate, 500... Main tank, 501... First tank, 502... Second tank, 503... Compressor, 504... Vacuum pump, 505... First liquid sending pump, 506... Second liquid sending pump, 600... Control unit, 601... External interface (external I/F), 602A... Receive buffer, 602B... Intermediate buffer , 602C... Output buffer, 604... Control processing unit, 605... Oscillation circuit, 606... Drive signal generating unit, 606A... First drive signal generating unit, 606B... Second drive signal generating unit, 607... Internal interface (internal I/ F), COM... Drive signal, COM1... First drive signal, COM2... Second drive signal, DP1... First ejection pulse, DP2... Second ejection pulse, P01... First expansion element, P02... First expansion maintaining element , P03... First contraction element, P04... First contraction maintaining element, P05... First expansion returning element, P11... Second expansion element, P12... Second expansion maintaining element, P13... Second contraction element, P14... Second contraction maintaining element, P15 ... second expansion return element, S ... recording sheet, T ... recording period (unit cycle, the discharge period), Vm ... intermediate potential, V 1 _... first potential, V 2 _... second potential, _{V 3} ... third potential, X ... first direction, Y ... second direction, Z ... third direction

Claims (21)

A flow channel substrate on which a flow channel is formed,
An energy generating element for causing a pressure change in the liquid in the flow path,
The flow path communicates with a first common liquid chamber, a second common liquid chamber, the first common liquid chamber and the second common liquid chamber, and from the first common liquid chamber to the second common liquid chamber. An individual flow path through which liquid flows,
The individual flow path includes a nozzle communicating with the outside, and a pressure chamber in which a pressure change is generated by the energy generating element,
Of the plurality of individual flow paths, the three individual flow paths that are adjacent to each other in the juxtaposed direction of the nozzles communicate with the first common liquid chamber and the second common liquid chamber, respectively.
The two individual flow channels that are adjacent to each other in the juxtaposed direction may have a different arrangement order of the pressure chambers and the nozzles in the direction in which the liquid flows from the first common liquid chamber toward the second common liquid chamber. Characteristic liquid jet head. Among the individual flow paths, the flow path resistance of the upstream flow path from the nozzle to the first common liquid chamber and the flow path resistance of the downstream flow path from the nozzle to the second common liquid chamber are the same. The liquid jet head according to claim 1, wherein the liquid jet head is provided. The liquid jet head according to claim 1, wherein the nozzle is arranged in communication with a midway of a flow path extending in an in-plane direction of a nozzle surface of the flow path substrate on which the nozzle opens. .. When viewed in a plan view from the side-by-side installation direction, in the two individual flow paths, the interval between the nozzles is smaller than the interval between the pressure chambers. The liquid jet head described. The plurality of individual flow paths,
A first individual flow path in which the nozzle is provided on the downstream side of the pressure chamber,
A second individual flow path in which the nozzle is provided on the upstream side of the pressure chamber;
Have
The first individual flow path and the second individual flow path are arranged at positions adjacent to each other in the juxtaposed direction,
In the direction perpendicular to the nozzle surface where the nozzle opens, the pressure chamber of the first individual flow passage, and the flow passage on the first common liquid chamber side of the nozzle of the second individual flow passage, The liquid jet head according to any one of claims 1 to 4, wherein the liquid jet head is arranged at a position different from the flow path extending in the in-plane direction of the nozzle surface. The pressure chamber of the first individual flow channel and the flow channel on the first common liquid chamber side of the nozzle of the second individual flow channel when viewed in a plan view from the direction perpendicular to the nozzle surface. The liquid jet head according to claim 5, wherein the flow path extending in the in-plane direction of the nozzle surface is arranged at a position where at least a part of the flow path extends. The plurality of individual flow paths,
A first individual flow path in which the nozzle is provided on the downstream side of the pressure chamber,
A second individual flow path in which the nozzle is provided on the upstream side of the pressure chamber;
Have
The first individual flow path and the second individual flow path are arranged at positions adjacent to each other in the juxtaposed direction,
In the direction perpendicular to the nozzle surface where the nozzle opens, the pressure chamber of the first individual flow passage, and the flow passage on the first common liquid chamber side of the nozzle of the second individual flow passage, The liquid jet head according to any one of claims 1 to 4, wherein the flow path extending in the in-plane direction of the nozzle surface is arranged at the same position. The compliance part which can absorb the pressure of a liquid is provided in a part of each wall surface of the said 1st common liquid chamber and the said 2nd common liquid chamber, It is characterized by the above-mentioned. 2. A liquid jet head according to item 1. The flow path substrate includes a compliance portion capable of absorbing pressure fluctuations of a liquid, and a nozzle plate provided with the nozzle,
9. The compliance part and the nozzle plate are arranged on the same side with respect to the individual flow path in a direction perpendicular to a nozzle surface on which the nozzle is opened, according to claim 1. The liquid-jet head according to item. The liquid ejecting head according to claim 9, wherein the compliance portion is formed on the nozzle plate. The liquid ejecting head according to claim 9, wherein the compliance portion is formed on a member different from the nozzle plate. The individual flow passage has an upstream communication passage extending from the nozzle to the first common liquid chamber in a direction perpendicular to a nozzle surface on which the nozzle opens,
The upstream communication passages of the two individual flow passages have portions that do not overlap each other when viewed from the juxtaposed direction, according to any one of claims 1 to 11. Liquid jet head. The nozzle is arranged between the first common liquid chamber and the second common liquid chamber when viewed in a plan view from a direction perpendicular to a nozzle surface where the nozzle opens. 13. The liquid jet head according to any one of 12. The plurality of individual flow paths,
A first individual flow path in which the nozzle is provided on the downstream side of the pressure chamber,
A second individual flow path in which the nozzle is provided on the upstream side of the pressure chamber;
Have
The first individual flow path and the second individual flow path are arranged at positions adjacent to each other in the juxtaposed direction,
The first individual flow path has, between the pressure chamber and the nozzle, a first communication path extending in a direction perpendicular to a nozzle surface on which the nozzle opens,
The second individual flow path has a second communication path extending in a direction perpendicular to the nozzle surface between the pressure chamber and the nozzle,
In the first communication passage, the nozzle side opening is located closer to the second common liquid chamber side than the pressure chamber side opening is,
The liquid according to any one of claims 1 to 13, wherein the second communication passage has an opening on the nozzle side located closer to the first common liquid chamber than an opening on the pressure chamber side. Jet head. A flow channel substrate on which a flow channel is formed,
An energy generating element for causing a pressure change in the liquid in the flow path,
The flow path communicates with a first common liquid chamber, a second common liquid chamber, the first common liquid chamber and the second common liquid chamber, and from the first common liquid chamber to the second common liquid chamber. An individual flow path through which liquid flows,
The individual flow path includes a nozzle communicating with the outside, and a pressure chamber in which a pressure change is generated by the energy generating element,
The flow channel substrate includes a first flow channel substrate, a second flow channel substrate, and a third flow channel substrate,
A flow path is formed between the first flow path substrate and the second flow path substrate at a first resolution in a juxtaposed direction,
A flow path is formed between the second flow path substrate and the third flow path substrate in the juxtaposed direction at a second resolution higher than the first resolution. Liquid jet head. 16. The liquid jet head according to claim 15, wherein the third flow path substrate includes a nozzle plate on which the nozzle is formed. The liquid jet head according to claim 15 or 16, wherein the first resolution is a pitch of the flow paths in a direction in which the flow paths are arranged. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1. A liquid jet head according to any one of claims 1 to 17,
A circulation system that supplies a liquid to one of the first and second common liquid chambers and recovers the liquid from the other common liquid chamber to generate a circulation flow in the individual flow path. ,
A liquid ejecting system comprising: The pressure inside the nozzle when the liquid is not discharged from the nozzle is a difference of ±2% or less between the nozzles when a circulation flow is generated in the individual flow path. A liquid ejecting system according to claim 19. It has a control part which supplies a drive pulse to the above-mentioned energy generating element, The above-mentioned control part supplies a different drive pulse to an energy generating element corresponding to each of the two above-mentioned individual channels. Item 21. The liquid ejecting system according to Item 20.