JP2020092422A - 横スプリアスモード抑制を有する弾性波デバイス - Google Patents
横スプリアスモード抑制を有する弾性波デバイス Download PDFInfo
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14561—Arched, curved or ring shaped transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14517—Means for weighting
- H03H9/14529—Distributed tap
- H03H9/14532—Series weighting; Transverse weighting
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/1457—Transducers having different finger widths
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/72—Networks using surface acoustic waves
- H03H9/725—Duplexers
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- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Abstract
Description
本願は、「横スプリアスモード抑制を有する弾性波共振器」との名称の2018年12月3日に出願された米国仮特許出願第62/774,734号の優先権の利益を主張し、その開示は全体がここに参照により組み入れられる。本願は、「湾曲セクションを有する弾性波共振器」との名称の2018年12月3日に出願された米国仮特許出願第62/774,762号の優先権の利益を主張し、その開示は全体がここに参照により組み入れられる。
Claims (20)
- 弾性波デバイスであって、
圧電層と、
前記圧電層上のインターディジタルトランスデューサ電極と
を含み、
前記インターディジタルトランスデューサ電極は、前記弾性波デバイスの横スプリアスモードを抑制するべく前記弾性波デバイスの導波路に曲率をもたらすように配列された湾曲セクションを含む、弾性波デバイス。 - 前記湾曲セクションは湾曲角が1°から20°の範囲にある、請求項1の弾性波デバイス。
- 前記弾性波共振器のアクティブ領域の中央部分よりも遅い速度を有する前記弾性波デバイスの低速度境界領域をもたらすべく配列されたピストンモード構造をさらに含む、請求項2の弾性波デバイス。
- 前記湾曲セクションは湾曲角が10°から20°の範囲にある、請求項1の弾性波デバイス。
- 前記弾性波デバイスは、弾性表面波を生成するべく構成された温度補償弾性表面波共振器である、請求項1の弾性波デバイス。
- 前記インターディジタルトランスデューサ電極は、本質的に弓状セクションから構成されるバスバーを含む、請求項1の弾性波デバイス。
- 前記インターディジタルトランスデューサ電極は、弓状セクション及び直線状セクションを含むバスバーを含む、請求項1の弾性波デバイス。
- 弾性波デバイスであって、
圧電層と、
前記圧電層上のインターディジタルトランスデューサ電極と
を含み、
前記インターディジタルトランスデューサ電極は、
弓状セクションを含むバスバーと、
前記バスバーから延びる指と
を含み、
前記インターディジタルトランスデューサ電極は、前記弾性波デバイスの横スプリアスモードを抑制するべく構成される、弾性波デバイス。 - 前記弓状セクションは湾曲角が1°から20°の範囲にある、請求項8の弾性波デバイス。
- 前記弓状セクションは湾曲角が10°から20°の範囲にある、請求項8の弾性波デバイス。
- 前記バスバーは、本質的に前記弓状セクションから構成される、請求項8の弾性波デバイス。
- 前記バスバーは直線状セクションを含む、請求項8の弾性波デバイス。
- 前記弾性波デバイスのアクティブ領域の中央部分よりも遅い速度を有する前記弾性波デバイスの低速度境界領域をもたらすべく配列されたピストンモード構造をさらに含む、請求項8の弾性波デバイス。
- 前記インターディジタルトランスデューサ電極を覆う温度補償層をさらに含む、請求項8の弾性波デバイス。
- 前記温度補償層を覆う分散調整層をさらに含む、請求項14の弾性波デバイス。
- キャリア基板をさらに含み、
前記圧電層は前記キャリア基板の上に存在する、請求項8の弾性波デバイス。 - キャリア基板及び分散調整層をさらに含み、
前記分散調整層は、前記キャリア基板と前記圧電層との間に配置される、請求項8の弾性波デバイス。 - 前記弾性波デバイスは、弾性表面波を生成するべく構成された弾性表面波共振器である、請求項8の弾性波デバイス。
- 弾性波フィルタであって、
弾性波共振器と、
複数の付加弾性波共振器と
を含み、
前記弾性波共振器は、
圧電層と、
前記圧電層上のインターディジタルトランスデューサ電極と
を含み、
前記インターディジタルトランスデューサ電極は、
弓状セクションを含むバスバーと、
前記バスバーから延びる指と
を含み、
前記弾性波共振器及び前記付加的弾性波共振器は一緒になって、無線周波数信号をフィルタリングするべく構成される、弾性波フィルタ。 - 前記弾性波共振器はシャント弾性波共振器である、請求項19の弾性波フィルタ。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862774762P | 2018-12-03 | 2018-12-03 | |
US201862774734P | 2018-12-03 | 2018-12-03 | |
US62/774,762 | 2018-12-03 | ||
US62/774,734 | 2018-12-03 |
Publications (3)
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JP2020092422A true JP2020092422A (ja) | 2020-06-11 |
JP2020092422A5 JP2020092422A5 (ja) | 2022-12-06 |
JP7348044B2 JP7348044B2 (ja) | 2023-09-20 |
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JP2019217796A Active JP7348044B2 (ja) | 2018-12-03 | 2019-12-02 | 弾性波デバイスと弾性波フィルタ |
Country Status (3)
Country | Link |
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US (2) | US11165411B2 (ja) |
JP (1) | JP7348044B2 (ja) |
SG (1) | SG10201911416RA (ja) |
Cited By (2)
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WO2023058755A1 (ja) * | 2021-10-08 | 2023-04-13 | 株式会社村田製作所 | 弾性波装置および弾性波装置の製造方法 |
WO2024106120A1 (ja) * | 2022-11-14 | 2024-05-23 | 株式会社村田製作所 | 弾性波装置 |
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SG10201911416RA (en) | 2018-12-03 | 2020-07-29 | Skyworks Solutions Inc | Acoustic Wave Device With Transverse Spurious Mode Suppression |
CN116686217A (zh) * | 2021-03-29 | 2023-09-01 | 华为技术有限公司 | 谐振器、滤波器及电子设备 |
CN113676152A (zh) * | 2021-08-26 | 2021-11-19 | 中国科学院上海微系统与信息技术研究所 | 一种弹性波谐振器及其制备方法 |
US20230133161A1 (en) * | 2021-10-29 | 2023-05-04 | Qorvo Us, Inc. | Surface acoustic wave (saw) structures with transverse mode suppression |
CN114567283B (zh) * | 2022-01-28 | 2023-04-11 | 江苏卓胜微电子股份有限公司 | 叉指换能结构、谐振器、谐振器制作方法及滤波器 |
CN115102518B (zh) * | 2022-05-16 | 2023-07-14 | 武汉敏声新技术有限公司 | 一种横向激励体声波谐振器 |
CN116405005B (zh) * | 2023-03-15 | 2023-11-28 | 北京航天微电科技有限公司 | 叉指换能器的指条参数确定方法、装置、设备及滤波器 |
CN116208119B (zh) * | 2023-04-19 | 2023-07-14 | 深圳新声半导体有限公司 | 声表面波装置及其制造方法 |
CN117240248B (zh) * | 2023-11-13 | 2024-03-29 | 深圳新声半导体有限公司 | 声表面波谐振器、mems设备 |
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WO2024106120A1 (ja) * | 2022-11-14 | 2024-05-23 | 株式会社村田製作所 | 弾性波装置 |
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US20200177159A1 (en) | 2020-06-04 |
US11165411B2 (en) | 2021-11-02 |
JP7348044B2 (ja) | 2023-09-20 |
US11990892B2 (en) | 2024-05-21 |
SG10201911416RA (en) | 2020-07-29 |
US20220014177A1 (en) | 2022-01-13 |
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