JP2020095003A - X-ray analysis device - Google Patents

Abstract

To provide an X-ray analysis device capable of providing enhanced X-ray intensity.SOLUTION: An X-ray analysis device is provided, comprising: an X-ray tube for generating X-rays; a first X-ray guide tube configured to focus the X-rays generated by the X-ray tube and irradiate an irradiation target with the X-rays; and a second X-ray guide tube disposed between an output end of the X-ray tube and an input end of the first X-ray guide tube.SELECTED DRAWING: Figure 1

Description

The present invention relates to an X-ray analysis device.

Irradiate a sample with X-rays and transmit fluorescent X-rays emitted from the sample and the sample for various purposes such as research and development such as material development or biological inspection, or quality control such as foreign substance analysis or defect analysis. An X-ray analyzer is used that detects transmitted X-rays or diffracted X-rays and analyzes the internal composition of the sample and the crystal structure of the sample.

Patent Document 1 discloses an X-ray analyzer that irradiates a target with an electron beam to generate X-rays and collects the X-rays on a sample using an optical system. Further, as the optical system, an X-ray conduit such as a monocapillary is conventionally used.

JP-A-6-34580

However, in the conventional X-ray analyzer, the X-ray tube that generates X-rays and the X-ray conduit are arranged separately. In particular, the X-ray tube and the X-ray conduit are spaced apart for selective placement of the X-ray conduit or for placement of the X-ray filter. Therefore, there is a problem that a part of the X-ray generated in the X-ray tube does not enter the X-ray conduit and the X-ray intensity decreases.

The present invention has been made in view of such circumstances, and an object thereof is to provide an X-ray analysis apparatus capable of improving X-ray intensity.

An X-ray analysis apparatus according to the present invention includes an X-ray tube that generates X-rays, a first X-ray conduit that collects X-rays generated by the X-ray tube and irradiates an irradiation target with the X-ray tube, and the X-ray tube. A second X-ray conduit disposed between the exit end of the X-ray tube and the entrance end of the first X-ray conduit.

The X-ray analysis apparatus includes an X-ray tube that generates X-rays, and a first X-ray conduit that collects the X-rays generated by the X-ray tube and irradiates the irradiated body. The X-ray analysis apparatus further comprises a second X-ray conduit arranged between the exit end of the X-ray tube and the entrance end of the first X-ray conduit. That is, the second X-ray conduit is provided between the X-ray tube and the first X-ray conduit.

Since the second X-ray conduit is provided between the emission end of the X-ray tube and the incident end of the X-ray conduit (first X-ray conduit) arranged apart from each other, the light is emitted from the emission end of the X-ray tube. Most of the emitted X-rays can be directed into the second X-ray conduit. The X-rays that have traveled in the second X-ray conduit can be guided into the first X-ray conduit. As a result, most of the X-rays generated by the X-ray tube are incident on the X-ray conduit, so that the X-ray intensity can be improved.

In the X-ray analyzer according to the present invention, a predetermined film material is formed on the inner wall of the second X-ray conduit.

The X-ray analyzer has a predetermined film material formed on the inner wall of the second X-ray conduit. The predetermined film material may be a film material that is excited by X-rays from an X-ray tube to generate X-rays, and examples thereof include tungsten, rhodium, silver, molybdenum, palladium, tantalum, gold, copper and chromium. Contains heavy metals. As a result, when the inner wall of the second X-ray conduit is irradiated with X-rays and the incident angle of the X-rays on the inner wall is shallower than the critical angle, the X-rays are totally reflected by the inner wall and collected. Therefore, the X-ray intensity can be improved. Further, when the incident angle of X-rays is deeper than the critical angle, the film material on the inner wall of the second X-ray conduit is excited to generate X-rays, and among newly generated X-rays, the angle is smaller than the critical angle. The X-rays incident on the inner wall at a shallow incident angle are totally reflected and condensed by the inner wall, so that the X-ray intensity can be improved.

In the X-ray analysis apparatus according to the present invention, the film material formed on the inner wall of the second X-ray tube is the same metal as the target included in the X-ray tube.

The film material formed on the inner wall of the second X-ray tube is the same metal as the target of the X-ray tube. As a result, it is possible to prevent an increase in so-called system peak in which fluorescent X-rays generated from a portion other than the sample, such as the wall surface of the second X-ray conduit, are detected, and to improve the X-ray intensity.

An X-ray analysis apparatus according to the present invention comprises a plurality of the second X-ray conduits, selects one second X-ray conduit from the plurality of the second X-ray conduits, and selects the selected first X-ray conduit. A selector is provided for arranging two X-ray conduits between the exit end of the X-ray tube and the entrance end of the first X-ray conduit.

The selecting unit selects one second X-ray conduit from the plurality of second X-ray conduits, and selects the selected one second X-ray conduit from the emission end of the X-ray tube and the first X-ray. It is arranged between the entrance end of the conduit. As the plurality of second X-ray conduits, for example, a plurality of second X-ray conduits having different inner diameters may be prepared and a desired inner diameter may be selected. This makes it possible to change the intensity of X-rays applied to the sample, the focus size, and the like.

In the X-ray analyzer according to the present invention, the shape of the inner wall surface of the second X-ray conduit is a curved surface having a curvature.

The shape of the inner wall surface of the second X-ray conduit is a curved surface having a curvature. The curved surface can be, for example, a spheroidal surface or a paraboloid of rotation, but is not limited thereto. By making the shape of the inner wall surface a curved surface having a curvature, the X-rays incident on the second X-ray conduit can be totally reflected by the inner wall surface and can be efficiently collected. A stronger X-ray can be made to enter.

The X-ray analysis apparatus according to the present invention includes a mirror arranged at an appropriate distance from the emission end of the first X-ray conduit, and the mirror has a hole formed in a portion through which the X-ray passes.

The X-ray analysis apparatus includes a mirror that is arranged at an appropriate distance from the emission end of the first X-ray conduit. The mirror is used for observing the sample with an optical microscope or the like. The mirror has a hole formed in a portion through which the X-ray passes. As a result, the portion other than the hole through which the X-rays can be observed with the optical microscope, and the X-rays and the optical microscope can perform coaxial observation.

In the X-ray analysis apparatus according to the present invention, a collimator is provided in the hole of the mirror.

A collimator is provided in the hole of the mirror. That is, the collimator is provided using the hole of the mirror. As a result, the X-rays can be converted into parallel rays toward the sample, chromatic aberration can be reduced, and the depth of focus of the X-rays can be increased.

The X-ray analysis apparatus according to the present invention includes a pellicle mirror that is arranged at a proper distance from the emission end of the first X-ray conduit.

The X-ray analysis apparatus includes a pellicle mirror that is arranged at an appropriate distance from the emission end of the first X-ray conduit. The pellicle mirror is made of a material that can transmit X-rays. Since no gaps or cutouts for transmitting X-rays are required unlike ordinary mirrors, it is possible to eliminate adverse effects such as lack of a visual field when observing with an optical microscope or the like.

An X-ray analysis apparatus according to the present invention includes an X-ray tube that generates X-rays, a first X-ray conduit that collects X-rays generated by the X-ray tube and irradiates an irradiation target with the X-ray tube, and the X-ray tube. A reflection member disposed between an emission end of the X-ray tube and an incidence end of the first X-ray conduit, the reflection film having a reflection film for X-rays, wherein the reflection film is a first film material containing a first element. Further, a plurality of laminated films in which a second film material containing a second element having a mass different from that of the first element is laminated are further laminated.

The X-ray analysis apparatus includes an X-ray tube that generates X-rays, and a first X-ray conduit that collects the X-rays generated by the X-ray tube and irradiates the irradiated body. The X-ray analysis apparatus further includes a reflection member having an X-ray reflection film, which is arranged between the emission end of the X-ray tube and the incidence end of the first X-ray conduit. That is, a reflection member having an X-ray reflection film is provided between the X-ray tube and the first X-ray conduit.

The reflective film is formed by further laminating a plurality of laminated films in which a first film material containing the first element and a second film material containing the second element having a mass different from that of the first element are stacked. For example, the first element can be an element heavier than the second element. The first film material may contain only the first element or may contain a compound with the first element. Further, the second film material may contain only the second element or may contain a compound with the second element. The reflective film can be formed by using, for example, a sputtering method, an electron beam evaporation method, a CVD method, an MBE method or the like.

As described above, the reflective film is a multi-layered film and has a structure in which layers of a material having a large difference in refractive index (first film material and second film material) are alternately laminated with a constant thickness. When X-rays generated by an X-ray tube enter the reflection film, X-rays of wavelength λ determined by the formula 2×d×sin θ=n×λ are extracted due to the interference effect of X-rays scattered in each layer. be able to. Here, d is the sum of the thicknesses of the first film material and the second film material, θ is the angle between the film surface of the reflective film and the X-ray, and n is a constant. The reflection of X-rays on the reflection film is so-called Bragg reflection.

The first film material containing the first element has a mass different from that of the first element between the emission end of the X-ray tube and the incident end of the X-ray conduit (first X-ray conduit) arranged apart from each other. Since the reflective member has the reflective film in which a plurality of laminated films in which the second film material containing two elements is laminated is further laminated, the X-ray (monochromatic light) of the required wavelength extracted by the reflective member is converted into the first X-ray. It can be introduced into a conduit. The first X-ray conduit can collect X-rays (monochromatic light) having a required wavelength and irradiate the irradiation target. This makes it possible to extract X-rays (monochromatic light) having a desired wavelength from the X-ray spectrum generated by the X-ray tube and irradiate the irradiated body, so that composition analysis of the irradiated body can be easily performed.

According to the present invention, the X-ray intensity can be improved.

It is a schematic diagram which shows the 1st example of a structure of the X-ray-analysis apparatus of this Embodiment. It is a schematic diagram which shows the example of arrangement|positioning of the X-ray conduit of the X-ray analyzer of this Embodiment. It is a schematic diagram which shows an example of a structure of the X-ray-analysis apparatus as a comparative example. It is a schematic diagram which shows the 2nd example of the 2nd X-ray conduit|pipe of this Embodiment. It is a schematic diagram which shows the 3rd example of the 2nd X-ray conduit|pipe of this Embodiment. It is a schematic diagram which shows the 4th example of the 2nd X-ray conduit|pipe of this Embodiment. It is a schematic diagram which shows the 5th example of the 2nd X-ray conduit|pipe of this Embodiment. It is a schematic diagram which shows the 2nd example of a structure of the X-ray-analysis apparatus of this Embodiment. It is a top view which shows an example of a rotor. It is a schematic diagram which shows the 2nd example of a structure of the mirror of the X-ray-analysis apparatus of this Embodiment. It is a schematic diagram which shows the 3rd example of a structure of the mirror of the X-ray-analysis apparatus of this Embodiment. It is a schematic diagram which shows the 1st example of the reflection member of the X-ray analyzer of this Embodiment. It is a schematic diagram which shows the 2nd example of the reflection member of the X-ray analysis apparatus of this Embodiment. It is a schematic diagram which shows the 3rd example of the reflection member of the X-ray-analysis apparatus of this Embodiment. It is a schematic diagram which shows the 4th example of the reflection member of the X-ray analysis apparatus of this Embodiment. It is a schematic diagram which shows an example of the spectrum of the X-ray generated in an X-ray tube.

Hereinafter, the present invention will be described based on the drawings showing an embodiment thereof. FIG. 1 is a schematic diagram showing a first example of the configuration of the X-ray analysis apparatus 100 of the present embodiment. The X-ray analysis apparatus 100 includes an optical system container 71 and a sample container 72. An X-ray transmission window 74 is provided between the optical system storage 71 and the sample storage 72. The inside of the optical system housing 71 is kept in a depressurized state. The inside of the sample container 72 may be atmospheric air, but it may be kept in a depressurized state in order to prevent attenuation of fluorescent X-rays (secondary X-rays) emitted from the sample S (irradiation target). desirable. Further, the optical system container 71 and the sample container 72 may be the same container.

An X-ray tube 30 is provided above the optical system housing 71. The first X-ray conduit 10, the second X-ray conduit 20, the mirror 73, a part of the X-ray detector 50, and the like are housed in the optical system housing 71.

The X-ray tube 30 is surrounded by, for example, a hollow glass wall, and has a filament containing tungsten therein. When the filament is heated by passing an electric current through the filament, electrons (thermoelectrons) are emitted from the filament. Further, the X-ray tube 30 includes an anode, a deflection coil, an electron lens composed of a converging lens and an objective lens, a target, and the like, and changes the traveling direction of the electrons emitted from the filament and directs the electrons to the target. To accelerate. The target includes, for example, a heavy metal such as tungsten or molybdenum and can generate X-rays by collision or transmission of electrons. In FIG. 1, reference numeral 31 indicates an X-ray generation center (X-ray source).

The X-ray generated in the X-ray tube 30 is emitted from the emission end 32 of the X-ray tube 30 and is incident on the incidence end 21 of the second X-ray conduit 20. The X-rays that have entered the second X-ray conduit 20 are totally reflected by the inner wall surface of the second X-ray conduit 20 and emitted from the emission end 22. The X-rays emitted from the emission end 22 of the second X-ray conduit 20 enter the incidence end 11 of the first X-ray conduit 10. The X-rays incident on the first X-ray conduit 10 are totally reflected by the inner wall surface of the first X-ray conduit 10 and emitted from the emission end 12 toward the sample S.

The mirror 73 is arranged at a proper distance from the emission end 12 of the first X-ray conduit 10. The mirror 73 is used for observing the sample by the imaging unit 60. The mirror 73 as a first example is provided with a notch in a portion through which the X-ray passes. Alternatively, the mirrors 73 may be arranged so as to face each other with a portion through which the X-rays pass in between and to be provided with a required gap. Other examples of the mirror will be described later.

A stage 75 on which the sample S is placed is arranged in the sample container 72. The imaging unit 60 is arranged on the upper side of one side of the sample storage unit 72. The imaging unit 60 is, for example, an optical camera or an optical microscope.

The PC 40 includes a control unit 41, a calculation unit 42, and a display unit 43, and controls the processing in the X-ray analysis apparatus 100.

The control unit 41 can control the operation of the X-ray tube 30 to control the output intensity of X-rays. Further, the control unit 41 can control the operations of the stage 75 and the imaging unit 60.

The calculation unit 42 performs an analysis process based on the intensity data of the spectrum line of the fluorescent X-ray detected by the X-ray detection unit 50. The control unit 41 can display the analysis result of the calculation unit 42 on the display unit 43. Further, the control unit 41 can display an image obtained by capturing the image of the sample S by the image capturing unit 60 on the display unit 43. That is, the sample S can be analyzed based on the fluorescent X-rays (secondary X-rays) detected by the X-ray detection unit 50.

As described above, the X-ray analysis apparatus 100 includes the X-ray tube 30 that generates X-rays, and the first X-ray conduit 10 that collects the X-rays generated by the X-ray tube 30 and irradiates the sample S with the X-rays. Equipped with. The X-ray analysis device 100 further comprises a second X-ray conduit 20 arranged between the exit end 32 of the X-ray tube 30 and the entrance end 11 of the first X-ray conduit 10. That is, the second X-ray conduit 20 is provided between the X-ray tube 30 and the first X-ray conduit 10.

Since the second X-ray tube 20 is provided between the emission end 32 of the X-ray tube 30 and the incident end 11 of the X-ray tube (first X-ray tube 10) which are arranged apart from each other, the X-ray tube 30 is provided. Most of the X-rays emitted from the emission end 32 of can be guided into the second X-ray conduit 20. The X-rays that have traveled through the second X-ray conduit 20 can be guided into the first X-ray conduit 10. Thereby, most of the X-rays generated in the X-ray tube 30 enter the X-ray conduit, so that the X-ray intensity can be improved.

FIG. 2 is a schematic diagram showing an arrangement example of X-ray conduits of the X-ray analysis apparatus 100 of the present embodiment. It should be noted that in the figure, for convenience, the radial dimension is drawn larger than the lengthwise dimension of the X-ray conduit, but the radial dimension is actually smaller. As shown in FIG. 2, the distance between the X-ray generation center 31 or the exit end 32 of the X-ray tube 30 and the entrance end 11 of the X-ray conduit (first X-ray conduit 10) is relatively long. In the present embodiment, the second X-ray conduit 20 as a first example is provided between the emitting end 32 of the X-ray tube 30 and the incident end 11 of the first X-ray conduit 10.

FIG. 3 is a schematic diagram showing an example of the configuration of an X-ray analysis apparatus as a comparative example. As shown in FIG. 3, the distance D between the X-ray source (center of X-ray generation) in the X-ray tube and the incident end of the X-ray tube is represented by the symbol D. In the case of the comparative example, since the distance D is relatively long, a part of the X-ray generated by the X-ray source (indicated by symbol A) is emitted to the outside of the X-ray conduit without entering the X-ray conduit. Therefore, the X-ray intensity decreases. Further, when the X-rays emitted toward the outside of the X-ray conduit hit a portion other than the sample to generate fluorescent X-rays, the so-called system peak increases.

According to the present embodiment, as illustrated in FIG. 2, the distance L between the X-ray generation center 31 and the incident end of the X-ray conduit (second X-ray conduit 20) is illustrated in FIG. Since the distance can be made shorter than the distance D, the X-rays emitted toward the outside of the X-ray conduit can be reduced and the X-ray intensity can be improved. In addition, it is possible to suppress a system peak caused by the fact that the X-rays emitted toward the outside of the X-ray conduit hit a portion other than the sample to generate fluorescent X-rays.

FIG. 4 is a schematic diagram showing a second example of the second X-ray conduit 20 of the present embodiment. In FIG. 4, reference numeral 201 is a film material. In the second example, the film material 201 is formed on the inner wall of the second X-ray conduit 20. The film material 201 may be any film material that is excited by X-rays from the X-ray tube 30 to generate X-rays, and examples thereof include tungsten, rhodium, silver, molybdenum, palladium, tantalum, gold, copper, and chromium. Contains heavy metals. Accordingly, when the inner wall of the second X-ray conduit 20 is irradiated with X-rays and the incident angle of the X-rays on the inner wall is shallower than the critical angle, the X-rays are totally reflected by the inner wall and condensed. Therefore, the X-ray intensity can be improved. Further, when the incident angle of X-rays is deeper than the critical angle, the film material 201 on the inner wall of the second X-ray conduit 20 is excited to generate X-rays, and among the newly generated X-rays, the critical angle X-rays that have entered the inner wall at a shallower incident angle are totally reflected by the inner wall and condensed, so that the X-ray intensity can be improved. The second X-ray conduit 20 may be prepared by, for example, dividing a metal tube into several pieces, and forming a film on the inner wall of the tube by vapor deposition, plating, or the like, and reattaching the pieces.

Further, the film material 201 may be made of the same metal as the target included in the X-ray tube 30. As a result, it is possible to prevent an increase in so-called system peak in which fluorescent X-rays generated from a portion other than the sample, such as the wall surface of the second X-ray conduit 20, are detected, and to improve the X-ray intensity.

FIG. 5 is a schematic diagram showing a third example of the second X-ray conduit 20 of the present embodiment. In the third example, the shape of the inner wall surface 202 of the second X-ray conduit 20 may be a curved surface having a curvature. The curved surface can be, for example, a spheroidal surface or a paraboloid of rotation, but is not limited thereto. By making the shape of the inner wall surface 202 into a curved surface having a curvature, the X-rays incident on the second X-ray conduit 20 can be totally reflected by the inner wall surface 202 and can be efficiently condensed. Stronger X-rays can be incident on the X-ray conduit 10. Although not shown, the film material 201 may be formed on the inner wall surface 202 of the second X-ray conduit 20 of the third example. Thereby, the X-ray intensity can be further improved.

FIG. 6 is a schematic diagram showing a fourth example of the second X-ray conduit 20 of the present embodiment. In the fourth example, the inner diameter of the second X-ray conduit 20 on the X-ray generation center 31 side is reduced, and the inner diameter of the second X-ray conduit 20 on the first X-ray conduit 10 side is increased. That is, the second X-ray conduit 20 has a tapered inner wall 203 whose diameter increases from the X-ray generation center 31 side toward the first X-ray conduit 10 side. As a result, the X-rays that are totally reflected by the inner wall 203 of the second X-ray conduit 20 can be increased and made incident on the first X-ray conduit 10, and the X-ray intensity can be improved. Although not shown, the film material 201 may be formed on the inner wall 203 of the second X-ray conduit 20 of the fourth example. Thereby, the X-ray intensity can be further improved.

FIG. 7 is a schematic diagram showing a fifth example of the second X-ray conduit 20 of the present embodiment. In the fifth example, the inner diameter of the second X-ray conduit 20 on the X-ray generation center 31 side is increased, and the inner diameter of the second X-ray conduit 20 on the first X-ray conduit 10 side is decreased. That is, the second X-ray conduit 20 has a tapered inner wall 204 whose diameter decreases from the X-ray generation center 31 side toward the first X-ray conduit 10 side. Thereby, it is possible to increase the X-rays incident on the inner wall 204 of the second X-ray conduit 20 and to make them incident on the first X-ray conduit 10, thereby improving the X-ray intensity. Although not shown, the film material 201 may be formed on the inner wall 204 of the second X-ray conduit 20 of the fifth example. Thereby, the X-ray intensity can be further improved.

FIG. 8 is a schematic diagram showing a second example of the configuration of the X-ray analysis apparatus 100 of this embodiment. The difference from the first example illustrated in FIG. 1 is that the rotor 25 is provided as a selection unit. As shown in FIG. 8, the rotor 25 is arranged between the exit end 32 of the X-ray tube 30 and the entrance end 11 of the first X-ray conduit 10. Based on a control signal from the control unit 41, the rotor 25 can rotate about an axis (for convenience, the axis C is shown as the axis center).

FIG. 9 is a plan view showing an example of the rotor 25. The rotor 25 has a circular plate shape and can rotate about the axis C. The rotor 25 can be formed using a metal that shields X-rays. In the rotor 25, a plurality of (three in FIG. 9) second X-ray conduits 26, 27, 28 are arranged in an appropriate length circumferentially spaced from the axial center C by an appropriate length. The rotor 25 selects one second X-ray conduit from the plurality of second X-ray conduits 26, 27, 28, and selects the selected one second X-ray conduit from the emission end of the X-ray tube 30. It can be arranged between 32 and the entrance end 11 of the first X-ray conduit 10. The plurality of second X-ray conduits 26, 27, 28 may have different inner diameters or different materials, for example. By rotating the rotor 25, the second X-ray conduit having a desired inner diameter can be selected. This makes it possible to change the intensity of X-rays applied to the sample, the focus size, and the like. The number of the second X-ray conduits attached to the rotor 25 is not limited to three. Although not shown, an X-ray filter may be attached to the rotor 25 to switch not only the second X-ray conduit but also the X-ray filter.

FIG. 10 is a schematic diagram showing a second example of the configuration of the mirror 73 of the X-ray analysis apparatus 100 of this embodiment. As shown in FIG. 10, the mirror 73 has a hole 731 formed in a portion through which the X-ray passes. As a result, the portion other than the hole 731 through which the X-rays can be observed by the imaging unit 60, and for example, coaxial observation can be performed with the X-rays and the optical microscope.

Further, a collimator 732 is provided inside the hole 731 of the mirror 73. The shape of the collimator 732 can be circular, but is not limited to circular. For example, a quadrangle or a hexagon may be used. The collimator 732 can collimate and focus X-rays. That is, the collimator 732 is provided using the hole 731 of the mirror 73. As a result, the X-rays can be converted into parallel rays toward the sample, chromatic aberration can be reduced, and the depth of focus of the X-rays can be increased.

FIG. 11 is a schematic diagram showing a third example of the configuration of the mirror 76 of the X-ray analysis apparatus 100 of this embodiment. In the third example, the X-ray analysis apparatus 100 includes a pellicle mirror 76 that is arranged at a proper distance from the emission end 12 of the first X-ray conduit 10. The pellicle mirror 76 is held by a mirror holding member 761. The pellicle mirror 76 is made of a material that can transmit X-rays. Since no gaps or cutouts for transmitting X-rays are required unlike ordinary mirrors, it is possible to eliminate adverse effects such as lack of a visual field when observing with an optical microscope or the like.

Further, a part of the mirror holding member 761 may be the collimator 762. As a result, the X-rays can be converted into parallel rays toward the sample, chromatic aberration can be reduced, and the depth of focus of the X-rays can be increased.

FIG. 12 is a schematic diagram showing a first example of the reflecting member of the X-ray analysis apparatus 100 of the present embodiment. It should be noted that in the figure, for convenience, the radial dimension is drawn larger than the lengthwise dimension of the X-ray conduit, but the radial dimension is actually smaller. As shown in FIG. 12, the distance between the X-ray generation center 31 or the exit end 32 of the X-ray tube 30 and the entrance end 11 of the X-ray conduit (first X-ray conduit 10) is relatively long. In the first example, an X-ray conduit 80 as a reflecting member having an X-ray reflecting film 801 is provided between the emitting end 32 of the X-ray tube 30 and the incident end 11 of the first X-ray conduit 10. There is. A reflective film 801 is formed on the inner wall of the X-ray conduit 80.

Between the X-ray conduit 80 and the first X-ray conduit 10, a shield member 90 (beam that shields X-rays generated in the X-ray tube 30 from directly entering the first X-ray conduit 10). (Also called a stopper) is arranged. The shielding member 90 can be manufactured using an element with a large mass, such as lead, tin, or gold.

The reflective film 801 is formed by further laminating a plurality of laminated films in which a second film material containing a second element having a mass different from that of the first element is stacked on a first film material containing the first element. For example, the first element can be an element heavier than the second element. The first film material may contain only the first element or may contain a compound with the first element. Further, the second film material may contain only the second element or may contain a compound with the second element. As the first film material, for example, tungsten (W), molybdenum (Mo), etc. can be used, and as the second film material, carbon (C), silicon (Si), boron carbide (B ₄ C), etc. Can be used, but is not limited thereto.

The reflective film 801 can be manufactured by, for example, a sputtering method, an electron beam evaporation method, a CVD (chemical vapor deposition) method, an MBE (Molecular Beam Epitaxy) method, or the like.

The total thickness of the first film material and the second film material can be, for example, about 1 nm to 5 nm, but is not limited thereto. The laminated film in which the first film material and the second film material are laminated can be further laminated by about 100 to 300 pairs to form a multilayer film. The number of pairs is not limited to 100 to 300, but the thickness of the multilayer film can be about 1 μm or less.

As described above, the reflection film 801 is a multilayer film, and has a structure in which layers of materials having a large difference in refractive index (first film material and second film material) are alternately laminated with a constant thickness. When the X-ray generated by the X-ray tube 30 is incident on the reflection film 801, the X-ray having the wavelength λ determined by the formula of 2×d×sin θ=n×λ due to the interference effect of the X-ray scattered in each layer. Can be taken out. Here, d is the sum of the thicknesses of the first film material and the second film material, θ is the angle between the film surface of the reflective film and the X-ray, and n is a constant. The reflection of X-rays on the reflection film is so-called Bragg reflection. The energy E of the X-ray having the wavelength λ can be expressed by E=k/λ. Here, k is a constant.

As shown in FIG. 12, the X-rays (monochromatic X-rays) reflected by the reflection film 801 of the X-ray conduit 80 enter the first X-ray conduit 10 and The X-ray reflected by the reflection film 801 of the X-ray conduit 80 by being incident on the wall surface at an angle α that is equal to or less than the critical angle for total reflection is totally reflected by the inner wall surface of the first X-ray conduit 10 and is emitted from the emission end. The light is emitted from 12 toward the sample S. Further, by providing the shielding member 90, it is possible to prevent the X-rays generated in the X-ray tube 30 from directly entering the first X-ray conduit 10, and the monochromatic color from the emission end 12 of the first X-ray conduit 10. Only the converted X-rays can be extracted.

Between the emitting end 32 of the X-ray tube 30 and the incident end 11 of the X-ray conduit (first X-ray conduit 10) arranged apart from each other, the first film material containing the first element is provided with the first element. Since the X-ray conduit 80 has the reflection film 801 in which a plurality of laminated films in which the second film material containing the second element having a different mass is laminated is further provided, the X-ray of the required wavelength extracted by the X-ray conduit 80 ( Monochromatic light) can be directed into the first X-ray conduit 10. The first X-ray conduit 10 can collect X-rays (monochromatic light) having a required wavelength and irradiate the sample S with the condensed X-rays. This makes it possible to extract X-rays (monochromatic light) having a desired wavelength from the X-ray spectrum generated by the X-ray tube 30 and irradiate the sample S, so that it is possible to excite only a specific element and The composition analysis can be easily performed.

FIG. 13 is a schematic diagram showing a second example of the reflecting member of the X-ray analysis apparatus 100 of the present embodiment. In the second example, the inner diameter of the X-ray conduit 80 on the X-ray generation center 31 side is reduced, and the inner diameter of the X-ray conduit 80 on the first X-ray conduit 10 side is increased. That is, the X-ray conduit 80 has a tapered inner wall whose diameter increases from the X-ray generation center 31 side toward the first X-ray conduit 10 side, and the reflective film 802 is formed on the inner wall. The structure of the reflective film 802 is the same as that of the reflective film 801 of the first example, and thus the description thereof is omitted.

The thickness of the reflection film 802 may be the same from the X-ray generation center 31 side of the X-ray conduit 80 toward the first X-ray conduit 10 side, as in the case of the reflection film 801 of the first example, or in FIG. As shown, the film thickness may be gradually increased from the X-ray generation center 31 side of the X-ray conduit 80 toward the first X-ray conduit 10 side. The incident angle θ of X-rays from the X-ray tube 30 gradually decreases from the X-ray generation center 31 side of the X-ray conduit 80 toward the first X-ray conduit 10 side, so that the X-rays reflected by the reflective film 802 are reflected. The wavelength of the rays is larger on the first X-ray conduit 10 side than on the X-ray generation center 31 side. Therefore, by making the thickness of the reflection film 802 thicker on the first X-ray conduit 10 side than on the X-ray generation center 31 side, it is possible to make the wavelengths of the reflected X-rays uniform and further monochromatic. The generated X-ray can be extracted.

FIG. 14 is a schematic diagram showing a third example of the reflecting member of the X-ray analysis apparatus 100 of the present embodiment. In the third example, the shape of the inner wall surface of the X-ray conduit 80 may be a curved surface having a curvature. The curved surface can be, for example, a spheroidal surface or a paraboloid of rotation, but is not limited thereto. Further, the inner diameter of the X-ray conduit 80 on the X-ray generation center 31 side is reduced, and the inner diameter of the X-ray conduit 80 on the first X-ray conduit 10 side is increased. The reflective film 803 has the same configuration as the reflective film 801 of the first example, and thus the description thereof will be omitted.

The thickness of the reflection film 803 may be the same from the X-ray generation center 31 side of the X-ray conduit 80 toward the first X-ray conduit 10 side as in the case of the reflection film 801 of the first example, or in FIG. As shown, the film thickness may be gradually reduced from the X-ray generation center 31 side of the X-ray conduit 80 toward the first X-ray conduit 10 side. The incident angle θ of X-rays from the X-ray tube 30 gradually increases from the X-ray generation center 31 side of the X-ray conduit 80 toward the first X-ray conduit 10 side, so that X reflected by the reflective film 802 is reflected. The wavelength of the rays is smaller on the first X-ray conduit 10 side than on the X-ray generation center 31 side. Therefore, by making the thickness of the reflection film 802 thinner on the first X-ray conduit 10 side than on the X-ray generation center 31 side, X-rays of the same wavelength can be reflected over a wide range of the reflection film 803. It is possible to take out more monochromatic X-rays.

FIG. 15 is a schematic diagram showing a fourth example of the reflecting member of the X-ray analysis apparatus 100 of the present embodiment. In the fourth example, a mirror 85 as a reflecting member having an X-ray reflecting film 851 is provided between the emitting end 32 of the X-ray tube 30 and the incident end 11 of the first X-ray conduit 10. A reflective film 851 is formed on the reflective surface of the mirror 85. Between the X-ray generation center 31 and the mirror 85, a limiting member 91 for limiting the traveling direction of the X-ray is arranged so that the X-ray generated by the X-ray tube 30 is incident only on the reflection film 851 of the mirror 85. doing. The limiting member 91 can use, for example, a slit or an aperture, but is not limited to these. The reflective film 851 has the same configuration as the reflective film 801 of the first example, and thus the description thereof will be omitted.

As shown in FIG. 15, the X-rays (monochromatic X-rays) reflected by the reflection film 851 of the mirror 85 enter the first X-ray conduit 10 and reach the inner wall surface of the first X-ray conduit 10. On the other hand, the X-ray reflected by the reflection film 851 of the mirror 85 by being incident at an angle α equal to or less than the critical angle for total reflection is totally reflected by the inner wall surface of the first X-ray conduit 10 and is emitted from the emission end 12 to the sample S. It is emitted toward. As a result, only monochromatic X-rays can be extracted from the emission end 12 of the first X-ray conduit 10.

FIG. 16 is a schematic diagram showing an example of an X-ray spectrum generated by the X-ray tube 30. The horizontal axis represents the X-ray wavelength, and the vertical axis represents the X-ray intensity. The X-ray spectrum shown in FIG. 16 is a schematic illustration, and may differ from the actual X-ray spectrum. As shown in FIG. 16, the X-rays generated in the X-ray tube 30 continued from the shortest wavelength determined by the tube voltage (voltage for accelerating electrons emitted from the filament by the thermoelectron effect) to the long wavelength side. It is a continuous X-ray having an intensity distribution.

As described above, between the emission end 32 of the X-ray tube 30 and the incidence end 11 of the first X-ray conduit 10, the second element having a mass different from that of the first element is contained in the first film material containing the first element. By providing the X-ray conduit 80 or the mirror 85 as a reflection member having a reflection film in which a plurality of laminated films in which the second film material including is included is further laminated, a required wavelength of continuous X-rays (see a pattern in FIG. 16). It is possible to take out the X-rays (the colored portions) attached thereto) and guide them into the first X-ray conduit 10. The first X-ray conduit 10 can collect X-rays (monochromatic light) having a required wavelength and irradiate the sample S with the condensed X-rays. This makes it possible to extract X-rays (monochromatic light) having a desired wavelength from the X-ray spectrum generated by the X-ray tube 30 and irradiate the sample S, so that it is possible to excite only a specific element and The composition analysis can be easily performed.

10 first X-ray conduit 20, 26, 27, 28 second X-ray conduit 11, 21 entrance end 12, 22 exit end 25 rotor 30 X-ray tube 31 X-ray generation center 32 exit end 40 PC
41 control unit 42 calculation unit 43 display unit 50 X-ray detection unit 60 imaging unit 71 optical system storage unit 72 sample storage unit 73 mirror 731 hole 732, 762 collimator 74 X-ray transmission window 75 stage 76 pellicle mirror 80 X-ray conduit 801, 802, 803 Reflective film 85 Mirror 851 Reflective film 90 Shielding member 91 Restricting member

Claims (9)

An X-ray tube for generating X-rays,
A first X-ray conduit for condensing X-rays generated by the X-ray tube and irradiating the irradiated body;
An X-ray analysis apparatus comprising: a second X-ray conduit arranged between an emission end of the X-ray tube and an incidence end of the first X-ray conduit. The X-ray analysis apparatus according to claim 1, wherein a predetermined film material is formed on the inner wall of the second X-ray conduit. The X-ray analysis apparatus according to claim 2, wherein the film material formed on the inner wall of the second X-ray tube is the same metal as the target included in the X-ray tube. A plurality of the second X-ray conduits,
One second X-ray conduit is selected from a plurality of the second X-ray conduits, and the selected one second X-ray conduit is used as the emission end of the X-ray tube and the first X-ray conduit. The X-ray analysis apparatus according to any one of claims 1 to 3, further comprising a selection unit disposed between the X-ray analysis unit and the incident end. The X-ray analysis apparatus according to any one of claims 1 to 4, wherein the shape of the inner wall surface of the second X-ray conduit is a curved surface having a curvature. A mirror disposed at an appropriate distance from the emission end of the first X-ray conduit,
The X-ray analysis apparatus according to any one of claims 1 to 5, wherein the mirror has a hole formed in a portion through which an X-ray passes. The X-ray analysis apparatus according to claim 6, wherein a collimator is provided in the hole of the mirror. The X-ray analysis apparatus according to any one of claims 1 to 5, further comprising a pellicle mirror arranged at a proper distance from an emission end of the first X-ray conduit. An X-ray tube for generating X-rays,
A first X-ray conduit for condensing X-rays generated by the X-ray tube and irradiating the irradiated body;
A reflecting member arranged between the emitting end of the X-ray tube and the incident end of the first X-ray conduit, the reflecting member having an X-ray reflecting film,
The reflective film is
An X-ray analysis apparatus, wherein a plurality of laminated films in which a second film material containing a second element having a mass different from that of the first element is stacked on a first film material containing the first element are further laminated.

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