JP2020068334A - Electronic component, manufacturing method thereof, and mounting method of electronic component - Google Patents

Electronic component, manufacturing method thereof, and mounting method of electronic component Download PDF

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JP2020068334A
JP2020068334A JP2018201095A JP2018201095A JP2020068334A JP 2020068334 A JP2020068334 A JP 2020068334A JP 2018201095 A JP2018201095 A JP 2018201095A JP 2018201095 A JP2018201095 A JP 2018201095A JP 2020068334 A JP2020068334 A JP 2020068334A
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electronic component
protective film
opening
package
mounting
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JP7226680B2 (en
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緒方 敏洋
Toshihiro Ogata
敏洋 緒方
田中 健司
Kenji Tanaka
健司 田中
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New Japan Radio Co Ltd
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New Japan Radio Co Ltd
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Abstract

To provide an electronic component having an opening, in which a protective film can be easily attached so as to close the opening, and the protective film can be easily peeled off, a manufacturing method thereof, and a mounting method of the electronic component.SOLUTION: An electronic component 10 with a protective film 1 attached to the surface includes a chip component 5 mounted inside the electronic component, a package portion 2 having an opening 4 through which at least a part of the chip component is exposed or communicates with the outside, and the protective film 1 includes a sticking portion 1b that covers at least the opening of the package surface, and a gripping portion 1a that faces the package surface and that includes a portion that does not adhere to the package surface. The open end of the gripping portion extends outside the end of the electronic component.SELECTED DRAWING: Figure 1

Description

本発明は、電子部品およびその製造方法並びに電子部品の実装方法に関する。特に、例えばセンサ素子等のチップ部品がパッケージされた状態で外部に露出する開口部を有する電子部品において、開口部を塞ぐ保護フィルム付きの電子部品およびその製造方法並びに電子部品の実装方法に関するものである。   The present invention relates to an electronic component, a method of manufacturing the electronic component, and a method of mounting the electronic component. Particularly, in an electronic component having an opening exposed to the outside in a state where a chip component such as a sensor element is packaged, an electronic component with a protective film that closes the opening, a method for manufacturing the same, and a method for mounting the electronic component are disclosed. is there.

近年、各種センサは、スマートフォンまたはタブレット端末等の通信機器への搭載や、歩数計や活動量計等のヘルスケア機器への搭載や、車載用または産業機器用のセンサの増加等により需要がますます拡大し、種々のセンサが開発されている。例えば湿度センサでは、従来の抵抗式に加え、雰囲気温度範囲として広く使用できる容量式のセンサが開発されている。また圧力センサでは、ダイヤフラム表面に半導体歪ゲージを形成し、圧力によってダイヤフラムが変形することにより発生するピエゾ抵抗効果による電気抵抗の変化に依存する抵抗式や、固定電極と可動電極とを対向させて配置するコンデンサを形成し、圧力によって可動電極が変形することにより発生する静電容量の変化を測る容量式のセンサが開発されている。   In recent years, demand for various sensors has increased due to mounting in communication devices such as smartphones and tablet terminals, mounting in health care devices such as pedometers and activity monitors, and an increase in sensors for in-vehicle or industrial devices. It is expanding and various sensors are being developed. For example, as a humidity sensor, in addition to the conventional resistance type, a capacitance type sensor that can be widely used as an ambient temperature range has been developed. In the pressure sensor, a semiconductor strain gauge is formed on the surface of the diaphragm, and the resistance type is dependent on the change in electrical resistance due to the piezoresistive effect that occurs when the diaphragm is deformed by pressure. Capacitive sensors have been developed that form capacitors to be placed and measure changes in electrostatic capacitance caused by deformation of movable electrodes due to pressure.

このような湿度センサまたは圧力センサ等は、セラミックまたは樹脂等によって形成されるパッケージ内にセンサ素子を載置し、物理量を計測する検出部の少なくとも一部を外部に露出あるいは連通する開口部を有するパッケージ構造が採用される(例えば、特許文献1)。   Such a humidity sensor, a pressure sensor, or the like has a sensor element placed in a package formed of ceramic, resin, or the like, and has an opening for exposing or communicating at least a part of a detection unit for measuring a physical quantity to the outside. A package structure is adopted (for example, Patent Document 1).

このような開口部を有する電子部品を実装基板に実装する場合、様々な問題が発生する。例えば電子部品を実装基板に実装するとき、はんだを用いるのが一般的で、はんだを溶融させるための高温処理を行う必要がある。その際、はんだと共に使用されるフラックスから揮発成分がアウトガスとして放出され、電子部品全体がアウトガスに晒されてしまう。そしてこのアウトガスが電子部品の開口部内に露出するセンサ素子に付着することにより、センサの性能を低下させてしまうという問題があった。   When mounting an electronic component having such an opening on a mounting board, various problems occur. For example, when mounting an electronic component on a mounting board, solder is generally used, and it is necessary to perform high-temperature processing for melting the solder. At that time, volatile components are released as outgas from the flux used together with the solder, and the entire electronic component is exposed to the outgas. There is a problem that the performance of the sensor is deteriorated by the outgas adhering to the sensor element exposed in the opening of the electronic component.

そこで例えば、電子部品の開口部に保護フィルムを貼付することで、開口部を塞ぐ方法が採られている。例えば図7に示すように、電子部品20の開口部18をポリイミドフィルム等の耐熱性を有する保護フィルム19で塞ぐことにより、電子部品20内にアウトガスが入り込まない構造が採られている。   Therefore, for example, a method is adopted in which a protective film is attached to the opening of the electronic component to close the opening. For example, as shown in FIG. 7, by closing the opening 18 of the electronic component 20 with a heat-resistant protective film 19 such as a polyimide film, a structure is adopted in which outgas does not enter the electronic component 20.

特開2010−203857号公報JP, 2010-203857, A

図7に示すような従来提案されている保護フィルム付きの電子部品20では、実装基板に搭載した後、保護フィルム19を剥がす必要がある。その際、保護フィルム19を把持し易くするため、保護フィルムの一部を電子部品20より長尺としていた。しかし、このような構造の保護フィルム19は、個々の電子部品毎に貼付する必要があり、生産性を悪化させる原因となっていた。   In the conventionally proposed electronic component 20 with a protective film as shown in FIG. 7, it is necessary to peel off the protective film 19 after mounting on a mounting board. At that time, in order to make it easier to grip the protective film 19, a part of the protective film is longer than the electronic component 20. However, the protective film 19 having such a structure needs to be attached to each electronic component, which is a cause of deterioration of productivity.

そこで本発明は、開口部を有する電子部品において、開口部を塞ぐように、保護フィルムを簡便に貼付することができ、複数の電子部品へ効率よく保護フィルムを貼付することができる生産性に優れた電子部品およびその製造方法を提供することを目的とする。さらに、保護フィルムの貼付構造を改善し、従来と同等の把持性を維持することにより、簡便に保護フィルムを剥離することができる電子部品の実装方法を提供することを目的とする。   Therefore, the present invention can easily attach a protective film to an electronic component having an opening so as to close the opening, and can efficiently attach the protective film to a plurality of electronic components, which is excellent in productivity. It is an object of the present invention to provide an electronic component and a manufacturing method thereof. Furthermore, it is an object of the present invention to provide an electronic component mounting method capable of easily peeling off the protective film by improving the sticking structure of the protective film and maintaining the same gripping property as the conventional one.

上記目的を達成するため、本願請求項1に係る電子部品は、表面に保護フィルムを貼付した電子部品において、前記電子部品の内部に搭載したチップ部品と、前記チップ部品の少なくとも一部が外部に露出あるいは連通する開口部を備えたパッケージ部と、前記パッケージ部表面の少なくとも前記開口部を塞ぐ貼付部と、前記パッケージ部表面と対向し、前記パッケージ部表面と接着しない部分を含む把持部とからなる前記保護フィルムと、を備え、前記把持部の開放端部は、前記電子部品の端部よりも外側まで延出していることを特徴とする。   In order to achieve the above object, the electronic component according to claim 1 of the present application is an electronic component in which a protective film is attached to the surface, and a chip component mounted inside the electronic component and at least a part of the chip component are externally disposed. From a package portion having an opening that is exposed or in communication, a sticking portion that closes at least the opening portion of the package portion surface, and a grip portion that includes a portion that faces the package portion surface and that does not adhere to the package portion surface. The protective film is provided, and the open end portion of the grip portion extends outside the end portion of the electronic component.

本願請求項2に係る電子部品の製造方法は、内部に搭載されたチップ部品の少なくとも一部が外部に露出あるいは連通する開口部を備えたパッケージ部を備え、前記開口部を塞ぐように保護フィルムを前記パッケージ部表面に貼付した電子部品の製造方法であって、前記保護フィルムに前記開口部を塞ぐ貼付部と把持部とを形成する工程と、前記電子部品の複数の集合体を形成する工程と、前記保護フィルムを前記集合体のそれぞれの表面に前記貼付部が前記開口部を塞ぎ、前記把持部が前記パッケージ部表面から浮き上がるとともに、前記把持部の開放端部が前記電子部品の端部よりも外側まで延出するように貼付する工程と、前記保護フィルムを貼付した前記集合体の前記保護フィルムの一部と前記パッケージ部の一部とを切断することにより前記電子部品に個片化する工程とを含むことを特徴とする。   The method of manufacturing an electronic component according to claim 2 of the present application includes a package portion having an opening through which at least a part of the chip component mounted inside is exposed or communicated with the outside, and the protective film is provided so as to close the opening. Is a method of manufacturing an electronic component that is attached to the surface of the package portion, the step of forming an attaching portion that closes the opening and the grip portion in the protective film, and a step of forming a plurality of aggregates of the electronic component. With the protective film on each surface of the aggregate, the sticking portion closes the opening, the gripping portion floats from the surface of the package portion, and the open end of the gripping portion is an end of the electronic component. A step of sticking so as to extend to the outer side, and cutting a part of the protective film and a part of the package part of the aggregate to which the protective film is stuck Characterized in that it comprises a step of singulating more the electronic component.

本願請求項3に係る電子部品の製造方法は、前記電子部品の複数の集合体を形成する工程は、前記電子部品が列状に配置した集合体を複数列形成する工程であることを特徴とする。   The method of manufacturing an electronic component according to claim 3 of the present application is characterized in that the step of forming a plurality of aggregates of the electronic component is a step of forming a plurality of aggregates in which the electronic components are arranged in a row. To do.

本願請求項4に係る電子部品の実装方法は、チップ部品の少なくとも一部が外部に露出あるいは連通する開口部を備えたパッケージ部を備え、前記パッケージ部表面に前記開口部を塞ぐように保護フィルムを貼付した電子部品を実装基板に実装する実装方法であって、前記電子部品を実装基板に実装した後、前記保護フィルムを剥離する際、前記パッケージ部表面から浮き上がるとともに、開放端部が前記電子部品の端部よりも外側まで延出する把持部の前記保護フィルムを把持することにより、前記保護フィルムを剥離する工程を含むことを特徴とする。   According to a fourth aspect of the present invention, there is provided an electronic component mounting method, which includes a package part having an opening through which at least a part of a chip part is exposed or communicated with the outside, and a protective film is formed on the surface of the package part so as to cover the opening. Is a mounting method for mounting an electronic component affixed to a mounting substrate, after mounting the electronic component on the mounting substrate, when peeling off the protective film, while floating from the package surface, the open end is the electronic It is characterized by including a step of peeling the protective film by gripping the protective film of a gripping portion that extends to the outside of the end of the component.

本発明の電子部品は、電子部品の開口部を保護フィルムで塞いでいるため、実装基板に実装するとき高温処理によりフラックス等から放出されるアウトガスが発生してもセンサ素子等がアウトガスに晒されることがないため、チップ部品の性能の低下を招くことはない。   Since the electronic component of the present invention closes the opening of the electronic component with the protective film, the sensor element or the like is exposed to the outgas even when the outgas emitted from the flux or the like is generated by the high temperature treatment when mounted on the mounting substrate. As a result, the performance of the chip component will not be degraded.

また本発明の電子部品の製造方法によれば、複数の電子部品からなる電子部品集合体の表面に効率よく保護フィルムを貼付することができるので、生産性の高い製造方法を実現することが可能となる。   Further, according to the method of manufacturing an electronic component of the present invention, since the protective film can be efficiently attached to the surface of the electronic component assembly including a plurality of electronic components, a highly productive manufacturing method can be realized. Becomes

さらに電子部品集合体を個片化するとき、例えばダイシングソーを用いた個片化方法を採用しても、開口部は保護フィルムで塞がれているため、個片化時に発生する切削屑や水等が開口部から電子部品の内部に侵入することを防ぐことができ、電子部品の品質低下等のない製造方法を実現することが可能となる。   Further, when the electronic component assembly is singulated, even if a dicing method using a dicing saw is adopted, since the opening is blocked by the protective film, cutting scraps and the like generated during singulation It is possible to prevent water and the like from entering the inside of the electronic component through the opening, and it is possible to realize a manufacturing method that does not deteriorate the quality of the electronic component.

さらにまた本発明の電子部品の実装方法によれば、電子部品表面に貼付した保護フィルムの一部が電子部品の表面から浮き上がるように形成されているため、例えばピンセットの先端部で確実に保護フィルムを把持し、引き上げることにより容易に保護フィルムを電子部品から取り除くことができる。   Furthermore, according to the method for mounting an electronic component of the present invention, since a part of the protective film attached to the surface of the electronic component is formed so as to float above the surface of the electronic component, for example, the protective film is surely formed at the tip of the tweezers. The protective film can be easily removed from the electronic component by gripping and pulling up.

本発明の実施例の電子部品を説明する図である。It is a figure explaining the electronic component of the Example of this invention. 本発明の実施例の電子部品の製造方法を説明する図である。It is a figure explaining the manufacturing method of the electronic component of the Example of this invention. 本発明の実施例の電子部品の製造方法を説明する図である。It is a figure explaining the manufacturing method of the electronic component of the Example of this invention. 本発明の実施例の電子部品の製造方法を説明する図である。It is a figure explaining the manufacturing method of the electronic component of the Example of this invention. 本発明の実施例の電子部品の製造方法を説明する図である。It is a figure explaining the manufacturing method of the electronic component of the Example of this invention. 本発明の実施例の電子部品の実装方法を説明する図である。It is a figure explaining the mounting method of the electronic component of the Example of this invention. 従来の電子部品を説明する図である。It is a figure explaining the conventional electronic component.

本発明は、開口部を有する電子部品を実装基板に実装するとき、電子部品の開口部を保護フィルムで塞ぐことにより、フラックス等から放出されるアウトガスの影響を確実に防ぐことができる。さらに電子部品表面に貼付した保護フィルムの把持部は電子部品の表面から浮き上がるように形成されているため、電子部品を実装基板に実装した後、例えばピンセットの先端部で確実に把持部の一部を把持し、引き上げることにより容易に保護フィルムを電子部品から剥離することができる。以下、本発明の実施例について、湿度センサや圧力センサ等のセンサ素子を備えた電子部品を例にとり、その構造、製造方法並びに実装方法について詳細に説明する。   According to the present invention, when an electronic component having an opening is mounted on a mounting board, by blocking the opening of the electronic component with a protective film, the influence of outgas emitted from flux or the like can be reliably prevented. Furthermore, since the grip of the protective film attached to the surface of the electronic component is formed so as to rise from the surface of the electronic component, after mounting the electronic component on the mounting board, for example, the tip of the tweezers can be used to ensure that part of the grip is The protective film can be easily peeled from the electronic component by grasping and pulling up. An embodiment of the present invention will be described in detail with respect to its structure, manufacturing method, and mounting method, taking an electronic component including a sensor element such as a humidity sensor and a pressure sensor as an example.

本発明の実施例について説明する。
図1は、電子部品10の断面図を示す。電子部品10は、内部にセンサチップ5(チップ部品)を搭載している。このセンサチップ5の表面には電極パッドが形成されており、金属線6でリード3と接続されている。センサチップ5の図示しないセンサ部が封止樹脂2(パッケージ部)から露出するように開口部4が設けられている。さらに開口部4を設けた封止樹脂2の表面側は保護フィルム1が接着層8を介して貼付されている。本発明の保護フィルム1は、折り曲げ部7から折れ曲げており、この折り曲げ部7を挟んで接着層8のない把持部1aと接着層8が形成された貼付部1bとに分かれている。把持部1aは、折り曲げ部7から封止樹脂2の表面から浮き上がるように形成されており、電子部品10の表面に接着していない。一方、貼付部1bは封止樹脂2の表面に接着して開口部4を塞いでいる。また、把持部1aの端部は電子部品10の端部より外側に延出する長さとし、把持するのに十分な長さを有している。なお、封止樹脂2の表面から把持部1aが浮き上がったときに、常に電子部品10の端部から突出した位置にある必要はない。
Examples of the present invention will be described.
FIG. 1 shows a cross-sectional view of the electronic component 10. The electronic component 10 has the sensor chip 5 (chip component) mounted therein. Electrode pads are formed on the surface of the sensor chip 5 and are connected to the leads 3 by metal wires 6. The opening 4 is provided so that the sensor portion (not shown) of the sensor chip 5 is exposed from the sealing resin 2 (package portion). Further, on the front surface side of the sealing resin 2 provided with the openings 4, the protective film 1 is attached via the adhesive layer 8. The protective film 1 of the present invention is bent from the bent portion 7, and is divided into a gripping portion 1a without the adhesive layer 8 and a sticking portion 1b on which the adhesive layer 8 is formed, with the bent portion 7 sandwiched therebetween. The gripping portion 1 a is formed so as to float above the surface of the sealing resin 2 from the bent portion 7, and is not bonded to the surface of the electronic component 10. On the other hand, the sticking portion 1b is adhered to the surface of the sealing resin 2 to close the opening 4. Further, the end portion of the grip portion 1a has a length extending outward from the end portion of the electronic component 10, and has a length sufficient for gripping. In addition, when the gripping portion 1 a is lifted from the surface of the sealing resin 2, the gripping portion 1 a does not always have to be in a position protruding from the end of the electronic component 10.

このような構造の電子部品を製造する場合、まず図2に示すように、電子部品集合体11を形成する。図2(a)は電子部品集合体11の上面図、図2(b)は電子部品集合体11の裏面側を表面にして保護テープ13に貼り付けた状態で電子部品集合体11を分割して複数の電子部品集合体11(a)、11(b)を形成した状態の上面図であり、図2(c)は、図2(b)のA−A面における電子部品集合体11(a)、11(b)の断面図である。図2(b)(c)に示すように封止樹脂2とリード3の一部を切削除去した切断溝12により分けられた2個の電子部品が列状に配置した複数の電子部品集合体11(a)、11(b)が形成される。図2(c)に示すようにセンサチップ5の表面が、開口部4から封止樹脂2の外部に露出する構造となっているが、切断溝12を形成する工程のためダイシングテープ等の保護テープ13により開口部4が覆われた状態で複数の電子部品集合体11(a)、11(b)が形成できる。なお図2(b)では、封止樹脂2から露出するリードフレームの連結バー等一部を省略している。   When manufacturing an electronic component having such a structure, first, as shown in FIG. 2, an electronic component assembly 11 is formed. 2 (a) is a top view of the electronic component assembly 11, and FIG. 2 (b) is the electronic component assembly 11 divided with the back side of the electronic component assembly 11 as the front surface and attached to the protective tape 13. 2C is a top view of a state in which a plurality of electronic component assemblies 11 (a) and 11 (b) are formed, and FIG. 2 (c) is an electronic component assembly 11 ( It is sectional drawing of a) and 11 (b). As shown in FIGS. 2B and 2C, a plurality of electronic component assemblies in which two electronic components separated by a cutting groove 12 obtained by cutting and removing a part of the sealing resin 2 and the lead 3 are arranged in a row. 11 (a) and 11 (b) are formed. As shown in FIG. 2C, the surface of the sensor chip 5 is exposed to the outside of the sealing resin 2 through the opening 4. However, since the process of forming the cutting groove 12 protects the dicing tape or the like. A plurality of electronic component aggregates 11 (a) and 11 (b) can be formed with the tape 13 covering the opening 4. Note that, in FIG. 2B, a connecting bar and the like of the lead frame exposed from the sealing resin 2 are omitted.

続いて電子部品集合体11(a)、11(b)の裏面側に別の保護テープ14を貼付したのち、電子部品集合体11(a)、11(b)の表面側に貼付した保護テープ13を剥離する。その結果、図3に示すように位置ずれなく開口部4が露出した状態となる。   Subsequently, another protective tape 14 is attached to the back side of the electronic component assemblies 11 (a) and 11 (b), and then the protective tape attached to the front side of the electronic component assemblies 11 (a) and 11 (b). 13 is peeled off. As a result, as shown in FIG. 3, the opening 4 is exposed without displacement.

続いて電子部品集合体11(a)、11(b)それぞれの表面に保護フィルム1を貼付する。図4(a)に示すように保護フィルム1は、各電子部品集合体11(a)、11(b)に形成されている2個の電子部品の開口部4を塞ぐことができる長さに形成され、接着層8が形成されている。保護フィルム1は、次のように形成することができる。まずポリイミド樹脂等からなる耐熱性フィルムを用意し、金型を用いて所定の大きさに切り抜くとともに長手方向に延出する折り曲げ部7を形成し、この折り曲げ部7を境界として把持部1aと貼付部1bとを形成する。次に貼付部1bの接着面(電子部品集合体11(a)、11(b)と接着する面)に選択的に接着層8を形成する。このとき把持部1aの表面には接着層8を形成しない。接着層8はシリコーン樹脂系やアクリル樹脂系などの感圧性接着材により形成される。ここで接着層8としては後述する個片化工程の際、保護フィルム1が剥離しない耐水性を有し、さらに実装工程の際、アウトガスが発生しないものが好ましい。   Subsequently, the protective film 1 is attached to the surface of each of the electronic component assemblies 11 (a) and 11 (b). As shown in FIG. 4A, the protective film 1 has a length that can close the openings 4 of the two electronic components formed in each of the electronic component assemblies 11 (a) and 11 (b). The adhesive layer 8 is formed. The protective film 1 can be formed as follows. First, a heat-resistant film made of polyimide resin or the like is prepared, cut into a predetermined size using a mold, and a bent portion 7 extending in the longitudinal direction is formed, and the bent portion 7 is used as a boundary to attach the grip portion 1a. The part 1b is formed. Next, the adhesive layer 8 is selectively formed on the adhesive surface of the sticking portion 1b (the surface that adheres to the electronic component assemblies 11 (a) and 11 (b)). At this time, the adhesive layer 8 is not formed on the surface of the grip portion 1a. The adhesive layer 8 is formed of a pressure sensitive adhesive such as a silicone resin type or an acrylic resin type. Here, the adhesive layer 8 preferably has water resistance so that the protective film 1 does not peel off in the individualizing step described later, and further, outgas is not generated in the mounting step.

次に貼付部1bに形成した接着層8を開口部4が形成された電子部品集合体11(a)、11(b)の表面側に圧着することで、保護フィルム1を貼付する。保護フィルム1を貼付する際には、図4(b)に示すように電子部品集合体11(b)上に貼付した保護フィルム1の貼付部1bの上方に電子部品集合体11(a)に貼付する別の保護フィルム1の把持部1aが重なるように順番に貼付すればよい。この貼付方法によれば、電子部品集合体11(a)、11(b)それぞれの短手方向の長さよりも長い保護フィルム1を重ねて貼付しても、電子部品集合体11(a)に貼付された保護フィルム1の把持部は、電子部品集合体11(b)に貼付された保護フィルム1上に接着することなく、開口部4は保護フィルム1によって塞がれることになる。   Next, the protective film 1 is attached by pressure-bonding the adhesive layer 8 formed on the attaching portion 1b to the surface side of the electronic component assembly 11 (a), 11 (b) in which the opening 4 is formed. When the protective film 1 is attached, as shown in FIG. 4 (b), the electronic component assembly 11 (a) is attached above the attaching portion 1b of the protective film 1 attached on the electronic component assembly 11 (b). It suffices to attach the protective films 1 in order so that the grip portions 1a of the different protective films 1 to be attached overlap. According to this sticking method, even if the protective films 1 longer than the respective lengths in the lateral direction of the electronic component assemblies 11 (a) and 11 (b) are stacked and stuck, the electronic component assembly 11 (a) is stuck. The gripping portion of the attached protective film 1 is not adhered to the protective film 1 attached to the electronic component assembly 11 (b), and the opening 4 is closed by the protective film 1.

続いて、電子部品集合体11を個片化する。既に電子部品集合体11の開口部4を有する面と反対側の封止樹脂2とリード3とが露出する面をダイシングテープ等の保護テープ14に貼付してある。
ダイシングソー15は、図5に示すように先に形成した切断溝12と直交する方向であり、かつ図中矢印で示すように保護フィルム1の貼付部1b側から把持部1a側へ走行させ、保護フィルム1、封止樹脂2、保護テープ14および図示しないリードフレームの一部を切削除去することにより個片化を行う。把持部1aが電子部品集合体11(a)、11(b)の表面から浮き上がるように形成されているが、切断時に使用する切削水の水圧により、把持部1aを隣接する貼付部1b表面に押し付けて一時的に固定化し、確実に把持部1aを切断することができる。さらにダイシングソー15の回転方向をダイシングソー15の進行方向に対し上から下に向かうダウンカットとすることで、把持部1aを電子部品集合体11(a)、11(b)に押し付けながら、確実に切断することができる。なお、図5中の点線は、電子部品集合体11(b)に貼付した保護フィルム1の貼付部1bの左端16を示し、二点鎖線はダイシングソー15による切断予定領域を示す。
Then, the electronic component assembly 11 is divided into individual pieces. The surface of the electronic component assembly 11 opposite to the surface having the opening 4 and exposing the sealing resin 2 and the leads 3 is already attached to a protective tape 14 such as a dicing tape.
The dicing saw 15 is in a direction orthogonal to the cutting groove 12 formed previously as shown in FIG. 5, and is made to travel from the sticking portion 1b side of the protective film 1 to the gripping portion 1a side as shown by an arrow in the figure, The protective film 1, the sealing resin 2, the protective tape 14, and a part of the lead frame (not shown) are cut and removed to separate them. The gripping portion 1a is formed so as to float above the surface of the electronic component assembly 11 (a), 11 (b). The grip portion 1a can be reliably cut by pressing and temporarily fixing. Further, by making the rotating direction of the dicing saw 15 down-cut from the top to the bottom with respect to the traveling direction of the dicing saw 15, the gripping portion 1a is securely pressed against the electronic component assemblies 11 (a) and 11 (b). Can be cut into The dotted line in FIG. 5 indicates the left end 16 of the sticking portion 1b of the protective film 1 stuck on the electronic component assembly 11 (b), and the chain double-dashed line indicates the area to be cut by the dicing saw 15.

この個片化工程により、個々の電子部品に個片化される。なお、この個片化工程において、開口部4は貼付部1bで塞がれているため、切削水や封止樹脂やリード等から発生する切削屑が、開口部4内に侵入することを防ぐことができる。   By this individualizing step, individual electronic components are individualized. In the individualizing step, since the opening 4 is closed by the sticking portion 1b, it is possible to prevent cutting chips generated from cutting water, sealing resin, leads, or the like from entering the opening 4. be able to.

続いて、開口部4を保護フィルム1で塞いだ電子部品10をはんだペースト等を用いて実装基板に実装する実装方法について説明する。通常の電子部品の製造方法に従い、リード3と実装基板とに形成した接続電極部にはんだペーストを形成した後、リフロー装置を用いてはんだを溶融させることではんだ接続を形成する。この高温の加熱処理のときはんだペーストに含まれるフラックスから揮発成分がアウトガスとして放出するが、電子部品10は開口部4を保護フィルム1で塞いでいるので、開口部4内に揮発成分が入り込むことはなく、チップ部品の性能の低下を防ぐことが可能となる。   Next, a mounting method for mounting the electronic component 10 in which the opening 4 is covered with the protective film 1 on the mounting board using solder paste or the like will be described. According to a general method for manufacturing an electronic component, after a solder paste is formed on the connection electrode portions formed on the leads 3 and the mounting substrate, the solder is melted by using a reflow device to form a solder connection. During this high-temperature heat treatment, volatile components are emitted as outgas from the flux contained in the solder paste, but since the electronic component 10 closes the opening 4 with the protective film 1, the volatile component may enter the opening 4. It is possible to prevent the deterioration of the performance of the chip component.

続いて、実装基板に実装した電子部品10から保護フィルム1を剥離する。図6に示すように把持部1aを例えばピンセット17等の先端部で把持してから引き上げることにより、電子部品10から保護フィルム1を容易に剥離することができる。本実施例では、把持部1aが電子部品10表面まで続く構造となっているため、十分に把持部1aの寸法を確保しながら、電子部品表面から延出する寸法を短くすることができる。   Then, the protective film 1 is peeled off from the electronic component 10 mounted on the mounting board. As shown in FIG. 6, the protective film 1 can be easily peeled from the electronic component 10 by grasping the grasping portion 1a with the tip portion of the tweezers 17 or the like and then pulling it up. In this embodiment, since the grip portion 1a has a structure that continues to the surface of the electronic component 10, it is possible to shorten the dimension extending from the surface of the electronic component while sufficiently securing the dimension of the grip portion 1a.

以上本発明の実施例について説明したが、本発明は上記実施例に限定されるものではないことは言うまでもない。例えば保護フィルム1上に折り曲げ部7を一箇所のみに形成したが、開口部4を塞いでいれば、複数形成してもよい。あるいは折り曲げ部7を形成しなくてもよい。   Although the embodiments of the present invention have been described above, it goes without saying that the present invention is not limited to the above embodiments. For example, although the bent portion 7 is formed on the protective film 1 only at one place, a plurality of bent portions may be formed as long as the opening 4 is closed. Alternatively, the bent portion 7 may not be formed.

また、接着層8は保護フィルム1により開口部4を塞いでいればよくその形成方法は限定されない。本実施例では、貼付部1b全面に接着層8を形成したが、開口部4に相当する領域には接着層8を形成しないことも可能である。   The adhesive layer 8 may be formed by any method as long as it covers the opening 4 with the protective film 1. In this embodiment, the adhesive layer 8 is formed on the entire surface of the attaching portion 1b, but the adhesive layer 8 may not be formed in the region corresponding to the opening 4.

また電子部品の内部にセンサチップを搭載した場合について説明したが、本発明はこれに限定されるものではなく、内部に搭載されたセンサチップが露出あるいは連通するように開口部が形成された電子部品に適用することが可能である。   Further, the case where the sensor chip is mounted inside the electronic component has been described, but the present invention is not limited to this, and an electronic device in which an opening is formed so that the sensor chip mounted inside is exposed or communicates It can be applied to parts.

1:保護フィルム、1a:把持部、1b:貼付部、2:封止樹脂、3:リード、4:開口部、5:センサチップ、6:金属線、7:折り曲げ部、8:接着層、10:電子部品、11:電子部品集合体、12:切断溝、13,14:保護テープ 1: protective film, 1a: gripping portion, 1b: pasting portion, 2: sealing resin, 3: lead, 4: opening portion, 5: sensor chip, 6: metal wire, 7: bent portion, 8: adhesive layer, 10: Electronic component, 11: Electronic component assembly, 12: Cutting groove, 13, 14: Protective tape

Claims (4)

表面に保護フィルムを貼付した電子部品において、
前記電子部品の内部に搭載したチップ部品と、
前記チップ部品の少なくとも一部が外部に露出あるいは連通する開口部を備えたパッケージ部と、
前記パッケージ部表面の少なくとも前記開口部を塞ぐ貼付部と、前記パッケージ部表面と対向し、前記パッケージ部表面と接着しない部分を含む把持部とからなる前記保護フィルムと、を備え、
前記把持部の開放端部は、前記電子部品の端部よりも外側まで延出していることを特徴とする電子部品。
For electronic parts with a protective film attached to the surface,
A chip component mounted inside the electronic component,
At least a portion of the chip component is a package portion having an opening exposed or communicating with the outside,
A sticking part that closes at least the opening of the package part surface, and the protective film comprising a gripping part that faces the package part surface and that does not adhere to the package part surface,
The electronic component, wherein the open end of the grip portion extends to the outside of the end of the electronic component.
内部に搭載されたチップ部品の少なくとも一部が外部に露出あるいは連通する開口部を備えたパッケージ部を備え、
前記開口部を塞ぐように保護フィルムを前記パッケージ部表面に貼付した電子部品の製造方法であって、
前記保護フィルムに前記開口部を塞ぐ貼付部と把持部とを形成する工程と、
前記電子部品の複数の集合体を形成する工程と、
前記保護フィルムを前記集合体のそれぞれの表面に前記貼付部が前記開口部を塞ぎ、前記把持部が前記パッケージ部表面から浮き上がるとともに、前記把持部の開放端部が前記電子部品の端部よりも外側まで延出するように貼付する工程と、
前記保護フィルムを貼付した前記集合体の前記保護フィルムの一部と前記パッケージ部の一部とを切断することにより前記電子部品に個片化する工程とを含むことを特徴とする電子部品の製造方法。
At least a part of the chip component mounted inside is provided with a package portion having an opening exposed or communicating with the outside,
A method of manufacturing an electronic component, wherein a protective film is attached to the surface of the package portion so as to close the opening,
A step of forming a sticking portion and a holding portion that close the opening in the protective film;
Forming a plurality of assemblies of the electronic components,
The sticking portion closes the opening on each surface of the aggregate of the protective film, the gripping portion floats from the surface of the package portion, and the open end of the gripping portion is more than the end of the electronic component. A step of sticking so as to extend to the outside,
Manufacture of an electronic component, characterized by including a step of cutting a part of the protective film and a part of the package portion of the assembly to which the protective film is attached to separate the electronic component into the electronic components. Method.
前記電子部品の複数の集合体を形成する工程は、前記電子部品が列状に配置した集合体を複数列形成する工程であることを特徴とする電子部品の製造方法。   The method of manufacturing an electronic component, wherein the step of forming the plurality of aggregates of the electronic component is a step of forming a plurality of columns of the electronic component arranged in a row. チップ部品の少なくとも一部が外部に露出あるいは連通する開口部を備えたパッケージ部を備え、
前記パッケージ部表面に前記開口部を塞ぐように保護フィルムを貼付した電子部品を実装基板に実装する実装方法であって、
前記電子部品を実装基板に実装した後、前記保護フィルムを剥離する際、前記パッケージ部表面から浮き上がるとともに、開放端部が前記電子部品の端部よりも外側まで延出する把持部の前記保護フィルムを把持することにより、前記保護フィルムを剥離する工程を含むことを特徴とする電子部品の実装方法。
At least a part of the chip component is provided with a package portion having an opening exposed or communicating with the outside,
A mounting method for mounting an electronic component having a protective film attached on the surface of the package to cover the opening on a mounting board,
After peeling the protective film after mounting the electronic component on a mounting board, the protective film of the gripping portion that floats from the surface of the package portion and has an open end extending to the outside of the end of the electronic component. A method for mounting an electronic component, comprising the step of peeling the protective film by gripping.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006332419A (en) * 2005-05-27 2006-12-07 Nitto Denko Corp Adhesive tape for protecting solid-state imaging device and image sensor mounting method using the same
JP2007095778A (en) * 2005-09-27 2007-04-12 Sony Chemical & Information Device Corp Function element package and method of manufacturing same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006332419A (en) * 2005-05-27 2006-12-07 Nitto Denko Corp Adhesive tape for protecting solid-state imaging device and image sensor mounting method using the same
JP2007095778A (en) * 2005-09-27 2007-04-12 Sony Chemical & Information Device Corp Function element package and method of manufacturing same

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