JP2020064122A

JP2020064122A - Sample holder, and analyzer comprising the same

Info

Publication number: JP2020064122A
Application number: JP2018194670A
Authority: JP
Inventors: 克浩西原; Katsuhiro Nishihara; 大介桑野; Daisuke Kuwano; 翔輝畑中; Shoki Hatanaka; 忠男石井; Tadao Ishii
Original assignee: Nippon Steel Corp
Current assignee: Nippon Steel Corp
Priority date: 2018-10-15
Filing date: 2018-10-15
Publication date: 2020-04-23
Anticipated expiration: 2038-10-15
Also published as: JP7095547B2

Abstract

To provide a sample holder capable of adjusting inclination angles of placement parts, while restricting rotation of the placement parts where a sample is placed, and to provide an analyzer comprising the sample holder.SOLUTION: A sample holder 12 includes: a main body 30; a first placement part 32; a second placement part 34; a state switching part 38; and an angle adjusting part 40. The main body 30 is mounted to a stage 14 of a microscope 10. A measurement sample 1 is placed on the first placement part 32. The second placement part 34 supports the first placement part 32, and is supported by the main body 30 in a state that rotation about an axis center A extending in a vertical direction is restricted. The state switching part 38 switches to one state out of: a first state allowing the first placement part 32 to rotate about the axis center A relative to the second placement part 34; and a second state of fixing the first placement part to the second placement part 34. The angle adjusting part 40 is supported on the main body 30, regulates movement of the second placement part 34 in a horizontal direction, and adjusts an inclination angle of the second placement part 34 relative to the main body 30.SELECTED DRAWING: Figure 3

Description

本発明は、試料保持具およびそれを備える分析装置に関する。 The present invention relates to a sample holder and an analyzer including the sample holder.

鋼材が腐食環境下に曝されると、鋼材上において、その環境に応じた種々の腐食反応が生じ、その結果、鋼材表面に腐食生成物が形成される。そして、上記の腐食環境が、腐食生成物の構造および組成（元素、官能基、分子構造、結晶成分、非晶質成分等）に影響を及ぼし、さらに上記の腐食生成物形成後の腐食反応の進行は、腐食生成物の構造および組成に影響を受けることとなる。 When a steel material is exposed to a corrosive environment, various corrosion reactions depending on the environment occur on the steel material, and as a result, corrosion products are formed on the surface of the steel material. The above-mentioned corrosion environment affects the structure and composition (element, functional group, molecular structure, crystalline component, amorphous component, etc.) of the corrosion product, and further the corrosion reaction after the formation of the corrosion product. Progress will be affected by the structure and composition of the corrosion products.

そのため、腐食反応後の鋼材表面に形成された腐食生成物について、構造および組成の解析を行うことによって、腐食環境が腐食生成物の構造および組成に及ぼす影響、ならびに上記の腐食生成物の構造および組成が、その後の腐食反応の進行に及ぼす影響を明確化または推定することができるようになる。 Therefore, by analyzing the structure and composition of the corrosion product formed on the steel surface after the corrosion reaction, the effect of the corrosion environment on the structure and composition of the corrosion product, and the structure and composition of the above corrosion product It becomes possible to clarify or estimate the influence of the composition on the progress of the subsequent corrosion reaction.

腐食生成物の構造および組成を分析する方法として、例えば、フーリエ変換赤外分光法（ＦＴ−ＩＲ）が挙げられる。特に、数ｍｍから数ｃｍオーダーの広範囲にわたる領域の分析には、顕微ＦＴ−ＩＲによるマッピング分析が用いられる。 Examples of methods for analyzing the structure and composition of corrosion products include Fourier transform infrared spectroscopy (FT-IR). In particular, the mapping analysis by microscopic FT-IR is used for the analysis of a wide range of several mm to several cm.

顕微ＦＴ−ＩＲでは、測定試料の表面に顕微鏡の焦点位置を合わせなければ、ＩＲスペクトルを精度良く測定することができない。そのため、数ｍｍから数ｃｍオーダーの全領域にわたって顕微鏡の焦点が大きくずれないよう、顕微鏡ステージに対する測定試料の角度を調整しなければならない。顕微ＦＴ−ＩＲは、焦点深度（焦点を合わせることができる距離の範囲）が小さいため、厳密な角度調整が要求される。また、例えば、試料断面において、試料とその表面に形成された腐食生成物との界面に沿って、より広範囲のマッピング分析を行いたい場合がある。この場合には、試料断面において上記界面が延びる方向と、マッピング分析の走査方向とを一致させる必要が生じる。このため、測定試料を顕微鏡視野において、観察軸（後述の図１において二点鎖線で示す入射光軸１１に相当。）回りに回転させる機構が必要となる。 In the microscopic FT-IR, the IR spectrum cannot be accurately measured unless the focus position of the microscope is aligned with the surface of the measurement sample. Therefore, it is necessary to adjust the angle of the measurement sample with respect to the microscope stage so that the focus of the microscope is not largely shifted over the entire region of the order of several mm to several cm. Since the microscopic FT-IR has a small depth of focus (a range of distance at which it can be focused), strict angle adjustment is required. In addition, for example, in a sample cross section, it may be desired to perform a wider range of mapping analysis along the interface between the sample and the corrosion product formed on the surface thereof. In this case, it becomes necessary to match the direction in which the interface extends in the sample cross section with the scanning direction of the mapping analysis. Therefore, a mechanism for rotating the measurement sample around the observation axis (corresponding to the incident optical axis 11 shown by the chain double-dashed line in FIG. 1 described later) in the microscope field is required.

そこで、本発明者らは、顕微ＦＴ−ＩＲにおける上記のような課題を考慮して、特許文献１に開示されている試料保持具および分析装置を提案した。特許文献１に開示された試料保持具は、顕微鏡ステージに着脱可能に装着される本体部と、測定試料を載せる載置部と、本体部に対する載置部の傾斜角度を調整する角度調整部と、角度調整部を上下方向に案内するガイド部とを備えている。ガイド部は、該載置部の周方向の回転が可能な状態で、径方向の移動を規制している。このような構成により、測定試料の傾斜角度の調整および観察軸回りの回転を行うことができる。 Therefore, the present inventors have proposed the sample holder and the analyzer disclosed in Patent Document 1 in consideration of the above problems in the microscopic FT-IR. The sample holder disclosed in Patent Document 1 includes a main body unit that is detachably mounted on a microscope stage, a mounting unit that mounts a measurement sample, and an angle adjusting unit that adjusts an inclination angle of the mounting unit with respect to the main body unit. , And a guide portion for guiding the angle adjusting portion in the vertical direction. The guide portion restricts radial movement of the mounting portion in a state in which the mounting portion can rotate in the circumferential direction. With such a configuration, it is possible to adjust the tilt angle of the measurement sample and rotate it around the observation axis.

特開２０１６−５７２２２号公報JP, 2016-57222, A

しかしながら、試料保持具について本発明者らがさらに研究を進めたところ、特許文献１に開示された試料保持具では、載置部の傾斜角度を調整する際に、僅かではあるが、載置部が周方向に回転する場合があることが分かった。具体的には、特許文献１に開示された試料保持具では、載置部を周方向に回転可能に保持するために、載置部とガイド部との間にある程度の遊び（隙間）を持たせておく必要がある。このため、角度調整部を上下方向に移動させて載置部の傾斜角度を調整する際に、載置部の周方向への回転を規制することができず、載置部が周方向に僅かに回転する場合がある。この場合には、載置部の回転位置の調整と傾斜角度の調整とを再度行う必要が生じる。 However, when the inventors further researched the sample holder, in the sample holder disclosed in Patent Document 1, when adjusting the tilt angle of the mounting portion, the mounting portion is slightly different. Was found to rotate in the circumferential direction. Specifically, the sample holder disclosed in Patent Document 1 has a certain amount of play (gap) between the mounting portion and the guide portion in order to hold the mounting portion rotatably in the circumferential direction. It is necessary to leave it. For this reason, when the angle adjusting unit is moved in the vertical direction to adjust the inclination angle of the mounting unit, it is not possible to restrict the rotation of the mounting unit in the circumferential direction, and the mounting unit moves slightly in the circumferential direction. May rotate to. In this case, it is necessary to adjust the rotational position of the mounting portion and the tilt angle again.

そこで、本発明は、試料を載せる載置部の回転を規制しつつ、該載置部の傾斜角度の調整を行うことが可能な試料保持具およびそれを備える分析装置を提供することを目的とする。 Therefore, an object of the present invention is to provide a sample holder capable of adjusting the tilt angle of the mounting portion while restricting the rotation of the mounting portion on which the sample is mounted, and an analyzer including the same. To do.

本発明は、下記の試料保持具およびそれを備える分析装置を要旨とする。 The gist of the present invention is the following sample holder and an analyzer including the same.

（１）測定試料を保持しかつ顕微鏡のステージに装着される試料保持具であって、
前記ステージに着脱可能に装着される本体部と、
測定試料を載せる第１載置部と、
前記第１載置部を支持し、かつ上下方向に延びる軸心回りへの回転が規制された状態で前記本体部に支持された第２載置部と、
前記第１載置部を、前記第２載置部に対して前記軸心回りに回転可能な第１状態と、前記第２載置部に固定された第２状態とのうちのいずれかの状態にする状態切替部と、
前記本体部に支持され、前記第２載置部の水平方向への移動を規制し、かつ前記本体部に対する前記第２載置部の傾斜角度を調整する角度調整部と、
を備える、試料保持具。 (1) A sample holder that holds a measurement sample and is mounted on a stage of a microscope,
A main body detachably attached to the stage,
A first mounting portion for mounting a measurement sample,
A second mounting portion that supports the first mounting portion and that is supported by the main body portion in a state in which rotation about an axis extending in the vertical direction is restricted;
Any one of a first state in which the first placing portion can be rotated around the axis with respect to the second placing portion, and a second state in which the first placing portion is fixed to the second placing portion. A state switching unit for setting the state,
An angle adjustment unit supported by the main body, restricting the horizontal movement of the second placement unit, and adjusting an inclination angle of the second placement unit with respect to the main body;
And a sample holder.

（２）前記状態切替部は、前記第１載置部および前記第２載置部を締め付けることによって、前記第１載置部を前記第２状態にする、上記（１）に記載の試料保持具。 (2) The sample holding according to (1), wherein the state switching unit puts the first placing unit and the second placing unit into the second state by tightening the first placing unit and the second placing unit. Ingredient

（３）前記第２載置部は、前記角度調整部を介して前記本体部に支持されており、
前記角度調整部は、前記本体部に固定された３つ以上の棒ネジと、前記３つ以上の棒ネジそれぞれに螺合された３つ以上の調整子とを有し、
前記調整子は、回転させることによって前記棒ネジの軸方向に移動し、
前記第２載置部は、前記３つ以上の調整子に支持されている、上記（１）または（２）に記載の試料保持具。 (3) The second mounting portion is supported by the main body portion via the angle adjusting portion,
The angle adjusting unit has three or more bar screws fixed to the main body, and three or more adjusters screwed to the three or more bar screws, respectively.
The adjuster moves in the axial direction of the bar screw by rotating,
The said 2nd mounting part is a sample holder as described in said (1) or (2) supported by said three or more adjusters.

（４）前記角度調整部は、少なくとも一つの前記棒ネジに螺合された固定子をさらに有し、
前記固定子は、回転させることによって前記棒ネジの軸方向に移動し、かつ前記調整子と共に前記第２載置部を挟持することで、前記第２載置部の上下方向の移動を規制し、
前記調整子および前記固定子はそれぞれ、平面視において中空円板形状を有し、前記調整子の直径は前記固定子の直径よりも大きい、上記（３）に記載の試料保持具。 (4) The angle adjusting unit further includes a stator screwed to at least one of the bar screws,
The stator moves in the axial direction of the rod screw by rotating, and clamps the second mounting portion together with the adjuster, thereby restricting the vertical movement of the second mounting portion. ,
The sample holder according to (3) above, wherein each of the adjuster and the stator has a hollow disc shape in a plan view, and the diameter of the adjuster is larger than the diameter of the stator.

（５）平面視において、前記調整子の外縁は前記第２載置部の外縁から外側に突出し、前記固定子の外縁は前記第２載置部の外縁よりも内側に位置する、上記（４）に記載の試料保持具。 (5) In plan view, the outer edge of the adjuster projects outward from the outer edge of the second mounting portion, and the outer edge of the stator is located inside the outer edge of the second mounting portion. ) The sample holder according to [4].

（６）参照試料を載せる第３載置部と、
前記本体部に支持され、前記本体部に対する前記第３載置部の高さを調整する高さ調整部と、
をさらに備える、上記（１）から（５）のいずれかに記載の試料保持具。 (6) A third mounting part on which a reference sample is mounted,
A height adjustment part that is supported by the main body part and that adjusts the height of the third mounting part with respect to the main body part;
The sample holder according to any one of (1) to (5) above, further comprising:

（７）試料表面の顕微分析を行う分析装置であって、上記（１）から（６）までのいずれかに記載の試料保持具を備える、分析装置。 (7) An analyzer for performing microscopic analysis of a sample surface, comprising the sample holder according to any one of (1) to (6) above.

本発明によれば、試料を載せる載置部（第１載置部）の回転を規制しつつ、該載置部の傾斜角度の調整を行うことが可能になる。 According to the present invention, it is possible to adjust the inclination angle of the mounting part while restricting the rotation of the mounting part (first mounting part) on which the sample is mounted.

図１は、本発明の一実施形態に係る試料保持具を備えた分析装置の構成を示す概略図である。FIG. 1 is a schematic diagram showing the configuration of an analyzer equipped with a sample holder according to an embodiment of the present invention. 図２は、試料保持具の平面図である。FIG. 2 is a plan view of the sample holder. 図３（ａ）は、図２のＡ１−Ａ２部分を示す端面図であり、図３（ｂ）は、図２のＡ１−Ａ３部分を示す端面図である。3A is an end view showing the A1-A2 portion of FIG. 2, and FIG. 3B is an end view showing the A1-A3 portion of FIG. 図４は、第１載置部の平面図である。FIG. 4 is a plan view of the first mounting portion. 図５は、第２載置部の平面図である。FIG. 5 is a plan view of the second mounting portion. 図６は、試料保持具の他の実施形態を模式的に示した図である。FIG. 6 is a diagram schematically showing another embodiment of the sample holder. 図７は、第１載置部の変形例を示す断面図である。FIG. 7 is a cross-sectional view showing a modified example of the first mounting portion. 図８は、試料保持具のその他の実施形態を模式的に示した図である。FIG. 8 is a diagram schematically showing another embodiment of the sample holder.

図１は、本発明の一実施形態に係る試料保持具を備えた分析装置の構成を示す概略図である。本実施形態に係る分析装置１００は、顕微鏡１０と、試料保持具１２とを備えている。 FIG. 1 is a schematic diagram showing the configuration of an analyzer equipped with a sample holder according to an embodiment of the present invention. The analyzer 100 according to this embodiment includes a microscope 10 and a sample holder 12.

本実施形態では、顕微鏡１０は、試料表面の顕微分析を行うための顕微鏡（例えば、赤外顕微鏡）であり、顕微鏡ステージ１４（以下、単にステージ１４と記載する。）と、駆動部１６と、レンズ１８と、ミラー２０と、観察部２２と、分析部２４と、制御部２６とを備えている。なお、顕微鏡１０としては、公知の種々の顕微鏡を利用することができるので、以下においては、顕微鏡１０の各部の構成について簡単に説明する。 In the present embodiment, the microscope 10 is a microscope (for example, an infrared microscope) for performing microscopic analysis of the sample surface, and includes a microscope stage 14 (hereinafter simply referred to as the stage 14), a drive unit 16, and The lens 18, the mirror 20, the observation unit 22, the analysis unit 24, and the control unit 26 are provided. Since various known microscopes can be used as the microscope 10, the configuration of each part of the microscope 10 will be briefly described below.

試料保持具１２は、顕微鏡１０のステージ１４に着脱可能に装着される。試料保持具１２は、様々な材質および形状の測定試料１を保持する。試料保持具１２の詳細は後述する。ステージ１４は、Ｘ−Ｙ−Ｚ方向（３次元方向）に移動可能に構成されている。駆動部１６は、ステージ１４をＸ−Ｙ−Ｚ方向に移動させる。これによって、測定試料１の表面の任意の領域における撮像および分析を行うことができる。 The sample holder 12 is detachably attached to the stage 14 of the microscope 10. The sample holder 12 holds the measurement sample 1 of various materials and shapes. Details of the sample holder 12 will be described later. The stage 14 is configured to be movable in the XYZ directions (three-dimensional direction). The drive unit 16 moves the stage 14 in the XYZ directions. As a result, imaging and analysis can be performed in an arbitrary area on the surface of the measurement sample 1.

分析部２４は、可視光および赤外光等を発する光源と測定試料１の表面で反射された赤外光を解析する分光器とを含む。レンズ１８は、分析部２４の光源から照射された光を集光する。ミラー２０は、分析部２４の光源から照射された光および測定試料１の表面で反射された光を反射する。なお、図１においては、ミラー２０から測定試料１の表面に入射する光の軸線１１（以下、入射光軸１１と記載する。）を二点鎖線で示している。観察部２２は、例えば、ＣＣＤカメラ等の撮像機を含み、測定試料１の表面で反射された可視光を観察する。 The analysis unit 24 includes a light source that emits visible light, infrared light, and the like, and a spectroscope that analyzes the infrared light reflected on the surface of the measurement sample 1. The lens 18 collects the light emitted from the light source of the analysis unit 24. The mirror 20 reflects the light emitted from the light source of the analysis unit 24 and the light reflected on the surface of the measurement sample 1. In FIG. 1, the axis line 11 of the light that enters the surface of the measurement sample 1 from the mirror 20 (hereinafter referred to as the incident optical axis 11) is indicated by a two-dot chain line. The observation unit 22 includes, for example, an image pickup device such as a CCD camera, and observes visible light reflected on the surface of the measurement sample 1.

制御部２６は、分析装置１００の利用者の操作に基づいて、駆動部１６、観察部２２および分析部２４を制御する。本実施形態では、制御部２６は、駆動部１６を制御することによって、ステージ１４を所望の位置に移動させると共に、観察部２２で得られる像および分析部２４で得られる分析データを取り込み、解析することができる。 The control unit 26 controls the drive unit 16, the observation unit 22, and the analysis unit 24 based on the operation of the user of the analysis device 100. In the present embodiment, the control unit 26 controls the drive unit 16 to move the stage 14 to a desired position, and at the same time, captures and analyzes the image obtained by the observation unit 22 and the analysis data obtained by the analysis unit 24. can do.

上記の構成を備えた分析装置１００は、例えば、測定試料１の表面の顕微鏡写真の取得またはＦＴ−ＩＲを用いたマッピング分析を行うのに好適に用いることができる。 The analyzer 100 having the above-described configuration can be suitably used, for example, for obtaining a micrograph of the surface of the measurement sample 1 or performing mapping analysis using FT-IR.

以下、試料保持具１２について、より詳しく説明する。 Hereinafter, the sample holder 12 will be described in more detail.

図２および図３は、本発明の一実施形態に係る試料保持具を示した概略図である。具体的には、図２は、試料保持具の平面図であり、図３（ａ）は、図２のＡ１−Ａ２部分を示す端面図であり、図３（ｂ）は、図２のＡ１−Ａ３部分を示す端面図である。 2 and 3 are schematic views showing a sample holder according to an embodiment of the present invention. Specifically, FIG. 2 is a plan view of the sample holder, FIG. 3 (a) is an end view showing the A1-A2 portion of FIG. 2, and FIG. 3 (b) is an A1 of FIG. It is an end view showing the -A3 portion.

図２および図３を参照して、試料保持具１２は、本体部３０と、第１載置部３２と、第２載置部３４と、第３載置部３６と、状態切替部３８と、角度調整部４０と、高さ調整部４２とを備えている。本体部３０は、平面視において円環形状を有し、ステージ１４（図１参照）に着脱可能に装着される。 With reference to FIG. 2 and FIG. 3, the sample holder 12 includes a main body portion 30, a first placing portion 32, a second placing portion 34, a third placing portion 36, and a state switching portion 38. The angle adjusting unit 40 and the height adjusting unit 42 are provided. The main body 30 has an annular shape in a plan view and is detachably attached to the stage 14 (see FIG. 1).

図４は、第１載置部３２を示す平面図であり、図５は、第２載置部３４を示す平面図である。図２〜図４を参照して、第１載置部３２は、平面視において中空円板形状を有する。第１載置部３２に測定試料１が載せられる。本実施形態では、第１載置部３２は、上下方向に延びる軸心Ａ（図３参照）を中心として回転できるように、第２載置部３４に支持されている。 FIG. 4 is a plan view showing the first mounting portion 32, and FIG. 5 is a plan view showing the second mounting portion 34. 2 to 4, the first mounting portion 32 has a hollow disc shape in plan view. The measurement sample 1 is placed on the first placing section 32. In the present embodiment, the first mounting portion 32 is supported by the second mounting portion 34 so as to be rotatable about an axis A (see FIG. 3) extending in the up-down direction.

第１載置部３２の外周部には、複数（本実施形態では７つ）の貫通孔３２ａが形成されている。平面視において、複数の貫通孔３２ａは、軸心Ａ（図３参照）を中心とする共通の仮想円周上に配置されている。各貫通孔３２ａは、第１載置部３２の周方向に延びるように、円弧形状を有している。 A plurality of (seven in the present embodiment) through holes 32 a are formed in the outer peripheral portion of the first mounting portion 32. In plan view, the plurality of through holes 32a are arranged on a common virtual circumference centered on the axis A (see FIG. 3). Each through hole 32a has an arc shape so as to extend in the circumferential direction of the first mounting portion 32.

第２載置部３４は、平面視において中空円板形状を有する。上述したように、第２載置部３４は、第２載置部３４上において第１載置部３２が軸心Ａを中心として回転できるように、第１載置部３２を下方から支持している。本実施形態では、第２載置部３４は、角度調整部４０を介して本体部３０に支持されている。角度調整部４０については後述する。 The second mounting portion 34 has a hollow disc shape in a plan view. As described above, the second mounting portion 34 supports the first mounting portion 32 from below so that the first mounting portion 32 can rotate around the axis A on the second mounting portion 34. ing. In the present embodiment, the second mounting section 34 is supported by the main body section 30 via the angle adjusting section 40. The angle adjusting unit 40 will be described later.

第２載置部３４の外周部には、複数の貫通孔３４ａ〜３４ｃが形成されている。平面視において、複数の貫通孔３４ａ〜３４ｃは、軸心Ａ（図３参照）を中心とする共通の仮想円周上に配置されている。本実施形態では、第２載置部３４の外周部に、後述するガイド部材３８ａを取り付けるための３つの貫通孔３４ａ、後述するガイド部材４０ａを通すための３つの貫通孔３４ｂ、および高さ調整部４２を通すための１つの貫通孔３４ｃが形成されている。 A plurality of through holes 34 a to 34 c are formed in the outer peripheral portion of the second mounting portion 34. In plan view, the plurality of through holes 34a to 34c are arranged on a common virtual circumference centered on the axis A (see FIG. 3). In the present embodiment, three through holes 34a for attaching a guide member 38a described below, three through holes 34b for passing a guide member 40a described below, and a height adjustment are provided on the outer peripheral portion of the second mounting portion 34. One through hole 34c for passing the portion 42 is formed.

図２および図３（ａ）を参照して、状態切替部３８は、第２載置部３４に支持されている。状態切替部３８は、第１載置部３２を、第２載置部３４に対して軸心Ａ回りに回転可能な第１状態と、第２載置部３４に固定された第２状態とのうちのいずれかの状態に切り替えることができるように構成されている。本実施形態では、状態切替部３８は、複数（本実施形態では３つ）のガイド部材３８ａと、複数（本実施形態では３つ）の締め具３８ｂとを有している。 With reference to FIGS. 2 and 3A, the state switching section 38 is supported by the second mounting section 34. The state switching unit 38 has a first state in which the first placing unit 32 is rotatable about the axis A with respect to the second placing unit 34, and a second state in which the first placing unit 32 is fixed to the second placing unit 34. It is configured to be able to switch to any one of these states. In the present embodiment, the state switching unit 38 includes a plurality of (three in the present embodiment) guide members 38a and a plurality of (three in the present embodiment) fasteners 38b.

本実施形態では、各ガイド部材３８ａは棒ネジである。各ガイド部材３８ａの下部は、貫通孔３４ａにおいて第２載置部３４に取り付けられている。なお、各ガイド部材３８ａは、貫通孔３４ａに螺合させることによって第２載置部３４に取り付けられていてもよく、接着剤等によって第２載置部３４に固定されていてもよい。各ガイド部材３８ａの上部は、第１載置部３２の貫通孔３２ａを通って第１載置部３２の上方に突出している。 In this embodiment, each guide member 38a is a bar screw. The lower portion of each guide member 38a is attached to the second mounting portion 34 in the through hole 34a. Each guide member 38a may be attached to the second mounting portion 34 by being screwed into the through hole 34a, or may be fixed to the second mounting portion 34 with an adhesive or the like. The upper portion of each guide member 38 a passes through the through hole 32 a of the first mounting portion 32 and projects above the first mounting portion 32.

各ガイド部材３８ａにおいて第１載置部３２よりも上方に、締め具３８ｂが嵌め込まれている。締め具３８ｂは鍔形状を有し、回転させることによってガイド部材３８ａの軸方向に移動できるようにガイド部材３８ａに螺合されている。本実施形態では、状態切替部３８は、第１載置部３２および第２載置部３４を締め付けることによって、第１載置部３２を第２載置部３４に固定することができる。具体的には、締め具３８ｂを下方に移動させて、締め具３８ｂと第２載置部３４とによって第１載置部３２を挟み込むことによって、第１載置部３２を第２載置部３４に固定することができる（第２状態）。一方、締め具３８ｂを上方に移動させて締め具３８ｂを第１載置部３２から離すことによって、第１載置部３２は、第２載置部３４に対して回転可能な第１状態となる。 A fastener 38b is fitted in each guide member 38a above the first mounting portion 32. The fastener 38b has a brim shape and is screwed to the guide member 38a so as to be movable in the axial direction of the guide member 38a by rotating. In the present embodiment, the state switching section 38 can fix the first placing section 32 to the second placing section 34 by tightening the first placing section 32 and the second placing section 34. Specifically, by moving the fastener 38b downward and sandwiching the first placing portion 32 between the fastener 38b and the second placing portion 34, the first placing portion 32 is moved to the second placing portion. It can be fixed to 34 (second state). On the other hand, by moving the fastener 38b upward to separate the fastener 38b from the first placing portion 32, the first placing portion 32 is brought into the first state in which the first placing portion 32 is rotatable with respect to the second placing portion 34. Become.

なお、本実施形態では、締め具３８ｂの下面はテーパー形状を有している。具体的には、締め具３８ｂの下面は、下端に近づくほど直径が小さくなるように、円錐形状を有している。このため、締め具３８ｂおよび第２載置部３４によって第１載置部３２を狭持する際に、締め具３８ｂの下面は、貫通孔３２ａの縁に接触する。したがって、締め具の下面が第１載置部３２の上面に平行である場合に比べて、本実施形態に係る締め具３８ｂの下面は、より点接触に近い状態で第１載置部３２に接触する。その結果、締め具３８ｂおよび第２載置部３４によって、第１載置部３２をより安定に保持することができる。ただし、締め具３８ｂの形状は上述の例に限定されず、締め具として、例えば、通常のナットを用いてもよい。 In addition, in this embodiment, the lower surface of the fastener 38b has a tapered shape. Specifically, the lower surface of the fastener 38b has a conical shape so that the diameter becomes smaller toward the lower end. Therefore, when the first placing portion 32 is held by the fastener 38b and the second placing portion 34, the lower surface of the fastener 38b comes into contact with the edge of the through hole 32a. Therefore, as compared with the case where the lower surface of the fastener is parallel to the upper surface of the first mounting portion 32, the lower surface of the fastener 38b according to the present embodiment is closer to the first mounting portion 32 in a state closer to point contact. Contact. As a result, the first mounting portion 32 can be held more stably by the fastener 38b and the second mounting portion 34. However, the shape of the fastener 38b is not limited to the above example, and a normal nut may be used as the fastener, for example.

角度調整部４０は、本体部３０に支持されている。角度調整部４０は、複数（本実施形態では３つ）のガイド部材４０ａと、複数（本実施形態では３つ）の角度調整子４０ｂと、複数（本実施形態では３つ）の固定子４０ｃとを含む。 The angle adjusting section 40 is supported by the main body section 30. The angle adjusting unit 40 includes a plurality (three in the present embodiment) of guide members 40a, a plurality (three in the present embodiment) of angle adjusters 40b, and a plurality of (three in the present embodiment) stators 40c. Including and

本実施形態では、各ガイド部材４０ａは、下端部が本体部３０に固定された棒ネジである。平面視において、複数のガイド部材４０ａは、軸心Ａを中心とする共通の仮想円周上に配置されている。また、本実施形態では、平面視において、本体部３０を２つの領域に等分割した場合に、各領域に少なくとも一つのガイド部材４０ａが固定されるように、複数のガイド部材４０ａが設けられている。 In the present embodiment, each guide member 40a is a bar screw whose lower end is fixed to the main body 30. In plan view, the plurality of guide members 40a are arranged on a common virtual circumference centered on the axis A. In the present embodiment, the plurality of guide members 40a are provided so that when the main body 30 is equally divided into two regions, at least one guide member 40a is fixed to each region in plan view. There is.

各ガイド部材４０ａは、第２載置部３４の貫通孔３４ｂおよび第１載置部３２の貫通孔３２ａを通って、第１載置部３２の上方に突出している。本実施形態では、第２載置部３４の水平方向への移動および軸線Ａ回りの回転は、ガイド部材４０ａによって規制されている。一方、第１載置部３２は、ガイド部材３８ａ、ガイド部材４０ａおよび高さ調整部４２が、貫通孔３２ａ内において第１載置部３２に対して相対的に移動できる範囲において、軸線Ａ回りに回転できる。 Each guide member 40a protrudes above the first mounting portion 32 through the through hole 34b of the second mounting portion 34 and the through hole 32a of the first mounting portion 32. In the present embodiment, the movement of the second mounting portion 34 in the horizontal direction and the rotation around the axis A are restricted by the guide member 40a. On the other hand, the first mounting portion 32 rotates around the axis A within a range in which the guide member 38a, the guide member 40a, and the height adjusting portion 42 can move relative to the first mounting portion 32 within the through hole 32a. Can be rotated to.

なお、本実施形態では、第２載置部３４上で第１載置部３２を円滑に回転させるために、ガイド部材３８ａ、ガイド部材４０ａおよび高さ調整部４２と第１載置部３２とが接触することを避ける必要がある。そのため、第１載置部３２とガイド部材３８ａ、ガイド部材４０ａおよび高さ調整部４２との間には、ある程度の隙間を確保することが好ましい。一方、ガイド部材４０ａによって第２載置部３４の軸心Ａ回りの回転を規制するために、ガイド部材４０ａと第２載置部３４との隙間は出来るだけ小さくすることが好ましい。このため、本実施形態では、軸心Ａに直交する断面において、水平方向における貫通孔３４ｂの長さは、水平方向における貫通孔３２ａの長さよりも短く設定されている。なお、軸心Ａに直交する断面において、水平方向における貫通孔３２ａの長さは、例えば、水平方向におけるガイド部材３８ａ、ガイド部材４０ａおよび高さ調整部４２の長さの１．５倍程度に設定される。一方、軸心Ａに直交する断面において、水平方向における貫通孔３４ｂの長さは、例えば、水平方向におけるガイド部材４０ａの長さの１．１〜１．２倍程度に設定される。 In the present embodiment, in order to smoothly rotate the first placing part 32 on the second placing part 34, the guide member 38a, the guide member 40a, the height adjusting part 42, the first placing part 32, and Need to avoid contact. Therefore, it is preferable to secure a certain degree of clearance between the first mounting portion 32 and the guide member 38a, the guide member 40a, and the height adjusting portion 42. On the other hand, since the guide member 40a restricts the rotation of the second mounting portion 34 around the axis A, it is preferable that the gap between the guide member 40a and the second mounting portion 34 be as small as possible. Therefore, in the present embodiment, in the cross section orthogonal to the axis A, the length of the through hole 34b in the horizontal direction is set to be shorter than the length of the through hole 32a in the horizontal direction. In the cross section orthogonal to the axis A, the length of the through hole 32a in the horizontal direction is, for example, about 1.5 times the length of the guide member 38a, the guide member 40a, and the height adjusting portion 42 in the horizontal direction. Is set. On the other hand, in the cross section orthogonal to the axis A, the length of the through hole 34b in the horizontal direction is set to, for example, about 1.1 to 1.2 times the length of the guide member 40a in the horizontal direction.

各ガイド部材４０ａに、角度調整子４０ｂおよび固定子４０ｃが嵌め込まれている。具体的には、ガイド部材４０ａにおいて本体部３０と第２載置部３４との間に角度調整子４０ｂが設けられ、ガイド部材４０ａにおいて第１載置部３２の上方に固定子４０ｃが設けられている。 An angle adjuster 40b and a stator 40c are fitted in each guide member 40a. Specifically, in the guide member 40a, the angle adjuster 40b is provided between the main body portion 30 and the second mounting portion 34, and in the guide member 40a, the stator 40c is provided above the first mounting portion 32. ing.

本実施形態では、角度調整子４０ｂおよび固定子４０ｃはそれぞれ鍔形状を有し、回転させることによってガイド部材４０ａの軸方向に移動できるようにガイド部材４０ａに螺合されている。 In the present embodiment, the angle adjuster 40b and the stator 40c each have a brim shape, and are screwed to the guide member 40a so that they can be moved in the axial direction of the guide member 40a by rotating.

本実施形態では、複数の角度調整子４０ｂの上下方向の位置を相対的に変化させることによって、本体部３０に対する第２載置部３４および第２載置部３４に載置された第１載置部３２の傾斜角度を調整することができる。これにより、ステージ１４（図１参照）に対する測定試料１の角度を調整することができる。 In the present embodiment, the second mounting portion 34 and the first mounting portion mounted on the second mounting portion 34 with respect to the main body portion 30 are changed by relatively changing the vertical positions of the plurality of angle adjusters 40b. The inclination angle of the mounting portion 32 can be adjusted. As a result, the angle of the measurement sample 1 with respect to the stage 14 (see FIG. 1) can be adjusted.

また、本実施形態では、複数の角度調整子４０ｂと複数の固定子４０ｃとで第１載置部３２および第２載置部３４を挟み込むことによって、第１載置部３２および第２載置部３４の上下方向の移動を規制することができる。また、第１載置部３２を第２載置部３４により強固に固定することができる。これにより、分析装置１００による分析中に、より安定に測定試料１を保持することが可能になる。 In addition, in the present embodiment, by sandwiching the first mounting portion 32 and the second mounting portion 34 with the plurality of angle adjusters 40b and the plurality of stators 40c, the first mounting portion 32 and the second mounting portion 32 are sandwiched. The vertical movement of the portion 34 can be restricted. Further, the first mounting portion 32 can be firmly fixed to the second mounting portion 34. This makes it possible to hold the measurement sample 1 more stably during the analysis by the analyzer 100.

なお、本実施形態では、角度調整子４０ｂの上面および固定子４０ｃの下面はそれぞれ、テーパー形状を有している。具体的には、角度調整子４０ｂの上面は、上端に近づくほど直径が小さくなるように、円錐形状を有している。また、固定子４０ｃの下面は、下端に近づくほど直径が小さくなるように、円錐形状を有している。このような構成によって、上述の締め具３８ｂと同様に、角度調整子４０ｂおよび固定子４０ｃを第２載置部３４および第１載置部３２に対して、より点接触に近い状態で接触させることができる。その結果、角度調整子４０ｂおよび固定子４０ｃによって、第１載置部３２および第２載置部３４をより安定に保持することができる。なお、角度調整子４０ｂおよび固定子４０ｃの形状は上述の例に限定されず、角度調整子４０ｂおよび固定子４０ｃとして、例えば、通常のナットを用いてもよい。 In this embodiment, the upper surface of the angle adjuster 40b and the lower surface of the stator 40c each have a tapered shape. Specifically, the upper surface of the angle adjuster 40b has a conical shape so that the diameter becomes smaller toward the upper end. Further, the lower surface of the stator 40c has a conical shape such that the diameter becomes smaller toward the lower end. With such a configuration, the angle adjuster 40b and the stator 40c are brought into contact with the second placement portion 34 and the first placement portion 32 in a state closer to point contact, as in the case of the fastener 38b described above. be able to. As a result, the first mounting portion 32 and the second mounting portion 34 can be held more stably by the angle adjuster 40b and the stator 40c. Note that the shapes of the angle adjuster 40b and the stator 40c are not limited to the above examples, and as the angle adjuster 40b and the stator 40c, for example, ordinary nuts may be used.

また、本実施形態では、平面視において、固定子４０ｃの直径は、角度調整子４０ｂの直径よりも小さい。これにより、作業者が角度調整子４０ｂを回転させる際に、作業者の指が固定子４０ｃに接触することを抑制できる。その結果、作業者は、第１載置部３２および第２載置部３４の角度調整を円滑に行うことができる。なお、平面視において、角度調整子４０ｂの外縁が第２載置部３４の外縁から外側に突出し、固定子４０ｃの外縁が第２載置部３４の外縁よりも内側に位置するように、角度調整子４０ｂおよび固定子４０ｃが設けられることが好ましい。この場合、作業者が角度調整子４０ｂを回転させる際に、作業者の指が固定子４０ｃに接触することを十分に抑制できる。 Further, in the present embodiment, the diameter of the stator 40c is smaller than the diameter of the angle adjuster 40b in plan view. Thereby, when the worker rotates the angle adjuster 40b, it is possible to suppress the finger of the worker from contacting the stator 40c. As a result, the worker can smoothly adjust the angles of the first placing section 32 and the second placing section 34. In plan view, the angle adjuster 40b has an outer edge protruding outward from the outer edge of the second mounting portion 34, and an outer edge of the stator 40c is positioned inside the outer edge of the second mounting portion 34. The adjuster 40b and the stator 40c are preferably provided. In this case, when the worker rotates the angle adjuster 40b, it is possible to sufficiently suppress the finger of the worker from coming into contact with the stator 40c.

なお、顕微ＦＴ−ＩＲ等を用いた顕微分析においては、測定試料１の厳密な角度調整が要求されるため、角度調整子４０ｂの高さは精密に変化させられることが望ましい。角度調整子４０ｂの高さは、ガイド部材４０ａのネジ部のピッチを小さくすればするほど精密に上下させることが可能になるため、ピッチは０．４ｍｍ以下とすることが望ましい。また、ガイド部材４０ａのネジ部は消耗しやすいため、ガイド部材４０ａは本体部に着脱自在に取り付け可能であることが望ましい。 In the microscopic analysis using the microscopic FT-IR or the like, strict angle adjustment of the measurement sample 1 is required, and therefore it is desirable that the height of the angle adjuster 40b be precisely changed. The height of the angle adjuster 40b can be moved up and down more accurately as the pitch of the threaded portion of the guide member 40a is made smaller, so that the pitch is preferably 0.4 mm or less. Further, since the screw portion of the guide member 40a is easily worn, it is desirable that the guide member 40a be detachably attachable to the main body portion.

図２および図３（ｂ）を参照して、本実施形態では、高さ調整部４２は、下端部が本体部３０に固定された棒ネジである。高さ調整部４２は、第２載置部３４の貫通孔３４ｃおよび第１載置部３２の貫通孔３２ａを通って、第１載置部３２の上方に突出している。なお、本実施形態では、複数のガイド部材３８ａ、複数のガイド部材４０ａおよび高さ調整部４２が互いに異なる貫通孔３２ａを通るように、第２載置部３４上に第１載置部３２が載せられている。高さ調整部４２において第１載置部３２よりも上方に、第３載置部３６が嵌め込まれている。本実施形態では、第３載置部３６は鍔形状を有し、回転させることによって高さ調整部４２の軸方向に移動できるように高さ調整部４２に螺合されている。 With reference to FIGS. 2 and 3B, in the present embodiment, the height adjusting portion 42 is a bar screw whose lower end portion is fixed to the main body portion 30. The height adjusting portion 42 projects above the first placing portion 32 through the through hole 34c of the second placing portion 34 and the through hole 32a of the first placing portion 32. In the present embodiment, the first mounting portion 32 is placed on the second mounting portion 34 so that the plurality of guide members 38a, the plurality of guide members 40a, and the height adjusting portion 42 pass through the different through holes 32a. It is posted. In the height adjusting part 42, the third mounting part 36 is fitted above the first mounting part 32. In the present embodiment, the third mounting portion 36 has a brim shape, and is screwed onto the height adjusting portion 42 so as to be movable in the axial direction of the height adjusting portion 42 by rotating.

第３載置部３６としては、例えば、ナット等の公知の部材（中空状の部材）を用いることができる。第３載置部３６に参照試料２が載せられる。図２および図３（ｂ）に示した例では、参照試料２は、高さ調整板４４を介して第３載置部３６に載せられている。本実施形態では、平面視において、第１載置部３２、第２載置部３４および第３載置部３６は互いに重なるように設けられている。 As the third mounting portion 36, for example, a known member (hollow member) such as a nut can be used. The reference sample 2 is placed on the third placing section 36. In the example shown in FIGS. 2 and 3B, the reference sample 2 is placed on the third placing section 36 via the height adjusting plate 44. In the present embodiment, the first mounting portion 32, the second mounting portion 34, and the third mounting portion 36 are provided so as to overlap each other in plan view.

なお、測定試料１および参照試料２は、分析中にずれないよう第１載置部３２および第３載置部３６に固定することが望ましい。測定試料１および参照試料２を固定する方法については、特に制限はなく、両面テープ、接着剤、固定金具等を用いて固定すればよい。 The measurement sample 1 and the reference sample 2 are preferably fixed to the first mounting part 32 and the third mounting part 36 so as not to shift during the analysis. The method of fixing the measurement sample 1 and the reference sample 2 is not particularly limited, and may be fixed using a double-sided tape, an adhesive, a fixing metal fitting, or the like.

本実施形態に係る分析装置１００によって測定試料１を分析する際には、まず、試料保持具１２をステージ１４に装着し、顕微鏡１０の観察視野内で測定試料１を保持する。その後、第２載置部３４上において第１載置部３２を回転させ、顕微鏡１０によって測定試料１を観察しながら測定試料１の入射光軸１１（観察軸）回りの角度を調整する。入射光軸１１回りの角度を調整が終了すると、状態切替部３８によって、第１載置部３２を第２載置部３４に固定する。続いて、観察視野において、測定試料１の表面の任意の３個所以上で顕微鏡１０の焦点が合うように、複数の角度調整子４０ｂの高さをそれぞれ調整することによって、本体部３０に対する第１載置部３２（第２載置部３４）の傾斜角度を調整する。第１載置部３２の傾斜角度の調整が終了すると、複数の固定子４０ｃの高さを調整して、複数の角度調整子４０ｂと複数の固定子４０ｃとで第１載置部３２および第２載置部３４を挟み込む。これにより、第１載置部３２（第２載置部３４）の傾斜角度が固定される。次に、ステージ１４を水平方向に移動させ、観察視野において、参照試料２の表面の任意の位置で顕微鏡１０の焦点が合うように、第３載置部３６の高さを調整する。その後、参照試料２および測定試料１の表面を測定して、マッピング分析等の顕微分析を行う。 When analyzing the measurement sample 1 by the analyzer 100 according to the present embodiment, first, the sample holder 12 is mounted on the stage 14 to hold the measurement sample 1 in the observation visual field of the microscope 10. After that, the first mounting portion 32 is rotated on the second mounting portion 34, and the angle around the incident optical axis 11 (observation axis) of the measurement sample 1 is adjusted while observing the measurement sample 1 with the microscope 10. When the adjustment of the angle around the incident optical axis 11 is completed, the state mounting unit 38 fixes the first mounting unit 32 to the second mounting unit 34. Subsequently, in the observation field of view, the heights of the plurality of angle adjusters 40b are adjusted so that the microscope 10 is focused at any three or more positions on the surface of the measurement sample 1, so that the first relative to the main body 30 is adjusted. The tilt angle of the mounting portion 32 (second mounting portion 34) is adjusted. When the adjustment of the tilt angle of the first mounting portion 32 is completed, the heights of the plurality of stators 40c are adjusted so that the plurality of angle adjusters 40b and the plurality of stators 40c serve as the first mounting portion 32 and the first mounting portion 32. 2 The mounting portion 34 is sandwiched. As a result, the inclination angle of the first mounting portion 32 (second mounting portion 34) is fixed. Next, the stage 14 is moved in the horizontal direction, and the height of the third mounting portion 36 is adjusted so that the microscope 10 is focused at an arbitrary position on the surface of the reference sample 2 in the observation visual field. After that, the surfaces of the reference sample 2 and the measurement sample 1 are measured, and microscopic analysis such as mapping analysis is performed.

本実施形態によれば、測定試料１の傾斜角度の調整および入射光軸１１（観察軸）回りの回転を、顕微鏡で観察しながら、容易に行うことが可能であり、数ｍｍから数ｃｍオーダーの広範囲にわたる領域の高精度なマッピング分析を実施することができるようになる。 According to the present embodiment, it is possible to easily adjust the tilt angle of the measurement sample 1 and rotate it about the incident optical axis 11 (observation axis) while observing it with a microscope, and the order of several mm to several cm. It becomes possible to perform highly accurate mapping analysis of a wide range of

また、本実施形態では、上述したように、状態切替部３８によって第１載置部３２を第２載置部３４に固定した状態で、角度調整部４０によって第２載置部３４の傾斜角度を調整することができる。これにより、第１載置部３２の傾斜角度が調整される。ここで、本実施形態では、第２載置部３４は、軸心Ａ回りの回転が規制された状態で本体部３０に支持されている。したがって、第１載置部３２を第２載置部３４に固定した状態で第２載置部３４の傾斜角度を調整することによって、第１載置部３２の軸心Ａ回りの回転を規制しつつ第１載置部３２の傾斜角度を調整することができる。すなわち、第１載置部３２の傾斜角度の調整時に、第１載置部３２が軸心Ａ回りに回転することを防止できる。これにより、第１載置部３２の回転位置の調整と傾斜角度の調整とを円滑に行うことが可能になる。 Further, in the present embodiment, as described above, in the state where the first mounting portion 32 is fixed to the second mounting portion 34 by the state switching portion 38, the inclination angle of the second mounting portion 34 is set by the angle adjusting portion 40. Can be adjusted. As a result, the tilt angle of the first mounting portion 32 is adjusted. Here, in the present embodiment, the second mounting portion 34 is supported by the main body portion 30 in a state in which rotation around the axis A is restricted. Therefore, the rotation of the first mounting portion 32 about the axis A is regulated by adjusting the inclination angle of the second mounting portion 34 with the first mounting portion 32 fixed to the second mounting portion 34. In addition, the tilt angle of the first mounting portion 32 can be adjusted. That is, it is possible to prevent the first mounting portion 32 from rotating around the axis A when adjusting the inclination angle of the first mounting portion 32. This makes it possible to smoothly adjust the rotational position and the tilt angle of the first mounting portion 32.

また、本実施形態では、顕微鏡１０の焦点位置を測定試料１の表面に合わせた後、高さ調整部４２を用いて第３載置部３６の高さを調整することによって、ステージ１４の高さを変えることなく、顕微鏡１０の焦点位置を参照試料２の表面に適切に合わせることができる。すなわち、測定試料１の高さを維持したまま、顕微鏡１０の焦点位置を参照試料２の表面に合わせることができる。これにより、例えば、顕微ＦＴ−ＩＲ等を用いた顕微分析を行うに際して、従来のステージ１４を用いて、測定試料１および参照試料２の赤外反射スペクトルを精度良く繰り返し測定することが可能になる。すなわち、顕微鏡１０による測定試料１の測定精度を向上させることができる。 Further, in the present embodiment, after adjusting the focus position of the microscope 10 to the surface of the measurement sample 1, the height of the third mounting portion 36 is adjusted by using the height adjusting portion 42, so that the height of the stage 14 is increased. The focus position of the microscope 10 can be properly adjusted to the surface of the reference sample 2 without changing the thickness. That is, the focus position of the microscope 10 can be adjusted to the surface of the reference sample 2 while maintaining the height of the measurement sample 1. As a result, for example, when performing a microscopic analysis using a microscopic FT-IR or the like, it becomes possible to accurately and repeatedly measure the infrared reflection spectra of the measurement sample 1 and the reference sample 2 using the conventional stage 14. . That is, the measurement accuracy of the measurement sample 1 by the microscope 10 can be improved.

また、本実施形態によれば、測定試料１および参照試料２を繰り返し測定する際に、測定試料１および参照試料２の高さを調整しなくてよいので、測定試料１および参照試料２の自動測定が可能になる。すなわち、測定試料１のマッピング分析を自動でかつ精度良く行うことが可能になる。 Further, according to the present embodiment, when the measurement sample 1 and the reference sample 2 are repeatedly measured, it is not necessary to adjust the heights of the measurement sample 1 and the reference sample 2, so that the measurement sample 1 and the reference sample 2 are automatically measured. Measurement becomes possible. That is, the mapping analysis of the measurement sample 1 can be performed automatically and accurately.

また、本実施形態では、平面視において、第１載置部３２、第２載置部３４および第３載置部３６は重なるように設けられている。この場合、第１載置部３２に載せられた測定試料１と、第３載置部３６に載せられた参照試料２との水平方向の距離を十分に短くすることができる。これにより、測定試料１および参照試料２を繰り返し測定する際に、ステージ１４の水平方向の移動距離を短くすることができるので、顕微鏡１０による測定試料１の測定精度が低下することを十分に抑制できる。 Further, in the present embodiment, the first mounting portion 32, the second mounting portion 34, and the third mounting portion 36 are provided so as to overlap each other in a plan view. In this case, the horizontal distance between the measurement sample 1 placed on the first placing section 32 and the reference sample 2 placed on the third placing section 36 can be sufficiently shortened. Accordingly, when the measurement sample 1 and the reference sample 2 are repeatedly measured, the horizontal movement distance of the stage 14 can be shortened, so that the measurement accuracy of the measurement sample 1 by the microscope 10 can be sufficiently suppressed from decreasing. it can.

なお、上述の実施形態では、角度調整部４０（より具体的には、ガイド部材４０ａ）によって第２載置部３４の軸心Ａ回りへの回転を規制しているが、高さ調整部４２によって第２載置部３４の軸心Ａ回りへの回転を規制してもよい。この場合、高さ調整部４２によって第２載置部３４の回転が規制されるように、上述した貫通孔３４ｂとガイド部材４０ａと同様に、貫通孔３４ｃおよび高さ調整部４２の寸法を調整すればよい。また、詳細な説明は省略するが、角度調整部４０および高さ調整部４２とは別の部材を設けて、第２載置部３４の回転を規制してもよい。 In the above embodiment, the angle adjusting section 40 (more specifically, the guide member 40a) restricts the rotation of the second placing section 34 around the axis A, but the height adjusting section 42. The rotation of the second mounting portion 34 around the axis A may be restricted by. In this case, the dimensions of the through hole 34c and the height adjusting portion 42 are adjusted in the same manner as the through hole 34b and the guide member 40a described above so that the rotation of the second mounting portion 34 is restricted by the height adjusting portion 42. do it. Although not described in detail, a member different from the angle adjusting unit 40 and the height adjusting unit 42 may be provided to restrict the rotation of the second mounting unit 34.

また、上述の実施形態では、各ガイド部材４０ａに固定子４０ｃが設けられているが、固定子４０ｃは、少なくとも一つのガイド部材４０ａに設けられていればよい。 Further, in the above-described embodiment, the stator 40c is provided on each guide member 40a, but the stator 40c may be provided on at least one guide member 40a.

また、上述の実施形態では、状態切替部３８は、３つのガイド部材３８ａと３つの締め具３８ｂとを有しているが、ガイド部材３８ａおよび締め具３８ｂの数は１つであってもよく、２つであってもよく、４つ以上であってもよい。また、上述の実施形態では、状態切替部３８がガイド部材３８ａと締め具３８ｂとを含む場合について説明したが、ガイド部材３８ａおよび締め具３８ｂの代わりにボルトを用いてもよい。すなわち、ボルトを締め付けることによって、第１載置部３２を第２載置部３４に固定してもよい。 Further, in the above-described embodiment, the state switching unit 38 has the three guide members 38a and the three fasteners 38b, but the number of the guide members 38a and the fasteners 38b may be one. The number may be two, or four or more. Further, in the above-described embodiment, the case where the state switching unit 38 includes the guide member 38a and the fastener 38b has been described, but a bolt may be used instead of the guide member 38a and the fastener 38b. That is, the first mounting portion 32 may be fixed to the second mounting portion 34 by tightening the bolt.

また、上述の実施形態では、角度調整部４０が３つのガイド部材４０ａを有する場合について説明したが、４つ以上のガイド部材４０ａが設けられてもよい。この場合、ガイド部材４０ａの数に応じて、角度調整子４０ｂ、固定子４０ｃ、貫通孔３２ａおよび貫通孔３４ｂの数を調整すればよい。なお、固定子４０ｃは、設けられなくてもよい。 Further, in the above-described embodiment, the case where the angle adjusting unit 40 has the three guide members 40a has been described, but four or more guide members 40a may be provided. In this case, the numbers of the angle adjuster 40b, the stator 40c, the through hole 32a, and the through hole 34b may be adjusted according to the number of the guide members 40a. The stator 40c may not be provided.

また、上述の実施形態では、高さ調整部４２として棒ネジを用いる場合について説明したが、高さ調整部４２の構成は上述の例に限定されない。例えば、図６に示すように、高さ調整部４２が、棒ネジ４２ａと、棒ネジ４２ａにはめ込まれた高さ調整子４２ｂとを含んでいてもよい。高さ調整子４２ｂは鍔形状を有し、回転させることによって棒ネジ４２ａの軸方向に移動できるように棒ネジ４２ａに螺合されている。高さ調整子４２ｂとしては、例えば、ナットを用いることができる。本実施形態では、第３載置部３６にネジ部が形成されておらず、第３載置部３６が棒ネジ４２ａの軸方向に移動自在になるように、第３載置部３６に棒ネジ４２ａが挿通されている。第３載置部３６は、高さ調整子４２ｂに支持されている。本実施形態では、高さ調整子４２ｂを回転させて、高さ調整子４２ｂを棒ネジ４２ａの軸方向に移動させることによって、第３載置部３６を棒ネジ４２ａの軸方向に移動させることができる。その結果、参照試料２の高さを調整することができる。 Further, in the above-described embodiment, the case where the bar screw is used as the height adjusting unit 42 has been described, but the configuration of the height adjusting unit 42 is not limited to the above example. For example, as shown in FIG. 6, the height adjusting portion 42 may include a bar screw 42a and a height adjuster 42b fitted in the bar screw 42a. The height adjuster 42b has a brim shape and is screwed to the bar screw 42a so as to be movable in the axial direction of the bar screw 42a by rotating. For example, a nut can be used as the height adjuster 42b. In the present embodiment, no screw portion is formed on the third mounting portion 36, and the third mounting portion 36 is provided with a rod so that the third mounting portion 36 is movable in the axial direction of the bar screw 42a. The screw 42a is inserted. The third mounting portion 36 is supported by the height adjuster 42b. In the present embodiment, the height adjuster 42b is rotated to move the height adjustor 42b in the axial direction of the bar screw 42a, thereby moving the third mounting portion 36 in the axial direction of the bar screw 42a. You can As a result, the height of the reference sample 2 can be adjusted.

上述の実施形態では、参照試料２が、高さ調整板４４を介して第３載置部３６に載せられる場合について説明したが、図６に示すように、高さ調整板４４が設けられなくてもよい。また、図示は省略するが、測定試料１が、高さ調整板を介して第１載置部３２に載せられてもよい。 In the above-described embodiment, the case where the reference sample 2 is placed on the third placing section 36 via the height adjusting plate 44 has been described, but as shown in FIG. 6, the height adjusting plate 44 is not provided. May be. Although not shown, the measurement sample 1 may be placed on the first placing section 32 via the height adjusting plate.

また、上述の実施形態では、第１載置部３２および第２載置部３４が平板形状を有する場合について説明したが、第１載置部３２および第２載置部３４の形状は、測定試料１の厚みおよび形状等に応じて適宜変更することができる。例えば、図７に示すように、第１載置部３２の中央部が下方に向かって凸となるように凹んでいてもよい。なお、図示は省略するが、第２載置部３４は、第１載置部３２に対応する形状にすればよい。具体的には、図７に示す第１載置部３２を用いる場合には、例えば、第２載置部３４は、中央部が下方に向かって凸となる形状を有していてもよく、中央部に、第１載置部３２の中央部を下方に突出させることができる大きさの貫通孔を有していてもよい。図示は省略するが、第１載置部３２の中央部が上方に向かって凸となるように突出していてもよい。 Further, in the above-described embodiment, the case where the first placing section 32 and the second placing section 34 have a flat plate shape has been described, but the shapes of the first placing section 32 and the second placing section 34 are measured. It can be appropriately changed depending on the thickness and shape of the sample 1. For example, as shown in FIG. 7, the central portion of the first mounting portion 32 may be recessed so as to be convex downward. Although not shown, the second mounting portion 34 may have a shape corresponding to the first mounting portion 32. Specifically, when using the first mounting portion 32 shown in FIG. 7, for example, the second mounting portion 34 may have a shape in which the central portion is convex downward. The central portion may have a through hole having a size that allows the central portion of the first mounting portion 32 to project downward. Although illustration is omitted, the central portion of the first mounting portion 32 may project upward so as to be convex.

また、上述の実施形態では、第１載置部３２および第２載置部３４は、同一直径の円板形状を有しているが、第１載置部３２および第２載置部３４の大きさが異なっていてもよい。例えば、図８に示すように、第１載置部３２の直径が第２載置部３４の直径よりも小さくてもよい。図８に示す例では、第２載置部３４の上面に凹部が形成され、該凹部内において第２載置部３４の上面に、第１載置部３２が軸心Ａ回りに回転可能に支持されている。本実施形態では、第１載置部３２の貫通孔３２ａおよび第２載置部３４の貫通孔３４ａは、第２載置部３４の貫通孔３４ｂおよび貫通孔３４ｃ（図３（ｂ）参照）よりも内側に形成されている。ガイド部材４０ａおよび高さ調整部４２（図３（ｂ）参照）は、貫通孔３２ａには通されない。 In addition, in the above-described embodiment, the first mounting portion 32 and the second mounting portion 34 have a disk shape with the same diameter, but the first mounting portion 32 and the second mounting portion 34 have the same shape. The sizes may be different. For example, as shown in FIG. 8, the diameter of the first mounting portion 32 may be smaller than the diameter of the second mounting portion 34. In the example shown in FIG. 8, a concave portion is formed on the upper surface of the second mounting portion 34, and the first mounting portion 32 is rotatable around the axis A on the upper surface of the second mounting portion 34 in the concave portion. It is supported. In the present embodiment, the through hole 32a of the first mounting portion 32 and the through hole 34a of the second mounting portion 34 are the through hole 34b and the through hole 34c of the second mounting portion 34 (see FIG. 3B). Is formed inside. The guide member 40a and the height adjusting portion 42 (see FIG. 3B) are not passed through the through hole 32a.

また、上述の実施形態では、高さ調整部４２が、ガイド部材４０ａとは別個の棒ネジからなる場合について説明したが、いずれかのガイド部材４０ａの一部を高さ調整部４２として利用してもよい。例えば、いずれかのガイド部材４０ａの上端部に、第３載置部３６を嵌め込んでもよい。 Further, in the above-described embodiment, the case where the height adjusting portion 42 is formed of a bar screw separate from the guide member 40a has been described, but a part of one of the guide members 40a is used as the height adjusting portion 42. May be. For example, you may fit the 3rd mounting part 36 in the upper end part of either guide member 40a.

以上、図１〜８を用いて本発明の実施形態に係る試料保持具および分析装置の説明を行ったが、本発明は上記の実施形態に限定されるものではない。 Although the sample holder and the analyzer according to the embodiment of the present invention have been described above with reference to FIGS. 1 to 8, the present invention is not limited to the above embodiment.

本発明に係る試料保持具によれば、測定試料を精度良く測定することが可能になる。したがって、本発明に係る試料保持具およびそれを備える分析装置は、数ｍｍから数ｃｍオーダーの広範囲にわたる領域のマッピング分析を実施するのに好適に用いることができる。 According to the sample holder of the present invention, it is possible to measure a measurement sample with high accuracy. Therefore, the sample holder according to the present invention and the analyzer equipped with the same can be suitably used for performing mapping analysis of a wide range of several mm to several cm.

１測定試料
２参照試料
１０顕微鏡
１１入射光軸
１２試料保持具
１４顕微鏡ステージ
１６駆動部
１８レンズ
２０ミラー
２２観察部
２４分析部
２６制御部
３０本体部
３２第１載置部
３２ａ貫通孔
３４第２載置部
３４ａ，３４ｂ，３４ｃ貫通孔
３６第３載置部
３８状態切替部
３８ａガイド部材
３８ｂ締め具
４０角度調整部
４０ａガイド部材
４０ｂ角度調整子
４０ｃ固定子
４２高さ調整部
４２ａ棒ネジ
４２ｂ高さ調整子
４４高さ調整板
１００分析装置 1 Measurement sample 2 Reference sample 10 Microscope 11 Incident optical axis 12 Sample holder 14 Microscope stage 16 Drive part 18 Lens 20 Mirror 22 Observation part 24 Analysis part 26 Control part 30 Main body part 32 1st mounting part 32a Through hole 34 2nd Mounting part 34a, 34b, 34c Through hole 36 Third mounting part 38 State switching part 38a Guide member 38b Fastener 40 Angle adjustment part 40a Guide member 40b Angle adjuster 40c Stator 42 Height adjustment part 42a Bar screw 42b Height Adjuster 44 Height adjuster 100 Analyzer

Claims

A sample holder for holding a measurement sample and mounted on a stage of a microscope,
A main body detachably attached to the stage,
A first mounting portion for mounting a measurement sample,
A second mounting portion that supports the first mounting portion and that is supported by the main body portion in a state in which rotation about an axis extending in the vertical direction is restricted;
Any one of a first state in which the first placing portion can be rotated around the axis with respect to the second placing portion, and a second state in which the first placing portion is fixed to the second placing portion. A state switching unit for setting the state,
An angle adjusting unit supported by the main body, restricting the horizontal movement of the second placing unit, and adjusting an inclination angle of the second placing unit with respect to the main body;
And a sample holder.

The sample holder according to claim 1, wherein the state switching unit puts the first placing unit and the second placing unit into the second state by tightening the first placing unit and the second placing unit.

The second mounting portion is supported by the main body portion via the angle adjusting portion,
The angle adjusting unit has three or more bar screws fixed to the main body, and three or more adjusters screwed to the three or more bar screws, respectively.
The adjuster moves in the axial direction of the bar screw by rotating,
The sample holder according to claim 1 or 2, wherein the second mounting portion is supported by the three or more adjusters.

The angle adjusting unit further has a stator screwed to at least one of the bar screws,
The stator moves in the axial direction of the rod screw by rotating, and clamps the second mounting portion together with the adjuster, thereby restricting the vertical movement of the second mounting portion. ,
The sample holder according to claim 3, wherein each of the adjuster and the stator has a hollow disk shape in a plan view, and the diameter of the adjuster is larger than the diameter of the stator.

The outer edge of the adjuster projects outward from the outer edge of the second mounting portion in a plan view, and the outer edge of the stator is positioned inside the outer edge of the second mounting portion. Sample holder.

A third mounting portion for mounting a reference sample,
A height adjustment part that is supported by the main body part and that adjusts the height of the third mounting part with respect to the main body part;
The sample holder according to any one of claims 1 to 5, further comprising:

An analyzer for performing microscopic analysis of a sample surface, comprising the sample holder according to any one of claims 1 to 6.