JP2020076563A - Unit type clean room and unit type clean room construction method - Google Patents

Abstract

To provide a clean room that can be constructed in a building having a ceiling with normal height, without installing a separate duct to supply air.SOLUTION: A clean room 10A has a work area 15 (air cleaning degree high request area 13) or a support area 16, a supply area 17, a gowning area 18, and a maintenance area 19 (air cleaning degree low request area 14) that are divided by a side wall panel 11 and a ceiling panel 12 airtightly installed at predetermined places in the inside of a building. The clean room 10A is a unit type clean room without a duct that enables air to flow in the areas 15 to 19 by using a fan filter unit, and makes the work area 15 or the support area 16, the supply area 17, the gowning area 18, and the maintenance area 19 function as a channel flowing air therein, and in which the air flows in these areas 15 to 19.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a unit type clean room facility method for providing a ductless unit type clean room at a predetermined location of a building, as well as a unit type clean room facility provided at a predetermined location inside a building.

  An indoor compartment divided into multiple rooms, a ceiling-embedded air conditioner that takes in outside air, an in-ceiling chamber that is supplied from the ceiling-embedded air conditioner, and is separated from the indoor compartment, and an in-ceiling chamber A filter fan unit for supplying the above air to the room, a first return air fan for returning the air from the room to the chamber in the ceiling, and a second return air fan for returning the air from the chamber in the ceiling to the ceiling embedded air conditioner. There is disclosed a unit type cell culture facility which is provided at a predetermined location inside a building (see Patent Document 1). The filter fan unit supplies a larger amount of air from the embedded air conditioner to the chamber in the ceiling, and the first return air fan supplies an amount of air equal to and / or less than that of the filter fan unit. The second return air fan returns the same amount of air as the amount of air supplied from the ceiling-embedded air conditioner to the chamber in the ceiling.

Patent No. 5615417

  The unit-type cell culture facility disclosed in Patent Document 1 needs to have an in-ceiling chamber that is isolated from an indoor compartment, and is installed in a building with a ceiling height restriction (a building with a low ceiling). It may not be possible, and there are cases where the buildings that can be constructed are limited or new construction is required. Also, since the filter, the first return air fan, and the second return air fan are installed on the ceiling of the unit-type cell culture facility, when the maintenance workers of the facility perform their maintenance, they climb up the stepladder to the ceiling. You have to perform maintenance work while facing or facing into the ceiling, which requires labor and time, and measures to prevent accidents (labor accident prevention measures) Will be needed.

  The unit-type cell culture facility disclosed in Patent Document 1 is airtightly installed with a plurality of partition plates forming side walls and ceiling walls at predetermined locations inside a building in facility construction of the unit-type cell culture facility, With these partition plates, an operation room, a dressing room, a dressing room, a preparation room, a combined changing room, a bathroom, an entrance, a carry-in entrance, and a corridor must be provided, which requires various kinds of materials and works for the facility. Since it takes time, it is difficult to reduce the cost and the construction period cannot be shortened. In addition, the layout of the room cannot be changed after the facility is once installed, and it is impossible to respond to the layout change request accompanying the change of the work contents of the facility user. Furthermore, it is impossible to increase the number of rooms or reduce the number of rooms after the facility is once constructed, and it is not possible to meet the demand for increasing the number of rooms and the demand for decreasing the number of rooms in response to changes in the work contents of facility users.

  An object of the present invention is to provide a unit type clean room that can be installed not only in a structure having a high ceiling height but also in a structure having a normal ceiling height without the need to separately install a duct for supplying air. And a unit type clean room facility method. Another object of the present invention is to provide a unit type clean room and a facility method for the unit type clean room, which can reduce the labor and time in the maintenance work and can easily perform the maintenance work. Another object of the present invention is to eliminate the need for various materials related to the duct material, to omit the duct construction, to perform the facility work in a short time, and to reduce the cost and the construction period. A type clean room and a unit type clean room facility method are provided. Another object of the present invention is to be able to change the layout (shape) of the area in response to changes in the work contents of the user after the facility is installed once, and to change the work contents of the user after being installed once. Unit type clean room and unit type clean room facility that can increase the number of areas and reduce the number of areas in response to the requirements of area layout change, area increase and area decrease To provide a method. Another object of the present invention is to prevent the non-clean air inside the building from flowing into each area, without causing the contamination of the air inside the building into the air in each area. An object is to provide a unit type clean room and a unit type clean room facility method capable of maintaining the clean state of each area.

  A first premise of the present invention for solving the above problems is a unit type clean room installed at a predetermined location inside a building.

  The feature of the unit type clean room of the present invention on the first premise is that the unit type clean room is a high air cleanliness required area partitioned by side wall panels that are airtightly installed at predetermined locations inside the building. It has an area requiring low air cleanliness, and the area requiring high air cleanliness functions as a flow path for the air consisting of the external air of the unit type clean room and the internal air of the unit type clean room, and also has a filter and a ventilation mechanism. It has a clean air supply means for supplying air to the inside thereof, and the low air cleanliness requirement area functions as a flow path through which air flows, and also recirculates the air to the high air cleanness requirement area. In a unit type clean room equipped with a recirculation means, the air cleanliness requirement gradually decreases from the area requiring high air cleanliness to the area requiring low air cleanliness. It is possible to allow air to flow in order from the area to the area requiring low air cleanliness, and to install a ductless clean room at a predetermined location inside the building.

  As an example of the unit type clean room of the present invention, in the unit type clean room, the air is continuously used step by step toward the high air cleanliness requirement area to the low air cleanliness requirement area using the clean air supply means, The air conditioned to a proper cleanliness and a required temperature is made to flow in order from the area requiring high air cleanliness to the area requiring low air cleanliness.

  As another example of the unit type clean room of the present invention, clean air supply means is installed on a side wall panel that partitions an area requiring high air cleanliness.

  As another example of the unit type clean room of the present invention, an air recirculation means for recirculating air in a low air cleanliness required area has a recirculation port, a predetermined filter and a blowing mechanism to recirculate air to a high air cleanliness required area. Means, a filter, and a blower mechanism, and at least one of the clean air recirculation means for recirculating air to the high air cleanliness requirement area. At least one of them is installed on a side wall panel that defines an area requiring low air cleanliness.

  As another example of the unit type clean room of the present invention, an exhaust port for exhausting air to the outside is at least one of an area requiring high air cleanliness and an area requiring low air cleanliness, and It is installed on the dividing side wall panel.

  As another example of the unit type clean room of the present invention, an area requiring high air cleanliness is at least one work area for performing main work in the unit type clean room, and an area requiring low air cleanliness is an auxiliary work for the main work. And at least one support area for performing the second dressing and at least one supply area for performing sub-operations other than the main work, and these areas are connected via an entrance / exit of a predetermined opening area, and require air cleanliness. Becomes lower in the order of work area → support area → supply area.

  As another example of the unit type clean room of the present invention, the low air cleanliness required area is connected to at least one of the support area and the supply area via an opening / closing door or a doorway having a predetermined opening area, and a first changing clothes And including at least one goowning area having the lowest air cleanliness requirements.

  As another example of the unit type clean room of the present invention, the exhaust port is installed in a side wall panel which is at least one of a work area, a support area, a supply area and a goowning area and which partitions the area. ing.

  As another example of the unit type clean room of the present invention, a low air cleanliness required area is divided by a side wall panel to connect the work area and the supply area, and external air of the unit type clean room flows in and the unit type clean room The clean air supply means including the maintenance area where the internal air flows, is installed on the side wall panel of the work area facing the maintenance area, and includes the return port, the filter, the air return means, and the clean air return means. Is installed on the side wall panel of the supply area facing the maintenance area.

  As another example of the unit type clean room of the present invention, there is an external air supply means and a filter for supplying the external air having an external air flow inlet for introducing the external air of the unit type clean room, a predetermined filter and a blowing mechanism, and At least one of the clean external air supply means that has a blower mechanism and supplies the external air is installed on the side wall panel that defines the maintenance area.

  As another example of the unit-type clean room of the present invention, an air conditioner that air-conditions the air consisting of the external air of the unit-type clean room and the internal air of the unit-type clean room is installed in the maintenance area.

  As another example of the unit type clean room of the present invention, the unit type clean room is installed on the side wall panel of the work area facing the maintenance area, and air is supplied in one direction to the area requiring high air cleanliness by the clean air supply means. A straightening vane for diffusing the flow of air is included.

  As another example of the unit type clean room of the present invention, as the straightening vane, a deflector plate that changes the flow of air supplied to the work area to an intersecting direction intersecting with one direction, and a plurality of through holes that allow the air to flow therethrough are provided. And a punching plate that forms airflow and distributes the air flow supplied to the work area in other directions including one direction, and changes the air flow supplied to the work area to the cross direction intersecting the one direction. , A deflector punching plate that forms a plurality of through holes for allowing air to flow therethrough and distributes the flow of the air supplied to the work area in the other direction including one direction.

  A second premise of the present invention for solving the above-mentioned problem is a unit type clean room facility method for providing a ductless unit type clean room at a predetermined location inside a building.

  A feature of the unit type clean room facility method of the present invention on the second premise is that the unit type clean room facility method uses a plurality of side wall panels to establish a high air cleanliness requirement at a predetermined location inside a building. Area to air cleanliness The layout design process of designing the layout of the required area according to the design requirements, and the side wall panels are airtightly installed at predetermined locations inside the building based on the layout designed by the layout design process. However, the air cleanliness high demand area-air cleanliness low demand area having a function as a flow path through which the air composed of the outside air of the unit type clean room and the inside air of the unit type clean room is divided by the side wall panels. The area where the facility is installed Clean air supply means installation process to install a clean air supply means equipped with a filter and a blowing function to the area requiring high cleanliness in the area requiring high cleanliness At least one of a recirculation means installation step of installing a recirculation means for recirculating to an area in an area requiring low air cleanliness, and an exhaust port for exhausting air to the outside of an area requiring high air cleanliness and an area requiring low air cleanliness. And the step of installing the exhaust port in the area.

  As an example of the unit type clean room facility method of the present invention, the unit type clean room facility method, after installing the unit type clean room, in at least one of the high air cleanliness required area and the air cleanliness low required area The installation position of the side wall panel is changed, or a new side wall panel is installed in at least one of the area requiring high air cleanliness and the area requiring low air cleanliness, or with the area requiring high air cleanliness. By removing the existing side wall panel from at least one of the low air cleanliness required area, the layout of at least one of the high air cleanliness required area and the low air cleanliness required area is modified. Includes layout modification process.

  As another example of the unit-type clean room facility method of the present invention, the unit-type clean room facility method is, after the unit-type clean room is installed, installing a new side wall panel at a predetermined position inside the building to obtain the air cleanliness. An area number increasing process for increasing the number of at least one of the high demand area and the low air cleanliness area, and after installing a unit type clean room, an existing side wall panel from a predetermined location inside the building And an area number reducing step of reducing the number of at least one of the high air cleanliness requirement area and the air cleanliness low requirement area.

  As another example of the unit type clean room facility method of the present invention, the high air cleanliness requirement area is at least one work area for performing main work in the unit type clean room, and the low air cleanness requirement area is for the main work. At least one support area for performing the auxiliary work and the second dressing, at least one supply area for performing the sub-work excluding the main work, and at least one goning area for performing the first dressing, and the area facility process includes A work area, a support area, a supply area, and a goowning area are provided at predetermined locations inside the building.

  As another example of the unit type clean room facility method of the present invention, the area facility process connects the work area and the supply area partitioned by the side wall panel, the outside air of the unit type clean room flows in, and the inside of the unit type clean room There is a maintenance area where air flows, and the clean air supply means installation process installs the clean air supply means on the side wall panel of the work area facing the maintenance area. Of the air recirculation means for recirculating air to the area requiring high air cleanliness with the filter and the air blowing mechanism, and the clean air recirculation means for recirculating air to the areas requiring high air cleanliness with the filter and air blowing mechanism Install at least one of these on the side wall panel of the supply area facing the maintenance area. Outlet installation step, installing the outlet and at least one area of the work area and the support area and supply area and Gow training area to the side wall panel for partitioning the area.

  As another example of the unit type clean room facility method of the present invention, the unit type clean room facility method has an external air flow inlet for allowing the external air of the unit type clean room to flow into the maintenance area, a predetermined filter, and a blower mechanism. A side wall for partitioning the maintenance area with at least one of an external air supply means for supplying air to the maintenance area and a clean external air supply means for supplying external air to the maintenance area, which has a filter and a blowing mechanism. This includes the step of installing outside air intake means installed on the panel.

  As another example of the unit type clean room facility method of the present invention, the unit type clean room facility method installs an air conditioner for air conditioning the air consisting of the external air of the unit type clean room and the internal air of the unit type clean room in the maintenance area. Including air conditioner installation process.

  As another example of the unit type clean room facility method of the present invention, the unit type clean room facility method is a unit type clean room facility method, in which a rectifying plate for diffusing a flow of air supplied in one direction of the work area by the clean air supply means is provided in the maintenance area. It includes a step of installing a current plate installed on the side wall panel of the opposite work area.

  As another example of the unit type clean room facility method of the present invention, a flow straightening plate installed in the flow straightening plate installation step is a deflector plate that changes the flow of air supplied to the work area to a cross direction intersecting one direction. , A punching plate that has a plurality of through holes that allow air to flow and that distributes the flow of air supplied to the work area to other directions, including one direction, and the flow of air supplied to the work area. With a deflector punching plate that changes to a crossing direction that intersects with one direction and that has a plurality of through holes that allow air to flow and that distributes the flow of air supplied to the work area to other directions including one direction. It is one of them.

  According to the unit type clean room of the present invention, the air cleanliness high demand area and the air cleanliness low demand area forming it function as a flow path for passing the air consisting of the outside air of the clean room and the inside air of the clean room. Since it is a ductless clean room, it is not necessary to secure a ceiling height when installing a dedicated duct because it is not necessary to separately install a dedicated duct for each area, and it is not only for buildings with high ceiling height It can be installed in a building with a high ceiling. A unit type clean room can be equipped with an area requiring high air cleanliness and an area requiring low air cleanliness by using side wall panels (partition plates) that are airtightly installed at predetermined locations inside the building. It does not require a plurality of various materials, can omit the duct work, can perform the facility work in a short time, and can reduce the cost and the construction period. In the unit type clean room, after the clean room is installed once, the layout of each area can be freely changed by installing new side wall panels or removing existing side wall panels, and the number of each area can be increased or decreased. Therefore, it is possible to promptly respond to a layout change request, an area division request, an area expansion request, an area expansion request, and an area reduction request, which accompany changes in the work contents of a clean room user. The unit type clean room uses a clean air supply unit having a filter (HEPA filter) and a blower mechanism to allow air to flow in order from an area requiring high air cleanliness to an area requiring low air cleanliness in the flow path. Since it is possible to make positive pressure, it is possible to prevent the air inside the building from flowing into the area requiring high air cleanliness or the area requiring low air cleanliness due to the pressure difference between the inside and outside of the clean room. The inside air (outside air of the clean room) does not cause contamination by mixing with the air in areas requiring high air cleanliness or areas requiring low air cleanliness, and areas requiring high air cleanliness or areas requiring low air cleanliness The clean state of can be maintained.

  Using the clean air supply means, the air is continuously used step by step from the area requiring high air cleanliness to the area requiring low air cleanliness, and the air conditioned to the required cleanliness and temperature is cleaned. The unit type clean room that sequentially flows from the area requiring high cleanliness to the area requiring low air cleanliness can supply air with the required cleanliness and the required temperature to the areas requiring high air cleanliness. By keeping the air in the high air cleanliness required area at the required cleanliness and the required temperature, the air that has passed through the high air cleanliness required area is passed to the low air cleanliness required area. The air with the required cleanliness and the required temperature can be continuously used in stages.

  The unit type clean room in which the clean air supply means is installed on the side wall panel that partitions the air cleanliness high demand area, the clean air supply means is installed on the side wall panel that partitions the air cleanliness high demand area, Using the clean air supply means, air having a required cleanliness and a required temperature can be made to flow in order from the area requiring high air cleanliness to the area requiring low air cleanliness, and the clean air supply can be performed. When performing maintenance on the air supply means, it is not necessary for the maintenance operator to step on a stepladder or enter the ceiling, and the maintenance work can be performed with the clean air supply means facing down in a low place. The time and labor can be reduced, and the maintenance work of the clean air supply means can be performed easily and safely.

  The recirculation means in the low air cleanliness requirement area has a recirculation port, a predetermined filter, and a blowing mechanism to recirculate the air to the high air cleanliness requirement area. It is at least one of clean air recirculation means for recirculating to the high-reliability request area, and at least one of a recirculation port, a filter, an air recirculation means, and a clean air recirculation means defines an air cleanness low-requirement area. In the unit type clean room installed on the side wall panel, when the recirculation means is the recirculation port, the air recirculates through the recirculation port to the high air cleanliness requirement area. It can be returned to the high demand area. When the recirculation means is a predetermined filter, the air recirculates through the recirculation port to the area requiring high air cleanliness and impurities (dust, fine particles, etc.) contained in the air are removed by the filter. It is possible to recirculate from an area requiring low air cleanliness to an area requiring high air cleanliness. When the recirculation unit is an air recirculation unit having a blower mechanism, the air recirculation unit forcibly recirculates the air to the high air cleanliness requirement area, so that the air is changed from the low air cleanliness requirement area to the high air cleanliness requirement area. It can be surely refluxed. When the recirculation means is a clean air recirculation means having a filter and a blowing mechanism, the clean air recirculation means forcibly recirculates the air to the area requiring high air cleanliness and cleans the impurities (dust, fine particles, etc.) contained in the air. Since it is removed by the filter of the air recirculation means, clean air can be reliably recirculated from the area requiring low air cleanliness to the area requiring high air cleanliness. In the unit type clean room, at least one of the recirculation port, the filter, the air recirculation unit, and the clean air recirculation unit is installed on the side wall panel that defines the low air cleanliness low requirement area. When performing maintenance on the clean air recirculation means, it is not necessary for the maintenance worker to step up to the stepladder or enter the ceiling, and the recirculation port, filter, air recirculation means, and clean air recirculation means should be in the front in a low place. The maintenance work can be performed, the labor and time required for the maintenance work can be reduced, and the maintenance work for the recirculation port, the filter, the air recirculation unit, and the clean air recirculation unit can be easily and safely performed.

  The unit type clean room installed on the side wall panel that defines at least one of the air cleanliness high demand area and the air cleanliness low demand area where the exhaust port that exhausts air to the outside is By installing an exhaust port on the side wall panel that divides the area requiring high air cleanliness and the area requiring low air cleanliness, the air can be used outside the areas requiring high air cleanliness and areas requiring low air cleanliness. When performing maintenance on the exhaust port, it is not necessary for the maintenance worker to step on a stepladder or enter the ceiling, and the maintenance work can be performed with the exhaust port facing forward at a low place. The maintenance work of the exhaust port can be performed easily and safely as well as the labor and time required for the maintenance work can be reduced. Kill.

  The area requiring high air cleanliness is at least one work area for main work in the unit type clean room, and the area requiring low air cleanliness is auxiliary work for the main work and at least one support area for performing second dressing and main work. Except for at least one supply area where subordinate work is performed, these areas are connected via a doorway with a predetermined opening area, and the unit type clean room in which the air cleanliness requirement decreases in the order of work area → support area → supply area , The work area, support area, and supply area that form it function as a flow path for passing the air consisting of the outside air of the clean room and the inside air of the clean room, and it is not necessary to install a dedicated duct for each area separately, Dedicated because it is a ductless clean room It is not necessary to secure the ceiling height when installing the extract, not only buildings with high ceiling height, it is possible to facility buildings with ceiling normal ceiling height. A unit type clean room can have a work area, a support area, and a supply area with side wall panels (partition plates) that are airtightly installed at predetermined locations inside the building, so various types of materials related to duct materials can be installed. It is not necessary, the duct work can be omitted, the facility work can be performed in a short time, and the cost and the construction period can be shortened. The unit type clean room allows you to freely change the layout of the work area, support area, and supply area by installing a new side wall panel or removing the existing side wall panel after the clean room is installed once. It is possible to increase or decrease the number, and to promptly respond to layout change requests, area division requests, area expansion requests, area expansion requests, area reduction requests due to changes in the work contents of clean room users. You can The unit type clean room uses a clean air air supply means having a filter (HEPA filter) and a blower mechanism to sequentially pass air toward a work area, a support area and a supply area to make a positive pressure in the flow path. Therefore, it is possible to prevent the air inside the building (the air outside the clean room) from flowing into the work area, support area, and supply area, and the air inside the building can be controlled by the pressure difference inside and outside the clean room. Does not cause contamination by mixing with the air in the work area, support area, or supply area, and can keep the work area, support area, and supply area clean.

  The low air cleanliness requirement area is connected to at least one of the support area and the supply area through an opening / closing door or a doorway having a predetermined opening area to perform the first change, and at least one of which has the lowest air cleanness requirement. The unit type clean room including the goowning area functions as a flow path that allows the work area, support area, supply area, and forming area that form it to pass the air consisting of the outside air of the clean room and the inside air of the clean room. There is no need to install a dedicated duct to the area separately, and since it is a ductless clean room, it is not necessary to secure the ceiling height when installing a dedicated duct, and it is not only for buildings with high ceiling height, but also for normal ceilings. It can be installed in buildings with high ceilings. A unit type clean room can have a work area, a support area, a supply area, and a goowning area by side wall panels (partition plates) that are airtightly installed at predetermined locations inside the building. It does not require a plurality of materials, the duct work can be omitted, the facility work can be performed in a short time, and the cost can be reduced and the construction period can be shortened. The unit type clean room allows you to freely change the layout of the work area, support area, supply area, and goowning area by installing a new side wall panel and removing the existing side wall panel after the clean room is installed once. It is possible to increase or decrease the number of areas, and to quickly respond to layout change requests, area division requests, area expansion requests, area expansion requests, area reduction requests due to changes in the work contents of clean room users. Can correspond to. The unit type clean room uses a clean air air supply means having a filter (HEPA filter) and an air blowing mechanism to allow air to flow in order toward a work area, a support area, a supply area, and a goowning area, and to flow through the flow path. Since it is possible to make positive pressure, it is possible to prevent the air inside the building (external air of the clean room) from flowing into the work area, support area, supply area, and goowning area, and the pressure inside and outside the clean room. Due to the difference, the air inside the building does not cause contamination by mixing with the air in the work area, support area, supply area, and gouning area. Can be held.

  A unit-type clean room in which an exhaust port for exhausting air to at least one of a work area, a support area, a supply area, and a gouning area and which is installed on a side wall panel that divides the area is a work area. An exhaust port is installed in a side wall panel that defines at least one of an area, a support area, a supply area, and a goowning area, and an air outlet is used to provide air to a work area or support. It is possible to exhaust air to the outside of the area, ply area, goowning area, and when performing the maintenance of the exhaust port, it is not necessary for the maintenance worker to step on the stepladder or enter the ceiling, Maintenance work can be performed with the front facing It is possible to reduce the labor and time that can perform maintenance work of the exhaust port easily and securely.

  It includes a maintenance area that is divided by a side wall panel to connect the work area and the supply area, the outside air of the unit type clean room flows in, and the internal air of the unit type clean room flows, and the clean air supply means faces the maintenance area. Unit type clean room installed on the side wall panel of the work area, and at least one of the return port, the filter, the air return means and the clean air return means is installed on the side wall panel of the supply area facing the maintenance area. By installing the clean air supply means on the side wall panel of the work area facing the maintenance area, the clean air supply means can be used to reliably return air from the maintenance area to the work area. Maintenance of clean air recirculation means When performing the maintenance work, the maintenance worker does not have to step up to the stepladder or enter the ceiling, and the maintenance work can be performed with the clean air recirculation means in a low place in the front, which saves the labor and time required for the maintenance work. In addition to being able to reduce the number, the maintenance work of the clean air recirculation means can be performed easily and safely. In the unit type clean room, when the outside air flows into the maintenance area, the outside air (outside air of the clean room) can be mixed with the return air, and fresh air can be taken into the clean room. In the unit type clean room, at least one of the return port, the filter, the air return unit, and the clean air return unit is installed on the side wall panel of the supply area facing the maintenance area. Air can be recirculated to the maintenance area using the air means and clean air return means, and when performing maintenance on the return port, the filter, the air return means, and the clean air return means, the maintenance worker takes a stepladder. It is not necessary to go to the ceiling or enter the ceiling, and maintenance work can be performed with the reflux port, filter, air return means, and clean air return means facing down in a low place. It is possible to reduce The nonce work can be performed easily and safely.

  An external air supply means for supplying external air to the unit type clean room, which has an external air flow inlet for introducing the external air, a predetermined filter and an air blowing mechanism, and a cleaning device having a filter and an air blowing mechanism to supply the external air. The unit type clean room in which at least one of the external air supply means is installed on the side wall panel that divides the maintenance area is provided with an external air inlet, a filter, an external air supply means, and a clean external air supply means. By installing it on the side wall panel that divides the room, it is possible to allow the air consisting of the outside air of the clean room and the inside air of the clean room to flow into the work area, support area, supply area, and gouning area, as well as the outside air inlet and filter. , Maintenance of external air supply, clean external air supply In this case, the maintenance worker does not have to step up to the stepladder or enter the ceiling, and perform the maintenance work with the outside air inlet, the filter, the external air supply unit, and the clean external air supply unit facing forward in a low place. Therefore, the labor and time required for the maintenance work can be reduced, and the maintenance work for the outside airflow inlet, the filter, the external air supply unit, and the clean external air supply unit can be performed easily and safely.

  An air conditioner for air conditioning the outside air of the unit type clean room and the air of the unit type clean room is installed in the maintenance area. In addition, the air conditioned to the set humidity can be made to flow in order from the maintenance area to the work area, support area, supply area, and goowning area, and the temperature and humidity environments in those areas can be optimally maintained. It is possible to create a good working environment for users of the clean room and a good working environment in those areas.

  When air is supplied from the clean air supply means in one direction to the work area (area requiring high air cleanliness), if the dynamic pressure of the air supply is large, the air that has passed through the work area will be in the support area (requesting low air cleanliness). Area) side walls may bounce off and air containing low cleanliness air in the support area may flow back to the work area, but it is installed on the side wall panel of the work area facing the maintenance area and the work is performed by the clean air supply means. In a unit type clean room including a straightening vane for diffusing the flow of air supplied in one direction of the area, the flow of the air fed in one direction of the work area is diffused by the flow straightening plate by the clean air supply means. Therefore, the dynamic pressure of the supply air is not concentrated in one place, the dynamic pressure of the supply air is dispersed, and the dynamic pressure becomes low. Rebound can be prevented in the side wall panels of the support area, it is possible to prevent backflow into the work area of air containing low cleanliness air.

  A deflector plate that changes the flow of air supplied to the work area to the crossing direction that intersects with one direction, and the flow of air that is supplied to the work area by forming multiple through holes for passing air. A punching plate that disperses the air into other directions, including one direction, and a plurality of through holes that allow the air to flow while changing the flow of the air supplied to the work area to the intersecting direction that intersects the one direction. A unit type clean room, which is one of a deflector punching plate that disperses the flow of air supplied to the work area in other directions including one direction, is a work area facing the maintenance area (high air cleanliness requirement). By installing a deflector plate on the side wall panel of (Area), the flow of air that is supplied to the work area in one direction by the clean air supply unit The deflector plate changes the crossing direction so that it crosses the one direction, so the dynamic pressure of the supply air does not concentrate at one location, the dynamic pressure of the supply air is dispersed, and the dynamic pressure becomes low and passes through the work area. It is possible to prevent rebound in the side wall panel of the air support area (low air cleanliness requirement area), and to prevent backflow of air containing low cleanliness air into the work area. In the unit type clean room, by installing a punching plate on the side wall panel of the work area (area requiring high air cleanliness) facing the maintenance area, the air supplied to the work area in one direction by the clean air supply means is Since the flow is dispersed by the punching plate in other directions including one direction, the dynamic pressure of the supply air is not concentrated in one place, the dynamic pressure of the supply air is dispersed and the dynamic pressure becomes low, and the work area is reduced. It is possible to prevent rebound of the air that has passed through the side wall panel in the support area (low air cleanliness requirement area), and to prevent backflow of air containing low cleanliness air into the work area. In the unit type clean room, the deflector punching plate is installed on the side wall panel of the work area (area requiring high air cleanliness) facing the maintenance area, so that the air supplied to the work area in one direction by the clean air supply means. Flow is changed by the deflector punching plate to the crossing direction that intersects with one direction and is distributed to other directions including one direction, so that the dynamic pressure of the supply air does not concentrate at one location, The pressure is dispersed and the dynamic pressure becomes low, so that it is possible to prevent the air that has passed through the work area from bouncing back in the side wall panel of the support area (low air cleanliness requirement area), and to the work area of air containing low cleanliness air. It is possible to prevent backflow.

  According to the unit type clean room facility method of the present invention, a design request is made for a layout of a high air cleanliness required area to a low air cleanliness required area where a plurality of side wall panels are used to provide facilities at predetermined locations inside a building. Based on the layout design process designed according to the layout design process and the layout designed by the layout design process, the side wall panels are airtightly installed at predetermined locations inside the building, and the side wall panels are partitioned to create a unit type clean room. Areas with a high air cleanliness requirement area to a low air cleanliness requirement area with a function as a flow path for the outside air and the internal air of the unit type clean room. Filters and air blows that flow in order from areas requiring high demand to air cleanliness A clean air supply means installation process that installs a clean air supply means with high performance in an area requiring high air cleanliness and a recirculation means that recirculates air to areas requiring high air cleanliness are installed in areas requiring low air cleanliness. Since there is a recirculation means installation step for performing air exhaust and an exhaust port installation step for installing an exhaust port for exhausting air to at least one of an area requiring high air cleanliness and an area requiring low air cleanliness, The layout of areas requiring high cleanliness to areas requiring low air cleanliness can be freely designed according to the design requirements of the users of the clean room by changing the work content, and the design requirements can be set at specified locations inside the building. It is possible to set up a unit type clean room with a suitable layout. In the unit type clean room facility method, the areas requiring high air cleanliness and areas requiring low air cleanliness that form a clean room function as a flow path for passing the air consisting of the outside air of the clean room and the inside air of the clean room. It is not necessary to separately install a dedicated duct of, and a ductless unit type clean room can be easily installed at a predetermined place inside a building. In the unit type clean room facility method, it is not necessary to secure the ceiling height when installing a dedicated duct, and the unit type clean room is installed not only for buildings with high ceiling height but also for structures with normal ceiling height. can do. In the unit type clean room facility method, side wall panels (partition plates) that are airtightly installed at predetermined locations inside the building are used to install areas requiring high air cleanliness and areas requiring low air cleanliness. The need for multiple materials is eliminated, duct work can be omitted, facility work in a clean room can be performed in a short time, and costs can be reduced and construction periods can be shortened.

  After installing a unit type clean room, the installation position of the side wall panel in at least one of the area requiring high air cleanliness and the area requiring low air cleanliness is changed, or the area requiring high air cleanliness and the air are required. A new side wall panel is installed in at least one of the low cleanliness required area, or an existing side wall panel is provided from at least one of the high air cleanliness required area and the low air cleanliness required area. The unit type clean room facility method including a layout modification step of modifying the layout of at least one of the area requiring high air cleanliness and the area requiring low air cleanliness by removing the By changing the installation position of the side wall panels in areas requiring low air cleanliness, clean room Can be freely modified layout area in accordance with the layout change request their areas due to a change of the work of the use's. In the unit type clean room facility method, by installing new side wall panels in the areas requiring high air cleanliness and areas requiring low air cleanliness, the areas can be divided by the new side wall panels, and the clean room users It is possible to freely change the layout of the areas in response to a request for dividing those areas as the work content is changed. In the unit type clean room facility method, by removing the existing side wall panels from the areas requiring high air cleanliness and areas requiring low air cleanliness, the volume and floor area of those areas can be expanded, and the work of clean room users can be improved. The layout of the areas can be freely modified according to the expansion request of those areas accompanying the change of the contents.

  After installing a unit type clean room, install a new side wall panel at a predetermined place inside the building to increase the number of at least one of the area requiring high air cleanliness and the area requiring low air cleanliness. After the process of increasing the number of areas and the unit type clean room are installed, the existing side wall panel is removed from the predetermined location inside the building, and at least one of the high air cleanliness requirement area and the low air cleanliness requirement area In the unit type clean room facility method including the area number reduction step of reducing the number of areas of the above, after installing the unit type clean room, by installing a new side wall panel at a predetermined location of the building, Areas that require new air cleanliness requirements and low air cleanliness requirements to be connected can be installed, The number of number and air cleanliness low demand area of air cleanliness high demand area can be freely increased according to the expansion request areas inside the buildings due to a change of the work room of the user. The unit type clean room facility method is an area inside the building where the user of the clean room changes the work content by removing the existing side wall panel from the predetermined location inside the building after the unit type clean room is installed. It is possible to freely reduce the number of areas requiring high air cleanliness and the number of areas requiring low air cleanliness in accordance with the demand for reduction of air cleanliness.

  The area requiring high air cleanliness is at least one work area for main work in the unit type clean room, and the area requiring low air cleanliness is auxiliary work for the main work and at least one support area for performing second dressing and main work. Except for at least one supply area that performs subordinate work and at least one goning area that performs the first change, the area facility process is a work area, a support area, a supply area, and a goown at a predetermined location inside the building. The unit type clean room facility method that establishes the area and the area can freely design the layout of the work area, the support area, the supply area, and the gowning area that form the clean room according to the design requirements. Clean room users Work work area or support area of the layout according to the design requirements of a change in, the supply area, the Gaussian training area may be facility. The unit type clean room facility method functions as a flow path for the work area, support area, supply area, and gowning area to pass the air consisting of the outside air of the clean room and the inside air of the clean room, and separate ducts for each area are provided separately. It is not necessary to install, a ductless unit type clean room can be easily installed at a predetermined location inside the building, and there is no need to secure the ceiling height when installing a dedicated duct, and it has a high ceiling height. A unit type clean room can be installed not only in a building but also in a building having a normal ceiling height. In the unit type clean room facility method, a work area, a support area, a supply area, and a goowning area are constructed by side wall panels that are airtightly installed at predetermined locations inside the building, so various types of materials related to duct materials are required. Without doing so, the duct work can be omitted and the facility work in the clean room can be performed in a short time, and the cost and the construction period can be shortened. The unit-type clean room facility method allows you to freely change the layout of the work area, support area, supply area, and goowning area after installing the clean room once by installing (adding) new side wall panels or removing existing side wall panels. The number of these areas can be increased or decreased easily.

  It includes a maintenance area facility process in which a work area and a supply area are connected by being partitioned by a side wall panel, and a maintenance area where the outside air of the unit type clean room flows in and the internal air of the unit type clean room flows is installed. The air means installation process installs clean air air supply means on the side wall panel of the work area facing the maintenance area, and the recirculation means installation process has a recirculation port, a predetermined filter and a blower mechanism, and requires high air cleanliness of the air. At least one of the air recirculation means for recirculating to the area and the clean air recirculation means for recirculating air to the area requiring high air cleanliness, which has a filter and a blowing mechanism, is provided on the side wall panel of the supply area facing the maintenance area. Installed, exhaust port installation process supports exhaust port with work area A unit-type clean room facility method of installing at least one of a rear area, a supply area, and a gowning area on a side wall panel that partitions the area is a clean air supply means for a work area facing a maintenance area. When installed on the side wall panel, air can be passed to the work area, support area, supply area, and gowning area by using the clean air supply means, and the clean air supply means is maintained. , The maintenance worker does not need to step up to the stepladder or enter the ceiling, and the maintenance work can be performed with the clean air supply means in the front in a low place in the maintenance area. Can be reduced and the clean air supply means The unit type clean room capable of performing Maintenance Manual work easily and safely can be facility. The unit type clean room facility method is to install a unit type clean room that can mix the outside air (external air of the clean room) into the return air by letting the outside air flow into the maintenance area and take in fresh air. You can In the unit type clean room facility method, by installing at least one of the return port, the filter, the air return unit, and the clean air return unit on the side wall panel of the supply area facing the maintenance area, Air can be returned to the work area by using the air return means and the clean air return means, and when performing maintenance of the return port, the filter, the air return means, and the clean air return means, a maintenance worker There is no need to go up to a stepladder or enter the ceiling, and maintenance work can be performed with the reflux port, filter, air return means, and clean air return means in the front at a low place in the maintenance area. The time and labor required for work can be reduced, and the return port, filter, and air return air can be reduced. Stage, the clean room which can be easily and safely maintenance of the clean air return air means can be facility. The unit type clean room facility method uses an exhaust port by installing an exhaust port in a side wall panel that partitions at least one of a work area, a support area, a supply area, and a goowning area. The air in the work area, support area, supply area, and gowning area can be exhausted to the outside, and when performing the maintenance of the exhaust port, it is not necessary for the maintenance worker to step on the stepladder or enter the ceiling. The maintenance work can be performed with the exhaust port facing down at a low place, and the labor and time of the maintenance work can be reduced, and the maintenance work of the exhaust port can be performed easily and safely. A unit type clean room can be installed.

  An external air supply means for supplying the outside air of the unit type clean room to the maintenance area and a predetermined filter and a ventilation mechanism to supply the outside air to the maintenance area A unit type clean room facility method including a step of installing outside air intake means for installing at least one of a clean external air supply means for supplying air to a maintenance area on a side wall panel partitioning the maintenance area is an outside air inlet. A filter, external air supply means, and clean external air supply means are installed on the side wall panel that defines the maintenance area. The outside air of the clean room) can flow into the maintenance area. When performing maintenance on the outside air inlet, the filter, the external air supply unit, and the clean outside air supply unit, it is not necessary for the maintenance worker to step on the stepladder or enter the ceiling. It is possible to perform maintenance work with the air means and the clean external air supply means in the front in a low place, and the time and labor required for the maintenance work can be reduced. It is possible to provide a unit-type clean room capable of easily and safely performing maintenance work for the air means and the clean external air supply means.

  A unit type clean room facility method that includes an air conditioner installation process that installs an air conditioner that air-conditions the outside air of the unit type clean room and the air inside the unit type clean room in the maintenance area. The generated air can be made to flow from the maintenance area to the work area, support area, supply area, and gouning area in order, and the temperature environment and humidity environment of those areas can be maintained optimally, and the users of the clean room. It is possible to install a unit type clean room that can create a good working environment for those areas.

  If air is supplied from the clean air supply means in one direction to the work area (area requiring high air cleanliness), if the dynamic pressure of the air supply is large, the air that has passed through the work area will be in the support area (requesting low air cleanliness). The air that contains the low cleanliness air in the support area may bounce back in the work area and may flow back to the work area, but the clean air supply means diffuses the air supplied to the work area in one direction. In the unit type clean room facility method including the step of installing the straightening vanes on the side wall panel of the work area facing the maintenance area, the flow of the air supplied to the work area in one direction by the clean air supply means is Since it is diffused by the straightening vanes, the dynamic pressure of the supply air is not concentrated in one place, the dynamic pressure of the supply air is dispersed and the dynamic pressure becomes low, and It is possible to install a unit type clean room that can prevent the air that has passed through the area from bouncing back in the side wall panel of the support area and can prevent the backflow of air containing low cleanliness air into the work area. .

  A work is formed by a deflector plate installed by the flow straightening plate installation step that changes the flow of air supplied to the work area to a cross direction intersecting with one direction, and a plurality of through holes for allowing air to flow. A punching plate that disperses the flow of air supplied to the area in other directions, including one direction, and changes the flow of the air supplied to the work area to the cross direction that intersects with one direction, and also allows air to flow. A unit type clean room facility method which is one of a deflector punching plate for distributing a flow of air supplied to a work area in one direction to another direction, in which a plurality of through holes are formed. By installing a deflector plate on the side wall panel of the work area facing to the work area, the flow of the air supplied in one direction of the work area by the clean air supply means can be changed by the deflector plate in the cross direction intersecting the one direction. Therefore, the dynamic pressure of the supply air is not concentrated in one place, the dynamic pressure of the supply air is dispersed and the dynamic pressure becomes low, and the dynamic area of the air that has passed through the work area (area requiring low air cleanliness) It is possible to install a unit type clean room capable of preventing rebound in the side wall panel and preventing backflow of air containing low cleanliness air to the work area. In the unit type clean room facility method, by installing a punching plate on the side wall panel of the work area facing the maintenance area, clean air is supplied to the work area (air cleanliness requirement area) in one direction. Since the air flow is dispersed by the punching plate in other directions including one direction, the dynamic pressure of the supply air is not concentrated in one place, the dynamic pressure of the supply air is dispersed and the dynamic pressure becomes low, It is possible to prevent the air that has passed through the work area from bouncing back in the side wall panel of the support area (low air cleanliness requirement area), and to prevent the backflow of air containing low cleanliness air to the work area. A unit type clean room can be installed. In the unit type clean room facility method, a deflector punching plate is installed on the side wall panel of the work area (area requiring high air cleanliness) facing the maintenance area, so that clean air is supplied to the work area in one direction. The air flow of the air is changed by the deflector punching plate to the crossing direction that intersects with one direction and is distributed to other directions including one direction, so that the dynamic pressure of the air supply is not concentrated in one place. The dynamic pressure is dispersed and the dynamic pressure becomes low, and it is possible to prevent the air that has passed through the work area from bouncing back in the side wall panel of the support area (area requiring low air cleanliness), including low cleanliness air. A unit type clean room that can prevent backflow of air to the work area can be installed.

The perspective view of the unit type clean room 1 shown as an example. The top view of a unit type clean room. The front view of a unit type clean room. Rear view of the unit type clean room. Right side view of the unit type clean room. Left side view of the unit type clean room. The top view of the unit type clean room shown with the ceiling panel removed. Top view explaining the flow of air (outside air and return air) in a unit type clean room The top view of the unit type clean room shown as another example. The top view explaining the flow of the air in the unit type clean room of FIG. The top view of the unit type clean room before the layout modification. The top view of the unit type clean room after the layout is modified. The top view of the unit type clean room after the number of areas is increased. The top view of the unit type clean room of another example shown in the state which removed the ceiling panel. The perspective view which shows an example of the deflector board installed in the side wall panel. The side view of the deflector board installed in the side wall panel. The top view explaining the flow of the air (outside air and return air) in the unit type clean room which attached the deflector board. The top view of the unit type clean room of another example shown in the state which removed the ceiling panel. The perspective view which shows an example of the punching board installed in the side wall panel. The top view explaining the flow of the air (outside air and return air) in the unit type clean room which attached the punching board. The perspective view which shows an example of the deflector punching board installed in the side wall panel. The side view of the deflector punching board installed in the side wall panel.

  The details of the unit type clean room and the unit type clean room facility method according to the present invention will be described below with reference to the accompanying drawings such as FIG. 1 which is a perspective view of the unit type clean room 10A shown as an example. 2 is a top view of the unit type clean room 10A, and FIG. 3 is a front view of the unit type clean room 10A. FIG. 4 is a rear view of the unit type clean room 10A, and FIG. 5 is a right side view of the unit type clean room 10A. 6 is a left side view of the unit type clean room 10A, and FIG. 7 is a top view of the unit type clean room 10A shown with the ceiling panel 12 removed. In FIG. 1, illustration of each device installed in the clean room 10A and each device accommodated in the clean room 10A is omitted. In FIG. 1, the front-rear direction is indicated by arrow A, the lateral direction is indicated by arrow B, and the vertical direction is indicated by arrow C.

  The unit type clean room 10A (including the unit type clean rooms 10B to 10D) is a facility at a predetermined location inside (inside) a building such as a hospital, a research building, an experimental building, a cell culture facility, a drug manufacturing factory, or a semiconductor manufacturing factory. And used for various experiments, research, cell culture, development, etc. The unit type clean room 10A (including the unit type clean rooms 10B to 10D) requires high air cleanliness partitioned by each side wall panel 11 (partition plate forming a side wall) and each ceiling panel 12 (partition plate forming a ceiling). It has an area 13 to an area 14 requiring low air cleanliness. The high air cleanliness required area 13 to the low air cleanliness required area 14 are connected in series to form one unit type clean room 10A. The atmospheric pressure inside these areas 13 and 14 is maintained at a positive pressure.

  The side wall panels 11 are vertically arranged, and their lower ends are airtightly connected to the floor of the building while being aligned in the front-rear direction and the lateral direction. The side wall panels 11 are airtightly connected at their side edges. The side wall panels 11 are connected in the front-rear direction and the horizontal direction to form the side walls of the unit type clean room 10A (each area 13, 14). The side wall panels 11 can be attached to and detached from the inside of the building, and a plurality of side wall panels 11 can be easily and quickly attached to the inside of the building according to a predetermined manual (procedure). It can be easily and quickly removed, and can be easily disassembled into a plurality of side wall panels 11.

  Each ceiling panel 12 is arranged horizontally and is airtightly connected to the upper end portion of the side wall panel 11 in a state of being lined up in the front-rear direction and the lateral direction. The ceiling panels 12 are hermetically connected at their joints. The ceiling panels 12 are connected in the front-rear direction and the lateral direction to form the ceiling of the clean room 10A (each area 13, 14). The ceiling panels 12 can be attached to and detached from the inside of the building, and a plurality of ceiling panels 12 can be easily and quickly attached to the inside of the building according to a predetermined manual (procedure). It can be easily and quickly removed, and can be easily disassembled into a plurality of ceiling panels 12.

  Although not shown, the ceiling panel 12 is provided with a ceiling lighting device (LED lighting or fluorescent lamp) that illuminates the clean room 10A. Note that the ceiling panel 12 can be omitted by using the ceiling of the building as the ceiling of the clean room 10A. In this case, the lower end of the side wall panel 11 is airtightly connected to the floor of the building, and the upper end of the side wall panel 11 is airtightly connected to the ceiling of the building.

  The side wall panel 11 and the ceiling panel 12 are made of an aluminum sash (aluminum frame) with a transparent (colorless transparent, colored transparent), translucent, opaque synthetic resin plate (acrylic board, polycarbonate board, vinyl chloride board, etc.) airtight A plate with a square planar shape is used. A plate with a square planar shape is used in which an aluminum sash (aluminum frame) is hermetically fitted with a transparent (colorless transparent, colored transparent), translucent, or opaque glass plate. .. As the panels 11 and 12, an aluminum panel or a steel panel having a quadrangular planar shape can be used.

  The high air cleanliness requirement area 13 is a work area 15 (work area) having a predetermined volume and a predetermined floor area for main work in the unit type clean room 10A (including the unit type clean rooms 10B to 10D). The low air cleanliness required area 14 includes a support area 16 having a predetermined volume and a predetermined floor area for performing auxiliary work and a second dressing for the main work, and a supply having a predetermined volume and a predetermined floor area for performing the sub-work excluding the main work. The area 17 is formed of a gouging area 18 having a predetermined volume and a predetermined floor area for performing the first dressing, and a maintenance area 19 having a predetermined volume and a predetermined floor area for performing predetermined maintenance.

  The work area 15, the support area 16, the supply area 17, the goowning area 18, and the maintenance area 19 are connected to form one clean room 10A (similar to the clean rooms 10B to 10D). It should be noted that the low air cleanliness required area 14 is one (1 area) or more support area 16, one (1 area) or more supply area 17, one (1 area) or more goowning area 18, and one. At least one (1 area) or more of the supply areas 17 among the (1 area) or more maintenance areas 19 may be used.

  The unit-type clean room 10A (including the unit-type clean rooms 10B to 10D) is either the outside air of the clean room 10A and the inside air of the clean room 10A toward the high air cleanliness requirement area 13 to the low air cleanliness requirement area 14 or the outside. Air consisting of either air or internal air is continuously used in stages. Specifically, air is circulated in the order of work area 15 → support area 16 → supply area 17 → maintenance area 19 and the air is continuously used in these areas 15, 16, 17, 19 step by step. A part of the air is exhausted from the supply area 17 to the outside. In addition, a part of the air flows in the order of work area 15 → support area 16 → going area 18 and is exhausted to the outside from the goning area 18.

  In the unit type clean room 10A (including the unit type clean rooms 10B to 10D), the air cleanliness requirement in the air cleanliness high demand area 13 is the highest. The air cleanliness requirement decreases in order from the high air cleanliness requirement area 13 to the low air cleanliness requirement area 14. Specifically, the air cleanliness requirement decreases in the order of work area 15 → support area 16 → supply area 17 → maintenance area 19, and the air cleanliness requirement of work area 15 → support area 16 → going area 18 It becomes lower in order.

  In the unit type clean room 10A (including the unit type clean rooms 10B to 10D), the air temperature requirement in the air cleanliness requirement area 13 is the highest. The air temperature requirement decreases in order from the high air cleanliness requirement area 13 to the low air cleanliness requirement area 14. Specifically, the air temperature requirement decreases in the order of work area 15 → support area 16 → supply area 17 → maintenance area 19, and the air temperature requirement decreases from work area 15 → support area 16 → going area. It becomes lower in the order of 18.

  Main work performed in the work area 15 includes various kinds of experiment work, research work, development work, cell culture work, and the like. In the work area 15, a biohazard countermeasure safety cabinet (BSC) 20 used for cell culture, a centrifuge 21, and an incubator 22 are installed (see FIG. 7). In addition, experimental equipment such as a clean bench, a glove box, an isolator, and a draft chamber may be installed in the work area 15.

  Although FIG. 1 illustrates one (1 area) work area 15 (high air cleanliness requirement area 13), there are two (2 areas) or more work areas 15 at a predetermined location of the building. May be done. There is no particular limitation on the volume (size), floor area, and layout (planar shape of area) of the work area 15, and the volume, floor area, and layout can be freely set (designed according to the purpose and use of the work area 15). )can do.

  By planning the number and installation locations of the side wall panels 11 and the number and installation locations of the ceiling panels 12, the volume, floor area (size), and layout of the work area 15 in front of the work area 15 (before construction) Can be freely designed. In addition, after the work area 15 is constructed (constructed), a new side wall panel 11 or a new ceiling panel 12 is installed (expanded), or the existing side wall panel 11 or the existing ceiling panel 12 is removed, thereby The volume (size) and floor area of the work area 15 after the construction of the area 15 can be increased or decreased, and the layout of the work area 15 (planar shape of the area) can be freely modified. The number of work areas 15 (number of areas) can be increased, and the number of work areas 15 (number of areas) can be reduced.

  The first change of clothes performed in the goowning area 18 is, for example, a primary dust-free garment made of a hood, a front body, a back body, and sleeves (a coverall type that covers the upper and lower body of the worker, or the upper body of the worker). It is the act of wearing a jacket type that covers and a pants type that covers the lower body) on clothes. A locker 23 for changing clothes is installed in the goowning area 18 (see FIG. 7).

  Sub-operations performed in the supply area 17 include, for example, preservation work of cultured cells and preservation work of culture solution, loading and unloading of articles, input work of experimental data, input work of research results, input work of culture results, and development products. There is work such as confirmation of physical properties and quality of. The auxiliary work performed in the support area 16 includes, for example, an experiment material, a research material, a development device, a cultured cell, a carry-in operation of a culture solution, a collection operation of a cultured cell or a culture solution, and the like. An explosion-proof refrigerator 24 and a deep freezer 25 are installed in the supply area 17 (see FIG. 7). Chairs, desks, shelves, computers (servers), etc. may be installed in the supply area 17. The second change of clothes performed in the support area 16 is an act of wearing a Yakke type secondary dustless garment, a dustless arm cover, a dustless mask, a dustless cap, or the like.

  In FIG. 1, one (one area) support area 16 (low air cleanliness requirement area 14), supply area 17 (low air cleanliness requirement area 14), goowning area 18 (low air cleanliness requirement area 14). Although one maintenance area 19 (area with low air cleanliness requirement 14) is illustrated, two or more (two areas) support areas 16, supply areas 17, and goowning areas 18 are provided at predetermined locations in the building. A maintenance area 19 may be provided.

  There are no particular restrictions on the volume (size), floor area, and layout (planar shape of areas 16 to 19) of the support area 16, the supply area 17, the gowning area 18, and the maintenance area 19, and the support area 16, the supply area 17, The volumes, floor areas, and layouts of the areas 16 to 19 can be freely set (designed) according to the purpose of use and the purpose of use of the gowning area 18 and the maintenance area 19.

  By planning the number and installation locations of the side wall panels 11 and the number and installation locations of the ceiling panels 12, those areas 16 to 19 before the construction of the support area 16, the supply area 17, the gowning area 18, and the maintenance area 19 are performed. It is possible to freely design the volume (size), floor area, and layout (planar shape of the areas 16 to 19).

  After constructing (constructing) those areas 16 to 19, installing (extending) a new side wall panel 11 or a new ceiling panel 12 or removing the existing side wall panel 11 or existing ceiling panel 12 to support It is possible to increase or decrease the volume (size) and the floor area of the areas 16 to 19 after the construction of the area 16, the supply area 17, the goowning area 18, and the maintenance area 19. The layout (planar shape of the areas 16 to 19) can be freely modified, the number of the areas 16 to 19 can be increased, and the number of the plurality of areas 16 to 19 can be reduced.

  The work area 15 (area 13 requiring high air cleanliness) is located between the support area 16 and the maintenance area 19. The work area 15 is surrounded (partitioned) by the floor of the building, the side wall panels 11 and the ceiling panels 12, and has a volume and a floor area capable of performing main work. The work area 15 is air when the air composed of the external air of the clean room 10A and the internal air of the clean room 10A or the air composed of either the external air or the internal air flows from the work area 15 toward the support area 16. Function as a flow path (pseudo duct) through which

  An entrance / exit 26 (opening) having an area (size) through which a worker can pass is formed between the side walls 11 that partition the work area 15 and the support area 16. The work area 15 is connected to the support area 16 via a doorway 26 having a predetermined area. In the work area 15, it is possible to enter the work area 15 from the support area 16 by passing through the entrance / exit 26 and to exit the work area 15 to the support area 16.

  The work area 15 includes two fan filter units 27 (clean air supply means for supplying air to the inside of the work area 15 having a filter and a blowing mechanism) for supplying air to the inside from the maintenance area 19. I have it. The work area 15 is connected to the maintenance area 19 via the fan filter unit 27. The work area 15 is supplied with air of a predetermined air supply amount (for example, 0.3 to 0.4 m / s) from the fan filter unit 27 and a fan filter unit 31 described later, so that the internal pressure of the work area 15 is positive. The pressure is maintained at 30 Pa.

  The fan filter units 27 are installed on the side wall panel 11 that defines the work area 15 and that is located above the side wall panel 11 that faces the maintenance area 19. Although not shown, the fan filter unit 27 is connected to a controller (control panel) installed on the side wall panel 11 (side wall panel 11 on the inner side of the building) that defines the maintenance area 19, and the fan filter unit 27 is operated by the controller. Start / stop (ON / OFF) and fan output settings are performed.

  A HEPA filter is detachably installed in these fan filter units 27, and impurities (dust, fine particles, PM2.5, etc.) contained in the air passing through the fan filter unit 27 are removed by the HEPA filter. The number of fan filter units 27 installed is not particularly limited, and the number of fan filter units 27 installed is determined by the volume and floor area of the clean room 10A.

  The clean room 10A requires the fan filter unit 27 because the fan filter unit 27 (clean air supply means) is installed on the side wall panel 11 that partitions the work area 15 (high air cleanliness requirement area 13). It is possible to allow air having a sufficient cleanliness and a required temperature to flow in order from the work area 15 to the support area 16, the supply area 17, the goowning area 18, and the maintenance area 19 (low air cleanliness requirement area 14). In addition, when performing maintenance on the fan filter unit 27, it is not necessary for the maintenance worker to step up to the stepladder or enter the ceiling, and the fan filter unit 27 should be in a front position at a low place (near the floor surface height). The maintenance work can be performed, the labor and time in the maintenance work can be reduced, and the maintenance work of the fan filter unit 27 can be performed easily and safely.

  The support area 16 (low air cleanliness requirement area 14) is located between the work area 15 and the gouging area 18. The support area 16 is surrounded (partitioned) by the floor of the building, each side wall panel 11, and each ceiling panel 12, and has a volume (size) and a floor area capable of performing auxiliary work. In the support area 16, the air formed of the outside air of the clean room 10A and the inside air of the clean room 10A or the air formed of any one of the outside air and the inside air flows from the support area 16 toward the supply area 17, and the air flows. By flowing from the support area 16 toward the gouging area 18, it functions as a flow path (pseudo duct) through which air flows.

  Between the side wall panel 11 partitioning the work area 15 and the support area 16 and the side wall panel 11 partitioning the support area 16 and the gouging area 18, there is a doorway 28 (having an area (size) through which a worker can pass. Aperture) is made. The support area 16 is connected to the supply area 17 via a doorway 28 having a predetermined area. In the support area 16, it is possible to enter the support area 16 from the supply area 17 by passing through the entrance / exit 28 and to exit the support area 16 from the supply area 17. The support area 16 may be connected to the supply area 17 by an opening / closing door (door) attached between the side walls 11, and the support area 16 may be connected by the opening / closing door (door) attached between the side walls 11. It may be connected to the gounning area 18.

  The support area 16 is one fan filter unit 29 that supplies air from the support area 16 to the goowning area 18 (clean air supply means that has a filter and a blowing mechanism to supply air to the inside of the goowning area). ) Is provided. The internal pressure of the support area 16 is maintained at a positive pressure (30 Pa) during operation of the fan filter unit 27, the fan filter unit 29, and the fan filter unit 31. The fan filter unit 29 is installed on the side wall panel 11 that defines the support area 16 and is located above the side wall panel 11 that faces the gouging area 18.

  The fan filter unit 29 is connected to a controller (control panel), and its start / stop (ON / OFF) and fan output setting are performed by the controller. A HEPA filter is detachably installed in the fan filter unit 29, and impurities (dust, fine particles, PM2.5, etc.) contained in the air passing through the fan filter unit 29 are removed by the HEPA filter. Air flows into the supply area 17 from the support area 16 through the entrance / exit 28, and flows from the support area 16 through the fan filter unit 29 into the gouging area 18. The number of fan filter units 29 to be installed is not particularly limited, and the number of fan filter units 29 to be installed is determined according to the volume and floor area of the gauging area 18 and the required cleanliness of the gauging area 18.

  The support area 16 may include a filter unit (filter) or a fan unit (an air supply unit having a blower mechanism to supply air to the goowning area) instead of the fan filter unit 29. In that case, the filter unit and the fan unit are installed on the side wall panel 11 that partitions the support area 16 and is opposed to the gouging area 18. A HEPA filter is detachably installed in the filter unit, and impurities (dust, fine particles, PM2.5, etc.) contained in the air passing through the filter unit are removed by the HEPA filter. Air flows from the support area 16 through the filter unit and the fan unit into the gouning area 18. The number of filter units and fan units to be installed is not particularly limited, and the number of filter units and fan units to be installed is determined by the volume and floor area of the gouning area 18 and the required cleanliness of the gouning area 18.

  In the clean room 10A, the fan filter unit 29 (clean air supply unit) (or the filter unit, the fan unit) is installed on the side wall panel 11 that partitions the support area 16 (the low air cleanliness requirement area 14). Using the filter unit 29, air having a required cleanliness can be made to flow from the support area 16 to the goowning area 18 (the low air cleanliness requirement area 14), and the fan filter unit 29 (or the filter unit, When performing maintenance of the fan unit), it is not necessary for the maintenance worker to step on the stepladder or enter the ceiling, and the fan filter unit 29 (or the filter unit, the fan unit) should be placed in front of a low place (near the floor height). The maintenance work can be performed in this state, the labor and time required for the maintenance work can be reduced, and the maintenance work of the fan filter unit 29 (or the filter unit, the fan unit) can be performed easily and safely. it can.

  The supply area 17 (area 14 requiring low air cleanliness) is located in front of the work area 15, the support area 16, and the gouging area 18. The supply area 17 is surrounded by a floor of a building, each side wall panel 11, and each ceiling panel 12, and has a volume (size) and a floor area capable of performing a sub-operation. In the supply area 17, the air composed of the external air of the clean room 10A and the internal air of the clean room 10A or the air composed of one of the external air and the internal air flows from the supply area 17 toward the maintenance area 19. Function as a flow path (pseudo duct) through which

  The supply area 17 is connected to the gouging area 18 via an opening / closing door 30 (door) attached between the side walls 11 that partition the area 17 and the gouging area 18. In the supply area 17, the opening / closing door 30 (door) can be opened to enter the supply area 17 from the gouging area 18 and exit from the supply area 17 to the gouging area 18. The supply area 17 is provided with two fan filter units 31 (recirculation means) (clean air recirculation means having a filter and a blowing mechanism to supply air into the maintenance area). The fan filter units 31 allow air to flow (recirculate) from the supply area 17 to the maintenance area 19. In the supply area, the internal air pressure is maintained at a positive pressure (30 Pa) during operation of the fan filter unit 27, the fan filter unit 29, and the fan filter unit 31.

  The fan filter units 31 (recirculation means) are installed on the side wall panel 11 that divides the supply area 17 and faces the maintenance area 19. The fan filter unit 31 is connected to a controller (control panel), and the controller controls the start / stop (ON / OFF) and the output setting of the fan. A HEPA filter is detachably installed in the fan filter unit 31. In the fan filter unit 31, impurities (dust, fine particles, PM2.5, etc.) contained in the air passing therethrough are removed by the HEPA filter. The number of fan filter units 31 installed is not particularly limited, and the number of fan filter units 31 installed is determined by the volume and floor area of the clean room 10A.

  As the reflux means, instead of the fan filter unit 31, a reflux port opening to the side wall panel 11 may be used, or a HEPA filter may be detachably installed in the filter unit (filter), or It may be a fan unit (air recirculation means having a blower mechanism to supply air to the maintenance area). When the recirculation means is a recirculation port, a filter unit, or a fan unit, the recirculation port, the filter unit, or the fan unit is installed on the side wall panel 11 that partitions the supply area 17 and is opposite to the maintenance area 19. To be done. Air flows into the maintenance area 19 through the return port, the filter unit, and the fan unit. Impurities (dust and fine particles; PM2.5, etc.) contained in the air passing through the filter unit are removed by the HEPA filter, and clean air flows into the maintenance area 19 through the filter unit.

  In the supply area 17, two pass boxes 32 and one balance damper 33 (exhaust port) are installed. The pass box 32 is installed on the side wall panel 11 that defines the supply area 17 and is located on the opposite side of the maintenance area 19. The pass box 32 has a door 34 that opens and closes inside the supply area 17 and a door 35 that opens and closes outside the clean room 10A (inside the building), and various experimental materials (experiment Cells and experimental bacteria) are carried into the supply area 17 from the outside of the clean room 10A, and various products (cultured cells, culture bacteria, etc.) are carried out from the supply area 17 to the outside of the clean room 10A.

  The balance damper 33 (exhaust port) is installed above the side wall panel 11 that partitions the supply area 17 and is located on the opposite side of the maintenance area 19. The balance damper 33 discharges a part of the air flowing in from the support area 16 to the outside of the supply area 17 (inside the building). The number of balance dampers 33 installed is not particularly limited, and the number of balance dampers 33 installed is determined by the amount of air exhausted from the supply area 17. The balance damper 33 (exhaust port) may be installed on the side wall panel 11 that surrounds (partitions) the work area 15 or the side wall panel 11 that surrounds (partitions) the support area 16. Further, the exhaust port may be the exhaust opening instead of the balance damper 33.

  The maintenance area 19 (area requiring low air cleanliness 14) is located on the side of the work area 15 and the supply area 17, and connects the work area 15 and the supply area 17. The maintenance area 19 is surrounded (partitioned) by the floor of the building, each side wall panel 11, and each ceiling panel 12, and has a volume (size) and floor area in which maintenance work can be performed. In the maintenance area 19, the air formed by the outside air of the clean room 10A and the inside air of the clean room 10A or the air formed by either one of the outside air and the inside air flows from the maintenance area 19 toward the work area 15. Function as a flow path (pseudo duct) through which

  The maintenance area 19 is connected to the work area 15 via a fan filter unit 27 installed on the side wall panel 11 of the work area 15, and is connected to the supply area 17 via a fan filter unit 31 installed on the side wall panel 11 of the supply area 17. Connected to. An opening / closing curtain 36 is installed at a rear end portion of the maintenance area 19 adjacent to the work area 15. By opening the opening / closing curtain 36, the maintenance area 17 can be entered, and the maintenance area 17 can exit the clean room 10A outside (inside the building). Instead of the opening / closing curtain 36, an opening / closing door (door) may be installed at the rear end portion of the maintenance area 19.

  In the maintenance area 19, one balance damper 37 (outside airflow inlet) is installed to air-condition the outside air of the clean room 10A and the air consisting of the internal air of the clean room 10A or the air consisting of either the external air or the internal air. An air conditioner 38 (floor-mounted PAC) is installed. The balance damper 37 (outside air flow inlet) is installed on the side wall panel 11 above the opening / closing curtain 36 installed in the maintenance area 19. The balance damper 37 causes outside air (external air) to flow into the maintenance area 17 from outside the maintenance area 17 (inside the building). The number of balance dampers 37 to be installed is not particularly limited, and the number of balance dampers 37 to be installed is determined by the amount of supplied outside air (external air) to the maintenance area 17. The outside airflow inlet may be the outside air inflow opening, and the air conditioner 38 (floor-standing PAC) may not be installed in the maintenance area 17.

  A filter unit (filter) through which outside air (external air) flows may be installed in the maintenance area 19, or a fan unit (having a blower mechanism) that supplies outside air (external air) to the maintenance area. External air supply means for supplying external air to the maintenance area may be installed, or a fan filter unit (having a filter and a blower mechanism) for supplying external air (external air) to the maintenance area may be installed. A clean external air supply means for supplying external air to the maintenance area may be installed.

  The filter unit, the fan unit, and the fan filter unit are installed above the side wall panel 11 that defines the maintenance area 19. A HEPA filter is detachably installed in the filter unit and the fan filter unit, and impurities (dust, fine particles, PM2.5, etc.) contained in the air passing through the filter unit and the fan filter unit are removed by the HEPA filter. Air flows into the maintenance area 17 through the filter unit, the fan unit, and the fan filter unit. The number of filter units, fan units, and fan filter units to be installed is not particularly limited, and the number of the filter units, fan units, and fan filter units to be installed is determined by the supply amount of outside air (external air) flowing into the maintenance area 17 and the required cleanliness of the maintenance area 17. ..

  The gounning area 18 (the low air cleanliness requirement area 14) is located on the side of the support area 16 and behind the supply area 17. The gowning area 18 is surrounded by the floor of the building, each side wall panel 11, and each ceiling panel 12, and has a volume (size) and a floor area capable of performing the first change. In the gourning area 18, the air consisting of the external air of the clean room 10A and the internal air of the clean room 10A or the air consisting of either the external air or the internal air flows from the gauging area 18 to the exterior of the clean room 10A (inside the building). By flowing toward, it functions as a flow path (pseudo duct) through which air flows.

  The gowning area 18 is connected to the outside (inside the building) via an opening / closing door 39 (door) attached between the side wall panels 11. In the gowning area 18, the opening / closing door 39 (door) can be opened to enter the gowning area 18 from the outside and to exit the gowning area 18 to the outside. The internal pressure of the gouning area 18 is maintained at a positive pressure (15 Pa) during operation of the fan filter unit 29.

  One balancing damper 40 (exhaust port) is installed in the goowning area 18. The balance damper 40 (exhaust port) is installed on an upper portion of the side wall panel 11 that partitions the goowning area 18 and is located on the opposite side of the support area 16. The balance damper 40 exhausts the air that has flowed from the support area 16 into the gauging area 18 to the outside of the gauging area 18 (inside the building). The number of balance dampers 40 to be installed is not particularly limited, and the number of balance dampers 40 to be installed is determined by the amount of air exhausted from the goowning area 18. The exhaust port may be the exhaust opening instead of the balance damper 39.

  FIG. 8 is a top view illustrating the flow of air (outside air and return air) in the unit type clean room 10A. In the controller, the fan filter units 27, 29, 31 are activated (ON), and the remote controller (not shown) activates (ON) the air conditioner 38 (floor PAC). When the air conditioner 38 (floor-standing PAC) is activated, the air conditioner 38 creates conditioned air at the set temperature and the set humidity, and the conditioned air is supplied to the maintenance area 19 from the outlet of the air conditioner 38. It

  When the fan filter unit 27 is activated, air is forcibly supplied from the maintenance area 19 to the work area 15 by the fan filter unit 27, as shown by an arrow L1 in FIG. Accordingly, as shown by an arrow L2 in FIG. 8, outside air (external air) flows into the maintenance area 19 through the balance damper 37, and returns air (internal air of the clean room 10A) and outside air (external air of the clean room 10A). ) And are mixed in the maintenance area 19.

  When the fan filter unit 31 is activated, air is forcibly supplied from the supply area 17 to the maintenance area 19 by the fan filter unit 31, as indicated by an arrow L3 in FIG. When the fan filter unit 29 is activated, the fan filter unit 29 forcibly supplies air from the support area 16 to the gauging area 18, as indicated by an arrow L4 in FIG.

  The air composed of the outside air and the return air supplied from the maintenance area 19 to the work area 15 flows into the work area 15, and then passes through the entrance / exit 26 to pass from the work area 15 to the support area as shown by an arrow L5 in FIG. It flows into 16. Most of the air that has flowed into the support area 16 flows from the support area 16 into the supply area 17 through the inlet / outlet port 28, as indicated by an arrow L6 in FIG. A part of the air that has flowed into the support area 16 flows from the support area 16 into the gauging area 18 by the fan filter unit 29, passes through the balance damper 40, and then comes out of the gauging area 18 as shown by an arrow L7 in FIG. Exhausted to the outside (inside the building).

  Most of the air flowing into the supply area 17 flows into the maintenance area 19 from the supply area 17 by the fan filter unit 31, and flows into the work area 15 again from the maintenance area 19 as shown by an arrow L8 in FIG. Part of the air that has flowed into the supply area 17 passes through the balance damper 33 and is exhausted from the supply area 17 to the outside (inside the building), as indicated by the arrow L9 in FIG.

  In the unit type clean room 10A (including the unit type clean room 10B), the air having a high degree of cleanness, which is conditioned by the air conditioner 38 to an appropriate temperature and an appropriate humidity, flows into the work area 15, and the main work is performed in the work area 15. The cleanliness of air, the proper temperature, and the proper humidity are lowered, and the air having the lowered cleanliness, the proper temperature, and the proper humidity flows into the support area 16. The second change of clothes in the support area 16 further lowers the cleanliness, appropriate temperature, and appropriate humidity of air, and the air having reduced cleanliness, appropriate temperature, and appropriate humidity flows into the supply area 17.

  By performing the sub-operation in the supply area 17, the cleanliness of air, the appropriate temperature and the appropriate humidity are further reduced, and the air having the reduced cleanliness, the appropriate temperature and the appropriate humidity flows into the fan filter unit 31. The fan filter unit 31 removes impurities contained in the air, and the air whose cleanliness is restored is supplied from the fan filter unit 31 to the maintenance area 19. Air is conditioned by the air conditioner 38 installed in the maintenance area 19, the temperature and humidity of the air are restored to the appropriate temperature and humidity, and the air flows into the fan filter unit 27.

  By performing the maintenance work in the maintenance area 19, the cleanliness of the air flowing through the maintenance area 19 decreases, but the impurities contained in the air are removed by the fan filter unit 27, and the air whose cleanliness is restored becomes the fan filter. Air is supplied to the work area 15 from the unit 27. The air whose cleanliness has decreased in the support area 16 flows into the fan filter unit 29 connected to the gouging area 18. Impurities contained in the air are removed by the fan filter unit 29, and the air whose cleanliness is restored flows from the fan filter unit 29 into the goowning area 18.

  FIG. 9 is a top view of a unit type clean room 10B shown as another example, and FIG. 10 is a top view illustrating the flow of air (outside air and return air) in the unit type clean room 10B. This unit type clean room 10B is different from that of FIG. 1 in that the opening / closing door 30 (door) is not installed between the side wall panels 11 that partition the supply area 17 and the goowning area 18, and those areas 17, 18 are not provided. A doorway 41 (opening) is formed between the side wall panels 11 that partition the area, and an opening / closing door 39 (door) is not installed between the side wall panels 11 that partition the goowning area 18. An entrance / exit 42 (opening) is formed between the side wall panels 11 partitioning the. The other configurations of the unit type clean room 10B are the same as those of the unit type clean room 10A of FIG. 1, so the same reference numerals as those in FIG. 1 are attached and the description of the clean room 10A of FIG. Descriptions of other configurations of 10B are omitted.

  An entrance / exit 41 (opening) having an opening area (size) through which a worker can pass is formed between each side wall panel 11 that divides the supply area 17 and the gouging area 18. The supply area 17 is connected to the gounning area 18 via the doorway 41 (opening). In the supply area 17, it is possible to enter the supply area 17 from the gouging area 18 by passing through the entrance / exit 41 (opening), and to exit from the supply area 17 to the gauging area 18.

  An entrance / exit 42 (opening) having an opening area (size) through which an operator can pass is formed between the side wall panels 11 that partition the gouging area 18. The gounning area 18 is connected to the outside (inside the building) via the entrance / exit 42 (opening). In the gouning area 18, the gouning area 18 can be entered from the outside by passing through the entrance / exit 42 (opening), and can be exited from the gouning area 18.

  In the clean room 10B, the fan filter unit 27, the fan filter unit 29, and the fan filter unit 31 generate an air flow flowing in one direction in which the work area 15 → the support area 16 → the supply area 17 → the maintenance area 19 (flow) in order. Then, an airflow flowing in one direction is generated, which flows in the order of work area 15 → support area 16 → going area 18.

  When the air conditioner 38 (floor-standing PAC) is activated, air conditioned to the set temperature and the set humidity is created by the air conditioner 38, and the conditioned air is supplied from the outlet of the air conditioner 38 to the maintenance area 19. .. When the fan filter unit 27 is activated, air is forcibly supplied from the maintenance area 19 to the work area 15 by the fan filter unit 27, as shown by an arrow L1 in FIG. Along with this, as shown by an arrow L2 in FIG. 10, the outside air flows into the maintenance area 19 through the balance damper 37, and the return air and the outside air are mixed in the maintenance area 19.

  When the fan filter unit 31 is activated, air is forcibly supplied from the supply area 17 to the maintenance area 19 by the fan filter unit 31, as shown by an arrow L3 in FIG. When the fan filter unit 29 is activated, the fan filter unit 29 forcibly supplies air from the support area 16 to the gauging area 18, as indicated by an arrow L4 in FIG.

  The air composed of the outside air and the return air supplied from the maintenance area 19 to the work area 15 flows into the work area 15, and then passes through the entrance / exit 26 to pass from the work area 15 to the support area as shown by an arrow L5 in FIG. It flows into 16. Most of the air that has flowed into the support area 16 flows from the support area 16 into the supply area 17 through the inlet / outlet port 28, as indicated by an arrow L6 in FIG.

  Most of the air that has flowed into the supply area 17 flows from the supply area 17 into the maintenance area 19 by the fan filter unit 31, and then flows into the work area 15 again from the maintenance area 19 as indicated by an arrow L7 in FIG. Part of the air that has flowed into the supply area 17 passes through the balance damper 33 and is exhausted from the supply area 17 to the outside (inside the building), as indicated by an arrow L8 in FIG.

  Part of the air that has flowed into the support area 16 flows from the support area 16 into the gauging area 18 by the fan filter unit 29, and passes through the entrance / exit 42 to the outside of the gauging area 18 as shown by an arrow L9 in FIG. While being exhausted to (inside the building), as shown by an arrow L10 in FIG. 10, it is exhausted to the outside (inside the building) from the goowning area 18 through the balance damper 40.

  The unit type clean rooms 10A and 10B have a work area 15, a support area 16, a supply area 17, a gowning area 18, and a maintenance area 19 (areas requiring high air cleanliness 13 and areas requiring low air cleanliness 14) that form the unit clean rooms 10A and 10B. Each of the areas 15 to 15 functions as a flow path (pseudo duct) that allows air to flow through the outside air of the clean rooms 10A and 10B and the inside air of the clean rooms 10A and 10B, or the air including either the outside air or the inside air. There is no need to separately install a dedicated duct to 19, and since it is a ductless clean room 10A, 10B, it is not necessary to secure a ceiling height when installing a dedicated duct, and not only a building having a high ceiling height, It can be installed in a building with a ceiling of normal ceiling height.

  The unit type clean rooms 10A and 10B are provided with a work area 15, a support area 16, a supply area 17, a side wall panel 11 (partition plate) and a ceiling panel 12 (partition plate) which are hermetically installed at predetermined locations inside a building. Since the gouning area 18 and the maintenance area 19 (the high air cleanliness requirement area 13 and the low air cleanliness requirement area 14) can be installed, various plural materials relating to the duct material are not required and the duct construction is omitted. The facility work can be performed in a short time, and the cost can be reduced and the construction period can be shortened.

  The unit type clean rooms 10A and 10B have a work area 15 by installing (extending) the new side wall panel 11 and the new ceiling panel 12 or removing the existing side wall panel 11 and the existing ceiling panel 12 after having installed them once. And the layout of the support area 16, the supply area 17, the goowning area 18, and the maintenance area 19 (the high air cleanliness requirement area 13 and the low air cleanliness requirement area 14) can be freely changed, and the areas 15 to The number of 19 can be increased or decreased, and a layout change request, a request to divide the areas 15 to 19, a request to expand the areas 15 to 19, an area 15 to 19 can be made in response to a change in the work content of the user of the clean rooms 10A and 10B. It is possible to promptly respond to the request for the expansion of the area and the request for the decrease of the areas 15 to 19.

  The unit type clean rooms 10A and 10B utilize a fan filter unit 27 (clean air supply means having a filter and a blowing mechanism) to provide a work area 15, a support area 16, a supply area 17, a goowning area 18, and a maintenance area 19 ( Since it is possible to make air flow in order toward the high air cleanliness requirement area 13 and the low air cleanliness requirement area 14) to make the inside of the flow path a positive pressure, the pressure difference between the inside and outside of the clean room causes the building The inside air of the building can be prevented from flowing into the work area 15, the support area 16, the supply area 17, the gauging area 18, and the maintenance area 19, and the air inside the building can be prevented from flowing into the work area 15, the support area 16, and the supply area. It is possible to maintain the clean state of the areas 15, 19 without causing contamination of the areas 17, the gouging area 18, and the maintenance area 19 with the air.

  The unit type clean rooms 10A and 10B (ductless unit type clean room) are installed (constructed) at predetermined locations inside the building by the unit type clean room installation method. The unit type clean room facility method includes a layout design process, an area facility process, a clean air supply unit installation process, a recirculation unit installation process, an exhaust port installation process, an outside air intake unit installation process, and an air conditioner installation process. , 10B facilities. In the unit type clean room facility method, the layout of the work area 15, the support area 16, the supply area 17, the goowning area 18, and the maintenance area 19 is modified by the layout modification process.

  Further, in the unit type clean room facility method, the number of work areas 15, the support area 16, the supply area 17, the gowning area 18, and the maintenance area 19 are increased by the area number increasing process, and the work area 15 and the supporting area are increased by the area number decreasing process. The number of areas 16, supply area 17, goowning area 18, and maintenance area 19 is reduced.

  The layout design process includes a work area 15, a support area 16, a supply area 17, a gowning area 18, and a maintenance area 19 (a high air cleanliness requirement area 13 to a low air cleanliness requirement) which are provided at predetermined locations inside the building. The layout of the area 14) is designed according to the design requirements. In the layout design process, the number of installations and locations of the side wall panels 11 are planned according to the design requirements, and the number of installations and locations of the ceiling panels 12 are planned according to the design requirements. Before (before construction), the layout of each area 15 to 19 can be freely designed.

  In the area facility process, the side wall panel 11, the ceiling panel 12, the opening / closing doors 30 and 39 are hermetically installed at predetermined locations inside the building based on the layout designed by the layout design process, and the side wall panel 11 and those A flow of air that is partitioned by the ceiling panel 12 and the opening / closing doors 30 and 39 and that is composed of the external air of the clean rooms 10A and 10B and the internal air of the clean rooms 10A and 10B, or the air that is either external air or internal air. A work area 15 having a function as a road, a support area 16, a supply area 17, a gowning area 18, and a maintenance area 19 (high air cleanliness requirement area 13 to low air cleanliness requirement area 14) are provided. The layout design may be changed in the area facility process.

  In the clean air supply means installation process, air is circulated (circulated) in the order of work area 15 → support area 16 → supply area 17 → maintenance area 19, and part of the air is work area 15 → support area 16 → gau Fan filter unit 27 (clean air supply having a filter and a blowing function) that allows air to flow in the order of the cooling area 18 (air flows in order from the area 13 requiring high air cleanliness to the area 14 requiring low air cleanliness) Means) is installed in the work area 15 (area 13 requiring high air cleanliness), and the fan filter unit 29 is installed in the support area 16. In the clean air supply means installation step, the fan filter unit 27 is installed on the upper portion of the side wall panel 11 of the work area 15 facing the maintenance area 19, and the fan filter unit 29 is mounted on the side wall of the support area 16 facing the gauging area 18. It is installed on the top of the panel 11.

  In the unit type clean room facility method, the fan filter unit 27 (clean air supply means) is installed on the side wall panel 11 of the work area 15 facing the maintenance area 19, and the fan filter unit 29 is supported on the supporting area facing the gauging area 18. By installing on the side wall panel 11 of 16, the air can be circulated to the work area 15, the support area 16, the supply area 17, the goowning area 18, and the maintenance area 19 using the fan filter units 27 and 29. At the same time, when performing maintenance on the fan filter units 27, 29, it is not necessary for a maintenance worker to climb a stepladder or enter the ceiling, and the fan filter units 27, 29 are placed at a low place (near the floor height) in the maintenance area. In the unit type, the maintenance work can be performed in a state of being in the front, the labor and time in the maintenance work can be reduced, and the maintenance work of the fan filter units 27, 29 can be performed easily and safely. Clean rooms 10A and 10B can be installed.

  In the recirculation means installation step, the fan filter unit 31 (recirculation means) for recirculating air from the maintenance area 19 (low air cleanliness requirement area 14) to the work area 15 (air cleanliness requirement area 13) is supplied to the supply area 18 (air circulation means). Install in the area 14) requiring low cleanliness. In the step of installing the recirculation means, the fan filter unit 31 (recirculation means) (clean air recirculation means for recirculating air to the work area 15 (air cleanliness requirement area 13) having a filter and a blowing mechanism) is installed in the supply area 17. The side wall panel 11 to be partitioned is installed above the side wall panel 11 facing the maintenance area 19.

  In the recirculation means installation step, a recirculation port (recirculation opening) that recirculates air to the work area 15, a filter unit (predetermined filter) that recirculates air to the work area 15, a fan unit that recirculates air to the work area 15 (blower mechanism). Supplying at least one of the air recirculation means for recirculating air to the work area 15 (air cleanliness requirement area 13) and the fan filter unit 31 (clean air recirculation means) facing the maintenance area 19. It may be installed on the side wall panel 11 in the area 17.

  In the unit type clean room facility method, at least one of a recirculation port (recirculation opening), a filter unit (predetermined filter), a fan unit (air supply unit), and a fan filter unit 31 (clean air supply unit) is used as a maintenance area. By installing it on the side wall panel 11 of the supply area 17 opposite to 19, air can be recirculated from the maintenance area 19 to the work area 15 by utilizing the recirculation port, the filter unit, the fan unit, and the fan filter unit 31. When performing maintenance of the return port, the filter unit, the fan unit, and the fan filter unit 31, it is not necessary for the maintenance worker to step up to the stepladder or enter the ceiling, and the return port, the filter unit, the fan unit, The maintenance work can be performed with the fan filter unit 31 facing forward at a low place (near the height of the floor), and the labor and time required for the maintenance work can be reduced, and the return port, the filter unit, and the fan can be used. It is possible to provide unit type clean rooms 10A and 10B in which maintenance work of the unit and the fan filter unit 31 can be performed easily and safely.

  In the exhaust port installation process, the balance dampers 33 and 40 (exhaust ports) that exhaust air to the outside are provided in the supply area 17 (low air cleanliness requirement area 14) and the goowning area 18 (low air cleanliness requirement area 14). And is installed on the upper portion of the side wall panel 11 that divides the areas 17 and 18. In the exhaust port installation process, the work area 15 (high air cleanliness requirement area 13), the support area 16 (low air cleanliness requirement area 14), the supply area 17 (low air cleanliness requirement area 14), the goning area 18 ( The balance dampers 33, 40 (exhaust ports) may be installed on at least one of the areas 15-18 of the low air cleanliness required area 14) and the upper part of the side wall panel 11 that partitions the areas 15-18. .. In the exhaust port installation step, the exhaust openings may be installed in those areas 15 to 18 instead of the balance dampers 33 and 40.

  In the unit type clean room facility method, at least one of the work area 15, the support area 16, the supply area 17, and the gouging area 18 is balanced to the side wall panel 11 which defines the areas 15 to 18. By installing the dampers 33, 40 (exhaust port), the air in the work area 15, the support area 16, the supply area 17, and the goowning area 18 can be externally (inside the building) using the balance dampers 33, 40. When the balance dampers 33, 40 can be exhausted and the maintenance of the balance dampers 33, 40 is performed, it is not necessary for the maintenance worker to climb a stepladder or enter the ceiling, and the balance dampers 33, 40 are placed at a low place (around the floor height). In the unit type clean room, the maintenance work can be performed in a state of being in front, and the labor and time in the maintenance work can be reduced, and the maintenance work of the balance dampers 33 and 40 can be performed easily and safely. 10A and 10B can be installed.

  In the step of installing the outside air intake means, the balance damper 37 (outside air inlet) that allows the outside air (the outside air of the clean rooms 10A and 10B) to flow into the maintenance area 19 is provided on the opening / closing curtain 36 of the side wall panel 11 that defines the maintenance area 19. It is installed on the upper side wall panel 11. In the step of installing the outside air intake means, the balance damper 37 may be installed on any one of the side wall panels 11 that partition the maintenance area 19.

  In the step of installing the outside air intake means, the balance damper 37 (outside air flow inlet), the outside air inflow opening for letting the outside air into the maintenance area, the filter unit (predetermined filter) through which the outside air flows, and the fan unit for letting the outside air into the maintenance area. (Air supply means for supplying outside air to the maintenance area with a blower mechanism), Fan filter unit for introducing outside air into the maintenance area (Clean air supply for supplying outside air to the maintenance area with a filter and blower mechanism) At least one of the air-conditioning means) may be installed on the side wall panel 11 that defines the maintenance area 19.

  In the unit type clean room facility method, by introducing the outside air into the maintenance area 19, the outside air can be added to the return air, and clean rooms 10A and 10B (unit type clean room) capable of taking in fresh air can be installed. You can In the unit type clean room facility method, the balance damper 37 (outside airflow inlet), the outside air inflow opening, the filter unit (predetermined filter), the fan unit (air supply unit), the fan filter unit (clean air supply unit) are installed in the maintenance area 19. The balance damper 37 and the outside air inflow opening, the filter unit, the fan unit, and the fan filter unit allow the outside air to flow into the maintenance area 19, and the balance damper 37 and the outside air inflow opening. When performing maintenance on the filter unit, the fan unit, and the fan filter unit, it is not necessary for the maintenance worker to climb the stepladder or enter the ceiling, and the balance damper 37 and the outside air inflow opening, the filter unit, and the fan unit in the maintenance area 19. The maintenance work can be performed in a state where the fan filter unit is in the front at a low place (near the height of the floor), and the labor and time in the maintenance work can be reduced, and the balance damper 37 and the outside air inflow opening can be reduced. It is possible to install the filter unit, the fan unit, and the unit type clean rooms 10A and 10B in which the maintenance work of the fan filter unit can be performed easily and safely.

  In the air conditioner installation step, an air conditioner 38 (floor-standing PAC) that air-conditions the air composed of the outside air and the return air is installed in the maintenance area 19. When the air conditioner 38 is not installed in the maintenance area 19, the air conditioner installation process can be omitted. In the unit type clean room facility method, the air conditioned by the air conditioner 38 to the set temperature and the set humidity can be made to flow from the maintenance area 19 to the work area 15, the support area 16, the supply area 17, and the goowning area 18 in order. The unit type clean rooms 10A and 10B capable of optimally maintaining the temperature environment and the humidity environment of the areas 15 to 18 and creating a good working environment in the areas 15 to 18 can be provided.

  FIG. 11 is a top view of the unit type clean room 10C before the layout is changed, and FIG. 12 is a top view of the unit type clean room 10C after the layout is changed. 11 and 12, the flow of air is indicated by arrows. The unit type clean room 10C shown in FIGS. 11 and 12 is partitioned by each side wall panel 11 (partition plate forming a side wall) and each ceiling panel 12 (partition plate forming a ceiling), as in FIGS. 1 and 8. The work area 15 (high air cleanliness requirement area 13), the support area 16, the supply area 17, the gouging area 18, and the maintenance area 19 (low air cleanness requirement area 14) are provided.

  The work area 15, the support area 16, the supply area 17, the goowning area 18, and the maintenance area 19 are connected in series to form a unit type clean room 10C. The atmospheric pressure inside these areas 15 to 19 is maintained at a positive pressure. In the unit type clean room 10C of FIG. 11, two (2 areas) work areas 15 and two (2 areas) support areas 16 are created. An opening / closing door 43 (door) is installed in the maintenance area 19. By opening the opening / closing door 43, it is possible to enter the maintenance area 19 from the outside (inside the building) and exit from the maintenance area 19 to the outside (inside the building). A fan unit 45 for supplying outside air to the area 19 is installed on the side wall panel that partitions the maintenance area 19.

  In the unit type clean room facility method, after the unit type clean room 10C is installed, the work area 15 (high air cleanliness requirement area 13), the support area 15, the supply area 16, the gowning area 18, the maintenance area 19 (low air cleanliness level). The installation position of the side wall panel 11 in at least one area 15 to 19 of the required area 14) is changed, and the layout of at least one area 15 to 19 of those areas 15 to 19 is changed (layout changing step). ..

  In the unit type clean room facility method, after the unit type clean room 10C is installed, the work area 15 (high air cleanliness requirement area 13), the support area 16, the supply area 17, the gowning area 18, the maintenance area 19 (low air cleanliness) A new side wall panel 11 is installed in at least one area 15 to 19 of the required area 14) and the layout of at least one area 15 to 19 of those areas 15 to 19 is modified (layout modification step).

  In the unit type clean room facility method, after the unit type clean room 10C is installed, the work area 15 (high air cleanliness requirement area 13), the support area 16, the supply area 17, the gowning area 18, the maintenance area 19 (low air cleanliness) The existing side wall panel 11 is removed from at least one area 15 to 19 of the required area 14), and the layout of at least one area 15 to 19 of those areas 15 to 19 is modified (layout modifying step).

  In the unit type clean room 10C shown in FIG. 12, the side wall panel 11 for partitioning (partitioning) the support area 16 from the unit type clean room 10C of FIG. 11 is removed (removal of the existing side wall panel 11), and the side wall for partitioning the goowning area 18 is formed. The panel 11 (the louver 44 is installed on the upper portion of the side wall panel 11) and the opening / closing door 30 (door) are moved forward (change of installation positions of the side wall panel 11 and the opening / closing door 30 (door)). By removing the existing side wall panel 11, two (2 areas) support areas 16 are connected, the layout is modified to one (1 area) support area 16, and the volume (size) and floor area of the support area 16 are changed. It is expanding. The layout of the supply area 17 and the gauging area 18 is changed by changing the installation positions of the side wall panel 11 and the opening / closing door 30 (door), and the volume (size) and floor area of the supply area 17 are reduced, and the gauging area 18 is reduced. The volume (size) and floor area are increasing.

  In addition, in the unit type clean room 10C of FIG. 12, a new side wall panel 11 is installed in the support area 16 (installation of the new side wall panel 11), and the side wall panel 11 and the opening / closing door 30 (door) that partition the goowning area 18 are installed. By moving to the rear (changing the installation positions of the side wall panel 11 and the opening / closing door 30 (door)) and changing the unit type clean room 10C shown in FIG. 12 to the unit type clean room 10C shown in FIG. The layout of the area 17 and the goowning area 18 is modified so that one (1 area) support area 16 is divided into two, and the volume (size) and floor area of the supply area 17 are reduced, resulting in the goowning. The volume (size) and floor area of the area 18 increase.

  In the unit type clean room facility method, after the unit type clean room 10C is installed, the work area 15 (high air cleanliness requirement area 13), the support area 16, the supply area 17, the gowning area 18, the maintenance area 19 (low air cleanliness) By changing the installation position of the side wall panel 11 in the request area 14), the layout of each area 15 to 19 can be freely set according to the layout change request of those areas 15 to 19 accompanying the change of the work content of the user of the clean room 10C. Can be modified to.

  In the unit type clean room facility method, after the unit type clean room 10C is installed, the work area 15 (high air cleanliness requirement area 13), the support area 16, the supply area 17, the gowning area 18, the maintenance area 19 (low air cleanliness) By installing the new side wall panel 11 in the required area 14), the areas 15 to 19 can be divided by the new side wall panel 11, and the areas 15 to 15 accompanying the change of the work content of the user of the clean room 10C. It is possible to freely divide (modify) the layout of the areas 15 to 19 according to 19 division requests.

  In the unit type clean room facility method, after the unit type clean room 10C is installed, the work area 15 (high air cleanliness requirement area 13), the support area 16, the supply area 17, the gowning area 18, the maintenance area 19 (low air cleanliness) By removing the existing side wall panel 11 from the required area 14), the volume and floor area of the areas 15 to 19 can be expanded, and the areas 15 to 19 of the clean room 10C accompanying the change of the work content of the user can be expanded. The layout of the areas 15 to 19 can be freely expanded (modified) according to the expansion request.

  FIG. 13 is a top view of the unit type clean room 10D after the number of areas is increased. In FIG. 13, the flow of air is indicated by arrows. The unit type clean room 10D shown in FIG. 13 is partitioned by each side wall panel 11 (partition plate forming a side wall) and each ceiling panel 11 (partition plate forming a ceiling), as in the case of FIGS. 1 and 8. It has a work area 15 (area 13 requiring high air cleanliness), a support area 16, a supply area 17, a gowning area 18, and a maintenance area 19 (area 14 requiring low air cleanliness).

  The work area 15, the support area 16, the supply area 17, the gowning area 18, and the maintenance area 19 are connected to each other in series to form a clean room 10D. The air pressure inside these areas 15 to 19 is maintained at a slight positive pressure. In the clean room 10D of FIG. 13, three (3 areas) work areas 15 and three (3 areas) support areas 16 are created.

  In the unit type clean room facility method, after changing the layout from the unit type clean room 10C in FIG. 11 to the unit type clean room 10C in FIG. 12, a new side wall panel 11 and a ceiling panel 12 are installed at predetermined locations inside the building. , At least one of the work area 15 (high air cleanliness requirement area 13), the support area 16, the supply area 17, the gowning area 18, and the maintenance area 19 (low air cleanliness requirement area 14). The number (area number) is increased (area number increasing step).

  As shown in FIG. 13, the unit type clean room 10D is provided with a new side wall panel 11 and a new ceiling panel 12 for partitioning a new work area 15 in the unit type clean room 10C shown in FIG. The number of areas is increased from two (2 areas) work areas 15 to three (3 areas) work areas 15, and a new side wall panel 11 and a new ceiling panel 12 that partition a new support area 16 are installed. Then, a new support area 16 is created, and the number of areas is increased from one (2 areas) support area 16 to three (3 areas) support areas 16. Further, by installing the new side wall panel 11 and the new ceiling panel 12 on the existing side wall panel 11 and the existing ceiling panel 12 that partition the supply area 17, the volume and floor area of the supply area 17 are increased, and the maintenance 19 is partitioned. By installing the new side wall panel 11 and the new ceiling panel 12 on the existing side wall panel 11 and the existing ceiling panel 12, the volume and floor area of the maintenance 19 are increased.

  In the unit type clean room facility method, after the unit type clean room 10C is installed, a new side wall panel 11 or a new ceiling panel 12 is installed at a predetermined location of the building to connect to the existing areas 15 to 19. A work area 15 (high air cleanliness requirement area 13), a support area 16, a supply area 17, a gowning area 18, a maintenance area 19 (low air cleanliness requirement area 14) can be installed (extended), and a clean room 10C can be installed. The number of work areas 15 (high air cleanliness requirement area 13), the support area 16, and the supply area 17 according to the expansion request of the number of areas 15 to 19 inside the building due to the change of the work content of the user It is possible to freely increase the number of gouning areas 18 and maintenance areas 19 (areas requiring low air cleanliness 14) (areas).

  In the unit type clean room facility method, after the unit type clean room 10D of FIG. 13 is installed, the existing side wall panel 11 and a part of the existing ceiling panel 12 are removed from a predetermined location inside the building, and the work area 15 (air The number of at least one area 15 to 19 among the high cleanliness requirement area 13), the support area 16, the supply area 17, the gouging area 18, and the maintenance area 19 (low air cleanliness requirement area 14) is reduced (area. Number reduction process).

  A part of the existing side wall panel 11 and the existing ceiling panel 12 that divides the work area 15 from the unit type clean room 10D is removed, a part of the existing work area 15 is disassembled, and three (3 areas) work areas 15 are formed. The number of work areas 15 is reduced to two (2 areas), and part of the existing side wall panel 11 and existing ceiling panel 12 that partition the support area 16 from the unit type clean room 10D is removed to remove the existing support area 17 Is partially disassembled, and the number of areas is reduced from three (3 areas) support areas 16 to two (2 areas) support areas 16. Further, by removing a part of the existing ceiling panel 12 from the side wall panel 11 partitioning the supply area 17, the volume and floor area of the supply area 17 are reduced, and the side wall panel 11 partitioning the maintenance area 19 to the existing ceiling panel 12 is removed. The volume and floor area of the maintenance area 19 can be reduced by removing a part of the maintenance area 19 and returned to the unit type clean room 10C of FIG.

  In the unit type clean room facility method, after installing the clean room 10D (unit type clean room), by removing a part of the existing side wall panel 11 and the existing ceiling panel 12 from a predetermined location inside the structure, A plurality of work areas 15 (a plurality of air cleanliness requirement areas 13), a plurality of support areas 16, a plurality of supply areas 17, a plurality of goowning areas 18, and a plurality of maintenance areas 19 which are installed at predetermined locations inside. It is possible to reduce the number of (a plurality of areas 14 requiring low air cleanliness), and work area 15 (air) in response to a request to reduce the number of areas 15 to 19 accompanying a change in the work content of the user of clean room 10D. The number (area number) of the high cleanliness requirement area 13), the support area 16, the supply area 17, the gowning area 18, and the maintenance area 19 (low air cleanliness requirement area 14) can be freely reduced.

  FIG. 14 is a top view of another example of the unit type clean room 10E shown with the ceiling panel 12 removed, and FIG. 15 is a perspective view showing an example of the deflector plate 43 installed on the side wall panel 11. 16 is a side view of the deflector plate 43 installed on the side wall panel 11, and FIG. 17 is a top view illustrating the flow of air (outside air and return air) in the unit type clean room 10E to which the deflector plate 43 is attached. is there.

  The unit type clean room 10E shown in FIG. 14 is different from that of FIG. 1 in that a deflector plate 43 (rectifying plate) is installed in the work area 15, and other configurations are the same as those of the unit type clean room 10A of FIG. Since they are the same as those, the same reference numerals as those in FIG. 1 are attached, and the description of the unit type clean room 10E is cited by referring to the description of the unit type clean room 10A in FIG. The deflector plate 43 can also be installed in the unit type clean rooms 10B to 10D described above.

  The deflector plate 43 (rectifying plate) changes the flow of air supplied to the work area 15 in a crossing direction intersecting with one direction. The deflector plate 43 is installed on the side wall panel 11 that defines the work area 15 and covers the outlets of the fan filter units 27, and is located above the side wall panel 11 that faces the maintenance area 19. As shown in FIGS. 15 and 16, the deflector plate 43 is installed inside the work area 15 and in front of the outlet of the fan filter unit 27.

  At four corners of the deflector plate 43, support rods (support members) 44 that extend in one direction (lateral direction) and whose length can be changed are installed. A predetermined clearance (space) is provided between the outlet of the fan filter unit 27 and the deflector plate 43. By changing the length of the support rod 44, the clearance (space) between the outlet of the fan filter unit 27 and the deflector plate 43 can be changed, and the outlet of the fan filter unit 27 and the deflector plate 43 can be changed. By changing the clearance (space) between them, the diffusion characteristics of the air supplied from the fan filter unit 27 can be adjusted.

The air supplied in one direction from the outlet of the fan filter unit 27 toward the work area 15 (high air cleanliness requirement area 13) hits the deflector plate 43 as shown by the arrow in FIG. It flows into the work area 15 from the periphery of the deflector plate 43. The flow of air supplied to the work area 15 is changed by the deflector plate 43 in an intersecting direction intersecting with one direction.

  When air is supplied in one direction from the fan filter unit 27 (clean air supply means) to the work area 15 (air cleanliness requirement area 13), if the dynamic pressure of the supply air is large, it passes through the work area 15. Although the generated air may bounce off on the side wall panel 11 of the support area 16 (low air cleanliness requirement area 14) and the air containing the low cleanliness air of the support area 16 may flow back to the work area 15, the unit type clean room 10E , A deflector plate 43 (rectifying plate) that changes the flow of air supplied to the work area 15 in an intersecting direction intersecting with one direction is installed on the side wall panel 11 of the work area 15, and the fan filter unit 27 (clean air supply The flow of the air supplied in one direction toward the work area 15 by the means) is changed by the deflector plate 43 in the intersecting direction intersecting the one direction (because the air flow is diffused). The pressure is not concentrated in one place, the dynamic pressure of the supply air is dispersed and the dynamic pressure becomes low, and the air that has passed through the work area 15 can be prevented from rebounding in the side wall panel 11 of the support area 16. It is possible to prevent backflow of air including cleanliness air into the work area 15.

  FIG. 18 is a top view of another example of the unit type clean room 10F shown with the ceiling panel 12 removed, and FIG. 19 is a perspective view showing an example of the punching plate 45 installed on the side wall panel 11. FIG. 20 is a top view illustrating the flow of air (outside air and return air) in the unit type clean room 10F with the punching plate 45 attached. In FIG. 19, the illustration of the through holes 46 formed in the punching plate 45 is partially omitted.

  The unit type clean room 10F shown in FIG. 18 is different from that of FIG. 1 in that a punching plate 45 (rectifying plate) is installed in the work area 15, and other configurations are the same as those of the unit type clean room 10A of FIG. Since they are the same as those, the same reference numerals as those in FIG. 1 are attached, and the description of the unit type clean room 10A is incorporated by reference to omit the description of other configurations in the unit type clean room 10F. The punching plate 45 can also be installed in the unit type clean rooms 10B to 10D described above.

  As shown in FIG. 19, the punching plate 45 (rectifying plate) has a plurality of through holes 46 for allowing air to flow therethrough. The through holes 46 are arranged in the vertical direction and the horizontal direction at equal intervals, and are formed in substantially the entire area of the punching plate 45. The punching plate 45 disperses the flow of air supplied to the work area 15 in other directions including one direction. The punching plate 45 is installed on the side wall panel 11 that partitions the work area 15 and faces the maintenance area 19 so as to block the blowout ports of the fan filter units 27.

  As shown in FIGS. 17 and 18, the punching plate 45 is installed inside the work area 15 and in front of the outlet of the fan filter unit 27. The air supplied in one direction from the outlet of the fan filter unit 27 toward the work area 15 (high air cleanliness requirement area 13) is perforated in the punching plate 45 as shown by the arrow in FIG. It flows into the work area 15 through the through hole 46. The flow of air supplied to the work area 15 is dispersed by the punching plate 45 in other directions including one direction.

  In the unit type clean room 10F, a punching plate 45 (rectifying plate) that disperses the flow of air supplied to the work area 15 in other directions including one direction is a side wall of the work area 15 (high air cleanliness requirement area 13). The flow of air installed in the panel 11 and supplied in one direction toward the work area 15 by the fan filter unit 27 (clean air supply means) is dispersed by the punching plate 45 in other directions including one direction. From the above (because the air flow is diffused), the dynamic pressure of the supply air is not concentrated in one place, the dynamic pressure of the supply air is dispersed, and the dynamic pressure becomes low. It is possible to prevent rebound of the support area 16 (area 14 requiring low air cleanliness) in the side wall panel 11, and to prevent backflow of air containing low cleanliness air into the work area 15.

  FIG. 21 is a perspective view showing an example of the deflector punching plate 47 installed on the side wall panel 11, and FIG. 22 is a side view of the deflector punching plate 47 installed on the side wall panel 11. In FIG. 21, the illustration of the through holes 46 formed in the deflector punching plate 47 is partially omitted. The deflector punching plate 47 (rectifying plate) is installed in the unit type clean room 10E described above. The deflector punching plate 47 can also be installed in the unit type clean rooms 10B to 10D described above.

  As shown in FIG. 21, the deflector punching plate 47 (rectifying plate) has a plurality of through holes 46 for allowing air to flow therethrough. The through holes 46 are arranged at equal intervals in the vertical direction and the horizontal direction, and are formed in substantially the entire area of the deflector punching plate 47. The deflector punching plate 47 changes the flow of air supplied to the work area 15 to a cross direction intersecting with one direction, and distributes the flow of air supplied to the work area 15 to other directions including one direction. Let The deflector punching plate 47 is installed above the side wall panel 11 that partitions the work area 15 and faces the maintenance area 19 so as to cover the outlets of the fan filter units 27.

  As shown in FIGS. 21 and 22, the deflector punching plate 47 is installed inside the work area 15 and in front of the outlet of the fan filter unit 27. At four corners of the deflector punching plate 47, support rods (support members) 44 that extend in one direction (lateral direction) and whose length can be changed are installed. A predetermined clearance (space) is provided between the outlet of the fan filter unit 27 and the deflector punching plate 47. By changing the length of the support rod 44, the clearance (space) between the blowout port of the fan filter unit 27 and the deflector punching plate 47 can be changed, and the blowout port of the fan filter unit 27 and the deflector punching plate 47 can be changed. By changing the clearance (space) with respect to 47, the diffusion characteristic of the air supplied from the fan filter unit 27 can be adjusted.

  The air supplied in one direction from the outlet of the fan filter unit 27 toward the work area 15 (high air cleanliness requirement area 13) is perforated in the deflector punching plate 47 as shown by the arrow in FIG. It flows into the work area 15 through each through hole 46, hits the deflector punching plate 47, and then flows into the work area 15 from the peripheral edge of the deflector punching plate 47. The flow of air supplied to the work area 15 is changed by the deflector punching plate 47 in an intersecting direction intersecting with one direction, and is dispersed in other directions including one direction.

  The unit type clean room 10E equipped with the deflector punching plate 47 changes the flow of the air supplied to the work area 15 to a crossing direction intersecting with one direction and disperses it in other directions including one direction. Air which is unidirectionally supplied toward the work area 15 by the fan filter unit 27 (clean air supply means) is installed on the side wall panel 11 of the work area 15 (high air cleanliness requirement area 13). Flow is changed by the deflector punching plate 47 to an intersecting direction intersecting with one direction and is dispersed in other directions including one direction (because the air flow is diffused), the dynamic pressure of the supply air is at one place. To prevent the air that has passed through the work area 15 from bouncing back in the side wall panel 11 of the support area 16 (area requiring low air cleanliness). Therefore, it is possible to prevent backflow of air including low cleanliness air into the work area 15.

  The unit type clean rooms 10E and 10F (ductless unit type clean rooms) are installed (constructed) at predetermined locations inside a building by the unit type clean room installation method. The unit type clean room facility method consists of layout design process, area facility process, clean air supply means installation process, recirculation means installation process, exhaust port installation process, outside air intake device installation process, air conditioner installation process, straightening plate installation process. Clean rooms 10E and 10F are installed by each process. The layout design process, the area facility process, the clean air supply unit installation process, the recirculation unit installation process, the exhaust port installation process, the outside air intake unit installation process, and the air conditioner installation process are the same as those described above.

  In the flow straightening plate installation step, the flow straightening plate (air supplied to the work area 15) that diffuses the flow of the air supplied to the work area 15 (the air cleanliness requirement area 13) in one direction by the clean air supply means. Of the deflector plate 43 for changing the flow of the air into a crossing direction intersecting with one direction, and a plurality of through holes 46 for allowing the air to flow therethrough, and the flow of the air supplied to the work area 15 to the other directions including the one direction. The punching plate 45 to disperse and the flow of air supplied to the work area 15 are changed to an intersecting direction intersecting with one direction, and the flow of air supplied to the work area 15 is dispersed to other directions including one direction. Any one of the deflector punching plates 47) is installed on the side wall panel 11 of the work area 15 facing the maintenance area 19.

  In the unit type clean room facility method, the fan filter unit 27 (clean air supply means) is provided by installing the deflector plate 43 on the side wall panel 11 of the work area 15 (the air cleanliness requirement area 13) facing the maintenance area 19. By the deflector plate 43, the flow of the air supplied to one direction of the work area 15 is changed to the intersecting direction intersecting with the one direction, so that the dynamic pressure of the supply air does not concentrate on one place, and Since the dynamic pressure is dispersed and the dynamic pressure becomes low, it is possible to prevent the air that has passed through the work area 15 from bouncing back in the side wall panel 11 of the support area 16 (the low air cleanliness requirement area 14), which results in a low cleanliness. A unit type clean room 10E (ductless unit type clean room) capable of preventing backflow of air containing air to the work area 15 can be provided.

  The unit type clean room facility method installs the punching plate 44 on the side wall panel 11 of the work area 15 (the air cleanliness requirement area 13) facing the maintenance area 19 to install the fan filter unit 27 (clean air supply means). By the punching plate 44, the flow of air supplied in one direction of the work area 15 is dispersed in other directions including one direction, so that the dynamic pressure of the supply air is not concentrated in one place. Of the air that has passed through the work area 15 can be prevented from bouncing back in the side wall panel 11 of the support area 16 (low air cleanliness requirement area 14). It is possible to install a unit type clean room 10F (a ductless unit type clean room) capable of preventing the backflow of air containing air to the work area 15.

  In the unit type clean room facility method, the deflector punching plate 47 is installed on the side wall panel 11 of the work area 15 (the air cleanliness requirement area 13) facing the maintenance area 19 to provide the fan filter unit 27 (clean air supply means). ), The flow of air supplied to one direction of the work area 15 is changed by the deflector punching plate 47 to an intersecting direction intersecting with one direction and is dispersed to the other direction including one direction. The pressure is not concentrated in one place, the dynamic pressure of the supply air is dispersed and the dynamic pressure becomes low, and the side wall panel 11 of the support area 16 (the air cleanliness requirement area 14) for the air that has passed through the work area 15 It is possible to provide a unit type clean room 10E (ductless unit type clean room) capable of preventing rebound and preventing backflow of air containing low cleanliness air into the work area 15.

10A clean room (unit type clean room)
10B clean room (Unit type clean room)
10C clean room (unit type clean room)
10D clean room (unit type clean room)
10E clean room (unit type clean room)
10F clean room (Unit type clean room)
11 Side wall panel 12 Ceiling panel 13 High air cleanliness required area 14 Air cleanliness low required area 15 Work area 16 Support area 17 Supply area 18 Goowning area 19 Maintenance area 20 Biohazard safety cabinet (BSC)
21 Centrifuge 22 CO2 Incubator 23 Rocker 24 Explosion-proof Refrigerator 25 Deep Freezer 26 Doorway 27 Fan Filter Unit (Clean Air Supply Means)
28 doorway 29 fan filter unit (clean air supply means)
30 Doors
31 Fan filter unit (clean air supply means)
32 pass box 33 balance damper 33 (exhaust port)
34 Door 35 Door 36 Opening / closing curtain 37 Balance damper (outside air flow inlet)
38 Air Conditioner (Floor PAC)
39 Open / close door (door)
40 Balance damper (exhaust port)
41 Balance damper (exhaust port)
42 doorway 43 deflector plate (rectifying plate)
44 Support rod (support material)
45 Punching plate (rectifying plate)
46 through hole 47 deflector punching plate (rectifying plate)

Claims (22)

In a unit type clean room installed in a predetermined place inside the building,
The unit type clean room has an air cleanliness high demand area-air cleanliness low demand area partitioned by each side wall panel airtightly installed at a predetermined location inside the building, and the air cleanliness high The required area functions as a flow path through which the air composed of the external air of the unit type clean room and the internal air of the unit type clean room flows, and has a filter and a blowing mechanism to supply the air to the inside thereof. A clean air supply unit is provided, the air cleanliness low required area functions as a flow path for the air to flow, and a recirculation unit is provided to recirculate the air to the air cleanliness high required area.
In the unit type clean room, the cleanliness requirement of the air decreases in order from the high air cleanliness requirement area to the low air cleanliness requirement area, and the high cleanliness of air is obtained by using the clean air supply means. It is possible to flow air in order from the required area to the low air cleanliness required area, and it is possible to install a ductless clean room at a predetermined location inside the building. A unit type clean room.   In the unit type clean room, the clean air supply unit is used to continuously use the air stepwise from the high air cleanliness requirement area to the low air cleanliness requirement area to obtain a required cleanliness level and a required cleanliness level. The unit type clean room according to claim 1, wherein the air conditioned at various temperatures is allowed to flow in order from the high air cleanliness requirement area to the low air cleanness requirement area.   The unit type clean room according to claim 1 or 2, wherein the clean air supply unit is installed on a side wall panel that partitions the air cleanliness requirement area.   The recirculation means for the low air cleanliness requirement area has an air recirculation means, a filter and a ventilation mechanism for recirculating the air to the high air cleanliness requirement area by having a recirculation port, a predetermined filter and a ventilation mechanism. At least one of clean air recirculation means for recirculating the air to the high air cleanliness requirement area, and at least one of the recirculation port, the filter, the air recirculation means, and the clean air recirculation means. 4. The unit type clean room according to claim 1, wherein the unit type clean room is installed on a side wall panel that divides the low air cleanliness required area.   An exhaust port for exhausting the air to the outside is installed in a side wall panel that defines at least one of the high air cleanliness requirement area and the low air cleanliness requirement area. The unit type clean room according to any one of claims 1 to 4.   The area requiring high air cleanliness is at least one work area for performing main work in the unit type clean room, and the area requiring low air cleanliness is at least one for performing auxiliary work and second changing clothes for the main work. A support area and at least one supply area for performing sub-operations other than the main work, the areas being connected via an entrance / exit of a predetermined opening area, the air cleanliness requirement being the work area → the above-mentioned The unit type clean room according to any one of claims 1 to 5, wherein the support area is lowered in the order of the supply area.   The low air cleanliness required area is connected to at least one of the support area and the supply area through an opening / closing door or a doorway having a predetermined opening area to perform a first change, and the air cleanliness requirement is 7. The unitized clean room of claim 6 including at least one lowest goowning area.   The exhaust port is installed in a side wall panel that partitions at least one of the work area, the support area, the supply area, and the goowning area. Unit type clean room.   Maintenance in which the low air cleanliness required area is divided by the side wall panel to connect the work area and the supply area, the outside air of the unit type clean room flows in, and the internal air of the unit type clean room flows Including an area, the clean air supply means is installed on a side wall panel of the work area facing the maintenance area, and the return port, the filter, the air return means, and the clean air return means are included. 9. The unit type clean room according to claim 6, wherein at least one of them is installed on a side wall panel of the supply area facing the maintenance area.   The unit type clean room has an outside air inlet for introducing the outside air, a predetermined filter and an air blowing mechanism to supply the outside air to the outside air supply means, a filter and an air blowing mechanism to supply the outside air. 10. The unit type clean room according to claim 9, wherein at least one of the clean external air supply means to be concerned is installed on a side wall panel which defines the maintenance area.   The unit type clean room according to claim 9 or 10, wherein an air conditioner that air-conditions the air composed of the external air of the unit type clean room and the internal air of the unit type clean room is installed in the maintenance area.   The unit type clean room is installed on a side wall panel of the work area facing the maintenance area, and diffuses a flow of air supplied to the one direction of the air cleanliness high demand area by the clean air supply means. The unit type clean room according to claim 9, further comprising a current plate.   The straightening plate is provided with a deflector plate that changes the flow of air supplied to the work area in an intersecting direction that intersects with the one direction, and a plurality of through holes that allow the air to flow therethrough. A punching plate that disperses the flow of air to be blown in other directions including the one direction, and changes the flow of air to be supplied to the work area to a crossing direction that intersects the one direction, and at the same time passes the air. The deflector punching plate for forming a plurality of through-holes for allowing the air to be supplied to the work area to be dispersed in other directions including the one direction, according to claim 12. Unit type clean room. In the unit type clean room facility method of installing a ductless unit type clean room at a predetermined location inside a building,
The unit type clean room facility method uses a plurality of side wall panels to design a layout of an area requiring high air cleanliness to an area requiring low air cleanliness, which is installed at a predetermined location inside the building, according to design requirements. And a layout design step for performing the layout design step, and the side wall panels are airtightly installed at predetermined locations inside the building based on the layout designed by the layout design step, and the side wall panels partition the exterior of the unit type clean room. An area facility step for installing the air cleanliness high required area to the air cleanliness low required area having a function as a flow path through which air composed of air and internal air of the unit type clean room flows, and the air A clean air supply means for installing a clean air supply means having a filter and a blowing function for sequentially passing the air cleanliness high demand area to the air cleanness low demand area in the air cleanliness high demand area Installation step, a recirculation means for recirculating the air to the high air cleanliness requirement area, a recirculation means installation step for arranging the air in the low air cleanness requirement area, and an exhaust port for exhausting the air to the outside A unit-type clean room facility method comprising: an exhaust port installation step of installing in at least one of a high demand area and the low air cleanliness demand area.   The unit type clean room facility method, after installing the unit type clean room, changing the installation position of the side wall panel in at least one of the air cleanliness high required area and the air cleanliness low required area. Alternatively, a new side wall panel is installed in at least one of the area requiring high air cleanliness and the area requiring low air cleanliness, or the area requiring high air cleanliness and the low air cleanliness are provided. A layout modification for modifying the layout of at least one of the high air cleanliness high demand area and the air cleanliness low demand area by removing the existing side wall panel from at least one of the required areas The unit type clean room facility method according to claim 14, which includes a step.   In the unit type clean room facility method, after installing the unit type clean room, a new side wall panel is installed at a predetermined position inside the building, and the air cleanliness high demand area and the air cleanness low demand area are provided. Area number increasing step of increasing the number of at least one of the area, and after installing the unit type clean room, remove the existing side wall panel from a predetermined location inside the building, the air cleanliness The unit type clean room facility method according to claim 14 or 15, further comprising: an area number reducing step of reducing the number of at least one of the required area and the low air cleanliness required area.   The area requiring high air cleanliness is at least one work area for performing main work in the unit type clean room, and the area requiring low air cleanliness is at least one for performing auxiliary work and second changing clothes for the main work. A support area, at least one supply area for performing sub-operations other than the main work, and at least one goowning area for performing the first dressing, wherein the area facility process is a predetermined location inside the building. The unit type clean room facility method according to any one of claims 14 to 16, wherein the work area, the support area, the supply area, and the goowning area are installed in the work area.   The area facility process connects the work area and the supply area by being partitioned by the side wall panel, and has a maintenance area where the outside air of the unit type clean room flows in and the internal air of the unit type clean room flows. Then, the clean air supply means installation step installs the clean air supply means on a side wall panel of the work area facing the maintenance area, and the recirculation means installation step comprises a recirculation port, a predetermined filter, and a blower. Of the air recirculation means having a mechanism to recirculate the air to the high air cleanliness requirement area and the clean air recirculation means to have a filter and a blowing mechanism to recirculate the air to the air cleanliness requirement area. At least one of them is installed on a side wall panel of the supply area facing the maintenance area, and the exhaust port installation step includes the exhaust port of the work area, the support area, the supply area, and the goowning area. The unit type clean room facility method according to claim 17, wherein the unit type clean room facility is installed in at least one of the areas and a side wall panel that partitions the area.   The unit type clean room facility method has an external air inlet for allowing the external air of the unit type clean room to flow into the maintenance area, a predetermined filter, and a blower mechanism to supply the external air to the maintenance area. At least one of a clean external air supply means for supplying the external air to the maintenance area, which has an air means, a filter, and a blower mechanism, is installed in a side wall panel defining the maintenance area. The unit type clean room facility method according to claim 18, including a means installation step.   19. The unit type clean room facility method includes an air conditioner installation step of installing an air conditioner for air conditioning the air consisting of the external air of the unit type clean room and the internal air of the unit type clean room in the maintenance area. 19. The unit type clean room facility method according to item 19.   In the unit type clean room facility method, a straightening plate for diffusing a flow of air supplied in one direction of the work area by the clean air supply means is installed on a side wall panel of the work area facing the maintenance area. The unit type clean room facility method according to any one of claims 18 to 20, including a step of installing a current plate.   The current plate installed by the current plate installation step, the deflector plate for changing the flow of the air supplied to the work area to the intersecting direction intersecting the one direction, and a plurality of through holes for passing the air. A punching plate that is formed to disperse the flow of air supplied to the work area in other directions including the one direction, and a crossing direction that intersects the flow of air supplied to the work area with the one direction. And a deflector punching plate that forms a plurality of through holes that allow the air to flow therethrough and that distributes the flow of the air supplied to the work area in other directions including the one direction. 22. The unit type clean room facility method according to claim 21.

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