JP2020051461A - Object support device - Google Patents

Abstract

To provide an object support device that supports an object with a simple structure and further improved seismic isolation function.SOLUTION: Instead of a conventional table support mechanism, a pair of guide rails that guide a pair of guide blocks in the horizontal direction are arranged on a table and the base, respectively. An upward spring force is generated on the table. A right side link set and a left side link set are provided left and right sides, which intersect in an X shape and are rotatably connected. A first right link and the first left link have an upper end rotatably connected to a member supported by the table and a lower end rotatably connected to the pair of lower left and right guide blocks. A second right link and the second left link have a lower end rotatably connected to a member supported by the base and an upper end rotatably connected to the pair of lower left and right guide blocks. The spring force is applied to each of the right link set and the left link set in a direction approaching another link.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an object support device that supports an object. In particular, the present invention relates to an object support device that pays attention to a seismic isolation function against vertical vibration.

  BACKGROUND ART As a horizontal object support device (for example, a seismic isolation table), there have been conventionally devised several structures. Horizontal seismic isolation tables can be realized relatively easily. Since the weight of the object supported by the seismic isolation table is supported by the XY table, bearings, and the like, the spring constant in the horizontal direction can be set relatively small to respond to horizontal acceleration vibration during an earthquake. For example, a vertical load is supported by a mechanism such as a bearing, a resistance to horizontal vibration is suppressed, and a seismic isolation function can be effectively exhibited.

  On the other hand, there is a demand for an object support device that has a simple configuration and can be realized at low cost with respect to vertical vibration.

  Waves having various periods overlap with the waves of the earthquake, and among them, wave components having a period of about 0.5 to 1.0 second are dominant. By making the natural period in the vertical direction of the object support device larger than 1 second, it is possible to avoid resonance of the object support device with respect to seismic waves and increase the seismic isolation effect. The seismic isolation effect increases as the vertical natural period of the object support device is increased to 1 second, 2 seconds, 3 seconds, and 5 seconds. Preferably, it is at least about 2 seconds.

  In order to set the vertical period of the object support device to about 2 seconds, it is necessary to soften the vertical spring. Here, in order to set the natural period of the object support device in the vertical direction to about 2 seconds, a static deflection of about 1 m is required regardless of the mass of the object when the spring constant is constant. I know. This is because when the object is gently placed on the seismic isolation device in a no-load state, it sinks about 1 m and balances, and vibrates up and down around the static balance position to exhibit the seismic isolation effect. The object support device has a height of about 1 m to several tens cm. If the natural period in the vertical direction of the seismic isolation device is set to 3 seconds or 5 seconds, the static deflection is further increased.

In particular, it is preferable that the object supporting device against vertical vibration has a very small static deflection under a certain load, and a seismic isolation device having a nonlinear spring characteristic having a soft spring constant at a certain load or more.
For example, when an object is placed on a table, it flexes statically to one position and hangs statically at the static hanging position. When an earthquake occurs, it vibrates up and down around the static suspension position.

  In the market, a pair of upper and lower horizontal movement guide mechanisms arranged on the table and the base, a vertical spring member for applying an upward spring force to the table, and an X-shaped crossing of the table inclined in opposite directions to each other. It is composed of a pair of links rotatably connected at the intersection, one of the links is rotatably connected at the upper end to the table, and the lower end is horizontally guided by the horizontal movement guide mechanism below, and the other link is A horizontal link member rotatably connected to the base at a lower end and a link mechanism guided at the other end so as to be horizontally movable by the upper horizontal movement guide mechanism and a spring force acting on the pair of links so as to approach each other. And an object support device that operates the table support mechanism configured by the above.

The above-described object support device exerts the above-described function by adjusting the specifications of the link and the specifications of the spring. When the object support device and the table move up and down, the center of gravity of the table support mechanism moves up and down and also moves left and right.
As a result, it is known that when the table moves up and down, the vertical movement and the left and right movement of the table support mechanism influence each other, and there is a possibility that undesirable vibration is generated.
The market wants the applicant to further improve the seismic isolation function of the object support device described above.

  The present invention has been devised in view of the problems described above, and an object of the present invention is to provide an object support device that supports an object with a simple structure and further improved seismic isolation function.

In order to achieve the above object, an object supporting device for supporting an object according to the present invention includes a table on which an object is placed, a base supported on a base, and the table supported on the base. A table support mechanism, wherein the table support mechanism has a horizontal movement guide mechanism, a vertical spring member, a link mechanism, and a horizontal spring member, and the horizontal movement guide mechanism is disposed vertically apart. It has a first horizontal movement guide mechanism and a second horizontal movement guide mechanism, and the first horizontal movement guide mechanism is a pair of left and right guide blocks arranged apart from the base along a specific horizontal axis. A first right guide block which is a pair of left and right guide rails for movably guiding the first right guide block, the first left guide block, and the pair of left and right guide blocks to each other along a pair of left and right orbits extending along a specific horizontal axis. A second right guide block that includes a guide rail and a first left guide rail, wherein the second horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the table along a specific horizontal axis. A second right guide rail and a second left guide rail are a pair of left and right guide rails for movably guiding the second left guide block and the pair of left and right guide blocks to each other along a pair of left and right trajectories extending along a specific horizontal axis. And a guide rail, wherein the vertical spring member is a member that generates an upward spring force on the table based on the base, and the link mechanism is separated left and right along a specific horizontal axis. It has a right link group and a left link group which are a pair of links, and the right link group is inclined in opposite directions when viewed along a specific line of sight, intersects in an X shape, and is rotatable at the intersection. A first right link and a second right link, which are a pair of links connected to each other, wherein the left link group is inclined in opposite directions when viewed along a specific line of sight, intersects in an X-shape, and rotates at the intersection. A first left link and a second left link, which are a pair of links freely connected to each other, wherein the first right link and the first left link are members whose upper ends are supported by the table. A pair of first rotation fixing members are rotatably connected around a first upper rotation center that is a center of rotation, and lower ends thereof are a pair of rotation centers that are the center of rotation of the first right guide block and the first left guide block. A second pivotally fixed member rotatably connected to each other around a first lower rotation center, wherein the second right link and the second left link are members whose lower ends are supported by the base; The rotation of the member about the second lower rotation center which is the rotation center Upper ends are rotatably connected to the second right guide block and the second left guide block, and are rotatably connected to each other around a pair of second upper rotation centers that are rotation centers.
The direction in which the upper and lower ends of the horizontal spring member approach each other to the set of the first right link and the second right link or the link of the set of the first left link and the second left link. A member that applies a spring force along the specific horizontal axis, wherein the specific horizontal axis is a horizontal axis extending in a specific horizontal direction, and a specific line of sight is a line of sight intersecting with the specific horizontal axis and extending in the horizontal direction. Yes, it was.

According to the configuration of the present invention, the specific horizontal axis is a horizontal axis extending in a specific horizontal direction. The specific line of sight is a line of sight intersecting with a specific horizontal axis and extending in the horizontal direction. A table can be loaded with an object. A base is supported on the foundation. A table support mechanism supports the table based on the base. The table support mechanism has a horizontal movement guide mechanism, a vertical spring member, a link mechanism, and a horizontal spring member. The horizontal movement guide mechanism has a first horizontal movement guide mechanism and a second horizontal movement guide mechanism which are arranged vertically apart. A first right guide block, a first left guide block, and a pair of left and right guides, wherein the first horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the base along a specific horizontal axis. It includes a first right guide rail and a first left guide rail, which are a pair of left and right guide rails for movably guiding the block along a pair of left and right trajectories extending along a specific horizontal axis. A second right guide block, a second left guide block, and a pair of left and right guide blocks, wherein the second horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the table along a specific horizontal axis. A second right guide rail and a second left guide rail, which are a pair of left and right guide rails for movably guiding each of them along a pair of left and right orbits extending along a specific horizontal axis. The vertical spring member is. An upward spring force is generated on the table based on the base. The link mechanism has a right link group and a left link group, which are a pair of left and right links arranged apart along a specific horizontal axis. A first right link and a second right link, which are a pair of links that are rotatably connected at a location where the right link group is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other. Including. A first left link and a second left link, which are a pair of links that are rotatably connected at a point where the left link set is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other Including. The first right link and the first left link have upper ends rotatably connected to a first rotation fixing member, which is a member supported by the table, about a first upper rotation center, which is a rotation center. The lower end is connected to the first right guide block and the first left guide block so as to be rotatable around a pair of first lower rotation centers that are rotation centers. The second right link and the second left link are rotatable around a second lower rotation center, which is a rotation center, on a second rotation fixing member that is a member whose lower end is supported by the base. The connected upper ends are connected to the second right guide block and the second left guide block so as to be rotatable around a pair of second upper rotation centers that are rotation centers. The upper and lower ends of the horizontal spring member approach each other to the set of the first right link and the second right link or the link of the set of the first left link and the second left link. A spring force is applied in the direction along the specific horizontal axis.
As a result, with the vertical movement of the table, the inertial forces in the right and left directions of the right link set and the left link set cancel each other out, and by selecting the link mechanism and the specifications of the spring, the desired combined reaction force is stably achieved. Can act on the table.

  Hereinafter, an object support device according to an embodiment of the present invention will be described. The present invention includes aspects in which any of the embodiments described below or two or more of them are combined.

The first rotation fixing member is fixed to and supported by the table, and the second rotation fixing member is fixed to and supported by the base.
With the configuration of the embodiment according to the present invention, the first rotation fixing member is fixed to and supported by the table. The second rotation fixing member is fixed to and supported by the base.
As a result, a desired combined reaction force can be stably applied to the table by selecting the specifications of the link mechanism and the spring.

Further, the first rotation fixing member is fixed to and supported by the table, and the second rotation fixing member restrains the movement in the direction of the specific horizontal axis and freely moves in the vertical direction with respect to the base. And is supported by the base.
With the configuration of the embodiment according to the present invention, the first rotation fixing member is fixed to and supported by the table. The second rotation fixing member is supported by the base so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the base.
As a result, the relative movement of the second rotation fixing member in the vertical direction is allowed, and by selecting the specifications of the link mechanism and the spring, a desired synthetic reaction force can be stably applied to the table.

Further, the first rotation fixing member is supported by the table so as to restrict the movement in the direction of the specific horizontal axis and allows relative movement in the vertical direction with respect to the table, and the second rotation fixing member is The base is fixed and supported.
With the configuration of the embodiment according to the present invention, the first rotation fixing member is supported by the table so as to restrict the movement of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the table, The second rotation fixing member is fixed to and supported by the base.
With the configuration of the embodiment according to the present invention, the first rotation fixing member is supported by the table so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the table. You. The second rotation fixing member is fixed to and supported by the base.
As a result, the relative movement of the first rotation fixing member in the vertical direction is allowed, and by selecting the specifications of the link mechanism and the spring, a desired synthetic reaction force can be stably applied to the table.

Further, the first rotation fixing member is supported by the table so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the table,
The second rotation fixing member is supported by the base so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the base.
With the configuration of the embodiment according to the present invention,
The first rotation fixing member is supported by the table so as to restrict the movement in the direction of the specific horizontal axis and to allow the vertical movement relative to the table.
The second rotation fixing member is supported by the base so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the base.
As a result, the first rotation fixing member and the second rotation fixing member are allowed to move relative to each other in the vertical direction, and by selecting the specifications of the link mechanism and the spring, a desired combined reaction force is stably applied to the table. Can work.

Further, when the pair of left and right orbits transit along a direction separated from each other along the specific horizontal axis, the orbits extend so as to be deviated to one of the up and down directions as the transitions.
With the configuration of the embodiment according to the present invention, when the pair of left and right orbits transitions along the direction separated from each other along the specific horizontal axis, they extend so as to be biased in one of the up and down directions as they transition.
As a result, by appropriately selecting the degree of deviation in one of the up and down directions as the transition is made, the desired combined reaction force can be applied to the table stably by selecting the specifications of the link mechanism and the spring.

In order to achieve the above object, an object supporting device for supporting an object according to the present invention includes a table on which an object is placed, a base supported on a base, and the table supported on the base. A table support mechanism, the table support mechanism has a horizontal movement guide mechanism, a vertical spring member, a link mechanism, and a horizontal spring member,
The horizontal movement guide mechanism has a first horizontal movement guide mechanism and a second horizontal movement guide mechanism which are arranged vertically apart, and the first horizontal movement guide mechanism has a specific horizontal axis with respect to the base. A first right guide block, a first left guide block, and a pair of left and right guide blocks, which are a pair of left and right guide blocks arranged apart from each other, respectively along a pair of left and right orbits extending along a specific horizontal axis. A first right guide rail and a first left guide rail, which are a pair of left and right guide rails for movably guiding, wherein the second horizontal movement guide mechanism is spaced apart from the table along a specific horizontal axis. A second right guide block, a second left guide block, and a pair of left and right guide blocks, which are a pair of left and right guide blocks, are movably guided along a pair of left and right trajectories extending along a specific horizontal axis. Including a second right guide rail and a second left guide rail which are a pair of right guide rails, the vertical spring member is a member that generates an upward spring force on the table based on the base, The link mechanism has a right link group and a left link group, which are a pair of left and right links arranged apart along a specific horizontal axis, and the right link group is opposite to each other when viewed along a specific line of sight. Includes a first right link and a second right link, which are a pair of links that are inclined and intersect in an X shape and are rotatably connected at the intersections, and the left link group is opposite to each other when viewed along a specific line of sight. A first left link and a second left link, which are a pair of links that are rotatably connected to each other at a location where they intersect in an X shape while intersecting in the direction, and the first right link and the first left link Is the upper end A pair of first pivots that are rotatably connected to the rotation fixing member about a first upper rotation center that is a center of rotation, and that have lower ends that are the centers of rotation of the first right guide block and the first left guide block. The second right link and the second left link are rotatably connected to each other around a lower rotation center, and a lower end of the second lower rotation center is a rotation center of the lower end of the second rotation fixing member. The upper end is rotatably connected to each other, and the upper end is rotatably connected to each of a pair of second upper rotation centers that are rotation centers of the second right guide block and the second left guide block. A direction in which upper and lower ends of a horizontal spring member approach each other to a pair of the first right link and the second right link or a link of a pair of the first left link and the second left link. Spring force along said specific horizontal axis Here, the specific horizontal axis is a horizontal axis extending in a specific horizontal direction, and the specific line of sight is a line of sight intersecting with the specific horizontal axis and extending in the horizontal direction.

According to the configuration of the present invention, the specific horizontal axis is a horizontal axis extending in a specific horizontal direction. The specific line of sight is a line of sight intersecting with a specific horizontal axis and extending in the horizontal direction. A table can be loaded with an object. A base is supported on the foundation. A table support mechanism supports the table based on the base. The table support mechanism has a horizontal movement guide mechanism, a vertical spring member, a link mechanism, and a horizontal spring member. The horizontal movement guide mechanism has a first horizontal movement guide mechanism and a second horizontal movement guide mechanism which are arranged vertically apart. A first right guide block, a first left guide block, and a pair of left and right guides, wherein the first horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the base along a specific horizontal axis. It includes a first right guide rail and a first left guide rail, which are a pair of left and right guide rails for movably guiding the block along a pair of left and right trajectories extending along a specific horizontal axis. A second right guide block, a second left guide block, and a pair of left and right guide blocks, wherein the second horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the table along a specific horizontal axis. A second right guide rail and a second left guide rail, which are a pair of left and right guide rails for movably guiding each of them along a pair of left and right orbits extending along a specific horizontal axis. The vertical spring member is. An upward spring force is generated on the table based on the base. The link mechanism has a right link group and a left link group, which are a pair of left and right links arranged apart along a specific horizontal axis. A first right link and a second right link, which are a pair of links that are rotatably connected at a location where the right link group is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other. Including. A first left link and a second left link, which are a pair of links that are rotatably connected at a point where the left link set is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other Including. The first right link and the first left link have their upper ends rotatably connected to a first rotation fixing member around a first upper rotation center which is the center of rotation, and the lower end has the first end. The right guide block and the first left guide block are rotatably connected to each other around a pair of first lower rotation centers that are rotation centers. The second right link and the second left link are rotatably connected at their lower ends to a second rotation fixing member around a second lower rotation center, which is the center of rotation, and have an upper end that is the second end. The right guide block and the second left guide block are connected to each other so as to be rotatable around a pair of second upper rotation centers that are rotation centers. The upper and lower ends of the horizontal spring member approach each other to the set of the first right link and the second right link or the link of the set of the first left link and the second left link. A spring force is applied in the direction along the specific horizontal axis.
As a result, with the vertical movement of the table, the inertial forces in the right and left directions of the right link set and the left link set cancel each other out, and by selecting the link mechanism and the specifications of the spring, the desired combined reaction force is stably achieved. Can act on the table.

  Hereinafter, an object support device according to an embodiment of the present invention will be described. The present invention includes aspects in which any of the embodiments described below or two or more of them are combined.

Further, the first rotation fixing member is fixed to and supported by the table, and the second rotation fixing member is not restrained by the base.
With the configuration of the embodiment according to the present invention, the first rotation fixing member is fixed to and supported by the table. The second rotation fixing member is not restrained by the base.
As a result, a desired combined reaction force can be stably applied to the table by selecting the specifications of the link mechanism and the spring.

Further, the first rotation fixing member is not restricted by the table, and the second rotation fixing member is fixed to and supported by the base.
With the configuration of the embodiment according to the present invention, the first rotation fixing member is not restricted by the table. The second rotation fixing member is fixed to and supported by the base.
As a result, a desired combined reaction force can be stably applied to the table by selecting the specifications of the link mechanism and the spring.

Further, the first rotation fixing member is not restricted by the table, and the second rotation fixing member is not restricted by the base.
With the configuration of the embodiment according to the present invention, the first rotation fixing member is not restricted by the table. The second rotation fixing member is not restrained by the base.
As a result, a desired combined reaction force can be stably applied to the table by selecting the specifications of the link mechanism and the spring.

Further, when the pair of left and right orbits transit along a direction separated from each other along the specific horizontal axis, the orbits extend so as to be deviated to one of the up and down directions as the transitions.
With the configuration of the embodiment according to the present invention, when the pair of left and right orbits transitions along the direction separated from each other along the specific horizontal axis, they extend so as to be biased in one of the up and down directions as they transition.
As a result, by appropriately selecting the degree of deviation in one of the up and down directions as the transition is made, the desired combined reaction force can be applied to the table stably by selecting the specifications of the link mechanism and the spring.

As described above, the object support device according to the present invention has the following effects by its procedure and configuration.
A pair of left and right guide rails for guiding a pair of left and right guide blocks along a trajectory extending in the horizontal direction are arranged on the table and the base, respectively, and an upward spring force is generated on the table based on the base to form an X-shape. A right link group and a left link group rotatably connected at a crossing point are arranged on the left and right, and the first right link and the first left link have upper ends supported by the table. And a lower end portion is rotatably connected to a pair of lower left and right guide blocks, and the second right link and the second left link are lower ends. Part is rotatably connected to a second rotation fixing member supported by the base, and an upper end is rotatably connected to each of the pair of left and right guide blocks above, and a link of a right link set or a left side. The links in the link set The spring force is applied to each of them in the direction approaching, so the vertical inertia forces of the right and left link sets cancel each other as the table moves up and down, and the link mechanism and spring specifications By selecting, a desired combined reaction force can be stably applied to the table.
Since the first rotation fixing member is fixed and supported on the table and the second rotation fixing member is fixed and supported on the base, the specifications of the link mechanism and the spring are selected. Thus, a desired combined reaction force can be stably applied to the table.
The first rotation fixing member is fixed to and supported by the table, and the second rotation fixing member restrains the movement in the left and right directions and allows the vertical movement relative to the base. Since the base is supported by the base, the relative movement of the second rotation fixing member in the vertical direction is allowed, and the desired combined reaction force can be stably achieved by selecting the specifications of the link mechanism and the spring. Can be acted upon.
The first rotation fixing member is supported by the table so as to restrain the movement in the left and right directions and allows relative movement in the vertical direction with respect to the table, and the second rotation fixing member is attached to the base. Because it was fixed and supported, allowing the vertical relative movement of the first rotation fixing member,
By selecting the specifications of the link mechanism and the spring, a desired combined reaction force can be stably applied to the table.
The first rotation fixing member is supported by the table so as to restrain the movement in the left and right directions and allows relative movement in the up and down direction with respect to the table, and the second rotation fixing member is movable in the left and right directions. The first rotation fixing member and the second rotation fixing member are supported by the base so as to restrain the movement and allow the vertical movement relative to the base. By allowing relative movement in the directions and selecting the specifications of the link mechanism and the spring, a desired combined reaction force can be stably applied to the table.
As the pair of left and right orbits transitions along the direction separated from each other along the specific horizontal axis, as they transition, they extend so as to be biased in one of the up and down directions. By appropriately selecting the link mechanism and the specifications of the spring, a desired combined reaction force can be stably applied to the table.
A pair of left and right guide rails for guiding a pair of left and right guide blocks along a trajectory extending in the horizontal direction are arranged on the table and the base, respectively, and an upward spring force is generated on the table based on the base to form an X-shape. A right link group and a left link group rotatably connected at a crossing point are arranged on the left and right, and the first right link and the first left link fix an upper end to a first rotation. A lower end is rotatably connected to a pair of lower left and right guide blocks, and the second right link and the second left link rotate a lower end by a second rotation. The upper end is rotatably connected to the fixing member and the upper end is rotatably connected to the pair of left and right guide blocks. The spring force is applied in a direction to approach the link of the right link set or the link of the left link set. Act on each, Based on the base, the relative left and right movement of the table is suppressed and the table is guided so as to be movable in the vertical direction. The inertia forces cancel each other, and by selecting the specifications of the link mechanism and the spring, a desired combined reaction force can be stably applied to the table.
The first rotation fixing member is fixed and supported on the table, and the second rotation fixing member is not restrained by the base. Can be applied to the table stably.
Since the first rotation fixing member is not restrained by the table and the second rotation fixing member is fixed to and supported by the base, the specifications of the link mechanism and the spring are selected. Thus, the desired synthetic reaction force can be stably applied to the table.
Since the first rotation fixing member is not restrained by the table and the second rotation fixing member is not restrained by the base, a desired synthetic countermeasure can be obtained by selecting the specifications of the link mechanism and the spring. The force can be applied to the table stably.
As the pair of left and right orbits transitions along the direction separated from each other along the specific horizontal axis, as they transition, they extend so as to be biased in one of the up and down directions. By appropriately selecting the link mechanism and the specifications of the spring, a desired combined reaction force can be stably applied to the table.
When viewed from above, the N table support mechanisms are arranged to surround the table and support the tables respectively, so that the N table support mechanisms are stably exempted from the table based on the base. We can support by shaking.
When two table support mechanisms are disposed apart from each other in the front-rear direction as viewed from above and support the tables respectively, the N table support mechanisms stably isolate the table based on the base. I can support it.
Therefore, it is possible to provide a seismic isolation device that has a simple structure and supports an object whose seismic isolation function is further adapted.

It is a key map of object support device 1 concerning a first embodiment of the present invention. It is a key map of object support device 2 concerning a first embodiment of the present invention. It is an operation explanatory view of the object support device 1 according to the first embodiment of the present invention. It is a key map of object support device 1 concerning a 2nd embodiment of the present invention. It is a key map of object support device 2 concerning a 2nd embodiment of the present invention. It is a key map of object support device 3 concerning a 2nd embodiment of the present invention. It is a key map of object support device 4 concerning a 2nd embodiment of the present invention. It is a key map of object support device 5 concerning a 2nd embodiment of the present invention. It is a key map of object support device 6 concerning a 2nd embodiment of the present invention. It is a key map of object support device 1 concerning a 3rd embodiment of the present invention. It is a key map of object support device 2 concerning a 3rd embodiment of the present invention. It is a key map of object support device 3 concerning a 3rd embodiment of the present invention. It is a key map of object support device 4 concerning a 3rd embodiment of the present invention. It is a key map of object support device 5 concerning a 3rd embodiment of the present invention. It is a key map of object support device 6 concerning a third embodiment of the present invention. 6 is a composite spring reaction force graph of the object support device according to the embodiment of the present invention. It is a comparative graph of the synthetic spring reaction force of the object support device concerning an embodiment of the present invention. It is an example of adoption of the object support device concerning the embodiment of the present invention. It is a side view of an example of adoption of an object support device concerning an embodiment of the present invention. It is a top view of an example of adoption of an object support device concerning an embodiment of the present invention. It is a conceptual diagram of the conventional object support device. It is an operation explanatory view of the conventional object support device.

  Hereinafter, the best mode for carrying out the present invention will be described with reference to the drawings.

First, an object support device according to an embodiment of the present invention will be described. FIG. 1 is a conceptual diagram of an object support device 1 according to the first embodiment of the present invention. FIG. 2 is a conceptual diagram of an object supporting device 2 according to the first embodiment of the present invention. FIG. 3 is an operation explanatory view of the object supporting device 1 according to the first embodiment of the present invention.
In the drawing, a bold vertical line with an arrow, a bold horizontal arrow with a line, and a bold horizontal arrow with a curve indicate the freedom of movement of the table 100 in the illustrated direction with respect to the base 200 having the illustrated structure. Indicates the degree.
The absence of a mark on a straight line or a curve means that the movement in the direction indicated by the arrow is not restricted.
The crosses in the straight lines and curves indicate that the movement in the direction indicated by the arrow is restricted.
The presence of a triangle on a straight line or a curve means that movement in the direction indicated by the arrow generates a restoring force within a certain limit.

The object support device is a device that supports the object 10.
The object support device is used for a device that supports the object 10 and isolates vibrations in the vertical direction.
The object support device may be used in combination with a device for isolating horizontal vibration.

The object support device includes a table 100, a base 200, and a table support mechanism 300.
The table 100 holds the object 10 thereon.
The base 200 is supported on a foundation.
The table support mechanism 300 is a mechanism that supports the table 100 based on the base 200.
Hereinafter, the structure of the table support mechanism 300 will be described.
Hereinafter, for convenience of description, a horizontal axis extending in a specific horizontal direction is referred to as a specific horizontal axis x, and a line of sight that intersects the specific horizontal axis x and extends in the horizontal direction is referred to as a specific line of sight.

  The table support mechanism 300 includes a horizontal movement guide mechanism 310, a vertical spring member 320, a link mechanism 330, and a horizontal spring member 340.

The horizontal movement guide mechanism 310 includes a first horizontal movement guide mechanism 311 and a second horizontal movement guide mechanism 312 which are arranged vertically apart.
The horizontal movement guide mechanism 310 may be composed of a first horizontal movement guide mechanism 311 and a second horizontal movement guide mechanism 312 that are sandwiched between the table 100 and the base 200 and are spaced apart in the vertical direction.
The first horizontal movement guide mechanism 311 may be supported by the base 200, and the second horizontal movement guide mechanism 312 may be supported by the table 100.

The first horizontal movement guide mechanism 311 includes a first right guide block 311Br, a first left guide block 311Bl, a first right guide rail 311Rr, and a first left guide rail 311Rl.
The first right guide block 311Br and the first left guide block 311B1 are a pair of left and right guide blocks that are disposed apart from the base 200 along the specific horizontal axis x.
The first right guide rail 311Rr and the first left guide rail 311Rl are a pair of left and right guide rails that movably guide a pair of left and right guide blocks along a pair of right and left trajectories g extending along the specific horizontal axis x. It is.
The first right guide rail 311Rr movably guides the first right guide block 311Br to a respective right trajectory g extending along the specific horizontal axis x. The first left guide rail 311Rl is a first left guide block. 311Bl are movably guided along a left orbit g extending along a specific horizontal axis x.
The first right guide rail 311Rr and the first left guide rail 311Rl may be fixed to the base 200.
FIGS. 1 and 2 show a state where the first right guide rail 311Rr and the first left guide rail 311Rl are fixed to the base 200. FIG.
FIG. 1 shows a state in which a first right guide rail 311Rr and a first left guide rail 311Rl are arranged on the left and right with a second rotation fixing member 332F described later interposed therebetween and fixed to the base 200. It is.
FIG. 2 shows a state in which the first right guide rail 311Rr and the first left guide rail 311Rl are sandwiched between a pair of left and right second rotation fixing members 332F described later and fixed to the base 200. It is.

The second horizontal movement guide mechanism 312 includes a second right guide block 312Br, a second left guide block 312Bl, a second right guide rail 312Rr, and a second left guide rail 312Rl.
The second right guide block 312Br and the second left guide block 312Bl are a pair of left and right guide blocks arranged apart from the table 100 along the specific horizontal axis x.
The second right guide rail 312Rr and the second left guide rail 312Rl are a pair of left and right guide rails for movably guiding a pair of left and right guide blocks along a pair of right and left trajectories g extending along the specific horizontal axis x. It is.
The second right guide rail 312Rr movably guides the second right guide block 312Br along a right trajectory g extending along the specific horizontal axis x. The second left guide rail 312Rl is a second left guide block. 312Bl are movably guided along a left trajectory g extending along a specific horizontal axis x.
The second right guide rail 312Rr and the second left guide rail 312Rl may be fixed to the table 100.
FIGS. 1 and 2 show how the second right guide rail 312Rr and the second left guide rail 312Rl are fixed to the table 100. FIG.
FIG. 1 shows a state in which the second right guide rail 312Rr and the second left guide rail 312Rl are arranged on the left and right with a first rotation fixing member 331F described later interposed therebetween and fixed to the table 100. .
FIG. 2 shows a state in which the second right guide rail 312Rr and the second left guide rail 312Rl are interposed between a pair of left and right first rotation fixing members 331F described later and fixed to the table 100. .

The vertical spring member 320 is a member that generates an upward spring force on the table 100 based on the base 200.
The vertical spring member 320 has a spring constant selected by design.
The vertical spring member 320 may be a compression spring.
For example, the compression spring has a lower end connected to the base 200 and an upper end connected to the table 100, and applies an upward compressive force to the table 100.
The vertical spring member 320 may be a tension spring.
For example, the tension spring has a lower end connected to the table 100 and an upper end connected to the base, and applies an upward tensile force to the table 100.
1 and 2 show an example of a structure in which the vertical spring member 320 generates an upward spring force on the table 100 based on the base 200. FIG.
The upward hollow arrow in the figure indicates the spring force applied to the table 100 by the vertical spring member 320.
1 and 2 schematically show a state in which a compression spring is provided between the table 100 and the base 200. FIG.

The link mechanism 330 is a mechanism that generates an upward spring force on the table 100 based on the base 200.
The link mechanism 330 transmits a spring force generated by a horizontal spring member 340 described later, and generates an upward spring force on the table 100 based on the base 200.
The upward spring force generated by the link mechanism 330 may have a negative spring constant whose magnitude decreases as the table 100 moves downward in a part of the range in which the table 100 moves up and down.

The link mechanism 330 includes a right link group 330r and a left link group 330l, which are a pair of left and right links arranged apart along the specific horizontal axis x.
The specifications of the right link set 330r and the specifications of the left link set 330l are substantially the same except that the left and right directions are different.

The right link set 330r is inclined in opposite directions when viewed along a specific line of sight, intersects in an X-shape, and a first right link 331r and a second right link, which are a pair of links rotatably connected at the intersection. A link 332r.
For example, the right link set 330r is a pair of links which are inclined in opposite directions to each other when viewed along a specific line of sight and intersect in an X-shape, and are rotatably connected by the right link connection shaft 333r at the intersection. It is composed of one right link 331r and a second right link 332r.
A first left link 331l and a second left link, which are a pair of links in which the left link set 330l is inclined in opposite directions when viewed along a specific line of sight and intersects in an X-shape and is rotatably connected at the intersection. 332l.
For example, the left link set 330l is a pair of links that are rotatably connected by a left link connection shaft 333l at a location where the left link set 330l is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape. It is composed of a left link 331l and a second left link 332l.

The first right link 331r and the first left link 331l are rotatably connected at their upper ends around a first upper rotation center 331Cu, which is the center of rotation, and have lower ends connected to the first right guide block 311Br. The first left guide block 311Bl and the first left guide block 311Bl are rotatably connected to each other around a pair of first lower rotation centers 331Cd which are rotation centers.
The first right link 331r and the first left link 331l rotate around an upper end around a first upper rotation center 331Cu, which is a rotation center of a first rotation fixing member 331F which is a member supported by the table 100. The lower end portions may be rotatably connected to the first right guide block 311Br and the first left guide block 311Bl so as to be rotatable around a pair of first lower rotation centers 331Cd which are rotation centers. Good.
For example, the first right link 331r is rotatably connected to a first rotation fixing member 331F whose upper end is a member supported by the table 100 around a first upper rotation center 331Cu which is a rotation center, The lower end is connected to the first right guide block 311Br so as to be rotatable around a first lower rotation center 331Cd which is a rotation center.
For example, the first left link 331l is rotatably connected around a first upper rotation center 331Cu, which is a center of rotation, to a first rotation fixing member 331F, which is a member whose upper end is supported by the table 100, The lower end is connected to the first left guide block 311Bl so as to be rotatable around a first lower rotation center 331Cd which is a rotation center.

The second right link 332r and the second left link 332l are rotatably connected at their lower ends around a second lower rotation center 332Cd, which is the center of rotation, and have their upper ends connected to the second right guide block 312Br. The second left guide block 312Bl is rotatably connected to the second left guide block 312B1 around a pair of second upper rotation centers 332Cu which are rotation centers.
The second right link 332r and the second left link 332l are rotated around a second lower rotation center 332Cd, which is a rotation center of a second rotation fixing member 332F that is a member whose lower end is supported by the base 200. The upper ends are rotatably connected to the second right guide block 312Br and the second left guide block 312Bl. Good.
For example, the second right link 332r is rotatably connected around a second lower rotation center 332Cd, which is a rotation center, to a second rotation fixing member 332F, a lower end of which is supported by the base 200. The upper end is connected to the second right guide block 312Br so as to be rotatable around a second upper rotation center 332Cu which is a rotation center.
For example, the second left link 332l is rotatably connected around a second lower rotation center 332Cd, which is the center of rotation, to a second rotation fixing member 332F, a lower end of which is supported by the base 200. The upper end is connected to the second left guide block 312Bl so as to be rotatable around a second upper rotation center 332Cu which is a rotation center.

When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, the first upper rotation center 331Cu at the upper end of the first right link 331r and the first upper rotation center 331Cu at the upper end of the first left link 331l May match.
When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, the first upper rotation center 331Cu at the upper end of the first right link 331r and the first upper rotation center 331Cu at the upper end of the first left link 331l May be separated by a predetermined distance H in the left-right direction.

When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, a second lower rotation center 332Cd at the lower end of the second right link 332r and a second lower rotation center 332Cd at the lower end of the second left link 332l May match.
When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, a second lower rotation center 332Cd at the lower end of the second right link 332r and a second lower rotation center 332Cd at the lower end of the second left link 332l May be separated by a predetermined distance H in the left-right direction.

The first rotation fixing member 331F is fixed to and supported by the table 100.
The second rotation fixing member 332F is fixed to and supported by the base 200.
1 and 2 show a state where the first rotation fixing member 331F is fixed and supported on the table 100, and the second rotation fixing member 332F is fixed and supported on the base 200.
FIG. 1 shows a state in which a first rotation fixing member 331F is arranged at a position sandwiched between a second right guide rail 312Rr and a second left guide rail 312R1, and is fixed and supported on the table 100, and is provided with a second rotation fixing member 332F. Is disposed at a position between the second first right guide rail 311Rr and the first left guide rail 311R1, and is fixed to and supported by the base 200.
FIG. 2 shows a pair of left and right first rotation fixing members 331F arranged at positions sandwiching the second right guide rail 312Rr and the second left guide rail 312R1, fixed and supported on the table 100, and a pair of left and right second rotation guide members 331F. The rotation fixing member 332F is arranged at a position sandwiching the first right guide rail 311Rr and the first left guide rail 311R1, and is fixed and supported by the base 200.

The upper and lower ends of the horizontal spring member 340 approach the pair of the first right link 331r and the second right link 332r or the pair of the first left link 331l and the second left link 332l. It is a member that applies a spring force in a direction along a specific horizontal axis x.
1 and 2, the horizontal spring member 340 is connected to a pair of a first right link 331r and a second right link 332r or a pair of a first left link 331l and a second left link 332l to each other above and below. An example of a structure in which a spring force is applied along a specific horizontal axis x in a direction in which a lower end approaches is shown.
The horizontal hollow arrow in the drawing indicates the spring force that the horizontal spring member 340 acts on the link mechanism 330.

The horizontal spring member 340 is connected to at least one of the pair of the first right link 331r and the first left link 331l or the second right link 332r and the second left link 332l along the specific horizontal axis x. A spring force may be applied to each of them so as to approach each other.
For example, the horizontal spring member 340 applies a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.
FIG. 1 shows that the horizontal spring member 340 applies a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.
For example, the horizontal spring member 340 applies a spring force to the second right link 332r and the second left link 332l in a direction approaching each other along the specific horizontal axis x.

The horizontal spring member 340 has both ends connected to the first right link 331r and the first left link 331l, respectively, in a direction approaching the first right link 331r and the first left link 331l along the specific horizontal axis x. A spring force may be applied to each.
The horizontal spring member 340 includes a pair of springs having one end connected to the first right link 331r and the first left link 331l, and the other end connected to the base 200, and the first right link 331r and the first right link 331r. A spring force may be applied to each of the left links 331l in a direction approaching each other along the specific horizontal axis x.
The horizontal spring member 340 has both ends connected to the second right link 332r and the second left link 332l, respectively, so that the second right link 332r and the second left link 332l approach each other along the specific horizontal axis x. A spring force may be applied to each.
The horizontal spring member 340 includes a pair of springs having one end connected to the second right link 332r and the second left link 332l, and the other end connected to the table 100, and includes a second right link 332r and a second left link. A spring force may be applied to each of the links 332l in a direction approaching each other along a specific horizontal axis x.

The upper and lower ends of the horizontal spring member 340 approach the set of the first right link 331r and the second right link 332r and the set of the first left link 331l and the second left link 332l. It may be constituted by a pair of left and right springs that apply a spring force in the direction along the specific horizontal axis x.
In FIG. 2, a pair of left and right springs, which are horizontal spring members 340, are formed of a pair of a first right link 331 r and a second right link 332 r and a pair of a first left link 331 l and a second left link 332 l. The manner in which a spring force is applied to the lower end along a specific horizontal axis x in a direction in which the upper and lower ends approach each other is shown.

The horizontal spring member 340 has a spring constant selected by design.
The horizontal spring member 340 may be a compression spring.
A pair of compression springs may apply a spring force to the other end of the pair of left and right link mechanisms 330 in a direction approaching each other along the specific horizontal axis x.
The horizontal spring member 340 may be a tension spring.
A tension spring may apply a spring force to the other end of the pair of left and right link mechanisms 330 in a direction approaching each other along the specific horizontal axis x.

The horizontal spring member 340 may apply a spring force to the pair of left and right links 331r and 331l or the pair of left and right links 332r and 332l in a direction approaching each other along the specific horizontal axis x via the guide block. .
In FIG. 1, a tension spring has one end connected to the lower end of the first right link 331r via a first right guide block 311Br, and the other end connected to the lower end of the first left link 331l. And a lower left end of the first right link 331r and a lower end of the first left link 331l in a direction approaching each other along a specific horizontal axis x. Are applied to each of them.

Next, an object support device according to a second embodiment of the present invention will be described with reference to the drawings.
FIG. 4 is a conceptual diagram of an object supporting device 1 according to the second embodiment of the present invention. FIG. 5 is a conceptual diagram of an object supporting device 2 according to the second embodiment of the present invention. FIG. 6 is a conceptual diagram of an object supporting device 3 according to the second embodiment of the present invention. FIG. 7 is a conceptual diagram of an object supporting device 4 according to the second embodiment of the present invention. FIG. 8 is a conceptual diagram of an object supporting device 5 according to the second embodiment of the present invention. FIG. 9 is a conceptual diagram of an object supporting device 6 according to the second embodiment of the present invention.

The object support device is a device that supports an object.
The object support device is used for a device that supports the object 10 and isolates vibrations in the vertical direction.
The object support device may be used in combination with a device for isolating horizontal vibration.

The object support device includes a table 100, a base 200, and a table support mechanism 300.
The table 100 holds the object 10 thereon.
The base 200 is supported on a foundation.
The table support mechanism 300 is a mechanism that supports the table 100 based on the base 200.
Hereinafter, the structure of the table support mechanism 300 will be described.
Hereinafter, for convenience of description, a horizontal axis extending in a specific horizontal direction is referred to as a specific horizontal axis x, and a line of sight that intersects the specific horizontal axis x and extends in the horizontal direction is referred to as a specific line of sight.

  The table support mechanism 300 includes a horizontal movement guide mechanism 310, a vertical spring member 320, a link mechanism 330, and a horizontal spring member 340.

A pair of left and right orbits g transition along directions that are separated from each other along the specific horizontal axis x.
The trajectory g may be horizontal.
The configurations of the horizontal movement guide mechanism 310, the vertical spring member 320, and the horizontal spring member 340 are the same as those of the object supporting device 1 according to the first embodiment of the present invention, and thus the description thereof is omitted.

The link mechanism 330 is a mechanism that generates an upward spring force on the table 100 based on the base 200.
The upward spring force generated by the link mechanism 330 has a negative spring constant whose magnitude decreases as the table 100 moves downward in a part of the range in which the table 100 moves up and down.

  Since the main configuration of the link mechanism 330 is the same as that of the object support device according to the first embodiment of the present invention, only different points will be described.

  One of the first rotation fixing member 331F and the second rotation fixing member 332F is fixed, and the other of the first rotation fixing member 331F and the second rotation fixing member 332F moves in the direction of the specific horizontal axis x. It is constrained and supported so as to be able to move vertically relative to the base 200 freely.

The first rotation fixing member 331F is fixed to and supported by the table 100, and the second rotation fixing member 332F restricts the movement in the direction of the specific horizontal axis x so that the relative movement in the vertical direction with respect to the base 200 can be freely performed. It may be supported by the base 200 as shown in FIG.
In FIG. 4, the rotation fixing member guide mechanism 334 controls the second rotation fixing member 332F so as to restrict the movement in the direction of the specific horizontal axis x and to allow the vertical movement relative to the base 200. A state of being supported by the table 200 is shown.
The second rotation fixing member 332 </ b> F is guided by the rotation fixing member guide mechanism 334 fixed to the base 200, and can move vertically with respect to the base 200.
The horizontal spring member 340 may apply a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.
FIG. 4 shows that the horizontal spring member 340 applies a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.
The horizontal spring member 340 may apply a spring force to the second right link 332r and the second left link 332l so as to approach each other along the specific horizontal axis x.

The first rotation fixing member 331F is supported by the table 100 so as to restrict the movement in the direction of the specific horizontal axis x and to allow the vertical movement relative to the table 100. It may be fixed and supported on the base 200.
In FIG. 5, the rotation fixing member guide mechanism 334 controls the table 100 such that the first rotation fixing member 331F restricts the movement in the direction of the specific horizontal axis x and allows the vertical movement relative to the table 100. Is shown.
The first rotation fixing member 331 </ b> F is guided by a rotation fixing member guide mechanism 334 fixed to the table 100, and can relatively move vertically with respect to the table 100.
The horizontal spring member 340 may apply a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.
The horizontal spring member 340 may apply a spring force to the second right link 332r and the second left link 332l so as to approach each other along the specific horizontal axis x.
In FIG. 5, the horizontal spring member 340 applies a spring force to the second right link 332r and the second left link 332l in such a direction as to approach each other along the specific horizontal axis x. The situation is shown.

The first rotation fixing member 331F is supported by the table 100 so as to restrict the movement in the direction of the specific horizontal axis x and to allow the vertical movement relative to the table 100, and the second rotation fixing member 332F It may be supported by the base 200 so as to restrict the movement in the direction of the specific horizontal axis x and allow the vertical movement relative to the base 200.
FIG. 6 shows a configuration in which a pair of upper and lower rotation fixing member guide mechanisms 334 restrict the movement of the first rotation fixing member 331F in the direction of the specific horizontal axis x so as to freely move in the vertical direction with respect to the table 100. A state in which the second rotation fixing member 332F is supported on the base 200 so as to restrict the movement in the direction of the specific horizontal axis x and allow the vertical movement relative to the base 200. Is shown.
The first rotation fixing member 331 </ b> F is guided by a rotation fixing member guide mechanism 334 fixed to the table 100, and can relatively move vertically with respect to the table 100.
The second rotation fixing member 332 </ b> F is guided by the rotation fixing member guide mechanism 334 fixed to the base 200, and can move vertically with respect to the base 200.
The horizontal spring member 340 may apply a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.
The horizontal spring member 340 may apply a spring force to the second right link 332l and the second left link 332l in a direction approaching each other along the specific horizontal axis x.
FIG. 6 shows that the horizontal spring member 340 applies a spring force to the second right link 332l and the second left link 332l in a direction approaching each other along the specific horizontal axis x.

A pair of left and right trajectories g may transition along directions separated from each other along the specific horizontal axis x.
FIGS. 7, 8, and 9 show a state where the pair of left and right orbits g transitions along the direction that is separated from each other along the specific horizontal axis x.

When the pair of left and right orbits g transition along the direction that is separated from each other along the specific horizontal axis x, they may extend so as to be biased toward one of the up and down directions as the transition progresses.
For example, the pair of left and right trajectories g may extend so as to be deviated upward at a constant rate as the transitions occur when the trajectories g transition along the direction separated from each other along the specific horizontal axis x.
FIGS. 7, 8, and 9 show that the trajectory g is linear, and is shifted at a fixed ratio toward one of the upward directions as the trajectory transits along a specific horizontal axis x in a direction away from each other. It shows how it extends.
For example, the pair of left and right orbits g may extend so as to be deviated downward at a fixed ratio as the transitions occur when the pair of right and left orbits g transitions along the specific horizontal axis x.
A pair of right and left tracks may extend along a concave curve.
A pair of left and right orbits may extend along a downwardly concave curve.
The pair of left and right tracks may extend along a pair of left and right curves having a predetermined curvature that is concave downward.

When the trajectory g of the first right guide rail 311Rr and the first left guide rail 311Rl transitions along the specific horizontal axis x in a direction away from each other, the trajectory g extends so as to be deviated to one of the up and down directions as the transition progresses.
FIG. 7 shows that the second rotation fixing member 332 </ b> F is guided by the rotation fixing member guide mechanism 334 fixed to the base 200, and can relatively move in the vertical direction with respect to the base 200. A trajectory g of 311Rr and the first left guide rail 311Rl shows a state in which the trajectory g extends toward one of the up and down directions as the transition progresses along the specific horizontal axis x in a direction away from each other.

The trajectory g of the second right guide rail 312Rr and the second left guide rail 312Rl may extend so as to be biased in one of the up and down directions as the trajectory transitions along the specific horizontal axis x and separates from each other. .
FIG. 8 shows that the first rotation fixing member 331F is guided by the rotation fixing member guide mechanism 334 fixed to the table 100, and can relatively move up and down with respect to the table 100. It is shown that the trajectory g with the second left guide rail 312Rl transitions along the specific horizontal axis x in a direction away from each other, and extends so as to be biased in one of the up and down directions as the transition progresses.

When the trajectory g of the first right guide rail 311Rr and the first left guide rail 311Rl transitions along a direction separated from each other along the specific horizontal axis x, the trajectory g extends so as to be biased in one of the up and down directions as the transition progresses. The trajectory g of the right guide rail 312Rr and the second left guide rail 312Rl may extend so as to be biased in one of the up and down directions as the trajectory transitions along the specific horizontal axis x in a direction away from each other.
FIG. 9 shows that the first rotation fixing member 331F is guided by the rotation fixing member guide mechanism 334 fixed to the table 100, and can relatively move up and down with respect to the table 100. Is guided by a rotation fixing member guide mechanism 334 fixed to the base 200, and can move in the vertical direction relative to the base 200, so that the track between the first right guide rail 311Rr and the first left guide rail 311Rl g transitions along the direction separated from each other along the specific horizontal axis x, and extends so as to be deviated to one of the up and down directions as the transition progresses, and the trajectory g of the second right guide rail 312Rr and the second left guide rail 312Rl becomes And a transition along a direction that is separated from each other along the specific horizontal axis x.

Next, an object support device according to a third embodiment of the present invention will be described with reference to the drawings.
FIG. 10 is an operation explanatory view of the object supporting device 1 according to the third embodiment of the present invention. FIG. 11 is an operation explanatory view of the object supporting device 2 according to the third embodiment of the present invention. FIG. 12 is a conceptual diagram of an object supporting device 3 according to the third embodiment of the present invention. FIG. 13 is a conceptual diagram of an object supporting device 4 according to the third embodiment of the present invention. FIG. 14 is a conceptual diagram of an object supporting device 5 according to the third embodiment of the present invention. FIG. 15 is a conceptual diagram of an object supporting device 6 according to the third embodiment of the present invention.

The object support device is a device that supports an object.
The object support device is used for a device that supports the object 10 and isolates vibrations in the vertical direction.
The object support device may be used in combination with a device for isolating horizontal vibration.

The object support device includes a table 100, a base 200, and a table support mechanism 300.
The table 100 holds the object 10 thereon.
The base 200 is supported on a foundation.
The table support mechanism 300 is a mechanism that supports the table 100 based on the base 200.
Hereinafter, the structure of the table support mechanism 300 will be described.
Hereinafter, for convenience of description, a horizontal axis extending in a specific horizontal direction is referred to as a specific horizontal axis x, and a line of sight that intersects the specific horizontal axis x and extends in the horizontal direction is referred to as a specific line of sight.

The table support mechanism 300 includes a horizontal movement guide mechanism 310, a vertical spring member 320, a link mechanism 330, and a horizontal spring member 340.
The table support mechanism 300 may include a horizontal movement guide mechanism 310, a vertical spring member 320, a link mechanism 330, a horizontal spring member 340, and a vertical movement guide mechanism (not shown).

  The structure of the horizontal movement guide mechanism 310, the vertical spring member 320, and the horizontal spring member 340 is the same as that of the table support mechanism 300 according to the first embodiment 1 of the present invention, and therefore different points will be described.

The link mechanism 330 is a mechanism that generates an upward spring force on the table 100 based on the base 200.
The upward spring force generated by the link mechanism 330 has a negative spring constant whose magnitude decreases as the table 100 moves downward in a part of the range in which the table 100 moves up and down.

  The link mechanism 330 includes a right link group 330r and a left link group 330l, which are a pair of left and right links arranged apart along the specific horizontal axis x.

A first right link 331r and a second right link, which are a pair of links, where the right link set 330r is inclined in opposite directions when viewed along a specific line of sight and intersects in an X shape and is rotatably connected at the intersection. 332r.
For example, the right link set 330r is a pair of links that are rotatably connected by a right link connection shaft 333r at a location where the right link set 330r is inclined in opposite directions to each other and crosses in an X shape when viewed along a specific line of sight. It is composed of a right link 331r and a second right link 332r.
A first left link 331l and a second left link, which are a pair of links in which the left link set 330l is inclined in opposite directions when viewed along a specific line of sight and intersects in an X-shape and is rotatably connected at the intersection. 332l.
For example, the left link set 330l is a pair of links that are rotatably connected by a left link connection shaft 333l at a location where the left link set 330l is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape. It is composed of a left link 331l and a second left link 332l.

The first right link 331r and the first left link 331l have their upper ends rotatably connected to a first rotation fixing member 331F around a first upper rotation center 331Cu, which is the center of rotation, and a lower end. Are connected to the first right guide block 311Br and the first left guide block 311Bl so as to be rotatable around a pair of first lower rotation centers 331Cd which are rotation centers.
For example, a first right link 331r is rotatably connected at an upper end thereof to a first rotation fixing member 331F around a first upper rotation center 331Cu which is a rotation center, and guides a lower end to a first right guide. The blocks 311Br are rotatably connected to a first lower rotation center 331Cd, which is a rotation center, respectively.
For example, the first left link 331l is rotatably connected at an upper end thereof to a first rotation fixing member 331F around a first upper rotation center 331Cu which is a center of rotation, and a lower end thereof is guided by a first left guide. The block 311Bl and the block 311Bl are rotatably connected to each other around a first lower rotation center 331Cd which is a rotation center.

The second right link 332r and the second left link 332l are rotatably connected at their lower ends to a second rotation fixing member 332F around a second lower rotation center 322Cu which is a rotation center, and an upper end. Are rotatably connected to a second right guide block 312Br and a second left guide block 312Bl so as to be rotatable around a pair of second upper rotation centers 332Cu which are rotation centers.
For example, the second right link 332r is rotatably connected at the lower end thereof to the second rotation fixing member 332F around the second lower rotation center 322Cu which is the center of rotation, and guides the upper end to the second right guide. Each of the blocks 312Br is rotatably connected to a second upper rotation center 332Cu which is a rotation center.
For example, the second left link 332l is rotatably connected at a lower end thereof to a second rotation fixing member 332F around a second lower rotation center 322Cu which is a rotation center, and connects the upper end to the second left fixing member 332F. The guide block 312Bl is rotatably connected to a second upper rotation center 332Cu which is a rotation center.

When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, the first upper rotation center 331Cu at the upper end of the first right link 331r and the first upper rotation center 331Cu at the upper end of the first left link 331l May match.
When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, the first upper rotation center 331Cu at the upper end of the first right link 331r and the first upper rotation center 331Cu at the upper end of the first left link 331l May be separated by a predetermined distance H.

When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, a second lower rotation center 332Cd at the lower end of the second right link 332r and a second lower rotation center 332Cd at the lower end of the second left link 332l May match.
When viewed horizontally so as to be divided into right and left link sets 330r and left link sets 330l, a second lower rotation center 332Cd at the lower end of the second right link 332r and a second lower rotation center 332Cd at the lower end of the second left link 332l May be separated by a predetermined distance H.

The first rotation fixing member 331F may be fixed and supported on the table 100, and the second rotation fixing member 332F may not be restricted by the base 200.
The first rotation fixing member 331F is fixed to and supported by the table 100, and the second rotation fixing member 332F is not restrained by the base 200, and can move vertically and horizontally relative to the base 200. You may.
For example, the first rotation fixing member 331F may be fixed and supported on the table 100, and the second rotation fixing member 332F may not be restricted by the base 200.
In FIG. 10, the first rotation fixing member 331F is fixed to and supported by the table 100, and the second rotation fixing member 332F is not restricted by the base 200, and is vertically and horizontally relative to the base 200. The state in which it is relatively movable is shown.
The upper and lower ends of the horizontal spring member 340 approach the pair of the first right link 331r and the second right link 332r or the pair of the first left link 331l and the second left link 332l. It is a member that applies a spring force in a direction along a specific horizontal axis x.
The horizontal spring member 340 may apply a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.
The horizontal spring member 340 may apply a spring force to the second right link 332r and the second left link 332l so as to approach each other along the specific horizontal axis x.

The first rotation fixing member 331F is not restricted to the table 100, and the second rotation fixing member 332F may be fixed to and supported by the base 200.
The first rotation fixing member 331F is not restrained by the table 100, is relatively movable in the vertical and horizontal directions with respect to the table 100, and the second rotation fixing member 332F is fixed to and supported by the base 200. You may.
For example, the first rotation fixing member 331F is not restricted by the table 100, and the second rotation fixing member 332F is fixed to and supported by the base 200.
In FIG. 11, the first rotation fixing member 331F is not restricted by the table 100, is relatively movable vertically and horizontally relative to the table 100, and the second rotation fixing member 332F is fixed to the base 200. The state of being supported is shown.
The horizontal spring member 340 may apply a spring force to the second right link 332r and the second left link 332l so as to approach each other along the specific horizontal axis x.
The horizontal spring member 340 may apply a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.

The first rotation fixing member 331F may not be restricted by the table 100, and the second rotation fixing member 332F may not be restricted by the base 200.
The first rotation fixing member 331F is not restrained by the table 100, is relatively movable vertically and horizontally relative to the table 100, and the second rotation fixing member 332F is not restrained by the base 200, It may be movable relative to the base 200 in the vertical and horizontal directions.
In FIG. 12, the first rotation fixing member 331F is not restricted by the table 100 and is relatively movable in the vertical and horizontal directions with respect to the table 100, and the second rotation fixing member 332F is This shows a state in which the base 200 is not restricted but is relatively movable in the vertical and horizontal directions.
The horizontal spring member 340 may apply a spring force to the second right link 332r and the second left link 332l so as to approach each other along the specific horizontal axis x.
The horizontal spring member 340 may apply a spring force to the first right link 331r and the first left link 331l in a direction approaching each other along the specific horizontal axis x.

The table support structure having the structure of FIG. 12 requires a vertical movement guide mechanism.
The up-down movement guide mechanism (not shown) is a mechanism that suppresses the relative left-right movement of the table 100 based on the base 200 and guides the table 100 so as to be movable up and down.
For example, the vertical spring member 320 may have lateral rigidity and function as a vertical movement guide mechanism.

A pair of left and right trajectories g may transition along directions separated from each other along the specific horizontal axis x.
13, 14, and 15 show a state where the pair of left and right orbits g transitions along the direction that is separated from each other along the specific horizontal axis x.

When the pair of left and right orbits g transition along the direction that is separated from each other along the specific horizontal axis x, they may extend so as to be biased toward one of the up and down directions as the transition progresses.
For example, the pair of left and right trajectories g may extend so as to be deviated upward at a constant rate as the transitions occur when the trajectories g transition along the direction separated from each other along the specific horizontal axis x.
13, 14, and 15 show that the trajectory g is linear, and is shifted at a fixed ratio toward one of the upward directions as the trajectory transitions along a specific horizontal axis x in a direction away from each other. It shows how it extends.
For example, the pair of left and right orbits g may extend so as to be deviated downward at a fixed ratio as the transitions occur when the pair of right and left orbits g transitions along the specific horizontal axis x.
A pair of right and left tracks may extend along a concave curve.
A pair of left and right orbits may extend along a downwardly concave curve.
The pair of left and right tracks may extend along a pair of left and right curves having a predetermined curvature that is concave downward.

When the trajectory g of the first right guide rail 311Rr and the first left guide rail 311Rl transitions along the specific horizontal axis x in a direction away from each other, the trajectory g extends so as to be deviated to one of the up and down directions as the transition progresses.
FIG. 13 shows that the second rotation fixing member 332F is not constrained by the base 200, and can move vertically and horizontally relative to the base 200, and the first right guide rail 311Rr and the first left guide rail 311Rl. 5 shows a state in which the trajectory g of と changes along the specific horizontal axis x in a direction in which the trajectory is separated from each other, and as the transition progresses, the trajectory g is biased in one of the up and down directions.

The trajectory g of the second right guide rail 312Rr and the second left guide rail 312Rl may extend so as to be biased in one of the up and down directions as the trajectory transitions along the specific horizontal axis x and separates from each other. .
FIG. 14 shows that the first rotation fixing member 331F is not restrained by the table 100, and can move vertically and horizontally relative to the table 100, and the second right guide rail 312Rr and the second left guide rail 312Rl When the trajectory g transitions along a direction that is separated from each other along the specific horizontal axis x, the trajectory g extends so as to be deviated to one of the up and down directions as the transition progresses.

When the trajectory g of the first right guide rail 311Rr and the first left guide rail 311Rl transitions along a direction separated from each other along the specific horizontal axis x, the trajectory g extends so as to be biased in one of the up and down directions as the transition progresses. The trajectory g of the right guide rail 312Rr and the second left guide rail 312Rl may extend so as to be biased in one of the up and down directions as the trajectory transitions along the specific horizontal axis x in a direction away from each other.
FIG. 15 shows that the first rotation fixing member 331F is not restrained by the table 100 but can move relatively in the vertical and horizontal directions with respect to the table 100, and the second rotation fixing member 332F is restrained by the base 200. The first right guide rail 311Rr and the first left guide rail 311Rl are separated from each other along the specific horizontal axis x. As the transition progresses, it extends so as to be deviated to one of the up and down directions, and the trajectory g of the second right guide rail 312Rr and the second left guide rail 312Rl transitions along the direction separated from each other along the specific horizontal axis x. Then, it shows a state where it extends so as to be deviated to one of the up and down directions as it makes a transition.

Hereinafter, a combined spring reaction force of the object support mechanism according to the embodiment of the present invention will be described with reference to the drawings.
FIG. 16 is a composite spring reaction force graph of the object support device according to the embodiment of the present invention.
The solid line in FIG. 16 is a curve showing the relationship between the vertical displacement (m) of the table 100 and the vertical reaction force (N) acting on the table 100 by the spring force of the horizontal spring member 340.
The solid dashed line in FIG. 16 is a curve showing the relationship between the vertical displacement (m) of the table 100 and the vertical reaction force (N) acting on the table 100 by the spring force of the vertical spring member 320.
The thin broken line in FIG. 16 is a curve showing the relationship between the vertical displacement (m) of the table 100 and the resultant spring reaction force.
By selecting the locus g and the position of one end of the link, the characteristics of the resultant spring reaction force can be selected.

FIG. 17 is a comparison graph of the combined spring reaction force of the object support devices 4 to 6 according to the second and third embodiments of the present invention.
FIGS. 17 (A) to 17 (D) show the characteristics of the combined spring reaction force in which the shape and the specifications are the same except for the shape of the trajectory of the guide rail, and the trajectory of the guide rail is as follows. It is.
(A) The embodiment in which the locus is a concave curve below.
(B) The embodiment in which the trajectory is an upward concave curve.
(C) In the embodiment, the trajectory is a straight line that rises as the trajectory changes outward.
(D) Although the embodiment is a straight line that descends as the trajectory transitions outward.
In the figures, the combined spring reaction force indicated by the broken line is that of the table support structure shown in FIGS. 1 and 2 having a locus g whose locus is a horizontal straight line, and is shown for comparison.
A comparison of (A) to (D) in FIG. 17 reveals the following.

  When one end of the link is the upper end and the other end guided by the guide rail of the link is the lower end, the center of curvature of the guide rail is located above the locus g. When the inclination is set to be upward as the inclination of the trajectory transitions to the left or right, the spring constant of the negative spring is increased as compared with the conventional table support structure having the horizontal trajectory g, so that the spring is so-called. The rigidity and the negative inclination sharpen the inclination, flatten the overall spring characteristics combined with the upper and lower springs, and make the response characteristic of the object supporting device that supports the object longer.

  When one end of the link is the upper end and the other end guided by the guide rail of the link is the lower end, the center of curvature of the guide rail is located below the locus g. , Or set so that the inclination becomes lower as the inclination of the trajectory transitions to the left or right, the spring constant of the negative spring is reduced as compared with a conventional table support structure having a horizontal trajectory g, so that the spring is so-called. As a result, the inclination of the minus inclination becomes slower, the overall spring characteristic combined with the upper and lower springs is inclined, and the response characteristic of the object supporting device that supports the object can be shortened.

Hereinafter, an example of adopting the object support device according to the embodiment of the present invention will be described with reference to the drawings.
An example in which the object supporting device according to the embodiment of the present invention is employed is employed in a table that supports a small object.
FIG. 18 is an example of employing the object support device according to the embodiment of the present invention. FIG. 19 is a side view of an example of employing the object support device according to the embodiment of the present invention. FIG. 20 is a plan view of an example of employing the object support device according to the embodiment of the present invention.
For example, a small object is a work of art.
For example, the stand supporting the artwork is composed of an upper and lower seismic isolation table 20, a horizontal seismic isolation table 30, and a glass case 40.
The vertical seismic isolation table 20 incorporates the object support device according to the embodiment of the present invention.
The horizontal seismic isolation table 30 is a table that restrains vertical movement, allows horizontal movement, and generates a damping force according to the horizontal movement.
The glass case 40 is a transparent body that covers the artwork.

The object support device employed in the vertical seismic isolation table 20 includes a table 100, a base 200, and N table support mechanisms 300.
FIG. 19 shows an object support device including a table 100, a base 200, and four table support mechanisms 300.
The table support mechanism 300 includes a horizontal movement guide mechanism 310, a vertical spring member 320, a pair of left and right link mechanisms 330, and a horizontal spring member 340.
The description of the same configurations as the horizontal movement guide mechanism 310, the vertical spring member 320, the pair of left and right link mechanisms 330, and the horizontal spring member 340 described above is omitted, and the object support device employed in the vertical seismic isolation table 20 is omitted. The characteristic configuration will be described.

  Seen from above, N table support mechanisms are arranged to surround the table 100 and support the table 100 respectively.

The horizontal movement guide mechanism 310 is provided on the base 200.
The guide rail is a slit S provided on a plate material forming the side surface of the base 200 and formed along the locus g.
The guide block has wheels 350 guided by slits S forming a guide rail.
The wheel 350 rolls along the locus g.
(A) in the figure shows that a guide rail having a straight horizontal locus g can be provided.
(B) in the figure shows a case where a guide rail having a locus g that is linearly inclined is provided.
(C) in the figure shows a case where a guide rail having a locus g of a concave curve is provided.

  The vertical spring member 320 is a tension spring whose upper part is connected to the base and whose lower part is connected to the table.

When the object support device according to the above-described embodiment is used, the following effects are exhibited.
A pair of left and right guide rails for guiding a pair of left and right guide blocks along a trajectory extending in the horizontal direction are arranged on the table 100 and the base 200, respectively, and generate an upward spring force on the table 100 based on the base 200. A right link group 330r and a left link group 330l rotatably connected to each other at an X-shaped intersection and intersecting with each other are arranged on the left and right, and the first right link 331r and the first left link 331l are upper ends. Are rotatably connected to a first rotation fixing member 331F supported by the table 100, and lower ends are rotatably connected to a pair of lower left and right guide blocks, respectively, and a second right link 332r and a second left link are provided. The link 322l is rotatably connected at its lower end to a second rotation fixing member 332F supported by the base 200, and rotates at its upper end to a pair of upper left and right guide blocks. The spring force is applied to each of the links of the right link group 330r or the link of the left link group 330l so as to approach each other. The inertial forces of the left and right link sets 330l and the left link set 330l cancel each other out, and the desired combined reaction force can be applied to the table 100 stably by selecting the specifications of the link mechanism 330 and the spring.
Since the first rotation fixing member 331F is fixed and supported on the table 100 and the second rotation fixing member 332F is fixed and supported on the base 200, the link mechanism 330 and the specifications of the spring are selected. By doing so, a desired combined reaction force can be applied to the table 100 stably.
The first rotation fixing member 331F is fixed to and supported by the table 100, and the second rotation fixing member 332F restricts the movement in the left-right direction and allows the vertical movement relative to the base 200. Since the second rotation fixing member 332F is supported by the base 200, the relative movement of the second rotation fixing member 332F in the up and down direction is allowed, and by selecting the specifications of the link mechanism 330 and the spring, a desired combined reaction force can be stably achieved. Can act on the table.
The first rotation fixing member 331F is supported by the table 100 so as to restrain the movement in the left and right directions and allows the vertical movement relative to the table 100, and the second rotation fixing member 332F is mounted on the base 200. Since the first rotation fixing member 331F is fixed and supported, the relative movement of the first rotation fixing member 331F in the vertical direction is allowed, and by selecting the specifications of the link mechanism 330 and the spring, a desired combined reaction force can be stably maintained. 100.
The first rotation fixing member 331F is supported by the table 100 so as to restrain the movement in the left and right directions and allows the vertical movement relative to the table 100, and the second rotation fixing member 332F moves in the left and right directions. The first rotation fixing member 331F and the second rotation fixing member 332F are supported by the base 1200 so as to restrict the movement and allow the vertical movement relative to the base 200. By allowing relative movement in the vertical direction and selecting the specifications of the link mechanism and the spring, a desired combined reaction force can be stably applied to the table.
When the pair of left and right orbits transitions along the direction separated from each other along the specific horizontal axis x, they extend so as to be biased in one of the up and down directions as the transition occurs. By selecting, the left and right link inertia forces of the right link set 330r and the left link set 330l cancel each other, and by selecting the link mechanism 330 and the specifications of the spring, the desired combined reaction force is stably applied to the table 100. Can work.
A pair of left and right guide rails for guiding a pair of left and right guide blocks along a trajectory extending in the horizontal direction are arranged on the table 100 and the base 200, respectively, and generate an upward spring force on the table 100 based on the base 200. A right link group 330r and a left link group 330l rotatably connected to each other at an X-shaped intersection and intersecting with each other are arranged on the left and right, and the first right link 331r and the first left link 331l are upper ends. Is rotatably connected to the first rotation fixing member 331F, and the lower end is rotatably connected to a pair of lower left and right guide blocks, respectively. The second right link 332r and the second left link 332l are The ends are rotatably connected to the second rotation fixing member 332F, and the upper ends are rotatably connected to a pair of upper left and right guide blocks, respectively. Alternatively, a spring force is applied to each of the links of the left link set 330l in a direction approaching each other, so that the relative left and right movement of the table 100 based on the base 200 is suppressed, and the table 100 is guided so as to be movable up and down. As the table 100 moves up and down, the right and left link sets 330r and the left link set 330l cancel each other out, and the desired combined reaction force is stabilized by selecting the link mechanism 330 and the specifications of the spring. Then, it can be applied to the table 100.
The first rotation fixing member 331F is fixed and supported on the table 100, and the second rotation fixing member 332F is not following the table 100, but is relatively movable in the vertical and horizontal directions with respect to the base 200. Thus, by selecting the link mechanism 330 and the specifications of the spring, a desired combined reaction force can be applied to the table 100 stably.
The first rotation fixing member 331F is not restrained by the table 100 and is relatively movable in the vertical and horizontal directions with respect to the table 100, and the second rotation fixing member 332F is fixed to the base 200 and supported. Since the link mechanism 330 and the specifications of the spring are selected, a desired combined reaction force can be applied to the table 100 stably.
Since the first rotation fixing member 331F is not restrained by the table 100 and the second rotation fixing member 332F is not restrained by the base 200, a desired synthetic countermeasure can be obtained by selecting the link mechanism and the specifications of the spring. The force can be applied to the table stably.
When the pair of left and right orbits g transits along the direction that is separated from each other along the specific horizontal axis x, it extends so as to be biased in one of the up and down directions as the transition occurs. By appropriately selecting the link mechanism 330 and the specifications of the spring, a desired combined reaction force can be applied to the table 100 stably.
When viewed from above, the N table support mechanisms 300 are arranged so as to surround the table 100 and support the tables 100 respectively, so that the N table support mechanisms 300 are stably mounted on the base 200. The table 100 can be supported by seismic isolation.
When the two table support mechanisms 300 are arranged apart from each other in the front-rear direction when viewed from above and support the tables 100 respectively, the N table support mechanisms 300 are stably mounted on the base 200 based on the table 100. Can be supported by seismic isolation.

The present invention is not limited to the above-described embodiments, and various changes can be made without departing from the gist of the invention.
Although the case where the horizontal movement guide mechanism 310 is provided on the base 200 has been described as an example, the invention is not limited to this. For example, the horizontal movement guide mechanism 310 may be provided on the table 100.
An object support device having a structure that does not actively restrain horizontal movement has also been described. A separate structure that restricts horizontal movement may be added,
For example, the trajectory G may be inclined without adding a separate mechanism. In this case, the center of gravity of the object support device moves like a pendulum by the action of the trajectory g, and a horizontal restoring force is generated by the component force of gravity, and the horizontal movement of the table is displaced within a certain limit. Is suppressed. In the structure shown by a bold horizontal arrowed line with a triangle in the figure, such an effect is expected.
For example, the vertical spring member may be a tension spring that hangs the table 100 from the base 200 without adding a separate mechanism. In this case, the center of gravity of the object support device moves in a pendulum shape, and a left-right restoring force is generated by the component force of gravity, and the left-right movement of the table is restricted within a certain limit.

x Specific horizontal axis g Trajectory H Separation distance S Slit 10 Object 20 Vertical seismic isolation table 30 Horizontal seismic isolation table 40 Glass case 100 Table 200 Base 300 Table support mechanism 310 Horizontal movement guide mechanism 311 First horizontal movement guide mechanism 311Br No. One right guide block 311Rr First right guide rail 311Bl First left guide block 311Rl First left guide rail 312 Second horizontal movement guide mechanism 312Br Second right guide block 312Rr Second right guide rail 312Bl Second left guide block 312Rl Second Left guide rail 320 Vertical spring member 330 Link mechanism 330r Right link set 330l Left link set 331r First right link 331l First left link 331F First rotation fixing member 331Cu First upper rotation center 331Cd First lower rotation center 332r Second right link 332l Second left link 332F Second rotation fixing member 332Cu Second upper rotation center 332Cd Second lower rotation center 333r Right link connection shaft 333l Left link connection shaft 334 Rotation fixing member Guide mechanism 340 Horizontal spring member 350 Wheel

JP-A-11-37214 JP 2009-168157 A JP 2008-157288 A

Claims (12)

An object support device for supporting an object,
A table on which objects can be placed,
A base supported by the foundation,
A table support mechanism that supports the table based on the base,
With
The table support mechanism has a horizontal movement guide mechanism, a vertical spring member, a link mechanism, and a horizontal spring member,
The horizontal movement guide mechanism has a first horizontal movement guide mechanism and a second horizontal movement guide mechanism that are arranged vertically apart,
A first right guide block, a first left guide block, and a pair of left and right guides, wherein the first horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the base along a specific horizontal axis. Including a first right guide rail and a first left guide rail, which are a pair of left and right guide rails that movably guide the block along a pair of left and right trajectories extending along a specific horizontal axis,
A second right guide block, a second left guide block, and a pair of left and right guide blocks, wherein the second horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the table along a specific horizontal axis. A second right guide rail and a second left guide rail, which are a pair of left and right guide rails that movably guide each along a pair of left and right tracks extending along a specific horizontal axis,
The vertical spring member is a member that generates an upward spring force on the table based on the base,
The link mechanism has a right link group and a left link group, which are a pair of left and right links arranged apart along a specific horizontal axis,
A first right link and a second right link, which are a pair of links that are rotatably connected at a location where the right link group is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other. Including
A first left link and a second left link, which are a pair of links that are rotatably connected at a point where the left link set is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other. Including
The first right link and the first left link have upper ends rotatably connected to a first rotation fixing member, which is a member supported by the table, about a first upper rotation center, which is a rotation center. The lower end is connected to each of the first right guide block and the first left guide block so as to be rotatable around a pair of first lower rotation centers that are rotation centers, and
The second right link and the second left link are rotatable around a second lower rotation center, which is a rotation center, on a second rotation fixing member that is a member whose lower end is supported by the base. The connected upper ends are connected to the second right guide block and the second left guide block so as to be rotatable around a pair of second upper rotation centers that are rotation centers, respectively,
The direction in which the upper and lower ends of the horizontal spring member approach each other to the set of the first right link and the second right link or the link of the set of the first left link and the second left link. A member for applying a spring force along the specific horizontal axis,
here,
The specific horizontal axis is a horizontal axis extending in a specific horizontal direction,
The object support device is characterized in that the specific line of sight intersects a specific horizontal axis and extends in the horizontal direction. The first rotation fixing member is fixed and supported on the table,
The second rotation fixing member is fixed and supported on the base,
The object support device according to claim 1, wherein: The first rotation fixing member is fixed and supported on the table,
The second rotation fixing member is supported by the base so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the base.
The object support device according to claim 1, wherein: The first rotation fixing member is supported by the table so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the table,
The second rotation fixing member is fixed and supported on the base,
The object support device according to claim 1, wherein: The first rotation fixing member is supported by the table so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the table,
The second rotation fixing member is supported by the base so as to restrict movement in the direction of the specific horizontal axis and to allow relative movement in the vertical direction with respect to the base.
The object support device according to claim 1, wherein: When the pair of left and right orbits transitions along the direction separated from each other along the specific horizontal axis, they extend so as to be biased in one of the up and down directions as the transition occurs.
The object support device according to any one of claims 3 to 5, wherein: An object support device for supporting an object,
A table on which objects can be placed,
A base supported by the foundation,
A table support mechanism that supports the table based on the base,
With
The table support mechanism has a horizontal movement guide mechanism, a vertical spring member, a link mechanism, and a horizontal spring member,
The horizontal movement guide mechanism has a first horizontal movement guide mechanism and a second horizontal movement guide mechanism that are arranged vertically apart,
A first right guide block, a first left guide block, and a pair of left and right guide blocks, wherein the first horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the base along a specific horizontal axis. A first right guide rail and a first left guide rail, which are a pair of left and right guide rails that movably guide each along a pair of left and right tracks extending along a specific horizontal axis,
A second right guide block, a second left guide block, and a pair of left and right guide blocks, wherein the second horizontal movement guide mechanism is a pair of left and right guide blocks disposed apart from the table along a specific horizontal axis. A second right guide rail and a second left guide rail, which are a pair of left and right guide rails that movably guide each along a pair of left and right tracks extending along a specific horizontal axis,
The vertical spring member is a member that generates an upward spring force on the table based on the base,
The link mechanism has a right link group and a left link group, which are a pair of left and right links arranged apart along a specific horizontal axis,
A first right link and a second right link, which are a pair of links that are rotatably connected at a location where the right link group is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other. Including
A first left link and a second left link, which are a pair of links that are rotatably connected at a point where the left link set is inclined in opposite directions to each other when viewed along a specific line of sight and intersects in an X shape and intersects each other. Including
The first right link and the first left link have their upper ends rotatably connected to a first rotation fixing member around a first upper rotation center which is the center of rotation, and the lower end has the first end. The right guide block and the first left guide block are rotatably connected to each other around a pair of first lower rotation centers that are rotation centers,
The second right link and the second left link are rotatably connected at their lower ends to a second rotation fixing member around a second lower rotation center, which is the center of rotation, and have an upper end that is the second end. The right guide block and the second left guide block are rotatably connected to each other around a pair of second upper rotation centers that are rotation centers,
The direction in which the upper and lower ends of the horizontal spring member approach each other to the set of the first right link and the second right link or the link of the set of the first left link and the second left link. A member for applying a spring force along the specific horizontal axis,
here,
The specific horizontal axis is a horizontal axis extending in a specific horizontal direction,
The object support device is characterized in that the specific line of sight intersects a specific horizontal axis and extends in the horizontal direction. The first rotation fixing member is fixed and supported on the table,
The second rotation fixing member is not restrained by the base,
The object support device according to claim 7, wherein: The first rotation fixing member is not restrained by the table,
The second rotation fixing member is fixed and supported on the base,
The object support device according to claim 7, wherein: The first rotation fixing member is not restrained by the table,
The second rotation fixing member is not restrained by the base,
The object support device according to claim 7, wherein When the pair of left and right orbits transitions along the direction separated from each other along the specific horizontal axis, they extend so as to be biased in one of the up and down directions as the transition occurs.
The object support device according to any one of claims 8 to 10, wherein: N table support mechanisms;
With
N table support mechanisms, as viewed from above, are arranged to surround the table and support each of the tables,
The object support device according to any one of claims 1 to 11, wherein:

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