JP2020090826A - Tracked conveyance vehicle system - Google Patents

Abstract

To provide a tracked conveyance vehicle system capable of returning a movable track, which has been moved from a first position connectable to a fixed track to a second position separated by a prescribed distance, to the first position without manpower.SOLUTION: A tracked conveyance vehicle system 1 in which a part of a track 2 of a conveyance vehicle 10 is provided as a movable track 40 so as to be movable relative to a fixed track 30 other than the movable track 40, comprises: a movement mechanism 45, a holding mechanism 70, and a control device 90. The movement mechanism 45 moves the movable track 40 between a first position P1 that connects the movable track 40 to the fixed track 30 and a second position P2 that is a prescribed distance away from the first position P1. The holding mechanism 70 holds or releases a connection state of the movable track 40 to the fixed track 30 at the first position P1. The control device 90 controls the movement mechanism 45 to move the movable track 40.SELECTED DRAWING: Figure 3

Description

The present invention relates to a guided vehicle system.

A guided vehicle system in which a guided vehicle runs on a track installed on a ceiling or the like, and carries a container such as a FOUP (Front Opening Unified Pod) or a reticle pod in which an object to be stored such as a semiconductor wafer or a glass substrate is stored. It has been known. The track of such a guided vehicle system may be arranged so as to straddle two spaces defined by a fireproof shutter provided in a building. Patent Document 1 discloses a guided vehicle system in which a movable track is provided below a fire protection shutter. In this guided-rail guided vehicle system, both ends of the movable track are engaged with the fixed track to form a series of tracks. When the engagement is released, the action of the weight attached to the movable track is performed. As a result, the movable track moves so as to retreat from below the fire protection shutter.

JP, 2005-138658, A

In the conventional tracked guided vehicle system, the movable track is moved to the second position, which is separated from the first position connectable to the fixed track by a predetermined distance, only by releasing the engaging piece provided on the electric switch. It is possible. However, in order to return the fixed track to the first position where it can be connected to the fixed track, it is necessary to use manpower. Such work is a burden on the worker.

Therefore, an object of the present invention is to transfer a movable track, which is moved from a first position connectable to a fixed track to a second position separated by a predetermined distance, to the first position without manual operation. To provide a car system.

In the guided vehicle system of the present invention, a movable track is connected to a fixed track in a guided vehicle system in which a part of the track of the guided vehicle is provided as a movable track so as to be movable with respect to a fixed track other than the movable track. A moving mechanism that moves the movable track between a first position and a second position that is a predetermined distance away from the first position, and a holding mechanism that holds or releases the connection state of the movable track to the fixed track at the first position. And a control device that controls the moving mechanism to move the movable track.

In the guided vehicle system of this configuration, a moving mechanism for returning the movable track from the second position to the first position is provided, and a holding mechanism for holding the connection state of the movable track returned to the first position to the fixed track. Is provided. As a result, the movable track that has moved to the second position that is a predetermined distance away from the first position that can be connected to the fixed track can be moved to the first position, and the movable track can be fixed to the first position. become. As a result, the movable track that has moved to the second position that is a predetermined distance away from the first position can be returned to the first position without manual intervention.

In the guided vehicle system of the present invention, the moving mechanism includes a first biasing member that biases the movable track in the direction of the second position, and the movable track that moves the movable track against the first position against the first biasing member. And a drive device for moving to. With this configuration, the movable track can be moved to the second position with a simple configuration.

In the rail guided vehicle system of the present invention, the holding mechanism includes a second biasing member that biases the movable track from the second position toward the first position by a biasing force generated by contracting the contracting portion, and a fixed track. And a locking member that supports the movable track that is provided on the second biasing member and is biased by the second biasing member. With this configuration, the movable track can be stably fixed to the first position with a simple configuration.

The guided vehicle system of the present invention may further include a detection unit that detects a contracted state of the contraction unit, and the control device may control the drive device based on a detection result of the detection unit. With this configuration, even when a motor or the like is provided as the drive device, it is possible to prevent the drive device from being overloaded. As a result, the durability and safety of the drive device can be improved.

In the track guided vehicle system of the present invention, the movable track may be provided so as to be movable in a horizontal plane. As a result, the movable track can be retracted with a simple configuration.

In the guided vehicle system of the present invention, the movable track may be provided in a horizontal plane so as to be movable in a direction oblique to the carrying direction of the guided vehicle. As a result, the movable track can be moved with a simple structure and space saving.

In the track guided vehicle system of the present invention, the fixed track is fixed to the base member, and the movable track is fixed to the base member via the sliding mechanism, and the movable track is opposite to the connection portion with the fixed track. When the end on the side is the front end, the sliding mechanism has two support parts that support the front end part of the movable track when positioned at the first position, and the two support parts are the movable track. May be arranged so as to sandwich a center line extending in the extending direction, and may be arranged at positions equidistant from each other. With this configuration, the front end portion is stably supported when the movable track is located at the first position. As a result, it is possible to stabilize the traveling when the transport vehicle transfers from the front end of the movable track to another track.

In the guided vehicle system of the present invention, the guided vehicle may be a ceiling guided vehicle that travels on the track while being suspended from the track. In this case, the present invention can be applied to an overhead traveling vehicle.

According to the present invention, a movable track that has moved to a second position that is a predetermined distance away from a first position that can be connected to a fixed track can be returned to the first position without manpower.

FIG. 1 is a front view showing a guided vehicle system according to an embodiment. FIG. 2 is a cross-sectional view showing an enlarged view of the carrier vehicle and the track of FIG. FIG. 3 is a perspective view showing a movable track and a fixed track included in the guided vehicle system. FIG. 4 is a perspective view showing a state in which the base plate is removed from FIG. FIG. 5 is a bottom view of the movable track and the fixed track located at the first position as viewed from below. FIG. 6 is a bottom view of the movable track and the fixed track located at the second position as seen from below. FIG. 7 is a perspective view showing the second biasing member provided on the movable track. 8A is a plan view showing a state of the sliding mechanism when the movable track is located at the first position, and FIG. 8B is a plan view showing a state of the sliding mechanism when the movable track is located at the second position. It is a figure.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same elements will be denoted by the same reference symbols, without redundant description.

The guided vehicle system 1 is a system for carrying an article F using a ceiling guided vehicle 10 that can move along a track 2. The article F includes, for example, a container that stores a plurality of semiconductor wafers, a reticle pod that stores glass substrates, and general parts. Here, for example, a rail guided vehicle system 1 in which a ceiling guided vehicle 10 (hereinafter, simply referred to as a "carried vehicle 10") travels along a track 2 laid on a ceiling or the like in a factory or the like is taken as an example. I will give you an explanation. As shown in FIG. 1, the guided vehicle system 1 mainly includes a plurality of guided vehicles 10, a track 2, a plurality of mounting portions (not shown), and the like.

The transport vehicle 10 travels along the track 2 and transports the article F. The transport vehicle 10 is configured so that the article F can be transferred. The transport vehicle 10 includes a traveling unit 11 that causes the transport vehicle 10 to travel along the track 2, a power receiving unit 12, a main body frame 13, a lateral feed unit 14, a θ drive 15, an elevating drive unit 16, and an elevator. 17 and a fall prevention cover 18.

The traveling unit 11 causes the transport vehicle 10 to travel along the track 2. The traveling unit 11 has a motor 11a, a traveling roller 11b, and a side roller 11c. The lateral feed unit 14 collectively laterally feeds the θ drive 15, the elevation drive unit 16, and the elevator platform 17 in a direction perpendicular to the traveling direction of the track 2. The θ drive 15 rotates at least one of the lifting drive unit 16 and the lifting platform 17 within a predetermined angle range in the horizontal plane. The elevating/lowering drive unit 16 elevates and lowers the elevating table 17 by winding or unwinding a suspending material such as a wire cable, a rope and a belt. A chuck is provided on the lifting table 17 so that the article F can be grasped or released freely. The fall prevention covers 18 are provided, for example, in a pair in front and behind in the traveling direction of the transport vehicle 10. The fall prevention cover 18 prevents the article F from dropping during transportation by causing a nail or the like (not shown) to appear and disappear.

As shown in FIGS. 1 and 2, the track 2 is laid, for example, near the ceiling, which is an overhead space of an operator. The track 2 is suspended from the ceiling C, for example. The track 2 is a traveling path provided for traveling the transport vehicle 10. The track 2 has a first base member (base member) 21 fixed to the ceiling C, a track member 22 fixed to the first base member 21, and a power feeding portion 23 provided on the inner surface of the track member 22. is doing.

The first base member 21 is a plate-shaped member and is fixed to the ceiling C with bolts or the like. The track member 22 is fixed to the first base member 21 with bolts or the like. The track member 22 includes a top plate portion 22a facing the first base member 21, side surface portions 22b and 22b extending downward from both ends of the top plate portion 22a, and side surface portions 22b and 22b, respectively. Bottom surfaces 22c and 22c extending horizontally from the lower end. For example, the guide portion 22d is disposed on the branch portion of the track 2 or on the upper surfaces of the bottom surface portions 22c and 22c in the connecting portion (seam) of the track member 22.

The traveling unit 11 of the transport vehicle 10 travels in a space S surrounded by the top plate portion 22a, the side surface portions 22b and 22b, and the bottom surface portions 22c and 22c. The motor 11a rotationally drives the traveling roller 11b by the electric power supplied to the power receiving unit 12. The traveling rollers 11b and 11b are driven by the motor 11a and roll on the upper surfaces of the bottom surface portions 22c and 22c of the track member 22. A linear motor or the like may be used instead of the motor that directly rotates the traveling roller. The side rollers 11c, 11c are provided so as to roll while being in contact with the guide portion 22d described above. The power receiving unit 12 receives power from the power feeding unit 23 of the track 2 in a non-contact state.

In the guided vehicle system 1 of the present embodiment, a part of the track 2 of the guided vehicle 10 is provided as a movable track 40 so as to be movable with respect to a fixed track 30 other than the movable track 40. As shown in FIGS. 3 to 7, the guided vehicle system 1 includes a fixed track 30, a movable track 40, a moving mechanism 45, a holding mechanism 70, and a control device 90. The fixed track 30 includes the first base member 21 and the track member 22 described above. The fixed track 30 is provided immovably with respect to the ceiling C. The movable track 40 has the above-mentioned first base member 21, the second base member 41, and the above-mentioned track member 22.

The moving mechanism 45 is movable between a first position P1 (see FIG. 5) that connects the movable track 40 to the fixed track 30 and a second position P2 (see FIG. 6) that is apart from the first position P1 by a predetermined distance. The orbit 40 is moved. The first position P1 of the present embodiment is arranged below the fire prevention shutter SH, that is, the fire prevention shutter SH that has operated during an abnormality contacts the movable track 40 at the first position P1. The second position P2 of the present embodiment is a position where the connection with the fixed track 30 is released, and a position displaced from below the fire protection shutter SH. That is, the fire protection shutter SH that has operated during an abnormality does not come into contact with the movable track 40 located at the second position P2. The moving mechanism 45 includes a sliding mechanism 42, a first urging member 47, and a drive device 50.

The sliding mechanism 42 is configured to slide the second base member 41 with respect to the first base member 21. An example of the sliding mechanism 42 is a linear motion guide. The sliding mechanism 42 allows the movable track 40 to move in a horizontal plane, and is oblique to the transport direction of the transport vehicle 10 (for example, the predetermined angle α is 20° to 60°: see FIG. 8A). ).

The sliding mechanism 42 has a sliding rail 42a and a sliding block (support portion) 42b. The slide rail 42 a is slidably fixed to the first base member 21. One of the sliding blocks 42b is fixed to the second base member 41, and the other is fixed to the sliding rail 42a. With such a configuration, the movable track 40 can slide with respect to the fixed track 30.

The end of the track member 22 of the movable track 40 opposite to the connecting portion with the fixed track 30 is referred to as a front end 22e (see FIGS. 8A and 8B). The sliding mechanism 42 of the present embodiment is provided with two sliding blocks 42b and 42b so as to support the front end portion 22e of the track member 22 of the movable track 40 when the movable track 40 is located at the first position P1. (See FIG. 8A). The two sliding blocks 42b, 42b are arranged so as to sandwich the center line CL1 extending in the extending direction in the movable track 40, and at the same distance from the center line CL1.

The first urging member 47 urges the movable track 40 in the direction from the first position P1 to the second position P2 (the direction of the white arrow in FIGS. 3 and 5, hereinafter referred to as “retraction direction ED”). An example of the first biasing member 47 is a constant force spring. The first biasing member 47 has one end fixed to the first base member 21 and the other end fixed to the second base member 41. The first urging member 47 pulls the movable track 40 in the retracting direction ED by the tensile load in the retracting direction ED.

The drive device 50 moves the movable track 40 in the direction from the second position P2 to the first position P1 against the first biasing member 47 (the black arrow direction in FIGS. 3 and 5: hereinafter, also referred to as “return direction RD”). (Referred to)). The drive device 50 includes a wire cable 51, a winding unit 53, a drive unit 55, and a ratchet mechanism 57. The wire cable 51 has one end connected to the second biasing member 71 and the other end connected to the winding portion 53. The wire cable 51 is guided by two first pulleys 52 a, 52 provided on the fixed track 30 and a plurality of second pulleys 52 b, 52 b provided on the first base member 21. The winding unit 53 is, for example, a cylindrical member, and is rotationally driven by the drive unit 55. The winding unit 53 winds the wire cable 51 by winding the wire cable 51 around the outer peripheral surface thereof.

The drive unit 55 is, for example, a motor, and applies a rotational force in a winding direction of the wire cable 51 to the winding unit 53. The wire cable 51 is tensioned by being wound up by the winding portion 53, and generates a pulling force in the return direction RD. The ratchet mechanism 57 prevents the winding portion 53 from rotating in the unwinding direction of the wire cable 51. That is, the drive device 50 prevents the tension of the wire cable 51 from being loosened even when the rotational force in the winding direction is not applied by the drive unit 55. The ratchet mechanism 57 is a known mechanism configured by combining, for example, a gear, a pawl (claw) that engages with the gear, a solenoid that releases the engagement of the pawl with the gear, and a battery that operates the solenoid when power is lost. Is.

The holding mechanism 70 holds or releases the connection state of the movable track at the first position P1. The holding mechanism 70 includes a retractable second urging member 71 that positions the movable track 40 at the first position P1, and a locking member 77. The second urging member 71 has a fixed portion 72, a connecting portion 73, a movable portion 74, compression springs (contraction portions) 75, 75, and a detection portion 76.

The fixed portion 72 is fixed to the second base member 41. The connecting portion 73 is connected to the wire cable 51. The movable portion 74 has a base end portion 74a, a terminal end portion 74b, and shaft portions 74c, 74c that connect the base end portion 74a and the terminal end portion 74b. The base end portion 74 a of the movable portion 74 is connected to the connecting portion 73. Each of the compression springs 75, 75 is inserted through the shaft portions 74c, 74c, one end of which is in contact with the fixed portion 72 and the other end thereof is in contact with the terminal end portion 74b. The detection unit 76 detects the contracted state of the compression springs 75, 75. The detection unit 76 is an optical axis sensor provided in the fixed unit 72, and detects the shielding of the optical axis OA by the shielding plate 74d attached to the terminal end portion 74b.

The locking member 77 is provided on the fixed track 30. When the movable track 40 is pulled in the return direction RD by the wire cable 51, a part of the track member 22 of the movable track 40 contacts (supports) the locking member 77. When the movable track 40 is further pulled by the wire cable 51 while the movable track 40 is pressed against the locking member 77, the movable portion 74 of the second biasing member 71 moves in the return direction RD. As a result, the compression springs 75, 75 contract. When the compression springs 75, 75 contract, a force that urges the movable track 40 in the return direction RD is generated. That is, the load acts in the direction in which the movable track 40 is pressed against the locking member 77. Thereby, the movable track 40 can be positioned at the first position P1.

The controller 90 controls the operation of the drive device 50. The control device 90 is an electronic control unit including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The control device 90 can be configured as, for example, software in which a program stored in the ROM is loaded on the RAM and executed by the CPU. The control device 90 may be configured as hardware such as an electronic circuit.

The control device 90 controls the drive device 50 to move the movable track 40. The controller 90 controls the drive unit 55 to wind the wire cable 51. The control device 90 controls the drive device 50 based on the detection result of the detection unit 76 of the second biasing member 71. More specifically, when winding the wire cable 51, the drive of the drive unit 55 is stopped at the time when the detection unit 76 detects it. The controller 90 may turn off the power of the drive unit 55 at this point. Further, the control device 90 controls the solenoid so as to release the engagement of the ratchet mechanism 57 with the gear when a fire alarm is input from an automatic fire alarm facility or the like.

Next, an operation (retracting operation) of retracting the movable track 40 from the first position P1 to the second position P2 will be described. As described above, the movable track 40 is normally fixed to the first position P1 by being pressed against the locking member 77 by the urging force of the compression springs 75, 75 of the second urging member 71. There is. That is, the movable track 40 is connected to the fixed track 30. In such a state, for example, when a fire alarm is input to the control device 90 from an automatic fire alarm facility or the like, the engagement of the ratchet mechanism 57 with the ratchet gear is released by the solenoid. As a result, the winding section 53 can be rotated in the reverse direction, and the tension of the wire cable 51 is relaxed. When the tension of the wire cable 51 is released, the movable track 40 is pulled by the first biasing member 47 in the retreat direction ED. As a result, the movable track 40 moves to the second position P2.

Next, an operation (return operation) when the movable track 40 is returned from the second position P2 to the first position P1 will be described. For example, the operator operates the operation panel installed on the ground or the like to start the return operation. When the operator operates the operation panel, the drive unit 55 of the drive device 50 operates and the winding unit 53 starts winding the wire cable 51. When tension is generated in the wire cable 51 by winding the wire cable 51, a tensile force is generated on the movable track 40, and the movable track 40 starts moving in the return direction RD.

When the movable track 40 is pulled to the first position P1 by the wire cable 51, the movable track 40 contacts the locking member 77 provided on the fixed track 30. When the movable track 40 contacts the locking member 77, the movement of the movable track 40 in the return direction RD is restricted. When the wire cable 51 is further wound in this state, the compression springs 75, 75 of the second biasing member 71 start to be compressed. When the detection unit 76 detects that the compression of the compression springs 75, 75 has reached the predetermined amount, the detection unit 76 sends the detection signal to the control device 90. The control device 90 to which the detection signal is input controls the drive unit 55 of the drive device 50 to stop the winding of the wire cable 51. The compressed compression springs 75, 75 give a force for pressing the movable track 40 against the locking member 77. Thereby, the movable track 40 is stably positioned at the first position P1.

Next, the function and effect of the guided vehicle system 1 of the above embodiment will be described. In the guided vehicle system 1 of the present embodiment, the moving mechanism 45 for returning the movable track 40 from the second position P2 to the first position P1 is provided, and the fixed track 30 of the movable track 40 returned to the first position P1. A holding mechanism 70 for holding the connection state to the is provided. As a result, the movable track 40 retracted to the second position P2 that is a predetermined distance away from the first position P1 that can be connected to the fixed track 30 is returned to the first position P1, and the movable track 40 is fixed to the first position P1. It becomes possible to do. As a result, the movable track 40 retracted to the second position P2, which is a predetermined distance away from the first position P1, can be returned to the first position P1 without manpower.

In the guided vehicle system 1 of the present embodiment, the first urging member 47 that urges the movable track 40 in the retreat direction ED, and the movable track 40 is pulled in the return direction RD against the first urging member 47. The movable track 40 is moved by the drive device 50. With this configuration, the movable track 40 can be moved with a simple configuration.

In the rail guided vehicle system 1 of the present embodiment, the second biasing member 71 for positioning the movable track 40 at the first position P1 by the compression springs 75, 75 for applying the biasing force, and the fixed track 30 are provided. The movable track 40 is fixed to the first position P1 by the locking member 77 that supports the movable track 40 that is biased by the second biasing member 71. Accordingly, the movable track 40 can be stably fixed to the first position P1 with a simple configuration.

In the guided vehicle system 1 of the present embodiment, the control device 90 controls the drive unit 55 based on the detection result of the detection unit 76 that detects the contracted state of the compression springs 75, 75. With this configuration, it is possible to prevent the drive unit 55 such as a motor from being overloaded. As a result, the durability and safety of the drive unit 55 can be improved.

In the guided vehicle system 1 of the present embodiment, the movable track 40 is configured to move in an oblique direction with respect to the carrying direction of the guided vehicle 10 in a horizontal plane. As a result, the movable track 40 can be retracted with a simple structure and space saving.

In the guided vehicle system 1 of the present embodiment, the two sliding blocks 42b, 42b of the sliding mechanism 42 sandwich the center line CL1 extending in the extending direction in the movable track 40 located at the first position P1. It is arranged so as to be arranged at positions equidistant from the center line CL1. In this configuration, since the front end portion 22e is stably supported when the movable track 40 is located at the first position P1, when the transport vehicle 10 transfers from the front end portion 22e of the movable track 40 to another track 2. The running can be stabilized. Further, the two sliding blocks 42b, 42b of the sliding mechanism 42 are arranged so as to sandwich the center line CL2 extending in the extending direction in the movable track 40 located at the second position P2, and are mutually equal from the center line CL2. It is provided so as to be located at a distance. With this configuration, the front end portion 22e is stably supported even when the movable track 40 is located at the second position P2.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention.

In the above-described embodiment, the movable track 40 has been described by taking an example in which the movable track 40 is configured to move diagonally with respect to the transport direction of the transport vehicle 10 in the horizontal plane. It may be configured so as to move in a vertical direction, or may be configured to move in a direction having a vertical component.

In the above embodiment, the constant load spring was described as an example of the first urging member 47 that urges the movable track 40 in the retreat direction ED. However, a weight that urges the movable track 40 in the retreat direction ED by gravity is used. It may be.

In the above-described embodiment, an example in which the transport vehicle 10 is applied to the track 2 for traveling while suspended is described, but the present invention is also applied to a tracked system in which the transport vehicle travels on a track arranged on the ground. It is possible.

In the above-described embodiment, the example in which the movable track 40 is moved for the purpose of retracting a part of the track 2 from the fire protection shutter SH has been described. However, regardless of such a purpose, a part of the track 2 is used. The present invention can be applied to the case of moving.

DESCRIPTION OF SYMBOLS 1... Tracked guided vehicle system, 2... Track, 10... Ceiling guided vehicle (carrying vehicle), 21... First base member (base member), 22... Track member, 22e... Front end part, 30... Fixed track, 40... Movable track, 41... Second base member, 42... Sliding mechanism, 42a... Sliding rail, 42b... Sliding block (supporting part), 45... Moving mechanism, 47... First biasing member, 50... Driving device, 70... Holding mechanism, 71... Second biasing member, 76... Detecting section, 77... Locking member, 90... Control device, ED... Retracting direction, RD... Returning direction, F... Article, P1... First position, P2 …Second position.

Claims (8)

In a track guided vehicle system, wherein a part of the track of the carrier is provided as a movable track so as to be movable with respect to a fixed track other than the movable track,
A first mechanism for connecting the movable track to the fixed track, and a moving mechanism for moving the movable track between a second position separated by a predetermined distance from the first position,
A holding mechanism that holds or releases the connection state of the movable track to the fixed track at the first position,
A guided vehicle system comprising: a control device that controls the moving mechanism to move the movable track. The moving mechanism is
A first biasing member for biasing the movable track in the direction of the second position,
A drive device that moves the movable track to the first position against the first biasing member,
The guided vehicle system according to claim 1, further comprising: The holding mechanism is
A second biasing member that biases the movable track from the second position toward the first position by the biasing force generated by contracting the contracting portion,
A locking member provided on the fixed track and supporting the movable track biased by the second biasing member,
The guided vehicle system according to claim 2, further comprising: Further comprising a detection unit for detecting the contraction state of the contraction unit,
The guided vehicle system according to claim 3, wherein the control device controls the drive device based on a detection result of the detection unit. The rail guided vehicle system according to any one of claims 1 to 4, wherein the movable track is provided so as to be movable in a horizontal plane. The tracked guided vehicle system according to claim 5, wherein the movable track is provided in the horizontal plane so as to be movable in a direction oblique to the transport direction of the guided vehicle. The fixed track is fixed to the base member,
The movable track is fixed to the base member via a sliding mechanism,
When the end of the movable track opposite to the connection with the fixed track is the front end, the sliding mechanism supports the front end of the movable track when positioned at the first position. Has two supports,
The two support portions are arranged so as to sandwich a center line extending in the extending direction in the movable track, and are arranged at positions equidistant from each other from the center line. 7. The guided vehicle system according to claim 6. The guided vehicle system according to any one of claims 1 to 7, wherein the guided vehicle is a ceiling guided vehicle that travels on the track while being suspended from the track.

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